JP2015052453A - Inspection apparatus and inspection method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an inspection apparatus and an inspection method that are capable of easily changing a deformation state of an object to be inspected and capable of accurately detecting a defect such as a microcrack in the object to be inspected by comparison of stress distribution of the object to be inspected in each of states where the object to be inspected is in different deformation states.SOLUTION: An inspection apparatus 10 comprises: plural support sections 14 that support an object W to be inspected from below, and each of which can move up and down independently of other support sections 14; a drive section that moves up and down each support section 14; a stress measurement section 40 that measures stress distribution of the object W to be inspected supported by the plural support sections 14; and a control section that controls the drive section to move up and down each support sections 14 so that the object W to be inspected is in different deformation states.

Description

  The present invention relates to an inspection apparatus and an inspection method for detecting defects such as microcracks in an inspection object such as a glass substrate.

  2. Description of the Related Art Conventionally, various types of inspection apparatuses have been used as an inspection apparatus for detecting defects such as microcracks in an inspection object such as a glass substrate. For example, Patent Document 1 irradiates the surface of an object to be inspected with polarized light, simultaneously measures P-polarized component light and S-polarized component light of the scattered light, and applies stress to the object to be inspected. A technique for detecting a defect in an object to be inspected by comparing a case with a case where it is not applied is disclosed.

Japanese Unexamined Patent Publication No. 2009-281846

  In the inspection apparatus disclosed in Patent Document 1, it is necessary to create a state in which no stress is applied to the object to be inspected and a state in which stress is applied. Is a large size, there is a problem that it is difficult to create a state in which no stress is applied to the object to be inspected. This is because even if such a large object to be inspected is supported by a plurality of fulcrums so as to be in a horizontal state, a portion having no fulcrum may be bent by its own weight. In addition, even when a test object is placed on a surface plate to inspect the inspection object for defects, it is necessary to produce a large surface plate with high flatness when the test object is large. There exists a problem that the manufacturing cost of an apparatus will become very large. Furthermore, when the object to be inspected is large, there is a problem that it is often difficult to apply stress by bending the object to be inspected.

  The present invention has been made in consideration of such points, and can easily change the bending state of the object to be inspected, and can be used in each state when the object to be inspected is in a different state of bending. It is an object of the present invention to provide an inspection apparatus and an inspection method capable of accurately detecting defects such as microcracks in the inspection object by comparing the stress distributions of the inspection object.

  The inspection apparatus according to the present invention includes a base and a plurality of support portions that are provided on the base and support the object to be inspected from below, and each of the support portions is lifted and lowered independently of the other support portions. A plurality of support portions that are free, a drive portion that raises and lowers each support portion, a stress measurement portion that measures a stress distribution of the object to be inspected supported by the plurality of support portions, and each support portion And a control unit that controls the drive unit so as to raise and lower the object to be bent in different states.

  According to such an inspection apparatus, the deflection state of the object to be inspected can be easily changed by supporting the object to be inspected from below by a plurality of support portions that are movable up and down independently of each other. By comparing the stress distribution of the inspection object in each state when the inspection object is in different deflection states, defects such as microcracks in the inspection object can be accurately detected.

  The inspection apparatus of the present invention may further include a display unit that displays the stress distribution of the inspection object measured by the stress measurement unit.

  In the inspection apparatus according to the present invention, each of the support portions may be formed of a bar-like member that extends over the entire surface of the base and extends in the vertical direction.

  Or each said support part may consist of the plate-shaped thing arrange | positioned so that it might mutually become parallel, and extended in a perpendicular direction.

  In the inspection apparatus of the present invention, an elastic body may be provided on the top of each of the support portions.

  Or the adsorption | suction mechanism which adsorb | sucks with a negative pressure may be provided in the top part of each said support part.

  In the inspection apparatus of the present invention, each support part may be provided with an electric actuator as the drive part, and each support part may be moved up and down by the corresponding electric actuator.

  In the inspection apparatus of the present invention, the control unit is configured such that the inspection object is in a horizontal state and is not bent, the inspection object is bent so as to protrude upward, and the inspection object is downward. The driving unit may be controlled so as to raise and lower each of the supporting units so as to change from one state to another state among the three states that are bent so as to be convex.

  In the inspection apparatus of the present invention, the stress measurement unit may measure a stress distribution of the inspection object by a photoelasticity measurement method.

