JP2012035299A - Ultrasonic bonding controller and ultrasonic bonding controlling method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an ultrasonic bonding controller capable of determining whether the bonded state is good or not even if a workpiece to be bonded having a small oscillation amplitude is subjected to the ultrasonic joining, and detecting a poor bonding, a crack failure or an abnormal bonding peeling inexpensively.SOLUTION: The ultrasonic bonding controller bonds a bonding member (121) and a workpiece (120) to be bonded with an ultrasonic oscillator (132) driven from an oscillator drive voltage source (332), and a first vibratory sensor (152) does not detect a mechanical vibration of the workpiece (120) or the bonding member (121) and detects a generation of friction vibration caused by sliding friction and a disappearance of friction vibration caused by a finish of boding to determine the bonded state.

Description

  The present invention is an improvement of an ultrasonic bonding control apparatus in which ultrasonic vibration is applied to a contactor that presses a bonding member against a member to be bonded, and both members are bonded, in particular, one member is likely to be cracked. Ultrasonic bonding suitable for high-hardness brittle members or materials that are subject to bond strength due to the large weight of the members to be bonded and that are prone to bond separation due to excessive vibration after bonding The present invention relates to an improvement of a control device and an ultrasonic bonding control method.

  There are a wide range of ultrasonic welding equipment that melts and joins metal members by frictional heat generated by ultrasonic vibration applied to the pressure-welded surface, and ultrasonic bonding control devices that use physical coupling between active surfaces generated by friction polishing. Although it is practically used, it is difficult to determine whether or not the ultrasonic bonding has been normally completed. Generally, normal bonding is performed depending on whether or not predetermined ultrasonic energy has been applied in a predetermined time. It is supposed to take care of.

  However, if the applied ultrasonic energy is small, there is a problem that the predetermined bonding force cannot be obtained, and if the applied ultrasonic energy is too large, problems such as crack breakage and bond peeling occur. It is necessary to adjust the ultrasonic energy according to the dimensions, environmental temperature.

  Against this background, in order to select solar cells with internal cracks at the time of solar cell production, a bending inspection process is provided for forcibly bending and inspecting the solar cells themselves, and vibrations generated during bending A technique is disclosed in which a wave is detected by an ultrasonic sensor and analyzed for nondestructive inspection for the presence or absence of internal cracks (see, for example, Patent Document 1).

  Further, an ultrasonic vibration is applied to the die pad through the tool in a state where the die pad as the bonding member is pressed against the metal heat radiating plate as the bonded member by a tool connected to the ultrasonic generation source. Disclosed is an ultrasonic bonding method, characterized in that ultrasonic vibration by the ultrasonic wave generation source is stopped or reduced according to the vibration state of the metal heat dissipation plate or its support member. (For example, refer to Patent Document 2).

Specifically, as the ultrasonic bonding progresses, the metal heat sink starts to vibrate in synchronization with the die pad, but this state is detected directly by the vibration sensor, and more ultrasonic vibration energy is applied than necessary. So that it won't be.
In addition, by detecting the vibration state of the metal heat sink, it is possible to determine whether or not an appropriate joint state has been obtained, and always obtain an appropriate joint state without causing a problem with the metal heat sink. It is supposed to be possible.

JP 2002-34392 A JP 09-045737 A

  The method for inspecting internal cracks of a solar cell and the inspection apparatus according to Patent Document 1 described above, in the final process, check for the presence of internal cracks that may occur in all processes including, for example, a simple transfer process. However, it is not suitable as a means for detecting crack generation due to excessive ultrasonic energy accompanying ultrasonic bonding in the ultrasonic bonding process.

This is because the pressing force of the tool (contactor) that presses between the joining members and is applied with ultrasonic vibration does not match the pressing force required to curve the joining member, even if they are matched. This is also because the ultrasonic bonding is hindered by the plane vibration generated on the curved surface.
Accordingly, there is a problem that it is difficult to detect the occurrence of internal cracks in the main cause process in which internal cracks are likely to occur, and it is difficult to improve the ultrasonic bonding method.

  On the other hand, in the ultrasonic bonding method and apparatus according to Patent Document 2, the ultrasonic vibration generated by the ultrasonic wave generation source is stopped in accordance with the vibration state of the member to be bonded or the supporting member, and a problem due to excessive energy application is generated. Although it suppresses, the used vibration sensor operates in the same frequency band as that of the ultrasonic vibrator, for example, in the 20 KHz band in order to directly detect the vibration of the bonded member.

Therefore, since the joining state is detected by the mechanical vibration of the member to be joined, when the weight of the member to be joined is larger than the joining strength, a sufficient vibration amplitude cannot be obtained, and it is difficult to determine the joining state. There are disadvantages.
In addition, it is necessary to detect a signal of several MHz band in order to detect crack breakage occurring in a member to be joined, and it is not possible to detect a broadband signal from several tens KHz to several MHz by the same vibration sensor. There is a point.

  The present invention has been made to solve the above-described problems, and it is possible to determine whether or not the joining is good even with ultrasonic joining in which the vibration amplitude of the member to be joined is small, as well as poor joining and crack breakage or joining. An object of the present invention is to obtain an ultrasonic bonding control apparatus capable of detecting a peeling abnormality at low cost.

  In the ultrasonic bonding control device according to the present invention, the contact member is pressed against the member to be bonded by the contact pressed by the pressing drive mechanism, and the output voltage of the vibrator driving voltage source is applied to the contact. An ultrasonic bonding control device for an ultrasonic bonding control device in which an ultrasonic transducer is connected and the bonding member and the member to be bonded are bonded by ultrasonic vibration in a direction parallel to the pressure contact surface, When the joining member is pressed by the contact, the detection output of the first vibration sensor abutted on the member to be joined or the detection of the second vibration sensor provided on the contact side An abnormality detection unit that responds to an output, wherein the abnormality detection unit is a first frequency that is a lower band in the entire frequency band that can be detected by the first vibration sensor or the second vibration sensor; A first band filter for extracting a band output signal, a second band filter for extracting an output signal in a second frequency band, which is an upper band in the entire frequency band, and a first abnormality determination means And second abnormality determination means.

  In the ultrasonic bonding control apparatus according to the present invention, a center frequency of the first bandpass filter is higher than a frequency of an output voltage generated by the vibrator driving voltage source, and the bonding member and the The center frequency of the second band filter is determined by the material and dimensions of the applied member to be joined or the joining member. Selection switching or variable adjustment is performed according to the natural vibration frequency at the time of occurrence of crack breakage or bond separation, and the first abnormality determination means is the first vibration sensor or the first obtained through the first bandpass filter. When the output signal of the vibration sensor 2 is monitored and the signal amplitude of the output signal has not reached the first determination threshold in a predetermined time range after the start of excitation The second abnormality determining means determines that at least one of the output signals of the first vibration sensor or the second vibration sensor has an amplitude in the second frequency band. When the second limit amplitude is exceeded, it is temporarily stored in the second storage circuit, and based on the stored information, it is determined that at least one of the member to be joined or the joining member has a crack breakage or a joining peeling abnormality To do.

As described above, the ultrasonic bonding control apparatus according to the present invention bonds the bonding member and the member to be bonded using the ultrasonic vibrator driven from the vibrator driving voltage source, and includes the first or second member. The vibration sensor does not detect the mechanical vibration of the member to be joined or the joining member, but detects the occurrence of rubbing vibration due to sliding friction and the disappearance of rubbing vibration upon completion of joining, determines the joining state, and vibration of the same specification The sensor can detect crack breakage or abnormal bonding separation.
Therefore, it is possible to determine whether or not the joining is good even in ultrasonic joining where the weight of the member to be joined is heavy and the vibration amplitude of the member to be joined is small and the vibration amplitude is difficult to detect in the ratio of the joining strength. Since the first or second vibration sensor determines the joining quality in a vibration frequency band that is much higher than the vibration frequency range of the ultrasonic vibrator, the bandwidth of the response frequency is compressed, and one kind of inexpensive vibration sensor is used. Signal detection is possible in the entire frequency band from the first frequency band to the second frequency band, and a small size is obtained by detecting joint failure and crack breakage or joint peeling abnormality independently or in cooperation with one or a plurality of sensors. There is an effect that an inexpensive ultrasonic bonding control apparatus can be obtained.

