JP2013038965A - Partition structure attached to motor and vacuum motor - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a partition structure attached to a motor which does not discharge an impurity gas to a vacuum side space.SOLUTION: A fastening member and a sealing member are provided from the high pressure side toward the lower pressure side in this written order at a space between an opening and a transmission plate.

Description

  The present invention relates to a partition structure and a vacuum motor attached to a motor, and relates to a technique suitable for use in a vacuum motor and a vacuum robot that can prevent leakage of gas generated from a component under vacuum.

  For example, a vacuum apparatus such as a multi-chamber type CVD apparatus is provided with a transfer device for transferring a film formation object between a charging / unloading chamber and a processing chamber. Such a conveying apparatus is comprised from the roller etc. which support and move a board | substrate, for example, the motor which rotates this roller, etc. (for example, refer patent document 1). Conventionally, a motor used in a transfer device is disposed outside a chamber serving as a vacuum environment, that is, in contact with outside air, and a motor shaft (rotating shaft) is connected to a roller disposed in the chamber, thereby the inside of the chamber. The roller was rotating. For this reason, a structure in which an airtight seal for keeping the airtightness in the chamber is provided in a portion where the motor shaft penetrates the wall surface of the chamber is known.

  However, in a structure in which the motor of the transfer device is installed outside the chamber and the motor shaft is connected to the roller in the chamber via an airtight seal, the entire transfer device becomes large, which is an obstacle to downsizing the vacuum device. It was. In addition, there is a problem that the structure is complicated, for example, an airtight seal is required between the motor shaft and the chamber wall surface. Furthermore, such a hermetic seal can maintain the airtightness in the chamber only when the rotation speed of the motor shaft is about 500 rpm. When the motor rotation speed is increased to, for example, about 2000 to 3000 rpm, the film deposition is performed at a high speed. It was an obstacle. Moreover, since the installation position of the motor is restricted with respect to the chamber wall surface and the degree of freedom of layout of the motor or the like in the vacuum apparatus is restricted, there is a demand for improvement.

  For this reason, the vacuum motor which arrange | positions the vacuum motor of a conveying apparatus in the inside of a chamber in a vacuum apparatus is also known (for example, refer patent document 2). By disposing the motor inside the chamber, an airtight seal between the motor shaft and the chamber wall surface becomes unnecessary, the structure can be simplified, the vacuum apparatus can be miniaturized, and the airtightness inside the chamber can be maintained. The number of rotations of the motor can be increased to enable high-speed conveyance of the film formation.

  However, in a servo motor or the like that detects the rotational position of the motor rotation shaft, a sensor that detects the position needs to read a signal from the vacuum side, and thus the sensor is exposed to vacuum.

Patent Document 3 discloses a technique using an epoxy resin with low gas generation as a mold resin of a sensor, but it is difficult to make the gas generation from the mold resin zero, and a space connected to a vacuum exhaust device. An impurity gas was released in
The released gas diffuses into the vacuum chamber where the substrate is moved and placed, and adheres to the substrate or the inner wall surface of the vacuum chamber.

JP 2001-339920 A JP 2007-277617 A JP 2002-281725 A

  The present invention has been made to solve the above-described problems of the prior art, and includes a partition structure attached to a motor that does not release impurity gas to a decompression side space connected to a vacuum exhaust device, a vacuum motor, and a vacuum robot. It is to provide.

In order to solve the above problems, the partition structure attached to the motor of the present invention includes a low-pressure side drive space in which a motor rotation shaft and a rotation detection plate for detecting rotation of the rotation shaft are disposed,
A high-pressure sensor space in which a sensor for detecting the rotation state of the rotation detection plate is disposed;
An opening (opening) provided in a boundary member between the drive space and the sensor space is provided so that the rotation state of the rotation detection plate by the sensor can be detected,
A partition structure attached to the motor for sealing the drive space and the sensor space,
The partition structure is a transmission plate made of a non-magnetic material fitted into the opening, a fixing member that fixes the transmission plate to the boundary member, and a sealing member that seals between the transmission plate and the boundary member Have
The fixing member and the sealing member are provided in this order from the high pressure side to the low pressure side between the opening and the transmission plate.
The present invention has a step so that the transmission plate is reduced in diameter from the high pressure side toward the low pressure side, and the sealing member is provided so that the sealing member is in close contact with the step surface, and the fixing member is provided on the high pressure side of the step surface. And the transmission plate can be fixed.
According to the present invention, a recess is provided on the high pressure side around the opening in the boundary member, the transmission plate is provided in the recess, and a sealing member is connected to the transmission plate on the low pressure side in the recess. It is provided so as to be in close contact, and the fixing member is arranged on the high-pressure side in the recess to fix the transmission plate.
In the present invention, the transmission plate has a step so that the diameter thereof decreases from the low pressure side toward the high pressure side, and the sealing member is provided so as to be in close contact with the step surface, and the fixing member is provided on the high pressure side of the step surface. And the transmission plate can be fixed.
In the present invention, the boundary member may have a portion formed as a case member of the sensor.
In the present invention, the fixing member may be an adhesive, and the sealing member may be an O-ring.
In the present invention, the sensor may be an optical sensor, and the transmission plate may be a glass plate.
The present invention may be characterized in that the sensor is a magnetic sensor and the transmission plate is a non-magnetic metal plate.

The vacuum motor of the present invention also includes a cylindrical cylindrical member, a rotary shaft disposed coaxially with the cylindrical member inside the cylindrical member, a magnet provided on an outer peripheral side surface of the rotary shaft, A coil disposed on the outside of the magnet so as to face the magnet, and a ring-shaped plate. The rotation shaft is inserted into a hole of the ring, and a code for generating a signal on the surface is the center of the rotation shaft. A rotation detection plate (rotation plate) disposed along a circumference centered on an axis, and a sensor disposed opposite to the surface of the rotation detection plate and capable of detecting the signal, and the rotation The space where the plate is arranged is a vacuum motor that is connected to a vacuum exhaust device and is evacuated,
The sensor is disposed inside, a sensor chamber (sensor space) provided with an opening in a portion facing the sensor, and a transmission window disposed in the opening and transmitting the signal,
The transmission window may be provided so as to close the opening, and the internal space of the sensor chamber may have the partition structure attached to the motor according to any one of the above, which is separated from the space where the rotating plate is disposed.
The present invention is a vacuum motor, wherein the reference numeral includes a first region that generates a first signal and a second region that generates a second signal, and the sensor outputs the first and second signals. Sometimes it can be detected.
The present invention is a vacuum motor, wherein the sensor has a magnetoresistive accumulator, the first and second signals are magnetic signals having different directions, and the transmission window can be made of a non-magnetic material. .
The present invention may be a vacuum motor, wherein a central axis of the rotating shaft may be oriented perpendicular to a plane on which the surface of the rotating plate is located.
The present invention is a vacuum motor, wherein the sign has first and second values, and the first and second values can be alternately arranged at equal intervals along the circumference. .
The present invention is a vacuum motor, and the sign may be set to a different value for each position along the circumference.

