JP2012211568A - Coating device and coating film forming system - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a coating device that can favorably form a coating film on a base material and provide a coating film forming system in which the coating device is incorporated.SOLUTION: A coating processing part chiefly includes a tank to store a coating liquid, a nozzle to spout the coating liquid toward the base material, and a send-out part 30. The send-out part 30 has a plurality of conveying pumps 31, wherein the discharge amount of the coating liquid discharged from each of the conveying pumps 31 varies periodically in accordance with the periodical parameter. The periodical parameter of each of the conveying pumps 31 is set so that the sum of the periodical components of the discharge amount discharged from the conveying pumps 31 may minimize.

Description

  The present invention relates to a coating apparatus that forms a coating film on a base material by continuously coating a coating liquid on a belt-shaped base material, and a coating film forming system incorporating the coating apparatus.

  Conventionally, a method of manufacturing a chemical battery such as a lithium ion secondary battery by applying a relatively high-viscosity electrode material on a metal foil used as a base material is known (for example, Patent Documents). 1). In Patent Document 1, the active material paste stored in the paint tank 5 is sent out toward the nozzle 7 by the metering pump 6.

Japanese Patent Laid-Open No. 2004-199916

  Here, the above-mentioned active material paste (electrode material) has a relatively high viscosity. Moreover, the film thickness of a coating film is about 50 micrometers-200 micrometers, and the discharge amount of the coating liquid discharged from a nozzle per unit time is comparatively small.

  As a result, even in the metering pump disclosed in Patent Document 1, the delivery amount per unit time periodically changes so as to beat a pulse in some cases. As a result, the problem that the film thickness of the coating film formed on a base material becomes non-uniform arises.

  Therefore, an object of the present invention is to provide a coating apparatus that can satisfactorily form a coating film on a substrate and a coating film forming system incorporating the coating apparatus.

  In order to solve the above-described problems, the invention of claim 1 is directed to a coating apparatus that forms a coating film on the substrate by continuously applying a coating liquid to a strip-shaped substrate. A reservoir for storing a coating liquid; a nozzle for discharging the coating liquid toward the substrate; a delivery section for delivering the coating liquid introduced from the storage section side to the nozzle; and the delivery section; It is connected in communication, and is connected in communication with the first supply pipe for circulating the coating liquid introduced from the storage part side to the delivery part, and the delivery part, and is delivered from the delivery part to the nozzle side. A second supply pipe for circulating the coating liquid, and the delivery section includes a plurality of transfer pumps, and a plurality of introduction pipes each connecting the first supply pipe and the corresponding transfer pump in communication with each other. , Each corresponding to the second supply pipe A plurality of discharge pipes communicating with the transfer pump, each of the plurality of transfer pumps receiving introduction of the coating liquid from the corresponding introduction pipe, and the discharge amount per unit time according to the periodic parameter Periodic parameters of each transfer pump are set so that the periodically changing coating liquid is discharged to a corresponding discharge pipe, and the sum of the periodic components of the discharge amount discharged from each transfer pump is minimized. It is characterized by.

  According to a second aspect of the present invention, in the coating apparatus according to the first aspect, a cycle and an initial phase of the discharge amount are set among the periodic parameters.

  According to a third aspect of the present invention, in the coating apparatus according to the first aspect, the period parameter is set with an amplitude of the discharge amount, a period of the discharge amount, and an initial phase.

  Further, the invention of claim 4 is the coating apparatus according to any one of claims 1 to 3, wherein each of the plurality of transfer pumps is a cylindrical body, and a stator having a female screw formed therein, A rod disposed in the stator, having a rotor with an external thread formed on an outer surface thereof, and a motor for rotating the rotor relative to the stator, wherein the rotor is relative to the stator; By being rotated, the cavity surrounded by the stator and the rotor moves from the coating liquid introduction part side to the discharge part side.

  The invention of claim 5 is the coating apparatus according to any one of claims 1 to 3, wherein each of the plurality of gear pumps is a gear pump.

  Moreover, invention of Claim 6 is provided with the coating device in any one of Claims 1-5, and the drying apparatus which dries the said coating liquid on the said base material apply | coated with the said coating device. It is characterized by.

