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JP2015049168A - Gas absorbance measuring device - Google Patents

Gas absorbance measuring device Download PDF

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JP2015049168A
JP2015049168A JP2013181842A JP2013181842A JP2015049168A JP 2015049168 A JP2015049168 A JP 2015049168A JP 2013181842 A JP2013181842 A JP 2013181842A JP 2013181842 A JP2013181842 A JP 2013181842A JP 2015049168 A JP2015049168 A JP 2015049168A
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松田　直樹
Naoki Matsuda
直樹 松田
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Shimadzu Corp
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Abstract

【課題】試料セル内に該試料セルの透過光強度に影響を及ぼすような現象が発生した場合でもその影響を排除して、試料ガス中の特定ガス成分の濃度を正確に求めることができるガス吸光度測定装置を提供する。【解決手段】本発明のガス吸光度測定装置１０は、試料ガスを収容する試料セル１２、試料ガスに含まれる目的成分の吸収波長を有するレーザ光を出射する第１光源１４、目的成分の吸収波長とは異なる波長のレーザ光を出射する第２光源１６、第１光源１４から出射されたレーザ光及び第２光源１６から出射されたレーザ光を、試料セル１２内の同一光路上を通過させる結合光学系を備え、試料セル１２を通過した光のうち第１光源１４からのレーザ光の強度を第１検出器２２１で、試料セル１２を通過した光のうち第２光源１６からのレーザ光の強度を第２検出器２２２でそれぞれ検出し、第２検出器２２２の検出信号を用いて、第１検出器２２１の検出信号を補正する。【選択図】図１A gas capable of accurately determining the concentration of a specific gas component in a sample gas even when a phenomenon that affects the transmitted light intensity of the sample cell occurs in the sample cell. An absorbance measurement device is provided. A gas absorbance measuring apparatus 10 according to the present invention includes a sample cell 12 that contains a sample gas, a first light source 14 that emits a laser beam having an absorption wavelength of a target component contained in the sample gas, and an absorption wavelength of the target component. A second light source 16 that emits a laser beam having a wavelength different from that of the first light source 14, a laser beam emitted from the first light source 14, and a laser beam emitted from the second light source 16 that passes through the same optical path in the sample cell 12. An optical system is provided, and the intensity of the laser light from the first light source 14 out of the light that has passed through the sample cell 12 is determined by the first detector 221, and the laser light from the second light source 16 in the light that has passed through the sample cell 12. The intensity is detected by the second detector 222, and the detection signal of the first detector 221 is corrected using the detection signal of the second detector 222. [Selection] Figure 1

Description

本発明は、レーザ光に対する吸収を利用して試料ガス中の特定成分の濃度を測定するガス吸光度測定装置に関する。   The present invention relates to a gas absorbance measurement apparatus that measures the concentration of a specific component in a sample gas by using absorption of laser light.

気体中に含まれる二酸化炭素やメタン等の特定ガスの濃度を測定する方法として、レーザ光に対する吸収を利用したレーザ吸収分光法が知られている（例えば特許文献１参照）。この方法は、試料ガスが導入された試料セルに所定波長のレーザ光を照射し、該試料セルを透過したレーザ光の強度を検出することにより、試料ガス中の特定ガス成分の濃度を求めるものである。   As a method for measuring the concentration of a specific gas such as carbon dioxide or methane contained in a gas, laser absorption spectroscopy using absorption of laser light is known (see, for example, Patent Document 1). In this method, the concentration of a specific gas component in the sample gas is obtained by irradiating the sample cell into which the sample gas is introduced with a laser beam having a predetermined wavelength and detecting the intensity of the laser beam transmitted through the sample cell. It is.

特開平８−３３８８０５号公報JP-A-8-338805

上記した従来の方法では、レーザ光源の光量変化等が透過光強度に及ぼす影響を排除するために試料ガスを含まない基準ガス用セルを用意し、光源から出射されるレーザ光を2つに分岐して試料セルと基準ガス用セルに照射している。そして、基準ガス用セルの透過光強度を用いて試料セルの透過光強度を補正するようにしている。   In the conventional method described above, a reference gas cell that does not contain sample gas is prepared in order to eliminate the influence of changes in the light amount of the laser light source on the transmitted light intensity, and the laser light emitted from the light source is split into two. Then, the sample cell and the reference gas cell are irradiated. Then, the transmitted light intensity of the sample cell is corrected using the transmitted light intensity of the reference gas cell.

