JP2012093745A - Optical waveguide and method of manufacturing the same - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an optical waveguide that facilitates alignment of a light emission device and a light reception device, and has its light propagation loss suppressed although a conventional optical waveguide has a light incidence surface and a light emission surface of a waveguide core arranged on an end face side of a film base material to make it difficult to align a light emission device and a light reception device, and to provide a method of manufacturing the same with high efficiency.SOLUTION: The optical waveguide includes a first mirror surface which is formed tilting so as to propagate light from outside the optical waveguide to an optical waveguide core by converting its optical path; a second mirror surface which is formed tilting to emit the light propagated in the optical waveguide core to outside the optical waveguide by converting its optical path; a gate part which is provided facing a side face of the optical waveguide core; and a runner part which is connected to the optical waveguide core through the gate part. Consequently, there are provided the optical waveguide which has the light emission device and light reception device easily aligned with the light incidence surface and light emission surface of the core, and has its light propagation loss suppressed, and the method of manufacturing the same.

Description

  The present invention relates to an optical waveguide in which an optical waveguide core made of a synthetic resin is integrally formed on a base material, and a method for manufacturing the same.

  With the increase in functionality of electronic devices in recent years, the amount of signal information handled has increased, the information transmission limit due to electrical transmission has become apparent, and the need for optical transmission has increased. Conventionally, in order to make optical functional circuits of optical information / communication devices compact and highly functional, optical waveguide wiring is formed on a substrate, VCSEL (Vertical Cavity Surface Emitting Laser), LD (Laser Diode), PD (Photo) 2. Description of the Related Art An optical module including a photoelectric conversion element such as a diode and an optoelectronic integrated circuit (OEIC) is known.

  Conventionally, in an optical waveguide and a method for manufacturing the same, for example, as disclosed in Patent Document 1, a core material is filled in a recess provided in an interface of a cladding portion, and the core material is pressed on a mold surface to form a core. Optical waveguides and methods for manufacturing the same are known. In Conventional Example 1 of Patent Document 1, as shown in FIG. 13, a transparent resin 808 serving as a core material is applied to a clad substrate 802 provided with a concave groove 803 and a depression 806 on one side (FIG. 13A) ( 13 (b)), the mold surface 813 is pressed against the transparent resin 808, and the transparent resin 808 on the flat portion 805 is thinly pushed toward the depression 806 side. Thereafter, the transparent resin 808 sandwiched between the clad substrate 802 and the mold surface 813 is cured to obtain an optical waveguide in which the core 804 for the optical waveguide is formed in the concave groove 803 (FIG. 13C). ).

  As another conventional technique, for example, as disclosed in Patent Document 2, a core material is injected into a concave mold provided with a through hole, and an optical waveguide core is formed on a clad film substrate. Waveguides and their manufacturing methods are known. In Conventional Example 2 of Patent Document 2, as shown in FIG. 14, a mold 920 provided with a recess 922 corresponding to the optical waveguide core, a through hole 926 communicating with the recess 922, and a through hole 928 is prepared (FIG. 14 (a)). )), The mold 920 and the clad film base 930 are brought into close contact with each other. Thereafter, the core-forming curable resin is put into the through-hole 926 formed in the mold 920, and is sucked under reduced pressure from the through-hole 928 at the other end to fill the concave portion 922 of the mold 920 with the core-forming curable resin (FIG. 14). (B)). When the filled resin is then cured and the mold 920 is peeled off, an optical waveguide core 932 corresponding to the recess 922 is formed on the clad film base 930 (FIG. 14C). Finally, the resin portion cured in the through hole 926 and the through hole 928 is cut off with a dicer or the like to obtain an optical waveguide in which the optical waveguide core 932 is formed on the clad film base material 930 (FIG. 14D). .

JP 2003-172841 A JP-A-2005-202230

  However, in the conventionally known method such as Conventional Example 1, the transparent resin 808 remains thin not only in the concave groove 803 but also in the flat portion 805, and after curing, a thin layer having the same composition as the core 804 is formed. Will be formed. As a result, there is a problem that light leaks through the thin layer.

  Further, in the conventionally known method as in Conventional Example 2, after obtaining an intermediate product in which the optical waveguide core 932 is formed on one surface of the clad film base material 930, it is cured at the through hole 926 and the through hole 928. It was necessary to cut the resin part with a dicer or the like. Therefore, not only the process becomes complicated, but also the light propagation loss of the optical waveguide core 932 increases due to the fact that the surface angle of the light incident surface and the light output surface of the optical waveguide core 932 varies and the surface accuracy decreases. There was a problem.

  In both cases of Conventional Example 1 and Conventional Example 2, the light incident surface and the light exit surface of the optical waveguide core are arranged on the end surface side of the clad film base material, so that the alignment of the light emitting device with respect to the light incident surface is performed. In addition, there is a problem that alignment of the light receiving device with respect to the light output surface is difficult.

  The present invention has been made to solve such a technical problem, and an object of the present invention is to facilitate alignment of a light emitting device and a light receiving device with respect to a light incident surface and a light output surface of a core, and to propagate light in an optical waveguide. An object of the present invention is to provide an optical waveguide with reduced loss and to provide an optical waveguide manufacturing method capable of manufacturing this type of optical waveguide with high efficiency.

In order to solve this problem, a method of manufacturing an optical waveguide according to claim 1 of the present invention is such that a synthetic resin is injected into a cavity formed by a base material and a shape recess provided in a mold member, and a mirror is formed at an end portion. In the method of manufacturing an optical waveguide in which an optical waveguide core provided with a surface is formed on the surface of the substrate,
The shape of the concave shape is a shape having a core region corresponding to the optical waveguide core, a gate region provided facing a side surface of the core region, and a runner region connected to the gate region. Formed by a mold forming step of the mold member for forming the shape recess in the mold member, an adhesion process for closely contacting the base material and the mold member, and the shape recess provided in the base material and the mold member An injection curing step of injecting and curing synthetic resin from the runner region to the core region through the gate region into the cavity, and peeling the base material from the mold member to obtain a desired shape made of the synthetic resin. A mold release step for forming an optical waveguide molded product on the surface of the base material, and a runner portion made of a resin injected and cured in the runner region and a part of the base material are cut to form an optical waveguide core It is characterized by having a cutting step of singulating, the.

  The optical waveguide manufacturing method according to claim 2 of the present invention is characterized in that the gate region is provided in a mirror forming region provided at an end of the core region.

  According to a third aspect of the present invention, there is provided a method for manufacturing an optical waveguide, wherein the mold forming step includes a first original plate manufacturing step of forming a first original plate by forming a patterned concave portion on a substrate, and a pattern of the first original plate. A second original plate producing step of producing a second original plate having a convex portion corresponding to the pattern-like concave portion, machining the convex portion of the second original plate, and forming a convex portion corresponding to the shape concave portion A third original plate manufacturing step for manufacturing the third original plate, and a mold member manufacturing step for manufacturing the mold member by transferring a pattern of the third original plate.

  According to a fourth aspect of the present invention, there is provided a method for manufacturing an optical waveguide, wherein the depth of the pattern-shaped recess is constant.

  The optical waveguide manufacturing method according to claim 5 of the present invention is characterized in that the first original plate manufacturing step includes a patterning step of providing the pattern-like recesses by photolithography.

  According to a sixth aspect of the present invention, there is provided a method for manufacturing an optical waveguide according to the sixth aspect of the present invention, in which the third master production step forms a mirror surface in the core region by machining a convex portion of the second master. It is characterized by having.

  Further, in the method of manufacturing an optical waveguide according to claim 7 of the present invention, in the mold forming step, the core region in the extending direction of the runner region is connected to the connecting portion of the shape recess with the gate region of the runner region. An inclined region having a plane that intersects with the extending direction of is formed.

  Further, in the method for manufacturing an optical waveguide according to claim 8 of the present invention, in the third original plate manufacturing process, the runner region is extended to a portion corresponding to the connection portion of the runner region with the gate region of the shape recess. It has an inclined portion machining step of machining the convex portion so as to form an inclined region having a plane that intersects the existing direction, the extending direction of the core region, and the protruding direction of the convex portion. .

  In order to solve this problem, an optical waveguide according to claim 9 of the present invention is an optical waveguide having a base material and an optical waveguide core, and the optical waveguide core formed on the surface of the base material A first mirror surface formed at an end of the optical waveguide core and inclined so as to convert an optical path of light from outside the optical waveguide penetrating the base material and to propagate to the optical waveguide core; The optical waveguide core is inclined at the other end of the optical waveguide core so as to change an optical path of light propagating through the optical waveguide core and to emit light from the optical waveguide core through the substrate and out of the optical waveguide. A second mirror surface formed, a gate portion provided facing the side surface of the optical waveguide core, and a runner portion connected to the optical waveguide core via the gate portion, The runner portion is the same as the height of the optical waveguide core It is characterized in that.

  According to a tenth aspect of the present invention, in the optical waveguide according to the tenth aspect of the present invention, the side surface of the mirror surface forming region portion in which the gate portion is a part of the optical waveguide core on which the first mirror surface and the second mirror surface are formed. It is characterized by the fact that it is provided in front of.

  An optical waveguide according to an eleventh aspect of the present invention is an inclined portion having a surface that intersects the extending direction of the runner portion and the extending direction of the optical waveguide core at a connection portion between the runner portion and the gate portion. Is featured.

  An optical waveguide according to a twelfth aspect of the present invention includes a plurality of the optical waveguide cores formed on the surface of the base material, the first mirror surface corresponding to each of the optical waveguide cores, and the second And the plurality of optical waveguide cores are arranged in parallel so that the extending directions of the optical waveguide cores are in the same direction as each other. Each of the runner portions extends in the same direction as the extending direction of the optical waveguide core.

  According to a thirteenth aspect of the present invention, in the optical waveguide according to the present invention, the positions of the adjacent first mirror surfaces are respectively shifted in the extending direction of the optical waveguide core, and the adjacent second mirror is provided. The positions of the surfaces are respectively shifted in the extending direction of the optical waveguide core.

  Further, the optical waveguide according to claim 14 of the present invention is such that the runner portion is formed such that the maximum width of the runner portion is narrower than the interval between the adjacent optical waveguide cores across the runner portion. It is a feature.

  An optical waveguide according to a fifteenth aspect of the present invention includes a protective member bonded to the base material so as to sandwich the optical waveguide core in order to protect the optical waveguide core, and the protective member includes the mirror. A hollow portion is formed in cooperation with the surface forming region portion, the runner portion, and the base material.

