JP2013088275A - Physical quantity detection element, physical quantity detection device and electronic apparatus - Google Patents

Abstract

A physical quantity detection element capable of acoustically coupling a plurality of vibrating arms to excite vibrations of the respective vibrating arms with a single oscillation circuit and improving the sensitivity of physical quantity detection.
A gyro element (physical quantity detection element) 1 includes a base 2, a first connecting part 31 and a second connecting part 32 extending from the base 2 in opposite directions along the X axis, and a drive signal electrode. 7 and a detection vibration arm 5 having a detection signal electrode 8, and the drive vibration arm 4 has a Y axis extending from the root 6 a of the first connecting portion 31 or the root 6 b of the second connecting portion 32. Or the first drive vibrating arm 41 to the eighth drive vibrating arm 48 extending obliquely with respect to the X-axis or the X-axis, and the detection vibrating arm 5 has a direction along the Y-axis from the base 2 or It has the 1st detection vibrating arm 51 thru | or the 8th detection vibrating arm 58 extended in the diagonal direction with respect to the X-axis.
[Selection] Figure 1

Description

  The present invention relates to a physical quantity detection element capable of detecting a physical quantity such as angular velocity, and a physical quantity detection device and an electronic apparatus including the physical quantity detection element.

  Conventionally, as a physical quantity detection element, for example, in Patent Document 1, a base part, a support part extending in the opposite direction along the X-axis direction from the base part, and a tip of the support part along the Y-axis direction are disclosed. A drive arm extending in the opposite direction to each other, a detection vibration arm for Y axis extending in the opposite direction along the Y-axis direction from the base portion, and in the opposite direction along the Y-axis direction from the base portion. A vibrator including a Z-axis detection vibration arm that extends is disclosed. According to this vibrator, it is possible to suppress the parasitic vibration of the Y-axis detection vibration arm caused by the rotation angular velocity around the Z axis and reduce the error in the measurement value of the rotation angular velocity.

  In addition, there is an inertial sensor element (physical quantity detection element) as disclosed in Patent Document 2, for example. The inertial sensor element includes a vibrating portion having a plurality of legs, the vibrating portions extending from the base in opposite directions along the first direction, and further from the base to the first This is a simple configuration extending in opposite directions to each other along a second direction orthogonal to the direction. The vibrating portion along the first direction is provided with an excitation electrode on one side and a detection electrode on the other side, and can detect a rotational angular velocity (physical quantity) around the first direction. Similarly, the vibration part along the second direction can detect the rotational angular velocity around the second direction.

JP 2007-108053 A JP 2006-267094 A

  However, in Patent Document 1 and Patent Document 2, these vibrators and inertial sensor elements have a configuration in which a vibration part having a drive arm and an excitation electrode extends separately from the base part, so that the acoustic coupling of each vibration mode is weak. There is a problem that it is difficult to excite both vibrations with one drive circuit. As a countermeasure against this, a configuration in which excitation is performed by two drive circuits is conceivable. However, in this configuration, the area of the circuit configuration portion becomes large, and it is difficult to reduce the size of the device including the vibrator or the inertial sensor element. .

  SUMMARY An advantage of some aspects of the invention is to solve at least a part of the problems described above, and the invention can be implemented as the following application examples or forms.

  Application Example 1 A physical quantity detection element according to this application example has a coordinate axis having a base, an X axis passing through the origin that is the center of gravity of the base, and a Y axis passing through the origin and orthogonal to the X axis. The first quadrant is a region where both the X and Y coordinates take a positive value, the second quadrant is a region where the X coordinate is negative and the Y coordinate takes a positive value, and both the X and Y coordinates are When defining a region having a negative value as the third quadrant and a region having a positive X coordinate and a negative Y coordinate as the fourth quadrant, the region is connected to the base, and the base along the X axis First and second connection portions provided on both sides of the first drive vibration arm and first drive vibration arms and second drive vibrations extending from the first connection portion in opposite directions along the Y-axis. Third drive vibration extending from the arm and the second connecting portion in opposite directions along the Y-axis. And a fourth drive vibrating arm, a fifth drive vibrating arm extending obliquely with respect to the first quadrant direction and the X axis from the first connecting portion side of the first drive vibrating arm, A sixth drive vibrating arm extending obliquely with respect to the X axis in the fourth quadrant direction from the first connecting portion side of the two drive vibrating arm, and the second connecting portion of the third drive vibrating arm From the side, in the second quadrant direction and obliquely extending with respect to the X-axis, from the second connecting portion side of the fourth drive vibration arm, in the third quadrant direction and the An eighth drive vibrating arm extending obliquely with respect to the X axis, a first detection vibrating arm extending in the plus Y axis direction from the first quadrant side of the base, and a fourth quadrant side of the base From the second detection vibrating arm extending in the negative Y-axis direction and the second quadrant side of the base, the positive Y-axis direction From the third quadrant side of the base, the fourth detection vibration arm extending in the negative Y-axis direction, and the first quadrant from the first quadrant side of the base. A fifth detection vibrating arm extending obliquely with respect to the direction and the X axis, and a sixth detection arm extending obliquely with respect to the fourth quadrant direction and with respect to the X axis from the fourth quadrant side of the base. From the second vibrating quadrant side of the base, the seventh detecting vibrating arm extending obliquely with respect to the second quadrant direction and the X axis, and the third quadrant side of the base And an eighth detection vibrating arm extending obliquely with respect to the X axis in a three-quadrant direction.

  According to the physical quantity detection element of this application example, the stress on the first connecting portion side in the first driving vibrating arm contributes to the excitation of the fifth driving vibrating arm, and on the first connecting portion side in the second driving vibrating arm. This stress contributes to the excitation of the sixth drive vibrating arm, and the acoustic coupling on the first connecting portion side that is the root of each is enhanced. Therefore, it is possible to suppress so-called vibration leakage, in which vibration is transmitted from the first drive vibration arm, the second drive vibration arm, the fifth drive vibration arm, and the sixth drive vibration arm to the first connecting portion. Similarly, vibration leakage can also be suppressed on the second connecting portion side of the third drive vibration arm, the fourth drive vibration arm, the seventh drive vibration arm, and the eighth drive vibration arm. Thereby, the physical quantity detection element can reduce the impedance as the physical quantity detection element and increase the Q value by suppressing vibration leakage. In addition, the physical quantity detection element does not need to be adjusted to increase the acoustic coupling by combining the natural resonance frequencies of the drive vibration arms (the first drive vibration arm to the eighth drive vibration arm). Since the acoustic coupling property is high, it becomes possible to excite two drive modes with one oscillation circuit. Furthermore, by setting the drive vibration arm and the detection vibration arm (first detection vibration arm to eighth detection vibration arm) individually, it is sufficient to wire only the drive electrode to the drive vibration arm, and the detection vibration arm. Since only a detection electrode needs to be wired, a large electrode space can be obtained, and the sensitivity of physical quantity detection can be improved. Also, the drive vibration arm and the detection vibration arm individually extend from the base, so that the drive signal of the drive vibration arm is electrostatically superimposed on the detection signal of the detection vibration arm. Can be suppressed. Such a physical quantity detection element can detect a physical quantity such as an angular velocity around the Y axis by the first detection vibrating arm to the fourth detection vibrating arm, and an angular velocity around the X axis by the fifth detection vibrating arm to the eighth detection vibrating arm. It is possible to detect a physical quantity around two axes by itself.

