JP2014099425A - Inspection apparatus, inspection method, manufacturing method, and manufacturing system for thin-film solar cell - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an inspection apparatus for thin-film solar cell, capable of identifying a failed insulation position when inspecting insulation performance of the thin-film solar cell.SOLUTION: The inspection apparatus for thin-film solar cell includes: a voltage application section 8; a current detection section 9; traveling mechanisms 711, 712; and terminals divided into a plurality of individual terminals 611, 612, each of which has a traveling mechanism, and brings each of the individual terminals into contact.

Description

  The present invention relates to a thin film solar cell inspection device, a thin film solar cell inspection method, a thin film solar cell manufacturing method, and a thin film solar cell manufacturing system.

  A thin film solar cell generates an electromotive force between a positive electrode and a negative electrode of a photoelectric conversion element by making light such as sunlight enter a photoelectric conversion element using a semiconductor material. Thin film solar cell modules are often installed outdoors, and insulation performance between the photoelectric conversion element and other members is required so that leakage does not occur even if it is struck by rain. In the present application, a thin film solar cell indicates a structure having at least a transparent electrode layer, a semiconductor layer, and a back electrode layer on a substrate, and a photoelectric conversion element includes a transparent electrode layer, a semiconductor layer, and a back electrode. The element which consists of layers is shown. The thin film solar cell module indicates a state where the thin film solar cell is sealed.

  When manufacturing a thin film solar cell module in which a metal frame is attached to the periphery of a thin film solar cell, according to IEC 61730, which is one of the standards, for example, when a system voltage is 1000 V, an insulating portion of 8.4 mm or more is photoelectrically generated. It is specified that it must be provided between the conversion element part and the metal frame.

  Japanese Patent Laid-Open No. 2008-109041 (Patent Document 1) shows a general structure of a thin film solar cell. FIG. 26 shows a plan view of the thin film solar cell, and FIG. 27 shows an enlarged sectional view of the vicinity of the end of the thin film solar cell. A thin-film solar cell 1000 disclosed in Patent Document 1 has a structure in which a region 1021 (an insulating portion in Patent Document 1) where the insulating substrate is exposed at the peripheral edge of the insulating substrate 1002 exists. As a method for forming the region 1021 where the insulating substrate is exposed, a transparent electrode layer 1003, a semiconductor layer 1004, and a back electrode layer 1005 are formed over the insulating substrate 1002, and then the transparent electrode layer 1003, the semiconductor layer 1004, and A method of exposing an insulating substrate by removing a part of the back electrode layer 1005 is disclosed. The region 1021 where the insulating substrate is exposed is a portion that becomes a part of the insulating portion between the photoelectric conversion element portion and the metal frame when the thin film solar cell module is manufactured, and originally exists on the insulating substrate. However, in reality, some material residue may be present even if each layer is removed by laser light. If there is a residue, when it is a solar cell module, sufficient insulation performance cannot be obtained between the photoelectric conversion element and a member such as a metal frame.

  As described above, it is not sufficient for the thin-film solar cell module to provide an insulating portion in design, and it is necessary to actually inspect and confirm the insulating performance. It is better to inspect the insulation performance earlier in the manufacturing process and find the nonconforming product than to measure the insulation performance after mounting the metal frame around the thin film solar cell and find the nonconforming product. This is desirable. This is because the non-conforming product does not need to be subjected to subsequent manufacturing processes.

  Japanese Patent Laid-Open No. 2005-236051 (Patent Document 2) is an example of a method for inspecting insulation performance before a metal frame is attached to a thin film solar cell. In a method for inspecting a thin film solar cell module (photoelectric conversion panel in Patent Document 2) in which a transparent support substrate, a photoelectric conversion element, and a moisture-proof sheet obtained by sandwiching a metal thin film with a resin thin film are stacked in this order. And the inspection method which performs the test | inspection of the insulation performance of a thin film solar cell module by inspecting the insulation performance between the circuit of a photoelectric conversion element, and the metal thin film of a moisture-proof sheet is disclosed. If this method is used, a nonconforming product can be found before the metal frame is attached to the thin film solar cell. Since the insulation performance is measured by using the metal thin film in the moisture-proof sheet covering the photoelectric conversion element and the photoelectric conversion panel as an electrode material, it is easy to inspect the insulation performance for the entire surface of the solar cell module body. And can be done quickly.

JP 2008-109041 A Japanese Patent Application Laid-Open No. 2005-236051

  However, the conventional method for inspecting the insulation performance of the entire surface only measures the whole surface, so it is possible to determine whether or not there is a defective insulation part, but the approximate position of the defective insulation part is not known. there were.

  This invention is made | formed in view of said problem, The objective is to specify the location of an insulation defect part in the test | inspection of the insulation performance of the peripheral part of a thin film solar cell.

  In order to solve the above-described problems, a thin film solar cell inspection apparatus, a thin film solar cell inspection method, a thin film solar cell manufacturing method, and a thin film solar cell manufacturing system according to the present invention employ the following means.

  That is, the inspection apparatus for a thin film solar cell according to the present invention includes a thin film solar cell in which a transparent electrode layer, a semiconductor layer, and a back electrode layer are stacked on an insulating substrate, and the insulating substrate is exposed at the peripheral edge of the insulating substrate. A first terminal that comes into contact with at least one of the transparent electrode layer or the back electrode layer, a second terminal that comes into contact with at least one of the region where the insulating substrate is exposed or the outer peripheral edge of the insulating substrate, A voltage application unit that applies a voltage between the terminal and the second terminal; a current detection unit that detects a current flowing between the first terminal and the second terminal; and a moving mechanism, and the first terminal or the second terminal At least one is divided into a plurality of individual terminals, and the moving mechanism moves the individual terminals.

  In addition to the first terminal and the second terminal, the inspection apparatus for a thin-film solar cell according to the present invention is between the place where the first terminal abuts and the place where the second terminal abuts, in the region where the insulating substrate is exposed. A third terminal that abuts, a voltage application unit that applies a voltage between two terminals selected from the first terminal, the second terminal, and the third terminal; and a current that flows between the terminals to which the voltage is applied A current detection unit for detection and a moving mechanism are provided, the third terminal is divided into a plurality of individual terminals, and the moving mechanism moves each of the individual terminals.

  In the thin-film solar cell inspection apparatus according to the present invention, the individual terminals are divided for each side of the insulating substrate.

  In the thin-film solar cell inspection apparatus according to the present invention, at least one of the first terminal, the second terminal, and the third terminal is divided into a plurality of portions in the length direction of at least one side of the insulating substrate. It is what.

