JP2014191969A - Observation device for observing form of stress application region of film-like specimen, and observation jig - Google Patents

Abstract

PROBLEM TO BE SOLVED: To more easily observe a form of a stress application region in the case where a local stress is applied to a film-like specimen.SOLUTION: An observation device for observing a form of a stress application region of a film-like specimen SPC comprises: a microscope; a base 210 disposed within a preset distance from an objective lens of the microscope; a height adjusting screw 220 which is provided in the base 210 closer to the objective lens and extends in an optical axis direction; a specimen holder 230 in which a screw hole 232 is provided into which the height adjusting screw 220 can be threaded and which penetrates the holder in an optical axis direction, and the specimen SPC is fixed over the screw hole 232; and a blade holder 242 in which a blade 244 is provided for locally applying a stress to the specimen SPC and which is configured to be abutted to the height adjusting screw 220 closer to the objective lens. A distance between an end of the height adjusting screw 220 closer to the objective lens and the base 210 is kept constant.

Description

  The present invention relates to a technique for observing the form of a stress application region of a film-like sample, and particularly to a technique for observing the form of a stress application region using a microscope.

  When a local stress is applied to the polymer material, cracks (crazing) including molecular orientation chains may occur. Such a craze has a structure including continuous pores. In particular, it is known that when craze is generated in a film-like polymer material (polymer film), the craze penetrates the polymer film and a void penetrating the film is formed.

  FIG. 7 is an explanatory view showing a crazing process for forming a craze on the polymer film PFM. FIG. 7A shows a schematic configuration of a crazing processing apparatus 900 for performing crazing processing. The crazing processing apparatus 900 includes a holding roller 910 that winds and holds the polymer film PFM, a first guide roller 920, a blade 930 having a sharp edge at the tip 932, and a second guide roller 940. have. The polymer film PFM supplied from the holding roller 910 comes into contact with the tip 932 of the blade 930 disposed between the two guide rollers 920 and 940. When a weight is applied to the polymer film PFM as shown by the arrow and the polymer film PFM is pulled out, local stress is applied to the linear region in contact with the tip 932 of the blade 930, and the polymer film PFM is applied to the polymer film PFM. Crazes are formed.

  FIG. 7B shows a state in which crazes are formed on the polymer film PFM. As described above, local stress is applied to the linear region in contact with the tip 932 of the blade 930 of the polymer film PFM (stress concentration). Thus, when stress concentrates, craze CR1 is produced | generated on the surface on the opposite side to the braid | blade 930 of the polymer film PFM (craze production | generation). The generated craze CR1 expands in the direction of the blade 930, and a penetrated craze CR2 is formed (craze penetration). When the craze CR2 penetrates, the polymer film PFM extends by the length of the craze CR2. Therefore, the tension applied to the polymer film PFM is reduced, and the stress applied to the polymer film PFM is reduced, so that a region without craze is formed. When the polymer film PFM moves, local stress is applied to the polymer film PFM (stress concentration).

  As shown in FIG. 7, craze CR2 is periodically formed on the polymer film PFM (craze film) that has been subjected to craze treatment. In this way, by using the technology of periodically forming the craze CR2 on the polymer film PFM, the transparent polymer film has a visual field selection function (see Patent Document 1), or the polymer film has gas permeability. It has been proposed to use it for generation of microbubbles and nanobubbles (hereinafter collectively referred to as “microbubbles”) (Patent Document 2).

  When microbubbles are used in various applications, it is desirable to generate microbubbles having a more appropriate size according to the application. When generating microbubbles of an appropriate size using a craze film, it is important to control the fine structure of the craze, such as the diameter of the voids in the craze. It is required to understand the phenomenon that occurs in Japan more accurately.

  By the way, in order to grasp the phenomenon related to the fine structure, the occurrence position of the fine structure is enlarged and observed using an electron microscope or the like. For example, Patent Document 3 describes a technique in which a structure is observed by performing a tensile test of a material in a sample chamber of an SEM. Specifically, it is described that when a material test is performed on a sample in an SEM and observed, a bending load is applied to the test piece without shifting the observation position, and a tensile stress is generated on the surface of the test piece.

JP 2011-99053 A JP 2011-168748 A JP 2012-3929 A

  However, when bending load is applied in the technique described in Patent Document 3, the height of the sample at the observation position changes. Therefore, it is necessary to readjust the focus each time the bending load applied to the sample is changed. In particular, when local stress is applied to a film-like sample as in the case of generating crazing, since the change in the height of the sample becomes large, there is a possibility that the time required for readjustment of the focal point or the like may become long. is there.