  According to a sixteenth aspect of the present invention, there is provided an optical waveguide manufacturing method comprising: injecting a synthetic resin into a cavity formed by a concave portion provided in a cladding member and an auxiliary member; and providing a mirror surface at an end portion. In the method of manufacturing an optical waveguide in which a core is formed on the surface of the cladding member, the shape of the concave portion is a core region corresponding to the optical waveguide core, a gate region provided facing a side surface of the core region, A mold forming step of forming the shape recess in the cladding member so as to have a shape having a runner region connected to the gate region, an adhesion step of closely contacting the cladding member and the auxiliary member, and the cavity, An injection hardening process for injecting and curing synthetic resin from the runner region to the core region through the gate region; and injection hardening to the runner region. And a cutting step of cutting a part of the runner portion made of resin and a part of the clad member to separate the optical waveguide core molded product into individual pieces.

  The method for manufacturing an optical waveguide according to claim 17 of the present invention is characterized in that the gate region is provided in a mirror forming region provided at an end of the core region.

  In the optical waveguide manufacturing method according to the eighteenth aspect of the present invention, the mold forming step includes a first original plate forming step of forming a first original plate by forming a pattern-shaped concave portion on a substrate, and a pattern of the first original plate. A second original plate producing step of producing a second original plate having a convex portion corresponding to the pattern-like concave portion, machining the convex portion of the second original plate, and forming a convex portion corresponding to the shape concave portion It has a 3rd original plate production process which produces the 3rd original plate which has, and a clad member production process which transfers the pattern of the 3rd original plate, and produces the above-mentioned clad member.

  According to a nineteenth aspect of the present invention, there is provided a method for manufacturing an optical waveguide, wherein the first original plate manufacturing step includes a patterning step of providing the pattern-like recesses by photolithography.

  The optical waveguide manufacturing method according to claim 20 of the present invention is characterized in that the depth of the pattern-shaped recess is constant.

  According to a twenty-first aspect of the present invention, in the method for manufacturing an optical waveguide, the third original plate manufacturing step includes a mirror surface forming step in which a convex portion of the second original plate is machined to form a mirror surface in the core region. It is characterized by having.

  Further, in the method for manufacturing an optical waveguide according to claim 22 of the present invention, in the mold forming step, the core region is formed in the extending portion of the runner region at the connection portion of the shape recess with the gate region of the runner region. An inclined region having a plane that intersects with the extending direction of is formed.

  In the optical waveguide manufacturing method according to claim 23 of the present invention, in the third original plate manufacturing process, the runner region is extended to a portion corresponding to the connection portion of the runner region to the gate region of the shape recess. It has an inclined portion machining step of machining the convex portion so as to form an inclined region having a plane that intersects the existing direction, the extending direction of the core region, and the protruding direction of the convex portion. .

  According to the first aspect of the present invention, the optical waveguide manufacturing method of the present invention cuts a part of the runner part and the base material, and separates the optical waveguide core molded product without directly cutting the optical waveguide core. Therefore, the optical waveguide core and the mirror can be used without degrading the light propagation quality of the optical waveguide, for example, because the angle of the light incident surface or the light exiting surface of the optical waveguide core varies and the surface accuracy decreases. A surface can be produced. This makes it possible to reliably manufacture an optical waveguide in which the light propagation loss of the optical waveguide is suppressed.

  According to the invention of claim 2, in the optical waveguide manufacturing method of the present invention, since the gate region is provided in the mirror forming region provided at the end of the core region, the light propagated through the optical waveguide core is runner portion. Leaking out, and the light propagation quality of the optical waveguide is not degraded. This makes it possible to reliably manufacture an optical waveguide in which the light propagation loss of the optical waveguide is suppressed.

  According to the invention of claim 3, in the method of manufacturing an optical waveguide according to the present invention, the convex portion of the second original plate corresponding to the pattern-like concave portion of the first original plate is processed by machining. It is possible to process a fine shape corresponding to the pattern-shaped concave portion of the first original plate which is not larger than the size of the blade. As a result, a mold member is obtained in which a fine shape that cannot be obtained by machining alone is subjected to high-precision machining such as mirror machining by machining. In addition, a mold member that can be processed into a thin optical waveguide core obtained by using a mold is obtained.

  According to the fourth aspect of the present invention, since the depth of the pattern-like concave portion is constant, the runner portion and the optical waveguide are manufactured in the same process with the same height of the runner portion and the optical waveguide core. The waveguide core can be easily manufactured. Furthermore, compared with the case where the depth of the pattern-like recess is not constant, the transfer in the second original plate production process can be performed easily and accurately.

  According to the invention of claim 5, in the method of manufacturing an optical waveguide according to the present invention, since the processing of the pattern-like concave portion in the first original plate manufacturing process is not cutting machining but processing by photolithography, the pattern can be easily and accurately formed. Can be produced. Moreover, a pattern-shaped recessed part with a narrow pattern width equal to or smaller than the cutting tool width can be produced.

  According to the sixth aspect of the present invention, in the method for manufacturing an optical waveguide according to the present invention, the convex portion at the portion for forming the mirror surface of the optical waveguide core is processed by machining in the convex portion of the second original plate. Therefore, compared with the case where the mirror surface is formed by machining directly into the optical waveguide core, the angle of the light incident surface and the light exiting surface of the optical waveguide core varies and surface accuracy decreases. Thus, the optical waveguide core and the mirror surface can be produced without adversely affecting the mirror surface. In addition, since the convex portion can be machined only in the portion corresponding to the mirror surface of the optical waveguide core, and an optical waveguide core molded product can be obtained, compared with the case of producing the mold member only by machining, Not only can molds be produced easily, but also there is a merit in manufacturing such that the consumption of machining blades is reduced, the number of maintenance operations is reduced, and the machining speed is not lowered.

  According to the seventh aspect of the present invention, in the method for manufacturing an optical waveguide of the present invention, a surface that intersects the extending direction of the runner region and the extending direction of the core region at the connection portion between the shape recess and the gate region of the runner region. Since the inclined region having the shape is formed, the second original plate production process for producing the second original plate by transferring the pattern of the first original plate and the mold member production step for producing the mold member by transferring the pattern of the third original plate In this case, when the mold member is peeled from the second original plate or the third original plate from the first original plate, it is possible to prevent an excessive force from being applied to a portion corresponding to the corner portion of the gate portion in the vicinity of the gate portion. Thus, the mold member can be peeled from the first original plate to the second original plate or the third original plate without damaging the second original plate and the mold member.

  According to the invention of claim 8, the method of manufacturing an optical waveguide according to the present invention is such that the runner region is extended to a portion corresponding to the connection portion of the convex portion of the second original plate with the gate region of the runner region of the shape concave portion. Since the inclined region having a surface that intersects the extending direction of the core region and the protruding direction of the convex portion is formed, in the mold member manufacturing step of transferring the pattern of the third original plate and manufacturing the mold member, When the mold member is peeled from the third original plate, it is possible to suppress an excessive force from being applied to a portion corresponding to the corner portion of the gate portion in the vicinity of the gate portion. Thereby, the mold member can be peeled from the third original plate without damaging the mold member.

  According to the invention of claim 9, the optical waveguide of the present invention is connected to the runner portion having the same height as the height of the optical waveguide core via the gate portion provided on the side surface of the optical waveguide core. The structure which can mount a light receiving element and a light emitting element in each position corresponding to a 1st mirror surface and a 2nd mirror surface on the back surface of a base material can be manufactured easily.

  According to the invention of claim 10, since the optical waveguide of the present invention is formed by connecting the runner portion to the side surface of the mirror surface forming region portion via the gate portion, the light propagating through the optical waveguide core is The second mirror surface reliably reflects the back surface of the base material and does not propagate to the runner portion. Similarly, light from the outside of the optical waveguide penetrating the base material is reflected by the first mirror surface, reliably propagates to the optical waveguide core, and does not propagate to the runner portion. As a result, light does not propagate to a portion that is not a light propagation optical path, so that optical loss can be suppressed.

  According to the invention of claim 11, in the optical waveguide of the present invention, an inclined portion having a surface intersecting with the extending direction of the runner portion and the extending direction of the optical waveguide core is formed at the connection portion between the runner portion and the gate portion. Therefore, the optical waveguide is excellent in optical characteristics with little loss due to deformation or breakage during manufacture.

  According to the invention of claim 12, since the optical waveguide of the present invention is an optical waveguide having a plurality of optical waveguide cores, it is suitably used as an optical waveguide for mounting a plurality of light receiving elements and light emitting elements. In addition, since the respective optical waveguide cores are arranged in parallel so as to be in the same direction as the extending direction of the optical waveguide core, the pattern design is easy and the mounting of the light receiving element and the light emitting element is also easy. .

  According to the invention of claim 13, in the optical waveguide of the present invention, the optical member that condenses or collimates the light is disposed in the light incident portion and the light exit portion corresponding to the first mirror surface and the second mirror surface. In this case, since the optical members corresponding to the first mirror surface and the second mirror surface can be arranged in a staggered arrangement, the optical waveguide core can be laid at a high density even if an optical member larger than each mirror surface is used.

  According to the fourteenth aspect of the present invention, since the optical waveguide of the present invention has the maximum width of the runner portion smaller than the interval between the optical waveguide cores, the interval between the optical waveguide cores can be reduced, and the optical waveguide cores can be densely arranged. Can be laid.

  According to the invention of claim 15, in the optical waveguide of the present invention, since the protective member covers the optical waveguide core, damage to the optical waveguide core and the mirror surface due to external stress can be prevented. In addition, since the hollow portion formed by the base material, the mirror surface forming region portion, the runner portion, and the protection member becomes an air clad of the light propagating through the optical waveguide core, the reflection efficiency on the mirror surface is increased. This can suppress light loss on the mirror surface.

  According to the invention of claim 16, the optical waveguide manufacturing method of the present invention cuts a part of the runner part and the clad member, and separates the optical waveguide core molded product without directly cutting the optical waveguide core. Therefore, without reducing the light propagation quality of the optical waveguide for reasons such as the angle of the light incident surface and the light exiting surface of the optical waveguide core vary or the surface accuracy decreases, the optical waveguide core and A mirror surface can be produced. This makes it possible to reliably manufacture an optical waveguide in which the light propagation loss of the optical waveguide is suppressed.

  According to the invention of claim 17, in the method of manufacturing an optical waveguide according to the present invention, since the gate region is provided in the mirror forming region provided at the end of the core region, the light propagated through the optical waveguide core is the runner portion. It is possible to reliably manufacture an optical waveguide that is suppressed from leaking into the optical waveguide and that suppresses optical propagation loss of the optical waveguide.

  According to the invention of claim 18, in the method for manufacturing an optical waveguide of the present invention, the convex portion of the second original plate corresponding to the pattern-like concave portion of the first original plate is processed by machining. It is possible to process a fine shape corresponding to the pattern-shaped concave portion of the first original plate which is not larger than the size of the blade. As a result, a clad member can be obtained in which the side and bottom surfaces are further finely processed. In addition, a clad member that can be processed into a thin optical waveguide core obtained by using a mold is obtained.