The method for inspecting a thin-film solar cell according to the present invention includes a first terminal that contacts at least one of the transparent electrode layer and the back electrode layer, and a first terminal that contacts at least one of the region where the insulating substrate is exposed or the outer peripheral edge of the insulating substrate. It has two terminals, at least one of the first terminal and the second terminal is divided into a plurality of individual terminals, each moved by a moving mechanism,
An abutting process for abutting one of the individual terminals, an abutting process for abutting a terminal corresponding to the abutted terminal, and an insulation performance inspection process for inspecting the insulation performance between the abutted terminals It is what you have.

  In addition to the first terminal and the second terminal, the method for inspecting a thin-film solar cell according to the present invention is between the place where the first terminal abuts and the place where the second terminal abuts, in the region where the insulating substrate is exposed. A third terminal that abuts is provided. The third terminal is divided into a plurality of individual terminals, and each of the third terminals is moved by a moving mechanism. A contact process for contacting the first terminal or the second terminal, and an insulation performance test process for testing the insulation performance between the contacted terminals.

  The method for inspecting a thin-film solar cell according to the present invention includes a contact step for contacting all the individual terminals, a contact step for contacting the terminals corresponding to the individual terminals, and an inspection of insulation performance between the contacted terminals. The insulation performance inspection process to be performed, the inspection result is compared with a reference value held in advance, a determination process for determining whether or not the individual terminals are brought into contact individually, and the individual terminals are individually applied according to the result of the determination process. It has the contact process to contact.

  The method for manufacturing a thin-film solar cell according to the present invention includes an inspection step of performing inspection by the thin-film solar cell inspection method according to the present invention.

  The method for manufacturing a thin-film solar cell according to the present invention includes a defective insulation cause removing step performed based on the result of the inspection step.

A thin-film solar cell manufacturing system according to the present invention includes a thin-film solar cell inspection apparatus according to the present invention, and an insulation failure cause that removes an insulation failure cause present in a region where the insulating substrate is exposed at the peripheral portion of the insulating substrate. A thin film solar cell manufacturing system including a removing device,
Based on the inspection information from the inspection device, the control unit of the defective insulation cause removing device controls the processing unit.

  According to the said structure, in the test | inspection of the insulation performance of the peripheral part of the insulating substrate of a thin film solar cell, there exists an effect that the location with an insulation defect part can be specified.

It is a figure which shows the inspection apparatus of the thin film solar cell in the 1st Embodiment of this invention. It is the figure which looked at the terminal of the thin film solar cell and inspection device in a 1st embodiment of the present invention from the upper part of an inspection device. It is a figure which shows the combination of the terminal to which the voltage is applied of the inspection apparatus of the thin film solar cell in the 1st Embodiment of this invention. It is the other example of the inspection apparatus of the thin film solar cell in the 1st Embodiment of this invention, Comprising: It is the figure which looked at the terminal of the thin film solar cell and the inspection apparatus from the upper direction of the inspection apparatus. It is a figure which shows the other example of the test | inspection apparatus of the thin film solar cell in the 1st Embodiment of this invention. It is a figure which shows the other example of the test | inspection apparatus of the thin film solar cell in the 1st Embodiment of this invention. It is a figure which shows the test | inspection apparatus of the thin film solar cell in the 2nd Embodiment of this invention. It is the figure which looked at the terminal of the thin film solar cell and inspection apparatus in the 2nd Embodiment of this invention from the upper direction of the inspection apparatus. It is the other example of the inspection apparatus of the thin film solar cell in the 2nd Embodiment of this invention, Comprising: It is the figure which looked at the terminal of the thin film solar cell and the inspection apparatus from the upper direction of the inspection apparatus. It is a figure which shows the inspection apparatus of the thin film solar cell in the 3rd Embodiment of this invention. It is the figure which looked at the terminal of the thin film solar cell and inspection apparatus in the 3rd Embodiment of this invention from the upper direction of the inspection apparatus. It is a figure which shows the combination of the terminal to which the voltage is applied of the inspection apparatus of the thin film solar cell in the 3rd Embodiment of this invention. It is the other example of the inspection apparatus of the thin film solar cell in the 3rd Embodiment of this invention, Comprising: It is the figure which looked at the terminal of the thin film solar cell and the inspection apparatus from the upper direction of the inspection apparatus. It is a figure which shows the other example of the terminal of the inspection apparatus of the thin film solar cell of this invention. It is a figure which shows the other example of the terminal of the inspection apparatus of the thin film solar cell of this invention. It is a figure which shows the other example of the terminal of the inspection apparatus of the thin film solar cell of this invention. It is a figure which shows the other example of the inspection apparatus of the thin film solar cell of this invention. It is a figure which shows the other example of the test | inspection apparatus of the thin film solar cell of this invention, (a) is a figure which shows the case where the 2nd terminal is contact | abutted from the end surface of an insulated substrate, (b) is a figure of an insulated substrate. It is a figure which shows the case where it is made to contact | abut from the main surface. It is a figure which shows the other example of the inspection apparatus of the thin film solar cell of this invention. It is a figure which shows the other example of the inspection apparatus of the thin film solar cell of this invention. It is a figure which shows the test process of the thin film solar cell in the 4th Embodiment of this invention. It is a figure which shows the other example of the test process of the thin film solar cell in the 4th Embodiment of this invention. It is a figure which shows the test | inspection process of the thin film solar cell in the 5th Embodiment of this invention. It is a figure which shows the manufacturing process of the thin film solar cell in the 6th Embodiment of this invention. It is a figure which shows the manufacturing system of the thin film solar cell in the 6th Embodiment of this invention. It is a top view of the thin film solar cell based on a prior art. It is an expanded sectional view of the outer periphery insulation area | region of the thin film solar cell based on a prior art.

[First Embodiment]
The thin film solar cell inspection apparatus of the present invention will be described below with reference to the drawings.

  FIG. 1 is an explanatory view of a thin-film solar cell inspection apparatus according to this embodiment. The thin-film solar cell inspection device according to the present embodiment is an inspection device for inspecting the thin-film solar cell 100 for the insulating performance of the region 21 where the insulating substrate is exposed. The thin film solar cell 100 includes an insulating substrate 2 having a main surface 2s, and a photoelectric conversion element including a transparent electrode layer 3, a semiconductor layer 4, and a back electrode layer 5 sequentially stacked on the main surface 2s of the insulating substrate 2. In addition, in the peripheral portion of the insulating substrate 2, the insulating substrate 2 has a region 21 where the main surface 2 s is exposed.

