JP2013189691A - Method for producing optical element - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a production method for easily performing film formation by supporting a number of optical elements with high density.SOLUTION: According to this production method, since a plurality of lenses LZ, which are a plurality of optical elements, are arranged so as to be packed in a plurality of guide parts 26 constituting a groove-like guide part 25 provided in a holder 20, the plurality of lenses LZ can be easily arranged with high density so as to be aligned in the direction in which the guide part 26 extends. Thus, efficiency of a film formation process of the lens LZ can be promoted.

Description

  The present invention relates to a method for manufacturing an optical element, in which a film is formed on a lens or other optical element.

  As an optical element manufacturing method, there is a method of forming an antireflection film so as to cover a rectangular optically effective region and a part of the outer peripheral surface, and a region where no antireflection film is formed is provided on the outer peripheral surface. (See Patent Document 1). The region where the antireflection film is not formed is a trace of holding the optical element with a jig during film formation, but can be used as a positioning mark or the like when the optical element is assembled.

  As an optical element manufacturing method, an antireflection film is formed on a large number of optical elements, so that a masking device that supports a large number of optical elements to be embedded and has openings at portions corresponding to a pair of optical surfaces is used. (See Patent Document 2).

  However, Patent Document 1 does not disclose a method for holding an optical element using a jig, and an actual film formation requires a method for efficiently forming a film by simply supporting a large number of optical elements. Further, in the masking device of Patent Document 2, it is necessary to form a holding hole for each optical element to be formed, and the number of storage elements per area is small. Furthermore, in order to sequentially form films on the front and back optical surfaces while being arranged in the film forming apparatus, a jig for inverting the masking apparatus in the film forming apparatus is also required.

JP 2010-262010 A JP 2011-157487 A

  The present invention has been made in view of the above background art, and an object of the present invention is to provide a manufacturing method for easily forming a film by supporting a large number of optical elements at a high density.

  In order to achieve the above object, an optical element manufacturing method according to the present invention includes a plate-shaped holder having a groove-shaped guide portion capable of supporting a peripheral portion provided around an optical function portion among a plurality of optical elements. And a step of arranging the plurality of optical elements so as to be continuously packed in the groove-shaped guide portion, and a step of collectively forming a film on the optical surfaces of the plurality of optical elements held by the holder. .

  In the above manufacturing method, a plurality of optical elements are arranged so as to be continuously packed in a groove-shaped guide provided in the holder, so that a plurality of optical elements are arranged in a high density and simply so as to be arranged in the extending direction of the guide. It is possible to increase the efficiency of the film formation process of the optical element.

  In a specific aspect or aspect of the present invention, the holder has a plurality of groove-shaped guide portions that can support a plurality of optical elements and extend linearly, and each of the plurality of guide portions includes a plurality of optical elements. Arrange them so that they are packed continuously. In this case, the optical elements can be two-dimensionally arranged at high density by providing a plurality of guide portions in parallel.

  According to another aspect of the present invention, the holder has a triangular outline, and the length of the plurality of guide portions varies depending on the position on the holder. In this case, the optical element can be disposed and fixed on the triangular holder without waste.

  According to still another aspect of the present invention, the groove-shaped guide portions support the pair of opposing portions of the peripheral portions of the plurality of optical elements so as to be movable in the extending direction of the groove-shaped guide portions. Has a groove. In this case, the periphery of the optical element can be supported so as to be sandwiched between the pair of concave grooves.

  According to still another aspect of the present invention, the groove-shaped guide portion has a slit-shaped opening on the pair of main surface sides of the holder, and the holder is inverted in the film forming apparatus, whereby a plurality of optical elements are provided. A film is formed on a pair of optical surfaces provided on the surface. In this case, the film can be sequentially formed on the pair of optical surfaces of the optical element by reversing the holder.