  Application Example 2 In the physical quantity detection element according to the application example described above, it is preferable that the first detection vibration arm to the fourth detection vibration arm extend from the Y axis side of the base portion.

  According to this configuration, the first detection vibrating arm to the fourth detection vibrating arm extend along the Y axis, and the starting point of the extension is closer to the Y axis at the base, that is, the side closer to the Y axis. It is located so as to be separated from any of the fifth detection vibration arm to the eighth detection vibration arm extending in an oblique direction with respect to the X axis from the base. Accordingly, the first detection vibrating arm to the fourth detection vibrating arm are arranged so as to suppress the influence of vibration on the fifth detection vibrating arm to the eighth detection vibrating arm. Therefore, the physical quantity detection element can reduce the so-called other-axis sensitivity and can detect the physical quantity reliably.

  Application Example 3 In the physical quantity detection element according to the application example described above, it is preferable that the fifth detection vibration arm to the eighth detection vibration arm extend from the X-axis side of the base portion.

  According to this configuration, the fifth detection vibration arm to the eighth detection vibration arm extend obliquely with respect to the X axis, and the starting point of the extension is closer to the X axis of the base, that is, closer to the X axis. Yes, and located away from any of the first detection vibrating arm to the fourth detection vibrating arm extending along the Y axis from the base. Thereby, the fifth detection vibrating arm to the eighth detection vibrating arm are arranged so as to suppress the influence of vibration on the first detection vibrating arm to the fourth detection vibrating arm. Therefore, the physical quantity detection element can further reduce the so-called other-axis sensitivity and can reliably detect the physical quantity.

  Application Example 4 In the physical quantity detection element according to the application example described above, the first drive vibration arm to the eighth drive vibration arm include drive signal electrodes, and the first detection vibration arm to the eighth detection vibration arm. Is preferably provided with a detection signal electrode.

  According to this configuration, the drive vibration arm (first drive vibration arm to eighth drive vibration arm) is configured to perform drive vibration by including the drive signal electrode, and the detection vibration arm (first detection vibration arm to The eighth detection vibrating arm) includes a detection signal electrode and is configured to detect a physical quantity such as an angular velocity around the X axis and the Y axis in the physical quantity detection element. That is, the drive vibration arm and the detection vibration arm are dedicated arms for driving or detection, and can vibrate without unnecessary noises. Thereby, the physical quantity detection element can detect the physical quantity more reliably.

  Application Example 5 The physical quantity detection element according to the application example described above includes a ninth detection vibration arm and a tenth detection vibration arm respectively extending in the opposite directions along the Y axis from the center of the base. It is preferable.

  According to this configuration, the physical quantity detection element further includes the ninth detection vibration arm and the tenth detection vibration arm, and the ninth detection vibration arm and the tenth detection vibration arm are arranged on the Y axis from the center of the base. In the state along, they extend in opposite directions. As a result, the physical quantity detection element can detect physical quantities around the Z-axis in addition to detecting physical quantities such as angular velocities around the X-axis and Y-axis. Is possible.

  Application Example 6 In the physical quantity detection element according to the application example described above, the fifth drive vibration arm and the sixth drive vibration arm extend from a position avoiding the extension line of the first connection portion, and It is preferable that the drive vibration arm and the eighth drive vibration arm extend from a position avoiding the extension line of the second connecting portion.

  According to this configuration, the fifth drive vibrating arm and the sixth drive vibrating arm are not formed on an extension line obtained by extending the first connecting portion extending from the base as it is. That is, the fifth drive vibrating arm and the sixth drive vibrating arm branch out from the first drive vibrating arm or the second drive vibrating arm, and this branch point is a position that avoids the extension line. As a result, the fifth drive vibrating arm and the sixth drive vibrating arm can improve the acoustic connectivity with the first drive vibrating arm or the second drive vibrating arm at a position away from the first connecting portion. Similarly, the seventh drive vibrating arm and the eighth drive vibrating arm extend from a position avoiding the extension line in the third drive vibrating arm or the fourth drive vibrating arm. It is possible to enhance the acoustic connectivity with the four-drive vibrating arm at a position away from the second connecting portion. Therefore, the physical quantity detection element can more reliably suppress vibration leakage from the first drive vibration arm to the eighth drive vibration arm in the base direction and increase the amplitude of vibration.

  Application Example 7 In the physical quantity detection element according to the application example described above, the fifth drive vibration arm vibrates in the same phase as the first drive vibration arm, and the sixth drive vibration arm includes the first drive vibration arm. The seventh drive vibration arm vibrates in the same phase as the second drive vibration arm that vibrates in the opposite phase to the arm, and the seventh drive vibration arm vibrates in the opposite phase to the first drive vibration arm. Preferably, the eighth drive vibrating arm vibrates in phase, and the eighth drive vibrating arm vibrates in the same phase as the fourth drive vibrating arm that vibrates in the opposite phase to the third drive vibrating arm.

  According to this configuration, in the physical quantity detection element, the first drive vibration arm and the fifth drive vibration arm, and the second drive vibration arm and the sixth drive vibration arm vibrate in mutually opposite phases with respect to the X axis, The third drive vibration arm and the seventh drive vibration arm that vibrate in the opposite phase to the first drive vibration arm, and the fourth drive vibration arm and the eighth drive vibration arm vibrate in opposite phases with respect to the X axis. . As a result, the physical quantity detection element can excite a well-balanced drive vibration, and is less likely to generate unnecessary vibration noise.

  Application Example 8 The physical quantity detection element described in the application example described above preferably uses a piezoelectric material having a hexagonal crystal structure.

  According to this configuration, the hexagonal piezoelectric material has a mechanical axis, an electrical axis, and an optical axis, such as quartz, and vibrates accurately by an applied drive signal and applied force. In response to this, the detection signal is generated. If such a piezoelectric material is used for forming the physical quantity detection element, it is possible to accurately detect a physical quantity such as an angular velocity. As a preferred example of the physical quantity detection element, the first drive vibrating arm and the sixth drive vibrating arm, the second drive vibrating arm and the fifth drive vibrating arm, the third drive vibrating arm and the eighth drive vibrating arm, and the fourth drive. A configuration in which each of the vibrating arm and the seventh driving vibrating arm forms an angle of 120 degrees is conceivable. In this case, the hexagonal piezoelectric material has three electrical axes (X-axis) each having an inner angle of 120 degrees, so that even an arm configuration such as the physical quantity detection element as an example is used. It can be easily formed. Furthermore, since the physical quantity detection element including the configuration example as the example has high connectivity at the root, when the vibration of the drive vibration arm is excited, the physical quantity detection element is more likely to contribute to the excitation of the corresponding drive vibration arm. Such a physical quantity detecting element having a high acoustic coupling property can form a system with a single drive circuit to obtain, for example, a bi-directional vibration mode. And more advantageous.

  Application Example 9 The physical quantity detection device according to this application example includes a drive circuit that supplies a drive signal to the first drive vibration arm to the eighth drive vibration arm, and at least the first detection vibration arm to the eighth detection vibration. And a detection circuit for detecting a physical quantity detection signal from the arm.