  The inspection method of the present invention includes a base and a plurality of support portions provided on the base and supporting the object to be inspected from below, wherein each of the support portions is lifted and lowered independently of the other support portions. An inspection method using an inspection apparatus including a plurality of support portions, wherein the test object is supported from below by the plurality of support portions, and the test object is a flat plate. The object in one state out of three states consisting of an unbent state, a state in which the inspection object is bent upward and a state in which the inspection object is bent downward. A step of measuring the stress distribution of the inspection object, a step of measuring the stress distribution of the inspection object after changing the deflection state by raising and lowering each of the support parts, and before and after changing the deflection state Comparison of stress distribution of the object to be inspected Characterized by comprising a step of detecting a defect of the object to be inspected by the.

  According to such an inspection method, it is possible to easily change the deflection state of the object to be inspected by supporting the object to be inspected from below by a plurality of support portions that are movable up and down independently of each other. By comparing the stress distribution of the inspection object in each state when the inspection object is in different deflection states, defects such as microcracks in the inspection object can be accurately detected.

  According to the inspection apparatus and the inspection method of the present invention, the deflection state of the inspection object can be easily changed, and the inspection object in each state when the inspection object is in a different bending state. By comparing the stress distributions, defects such as microcracks in the object to be inspected can be detected with high accuracy.

It is a perspective view which shows the outline of a structure of the test | inspection apparatus by embodiment of this invention, Comprising: It is a figure which shows a state when the to-be-inspected object is bent so that it may protrude upwards. It is a perspective view which shows the outline of a structure of the test | inspection apparatus by embodiment of this invention, Comprising: It is a figure which shows a state when a to-be-inspected object is horizontal and is not bent. It is a perspective view which shows the outline of a structure of the test | inspection apparatus by embodiment of this invention, Comprising: It is a figure which shows a state when the to-be-inspected object is bent so that it may protrude below. It is a block diagram which shows an example of a structure of each support part in the inspection apparatus shown in FIG. 1 thru | or FIG. It is a block diagram which shows the other example of a structure of each support part in the inspection apparatus shown in FIG. 1 thru | or FIG. It is a top view when the inspection apparatus shown in FIGS. 1 to 3 is viewed from above. It is a top view when the inspection apparatus of another structure by embodiment of this invention is seen from upper direction. It is a perspective view which shows the outline of a structure of the test | inspection apparatus shown in FIG. 7, Comprising: It is a figure which shows a state when the to-be-inspected object is bent so that it may protrude upwards. It is a functional block diagram of the inspection apparatus by embodiment of this invention. It is a side view which shows the other example of the test | inspection method of the to-be-inspected object by the test | inspection apparatus shown in FIG. It is a top view which shows the micro crack formed in the surface of to-be-inspected object. It is a sectional side view which shows the micro crack formed in the surface of to-be-inspected object.

  Embodiments of the present invention will be described below with reference to the drawings. 1 to 10 are diagrams showing an inspection apparatus and an inspection method according to the present embodiment. Among these, FIGS. 1 to 3 are perspective views schematically showing the configuration of the inspection apparatus according to the present embodiment, and FIGS. 4 and 5 are the configurations of the support portions in the inspection apparatus shown in FIGS. 1 to 3. It is a block diagram which shows the various examples of. FIG. 6 is a top view when the inspection apparatus shown in FIGS. 1 to 3 is viewed from above. FIG. 7 is a top view of an inspection apparatus having another configuration according to the present embodiment as viewed from above, and FIG. 8 is a perspective view schematically showing the configuration of the inspection apparatus shown in FIG. FIG. 9 is a functional block diagram of the inspection apparatus according to the present embodiment. FIG. 10 is a side view showing another example of a method for inspecting an object to be inspected by the inspection apparatus shown in FIGS. FIG. 11 is a top view showing microcracks formed on the surface of the object to be inspected, and FIG. 12 is a side sectional view showing microcracks formed on the surface of the object to be inspected.

  As shown in FIGS. 1 to 3, an inspection apparatus 10 according to the present embodiment is provided with a flat plate-like base 12 installed in a horizontal state, and on the base 12 to inspect a glass substrate or the like. And a plurality of support portions 14 that support the body W from below, and each support portion 14 is movable up and down independently of the other support portions 14. Here, each support part 14 consists of a rod-shaped thing extended in a perpendicular direction, and as shown in FIG. 5, these support parts 14 are arrange | positioned at equal intervals over the whole surface of the base 12 so that it may become what is called a sword mountain shape. .