ところが、上記方法ではレーザ光の分岐部から試料セルに向かう光路のみに、例えばレーザ光の光軸を変化させるような外乱が発生したり、レーザ光を遮るような埃等が侵入したりして透過光強度が変動した場合には、その影響を排除することができない。一方、レーザ光の分岐部から基準ガス用セルに向かう光路のみに上記したような外乱や埃の侵入等が生じた場合には、試料セルの透過光強度はその影響を受けないにもかかわらず上記方法ではその影響があるものとして補正してしまうことになる。つまり、いずれの場合も、試料セルの透過光強度を正確に求めることができない。   However, in the above method, for example, a disturbance that changes the optical axis of the laser beam occurs or dust or the like that blocks the laser beam enters only the optical path from the laser beam branch to the sample cell. When the transmitted light intensity fluctuates, the influence cannot be excluded. On the other hand, if the above disturbance or dust intrusion occurs only in the optical path from the laser beam branch to the reference gas cell, the transmitted light intensity of the sample cell is not affected. In the above method, correction is performed assuming that there is an influence. That is, in any case, the transmitted light intensity of the sample cell cannot be obtained accurately.

本発明が解決しようとする課題は、試料セル内に該試料セルの透過光強度に影響を及ぼすような現象が発生した場合でもその影響を排除して、試料ガス中の特定ガス成分の濃度を正確に求めることができるガス吸光度測定装置を提供することである。   The problem to be solved by the present invention is that even when a phenomenon that affects the transmitted light intensity of the sample cell occurs in the sample cell, the influence is eliminated and the concentration of the specific gas component in the sample gas is reduced. It is an object of the present invention to provide a gas absorbance measurement device that can be accurately obtained.

上記課題を解決するために成された本発明に係るガス吸光度測定装置は、
a) 試料ガスを収容する試料セルと、
b) 前記試料ガス中の目的成分の吸収波長を有するレーザ光を出射する第１光源と、
c) 前記目的成分の吸収波長とは異なる波長のレーザ光を出射する第２光源と、
d) 前記第１光源から出射されたレーザ光及び前記第２光源から出射されたレーザ光を、前記試料セル内の同一光路上を通過させる結合光学系と、
e) 前記試料セルを通過した光のうち前記第１光源からのレーザ光の強度を検出する第１検出器と、
f) 前記試料セルを通過したレーザ光のうち前記第２光源からのレーザ光の強度を検出する第２検出器と、
g) 前記第２検出器の検出信号を用いて、前記第１検出器の検出信号を補正するノイズ補正処理手段と
を備えることを特徴とする。 The gas absorbance measuring apparatus according to the present invention, which has been made to solve the above problems,
a) a sample cell containing the sample gas;
b) a first light source that emits laser light having an absorption wavelength of the target component in the sample gas;
c) a second light source that emits laser light having a wavelength different from the absorption wavelength of the target component;
d) a coupling optical system that allows the laser light emitted from the first light source and the laser light emitted from the second light source to pass through the same optical path in the sample cell;
e) a first detector that detects the intensity of laser light from the first light source among the light that has passed through the sample cell;
f) a second detector that detects the intensity of the laser light from the second light source among the laser light that has passed through the sample cell;
g) Noise correction processing means for correcting the detection signal of the first detector using the detection signal of the second detector.

前記結合光学系としては、前記第１光源からのレーザ光と前記第２光源からのレーザ光を合波するファイバカプラを用いることができる。この場合、ファイバカプラと試料セルの間に合波したレーザ光を平行光化するレンズを配置すると良い。   As the coupling optical system, a fiber coupler that multiplexes the laser light from the first light source and the laser light from the second light source can be used. In this case, it is preferable to arrange a lens for collimating the laser beam combined between the fiber coupler and the sample cell.

