JP2014207320A - Liquid processing apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To reliably prevent liquid from splashing from a cup.SOLUTION: A liquid processing apparatus comprises: supports 70 for supporting a workpiece W: liquid supplying sections 41 and 51 for supplying liquids to the workpiece W supported by the supports 70: a cup 10 for surrounding the workpiece W supported by the supports 70: and a mesh member 15 arranged at an inner surface side of the cup 10. A plurality of projections 11 are arranged between the inner surface of the cup 10 and the mesh member 15 so as to form a predetermined space between the inner surface of the cup 10 and the mesh member 15.

Description

  The present invention relates to a liquid processing apparatus for processing a target object by supplying a liquid to the target object supported by a support portion.

  2. Description of the Related Art Conventionally, there is known a liquid processing apparatus configured to supply a processing liquid onto a substrate in a processing container and rotate the substrate so that the processing liquid is diffused on the substrate or shaken off from the substrate. In the liquid processing apparatus described in Patent Document 1, a mesh-like rebound suppressing body for suppressing the rebound of the processing liquid scattered from the substrate is provided inside the processing container.

  In this Patent Document 1, an appropriate support material that also serves as a spacer is sandwiched between the bounce suppression body and between the outer container and the bounce suppression body, and between the bounce suppression body and between the outer container and the bounce suppression body. It is disclosed that voids are formed between them.

JP 2000-150365 A

  However, Patent Document 1 only discloses that an appropriate support material serving as a spacer is sandwiched between the bounce suppression body and between the outer container and the bounce suppression body, and what kind of support material is used. There is no disclosure about whether or not. And in the content proposed by patent document 1, the liquid splash from a cup cannot fully be prevented.

  This invention is made | formed in view of such a point, and provides the liquid processing apparatus which can prevent the liquid splash from a cup more reliably.

The liquid processing apparatus according to the present invention comprises:
A support part for supporting the object to be processed;
A liquid supply unit for supplying a liquid to the object to be processed supported by the support unit;
A cup surrounding the object to be processed supported by the support part;
A mesh member provided on the inner surface side of the cup;
A plurality of convex portions provided between the inner surface of the cup and the mesh member, and forming a predetermined interval between the inner surface of the cup and the mesh member;
It has.

In the liquid processing apparatus according to the present invention,
The distance between the plurality of convex portions may be the same distance.

In the liquid processing apparatus according to the present invention,
The plurality of convex portions may be a plurality of linear protrusions.

In the liquid processing apparatus according to the present invention,
The plurality of convex portions may be a plurality of point-like projections.

In the liquid processing apparatus according to the present invention,
The apex portion of the convex shape portion may have a linear shape.

In the liquid processing apparatus according to the present invention,
The apex portion of the convex shape portion may have a surface shape.

In the liquid processing apparatus according to the present invention,
The apex portion of the convex shape portion may have a cone shape.

In the liquid processing apparatus according to the present invention,
The magnitude | size of the space | interval between the inner surface of the said cup and the said mesh member may be 0.3 mm-2.9 mm.

In the liquid processing apparatus according to the present invention,
An opening width of the mesh member may be 300 μm to 800 μm.

In the liquid processing apparatus according to the present invention,
The liquid includes a chemical solution,
The cup and the mesh member may be made of a hydrophobic material having chemical resistance.

  A plurality of convex portions are provided between the inner surface of the cup and the mesh member for forming a predetermined interval between the inner surface of the cup and the mesh member. For this reason, in this invention, a liquid can be penetrated between the inner surface of a cup and a mesh member. As a result, the liquid droplets flying to the cup can be captured between the inner surface of the cup and the mesh member, and liquid splash from the cup can be more reliably prevented.