  In addition, the judgment of bonding quality and the presence or absence of crack breakage or bond peeling abnormality are determined after separating into detection signals in different frequency bands, and at least the determination result of crack breakage or bond peeling abnormality is temporarily stored in the memory circuit As a result, the burden on the abnormality determination means is reduced, and it is possible to perform an abnormality determination with high speed and high accuracy.

1 is an overall configuration diagram of an ultrasonic bonding control apparatus according to Embodiment 1 of the present invention. FIG. 2 is a partial plan view of the ultrasonic bonding control apparatus along line AA in FIG. 1. FIG. 2 is an overall control block diagram of the ultrasonic bonding control apparatus of FIG. 1. It is a time chart for description of the ultrasonic bonding control apparatus of FIG. FIG. 2 is an explanatory characteristic diagram of the ultrasonic bonding control apparatus of FIG. 1. 3 is a flowchart for explaining the operation of the ultrasonic bonding control apparatus of FIG. 1. It is a flowchart for detailed operation | movement description of the 1 part process in FIG. It is a whole block diagram of the ultrasonic bonding control apparatus which concerns on Embodiment 2 of this invention. It is a partial top view of the ultrasonic bonding control apparatus of FIG. FIG. 9 is an overall control block diagram of the ultrasonic bonding control apparatus of FIG. 8. It is a time chart for description of the ultrasonic bonding control apparatus of FIG. It is a flowchart for operation | movement description of the ultrasonic bonding control apparatus of FIG. It is a flowchart for detailed operation | movement description of the 1 part process in FIG. It is a whole control block diagram in the ultrasonic bonding control apparatus concerning Embodiment 3 of this invention. It is a time chart for description of the ultrasonic bonding control apparatus of FIG. It is a flowchart for operation | movement description of the ultrasonic bonding control apparatus of FIG. It is a flowchart for detailed operation | movement description of the one part process in FIG.

Hereinafter, preferred embodiments of an ultrasonic bonding control device of the present invention will be described with reference to the drawings.
Embodiment 1 FIG.
(1) Detailed Description of Configuration of Ultrasonic Bonding Control Device According to Embodiment 1 Hereinafter, FIG. 1 which is an overall configuration diagram of an ultrasonic bonding control device according to Embodiment 1 of the present invention, and the superstructure of FIG. The ultrasonic bonding control apparatus according to the first embodiment is shown in FIG. 2 which is a partial plan view of the ultrasonic bonding control apparatus along line AA and FIG. 3 which is an overall control block diagram of the ultrasonic bonding control apparatus in FIG. The configuration will be described in detail.

1 and 2, the ultrasonic bonding apparatus 100 </ b> A is configured by first to fourth parts, and the first part has a U-shaped side surface formed by a base 110, a back column 111, and a top plate 112. It is comprised by the stationary mechanism and the below-mentioned movable part and drive part which were provided in this stationary mechanism.
The second part is carried on and mounted on the upper surface of the base 110, and is moved upward in FIG. 2, for example, to-be-joined member 120 such as pottery, ceramics, glass, etc. The thin film tape-like joining member 121 is sequentially joined, and this joining member 121 is unwound from a reel reel (not shown).
The third part is a transfer movement mechanism 160 that sequentially transfers the members to be joined 120, and the fourth part is an overall control panel 190 </ b> A installed in the vicinity of the base 110.

  First, a wall plate 113 for holding and fixing a balancer 136 (described later) is fixed to the top plate 112 in the first portion, and an auxiliary pressing mechanism 114, which is an air cylinder, for example, is fixed to the right upper surface of the base 110. A first vibration sensor 116 is attached to the tip of the movable piston of the pressing mechanism 114 via a buffer member 115 that is a rubber material. When the piston is left-moved and pushed, the first vibration sensor 116 is joined. The right end surface of 120 is brought into contact with a non-hardening grease (not shown).

The first vibration sensor 116 is a semiconductor sensor using, for example, a piezoelectric element that responds in the band of several hundreds KHz to several MHz. The first vibration sensor 116 detects a pressure based on the vibration generated in the member 120 and outputs a voltage signal proportional to the pressure. It is generated and can be converted into mechanical vibration amplitude using a predetermined conversion coefficient.
The same applies to the case of the first vibration sensor 152 to be described later. However, when the first vibration sensor 152 is used, the first vibration sensor 116 is not necessary.

Further, the non-curable grease is, for example, a gel-like silicone grease, which improves the adhesion between the first vibration sensor 116 and the member to be joined 120 and facilitates transmission of ultrasonic vibration.
The buffer member 115 is for preventing the ultrasonic vibration from propagating to the auxiliary pressing mechanism 114, and for example, a rubber material having a hardness of about 80 to 90 Hs is used.

  The movable part in the first part includes a contact 130 that presses the bonding member 121, a first lead member 131 that is fixed to one end of the contact 130, and an ultrasonic vibrator 132 that vibrates at a constant frequency of 20 KHz, for example. And an ultrasonic horn 133 that is connected between the ultrasonic vibrator 132 and one end of the first lead member 131 or the contact 130 and amplifies the ultrasonic vibration, and the ultrasonic vibrator 132 is provided at one end. It is composed of a fixed second lead member 134 and a coupling block 135 fixed to the other end of the first and second lead members 131 and 134. Is driven and lifted with a constant thrust so as to be reduced by a balancer 136 which is fixed to the wall plate 113, for example, an air cylinder. The contact 130 is provided with a third vibration sensor 138 for detecting the vibration state on the vibration side.

  The drive unit in the first part is fixed to the upper surface of the top plate 112, meshingly engaged with a servo motor 140 provided with a rotation sensor 141 and a screw shaft 142 which is an output rotation shaft of the servo motor 140, A pressure drive mechanism 143 that moves up and down in accordance with the rotation direction of the servo motor 140, a pressure sensor 144 that is, for example, a load cell provided between the pressure drive mechanism 143 and the coupling block 135 of the movable part, and 1 It is comprised by the movable parts 146a and 146b which are movable pistons of the auxiliary | assistant pressing mechanisms 145a and 145b which are a pair of air cylinders, and the press drive mechanism 150 fixed to the lower end of the movable parts 146a and 146b.

A shock-absorbing member 151 made of a rubber material is bonded to the lower surface of the pressing drive mechanism 150, and a first vibration sensor 152 is embedded in the lower surface of the shock-absorbing member 151. It comes in contact with the curable grease.
A partial region of the pressing drive mechanism 150 is divided into a pair of pressing plates 150a and 150b as shown in FIG. 2, and presses the front and rear (upper and lower positions in FIG. 2) of the joining member 121 pressed by the contact 130. It is supposed to be.
The auxiliary pressing mechanisms 145a and 145b press the bonded member 120 and the bonding member 121 against the base 110 by the pressing drive mechanism 150 to prevent scooping out of the bonded member 120 due to slight vibration, and fluctuations in the bonding point of the bonding member 121. It is for preventing.

As shown in FIG. 1 and FIG. 2, the transport movement mechanism 160 as the third part includes a lift mechanism 161 a (161 b to 161 d not shown) as four air cylinders, and a tip of a movable piston of the lift mechanism. The provided suction plates 162a to 162d are provided, the workpiece 120 is sucked by the suction plates 162a to 162d, the lifting mechanisms 161a to 161d are raised, and then the transport movement mechanism 160 is moved upward in FIG. Then, the elevating mechanisms 161a to 161d are lowered, the suction plates 162a to 162d are opened, the elevating mechanisms 161a to 161d are raised again, and then moved back to the lower side in FIG. It is designed to be transported.
When the joined member 120 is moved forward (upward in FIG. 2), the joining member 121 is unwound from a reel reel (not shown) and moves together with the joined member 120.
As will be described later with reference to FIG. 3, the overall control panel 190 </ b> A that is the fourth part includes an ultrasonic bonding control device 300 </ b> A, a conveyance control unit 310, a power supply control unit 330 </ b> A, and a drive control unit 340.