また、上記のガス吸光度測定装置は、さらに、
h) 前記第１光源からのレーザ光を、前記試料セル内を通過する第１光路と、該第１光路とは別の第２光路とに分岐する分岐手段と、
i) 前記第２光路に配置された、前記第１光源からのレーザ光の強度を検出する第１光源光量補正用検出器と、
j) 前記第１光源光量補正用検出器の検出信号を用いて、前記第１検出器の検出信号を補正する第１光量補正処理手段と
を備えることが好ましい。
上記構成によれば、第１光源からのレーザ光の試料セルの透過光強度から該第１光源の光量変化の影響を排除することができるため、試料ガス中の目的成分濃度をより正確に測定することができる。 In addition, the gas absorbance measurement apparatus described above further includes
h) branching means for branching the laser light from the first light source into a first optical path passing through the sample cell and a second optical path different from the first optical path;
i) a first light source light quantity correction detector for detecting the intensity of the laser light from the first light source, disposed in the second optical path;
j) It is preferable that the first light amount correction processing unit corrects the detection signal of the first detector using the detection signal of the first light source light amount correction detector.
According to the above configuration, the influence of the light amount change of the first light source can be excluded from the transmitted light intensity of the laser light from the first light source, so the target component concentration in the sample gas can be measured more accurately. can do.

また、上記のガス吸光度測定装置は、さらに、
k) 前記第２光源からのレーザ光を、前記試料セル内を通過する第１光路と、該第１光路とは別の第２光路とに分岐する分岐手段と、
l) 前記第２光路に配置された、前記第２光源からのレーザ光の強度を検出する第２光源光量補正用検出器と、
m) 前記第２光源光量補正用検出器の検出信号を用いて、前記第２検出器の検出信号を補正する第２光量補正処理手段と
を備えることが好ましい。
上記構成によれば、第２光源からのレーザ光の試料セルの透過光強度から該第２光源の光量変化の影響を排除することができるため、試料ガス中の目的成分濃度をより正確に測定することができる。 In addition, the gas absorbance measurement apparatus described above further includes
k) branching means for branching the laser light from the second light source into a first optical path that passes through the sample cell and a second optical path different from the first optical path;
l) a second light source light quantity correction detector for detecting the intensity of the laser light from the second light source, disposed in the second optical path;
m) Preferably, a second light amount correction processing unit that corrects the detection signal of the second detector using the detection signal of the second light source light amount correction detector.
According to the above configuration, the influence of the light amount change of the second light source can be excluded from the intensity of the laser light transmitted from the second light source through the sample cell, so that the concentration of the target component in the sample gas can be measured more accurately. can do.

本発明のガス吸光度測定装置では、第１光源からのレーザ光は試料ガスに含まれる目的成分の量に応じて試料セルを通過する際に試料ガスに吸収される。また、第２光源からのレーザ光は、目的成分の吸収波長とは異なる波長であるため、目的成分の有無や目的成分の量に影響を受けることなく試料セルを透過する。このとき、第１光源からのレーザ光と第２光源からのレーザ光は結合され、試料セル内の同一光路上を通過するため、該光路上に埃が存在した場合には、その埃によって第１光源からのレーザ光と第２光源からのレーザ光の両方が同じように遮られる。また、第１光源及び第２光源からレーザ光の光軸が変化するような外乱が試料セルに発生した場合も同様に、第１光源及び第２光源からのレーザ光の両方がその影響を受ける。従って、ノイズ補正処理手段によって、試料セルを通過したレーザ光のうち第２光源からのレーザ光の検出信号を用いて第１光源からのレーザ光の検出信号を補正することにより、第１光源からのレーザ光と第２光源からのレーザ光が結合してから試料セルを通過するまでの光路上に発生した外乱や埃等による影響を排除することができ、試料ガス中の目的成分の濃度を正確に測定することができる。   In the gas absorbance measurement apparatus of the present invention, the laser light from the first light source is absorbed by the sample gas when passing through the sample cell according to the amount of the target component contained in the sample gas. Further, since the laser light from the second light source has a wavelength different from the absorption wavelength of the target component, it passes through the sample cell without being affected by the presence or absence of the target component or the amount of the target component. At this time, the laser light from the first light source and the laser light from the second light source are combined and pass on the same optical path in the sample cell. Therefore, if dust is present on the optical path, Both the laser light from one light source and the laser light from the second light source are blocked in the same way. Similarly, when a disturbance that changes the optical axis of the laser light from the first light source and the second light source occurs in the sample cell, both the laser light from the first light source and the second light source are similarly affected. . Therefore, the noise correction processing means corrects the detection signal of the laser beam from the first light source using the detection signal of the laser beam from the second light source among the laser beams that have passed through the sample cell, thereby allowing the first light source to The influence of disturbance and dust generated on the optical path from the combination of the laser beam from the second light source and the laser beam from the second light source to the passage through the sample cell can be eliminated, and the concentration of the target component in the sample gas can be reduced. It can be measured accurately.