A vacuum processing apparatus of the present invention, any of the vacuum motor described above,
It has a vacuum chamber and a conveyance roller for conveying the substrate to be processed in the vacuum chamber, and the vacuum motor can be driven by the conveyance roller.
A vacuum robot according to the present invention includes any one of the above-described vacuum motors, a vacuum chamber, a vacuum exhaust device that evacuates the vacuum chamber, and an arm portion that holds a substrate. One end of the cylindrical member of the motor is connected to an insertion port provided in the vacuum chamber. One end of the rotating shaft may be inserted into the vacuum chamber through a front insertion slot, and the arm portion may be disposed in the vacuum chamber and attached to the one end of the rotating shaft.

  In a vacuum processing apparatus or the like, since the space connected to the vacuum exhaust device and the space where the sensor is arranged are separated, the impurity gas is not released into the space connected to the vacuum exhaust device, and follows the vacuum exhaust device. The space created can be kept clean.

It is sectional drawing which shows 1st Embodiment of the partition structure attached to the motor which concerns on this invention. It is sectional drawing which shows 2nd Embodiment of the partition structure attached to the motor which concerns on this invention. It is sectional drawing which shows 3rd Embodiment of the partition structure attached to the motor which concerns on this invention. It is sectional drawing which shows 4th Embodiment of the partition structure attached to the motor which concerns on this invention. It is sectional drawing which shows 5th Embodiment of the partition structure attached to the motor which concerns on this invention. It is an internal block diagram of the vacuum motor of the 1st example of this invention. It is a top view of the rotating plate of the vacuum motor of the first example. It is an internal structure diagram of the vacuum robot of the present invention. It is an internal block diagram of the vacuum motor of the 2nd example of this invention. It is a top view of the rotating plate of the vacuum motor of a 2nd example. It is an internal block diagram of the vacuum motor of the 3rd example of this invention. It is an internal block diagram of the vacuum motor of the 4th example of this invention. It is a schematic diagram which shows the example of motor arrangement | positioning in the vacuum apparatus of this invention.

Hereinafter, a first embodiment of a partition structure attached to a motor according to the present invention will be described with reference to the drawings.
FIG. 1 is a cross-sectional view showing a part of a partition structure attached to a motor in the present embodiment. In the figure, reference numeral 12 denotes a rotating shaft of the motor.

  The partition structure attached to the motor of the present embodiment is provided in the motor as will be described later. As shown in FIG. 1, the rotation detection for detecting the rotation of the motor rotation shaft (rotation shaft) 12 and the rotation shaft 12 is performed. In a motor having a low pressure (vacuum) side drive space M01 in which the plate M21 is arranged and a high pressure side sensor space M24 in which a sensor M22 for detecting the rotation state of the rotation detection plate M21 is arranged, rotation detection by the sensor M22 is detected. An opening M02 provided in a boundary member M11 between the drive space M01 and the sensor space M22 is provided so that the rotation state of the plate M21 can be detected.

In the partition structure attached to the motor of the present embodiment, the transmission plate M23 is fitted into the opening M02, and the drive space M01 and the sensor space M24 are sealed.
This partition structure has a transmission plate M23 made of a non-magnetic material fitted in the opening, a fixing member M03 that fixes the transmission plate M23 to the boundary member M11, and a hermetic seal that seals between the transmission plate M23 and the boundary member M11. Member M04.

The opening M02 is provided with a step having a step surface M021, and the opening M02 is formed with a recess so that the diameter of the sensor space M24 is larger than that of the driving space M01.
The transmission plate M23 opening M02 has a step so that the driving space M01 side is reduced in diameter compared to the sensor space M24 side, and the fixing member M03 used as an adhesive is provided in close contact with the step surface M021, and the step surface A sealing member M04, which is an O-ring, is arranged on the drive space M01 side of M021, and the transmission plate M23 is fixed. In addition, the groove | channel for accommodating the sealing member M04 used as an O-ring is not illustrated in the boundary member M11.

  That is, in the transmission plate M23 fitted in the opening M02, the fixing member M03 and the sealing member M04 are provided in this order from the sensor space M24 on the high pressure side toward the drive space M01 on the low pressure side.

The transmission plate M23 only needs to be able to transmit a signal from the rotation detection plate M21 detected by the sensor M22. When the sensor M22 is a magnetic type, the transmission plate M23 is a non-magnetic metal, and when the sensor M22 is an optical type. It is assumed that it has optical transparency such as glass.
In the present embodiment, the drive space M01 and the sensor space M24 may be in a state having a pressure difference, and are not necessarily in a vacuum state and an atmospheric pressure state. In particular, it is assumed that either the drive space M01 or the sensor space M24 is at least a pressure-reducing side that affects gas generating properties, and that there is a pressure difference between the drive space M01 and the sensor space M24.

Hereinafter, 2nd Embodiment of the partition structure attached to the motor which concerns on this invention is described based on drawing.
FIG. 2 is a cross-sectional view showing a part of the partition structure attached to the motor in this embodiment.
In this embodiment, what is different from the first embodiment shown in FIG. 1 is a point related to the fixing member, and other corresponding components are denoted by the same reference numerals and description thereof is omitted.

  In the present embodiment, a screw M031 is employed as a fixing member instead of the adhesive in the first embodiment. The screw M031 is provided at a position closer to the sensor space M24 than the stepped surface M021 of the transmission plate M23 and through the transmission plate M23 on the sensor space M24 side which is the low pressure side, and is provided on a corresponding boundary member. The transmission plate M23 is fixed by being screwed to the female screw. Thereby, it can arrange | position so that the sensor M22 may contact the permeation | transmission board M23, and it can prevent that the sensor M22 distances from the rotation detection board M21, a detection sensitivity falls, or detection becomes inaccurate.

Hereinafter, a third embodiment of a partition structure attached to a motor according to the present invention will be described with reference to the drawings.
FIG. 3 is a cross-sectional view showing a part of the partition structure attached to the motor in the present embodiment.
In the present embodiment, what is different from the first embodiment shown in FIG. 1 is the point relating to the opening shape, and the corresponding components other than this are denoted by the same reference numerals and description thereof is omitted.