  The present invention has been made to solve the above-described conventional problems, and makes it possible to more easily observe the form of a stress application region when a local stress is applied to a film sample. With the goal.

  In order to achieve at least a part of the above object, the present invention can be realized as the following forms or application examples.

[Application Example 1]
An observation apparatus for observing the form of a stress application region of the film sample when a stress is locally applied to the film sample, the microscope for magnifying the stress application region, and the microscope A base disposed at a predetermined distance from the objective lens of the microscope in the optical axis direction, a height adjustment screw provided on the objective lens side of the base and extending in the optical axis direction, and the height adjustment In order to apply a stress locally to the film holder, a sample holder in which a screw can be screwed and a screw hole penetrating in the optical axis direction is provided and the film sample is fixed so as to straddle the screw hole A blade holder provided on the objective lens side and configured to come into contact with the objective lens side of the height adjustment screw, and the height adjustment screw Serial distance between the base and the objective lens side end is kept constant, the observation device.

  According to this application example, even when the stress applied to the film sample is changed, the distance (working distance) between the stress application region of the film sample and the objective lens can be maintained constant. Therefore, it is possible to observe the form of the stress application area without re-adjusting the focal point, the optical axis, etc. due to the change in the working distance. It becomes possible to do.

[Application Example 2]
The observation apparatus according to application example 1, wherein a center axis of the height adjusting screw coincides with an optical axis of the microscope, and a tip of the blade intersects the optical axis.

  By making the center axis of the height adjusting screw coincide with the optical axis of the microscope and making the tip of the blade intersect the optical axis, it becomes easier to observe the same position on the sample.

[Application Example 3]
The observation apparatus according to Application Example 1 or 2, further including a rotation mechanism that rotates the height adjustment screw and the sample holder relative to each other about a central axis of the height adjustment screw.

  By rotating the height adjustment screw and the sample holder relative to each other using the rotation mechanism, the stress applied to the sample can be adjusted while observing. It becomes possible to grasp more accurately.

[Application Example 4]
The observation apparatus according to any one of application examples 1 to 3, wherein the microscope is a scanning electron microscope, and the film-like sample is a polymer film.

  The craze generated in the stress application region of the polymer film has a fine structure. Such a fine structure may be damaged by long-time electron beam irradiation, but according to this application example, readjustment of the focus and optical axis performed in the state of electron beam irradiation is omitted. Therefore, the form of the craze generated in the polymer film can be observed more accurately.

  Note that the present invention can be realized in various modes. For example, it can be realized in an aspect such as an observation apparatus, an observation jig used in the observation apparatus, an observation method using the observation apparatus or the observation jig, or the like.

Explanatory drawing which shows schematic structure of the observation system of the craze form to which 1st Embodiment is applied. Explanatory drawing which shows the structure of the observation jig | tool in 1st Embodiment. Explanatory drawing which shows the positional relationship of the sample and lens-barrel at the time of observing the generation | occurrence | production process of a craze. The SEM photograph which shows the result of having observed the morphological change of the craze using the observation jig | tool of 1st Embodiment. Explanatory drawing which shows the structure of the observation jig | tool in 2nd Embodiment. Explanatory drawing which shows the structure of the observation jig | tool in 3rd Embodiment. Explanatory drawing which shows the craze process which forms a craze in a polymer film.

Embodiments of the present invention will be described in the following order.
A. First embodiment:
A1. Configuration of observation device:
A2. Observation jig configuration:
A3. Example of the first embodiment:
B. Second embodiment:
C. Third embodiment:
D. Variations:

A1. Configuration of observation device:
FIG. 1 is an explanatory diagram showing a schematic configuration of a crazing-type observation system OBS to which the first embodiment is applied. The observation system OBS includes a scanning electron microscope (SEM) 100 for magnifying and observing a generation part of a craze, and an observation jig 200 that holds a polymer film as a sample SPC and generates a craze.