  The inspection apparatus includes first terminals 611 and 612 that are a plurality of individual terminals for contacting the back surface electrode layer 5, a second terminal 62 for contacting the outer peripheral edge of the insulating substrate, a first terminal 611, 612 flows through the moving mechanisms 711 and 712, the voltage applying unit 8 for applying a voltage between the first terminal and the second terminal, and the two terminals to which the voltage is applied by the voltage applying unit 8. And a current detection unit 9 for detecting current. The outer peripheral edge of the insulating substrate is the end surface of the insulating substrate. The moving mechanism is a mechanism for bringing a terminal and an inspection object into contact with or apart from each other, and does not represent only a case where the terminal moves in a vertical direction with respect to the main surface 2s of the substrate, but includes a case where the terminal and the inspection object move with an angle.

  When the first terminal 611 that is one of the individual terminals is in contact with the back electrode layer 5, the first terminal 612 that is another individual terminal is separated and the first terminal 612 is in contact with the back electrode layer 5. When moving, the moving mechanisms 711 and 712 are used so that the first terminal 611 is separated. That is, there are two first terminals, but there is one first terminal that is in contact with the back electrode layer 5 when a voltage is applied. In addition, the voltage application part 8 and the electric current detection part 9 in FIG. 1 are shown typically. There may be two voltage application units 8 and current detection units 9 corresponding to the first terminals 611 and 612, respectively, and one voltage application unit 8 and current detection unit 9 may be divided into conductive wires. And may be connected to both of the two first terminals. It is desirable to share it because the parts of the inspection apparatus can be reduced and the cost of the apparatus can be reduced.

  FIG. 2 is a schematic plan view of the thin film solar cell and the terminals of the inspection device as viewed from above the inspection device. The first terminal for contacting the back electrode layer is composed of two terminals, a first terminal 611 and a first terminal 612, and the second terminal 62 for contacting the outer peripheral edge of the insulating substrate is insulated. It is integrally formed along the outer peripheral edge of the substrate. FIG. 1 corresponds to a cross section taken along the line AA ′ in FIG. The distance t1 between the first terminal 611 and the second terminal 62 is about 12 mm.

  The region where the insulating substrate is exposed is divided into 211 and 212, which is not separated on the actual insulating substrate. In order to explain the effect of this embodiment later, the insulating substrate is isolated. The area where the substrate is exposed is shown separately.

  The moving mechanism may also be attached to the second terminal 62. By providing the moving mechanism on the second terminal 62, the second terminal can be brought into contact with the outer peripheral edge of the insulating substrate from the back electrode layer side of the thin film solar cell. The second terminal may be provided with a mechanism that moves to the left and right so as to contact the outer peripheral edge of the insulating substrate from the end surface side of the substrate.

  FIG. 3 shows an explanatory diagram of combinations of different terminals to which a voltage is applied. Similar to FIG. 1, a cross section taken along the line AA ′ in FIG. 2 corresponds to FIG. 3. By bringing either the first terminal 611 or 612 into contact with the back electrode 5, the voltage application unit 8 can apply a voltage to the combinations C1 and C2. This inspection apparatus applies a voltage between the first terminal 611 and the second terminal 62, or between the first terminal 612 and the second terminal 62, and detects the current flowing between the two terminals, thereby insulating performance. Can be inspected. That is, since the first terminal is not an integrated object but is divided into two parts, it is specified which of the regions 211 and 212 where the peripheral insulating substrate shown in FIG. can do.

  In FIG. 4, the top view at the time of seeing the terminal of the thin film solar cell which is a modification of 1st Embodiment, and an inspection apparatus from the upper direction of an inspection apparatus is shown. Unlike FIG. 2, the first terminal is divided into four corresponding to the number of sides. Each of the first terminals 613, 614, 615, and 616, which are individual terminals, has a moving mechanism, so that the insulation performance can be inspected for each side. By using such a thin-film solar cell inspection device, it is possible to specify which side of the region where the insulating substrate is exposed has the defective insulation portion.

  The more finely divided the terminal, the more accurately the location where insulation is insufficient can be identified.However, the inspection equipment is also complicated, so considering the balance between the two, It is desirable to have an inspection device that can identify For example, in the case of a triangular thin film solar cell, the first terminal is desirably divided into three. In other words, the terminal is desirably divided into the number of sides corresponding to each side of the insulating substrate.

  FIG. 5 shows a modification of the first embodiment. Although the same thin-film solar cell inspection apparatus as that of FIG. 1 is used, an example is shown in which the second terminal 62a abuts on the main surface 2s of the region 21 where the insulating substrate at the peripheral edge of the insulating substrate is exposed. The first terminal 617 contacts the transparent electrode layer 3 by the moving mechanism 717 as in FIG. Since the distance between the first terminal 617 and the second terminal 62a can be shortened by bringing the second terminal 62a into contact with the main surface 2s of the insulating substrate 2, the insulation performance can be measured more accurately. Become.

  FIG. 6 shows a modification of the first embodiment. Although the same thin-film solar cell inspection apparatus as that in FIG. 1 is used, an example in which the first terminal 618 contacts the transparent electrode layer 3 by the moving mechanism 718 is shown. It differs from the example shown so far in that the transparent electrode layer 3 of the thin film solar cell protrudes to the outer peripheral side from the photoelectric conversion layer 4 and the back electrode layer 5. The other points are the same, and the same action and effect can be obtained even when the first terminal 618 is brought into contact with the transparent electrode layer 3. Since the first terminal only needs to be electrically connected to the photoelectric conversion element, the first terminal may be in contact with either the transparent electrode layer or the back electrode layer. In other words, at least a part of the first terminal only needs to be in contact with the electrode of the thin film solar cell.

  In the case of a thin film solar cell having a structure in which the transparent electrode layer protrudes from the semiconductor layer and the back electrode layer in the peripheral portion, the distance between the first terminal and the second terminal is shorter when the first terminal is in contact with the transparent electrode layer. Therefore, it can measure with high accuracy. Moreover, if a load is applied to the back electrode layer, the semiconductor layer of the photoelectric conversion element may be scratched, and a short circuit may occur between the transparent electrode layer and the back electrode layer. In order to avoid a short circuit, it is desirable to contact the terminal with the transparent electrode layer.

If the transparent electrode layer does not have a protruding structure on all sides as the structure of the thin film solar cell, the first terminal is brought into contact with the transparent electrode layer on the protruding structure, and the rest It is good to make it contact | abut to a back surface electrode layer in the edge | side. This is because the semiconductor layer of the photoelectric conversion element is scratched and a short circuit between the transparent electrode layer and the back electrode layer can be avoided.
The thin-film solar cell to be inspected does not necessarily have to be completed as a photoelectric conversion element in which all of the transparent electrode layer, the semiconductor layer, and the back electrode layer are formed. Good. The same applies to other embodiments.

[Second Embodiment]
Another example of the thin-film solar cell inspection apparatus of the present invention is described below with reference to the drawings. The difference from the first embodiment is that the first terminal is an integral type, the second terminal is divided, and has a moving function.