  In the present embodiment, instead of the step in the first embodiment, the opening M02 has a spherical shape, and the outer surface shape of the transmission plate M23 is also a spherical surface. That is, the opening M02 itself forms a recess. Further, the sensor M22 and the transmission plate M23 are integrated, and a fixing member M03 as an adhesive is provided at a position on the sensor space M24 side of the transmission plate M23, and the sensor M22 and the transmission plate M23 are fixed. A sealing member M04 that is an O-ring is provided on the drive space M01 side. As a result, the sensor M22 and the rotation detection plate M21 can be brought closer to each other to prevent the detection sensitivity from being lowered or the detection from becoming inaccurate.

Hereinafter, 4th Embodiment of the partition structure attached to the motor which concerns on this invention is described based on drawing.
FIG. 4 is a cross-sectional view showing a part of the partition structure attached to the motor in the present embodiment.
In this embodiment, what is different from the first embodiment shown in FIG. 1 is a point related to the boundary member, and the corresponding components other than this are denoted by the same reference numerals, and description thereof is omitted.

In the present embodiment, the boundary member M11 in the first embodiment also serves as the case member of the sensor M22, and the sensor M22, the transmission plate M23, and the case M11C are integrated.
The sensor M22 is accommodated in the case M11C, and an opening M02 is provided at one end thereof, and a transmission plate M23 is fitted therein. Further, the other end of the case M11C is provided with a flange M11B that expands in diameter, and the case M11C fitted in the through hole M11A provided in the boundary member M11 is brought into contact with the boundary member around the through hole M11A. It is fixed to the boundary member M11. An O-ring M11D is provided at a position that contacts the flange M11B of the boundary member M11, and maintains a seal between the case M11C and the boundary member M11. Further, the other end of the case M11C is closed by a sealing member M11E. As a result, the sensor M22 and the rotation detection plate M21 can be brought closer to each other to prevent the detection sensitivity from being lowered or the detection from becoming inaccurate.

  In the fourth embodiment, when the gas generating property of the sensor M22 is sufficiently low, or when the gas-proof performance of the case M11C is sufficiently high, the sensor M22 is disposed at a position communicating with the driving space M01 on the low pressure side. You can also.

Hereinafter, 5th Embodiment of the partition structure attached to the motor which concerns on this invention is described based on drawing.
FIG. 5 is a cross-sectional view showing a part of the partition structure attached to the motor in the present embodiment.
In the present embodiment, what is different from the first embodiment shown in FIG. 1 is the point relating to the opening shape, and the corresponding components other than this are denoted by the same reference numerals and description thereof is omitted.

  In the present embodiment, the opening M02 is formed so that the step in the first embodiment is reversed between the high pressure side and the low pressure side.

The opening M02 is provided with a step having a step surface M022, and the opening M02 is formed with a recess so that the diameter of the drive space M01 is larger than that of the sensor space M24.
The transmission plate M23 and the opening M02 have a step so that the diameter of the sensor space M24 is smaller than that of the drive space M01, and the fixing member M03, which is an adhesive, is provided in close contact with the step surface M022. A sealing member M04 that is an O-ring is disposed on the drive space M01 side of the surface M022, and the transmission plate M23 is fixed. In the transmission plate M23 fitted in the opening M02, a fixing member M03 and a sealing member M04 are provided in this order from the sensor space M24 on the high pressure side toward the drive space M01 on the low pressure side.

  According to the present embodiment, since the recess is formed so that the driving space M01 side has a larger diameter than the sensor space M24 side, the transmission plate M23 is assembled from the driving space M01 side to the opening M02 during assembly. Therefore, it is easy to set the sensor space M24 to the same size as the sensor M22, and to install and seal only the sensor space M24 in a vacuum atmosphere.

According to each of these embodiments, the amount of gas released from the sensor M22 can be reduced, and impure gas contained in the gas can be reduced. Thereby, the vacuum atmosphere of the space in which the motor is provided can be kept clean, and for example, the surface of the glass substrate or wafer conveyed in the space used as the vacuum apparatus is not contaminated.
In addition, since the distance between the sensor M22 and the rotation detection plate M21 can be reduced, the position detection sensitivity of the sensor M22 is improved, and the glass substrate or wafer can be transported with high positional accuracy in the vacuum apparatus.

  When the transmissive plate M23 is fixed only with the adhesive, there is a possibility that the airtightness of the vacuum cannot be maintained due to poor adhesion, or there is a possibility that gas is generated from the adhesive. The force is maintained by the fixing member M03, which is an adhesive, and the sealing performance is maintained by the sealing member M04, which is an elastic seal. Therefore, the structure near the opening M02 is simplified, and the sensor unit has stable sealing performance. It can be a vacuum motor.

  Below, the example of the motor provided with the partition structure attached to the motor in this invention is demonstrated in detail.

<Structure of vacuum motor of first example>
The structure of the vacuum motor 10a of the first example of the present invention will be described.
FIG. 6 is an internal configuration diagram of the vacuum motor 10a of the first example, and FIG. 7 is a plan view of an example of the rotating plate 21a.
As shown in FIGS. 6 and 7, the vacuum motor 10 a of the first example includes a cylindrical tube member 11, a rotary shaft 12 disposed coaxially with the tube member 11 inside the tube member 11, and rotation. A magnet 14 provided on the outer peripheral side surface of the shaft 12 and a coil 15 disposed on the outer side of the magnet 14 so as to face the magnet 14 are provided.

In the present embodiment, contact portions 11 ₁ and 11 ₂ projecting toward the rotary shaft 12 are provided on the inner peripheral side surface of the cylindrical member 11, and a spherical member is provided between the contact portions 11 ₁ and 11 ₂ and the rotary shaft 12. 19 ₁ and 19 ₂ are arranged. The rotating shaft 12 is supported by the contact portions 11 ₁ and 11 ₂ via the spherical members 19 ₁ and 19 _2, and the center axis of the rotating shaft 12 is not shifted from the center axis of the cylindrical member 11.
When a rotational force about the central axis is applied to the rotary shaft 12, the rotary shaft 12 can rotate about the central axis. The spherical members 19 ₁ , 19 ₂ are in contact with the contact portions 11 ₁ , 11 ₂ and the rotary shaft 12 at points, respectively, and when the rotary shaft 12 rotates around the central axis, the spherical members 19 ₁ , 19 ₂ Are rotated about the central axis of the rotary shaft 12 so that they do not wear between the contact portion contact portions 11 ₁ , 11 ₂ and the rotary shaft 12. Therefore, it is prevented that the surfaces of the contact portions 11 ₁ and 11 _{2 and} the surface of the rotary shaft 12 are worn and impurities (dust) are generated.

Here, a magnet whose surface is Ni-plated is used. The surface of the magnet 14 is prevented from being oxidized or corroded by the Ni plating, and impurities (dust) are not generated from the surface of the magnet 14. Yes.
The magnet 14 is fixed to the outer peripheral side surface of the rotating shaft 12.
A coil chamber 16 is disposed outside the magnet 14, and the coil 15 is disposed in the coil chamber 16.