  The SEM 100 includes a sample chamber 110, a lens barrel 120, a secondary electron detector 130, and a sample stage 140. The lens barrel 120 incorporates an electron beam optical system having an electron beam source, a focusing lens, a scanning coil, and an objective lens (all not shown). The sample stage 140 has a drive mechanism 142 and a mount 144. The drive mechanism 142 has a function of moving the mount 144 in each of the X, Y, and Z directions, or rotating the mount 144 around the optical axis of the electron beam optical system (the optical axis of the SEM 100) indicated by a one-dot chain line. . As can be seen from FIG. 1, the + Z direction is the direction in which the lens barrel 120 with the objective lens incorporated is disposed when viewed from the observation jig 200, and therefore the + Z direction side of the observation jig 200 is the objective. It can also be called the lens side. Moreover, since the Z direction is a direction parallel to the optical axis of the electron beam optical system or the optical axis of the SEM 100, it can also be called the optical axis direction.

  The observation jig 200 includes a base 210, a height adjustment screw 220 fixedly attached to the base 210, and a sample holder 230 attached to the height adjustment screw 220. A specific configuration of the observation jig 200 and a method for attaching the sample SPC will be described later. Although not shown, the base 210 is configured to be able to maintain a fixed positional relationship with the mount 144 by fitting with the mount 144. Further, by fitting the base 210 to the mount 144, the sample SPC attached to the sample holder 230 can be moved in accordance with the movement of the mount 144.

  Normally, in the SEM 100, when the observation jig 200 is unloaded from the sample chamber 110 and loaded into the sample chamber 110, it is necessary to move the mount 144 to a predetermined position. However, in the SEM 100, the position of the mount 144 can be stored in advance, and the mount 144 can be moved to the position. Therefore, by storing the position of the mount 144 before the observation jig 200 is unloaded, the position of the mount 144 and the position of the base 210 can be made the same before and after the observation jig 200 is unloaded.

  The electron beam EB emitted through the objective lens arranged at the lower end (−Z direction end) of the lens barrel 120 is focused by the objective lens and irradiated onto the sample SPC. The secondary electron detector 130 detects secondary electrons emitted from the sample SPC when irradiated with the electron beam EB. By scanning the electron beam EB in the X and Y directions with the scanning coil and moving the irradiation position of the electron beam EB, it becomes possible to observe the form of the craze generated in the sample SPC as the strength of the secondary electrons. .

A2. Observation jig configuration:
FIG. 2 is a cross-sectional view showing the configuration of the observation jig 200 in the first embodiment. 2A is a top view of the observation jig 200 viewed from the + Z direction (that is, the lens barrel 120 side), and FIG. 2B is a cross-sectional view of the observation jig 200 on the AA plane. is there. In FIG. 2A, the base 210 is not shown for convenience. The observation jig 200 includes a base 210, a height adjustment screw 220, a sample holder 230, a blade holder 242 and a blade 244, a pressing plate 292, and a set screw 294.

  As shown in FIG. 2B, the base 210 is provided with a screw hole 212 that penetrates the center portion in the Z direction. The lower end (−Z direction end) of the height adjustment screw 220 is screwed into the screw hole 212 of the base 210. The height adjusting screw 220 is fixed to the base 210 by tightening with a lock nut (not shown). Thereby, the height of the upper end (+ Z direction end) of the height adjusting screw 220 with respect to the base 210 is maintained constant. The height adjustment screw 220 is fixed by being screwed into a screw hole 212 provided at the lower end of the base 210 and penetrating in the Z direction. It can be said that it is provided on the side) and extends in the Z direction.

  The sample holder 230 has a screw hole 232 that penetrates the center in the Z direction, and a recess 234 formed on the upper surface side (+ Z direction side). The upper end of the height adjustment screw 220 is screwed into a screw hole 232 that passes through the sample holder 230. Unlike the base 210 and the height adjustment screw 220, the sample holder 230 and the height adjustment screw 220 are maintained in a relatively rotatable state. In FIG. 2, the sample holder 230 is illustrated as a substantially cylindrical member, but the shape of the sample holder 230 can be variously changed.

  A blade holder 242 with a blade 244 attached to the upper end side (+ Z direction side) is inserted into the screw hole 232 of the sample holder 230 from the upper surface side. When the lower end of the blade holder 242 and the upper end of the height adjusting screw 220 are in contact (contact), the height of the tip (+ Z direction end) of the blade 244 relative to the base 210 is maintained constant.

  The sample SPC (polymer film) is fixed to the sample holder 230 so as to straddle the screw hole 232 by using a holding plate 292 and a set screw 294 arranged on the upper surface side of the sample holder 230. By rotating the sample holder 230 so that the height adjusting screw 220 is screwed in a state where the sample SPC fixed to the sample holder 230 is in contact with the tip of the blade 244, local stress is applied to the sample SPC. Thereby, craze is generated in the sample SPC (polymer film).