  According to the first to sixth aspects of the invention, the periodic parameter of each transfer pump is set so that the sum of the periodic components of the discharge amount discharged from each transfer pump is minimized. Thereby, a periodic change in the amount of the coating liquid delivered from the delivery unit is suppressed or reduced, and the amount of the coating liquid ejected onto the substrate is made substantially constant. Therefore, the film thickness of the coating film formed on the substrate is within the allowable range, and a coating film with a uniform film thickness can be formed on the substrate.

It is a front view which shows an example of the whole structure of the coating film formation system incorporating the coating device which concerns on this invention. It is a front view which shows schematic structure of a coating process part. It is a front view which shows schematic structure of a sending part.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

<1. Configuration of coating film forming system>
FIG. 1 is a diagram showing an overall configuration of a coating film forming system 1 incorporating a coating apparatus according to the present invention. In addition, in FIG. 1 and each subsequent figure, in order to clarify a directional relationship, the XYZ orthogonal coordinate system which makes a Z-axis direction a perpendicular direction and makes XY plane a horizontal surface is attached | subjected. Further, in FIG. 1 and the subsequent drawings, the dimensions and number of each part are exaggerated or simplified as necessary for easy understanding.

  The coating film forming system 1 manufactures an electrode of a lithium ion secondary battery by forming a coating film of an active material on a substrate 5 and drying the formed coating film. As shown in FIG. 1, the coating film forming system 1 mainly includes a coating processing unit 10, a preheating unit 60, a drying unit 65, an annealing unit 70, a cooling unit 75, and a transport unit 80. Further, the coating film forming system 1 includes an electrical box 9 that houses a power source, a control unit 90 (see FIG. 2) described later, and the like.

  Here, the base material 5 is a strip-shaped metal foil that functions as a current collector of a lithium ion secondary battery. More specifically, the shape of the substrate 5 is a long sheet. Moreover, although the width | variety and thickness of the base material 5 are not specifically limited, The width | variety of the base material 5 can be 600 mm-700 mm, and the thickness of the base material 5 can be 10 micrometers-20 micrometers. .

  Moreover, in the coating film formation system 1, when the positive electrode of a lithium ion secondary battery is manufactured, aluminum foil (Al) can be used as the base material 5, for example. On the other hand, when the negative electrode is manufactured, for example, a copper foil (Cu) can be used as the substrate 5.

  As shown in FIG. 1, the belt-shaped base material 5 is fed from the unwinding roller 81 and wound by the winding roller 82, so that the coating processing unit 10, the preheating unit 60, the drying unit 65, the annealing unit 70, It is conveyed to each part of the cooling unit 75 in this order. The conveying unit 80 includes the unwinding roller 81 and the winding roller 82 and a plurality of auxiliary rollers 83a to 83e, and conveys the base material 5 along the direction of the arrow AR1. In addition, about the number and arrangement | positioning of auxiliary roller 83a-83e, it is not limited to the example of FIG. 1, It can increase / decrease suitably as needed.

  The coating processing unit 10 forms a coating film on the base material 5 by continuously coating the coating liquid on the base material 5 having a strip shape. As the coating solution, an active material used as an electrode material is employed. As shown in FIG. 1, the coating processing unit 10 is downstream of the unwinding roller 81 in the transport path 8 along the longitudinal direction (arrow AR1 direction) of the base material 5 (hereinafter also simply referred to as “longitudinal direction”). It is located on the upstream side of the preheating unit 60. In addition, the detailed structure of the application | coating process part 10 and the specific example of the active material used as an electrode material are mentioned later.

  The preheating unit 60 raises the temperature of the coating film of the electrode material formed on the substrate 5 by the coating process in the coating processing unit 10 and performs preheating for a predetermined time. The drying unit 65 is a processing unit that performs a main drying process, and blows hot air on the coating film preheated by the preheating unit 60 to heat and evaporate the solvent. Further, the annealing unit 70 heats the coating film to a higher temperature, removes the solvent remaining in the coating film, and removes strain and residual stress generated in the coating film by the drying process in the drying unit 65. . The cooling unit 75 cools the coating film by blowing dry air at normal temperature onto the heated coating film.