Here, the coil chamber 16 has a bowl-shaped coil chamber lid member 17. The green portion of the coil chamber lid member 17 is fixed in an annular manner to the inner side surface of the cylindrical member 11, and the internal space of the coil chamber 16 is separated from the space where the magnet 14 is covered.
Therefore, even if the coil 15 generates heat and gas is released from the covering of the coil 15 and the varnish or mold material fixing the coil 15, the released gas is in the space where the magnet 14 is disposed. It is designed not to spread.

The coil chamber lid member 17 is a non-magnetic material, and here, aluminum is used, and the thickness of the portion between the coil 15 and the magnet 14 is 1 mm or less. A thinner portion between the coil 15 and the magnet 14 is preferable because the gap between the coil 15 and the magnet 14 is narrowed and the mutual magnetic coupling force can be increased.
A coil power supply 18 is electrically connected to the coil 15.
When a current is passed from the coil power supply 18 to the coil 15, the magnetic force lines formed by the coil 15 penetrate the magnet 14, and the magnet 14 receives a rotational force, and the rotation axis 12 and the center axis of the rotation axis 12 are centered. It is designed to rotate.

The vacuum motor 10a of the first example has a rotation detection unit 30a that detects the rotation angle of the rotary rod 12.
The rotation detection unit 30a includes a rotation detection plate 21a and a sensor 22a.
The sensor M22 corresponds to the sensor 22a, the rotation detection plate M21 corresponds to the rotation plate 21a, the sensor space M24 corresponds to the sensor chamber 24a, a part of the boundary member M11 corresponds to the contact portion 11 ₁ , and the transmission plate M23 corresponds to the transmission window 23a.

As shown in FIG. 7, the rotating plate 21a is a ring-shaped plate, and a code for generating a signal is arranged on the surface along a circumference centered on the center of the rotating plate 21a.
In this embodiment, the code is composed of a first region 51 that generates a first signal and a second region 52 that generates a second signal, but the first to Nth signals that generate first to Nth signals. The present invention also includes a case where the area is composed of areas (N is a natural number of 3 or more).

Here, the rotating plate 21a is a magnetic plate magnetized in the thickness direction, the first region 51 is provided with an opening, and the second region 52 is constituted by a shielding part other than the opening.
Accordingly, the first region 51 generates a first signal that is a zero magnetic field (magnetic signal), and the second region 52 generates a second signal that is a magnetic field (magnetic signal) in the thickness direction.
The individual structures of the first and second regions 51 and 52 are not limited to the above-described configuration, but are portions magnetized in two different directions, and the first and second signals are magnetic fields (magnetic) having different directions. Signal).

  Here, the first area 51 and the second area 52 are alternately arranged at equal intervals along the circumference centered on the center of the rotating plate 21a, the first signal is the first value, and the second area When the signal is a second value, the code formed by the first and second regions 51 and 52 has the first and second values, and the first value and the second value are in the circumference. It is alternately arranged at equal intervals along.

Referring to FIG. 6, the rotary shaft 12 is inserted into the hole of the ring of the rotary plate (rotation detection plate) 21a, and the central axis of the rotary shaft 12 is directed at right angles to the plane on which the surface of the rotary plate 21a is located. In this state, the rotating plate 21 a is fixed to the rotating rod 12. The rotating plate 21 a is disposed coaxially with the rotating shaft 12.
A space (driving space) in which the rotating plate 21a is arranged in the cylindrical member 11 is communicated with a space in which the magnet 14 is arranged.

The sensor 22a is arranged to face the surface of the rotating plate 21a and can detect the first and second signals generated by the first and second regions 51 and 52.
Here, the sensor 22 a has a magnetoresistive element 31. The magnetoresistive element 31 is an element whose resistance value changes to a value corresponding to the strength and direction of the magnetic signal when receiving a magnetic signal.
The magnetoresistive element 31 is covered and sealed with a mold resin 32 so that dust and moisture do not adhere to the magnetoresistive element 31 and deteriorate.
A sensor power source 27 is electrically connected to the sensor 22a. When the sensor 22a receives the first and second signals, the sensor 22a outputs electric signals having different voltage values according to the first and second signals. It is configured.
A control device 28 is connected to the sensor 22a.
When receiving the electrical signal output from the sensor 22a, the control device 28 is configured to obtain the rotation angle of the rotating plate 21a from the received electrical signal.

Here, the control device 28 counts the number of rising or falling of the change in the voltage value of the received electric signal, and the central angle between the centers of the two adjacent first regions 51 or the two adjacent second regions 52. The rotation angle of the rotating plate 21a is calculated by integrating the count value counted in the center angle between the centers.
The control device 28 is configured to transmit a control signal to the coil power supply 18 to stop the current supply to the coil 15 and stop the rotation of the rotating shaft 12 when the rotation angle of the rotating plate 21a reaches a predetermined angle. Has been.
The rotation detector 30a includes a sensor chamber (sensor space) 24a in which a sensor 22a is disposed and an opening (opening) is provided in a portion facing the detection surface of the sensor 22a, and the sensor chamber 24a is opened. And a transmission window (transmission plate) 23a that transmits the first and second signals.
Here, the sensor chamber 24 a has a bowl-shaped sensor chamber lid member 26. Green portion of the sensor chamber lid member 26 is fixed in close contact with the annular extending across the inner side surface of the cylindrical member 11 and the contact portion 11 _1, where the opening of the sensor chamber 24a provided on the contact portion 11 ₁ Yes.

The transmission window (transmission plate) 23a is made of a non-magnetic material that does not release gas even when heated, and can transmit the first and second signals. Here, glass is used for the transmission window 23a. However, the transmission window 23a is not limited to glass as long as it is a non-magnetic material that does not release a gas even when heated. For example, aluminum may be used.
The transmission window 23a is provided so as to close the opening of the sensor chamber 24a, and the internal space of the sensor chamber 24a is separated from the space where the rotating plate 21a is disposed.
For this reason, the coil 15 and the magnet 14 generate heat. Even if the sensor 22a is heated and gas is released from the mold resin 32, the released gas does not diffuse into the space (drive space) in which the rotating plate 21a is disposed.

<Structure of vacuum robot>
A structure of a vacuum robot using the vacuum motor 10a of the first example will be described.

FIG. 8 is an internal configuration diagram of the vacuum robot 40.
The vacuum robot 40 includes a vacuum motor 10a of the first example shown in FIGS. 5 and 6, a vacuum chamber 41, a vacuum exhaust device 42 communicating with the inside of the vacuum chamber 41, and an arm portion 43 that holds a substrate. have.

