JP2013083484A - Angle sensor - Google Patents

Abstract

An angle sensor is provided which is less susceptible to the influence of electromagnetic noise on connection wires constituting a sensor stator.
An angle sensor includes a sensor rotor in which a planar coil is formed, and a sensor stator that is disposed opposite to the surface and includes a multi-X planar coil (10A to 10D). Forward plane coils 10B and 10D and reverse plane coils 10A and 10C provided on the stator substrate of the sensor stator are connected in series via connection lines 15a to 15e, and are connected to both ends of the series of plane coils 10A to 10D. One end thereof is connected to the positive terminal 16 through the connection line 15d, and the other end is connected to the negative terminal 17 through the connection line 15a. The connection lines 15a to 15e are arranged in a range of less than one turn along the arrangement of the series of planar coils 10A to 10D, and the folded connection line 15e is the other connection line 15a with one end 10a of the series of planar coils as a folding point. Arranged along ˜15d and connected to the negative terminal 17.
[Selection] Figure 6

Description

  The present invention relates to an angle sensor that detects a rotation angle of an output shaft of a motor or an engine.

  Conventionally, as this type of technology, for example, a flat resolver described in Patent Document 1 below is known. This flat resolver includes a fixed-side core, a movable-side core, and a plurality of multi-X-type sheet coils provided on the surface of the fixed-side core. And the connection line which connects between these several sheet coils is connected so that a fixed side core may be made to make a round.

JP 2006-162577 A

  However, in the flat resolver described in Patent Document 1, since the connection line connecting the sheet coils has a substantially large loop shape, it acts as an antenna and is affected by electromagnetic noise from the outside. There was a fear.

  The present invention has been made in view of the above circumstances, and an object of the present invention is to provide an angle sensor that makes it difficult to be affected by electromagnetic noise from the outside with respect to a connection wire constituting the sensor stator. It is in.

  In order to achieve the above object, the invention according to claim 1 is provided with a sensor rotor attached to a rotating shaft and having a planar coil formed on a surface thereof, the surface facing the surface of the sensor rotor, And a sensor stator having a multi-X planar coil formed thereon, the sensor stator being alternately arranged in the circumferential direction on the stator substrate and wound in a spiral shape. The forward planar coil and the reverse planar coil wound in a spiral shape and electrically connected so as to be in reverse phase with respect to the forward planar coil are disposed adjacent to each other and provided to be connectable to the outside. A forward planar coil and a reverse planar coil are connected in series via a connection line, and one end of both ends of a series of planar coils connected in series is connected. Line And the other end is connected to the negative electrode terminal via the connection line, and the connection line is arranged in a range of less than one round along the array of the series of planar coils connected in series. The purpose is that the folded connection line connected to one end of the series of planar coils as the folding point is arranged along the other connection lines and connected to the positive terminal or the negative terminal.

  According to the configuration of the above invention, one end of the series of forward planar coils and reverse planar coils arranged alternately in the circumferential direction on the stator substrate and connected in series is connected through the connecting line. The terminal is connected to the positive terminal, and the end is connected to the negative terminal via a connection line. Here, the connection line is arranged in a range of less than one turn along the arrangement of the series of planar coils connected in series, and the folded end connected to one end of the series of planar coils with the end as the folding point. The connection line is disposed along the other connection lines and connected to the positive terminal or the negative terminal. Therefore, for the connection lines connected to both ends of the series of planar coils connected in series, the folded connection line connected to one end is arranged along the other connection lines, so that the connection line is substantially a loop antenna. Does not make up. In addition, since the folded connection line is arranged along the other connection lines, the current is reversed between the two, and electromagnetic noise entering the folded connection line from the outside and electromagnetic waves entering the other connection line from the outside. Noise cancels each other.

  In order to achieve the above object, the invention described in claim 2 is the invention described in claim 1, wherein the folded connection wire and the other connection wires are disposed radially outside a series of planar coils connected in series. The purpose is that they are arranged adjacent to each other.

  According to the configuration of the invention described above, in addition to the operation of the invention according to claim 1, the folded connection line and the other connection lines are arranged on the radially outer side of the series of planar coils connected in series. Electromagnetic noise is less likely to enter the planar coil arranged inside the wire from the outside. Further, since the folded connection line and the other connection lines are arranged adjacent to each other, the space between them is reduced.

  In order to achieve the above object, according to a third aspect of the present invention, in the second aspect of the present invention, the folded connection line is vertically and parallelly arranged with respect to the other connection lines via an insulating layer. The intent is that

  According to the configuration of the above invention, in addition to the operation of the invention according to claim 2, the folded connection line and the other connection lines are arranged in parallel in the vertical direction, so that the space between them is substantially reduced. It becomes zero.

  In order to achieve the above object, according to a fourth aspect of the present invention, in the second aspect of the present invention, the folded connection line is twisted by alternately changing the direction of the other connection line through an insulating layer. It is intended that it is arranged so as to intersect with each other.

  According to the configuration of the above invention, in addition to the operation of the invention according to claim 2, the folded connection line and the other connection lines are alternately arranged to be twisted so as to intersect with each other. The space between them becomes smaller, and electromagnetic noise from the outside cancels out more effectively.

  According to the first aspect of the present invention, the connection wire constituting the sensor stator can be made less susceptible to external electromagnetic noise, and the influence of external electromagnetic noise on the planar coil can be reduced. As a result, the detection accuracy and performance as an angle sensor can be improved.

  According to the second aspect of the present invention, the connection line can be made less susceptible to external electromagnetic noise with respect to the effect of the first aspect of the invention.

  According to the third aspect of the invention, the effect of the invention of the second aspect can be made more difficult to be affected by external electromagnetic noise per connection line.

  According to the invention described in claim 4, the effect of the invention described in claim 2 can be made even less susceptible to the influence of electromagnetic noise from the outside per connection line.

Sectional drawing which shows a part of motor which concerns on one Embodiment and attached the angle sensor. The block diagram which shows the electrical structure which concerns on the same embodiment and concerns on an angle sensor. The perspective view which decomposes | disassembles and shows the structure of a sensor stator according to the embodiment. The top view which shows the pattern image of a SIN signal detection coil according to the embodiment. The top view which shows the pattern image of a COS signal detection coil according to the embodiment. The top view which shows schematic structure of the pattern image of a SIN signal detection coil concerning the embodiment. The top view which shows schematic structure of the pattern image of a COS signal detection coil according to the embodiment. FIG. 4 is a plan view showing, in a representative manner, one of the arc-shaped coils extracted and enlarged according to the same embodiment. The top view which concerns on the same embodiment and shows a 2nd coil layer. FIG. 10 is a plan view showing only the SIN second coil and the SIN third coil in FIG. 9 according to the same embodiment. FIG. 10 is a plan view showing only the COS second coil and the COS third coil in FIG. 9 according to the embodiment; FIG. 11 is an enlarged plan view showing only a part of the relationship between the SIN third coil and the SIN second coil in FIGS. 9 and 10 according to the same embodiment. The top view which concerns on the same embodiment and shows a 1st coil layer. FIG. 14 is a plan view showing only the SIN first coil and the SIN fourth coil in FIG. 13 according to the same embodiment. FIG. 14 is a plan view showing only the COS first coil and the COS fourth coil in FIG. 13 according to the same embodiment. FIG. 15 is an enlarged plan view showing only a part of the relationship between the SIN first coil and the SIN fourth coil in FIGS. 13 and 14 according to the embodiment; The top view which extracts and shows the coil shown in FIG. 9 concerning the embodiment. The top view which extracts and shows the coil shown in FIG. 13 concerning the embodiment. The perspective view which decomposes | disassembles and shows the structure of a sensor rotor concerning the embodiment. The graph which shows the relationship between an error component and an error angle regarding the angle sensor of this embodiment concerning the same embodiment. The graph which shows the relationship between an error component and an error angle regarding a relative angle sensor concerning the embodiment. The graph which shows the relationship of the output waveform of the angle sensor with respect to the same embodiment regarding an electrical angle. The top view concerning another embodiment, expanding and showing the arrangement state of some connection lines.