  FIG. 7 shows an explanatory diagram in the case where a thin film solar cell is inspected by an inspection apparatus having second terminals 621 and 622 which are a plurality of individual terminals, and each of the individual terminals has a moving mechanism 721 and 722. . The first terminal 61 is an integral type.

  FIG. 8 is an explanatory diagram when the terminals of the inspection apparatus for the thin-film solar cell in FIG. 7 are viewed from above the inspection apparatus. The BB ′ cross section in FIG. 8 corresponds to FIG. The difference from the first embodiment is only the type of terminal to be divided, and the actions and effects are the same. Moreover, even if both the first terminal and the second terminal are divided, the operation and effect are the same.

  In FIG. 9, the top view at the time of seeing the terminal of the thin film solar cell which is a modification of 2nd Embodiment, and an inspection apparatus from the upper side of an inspection apparatus is shown. The second terminal is divided into four corresponding to the number of sides. Each of the second terminals 623, 624, 625, and 626, which are a plurality of individual terminals, has a moving mechanism, so that the insulation performance can be inspected for each side.

  Further, the difference from the example described with reference to FIG. 4 in the first embodiment is only whether the divided terminal is the first terminal or the second terminal, and has been described with reference to FIG. The same action and effect as the case. Therefore, the terminal of the inspection apparatus divided into the number of sides corresponding to each side of the insulating substrate of the thin-film solar cell may be either the first terminal or the second terminal, and both the first terminal and the second terminal. But you can.

[Third Embodiment]
Another example of the thin-film solar cell inspection apparatus according to the present invention will be described below with reference to the drawings. The difference from the first embodiment is that the first terminal and the second terminal are integrated, the third terminal is provided, and the third terminal is divided into a plurality of individual terminals, each having a moving mechanism. is there.

  In FIG. 10, explanatory drawing of the inspection apparatus of the thin film solar cell which concerns on this embodiment is shown.

The inspection apparatus includes a first terminal 61 for contacting the back electrode layer 5, a second terminal 62 for contacting the outer peripheral edge of the insulating substrate, and an individual terminal contacting the region 21 where the insulating substrate is exposed. The third terminals 631 and 632, the moving mechanisms 731 and 732 that move the third terminals 631 and 632, the voltage application unit 81, and the current detection unit 91 that detects the current flowing between the terminals. The voltage application unit 81 applies a voltage between two terminals selected from a total of four terminals, three types of first terminal 61, second terminal 62, third terminal 631, and third terminal 632. To do.
When the third terminal 631 is in contact with the region 21 where the insulating substrate is exposed, the third terminal 632 moves away, and when the third terminal 632 is in contact, the third terminal 631 moves away. Mechanisms 731 and 732 are used. A movement mechanism may be attached to each or both of the first terminal 61 and the second terminal 62. In addition, the voltage application part 81 and the electric current detection part 91 in FIG. 10 are shown typically.

  In FIG. 11, the top view at the time of seeing the terminal of a thin film solar cell and an inspection apparatus from the upper side of an inspection apparatus is shown. The third terminal that contacts the region 21 where the insulating substrate is exposed is divided into a third terminal 631 and a third terminal 632, and the first terminal 61 and the second terminal 62 are integrated. The distance t2 between the first terminal 61 and the third terminal 631 is 5 mm, and the distance t3 between the third terminal 631 and the second terminal 62 is 6 mm. The width of the third terminal 631 is 1 mm. FIG. 10 corresponds to a cross section taken along the line CC ′ in FIG.

  Only one of the third terminal 631 and the third terminal 632 is brought into contact with the region 21 where the insulating substrate is exposed, so that it is possible to know which part of the peripheral portion of the insulating substrate has the defective insulation portion.

  FIG. 12 is an explanatory diagram of combinations of terminals to which voltages are applied. By bringing either the third terminal 631 or 632 into contact with the region 21, the voltage application unit 81 can apply a voltage to the combinations C1, C2, C3, C2 ′, and C3 ′. Although it is desirable to apply a voltage to all of these terminal combinations and measure the current, this is not a requirement.

  By applying a voltage to both C1 and C2 in order, it is possible to specify the location of the defective insulation portion more finely. In addition, by performing C3, a more detailed inspection can be performed, and the accuracy of the insulation inspection can be increased. In addition, when it is not necessary to inspect the entire periphery of the substrate, such as when it is possible to predict a place where sufficient insulation cannot be obtained, or when a place where insulation inspection is performed is determined, a terminal used for measurement may be selected. .

  Although FIG. 11 shows the case where the third terminal is divided into two from the rectangular frame, it may be divided into four corresponding to each side of the insulating substrate. By being divided corresponding to each side, it is possible to specify the location where the defective insulation portion exists, and it is possible to efficiently remove the defective insulation portion.

  FIG. 13 shows a modification of the third embodiment. The third terminal of the thin-film solar cell inspection device is divided into a plurality of individual terminals, and a plurality of third terminals exist in parallel to each side. There are a total of eight third terminals 634a, 634b, 635a, 635b, 636a, 636b, 637a, and 637b, two in parallel with each side. The first terminal 61 and the second terminal 62 are integrated. The distance t4 between the first terminal 61 and the third terminal 634a was 3 mm, the distance t5 between the third terminal 634a and the third terminal 634b was 3 mm, and the distance t6 between the third terminal 634b and the second terminal 62 was 4 mm. The width of the third terminal is 1 mm.

  As the number of third terminals existing in parallel to each side is increased within the range allowed by the width of the region where the insulating substrate is exposed at the peripheral edge of the substrate, the location with insufficient insulation performance is more accurately identified. be able to. However, if the number of the third terminals is increased too much, the structure of the inspection apparatus becomes complicated, so about two are preferable.

  In the third embodiment, the case where the third terminal moves has been described. However, either or both of the first terminal and the second terminal may be individually divided to have a moving mechanism. A common moving mechanism may be provided so that the first terminal and the third terminal can be moved simultaneously. By sharing, the apparatus structure is simplified, the apparatus cost can be reduced, and the effect of reducing the apparatus maintenance load can be obtained.

  Hereinafter, terminal division examples and shape examples that can be applied to the first to third embodiments will be described.

  FIG. 14 to FIG. 16 show examples of division of the first terminal, the second terminal, and the third terminal. These examples can be used in any of the first to third embodiments.

  As shown in FIGS. 14 and 15, the terminals may be divided into two or four in each side. 14 and 15 exemplify a form in which the terminals are divided into the same number on all sides, but the present invention is not limited to this, and the terminals on each side are divided into different numbers. Also good.