  According to this physical quantity detection device, it has a physical quantity detection element capable of suppressing vibration leakage, and further, the physical quantity detection element is controlled by the drive circuit and the detection circuit, thereby detecting physical quantities such as angular velocity. The accuracy can be greatly improved. In this case, if the physical quantity detection device is configured as in this application example, vibration can be excited with a single drive circuit even if it has a plurality of arms, and the size of the device can be reduced.

  Application Example 10 In the physical quantity detection device according to the application example, the detection circuit includes a sum of the detection signal generated in the first detection vibrating arm and the detection signal generated in the second detection vibrating arm, and It is preferable that the physical quantity detection signal is detected by differentiating a sum of the detection signal generated in the third detection vibrating arm and the detection signal generated in the fourth detection vibrating arm.

  According to this configuration, a so-called difference is obtained in which the sum of the detection signal from the first detection vibration arm and the second detection vibration arm and the detection signal from the third detection vibration arm and the fourth detection vibration arm is differential. In this case, it is possible to detect a physical quantity such as an angular velocity around the Y axis by using the motion detection method.

  Application Example 11 In the physical quantity detection device according to the application example, the detection circuit includes a sum of the detection signal generated in the fifth detection vibrating arm and the detection signal generated in the seventh detection vibrating arm, It is preferable that the physical quantity detection signal is detected by differentiating a sum of the detection signal generated in the sixth detection vibrating arm and the detection signal generated in the eighth detection vibrating arm.

  According to this configuration, a so-called difference is obtained in which the sum of the detection signals from the fifth detection vibration arm and the seventh detection vibration arm and the detection signals from the sixth detection vibration arm and the eighth detection vibration arm are obtained. By using the motion detection method, in this case, it is possible to detect a physical quantity such as an angular velocity around the X axis.

  Application Example 12 An electronic apparatus described in this application example includes the physical quantity detection element described in the application example.

  According to this electronic apparatus, since the drive vibration arm and the detection vibration arm are individually set and the physical quantity detection element capable of improving the physical quantity detection accuracy by suppressing vibration leakage, An accurate sensor function can be exhibited, and the performance as an electronic device can be improved.

FIG. 3 is a plan view illustrating a configuration of a gyro element according to the first embodiment. FIG. 6 is a plan view illustrating a configuration of a gyro element according to a second embodiment. FIG. 6 is a plan view illustrating a configuration of a gyro element according to a third embodiment. (A) Plan view showing detection of angular velocity around Y axis in gyro element, (b) Plan view showing detection of angular velocity around X axis in gyro element, (c) Detection of angular velocity around Z axis in gyro element. FIG. (A) The top view which shows the gyro apparatus provided with the gyro element, (b) Sectional drawing which shows the gyro apparatus provided with the gyro element. (A) A perspective view showing a digital video camera provided with a gyro element, (b) A perspective view showing a cellular phone provided with a gyro element.

  Hereinafter, a physical quantity detection element of the present invention will be described with reference to the accompanying drawings. Here, as a preferred example, a gyro element (physical quantity detection element) made of quartz, which is a piezoelectric material having good vibration characteristics, will be described.

  First, the quartz that is the material of the gyro element will be described. A gyro element as a physical quantity detection element is cut out from a crystal column that forms a hexagonal column. The crystal column includes a z-axis that is an optical axis in the longitudinal direction of the column, an x-axis that is an electric axis perpendicular to the z-axis, and a mechanical axis. It has a y-axis which is an axis, and has a so-called hexagonal nature. Here, there are three x-axes on the xy plane, which is a hexagonal plane perpendicular to the z-axis, and each has an interior angle of 120 degrees, and etching is performed in each plane formed by these x-axes. The etching speed and the like depending on directions are the same. In such a quartz crystal column, the gyro element is cut out from a quartz crystal z plate along a plane inclined at an angle of 5 degrees around the x-axis when the xy plane is seen from the intersection (coordinate origin) of the x-axis and the y-axis. It is a thing. That is, the coordinate axes of the gyro element cut out from the crystal column are x (X axis in claims), y '(Y axis in claims), and z' (Z axis in claims).

In general, a physical quantity detection element is required to maintain a certain vibration frequency difference between the natural resonance frequency of the driving vibration mode and the natural resonance frequency of the detection vibration mode in order to improve measurement sensitivity. Yes. However, the quartz crystal of the piezoelectric material has anisotropy, and when the crystal plane changes, the degree of temperature change of the vibration frequency differs. On the other hand, the gyro element uses only a crystal plane having the best temperature characteristics or the like of quartz, for example, a quartz z-plate, to vibrate the entirety of each vibrating arm within a predetermined plane. Thus, it is possible to provide a gyro element that vibrates with extremely high stability. In the following, first, an embodiment according to the shape of the gyro element will be described.
(Embodiment 1)

  FIG. 1 is a plan view showing the configuration of the gyro element in the first embodiment. As shown in FIG. 1, the gyro element (physical quantity detection element) 1 has arms along the XY plane in the X, Y, and Z coordinates with the center of gravity of the base 2 (in this case, the center position of the base 2) as the origin. Etc. are extended. The X, Y, and Z coordinates are coordinate axes having an X axis passing through the origin, a Y axis passing through the origin and orthogonal to the X axis, and a Z axis passing through the origin and orthogonal to the X axis and the Y axis. . In this coordinate axis, an area where both the X coordinate and the Y coordinate take a positive value is the first quadrant, an area where the X coordinate is negative and the Y coordinate takes a positive value, the second quadrant, the X coordinate and the Y coordinate Are defined as the third quadrant, and the region where the X coordinate is positive and the Y coordinate is negative is defined as the fourth quadrant. The X axis, Y axis, and Z axis here correspond to the X axis, Y axis, and Z axis in the claims.

  The gyro element 1 is one of a quadrangular base 2 centered on the origin of the coordinate axis and a connecting portion 3 provided on both sides of the base 2, and a first extending from the base 2 in the plus X-axis direction. A first drive vibration arm 41 that is one of the drive vibration arms 4 that extends from the distal end of the connection portion 31 and the first connection portion 31 in a positive Y-axis direction at a right angle to the X axis, and a first connection A second drive vibrating arm 42 extending from the tip of the portion 31 in the minus Y-axis direction at a right angle to the X-axis, and from the base 2 in the direction opposite to the first connecting portion 31 The second connecting portion 32 extending in the minus X-axis direction, and the third driving vibration extending in the plus Y-axis direction at right angles to the X-axis from the tip of the second connecting portion 32 Extends in the minus Y-axis direction perpendicular to the X-axis from the arm 43 and the tip of the second connecting portion 32 It has a fourth driving vibration arms 44, a.

  Further, the gyro element 1 includes, as the drive vibration arm 4, from the base 6 a that is the intersection of the first connection portion 31 and the first drive vibration arm 41 in addition to the first drive vibration arm 41 to the fourth drive vibration arm 44. , The intersection of the fifth drive vibrating arm 45 extending obliquely in the direction of the first quadrant at an angle of 30 degrees with respect to the X axis, the first connecting portion 31 and the second drive vibrating arm 42 The intersection of the sixth drive vibrating arm 46, the second connecting portion 32, and the third drive vibrating arm 43 extending obliquely in the direction of the fourth quadrant from the base 6a at an angle of 30 degrees with respect to the X axis. A seventh drive vibrating arm 47 extending obliquely in the direction of the second quadrant at an angle of 30 degrees with respect to the X axis from the base 6b, which is a portion, and the second connecting portion 32 and the fourth drive vibrating arm 44 Extends diagonally from the base 6b, which is also the intersection with the X axis, in the direction of the third quadrant at an angle of 30 degrees to the X axis Has a eighth driving vibration arm 48 is, the.

