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JP2015023018A - Heating body - Google Patents

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Publication number
JP2015023018A
JP2015023018A JP2013153237A JP2013153237A JP2015023018A JP 2015023018 A JP2015023018 A JP 2015023018A JP 2013153237 A JP2013153237 A JP 2013153237A JP 2013153237 A JP2013153237 A JP 2013153237A JP 2015023018 A JP2015023018 A JP 2015023018A
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foil heater
peripheral frame
heating body
outer peripheral
metal
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Inventor
孝幸 井口
Takayuki Iguchi
孝幸 井口
禎子 山田
Sadako Yamada
禎子 山田
健一 三好
Kenichi Miyoshi
健一 三好
玄秀 吉沢
Haruhide Yoshizawa
玄秀 吉沢
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Nihon Dennetsu Co Ltd
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Nihon Dennetsu Co Ltd
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Priority to JP2013153237A priority Critical patent/JP2015023018A/en
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Abstract

PROBLEM TO BE SOLVED: To provide a heating body capable of increasing and decreasing the temperature more quickly than before without damaging flatness of a heating surface.SOLUTION: A foil heater 5 formed by coating polyimide on both surfaces of a metal foil heater 6 is placed on an inner peripheral frame 3 fixed to the upper side of a pedestal 2, the peripheral edge 5a is adhered and fixed on an outer peripheral frame 4 capable of being freely lifted and lowered along a plurality of holding pins 9, and the outer peripheral frame 4 is directed downward and energized by springs 11, thereby uniformly straining a heating surface 7 of the foil heater 5 in the horizontal direction.

Description

本発明は加熱体に関し、更に詳しくは、加熱面の平面度を損なうことなく、従来よりも急速に昇降温させることができる加熱体に関する。   The present invention relates to a heating element, and more particularly to a heating element that can be raised and lowered more rapidly than before without impairing the flatness of the heating surface.

一般に、半導体ウェハや液晶用ガラスなどの基板の加熱処理工程においては、金属プレート型の加熱体が用いられている。この金属プレート型の加熱体は、発熱源である金属箔ヒータをポリイミドなどの耐熱性樹脂フィルムで被覆した箔ヒータを、加熱面を形成する金属製の加熱プレートと高圧で押圧して接着することにより製造される(例えば、特許文献1を参照)。   In general, a metal plate type heating element is used in a heat treatment process of a substrate such as a semiconductor wafer or glass for liquid crystal. This metal plate-type heating element is made by pressing a metal foil heater, which is a heat generation source, coated with a heat-resistant resin film such as polyimide, and pressing the metal heater plate forming the heating surface with high pressure. (For example, refer to Patent Document 1).

ところで近年では、生産効率の向上及び省エネルギーの観点から、加熱体をより急速に昇降温することが求められている。そのためには、加熱プレートを薄肉化して熱容量を小さくすることが考えられるが、製造中や使用中に加熱プレートが変形して加熱面の平面度が損なわれてしまい、基板の加熱処理に支障を来すおそれがある。   Incidentally, in recent years, it has been required to raise and lower the temperature of the heating element more rapidly from the viewpoint of improving production efficiency and saving energy. For this purpose, it is conceivable to reduce the heat capacity by reducing the thickness of the heating plate, but the heating plate is deformed during manufacturing or use, and the flatness of the heating surface is impaired, which hinders the heat treatment of the substrate. There is a risk of coming.

特開2003−217799号公報JP 2003-217799 A

本発明の目的は、加熱面の平面度を損なうことなく、従来よりも急速に昇降温させることができる加熱体を提供することにある。   An object of the present invention is to provide a heating body capable of raising and lowering the temperature more rapidly than before without impairing the flatness of the heating surface.