  According to the nineteenth aspect of the present invention, since the depth of the pattern-shaped recess is constant, the optical waveguide manufacturing method of the present invention is easily manufactured in the same process with the same height of the runner portion and the optical waveguide core. be able to. Furthermore, compared with the case where the depth of the pattern-like recess is not constant, the transfer in the second original plate production process can be performed easily and accurately.

  According to the invention of claim 20, in the method of manufacturing an optical waveguide according to the present invention, since the processing of the pattern-like concave portion in the first original plate manufacturing process is not cutting machining but processing by photolithography, the pattern can be easily and accurately formed. Can be produced. Moreover, a pattern-shaped recessed part with a narrow pattern width equal to or smaller than the cutting tool width can be produced.

  According to the invention of claim 21, in the method of manufacturing an optical waveguide according to the present invention, the convex portion of the second original plate where the mirror surface of the optical waveguide core is formed is processed by machining. Therefore, compared with the case where the mirror surface is formed by machining directly into the optical waveguide core, the angle of the light incident surface and the light exiting surface of the optical waveguide core varies, and the surface accuracy decreases. The optical waveguide core and the mirror surface can be produced without adversely affecting the mirror surface. In addition, since the convex portion can be processed by machining only in the portion corresponding to the mirror surface of the optical waveguide core, and an optical waveguide core molded product can be obtained, compared with the case of producing the clad member only by machining, The mold can be easily manufactured.

  According to the invention of claim 22, in the method of manufacturing an optical waveguide according to the present invention, a surface that intersects the extending direction of the runner region and the extending direction of the core region at the connection portion between the shape recess and the gate region of the runner region. Since the slanted region is formed, the second original plate production step for producing the second original plate by transferring the pattern of the first original plate and the clad member production step for producing the mold member by transferring the pattern of the third original plate In this case, when the clad member is peeled off from the first original plate to the second original plate or from the third original plate, it is possible to suppress an excessive force from being applied to a portion corresponding to the corner portion of the gate portion in the vicinity of the gate portion. Accordingly, the clad member can be peeled from the first original plate to the second original plate or the third original plate without damaging the second original plate and the clad member.

  According to the invention of claim 23, the method for manufacturing an optical waveguide of the present invention includes extending the runner region to a portion corresponding to a connection portion between the convex portion of the second original plate and the gate region of the runner region of the shape concave portion. Since the inclined region having a surface that intersects the extending direction of the core region, the extending direction of the core region, and the protruding direction of the convex portion is formed, in the cladding member manufacturing step of manufacturing the cladding member by transferring the pattern of the third original plate, When peeling the clad member from the third original plate, it is possible to prevent an excessive force from being applied to a portion corresponding to the corner of the gate portion in the vicinity of the gate portion. Thereby, the clad member can be peeled from the third original plate without damaging the base material.

  Therefore, the optical waveguide and the manufacturing method thereof according to the present invention can provide an optical waveguide in which the light emitting device and the light receiving device are easily aligned with respect to the light incident surface and the light emitting surface of the core, and the light propagation loss of the optical waveguide is suppressed. .

It is a block diagram explaining the optical waveguide of 1st Embodiment of this invention, and is the perspective view which pointed out the whole. FIG. 2A is a diagram illustrating an optical waveguide according to a first embodiment of the present invention. FIG. 2A is a plan configuration diagram when the optical waveguide is viewed from the optical waveguide core side, and FIG. FIG. 2C is a side configuration diagram seen from the Y1 direction shown in FIG. 2A. FIG. 2C is a side configuration diagram seen from the Y2 direction shown in FIG. It is a block diagram explaining the optical waveguide of 1st Embodiment of this invention, Fig.3 (a) is the top view which expanded the W part shown to Fig.2 (a), FIG.3 (b) is FIG. It is the side view which expanded Z part shown in (b). It is a figure explaining an example of the manufacturing method of the optical waveguide concerning a 1st embodiment of the present invention, and is a lineblock diagram explaining a mold formation process. It is a figure explaining an example of the manufacturing method of the optical waveguide concerning a 1st embodiment of the present invention, and is a lineblock diagram explaining an adhesion process. It is a figure explaining an example of the manufacturing method of the optical waveguide concerning a 1st embodiment of the present invention, and is a lineblock diagram explaining an injection hardening process, a mold release process, and a cutting process. FIGS. 7A and 7B are diagrams illustrating an optical waveguide according to a second embodiment of the present invention. FIG. 7A is a plan view of the optical waveguide as viewed from the optical waveguide core side, and FIG. It is the plane block diagram which provided the member and was seen from the base-material side. It is a figure explaining the optical waveguide of 3rd Embodiment of this invention, Fig.8 (a) is a plane block diagram which looked at the optical waveguide from the protection member side, FIG.8 (b) is FIG.8 (a). It is the side block diagram seen from the Y3 direction shown in FIG. FIG. 9A is a diagram illustrating Modification Example 1 of the optical waveguide according to the first embodiment of the present invention, and FIG. 9A is a configuration diagram illustrating a modification example of the enlarged portion of FIG. ) Is a side view thereof. FIG. 10A is a diagram illustrating a second modification of the optical waveguide according to the first embodiment of the present invention, and FIG. 10A is a plan configuration diagram compared with the portion illustrated in FIG. ) Is a side configuration diagram compared with the C portion shown in FIG. It is a figure explaining the modification 4 of the optical waveguide of 1st Embodiment of this invention, Comprising: It is a plane block diagram compared with the part shown to Fig.3 (a). FIG. 12A is a diagram illustrating a comparative example having a configuration different from that of the first embodiment of the present invention, FIG. 12A is a configuration diagram illustrating a comparative example with the enlarged portion of FIG. 3A, and FIG. FIG. It is explanatory drawing which shows the structure of the optical waveguide of the prior art example 1. FIG. It is explanatory drawing which shows the structure of the optical waveguide of the prior art example 2. FIG.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings.

[First Embodiment]
FIG. 1 is a configuration diagram for explaining an optical waveguide 101 according to a first embodiment of the present invention, and is a perspective view showing the whole. FIG. 2 is a diagram for explaining the optical waveguide 101 according to the first embodiment of the present invention. FIG. 2A is a plan view of the optical waveguide 101 viewed from the optical waveguide core 11 side, and FIG. ) Is a side configuration diagram viewed from the Y1 direction shown in FIG. 2 (a), and FIG. 2 (c) is a side configuration diagram viewed from the Y2 direction shown in FIG. 2 (a). Note that the two-dot chain line and the light OP shown in FIG. 2B show an example of an optical path of light (not all of the optical path of light).

  As shown in FIGS. 1 and 2, the optical waveguide 101 includes an optical waveguide core 11 formed on the surface of the substrate 10, a first mirror surface M <b> 12 formed on one end of the optical waveguide core 11, The second mirror surface M22 formed at the other end of the waveguide core 11, the gate portion 13 provided facing the side surface of the optical waveguide core 11, and the optical waveguide core 11 are connected via the gate portion 13. The runner part 14 is provided. In addition, the connection portion between the runner portion 14 and the gate portion 13 is provided with an inclined portion K16 having a plane P16 that intersects with the extending direction of the runner portion 14 and the extending direction of the optical waveguide core 11.

  Further, as shown in FIG. 2B, the first mirror surface M12 is inclined so as to convert the optical path of the light OP from the outside of the optical waveguide 101 that has penetrated the base material 10 and to propagate to the optical waveguide core 11. The second mirror surface M22 converts the optical path of the light OP propagating through the optical waveguide core 11, and the light OP from the optical waveguide core 11 penetrates the base material 10 to the outside of the optical waveguide 101. Are inclined so as to be emitted. Light OP incident from the outside of the optical waveguide 101 is light that propagates an optical signal emitted from a light emitting element (not shown), propagates in the optical waveguide core 11, is emitted to the outside of the optical waveguide 101, and receives light. Light is received by an element (not shown). As described above, the optical waveguide 101 has the first mirror surface M12 that reflects the light incident from the back surface of the substrate 10 and the second mirror surface M22 that reflects the back surface of the substrate 10. Is provided on the plane of the base material 10, so that the light receiving element and the light emitting element are mounted on the back surface of the base material 10 and at positions corresponding to the first mirror surface M 12 and the second mirror surface M 22. can do. By this, compared with the case where the light incident surface and the light outgoing surface of the optical waveguide core 11 are arranged on the end surface side of the clad film base material 930 of Conventional Example 2 shown in FIG. The light receiving element and the light emitting element can be easily aligned with respect to the light incident surface and the light outgoing surface, and the light receiving element and the light emitting element can be accurately arranged.

  The base material 10 is a film base material, and has optical characteristics such as refractive index, mechanical strength, heat resistance, an optical waveguide core 11 and a mold described later, depending on the use of the optical device including the optical waveguide 101. The material of the base material 10 is selected in consideration of the adhesion, flexibility, water absorption, and the like. For example, polymethyl methacrylate (PMMA), polycarbonate (PC), amorphous polyolefin, polyethylene terephthalate (PET), polyethersulfone (PES), silicon-based resin that is transparent and has a smaller refractive index than the optical waveguide core 11 In addition, a resin material such as an epoxy resin, inorganic glass, or the like is used. In particular, in order to ensure a difference in refractive index from the optical waveguide core 11, an alicyclic acrylic having a refractive index smaller than the refractive index of the optical waveguide core 11 (refractive index is about 1.51) and a thickness of about 50 μm to 100 μm. Resin films and alicyclic olefin resin films are preferably used.

  The optical waveguide core 11 can be formed of any known synthetic resin as long as it has a required refractive index and light transmittance. However, the optical waveguide core 11 can be formed by regulating the irradiation range of the resin curing light. Since only the above portion can be selectively cured and the manufacture of the optical waveguide core 11 and thus the optical waveguide 101 can be facilitated, an ultraviolet curable resin is particularly suitable. For example, for the base material 10 having a refractive index of about 1.51, it is preferable to use an ultraviolet curable resin having a refractive index after curing of about 1.55. Moreover, the cross-sectional shape of the optical waveguide core 11 is a rectangular shape, and the width and height thereof are formed to be about 15 μm to 100 μm depending on the application of the optical device including the optical waveguide 101. It should be noted that the length of the optical waveguide core 11 shown in the figure does not represent the actual length in order to facilitate the explanation, and may be any number depending on the application, such as several centimeters or several tens of centimeters. Decided. In addition, it is possible to form a plurality of optical waveguide cores 11 on the base material 10, and in practice, a structure in which a plurality of optical waveguide cores 11 are formed on the base material 10 is more general. is there.