  As shown in FIG. 4, a drive unit 16 such as an electric actuator is provided at the lower end of each support unit 14. The drive unit 16 moves the support unit 14 in the vertical direction in FIG. 4. Yes. Further, an elastic body 14 a made of a resin such as ultra high molecular weight polyethylene (UHMWPE) is provided at the upper end of the support portion 14. Here, the elastic body 14a is curved to be convex upward. Since the elastic body 14a is provided on the upper end portion of the support portion 14, the lower surface of the test subject W is damaged when the test subject W is supported by the plurality of support portions 14 from below. This can be suppressed.

  Instead of providing the elastic body 14a at the upper end portion of the support portion 14, a suction mechanism 14b may be provided at the upper end portion of the support portion 14 as shown in FIG. Such an adsorption mechanism 14b is configured to adsorb the lower surface of the inspection object W by negative pressure when the inspection object W is supported from below by the plurality of support portions 14. When such an adsorption mechanism 14b is provided at the upper end portion of the support portion 14, the lower surface of the object W to be inspected is adsorbed by a negative pressure by each adsorption mechanism 14b, so that the stress measuring unit 40 described later can cover the object. When measuring the stress distribution of the inspection object W, it is possible to suppress the occurrence of the positional deviation of the inspection object W.

  Since each of the support portions 14 is provided on the base 12, the inspected object W supported from below by the plurality of support portions 14 is convex upward as shown in FIG. It is possible to bend or to be bent downward as shown in FIG. Further, in FIG. 1 and FIG. 3, the inspection object W supported from below by the plurality of support portions 14 is bent in the X direction (left and right direction in FIG. 1 and FIG. 3). It can be bent in the Y direction (the depth direction in FIGS. 1 and 3). Such raising / lowering of each support part 14 is performed when the control part 50 mentioned later controls each drive part 16. FIG. Further, by aligning the height direction positions of the support portions 14, the inspected object W supported from below by the plurality of support portions 14 as shown in FIG. 2 is prevented from being bent in a horizontal state. You can also.

  In addition, the inspection apparatus 10 of the present embodiment is provided with a stress measurement unit 40 that measures the stress distribution of the object to be inspected W supported by the plurality of support units 14. The stress measurement unit 40 includes, for example, a photoelastic stress measurement system that measures the stress distribution of the object to be inspected by a photoelasticity measurement method. The photoelastic stress measurement system will be described in more detail. A light source (not shown) is provided above the base 12 in the inspection apparatus 10, and light emitted from the light source is circularly polarized. The light is incident on the inspected object W. And while this light passes the to-be-inspected object W, the intensity | strength of light changes relatively in the direction of the stress concerning the to-be-inspected object W. As a result, the light transmitted through the object W is polarized into an ellipse. The stress measuring unit 40 has a CCD camera 42. The CCD camera 42 captures light transmitted through the object W, calculates the ellipticity, and obtains a stress distribution image. In this manner, the stress distribution of the object to be inspected W is obtained in the stress measuring unit 40.

  Next, a case where a defect such as a microcrack C is generated on the surface of the inspection object W will be described with reference to FIGS. 11 and 12. FIG. 11 is a top view showing the microcracks C formed on the surface of the inspection object W, and FIG. 12 is a side sectional view showing the microcracks C formed on the surface of the inspection object W. When microcracks C are formed on the surface of the inspection object W as shown in FIGS. 11 and 12, when a product such as a semiconductor circuit or an optical functional element is manufactured using the inspection object W In addition, since the original function may be impaired due to the microcrack C, the inspected object W is inspected in advance by the inspection apparatus 10 of the present embodiment to detect the microcrack C, and the microcrack C is removed. It is necessary to determine whether or not the object W is unusable. 11 and 12 show an example in which the microcracks C are formed on the upper surface of the inspection object W, but the microcracks C may be formed on the lower surface of the inspection object W.

  As shown in FIG. 1, when the inspection object W is bent so as to protrude upward, a tensile stress is applied to the upper surface of the inspection object W and the lower surface of the inspection object W is compressed. Stress is applied. In this state, when the microcracks C are formed on the upper surface of the inspection object W, stress concentration occurs in the microcracks C. Thus, when the stress distribution of the inspection object W is obtained by the stress measuring unit 40, the microcracks C formed on the upper surface of the inspection object W are emphasized.