上記の目的を達成する本発明の加熱体は、樹脂フィルムの中央部に金属箔ヒータを埋設してなる箔ヒータの上面を介して加熱処理を行う加熱体において、前記箔ヒータにおける少なくとも前記金属箔ヒータが埋設された部分を緊張させる緊張手段を備えることを特徴とするものである。   The heating body of the present invention that achieves the above object is a heating body that performs heat treatment via the upper surface of a foil heater in which a metal foil heater is embedded in the center of a resin film, and at least the metal foil in the foil heater. It is characterized by comprising tension means for tensioning the portion where the heater is embedded.

上記の加熱体においては、緊張手段を、箔ヒータの周縁部が固定された外周フレームと、金属箔ヒータが埋設された部分を囲むように箔ヒータの下面に接する内周フレームと、外周フレーム及び内周フレームの少なくとも一方を互いの間隔が拡がる方向に付勢する弾性体とから構成する。   In the heating body, the tension means includes an outer peripheral frame to which the peripheral portion of the foil heater is fixed, an inner peripheral frame that is in contact with the lower surface of the foil heater so as to surround a portion where the metal foil heater is embedded, an outer peripheral frame, and At least one of the inner peripheral frames is composed of an elastic body that urges the inner circumferential frame in a direction in which the interval between the inner frames expands.

また、箔ヒータの上面に、金属製又はカーボン製のシート部材を、望ましくは表面をアルマイト処理及び/又は黒色塗装したアルミニウム製の薄板材を、金属箔ヒータが埋設された部分を覆うように貼り付ける。   In addition, a sheet member made of metal or carbon, preferably an aluminum sheet with anodized and / or black coated surface is applied to the upper surface of the foil heater so as to cover the portion where the metal foil heater is embedded. wear.

更には、内周フレームの内側に位置する箔ヒータの下面に、鏡面処理された金属製のシート部材を、金属箔ヒータが埋設された部分を覆うように貼り付ける。   Further, a mirror-finished metal sheet member is attached to the lower surface of the foil heater located inside the inner peripheral frame so as to cover the portion where the metal foil heater is embedded.

本発明の加熱体における箔ヒータでは、樹脂フィルムにポリイミドを用いることが望ましい。   In the foil heater in the heating body of the present invention, it is desirable to use polyimide for the resin film.

本発明の加熱体によれば、樹脂フィルムの中央部に金属箔ヒータを埋設してなる箔ヒータにおける少なくとも金属箔ヒータが埋設された部分を緊張させることにより、従来のように金属製の加熱プレートを用いないので熱容量が小さくなるため、加熱体を急速に昇降温させることができる。また、箔ヒータの加熱面となる金属箔ヒータが埋設された部分が均一に緊張されるため、加熱面の平面度が損なわれることはない。   According to the heating body of the present invention, a metal heating plate as in the prior art is obtained by tensioning at least a portion where the metal foil heater is embedded in the foil heater in which the metal foil heater is embedded in the central portion of the resin film. Since no heat capacity is used, the heat capacity is reduced, so that the heating body can be rapidly raised and lowered. Moreover, since the portion in which the metal foil heater serving as the heating surface of the foil heater is embedded is uniformly tensioned, the flatness of the heating surface is not impaired.

本発明の第1の実施形態からなる加熱体の平面図である。It is a top view of the heating body which consists of a 1st embodiment of the present invention. 図1においてA−A矢視で示す断面図である。It is sectional drawing shown by AA arrow in FIG. 図2におけるX部の拡大図である。It is an enlarged view of the X section in FIG. 本発明の第2の実施形態からなる加熱体の平面図である。It is a top view of the heating body which consists of the 2nd Embodiment of this invention. 図4においてB−B矢視で示す断面図である。It is sectional drawing shown by a BB arrow in FIG. 図5におけるY部の拡大図である。It is an enlarged view of the Y section in FIG. 内周フレームの近傍部分の拡大断面図である。It is an expanded sectional view of the vicinity part of an inner peripheral frame.

以下に、本発明の実施の形態について、図面を参照して説明する。図1〜3は、本発明の第1の実施形態からなる加熱体を示す。   Embodiments of the present invention will be described below with reference to the drawings. 1-3 show the heating body which consists of the 1st Embodiment of this invention.

