JP2013252014A - Drive unit and optical device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a drive unit which deals with driven members having different dimensions inexpensively.SOLUTION: The drive unit includes a plurality of electromechanical conversion elements 120 which are supplied with drive power and generate mechanical vibration, a substrate 110 having a transmission line of drive power and mechanically coupled with the plurality of electromechanical conversion elements 120 in common, and an urging member 140 which makes a force, for urging each of the plurality of electromechanical conversion elements 120 toward a driven member 130, act from the substrate 110 toward the electromechanical conversion elements 120. The plurality of electromechanical conversion elements 120 are coupled to the substrate 110 at positions separated from each other in a direction for driving the driven member 130.

Description

  The present invention relates to a drive device and an optical device.

There is an annular drive device that is arranged around an optical member and drives the optical member (see, for example, Patent Document 1).
Patent Document 1 Japanese Patent Application Laid-Open No. 2011-039092

  The annular drive device is expensive because it is manufactured according to the size of each optical member to be driven.

  According to the first aspect of the present invention, a plurality of electromechanical transducers that generate mechanical vibration when supplied with driving power and a transmission line that transmits the driving power are mechanically coupled to the plurality of electromechanical transducers in common. There is provided a drive device that includes the substrate and a biasing member that applies a biasing force that biases each of the plurality of electromechanical conversion elements toward the driven member from the substrate to the electromechanical conversion element.

  According to a second aspect of the present invention, an optical device comprising the above driving device is provided.

  The above summary of the present invention does not enumerate all necessary features of the present invention. Sub-combinations of these feature groups can also be an invention.

FIG. 3 is an exploded perspective view of a driving device 101. 2 is a plan view of a substrate 110. FIG. FIG. 2 is a schematic diagram of a driving device 101. 3 is a schematic diagram of an electromechanical transducer 120. FIG. It is a wave form diagram of a drive signal. FIG. 6 is a schematic diagram showing the operation of the electromechanical transducer 120. 1 is a schematic diagram of a camera system 400. FIG. 2 is a plan view of a substrate 111. FIG. FIG. 4 is a partial exploded perspective view of the driving device 102. 3 is a schematic diagram of a driving device 102. FIG. 3 is a cross-sectional view of a driving device 103. FIG. 4 is a partial side view of the driving device 103. FIG. 4 is a bottom view of a substrate 113. FIG. FIG. 4 is a partial plan view of the driving device 103.

  Hereinafter, the present invention will be described through embodiments of the invention, but the following embodiments do not limit the invention according to the claims. In addition, not all the combinations of features described in the embodiments are essential for solving the problem.

  FIG. 1 is an exploded perspective view of the drive device 101. The driving device 101 includes three urging members 140, a single substrate 110, three sets of transmission members 150, three electromechanical transducers 120, and a single driven member 130 in order from the top in the figure.

  The biasing member 140 is an elastic member that is a coil spring, for example, and is compressed and assembled in the drive device 101. Thereby, the urging member 140 urges the substrate 110 from the upper side to the lower side in the drawing.

  The substrate 110 is formed of an annular insulating material having a circular opening at the center. In the surface visible in the figure, three engaging portions 112 corresponding to the three electromechanical transducers 120, three sets of through electrodes 114 and three punched holes 116, and three corresponding to the three biasing members 140 are shown. And two through holes 118. Each of the engaging portion 112, the through electrode 114, the through hole 116, and the through hole 118 is arranged at equal intervals in the circumferential direction of the substrate 110.

  The engaging portion 112 extends in the radial direction of the substrate 110 and protrudes in a hook shape downward from the lower surface of the substrate 110 in the drawing. The through electrode 114 is provided so as to penetrate the substrate 110 in the thickness direction, and a lower end surface appears in the drawing.

  The through hole 116 and the through hole 118 are provided so as to penetrate the substrate 110 in the thickness direction. The punched hole 116 extends in an arc shape in the circumferential direction of the substrate 110. The through hole 118 is a circular hole through which a screw or the like can be inserted, and a member for guiding the biasing member 140 is inserted therethrough.

  The electromechanical conversion element 120 has a rectangular parallelepiped shape, and has an engagement groove 122 and a power supply terminal on the upper surface in the drawing. The engagement groove 122 extends in the short side direction of the electromechanical conversion element 120 and has a shape and a dimension complementary to the engagement portion 112 of the substrate 110. Further, the electromechanical conversion element 120 has a contact portion 126 on the lower surface in the drawing. The contact portion 126 protrudes downward in the drawing.