  DETAILED DESCRIPTION Hereinafter, an embodiment of an angle sensor according to the present invention will be described in detail with reference to the drawings.

  FIG. 1 is a sectional view showing a part of a motor 70 to which an angle sensor 9 according to this embodiment is attached. The motor 70 includes a motor case 71, a case cover 72 that covers the opening of the motor case 71, a motor stator 73 fixed to the motor case 71, a motor rotor 74 provided inside the motor stator 73, and the motor rotor 74. A motor shaft 75 as a rotating shaft integrally provided at the center, and a pair of bearings 76 and 77 that rotatably support the motor shaft 75 between the motor case 71 and the motor cover 72 are provided.

  The motor case 71 and the case cover 72 are formed by casting an aluminum alloy or the like. The motor stator 73 includes a coil 78 and is fixed to the inner periphery of the motor case 71. The motor stator 73 is excited when the coil 78 is energized to generate a magnetic force.

  The motor rotor 74 includes a permanent magnet (not shown). The motor rotor 74 is held between the motor stator 73 via a predetermined gap. By energizing the motor stator 73 by energization, the motor rotor 74 rotates integrally with the motor shaft 75 to obtain driving force.

  As shown in FIG. 1, the angle sensor 9 is provided on the case cover 72 and the motor rotor 74. A sensor stator 7 constituting the angle sensor 9 is fixed to the case cover 72. A sensor rotor 8 constituting the angle sensor 9 is fixed to the motor rotor 74. In a state where the motor case 71 and the case cover 72 are assembled, the sensor rotor 8 and the sensor stator 7 are disposed so that the surfaces thereof face each other with a predetermined gap GA. By narrowing the gap GA, the detection accuracy of the angle sensor 9 can be improved. It is preferable to determine the size of the gap GA in consideration of a dimensional tolerance, a dimensional change due to temperature, and the like.

  FIG. 2 is a block diagram showing an electrical configuration related to the angle sensor 9. The angle sensor 9 includes a SIN signal detection coil 10, a COS signal detection coil 20 and a stator side rotary transformer 30 provided in the sensor stator 7, and an excitation coil 40 and a rotor side rotary transformer 41 provided in the sensor rotor 8. The SIN signal detection coil 10 and the COS signal detection coil 20 are arranged with their phases shifted by a predetermined angle. The signal processing device 50 connected to the angle sensor 9 includes an excitation signal generation circuit 51, a first detection circuit 55, a second detection circuit 56, and a calculator 57. The excitation signal generation circuit 51 outputs a high frequency (480 kHz) excitation signal (SIN signal) to the stator side rotary transformer 30. The first detection circuit 55 receives the SIN signal output from the SIN signal detection coil 10. The second detection circuit 56 receives the COS signal output from the COS signal detection coil 20. The computing unit 57 inputs the SIN signal and the COS signal output from the first and second detection circuits 55 and 56, respectively.

  In the signal processing device 50 described above, when an excitation signal is generated by the excitation signal generation circuit 51, the excitation signal is input to the rotor-side excitation coil 40 via the stator-side rotary transformer 30 and the rotor-side rotary transformer 41. . An electromotive force (SIN signal and COS signal) is generated in the SIN signal detection coil 10 and the COS signal detection coil 20 on the stator side by the magnetic flux generated by the current of the excitation signal. By analyzing the amplitude fluctuation of the electromotive force (SIN signal) generated in the SIN signal detection coil 10 and the amplitude fluctuation of the electromotive force (COS signal) generated in the COS signal detection coil 20, the rotational position of the sensor rotor 8 is determined. Can be calculated. That is, the first detection circuit 55 removes the high frequency component of the excitation signal from the SIN signal generated by the SIN signal detection coil 10. On the other hand, the second detection circuit 56 removes the high frequency component of the excitation signal from the COS signal generated by the COS signal detection coil 20. Then, the computing unit 57 calculates the current angular position of the sensor rotor 8 from the amplitude ratio between the output signal of the first detection circuit 55 and the output signal of the second detection circuit 56, and uses the calculation result as angle data. Output.

  Next, the configuration of the sensor stator 7 will be described in detail. FIG. 3 is an exploded perspective view showing the configuration of the sensor stator 7. As shown in FIG. 3, the sensor stator 7 includes a stator substrate 1, a first insulating layer 2, a first coil layer 3, a second insulating layer 4, a second coil layer 5, and an overcoat 6 in order from the bottom. The stator substrate 1 is formed in a substantially annular plate shape by PPS resin and has high planarity. The first insulating film layer 2 is formed on the stator substrate 1 and has a substantially annular thin film shape. Stator substrate 1 includes three attachment portions 1a and one connector portion 1b on the outer periphery. The first coil layer 3 is formed on the surface of the first insulating film layer 2. The second insulating layer 4 has a substantially annular thin film shape and is formed on the first coil layer 3. The second coil layer 5 is formed on the second insulating layer 4. The overcoat 6 is formed on the second coil layer 5 and protects the coil layer 5.

  In FIG. 3, the first coil layer 3, the second insulating layer 4, and the second coil layer 5 constitute the SIN signal detection coil 10 and the COS signal detection coil 20 described above. That is, by connecting the first coil layer 3 and the second coil layer 5 formed one above the other with the second insulating layer 4 interposed therebetween, the SIN signal detection coil as a multi-X type planar coil is connected. 10 and the COS signal detection coil 20 are configured. The sensor stator 7 is disposed so that the surface thereof faces the surface of the sensor rotor 8, and the SIN signal detection coil 10 and the COS signal detection coil 20 are formed on the surface of the sensor stator 7.

  FIG. 4 is a plan view showing a pattern image of the SIN signal detection coil 10 as a planar coil of the present invention. FIG. 5 is a plan view showing a pattern image of the COS signal detection coil 20 as a planar coil of the present invention. As shown in FIG. 4, the SIN signal detection coil 10 has a generally annular shape as a whole, and is arranged in four arcs arranged at phase positions of “180 degrees” in electrical angle (“90 degrees in mechanical angle”). Coils 10A, 10B, 10C, and 10D are provided. Each of the arcuate coils 10 </ b> A to 10 </ b> D is arranged on the stator substrate 1 in the circumferential direction. The respective arcuate coils 10A to 10D arranged in the circumferential direction are connected in series via a connecting line 15 arranged adjacent to the outer side in the radial direction of the arcuate coils 10A to 10D. Both ends of the connection line 15 are connected to a positive terminal 16 and a negative terminal 17 that are arranged adjacent to each other. Both terminals 16 and 17 are provided so as to be connectable to the outside. As will be described later, each of the arcuate coils 10A to 10D is formed by connecting two parts that are divided in the circumferential direction and divided in the radial direction.

  Similarly, as shown in FIG. 5, the COS signal detection coil 20 has a substantially annular shape as a whole, and is arranged at phase positions of “180 degrees” in electrical angle (“90 degrees in mechanical angle”). Two arcuate coils 20A, 20B, 20C, 20D are provided. Each of the arcuate coils 20 </ b> A to 20 </ b> D is arranged on the stator substrate 1 in the circumferential direction. The respective arcuate coils 20A to 20D arranged in the circumferential direction are connected in series via connection lines 25 arranged adjacent to the outer sides in the radial direction of the arcuate coils 20A to 20D. Both ends of the connection line 25 are connected to a positive terminal 26 and a negative terminal 27 arranged adjacent to each other. Both terminals 26 and 27 are provided so as to be connectable to the outside. As will be described later, each of the arcuate coils 20 </ b> A to 20 </ b> D is formed by connecting two parts that are divided in the circumferential direction and divided in the radial direction. The SIN signal detection coil 10 and the COS signal detection coil 20 are arranged on the same axis, and are arranged so that the phases of the coils 10 and 20 are shifted by “90 degrees” in electrical angle (“45 degrees in mechanical angle”).