本発明の一実施例に係るガス吸光度測定装置の概略構成図。1 is a schematic configuration diagram of a gas absorbance measurement apparatus according to an embodiment of the present invention. 透過光検出器のＩｎＧａＡｓフォトダイオードの出力（ａ）、透過光検出器のＳｉフォトダイオードの出力（ｂ）、光量補正用検出器の出力（ｃ）、試料ガス中の目的成分の吸光度スペクトル。The output (a) of the InGaAs photodiode of the transmitted light detector, the output (b) of the Si photodiode of the transmitted light detector, the output (c) of the light quantity correction detector, and the absorbance spectrum of the target component in the sample gas.

以下、本発明の一実施例に係るガス吸光度測定装置の構成を説明する。
ガス吸光度測定装置１０は、試料ガスが導入される試料セル１２と、前記試料ガスの吸収波長のレーザ光を出射する第１光源１４と、試料ガスの吸収波長とは異なるレーザ光を出射する第２光源１６とを備えている。以下、第１光源１４の出射レーザ光を「吸収波長光」、第２光源１６の出射レーザ光を「非吸収波長光」ともいう。本実施例では、第１光源１４としてＣＯ２の赤外吸収スペクトルに対応した２．０μｍ帯のＤＦＢ−ＬＤ（分布帰還型レーザダイオード、Distributed FeedBack Laser Diode）を使用し、第２光源１６として６８５ｎｍ帯のＬＤ（レーザダイオード、Laser Diode）を使用している。 Hereinafter, the configuration of a gas absorbance measuring apparatus according to an embodiment of the present invention will be described.
The gas absorbance measurement apparatus 10 includes a sample cell 12 into which a sample gas is introduced, a first light source 14 that emits a laser beam having an absorption wavelength of the sample gas, and a first laser beam that emits a laser beam different from the absorption wavelength of the sample gas. Two light sources 16. Hereinafter, the emitted laser light from the first light source 14 is also referred to as “absorption wavelength light”, and the emitted laser light from the second light source 16 is also referred to as “non-absorption wavelength light”. In the present embodiment, a 2.0 μm band DFB-LD (Distributed Feedback Laser Diode) corresponding to the infrared absorption spectrum of CO 2 is used as the first light source 14, and 685 nm as the second light source 16. A band LD (Laser Diode) is used.

第１光源１４から出射されるレーザ光と第２光源１６から出射されるレーザ光は赤外線シングルモードファイバカプラ１８（以下、「ファイバカプラ」という。）を介して試料セル１２に向かうようになっている。ファイバカプラ１８は、入射した光を分波・合波する機能を有しており、第１光源１４からのレーザ光及び第２光源１６からのレーザ光をそれぞれ二つに分岐し、各レーザ光、つまり吸収波長光と非吸収波長光とを結合して試料セル１２に向かう第１光路ＬＡに出射し、各レーザ光、つまり吸収波長光と非吸収波長光とを結合して第１光路ＬＡとは別の第２光路ＬＢに出射する。なお、ファイバカプラ１８は第２光源１６からのレーザ光を伝搬できれば良く、当該光が最適波長でなくても良い。ファイバカブラ１８と試料セル１２の間には一つに結合された吸収波長光と非吸収波長光を平行光線化するレンズ２０が配置されている。本実施例では、ファイバカプラ１８とレンズ２０から結合光学系が構成される。   Laser light emitted from the first light source 14 and laser light emitted from the second light source 16 are directed to the sample cell 12 via an infrared single-mode fiber coupler 18 (hereinafter referred to as “fiber coupler”). Yes. The fiber coupler 18 has a function of demultiplexing / combining incident light. The fiber coupler 18 branches the laser light from the first light source 14 and the laser light from the second light source 16 into two, respectively. That is, the absorption wavelength light and the non-absorption wavelength light are combined and output to the first optical path LA toward the sample cell 12, and the respective laser beams, that is, the absorption wavelength light and the non-absorption wavelength light are combined to form the first optical path LA. It radiates | emits to 2nd optical path LB different from. The fiber coupler 18 only needs to be able to propagate the laser light from the second light source 16, and the light may not have the optimum wavelength. A lens 20 for collimating the absorption wavelength light and the non-absorption wavelength light, which are combined into one, is disposed between the fiber cover 18 and the sample cell 12. In this embodiment, the fiber coupler 18 and the lens 20 constitute a coupling optical system.