In FIG. 3, the ultrasonic bonding control apparatus 300A is mainly configured by a program memory 302A that cooperates with the microprocessor 301, and its control functions are an abnormality detection unit 320A, a carry-in transfer command unit 603, and a press control command unit. 604 and a power supply control command unit 606.
The conveyance control unit 310 that responds to the carry-in / transfer command from the carry-in / transfer command unit 603 is configured by, for example, a programmable controller, and controls the work transfer mechanism 311 mainly composed of the above-described air cylinder, so The workpiece 121 is lifted / transferred / lowered, or the auxiliary pressing mechanisms 114, 145a, and 145b are controlled to be pressed.
The drive control unit 340 rotationally drives the servo motor 140 via the servo amplifier 342 based on the speed pattern 341 corresponding to the carry-in / transfer command from the carry-in / transfer command unit 603, and the rotation speed detected by the rotation sensor 141 becomes the target. The contactor 130 is driven closer to the joining member 121 or is driven away from the joint member 121 by controlling the rotational speed to be such that the contactor 130 is driven.
Further, the drive control unit 340 controls the torque generated by the servo motor 140 via the servo amplifier 342 based on the pressing force pattern 344 responsive to the pressing command from the pressing control command unit 604, and is detected by the pressing sensor 144. The contact 130 is pressed against the bonding member 121 by controlling the pressing force to be a target pressing force.

The power supply control unit 330A sets a target value of the output voltage or output current of the vibrator drive voltage source 332 based on the voltage / current generation pattern 331 that responds to the vibration control command from the power supply control command unit 606, and the voltage / current Negative feedback control is performed while monitoring the output voltage or output current of the vibrator drive voltage source 332 detected by the sensor 333.
The vibrator driving voltage source 332 operates with, for example, a commercial power supply of AC100V and generates a high voltage with a constant high frequency of 20 KHz at AC1000V or less via a booster circuit. The output voltage and output current are boosted. It is detected at the front stage or the rear stage of the circuit.
Further, the target voltage or the target current is gradually decreased by a command from the first amplitude suppression unit 321c and the second amplitude suppression unit 322c, which will be described later, and the target output voltage is suppressed so that the detected output current does not become excessive. The target output current is suppressed so that the detected output voltage does not become excessive.
The abnormality detection unit 320A includes a first band filter 321a, a second band filter 322a, and a third band filter 323a, and the output signal of the first vibration sensor 152 (or 116) is used as the first abnormality determination means 321b. The second abnormality determination unit 322b, the third abnormality determination unit 323b, the first amplitude suppression unit 321c, and the second amplitude suppression unit 322c are input.
The fourth abnormality determination means 324b responds to the output signal of the fourth band filter 324a to which the output signals of the voltage / current sensor 333 and the third vibration sensor 138 are input.

The center frequency of the first band-pass filter 321a is much higher than the frequency of the output voltage generated by the vibrator drive voltage source 332 (for example, 20 KHz), and the joining member 121 and the joined member 120 are pressed to cause friction. The filter characteristics are selected and determined so that the input / output gain becomes a large value at a specific frequency of, for example, 200 KHz to 1 MHz, which is a frequency band of rubbing vibration accompanying sliding.
The center frequency of the second band-pass filter 322a is, for example, 0. 0 as a natural vibration frequency at the time of occurrence of cracking or occurrence of abnormal bonding separation determined by the material and dimensions of the member 120 or the bonding member 121 applied. The filter characteristics are selectively adjusted so that the input / output gain becomes a large value at a specific frequency of 5 to 4 MHz.
The center frequency of the third band-pass filter 323a is, for example, 0. 0 as the natural frequency of the other when cracking or bonding peeling abnormality occurs determined by the material and dimensions of the applied member 120 or bonding member 121 applied. The filter characteristics are selectively adjusted so that the input / output gain becomes a large value at a specific frequency of 5 to 4 MHz.
The second band filter 322a and the third band filter 323a are selected and adjusted by a filter characteristic selection / adjustment command 322d. However, it is desirable to variably adjust the first band filter 321a as well. Among them, a specific frequency range is extracted by Fourier analysis, and signal amplitude is monitored in this specific frequency range.
The center frequency of the fourth band filter 324a is, for example, 20 KHz corresponding to the frequency of the output voltage of the vibrator driving voltage source 332.

The first abnormality determination unit 321b monitors the output signal of the first vibration sensor 152 (or 116) obtained via the first bandpass filter 321a, and starts excitation as will be described later with reference to FIG. If the signal amplitude of the output signal does not reach the first determination threshold value H11 in a later predetermined time range, it is determined that there is a bonding failure.
The second abnormality determination means 322b monitors the output signal of the first vibration sensor 152 (or 116) obtained via the second band filter 322a, and this output signal is described later with reference to FIG. 5 (A). Is temporarily stored in the second storage circuit when the signal amplitude exceeds the second limit amplitude H22, and it is determined that a crack breakage abnormality has occurred in the bonded member 120 based on the stored information. Yes.
The third abnormality determination means 323b monitors the output signal of the first vibration sensor 152 (or 116) obtained through the third band filter 323a, and this output signal is described later with reference to FIG. Is temporarily stored in the third memory circuit when the signal amplitude exceeds the third limit amplitude H3, and a bonding separation abnormality occurs between the member 120 and the bonding member 121 based on the stored information. It comes to judge.
The fourth abnormality determination unit 324b compares the output signal of the third vibration sensor 138 obtained through the fourth band filter 324a with the detection signal of the voltage / current sensor 333, and thereby the vibrator driving voltage source. The presence or absence of equipment abnormality is determined based on whether an output current and vibration amplitude corresponding to the input voltage supplied to 332 are obtained.

When any one of the first to fourth abnormality determination means 321b, 322b, 323b, 324b makes an abnormality determination, the abnormality processing command generation unit 618A generates an abnormality processing command, and the abnormality notification and the storage information of the abnormality occurrence information are stored. The device is automatically stopped.
If none of the first to fourth abnormality determination means 321b, 322b, 323b, 324b makes an abnormality determination, the continuation command generation unit 614 continues the operation unless a manual stop command (not shown) is generated. The continuation command to permit is generated.
In the first amplitude suppression means 321c, the signal amplitude obtained by the first vibration sensor 152 (or 116) obtained via the first band-pass filter 321a is a first determination threshold value which will be described later with reference to FIGS. When H11 is exceeded, the target output voltage or target output current with respect to the vibrator drive voltage source 332 is gradually decreased with time after a predetermined delay time Δτ, and the degree of gradual decrease is a constant value. Alternatively, it may be decreased rapidly in proportion to the degree of excess from the first determination threshold value H11.
In the second amplitude suppression means 322c, the signal amplitude by the first vibration sensor 152 (or 116) obtained via the second band-pass filter 322a exceeds the second determination threshold value H21 as will be described later with reference to FIG. The target output voltage or the target output current for the vibrator drive voltage source 332 is reduced by a predetermined amount during the operation, and the degree of reduction is a predetermined value or the degree of excess from the second determination threshold value H21. You may make it reduce in proportion to.