  According to still another aspect of the present invention, the plate-shaped holder has a pair of rotating shafts that enable reversal, and transmits a driving force to a cam member that extends from the rotating shaft. Invert the holder. In this case, it is possible to increase the processing speed and efficiency by inverting the holder in the film forming apparatus.

  According to still another aspect of the present invention, the opening has a tapered shape that opens toward the surface with respect to a direction or a plane perpendicular to the direction in which the groove-shaped guide portion extends. In this case, uniform film formation is possible up to the periphery of the optical surface.

(A) is a top view explaining the holder utilized when enforcing the manufacturing method of an optical element, (B) is a side view of a holder. (A) is a partial enlarged side sectional view of the holder, and (B) is a partially enlarged plan view of the holder. It is a conceptual diagram explaining the film-forming process using the vapor deposition apparatus incorporating a holder.

  Hereinafter, an embodiment of an optical element manufacturing method according to the present invention will be described with reference to the drawings.

  FIGS. 1A and 1B are diagrams illustrating a holder used in manufacturing an optical element. The holder 20 is set in the film forming apparatus and can support a large number of lenses in a two-dimensional array.

  The holder 20 is a plate-like member having an isosceles triangular outline, and extends along an XY plane parallel to the paper surface. The holder 20 is formed, for example, by joining first and second main body members 21a and 21b that form a pair of upper and lower parts, and the two main body members 21a and 21b are set at appropriate intervals by a number of fasteners 22. It is fixed at the fastened position. Both the body members 21a and 21b are made of a metal material such as aluminum or stainless steel.

  The holder 20 has shafts 23a and 23b at the apex position and the bottom midpoint position, respectively, and supports both shafts 23a and 23b, thereby forming a bisector of two sides 20a and 20b constituting the contour. It can be rotated around a rotation axis AX extending along the axis. One shaft 23b of the holder 20 is provided with a cam member 23c, and the holder 20 is rotated by receiving a driving force from a mechanical mechanism (not shown) provided outside (a reversing mechanism 41 in FIG. 3 described later). Can be made.

  A groove-shaped guide portion 25 is formed in the holder 20. The groove-shaped guide portion 25 includes a large number of groove-shaped guide portions 26. Each guide portion 26 extends linearly in the Y direction and extends so as to be parallel to each other at equal intervals, and the entire groove-shaped guide portion 25 extends over the entire holder 20.

  Each guide portion 26 extends in a direction (Y direction) perpendicular to one side 20a of the contour, and has an insertion port 26a connected to each guide portion 26 on the side 20a side. The insertion opening 26a has a size corresponding to a circular lens (optical element) described later, and allows the lens to be loaded into the guide portion 26. These insertion openings 26a can be collectively covered by the lid member 24, and the lens in each guide portion 26 can be prevented from flowing out. The length in the depth direction (Y direction) of the guide portion 26 differs depending on the arrangement of the guide portion 26 of interest, and the lens filling density is made as high as possible. The specific length of the guide portion 26 corresponds to the number of lenses packed in the guide portion 26. Thereby, the substantially circular lens (optical element) can be packed in the guide portion 26 without any gap, and the number of lenses can be easily managed.

  As shown in an enlarged view in FIG. 2A, the first main body member 21a supports the first optical surface S1 side of the lens LZ, and the second main body member 21b is the second optical member of the lens LZ. The surface S2 side is supported. The first main body member 21a includes a plurality of lens frame portions 28a disposed between the plurality of guide portions 26, and a connection portion 28b that connects the plurality of lens frame portions 28a to each other and forms an overall shape. Similarly, the second main body member 21b includes a plurality of lens frame portions 28c disposed between the plurality of guide portions 26, and a connection portion 28d that connects the plurality of lens frame portions 28c to each other and forms an overall shape. Have. A projection 29a is formed on the lens frame portion 28a so as to face the space SP of the guide portion 26. Further, a step-shaped recess 29b is formed in the lens frame portion 28c facing the lens frame portion 28a so as to face the space SP of the guide portion 26. In a state where the first main body member 21a and the second main body member 21b are connected, the projection 29a of the lens frame portion 28a and the recess 29b of the lens frame portion 28c are combined to form the concave groove 29. A pair of concave grooves 29 arranged to face each other with the space SP interposed therebetween constitutes a part of the guide portion 26 and supports a pair of portions facing the X direction in the peripheral portion 82 of the lens LZ. Yes. Thereby, the lens LZ is slidable along the guide portion 26. At this time, since the optical function portion 81 of the lens LZ does not contact the guide portion 26 or the concave groove 29 thereof, the lens LZ can be accommodated without being damaged.