  As shown in FIG. 2B, the first mirror surface M <b> 12 converts the optical path of the light OP from the outside of the optical waveguide 101 that has penetrated the base material 10 and propagates it to the optical waveguide core 11. In the case of the light OP incident perpendicularly to the base material 10, the first mirror surface M12 is formed to be inclined with respect to the base material 10 at an angle of 45 °. Similarly, the second mirror surface M22 converts the optical path of the light OP propagating through the optical waveguide core 11, and passes through the base material 10 so as to be emitted out of the optical waveguide 101. In the case where the light is emitted perpendicularly to the base material 10, it is inclined with respect to the base material 10 at an angle of 45 °. Accordingly, the light receiving element and the light emitting element can be mounted at the respective positions corresponding to the first mirror surface M12 and the second mirror surface M22, which are the back surface of the base material 10.

  In addition, a reflective film may be provided on the first mirror surface M12 and the second mirror surface M22 in order to increase the light reflection efficiency. The reflective film is formed by vacuum-depositing a metal material having a high reflectance such as aluminum or silver or an alloy material containing these metal materials as a main component on each mirror surface. The method is performed by superimposing the base material 10 and a mask material having an opening corresponding to each mirror surface, and forming a reflective film on each mirror surface. Thus, if a reflective film is provided to increase the light reflection efficiency on the first mirror surface M12 and the second mirror surface M22, the difference in refractive index between the optical waveguide core 11 and the substrate 10 cannot be sufficiently increased. Even in this case, the optical waveguide 101 having high light propagation efficiency can be obtained.

  Further, it is sufficient that the reflective film is formed only on each mirror surface, but the reflective film is not necessarily limited to only each mirror surface, and may be formed on the optical waveguide core 11. In that case, in the manufacture of the optical waveguide 101, the mask material becomes unnecessary, or the post-processing for removing the reflective film attached to unnecessary portions becomes unnecessary, thereby suppressing the manufacturing cost of the optical waveguide 101. Can do.

  As shown in FIG. 2, the gate portion 13 includes a mirror surface formation region portion A32 (one-dot chain line in the drawing) that is a part of the optical waveguide core 11 on which the first mirror surface M12 and the second mirror surface M22 are formed. It is provided facing the side of the part indicated by. That is, the runner portion 14 is connected to the mirror surface forming region portion A32 of the triangular body portion including each mirror surface, and the connecting surface of the mirror surface forming region portion A32 is connected to the gate portion 13. It has become. In the gate portion 13 shown in FIG. 2, all the side surfaces on one side of the mirror surface forming region A32 are the gate portion 13. The runner portion 14 is connected to the optical waveguide core 11 via the gate portion 13, but the runner portion 14 shown in FIG. 2 is formed to have the same height as the optical waveguide core 11.

  FIG. 3 is a configuration diagram for explaining the optical waveguide 101 according to the first embodiment of the present invention. FIG. 3A is a plan view in which a portion W shown in FIG. 2A is enlarged, and FIG. ) Is an enlarged side view of a Z portion shown in FIG. FIG. 9 is a diagram for explaining a first modification of the optical waveguide 101 according to the first embodiment of the present invention. FIG. 9A shows a modification of the enlarged portion of FIG. FIG. 9B is a side view thereof. FIG. 12 is a diagram for explaining a comparative example having a configuration different from that of the first embodiment of the present invention, and FIG. 12A is a configuration diagram showing a comparative example with the enlarged portion of FIG. FIG. 12B is a side view thereof. 3, 9, and 12, the two-dot chain line and the light OP indicate an example of an optical path of light (not all of the optical path of light).

  As shown in FIGS. 3A and 3B, the optical waveguide core 11 is provided with the gate portion 13 over the entire side surface on one side of the mirror surface forming region A32 and connected to the runner portion 14. Yes. The light OP that has propagated through the optical waveguide core 11 is reliably reflected by the second mirror surface M22, passes through the base material 10, and is emitted entirely out of the optical waveguide 101.

  On the other hand, as shown in FIGS. 9A and 9B, in the optical waveguide C111 of the first modification, the optical waveguide core C11 has a gate portion C13 on a part of one side surface of the mirror surface forming region portion A52. And is connected to the runner part C14. Similarly, in the optical waveguide C111 of this modified embodiment, the light OP propagating through the optical waveguide core C11 is reliably reflected by the second mirror surface M52, penetrates the base material 10, and is entirely out of the optical waveguide C111. It comes out.

  However, as shown in FIGS. 12A and 12B, in the optical waveguide 501 of the comparative example, the gate portion 513 is provided in the portion of the optical waveguide core 511 where the region C5 is added to the mirror surface forming region portion B532. , Connected to the runner part 514. In such a case, the light OP1 that has propagated through the optical waveguide core 511 may be propagated to the runner portion 514 without being reflected by the mirror surface M522. As shown in FIG. 12A, the gate portion 513 is provided with the gate portion 513A provided facing the mirror surface formation region portion B532 and the gate portion 513B provided facing the region C5 other than the mirror surface formation region portion B532. (Indicated by a two-dot chain line in the drawing), the more the gate part 513B is included, the more light OP1 is not reflected by the mirror surface M522 and propagates to the runner part 514. Become. In addition, although not shown, the light incident side is similarly provided with a gate portion in the portion of the optical waveguide core 511 to which the region other than the mirror surface forming region portion is added and connected to the runner portion. The light OP from outside the optical waveguide 501 penetrating 510 is reflected by the mirror surface on the light incident side and propagates not only to the optical waveguide core 511 but also to the runner portion.

  Thus, since the runner part 14 and C14 are connected to the side surfaces of the mirror surface forming region parts A32 and A52 via the gate parts 13 and C13, the light propagating through the optical waveguide cores 11 and C11 is The second mirror surfaces M22 and M52 are reliably reflected on the back surface of the base material 10 and do not propagate to the runner portions 14 and C14. Similarly, the light OP from outside the optical waveguide 101 and C111 penetrating the base material 10 is reflected by the first mirror surface M12, reliably propagated to the optical waveguide cores 11 and C11, and propagates to the runner portion. There is nothing. As a result, the light OP is not propagated to a portion that is not the light propagation optical path, such as the runner portion, so that the optical loss can be suppressed.

  As described above, the optical waveguide 101 of the present invention has the first mirror surface M12 that reflects the light incident from the back surface of the base material 10 and the second mirror surface M22 that reflects the back surface of the base material 10. Since the core 11 is provided on the plane of the base material 10, the light receiving element and the light emitting element are located at positions corresponding to the first mirror surface M 12 and the second mirror surface M 22, which are the back surface of the base material 10. Can be implemented. By this, compared with the case where the light incident surface and the light outgoing surface of the optical waveguide core 11 are arranged on the end surface side of the clad film base material 930 of Conventional Example 2 shown in FIG. The light receiving element and the light emitting element can be easily aligned with respect to the light incident surface and the light outgoing surface, and the light receiving element and the light emitting element can be accurately arranged.

  Further, since the runner portion 14 is formed by being connected to the side surface of the mirror surface formation region portion A32 via the gate portion 13, the light propagating through the optical waveguide core 11 is reliably transmitted through the second mirror surface M22. It is reflected by the back surface of the base material 10 and does not propagate to the runner part 14. Similarly, the light OP from the outside of the optical waveguide 101 that has penetrated the base material 10 is reflected by the first mirror surface M12, is reliably propagated to the optical waveguide core 11, and does not propagate to the runner portion 14. . As a result, the light OP is not propagated to a portion that is not the light propagation optical path, such as the runner portion 14, so that the optical loss can be suppressed.

  Next, a method for manufacturing the optical waveguide 101 according to the first embodiment will be described with reference to FIGS. 4, 5, and 6.

  The manufacturing method of the optical waveguide 101 according to the first embodiment includes a mold member 19 having a shape concave portion 18 for forming a desired shape having the optical waveguide core 11, the mirror surface 12, the runner portion 14, and the gate portion 13. Is formed into a cavity CA formed by a mold forming process P1 for forming a substrate, an adhesion process P2 in which the substrate 10 and the mold member 19 are in close contact, and a shape recess 18 provided in the substrate 10 and the mold member 19. An injection curing process P3 for injecting and curing a resin, and a mold release process P4 for peeling the base material 10 from the mold member 19 and forming an optical waveguide molded product L51 having a desired shape made of a synthetic resin on the surface of the base material 10; And a cutting step P5 for cutting a part of the runner part 14 and the base material 10 and separating the optical waveguide core molded product L11 into individual pieces.

  Furthermore, the mold forming process P1 corresponds to the first master plate manufacturing process P11 in which the pattern-shaped recess 16 is formed on the base 30 to manufacture the first master 1L, and the pattern of the first master 1L is transferred to correspond to the pattern-shaped recess 16. A second original plate production step P12 for producing the second original plate 2L having the convex portions 17 to be machined, and the third original plate 3L having the convex portions corresponding to the shape concave portions 18 by machining the convex portions 17 of the second original plate 2L. A third original plate production process P13 to be produced, and a mold member production step P14 to produce a mold member 19 having a shape recess 18 corresponding to a desired shape by transferring the pattern of the third original plate 3L.

  First, the mold forming process P1 will be described in detail. FIG. 4 is a diagram for explaining an example of the manufacturing method of the optical waveguide 101 according to the first embodiment, and is a configuration diagram for explaining the mold forming process P1. 4A is a configuration diagram showing the first original plate 1L after the completion of the first original plate production process P11, and FIG. 4B shows the second original plate 2L after the completion of the second original plate production step P12. FIG. 4C is a configuration diagram showing the third original plate 3L after the completion of the third original plate manufacturing step P13, and FIG. 4D is a mold member after the end of the mold member manufacturing step P14. FIG. FIG. 10 is a view of an optical waveguide C121 for explaining a modification 2 of the optical waveguide 101 according to the first embodiment of the present invention. FIG. 10 (a) is a plan view compared with the portion shown in FIG. 3 (a). FIG. 10B is a configuration diagram, and FIG. 10B is a side configuration diagram compared with a portion C shown in FIG.

  The mold forming step P1 includes a core region corresponding to the optical waveguide core 11, a gate region provided facing the side surface of the core region and corresponding to the gate portion 13, a runner region connected to the gate region and corresponding to the runner portion 14. This is a step of forming the shape concave portion 18 in the mold member 19 so as to obtain a shape having the shape The gate region described above is provided in the mirror forming region corresponding to the mirror surface forming region A32 provided at the end of the core region.