  FIG. 6 is a plan view showing a schematic configuration of a pattern image of the SIN signal detection coil 10. FIG. 7 is a plan view showing a schematic configuration of a pattern image of the COS signal detection coil 20. As shown in FIG. 6, the SIN signal detection coils 10 are alternately arranged in the circumferential direction on the stator substrate 1, and forward arcuate coils 10 </ b> B and 10 </ b> D as forward planar coils wound in a spiral shape. And reverse arcuate coils 10A and 10C as reverse plane coils that are spirally wound and electrically connected so as to be in reverse phase with respect to the forward plane coil, and arranged adjacent to each other, The positive electrode terminal 16 and the negative electrode terminal 17 provided so as to be connectable are included. The forward arcuate coils 10B and 10D and the reverse arcuate coils 10A and 10C are connected in series via intermediate connection lines 15a, 15b and 15c. One end of both ends of the series of arc-shaped coils 10A to 10D connected in series is connected to the positive terminal 16 via the first end connection line 15d, and the other end is connected to the negative terminal 17 via the second end connection line 15e. Connected to. Each connection line 15a-15e which comprises the connection line 15 is arrange | positioned in the range which is less than one circumference along those arrangement | sequences in the outer periphery of a series of arc-shaped coils 10A-10D connected in series. The second end connection line 15e is the other connection line, the intermediate connection lines 15a to 15c and the first connection line 15e as the return connection line connected to the one end 10a with the one end 10a of the series of arcuate coils 10A to 10D as the return point. It is arranged along the end connection line 15 d and connected to the negative terminal 17. In this embodiment, as shown in FIG. 4, the second end connection line 15e, which is a folded connection line, is disposed so as to be parallel to the other connection lines 15a to 15d via the second insulating layer 4 in the vertical direction. (In FIG. 6, they are arranged side by side for convenience.) In FIG. 4, the connection lines 15 a to 15 e illustrated in FIG. 6 are collectively shown as the connection line 15.

  As shown in FIG. 7, the COS signal detection coils 20 are alternately arranged in the circumferential direction on the stator substrate 1, and forward arcuate coils 20 </ b> B and 20 </ b> D as forward planar coils wound in a spiral shape. And reverse arcuate coils 20A and 20C as reverse planar coils that are spirally wound and electrically connected in reverse phase with respect to the forward planar coil, and are arranged adjacent to each other and externally A positive terminal 26 and a negative terminal 27 are provided so as to be connectable. The forward arcuate coils 20B and 20D and the reverse arcuate coils 20A and 20C are connected in series via intermediate connection lines 25a, 25b, and 25c. One end of both ends of the series of arc-shaped coils 20A to 20D connected in series is connected to the positive terminal 26 via the first end connection line 25d, and the other end is connected to the negative terminal 27 via the second end connection line 25e. Connected to. Each connection line 25a-25e is arrange | positioned in the range which is less than one circumference along those arrangement | sequences in the outer periphery of a series of arc-shaped coils 20A-20D connected in series. The second end connection line 25e is the other connection line, the intermediate connection lines 25a to 25c and the first connection line 25e connected to the one end 20a, with the one end 20a of the series of arcuate coils 20A to 20D as the return point. It is arranged along the end connection line 25d and connected to the negative terminal 27. In this embodiment, as shown in FIG. 5, the second end connection line 25e, which is a folded connection line, is arranged so as to be parallel to the other connection lines 25a to 25d in the vertical direction via the second insulating layer 4. (In FIG. 7, they are arranged side by side for convenience.) In FIG. 5, the connection lines 25 a to 25 e illustrated in FIG. 7 are collectively shown as the connection line 25.

  In FIG. 8, as one of the arcuate coils 10A to 10D and 20A to 20D, the arcuate coil 10A (20A) is representatively extracted and enlarged and shown in a plan view. As shown in FIGS. 4, 6, and 8, one end 10 b and the other end 10 c of each of the arcuate coils 10 </ b> A to 10 </ b> D that constitute the SIN signal detection coil 10 Placed in position. That is, each of the arcuate coils 10A to 10D has a bilaterally symmetric shape around the symmetry axis L1 extending in the radial direction at the center position in the circumferential direction. One end 10b and the other end 10c of each of the arcuate coils 10A to 10D are disposed on the symmetry axis L1 of each of the arcuate coils 10A to 10D. And each arc-shaped coil 10A-10D connected to each connection line 15a-15e is comprised so that an electric current may enter from the center position of the circumferential direction, and an electric current may come out from the center position.

  As shown in FIG. 8, for each of the arcuate coils 10A to 10D, one end 10b is arranged inside the arcuate coils 10A to 10D, and the other end 10c is arranged outside the arcuate coils 10A to 10D. And in order to make the arrangement | sequence of the coil wire group 100 which comprises each arc-shaped coil 10A-10D symmetrical about the symmetry axis L1, the arrangement | sequence of the coil wire group 100 is arranged between the one end 10b and the other end 10c. Displacement 100a is formed by displacing in the radial direction.

  As shown in FIG. 6, for the SIN signal detection coil 10, the connection lines 15 a to 15 e are arranged on the outer peripheral side of each arcuate coil 10 </ b> A to 10 </ b> D connected in series. For each of the arcuate coils 10A to 10D, a first connecting wire 15f extending in the radial direction from one end 10b toward the connecting wires 15a to 15e and a second extending in the radial direction from the other end 10c toward the connecting wires 15a to 15e. A connecting line 15g is provided. And these 1st crossover connection lines 15f and the 2nd crossover connection line 15g are arrange | positioned so that it may overlap with the upper and lower sides via the 2nd insulating layer 4 (refer FIG. 3), as shown in FIG.

  Similarly, as shown in FIGS. 5, 7, and 8, one end 20 b and the other end 20 c of each arcuate coil 20 </ b> A to 20 </ b> D that constitute the COS signal detection coil 20 are arranged in the circumferential direction of each arcuate coil 20 </ b> A to 20 </ b> D. It is arranged at the center position. That is, each of the arcuate coils 20A to 20D has a bilaterally symmetric shape around the symmetry axis L1 extending in the radial direction at the center position in the circumferential direction. One end 20b and the other end 20c of each arcuate coil 20A-20D are disposed on the axis of symmetry L1 of each arcuate coil 20A-20D. The arcuate coils 20A to 20D connected to the connection lines 25a to 25e are configured such that current enters from the center position in the circumferential direction and current flows from the center position.

  As shown in FIG. 8, for each of the arcuate coils 20A to 20D, one end 20b is arranged inside the arcuate coils 20A to 20D, and the other end 20c is arranged outside the arcuate coils 20A to 20D. And in order to make the arrangement | sequence of the coil wire group 200 which comprises each circular-arc-shaped coil 20A-20D symmetrical about the symmetry axis L1, the arrangement | sequence of the coil wire group 200 is arranged between the one end 20b and the other end 20c. The displacement part 200a is formed by displacement in the radial direction.

  As shown in FIG. 7, for the COS signal detection coil 20, the connection lines 25 a to 25 e are arranged on the outer peripheral side of each arcuate coil 20 </ b> A to 20 </ b> D connected in series. For each of the arcuate coils 20A to 20D, a first connecting wire 25f extending in the radial direction from one end 20b toward the connecting wires 25a to 25e, and a second extending in the radial direction from the other end 20c toward the connecting wires 25a to 25e. A connecting line 25g is provided. And these 1st crossover connection lines 25f and the 2nd crossover connection line 25g are arrange | positioned so that it may overlap with the upper and lower sides via the 2nd insulating layer 4 (refer FIG. 3), as shown in FIG.