  The lens frame 28a on the first main body member 21a side has a slit-like elongated opening OP1 opened upward on the upper main surface 20i side, and the lens frame on the second main body member 21b side. The portion 28c has a slit-like elongated opening OP2 that is opened downward toward the lower main surface 20j. One opening OP1 has a tapered shape that opens toward the surface or the outside in the direction (X direction) or the surface (XZ plane) perpendicular to the direction in which the guide portion 26 extends. That is, the slope 26s of the opening OP1 has a mortar-shaped cross section, and the film substance can easily reach the peripheral portion of the first optical surface S1 formed in the optical function portion 81 of the lens (optical element) LZ. Yes. The other opening OP2 also has a tapered shape that opens toward the back surface or the outside in the direction perpendicular to the direction in which the guide portion 26 extends. That is, the inclined surface 26t of the opening OP2 has a mortar-shaped cross section, and the film substance can easily reach the peripheral portion of the second optical surface S2 formed in the optical function portion 81 of the lens LZ.

  As shown in FIG. 2B, in each guide portion 26, a plurality of lenses LZ each having a circular optical function portion 81 and an annular peripheral portion 82 are arranged without gaps. That is, the lenses LZ are arranged so as to be continuously packed. Thereby, the arrangement density of the lenses LZ can be increased, and the number of lenses supported by one holder 20 can be increased. In addition, each guide portion 26 is formed with openings OP1 and OP2 that are provided with tapered outwards, so that unevenness of film formation on the optical surfaces S1 and S2 can be reduced. When the lens LZ is stored in the guide portion 26, for example, the lens LZ is sequentially inserted from the insertion port 26a. Since the lens LZ slides within the guide portion 26, the lens LZ can be stuffed into the guide portion 26 so that the lens LZ can be poured into the guide portion 26. After the lens stuffing is completed, the lens LZ has a protrusion that is partially inserted into the insertion port 26a. By attaching the lid member 24, the lens LZ is easily fixed in the guide portion 26. When taking out the lens LZ in the guide portion 26, the reverse process is performed. That is, the lid member 24 is removed from the holder 20 and the lens LZ is taken out so as to flow out from each guide portion 26. As for the insertion and removal of the lens LZ, a storage device (not shown) that stores the lenses LZ in a row in the same manner as the guide portion 26 can be used. The storage device can be connected to the main body of the holder 20 with the lid member 24 removed, and the lens LZ can be put in and out at once.

  Hereinafter, a vapor deposition apparatus and the like for performing film formation collectively on the lens LZ housed in the holder 20 of FIG. 1 will be described.

  As shown in FIG. 3, the vapor deposition apparatus 100 includes a vapor deposition source 10 that is a film forming material source for vacuum vapor deposition, a holder 20 that holds a plurality of lenses LZ in a two-dimensional array, and a plurality of holders 20. A vapor deposition jig 30 that supports and rotates and reverses, a vacuum vessel 40 that accommodates the vapor deposition source 10, the vapor deposition jig 30, and the like, a vapor deposition source control unit 91 that controls the operation of the vapor deposition source 10, and the vapor deposition jig 30 The operation of the vapor deposition jig driving unit 92 for operating and driving, the atmospheric pressure control unit 93 for controlling the atmospheric pressure in the vacuum vessel 40, that is, the degree of vacuum, the operation of the vapor deposition source control unit 91, the vapor deposition jig driving unit 92, and the atmospheric pressure control unit 93 The control part 90 which controls this is provided. Note that the lens LZ that is a target of film formation by the vapor deposition apparatus 100 is a small plastic lens formed by injection molding.