(2) Detailed Description of Action / Operation of Ultrasonic Bonding Control Device According to Embodiment 1 Hereinafter, the ultrasonic bonding control device according to Embodiment 1 of the present invention configured as shown in FIGS. An outline of the control operation will be described based on the time chart shown in FIG. 4 and the characteristic diagram shown in FIG.
FIG. 4 (A) shows the work loading / unloading operation. The workpieces, which are the plate-like member 120 and the thin-film tape-like joining member 121, are sequentially moved so that the ultrasonic joining portions are sequentially contacted. In order to move to the lower part of 130, the transport movement mechanism 160, the lifting mechanisms 161a to 161d and the suction plates 162a to 162d cooperate to advance in the first time zone 401a and carry out carry-in and carry-in. 'Retreat with empty load in the time zone 401aa, and repeat the same operation from the sixth time zone 406a.
FIG. 4B shows the raising / lowering operation of the contact 130 by the servo motor 140. The lowering operation is performed in the subsequent time zone 401b following the first time zone 401a, and is raised in the preceding time zone 406b of the sixth time zone 406a. The operation is to be performed.
FIG. 4C shows the ascending / descending operation of the pressing drive mechanism 150 by the auxiliary pressing mechanisms 145a and 145b. The descending operation is performed in the subsequent time zone 401c following the subsequent time zone 401b, and the further preceding time of the preceding time zone 406b. The ascending operation is performed in the band 406c.

The auxiliary pressing mechanisms 145a and 145b, which are air cylinders, move up and down in conjunction with the pressing drive mechanism 143 that lifts and lowers the contact 130, and performs the downward pressing operation of the pressing drive mechanism 150 when the lowering of the contact 130 is completed. The contact 130 is lifted after the start of the lifting operation of the pressing drive mechanism 150.
FIG. 4D shows the pressing operation of the contact 130 by the servo motor 140. The pressing operation is performed in the subsequent time zone 401d following the subsequent time zone 401c, and in the further preceding time zone 406d of the preceding time zone 406c. A press release operation is performed.
There are various ways of thinking about the rising / lowering pattern of the pressing force. For example, the pressing force may be gradually increased as shown by the dotted line in FIG.
FIG. 4E shows the peak value of the output voltage of the vibrator driving voltage source 332 applied to the ultrasonic vibrator 132, and the subsequent state in which the bonding member 121 is pressed by the contact 130 with a pressure equal to or higher than a predetermined pressure. The vibration starts at the first time 401e following the time zone 401d, reaches a later-described fourth'time 404ee while maintaining a predetermined output voltage, and after the fourth'time 404ee, gradually decreases by the later-described vibration suppressing operation, By the fifth time 405e described later, the output voltage is zero.

The command generation period, which is the time between the vibration start time 401e and the vibration completion time 405e, is the statistical maximum time required for normal bonding in a plurality of ultrasonic bondings that have been experimentally measured in advance or The maximum energy amount is applied, and when the command generation time arrives, the elapsed time is measured, or the output energy accumulated from the generation output of the vibrator driving voltage source 332 reaches the predetermined maximum energy amount. Judgment is made based on whether or not it was done.
After the vibration completion time 405e, the process moves to the sixth time zone 406a via the preceding time zones 406d, 406c, and 406b.
FIG. 4F shows the vibration amplitude on the excitation side obtained from the third vibration sensor 138 provided for detecting the mechanical vibration of the contact 130 via the fourth band-pass filter 324a.
The vibration of the contact 130 starts to be generated from the same vibration start time 401f as the vibration start time 401e, and reaches the second time 402f that is the slide end time while maintaining the sliding vibration amplitude that changes depending on the degree of dirt on the sliding surface. From the second time 402f to the joining start time 404g of FIG. 4 (G), the vibration amplitude gradually decreases as the load for polishing the sliding surface increases, and a signal from the fourth 'time 404ff when the vibration suppression starts is a signal. The amplitude further decreases gradually, and the signal amplitude becomes zero as the excitation is completed.

FIG. 4 (G) shows the signal amplitude on the excitation side by the first vibration sensor 152 (or 116), and this output signal is different from the mechanical vibration signal voltage in the case of FIG. 4 (F). Thus, the vibration completion time 405g is reached through the vibration start time 401g, the sliding end time 402g, and the joining start time 404g.
The fourth time 404ee in FIG. 4 (E) corresponds to the time when the delay time Δτ has elapsed from the time when the signal amplitude of the frictional vibration in FIG. 5 (G) increases from less than the first determination threshold value H11. This delay time Δτ corresponds to the time when the vibration amplitude has decreased to H12 after the bonding start time 404g.
Note that instead of setting the delay time Δτ, a decrease start point of the output signal of the first vibration sensor 152 may be detected, and excitation suppression may be started at this point.

In FIG. 5A showing an example of the output waveform of the second band-pass filter 322a in FIG. 3, the signal detection output increases at a frequency near 2 MHz. This is the case where the member 120 is a glass plate. The waveform at the time of crack occurrence is shown.
When the output of the second band-pass filter 322a exceeds the second determination threshold value H21 shown in FIG. 5 (A), the second amplitude suppression means 322c shown in FIG. 3 immediately applies to the ultrasonic transducer 132. The voltage is reduced.
The second abnormality determination means 322b shown in FIG. 3 determines that crack breakage has occurred when the output of the second bandpass filter 322a exceeds the second limit amplitude H22 shown in FIG. It is like that.
In FIG. 5B showing an example of the output waveform of the third band-pass filter 323a of FIG. 3, the signal detection output increases at a frequency near 1 MHz, which is the case where the member 120 is a glass plate. The waveform at the time of occurrence of abnormal bonding peeling is shown.
The third abnormality determining means 323b shown in FIG. 3 determines that a bond separation abnormality has occurred when the output of the third band filter 323a exceeds the third limit amplitude H3 shown in FIG. 5B. It is supposed to be.

Next, the details of the control operation of the ultrasonic bonding control apparatus according to Embodiment 1 of the present invention configured as shown in FIGS. 1 to 3 will be described based on the flowcharts shown in FIGS.
In FIG. 6, a process 600 is a starting step of a control operation of the microprocessor 301 which is a main component of the ultrasonic bonding control apparatus 300A, and a subsequent process 601a raises the contact 130 by the servo motor 140, and an auxiliary pressing mechanism 145a, This is a step of generating an ascending command so as to ascend the pressing drive mechanism 150 by 145b. When the ascending operation has already been performed in Step 613 described later, the ascending operation in Step 601a is not necessary.
Subsequent step 602 is a step of generating a workpiece loading / unloading command. With this command, the transfer control unit 310 lowers the suction plates 162a to 162d in FIGS. 1 and 2 to suck and raise the member 120 to be joined. After the moving mechanism 160 is moved forward, the suction plates 162a to 162d are lowered / released / raised, and a series of conveyance control is performed to move back to the initial position due to an empty load.
The subsequent step 601b is a step of generating a command to lower the contact 130 to the servo motor 140 and lowering the pressing drive mechanism 150 by the auxiliary pressing mechanisms 145a and 145b. The step 601b includes steps 601a, 602, and 601b. The process block 603 is a carry-in / transfer command generation process, and these operations are the first time zone 401a and the first 'time zone 401aa in FIG. 4 (A), the first time zone 401b in FIG. 4 (B), FIG. It is executed in the first time zone 401c of 4 (C).
A subsequent step 604 is a pressing control command generation step for generating a command for pressing the contact 130 against the joining member 121 with respect to the servo motor 140.
In the subsequent step 605, it is determined whether or not the pressing force of the contact 130 has reached a predetermined value. If not, NO is determined and the process returns to step 604. If it has reached, the determination is YES and step 606 is performed. These steps are executed after the first time zone 401d in FIG. 4D.

Note that the raising / lowering control and pressing control of the contact 130 are executed by the drive control unit 340 of FIG. 3, and the microprocessor 301 monitors the output of the pressing sensor 144 and only generates and stops the pressing control command. It has become.
A subsequent step 606 is a power supply control command generation step for applying a drive voltage of a predetermined frequency to the ultrasonic transducer 132. When the power supply control command is generated, the power supply control unit 330A in FIG. 3 is based on a predetermined output pattern. Thus, negative feedback control of the output voltage or output current of the vibrator drive voltage source 332 is performed.
Subsequent step 607 is a step in which step 606 becomes a vibration completion timing determination step for determining a command generation period for generating a drive voltage. This command generation period is a plurality of ultrasonic bondings that have been experimentally measured in advance. The statistical maximum time or maximum energy amount required for normal joining is applied, and the arrival of the command generation time is measured by measuring the elapsed time, or the generated output of the vibrator driving voltage source 332 is timed. Judgment is made based on whether or not the output energy accumulated over time has reached a predetermined maximum energy amount. If not reached, NO is determined and the process proceeds to process block 620A. If reached, YES is determined. Then, the process proceeds to step 608.