この加熱体1Aは、円盤状の台座2の上方に水平に配置されたリング状の内周フレーム3及び外周フレーム4と、その内周フレーム3上で水平方向に均一に緊張された箔ヒータ5とから主に構成されている。   The heating body 1A includes a ring-shaped inner peripheral frame 3 and an outer peripheral frame 4 that are horizontally disposed above the disk-shaped pedestal 2, and a foil heater 5 that is uniformly tensioned in the horizontal direction on the inner peripheral frame 3. And is composed mainly of.

箔ヒータ5は、被加熱物の加熱処理に適した大きさ及びパターンを有する金属箔ヒータ6の両面を、その金属箔ヒータ6が中央部に位置するようにポリイミド製のフィルムで被覆したものである。この箔ヒータ5は、加熱面7を介して半導体ウェハなどの被加熱物を直接的又は間接的に加熱処理する。なお、ここで加熱面7とは、箔ヒータ5における金属箔ヒータ6が埋設された部分を覆う上面を指すものとする。   The foil heater 5 is obtained by covering both surfaces of a metal foil heater 6 having a size and a pattern suitable for heat treatment of an object to be heated with a polyimide film so that the metal foil heater 6 is located at the center. is there. The foil heater 5 directly or indirectly heats an object to be heated such as a semiconductor wafer via the heating surface 7. Here, the heating surface 7 refers to the upper surface that covers the portion of the foil heater 5 in which the metal foil heater 6 is embedded.

内周フレーム3は、箔ヒータ5の加熱面7を囲む大きさを有しており、周方向に等間隔で配置された複数の支柱8(例えば8本)を介して台座2上に固定されている。   The inner peripheral frame 3 has a size surrounding the heating surface 7 of the foil heater 5 and is fixed on the pedestal 2 via a plurality of support columns 8 (for example, eight) arranged at equal intervals in the circumferential direction. ing.

外周フレーム4は内周フレーム3よりも大きく、台座2上に立設された複数の保持ピン9(例えば8本)が周方向に等間隔で貫通しており、内周フレーム3と平行かつ同軸の状態で昇降自在に保持されている。それぞれの保持ピン9の上部には太径のヘッド部10が形成されており、そのヘッド部10と外周フレーム4の上面との間には圧縮状態のバネ11が保持ピン9に沿って介設されている。   The outer peripheral frame 4 is larger than the inner peripheral frame 3, and a plurality of holding pins 9 (for example, eight) standing on the base 2 penetrate at equal intervals in the circumferential direction, and are parallel and coaxial with the inner peripheral frame 3. In this state, it is held up and down freely. A large-diameter head portion 10 is formed above each holding pin 9, and a compressed spring 11 is interposed along the holding pin 9 between the head portion 10 and the upper surface of the outer peripheral frame 4. Has been.

上記の箔ヒータ5の下面には、加熱面7が内側に位置するように内周フレーム3が接している。また、箔ヒータ5のポリイミドフィルムのみからなる周縁部5aは、外周フレーム4の上面に接着固定されている。なお、箔ヒータ5の周縁部5aと外周フレーム4との接着固定を確実にするために、外周フレーム4と同形のフレーム抑え部材で周縁部5aを上から挟持するようにしてもよい。   The inner peripheral frame 3 is in contact with the lower surface of the foil heater 5 so that the heating surface 7 is positioned inside. Further, the peripheral edge portion 5 a made of only the polyimide film of the foil heater 5 is bonded and fixed to the upper surface of the outer peripheral frame 4. In order to secure adhesion between the peripheral edge portion 5 a of the foil heater 5 and the outer peripheral frame 4, the peripheral edge portion 5 a may be sandwiched from above by a frame holding member having the same shape as the outer peripheral frame 4.