  The driven member 130 has an opening penetrating the center. For example, an optical member or a member that holds and drives the optical member can be placed in the opening of the driven member 130. Further, an annular driven surface surrounding the opening is formed on the upper surface of the driven member 130 in the drawing. When the three electromechanical conversion elements 120 are arranged so as to engage with the engaging portions 112 of the substrate 110, the driven surfaces of the driven members 130 are all contact portions of all the electromechanical conversion elements 120. It has a shape and a size that abuts 126.

  The transmission member 150 is disposed between the lower surface of the substrate 110 in the drawing and the upper surface of the electromechanical transducer 120 in the drawing. The transmission member 150 is formed of a conductive material and has elasticity in the vertical direction in the figure.

  FIG. 2 is a plan view of the substrate 110. In FIG. 2, the same elements as those in FIG. The substrate 110 includes a transmission line 162, a power supply pad 163, a strain gauge 166, and a detection pad 167, each formed of a conductive material on the upper surface of the substrate 110.

  The plurality of transmission lines 162 extend in the circumferential direction around the opening at the center of the substrate 110 and are electrically coupled to each of the three sets of through electrodes 114. Further, a part of the transmission line 162 crosses over in the radial direction of the substrate 110 and is coupled to the power supply pad 163. Thus, the transmission line 162 electrically couples the power supply pad 163 and the through electrode 114.

  Further, the through electrode 114 and the electromechanical conversion element 120 are electrically coupled to each other on the lower surface of the substrate 110. Therefore, driving power can be supplied to the electromechanical transducer 120 through the transmission line 162, the through electrode 114, and the transmission member 150 by feeding the power feeding pad from the outside.

  The strain gauge 166 is disposed in the vicinity of the punched hole 116. The detection pad 167 is electrically coupled to both ends of the line forming the strain gauge 166. When the substrate 110 is deformed in the region where the strain gauge 166 is disposed, the electrical characteristics such as electrical resistance in the line forming the strain gauge 166 change. Therefore, mechanical deformation of the substrate 110 can be electrically detected through the detection pad 167.

  In the substrate 110, the width of the substrate 110 is reduced in the region radially outside the punched hole 116, and the bending rigidity is reduced. Therefore, the reaction force received by the substrate 110 from the electromechanical transducer 120 arranged near the longitudinal center of the punched hole 116 can be detected by the strain gauge 166 as a deformation of the substrate 110 with high sensitivity.

  On the upper surface of the substrate 110, the periphery of each of the through holes 118 also serves as a spring seat 119 that transmits an urging force by abutting one end of the urging member 140. Therefore, no line is arranged around the through hole 118.

  FIG. 3 is a schematic diagram showing the overall structure of the drive device 101. Elements common to those in FIGS. 1 and 2 are denoted by the same reference numerals, and redundant description is omitted.

  The drive device 101 includes a drive circuit 170 in addition to the biasing member 140, the substrate 110, the transmission member 150, the electromechanical transducer 120, and the driven member 130, which are also shown in FIG. The drive circuit 170 generates a two-phase drive signal for driving the electromechanical conversion element 120 and supplies it to the power supply pad 163 of the substrate 110.

  In the driving device 101, the urging member 140 disposed on the upper side of the substrate 110 in the drawing contacts the upper surface of the substrate 110 in a compressed state to urge the substrate 110 downward in the drawing. Below the substrate 110, a plurality of electromechanical transducers 120 are arranged with the transmission member 150 interposed between the substrate 110 and the substrate 110.

  Each of the transmission members 150 is compressed between the through electrode 114 of the substrate 110 and the power supply terminal 124 of the electromechanical transducer 120. Thereby, the through electrode 114 and the power feeding terminal 124 are electrically coupled. Therefore, the A-phase drive signal and the B-phase drive signal supplied from the drive circuit 170 are transmitted to the electromechanical transducer 120 through the substrate 110 and the transmission member 150.

  The urging force generated by the urging member 140 is transmitted to the electromechanical conversion element 120 through the substrate 110 and the transmission member 150. Thereby, the contact part 126 of the electromechanical conversion element 120 is pressed against the upper surface of the driven member 130 in the drawing. Therefore, the driving force generated in the electromechanical conversion element 120 is efficiently transmitted to the driven member 130.

  Furthermore, the electromechanical conversion element 120 engages the engagement groove 122 with the engagement portion 112 of the substrate 110 on the lower side of the substrate 110 in the drawing. Thereby, the displacement of the relative position of the electromechanical transducer 120 with respect to the substrate 110 is restrained in the direction parallel to the paper surface indicated by the arrow A in the drawing. Therefore, when a driving force is generated in the direction of arrow A by the electromechanical transducer 120, the driving force drives the driven member 130 in the direction of arrow A.