  First, as shown in FIG. 4A, a pattern-shaped concave portion 16 is formed in the base body 30, and a step of manufacturing the first original plate 1L (first original plate manufacturing step P11) is performed. The pattern-like recess 16 is formed with a constant depth. Thereby, the runner part 14 and the optical waveguide core 11 of the optical waveguide 101 are made the same height, and the runner part 14 and the optical waveguide core 11 can be easily manufactured in the same process. Furthermore, compared with the case where the depth of the pattern-shaped recessed part 16 is not constant, the transfer in the 2nd original plate preparation process P12 mentioned later can be performed easily and correctly. Although not shown, in the first original plate production process P11, the sidewall surface of the pattern-shaped recess 16 is processed, and the extending direction of the runner region at the connection portion of the shape recess 18 with the gate region of the runner region In both cases, the pattern-shaped recess 16 is formed so that a surface intersecting with the extending direction of the core region (corresponding to the surface P16 of the optical waveguide 101 shown in FIG. 2A) is formed. The processing and shape of the side wall surface of the pattern-like recess 16 can be easily achieved by selecting the pattern shape of the pattern-like recess 16.

  Further, as a method of forming the patterned recess 16 in the substrate 30 in the first original plate production process P11, laser processing or mechanical processing can be used. However, patterning of the patterned recess 16 can be performed using photolithography. More preferred. In the patterning process by photolithography, a resist layer (not shown) is formed on the substrate 30, and the resist layer is irradiated with light through a mask material having a predetermined pattern. Is cured. Next, the resist layer is developed to form a resist layer corresponding to a predetermined pattern on the substrate 30, and the substrate 30 is etched using the patterned resist layer as a mask. Thereafter, the resist layer remaining on the substrate 30 is removed, and the pattern-shaped recess 16 is formed on the substrate 30. Note that photolithography can be applied not only to semiconductor technology mainly for two-dimensional processing but also to MEMS (Micro Electro Mechanical System) technology for performing three-dimensional processing. In addition, when the patterning process by photolithography is used, the side wall surface processing described above can be performed simultaneously with the patterning process only by designing the pattern shape of the patterning process.

  As the substrate 30, a synthetic resin substrate such as a silicon substrate, a resist layer material or an acrylic resin plate can be used. As an etching method, wet etching, dry etching, isotropic etching, anisotropic etching, or the like can be used. Various resists such as a negative resist and a positive resist can be used as the resist constituting the resist layer.

  Thus, since the processing of the pattern-shaped recess 16 in the first original plate manufacturing process P11 is not a cutting machine process but a processing by photolithography, the pattern-shaped recess 16 can be easily and accurately manufactured. In addition, a pattern-like concave portion 16 having a narrow pattern width equal to or smaller than the cutting tool width can be produced. The first master 1L has a fine shape or a shape having a high aspect ratio (relatively high, for example, 1 in the μm order). It is possible to easily form a shape having the above aspect ratio.

  Further, as shown in FIG. 4A, when the depth of the concave portion of the patterned concave portion 16 is made constant, the patterned concave portion 16 can be formed by one photolithography, so that the manufacturing process is simplified. Furthermore, compared with the case where the depth of the pattern-shaped recessed part 16 is not constant, the transfer in the 2nd original plate preparation process P12 mentioned later can be performed easily and correctly.

  Also, a second original plate production process P12 for transferring the pattern of the first original plate 1L to produce the second original plate 2L, which will be described later, and a mold member production process P14 for producing the mold member 19 by transferring the pattern of the third original plate 3L. Also, since the side wall surface of the pattern-like concave portion 16 corresponding to the portion for forming the inclined portion K16 of the runner 14 portion in the vicinity of the gate portion 13 is processed, the first original plate 1L to the second original plate 2L, Alternatively, when the mold member 19 is peeled from the third original plate 3L, it is possible to prevent an excessive force from being applied to a portion corresponding to the corner portion of the gate portion 13 near the gate portion 13. Thus, the mold member 19 can be peeled from the first original plate 1L to the second original plate 2L or the third original plate 3L without damaging the second original plate 2L and the mold member 19.

  Also, in the injection hardening process P3 and the mold release process P4 described later, since the mold member 19 processed at a position corresponding to the inclined part K16 of the runner part 14 in the vicinity of the gate part 13 is used, the runner part 14 is used. It is easy to inject synthetic resin into the cavity CA through the gate portion 13 (injection hardening step P3), and excessive force is applied to the corner portion of the gate portion 13 in the vicinity of the gate portion 13 when the base material 10 is peeled from the mold member 19. Therefore, the base material 10 can be peeled from the mold member 19 without damaging the optical waveguide molded product L51 (mold release step P4).

  Next, a second original plate production process P12 is performed in which the pattern of the first original plate 1L is transferred and the second original plate 2L having the convex portions 17 (17a, 17b, 17c) corresponding to the pattern-like concave portions 16 is produced. As shown in FIG. 4B, the second original 2L has a convex shape to which the pattern of the first original 1L is transferred. As a method of transferring the pattern of the first original plate 1L, a method of transferring a pattern to a metal layer material or a plastic layer material by using metal electroforming or plastic molding can be used. For example, nickel is electroformed on a silicon substrate or a synthetic resin substrate, which is the substrate 30 having the pattern-like recess 16 formed as described above, and the silicon substrate is peeled off from the nickel substrate formed by electroforming. Thus, the pattern can be transferred to the nickel base material as the transfer layer. Alternatively, the pattern can be transferred to the silicon carbide material by forming a silicon carbide material on the silicon substrate patterned as described above and then dissolving the silicon substrate.

  In this way, by transferring the pattern-like concave portion 16 of the first original plate 1L to produce the second original plate 2L, machining in the third original plate production process P13 described later is not limited by the size of the blade or the like. Processing can be performed. That is, for example, even if a concave fine shape having a high aspect ratio is formed on the first original plate 1L, the concave fine shape is inverted and projected by transferring the concave fine shape to the second original plate 2L. It appears as a fine shape. For this reason, even if the concave fine shape is small, it is possible to perform machining, which will be described later, on the convex portion 17 having the inverted convex shape.

  Next, the convex part 17 of the 2nd original 2L is processed by machining, and the 3rd original production process P13 which produces 3rd original 3L is performed. As shown in FIG. 4C, the third original plate 3L has a shape obtained by machining the second original plate 2L. Portions 17i and 17j indicated by two-dot chain lines in the drawing indicate portions that have been cut by machining. For example, even if a concave fine shape having a high aspect ratio is formed on the first original 1L, it appears as a convex pattern on the second original 2L. Therefore, the convex 17 of this convex shape is formed. Can be easily machined. Thereby, it becomes possible to form the taper shape, the curved surface shape, or the like with high accuracy, for example, with high accuracy of 1/100 ° or more as the taper angle, with respect to the convex portion 17 of the second original 2L. That is, it is possible to remove the partial portions 17i and 17j of the convex portion 17 with high accuracy. In addition, the machining mentioned here means normal machining performed using a blade.

  In the case of normal machining performed using a blade, the interval between the convex portion 17a of the portion to be machined and the adjacent convex portion 17b is preferably 200 μm or more. When the interval is 200 μm or more, the cutter does not touch the adjacent convex portion 17b and damage the convex portion 17b when the convex portion 17a is processed.

  As described above, the second original plate 2L after the machining can be used as the third original plate 3L, and by molding using the third original plate 3L, a special shape such as a high aspect described later is obtained. A mold member 19 having a ratio portion can be obtained. Furthermore, for example, stripe grooves or fine irregularities are formed on the tapered surface or bottom surface of a fine structure having a dimension equal to or smaller than the size of the cutter used for machining, for example, with precision of machining. The mold member 19 that can be obtained can be obtained. As a result, the processing limit of the mold member 19 can be greatly increased.

  Further, the third original plate production process P13 includes a mirror surface forming step of producing a mold for forming the mirror surface 12 by machining the convex portions 17 of the second original plate 2L by machining. As a result, the convex portion 17b of the portion for forming the mirror surface 12 of the optical waveguide core 11 among the convex portions 17 of the second original 2L is machined, so that the optical waveguide core 11 is directly machined. Compared with the case where the mirror surface is formed, the optical waveguide core 11 does not adversely affect the mirror surface 12 such as the angle of the light incident surface and the light exiting surface of the optical waveguide core 11 varies, and the surface accuracy decreases. 11 and the mirror surface 12 can be produced. Moreover, since the convex part 17b can be machined only in the part corresponding to the mirror surface 12 of the optical waveguide core 11, and the optical waveguide core molded product L11 described later can be obtained, the mold member 19 is produced only by machining. Compared with the case where it does, not only can mold | die manufacture easily, but the consumption of the cutting tool for machining will also decrease, there will be a merit on manufacture, such as the frequency | count of a maintenance reducing and a processing speed not falling.

  Next, the pattern of the 3rd original 3L is transcribe | transferred and the mold member preparation process P14 which produces the mold member 19 which has the shape recessed part 18 corresponding to desired shapes, such as the optical waveguide core 11 and the runner part 14, is performed. As shown in FIG. 4 (d), the mold member 19 is produced by transferring the pattern of the third original plate 3L processed by machining to the convex portion 17 of the second original plate 2L. , Can have any shape part. That is, the mold member 19 has a shape concave portion 18 including a tapered surface 19b and concave shapes 18a, 18b, and 18c subjected to high-precision fine processing. Thus, by performing molding using such a mold member 19 as a mother mold and using a mold, it is possible to obtain an optical waveguide core molded product L11 having a special shape, for example, a high aspect ratio portion described later. it can.

  As a method for transferring the pattern of the third original plate 3L to the mold member 19, for example, when the third original plate 3L is a nickel base, electroforming nickel directly on the nickel base or via a release layer. The nickel base material is formed, and then the nickel base materials are separated from each other, and the pattern is transferred to the nickel base material that is the mold member 19. In this case, burrs may not be generated in the mold member 19 by appropriately changing the liquid composition during the electroforming of nickel and changing the hardness of the nickel base material. When the third original plate 3L is a silicon carbide base material, the silicon carbide base material is formed on the silicon carbide base material via a release layer, and the release layer is selectively dissolved to form the mold member 19. Other methods for transferring the pattern to the silicon carbide substrate can be mentioned. When resin or glass is used as the mold member 19, the pattern can be transferred by a known molding method. In particular, a hot press, imprint, and the like are desirable because high-precision transfer is possible.

  Moreover, although not implemented in the first embodiment of the present invention, the runner portion 14 extends to the connection portion with the gate portion C23 of the runner portion C24 as in the optical waveguide C121 of the second modification shown in FIG. It is preferable to form an inclined portion K26 having a surface P26 that intersects both the direction and the extending direction of the optical waveguide core 11 and the surface P16. The formation of the inclined portion K26 having the surface P26 corresponds to the connecting portion of the shape concave portion 18 with the gate region of the runner region by machining the convex portion 17 of the second original plate 2L in the third original plate manufacturing step P13. An inclined region having a surface (corresponding to the surface P26 of the optical waveguide C121 shown in FIG. 10) intersecting the extending direction of the runner region, the extending direction of the core region, and the protruding direction of the convex portion 17 is formed in the portion to be formed. This is achieved by the inclined portion machining process. As a result, when the mold member 19 is peeled from the third original plate 3L in the mold member manufacturing step P14 in which the pattern of the third original plate 3L is transferred to manufacture the mold member 19, the gate portion C23 in the vicinity of the gate portion C23. It is possible to prevent an excessive force from being applied to a portion corresponding to the corner portion of. Thus, the mold member 19 can be peeled from the third original plate 3L without the mold member 19 being damaged.