  FIG. 9 is a plan view showing the second coil layer 5. The coil pattern of the second coil layer 5 is formed by drawing conductive ink on the surface of the second insulating layer 4 by printing and then baking it. As shown in FIG. 9, the substantially circular second coil layer 5 includes four SIN second coils 12A, 12B, 12C, and 12D constituting the SIN signal detection coil 10, which are electrically connected to the outer peripheral side. They are arranged at different positions by “180 degrees” in angle (“90 degrees in machine angle”). As shown in FIG. 9, the second coil layer 5 includes four SIN third coils 13A, 13B, 13C, and 13D on the inner peripheral side, which are “180 degrees” in electrical angle on the inner peripheral side. They are arranged at different positions (“90 degrees in mechanical angle”). FIG. 10 is a plan view showing only the SIN second coils 12A to 12D and the SIN third coils 13A to 13D in FIG. These SIN third coils 13A to 13D are arranged at positions shifted in phase by 90 degrees in electrical angle (45 degrees in mechanical angle) with respect to SIN second coils 12A to 12D. .

  As shown in FIG. 9, COS third coils 23 </ b> C, 23 </ b> D, 23 </ b> A, and 23 </ b> B constituting the COS signal detection coil 20 are arranged on the inner peripheral side of the SIN second coils 12 </ b> A to 12 </ b> D. In addition, COS second coils 22B, 22C, 22D, and 22A constituting the COS signal detection coil 20 are arranged on the outer peripheral side of the SIN third coils 13A to 13D. 11, only the COS second coils 22A to 22D and the COS third coils 23A to 23D in FIG. 9 are extracted and shown in a plan view. These COS third coils 23A to 23D are arranged at positions shifted in phase by 90 degrees in electrical angle ("45 degrees in mechanical angle") with respect to the COS second coils 22A to 22D. .

  FIG. 12 shows the relationship between the SIN third coils 13A to 13D and the SIN second coils 12A to 12D in FIGS. 9 and 10, and only the SIN third coil 13A and the SIN second coil 12A are extracted and enlarged in plan view. Show. As shown in FIG. 12, the SIN second coil 12A includes seven coil wires 121, 122, 123, 124, 125, 126, and 127 that constitute a substantially rectangular quarter portion. These coil wires 121 to 127 are formed and arranged so as to increase sequentially from the inner peripheral side to the outer peripheral side. Each coil wire 121-127 includes a first end 121a, 122a, 123a, 124a, 125a, 126a, 127a and a second end 121b, 122b, 123b, 124b, 125b, 126b, 127b, respectively. Similarly, the SIN third coil 13A includes seven coil wires 131, 132, 133, 134, 135, 136, and 137 that constitute a substantially rectangular quarter portion. These coil wires 131 to 137 are formed and arranged so as to increase sequentially from the outer peripheral side to the inner peripheral side. Each coil wire 131 to 137 includes a first end 131a, 132a, 133a, 134a, 135a, 136a, 137a and a second end 131b, 132b, 133b, 134b, 135b, 136b, 137b, respectively.

  FIG. 13 shows the first coil layer 3 in a plan view. The coil pattern of the first coil layer 3 is formed by drawing conductive ink on the surface of the first insulating layer 2 by printing and then baking. As shown in FIG. 13, the first coil layer 3 having a substantially annular shape includes four SIN first coils 11A, 11B, 11C, and 11D that constitute the SIN signal detection coil 10, and these are electrically connected to the outer peripheral side. They are arranged at different positions by “180 degrees” in angle (“90 degrees in machine angle”). Further, as shown in FIG. 13, the first coil layer 3 includes four SIN fourth coils 14A, 14B, 14C, and 14D constituting the SIN signal detection coil 10, and these are electrically angled on the inner peripheral side. “180 degrees” (“90 degrees in mechanical angle”) are arranged at different positions. FIG. 14 shows a plan view of only the SIN first coils 11A to 11D and the SIN fourth coils 14A to 14D in FIG. These SIN fourth coils 14A to 14D are arranged at positions that are out of phase with respect to the SIN first coils 11A to 11D by an electrical angle of "90 degrees" (mechanical angle of "45 degrees") counterclockwise. .

  As shown in FIG. 13, COS fourth coils 24 </ b> B, 24 </ b> C, 24 </ b> D, 24 </ b> A constituting the COS signal detection coil 20 are arranged on the inner peripheral side of the SIN first coils 11 </ b> A to 11 </ b> D. In addition, COS first coils 21C, 21D, 21A, and 21B that constitute the COS signal detection coil 20 are disposed on the outer peripheral side of the SIN fourth coils 14A to 14D. 15, only the COS first coils 21A to 21D and the COS fourth coils 24A to 24D in FIG. 13 are extracted and shown in a plan view. The COS first coils 21A to 21D are arranged at positions shifted in phase by 90 degrees in electrical angle (45 degrees in mechanical angle) with respect to the COS fourth coils 24A to 24D. .

  FIG. 16 is a plan view showing only the SIN first coil 11A and the SIN fourth coil 14A, with respect to the relationship between the SIN first coils 11A to 11D and the SIN fourth coils 14A to 14D in FIGS. Show. As shown in FIG. 16, the SIN first coil 11A includes seven coil wires 111, 112, 113, 114, 115, 116, and 117 that constitute a substantially rectangular quarter portion. These coil wires 111 to 117 are formed and arranged so as to increase sequentially from the inner peripheral side to the outer peripheral side. Each coil wire 111-117 includes a first end 111a, 112a, 113a, 114a, 115a, 116a, 117a and a second end 111b, 112b, 113b, 114b, 115b, 116b, 117b, respectively. Similarly, the SIN fourth coil 14 </ b> A includes seven coil wires 141, 142, 143, 144, 145, 146, and 147 that constitute a substantially rectangular quarter portion. These coil wires 141 to 147 are formed and arranged so as to increase sequentially from the outer peripheral side to the inner peripheral side. Each of the coil wires 141 to 147 includes a first end 141a, 142a, 143a, 144a, 145a, 146a, 147a, and a second end 141b, 142b, 143b, 144b, 145b, 146b, 147b, respectively.

  As shown in FIG. 9, an annular coil 31 constituting the stator-side rotary transformer 30 is arranged inside the SIN third coils 13A to 13D and the COS third coils 23A to 23D arranged in an annular shape. The Further, as shown in FIG. 9, the connection lines 15 b, 15 c, 25 b, 25 d, 25 e and the SIN second coils 12 A to 12 D and the COS second coils 22 A to 22 D arranged in an annular shape Terminals 17 and 27 are arranged.

  Similarly, as shown in FIG. 13, an annular coil 32 constituting a stator-side rotary transformer 30 is arranged inside the SIN fourth coils 14 </ b> A to 14 </ b> D and the COS fourth coils 24 </ b> A to 24 </ b> D arranged in an annular shape. Is placed. Further, as shown in FIG. 13, outside the SIN first coils 11A to 11D and the COS first coils 21A to 21D arranged in an annular shape, connection lines 15a, 15c, 15d, 25a to 25e and terminals are provided. 16, 26, 35, and 36 are arranged.