  The vapor deposition source 10 enables vacuum deposition of various film forming materials, and includes a plurality of crucible portions 10 a and an electron gun portion 10 b arranged at the bottom of the vacuum vessel 40. Here, the plurality of crucible portions 10a are supported by the hearth liner 10d and can be switched in arrangement. Each crucible portion 10a contains an evaporating substance for coating the optical surfaces S1 and S2 of the lens LZ, and the electron gun portion 10b is located in a specific crucible portion 10a arranged at a deposition position by a hearth liner 10d. An electron beam is irradiated to the evaporated substance. Thereby, the evaporation substance in the crucible part 10a can be heated and melted by the electron beam, and the vapor EM of the evaporation substance can be evaporated or sublimated upward from the crucible part 10a. The vapor deposition source 10 is operated by the vapor deposition source control unit 91. In addition, a plurality of film forming materials can be coated on the optical surfaces S1 and S2 of the lens LZ by sequentially moving the plurality of crucible portions 10a to the evaporation position, and the lens can be changed by changing the film forming material. A multilayer coating can be formed on the surface of the LZ.

  As already described with reference to FIGS. 1 (A) and 1 (B), the holder 20 has a triangular plate-like outer shape, and two-dimensionally holds a plurality of lenses LZ. The holder 20 is supported by the vapor deposition jig 30 and is disposed above the vapor deposition source 10 in a state where a large number of lenses LZ are opposed to the vapor deposition source 10. As will be described later in detail, the holder 20 can be turned upside down or upside down by a vapor deposition jig 30, and as shown in a partially enlarged view, one surface of each lens LZ is an optical surface S1 and the other surface. The openings OP1 and OP2 that expose the optical surface S2 are on the front and back sides. Through these openings OP1 and OP2, the vapor EM from the vapor deposition source 10 can be vapor-deposited on the optical surface S1 or the optical surface S2 of the lens LZ to deposit the evaporated substance. The deposited film, that is, the thin film deposited on the optical surfaces S1 and S2, for example, is an antireflection film, but may be an optical thin film having various functions such as increased reflection and a filter.

  The vapor deposition jig 30 has a dome shape or a conical shape as a whole, and is disposed above the vapor deposition source 10 in the vacuum vessel 40. The vapor deposition jig 30 appropriately displaces the plurality of holders 20 while supporting the plurality of holders 20 against a specific crucible portion 10 a disposed at the vapor deposition position in the vapor deposition source 10. Each holder 20 is detachable from the vapor deposition jig 30, and the holder 20 can be set in the vapor deposition apparatus 100 as it is without refilling the lens LZ. The vacuum vessel 40 is provided with a reversing mechanism 41 so that the holder 20 held by the vapor deposition jig 30 can be reversed 180 ° at an appropriate timing. Each holder 20 is supported so that the distance from the vapor deposition source 10 to the lens LZ is the same even when inverted. As a result, when the film formation on the optical surface S1 side is completed, the holder 20 is reversed by the reversing mechanism 41 and the same processing is performed, so that both the optical surfaces S1, S2 of the lens LZ are collectively formed. A film (double-sided coating) can be performed.

  According to the manufacturing method of the present embodiment described above, a plurality of lenses LZ, which are a plurality of optical elements, are continuously packed in a plurality of guide portions 26 constituting a groove-shaped guide portion 25 provided in the holder 20. Since they are arranged, the plurality of lenses LZ can be easily arranged at high density so as to be arranged in the extending direction of the guide portion 26, and the film forming process of the lenses LZ can be made efficient.