  In the example of FIG. 2, a cylindrical blade holder 242 is used, and relative rotation between the blade holder 242 and the sample holder 230 is not restricted. However, when the sample SPC is in contact with the tip of the blade 244, torque is applied from the sample SPC to the blade 244, so the blade 244 rotates with the rotation of the sample holder 230. However, a mechanism for restricting relative rotation between the blade holder 242 (or the blade 244) and the sample holder 230 may be provided. In this case, for example, a notch may be provided on the upper end side of the blade holder 242, and a member that contacts the notch may be disposed in the recess 234 of the sample holder 230.

  FIG. 3 is an explanatory diagram showing the positional relationship between the sample SPC (polymer film) and the lens barrel 120 when observing the form of the craze. As described above, when the sample holder 230 is rotated so that the height adjusting screw 220 is screwed in as indicated by an arrow, local stress is applied to the sample SPC by the blade 244, and craze is generated in the sample SPC. At this time, the height of the tip of the blade 244 relative to the base 210 is kept constant. Further, as described above, since the position of the base 210 can be set to a position set in advance before the observation jig 200 is carried in and out, the observation jig 200 is used to increase the stress applied to the sample SPC. Even when carried in and out, the positional relationship between the base 210 and the lens barrel 120 can be made the same. Therefore, the distance WD (referred to as “working distance” or “working distance”) between the objective lens (not shown) arranged at the lower end of the lens barrel 120 and the sample SPC can be maintained constant.

  As described above, in the first embodiment, the working distance WD is kept constant even when the stress applied to the sample SPC is sequentially increased. As a result, it is possible to observe the form of the craze generated in the sample SPC without performing readjustment of the focal point, the optical axis, etc. accompanying the change in the working distance WD, so that the change in the form of the craze accompanying the change in the stress It becomes possible to observe easily.

  In addition, the fine structure of the craze generated in the polymer film may be damaged by long-time electron beam irradiation. On the other hand, in the first embodiment, since readjustment of the focal point and the optical axis performed in the state irradiated with the electron beam can be omitted, the form of the craze generated in the polymer film can be observed more accurately. Is possible.

  In the example of FIG. 3, the optical axis of the electron optical system indicated by the broken line and the center axis of the height adjusting screw 220 are made coincident with each other, and the optical axis of the electron optical system and the tip of the blade 244 are crossed. In this case, even when the sample holder 230 is rotated, the observation position does not move if the base 210 is rotated in the direction opposite to the rotation direction of the sample holder 230. Even when the base 210 is not rotated, the amount of movement of the observation position near the optical axis accompanying the rotation of the sample holder 230 is small. Therefore, it becomes easier to observe the same position on the sample SPC. However, the optical axis of the electron optical system and the center axis of the height adjusting screw 220 do not necessarily coincide with each other, and the optical axis of the electron optical system and the tip of the blade 244 do not necessarily intersect. Even in these cases, since the same position can be observed by moving the mount 144 in the X and Y directions, the working distance WD is kept constant, and readjustment of the focus, the optical axis, and the like can be omitted.

A3. Example of the first embodiment:
FIG. 4 is an SEM photograph showing a result of observing a change in the shape of the craze using the observation jig 200 (FIG. 2) of the first embodiment. In this example, a polypropylene film (PP film) was used as the sample SPC, and the manner in which the shape of the craze changed at the same position was observed by sequentially increasing the stress.

  In this example, first, a sample SPC (PP film) was attached to the sample holder 230, and then the sample holder 230 was rotated to apply a small stress to the PP film. And the observation jig | tool 200 was carried in to the sample chamber 110 of SEM100 (FIG. 1), and the craze form in the state with a small stress was observed. After the observation, the observation jig 200 was unloaded from the sample chamber 110 of the SEM 100, and the sample holder 230 was rotated to increase the stress applied to the PP film. And the observation jig | tool 200 was carried in to the sample chamber 110, and the craze form observation was performed.

  FIG. 4A shows the form of the craze in a state where the stress is small, that is, in the initial stage of craze generation. As shown to Fig.4 (a), when the stress was small, the PP film was cracked, and it was confirmed that the polypropylene fibers were elongated in the crack.

  FIG.4 (b) has shown the form of the craze in the state which enlarged the stress added to PP film. As shown in FIG. 4B, it was confirmed that by increasing the stress applied to the PP film, the polypropylene fibers in the cracks were stretched and narrowed.