  Next, the configuration of the SIN signal detection coil 10 will be described in more detail with reference to FIGS. A positive terminal 16 shown in FIG. 10 is a terminal for the SIN signal detection coil 10. The positive terminal 16 is connected to the end 127a of the coil wire 127 of the SIN second coil 12B shown in FIGS. 9 and 12 through the through hole 4a formed in the second insulating layer 4 by the first end connection line 15d. Connected to. The end 127b of the coil wire 127 of the SIN second coil 12B is connected to the end 147b of the coil wire 147 of the SIN fourth coil 14B shown in FIGS. 13 and 16 through the through hole 4a of the second insulating layer 4. Is done. The end 147a of the coil wire 147 of the SIN fourth coil 14B is connected to the end 137a of the coil wire 137 of the SIN third coil 13B shown in FIGS. 9 and 12 through the through hole 4a of the second insulating layer 4. Is done. The end portion 137b of the coil wire 137 of the SIN third coil 13B is connected to the end portion 117b of the coil wire 117 of the SIN first coil 11B shown in FIGS. 13 and 16 through the through hole 4a of the second insulating layer 4. Is done. In this way, the outermost winding portion (turn) is formed by the outermost coil wires 127, 147, 137, 117 of the SIN second coil 12B, the SIN fourth coil 14B, the SIN third coil 13B, and the SIN first coil 11B. ) Is configured.

  Further, the end 117a of the coil wire 117 of the SIN first coil 11B shown in FIGS. 13 and 16 is connected to the SIN second coil 12B shown in FIGS. 9 and 12 through the through hole 4a of the second insulating layer 4. The coil wire 126 is connected to the end 126a. Similarly to the outermost coil wires 127, 147, 137, 117 of the SIN second coil 12B, the SIN fourth coil 14B, the SIN third coil 13B, and the SIN first coil 11B, the SIN second coil 12B, The coil wires 126, 146, 136, and 116 of the SIN fourth coil 14B, the SIN third coil 13B, and the SIN first coil 11B constitute an inner turn adjacent to the outermost periphery. Similarly, the inner coils are sequentially formed, and finally, the innermost coil wires 121, 141, 131 of the SIN second coil 12B, the SIN fourth coil 14B, the SIN third coil 13B, and the SIN first coil 11B. 111 constitute the innermost turn. In this way, the arc-shaped coil 10B is configured as a clockwise spiral coil by the SIN second coil 12B, the SIN fourth coil 14B, the SIN third coil 13B, and the SIN first coil 11B.

  The end 111a of the coil wire 111 of the SIN first coil 11B constituting the innermost turn of the arc-shaped coil 10B described above is connected to the SIN shown in FIGS. 9 and 12 via the intermediate connection line 15a shown in FIG. It is connected to the end 121a of the innermost coil wire 121 of the second coil 12A. The end 121b of the coil wire 121 of the SIN second coil 12A is connected to the end 141b of the coil wire 141 of the SIN fourth coil 14A shown in FIGS. 13 and 16 through the through hole 4a of the second insulating layer 4. Is done. The end portion 141a of the coil wire 141 of the SIN fourth coil 14A is connected to the end portion 131a of the coil wire 131 of the SIN third coil 13A shown in FIGS. 9 and 12 through the through hole 4a of the second insulating layer 4. Is done. The end 131b of the coil wire 131 of the SIN third coil 13A is connected to the end 111b of the coil wire 111 of the SIN first coil 11A shown in FIGS. 13 and 16 through the through hole 4a of the second insulating layer 4. Is done. In this way, the innermost turns are caused by the innermost coil wires 121, 141, 131, 111 of the SIN second coil 12A, the SIN fourth coil 14A, the SIN third coil 13A, and the SIN first coil 11A. Composed.

  Further, the end 111a of the coil wire 111 of the SIN first coil 11A shown in FIGS. 13 and 16 is connected to the end of the SIN second coil 12A shown in FIGS. 9 and 12 through the through hole 4a of the second insulating layer 4. The coil wire 122 is connected to the end 122a. Similarly to the innermost coil wires 121, 141, 131, 111 of the SIN second coil 12A, the SIN fourth coil 14A, the SIN third coil 13A, and the SIN first coil 11A, the SIN second coil 12A. The coil wires 122, 142, 132, and 112 of the SIN fourth coil 14A, the SIN third coil 13A, and the SIN first coil 11A constitute an outer turn adjacent to the innermost periphery. Similarly, outer coils are sequentially formed, and finally, the outermost coil wires 127, 147, 137, SIN second coil 12A, SIN fourth coil 14A, SIN third coil 13A, and SIN first coil 11A. 117 is the outermost turn. In this manner, the arc-shaped coil 10A is configured as a counterclockwise spiral coil by the SIN second coil 12A, the SIN fourth coil 14A, the SIN third coil 13A, and the SIN first coil 11A.

  Similarly, the arc-shaped coil 10D is configured as a counterclockwise spiral coil by the SIN first coil 11D, the SIN third coil 13D, the SIN fourth coil 14D, and the SIN second coil 12D. Further, the arc-shaped coil 10C is configured as a clockwise spiral coil by the SIN second coil 12C, the SIN fourth coil 14C, the SIN third coil 13C, and the SIN first coil 11C.

  The four arc-shaped coils 10A, 10B, 10C, and 10D configured as described above constitute a SIN signal detection coil 10 that has a substantially annular shape.

  The COS signal detection coil 20 is also composed of four arcuate coils 20A, 20B, 20C, and 20D that are divided in the circumferential direction. One arcuate coil 20A includes a COS first coil 21A, a COS second coil 22A, a COS third coil 23A, and a COS fourth coil 24A. Here, the COS first coil 21A and the COS fourth coil 24A are formed in the first coil layer 3 as shown in FIG. 13, and the COS second coil 22A and the COS third coil 23A are as shown in FIG. It is formed on the second coil layer 5.

  The configuration of the remaining arcuate coils 20B, 20C, and 20D is basically the same as that of the arcuate coil 20A described above. The COS signal detection coil 20 is connected to the positive terminal 26 and the negative terminal 27 shown in FIGS. The two arcuate coils 20A and 20C constituting the COS signal detection coil 20 are configured as a clockwise spiral coil while going back and forth between the first coil layer 3 and the second coil layer 5. Further, the other two arc-shaped coils 20B and 20D constituting the COS signal detection coil 20 are configured as a counterclockwise spiral coil while going back and forth between the first coil layer 3 and the second coil layer 5. .

  FIG. 17 is a plan view of the coil 31 shown in FIG. FIG. 18 is a plan view of the extracted coil 32 shown in FIG. These coils 31 and 32 constitute a stator-side rotary transformer 30 and are connected to terminals 35 and 36 shown in FIGS. 18 and 13.

  Next, the configuration of the sensor rotor 8 will be described in detail. FIG. 19 is an exploded perspective view showing the configuration of the sensor rotor 8. As shown in FIG. 19, the sensor rotor 8 includes a rotor substrate 61 from below, a first coil layer 62 formed on the surface of the rotor substrate 61, and an insulating layer 63 formed on the first coil layer 62. The second coil layer 64 formed on the insulating layer 63 and the overcoat 65 which is a protective film formed on the second coil layer 64 are provided.

  The rotor substrate 61 is formed in a circular plate shape from a nonmagnetic conductive metal such as aluminum or brass, and has a circular hole 61a at the center. A recess 61 b is formed on the surface of the rotor substrate 61. The recess 61b is filled with a resin such as PPS, and the resin is solidified.

  The insulating layer 63 and the overcoat 65 are formed in an annular thin film shape by an insulating material. Through holes 63a are formed in the insulating layer 63 in various places.

  The first coil layer 62 includes four arc-shaped coils 62a, 62b, 62c, and 62d arranged so as to form an annular shape as a whole. The second coil layer 64 also includes four arcuate coils 64a, 64b, 64c, and 64d arranged so as to form an annular shape as a whole. One ends of the arc-shaped coils 62 a to 62 d constituting the first coil layer 62 are connected to the coil 41 a constituting the rotor-side rotary transformer 41. The other ends of the four arc-shaped coils 62 a to 62 d are connected to one end of the arc-shaped coils 64 a to 64 d constituting the second coil layer 64 through the through hole 63 a of the insulating layer 63. The other ends of the four arc-shaped coils 64 a to 64 d are connected to a coil 41 b that constitutes the rotor-side rotary transformer 41. The other end of the coil 41 a and the other end of the coil 41 b are connected via a through hole 63 a in the insulating layer 63.