  Moreover, as shown in FIG. 16, cylindrical terminals may be arranged. The terminal may be a prism instead of a cylinder. Further, the terminals do not have to have the same shape along all the sides of the substrate, and a combination of the examples shown so far may be used.

  If the terminals are finely divided from rectangular frame-shaped terminals and each has a moving mechanism, the location of the poorly-insulated part is further removed at the peripheral edge of the insulating substrate of the thin-film solar cell. Can be specified in detail.

  As an example, in a situation where a side where insulation performance is not sufficiently obtained is predicted, it is also possible to further specify the insulation failure portion in detail using only the terminals corresponding to that side finely divided. . By identifying the location of the defective insulation portion, it is possible to estimate in which process the problem occurs, and thus it is possible to identify the cause of the occurrence of a defect in the manufacturing process.

  In FIG. 17, the first terminal is divided into the number of individual terminals corresponding to each side, and the second terminal is divided in structure, but when it is brought into contact with the insulating substrate An explanatory view when the terminals are in contact with each other is shown. Any of the first to third embodiments can be used.

  The first terminals 619a, 619b, 619c, and 619d and the second terminals 629a, 629b, 629c, and 629d exist so as to correspond to the respective sides. In the first embodiment, the difference from the example shown in FIG. 4 is that the second terminal is divided into four in terms of structure. However, when all four terminals are in contact with the insulating substrate, they are adjacent to each other. This is the point where the terminals to be in contact with each other. By having a divided structure, it is easier to maintain than a single terminal, and even if the terminal is damaged, it is possible to cope with part replacement.

  In FIG. 17, the case of the second terminal has been described. However, the first terminal may be the contact between adjacent terminals when the two terminals are in contact with each other, or both the first terminal and the second terminal. Good.

  18 (a) and 18 (b), the location where the second terminal abuts when the end portion of the insulating substrate 2 of the thin-film solar cell has a semicircular shape will be described. It can be used in any of the first to third embodiments.

  When the second terminal 627 is brought into contact with the insulating substrate 2 with respect to the substrate having a semicircular end, the second terminal 628 is brought into contact with the end surface of the insulating substrate 2 as shown in FIG. By making contact, it is possible to reliably contact the true end. On the other hand, as shown in FIG. 18B, when the second terminal 627 is brought into contact with the main surface of the insulating substrate 2, the main surface 2s must be brought into contact with a flat portion. The distance D is measured on the inner side from the true end.

  18A and 18B show the case where the end portion of the insulating substrate has a semicircular shape, but it is not limited to the semicircular shape. For example, in the case of a thin film solar cell, a glass substrate is often used as the insulating substrate, and in that case, the end portion is chamfered from the viewpoint of safety in the manufacturing process. In the case of using a chamfered glass substrate, it is desirable that the second terminal abuts from the side as shown in FIG. 18A from the viewpoint that it can surely abut the true end.

If the thin-film solar cell is in an ideal state, there should be no conductivity on the end face of the insulating substrate. However, in the process of forming the transparent electrode layer and the back electrode layer, a conductive film may be laminated on the substrate end face. More specifically, a metal layer made of Ag, Al, or the like used as a back electrode layer that wraps around the end face of the insulating substrate when SnO ₂ is generally used as a transparent electrode layer of a thin film solar cell. There is a wraparound during the formation of a transparent conductive film such as ZnO that may be formed between the semiconductor layer and the metal layer. From the viewpoint of measuring the insulation performance more accurately including the state of the end face, it is desirable that the second terminal is brought into contact with the side face.

  In addition, since the position of the insulating substrate can be stabilized by bringing the second terminal into contact with the end surface of the insulating substrate from the side surface, there is no need to separately prepare a member for fixing the substrate. The effect of cost reduction can also be obtained.

  FIG. 19 shows an example of the shape of the terminal. It can be used in the first embodiment and the second embodiment.

  The inspection terminal may have a different shape for the first terminal and the second terminal. For example, as shown in FIG. 19, the first terminal 619e may have a rod shape, and the second terminal 629e may have a plate shape that extends long. As a first terminal, a rod-shaped one is brought into contact with the back electrode from a direction perpendicular to the main surface 2s of the substrate, and as a second terminal, a long extending plate-like shape arranged in parallel with each side of the insulating substrate. A plurality of terminals are arranged along each side of the insulating substrate of the thin-film solar cell, and are in contact with the insulating substrate from the side.

  Since the first terminal is in contact with the electrode of the thin-film solar cell, electrical connection is sufficiently possible even if the terminal is in the form of a bar. . In addition, the second terminal has a long plate-like shape, which has the effect of increasing the measurement accuracy of the inspection and measurement of the insulation performance, and by bringing the second terminal into contact with the insulating substrate from the side, Since the board fixing member is not necessary, the number of parts of the inspection apparatus can be reduced.

  FIG. 20 shows examples of terminal shapes. It can be used in the third embodiment.

  The first terminal 619f has a rod shape, and the second terminal 629f and the third terminals 638a and 638b have a plate shape extending long. By making the third terminal into a plate-like shape extending long, it becomes possible to measure with higher accuracy. This is because the third terminal has a higher possibility of coming into contact with a cause of poor insulation that causes a decrease in insulation as the area in contact with the region where the insulating substrate is exposed is larger. The first terminal 619f is brought into contact with the back electrode layer 5 of the thin film solar cell from the direction perpendicular to the surface of the insulating substrate, the second terminal 629f is brought into contact with the end surface of the insulating substrate from the side, and 638a and 638b are brought into contact with the surface of the insulating substrate. It is made to contact | abut to the area | region 21 where the insulated substrate of a board | substrate periphery is exposed from the perpendicular | vertical direction.

  Although a part of the description is omitted in FIG. 20, a total of eight pieces are arranged for each side as the first terminal, and the board is divided into four pieces so as to correspond to each side as the second terminal. A total of four plate-like terminals are arranged, and a total of eight plate-like terminals divided into four pieces corresponding to each side are arranged as third terminals, two in parallel with each side. By arranging the terminals in this way, it is possible to measure with high accuracy while preventing the cost of the apparatus from being increased.

[Fourth Embodiment]
An inspection method using the inspection apparatus according to the first or second embodiment of the present invention will be described below with reference to the drawings.

  FIG. 21 shows a flow chart of a method for inspecting a thin-film solar cell in the present embodiment. The method for inspecting a thin film solar cell according to the present embodiment is an inspection method for inspecting the insulating performance of the insulating portion at the peripheral edge of the substrate with respect to the thin film solar cell and identifying a location where insulation is insufficient.