The process block 620A is a joint quality determination process for determining whether or not a joint is good and whether or not an abnormality has occurred, as will be described later with reference to FIG. 7, and the subsequent process 617A reads whether or not the process 628 in FIG. If an abnormality has occurred, a determination of YES is made and the process proceeds to step 618A. If no abnormality has occurred, a determination of NO is made and the process proceeds to step 609a.
Step 609a reads out whether step 631 in FIG. 7 stores a certain amount of vibration suppression command or whether step 634 stores a gradual decrease vibration suppression command and stores the vibration suppression command. If NO is determined, the process returns to Step 604, and if the vibration suppression command is stored, a determination step of determining YES and proceeding to Step 619, Step 619 is performed with respect to the power supply control unit 330A of FIG. In this step, the target output voltage or output current is reduced by a certain amount or a command for gradually decreasing with the passage of time is generated, and then the process proceeds to step 609b.
Step 609b determines whether or not the output voltage of the vibrator drive voltage source 332 has dropped below a predetermined lower limit voltage. If not, NO is determined and the process returns to step 604, and if it has decreased, YES is determined. To move to step 612.
Step 618A is an abnormality occurrence processing step of notifying at least occurrence of abnormality, storing and storing abnormality occurrence information, and then proceeding to step 612.

In step 608, a first abnormality determination is made, the occurrence of an overtime abnormality is stored, at least abnormality notification is performed, and the process proceeds to step 612.
Step 612 is a step of issuing a drive stop command to the ultrasonic transducer 132 to the power supply control unit 330A, and steps 606 to 612 are performed in the steps of FIGS. 4 (E), (F), and (G). The operation from the 1st time 401e to the 5th time 405e is executed.
A subsequent step 613 is a step of generating a command to stop pressing the contact 130 and a command to raise the contacts 130 and the auxiliary pressing mechanisms 145a and 145b to the power supply control unit 330A, which are shown in FIGS. , (B) in the sixth time zone 406d, 406c, 406b.
The subsequent step 614 is a step for determining whether or not to continue the operation. If an operation stop request by a manual operation switch (not shown) is generated or if the abnormal process in step 618A is to stop the operation, NO is determined. A determination is made and the process proceeds to the operation end process 615. If it is permitted to continue operation, a determination of YES is made and the process returns to step 601a.
In the operation end process 615, when a restart command is generated by a manual operation switch (not shown), the operation start process 600 is started.

In FIG. 7, a step 621 is a subroutine program start step indicated by a process block 620A in FIG. 6, and a step 629 provided after a series of control programs is a return step to shift to step 617A in FIG. .
The step 622a executed following the step 621 is the fourth abnormality determination unit 324b shown in FIG. 3, and is compared with the standard characteristic relating to the output voltage vs. output current characteristic by the vibrator driving voltage source 332. If the actual output current is too large or too small, it is determined that the transducer drive voltage source 332 or the ultrasonic transducer 132 is abnormal, the process proceeds to step 628, and the output current is abnormal. If not, it is a determination step of determining NO and proceeding to step 622b.
Step 622b corresponds to the second abnormality determination means 322b and the third abnormality determination means 323b shown in FIG. 3, and is obtained through the second band filter 322a and the third band filter 323a. Cracks occur when the detection output of one vibration sensor 152 (or 116) exceeds the limit amplitude indicated by the second limit amplitude H22 in FIG. 5A or the third limit amplitude H3 in FIG. 5B. This is a determination step in which a determination of YES is made when a breakage abnormality or a bond separation abnormality has occurred and the process proceeds to step 628, and if there is no abnormality, a NO determination is made and the process proceeds to step 630.
Step 628 is a step of storing the occurrence of abnormality and proceeding to step 629.
Step 630 corresponds to the second amplitude suppression means 322c shown in FIG. 3, and the detection output of the first vibration sensor 152 (or 116) obtained through the second band-pass filter 322a is shown in FIG. When the second determination threshold value H21 shown in A) is exceeded, a determination of YES is made and the process proceeds to step 631, and when the second determination threshold value H21 is not reached, a determination of NO is made and the process proceeds to step 632 This is a determination step.

In step 631, a quantitative vibration suppression command for reducing the output voltage of the vibrator drive voltage source 332 by a certain amount is stored, and then the process proceeds to step 632.
Step 632 corresponds to the first amplitude suppression means 321c shown in FIG. 3, and the detection output of the first vibration sensor 152 (or 116) obtained via the first band-pass filter 321a is shown in FIG. When the first determination threshold value H11 indicated by G) is exceeded, it is determined that there is a possibility of joining and YES is determined and the process proceeds to step 633. When the first threshold value H11 is not reached, NO is determined and the process is performed. This is a determination step to shift to 629.
In step 633, it is determined whether or not the delay time Δτ in FIG. 4G has elapsed. If it has not elapsed, NO is determined and the process proceeds to step 629. If it has elapsed, YES is determined and the process proceeds to step 634. This is a determination step for transition.

Step 634 is a step of proceeding to step 629 after storing a gradually decreasing vibration suppression command for gradually decreasing the output voltage of the vibrator drive voltage source 332 with time.
When Step 628, Step 631, and Step 634 do not store an abnormality occurrence and vibration suppression command, step 620A to Step 617A (NO determination), step 609a (NO determination), and step 604 in FIG. After step 605, step 606 and step 607 (NO determination), process block 620A is repeatedly executed. If step 607 makes a determination of YES, the process proceeds to step 608 to exit from the routine routine. If it is determined that an abnormality has occurred, the process proceeds to step 618A to exit the cyclic routine, and when the vibration suppression command is stored, a cyclic routine including step 619 is performed, and in step 606, the voltage applied to the ultrasonic transducer 132 is changed. It will decrease or gradually decrease.
Thereafter, in step 609b, it is determined that the output voltage of the vibrator driving voltage source 332 has become equal to or lower than the predetermined lower limit voltage, and the process proceeds to step 612, or the process 607 determines that the time is exceeded and exits to process 608. It will be.

(3) Key Points and Features of Ultrasonic Bonding Control Device According to Embodiment 1 As is clear from the above description, the ultrasonic bonding control device according to Embodiment 1 of the present invention is a contact pressed from the pressing drive mechanism 143. The joining member 121 is pressed into contact with the joined member 120 by the child 130, and an ultrasonic vibrator 132 to which the output voltage of the vibrator driving voltage source 332 is applied is connected to the contact 130, and is parallel to the pressure contact surface. The ultrasonic bonding control apparatus 300A for the ultrasonic bonding apparatus 100A is configured to bond the bonding member 121 and the member to be bonded 120 by ultrasonic vibration in the direction in which the bonding member 121 is pressed by the contact 130. The abnormality detection unit that responds to the detection output of the first vibration sensor 152 (or 116) that is in contact with the member 120 to be joined. 320A, and the abnormality detection unit 320A is a lower band in the entire frequency band detectable by the first vibration sensor 152 (or 116), and extracts an output signal of the first frequency band. A first band filter 321a and a second band filter 322a for extracting an output signal of a second frequency band which is an upper band in the entire frequency band, and first and second abnormality determination means 321b. 322b.