  The exciting coil 40 is configured by the four arc-shaped coils 62 a to 62 d constituting the first coil layer 62 and the four arc-shaped coils 64 a to 64 d constituting the second coil layer 64.

  According to the angle sensor 9 of this embodiment described above, the SIN signal detection coils 10 constituting the sensor stator 7 are alternately arranged in the circumferential direction on the stator substrate 1 in series as shown in FIG. A series of forward arcuate coils 10B and 10D and reverse arcuate coils 10A and 10C connected to each other. Of both ends of the series of arc-shaped coils 10A to 10D connected in series, one end is connected to the positive terminal 16 via the first end connection line 15d, and the other end is connected to the negative electrode via the second end connection line 15e. Connected to terminal 17. Here, each connection line 15a-15e is arrange | positioned in the range which is less than 1 round along the arrangement | sequence of a series of arc-shaped coils 10A-10D. Further, with one end 10a of the series of arcuate coils 10A to 10D as a turning point, a folded connection line (second end connection line) 15e connected to the one end a is disposed along the other connection lines 15a to 15d. To the negative terminal 17. Accordingly, of the connection lines 15a to 15e connected to both ends of the series of arcuate coils 10A to 10D, the folded connection line (second end connection line) 15e connected to the one end 10a is replaced with the other connection lines 15a to 15d. Therefore, the entire connection lines 15a to 15e do not substantially constitute a loop antenna. For this reason, it can be made hard to receive the influence of the electromagnetic noise from the outside with respect to the whole connecting wires 15a-15e. Further, since the folded connection line (second end connection line) 15e is arranged along the other connection lines 15a to 15d, the current is reversed between the two connection lines 15e and 15a to 15d, and the folded connection line (first connection line) Electromagnetic noise entering from the outside into the two-end connecting line) 15e and electromagnetic noise entering from the outside into the other connecting lines 15a to 15d cancel each other. For this reason, it is possible to reduce the influence of external electromagnetic noise on the SIN signal detection coil 10.

  Further, according to the angle sensor 9 of this embodiment, as shown in FIG. 7, the COS signal detection coils 20 constituting the sensor stator 7 are alternately arranged in the circumferential direction on the stator substrate 1 in series. A series of connected forward arcuate coils 20B, 20D and reverse arcuate coils 20A, 20C are provided. Of both ends of the series of arc-shaped coils 20A to 20D connected in series, one end is connected to the positive terminal 26 via the first end connection line 25d, and the other end is connected to the negative electrode via the second end connection line 25e. Connected to terminal 27. Here, the connection lines 25a to 25e are arranged in a range of less than one turn along the arrangement of the series of arcuate coils 20A to 20D. Further, with one end 20a of the series of arcuate coils 20A to 20D as a turning point, a turning connection line (second end connecting line) 25e connected to the one end 20a is disposed along the other connecting lines 25a to 25d. Connected to the negative terminal 27. Accordingly, of the connection lines 25a to 25e connected to both ends of the series of arcuate coils 20A to 20D, the folded connection line (second end connection line) 25e connected to the one end 20a is replaced with the other connection lines 25a to 25d. Therefore, the entire connection lines 25a to 25e do not substantially constitute a loop antenna. For this reason, it can be made hard to receive the influence of the electromagnetic noise from the outside with respect to the whole connection lines 25a-25e. Further, since the folded connection line (second end connection line) 25e is arranged along the other connection lines 25a to 25d, the current is reversed between the two connection lines 25e and 25a to 25d, and the folded connection line (first The electromagnetic noise entering from the outside into the two-end connecting line) 25e and the electromagnetic noise entering from the outside into the other connecting lines 25a to 25d cancel each other. For this reason, it is possible to reduce the influence of external electromagnetic noise on the COS signal detection coil 20. Since the influence of electromagnetic noise on the SIN signal detection coil 10 and the COS signal detection coil 20 can be reduced as described above, the detection accuracy and performance of the angle sensor 1 can be improved.

  Further, in this embodiment, for the SIN signal detection coil 10, the diameter of the series of arcuate coils 10A to 10D in which the folded connection line (second end connection line) 15e and the other connection lines 15a to 15d are connected in series. Since it arrange | positions in the direction outer side, electromagnetic noise becomes difficult to penetrate | invade from the exterior with respect to a series of circular-arc coils 10A-10D arrange | positioned inside connection line 15a-15d. Further, since the folded connection line (second end connection line) 15e and the other connection lines 15a to 15d are arranged adjacent to each other in the vertical direction, the folded connection line (second end connection line) 15e and the other connection lines 15a to 15a are arranged. The space between 15d is reduced. In this sense, the connection lines 15a to 15e can be made less susceptible to external electromagnetic noise. The same applies to the connection lines 25a to 25e of the COS signal detection coil 20.

  In particular, in this embodiment, the folded connection line (second end connection line) 15e and the other connection lines 15a to 15d are arranged so as to be overlapped in parallel vertically, so the folded connection line (second end connection line) 15e. And the other connection lines 15a to 15d are substantially zero in area. For this reason, it is possible to make the connection lines 15a to 15e less susceptible to external electromagnetic noise. The same applies to the connection lines 25a to 25e of the COS signal detection coil 20.

  FIG. 20 is a graph showing the relationship between the error component (cycle) and the error angle (DEG) for the angle sensor 1 of this embodiment. FIG. 21 is a graph showing the relationship between the error component (cycle) and the error angle (DEG) with respect to the proportional angle sensor (the connection line is arranged in a loop antenna shape). As is clear from comparison between FIG. 20 and FIG. 21, it can be seen that both the angle sensor 1 of this embodiment and the proportional angle sensor cause a primary error between the error components “0 to 2”. In the angle sensor 1 of the embodiment, it can be seen that the primary error can be reduced by “60%” with respect to the proportional angle sensor. In this sense, it can be seen that the angle sensor 1 of the present embodiment can reduce the influence of external electromagnetic noise.

  In addition, according to the angle sensor 1 of this embodiment, each of the arc-shaped coils 10A to 10D connected in series via the connection lines 15a to 15g per the SIN signal detection coil 10 of the sensor stator 7 A symmetric shape is formed around a symmetric axis L1 extending in the radial direction at a central position in the circumferential direction. Further, one end 10b and the other end 10c of each of the arcuate coils 10A to 10D connected to the connection lines 15a to 15g are arranged on the symmetry axis L1. Therefore, the symmetry of the shape of each of the arcuate coils 10A to 10D is improved with respect to the current flowing in and out of the arcuate coils 10A to 10D. Similarly, for each COS signal detection coil 20 of the sensor stator 7, each of the arcuate coils 20A to 20D connected in series via the connection lines 25a to 25g is moved in the radial direction at the center position in the circumferential direction. A symmetrical shape is formed around the extending symmetry axis L1. Moreover, the one end 20b and the other end 20c of each arc-shaped coil 20A-20D connected to the connection lines 25a-25g are arrange | positioned on the symmetry axis L1. Therefore, the symmetry of the shape of each of the arcuate coils 20A to 20D is improved with respect to the current flowing in and out of the arcuate coils 20A to 20D. Therefore, the magnetic flux density can be equalized for each of the arcuate coils 10A to 10D and 20A to 20D, the detection accuracy of the SIN signal detection coil 10 and the COS signal detection coil 20 can be improved, and Thus, the detection accuracy and performance of the angle sensor 1 can be improved.