FIG. 1 is a schematic front view showing a configuration around a cup of a substrate processing apparatus according to an embodiment of the present invention. FIG. 2 is a schematic configuration diagram showing the overall configuration of the substrate processing apparatus according to the embodiment of the present invention. FIG. 3 is an upper plan view showing the movement of the chemical liquid arm and the rinse liquid arm used in the embodiment of the present invention. FIG. 4A is a side cross-sectional view of a linear protrusion having an apex portion having a surface shape in the first aspect of the embodiment of the present invention, and FIG. It is an upper top view of protrusion. FIG. 5A is a side cross-sectional view of a point-like protrusion having a vertex shape in a surface shape in the second aspect of the embodiment of the present invention, and FIG. It is an upper top view of protrusion. FIG. 6A is a side cross-sectional view of a linear protrusion whose apex is linear in the first aspect of the embodiment of the present invention, and FIG. It is an upper top view of protrusion. FIG. 7A is a side cross-sectional view of a point-like protrusion having a vertex in a line shape in the second aspect of the embodiment of the present invention, and FIG. It is an upper top view of protrusion. FIG. 8A is a side cross-sectional view of a point-like protrusion having a vertex in a point shape in the second aspect of the embodiment of the present invention, and FIG. It is an upper top view of protrusion. FIG. 9A is a side cross-sectional view of a convex portion whose apex portion is a surface shape in the embodiment of the present invention, and FIG. 9B is a linear shape of the apex portion. FIG. 9C is a side cross-sectional view of the convex shape portion, and FIG. 9C is a side cross-sectional view of the convex shape portion having a point-like vertex. FIG. 10 is a side sectional view showing a state in which a liquid droplet falls between the mesh member and the inner surface of the cup.

First Embodiment << Configuration >>
Embodiments of a substrate processing apparatus according to the present invention (corresponding to “liquid processing apparatus” in claims) will be described below with reference to the drawings. Here, FIG. 1 to FIG. 10 are diagrams for explaining an embodiment of the present invention.

  As shown in FIG. 1, the substrate processing apparatus 100 of the present embodiment supports and holds a semiconductor wafer W (hereinafter referred to as “wafer W”) as an object to be processed (“Claims” in the claims). 70, a holding plate 72 provided with the holding portion 70, a driving shaft 73 extending downward from the center of the holding plate 72, a rotating portion 75 for rotating the driving shaft 73, and holding. A cup 10 surrounding the wafer W held by the unit 70 and a discharge unit 79 for discharging liquid such as a chemical solution and a rinse solution supplied toward the wafer W are provided. In addition, although demonstrated using the fixed cup 10 in this Embodiment, it is not restricted to such an aspect, For example, this invention may be applied to the rotating cup which self rotates. .

  When the rotating unit 75 rotates the drive shaft 73, the holding unit 70 is rotated together with the holding plate 72. As a result, the wafer W held by the holding unit 70 is rotated.

  As shown in FIG. 3, in the present embodiment, three holding units 70 provided at equal intervals are provided, and the wafer W is held by the holding units 70. FIG. 3 is an upper plan view showing the movement of the chemical liquid arm 47 and the rinsing liquid arm 57 used in the present embodiment.

  As shown in FIGS. 1 and 2, the substrate processing apparatus 100 according to the present embodiment includes a chemical solution supply unit 40 for supplying chemical solutions such as SC1, SC2, and sulfuric acid to the wafer W, and a pure solution for the wafer W. A rinsing liquid supply unit 50 for rinsing liquid such as water (DIW).

  As shown in FIGS. 1 and 3, the chemical solution supply unit 40 includes a chemical solution arm 47 that extends in the horizontal direction and can swing in the horizontal direction around the swing shaft 49, and downward from the tip of the chemical solution arm 47. And a chemical solution supply nozzle 46 that protrudes. The rinsing liquid supply unit 50 includes a rinsing liquid arm 57 that extends in the horizontal direction and can be swung in the horizontal direction around the rocking shaft 59, and a rinsing liquid supply nozzle that protrudes downward from the tip of the rinsing liquid arm 57. 56. The chemical solution supply nozzle 46 can be positioned above the approximate center of the wafer W held by the holding unit 70, and the rinse solution supply nozzle 56 can be positioned above the approximate center of the wafer W held by the holding unit 70. Can do.

  As shown in FIG. 2, the chemical solution supply unit 40 includes a chemical solution supply unit 41 that supplies the chemical solution to the wafer W held by the holding unit 70, and a chemical solution supply path 45 that guides the chemical solution supplied from the chemical solution supply unit 41. It is equipped with. The chemical liquid supply path 45 extends into the chemical liquid arm 47, and the chemical liquid that has passed through the chemical liquid supply path 45 is supplied from the chemical liquid supply nozzle 46 (see FIG. 1).