An insertion rod 45 is provided on the wall surface of the vacuum chamber 41.
One end of the cylindrical member 11 of the vacuum motor 10a surrounds the outer periphery of the insertion port 45 and is fixed in close contact with the wall surface of the vacuum chamber 41, and the rotating plate 21a and the magnet 14 of the cylindrical member 11 are disposed. The space communicates with the internal space of the vacuum chamber 41 via the insertion rod 45.
When the inside of the vacuum chamber 41 is evacuated by the evacuation device 42, the space where the rotating plate 21a and the magnet 14 are arranged in the cylindrical member 11 is also evacuated together.

  One end of the rotating shaft 12 is passed through the insertion port 45 into the vacuum chamber 41, and the arm portion 43 is disposed in the vacuum chamber 41 and attached to the one end of the rotating shaft 12. When the rotary shaft 12 is rotated around the central axis of the rotary shaft 12, the arm portion 43 is also rotated together with the rotary shaft 12.

<Usage of vacuum robot>
A method of using the Mari robot 40 will be described.
The vacuum chamber 41 is evacuated by the evacuation device 42 to form a vacuum atmosphere.
At this time, the space in which the rotating plate 21a and the magnet 14 are arranged in the cylindrical member 11 is also evacuated to form a vacuum atmosphere. Thereafter, the evacuation by the evacuation device 42 is continued to maintain the vacuum atmosphere in the vacuum chamber 41 and the vacuum atmosphere in the space where the rotating plate 21a and the magnet 14 are arranged.

While maintaining the vacuum atmosphere in the vacuum chamber 41, the substrate is carried into the vacuum chamber 41 and placed on the arm portion 43.
A rotation angle for rotating the substrate is determined in advance.
The count value of the electric signal received by the control device 28 is initialized (in this case, zero).
A current is passed from the coil power supply 18 to the coil 15 to generate a magnetic force line, the generated magnetic force line is penetrated to give a rotational force to the magnet 14, and the rotary shaft 12 is rotated together with the rotary plate 21a and the arm portion 43. Rotate around the center axis. The substrate on the arm 43 also rotates around the central axis of the rotation shaft 12.

The coil 15 through which the current flows and the magnet 14 through which the lines of magnetic force pass generate heat, and the rotating plate 21a and the sensor 22a are heated by the heat from the coil 15 and the magnet 14, respectively.
The magnet 14 and the rotating plate 21a do not have a gas releasing member, and no gas is released from the magnet 14 and the rotating plate 21a even when heated.

On the other hand, when the coil 15 is heated, gas is released from the coating of the conductive wire and the varnish and the molding material fixing the conductive wire, and when the sensor 22a is heated, gas is released from the mold resin 32. The sensor chamber 24a is separated from the space in which the rotating plate 21a and the magnet 14 are arranged, and gas does not spread in the space in which the rotating plate 21a and the magnet 14 are arranged.
Therefore, the gas which is an impurity does not diffuse into the vacuum chamber 41 through the insertion port 45, and the problem that the gas adheres to the substrate or the inner wall surface of the vacuum chamber 41 does not occur.

When the rotating plate 2Ia rotates, the first and second regions 51 and 52 on the surface of the rotating plate 21a alternately pass through the positions facing the sensor 22a.
When the sensor 22a faces the first and second regions 51 and 52 of the rotating plate 21a, the sensor 22a outputs an electric signal having a voltage value corresponding to the first and second signals, and the control device 28 changes the voltage value of the electric signal. The number of rising or falling edges is counted, and the rotation angle of the rotating plate 21a is obtained from the counted value.

When the calculated rotation angle of the rotating plate 21a reaches a predetermined angle, the control device 28 sends a control signal to the coil power supply 18 to stop the power supply to the coil 15 and stop the rotation of the rotating shaft 12.
In this manner, the substrate held by the arm portion 43 is stationary after being rotated by a predetermined angle around the central axis of the rotation shaft 12.
While maintaining the vacuum atmosphere in the vacuum chamber 41, the substrate is carried out of the vacuum chamber 41 and sent to the subsequent process.

<Structure of vacuum motor of second example>
The structure of the vacuum motor of the second example will be described.

FIG. 9 is an internal configuration diagram of the vacuum motor 10b of the second example, and FIG. 10 is a plan view of an example of the rotating plate 21b. Of the structure of the vacuum motor 10b of the second example, the same parts as those of the vacuum motor 10a of the first example shown in FIGS.
As shown in FIGS. 9 and 10, the vacuum motor 10b of the second example includes a rotation detection unit 30b having a structure different from that of the rotation detection unit 30a of the vacuum motor 10a of the first example.
The sensor M22 corresponds to the sensor 22b, the rotation detection plate M21 corresponds to the rotation plate 21b, the sensor space M24 corresponds to the sensor chamber 24b, a part of the boundary member M11 corresponds to the contact portion 11 ₁ , and the transmission plate M23 corresponds to the transmission window 23b.

The structure of the rotation detection unit 30b of the vacuum motor 10b of the second example is obscured.
The rotation detection unit 30b includes a rotation plate 21b and a sensor 22b.
The material of the rotating plate 21b and the individual structures of the first and second regions 51 and 52 are the same as the material and the structure of the rotating plate 21a of the vacuum motor 10a of the first example, and description thereof is omitted.

The arrangement of the first and second regions 51 and 52 on the surface of the rotating plate 21b is deblurred.
A plurality of circumferences R _{1 to} R ₄ having different diameters are concentrically arranged on the surface of the rotating plate 21 b, and the first second regions 51 and 52 are arranged on the circumferences R _{1 to} R ₄ along the circumference. Are alternately arranged.

One set of first and second regions 51, 52 along the radial direction of the rotating plate 21b constitutes one symbol. Reference numeral 53 indicates a set of first and second regions 51 and 52 constituting one reference.
Each code has a different value for each position along the circumference.
Accordingly, when one half line starting from the center of the rotating plate 21b is called a reference line and a rotation angle from the reference line is called an absolute angle, one absolute angle can be known from each code.

With reference to FIG. 9, the arrangement of the rotary plate 21 b in the cylindrical portion 11 is the same as the arrangement of the rotary plate 21 a of the vacuum motor 10 a of the first example in the cylindrical member 11, and the description thereof is omitted.
Sensor 22b has a plurality of magnetic resistance elements ₃₁ 1 to 31 _4.
Each magnetoresistive element 31 _{1-31 4} is sealed and covered with a molding resin 32, dust and moisture is prevented from degraded by adhering to the magnetoresistive element 31 _{1-31 4.}
Sensor 22b is disposed to the surface facing the rotational plate 21b, the magnetoresistive element ₃₁ 1-31 ₄ are arranged on different circumferential _R 1 to R ₄ mutually among the rotating plate 21b.
Therefore, each magnetoresistive Sakuko ₃₁ 1-31 _4, and is capable of detecting different circumferential _R 1 to R ₄ on the first, the first from the second region 51, a second signal from each other .