  As described above, the preheating unit 60, the drying unit 65, the annealing unit 70, and the cooling unit 75 can be used as a drying device that dries the coating liquid on the substrate 5 applied by the coating processing unit 10. In addition, as a drying apparatus which dries the coating film formed on the base material 5, it is not limited to the structure provided with said four process part, According to the kind of coating liquid, it is appropriate and can do. For example, the drying device may be configured only by the preheating unit 60 and the drying unit 65.

  The control unit 90 controls the operation of each element of the coating film forming system 1 and realizes various data calculations. As shown in FIG. 2, the control unit 90 mainly includes a ROM 91, a RAM 92, and a CPU 93.

  A ROM (Read Only Memory) 91 is a so-called nonvolatile storage unit, and stores, for example, a program 91a. As the ROM 91, a flash memory that is a readable / writable nonvolatile memory may be used. A RAM (Random Access Memory) 92 is a volatile storage unit and stores, for example, data used in the calculation of the CPU 93.

  A CPU (Central Processing Unit) 93 performs control according to the program 91a of the ROM 91 (for example, control of the movement operation of the nozzle 11 by the drive unit 15, the discharge operation of the coating liquid by the closing valve 20 and the delivery unit 30). Executed.

<2. Configuration of coating processing section>
FIG. 2 is a front view showing a schematic configuration of the coating processing unit 10 which is a coating apparatus according to the present invention. As shown in FIG. 2, the application processing unit 10 mainly includes a nozzle 11, a delivery unit 30, a tank 50, first and second supply pipes 55 a and 55 b, and a closing valve 20.

  The tank 50 stores a solution of an active material that is an electrode material of a lithium ion secondary battery as a coating solution. Thereby, the electrode material for positive electrodes or negative electrodes is supplied to the nozzle 11 side. As described above, the tank 50 is used as a reservoir for storing the coating liquid and as a supply source for supplying the coating liquid to the nozzle 11 side.

Here, when a positive electrode is manufactured in the coating film forming system 1, the tank 50 includes, for example, lithium cobalt oxide (LiCoO ₂ ) as a positive electrode active material and carbon ( A mixed liquid of C), polyvinylidene fluoride (PVDF) as a binder, and N-methyl-2-pyrrolidone (NMP) as a solvent is stored.

As the positive electrode active material, lithium nickelate (LiNiO ₂ ), lithium manganate (LiMn ₂ O ₄ ), lithium iron phosphate (LiFePO ₄ ), or the like can be used instead of lithium cobaltate, but these materials are limited. Is not to be done.

  On the other hand, when the negative electrode is manufactured in the coating film forming system 1, the tank 50 contains, for example, graphite (graphite) as a negative electrode active material, PVDF as a binder, and a solvent as a coating liquid for the negative electrode material. A liquid mixture of NMP is stored.

As the negative electrode active material, hard carbon, lithium titanate (Li ₄ Ti ₅ O ₁₂ ), a silicon alloy, a tin alloy, or the like can be used instead of graphite, but the material is not limited to these materials.

In both the positive electrode material and the negative electrode material, styrene-butadiene rubber (SBR) or the like is used as a binder instead of PVDF, and water (H ₂ O) or the like is used as a solvent instead of NMP. it can. Furthermore, when SBR is used as the binder and water is used as the solvent, carboxymethylcellulose (CMC) can be used as a thickener.

  Furthermore, the coating liquid of these positive electrode material and negative electrode material is a slurry in which solid (fine particles) are dispersed. Each of these coating solutions has a viscosity of 1 Pa · s (pascal second) or more, and generally has thixotropic properties.

  The tank 50 is provided with a stirrer 53 and an air pressurizing unit 54. The stirrer 53 has a screw 53a, and the screw 53a can be immersed in the coating liquid in the tank 50. Therefore, the coating liquid stored in the tank 50 is agitated by rotating the screw 53a.