  The gyro element 1 includes a first detection vibrating arm 51 which is one of the detection vibrating arms 5 extending from the corner on the first quadrant side of the base 2 having a quadrangular shape, and the base 2. A second detection vibrating arm 52 extending in the minus Y-axis direction from the corner on the fourth quadrant side and a third detection extending in the plus Y-axis direction from the corner on the second quadrant side of the base 2 The vibration arm 53 and the fourth detection vibration arm 54 extending in the minus Y-axis direction from the corner of the base 2 on the third quadrant side are provided. Further, the gyro element 1 has, as the detection vibration arm 5, an angle of 30 degrees with respect to the X axis from the corner of the first quadrant side of the base 2 in addition to the first detection vibration arm 51 to the fourth detection vibration arm 54. Thus, the direction of the fourth quadrant is at an angle of 30 degrees with respect to the X axis from the fifth detection vibrating arm 55 extending obliquely in the direction of the first quadrant and the corner of the base 2 on the fourth quadrant side. Is extended obliquely in the direction of the second quadrant at an angle of 30 degrees with respect to the X-axis from the sixth detection vibrating arm 56 and the second quadrant side corner of the base 2 A seventh detection vibrating arm 57 and an eighth detection vibrating arm 58 extending obliquely in the direction of the third quadrant from the corner of the base 2 on the third quadrant side at an angle of 30 degrees with respect to the X axis; ,have. All these arms have a rectangular cross section.

  Here, the drive vibration arm 4 (first drive vibration arm 41 to eighth drive vibration arm 48) has the drive signal electrode 7 for exciting the drive vibration of each arm, and the detection vibration arm 5 (first drive vibration arm 48). The detection vibration arm 51 to the eighth detection vibration arm 58) have detection signal electrodes 8 for detecting a physical quantity such as an angular velocity applied to the gyro element 1, respectively.

  In the gyro element 1 having such a configuration, when a voltage is applied to the drive signal electrode 7, the drive vibrating arm 4 bends and vibrates. Specifically, the first driving vibrating arm 41 and the fifth driving vibrating arm 45 that vibrate in the same phase are different from the second driving vibrating arm 42 and the sixth driving vibrating arm 46 that vibrate in the same phase, That is, the first drive vibrating arm 41 is bent to the plus X side and the fifth drive vibrating arm 45 is bent to the X axis side, and the second drive vibrating arm 42 is also added to the plus X. The sixth drive vibrating arm 46 is also bent to the X axis side. When the first drive vibrating arm 41 is bent to the minus X side and the fifth drive vibrating arm 45 is bent to the side away from the X axis, the second drive vibrating arm 42 is also bent to the minus X side, and the sixth drive The vibrating arm 46 also bends away from the X axis side. Similarly, the third drive vibration arm 43 and the seventh drive vibration arm 47 that vibrate in the same phase vibrate in the opposite phase to the fourth drive vibration arm 44 and the eighth drive vibration arm 48 that vibrate in the same phase. It has become.

  Further, the detection signal electrode 8 of the detection vibration arm 5 has the first detection vibration arm 51 through the eighth detection vibration arm 58 when the angular velocity or the like is applied to the gyro element 1 around the X axis or the Y axis. This is an electrode for taking out a voltage generated by bending and vibrating as an electric signal. In this case, the angular velocity around the Y axis can be detected by the detection signal electrodes 8 of the first detection vibrating arm 51 to the fourth detection vibrating arm 54, and the fifth detection vibrating arm 55 to the eighth detection vibrating arm 58 can be detected. The angular velocity around the X axis can be detected. That is, the detection signal electrode 8 functions to detect an angular velocity applied to the gyro element 1 and output it as an electrical signal. The operation principle of detecting the physical quantity such as angular velocity will be described later in detail with reference to FIG.

The main effects of the gyro element 1 (physical quantity detection element) having the configuration described in the first embodiment as described above will be described.
(1) In the gyro element 1, the drive vibration arm 4 (first drive vibration arm 41 to eighth drive vibration arm 48) and the detection vibration arm 5 (first detection vibration arm 51 to eighth detection vibration arm 58) are In this configuration, the base 2 is individually extended. Thereby, it is possible to suppress electrostatic leakage, which is a phenomenon in which the drive signal in the drive vibration arm 4 is electrostatically carried on the detection signal in the detection vibration arm 5. Further, by setting the drive signal electrode 7 and the detection signal electrode 8 individually for the drive vibration arm 4 and the detection vibration arm 5, it is only necessary to wire only the drive signal electrode 7 to the drive vibration arm 4, Since only the detection signal electrode 8 needs to be wired to the detection vibrating arm 5, a space for each electrode can be increased, and the sensitivity of physical quantity detection can be improved.
(2) In the gyro element 1, the stress at the root 6a by the first drive vibrating arm 41 contributes to the excitation of the fifth drive vibrating arm 45, and the stress at the root 6a by the second drive vibrating arm 42 is Each acoustic coupling property is improved by contributing to the excitation of the sixth drive vibrating arm 46. Similarly, the acoustic coupling property is enhanced at the base 6b. Therefore, the gyro element 1 can suppress the leakage of vibration energy in the direction of the base 2 and lower the impedance, and is a high Q value element. Such a gyro element 1 having a high acoustic coupling property can be configured with a single drive circuit to obtain vibration modes in two directions, and is advantageous in terms of downsizing and cost reduction. It has become. This is because the first drive vibration arm 41 and the sixth drive vibration arm 46 form an angle of 120 degrees, and the second drive vibration arm 42 and the fifth drive vibration arm 45 form an angle of 120 degrees. It can be said that the bondability is high from the viewpoint of the crystal structure of the quartz crystal described above. Further, in this case, by using a hexagonal piezoelectric single crystal material having three X axes each having an inner angle of 120 degrees, for example, a quartz crystal z plate, an element having an arm configuration such as the gyro element 1 is obtained. It can be formed easily.
(3) Further, the gyro element 1 includes that the connecting portion 3 protrudes from the base portion 2 in opposite directions, the first drive vibrating arm 41, the fifth drive vibrating arm 45, the second drive vibrating arm 42, and The sixth drive vibrating arm 46 vibrates in opposite phases with each other, and similarly, the third drive vibrating arm 43 and the seventh drive vibrating arm 47, and the fourth drive vibrating arm 44 and the eighth drive vibrating arm 48 include By oscillating in mutually opposite phases, it is possible to excite a well-balanced driving vibration. Such a gyro element 1 is an element suitable for detecting angular velocities around the X axis and the Y axis.
(Embodiment 2)

  Next, another form of the gyro element will be described. FIG. 2 is a plan view showing the configuration of the gyro element according to the second embodiment. The gyro element 1A according to the second embodiment differs from the gyro element 1 according to the first embodiment in the extension positions of all the detection vibration arms 5A (the first detection vibration arm 51a to the eighth detection vibration arm 58a). Further, in the gyro element 1A, the extended positions of the fifth drive vibrating arm 45a, the sixth drive vibrating arm 46a, the seventh drive vibrating arm 47a, and the eighth drive vibrating arm 48a of the drive vibrating arm 4A are also the same as those in the first embodiment. The structure is different from that of the element 1. On the other hand, the function of the gyro element 1A is substantially the same as that of the gyro element 1, and is a suitable element for detecting angular velocities around the X axis and the Y axis.