  Thus, by using the observation jig 200 shown in the first embodiment, it is possible to suppress damage to the fine structure of the craze caused by the electron beam irradiation, and to clearly grasp the change in the shape of the craze accompanying the increase in stress. I was able to.

B. Second embodiment:
FIG. 5 is an explanatory diagram showing the configuration of the observation jig 200a in the second embodiment. In addition, since the shape seen from the upper surface side (+ Z direction side) of the observation jig 200a is the same as that of the observation jig 200 in 1st Embodiment, the illustration is abbreviate | omitted.

  The observation jig 200a in the second embodiment includes a base 210, a height adjustment screw 220, a sample holder 230a, a blade holder 242, a blade 244, a pressing plate 292, and a set screw 294 (not shown). And a rotation mechanism 250a. The rotation mechanism 250a in the second embodiment includes a guide rod 252a and a rotation drive unit 254a.

  The sample holder 230a is different from the sample holder 230 in the first embodiment in that a rod hole 236a for inserting the guide rod 252a is provided. Other points are the same as those of the sample holder 230 in the first embodiment. The rod hole 236a has an inner diameter slightly larger than the outer shape of the guide rod 252a so that the sample holder 230a can move in the Z direction.

  The rotation drive unit 254a has a lower end (−Z direction end) fixed to the base 210 and an upper end (+ Z direction end) fixed to the guide rod 252a. The rotation drive unit 254a is a mechanism that rotates the guide rod 252a around the center axis of the height adjustment screw 220 (hereinafter, also simply referred to as “center axis”). The rotation drive unit 254a that rotates the guide rod 252a can be configured by a combination of a worm and a worm wheel to which a motor is attached, or a known mechanism such as a coreless motor.

  When the guide rod 252a rotates about the central axis, the sample holder 230a rotates with the rotation of the guide rod 252a, and the sample holder 230a moves in the Z direction. Thereby, in 2nd Embodiment, it becomes possible to adjust the stress added to sample SPC.

  As in the second embodiment, the observation jig 200a is provided with a rotation drive unit 254a, and the sample holder 230a is rotated by a guide rod 252a fixed to the rotation drive unit 254a, whereby the observation jig 200b is carried in and out. It is possible to adjust the stress applied to the sample SPC without any problems. Therefore, it is possible to adjust the stress applied to the sample SPC while observing, and observe in-situ changes in the shape of the craze accompanying the increase in the stress applied to the sample SPC. On the other hand, the first embodiment is preferable to the second embodiment in that the configuration of the observation jig 200 is simpler.

C. Third embodiment:
FIG. 6 is an explanatory diagram showing the configuration of the observation jig 200b in the third embodiment. In addition, since the shape seen from the upper surface side (+ Z direction side) of the observation jig 200b is the same as that of the observation jig 200 in 1st Embodiment, the illustration is abbreviate | omitted.

  The observation jig 200b according to the third embodiment is different from the second embodiment in that the base 210b, the height adjusting screw 220b, and the rotation mechanism 250b configured by the guide rod 252b and the rotation drive unit 254b are different. It is different from the observation jig 200a of the form. Other points are the same as in the second embodiment.

  The base 210b in the third embodiment is different from the base 210 in the first and second embodiments in that the screw hole 212 is omitted and a rod hole 214b for inserting the guide rod 252b is provided. Is different. The lower end (−Z direction end) of the guide rod 252b longer than the guide rod 252a of the second embodiment is fixedly inserted into the rod hole 214b. Then, the rotation of the sample holder 230a relative to the base 210b is restricted by inserting the upper end (+ Z direction end) of the guide rod 252b into the rod hole 236a of the sample holder 230a.

  The rotation drive unit 254b according to the third embodiment has a lower end (−Z direction end) fixed to the base 210b and an inner surface fixed to the lower end (−Z direction end) side of the height adjustment screw 220b. The rotation drive unit 254b is a mechanism that rotates the height adjustment screw 220b around its central axis. Therefore, even when the height adjustment screw 220b is rotated, the height based on the base 210b at the upper end of the height adjustment screw 220b is kept constant. The rotation drive unit 254b can be configured as a general motor. As is apparent from FIG. 6, the height adjusting screw 220b in the third embodiment is also provided on the upper surface side (+ Z direction side) of the base 210b and extends in the Z direction.

  In the third embodiment, since the rotation of the sample holder 230a relative to the base 210b is restricted, when the height adjusting screw 220b rotates around the central axis, the sample holder 230a moves in the Z direction along with the rotation. Thereby, in 3rd Embodiment, it becomes possible to adjust the stress added to the sample SPC.