  Further, also in the injection hardening process P3 and the mold release process P4 described later, since the mold member 19 having the inclined region is used in the portion corresponding to the connection portion of the shape recess 18 with the gate region of the runner region, the runner region It is easy to inject synthetic resin into the core region through the gate region (injection curing step P3), and when the base material 10 is peeled from the mold member 19, excessive force is applied to the corner of the gate portion C23 in the vicinity of the gate portion C23. Since this can be suppressed, the base material 10 can be peeled from the mold member 19 without damaging the optical waveguide molded product L51 (mold release step P4).

  As described above, in the method of manufacturing the optical waveguide 101 according to the present invention, the mold forming process P1 processes the convex portion 17 of the second original 2L corresponding to the patterned concave portion 16 of the first original 1L by machining. Therefore, it is possible to process a fine shape corresponding to the pattern-shaped recess 16 of the first original plate 1L which is equal to or smaller than the size of the blade at the time of machining. As a result, a mold member 19 is obtained in which the side and bottom surfaces are further finely processed. Moreover, the mold member 19 that can be processed into the thin optical waveguide core 11 obtained by using the mold is obtained.

  Moreover, since the depth of the pattern-shaped recessed part 16 in the 1st original plate preparation process P11 is constant, it can manufacture easily in the same process by making the height of the runner part 14 and the optical waveguide core 11 the same. Furthermore, compared with the case where the depth of the pattern-shaped recessed part 16 is not constant, the transfer in the 2nd original plate production process P12 can be performed easily and correctly.

  In addition, since the processing of the pattern-shaped recess 16 in the first original plate manufacturing process P11 is not a cutting machine process but a processing by photolithography, the pattern-shaped recess 16 can be easily and accurately manufactured. Moreover, the pattern-shaped recessed part 16 with a narrow pattern width below the cutting tool width | variety can also be produced. Moreover, since the depth of the pattern-shaped recessed part 16 in the 1st original plate preparation process P11 is constant, the pattern-shaped recessed part 16 can be formed by one photolithography, and a manufacturing process can be performed easily.

  In the mold forming step P1, for example, photolithography is used to form a portion having a high aspect ratio in a fine structure, and machining is used for high-precision processing of an arbitrary shape in the fine structure. For this reason, it is possible to easily form a special shape, for example, a shape having a portion with a high aspect ratio. In addition, according to this method, machining is performed on a portion that requires high-precision machining, and the entire process is not performed by machining, so that the time required for the manufacturing process can be shortened.

  Further, in the third original plate production step P13, the convex portion 17b of the portion for forming the mirror surface 12 of the optical waveguide core 11 is processed by machining in the convex portion 17 of the second original plate 2L. Compared with the case where the mirror surface 12 is formed by machining the optical waveguide core 11 directly, the angle of the light incident surface and the light emitting surface of the optical waveguide core 11 varies, the surface accuracy decreases, etc. The optical waveguide core 11 and the mirror surface 12 can be produced without adversely affecting the mirror surface 12. Moreover, since the convex part 17 can be machined only in the part corresponding to the mirror surface 12 of the optical waveguide core 11, and the optical waveguide core molded product L11 can be obtained, the mold member 19 is produced only by machining. Compared to the above, not only can the mold be produced easily, but also there is a merit in manufacturing such that the consumption of the cutting tool for machining is reduced, the number of maintenance operations is reduced, and the machining speed is not lowered.

  In the second original plate production process P12 for producing the second original plate 2L by transferring the pattern of the first original plate 1L and the mold member production process P14 for producing the mold member 19 by transferring the pattern of the third original plate 3L. Since an inclined region having a surface that intersects both the extending direction of the runner region and the extending direction of the core region is formed at the connection portion of the recess 18 with the gate region of the runner region, the first original plate 1L to the second original plate are formed. When the mold member 19 is peeled from the 2L or the third original plate 3L, it is possible to prevent an excessive force from being applied to a portion corresponding to the corner portion of the gate portion 13 in the vicinity of the gate portion 13. Thus, the mold member 19 can be peeled from the first original plate 1L to the second original plate 2L or the third original plate 3L without damaging the second original plate 2L and the mold member 19.

  Next, a manufacturing method for manufacturing the optical waveguide 101 using the mold member 19 manufactured in the mold forming step P1 will be described. FIG. 5 is a configuration diagram showing a state in which the base material 10 and the mold member 19 are in close contact with each other in the contact process P2, and FIG. 5A is a plan view seen from the mold member 19 side, and FIG. b) is a side view thereof. Moreover, FIG. 6 is a figure explaining an example of the manufacturing method after the contact | adherence process P2, FIG. 6A is a structure side view explaining the injection hardening process P3 after the contact | adherence process P2, FIG. b) is a configuration side view showing a state in which the base material 10 is peeled from the mold member 19 in the release step P4 after the injection curing step P3, and FIG. 6C is a cutting step after the release step P4. In P5, it is a composition side view showing the state where a part of runner part 14 and base material 10 was cut.

  In the adhesion process P2, as shown in FIGS. 5A and 5B, the mold member 19 produced in the mold formation process P1 and the substrate 10 are adhered to each other. At that time, the shape recess 18 (the shape recess 18A and the shape recess 18B shown in FIG. 5 or FIG. 6A) having the core region, the gate region, and the runner region for forming the runner portion, the optical waveguide core, etc. A space sandwiched between the materials 10, that is, a cavity CA is formed. In addition, an injection hole 10h for injecting a synthetic resin in an injection curing step P3 described later is made in the base material 10 in advance. The injection hole 10 h is preferably provided with a through hole in the base material 10, but may be provided in the mold member 19 or the like, and is not limited to the base material 10.

  Next, an injection curing step P3 is performed in which the synthetic resin for forming the optical waveguide 101 is filled in the injection hole 10h, the shape recess 18A, and the shape recess 18B. As shown in FIG. 6A, the mold member 19 and the base material 10 are sandwiched by a pressing jig 210 and a pressing jig 220, and the pressing member 210 and the pressing jig 220 The substrate 10 is pressed with an appropriate pressure. The holding jig 210 has a resin injection port 212 and an exhaust port 217 corresponding to the injection hole 10h, and when pressed, the injection hole 10h and the resin injection port 212 and the exhaust port 217 are aligned with each other. Positioning is performed.

  Next, in the injection curing step P3, the head of the resin supply device is connected to the resin injection port 212 (not shown), the head of the suction device is connected to the exhaust port 217 (not shown), and the exhaust port 217 is connected by the suction device. The gas in the injection hole 10h, the shape recess 18A, and the shape recess 18B is sucked from the injection hole 10h connected to, and the inside of the cavity CA in which the optical waveguide 101 is formed is decompressed. Then, when the pressure in the cavity CA is reduced to a predetermined value or less, from the injection hole 10h connected to the resin injection port 212 from the resin supply device, into the injection hole 10h, in the shape recess 18A of the runner region, the core region The synthetic resin for forming the optical waveguide 101 is pressure-filled in the shape recess 18B, the shape recess 18A in the runner region, and the injection hole 10h. As the synthetic resin for forming the optical waveguide 101, an ultraviolet curable resin is preferably used. As described above, since the space between the mold member 19 and the substrate 10, that is, the gas in the cavity CA is sucked, the synthetic resin for forming the optical waveguide 101 is filled. The synthetic resin is filled with high efficiency, and air bubbles are prevented from being mixed into the optical waveguide 101, so that a good product can be manufactured with high efficiency.

  Next, when the synthetic resin for forming the optical waveguide 101 is filled in the injection hole 10h, the shape recess 18A, and the shape recess 18B, the supply of resin from the resin supply device is stopped, and the resin injection port 212 is stopped. And the respective heads are removed from the exhaust port 217. Further, the holding jig 210 and the holding jig 220 are removed from the surfaces of the mold member 19 and the base material 10. In this state, the synthetic resin is cured. When the synthetic resin is an ultraviolet curable resin, curing can be easily performed only by irradiating the resin curing light of the ultraviolet curable resin from the outer surface on the substrate 10 side. For this reason, it is more preferable to use an ultraviolet curable resin.

  Further, by using the pressing jig 210 and the pressing jig 220 that transmit ultraviolet resin curing light, the entire surface of the resin curing light can be irradiated from the outside of the pressing jig while the pressing jig is mounted. As a result, the ultraviolet curable resin for forming the optical waveguide 101 can be cured while holding the mold member 19 and the substrate 10, so that the optical waveguide 101 can be reliably maintained while maintaining the normal shape of the optical waveguide 101. 101 can be manufactured.

  Next, the base material 10 is peeled from the mold member 19, and a mold release step P4 for forming an optical waveguide molded product L51 having a desired shape made of a synthetic resin on the surface of the base material 10 is performed. After the substrate 10 is peeled from the mold member 19, as shown in FIG. 6B, an optical waveguide molded product L51 in which the optical waveguide core 11, the mirror surface 12, and the runner portion 14 are formed is obtained. Although not shown, a gate portion is also formed in the mirror surface forming region of the optical waveguide core 11.

  Finally, a part of the runner part 14 and the base material 10 is cut, and a cutting process P5 for dividing the optical waveguide core molded product L11 into pieces is performed. After cutting the runner part 14 and a part of the substrate 10 along the two-dot chain line CT shown in FIG. 6B, as shown in FIG. 6C, the optical waveguide core 11, the mirror surface 12, and the runner. An optical waveguide core molded product L11 in which the portion 14 is formed is obtained. The cutting method may be press processing using a mold or laser processing using a laser beam.

  Further, after the release step P4 or the cutting step P5 is completed, a film forming step P66 for providing a reflective film on the mirror surface 12 may be performed in order to increase the light reflection efficiency of the mirror surface 12. In the film forming process P66, the mask material having an opening corresponding to the mirror surface 12 and the optical waveguide core molded product L11 or the optical waveguide core molded product L11 are overlapped, and a metal material having a high reflectance such as aluminum or silver or The vacuum evaporation of the alloy material which has these metal materials as a main component is performed. A reflective film is formed only on the mirror surface 12 corresponding to the opening. As described above, when the reflective film is formed on the mirror surface 12, the light reflection efficiency on the mirror surface 12 can be increased, so that even when the refractive index difference between the optical waveguide 101 and the substrate 10 cannot be sufficiently large, The optical waveguide 101 can have high light propagation efficiency.