The control device 28 stores in advance the corresponding grandchild of the sign and the absolute angle.
Controller 28 receives an electrical signal by each magnetoresistive element 31 _{1-31 4} outputs, constitutes one of the codes from a set of electrical signals received, on the basis of pre-stored relationship, the rotation plate The rotation angle (absolute angle) from the reference line 21b is obtained.
When the first and second absolute angles are obtained before and after rotating the rotating plate 21b and the first absolute angle is subtracted from the second absolute angle, the rotating angle of the rotating plate 21b is calculated.

The rotation detector 30b has a sensor 22b disposed therein. A sensor chamber 24b provided with an opening in a portion facing the detection surface of the sensor 22b, and a transmission window 23b that is disposed in the opening of the sensor chamber 24b and transmits the first and second signals.
The construction of the sensor chamber 24b and the transmission window 23b is the same as the structure of the sensor chamber 24a and the transmission window 23a of the vacuum motor 10a of the first example, and the description thereof is omitted.
The internal space of the sensor chamber 24b is separated from the space in which the rotating plate 21b is disposed. Even if the sensor 22b is heated and gas is released from the mold resin 32, the released gas is disposed in the rotating plate 21b. It is designed not to diffuse into the open space.

The vacuum motor 10b of the second example can be used in place of the vacuum motor 10a of the first example in the vacuum robot 40 described above. The method of using the vacuum robot having the vacuum motor 10b of the second example is the same as the method of using the vacuum robot 40 having the vacuum motor 10a of the first example, except for the method of calculating the angle of the rotating plate 21b. Exclude the explanation.
Compared with the vacuum motor 10a of the first example, the vacuum motor 10b of the second example has an advantage that it is unnecessary to initialize the counter value of the control device 28.
Further, there is an advantage that the rotation direction of the rotating plate 21b can be known from the sign of the calculated rotation angle.

<Structure of third example vacuum motor>
The structure of the vacuum motor of the third example will be described.

FIG. 11 is an internal configuration diagram of the vacuum motor 10c of the third example. Of the structure of the vacuum motor 10c of the third example, the same parts as those of the structure of the vacuum motor 10a of the first example shown in FIGS.
The vacuum motor 10c of the third example includes a rotation detection unit 30c having a structure different from that of the rotation detection unit 30a of the vacuum motor 10a of the first example.
The sensor M22 corresponds to the sensor 22c and the projector 25c, the rotation detection plate M21 corresponds to the rotation plate 21c, the sensor space M24 corresponds to the sensor chamber 24c, a part of the boundary member M11 corresponds to the contact portion 11 ₁ , and the transmission plate M23 corresponds to the transmission window 23c. To do.

The structure of the rotation detector 30c of the vacuum motor 10c of the third example will be described.
The rotation detection unit 30c includes a rotation plate 21c, a sensor 22c, and a light projecting unit 25c.
The rotating plate 21c is a ring-shaped plate, and a code formed by a first region that generates a first signal and a second region that generates a second signal is centered on the center of the rotating plate 21c. It is arranged along the circumference.

In the present embodiment, the rotating plate 21c is a plate whose surface can reflect light, an opening is provided in the first region, and the second region is configured by a reflective portion other than the opening. Therefore, when the first and second regions are irradiated with light, the first region does not reflect light and generates a first signal that is an optical signal with zero intensity, and the second region reflects light. A second signal that is an optical signal having an intensity greater than zero is generated.
The individual structures of the first and second regions are not limited to the above-described configuration, and may be portions having different reflectances, and the first and second signals may be optical signals having different intensities. The first and second regions are formed by applying inks having different reflectivities, for example.

Here, the arrangement of the first and second regions in the surface of the rotating plate 21c is the same as the arrangement of the first and second regions 51 and 52 in the rotating plate 21a of the vacuum motor 10a of the first example (see FIG. 7). This is the same and will not be described.
The arrangement of the rotary plate 21c in the cylindrical member 11 is the same as the arrangement of the rotary plate 21a in the cylindrical member 11 of the vacuum motor 10a of the first example, and the description thereof is omitted.

The light projecting unit 25c and the sensor 22c are arranged to face the surface of the rotating plate 21c, the light projecting unit 25c irradiates light to the first and second regions, and the sensor 22c generates the first and second regions. The first and second signals can be detected.
The light projecting unit 25 c has a light emitting element 35, and the sensor 22 c has a light receiving element 33. The light emitting element 35 is an element that emits light when a voltage is applied, and the light receiving element 33 is an element that outputs an electric signal having a voltage value corresponding to the intensity of the optical signal when receiving an optical signal.
The light emitting element 35 and the light receiving element 33 are covered and sealed with transparent mold resins 36 and 34, respectively, so that dust and moisture do not adhere to the light emitting element 35 and the light receiving element 33 and deteriorate.

A sensor power source 27 is electrically connected to the light projecting unit 25c and the sensor 22c. When the voltage is applied, the light projecting unit 25c irradiates the first and second regions 51 and 52 with light, and when the sensor 22c receives the first and second signals, the light projecting unit 25c has a voltage value corresponding to the first and second signals. An electrical signal is output.
The rotation detecting unit 30c includes a light projecting unit 25c and a sensor 22c disposed therein, and a sensor chamber 24c provided with openings at portions facing the light projecting surface of the light projecting unit 25c and the detection surface of the sensor 22c, and A transmission window 23c is disposed in the opening of the sensor chamber 24c and transmits the first and second signals.

The structure of the sensor chamber 24c is the same as the structure of the sensor chamber 24a of the vacuum motor 10a of the first example, and the description thereof is omitted.
The transmission window 23c is made of a light-transmitting member that does not emit gas even when heated, and can transmit the first and second signals. Here, glass is used for the transmission window 23c, but it is not limited to glass as long as it is a light-transmitting member that does not emit gas even when heated.
The transmission window 23c is provided so as to block the opening of the sensor chamber 24c, and the internal space of the sensor chamber 24c is separated from the space where the rotating plate 21c is disposed.
Therefore, even if the light projection part 25c and the sensor 22c are heated by the heat generated by the coil 15 and the magnet 14 and the gas is released from the mold resins 36 and 34, the released gas is a space in which the rotating plate 21c is disposed. It is designed not to spread.

  The vacuum motor 10c of the third example can be used in place of the vacuum motor 10a of the first example in the vacuum robot 40 described above. The method of using the vacuum robot having the vacuum motor 10c of the third example is the same as the method of using the vacuum robot 40 having the vacuum motor 10a of the first example, and a description thereof will be omitted.