  As shown in FIG. 21, at least one of the first terminals is brought into contact with the electrode layer of the thin-film solar cell (S1 represents a step; the same applies hereinafter), and the second terminal is placed on the outer peripheral edge of the substrate. Contact step S2, voltage application step S3 for applying a voltage between the contacted terminals, current detection step S4 for detecting a current between the terminals, and step of separating the contacted first terminal from the electrode layer S5, a step S6 in which the other one of the first terminals is brought into contact with the electrode layer, a voltage applying step S7 for applying a voltage between the terminals, and a current detecting step S8 for detecting a current between the terminals. The voltage application step S3 and the current detection step S4, or the voltage application step S7 and the current detection step S8 are combined to form an insulation performance inspection step.

  Step S1 is a step in which one of the first terminals is in contact with the back electrode layer or the transparent electrode layer of the thin film solar cell, and the other first terminals are in a separated state. Steps S1 and S2 are not necessarily performed in this order, and may be S1 after S2. Moreover, S1 and S2 may be performed simultaneously. However, before the voltage application step S3 is performed, it is necessary that two necessary terminals to be applied with voltage are in contact with the corresponding locations. The voltage application step S3 and the current detection step S4 may be performed a plurality of times for each different combination of terminals, and each time the selected combination of terminals is changed, as a preparation, the steps S1 and S2 The necessary steps are performed. The current detection step S4 is performed after the application is started by the voltage application step S3 and before the application is finished. Therefore, the current detection step S4 is performed during a part of the time zone during which the voltage application step S3 is performed. In this way, it is possible to know where the insulation defect is on the board by inspecting whether the current flows by applying a voltage for each combination by contacting a plurality of terminals individually. Can do.

  FIG. 22 shows another example of a method for inspecting a thin-film solar cell in the present embodiment. The difference from the inspection method shown in FIG. 21 is that there is a step of determining whether or not the first terminals are brought into contact individually.

  Step S11 in which all of the first terminals, which are a plurality of individual terminals, are brought into contact with the electrode layer, step S12 in which the corresponding second terminal is brought into contact with the outer peripheral edge of the substrate, and the entire periphery of the substrate of the thin film solar cell. A voltage application step S13 for applying a voltage, a current detection step S14 for detecting a current flowing between the terminals, and a current value detected in S14 are compared with a reference value held in advance. A determination step S15 for determining whether or not the first terminals are brought into contact with each other is included. In the determination step S15, if the detected current is equal to or less than the reference value, the inspection is terminated. If the detected current is equal to or greater than the reference value, it is determined that the next step in the inspection step is proceeded. This is because if a voltage is applied to the entire periphery of the thin-film solar cell and the detected current value is small, it can be determined that there is no defective insulation in the region where the insulating substrate is exposed. More specifically, when a voltage of 6000 V is applied between the first terminal and the second terminal and a current of 50 μA or more is not detected, it is determined that the inspection is completed. By performing steps S11 to S15, it is possible to select thin-film solar cells that do not need to determine where insulation failure has occurred, and it is possible to increase production efficiency by eliminating unnecessary steps.

  If it is determined in the determination step S15 that the first terminals, which are individual terminals, are brought into contact with each other, the step S16 in which one of the first terminals is brought into contact with the electrode layer, and the corresponding second terminal at the outer peripheral edge of the substrate. A contact step S17, a voltage application step S18 for applying a voltage between the two contacted terminals, and a current detection step S19 for detecting a current between the terminals are performed.

  The inspection method shown in FIG. 22 is more preferable than the inspection method shown in FIG. 21 because it is possible to efficiently inspect the insulation of the peripheral edge of the substrate of the thin-film solar cell.

[Fifth Embodiment]
An inspection method using the inspection apparatus according to the third embodiment of the present invention will be described below with reference to the drawings.

  FIG. 23 shows a flowchart of the method for inspecting a thin-film solar cell in the present embodiment. Step S21 in which the first terminal is brought into contact with the electrode layer of the thin-film solar cell, or the second terminal is brought into contact with the outer peripheral edge of the substrate, and one of the third terminals, which are individual terminals, is exposed at the peripheral edge of the substrate. A contact step S22, a voltage application step S23 for applying a voltage between the contacted terminals, and a current detection step S24 for detecting a current flowing between the two terminals to which the voltage is applied. Step S25 for separating the third terminal from the region where the insulating substrate is exposed, Step S26 for bringing the other one of the third terminals into contact with the region where the insulating substrate is exposed, and a voltage applying step for applying a voltage between the terminals S27 and a current detection step S28 for detecting a current between the terminals are included. The voltage application step S23 and the current detection step S24, or the voltage application step S27 and the current detection step S28 are collectively referred to as an insulation performance inspection step.

  In step S21, the first terminal is brought into contact with the back electrode layer or the transparent electrode layer of the thin film solar cell, or the second terminal is brought into contact with the outer peripheral edge of the substrate. In step S22, one of the plurality of third terminals, which are individual terminals, is in contact with the insulating region where the insulating substrate at the peripheral edge of the thin film solar cell is exposed, and the other third terminals are not in contact. State. Steps S21 and S22 are not necessarily performed in this order, and the order may be changed. Moreover, S21 and S22 may be performed simultaneously. However, before the voltage application step S23 is performed, it is necessary that two necessary terminals to be applied with voltage are in contact with the corresponding locations. Steps S23 and S24 may be performed a plurality of times for each different combination of terminals, and each time a combination of selected terminals is changed, a necessary step from among steps S21 and S22 is performed as a preparation. It may be done. The current detection step S24 is performed after the application is started by the voltage application step S23 and before the application is finished. Therefore, step S24 is performed during a part of the time zone during which step S23 is performed. By inspecting whether or not a current flows by applying a voltage for each combination by bringing a plurality of terminals into contact with each other, it is possible to know where the insulation defect is on the substrate.

  Further, as described with reference to FIG. 22 in the fourth embodiment, a step of determining whether or not the terminals need to be brought into contact with each other may be added.

[Sixth Embodiment]
A method and system for manufacturing a thin-film solar cell according to the present invention will be described below with reference to the drawings.

  FIG. 24 shows a flowchart of the method for manufacturing the thin-film solar cell in the present embodiment. A carrying-in process S31, a photoelectric conversion element forming process S32, an insulating region forming process S33, an inspection process S34, a judging process S35, an insulation failure cause removal process S36, a power generation performance evaluation process S37, and a carrying-out process S38. Including. In the first embodiment, the thin film solar cell 100 described with reference to FIG. 1 shows a state in which the insulating region forming step S33 has been performed, and will be referred to in the description of the following steps.

  In the carrying-in step S31, the insulating substrate 2 is carried into the thin-film solar cell production line.