  As shown in FIG. 2, the gyro element 1A includes a base 2, a first connecting part 31a, a second connecting part 32a, a first drive vibrating arm 41a, and a second drive that have the same form as the gyro element 1 in the first embodiment. It has a vibrating arm 42a, a third driving vibrating arm 43a, and a fourth driving vibrating arm 44a.

  First, in the detection vibrating arm 5A of the gyro element 1A, the first detection vibrating arm 51a starts from a position near the Y-axis side from the corner portion 9a on the first quadrant side of the base 2 having a quadrangular shape. It extends in the Y-axis direction. Similarly, the second detection vibrating arm 52a extends in the negative Y-axis direction starting from the corner 9b on the fourth quadrant side of the base 2 toward the Y-axis side, and the third detection vibrating arm 53a The base 2 extends from the corner 9c on the second quadrant side toward the Y-axis side starting from the position on the Y-axis side, and the fourth detection vibrating arm 54a is positioned on the third quadrant-side corner of the base 2 Starting from the position closer to the Y axis side from the portion 9d, it extends in the minus Y axis direction. That is, it can be said that the first detection vibrating arm 51a to the fourth detection vibrating arm 54a extend from the side of the base 2 near the Y axis.

  Further, in the detection vibrating arm 5A, the fifth detection vibrating arm 55a is at an angle of 30 degrees with respect to the X axis, starting from the position near the X axis side from the corner portion 9a on the first quadrant side of the base 2 Thus, it extends obliquely in the direction of the first quadrant. Similarly, the sixth detection vibrating arm 56a starts at a position near the X-axis side from the corner portion 9b on the fourth quadrant side of the base portion 2 at an angle of 30 degrees with respect to the X-axis. The seventh detection vibrating arm 57a extends at an angle of 30 degrees with respect to the X axis, starting from the position where the seventh detection vibrating arm 57a is closer to the X axis side from the corner portion 9c on the second quadrant side of the base portion 2. The eighth detection vibrating arm 58a extends obliquely in the direction of the second quadrant, and is 30 degrees with respect to the X axis, starting from the position where the corner 9d on the third quadrant side of the base portion 2 approaches the X axis side. At an angle extending in the direction of the third quadrant. That is, it can be said that the fifth detection vibrating arm 55a to the eighth detection vibrating arm 58a extend from the side of the base portion 2 near the X axis. All these arms have a rectangular cross section.

  The gyro element 1A according to the second embodiment having such a detection vibration arm 5A has a fifth detection vibration arm because the first detection vibration arm 51a is located on the Y axis side from the corner portion 9a of the base portion 2. The first detection vibrating arm 51a is separated from the first detection vibrating arm 55a, and can suppress the influence of vibration on the fifth detection vibrating arm 55a and can avoid the influence of vibration from the fifth detection vibrating arm 55a. It is an arrangement. Further, since the second detection vibrating arm 52a is located on the Y-axis side from the corner portion 9b of the base portion 2, the second detection vibrating arm 52a is separated from the sixth detection vibrating arm 56a, and vibration of the sixth detection vibrating arm 56a is detected. The arrangement can suppress the influence and avoid the influence of vibration from the sixth detection vibrating arm 56a. This is the same relationship between the third detection vibration arm 53a and the seventh detection vibration arm 57a, and the same relationship between the fourth detection vibration arm 54a and the eighth detection vibration arm 58a.

  Furthermore, in the gyro element 1A, since the fifth detection vibrating arm 55a is located on the X-axis side from the corner portion 9a of the base 2, the fifth detection vibrating arm 55a is further separated from the first detection vibrating arm 51a. The fifth detection vibrating arm 55a is arranged to be able to suppress the influence of vibration on the first detection vibrating arm 51a and to avoid the influence of vibration from the first detection vibrating arm 51a. This is the same relationship between the sixth detection vibrating arm 56a and the second detection vibrating arm 52a, the relationship between the seventh detection vibrating arm 57a and the third detection vibrating arm 53a, and the eighth detection vibrating arm 58a. The same applies to the relationship with the fourth detection vibrating arm 54a. That is, the gyro element 1A can suppress the influence of mutual vibration by the detection vibrating arm 5A, can reduce the so-called other-axis sensitivity, and can more reliably detect the angular velocity and the like.

  In the gyro element 1A, the fifth drive vibrating arm 45a extends obliquely from the first drive vibrating arm 41a, and the extended position is a position away from the root 6a by the distance s in the plus Y-axis direction. The extending direction of the fifth drive vibrating arm 45a is the same as that of the fifth drive vibrating arm 45 in the first embodiment, forms an angle of 30 degrees with respect to the X axis, and is the direction of the first quadrant. Similarly, the sixth drive vibrating arm 46a extends obliquely from a position away from the base 6a by a distance s in the negative Y-axis direction, and the extending direction is the same as that of the sixth drive vibrating arm 46 in the first embodiment. The seventh drive vibrating arm 47a extends in a four-quadrant direction obliquely from a position away from the base 6b by a distance s in the plus Y-axis direction, and the extending direction is the seventh drive vibrating arm in the first embodiment. 47, the eighth drive vibrating arm 48a extends obliquely from a position away from the base 6b by a distance s in the negative Y-axis direction, and the extending direction is the same as in the first embodiment. The direction of the third quadrant is the same as that of the 8-drive vibrating arm 48.

In the fifth drive vibration arm 45a, the sixth drive vibration arm 46a, the seventh drive vibration arm 47a, and the eighth drive vibration arm 48a configured as described above, the fifth drive vibration arm 45a and the sixth drive vibration arm 46a have a base portion. The first connecting portion 31a extending from 2 is not formed on the extension line when extending in the plus X-axis direction as it is, that is, it does not extend from the position of the root 6a. Accordingly, the fifth drive vibrating arm 45a and the sixth drive vibrating arm 46a can enhance the connectivity with the first drive vibrating arm 41a or the second drive vibrating arm 42a while being separated from the first connecting portion 31a. . Similarly, the seventh drive vibration arm 47a and the eighth drive vibration arm 48a can also enhance the connectivity with the third drive vibration arm 43a or the fourth drive vibration arm 44a while being separated from the second connecting portion 32a. . Thereby, the gyro element 1A causes vibration leakage in which vibration leaks from the first drive vibration arm 41a to the eighth drive vibration arm 48a toward the base 2 via the first connection portion 31a or the second connection portion 32a. Almost can be suppressed.
(Embodiment 3)

  Next, another form of the gyro element will be described. FIG. 3 is a plan view showing the configuration of the gyro element according to the third embodiment. The gyro element 1B according to the third embodiment is a form in which a ninth detection vibrating arm 60 and a tenth detection vibrating arm 61 are added to the gyro element 1A according to the second embodiment. Accordingly, components other than the ninth detection vibrating arm 60 and the tenth detection vibrating arm 61 are given the same reference numerals as the gyro element 1A, and the description thereof is omitted.