試料セル１２の後段には、試料セル１２を透過した光を検出する透過光検出器２２が配置されている。この透過光検出器２２は、赤外領域に感度を持つＩｎＧａＡｓフォトダイオード２２１と、可視及び紫外領域に感度を持つＳｉフォトダイオード２２２をタンデムに搭載した複合素子から構成されている。ＩｎＧａＡｓフォトダイオード２２１は本発明の第１検出器に相当し、Ｓｉフォトダイオード２２２は本発明の第２検出器に相当する。   A transmitted light detector 22 that detects light transmitted through the sample cell 12 is disposed at the subsequent stage of the sample cell 12. The transmitted light detector 22 is composed of a composite element in which an InGaAs photodiode 221 having sensitivity in the infrared region and a Si photodiode 222 having sensitivity in the visible and ultraviolet regions are mounted in tandem. The InGaAs photodiode 221 corresponds to the first detector of the present invention, and the Si photodiode 222 corresponds to the second detector of the present invention.

また、第２光路ＬＢ上には光量補正用検出器２４が配置されており、ファイバカプラ１８によって分岐された他方の吸収波長光と非吸収波長光の結合光が入射するようになっている。光量補正用検出器２４は、赤外領域に感度を持つＩｎＧａＡｓフォトダイオードから構成されている。   A light amount correction detector 24 is disposed on the second optical path LB so that the combined light of the other absorption wavelength light and the non-absorption wavelength light branched by the fiber coupler 18 enters. The light quantity correction detector 24 is composed of an InGaAs photodiode having sensitivity in the infrared region.

ガス吸光度測定装置１０は透過光検出器２２と光量補正用検出器２４の検出信号が入力されるデータ処理装置２６を備えている。該データ処理処置２６は、透過光検出器２２のＩｎＧａＡｓフォトダイオードの検出信号から光量補正用検出器２４のＩｎＧａＡｓフォトダイオードの検出信号を除算することで、第１光源１４の光量変化の補正処理を行う。なお、光量補正用検出器２４には第２光源１６からのレーザ光も入射するが、光量補正用検出器２４は非吸収波長光に感度を持たないＩｎＧａＡｓフォトダイオードが用いられているため、光量変化の補正処理には影響が及ばない。   The gas absorbance measurement device 10 includes a data processing device 26 to which detection signals from the transmitted light detector 22 and the light amount correction detector 24 are input. The data processing procedure 26 divides the detection signal of the InGaAs photodiode of the light amount correction detector 24 from the detection signal of the InGaAs photodiode of the transmitted light detector 22, thereby correcting the light amount change of the first light source 14. Do. Although the laser light from the second light source 16 is also incident on the light quantity correction detector 24, the light quantity correction detector 24 uses an InGaAs photodiode that is not sensitive to non-absorbed wavelength light. The change correction process is not affected.

また、データ処理装置２６は、透過光検出器２２のＳｉフォトダイオードの検出信号により透過光検出器２２のＩｎＧａＡｓフォトダイオードの検出信号を除算することで、試料セル１２の入射窓の汚れや試料セル１２中に侵入した埃等による光量変化の補正処理を行う。そして、これら補正処理によって得られた結果から、ガス吸収スペクトルが求められる。このガス吸収スペクトルは表示装置２８に出力されて、その表示画面に表示される。   Further, the data processing device 26 divides the detection signal of the InGaAs photodiode of the transmitted light detector 22 by the detection signal of the Si photodiode of the transmitted light detector 22, so that the entrance window of the sample cell 12 becomes dirty or the sample cell. 12 is performed to correct the change in the amount of light due to dust or the like entering the inside. And a gas absorption spectrum is calculated | required from the result obtained by these correction | amendment processes. The gas absorption spectrum is output to the display device 28 and displayed on the display screen.