  The center frequency of the first band-pass filter 321a is higher than the frequency of the output voltage generated by the vibrator driving voltage source 332, and the joining member 121 and the joined member 120 are pressed and frictionally slid. The center frequency of the second band-pass filter 322a is determined by the material and dimensions of the applied member to be joined 120 or the joining member 121. Depending on the natural vibration frequency of the first vibration sensor 152 (or 116), the first abnormality determination means 321b is obtained through the first band filter 321a. The signal is monitored, and the signal amplitude of the output signal does not reach the first determination threshold value H11 in a predetermined time range after the start of excitation. If it is determined that there is a bonding failure, the second abnormality determining means 322b determines that the signal amplitude of the output signal of the first vibration sensor 152 (or 116) is the second frequency band in the second frequency band. When the limit amplitude H22 of 2 is exceeded, it is temporarily stored in the second storage circuit, and based on this stored information, crack breakage or abnormal bonding peeling has occurred in at least one of the bonded member 120 or the bonded member 121 It comes to judge.

  The abnormality detection unit 320A further includes a first amplitude suppression unit 321c and a second amplitude suppression unit 322c, and the first amplitude suppression unit 321c is obtained through the first band filter 321a. When the signal amplitude of the output signal of the vibration sensor 152 (or 116) exceeds the first determination threshold value H11 and is delayed by a predetermined delay time Δτ or when the output signal starts to decrease, the vibrator The target output voltage or target output current for the drive voltage source 332 is started to gradually decrease, and the second amplitude suppression means 322c of the first vibration sensor 152 (or 116) obtained via the second band-pass filter 322a. When the signal amplitude of the output signal exceeds the second determination threshold value H21, the target output voltage or target for the vibrator drive voltage source 332 is obtained. The standard output current is reduced, and the second determination threshold value H21 has a signal amplitude lower than the second limit amplitude H22 applied in the second abnormality determination means 322b.

As described above, when the signal amplitude by the first vibration sensor obtained via the first and second bandpass filters exceeds the first and second determination thresholds, the target output voltage or the target output for the vibrator driving voltage source The current is gradually reduced or reduced.
Therefore, when the signal amplitude detected by the first vibration sensor increases with the progress of the frictional sliding, the vibration amplitude is suppressed by predicting the bonding completion time, and bonding peeling or crack breakage occurs. Can be prevented.

  The abnormality detection unit 320A further includes a third band filter 323a and a third abnormality determination unit 323b, and the center frequency of the third band filter 323a is determined by the first vibration sensor 152 (or 116). In a third frequency band that is within the entire detectable frequency band, it is unique when one of bond debonding or crack breakage abnormality determined by the material and dimensions of the applied member 120 or member 121 applied. According to the vibration frequency, the selection is switched or variably adjusted, and the third abnormality determination means 323b has a signal amplitude of the output signal of the first vibration sensor 152 (or 116) in the third frequency band. 3 is temporarily stored in the third storage circuit when the limit amplitude H3 of 3 is exceeded, and the bonded member 120 and the bonded portion are based on the stored information. 121, it is determined that one of the bonding separation or crack breakage abnormality has occurred between the second band filter 322a and the second abnormality determining means 322b, so that the other of the bond peeling or crack breakage abnormality is determined. They share functions with each other.

As described above, the third band filter and the third abnormality determination means are provided, and one of the bond separation abnormality or the crack breakage abnormality generated between the bonded member and the bonded member is detected using the first vibration sensor. The other abnormality is detected by the second band filter and the second abnormality determining means.
Therefore, the presence / absence of crack failure abnormality and bond separation abnormality is determined after being separated into detection signals in their respective frequency bands, and the determination results of crack failure abnormality and bond separation abnormality are temporarily stored in the respective storage circuits. As a result, the burden on the abnormality determination means is reduced, and it is possible to perform abnormality determination with high speed and high accuracy.

  The abnormality detection unit 320A further includes fourth abnormality determination means 324b that responds to a voltage / current sensor 333 that is a voltage or current detection means provided in an input circuit or an output circuit of the vibrator driving voltage source 332, The fourth abnormality determining means 324b compares the standard characteristics measured and stored for the output characteristics of the detection signal of the voltage / current sensor 333 with the output characteristics of the newly measured detection signal, and drives the vibrator. The presence or absence of power supply abnormality is determined based on whether or not an output current corresponding to the input voltage supplied to the voltage source 332 is obtained.

As described above, the voltage / current sensor for the vibrator driving voltage source is provided, and the fourth abnormality determining means is added to monitor the output signal of the vibrator driving voltage source.
Accordingly, in the ultrasonic bonding work process, the presence / absence of abnormality of the vibrator drive voltage source is detected in parallel with the determination process of the bonding quality, so that the defective product is prevented from flowing out and the cause of the abnormality is generated. Becomes clear and abnormality processing can be performed easily.
In addition, in the determination that the sliding friction has disappeared with the completion of joining and the signal output of the first vibration sensor has become zero, avoiding an erroneous determination by confirming that the signal output is not stopped due to power supply abnormality can do.

  The abnormality detection unit 320A further includes a fourth band-pass filter 324a to which an output signal of the third vibration sensor 138 is input. The third vibration sensor 138 is an additive installed close to the contact 130. A vibration sensor for detecting a vibration amplitude of a vibration mechanism, wherein the fourth band-pass filter 324a is a band-pass filter that operates using a frequency of an output voltage generated by the vibrator driving voltage source 332 as a center frequency, The fourth abnormality determination means 324b further compares the detection signal of the voltage / current sensor 333 with the output signal of the fourth bandpass filter 324a, and the vibration amplitude of the vibration mechanism including the contact 130 is the voltage. / It is determined whether the vibration amplitude corresponds to the detection output of the current sensor 333.

As described above, the third vibration sensor and the fourth band-pass filter for detecting the vibration amplitude of the vibration mechanism are provided, and the fourth abnormality determination means detects the abnormality of the equipment including the presence or absence of abnormality of the vibration mechanism. The presence or absence is determined.
Accordingly, in the ultrasonic bonding work process, the presence or absence of an abnormality in the vibration mechanism including the vibrator driving voltage source and the ultrasonic vibrator is detected in parallel with the bonding quality determination process, so that defective products flow out. Can be prevented, the cause of the abnormality is clarified, and the abnormality process can be easily performed.

  The press drive mechanism 143 is pressed and driven by a servo motor 140 driven and controlled by a drive control unit 340. A rotation sensor 141 and a press sensor 144 are connected to the drive control unit 340 as input signals, and the drive control is performed. The unit 340 includes a servo amplifier 342 having a speed control mode and a torque control mode. In the speed control mode, the rotation speed of the servo motor 140 detected by the rotation sensor 141 is negative so as to coincide with a predetermined speed pattern 341. Feedback control is performed to drive the contactor 130 closer to or away from the joining member 121. In the torque control mode, the contactor 130 and the joining member 121 detected by the pressing sensor 144 are driven. Is based on a predetermined pressing force pattern 344. Gradually increasing and maintaining a constant value, the pressing force is released when the output of the vibrator driving voltage source 332 is stopped, and the joining member 121 and the joined member 120 are moved while the contactor 130 is driven apart. It is to be carried in or transferred.

As described above, the approach / separation drive and the pressure drive of the contact are performed by the servo motor controlled in the speed control mode and the torque control mode.
Therefore, the approaching / separating drive of the contactor can be quickly performed, and the contact with the joining member can be brought into contact at a very low speed to prevent the joining member or the joined member from being broken due to the collision of the rotating inertial body.
The pressing force is detected and accurately controlled by the pressing sensor, and stable ultrasonic bonding can be performed.

  The contact 130 is attached and fixed to one end of the first lead member 131, and the ultrasonic transducer 132 is attached and fixed to one end of the second lead member 134, and the first and second leads The other ends of the members 131 and 134 are fixed to a common coupling block 135, and the ultrasonic transducer 132 and the contact 130 or one end of the first lead member 131 are used to amplify ultrasonic vibration. The contact 130, the first lead member 131, the coupling block 135, the second lead member 134, the ultrasonic transducer 132, and the ultrasonic horn 133 constitute a movable part that is connected by a sonic horn 133. The movable part is driven to be pressed from the servo motor 140 via the pressing sensor 144, and the entire gravity of the movable part is counterbalanced. And it has been reduced by 6.