  The air pressurization unit 54 pressurizes the liquid level of the coating liquid stored by sending high-pressure air into the gas phase portion in the tank 50. Note that the air pressurization unit 54 is not an indispensable element as long as liquid can be fed only by the delivery unit 30.

  As shown in FIG. 2, the first supply pipe 55 a is connected in communication with each of the tank 50 and the delivery unit 30. The 1st supply piping 55a distribute | circulates the coating liquid introduce | transduced into the sending part 30 from the tank 50 side.

  As shown in FIG. 2, the second supply pipe 55 b is connected to each of the delivery unit 30 and the nozzle 11. The 2nd supply piping 55b distribute | circulates the coating liquid sent to the nozzle 11 side from the sending part 30. FIG. Further, as shown in FIG. 2, a closing valve 20 and a flow meter 52 are interposed in the middle of the path of the second supply pipe 55b. As the first and second supply pipes 55a and 55b, stainless steel pipes or resin pipes can be used.

  The circulation pipe 56 is branched from the middle of the second supply pipe 55b. The proximal end side of the circulation pipe 56 is connected to a position between the closing valve 20 and the flow meter 52 of the second supply pipe 55 b, and the distal end side is connected to the tank 50. A circulation valve 57 and a flow rate adjustment valve 58 are inserted in the circulation pipe 56.

  The delivery unit 30 delivers the coating liquid introduced from the tank 50 side to the nozzle 11 side. As shown in FIG. 2, one end of the delivery unit 30 communicates with the first supply pipe 55a, and the other end of the delivery part 30 communicates with the second supply pipe 55b. The detailed configuration of the sending unit 30 will be described later.

  The flow meter 52 measures the flow rate of the coating liquid flowing through the second supply pipe 55b after being sent out from the sending unit 30. The shutoff valve 20 opens and closes the flow path of the second supply pipe 55b, thereby intermittently supplying the coating liquid to the nozzle 11.

  A circulation valve 57 provided in the circulation pipe 56 opens and closes the flow path of the circulation pipe 56. When the circulation valve 57 is opened in a state where the closing valve 20 closes the second supply pipe 55b, the coating liquid flowing through the second supply pipe 55b flows into the circulation pipe 56 and is returned to the tank 50. The flow rate of the coating liquid flowing through the circulation pipe 56 is adjusted by a flow rate adjusting valve 58.

  As shown in FIG. 2, the nozzle 11 is disposed at a position facing the backup roller 12. At the tip of the nozzle 11, there is a slit-like shape along the width direction of the substrate 5 (the direction of the arrow AR2 in FIG. 2) (the direction orthogonal to the longitudinal direction of the substrate 5: hereinafter simply referred to as the “width direction”). A discharge port 11a is provided. Then, the coating liquid supplied via the second supply pipe 55 b and discharged from the discharge port 11 a is discharged toward the base material 5 that is pressed and supported by the backup roller 12.

  As shown in FIG. 2, the position detection unit 13 is arranged at a detection position PS upstream of the discharge position PD of the nozzle 11 in the transport path 8 of the base material 5 along the longitudinal direction. opposite.

  The position detection unit 13 is a sensor configured by a so-called two-dimensional laser displacement meter, and accurately detects the position of the first coating film 6 in each part of the substrate 5. Thereby, the control part 90 can determine the position of the nozzle 11 so that the formation position of the 1st and 2nd coating films 6 and 7 may correspond in each part of the base material 5. FIG. Therefore, the performance of the chemical battery having the first and second coating films 6 and 7 can be improved.

  In addition, as the position detection part 13, what measures the film thickness of the 1st and 2nd coating films 6 and 7 using the laser beam reflected by the coating film and the laser beam which permeate | transmitted the coating film is used. , May be used.

  Returning to FIG. 2, the drive unit 15 adjusts the position of the discharge port 11 a relative to the backup roller 12 by moving the nozzle 11 back and forth, right and left, and up and down. The pressure gauge 18 measures the pressure of the coating liquid in the nozzle 11. In addition, the pressure of the coating liquid in the nozzle 11 is measured by the pressure gauge 18, and the flow rate of the coating liquid flowing through the second supply pipe 55 b is measured by the flow meter 52, whereby the coating flowing through the second supply pipe 55 b. The state of the liquid can be grasped.