  In the photoelectric conversion element forming step S <b> 32, the transparent electrode layer 3, the semiconductor layer 4, and the back electrode layer 5 are sequentially stacked on the insulating substrate 2 to form a photoelectric conversion element. Each layer is formed by a method such as plasma CVD, sputtering, or vapor deposition. In the photoelectric conversion element forming step S32, there is no necessity to form all of the transparent electrode layer 3, the semiconductor layer 4, and the back electrode layer 5. For example, in the carrying-in process S31, the insulating substrate 2 on which the transparent electrode layer 3 is formed may be carried in, and the processes after the formation of the semiconductor layer 4 may be performed in the photoelectric conversion element forming process S32.

  In the insulating region forming step S33, the transparent electrode layer 3, the semiconductor layer 4, and the back electrode layer 5 in a predetermined region at the peripheral portion of the insulating substrate 2 are removed using an insulating region forming apparatus, and the region 21 where the insulating substrate is exposed. Form. As the insulating region forming apparatus, for example, a polishing apparatus using a rotating polishing disk, a blasting apparatus that removes a film by spraying grains, or a laser processing apparatus that evaporates a film by irradiating a laser can be used.

  In the inspection step S34, the insulating performance of the peripheral portion of the thin-film solar cell is inspected by the inspection apparatus shown in the first to third embodiments.

  In the determination step S35, the inspection result is compared with the reference value, and the thin-film solar cell determined that the insulation performance is not sufficient is sent to the insulation failure cause removal step S36. The thin-film solar cell determined to have sufficient insulation performance omits the insulation failure cause removal step S36 and performs the power generation performance evaluation step S37.

In the insulation failure cause removal step S36, the insulation failure cause of the thin film solar cell in which the position of the insulation failure portion is specified is removed. Causes of poor insulation include, for example, wraparound during film formation of the transparent electrode layer, semiconductor layer and / or back electrode layer, and residues during formation of the region 21 where the insulating substrate is exposed.
As a defective insulation cause removing device, for example, a polishing device, a blast device or a laser processing device, a wiping device that removes a defective insulation cause by wiping with a cloth soaked in liquid such as pure water or an organic solvent, etc. Can be used. The defective insulation cause removing device can be replaced by the insulating region forming device used in the insulating region forming step S33. In the case of replacement, in order to prevent the insulating substrate 2 from being loaded and damaged, when removing the cause of the insulation failure, the operating conditions of the apparatus such as shortening the processing time, pressing during polishing and lowering the laser irradiation energy, etc. It is desirable to make changes. When using a laser processing device, laser processing can shorten the processing time with linear processing rather than processing with an angle that bends at a right angle, so the side where the insulation performance is insufficient is located on which side. It is desirable to specify whether it exists.

  In the power generation performance evaluation step S37, the power generation performance of the thin-film solar cell is evaluated using a solar simulator that evaluates the power generation performance by irradiating simulated sunlight. Note that after the defective insulation cause removal step S36, the thin-film solar cell may be transported again to the inspection step S34 to inspect the insulation performance.

  In the unloading step S38, the thin film solar cell is unloaded. Thereafter, other performance inspections and manufacturing processes of the thin-film solar cell module are performed as necessary.

  In the manufacturing method of the present embodiment, when there are few thin film solar cells that are determined to require the insulation failure cause removal step S36, the insulation failure cause removal device is installed so that the devices of other processes can be conveyed in series. You may install independently from a production line. In this case, it is only necessary to install an independent transport device that can be transported between the inspection device and the defective insulation cause removing device, while being installed so as to be transportable between the inspection device and the power generation performance evaluation device. Or you may provide the storage shelf which temporarily stores a thin film solar cell, without installing an independent conveying apparatus, and you may convey to an insulation defect cause substance removal apparatus from a storage shelf.

  In FIG. 25, the schematic explanatory drawing of the manufacturing system of the thin film solar cell in this embodiment is shown. This system includes an inspection device K1, an insulation failure cause removal device Z1, and a transfer device H1. The inspection device K1 includes an inspection unit K2, a storage unit K3, and a communication unit K4. The defective insulation cause removing device Z1 includes a communication unit Z2, a storage unit Z3, a control unit Z4, and a processing unit Z5. Information is transmitted between the communication unit K4 of the inspection device and the communication unit Z2 of the defective insulation cause removal device. Is to do. The transport device H1 transports the thin film solar cell between the inspection device K1 and the defective insulation cause removing device Z1.

  As the inspection unit K2 of the inspection apparatus, any of the inspection apparatuses shown in the first to third embodiments can be used. The inspection information detected by the inspection unit K2 of the inspection apparatus is stored in the storage unit K3 of the inspection apparatus. The inspection information includes position information that identifies the location of the defective insulation and thin film solar cell identification information that can identify the thin film solar cell. The inspection device K1 and the defective insulation cause removing device Z1 are connected so as to communicate with each other, and the inspection information stored in the storage unit K3 of the inspection device is transmitted from the communication unit K4 of the inspection device to the communication unit of the defective insulation cause removing device. It is transmitted to Z2 and stored in the storage unit Z3 of the defective insulation cause removing device. When the thin-film solar cell is transferred from the inspection device K1 to the processing unit Z5 of the defective insulation foreign matter removal device, the control unit Z4 of the defective insulation cause removing device is conveyed by the identification information included in the stored inspection information. The test result corresponding to the thin film solar cell is specified. Further, the location where the removal is performed is specified by the position information that specifies the location of the defective insulation contained in the inspection information. Based on the inspection information, the processing unit Z5 is controlled by the control unit Z4 of the defective insulation cause removing device, and the defective insulation cause is removed.

  Heretofore, the case where the inspection device K1 and the defective insulation cause removing device Z1 are connected so as to be directly communicable is shown, but the inspection device is not included in the control device (not shown) for controlling the entire thin film solar cell manufacturing system. K1 and the defective insulation cause removing device Z1 may be connected so as to be able to communicate with each other. In this case, inspection information is transmitted via a control device that controls the entire thin-film solar cell manufacturing system.

  Although the inspection device according to the prior art can detect the presence or absence of a cause of insulation failure, the location where the cause of insulation failure exists cannot be specified. In other words, it is necessary to perform an insulation cause removal process on all the insulating portions 21. On the other hand, in the manufacturing method of the present embodiment, the inspection apparatus K1 identifies the position where the cause of the insulation failure exists, and only the portion where the insulation cause is present is removed. Time can be shortened. Therefore, the manufacturing efficiency of a thin film solar cell can be improved.

  As described above, the first embodiment to the sixth embodiment have been specifically described, but the present invention is not limited thereto. Embodiments obtained by appropriately combining the technical means disclosed in the above-described embodiments are also included in the technical scope of the present invention.

    The present invention can be widely applied to thin film solar cell inspection devices, thin film solar cell inspection methods, thin film solar cell manufacturing methods, and thin film solar cell manufacturing systems in general.