  Further, as shown in FIG. 2, the rinsing liquid supply unit 50 includes a rinsing liquid supply unit 51 that supplies a rinsing liquid to the wafer W held by the holding unit 70, and a rinsing liquid supplied from the rinsing liquid supply unit 51. And a rinsing liquid supply path 55 for guiding. The rinse liquid supply path 55 extends into the rinse liquid arm 57, and the rinse liquid that has passed through the rinse liquid supply path 55 is supplied from the rinse liquid nozzle 56 (see FIG. 1).

  Note that the liquid supply units 41 and 51 are configured by the chemical solution supply unit 41 and the rinse liquid supply unit 51 described above.

  As shown in FIG. 1, a mesh-like mesh member 15 is provided on the inner surface side of the cup 10 of the present embodiment. Also, as shown in FIGS. 4 (a) (b) to 8 (a) (b), a plurality of convex portions 11 (11a to 11e) are formed on the inner surface of the cup 10 of the present embodiment. In addition, a gap G is formed between the inner surface of the cup 10 and the mesh member 15 by the plurality of convex portions 11 (see FIGS. 9A to 9C). The size of the gap G is preferably 0.3 mm to 2.9 mm, more preferably 0.5 mm to 2.0 mm, and even more preferably 0.7 mm to 1.5 mm. Incidentally, the “inner surface” of the cup 10 means a surface located on the holding portion 70 side of the surface of the cup 10 (see FIG. 1).

  The opening width of the mesh member 15 is preferably 300 μm to 800 μm.

  The cup 10 of the present embodiment is made of a material having hydrophobicity and chemical resistance. An example of such a material is Teflon (registered trademark). Further, the mesh member 15 of the present embodiment can also be formed from a material having hydrophobicity and chemical resistance. As an example of such a material, Teflon (registered trademark) can also be mentioned.

  In the present embodiment, the plurality of convex portions 11 are arranged uniformly.

More specifically, according to the 1st aspect of this Embodiment, as shown in FIG.4 and FIG.6, each of the some convex-shaped part 11 becomes the linear protrusion 11a, 11c. Each of the linear protrusions 11 a and 11 c is arranged with a gap in the surface direction of the cup 10. It is sufficient that the gap G formed between the inner surface of the cup 10 and the mesh member 15 is open at a predetermined interval (details will be described later). More specifically, each of the linear protrusions 11a and 11c is the same. Preferably, the distance between the linear protrusions 11a and 11c is the same distance. That is, in the embodiment shown in FIG. 4 (a) (b), the same height each linear projection 11a has (see Fig. 9 (a)) and the same width _{W 1,} between the linear projections 11a interval is preferably has the same distance D _1. Similarly, in the embodiment shown in FIG. 6 (a) (b), each of the linear protrusion 11c have the same height (see FIG. 9 (b)) and the same width _{W 3,} between the linear protrusions 11c it is preferable that the intervals have the same distance D _3. By the way, the “linear protrusion” in the present embodiment means a portion that extends linearly within the surface of the cup 10 and protrudes from the inner surface of the cup 10.

Incidentally, if the distance between the linear protrusions 11a and 11c becomes too large, the mesh member 15 is bent, and the gap G cannot be maintained at a predetermined distance. Therefore, it is preferable that the distance _{D 1} is 40mm or less when the width _{W 1} of about 5mm, the distance _{D 3} if the width _{W 3} is approximately 5mm is preferably at 40mm or less.

  In the first aspect, the apex portions of the linear protrusions (convex shape portions) 11a and 11c may have a surface shape or a linear shape.

  As an example of an aspect in which the apex of the linear protrusion (convex shape part) 11a has a planar shape, the linear protrusion 11a extends in the surface direction (vertical direction in FIG. 4B), and the linear shape The protrusion 11a can be exemplified by a cross section obtained by cutting the protrusion 11a in the left-right direction in FIG. 4B in a quadrangle such as a square, a rectangle, or a trapezoid (the one shown in FIG. 4A is a rectangle).

  As an example of an aspect in which the apex portion of the linear protrusion (convex shape portion) 11c has a linear shape, the linear protrusion 11c extends in the surface direction (vertical direction in FIG. 6B), and the linear shape An example is one in which the cross section obtained by cutting the protrusion 11c in the left-right direction in FIG. 6B is a triangle (the one shown in FIG. 6A is an isosceles triangle).