  Further, the reflection film only needs to be formed only on the mirror surface 12. However, in order to reduce the manufacturing cost of the optical waveguide 101, the reflection film is not necessarily limited only to the mirror surface 12 and may be formed on the optical waveguide 101. Permissible. Suppression of the manufacturing cost of the optical waveguide 101 is achieved by eliminating the need for a mask material or unnecessary post-processing for removing the reflective film attached to unnecessary portions. In addition, before the adhesion process P2, a method of vacuum-depositing a reflective film on the mold member 19 in advance and transferring the reflective film to the mirror surface 12 in a release process P4 in which the substrate 10 is peeled from the mold member 19 is performed. It can also be taken.

  As described above, in the method for manufacturing the optical waveguide 101 of the present invention, the synthetic resin is injected and cured from the runner region to the core region through the gate region into the cavity CA formed by the base material 10 and the mold member 19, The synthetic resin can be reliably filled into the cavity CA such that the synthetic resin does not flow out of the base member 10 and the mold member 19 other than the cavity CA.

  Further, the runner portion 14 and a part of the base material 10 are cut, and the optical waveguide core molded product L11 is separated into pieces without directly cutting the optical waveguide core 11, so that the light of the optical waveguide core 11 is incident. The optical waveguide core 11 and the mirror surface 12 can be manufactured without reducing the light propagation loss of the optical waveguide 101 due to the fact that the angle of the surface to be emitted and the surface to emit light varies and the surface accuracy is lowered. . As a result, the optical waveguide 101 in which the optical propagation loss of the optical waveguide 101 is suppressed can be reliably manufactured.

  Further, since the mold member 19 having the inclined region is used in the portion corresponding to the connecting portion of the shape recess 18 with the gate region of the runner region, it is easy to inject synthetic resin from the runner region into the core region through the gate region. In addition, when the base material 10 is peeled from the mold member 19, it is possible to prevent an excessive force from being applied to the corner portion of the gate portion C23 in the vicinity of the gate portion C23, so that the optical waveguide molded product L51 is damaged. The base material 10 can be peeled from the mold member 19 without any change.

  Moreover, in 1st Embodiment of this invention, the mold member 19 which has the shape recessed part 18 is produced, the base material 10 and the mold member 19 are stuck, and it forms between the base material 10 and the shape recessed part 18. The optical waveguide 101 is manufactured by filling the cavity CA with a synthetic resin and curing it. However, the mold member 19 is replaced with a clad member, the substrate 10 is replaced with an auxiliary member, and the shape of the auxiliary member and the clad member is reduced. An optical waveguide according to another embodiment of the present invention may be manufactured by filling a cavity CA formed between and with a synthetic resin and curing it. In that case, the clad member was used without being peeled from the optical waveguide, and the clad member was made of a synthetic resin having a refractive index lower than that of the optical waveguide core, so that the optical waveguide core was embedded in the clad member. An optical waveguide can be obtained. As a result, the light from the outside of the optical waveguide is reflected by the first mirror surface and reliably propagates to the optical waveguide core, and the light propagated through the optical waveguide core is reliably reflected by the second mirror surface. And propagated out of the optical waveguide. This makes it difficult for light to propagate to a portion that is not a light propagation optical path, so that an optical waveguide according to another embodiment of the present invention in which light loss is suppressed can be obtained.

  Although the auxiliary member may be peeled off, an optical waveguide in which the waveguide core is surrounded by the clad of the clad member and the auxiliary member is obtained by forming with a synthetic resin having the same refractive index as that of the clad member. You can also. As a result, the light is less likely to propagate to a portion that is not the light propagation optical path, so that an optical waveguide according to another embodiment of the present invention in which the optical loss is further suppressed can be obtained.

  The clad member production in the clad member creating step is achieved by transferring the pattern formed on the third original plate. As a method for transferring the pattern of the third original plate 3L to the clad member, synthetic resin is used. A method of hot pressing the third original plate on a film is easily used.

[Second Embodiment]
FIG. 7 is a diagram for explaining the optical waveguide 102 according to the second embodiment of the present invention. FIG. 7A is a plan view of the optical waveguide 102 as viewed from the optical waveguide core 11 side. FIG. 7B is a plan configuration diagram when the optical member OE is provided in the optical waveguide 102 and viewed from the substrate 10 side. The optical waveguide 102 of the second embodiment is different from the first embodiment in that a plurality of optical waveguide cores 11 are provided. In addition, about the same structure as 1st Embodiment, the same code | symbol is attached | subjected and detailed description is abbreviate | omitted.

  As shown in FIG. 7A, the optical waveguide 102 has a plurality of optical waveguide cores 11 formed on the surface of the base material 10, and further includes a first mirror surface M12 corresponding to the optical waveguide core 11, a second The mirror surface M22, the gate part 13, and the runner part 14 are provided. The plurality of optical waveguide cores 11 are arranged in parallel so that the extending directions DR of the optical waveguide cores 11 are the same as each other, and the runner portions 14 are also extended from the optical waveguide core 11. It extends in the same direction as the direction DR. Thus, since it is the optical waveguide 102 provided with the some optical waveguide core 11, it is used suitably for the optical waveguide for mounting two or more light receiving elements and light emitting elements. In addition, since the respective optical waveguide cores 11 are arranged in parallel so as to be in the same direction as the extending direction DR of the optical waveguide core 11, the pattern design is easy, and the light receiving element and the light emitting element can be mounted. It becomes easy.

  Moreover, as shown to Fig.7 (a), the runner part 14 is formed so that the largest width W14 of the runner part 14 may become narrower than the space | interval D11 between the optical waveguide cores 11 adjacent on both sides of the runner part 14. FIG. Thus, since the maximum width W14 of the runner portion 14 is narrower than the interval D11 between the optical waveguide cores 11, the interval between the optical waveguide cores 11 can be narrowed, and the optical waveguide cores 11 can be laid at high density.

  Further, as shown in FIG. 7A, the positions of the adjacent first mirror surfaces M12 are formed so as to be shifted in the extending direction DR of the optical waveguide core 11, and the adjacent second mirror surfaces. The positions of M22 are formed so as to be shifted in the extending direction DR of the optical waveguide core 11, respectively. Accordingly, as shown in FIG. 7B, when the optical member OE that collects or collimates the light is arranged in the light incident part and the light outgoing part corresponding to the first mirror surface M12 and the second mirror surface M22. Since the optical members OE corresponding to the first mirror surface M12 and the second mirror surface M22 can be arranged in a staggered arrangement, even if an optical member OE larger than each mirror surface is used, the optical waveguide core is densely formed. 11 can be laid.

  As described above, since the optical waveguide 102 according to the present invention is an optical waveguide 102 including a plurality of optical waveguide cores 11, it is suitably used as an optical waveguide for mounting a plurality of light receiving elements and light emitting elements. In addition, since the respective optical waveguide cores 11 are arranged in parallel so as to be in the same direction as the extending direction DR of the optical waveguide core 11, the pattern design is easy, and the light receiving element and the light emitting element can be mounted. It becomes easy.

  Moreover, since the maximum width W14 of the runner portion 14 is narrower than the distance D11 between the optical waveguide cores 11, the distance between the optical waveguide cores 11 can be narrowed, and the optical waveguide cores can be laid at high density.

  Further, when the optical member OE that condenses or collimates the light is disposed in the light incident portion and the light exit portion corresponding to the first mirror surface M12 and the second mirror surface M22, the first mirror surface M12 and the second mirror surface Since the optical members OE corresponding to the mirror surfaces M22 can be arranged in a staggered arrangement, the optical waveguide cores 11 can be laid at a high density even if optical members OE larger than the respective mirror surfaces are used.

[Third Embodiment]
FIG. 8 is a diagram for explaining the optical waveguide 103 according to the third embodiment of the present invention. FIG. 8A is a plan view of the optical waveguide 103 viewed from the protective member 15 side, and FIG. ) Is a side configuration diagram seen from the Y3 direction shown in FIG. The optical waveguide 103 according to the third embodiment is different from the first embodiment in that a protective member 15 is provided. In addition, about the same structure as 1st Embodiment, the same code | symbol is attached | subjected and detailed description is abbreviate | omitted.

  As shown in FIG. 8, the optical waveguide 103 is provided with a protective member 15 bonded to the base material 10 so as to sandwich the optical waveguide core 11 in order to protect the optical waveguide core 11. Thus, since the protective member 15 covers the optical waveguide core 11, damage to the optical waveguide core 11 and the mirror surface due to external stress can be prevented.

  The protective member 15 has optical characteristics such as refractive index, mechanical strength, heat resistance, adhesion to the optical waveguide core 11 and the base material 10, flexibility, and water absorption depending on the use of the optical device including the optical waveguide 103. The material is selected in consideration of properties and the like. For example, polymethylmethacrylate (PMMA), polycarbonate (PC), amorphous polyolefin, polyethylene terephthalate (PET), polyethersulfone, which is the same as the base material 10 and has a refractive index smaller than that of the optical waveguide core 11. Resin materials such as (PES), silicon resin, and epoxy resin, inorganic glass, and the like are used. In particular, in order to ensure a difference in refractive index from the optical waveguide core 11, an alicyclic acrylic having a refractive index smaller than that of the optical waveguide core 11 (refractive index is about 1.51) and a thickness of about 10 μm to 50 μm. Resin films and alicyclic olefin resin films are preferably used. The protective member 15 is attached by bonding using an adhesive or thermocompression bonding. Adhesion using an adhesive may be performed by applying an adhesive to the substrate 10 and the optical waveguide core 11 or the like, but may also be performed using a protective member 15 having an adhesive applied beforehand on one side.

  Moreover, as shown in FIG.8 (b), the protection member 15 cooperates with the mirror surface formation area part A32, the runner part 14, and the base material 10, and forms cavity part CA1. As described above, the cavity CA1 formed by the base material 10, the mirror surface forming region portion A32, the runner portion 14, and the protective member 15 becomes an air clad of light propagating through the optical waveguide core 11, so that the mirror surface Increases the reflection efficiency. This can suppress light loss on the mirror surface.

  Moreover, since the runner part 14 is produced with the same thickness as the optical waveguide core 11, the protection member 15 near the mirror surface can be supported. As a result, the cavity CA1 can be reliably formed. Further, when the protective member 15 is bonded or when a process such as additional processing to the base material 10 or the runner portion 14 is performed, the runner portion 14 can be used as an alignment mark.

  As described above, in order to protect the optical waveguide core 11, the protective member 15 bonded to the base material 10 is provided so as to sandwich the optical waveguide core 11. Thus, since the protective member 15 covers the optical waveguide core 11, damage to the optical waveguide core 11 and the mirror surface due to external stress can be prevented. In addition, since the cavity CA1 formed by the base material 10, the mirror surface formation region A32, the runner portion 14, and the protection member 15 becomes an air clad of light propagating through the optical waveguide core 11, Increases reflection efficiency. This can suppress light loss on the mirror surface.