DESCRIPTION OF SYMBOLS 100 Thin film solar cell 2 Insulating substrate 2s Main surface of insulating substrate 21, 211, 212 Area where insulating substrate is exposed 3 Transparent electrode layer 4 Semiconductor layer 5 Back electrode layer 61, 611, 612, 613, 614, 615, 616, 617 , 618, 619a, 619b, 619c, 619d, 619e, 619f First terminal 62, 62a, 621, 622, 623, 624, 625, 626, 627, 628, 629a, 629b, 629c, 629d, 629e, 629f Second Terminals 631, 632, 634a, 634b, 635a, 635b, 636a, 636b, 637a, 637b, 638a, 639b Third terminal 711, 712, 717, 718, 721, 722, 731, 732, 733, 734, 735, 736 , 737, 738 Movement mechanism
8, 81 Voltage application unit 9, 91 Current detection unit C1, C2, C3, C2 ′, C3 ′ Combination of voltage application D Distance from end of insulating substrate K1 Inspection device K2 Inspection device inspection unit K3 Storage unit of inspection device K4 Communication unit of inspection device Z1 Insulation defect cause removal device Z2 Insulation defect cause removal device communication unit Z3 Insulation defect cause removal device storage unit Z4 Insulation defect cause removal device control unit Z5 Insulation defect cause removal device Processing unit H1 conveyor

Claims (10)

An inspection apparatus for a thin-film solar cell, comprising: an insulating substrate; and a transparent electrode layer, a semiconductor layer, and a back electrode layer sequentially stacked on the insulating substrate, wherein the insulating substrate has a region where the insulating substrate is exposed at a peripheral portion. And
A first terminal in contact with at least one of the transparent electrode layer or the back electrode layer of the thin-film solar cell;
A second terminal that contacts at least one of a region where the insulating substrate is exposed or an outer peripheral end of the insulating substrate;
A voltage applying unit that applies a voltage between the first terminal and the second terminal;
A current detector for detecting a current flowing between the first terminal and the second terminal;
With a moving mechanism,
At least one of the first terminal or the second terminal is divided into a plurality of individual terminals,
The moving mechanism is a thin-film solar cell inspection apparatus that moves the individual terminals. An inspection apparatus for a thin-film solar cell, comprising: an insulating substrate; and a transparent electrode layer, a semiconductor layer, and a back electrode layer sequentially stacked on the insulating substrate, wherein the insulating substrate has a region where the insulating substrate is exposed at a peripheral portion. And
A first terminal in contact with at least one of the transparent electrode layer or the back electrode layer of the thin-film solar cell;
A second terminal that contacts at least one of a region where the insulating substrate is exposed or an outer peripheral end of the insulating substrate;
A third terminal that is in contact with a region where the insulating substrate is exposed, between the contact point of the first terminal and the contact point of the second terminal;
A voltage applying unit that applies a voltage between two terminals selected from the first terminal, the second terminal, and the third terminal;
A current detector for detecting a current flowing between terminals to which a voltage is applied;
With a moving mechanism,
The third terminal is divided into a plurality of individual terminals,
The moving mechanism is a thin-film solar cell inspection apparatus that moves the individual terminals.   The thin film solar cell according to claim 1, wherein the individual terminal is divided for each side of the insulating substrate.   The at least one terminal of the first terminal, the second terminal, and the third terminal is divided into a plurality in the length direction of at least one side of the insulating substrate. Item 4. The thin-film solar cell inspection device according to any one of Items 1 to 3. An inspection method for a thin-film solar cell, comprising: an insulating substrate; and a transparent electrode layer, a semiconductor layer, and a back electrode layer sequentially stacked on the insulating substrate, wherein the insulating substrate has a region where the insulating substrate is exposed at a peripheral edge. And
A first terminal that contacts at least one of the transparent electrode layer or the back electrode layer; and a second terminal that contacts at least one of a region where the insulating substrate is exposed or an outer peripheral end of the insulating substrate. At least one terminal of the terminal and the second terminal is divided into a plurality of individual terminals, each of which is moved by a moving mechanism,
A contact step of contacting one of the individual terminals;
A contact step of contacting a terminal corresponding to the contacted terminal;
A method for inspecting a thin-film solar cell having an insulation performance inspection process for inspecting insulation performance between terminals in contact with each other. A method for inspecting a thin-film solar cell, comprising: an insulating substrate; and a transparent electrode layer, a semiconductor layer, and a back electrode layer sequentially stacked on the insulating substrate, wherein the insulating substrate has a region where the insulating substrate is exposed at a peripheral portion. There,
A first terminal in contact with at least one of the transparent electrode layer or the back electrode layer;
A second terminal that contacts at least one of a region where the insulating substrate is exposed or an outer peripheral end of the insulating substrate;
A third terminal that is in contact with a region where the insulating substrate is exposed between a portion where the first terminal contacts and a portion where the second terminal contacts;
The third terminal is divided into a plurality of individual terminals and is moved by a moving mechanism,
A contact step of contacting one of the individual terminals;
An abutting step of abutting a first terminal or a second terminal corresponding to the abutting terminal;
A method for inspecting a thin-film solar cell having an insulation performance inspection process for inspecting insulation performance between terminals in contact with each other. In the inspection method of the thin film solar cell,
A contact step for contacting all the individual terminals;
A contact step of contacting the corresponding terminals with the individual terminals;
Insulation performance inspection process for inspecting insulation performance between the contacted terminals,
A determination step of comparing the test result with a reference value held in advance and determining whether or not the individual terminals are brought into contact with each other;
The thin film solar cell inspection method according to claim 5, further comprising an abutting step in which the individual terminals are individually abutted according to a result of the determination step. For a thin film solar cell having an insulating substrate, a transparent electrode layer sequentially laminated on the insulating substrate, a semiconductor layer, a back electrode layer, and a region where the insulating substrate is exposed at the peripheral edge of the insulating substrate,
The manufacturing method of the thin film solar cell which has a test | inspection process which test | inspects with the test | inspection method of the thin film solar cell in any one of Claims 5-7. The method of manufacturing the thin film solar cell is as follows:
It has a process of removing the cause of defective insulation,
The method for manufacturing a thin-film solar cell according to claim 8, wherein the defective insulation cause removal step is performed based on a result of the inspection step. 5. A thin film comprising the thin-film solar cell inspection device according to claim 1 and a defective insulation cause removing device that removes a defective insulation present in a region where the insulating substrate is exposed at a peripheral portion of the insulating substrate. A solar cell manufacturing system,
A thin-film solar cell manufacturing system in which a control unit of the defective insulation cause removing device controls a processing unit based on inspection information from the inspection device.