  Note that, as described above, the engaging portion 112 is provided for the purpose of restraining the electromechanical conversion element 120 in a direction parallel to the driven surface of the driven member 130. Therefore, the lower end surface of the engaging portion 112 in the drawing may not be in contact with the bottom surface of the engaging groove 122 of the electromechanical conversion element 120. Further, the engaging portion 112 does not restrain the electromechanical conversion element 120 in the direction perpendicular to the paper surface.

  FIG. 4 is a schematic diagram showing an enlarged view of one of the electromechanical transducer elements 120 as viewed from the side. Elements that are the same as those in the other drawings are given the same reference numerals, and redundant descriptions are omitted.

  Each of the electromechanical conversion elements 120 includes a pair of A-phase electrodes 121 and B-phase electrodes 123 disposed at diagonal positions of a piezoelectric material layer 125 that is substantially rectangular when viewed from the side. The piezoelectric material layer 125 is formed of a piezoelectric material such as PZT. The A-phase electrode 121 and the B-phase electrode 123 are each formed of a metal material fired together with the piezoelectric material layer 125.

  The piezoelectric material layer 125 may be formed by stacking layered piezoelectric materials, or may be in a bulk shape. The size of the piezoelectric material layer 125 formed in this way can be formed to be about 2 mm square by laminating, for example, about 10 layered piezoelectric materials.

  The A-phase electrode 121 and the B-phase electrode 123 are arranged at positions corresponding to the back surface of the piezoelectric material layer 125 in the direction perpendicular to the paper surface. Therefore, when a drive voltage is applied to the A-phase electrode 121, the piezoelectric material layer 125 contracts or expands in a region sandwiched between the A-phase electrodes 121. Similarly, when a driving voltage is applied to the B-phase electrode 123, the piezoelectric material layer 125 contracts or expands in a region sandwiched between the B-phase electrodes 123.

  FIG. 5 is a waveform diagram showing signal waveforms of the A-phase drive signal and the B-phase drive signal supplied from the drive circuit 170 to the electromechanical conversion element 120. As illustrated, the drive circuit 170 generates a voltage signal modulated with a modulation signal having a sine wave waveform, for example, as an A-phase drive signal. Further, the drive circuit 170 generates a voltage signal modulated by a modulation signal having a sine wave waveform delayed by 90 degrees with respect to the A-phase drive signal, that is, a cosine wave waveform, as the B-phase drive signal. Note that a driving signal other than a sine wave waveform may be supplied to the driving circuit 170.

  FIG. 6 is a schematic diagram illustrating the operation of the electromechanical transducer 120 supplied with the A-phase drive signal and the B-phase drive signal as described above. As described above, since the phase of the A-phase drive signal and the B-phase drive signal is shifted from each other, the piezoelectric material layer 125 in the region where the A-phase electrode 121 is disposed and the region where the B-phase electrode 123 is disposed Exhibits different stretch states.

  In the electromechanical transducer 120, since the A-phase electrode 121 and the B-phase electrode 123 are disposed adjacent to each other, the electromechanical transducer 120 is deformed to be bent by the expansion and contraction of the piezoelectric material layer 125 as described above. . In addition, the electromechanical conversion element 120 is also deformed such that the longitudinal dimension is expanded and contracted. As a result, as indicated by an arrow B in the figure, the abutting portion 126 generates an elliptical vibration that draws an elliptical orbit in the figure.

  Referring to FIG. 3 again, the contact portion 126 of the electromechanical conversion element 120 is pressed toward the driven member 130 by the urging force derived from the urging member 140. Therefore, when the abutting portion 126 generates the above elliptical vibration, the driven member 130 is driven relative to the substrate 110 in the direction of the arrow A in the figure.

  In view of the operation of the electromechanical conversion element 120 as described above, the contact portion 126 is preferably disposed at a portion corresponding to the antinode of vibration generated in the electromechanical conversion element 120. As a result, the driving force generated by the elliptical vibration of the electromechanical transducer 120 is efficiently transmitted to the driven member 130.

  Further, referring to FIG. 2 again, since the electromechanical conversion element 120 is annularly arranged on the substrate 110, the driven member 130 driven by the three electromechanical conversion elements 120 rotates. Further, since the electromechanical conversion element 120 is disposed near the periphery of the substrate 110, an opening can be provided in the center of the substrate 110 and the driven member 130. Thereby, the drive device 101 formed in an annular shape can be used, for example, when the optical member is driven by being arranged without blocking the optical path of the optical system.