  As shown in FIG. 3, in addition to the configuration of the gyro element 1A in the second embodiment, the gyro element 1B overlaps the Y axis from the base 2 between the first detection vibrating arm 51a and the third detection vibrating arm 53a. From the base 2 between the ninth detection vibrating arm 60 and the second detection vibrating arm 52a and the fourth detection vibrating arm 54a extending in the plus Y-axis direction in the state, the minus Y-axis in the arrangement state overlapping the Y-axis And a tenth detection vibrating arm 61 extending in the direction. That is, the ninth detection vibrating arm 60 and the tenth detection vibrating arm 61 are disposed so as to overlap the Y axis, and extend from the base 2 in opposite directions. The ninth detection vibrating arm 60 and the tenth detection vibrating arm 61 have the detection signal electrode 8, and can detect an angular velocity around the Z axis applied to the gyro element 1B.

  The detection signal electrodes 8 of the ninth detection vibration arm 60 and the tenth detection vibration arm 61 are connected to the ninth detection vibration arm 60 and the tenth detection vibration arm 61 when an angular velocity or the like around the Z axis is applied to the gyro element 1B. This is an electrode for taking out the voltage generated by the bending of each arm as an electrical signal. Thus, the ninth detection vibrating arm 60 and the tenth detection vibrating arm 61 have a function of detecting an angular velocity or the like applied to the gyro element 1B and outputting it as an electrical signal. The detection of the angular velocity around the Z axis by the gyro element 1B will be described later with reference to FIG.

  As described above, the main effect of the gyro element 1B having the configuration shown in the third embodiment is to detect angular velocities around the Z axis in addition to detecting angular velocities around the X and Y axes. It is possible to detect the angular velocity of three axes at the same time as a single unit. Even if the ninth detection vibrating arm 60 and the tenth detection vibrating arm 61 are added to the gyro element 1 in the first embodiment, substantially the same effect as the gyro element 1B can be obtained.

(Gyro element operating principle)
Next, the operation principle of the gyro elements 1, 1A, 1B in the first to third embodiments will be described. The operation principle here will be described by taking the case of the gyro element 1B as a representative example. 4A is a plan view showing detection of angular velocity around the Y axis in the gyro element, FIG. 4B is a plan view showing detection of angular velocity around the X axis in the gyro element, and FIG. FIG. 3 is a plan view showing detection of angular velocity around the Z axis in the gyro element.

  First, detection of angular velocity about the Y axis will be described with reference to FIG. When the gyro element 1B is rotated around the Y axis while the gyro element 1B is in driving vibration, Coriolis force in the Z-axis direction acts on the first driving vibration arm 41a and the second driving vibration arm 42a. Detection vibration in the Z-axis direction occurs. Similarly, Coriolis force acts on the third driving vibration arm 43a and the fourth driving vibration arm 44a in the Z-axis direction opposite to the first driving vibration arm 41a and the second driving vibration arm 42a, and detection in the Z-axis direction. Vibration occurs. The first detection vibrating arm 51a performs detection vibration in the Z-axis direction in the same manner as the first driving vibration arm 41a in response to the detection vibration of the first driving vibration arm 41a, and the second detection vibration arm 52a In response to the detected vibration of the second drive vibration arm 42a, the detection vibration is performed in the Z-axis direction in the same manner as the second drive vibration arm 42a. The third detection vibration arm 53a performs detection vibration in the Z-axis direction opposite to the first detection vibration arm 51a in response to the detection vibration of the third drive vibration arm 43a, and the fourth detection vibration arm 54a In response to the detection vibration of the fourth drive vibration arm 44a, the detection vibration is performed in the Z-axis direction opposite to the second detection vibration arm 52a.

  As described above, the first detection vibrating arm 51a and the second detection vibrating arm 52a, and the third detection vibrating arm 53a and the fourth detection vibrating arm 54a perform detection vibrations at phases different from each other. The gyro element 1B calculates the sum of the detection signals based on the detection vibrations of the first detection vibration arm 51a and the second detection vibration arm 52a, and further each of the third detection vibration arm 53a and the fourth detection vibration arm 54a. The magnitude of the Coriolis force can be obtained by a so-called differential detection method in which the sum of the detection signals based on the detected vibrations is calculated and the sum of these signals is differentiated. That is, the magnitude of the angular velocity (physical quantity) about the Y axis applied to the gyro element 1B can be recognized.

  Next, detection of angular velocity around the X axis will be described with reference to FIG. When the gyro element 1B is rotated around the X axis while the gyro element 1B is in driving vibration, the Coriolis force in the Z-axis direction acts on the fifth driving vibration arm 45a and the seventh driving vibration arm 47a. Detected vibration in the Z-axis direction occurs. Similarly, Coriolis force acts on the sixth driving vibration arm 46a and the eighth driving vibration arm 48a in the Z-axis direction opposite to the fifth driving vibration arm 45a and the seventh driving vibration arm 47a, and detection in the Z-axis direction. Vibration occurs. Then, the fifth detection vibrating arm 55a performs detection vibration in the Z-axis direction in the same manner as the fifth driving vibration arm 45a in response to the detection vibration of the fifth driving vibration arm 45a, and the seventh detection vibration arm 57a In response to the detected vibration of the seventh drive vibration arm 47a, the detection vibration is performed in the Z-axis direction in the same manner as the seventh drive vibration arm 47a. The sixth detection vibration arm 56a performs detection vibration in the Z-axis direction opposite to the fifth detection vibration arm 55a in response to the detection vibration of the sixth drive vibration arm 46a, and the eighth detection vibration arm 58a In response to the detection vibration of the eighth drive vibration arm 48a, the detection vibration is performed in the Z-axis direction opposite to the seventh detection vibration arm 57a.

  As described above, in the gyro element 1B, the fifth detection vibration arm 55a and the seventh detection vibration arm 57a, and the sixth detection vibration arm 56a and the eighth detection vibration arm 58a perform detection vibration at phases different from each other. Become. The gyro element 1B calculates the sum of the detection signals based on the detection vibrations of the fifth detection vibration arm 55a and the seventh detection vibration arm 57a, and further each of the sixth detection vibration arm 56a and the eighth detection vibration arm 58a. The magnitude of the Coriolis force can be obtained by calculating the sum of the detection signals based on the detected vibrations and making the sum differential. That is, the magnitude of the angular velocity (physical quantity) around the X axis applied to the gyro element 1B can be recognized. Note that the same principle of operation is applied to detection of angular velocities around the Y axis and the X axis in the gyro elements 1 and 1A.

