JP2014095390A - Tube - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a tube capable of allowing an operator to discriminate a set temperature of a fluid flowing in the tube during an operation.SOLUTION: A tube in which a fluid flows, includes a temperature display for indicating a set temperature of the fluid flowing in the tube. According to the tube, an operator can discriminate the set temperature of the fluid flowing in the tube during an operation. Thus the operation can be executed while paying attention to not touching the tube in which the fluid of high temperature or low temperature flows.

Description

  The present invention relates to a tube through which a fluid flows.

  Many industrial machines and manufacturing apparatuses use various fluids such as water and air. For example, in a semiconductor device manufacturing process, in a grinding device called a grinder that grinds and thins a semiconductor wafer, or a cutting device called a dicer that divides a thinned semiconductor wafer into chips, a required part of the device It is known that piping for transmitting air, processing fluid, suction force, and the like is stretched (see, for example, Patent Documents 1 and 2).

  More specifically, the cutting apparatus includes at least a chuck table for sucking and holding a semiconductor wafer, an air-bearing spindle unit including a cutting blade for cutting the semiconductor wafer held on the chuck table, and a cut semiconductor wafer. And a cleaning device for cleaning.

  In addition, the grinding device includes at least a chuck table for sucking and holding a semiconductor wafer, an air bearing spindle unit including a grinding wheel for grinding the semiconductor wafer held on the chuck table, and a cleaning device for cleaning the ground semiconductor wafer. And.

  Further, in these cutting devices and grinding devices, an air suction source that generates a negative pressure for sucking the semiconductor wafer to the chuck table, an air supply source that supplies high-pressure air to the air bearing, and a cleaning solution is supplied to the cleaning device. In addition to a cleaning liquid supply source and the like, pipes are provided for guiding the fluid from the fluid suction source and the supply source to the respective action locations.

  As piping of various fluids in such a cutting device or grinding device, a resin tube having a flexibility of about several mm to several tens mm in diameter is generally used and cut to an appropriate length. The tube is connected in place in the device.

JP-A-10-321562 JP-A-55-112761

  In the processing devices such as the cutting device and the grinding device described above, in addition to the normal temperature fluid, a high temperature or low temperature fluid may flow in the tube, and the temperature of the fluid affects the temperature of the tube surface. Become. For example, when a high-temperature fluid at 80 ° C. flows, it is assumed that the temperature of the tube surface also rises to near 80 ° C.

  When the temperature of the tube surface cannot be identified, there is a concern that the operator may touch the tube during work without knowing that the tube surface has become hot or cold.

  When an operator touches a high or low temperature tube, it is assumed that the operator is surprised and retreats his / her hand etc., and there is a risk of hitting his / her hand on another part of the processing apparatus.

  When such a situation occurs, there is a concern that the processing apparatus may be damaged, or a secondary defect such as an operator's injury to the hand may be induced.

  On the other hand, it is conceivable to alert the operator that the fluid is hot or cold by monitoring the temperature of the fluid and displaying it on a display device or the like.

  However, it takes time to confirm the correspondence between the temperature displayed on the display device and the tube. In addition, troubles such as displaying the temperature display screens one by one are generated. Also, working while checking the display device is inefficient.

  This invention is made | formed in view of such a point, The place made into the objective is providing the tube tube which enables the operator to identify the preset temperature of the fluid which flows through the inside of a tube during work. is there.

  According to the first aspect of the present invention, there is provided a tube through which a fluid flows, and having a temperature display indicating a set temperature of the fluid flowing in the tube.

  According to the tube of the present invention, the operator can identify the set temperature of the fluid flowing in the tube during the operation. For example, it is possible to perform an operation while paying attention not to touch a tube through which a high-temperature or low-temperature fluid flows.