  Furthermore, by changing the dimensions of the substrate 110, the drive devices 101 having different diameters can be formed using the same electromechanical transducer 120. Therefore, the drive device 101 corresponding to the driven member 130 having different dimensions can be manufactured at low cost.

  In the above example, the drive device 101 is formed using the three electromechanical conversion elements 120, but it goes without saying that the number of electromechanical conversion elements 120 is not limited to three. The number of electromechanical conversion elements 120 can be freely selected according to the load, such as the size and mass of the driven member, the required speed, and the like.

  Referring again to FIG. 2, the substrate 110 has a strain gauge 166. Therefore, the strain applied to the substrate 110 can be detected by preloading the electromechanical transducer 120 through the substrate 110, and the load applied to each of the plurality of electromechanical transducers 120 can be detected. As a result, the drive signal can be feedback-controlled and the drive device 101 can be operated efficiently.

  In the above embodiment, the strain gauge 166 is mounted on the substrate 110 together with the transmission line 162, but other elements or circuits may be mounted on the substrate 110. That is, in the driving device 101, the plurality of electromechanical conversion elements 120 are arranged on the substrate 110 so as to be separated from each other. Therefore, other elements or circuits other than the electromechanical conversion element 120 can be mounted between the electromechanical conversion elements 120 on the substrate 110. Thereby, a mounting density can be improved and the assembly containing the drive device 101 can be reduced in size.

  In the drive device 101 as described above, the biasing member 140 applies a biasing force to the substrate 110. Since the spring seats 119 are arranged at equal intervals in the substrate 110, the biasing force acts on the substrate 110 from the plurality of biasing members 140 in a balanced manner. In addition, since the urging force is transmitted from the single substrate 110 to the plurality of electromechanical conversion elements 120, an equal urging force acts on the electromechanical conversion elements 120.

  In addition, since the substrate 110 is responsible for all electrical connections, mechanical support, and propagation of preload, an increase in the number of components as the entire drive device 101 is suppressed. Furthermore, the multi-functional board 110 contributes to a reduction in assembly man-hours, a shortening of the adjustment process period, and product reliability.

  FIG. 7 is a schematic cross-sectional view of the camera system 400. The same members as those in FIGS. 1 to 6 are denoted by the same reference numerals, and redundant description is omitted.

  The camera system 400 includes a lens unit 200 and a camera body 300. For the purpose of simplifying the description, in the following description, the object side to be imaged by the camera system 400 is described as the front side or the front end side. In addition, the imaging surface side in the camera body 300 is referred to as a rear side or a back side.

  The lens unit 200 includes a driving device 101, a fixed cylinder 210, lens groups 220, 230 and 240, and a lens side control unit 250. The lens groups 220, 230, and 240 are held inside the fixed barrel 210, and at least one lens group 230 is supported by the guide shaft 236 and moves in the optical axis X direction of the optical system.

  A lens side mount portion 260 is provided at the rear end of the fixed cylinder 210. The lens side mount part 260 is engaged with the body side mount part 360 of the camera body 300 to couple the lens unit 200 to the camera body 300. Since the coupling of the lens side mount part 260 and the body side mount part 360 can be released, another lens unit 200 having the lens side mount part 260 of the same standard can also be attached to the camera body 300.

  The lens groups 220, 230, and 240 are arranged along the optical axis X inside the fixed cylinder 210 to form an optical system. At least one lens group 230 is slidably supported by inserting a guide shaft 236 into a holding frame 232 that holds the lens group 230.

  The holding frame 232 includes a cam follower 234 that protrudes outward in the radial direction of the lens unit 200. The cam follower 234 meshes with a cam groove of a cam cylinder 238 disposed inside the fixed cylinder 210. Therefore, when the cam cylinder 238 rotates around the optical axis X, the lens group 230 moves along the guide shaft 236 in a direction parallel to the optical axis X of the optical system.

  The drive device 101 is disposed between the rear end of the cam cylinder 238 and the rear end surface of the fixed cylinder 210, and rotationally drives the cam cylinder 238 with respect to the fixed cylinder 210. In the driving device 101, the urging member 140 urges the substrate 110 toward the front side in a direction parallel to the optical axis X in the vicinity of the rear end of the fixed cylinder 210.

  Accordingly, the electromechanical conversion element 120 coupled to the substrate 110 is pressed toward the driven member 130 provided on the rear end side of the cam cylinder 238. With such a structure, the driving force generated by the electromechanical conversion element 120 rotates the cam cylinder 238 to move the lens group 230. As a result, in the lens unit 200, for example, the focal position of the optical system including the lens group 230 changes.