そして箔ヒータ5は、外周フレーム4を保持する保持ピン9にそれぞれ介設されたバネ11が、ヘッド部10をバネ受けとして外周フレーム4を下方に向けて付勢することで、内周フレーム3と外周フレーム4との間の距離が拡大するため、内周フレーム3上で水平方向に均一に緊張される。   The foil heater 5 is configured such that the springs 11 respectively interposed in the holding pins 9 that hold the outer peripheral frame 4 urge the outer peripheral frame 4 downward with the head portion 10 as a spring receiver. Since the distance between the outer peripheral frame 4 and the outer peripheral frame 4 is increased, the inner peripheral frame 3 is uniformly tensioned in the horizontal direction.

このように加熱体1Aを構成したので、従来のように金属製の加熱プレートを用いないので熱容量が小さくなるため、加熱体1Aを急速に昇降温させることができる。また、箔ヒータ5の加熱面7が水平方向に均一に緊張されるため、加熱面7の平面度が損なわれることはない。   Since the heating body 1A is configured as described above, since the heat capacity is reduced because a metal heating plate is not used as in the conventional case, the heating body 1A can be rapidly raised and lowered. Moreover, since the heating surface 7 of the foil heater 5 is uniformly tensioned in the horizontal direction, the flatness of the heating surface 7 is not impaired.

図4〜6は、本発明の第2の実施形態からなる加熱体を示す。なお、図1〜3と同じ部分には同一の符号を付し、説明を省略する。   4-6 shows the heating body which consists of the 2nd Embodiment of this invention. In addition, the same code | symbol is attached | subjected to the same part as FIGS. 1-3, and description is abbreviate | omitted.

この加熱体1Bは、箔ヒータ5の周縁部5aが上面に接着固定された薄肉の外周フレーム12の下方に、台座2上に固定された断面略L字状の保持フレーム13を、外周フレーム12と平行かつ同軸になるように配置したものである。   The heating body 1B includes a holding frame 13 having a substantially L-shaped cross section fixed on the pedestal 2 below the thin outer peripheral frame 12 with the peripheral edge 5a of the foil heater 5 bonded and fixed to the upper surface. Are arranged so as to be parallel to and coaxial with each other.

保持フレーム13における外周フレーム12と対向する外周部13aには、太径のヘッド部14を有する複数の保持ピン15(例えば12本)が周方向に等間隔で下方から貫通しており、その先端部15aは外周フレーム12の下面に固定されている。また、保持ピン15のヘッド部14と保持フレーム13の下面との間には圧縮状態のバネ16が保持ピン15に沿って介設されている。   A plurality of holding pins 15 (for example, 12 pins) having a large-diameter head portion 14 penetrate from the lower side at equal intervals in the outer peripheral portion 13a of the holding frame 13 facing the outer peripheral frame 12, and the tip thereof The portion 15 a is fixed to the lower surface of the outer peripheral frame 12. Further, a compressed spring 16 is interposed along the holding pin 15 between the head portion 14 of the holding pin 15 and the lower surface of the holding frame 13.

これらの保持ピン15のそれぞれのバネ16が、保持フレーム13の下面をバネ受けとして、ヘッド部14及び保持ピン15を通じて外周フレーム12を下方へ付勢することで、内周フレーム3と外周フレーム12との間の距離が拡大するので、箔ヒータ5が内周フレーム3上で水平方向に均一に緊張される。   Each of the springs 16 of the holding pins 15 urges the outer peripheral frame 12 downward through the head portion 14 and the holding pins 15 with the lower surface of the holding frame 13 as a spring receiver, thereby the inner peripheral frame 3 and the outer peripheral frame 12. Since the distance between the two is increased, the foil heater 5 is uniformly tensioned on the inner peripheral frame 3 in the horizontal direction.

上記のいずれの実施形態においても、図7に示すように箔ヒータ5の加熱面7に金属シート(例えば、ステンレスシートやアルミニウムシート)やカーボンシートなどの高熱伝導度のシート部材17を接着等で貼付することにより、被加熱物をより均一に加熱することができる。   In any of the above embodiments, a sheet member 17 having a high thermal conductivity such as a metal sheet (for example, a stainless sheet or an aluminum sheet) or a carbon sheet is bonded to the heating surface 7 of the foil heater 5 as shown in FIG. By sticking, the object to be heated can be heated more uniformly.