According to the 2nd aspect of this Embodiment, each of the some convex-shaped part 11 becomes the dotted | punctate protrusion 11b, 11d, 11e. Each of the point-like protrusions 11 b, 11 d, and 11 e is arranged at an interval in the surface direction of the cup 10. The gap G formed between the inner surface of the cup 10 and the mesh member 15 only needs to be open at a predetermined interval. More specifically, each of the point-like protrusions 11b, 11d, and 11e has the same shape, and It is preferable that the distance between the point-like protrusions 11b, 11d, and 11e is the same distance. That is, in the embodiment shown in FIG. 5 (a) (b), the same height each point-like protrusion 11b has a (see Fig. 9 (a)) and the same width _{W 2,} between the point-like protrusions 11b interval is preferably has the same distance D _2. Similarly, in the embodiment shown in FIG. 7 (a) (b), the same height each point-like protrusion 11d (see FIG. 9 (b)) and have the same width _{W 4,} between the point-like protrusions 11d it is preferable that the intervals have the same distance D _4. Similarly, in the embodiment shown in FIG. 8 (a) (b), the same height each point-like protrusion 11e (see FIG. 9 (c)) and have the same width _{W 5,} between the point-like projections 11e it is preferable that the intervals have the same distance D _5. By the way, the “spot-like protrusion” in the present embodiment means a portion that is scattered in the surface of the cup 10 and protrudes from the inner surface of the cup 10.

Incidentally, if the interval between the linear protrusions 11b, 11d, and 11e becomes too large, the mesh member 15 is bent, and the gap G cannot be maintained at a predetermined interval. Therefore, it is preferable that the distance _{D 2} is 40mm or less when the width _{W 2} is about 5 mm, preferably the distance _{D 4} is 40mm or less when the width _{W 4} is about 5 mm, a width _{W 5} Is preferably about 5 mm, the distance D ₅ is preferably 40 mm or less.

  In the second mode as well, the apex portions of the dot-like projections (convex shape portions) 11b and 11d may be surface shapes or linear shapes. Moreover, the dotted | punctate protrusion (convex shape part) 11e may become a cone shape, and the vertex part of the dotted | punctate protrusion 11e may be a cone shape.

  As an example of the aspect in which the apex portion of the dot-like protrusion (convex shape part) 11b has a surface shape, the cross-section obtained by cutting the dot-like protrusion 11b in the horizontal direction or the vertical direction in FIG. Examples include a trapezoidal quadrangular shape (the rectangular shape shown in FIG. 5A).

  As an example of a mode in which the apex of the point-like protrusion (convex shape part) 11d has a linear shape, a cross section obtained by cutting the point-like protrusion 11d in the left-right direction in FIG. 7B is a triangle (FIG. 7A What is indicated by () is an isosceles triangle).

  As an example of the aspect in which the dot-like projections (convex shape portions) 11e have a conical shape, the one in which the dot-like projections 11e have a quadrangular pyramid can be cited. The cross section obtained by cutting the dot-like projection 11e in the horizontal direction or the vertical direction in FIG. 8B is a triangle (the one shown in FIG. 8A is an isosceles triangle).

《Action ・ Effect》
Next, the operation and effect of the present embodiment having the above-described configuration will be described.

  In the present embodiment, a plurality of convex shaped portions 11 are formed on the inner surface of the hydrophobic cup 10, and the plurality of convex shaped portions 11 cause gaps G between the inner surface of the cup 10 and the mesh member 15. Is formed. For this reason, liquid can enter between the inner surface of the cup 10 and the mesh member 15, and the liquid that has become liquid droplets by passing through the mesh member 15 is interposed between the inner surface of the cup 10 and the mesh member 15. It can be captured in a bridged state. Then, the captured droplet travels along the inner surface of the cup 10 and the mesh member 15 and falls below the cup 10 due to its own weight (see FIG. 10). As a result, liquid splash from the cup 10 to the wafer W can be more reliably prevented.