  Next, detection of angular velocity about the Z axis will be described with reference to FIG. The first drive vibrating arm 41a and the third drive vibrating arm 43a of the gyro element 1B vibrate in mutually opposite phases, and the second drive vibrating arm 42a and the fourth drive vibrating arm 44a vibrate in opposite phases. doing. In this state, when the gyro element 1B is rotated around the Z-axis, the Coriolis force in the Y-axis direction acts on the first drive vibrating arm 41a and the second drive vibrating arm 42a, and the detected vibration in the Y-axis direction is generated. To do. Similarly, Coriolis force acts on the third drive vibrating arm 43a and the fourth drive vibrating arm 44a in the Y-axis direction opposite to the first drive vibrating arm 41a and the second drive vibrating arm 42a, and detection in the Y-axis direction. Vibration occurs. Here, the ninth detection vibrating arm 60 and the tenth detection vibrating arm 61 are detected vibrations of the first driving vibrating arm 41a, the second driving vibrating arm 42a, the third driving vibrating arm 43a, and the fourth driving vibrating arm 44a. In response, detection vibrations occur in different X-axis directions. In the gyro element 1B, the magnitude of the Coriolis force can be obtained by differentiating the detection signals based on the detection vibrations of the ninth detection vibration arm 60 and the tenth detection vibration arm 61, respectively. That is, the magnitude of the angular velocity (physical quantity) around the Z axis applied to the gyro element 1B can be recognized. With such an operating principle, the gyro element 1B can detect physical quantities around the Z-axis in addition to detecting physical quantities such as angular velocities around the X-axis and Y-axis. It is possible to detect. In this case, since the first driving vibration arm 41a and the fifth driving vibration arm 45a vibrate in the same phase, the Coriolis force in the Y-axis direction in each arm portion becomes the same direction, and the detection vibration is surely ensured. Can be excited. The same applies to the second drive vibration arm 42a and the sixth drive vibration arm 46a, the third drive vibration arm 43a and the seventh drive vibration arm 47a, the fourth drive vibration arm 44a and the eighth drive vibration arm 48a.

  The operation principle has been described above by taking the gyro element 1B as an example. However, the gyro elements including the gyro elements 1 and 1A are mounted on a gyro apparatus, an electronic device, or the like and exhibit an excellent gyro function.

(Gyro device)
Next, the configuration of a gyro apparatus (physical quantity detection apparatus) that detects angular velocity using any one of the gyro elements 1, 1A, and 1B will be described. Fig.5 (a) is a top view which shows the gyro apparatus provided with the gyro element. FIG. 5B is a cross-sectional view showing a gyro device provided with a gyro element, and shows an EE cross section in FIG. In this case, FIG. 5 shows the gyro device 100 provided with the gyro element 1, and FIG. 5A shows the lid 72 omitted for the sake of explanation.

  As shown in FIG. 5, the gyro device 100 includes a gyro element 1, a support substrate 78 that supports the gyro element 1 via leads 80 (80a, 80b, 80c, 80d, 80e, 80f), and a support substrate 78. A ceramic package 70 having a housing 71 that is a fixed substrate to be fixed, an IC (Integrated Circuit) chip 90, and a lid 72 for hermetically sealing the inside of the housing 71 are provided. The IC chip 90 accommodated in the ceramic package 70 is connected to a bonding pad 77 of the ceramic package 70 by a metal wire 91 such as a gold wire. The IC chip 90 includes a drive circuit 90a that supplies a drive signal to excite the gyro element 1, and a detection circuit 90b that detects a physical quantity such as angular velocity. In this case, the gyro device 100 including the gyro element 1 can excite a plurality of drive vibrating arms 4 with a single drive circuit 90a, and the size of the device can be reduced.

  Further, a shelf 74 is formed on the container 71 in the ceramic package 70, and a connection terminal 75 is formed on the surface thereof. A support substrate 78 is bonded and fixed to the shelf 74, and a conductive adhesive 79 is used for the bonding and fixing. An external connection terminal 76 is formed on the outer peripheral portion of the ceramic package 70, and the external connection terminal 76 is electrically connected to the connection terminal 75 and a part of the bonding pad 77. The support substrate 78 is provided with leads 80, and the tips of the leads 80a, 80b, 80c, 80d are respectively joined to corresponding pads of the detection electrode pads 81 formed on the base 2 of the gyro element 1, The tips of the leads 80e and 80f are joined to corresponding pads of the drive electrode pad 82 formed on the base 2 of the gyro element 1, respectively. By these leads 80, the gyro element 1 is supported in the air so as not to contact other parts. The detection electrode pad 81 is for detecting detection vibration, and the drive electrode pad 82 is for exciting drive vibration. In the ceramic package 70 having such a configuration, the seam ring 73 is fixed to the container 71, and the lid 72 is seam welded to the seam ring 73, whereby the ceramic package 70 is sealed in a decompressed state. . The ceramic package 70 may be in a state in which an inert gas such as nitrogen, helium, or argon is sealed instead of being in a reduced pressure state.

  Here, the support substrate 78 uses a TAB (Tape Automated Bonding) mounting substrate, and has a conductor pattern formed of a metal foil such as a copper foil on a base material such as a polyimide film. The central portion of the support substrate 78 is an opening, and a lead 80 as a conductor pattern extends from the opening. The tip of the lead 80 opposite to the detection electrode pad 81 or the drive electrode pad 82 is connected to the connection terminal 75 of the ceramic package 70. The gyro apparatus 100 is mounted on, for example, an electronic device described below, and exhibits an excellent gyro function that detects angular velocities around the X axis and the Y axis. As the gyro device, in addition to the configuration provided with the gyro element 1, the one provided with the gyro element 1 </ b> A exhibits an excellent gyro function almost the same as the gyro element 1, and the one provided with the gyro element 1 </ b> B It exhibits an excellent gyro function that detects angular velocities around the X, Y, and Z axes.

(Electronics)
Next, an electronic apparatus having a configuration using any of the gyro elements 1, 1A, 1B will be described. FIG. 6A is a perspective view showing a digital video camera provided with a gyro element, and FIG. 6B is a perspective view showing a mobile phone provided with a gyro element. As an example, these electronic devices are equipped with a gyro element 1B. First, as illustrated in FIG. 6A, the video camera 300 includes an image receiving unit 301, an operation unit 302, an audio input unit 303, and a display unit 304. This video camera 300 includes a gyro element 1B and an IC chip 90 having a drive circuit 90a and a detection circuit 90b for controlling the gyro element 1B, and angular velocities about three axes of the X axis, the Y axis, and the Z axis. Can be detected to exhibit a camera shake correction function, and a clear moving image can be recorded. In this case, the gyro element 1 </ b> B is preferably in a form incorporated as part of the gyro device 100. Similarly, when the video camera 300 includes the gyro elements 1 and 1A, the camera shake correction function can be exhibited by detecting angular velocities around the X axis and the Y axis.

  As shown in FIG. 6B, the mobile phone 400 includes a plurality of operation buttons 401, a display unit 402, a camera mechanism 403, and a shutter button 404. This cellular phone 400 includes a gyro element 1B and an IC chip 90 having a drive circuit 90a and a detection circuit 90b for controlling the gyro element 1B, and angular velocities about three axes of the X axis, the Y axis, and the Z axis. , The camera mechanism 403 can exhibit a camera shake correction function, and a clear image can be recorded. In this case, the gyro element 1 </ b> B is preferably in a form incorporated as part of the gyro device 100. Similarly, when the mobile phone 400 includes the gyro elements 1 and 1A, the camera shake correction function can be exhibited by detecting the angular velocities around the X axis and the Y axis.

  Note that the electronic device is not limited to the video camera 300 and the mobile phone 400, and examples include a navigation device, a vehicle body posture detection device, a game controller, a head mountain display, a pointing device, and a cleaning robot.

  Further, the gyro elements 1, 1A, 1B are not limited to the above-described embodiment, and the same effects as those of the embodiment can be obtained even in the following modifications.