特に、上記の金属シートとして、表面をアルマイト処理、好ましくは黒色アルマイト処理したアルミニウムの薄板材や、表面を単に黒色塗装したアルミニウムの薄板材を用いることで、輻射率を増加させて加熱体1A、1Bの加熱処理性能を向上させることができる。   In particular, as the above metal sheet, by using an aluminum thin plate material whose surface is anodized, preferably black anodized, or an aluminum thin plate material whose surface is simply black coated, the radiation rate is increased and the heating element 1A, The heat treatment performance of 1B can be improved.

また、加熱体1A、1Bは、加熱面7の側面からの放熱ロスが非常に少ないという利点を有するが、図7に示すように、箔ヒータ5の加熱面7の裏面18(下面)に鏡面処理を施された金属シート(例えば、鏡面ステンレスシート)などの低輻射率のシート部材19を接着等で貼付することにより、裏面18からの放熱ロスをも低減させて加熱処理性能をより向上することができる。   In addition, the heating elements 1A and 1B have the advantage that the heat radiation loss from the side surface of the heating surface 7 is very small, but as shown in FIG. 7, a mirror surface is provided on the back surface 18 (lower surface) of the heating surface 7 of the foil heater 5. By attaching a low emissivity sheet member 19 such as a treated metal sheet (for example, a mirror surface stainless steel sheet) by adhesion or the like, heat dissipation loss from the back surface 18 is also reduced and heat treatment performance is further improved. be able to.

上述したいずれの実施形態からなる加熱体1A、1Bにおいても、内周フレーム3に対して外周フレーム4、12を下方へ付勢することで箔ヒータ5を緊張させているが、内周フレーム3のみを上方へ付勢する構成や、あるいは内周フレーム3及び外周フレーム4、12をそれぞれ上方及び下方へ付勢する構成にしてもよい。   In the heating elements 1A and 1B according to any of the embodiments described above, the foil heater 5 is tensioned by urging the outer peripheral frames 4 and 12 downward with respect to the inner peripheral frame 3, but the inner peripheral frame 3 Alternatively, the inner frame 3 and the outer frames 4 and 12 may be biased upward and downward, respectively.

また、内周フレーム3や外周フレーム4、12などのフレーム部材がリング状の形状になっているが、これに限られるものではなく、例えば被加熱物が液晶用ガラスの場合には、矩形状のフレーム部材を用いることができる。   Further, the frame members such as the inner peripheral frame 3 and the outer peripheral frames 4 and 12 are ring-shaped, but the present invention is not limited to this. For example, when the object to be heated is glass for liquid crystal, it is rectangular. The frame member can be used.

1A、1B 加熱体
3 内周フレーム
4、12 外周フレーム
5 箔ヒータ
5a (箔ヒータの)周縁部
6 金属箔ヒータ
7 加熱面
11、16 バネ
17 高熱伝導度のシート部材
19 低輻射率のシート部材
DESCRIPTION OF SYMBOLS 1A, 1B Heating body 3 Inner peripheral frame 4, 12 Outer frame 5 Foil heater 5a Peripheral part 6 (of foil heater) Metal foil heater 7 Heating surface 11, 16 Spring 17 High thermal conductivity sheet member 19 Low emissivity sheet member

Claims (6)