  Although the present invention has been described based on the above embodiments, the present invention is not limited to the above embodiments, and various modifications are possible.

  For example, the size and optical surface shape of the lens LZ stored in the guide unit 25 are appropriately changed according to the application of the lens LZ.

  Further, the holder 20 is not limited to the one in which the lens LZ is inserted from the one side 20a side. For example, it can be set as the structure which connects a pair of main body members 21a and 21b with a magnet etc. so that separation is possible easily. In this case, both the main body members 21a and 21b are separated, set so that a large number of lenses LZ are arranged in the recess 29b of the second main body member 21b, and the first main body member 21a so as to cover the second main body member 21b. By joining, a large number of lenses LZ can be stored and held.

  In the above embodiment, the guide portion 26 extends linearly. However, the guide portion 26 can extend in an arc shape.

  In the above embodiment, the lens LZ is a plastic lens. However, the material of the lens LZ is not limited to plastic, and may be glass or other inorganic materials.

  Moreover, in the said embodiment, although the vapor deposition source 10 is heated with an electron beam, the vapor deposition source 10 can also be heated with another heating method.

  The lens (optical element) LZ held by the holder 20 is generally circular. However, the holder 20 as described above can store a rectangular or elliptical lens, and has a notch in part. A lens can also be stored.

DESCRIPTION OF SYMBOLS 10 ... Deposition source, 20 ... Holder, 20a, 20b ... Side, 21a ... First main body member, 21b ... Second main body member, 22 ... Fastener, 23a, 23b ... Shaft, 23c ... Cam member, 24 ... Lid Member, 25 ... groove-shaped guide part, 26 ... guide part, 26a ... insertion port, 26s, 26t ... slope, 29 ... concave groove, 29a ... projection, 29b ... depression, 30 ... vapor deposition jig, 40 ... vacuum vessel, DESCRIPTION OF SYMBOLS 41 ... Inversion mechanism, 81 ... Optical function part, 82 ... Peripheral part, 100 ... Deposition apparatus, AX ... Rotating shaft, LZ ... Lens, OP1, OP2 ... Aperture, S1, S2 ... Optical surface, SP ... Space, EM ... Steam

Claims (7)

The plurality of optical elements are connected to the groove-shaped guide portion by using a plate-shaped holder having a groove-shaped guide portion capable of supporting a peripheral portion provided around the optical function portion among the plurality of optical elements. And a process of arranging to pack,
A method of collectively forming a film on the optical surfaces of the plurality of optical elements held by the holder.   The holder has a plurality of linear guide portions that can support the plurality of optical elements and extend linearly, and is arranged so that the plurality of optical elements are continuously packed in each of the plurality of guide portions. The method of manufacturing an optical element according to claim 1.   The method of manufacturing an optical element according to claim 2, wherein the holder has a triangular outline, and lengths of the plurality of guide portions are different depending on positions on the holder.   The groove-shaped guide portion has a pair of concave grooves that support a pair of opposing portions of the peripheral portions of the plurality of optical elements so as to be movable in the extending direction of the groove-shaped guide portion. The manufacturing method of the optical element as described in any one of Claim 1 to 3.   The groove-shaped guide part has a slit-like opening on a pair of main surface sides of the holder, and a pair of optical surfaces provided in the plurality of optical elements by inverting the holder in a film forming apparatus. 5. The method for manufacturing an optical element according to claim 1, wherein film formation is performed.   The plate-shaped holder has a pair of rotating shafts that can be reversed, and transmits the driving force to a cam member that extends from the rotating shaft, whereby the holder is reversed in the film forming apparatus. The method for producing an optical element according to claim 5.   The method of manufacturing an optical element according to claim 6, wherein the opening has a tapered shape that opens toward a surface in a direction perpendicular to a direction in which the groove-shaped guide portion extends.

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