It is an external appearance perspective view of a cutting device. It is a perspective view of the semiconductor wafer supported by the annular frame via the dicing tape. (A) is a figure explaining one Embodiment of the tube of this invention. (B) is a figure explaining other embodiment of the tube of this invention. (A) is a figure explaining other embodiment of the tube of this invention. (B) is a figure explaining other embodiment of the tube of this invention. It is a figure explaining embodiment of a tube provided with heat-resistant temperature. It is a figure which shows embodiment utilized for piping of the cutting device.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. FIG. 1 shows an external perspective view of a cutting device 2 using a tube of the present invention for piping. On the front side of the cutting device 2, there is provided operating means 4 for an operator to input instructions to the device such as machining conditions. In the upper part of the apparatus, there is provided a display means 6 such as a CRT for displaying a guidance screen for an operator and an image taken by an imaging means described later.

  As shown in FIG. 2, the first street (division planned line) S1 and the second street S2 are orthogonal to each other on the surface of the light emitting device wafer W to be diced (hereinafter also simply referred to as “wafer W”). A large number of devices D such as LEDs are formed on the wafer W by being partitioned by the first street S1 and the second street S2.

  The wafer W is attached to a dicing tape T that is an adhesive tape, and the outer peripheral edge of the dicing tape T is attached to an annular frame F. As a result, the wafer W is supported by the frame F via the dicing tape T, and a plurality of (for example, 25) wafers are accommodated in the wafer cassette 8 shown in FIG. The wafer cassette 8 is placed on a cassette elevator 9 that can move up and down.

  Behind the wafer cassette 8, a loading / unloading means 10 for unloading the wafer W before cutting from the wafer cassette 8 and loading the wafer after cutting into the wafer cassette 8 is disposed. Between the wafer cassette 8 and the loading / unloading means 10, a temporary placement area 12 that is an area on which a wafer to be loaded / unloaded is temporarily placed is provided. Positioning means 14 for positioning at a certain position is provided.

  In the vicinity of the temporary placement region 12, a transfer means 16 having a turning arm that sucks and transports the frame F integrated with the wafer W is disposed, and the wafer W carried to the temporary placement region 12 is Adsorbed by the conveying means 16 and conveyed onto the chuck table 18 and sucked by the chuck table 18, and held on the chuck table 18 by fixing the frame F by a plurality of fixing means (clamps) 19. .

  The chuck table 18 is configured to be rotatable and reciprocally movable in the X-axis direction. Above the movement path of the chuck table 18 in the X-axis direction, an alignment unit 20 that detects a street to be cut of the wafer W is provided. It is arranged.

  The alignment unit 20 includes an imaging unit 22 that images the surface of the wafer W, and can detect a street to be cut by processing such as pattern matching based on an image acquired by imaging. The image acquired by the imaging unit 22 is displayed on the display unit 6.

  A cutting means (cutting unit) 24 for cutting the wafer W held on the chuck table 18 is disposed on the left side of the alignment means 20. The cutting means 24 is configured integrally with the alignment means 20, and both move together in the Y-axis direction and the Z-axis direction.

  The cutting means 24 is configured by attaching a cutting blade 28 to the tip of a rotatable spindle 26 and is movable in the Y-axis direction and the Z-axis direction. The cutting blade 28 is located on the extended line of the imaging means 22 in the X-axis direction.

  Reference numeral 25 denotes transport means for transporting the wafer W after the cutting to the cleaning device 27. The cleaning device 27 cleans the wafer W and blows air from an air nozzle to dry the wafer W.

  Next, an embodiment of a tube having a characteristic configuration in the present invention will be described. As shown in FIG. 3A, the tube 11A is made of, for example, a resin exhibiting flexibility, and a temperature display 13a indicating the set temperature of the fluid flowing inside is printed on the tube 11A. .

  In the embodiment of the temperature display 13a of the tube 11A shown in FIG. 3A, “80 to 90 ° C.” indicating the value of the set temperature 15a is printed on the surface of the tube 11A.

  The tube 11A is cut to a length corresponding to a location where the tube 11A is used, that is, a length designed in advance, and a temperature display 13a is printed at a predetermined position in the length direction of the cut tube 11A. The Note that the printing timing may be either before cutting or after cutting.