  The lens-side control unit 250 includes the drive circuit 170 of the drive device 101 and controls the entire lens unit 200. The lens-side control unit 250 is also responsible for communication with the body-side control unit 322 of the camera body 300. Thereby, the lens unit 200 attached to the camera body 300 operates in cooperation with the camera body 300.

  The camera body 300 includes a mirror unit 370 on the rear side of the body side mount portion 360. The mirror unit 370 has a main mirror holding frame 372 and a main mirror 371. The main mirror holding frame 372 is supported by a main mirror rotating shaft 373 while holding the main mirror 371.

  Further, the mirror unit 370 includes a sub mirror holding frame 375 and a sub mirror 374. The sub mirror holding frame 375 is pivotally supported from the main mirror holding frame 372 by a sub mirror rotating shaft 376 while holding the sub mirror 374. When the main mirror holding frame 372 rotates, the sub mirror 374 and the sub mirror holding frame 375 rotate with respect to the main mirror holding frame 372 while moving together with the main mirror holding frame 372.

  In the camera body 300, a focusing screen 352 and a pentaprism 354 are sequentially arranged above the mirror unit 370 in the drawing. In the camera body 300, a finder optical system 356 and a photometric sensor 390 are disposed behind the pentaprism 354 in the drawing. The rear end of the viewfinder optical system 356 is exposed as a viewfinder 350 on the back surface of the camera body 300. The photometric sensor 390 detects the incident light intensity.

  In the camera body 300, a focal plane shutter 310, an optical filter 332, and an image sensor 330 are sequentially arranged behind the mirror unit 370 in the drawing. The focal plane shutter 310 opens and closes, and introduces or blocks a subject light beam incident on the image sensor 330.

  The optical filter 332 is installed immediately before the image sensor 330 and removes infrared rays and ultraviolet rays from the subject light flux incident on the image sensor 330. The optical filter 332 protects the surface of the image sensor 330. Furthermore, the optical filter 332 includes a low-pass filter that reduces the spatial frequency of the subject luminous flux. Thereby, the optical filter 332 removes the spatial frequency component exceeding the Nyquist frequency of the image sensor 330 from the incident light beam, and suppresses the generation of moire.

  The imaging element 330 is formed by a photoelectric conversion element such as a CCD sensor or a CMOS sensor, and receives incident light transmitted through the optical filter 332. A substrate 320 and a rear display unit 340 are sequentially arranged behind the image sensor 330. On the substrate 320, a body side control unit 322, an image processing unit 324, and the like are mounted. The rear display unit 340 is formed of a liquid crystal display panel or the like, and is exposed on the rear surface of the camera body 300.

  The main mirror 371 in the state shown in the figure is at an observation position that obliquely crosses the subject luminous flux incident through the lens unit 200. Part of the subject light incident on the main mirror 371 at the observation position passes through a half mirror region formed on a part of the main mirror 371 and enters the sub mirror 374. Part of the subject light incident on the sub mirror 374 is reflected downward in the figure of the mirror unit 370 and is incident on the focus sensor 382 through the focusing optical system 380 disposed in the lower part of the mirror unit 370 in the figure. .

  The main mirror 371 at the observation position reflects most of the incident light beam incident through the lens unit 200 toward the focusing screen 352. The focusing screen 352 is disposed at a position optically conjugate with the element arrangement surface of the imaging element 330 and visualizes the image light formed by the optical system of the lens unit 200. The subject image connected to the focusing screen 352 is observed as an erect image from the viewfinder 350 through the pentaprism 354 and the viewfinder optical system 356.

  Part of the subject luminous flux emitted from the pentaprism 354 is received by the photometric sensor 390 disposed above the viewfinder optical system 356. When the release button of the camera body 300 is pressed halfway, the photometric sensor 390 detects the subject brightness from a part of the received incident light beam.

  The body-side control unit 322 calculates imaging conditions such as an aperture value, a shutter speed, and ISO sensitivity according to the detected subject brightness. As a result, the camera system 400 is in a state where it can shoot a subject under appropriate shooting conditions.

  When the release button of the camera body 300 is half-pressed, the focus sensor 382 detects the defocus amount in the optical system of the lens unit 200 and notifies the body side control unit 322. The body side control unit 322 communicates with the lens side control unit 250 to move the lens group 230 so as to cancel the detected defocus amount. In this way, the lens unit 200 is focused to form a subject image on the element array surface of the image sensor 330.

  Subsequently, when the release button is pushed deeply in the camera system 400, the main mirror holding frame 372 rotates clockwise together with the main mirror 371 in the drawing and stops substantially horizontally at the retracted position. As a result, the main mirror 371 retracts from the optical path of the subject luminous flux incident through the optical system of the lens unit 200.