図２に透過光検出器２２及び光量補正用検出器２４の出力データ及びデータ処理装置２６の出力データの一例を示す。なお、図２では、透過光検出器２２を「検出器（１）」と、光量補正用検出器２４を「検出器（２）」と表している。また、図２は、ガス吸光度の計測中に試料ガス中に含まれる煤が試料セル１２内の光路を横切った場合の例を示す。   FIG. 2 shows an example of output data of the transmitted light detector 22 and the light amount correction detector 24 and output data of the data processing device 26. In FIG. 2, the transmitted light detector 22 is represented as “detector (1)”, and the light amount correction detector 24 is represented as “detector (2)”. FIG. 2 shows an example in which soot contained in the sample gas crosses the optical path in the sample cell 12 during measurement of gas absorbance.

図２（ａ）は透過光検出器２２のＩｎＧａＡｓフォトダイオードの出力を示しており、試料ガス中の目的成分（ＣＯ２）による吸収特性（透過光強度）が検出される。図２（ａ）から、目的成分の吸収特性には煤による光量低下が観察されることが分かる。図２（ｂ）は透過光検出器２２のＳｉフォトダイオードの出力を示しており、目的成分による吸収特性は検出されず、煤による光量低下のみが観察される。図２（ｃ）は光量補正用検出器２４の出力を示しており、第１光源１４の光量変化のみが観察される。 FIG. 2A shows the output of the InGaAs photodiode of the transmitted light detector 22, and the absorption characteristic (transmitted light intensity) due to the target component (CO 2 ) in the sample gas is detected. From FIG. 2A, it can be seen that a decrease in the amount of light due to wrinkles is observed in the absorption characteristics of the target component. FIG. 2B shows the output of the Si photodiode of the transmitted light detector 22, the absorption characteristic due to the target component is not detected, and only a light amount decrease due to wrinkles is observed. FIG. 2C shows the output of the light quantity correction detector 24, and only the light quantity change of the first light source 14 is observed.

図２（ａ）の結果を、図２（ｂ）の結果及び図２（ｃ）の結果で除算し、得られたガス吸光度スペクトルを図２（ｄ）に示す。図２（ｄ）の結果から、第１光源１４の光量変化の影響及び煤による光量低下の影響が排除され、試料ガスに含まれる目的成分本来のガス吸光度スペクトルが得られることが分かる。
このように、本実施例では、第１光源１４からのレーザ光と第２光源１６からのレーザ光を結合させた後、試料セル１２内の同一光路上を通過させて各レーザ光の透過光強度を検出するようにした。そして、第２光源１６からのレーザ光の透過光強度を用いて第１光源１４からのレーザ光の透過光強度を補正したため、試料セル１２内はもちろん、ファイバカプラ１８から試料セル１２に至るまでの光路上に発生する外乱や埃の侵入といった目的成分の透過光強度に及ぼす影響を排除することができる。 The result of FIG. 2 (a) is divided by the result of FIG. 2 (b) and the result of FIG. 2 (c), and the obtained gas absorbance spectrum is shown in FIG. 2 (d). From the result of FIG. 2D, it can be seen that the influence of the change in the amount of light of the first light source 14 and the influence of the reduction in the amount of light due to soot are eliminated, and the original gas absorbance spectrum of the target component contained in the sample gas is obtained.
As described above, in this embodiment, after the laser light from the first light source 14 and the laser light from the second light source 16 are combined, the light passes through the same optical path in the sample cell 12 and is transmitted through each laser light. The intensity was detected. Since the transmitted light intensity of the laser light from the first light source 14 is corrected using the transmitted light intensity of the laser light from the second light source 16, not only the inside of the sample cell 12 but also the fiber coupler 18 to the sample cell 12. The influence of the target component on the transmitted light intensity, such as the disturbance generated on the optical path and the intrusion of dust, can be eliminated.