  That is, as a result of intensive studies by the inventors of the present application, even when the hydrophobic cup 10 is used, a plurality of convex portions 11 are formed on the inner surface of the cup 10 and a mesh is formed on the convex portions 11. It was found that the cup 10 can have hydrophilic properties by providing the member 15. This is because a plurality of convex-shaped portions 11 are formed on the inner surface of the cup 10 and a mesh member 15 is provided on the convex-shaped portion 11 so that liquid can enter between the inner surface of the cup 10 and the mesh member 15. This is because the liquid that has become liquid droplets by passing through the mesh member 15 can be captured while being bridged between the inner surface of the cup 10 and the mesh member 15. Then, the captured droplet travels along the inner surface of the cup 10 and the mesh member 15 and falls below the cup 10 due to its own weight (see FIG. 10). As a result, it is possible to more reliably prevent liquid splashes such as a chemical solution and a rinse solution from the cup 10 to the wafer W held by the holding unit 70.

  Further, when the mesh member 15 is made of a hydrophobic material, the droplets captured by the inner surface of the cup 10 and the mesh member 15 are likely to fall below the cup 10.

  In order to capture such droplets, a plurality of convex portions 11 are formed directly on the inner surface of the cup 10, and a predetermined interval is maintained between the inner surface of the cup 10 and the mesh member 15. It is an important point to reliably form the gap G between the inner surface of the cup 10 and the mesh member 15. Here, “predetermined to maintain a predetermined interval” refers to a state where droplets can be bridged between the inner surface of the cup 10 and the mesh member 15 and this interval is maintained over the entire inner surface of the cup 10. is there.

  In this regard, Patent Document 1 discloses that an appropriate support material that also serves as a spacer is sandwiched between the rebound suppressing body and between the outer container and the rebound suppressing body. However, Patent Document 1 only proposes that “an appropriate support material is sandwiched”, and does not describe anything about the fact that a plurality of convex portions 11 are formed on the inner surface of the hydrophobic cup 10. It is important to note that there is no such thing.

  By the way, if the purpose is to make the cup 10 hydrophilic, there may be an idea that the cup 10 may be manufactured from a hydrophilic material from the beginning. A hydrophilic material having chemical properties could not be found. For this reason, in this Embodiment, it demonstrates on the assumption that the cup 10 consisting of a hydrophobic material is used. However, the present invention is not limited to this, and it is naturally possible to use the cup 10 made of a hydrophilic material. In addition, since the magnitude | size of the space | interval which can bridge | drop a droplet between the inner surface of the cup 10 and the mesh member 15 changes with wettability of the cup 10 and the mesh member 15 with respect to a liquid, the cup 10 consisting of a hydrophilic material is used. In this case, it is necessary to determine the size of the convex portion after considering the wettability of the cup 10 and the mesh member 15 with respect to the liquid.

  Moreover, in this Embodiment, each of the some convex-shaped part 11 is the same shape, and the space | interval is arrange | positioned at the same distance. For this reason, the gap G maintaining a predetermined interval can be more reliably formed between the inner surface of the cup 10 and the mesh member 15. As a result, droplets can be captured and liquid splash from the cup 10 can be prevented without unevenness.

  That is, if the gap G is not maintained at a predetermined interval, a portion where the inner surface of the cup 10 and the mesh member 15 cannot capture the droplet may occur. If the gap G is at such an interval that the droplet cannot be captured, the droplet adheres to either the mesh member 15 or the cup inner surface 10. As a result, the liquid droplets are easily separated from the mesh member 15 or the inner surface of the cup and cause liquid splash. In this regard, in the present embodiment, since each of the plurality of convex-shaped portions 11 has the same shape and is spaced at the same distance, it is possible to form a gap G that maintains a predetermined distance, The droplets can be captured without unevenness between the inner surface of the cup 10 and the mesh member 15. For this reason, the liquid splash from the cup 10 can be prevented evenly.

  According to the first embodiment in which each of the plurality of convex portions 11 is a linear protrusion 11a, 11c (see FIGS. 4A, 4B and 6A, 6B), the mesh member 15 is used. This is advantageous in that it is difficult to bend toward the inner surface side of the cup 10 and the gap G between the inner surface of the cup 10 and the mesh member 15 can be easily maintained at a predetermined interval. Then, by maintaining the gap G between the inner surface of the cup 10 and the mesh member 15 at a predetermined distance as described above, the droplets can be captured between the inner surface of the cup 10 and the mesh member 15, and the cup The liquid splash from 10 can be prevented evenly.