As described above, the press sensor is installed between the press drive mechanism by the servo motor and the movable part including the ultrasonic wave generation source, and the gravity of the entire movable part is reduced by the balancer so that it does not act as the pressing force of the contact. It has become.
Accordingly, it is possible to accurately detect the pressing force acting on the contact by the pressure sensor, and since the ultrasonic vibration is not directly applied to the pressure sensor, deterioration of the detection characteristic of the pressure sensor due to the ultrasonic vibration is prevented, Further, since the ultrasonic vibrator does not perform unnecessary weight body excitation, power consumption is suppressed.

  The vibrator drive voltage source 332 constitutes a power supply control unit 330A, and the power supply control unit 330A has an output voltage or output current detected by the voltage / current sensor 333 that matches a target output voltage or output current. As described above, the output voltage of the vibrator drive voltage source 332 is negative feedback controlled, and the target output voltage is suppressed or the target output is controlled so that the product of the target output voltage and the detected output current is not more than a predetermined value. The target output current is suppressed so that the product of the current and the detected output voltage is not more than a predetermined value.

As described above, the output voltage or output current of the vibrator driving voltage source supplied to the ultrasonic vibrator is subjected to negative feedback control using the voltage / current sensor.
Therefore, the target output voltage or output current can be obtained even if the load resistance varies, and the presence / absence of abnormality can be accurately determined by comparing the output signal of the voltage / current sensor and the output signal of the vibration sensor. It is possible to prevent excessive vibration amplitude from occurring.

  In the ultrasonic bonding control method using the ultrasonic bonding control device 300A, the output voltage of the vibrator driving voltage source 332 is changed after the pressing force of the contact 130 on the bonding member 121 becomes a predetermined value or more. A power control command generation step 606 for generating an output voltage to zero after a predetermined time, and an excitation completion timing determination step 607 for determining a timing for releasing the pressing force of the contact 130 by setting the output voltage to zero. When the abnormality determination step 617A that responds to the determination result of the second abnormality determination unit 322b and the first or second amplitude suppression unit 321c or 322c generate a vibration amplitude suppression command, the vibrator The vibration suppression start process 619 for gradually decreasing or reducing the output voltage or output current of the drive voltage source 332 and the crack determination abnormality or Upon detecting a slip peel abnormality, and a abnormal processing step 618A of performing at least abnormality notification.

  For the command generation period in the excitation completion time determination step 607, the statistical maximum time or maximum energy amount required for performing normal bonding in a plurality of ultrasonic bondings that have been experimentally measured in advance is applied. The arrival of the command generation time is determined by measuring the elapsed time or whether the output energy accumulated with the passage of time from the generated output of the vibrator drive voltage source 332 has reached a predetermined maximum energy amount. The vibration suppression by the vibration suppression start step 619 is completed within the command generation period by the vibration completion timing determination step 607 and the output voltage of the vibrator drive voltage source 332 has not decreased below a predetermined lower limit voltage. Sometimes the first abnormality determination is performed, the time excess abnormality process including at least abnormality notification is performed, and the abnormality determination step 617A performs the abnormality determination. When a, when the excitation by excitation suppression start step 619 inhibition is completed, thereby making it possible to stop the vibrating operation in a shorter time than the maximum time set in advance.

As described above, the abnormality detection method includes the power control command generation step, the vibration completion timing determination step, the abnormality determination step, the vibration suppression start step, and the abnormality generation processing step. When an abnormality is determined within the command generation period, the vibration operation is stopped, and when a vibration amplitude suppression command is generated within the vibration command generation period, the vibration amplitude is gradually reduced or reduced, and within the vibration command generation period. When the vibration suppression is not completed, the first abnormality determination is performed by completing the vibration command period, and the abnormality determination is not performed within the vibration command generation period, and the vibration suppression is completed. When the vibration command period is shortened, it is determined that normal joining has been performed.
Therefore, unless abnormalities are detected, it can be considered that ultrasonic bonding has been performed normally, and after a predetermined time, the generation of ultrasonic vibrations can be stopped and the next work can be started. Occurrence of crack breakage due to imperfection or excessive vibration over time is prevented.
In addition, it is possible to suppress the amplitude on the excited side from becoming excessive, and to automatically stop the excitation operation when an abnormality occurs.
In addition, if the risk of crack breakage or abnormal bonding delamination is predicted by the second band filter, the vibration suppression is strengthened step by step to prevent the occurrence of crack breakage and abnormal bonding delamination due to strong vibration. .

Embodiment 2. FIG.
(1) Detailed Description of Configuration of Ultrasonic Bonding Control Device According to Embodiment 2 of Present Invention Hereinafter, FIG. 8 and FIG. 8 are overall configuration diagrams of an ultrasonic bonding control device according to Embodiment 2 of the present invention. FIG. 9A is a partial plan view taken along line BB of the ultrasonic bonding control apparatus of FIG. 8, FIG. 9B is a partial sectional view taken along line CC of FIG. 9A, and FIG. FIG. 10 which is an overall control block diagram of the ultrasonic bonding control apparatus will be described in detail with a focus on differences from the ultrasonic bonding control apparatus of FIGS.
In each figure, the same reference numerals indicate the same or corresponding parts, and the subscripts A and B corresponding to the reference numerals indicate the corresponding parts due to the difference in the embodiment. The main difference is that 137 is provided.
8 and 9, the ultrasonic bonding apparatus 100B is composed of first to fourth parts, and the first part is the base 110, the back column 111, and the top plate 112, like the ultrasonic bonding control apparatus of FIG. The side surface structure constituted by the U-shape is constituted by a U-shaped stationary mechanism, and a movable part and a driving part described later provided in the stationary mechanism.

The same applies to the second part, and a member 120 such as pottery, ceramics, or glass that is carried on the upper surface of the base 110 and transferred upward in FIG. It is constituted by a thin film tape-like joining member 121 which is sequentially joined to the surface at a predetermined interval, and this joining member 121 is unwound from a reel reel (not shown).
The third part is a transport stand 170 for sequentially transferring the members 120 to be joined, and the fourth part is an overall control panel 190B installed in the vicinity of the base 110.
First, a wall plate 113 for holding and fixing a balancer 136, which will be described later, is fixed to the top plate 112 in the first part, and a first vibration sensor 118 is fixed to the upper surface of the base 110 via a buffer member 117, The first vibration sensor 118 is in contact with the lower surface of the member 120 to be bonded via a non-hardening grease (not shown).
The first vibration sensor 118 is a semiconductor sensor using, for example, a piezoelectric element that responds in the band of several hundreds KHz to several MHz, and detects a pressure based on vibration generated in the bonded member 120 and outputs a voltage signal proportional to the pressure. It is generated and can be converted into mechanical vibration amplitude using a predetermined conversion coefficient.

The same applies to a first vibration sensor 172, which will be described later, but the first vibration sensor 118 is not necessary when the first vibration sensor 172 is used.
Further, the non-curing grease is, for example, a gel-like silicone grease, which improves the adhesion between the first vibration sensor 118 and the member to be joined 120 and facilitates transmission of ultrasonic vibration.
The buffer member 117 is for preventing the ultrasonic vibration from propagating to the base 110, and for example, a rubber material having a hardness of about 80 to 90 Hs is used.
The movable portion in the first part is configured in the same manner as in FIG. 1, and a contact 130 that presses the joining member 121, a first lead member 131, an ultrasonic transducer 132, and an ultrasonic vibration are amplified. The ultrasonic horn 133, the second lead member 134, and the coupling block 135 fixed to the other end of the first and second lead members 131, 134, the pressure sensor 144 and the entire movable part Is lifted with a constant thrust so as to be reduced by a balancer 136 which is an air cylinder, for example, fixed to the wall plate 113.