  In addition, this invention is not limited to the said embodiment, For example, it can deform | transform and implement as follows, These embodiments also belong to the technical scope of this invention.

<Modification 3>
In the first embodiment, the optical waveguide core molded product L11 obtained after the cutting process P5 is used as it is to obtain the optical waveguide 101 of the first embodiment of the present invention. A reflection film may be attached to 12 to form an optical waveguide.

<Modification 4>
FIG. 11 is a diagram for explaining an optical waveguide C141 of Modification 4 of the optical waveguide 101 according to the first embodiment of the present invention, and is a plan configuration diagram compared with the portion shown in FIG. In the first embodiment, the inclined portion K16 shown in FIG. 3A is formed in a planar shape, but as shown in FIG. 11, the inclined portion formed in a curved surface in the runner portion C44 in the vicinity of the gate portion C43. The part CK46 may be provided.

<Modification 5>
A part of the first embodiment is changed to create a base material having a concave shape formed by transferring the convex mold to the base material, and forming a cavity between the auxiliary member and filling the synthetic resin. An optical waveguide may be created. An optical waveguide in which the optical waveguide core 11 is enclosed in a cladding member (mold member) 19 is used as a cladding member in which the mold member 19 in FIG. 5B is made of a resin having a lower refractive index than the optical waveguide core 11. Obtainable. In the present modification, the same processes are performed up to the third original plate creating process P13 in the mold forming process P1 in the first embodiment. In the mold member producing process (cladding member producing process) P14, the optical waveguide core 11 is used. A heat pressing process in which a pattern is transferred by pressing the third original plate 3L while heating a mold member (clad member) 19 made of a resin having a low refractive index, and the third original plate 3L is made into an uncured or semi-cured resin. The shape of the third original plate 3L is transferred to the mold member (cladding member) 19 by a process in which the resin is adhered and cured, or other known molding process. Subsequently, as in the first embodiment, the optical waveguide in which the optical waveguide core 11 is formed on the mold member (cladding member) 19 can be formed by performing the adhesion process P2 and the injection curing process P3. The base material 10 is a base material (auxiliary member) 10 in this modification. When the base material (auxiliary member) 10 is made of a clad resin, the peeling process P4 is not performed, and an optical waveguide sandwiched between the upper and lower sides can be obtained. Alternatively, the base material (auxiliary member) 10 may be peeled off by performing the peeling step P4 to form an optical waveguide in which the optical waveguide core 11 is formed on the mold member (cladding member) 19.

  The present invention is not limited to the above-described embodiment, and can be modified as appropriate without departing from the scope of the object of the present invention.

101, 102, 103, C111, C121, C141 Optical waveguide 10 Base material 11, C11 Optical waveguide core 12 Mirror surface M12 First mirror surface M22, M52 Second mirror surface A32, A52 Mirror surface forming region portion 13, C13 , C23, C43 Gate part 14, C14, C24, C44 Runner part 15 Protective member 16 Patterned concave part K16, K26, CK46 Inclined part P16, P26 Surface 17, 17a, 17b, 17c Convex part 18, 18A, 18B Shape concave part 19 Mold member 30 Base body CA1 Cavity L11 Optical waveguide core-formed product L51 Optical waveguide molded product CA Cavity DR Extension direction 1L First original 2L Second original 3L Third original

Claims (23)

A method of manufacturing an optical waveguide, comprising: injecting a synthetic resin into a cavity formed by a substrate and a shape recess provided in a mold member; and forming an optical waveguide core having a mirror surface at an end on the surface of the substrate In
The shape of the concave shape is a shape having a core region corresponding to the optical waveguide core, a gate region provided facing a side surface of the core region, and a runner region connected to the gate region. A mold forming step of the mold member for forming the concave shape in the mold member;
An adhesion step of closely adhering the base material and the mold member;
An injection curing step of injecting and curing a synthetic resin from the runner region to the core region through the gate region into a cavity formed by the base and the shape recess provided in the mold member;
A mold release step of peeling the base material from the mold member and forming an optical waveguide molded product having a desired shape made of the synthetic resin on the surface of the base material;
A method for producing an optical waveguide, comprising: a runner portion made of a resin injected and cured in the runner region; and a cutting step of cutting a part of the base material into individual optical waveguide core molded products. .   The method of manufacturing an optical waveguide according to claim 1, wherein the gate region is provided in a mirror formation region provided at an end of the core region. The mold forming step includes
Forming a first original plate by forming a patterned concave portion on a substrate;
A second original plate production step of producing a second original plate having a convex portion corresponding to the pattern-like concave portion by transferring the pattern of the first original plate;
A third original plate production step of machining the convex portion of the second original plate to produce a third original plate having a convex portion corresponding to the shape concave portion;
The method for manufacturing an optical waveguide according to claim 1, further comprising: a mold member manufacturing step of transferring the pattern of the third original plate to manufacture the mold member.   The method for manufacturing an optical waveguide according to claim 3, wherein the depth of the pattern-shaped recess is constant.   5. The method of manufacturing an optical waveguide according to claim 3, wherein the first original plate manufacturing step includes a patterning step of providing the pattern-shaped concave portion by photolithography.   The said 3rd original plate preparation process has a mirror surface formation process which performs a machining process on the convex part of the said 2nd original plate, and forms a mirror surface in the said core area, The Claims 3 thru | or 5 characterized by the above-mentioned. Manufacturing method of the optical waveguide.   In the mold forming step, an inclined region having a surface intersecting with the extending direction of the runner region and the extending direction of the core region is formed in a connection portion between the shape recess and the gate region of the runner region. The method for producing an optical waveguide according to claim 1, wherein:   In the third original plate manufacturing step, the protrusion of the convex portion protrudes in the extending direction of the runner region and the extending direction of the core region at a portion corresponding to the connecting portion of the shape concave portion with the gate region of the runner region. 7. The method of manufacturing an optical waveguide according to claim 3, further comprising an inclined portion machining step for machining the convex portion so that an inclined region having a surface intersecting with a direction is formed. An optical waveguide having a base material and an optical waveguide core,
The optical waveguide core formed on the surface of the substrate;
A first mirror surface formed at an end of the optical waveguide core and inclined to convert an optical path of light from outside the optical waveguide penetrating the base material and to propagate to the optical waveguide core;
At the other end of the optical waveguide core, the optical path of light propagating through the optical waveguide core is changed, and the light from the optical waveguide core is inclined so as to pass through the base material and be emitted out of the optical waveguide. A second mirror surface formed by
A gate portion provided facing the side surface of the optical waveguide core;
A runner portion connected to the optical waveguide core via the gate portion,
The optical waveguide characterized in that the runner portion has the same height as the optical waveguide core.   The gate portion is provided to face a side surface of a mirror surface forming region portion that is a part of the optical waveguide core on which the first mirror surface and the second mirror surface are formed. Item 10. The optical waveguide according to Item 9.   11. The inclined portion having a surface that intersects the extending direction of the runner portion and the extending direction of the optical waveguide core is provided at a connection portion between the runner portion and the gate portion. The optical waveguide described. A plurality of the optical waveguide cores are formed on the surface of the base material, and the first mirror surface, the second mirror surface, the gate portion, and the runner portion corresponding to each of the optical waveguide cores are further provided. Each has
The plurality of optical waveguide cores are arranged in parallel such that the extending directions of the optical waveguide cores are in the same direction, and
12. The optical waveguide according to claim 9, wherein each of the runner portions extends in the same direction as the extending direction of the optical waveguide core. The positions of the adjacent first mirror surfaces are each shifted in the extending direction of the optical waveguide core, and
The optical waveguide according to claim 12, wherein the positions of the adjacent second mirror surfaces are shifted from each other in the extending direction of the optical waveguide core.   The said runner part is formed so that the maximum width of the said runner part may become narrower than the space | interval between the said adjacent optical waveguide cores on both sides of the said runner part. Optical waveguide. In order to protect the optical waveguide core, having a protective member bonded to the base material so as to sandwich the optical waveguide core,
The optical waveguide according to claim 9, wherein the protective member forms a hollow portion in cooperation with the mirror surface forming region portion, the runner portion, and the base material. . In an optical waveguide manufacturing method, a synthetic resin is injected into a cavity formed by a shape recess provided in a clad member and an auxiliary member, and an optical waveguide core having a mirror surface at an end is formed on the surface of the clad member. ,
The shape of the concave shape is a shape having a core region corresponding to the optical waveguide core, a gate region provided facing a side surface of the core region, and a runner region connected to the gate region. A mold forming step of forming the shape recess in the clad member;
An adhesion step of closely adhering the clad member and the auxiliary member;
An injection curing step of injecting and curing synthetic resin from the runner region to the core region through the gate region into the cavity;
A method of manufacturing an optical waveguide, comprising: a runner portion made of a resin injected and cured in the runner region; and a cutting step of cutting a part of the clad member to separate an optical waveguide core molded product into individual pieces. .   The method of manufacturing an optical waveguide according to claim 16, wherein the gate region is provided in a mirror formation region provided at an end of the core region. The mold forming step includes
Forming a first original plate by forming a patterned concave portion on a substrate;
A second original plate production step of producing a second original plate having a convex portion corresponding to the pattern-like concave portion by transferring the pattern of the first original plate;
A third original plate production step of machining the convex portion of the second original plate to produce a third original plate having a convex portion corresponding to the shape concave portion;
The method for manufacturing an optical waveguide according to claim 16, further comprising: a clad member producing step of producing the clad member by transferring the pattern of the third original plate.   The method of manufacturing an optical waveguide according to claim 18, wherein the first original plate manufacturing step includes a patterning step of providing the pattern-shaped concave portion by photolithography.   The method for manufacturing an optical waveguide according to claim 19, wherein the depth of the pattern-shaped recess is constant.   21. The mirror surface forming step according to claim 18, wherein the third original plate manufacturing step includes a mirror surface forming step of forming a mirror surface in the core region by machining a convex portion of the second original plate. Manufacturing method of the optical waveguide.   In the mold forming step, an inclined region having a surface intersecting with the extending direction of the runner region and the extending direction of the core region is formed in a connection portion between the shape recess and the gate region of the runner region. The method of manufacturing an optical waveguide according to claim 16, wherein: In the third original plate manufacturing step, the protrusion of the convex portion protrudes in the extending direction of the runner region and the extending direction of the core region at a portion corresponding to the connecting portion of the shape concave portion with the gate region of the runner region. The method of manufacturing an optical waveguide according to claim 18, further comprising an inclined portion machining step of machining the convex portion so as to form an inclined region having a surface intersecting with a direction.