  When the main mirror 371 rotates toward the shooting position, the sub mirror holding frame 375 also moves up with the main mirror holding frame 372 and rotates around the sub mirror rotation shaft 376 and stops substantially horizontally at the shooting position. To do. As a result, the sub mirror 374 is also retracted from the optical path of the subject light beam.

  When the main mirror 371 and the sub mirror 374 move to the photographing position, the focal plane shutter 310 is subsequently opened. Thereby, the incident light beam incident through the optical system of the lens unit 200 passes through the optical filter 332, is received by the image sensor 330, and is imaged. Thereafter, the rear film of the focal plane shutter 310 is closed, the main mirror 371 and the sub mirror 374 are returned to the observation position again, and a series of operations related to photographing is completed.

  In addition, although the example which applied the drive device 101 to the lens unit 200 in the camera system 400 of a lens interchangeable single-lens reflex camera was demonstrated, the drive device 101 is various imaging devices, such as a mirrorless camera, a compact camera, and a video camera. The lens unit can be used for moving the optical member. Furthermore, the present invention is not limited to the imaging device, and can be widely used when driving a member positioned with high positioning accuracy, including an optical device such as a microscope provided with an optical member. Furthermore, the present invention is not limited to optical devices, and can be widely used as actuators for stage devices and the like.

  FIG. 8 is a plan view of the substrate 111 having a different transmission line 162 layout. Elements having the same functions as those of the substrate 110 shown in FIG. 2 are denoted by the same reference numerals, and redundant description is omitted.

  The substrate 111 is common to the substrate 110 of the driving device 101 in that it has three sets of through electrodes 114, three through holes 116, and three through holes 118. The substrate 111 is also common to the substrate 110 of the driving device 101 in that it includes a transmission line 162 including a crossover, a power supply pad 163, a strain gauge 166, and a detection pad 167, which are formed of a conductive material.

  However, in the substrate 111, the arrangement of the through electrodes 114 is different. That is, in the substrate 111, the through-electrodes 114 are arranged in a row at the approximate center in the longitudinal direction of the electromechanical conversion element 120 for each of the electromechanical conversion elements 120. Corresponding to the arrangement of the through electrodes 114, the arrangement of the power supply terminals 124 is also changed in the electromechanical conversion element 127 used in combination with the substrate 111.

  FIG. 9 is a partial exploded perspective view showing a correspondence relationship between the substrate 111 and the electromechanical conversion element 127. Elements that are the same as those in FIG. 1 are given the same reference numerals, and redundant descriptions are omitted.

  In the substrate 111, the engaging portion 112 is disposed at a position overlapping the row formed by the through electrodes 114. Further, in the substrate 111, the through electrode 114 is provided so as to penetrate the inside of the engaging portion 112, and the lower end surface is exposed to the lower end surface of the engaging portion 112. In the electromechanical conversion element 127 corresponding to the substrate 111, the power supply terminal 124 is disposed on the bottom surface of the engagement groove 122.

  FIG. 10 is a schematic diagram showing the overall structure of the driving device 102 including the substrate 111 and the electromechanical conversion element 127. Elements common to the other drawings are denoted by the same reference numerals, and redundant description is omitted.

  Also in the driving device 102, the urging member 140 disposed on the upper side of the substrate 110 in the drawing abuts against the substrate 110 in a compressed state, and urges the substrate 110 downward in the drawing. On the lower side of the substrate 110 in the figure, the electromechanical conversion element 120 engaged with the engagement groove 122 is disposed at the lower end of the engagement portion 112.

  The lower end surface of the engaging portion 112 is in contact with the bottom surface of the engaging groove 122. Therefore, the urging force applied to the substrate 111 by the urging member 140 is transmitted to each of the electromechanical conversion elements 120 through the engaging portion 112. As a result, each of the electromechanical conversion elements 120 is biased toward the driven member 130. Further, the through electrode 114 of the substrate 111 is pressed against the power supply terminal 124 of the electromechanical transducer 120 and is electrically coupled.

  As can be seen from FIG. 6 again, in the longitudinal center of the electromechanical transducer 120, a vibration node is located when the electromechanical transducer 120 is vibrated by being supplied with a drive signal. Therefore, the displacement due to vibration is small in the center of the electromechanical conversion element 120, and a good contact state between the through electrode 114 and the power supply terminal 124 can be maintained.

  Further, since the engaging portion 112 is coupled to the electromechanical conversion element 120 at the vibration node, there is no element that prevents vibration of the electromechanical conversion element 120 other than the load by the driven member 130. Thereby, the electromechanical transducer 120 can be operated efficiently.