<3. Configuration of sending section>
FIG. 3 is a front view illustrating a schematic configuration of the sending unit 30. As shown in FIG. 3, the delivery unit 30 mainly includes a plurality of transfer pumps 31 (31a, 31b), a plurality of introduction pipes 41 (41a, 41b), a plurality of discharge pipes 43 (43a, 43b), have.

  A plurality (two in this embodiment) of the introduction pipes 41 (41a, 41b) introduce the coating liquid into the corresponding transfer pumps 31a, 31b. As shown in FIG. 3, the introduction pipe 41a communicates and connects the first supply pipe 55a and the introduction section 38 (38a) of the corresponding transfer pump 31a. On the other hand, the introduction pipe 41b connects the first supply pipe 55a and the introduction section 38 (38b) of the corresponding transfer pump 31b.

  A plurality of (two in this embodiment) discharge pipes 43 (43a, 43b) distribute the coating liquid discharged from the corresponding transfer pumps 31a, 31b. As shown in FIG. 3, the discharge pipe 43a communicates and connects the second supply pipe 55b and the discharge section 39 (39a) of the corresponding transfer pump 31a. On the other hand, the discharge pipe 43b communicates with the second supply pipe 55b and the discharge section 39 (39b) of the corresponding transfer pump 31b.

  A plurality (two in the present embodiment) of the transfer pumps 31 (31a, 31b) are constituted by so-called MONO pumps. Each transfer pump 31 (31a, 31b) transfers the coating liquid introduced from the introduction part 38 (38a, 38b) to the discharge part 39 (39a, 39b), thereby discharging from the discharge part 39 (39a, 39b). The coating liquid at a desired flow rate is discharged. As shown in FIG. 3, the transfer pump 31 a mainly includes a stator 32, a rotor 33, a joint 34, and a motor 35.

  The transfer pumps 31a and 31b have the same hardware configuration. Therefore, only the hardware configuration of the transfer pump 31a will be described below. In the present embodiment, the transfer pumps 31a and 31b are also collectively referred to as “transfer pump 31”.

  The stator 32 is a metal cylinder. Inside the stator 32, an elastic material formed with a female screw is attached. The rotor 33 is a rod body arranged in the stator 32. A male screw is formed on the outer surface of the rotor 33. In addition, as shown in FIG. 3, the rotor 33 is linked and connected to a rotation shaft 35 a of a motor 35 through a joint 34.

  Thereby, the rotational force of the motor 35 is transmitted to the rotor 33 via the rotation shaft 35a and the joint 34, and when the rotor 33 rotates with respect to the stator 32, a cavity 32a (hollow) surrounded by the stator 32 and the rotor 33 is formed. Then, it moves from the introduction part 38a side to the discharge part 39a side. Therefore, when the rotor 33 rotates, the coating liquid in the cavity 32a is transferred from the introduction part 38a side to the discharge part 39a side.

  In addition, as an elastic material of the stator 32, synthetic rubber, resin, a metal, etc. are employable, for example. Moreover, as a material of the rotor 33, stainless steel, ceramics, etc. are employable, for example.

  Here, the coating liquid (electrode material) introduced into each of the transfer pumps 31a and 31b has a relatively high viscosity as described above. Moreover, the thickness of the coating liquid applied on the substrate 5 is 10 μm to 20 μm as described above, and the discharge amount of the coating liquid discharged from each of the transfer pumps 31a and 31b per unit time is relatively Few. As a result, there arises a problem that the discharge amount (discharge amount per unit time) of the coating liquid discharged from the transfer pumps 31a and 31b periodically changes so as to make a pulse.

  An example of this periodic change can be expressed as in equations (1) and (2).