  On the other hand, as shown in FIG. 3, when the inspection object W is bent so as to protrude downward, a compressive stress is applied to the upper surface of the inspection object W and the lower surface of the inspection object W. A tensile stress is applied to. In this state, when the microcracks C are formed on the lower surface of the inspection target W, stress concentration occurs in the microcracks C. Thereby, when the stress distribution of the inspection object W is obtained by the stress measurement unit 40, the microcracks C formed on the lower surface of the inspection object W are emphasized.

  As shown in FIG. 9, the inspection apparatus 10 according to the present embodiment includes a control unit 50 that controls the drive unit 16 that raises and lowers each support unit 14, and a display unit 56 that includes, for example, a monitor and a touch panel. Is provided. Here, the display unit 56 is connected to the control unit 50, and a stress distribution image obtained by the stress measurement unit 40 is displayed on the display unit 56.

  Here, when the inspection object W is inspected by the inspection apparatus 10 according to the present embodiment, the inspection object W is bent so as to protrude upward as shown in FIG. 1, as shown in FIG. In each of two states of the three states consisting of a state in which the inspected object W is not bent in a horizontal state and a state in which the inspected object W is bent so as to protrude downward as shown in FIG. The stress distribution measured by the stress measuring unit 40 is compared. Specifically, since the stress distribution image obtained by the stress measurement unit 40 is displayed on the display unit 56, the operator can view the stress distribution image displayed on the display unit 56 before changing the deflection state. The comparison of the stress distribution of the inspected object W after the change is made by visual observation, whether or not the microcracks C are formed on the surface of the inspected object W, and the microcracks C are the upper and lower surfaces of the inspected object W. It is detected which is formed. For example, when the microcracks C are formed on the upper surface of the inspection object W, the upper surface of the inspection object W is bent in a state where the inspection object W is bent upward as shown in FIG. Since tensile stress is applied to the micro crack C, stress concentration occurs in the stress distribution of the object W to be inspected. On the other hand, when the microcracks C are formed on the upper surface of the inspection object W, each support portion 14 is moved up and down to change the deflection state of the inspection object W, and the inspection object W is lowered as shown in FIG. In the case of being bent so as to be convex, a compressive stress is applied to the upper surface of the object W to be inspected, so that stress relaxation occurs in the microcracks C in the stress distribution of the object W to be inspected. For this reason, in each state of the state which the to-be-inspected object W as shown in FIG. 1 is bent so that it may protrude upwards, and the state to which the to-be-inspected object W as shown in FIG. By comparing the stress distributions of the inspection object W, it can be detected that the microcracks C are formed on the upper surface of the inspection object W.

  Further, in another aspect of the inspection apparatus 10 according to the present embodiment, the control unit 50 may be able to automatically detect the microcracks C in the inspection object W. Specifically, as shown in FIG. 9, a comparison unit 54 is connected to the control unit 50, and the comparison unit 54 is in a state in which the inspected object W is different from each other by raising and lowering each support unit 14. The stress distributions measured by the stress measurement unit 40 in each state when compared are compared. More specifically, the comparison unit 54 is bent in a state where the object W to be inspected is convex upward as shown in FIG. 1, and in a state where the object W to be inspected is horizontal as shown in FIG. Comparison of the stress distribution measured by the stress measuring unit 40 in each of two states among the three states that are not present and the state in which the inspected object W is bent so as to protrude downward as shown in FIG. Is supposed to do. Then, the control unit 50 determines whether or not the microcrack C is formed on the surface of the inspection object W based on the comparison result by the comparison unit 54, and the microcrack C is out of the upper surface and the lower surface of the inspection object W. It is possible to automatically detect which one is formed, and in this way, it is possible to automatically detect a defect of the inspection object W. Further, in this case, there is information on whether or not the microcracks C are formed on the surface of the inspection object W and on which of the upper and lower surfaces of the inspection object W the microcracks C are formed. It is displayed on the display unit 56.

  Next, an operation by the inspection apparatus 10 having such a configuration, specifically, an inspection method for the object W to be inspected will be described. In addition, the inspection method of the to-be-inspected object W shown below is performed when the control part 50 controls each drive part 16. FIG.