  FIG. 11 is a schematic cross-sectional view showing another driving device 103 from the same viewpoint as FIGS. 3 and 10. Elements common to the drive devices 101 and 102 are assigned the same reference numerals, and redundant description is omitted.

  In the driving device 103, the driven member 131 has a cylindrical shape. In addition, the electromechanical conversion element 129 causes the contact portion 126 to contact the driven member 131 in the direction from the outside to the inside of the substrate 113 horizontally in the drawing.

  The driving device 103 includes a biasing member 140 on the lower side of the substrate 113 in the figure. One end of the biasing member 140 is fixed to the substrate 113 by a set screw 142. The other end of the urging member 140 contacts the side surface of the electromechanical conversion element 129. Thereby, the urging member 140 urges the electromechanical conversion element 129 horizontally in the drawing in a direction from the outside to the inside of the substrate 113. Therefore, the contact portion 126 of the electromechanical conversion element 129 is pressed against the outer peripheral surface of the driven member 131 from the side in the figure.

  In the driving device 103, the transmission member 150 is sandwiched between the substrate 113 and the electromechanical conversion element 129, and the substrate 113 and the electromechanical conversion element 129 are electrically coupled. Further, the driving device 103 includes a support portion 180 that supports the electromechanical conversion element 129 so as to be slidable in the biasing direction of the biasing member 140.

  FIG. 12 is a side view partially showing a state in which the driving device 103 is seen from the direction indicated by the arrow C in FIG. Elements that are the same as those in FIG. 11 are given the same reference numerals, and redundant descriptions are omitted. The position of the cross section shown in FIG. 11 is indicated by an arrow D in FIG.

  A guide protrusion 182 extending perpendicularly to the paper surface is provided on the upper surface of the support portion 180 in the drawing. The guide protrusion 182 engages with an engagement groove 122 formed on the lower surface of the electromechanical conversion element 129 in the drawing. Thereby, the electromechanical conversion element 129 is supported from the support part 180 in a state in which the electromechanical conversion element 129 can slide vertically with respect to the paper surface.

  The urging member 140 urges the electromechanical conversion element 129 perpendicularly to the paper surface at the longitudinal center of the electromechanical conversion element 129. Therefore, the electromechanical conversion element 129 is guided by the guide protrusion 182 and pressed toward the driven member 131 located on the back side of the drawing.

  Further, as indicated by a dotted line in FIG. 12, the transmission member 150 contacts the electromechanical conversion element 129 at the center in the longitudinal direction of the electromechanical conversion element 129. As described above, the electromechanical conversion element 129 is supported and urged in contact with the guide protrusion 182, the urging member 140 and the transmission member 150 at the vibration node, and thus vibration generated when a drive signal is supplied. Are less disturbed by these members.

  FIG. 13 is a plan view of the substrate 113. Elements common to FIG. 11 and FIG. 12 are assigned the same reference numerals, and redundant description is omitted.

  The substrate 113 is common to the substrates 110 and 111 in that it has a through electrode 114 and a through hole 118. Similar to the substrate 111, the through electrode 114 is arranged in the radial direction of the substrate 113 so as to be located at the center in the longitudinal direction of each electromechanical transducer 120.

  The substrate 113 is also in common with the substrates 110 and 111 in that it has a transmission line 162 formed of a conductive material. However, in the substrate 113, the hole 116, the strain gauge 166, and the detection pad 167 are omitted. In addition, a connector 117 is mounted instead of the power supply pad 163. Further, since the substrate 113 is not subjected to the urging force, the substrate 113 does not have the spring seat 119.

  The substrate 113 is not provided with the punched hole 116 and the strain gauge 166. However, also on the substrate 113, a strain gauge 166 may be provided in the vicinity of the region where the urging member 140 is fixed, and the load applied to each electromechanical transducer 129 may be detected. Further, the strain gauge 166 may be highly sensitive by providing a hole 116 or a notch in the vicinity of the provided strain gauge 166.

  FIG. 14 is a plan view showing a state where the substrate 113 is removed from the driving device 103. Elements common to FIGS. 11 to 13 are denoted by the same reference numerals and redundant description is omitted.

  In the driving device 103, the driven member 131 has a cylindrical shape, and the electromechanical conversion elements 129 are arranged at equal intervals along the outer peripheral surface of the driven member 131, and the outer periphery of the annular driven member 131 is The contact portion 126 is brought into contact with the surface inward. Thereby, the drive device which rotates the cyclic | annular driven member 131 using the electromechanical conversion element 129 of the specification substantially the same as the electromechanical conversion elements 120 and 127 used in other embodiment can be formed.