さらに、本実施例では、第１光源１４からのレーザ光を２つに分岐し、そのうちの一方を光量補正用検出器２４で検出し、この結果を用いて第１光源１４からのレーザ光の透過光強度を補正するようにした。そのため、第１光源１４の光量変化の影響も排除することができる。   Further, in this embodiment, the laser light from the first light source 14 is branched into two, one of which is detected by the light quantity correction detector 24, and the result is used to detect the laser light from the first light source 14. The transmitted light intensity was corrected. Therefore, the influence of the light quantity change of the first light source 14 can be eliminated.

さらにまた、本実施例では、非吸収波長光である第２光源１６からのレーザ光として可視光を用いたため、該レーザ光を赤外光である吸収波長光のガイド光として利用することができる。従って、吸収波長光と非吸収波長光の結合光の光路上に位置するレンズ２０や試料セル１２、検出器２２等の位置調整を容易に行うことができる。   Furthermore, in this embodiment, since visible light is used as laser light from the second light source 16 that is non-absorption wavelength light, the laser light can be used as guide light for absorption wavelength light that is infrared light. . Therefore, it is possible to easily adjust the position of the lens 20, the sample cell 12, the detector 22 and the like positioned on the optical path of the combined light of the absorption wavelength light and the non-absorption wavelength light.

なお、本実施例の装置は、（１）試料セルの光路上に煤が存在する時の光量低下を補正する場合の他、（２）試料セル内の温度変化により目的成分のピーク形状が変化したときに該ピーク形状を補正することも可能である。   The apparatus of the present embodiment (1) corrects a decrease in the amount of light when wrinkles are present on the optical path of the sample cell, and (2) changes the peak shape of the target component due to a temperature change in the sample cell. In this case, the peak shape can be corrected.

また、本発明は上記の実施例に限定されるものではなく以下の変形が可能である。
例えば、ファイバから発せられた光は、レンズを使ってコリメートしているが、放物面鏡などの光学素子を使ってコリメートしても良い。
ファイバカプラに代えてビームスプリッタ等に第１光源及び第２光源からのレーザ光を入射させ、各レーザ光を二つに分岐すると共に、分岐後の各レーザ光の一方ずつを一つにまとめるようにしても良い。
試料セルを通過した吸収波長光と非吸収波長光の結合波をビームスプリッタで２つに分岐し、吸収波長に感度を持つ検出器と非吸収波長に感度を持つ検出器を用いて各波長光を検出するようにしても良い。
あるいは積分球と検出器を組み合わせて、入射された結合波を吸収波長に感度を持つ検出器と非吸収波長に感度を持つ検出器を用いて各波長光を検出するようにしても良い。
光量補正用検出器２４としてＩｎＧａＡｓフォトダイオードとＳｉフォトダイオードの両方を備えた検出器を用いてもよい。この構成では、第１光源と第２光源の両方の光量補正を行うことができる。 Further, the present invention is not limited to the above-described embodiments, and the following modifications are possible.
For example, the light emitted from the fiber is collimated using a lens, but may be collimated using an optical element such as a parabolic mirror.
In place of the fiber coupler, the laser beams from the first light source and the second light source are incident on a beam splitter or the like, and each laser beam is branched into two, and one of each of the branched laser beams is combined into one. Anyway.
The combined wave of absorption wavelength light and non-absorption wavelength light that has passed through the sample cell is split into two by a beam splitter, and each wavelength light is detected using a detector that is sensitive to the absorption wavelength and a detector that is sensitive to the non-absorption wavelength. May be detected.
Alternatively, an integrating sphere and a detector may be combined, and each wavelength light may be detected using a detector having sensitivity to the absorption wavelength of the incident coupled wave and a detector having sensitivity to the non-absorption wavelength.
A detector having both an InGaAs photodiode and a Si photodiode may be used as the light quantity correction detector 24. With this configuration, it is possible to perform light amount correction of both the first light source and the second light source.