  First, as shown in FIG. 2, after the positions of the support portions 14 in the height direction are aligned, the test subject W is placed on the support portions 14 to keep the test subject W in a horizontal state. As it is, it is supported from below by the plurality of support portions 14. Next, as shown in FIG. 1, the support portions 14 at the center portion in the X direction (the left-right direction in FIGS. 1 to 3) of the inspection apparatus 10 are raised and the support portions 14 at both end portions are lowered. Next, the test object W on each support portion 14 is bent so as to protrude upward. In this state, when light emitted from a light source (not shown) is circularly polarized and is incident on the inspection object W, the light transmitted through the inspection object W is captured by the CCD camera 42 of the stress measurement unit 40. . Then, the stress measurement unit 40 calculates the ellipticity with the light captured by the CCD camera 42 to obtain a stress distribution image. Here, the stress distribution image obtained by the stress measurement unit 40 is displayed on the display unit 56.

  Next, as shown in FIG. 3, the support portions 14 at the center portion in the X direction (the left-right direction in FIGS. 1 to 3) of the inspection apparatus 10 are lowered and the support portions 14 at both ends are raised. Next, the test object W on each support portion 14 is bent so as to protrude downward. In this state, when light emitted from a light source (not shown) is circularly polarized and is incident on the inspection object W, the light transmitted through the inspection object W is captured by the CCD camera 42 of the stress measurement unit 40. . Then, the stress measurement unit 40 calculates the ellipticity with the light captured by the CCD camera 42 to obtain a stress distribution image. Here, the stress distribution image obtained by the stress measurement unit 40 is displayed on the display unit 56.

  Thereafter, the operator compares the stress distribution of the object to be inspected before and after changing the deflection state by looking at the stress distribution image displayed on the display unit 56. More specifically, the operator is deflected so that the stress distribution image of the inspected object W obtained by the stress measuring unit 40 in a state of being convex upward and the convexity of being downward is obtained. The stress distribution image of the inspection subject W in the state is compared. Accordingly, whether or not the microcracks C are formed on the inspected object W, and when the microcracks C are formed on the inspected object W, any part of the upper and lower surfaces of the inspected object W It is possible for the operator to visually detect whether or not it is formed. As described above, instead of detecting the microcrack C while the operator looks at the stress distribution image displayed on the display unit 56, the control unit 50 automatically detects the microcrack C in the object W to be inspected. You may come to be performed.

  In the above-described embodiment, the stress distribution of the object W in a state of being convex upward as shown in FIG. 1 and the state of being convex downward as shown in FIG. However, the present invention is not limited to such a mode. As another example, as shown in FIG. 1, the stress distribution of the inspected object W in a state where it is bent upward, and in the state where it is bent in a horizontal state as shown in FIG. You may compare with the stress distribution of the test body W. FIG. As still another example, the stress distribution of the inspected object W in the horizontal state as shown in FIG. 2 and the state in which it is bent downward as shown in FIG. The stress distribution of the object W to be inspected may be compared.

  Further, when the stress distribution of the test object W is measured by the stress measurement unit 40, the test object W supported from below by the plurality of support units 14 in FIGS. 1 and 3 is arranged in the X direction (FIGS. 1 and 3). However, after performing a series of inspection processes for bending the inspection object W in the X direction, the inspection object W is bent in the Y direction (depth in FIGS. 1 and 3). The stress distribution of the object W to be inspected may be measured by the stress measuring unit 40 after being bent in the direction). As shown in FIG. 11, when the microcracks C formed on the surface of the inspection object W extend in the X direction (left-right direction in FIG. 11), the inspection object W is moved in the X direction (FIG. 1 or FIG. 11). 3, even if the stress distribution of the test object W is measured by the stress measuring unit 40, the microcrack C is pulled so as to spread in the X direction, but is difficult to detect, but the test object W Is bent not in the X direction but in the Y direction (the depth direction in FIGS. 1 and 3), when the stress distribution of the object W is measured by the stress measuring unit 40, the microcracks C are pulled so as to spread in the Y direction. It becomes easy to detect. In this way, a series of inspection steps for bending the inspection subject W in the X direction and a series of inspection steps for bending the inspection subject W in the Y direction are performed, so that the surface of the inspection subject W is formed. Even if the microcracks C extend in any direction, the microcracks C can be easily detected.

  According to the inspection apparatus 10 and the inspection method of the present embodiment having the above-described configuration, by supporting the object to be inspected W from below by the plurality of support portions 14 that are movable up and down independently of each other, The deflection state of the inspection subject W can be easily changed, and this is achieved by comparing the stress distribution of the inspection subject W in each state when the inspection subject W is in a different deflection state. Defects such as microcracks C in the inspected object W can be accurately detected.