  Also in the third embodiment, the rotation jig 254b is provided in the observation jig 200b, and the height adjustment screw 220b fixed to the rotation drive section 254b is rotated, so that the sample is not carried in and out of the observation jig 200b. It is possible to adjust the stress applied to the SPC. Therefore, it is possible to adjust the stress applied to the sample SPC while observing, and observe in-situ changes in the shape of the craze accompanying the increase in the stress applied to the sample SPC. On the other hand, the first embodiment is preferable to the third embodiment in that the configuration of the observation jig 200 is simpler.

D. Variations:
The present invention is not limited to the above-described embodiments and examples, and can be carried out in various modes without departing from the gist thereof. For example, the following modifications are possible.

D1. Modification 1:
In each of the above embodiments and examples, the present invention is applied, and a polymer film typified by a polypropylene film is used as a sample SPC, and a region where craze is generated, that is, a region where stress is locally applied (stress The present invention is applied to the observation of the stress application region in various film samples such as a metal foil or a composite film of a metal and a polymer material if the sample is a film sample. Can do. Even in these cases, by applying the present invention, the height of the stress application region with respect to the bases 210 and 210b can be kept constant. It becomes possible to observe more easily.

D2. Modification 2:
In the second and third embodiments, the guide rods 252a and 252b are used to rotate or restrict the rotation of the sample holder 230a. In general, the sample holder 230a is movable in the Z direction. It is only necessary to be able to rotate or restrict rotation. For example, instead of the guide rods 252a and 252b, a cylindrical or bellows-like member can be used.

DESCRIPTION OF SYMBOLS 110 ... Sample chamber 120 ... Barrel 130 ... Secondary electron detector 140 ... Sample stage 142 ... Drive mechanism 144 ... Mount 200, 200a, 200b ... Observation jig 210, 210b ... Base 212 ... Screw hole 214b ... Rod hole 220, 220b ... Height adjusting screw 230, 230a ... Sample holder 232 ... Screw hole 234 ... Recess 236a ... Rod hole 242 ... Blade holder 244 ... Blade 250a, 250b ... Rotation mechanism 252a, 252b ... Guide rod 254a, 254b ... Rotation drive unit 292 ... Presser plate 294 ... Set screw 900 ... Craze treatment device 910 ... Holding roller 920 ... Guide roller 930 ... Blade 932 ... Tip 940 ... Guide roller CR1 ... Craze CR2 ... Craze EB ... Electron beam OBS ... Observation system PFM ... Polymer Irumu SPC ... sample

Claims (5)

An observation device for observing the form of the stress application region of the film-like sample when stress is locally applied to the film-like sample,
A microscope for magnifying the stress application region;
A base disposed at a distance from the objective lens of the microscope set in advance in the optical axis direction of the microscope;
A height adjusting screw provided on the objective lens side of the base and extending in the optical axis direction;
A screw holder through which the height adjusting screw can be screwed and penetrating in the optical axis direction; a sample holder to which the film-like sample is fixed so as to straddle the screw hole;
A blade holder configured to abut on the objective lens side of the height adjustment screw, a blade for locally applying a stress to the film sample is provided on the objective lens side;
With
The distance between the objective lens side end of the height adjusting screw and the base is kept constant;
Observation device. The central axis of the height adjustment screw coincides with the optical axis of the microscope,
The tip of the blade intersects the optical axis,
The observation apparatus according to claim 1. The observation device according to claim 1, further comprising:
A rotation mechanism for rotating the height adjustment screw and the sample holder relative to each other about a center axis of the height adjustment screw;
Observation device. The microscope is a scanning electron microscope,
The film sample is a polymer film,
The observation apparatus according to claim 1. An observation jig for observing the form of the stress application region of the film sample when a stress is locally applied to the film sample using a microscope,
A base configured to be arranged at a distance from the objective lens of the microscope set in advance in the optical axis direction of the microscope;
A height adjusting screw provided on the objective lens side of the base and extending in the optical axis direction;
A screw holder through which the height adjusting screw can be screwed and penetrating in the optical axis direction; a sample holder to which the film-like sample is fixed so as to straddle the screw hole;
A blade holder configured to abut on the objective lens side of the height adjustment screw, a blade for locally applying a stress to the film sample is provided on the objective lens side;
With
The distance between the objective lens side end of the height adjusting screw and the base is kept constant;
Observation jig.