樹脂フィルムの中央部に金属箔ヒータを埋設してなる箔ヒータの上面を介して加熱処理を行う加熱体において、
前記箔ヒータにおける少なくとも前記金属箔ヒータが埋設された部分を緊張させる緊張手段を備えることを特徴とする加熱体。
In the heating body that performs the heat treatment through the upper surface of the foil heater in which a metal foil heater is embedded in the center of the resin film,
A heating body comprising tension means for tensioning at least a portion of the foil heater in which the metal foil heater is embedded.
前記緊張手段が、前記箔ヒータの周縁部が固定された外周フレームと、前記金属箔ヒータが埋設された部分を囲むように前記箔ヒータの下面に接する内周フレームと、前記外周フレーム及び内周フレームの少なくとも一方を互いの間隔が拡がる方向に付勢する弾性体とからなる請求項1に記載の加熱体。   The tension means includes an outer peripheral frame to which a peripheral portion of the foil heater is fixed, an inner peripheral frame in contact with a lower surface of the foil heater so as to surround a portion where the metal foil heater is embedded, the outer peripheral frame and the inner periphery The heating body according to claim 1, comprising an elastic body that urges at least one of the frames in a direction in which a distance between the frames increases. 前記箔ヒータの上面に、金属製又はカーボン製のシート部材を、前記金属箔ヒータが埋設された部分を覆うように貼り付けた請求項1又は2に記載の加熱体。   The heating body according to claim 1 or 2, wherein a metal or carbon sheet member is attached to an upper surface of the foil heater so as to cover a portion where the metal foil heater is embedded. 前記シート部材が、表面をアルマイト処理及び/又は黒色塗装したアルミニウム製の薄板材である請求項3に記載の加熱体。   The heating body according to claim 3, wherein the sheet member is an aluminum thin plate whose surface is anodized and / or painted black. 前記内周フレームの内側に位置する前記箔ヒータの下面に、鏡面処理された金属製のシート部材を、前記金属箔ヒータが埋設された部分を覆うように貼り付けた請求項1〜4のいずれか1項に記載の加熱体。   Any one of Claims 1-4 which stuck the metal sheet | seat member by which the mirror surface process was carried out on the lower surface of the said foil heater located inside the said inner peripheral frame so that the part with which the said metal foil heater was embed | buried may be covered. The heating body according to claim 1. 前記樹脂フィルムがポリイミドからなる請求項1〜5のいずれか1項に記載の加熱体。   The heating body according to claim 1, wherein the resin film is made of polyimide.
JP2013153237A 2013-07-24 2013-07-24 Heating body Pending JP2015023018A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019021948A1 (en) * 2017-07-25 2019-01-31 株式会社フジキン Fluid control device

Citations (3)

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JPS5334150A (en) * 1976-07-06 1978-03-30 Rhone Poulenc Ind Heater radiating element
JP2002506279A (en) * 1998-03-05 2002-02-26 エフエスアイ インターナショナル インコーポレイテッド Heating / cooling device with low heat capacity, heat conductive heating plate
JP2004228334A (en) * 2003-01-23 2004-08-12 Komatsu Ltd Thermostat

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Publication number Priority date Publication date Assignee Title
JPS5334150A (en) * 1976-07-06 1978-03-30 Rhone Poulenc Ind Heater radiating element
JP2002506279A (en) * 1998-03-05 2002-02-26 エフエスアイ インターナショナル インコーポレイテッド Heating / cooling device with low heat capacity, heat conductive heating plate
JP2004228334A (en) * 2003-01-23 2004-08-12 Komatsu Ltd Thermostat

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019021948A1 (en) * 2017-07-25 2019-01-31 株式会社フジキン Fluid control device
TWI674330B (en) * 2017-07-25 2019-10-11 日商富士金股份有限公司 Fluid control device
KR20190140001A (en) * 2017-07-25 2019-12-18 가부시키가이샤 후지킨 Fluid control device
CN110914959A (en) * 2017-07-25 2020-03-24 株式会社富士金 Fluid control device
JPWO2019021948A1 (en) * 2017-07-25 2020-06-11 株式会社フジキン Fluid control device
KR102338026B1 (en) * 2017-07-25 2021-12-10 가부시키가이샤 후지킨 fluid control unit
JP7132631B2 (en) 2017-07-25 2022-09-07 株式会社フジキン Fluid control device

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