In the above description, the arrangement of the first and second regions of the rotating plate 21c is the same as the arrangement of the first and second regions 51 and 52 of the rotating plate 21a of the vacuum motor 10a of the first example (see FIG. 7). However, you may be comprised similarly to arrangement | positioning (refer FIG. 10) of the 1st, 2nd area | regions 51 and 52 of the rotating plate 21b of the vacuum motor 10b of a 2nd example. In this case, the sensor 22c may be provided with a plurality of light receiving elements, and the light receiving elements may be arranged on different circumferences of the rotating plate 21c.
Further, the light projecting unit 25c is provided with a plurality of light emitting elements, the sensor 22c is provided with the same number of light receiving elements as the light emitting elements, and each pair of the light emitting elements and the light receiving elements is arranged on different circumferences of the rotating plate 21c. You may arrange.

<Structure of vacuum motor of fourth example>
The structure of the vacuum motor of the fourth example will be described.

FIG. 12 is an internal configuration diagram of the vacuum motor 10d of the fourth example. Of the structure of the vacuum motor 10d of the fourth example, the same parts as those of the vacuum motor 10a of the first example shown in FIGS.
The vacuum motor 10d of the fourth example has a rotation detection unit 30d having a structure different from that of the rotation detection unit 30a of the vacuum motor 10a of the first example.
The sensor M22 is a sensor 22d and a projector 25d, the rotation detection plate M21 is a rotation plate 21d, the sensor space M24 is a sensor chamber 24d and a light projection chamber 29, a part of the boundary member M11 is a contact portion 11 ₁ , and the transmission plate M23 is transmissive. It corresponds to the window 23d and the sub-transmission window 27, respectively.

The structure of the rotation detector 30d of the vacuum motor 10d of the fourth example will be described.
The rotation detection unit 30d includes a rotation plate 21d, a sensor 22d, and a light projecting unit 25d.
The rotating plate 21d is a ring-shaped plate, and a code formed by a first region that generates the first signal and a second region that generates the second signal is centered on the central axis of the rotating shaft 12 on the surface. It is arranged along the circumference.

  In the present embodiment, the rotating plate 21d is a plate that blocks light, the first region is provided with an opening, and the second region is constituted by a shielding part other than the opening. Therefore, when light is irradiated from the back side of the first and second regions, the first region transmits light and generates a first signal that is an optical signal having an intensity greater than zero, and the second region transmits light. A second signal that is an optical signal having a zero intensity is cut off.

  The first and second regions are not limited to the above-described configuration, and may be portions having different light transmittances. The first and second signals may be optical signals having different intensities. For example, the rotating plate 21d is a plate that transmits light, and the first region or the second region is formed by applying ink having a light transmittance smaller than that of the rotating plate 21d.

Here, the arrangement of the first and second regions in the surface of the rotating plate 21d is the same as the arrangement of the first and second regions 51 and 52 in the rotating plate 21a of the vacuum motor 10a of the first example. Description is omitted.
The arrangement of the rotating plate 21d in the cylindrical member 11 is the same as the arrangement of the rotating plate 21a of the vacuum motor 10a of the first example in the cylindrical member 11, and the description thereof is omitted.
The structures of the light projecting unit 25d and the sensor 22d are the same as the structures of the light projecting unit 25c and the sensor 22c of the vacuum motor 10c of the third example, and the description thereof is omitted.

  The sensor 22d is disposed to face the surface of the rotating plate 21d, and the light projecting unit 25d is disposed to face the back surface of the rotating plate 21d on the side opposite to the sensor 22d when viewed from the rotating plate 21d. The light projecting unit 25d irradiates the back side of the first and second regions 51 and 52, and the sensor 22d can detect the first and second signals generated by the first and second regions 51 and 52. ing.

  The rotation detection unit 30d has a sensor 22d disposed therein, a sensor chamber 24d provided with an opening in a portion facing the detection surface of the sensor 22d, and an opening in the sensor chamber 24d. And a transmission window 23d for transmitting signals.

The structure of the sensor chamber 24d and the transmission window 23d is the same as the structure of the sensor chamber 24c and the transmission window 23c of the vacuum motor 10c of the third example, and the description thereof is omitted.
Even if the sensor 22d is heated by the heat generated by the coil 15 and the magnet 14 and gas is released from the mold resin, the released gas does not diffuse into the space where the rotating plate 21d is disposed.

The rotation detector 30d has a light projecting unit 25d disposed therein, a light projecting chamber 28 provided with an opening at a portion facing the light projecting surface of the light projecting unit 25d, and an opening of the light projecting chamber 28. And a sub-transmission window 27 that transmits light.
Here, the light projecting chamber 28 has a bowl-shaped light projecting chamber lid member 29. The edge of the light projecting chamber cover member 29 is fixed in close contact with the inner surface of the cylindrical member 11 in an annular shape, and the opening of the light projecting chamber 28 is provided in the light projecting chamber cover member 29 here.

The sub-transmission window 27 is made of a light-transmitting member that does not emit gas even when heated, and glass is used here, but is not limited to glass as long as it is a light-transmitting member that does not release gas even when heated.
The sub-transmission window 27 is provided so as to close the opening of the light projection chamber 28, and the internal space of the light projection chamber 28 is separated from the space where the rotating plate 21d is disposed.
Therefore, even if the light projecting portion 25d is heated by the heat generated by the coil 15 and the magnet 14 and the gas is released from the mold resin, the released gas does not diffuse into the space where the rotating plate 21d is disposed. Yes.

  The vacuum motor 10d of the fourth example can be used in place of the vacuum motor 10a of the first example in the vacuum robot 40 described above. The method of using the vacuum robot having the vacuum motor 10d of the fourth example is the same as the method of using the vacuum robot 40 having the vacuum motor 10a of the first example, and a description thereof will be omitted.

  In the above description, the arrangement of the first and second regions of the rotating plate 21d is the same as the arrangement of the first and second regions 51 and 52 of the rotating plate 21a of the vacuum motor 10a of the first example (see FIG. 7). However, you may be comprised similarly to arrangement | positioning (refer FIG. 10) of the 1st, 2nd area | regions 51 and 52 of the rotating plate 21b of the vacuum motor 10b of a 2nd example. In this case, the sensor 22d may be provided with a plurality of light receiving elements, and the light receiving elements may be arranged on different circumferences of the rotating plate 21d.

  The light projecting unit 25d is provided with a plurality of light emitting elements, the sensor 22d is provided with the same number of light receiving elements as the light emitting elements, and each pair of light emitting elements and light receiving elements is placed on different circumferences of the rotating plate 21d. You may arrange.