  The position in the length direction of the tube 11A on which the temperature display 13a is to be printed is not particularly limited, but a plurality of the tubes 11A in the extending direction of the tube 11A can be easily found by the operator. It is preferable to print repeatedly so that it may be arranged at a location. For example, if the display is made at a predetermined interval (for example, 10 cm, 20 cm, etc.) in the tube extending direction, the operator can easily find the temperature display 13a, and the trouble of searching for the temperature display 13a is reduced. Is done.

  Further, the temperature display 13a printed on the tube 11A and the content of the set temperature 15a are set according to the location where the tube 11A is used. For example, regarding the tube 11A connected to a predetermined location, when air for high-temperature drying (air) flows, when the temperature of the air is set to “80 to 90 ° C.”, the “80 to 90” The value “° C.” is displayed as the set temperature 15a.

  As described above, in the present embodiment, as shown in FIG. 3A, the tube 11A in which the fluid flows and includes the temperature display 13a indicating the set temperature 15a of the fluid flowing in the tube 11A. Is configured.

  According to such a configuration, the operator can identify the set temperature 15a of the fluid flowing in the tube during the work. For example, it is possible to perform an operation while paying attention not to touch a tube through which a high-temperature or low-temperature fluid flows.

  Here, if no indication about the set temperature is displayed on the tube, the operator may be concerned about flowing a fluid at a set temperature or higher without being aware of the set temperature. By displaying the set temperature on the tube as in the form, the operator can be alerted to the presence of this set temperature. In order to alert the user, the set temperature 13a may be printed in a color that can be easily identified (a color that has a large contrast with the tube 11A).

  In addition, for example, when the set temperature is high, printing is performed in red. When the set temperature is low, printing is performed in blue. The configuration may be easier to understand.

  As shown in the temperature display 13b of the tube 11B shown in FIG. 3B, in addition to “80 to 90 ° C.” indicating the set temperature 15b, the characters “fluid temperature” are printed as the additional display 15c. Also good.

  Further, as in the temperature display 13c of the tube 11C shown in FIG. 4A, in addition to “80 to 90 ° C.” indicating the value of the set temperature 15d, “air” indicating the fluid type 15e, and additional display 15f It is also possible to print the letters “! High temperature!”.

  Similarly, as in the temperature display 13d of the tube 11D shown in FIG. 4B, in addition to “−30 ° C.” indicating the value of the set temperature 15g, “air” indicating the fluid type 15h, and additional display 15j It is possible to print the character “▲ CAUTION!”.

  Further, as in the temperature display 13e of the tube 11E shown in FIG. 5, in addition to the characters “80 to 90 ° C.” indicating the value of the set temperature 15k and “fluid temperature” as the additional display 15m, “heat resistance The notation “temperature: 180 ° C.” may be printed.

  Next, with reference to FIG. 6, the piping configuration of the cutting apparatus 2 in which the tube of the present invention can be used will be described. High pressure air is supplied from the air source 40 to the clean unit 46 via the tube 31.

  The clean unit 46 has a plurality of filters, and cleans the high-pressure air supplied from the air source 40. From the clean unit 46, air for suction release is supplied to the chuck table 18 via the tube 33, high pressure air is supplied to the negative pressure generating means 52 such as an ejector via the tube 35, and via the tube 37. Air for air bearing is supplied to the spindle unit 30.

  The clean unit 46 further supplies the wheel cover opening / closing air to the wheel cover 32 that covers the cutting blade 28 via the tube 39, and supplies air via the tube 41 to form the air curtain 34. The air is supplied to the branch joint 56 for the microscope 38 through the.

  The negative pressure generating means 52 generates a negative pressure using a high-pressure fluid passing through the orifice, supplies a negative pressure for chuck table vacuum to the chuck table 18 through the tube 45, and passes through the tube 47. A negative pressure for spinner table vacuum is supplied to the spinner cleaning device 27.