  In the linear protrusion 11c whose apex portion is linear in this first aspect (see FIGS. 6A and 6B), the contact area between the linear protrusion 11c and the mesh member 15 can be reduced, Liquid droplets are easily guided between the mesh member 15 and the cup 10. As a result, it is useful in terms of preventing liquid splashing from the cup 10.

  On the other hand, in the linear protrusion 11a whose apex portion has a surface shape (see FIGS. 4A and 4B), the contact area between the linear protrusion 11a and the mesh member 15 is increased, but the mesh member 15 is a cup. 10, the gap G between the inner surface of the cup 10 and the mesh member 15 can be easily maintained at a predetermined interval, and thus liquid splash from the cup 10 can be prevented more uniformly. .

  According to the second mode in which each of the plurality of convex-shaped portions 11 is a point-like protrusion 11b, 11d, 11e (FIGS. 5A, 5B, 7A, 7B, and 8). a) (see (b)), the contact area between the convex portion 11 and the mesh member 15 can be significantly reduced as compared with that of the first embodiment, and the liquid droplets between the mesh member 15 and the cup 10 can be reduced. It is much easier to guide in between. As a result, according to such an aspect, it is beneficial in that liquid splash from the cup 10 can be prevented.

  In addition, in the point-like protrusion 11e having a cone shape and a point-like vertex (see FIGS. 8A and 8B), the contact area between the point-like protrusion 11e and the mesh member 15 can be further reduced. It is easier to guide the liquid droplet between the mesh member 15 and the cup 10. As a result, it can be expected that the liquid splash from the cup 10 is further reliably prevented.

  However, in the point-like protrusion 11 e having a point-like vertex, the vertex of the point-like protrusion 11 e may enter the hole of the mesh member 15. When the apex of the dot-like protrusion 11e enters the hole of the mesh member 15 in this way, the contact area between the dot-like protrusion 11e and the mesh member 15 increases, and the inner surface of the cup 10 and the mesh member 15 It is not preferable because the gap G cannot be kept at a predetermined interval.

  In this regard, in the point-like protrusion 11d having a linear apex (see FIGS. 7A and 7B), the contact area between the point-like protrusion 11d and the mesh member 15 is reduced, and the point-like protrusion 11d has a linear shape. The possibility that the apex portion enters the hole of the mesh member 15 is also low. For this reason, in the point-like protrusion 11d whose apex portion has a linear shape, liquid droplets are efficiently guided between the mesh member 15 and the cup 10, and the inner surface of the cup 10 By keeping the gap G between the mesh member 15 and the mesh member 15 at a predetermined interval, it is possible to achieve a well-balanced prevention of liquid splashing from the cup 10 without unevenness.

  In addition, in the case where importance is placed on keeping the gap G between the inner surface of the cup 10 and the mesh member 15 at a predetermined distance, a point-like protrusion 11b whose apex portion has a surface shape may be employed (see FIG. 5 (a) (b)). In this case, the contact area between the dot-like projections 11b and the mesh member 15 is somewhat increased, but the gap G between the inner surface of the cup 10 and the mesh member 15 is maintained at a predetermined distance from the cup 10. It is possible to more surely prevent liquid splashing evenly. In this aspect, even if the contact area between the dot-like projections 11b and the mesh member 15 increases, the contact area is small compared to the first aspect, and the liquid droplets are meshed compared to the first aspect. It should be noted that it can be efficiently guided between the member 15 and the cup 10.

  As described above, according to the second aspect, the liquid droplets can be efficiently guided between the mesh member 15 and the cup 10 as compared with the first aspect. According to the second aspect, the gap G between the inner surface of the cup 10 and the mesh member 15 can be more reliably maintained at a predetermined interval as compared with the second mode. Thus, it should be noted that each of the first aspect and the second aspect has an inherent advantage.

  The gap G between the inner surface of the cup 10 and the mesh member 15 is preferably 0.3 mm to 2.9 mm, more preferably 0.5 mm to 2.0 mm, and even more preferably 0.7 mm to 1. 0.5 mm (see FIGS. 9A to 9C). If the gap G between the inner surface of the cup 10 and the mesh member 15 is smaller than 0.3 mm, droplets cannot enter between the inner surface of the cup 10 and the mesh member 15, and liquid splash from the cup 10 occurs. It cannot be prevented. On the other hand, if the gap G between the inner surface of the cup 10 and the mesh member 15 is larger than 2.9 mm, the droplets attached to the mesh member 15 cannot contact the inner surface of the cup 10. It becomes difficult for droplets to be captured.