  According to this embodiment, in order to make the arrangement of the coil wire groups 100 and 200 constituting the arc-shaped coils 10A to 10D and 20A to 20D symmetrical about the symmetry axis L1, the arc-shaped coils 10A to 10D, Since the arrangement of the coil wire groups 100, 200 is displaced in the radial direction by the displacement portions 100a, 200a between the one end 10b, 20b and the other end 10c, 20c of 20A to 20D, the coil wire group 100, The symmetry of 200 arrays is also improved. For this reason, the magnetic flux densities of the respective arc-shaped coils 10A to 10D and 20A to 20D can be further equalized, and the detection accuracy of the SIN signal detection coil 10 and the COS signal detection coil 20 can be further improved. The angle sensor 1 can further improve the detection accuracy and performance.

  According to this embodiment, for each arcuate coil 10A to 10D, 20A to 20D, the first crossover connection line 15f extending from the one end 10b or 20b toward the connection line 15a to 15e or 25a to 25e disposed on the outer peripheral side. , 25f, and second connecting connection lines 15g and 20g extending from the other ends 10c and 20c toward the connection lines 15a to 15e and 25a to 25e, respectively, overlap with each other through the second insulating layer 4 (see FIG. 3). Are arranged as follows. Therefore, the current is reversed between the first crossover connection lines 15f and 25f and the second crossover connection lines 15g and 25g, and electromagnetic noise that enters the first crossover connection lines 15f and 25f from the outside and the second crossover connection line. Electromagnetic noises that enter the lines 15g and 25g from each other cancel each other. For this reason, it can be made hard to receive the influence of the electromagnetic noise from the outside in the part of the 1st crossover connection lines 15f and 25f and the 2nd crossover connection lines 15g and 25g, and with respect to each arcuate coil 10A-10D and 20A-20D. The influence of electromagnetic noise from the outside can be reduced, and as a result, the detection accuracy and performance of the angle sensor 1 can be further improved.

  FIG. 22 is a graph showing the relationship of the output waveform of the angle sensor with respect to the electrical angle. In FIG. 22, the thick line indicates the waveform according to the present embodiment, the solid line indicates the waveform according to the proportionality (type in which the symmetry of each arc-shaped coil is not improved), and the broken line indicates the ideal waveform. As is apparent from this graph, the waveform according to the present embodiment substantially matches the ideal waveform, has good symmetry, and has improved error performance. On the other hand, the waveform of the proportional waveform has a peak portion greatly deviated from the ideal waveform, which shows that the symmetry is poor and the error performance is not good. In this sense, it can be seen that the angle sensor 1 of the present embodiment can improve error performance and improve detection accuracy.

  According to the angle sensor 9 of this embodiment, the sensor stator 7 and the sensor rotor 8 are provided, and the sensor stator 7 includes the stator substrate 1, the first insulating layer 2, the first coil layer 3, the second insulating layer 4, the first It is composed of two coil layers 5 and an overcoat 6. Here, the SIN signal detection coil 10 and the COS signal detection coil 20 are configured by the first coil layer 3 and the second coil layer 5 formed with the second insulating layer 4 interposed therebetween. And each arc-shaped coil 10A-10D which comprises the SIN signal detection coil 10 is formed by connecting what was divided into 2 by the circumferential direction, and was also divided by 2 in the radial direction. That is, in each of the arcuate coils 10A to 10D, the SIN first coils 11A to 11D and the SIN second coils 12A to 12D are disposed on the outer peripheral side, and the SIN third coils 13A to 13D and the SIN fourth coil 14A are disposed on the inner peripheral side. ~ 14D are arranged. Further, the SIN first coils 11A to 11D and the SIN third coils 13A to 13D are arranged to face each other in the circumferential direction, and the SIN second coils 12A to 12D and the SIN fourth coils 14A to 14D are opposed to each other in the circumferential direction. Arranged. Further, the SIN first coils 11A to 11D and the SIN fourth coils 14A to 14D are arranged in the first coil layer 3, and the SIN second coils 12A to 12D and the SIN third coils 13A to 13D are arranged in the second coil layer 5. Is done.

  Furthermore, each arc-shaped coil 20A-20D which comprises the COS signal detection coil 20 is formed by connecting what was divided into 2 by the circumferential direction, and was also divided by 2 in the radial direction. That is, each arcuate coil 20A-20D has COS first coils 21A-21D and COS second coils 22A-22D arranged on the outer peripheral side, and COS third coils 23A-23D and COS fourth coil 24A on the inner peripheral side. ~ 24D are arranged. The COS first coils 21A to 21D and the COS third coils 23A to 23D are arranged to face each other in the circumferential direction, and the COS second coils 22A to 22D and the COS fourth coils 24A to 24D face each other in the circumferential direction. Arranged. Further, the COS first coils 21 </ b> A to 21 </ b> D and the COS fourth coils 24 </ b> A to 24 </ b> D are arranged in the first coil layer 3. In addition, the COS second coils 22 </ b> A to 22 </ b> D and the COS third coils 23 </ b> A to 23 </ b> D are disposed in the second coil layer 5. Therefore, even if the stator substrate 1 itself is deformed in the circumferential direction such as undulation, the SIN first coils 11A to 11D (SIN fourth coils 14A to 14D) and the SIN second coil 21A to 21D (SIN third coils 13A to 13D) cancel out errors caused by deformation such as undulation. Similarly, the COS first coils 21A to 21D (COS fourth coils 24A to 24D) and the COS second coils 22A to 22D (COS third coils 23A to 23D) cancel out errors caused by deformation such as undulations. It will be. In this sense, it is possible to realize a highly accurate angle sensor 9 with little detection error.

  That is, the SIN first coils 11A to 11D are formed in the first coil layer 3, the SIN second coils 12A to 12D are formed in the second coil layer 5, and the SIN third coils 13A to 13D are formed in the second coil layer 5. The SIN fourth coils 14 </ b> A to 14 </ b> D are formed on the first coil layer 3. Therefore, the SIN first coils 11A to 11D and the SIN fourth coils 14A to 14D formed on the first coil layer 3, and the SIN second coils 12A to 12D and the SIN third coil formed on the second coil layer 5 Even if the magnetic flux density received by 13A to 13D differs due to a gap caused by deformation of the stator substrate 1 in the circumferential direction, the entire SIN signal detection coil 10 (SIN first coils 11A to 11D, SIN second coils 12A to 12D). , The third SIN coils 13A to 13D and the fourth SIN coils 14A to 14D) can cancel errors.

  Similarly, the COS first coils 21 </ b> A to 21 </ b> D are formed on the first coil layer 3, the COS second coils 22 </ b> A to 22 </ b> D are formed on the second coil layer 5, and the COS third coils 23 </ b> A to 23 </ b> D are formed on the second coil layer 5. The COS fourth coils 24 </ b> A to 24 </ b> D are formed in the first coil layer 3. Therefore, the COS first coils 21A to 21D and the COS fourth coils 24A to 24D formed on the first coil layer 3, and the COS second coils 22A to 22D and the COS third coil formed on the second coil layer 5 are formed. Even if the received magnetic flux density is different due to a gap due to deformation in the circumferential direction, the entire COS signal detection coil 20 (COS first coils 21A to 21D, COS second coils 22A to 22D, COS third As the coils 23A to 23D and the COS fourth coils 24A to 24D), the error can be canceled.

  In this embodiment, the set of the SIN first coils 11A to 11D and the SIN third coils 13A to 13D and the set of the COS second coils 22A to 22D and the COS fourth coils 24A to 24D are at the same position in the circumferential direction. Yes, a set of the SIN second coils 12A to 12D and the SIN fourth coils 14A to 14D and a set of the COS first coils 21A to 21D and the third coils 23A to 23D are at the same position in the circumferential direction. Therefore, the positional relationship between the SIN signal detection coil 10 and the COS signal detection coil 20 can be always constant with respect to the excitation coil 40.