  (Modification 1) In the gyro element 1, the fifth drive vibration arm 45 to the eighth drive vibration arm 48 and the fifth detection vibration arm 55 to the eighth detection vibration arm 58 form an angle of 30 degrees with respect to the X axis. However, the angle is not limited to 30 degrees and may be other angles. In particular, if the angle with respect to the X axis is 45 degrees, the drive components in the X axis direction and the Y axis direction in each vibrating arm are the same, so the amplitudes of the detection signals around the X axis and around the Y axis are substantially the same. This makes it easy to detect physical quantities such as angular velocities. This configuration is also possible in the gyro elements 1A and 1B.

  (Modification 2) In the gyro elements 1A and 1B, the detection vibration arm 5A is configured to be separated from the corner portion 9 of the base 2, but the detection vibration arm 5A extends from the corner portion 9. It may be.

(Modification 3) The gyro elements 1, 1A and 1B are made of quartz which is a piezoelectric material, but are not limited to quartz, but lithium niobate (LiNbO ₃ ) other than quartz and lead zirconate titanate. (PZT) or the like may be used. Furthermore, the gyro elements 1, 1A, 1B are not limited to piezoelectric materials, and may be non-piezoelectric materials such as silicon and germanium. In this case, a piezoelectric material is combined with the drive signal electrode. To be able to vibrate. Thereby, in gyro element 1, 1A, 1B, according to a required characteristic, a use, etc., an appropriate material can be chosen and a choice expands.

  DESCRIPTION OF SYMBOLS 1 ... Gyro element as a physical quantity detection element, 2 ... Base part, 3 ... Connection part, 4 ... Drive vibration arm, 5 ... Detection vibration arm, 7 ... Drive signal electrode, 8 ... Detection signal electrode, 90 ... IC chip, 90a ... Drive circuit, 90b ... detection circuit, 100 ... gyro device as physical quantity detection device, 300 ... video camera as electronic device, 400 ... mobile phone as electronic device.

Claims (12)

The base,
A region in which a coordinate axis having an X axis passing through the origin, which is the center of gravity of the base, and a Y axis passing through the origin and orthogonal to the X axis is defined, and both the X coordinate and the Y coordinate take a positive value Is the first quadrant, the area where the X coordinate is negative and the Y coordinate is positive, the second quadrant, the area where both the X coordinate and the Y coordinate are negative values is the third quadrant, the X coordinate is positive and the Y coordinate If we define the region where is negative as the fourth quadrant,
A first connecting part and a second connecting part, which are connected to the base part and are provided on both sides of the base part along the X axis;
A first drive vibrating arm and a second drive vibrating arm respectively extending in opposite directions along the Y axis from the first connecting portion;
A third drive vibrating arm and a fourth drive vibrating arm respectively extending in opposite directions along the Y axis from the second connecting portion;
A fifth drive vibrating arm extending from the first connecting portion side of the first drive vibrating arm in the first quadrant direction and obliquely with respect to the X axis;
A sixth drive vibrating arm extending from the first connecting portion side of the second drive vibrating arm in the fourth quadrant direction and obliquely with respect to the X axis;
A seventh drive vibrating arm extending from the second connecting portion side of the third drive vibrating arm in the second quadrant direction and obliquely with respect to the X axis;
An eighth drive vibrating arm extending from the second connecting portion side of the fourth drive vibrating arm in the third quadrant direction and obliquely with respect to the X axis;
A first detection vibrating arm extending in the plus Y-axis direction from the first quadrant side of the base;
A second detection vibrating arm extending in the minus Y-axis direction from the fourth quadrant side of the base;
A third detection vibrating arm extending in the plus Y-axis direction from the second quadrant side of the base;
A fourth detection vibrating arm extending in the negative Y-axis direction from the third quadrant side of the base;
A fifth detection vibrating arm extending from the first quadrant side of the base in the first quadrant direction and obliquely with respect to the X axis;
A sixth detection vibrating arm extending from the fourth quadrant side of the base in the fourth quadrant direction and obliquely with respect to the X axis;
A seventh detection vibrating arm extending from the second quadrant side of the base portion in the second quadrant direction and obliquely with respect to the X axis;
A physical quantity detection element comprising: an eighth detection vibration arm extending from the third quadrant side of the base in the third quadrant direction and obliquely with respect to the X axis. The physical quantity detection element according to claim 1,
The physical quantity detection element, wherein the first detection vibration arm to the fourth detection vibration arm extend from a side closer to the Y axis of the base. The physical quantity detection element according to claim 1 or 2,
The fifth detection vibrating arm to the eighth detection vibrating arm extend from the base portion closer to the X-axis. In the physical quantity detection element according to any one of claims 1 to 3,
The first drive vibrating arm to the eighth drive vibrating arm include drive signal electrodes,
The first detection vibrating arm to the eighth detection vibrating arm each include a detection signal electrode. In the physical quantity detection element according to any one of claims 1 to 4,
A physical quantity detection element comprising a ninth detection vibration arm and a tenth detection vibration arm respectively extending in the opposite directions along the Y axis from the center of the base. In the physical quantity detection element according to any one of claims 1 to 5,
The fifth drive vibrating arm and the sixth drive vibrating arm extend from a position avoiding the extension line of the first connecting portion,
The physical quantity detection element, wherein the seventh drive vibration arm and the eighth drive vibration arm extend from a position avoiding an extension line of the second connecting portion. In the physical quantity detection element according to any one of claims 1 to 6,
The fifth driving vibrating arm vibrates in the same phase as the first driving vibrating arm, and the sixth driving vibrating arm is the same as the second driving vibrating arm that vibrates in the opposite phase to the first driving vibrating arm. The seventh driving vibrating arm vibrates in the same phase as the third driving vibrating arm that vibrates in the opposite phase to the first driving vibrating arm, and the eighth driving vibrating arm A physical quantity detecting element that vibrates in the same phase as the fourth driving vibrating arm that vibrates in an opposite phase to the driving vibrating arm. In the physical quantity detection element according to any one of claims 1 to 7,
A physical quantity detecting element using a piezoelectric material having a hexagonal crystal structure. The physical quantity detection element according to any one of claims 1 to 8,
A driving circuit for supplying a driving signal to the first driving vibrating arm to the eighth driving vibrating arm;
A physical quantity detection device comprising: a detection circuit that detects at least a physical quantity detection signal from the first detection vibration arm to the eighth detection vibration arm. The physical quantity detection device according to claim 9,
The detection circuit includes a sum of the detection signal generated in the first detection vibrating arm and the detection signal generated in the second detection vibrating arm, the detection signal generated in the third detection vibrating arm, and the fourth detection vibration. A physical quantity detection device, wherein the physical quantity detection signal is detected by making a difference with a sum of the detection signal generated in an arm. The physical quantity detection device according to claim 9,
The detection circuit includes a sum of the detection signal generated in the fifth detection vibrating arm and the detection signal generated in the seventh detection vibrating arm, the detection signal generated in the sixth detection vibrating arm, and the eighth detection vibration. A physical quantity detection device, wherein the physical quantity detection signal is detected by making a difference with a sum of the detection signal generated in an arm.   An electronic apparatus comprising the physical quantity detection element according to claim 1.

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