Expressions (1) and (2) indicate the discharge amounts V _s1 and V _s2 (m ³ / s) of the transfer pumps 31a and 31b at time t, respectively. Moreover, in Formula (1) and Formula (2),
a) V _nt1, V _nt2 is transfer pump 31a, emission of the initial values of 31b the (m ³ / s),
b) V _amp1 and V _amp2 indicate the amplitude (m ³ / s) of the discharge amount of the transfer pumps 31a and 31b,
c) T ₁ and T ₂ are the period (s) of the change in the discharge amount of the transfer pumps 31a and 31b,
d) φ ₁ and φ ₂ are the initial phases,
e) V ₁ (t) and V ₂ (t) are periodic components (m ³ / s) that periodically change in the discharge amounts V _s1 and V _s2 ,
Each is shown. Of these variables, at least the amplitudes V _amp1 and V _{amp2 of} the discharge amount, the periods T ₁ and T ₂ , and the initial phases φ ₁ and φ ₂ are the periods of the discharge amounts discharged from the respective transfer pumps 31a and 31b. It is used as a periodic parameter that determines the dynamic change.

  Thus, each transfer pump 31a, 31b receives the application liquid from the corresponding introduction pipes 41a, 41b, and corresponds to the application liquid whose discharge amount per unit time changes periodically according to the periodic parameter. It discharges to the discharge pipes 43a and 43b.

On the other hand, the delivery unit 30 of the present embodiment mixes the application liquid discharged from the transfer pumps 31a and 31b through the second supply pipe 55b, and then delivers it to the nozzle 11 side. Therefore, the transmission amount V _sc (m ³ / s) of the transmission unit 30 at time t can be expressed as in Expression (3).

As shown in the equations (1) to (3), the period parameters (amplitude V _amp1 , V _amp2 , period T ₁ , T ₂ , and initial phase φ ₁ , φ ₂ ) are appropriately set, so that the period The sum of the target components V ₁ (t) and V ₂ (t) is minimized.

For example, among the periodic parameters, the amplitudes V _amp1 and V _amp2 , the periods T ₁ and T ₂ , and the initial phases φ ₁ and φ ₂ are “V _amp2 = V _amp1 ”, “T ₂ = T ₁ ”, and “φ When set to be “ ₂ = φ ₁ + π”, the sum of the periodic components V ₁ (t) and V ₂ (t) in Expression (3) is “0”. As a result, the sending amount V _sc of the sending unit 30 is constant.

Further, among the periodic parameters, when the periods T ₁ and T ₂ and the initial phases φ ₁ and φ ₂ are set to be “T ₂ = T ₁ ” and “φ ₂ = φ ₁ + π”, the formula ( The absolute value of the sum of the periodic components V ₁ (t) and V ₂ (t) in 3) is “0 ≦ | V _amp2 −V _amp1 |”. As a result, a periodic change in the sending amount V _sc of the sending unit 30 is reduced.

The periods T ₁ and T ₂ can be set by adjusting the rotational speed of the rotor 33, for example. The initial phases φ ₁ and φ ₂ can be set by adjusting the rotation start position of the rotor 33. These adjustments can also be realized by controlling the rotation operation of the motor 35 by the control unit 90.

<4. Advantages of coating processing unit and coating film forming system of the present embodiment>
As described above, in the coating film forming system 1 incorporating the coating processing unit 10 and the coating processing unit 10 of the present embodiment, the discharge amounts V _s1 and V _{s2 of the} coating liquid discharged from the transfer pumps 31a and 31b. Periodically changes (pulsates). In addition, the periodic parameters of the transfer pumps 31a and 31b are set so that the sum of the periodic components of the discharge amounts discharged from the transfer pumps 31a and 31b is minimized, and the periodic components cancel each other. The

Thereby, the periodic change of the delivery amount V _sc of the coating liquid _delivered from the delivery unit 30 is suppressed or reduced, and the ejection amount of the coating liquid ejected onto the substrate 5 is made substantially constant. Therefore, the film thicknesses of the first and second coating films 6 and 7 formed on the base material 5 are within the allowable range, and the first and second coating films 6 and 7 having a uniform film thickness on the base material 5. Is formed.

<5. Modification>
Although the embodiments of the present invention have been described above, the present invention is not limited to the above embodiments, and various modifications can be made.

  (1) Although the delivery unit 30 has been described as having two transfer pumps 31 (31a, 31b) in the present embodiment, the present invention is not limited to this. For example, the delivery unit 30 may include three or more transfer pumps 31.