  In the first to fourth vacuum motors 10a to 10d described above, the rotary shaft 12 may be configured to be movable in a direction parallel to the central axis. Since the optical signal has a longer reach than the magnetic signal, the third and fourth vacuum motors 10c and 10d have the same rotating shaft 12 as compared with the first and second vacuum motors 10a and 10b. The range of movement in the direction parallel to the central axis of can be increased.

<Structure of vacuum processing equipment>
The structure of the vacuum processing apparatus using the vacuum motor 10a of the first example will be described.

FIG. 13 is a schematic diagram showing the internal configuration of the vacuum processing apparatus C00.
The vacuum processing apparatus C00 includes a vacuum motor of the first example shown in FIGS. 6 and 7, or a vacuum motor M10 according to the vacuum motor, a vacuum chamber C01 in which the vacuum motor M10 is disposed, and a glass in the vacuum chamber C01. A transport roller M67 for transporting the substrate G;
The vacuum motor M10 drives the transport roller M67 that transports the glass substrate G in an upright state, and rotates with respect to the partition wall CC of the vacuum chamber C01, similarly to the partition structure attached to the motor shown in FIG. A rotation detection plate M21 is attached to the freely supported rotating shaft 12, and a sensor chamber M24 in which a sensor M22 for detecting this rotation is provided is provided.
The sensor wiring in the sensor chamber M24 is connected to a space C00 that is an atmospheric pressure outside the partition wall CC by a wiring sealing pipe MP.

According to the present embodiment, the amount of gas released from the sensor M24 can be reduced in the vacuum processing apparatus C00, and the impure gas contained in the gas can be reduced. Thereby, in the vacuum processing apparatus C00, the vacuum atmosphere of the internal space C01 in which the motor M10 is provided can be kept clean, and the surface of the glass substrate G transported in the processing space C01 is not contaminated.
In addition, since the distance between the sensor M22 and the rotation detection plate M21 can be reduced, the position detection sensitivity of the sensor M22 is improved, and the glass substrate G can be accurately conveyed in the vacuum device C00.

M11 …… Boundary member 12 …… Rotation axis M01 …… Drive space M02 …… Opening portion M021 …… Step surface M022 …… Step surface M21 …… Rotation plate M22 …… Sensor M23 …… Transmission plate M24 …… Sensor chamber

Claims (16)

A drive space on the low-pressure side in which a motor rotation shaft and a rotation detection plate for detecting rotation of the rotation shaft are disposed;
A high-pressure sensor space in which a sensor for detecting the rotation state of the rotation detection plate is disposed;
An opening provided in a boundary member between the drive space and the sensor space so as to enable detection of a rotation state of the rotation detection plate by the sensor;
A partition structure attached to the motor for sealing the drive space and the sensor space,
The partition structure is a transmission plate made of a non-magnetic material fitted into the opening, a fixing member that fixes the transmission plate to the boundary member, and a sealing member that seals between the transmission plate and the boundary member Have
A partition structure attached to a motor, wherein the fixing member and the sealing member are provided in this order from the high pressure side to the low pressure side between the opening and the transmission plate.   The transmission plate has a step so that the diameter decreases from the high pressure side toward the low pressure side, the sealing member is provided so as to be in close contact with the step surface, and the fixing member is disposed on the high pressure side of the step surface. 2. A partition structure attached to a motor according to claim 1, wherein the transmission plate is fixed.   A recess is provided on the high pressure side around the opening in the boundary member, the transmission plate is provided in the recess, and the sealing member is in close contact with the transmission plate on the low pressure side in the recess. The partition structure attached to the motor according to claim 1, wherein the partition member is provided, and the fixing member is arranged on the high-pressure side in the recess to fix the transmission plate.   The transmission plate has a step so that the diameter decreases from the low pressure side toward the high pressure side, the sealing member is provided so as to be in close contact with the step surface, and the fixing member is disposed on the high pressure side of the step surface. 2. A partition structure attached to a motor according to claim 1, wherein the transmission plate is fixed.   The partition structure attached to a motor according to any one of claims 1 to 4, wherein the boundary member has a portion formed as a case member of the sensor.   6. The motor-attached partition structure according to claim 1, wherein the fixing member is an adhesive, and the sealing member is an O-ring.   The partition structure attached to a motor according to any one of claims 1 to 6, wherein the sensor is an optical sensor, and the transmission plate is a glass plate.   The partition structure attached to a motor according to any one of claims 1 to 6, wherein the sensor is a magnetic sensor, and the transmission plate is a nonmagnetic metal plate. A cylindrical cylindrical member; a rotary shaft disposed coaxially with the cylindrical member on the inner side of the cylindrical member; a magnet provided on an outer peripheral side surface of the rotary shaft; and the magnet facing the outer side of the magnet. And a ring-shaped plate, and the rotation shaft is inserted into the hole of the ring, and a code for generating a signal is formed on the surface along the circumference centering on the central axis of the rotation shaft. A rotation detection plate arranged, and a sensor arranged to face the surface of the rotation detection plate and capable of detecting the signal, and the space in which the rotation plate is arranged is connected to a vacuum exhaust device. A vacuum motor to be evacuated,
The sensor is disposed inside, a sensor chamber provided with an opening in a portion facing the sensor, and a transmission window disposed in the opening and transmitting the signal,
9. The motor-attached partition according to claim 1, wherein the transmission window is provided so as to close the opening, and an internal space of the sensor chamber is separated from a space in which the rotating plate is disposed. A vacuum motor characterized by having a structure.   The vacuum motor according to claim 9, wherein the code includes a first area that generates a first signal and a second area that generates a second signal, and the sensor can detect the first and second signals.   The vacuum motor according to claim 10, wherein the front sensor includes a magnetoresistive element, the first and second signals are magnetic signals having different directions, and the transmission window is made of a nonmagnetic material.   The vacuum motor according to any one of claims 9 to 11, wherein a central axis of the rotary shaft is oriented at right angles to a plane on which the surface of the rotary plate is located.   13. The code according to claim 9, wherein the code has first and second values, and the first and second values are alternately arranged at equal intervals along the circumference. Vacuum motor.   The vacuum motor according to any one of claims 9 to 12, wherein the code has a different value for each position along the circumference. A vacuum motor according to any one of claims 9 to 14,
A vacuum processing apparatus comprising: a vacuum chamber; and a transport roller for transporting a substrate to be processed in the vacuum chamber, wherein the vacuum motor is driven by the transport roller. A vacuum motor according to any one of claims 9 to 14,
A vacuum chamber;
An evacuation device for evacuating the inside of the vacuum chamber;
An arm for holding the substrate;
Have
One end of the cylindrical member of the vacuum motor is connected to an insertion port provided in the Mika tank,
One end of the rotating shaft is inserted into the vacuum chamber through the insertion rod,
The arm is disposed in the vacuum chamber, and is a vacuum robot attached to the one end of the rotating shaft.

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