  From this point of view, when the wafer W is processed with a hydrophilic liquid, the mesh member 15 is preferably made of a hydrophobic material. That is, when the liquid for processing the wafer W is hydrophilic and the mesh member 15 is made of a hydrophobic material, the liquid droplets spread toward the inner surface of the cup 10 so as to escape from the mesh member 15. This is because it becomes easier to capture the droplets in the gap G.

  Moreover, it is preferable that the mesh width of the mesh member 15 is 300 μm to 800 μm.

  If the opening width of the mesh member 15 is smaller than 300 μm, droplets cannot enter between the inner surface of the cup 10 and the mesh member 15 or the rate at which the droplets enter becomes slow. Liquid splash cannot be prevented. Further, in a mode in which the mesh member 15 has a narrow mesh opening width as described above, when the droplets fly in the direction along the inner surface of the cup 10, the droplets slide on the surface of the mesh member 15, It will still cause liquid splashes.

  On the other hand, if the mesh member 15 has a mesh opening width greater than 800 μm, even if the inner surface of the cup 10 and the mesh member 15 can capture the droplet, the area of the mesh member 15 that holds the droplet is small. It becomes easy to splash liquid.

  On the other hand, when the opening width of the mesh member 15 is 300 μm to 800 μm, the droplets easily enter between the inner surface of the cup 10 and the mesh member 15, and the droplets are easily captured. Further, the liquid droplets that have entered between the inner surface of the cup 10 and the mesh member 15 can be moderately pressed by the mesh member 15, so that it is difficult for the liquid to splash to the wafer W side.

  In the present embodiment, the plurality of convex portions 11 are formed on the inner surface of the cup 10, but it is only necessary to maintain a predetermined distance between the inner surface of the cup 10 and the mesh member 15. The convex portion 11 may be formed.

  Lastly, the description of the above-described embodiment, the description of each example, and the disclosure of the drawings are merely examples for explaining the invention described in the claims, and the description of the above-described embodiment. The invention described in the scope of claims is not limited by the disclosure of the description or the drawings.

10 Cup 11a Linear protrusion (convex shape part)
11b Dot protrusion (convex shape)
11c Linear protrusion (convex shape)
11d Dot protrusion (convex shape)
11e Point-like protrusion (convex shape)
15 Mesh member 41 Chemical liquid supply part (liquid supply part)
51 Rinse solution supply unit (liquid supply unit)
70 Holding part (support part)
G gap

Claims (10)

A support part for supporting the object to be processed;
A liquid supply unit for supplying a liquid to the object to be processed supported by the support unit;
A cup surrounding the object to be processed supported by the support part;
A mesh member provided on the inner surface side of the cup;
A plurality of convex portions provided between the inner surface of the cup and the mesh member, and forming a predetermined interval between the inner surface of the cup and the mesh member;
A liquid processing apparatus comprising:   The liquid processing apparatus according to claim 1, wherein an interval between the plurality of convex portions is the same distance.   The liquid processing apparatus according to claim 1, wherein the plurality of convex portions are a plurality of linear protrusions.   The liquid processing apparatus according to claim 1, wherein the plurality of convex-shaped portions are a plurality of point-like protrusions.   5. The liquid processing apparatus according to claim 1, wherein an apex portion of the convex shape portion has a linear shape.   5. The liquid processing apparatus according to claim 1, wherein an apex portion of the convex portion has a planar shape.   The liquid processing apparatus according to claim 1, wherein an apex portion of the convex shape portion has a conical shape.   The size of an interval between the inner surface of the cup and the mesh member is 0.3 mm to 2.9 mm, according to any one of claims 1 to 7, The liquid processing apparatus as described.   9. The liquid processing apparatus according to claim 1, wherein an opening width of the mesh member is 300 μm to 800 μm. The liquid includes a chemical solution,
The liquid processing apparatus according to claim 1, wherein the cup and the mesh member are made of a hydrophobic material having chemical resistance.

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