  As mentioned above, although this invention was demonstrated using embodiment, the technical scope of this invention is not limited to the range as described in the said embodiment. It will be apparent to those skilled in the art that various modifications or improvements can be added to the above-described embodiment. It is apparent from the scope of the claims that the embodiments added with such changes or improvements can be included in the technical scope of the present invention.

101, 102, 103 Drive device, 110, 111, 113 Substrate, 112 Engagement part, 114 Through electrode, 116 Puncture hole, 117 Connector, 118 Through hole, 119 Spring seat, 120, 127, 129 Electromechanical conversion element, 121 A phase electrode, 122 engaging groove, 123 B phase electrode, 124 feeding terminal, 125 piezoelectric material layer, 126 abutting portion, 130, 131 driven member, 140 biasing member, 142 set screw, 150 transmission member, 162 transmission Line, 163 Feeding pad, 167 Detection pad, 166 Strain gauge, 170 Drive circuit, 180 Support part, 182 Guide protrusion, 200 Lens unit, 210 Fixed cylinder, 220, 230, 240 Lens group, 232 Holding frame, 234 Cam follower, 236 Guide shaft, 238 cam cylinder, 250 Lens side controller 260 lens side mount unit, 300 camera body, 310 focal plane shutter, 320 substrate, 322 body side control unit, 324 image processing unit, 330 imaging device, 332 optical filter, 340 display unit, 350 finder, 352 focusing screen, 354 penta Prism, 356 Finder optical system, 360 Body side mount, 370 Mirror unit, 371 Main mirror, 372 Main mirror holding frame, 373 Main mirror rotation axis, 374 Sub mirror, 375 Sub mirror holding frame, 376 Sub mirror rotation axis, 380 Focusing optical system, 382 focusing sensor, 390 photometric sensor, 400 camera system

Claims (16)

A plurality of electromechanical transducers that are supplied with driving power and generate mechanical vibrations;
A substrate having a transmission line for transmitting the driving power and mechanically coupled to the plurality of electromechanical transducer elements;
A drive device comprising: a biasing member that causes a biasing force that biases each of the plurality of electromechanical conversion elements toward the driven member from the substrate to the plurality of electromechanical conversion elements.   The drive device according to claim 1, wherein the plurality of electromechanical conversion elements are coupled to the substrate at positions separated from each other along a direction in which the driven member is driven.   The biasing member includes a plurality of elastic members that apply a biasing force to the substrate at equidistant positions in a direction of a surface orthogonal to the biasing direction of the biasing member. Drive device.   4. The drive device according to claim 2, wherein the plurality of electromechanical conversion elements are arranged in an annular shape to rotate the driven member.   5. The biasing force acts on the substrate, and the substrate transmits the biasing force to the plurality of electromechanical conversion elements. 6. Drive device.   5. The drive device according to claim 4, wherein each of the plurality of electromechanical conversion elements is restrained from displacement with respect to the substrate in a direction intersecting a direction of the urging force.   2. A transmission member that is deformably sandwiched between the substrate and each of the plurality of electromechanical transducers and that electrically couples the transmission line and each of the plurality of electromechanical transducers. The driving device according to any one of claims 1 to 6.   The said transmission member is compressed between the said board | substrate and each of these electromechanical conversion elements, and elastically deforms, The urging | biasing force acts on each of these electromechanical conversion elements. Drive device.   Each of the plurality of electromechanical transducers is restrained from being displaced with respect to the substrate in the direction of the biasing force at a mechanical vibration node of each of the plurality of electromechanical transducers. The drive device as described in any one.   The driving device according to claim 1, wherein the driven member receives a driving force from each of the plurality of electromechanical conversion elements on a cylindrical driven surface.   The driving device according to claim 10, wherein each of the plurality of electromechanical conversion elements receives a biasing force from the other end of an elastic member having one end fixed to the substrate.   The drive device according to claim 11, wherein each of the plurality of electromechanical conversion elements is slidably disposed along a biasing direction of the biasing force.   The drive according to any one of claims 1 to 12, wherein the substrate further includes a strain gauge that detects strain generated in the substrate in a region including a position coupled to the plurality of electromechanical transducer elements. apparatus.   The drive device according to claim 13, wherein the strain gauge includes a conductor line disposed on the substrate.   The drive device according to claim 13 or 14, wherein the substrate is provided along the strain gauge and has a punch hole that reduces a partial rigidity of the substrate.   An optical device comprising the drive device according to any one of claims 1 to 15.

Images