  Further, in the inspection apparatus 10 of the present embodiment, as shown in FIGS. 1 to 3 and 6, each support portion 14 is a rod-like member that is disposed over the entire surface of the base 12 and extends in the vertical direction. It is made up of. In this case, the inspected object W supported from below by the plurality of support portions 14 is in the X direction (left and right direction in FIGS. 1 and 3) and Y direction (depth direction in FIGS. 1 and 3). It is possible to bend. As a result, a series of inspection processes for deflecting the inspection object W in the X direction and a series of inspection processes for bending the inspection object W in the Y direction can be performed. Even if the microcracks C formed on the surface of W extend in any direction, the microcracks C can be easily detected.

  Moreover, in the inspection apparatus 10 of this Embodiment, as shown in FIG. 4, the elastic body 14a is provided in the top part of each support part 14. As shown in FIG. Thereby, when the to-be-inspected object W is supported by the some support part 14 from the downward direction, it can suppress that the lower surface of this to-be-inspected object W is damaged. Or as shown in FIG. 5, the adsorption | suction mechanism 14b which adsorb | sucks by a negative pressure may be provided in the top part of each support part 14. As shown in FIG. In this case, when the stress measurement unit 40 measures the stress distribution of the inspection object W by adsorbing the lower surface of the inspection object W by negative pressure by the suction mechanism 14b, the position of the inspection object W is measured. Generation | occurrence | production of deviation can be suppressed. As shown in FIGS. 4 and 5, each support portion 14 is provided with, for example, an electric actuator as the drive portion 16, and each support portion 14 can be moved up and down by the corresponding drive portion 16. Yes.

  In the inspection apparatus 10 according to the present embodiment, as described above, when the stress distributions are compared, the inspected object W as shown in FIG. Two states out of three states including a state in which the inspected object W is not bent in a horizontal state as shown in FIG. 3 and a state in which the inspected object W is bent in a downwardly convex manner as shown in FIG. The stress distributions measured by the stress measuring unit 40 are compared.

  Further, in the inspection apparatus 10 of the present embodiment, as described above, the stress measurement unit 40 measures the stress distribution of the object W to be inspected by the photoelasticity measurement method.

  Note that the inspection apparatus and inspection method according to the present embodiment are not limited to the above-described aspects, and various modifications can be made.

  For example, the stress measurement unit 40 is not limited to one that measures the stress distribution of the object W to be inspected by the photoelasticity measurement method. Various types of equipment other than the photoelastic stress measurement system can be used as the stress measurement unit 40 as long as the stress distribution of the inspected object W can be measured. Specifically, equipment other than the photoelastic stress measurement system, such as an infrared stress measurement system or a thermoelastic stress measurement system, can be used as the stress measurement unit 40. Further, as the stress measuring unit 40, a laser beam having a wavelength that can penetrate into the inspection object W is polarized by a polarizer (polarizer), and then the surface of the inspection object W is obliquely irradiated and scattered. You may use what isolate | separates light into P-polarized component light and S-polarized component light, and calculates | requires the polarization direction as the intensity | strength of each component light, and those ratio.

  Further, in the inspection apparatus 10 of the present embodiment, as shown in FIGS. 1 and 3, the object W to be inspected supported from below by a plurality of support portions 14 is arranged in the X direction (the left and right directions in FIGS. Instead of bending in the Y direction (the depth direction in FIG. 1 and FIG. 3), each support portion 14 at the center position in both the X direction and the Y direction of the object to be inspected W is raised and the object W to be inspected. By lowering each support portion 14 in the vicinity of each side, the center of the inspected object W may be raised and the side edges may be lowered so as to have a so-called mountain shape. Further, by lowering each support portion 14 at the center position in both the X direction and the Y direction of the object W to be inspected and by raising each support portion 14 in the vicinity of each side of the object W to be inspected, You may bend so that it may become what is called a trough shape that each center edge of the test body W becomes low and each side edge part becomes high.

  Further, when it is desired to inspect a specific location in the inspected object W, as shown in FIG. 10, each support located near the specific location so that only this specific location bulges upward. Only the portion 14 may be raised. In this case, tensile stress is applied to the upper surface and compressive stress is applied to the lower surface only at a specific location on the inspection object W. For this reason, when a microcrack C is formed on the surface of a specific location in the inspection object W, stress concentration occurs in that location in the stress distribution of the inspection object W. It can be detected that microcracks C are formed at the locations.