  Cover opening / closing air is supplied from the branch joint 56 to the microscope 38 via the tube 49, macro microscope blow air is supplied via the tube 51, and micro microscope blow air is supplied via the tube 53.

  The exhaust air from the chuck table 18 is exhausted to the duct 60 through the tube 55, the exhaust air from the spinner cleaning device 27 is exhausted to the duct 60 through the tube 57, and the exhaust air from the spindle 30 is exhausted through the tube 59. And discharged to the duct 60.

  As described above, all the air used in each component of the cutting device 2 is discharged to the duct 60. For example, a colorless and transparent tube is used as a tube for supplying air.

  The exhaust air from the wheel cover 32 is exhausted to the duct 60 through the tube 61, and the exhaust air from the air curtain 34 is exhausted to the duct 60 through the tube 63. Exhaust air from the microscope 38 is discharged to the duct 60 through the tube 65.

  From the coolant source 42, for example, a coolant such as city water is supplied to the clean unit 48 via the tube 67. The clean unit 48 includes a plurality of filters, and the coolant is filtered by these filters.

  Coolant is supplied from the clean unit 48 to the spindle unit 30 that rotatably supports the spindle 26 via the tube 69. The coolant discharged from the spindle unit 30 is discharged to the drain 58 through the tube 71. The tubes 67, 69, 71 supply liquid, and for example, those colored in light blue are preferably used in order to distinguish them from those supplying air.

  A liquid such as pure water is supplied from the cutting / cleaning liquid source 44 to the clean unit 50 through the tube 73. The clean unit 50 includes a plurality of filters. The cleaning liquid is supplied from the clean unit 50 to the spinner cleaning device 27 via the tube 75, the cutting fluid is supplied to the wheel cover branch joint 54 via the tube 77, and the liquid supplied via the tube 79 is water. A curtain 36 is formed.

  From the branch joint 54, the shower nozzle cutting fluid is supplied to the wheel cover 32 via the tube 83, the blade cooling cutting fluid is supplied via the tube 85, and the shower cutting fluid is supplied via the tube 87. .

  The cleaning liquid discharged from the spinner cleaning device 27 is discharged to the drain 58 through the tube 81, the cutting liquid discharged from the wheel cover 32 is discharged to the drain 58 through the tube 89, and the liquid forming the water curtain 36 is It is discharged to the drain 58 through the tube 91.

  The tubes 73 to 91 are used for supplying a liquid such as a cooling fluid or a cutting fluid or discharging a used liquid. It is preferable to use a colored one.

  As described above, in the example of the cutting apparatus 2, many tubes are used, and it is assumed that the fluid flowing inside each tube is set to a predetermined temperature. .

  And about each of these tubes, by providing the temperature display which shows the preset temperature of the fluid which flows through an inside, the operator can identify the preset temperature of the fluid which flows through the inside of a tube during work. For example, the operation can be performed while being careful not to touch a tube through which a high-temperature or low-temperature fluid flows.

  In the above-described embodiment, the example in which the tube of the present invention is applied to the piping of the cutting device has been described. However, the use of the tube of the present invention is not limited to this, and for example, a grinding device, a polishing device, and a division The same applies to the piping of other processing devices such as devices and printing devices.

  Specifically, examples of using a high-temperature fluid include high-temperature air used for heat-shrinking a dicing tape in a semiconductor wafer dividing apparatus, and high-temperature air for drying ink in a printing apparatus. Further, as the low temperature fluid, cooling air used for cooling a wafer with a DAF (Die Attach Film) in a semiconductor wafer dividing apparatus may be considered.

  In addition, printing such as temperature display on the surface of the tube may be performed by printing using an ink jet ink or laser printing by irradiating a laser beam.

11A Tube 13a Temperature display 15a Set temperature

Claims (1)

A tube through which fluid flows,
A tube having a temperature display indicating a set temperature of the fluid flowing in the tube.

Images