  (2) In the transfer pump 31 of the present embodiment, the rotor 33 is described as rotating with respect to the stator 32, but the present invention is not limited to this. If it is possible to realize that the cavity 32a (cavity) moves from the introduction portion 38a side toward the discharge portion 39a side, the stator 32 may rotate with respect to the rotor 33, or both the stator 32 and the rotor 33 rotate. You may do it. That is, it is sufficient if the motor 35 rotates the rotor 33 relative to the stator 32.

  (3) In the present embodiment, the transfer pump 31 is described as using a so-called MONO pump. However, the present invention is not limited to this. For example, a gear pump may be employed as the transfer pump 31.

  (4) In the present embodiment, the control unit 90 controls the operation of each element (the coating processing unit 10, the preheating unit 60, the drying unit 65, the annealing unit 70, and the cooling unit 75) of the coating film forming system 1. In addition, although it has been described that the arithmetic processing related to each of these elements is executed, the present invention is not limited to this. For example, the control unit 90 may be dedicated to the coating processing unit 10, and the coating processing unit 10 may include the control unit 90.

DESCRIPTION OF SYMBOLS 1 Coating film formation system 5 Base material 6 1st coating film 7 2nd coating film 10 Coating process part 11 Nozzle 30 Delivery part 31 (31a, 31b) Transfer pump 32 Stator 32a Cavity 33 Rotor 35 Motor 38 (38a, 38b) Introduction Part 39 (39a, 39b) Discharge part 41 (41a, 41b) Inlet pipe 43 (43a, 43b) Discharge pipe 50 Tank (storage part)
55a 1st supply piping 55b 2nd supply piping 60 Preheating part 65 Drying part 70 Annealing part 75 Cooling part 80 Conveying part 90 Control part

Claims (6)

In a coating apparatus that forms a coating film on the substrate by continuously applying a coating solution to the belt-shaped substrate,
(a) a reservoir for storing the coating liquid;
(b) a nozzle that discharges the coating liquid toward the substrate;
(c) a delivery unit for delivering the coating liquid introduced from the storage unit side to the nozzle side;
(d) a first supply pipe that is connected in communication with the delivery section and distributes the coating liquid introduced into the delivery section from the storage section side;
(e) a second supply pipe that is connected to the delivery unit and that circulates the coating solution delivered from the delivery unit to the nozzle side;
With
The sending section is
(c-1) a plurality of transfer pumps;
(c-2) a plurality of introduction pipes each connecting the first supply pipe and the corresponding transfer pump in communication with each other;
(c-3) a plurality of discharge pipes each connecting the second supply pipe and the corresponding transfer pump in communication with each other;
Have
Each of the plurality of transfer pumps is
(i) receiving the coating liquid from the corresponding introduction pipe,
(ii) discharging the coating liquid whose discharge amount per unit time periodically changes according to the periodic parameter to the corresponding discharge pipe;
A coating apparatus, wherein a periodic parameter of each transfer pump is set so that a sum of periodic components of the discharge amount discharged from each transfer pump is minimized. The coating apparatus according to claim 1,
The coating apparatus according to claim 1, wherein a cycle and an initial phase of the discharge amount are set among the cycle parameters. The coating apparatus according to claim 1,
The periodical parameter is set with an amplitude of the discharge amount, a cycle of the discharge amount, and an initial phase. In the coating device in any one of Claims 1-3,
Each of the plurality of transfer pumps is
A stator having a cylindrical body and a female screw formed inside;
A rod disposed in the stator, and a male screw is formed on the outer surface of the rotor;
A motor for rotating the rotor relative to the stator;
Have
The coating device according to claim 1, wherein the rotor is rotated relative to the stator so that a cavity surrounded by the stator and the rotor moves from the coating liquid introduction section side to the discharge section side. In the coating device in any one of Claims 1-3,
Each of the plurality of gear pumps is a gear pump. A coating apparatus according to any one of claims 1 to 5,
A drying device for drying the coating solution on the substrate coated by the coating device;
A coating film forming system comprising:

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