  Further, in the inspection apparatus of the present invention, each support portion provided on the base is not limited to a bar-like member that extends over the entire surface of the base and extends in the vertical direction. The other structure of each support part provided on a base is demonstrated using FIG. 7 and FIG. An inspection apparatus 80 according to the modification shown in FIGS. 7 and 8 includes a flat base 82 installed so as to be in a horizontal state, and an inspected object W such as a glass substrate provided on the base 82. A plurality of support portions 84 that support the support portion 84 from below, and each support portion 84 is movable up and down independently of the other support portions 84. Here, each support part 84 is comprised from the plate-shaped thing extended in the perpendicular direction arrange | positioned so that it might mutually become parallel. In such an inspection apparatus 80, as compared with the inspection apparatus 10 as shown in FIGS. 1 to 3 and 6, the object W to be inspected supported from below by a plurality of support portions 84 is placed in the X direction (in FIG. 8). Although it cannot be bent in each of the left and right directions) and the Y direction (the depth direction in FIG. 8), the object W supported from below by the plurality of support portions 84 is at least in the X direction (the left and right directions in FIG. 8). 1 to 3 and 6, the bending state of the object to be inspected W can be easily changed, and the object to be inspected W can be changed. By comparing the stress distribution of the inspected object W in each state when the bending state is different, defects such as microcracks C in the inspected object W can be accurately detected. Uninaru.

DESCRIPTION OF SYMBOLS 10 Inspection apparatus 12 Base 14 Support part 14a Elastic body 14b Adsorption mechanism 16 Drive part 40 Stress measurement part 42 CCD camera 50 Control part 54 Comparison part 56 Display part 80 Inspection apparatus 82 Base 84 Support part C Microcrack W Inspected object

Claims (10)

The base,
A plurality of support portions which are provided on the base and support the object to be inspected from below, and each of the support portions is movable up and down independently of the other support portions; and
A drive unit that raises and lowers each of the support units;
A stress measurement unit for measuring a stress distribution of the object to be inspected supported by the plurality of support units;
A control unit that controls the driving unit to raise and lower each of the support units to place the object to be inspected in a different bending state;
An inspection device comprising:   The inspection apparatus according to claim 1, further comprising a display unit that displays a stress distribution of the inspection object measured by the stress measurement unit.   The inspection device according to claim 1, wherein each of the support portions is formed of a bar-like member extending over the entire surface of the base and extending in the vertical direction.   The inspection apparatus according to claim 1, wherein each of the support portions is formed of a plate-like member extending in the vertical direction and arranged so as to be parallel to each other.   The inspection device according to any one of claims 1 to 4, wherein an elastic body is provided on a top portion of each of the support portions.   The inspection apparatus according to any one of claims 1 to 4, wherein a suction mechanism that performs suction by a negative pressure is provided on a top portion of each of the support portions.   Each said support part is each provided with the electric actuator as said drive part, Each said support part is raised / lowered by the said corresponding electric actuator, The Claim 1 thru | or 6 characterized by the above-mentioned. The inspection device described.   The control unit is in a state in which the inspection object is not bent in a horizontal state, in a state in which the inspection object is bent upward, and in a state in which the inspection object is bent downward. The inspection apparatus according to any one of claims 1 to 7, wherein the driving unit is controlled to raise and lower each of the support units so as to change from one state to another state among the three states. .   The inspection apparatus according to any one of claims 1 to 8, wherein the stress measurement unit is configured to measure a stress distribution of the object to be inspected by a photoelastic measurement method. And a plurality of support portions provided on the base and supporting the object to be inspected from below, wherein each of the support portions is movable up and down independently of the other support portions. An inspection method with an inspection device comprising a support part,
Supporting the object to be inspected from below by the plurality of support parts;
Three states consisting of a state in which the inspection object is not flat and bent, a state in which the inspection object is bent upward, and a state in which the inspection object is bent downward. Measuring a stress distribution of the object to be inspected in one state of:
Measuring the stress distribution of the test object after changing the deflection state by raising and lowering each support part; and
Detecting a defect in the inspection object by comparing a stress distribution of the inspection object before and after changing the deflection state;
An inspection method comprising:

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