１０…ガス吸光度測定装置
１２…試料セル
１４…第１光源
１６…第２光源
１８…赤外線シングルモードファイバカプラ（結合光学系）
２０…レンズ（結合光学系）
２２…透過光検出器
２４…光量補正用検出器
２６…データ処理装置 DESCRIPTION OF SYMBOLS 10 ... Gas absorbance measuring device 12 ... Sample cell 14 ... 1st light source 16 ... 2nd light source 18 ... Infrared single mode fiber coupler (coupling optical system)
20. Lens (coupled optical system)
22 ... Transmitted light detector 24 ... Light quantity correction detector 26 ... Data processing device

Claims (4)

a) 試料ガスを収容する試料セルと、
b) 前記試料ガス中の目的成分の吸収波長を有するレーザ光を出射する第１光源と、
c) 前記目的成分の吸収波長とは異なる波長のレーザ光を出射する第２光源と、
d) 前記第１光源から出射されたレーザ光及び前記第２光源から出射されたレーザ光を、前記試料セル内の同一光路上を通過させる結合光学系と、
e) 前記試料セルを通過した光のうち前記第１光源からのレーザ光の強度を検出する第１検出器と、
f) 前記試料セルを通過した光のうち前記第２光源からのレーザ光の強度を検出する第２検出器と、
g) 前記第２検出器の検出信号を用いて、前記第１検出器の検出信号を補正するノイズ補正処理手段と
を備えることを特徴とするガス吸光度測定装置。 a) a sample cell containing the sample gas;
b) a first light source that emits laser light having an absorption wavelength of the target component in the sample gas;
c) a second light source that emits laser light having a wavelength different from the absorption wavelength of the target component;
d) a coupling optical system that allows the laser light emitted from the first light source and the laser light emitted from the second light source to pass through the same optical path in the sample cell;
e) a first detector that detects the intensity of laser light from the first light source among the light that has passed through the sample cell;
f) a second detector for detecting the intensity of the laser light from the second light source among the light that has passed through the sample cell;
g) A gas absorbance measurement device comprising noise correction processing means for correcting the detection signal of the first detector using the detection signal of the second detector. 前記結合光学系が、前記第１光源からの光と前記第２光源からの光を合波するファイバカプラを備えることを特徴とする請求項１に記載のガス吸光度測定装置。   2. The gas absorbance measurement apparatus according to claim 1, wherein the coupling optical system includes a fiber coupler that multiplexes light from the first light source and light from the second light source. 請求項１又は２に記載のガス吸光度測定装置において、さらに、
h) 前記第１光源からのレーザ光を、前記試料セル内を通過する第１光路と、該第１光路とは別の第２光路とに分岐する分岐手段と、
i) 前記第２光路に配置された、前記第１光源からのレーザ光の強度を検出する第１光源光量補正用検出器と、
j) 前記第１光源光量補正用検出器の検出信号を用いて、前記第１検出器の検出信号を補正する第１光量補正処理手段と
を備えることを特徴とするガス吸光度測定装置。 In the gas absorbance measuring device according to claim 1 or 2, further,
h) branching means for branching the laser light from the first light source into a first optical path passing through the sample cell and a second optical path different from the first optical path;
i) a first light source light quantity correction detector for detecting the intensity of the laser light from the first light source, disposed in the second optical path;
j) A gas absorbance measurement apparatus comprising: first light quantity correction processing means for correcting a detection signal of the first detector using a detection signal of the first light source light quantity correction detector. 請求項１又は２に記載のガス吸光度測定装置において、さらに、
k) 前記第２光源からのレーザ光を、前記試料セル内を通過する第１光路と、該第１光路とは別の第２光路とに分岐する分岐手段と、
l) 前記第２光路に配置された、前記第２光源からのレーザ光の強度を検出する第２光源光量補正用検出器と、
m) 前記第２光源光量補正用検出器の検出信号を用いて、前記第２検出器の検出信号を補正する第２光量補正処理手段と
を備えることを特徴とするガス吸光度測定装置。 In the gas absorbance measuring device according to claim 1 or 2, further,
k) branching means for branching the laser light from the second light source into a first optical path that passes through the sample cell and a second optical path different from the first optical path;
l) a second light source light quantity correction detector for detecting the intensity of the laser light from the second light source, disposed in the second optical path;
m) A gas absorbance measurement apparatus comprising: a second light amount correction processing unit that corrects a detection signal of the second detector using a detection signal of the second light source light amount correction detector.
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