  In this embodiment, the SIN first coils 11 </ b> A to 11 </ b> D and the SIN second coils 12 </ b> A to 12 </ b> D are connected through a through hole 4 a formed in the second insulating layer 4. The SIN second coils 12 </ b> A to 12 </ b> D and the SIN fourth coils 14 </ b> A to 14 </ b> D are connected through a through hole 4 a formed in the second insulating layer 4. The SIN fourth coils 14 </ b> A to 14 </ b> D and the SIN third coils 13 </ b> A to 13 </ b> D are in contact with each other through a through hole 4 a formed in the second insulating layer 4. Furthermore, the SIN third coils 13 </ b> A to 13 </ b> D and the SIN first coils 11 </ b> A to 11 </ b> D are connected through a through hole 4 a formed in the second insulating layer 4. Similarly, the COS first coils 21 </ b> A to 21 </ b> D and the COS second coils 22 </ b> A to 22 </ b> D are connected through a through hole 4 a formed in the second insulating layer 4. Further, the COS second coils 22 </ b> A to 22 </ b> D and the COS fourth coils 24 </ b> A to 24 </ b> D are connected through a through hole 4 a formed in the second insulating layer 4. Further, the COS fourth coils 24 </ b> A to 24 </ b> D and the COS third coils 23 </ b> A to 23 </ b> D are connected through a through hole 4 a formed in the second insulating layer 4. Further, the COS third coils 23 </ b> A to 23 </ b> D and the COS first coils 21 </ b> A to 21 </ b> D are connected through a through hole 4 a formed in the second insulating layer 4. Therefore, the SIN signal detection coil 10 and the COS signal detection coil 20 can be easily manufactured with high positional accuracy. For this reason, even when the received magnetic flux density differs due to a gap caused by deformation in the circumferential direction of the stator substrate 1, the entire SIN signal detection coil 10 (SIN first coils 11A to 11D, SIN second coils 12A to 12D, SIN first) As the three coils 13A to 13D and the SIN fourth coils 14A to 14D), it is possible to cancel the error reliably and accurately.

  In this embodiment, the first coil layer 3 and the second coil layer 5 are formed by drawing conductive ink on the insulating layers 2 and 4 and then baking. Therefore, even if there is a deviation between the first coil layer 3 and the second coil layer 5 due to firing, the resistance values of the SIN signal detection coil 10 and the COS signal detection coil 20 are averaged by the above configuration, and the resistance value is They can cancel each other, and the detection accuracy is less deteriorated.

  In this embodiment, since the SIN signal detection coil 10 and the COS signal detection coil 20 constitute one detection coil, it is possible to generate a constant induced voltage with respect to a predetermined magnetic field, and the highly accurate angle sensor 9. Can be obtained.

  In addition, this invention is not limited to the said embodiment, A part of structure can also be changed suitably and implemented in the range which does not deviate from the meaning of invention.

  For example, in the above-described embodiment, the connection line 15 of the SIN signal detection coil 10 is vertically connected to the other connection lines 15a to 15d via the second insulating layer 4 with respect to the other connection lines 15a to 15d. Placed in parallel with each other. On the other hand, as shown in a plan view in which a part of the connection lines 15a to 15e is enlarged in FIG. 23, the folded connection line (second end connection line) 15e is changed to the other connection lines 15a to 15d. On the other hand, the direction can be changed alternately via the second insulating layer 4 (see FIG. 3) so as to cross the twist evenly. In this case, the folded connection line (second end connection line) 15e and the other connection lines 15a to 15d are arranged so as to alternately change directions and intersect in a twisted manner, so that both the 15e and 15a to 15d The space between them becomes smaller, and electromagnetic noise from the outside cancels out more effectively. For this reason, it is possible to make the connection lines 15a to 15e less susceptible to external electromagnetic noise. The same applies to the connection line 25 of the COS signal detection coil 20.

  In the embodiment, the SIN first coils 11A to 11D and the SIN fourth coils 14A to 14D are formed in the first coil layer 3, and the SIN second coils 12A to 12D and the SIN third coils 13A to 13D are second coils. Layer 5 was formed. On the other hand, the SIN first coils 11A to 11D and the SIN fourth coils 14A to 14D are formed in the second coil layer 5, and the SIN second coils 12A to 12D and the SIN third coils 13A to 13D are formed in the first coil layer. 3 may be formed.

  In the embodiment, the COS first coils 23A to 23D and the COS fourth coils 24A to 24D are formed in the first coil layer 3, and the COS second coils 22A to 22D and the COS third coils 23A to 23D are the second coil. Layer 5 was formed. In contrast, the COS first coils 21A to 21D and the COS fourth coils 24A to 24D are formed in the second coil layer 5, and the COS second coils 22A to 22D and the COS third coils 23A to 23D are formed to the first coil layer. 3 may be formed.

  In the above embodiment, the resolver with one excitation and two outputs has been described. However, the present invention can be applied to a resolver with two excitations and one output.

  The present invention can be used to detect the rotation angle of a rotation shaft of a motor, an engine, or the like.

1 Stator Substrate 3 First Coil Layer (Plane Coil)
4 Second insulating layer 5 Second coil layer (planar coil)
7 Sensor stator 8 Sensor rotor 9 Angle sensor 10 SIN signal detection coil (planar coil)
10a One end 10A (reverse direction) arc-shaped coil (reverse direction planar coil)
10B (forward direction) arc-shaped coil (forward direction planar coil)
10C (reverse direction) arc coil (reverse planar coil)
10D (forward) arc-shaped coil (forward planar coil)
15 connection line 15a intermediate connection line 15b intermediate connection line 15c intermediate connection line 15d first end connection line 15e second end connection line (folded connection line)
16 Positive terminal 17 Negative terminal 20 COS signal detection coil (planar coil)
20a One end 20A (reverse direction) arc-shaped coil (reverse direction planar coil)
20B (forward direction) arc-shaped coil (forward direction planar coil)
20C (Reverse direction) Arc coil (Reverse direction planar coil)
20D (forward direction) arc coil (forward direction planar coil)
25 connection line 25a intermediate connection line 25b intermediate connection line 25c intermediate connection line 25d first end connection line 25e second end connection line (folded connection line)
26 Positive terminal 27 Negative terminal 40 Exciting coil (planar coil)
62 First coil layer (planar coil)
64 Second coil layer (planar coil)
75 Motor shaft (rotating shaft)

Claims (4)

A sensor rotor attached to a rotating shaft and having a planar coil formed on the surface;
An angle sensor comprising: a sensor stator having a surface opposed to the surface of the sensor rotor and having a multi-X type planar coil formed on the surface;
The sensor stator is alternately arranged in the circumferential direction on the stator substrate and the stator substrate, and the forward planar coil wound in a spiral shape and the spiral wound in the reverse direction with respect to the forward planar coil. A reverse planar coil electrically connected so as to be in phase, and a positive electrode terminal and a negative electrode terminal that are arranged adjacent to each other and provided so as to be connectable to the outside,
The forward planar coil and the backward planar coil are connected in series via a connection line, and one end of both ends of the series of planar coils connected in series is connected to the positive terminal via a connection line. Connected, the other end is connected to the negative terminal via a connection line,
The connection line is arranged in a range of less than one turn along the array of the series of planar coils connected in series, and the folded connection is connected to one end of the series of planar coils as a folding point An angle sensor, wherein a line is disposed along another connection line and connected to the positive terminal or the negative terminal.   2. The angle sensor according to claim 1, wherein the folded connection line and the other connection lines are disposed adjacent to a radially outer side of the series of planar coils connected in series.   3. The angle sensor according to claim 2, wherein the folded connection line is disposed so as to be overlapped vertically in parallel with the other connection line via an insulating layer.   The angle sensor according to claim 2, wherein the folded connection line is arranged so as to cross the twisted shape by alternately changing a direction with respect to the other connection line via an insulating layer.