The contact 130 is provided with a second vibration sensor 137 for measuring the vibration state on the excitation side. In the case of the second vibration sensor 137, the first vibration sensor 172 (or 118) and Similarly, it is for detecting frictional vibration due to sliding friction, and is capable of detecting vibration signals in the band of several hundreds KHz to several MHz.
As in the case of FIG. 1, the drive unit in the first part includes a servo motor 140 having a rotation sensor 141, a press drive mechanism 143 meshingly engaged with the screw shaft 142, a press sensor 144 as a load cell, and an auxiliary The movable parts 146a and 146b, which are movable pistons of the pressing mechanisms 145a and 145b, and the pressing drive mechanism 150 fixed to the lower ends of the movable parts 146a and 146b.
A shock-absorbing member 151 made of a rubber material is bonded to the lower surface of the pressing drive mechanism 150, and a first vibration sensor 152 is embedded in the lower surface of the shock-absorbing member 151. It comes in contact with the curable grease.

However, when the first vibration sensor 172 described later and the first vibration sensor 118 described above are provided, the first vibration sensor 152 is not necessary.
Note that a partial region of the pressing drive mechanism 150 is divided into a pair of pressing plates 150a and 150b as shown in FIG. 9A and before and after the bonding member 121 pressed by the contact 130 (in FIG. 9A). The vertical position) is pressed.
As shown in FIGS. 9A and 9B, the first vibration sensor 152 is provided on the lower surface of the buffer member 151 so as to come into contact with the upper surface of the member 120 to be bonded through a non-hardening grease (not shown). ing.
The conveying base 170 as the third part is moved up and down by moving the member 120 to be joined by an elevating mechanism (not shown) and a forward / backward driving mechanism, and then moved upward in FIG. After the member 120 is placed, the elevating mechanism is further lowered again, and then moved back to the lower side in FIG. 9A, whereby the members 120 to be joined are sequentially moved forward.
A first vibration sensor 172 is provided on the upper surface of the transport base 170 via a buffer member 171, and this first vibration sensor 172 is in contact with the lower surface of the member 120 to be bonded via a non-hardening grease (not shown). It has become.
As will be described later with reference to FIG. 10, the overall control panel 190 </ b> B, which is the fourth part, includes an ultrasonic bonding control device 300 </ b> B, a conveyance control unit 310, a power supply control unit 330 </ b> B, and a drive control unit 340.

In FIG. 10, the ultrasonic bonding control device 300B is mainly configured by a program memory 302B that cooperates with the microprocessor 301, and its control functions are an abnormality detection unit 320B, a carry-in transfer command unit 603, and a press control command unit. 604 and a power supply control command unit 606.
The conveyance control unit 310 that responds to the carry-in / transfer command from the carry-in / transfer command unit 603 and the drive control unit 340 that responds to the commands from the carry-in / transfer command unit 603 and the pressing control unit 604 are the same as in FIG.
The power supply control unit 330B that responds to the power supply control command unit 606 is similar to the case of FIG. 3, but the function of gradually reducing the target output voltage or output current is not provided in the case of FIG.
The abnormality detection unit 320B includes a pair of first band-pass filters 321a and 321aa and a second band-pass filter 322a, and outputs the output signals of the first vibration sensor 172 (or 118 and 152) and the second vibration sensor 137 as the first. The first abnormality determination unit 321b and the second abnormality determination unit 322b are input.
Further, the voltage / current sensor 333 of the power supply control unit 330B is connected as an input signal to the fourth abnormality determination means 324bb for detecting a power supply abnormality.

The first vibration sensor 172 (or 118, 152) for detecting both the rubbing vibration of the frictional sliding surface and the crack breakage abnormality can detect vibrations in the frequency band from 200 KHz to 4 MHz as in the case of FIG. The first band filter 321a, the second band filter 322a, the first abnormality determination unit 321b, and the second abnormality determination unit 322b are also the same as in the case of FIG.
The fourth abnormality determination unit 324b determines whether there is a power supply abnormality depending on whether an output current corresponding to the input voltage supplied to the vibrator driving voltage source 332 is obtained.

The frequency of the detection signal from the second vibration sensor 137 is set to, for example, 20 KHz, which is equal to the frequency of the output voltage of the vibrator driving voltage source 332, and the first band filter 321aa is different from the first band filter 321a. If so, it is possible to more accurately determine the presence or absence of equipment abnormality by comparing the operating state of the voltage / current sensor 333 and the detection output of the second vibration sensor 137.
However, in the following description, it is assumed that the second vibration sensor 137 also operates in the same frequency band as the first vibration sensor 172 (or 118, 152) and detects the friction vibration of the sliding friction surface.
The old data update storage means 325a is a pair of multi-stage shift registers, which sequentially stores the output signal of the first vibration sensor 172 (or 118, 152) obtained from the first bandpass filter 321a, and has a predetermined time or more. The old data overflows and disappears, the output signal of the second vibration sensor 137 obtained from the first bandpass filter 321aa is sequentially stored, and the old data over a predetermined time overflows and disappears. Yes.

The new and old data comparison means 325b compares the latest data stored in the old data update storage means 325a with the old data before a predetermined time to determine whether there is a change in the old and new data.
As will be described later with reference to FIGS. 11G and 11F, the joining completion determination unit 325B has a signal amplitude of frictional vibration detected by the first and second vibration sensors from less than the first determination thresholds H11 and h11. After the above change, it is determined that the ultrasonic bonding has been completed by detecting that the value has decreased below the predetermined lower thresholds H13 and h13.
If any of the first, second, and fourth abnormality determination means 321b, 322b, and 324bb makes an abnormality determination, or if the bonding completion determination unit 325c does not make a bonding completion determination within a predetermined time, an abnormality processing command The generation unit 618B generates an abnormality processing command, and performs abnormality notification, storage and storage of abnormality occurrence information, and automatic stop of the apparatus.
When none of the first, second, and fourth abnormality determination means 321b, 322b, and 324bb makes an abnormality determination, a manual stop command (not shown) is not generated, but the continuation command generation unit 614 continues. A continuation command for permitting operation is generated.

The joining completion determination unit 325B further includes a premature abnormality determination unit 325d, and the elapsed time from when the excitation to the contact 130 is started until the output signal data changes from rising to decreasing and performing the joining completion determination. Is less than the predetermined minimum time, it is determined that the joining is abnormal, or at least the joining completion judgment is invalidated.
However, the predetermined minimum time is the statistical minimum time or minimum energy amount required to perform normal bonding in multiple ultrasonic bondings that have been experimentally measured in advance. It is determined by measuring the elapsed time after the start of vibration or by determining whether the output energy accumulated with the passage of time has reached the predetermined minimum amount of energy generated by the vibrator drive voltage source 332. ing.

(2) Detailed Description of Action / Operation of Ultrasonic Bonding Control Device According to Embodiment 2 of the Invention Hereinafter, ultrasonic bonding control according to Embodiment 2 of the present invention configured as shown in FIGS. An outline of the control operation of the apparatus will be described based on the time chart shown in FIG. 11 with a focus on differences from the case of FIG.
FIG. 11A shows the work loading / unloading operation as in FIG. 4A. In the case of FIG. 4, the member 120 to be joined is transferred by the upper transfer moving mechanism 160. On the other hand, in the case of FIG. 11, it is different in that the transfer is performed by the transport stand 170 provided below the member 120 to be joined.
FIG. 11B shows the raising / lowering operation of the contact 130 similarly to FIG. 4B.
FIG. 11C shows the raising / lowering operation of the pressing drive mechanism 150 in the same manner as FIG.
FIG. 11D shows the pressing operation of the contact 130 as in FIG.

FIG. 11E shows the peak value of the output voltage of the vibrator drive voltage source 332 as in FIG. 4E, and the subsequent time zone 401d when the joining member 121 is pressed to a predetermined pressure by the contact 130. Is started at the first time 401e, and reaches a third time 403e while maintaining a predetermined output voltage. From the third time 403e to a fourth time 404e, which is a joining completion time described later, the output voltage is gradually reduced. The voltage gradually increases and then decreases rapidly after the fourth time 404e, and the output voltage is zero before the fifth time 405e, which is a vibration completion time described later.
The vibration command generation period, which is the period from the vibration start time 401e to the vibration completion time 405e, is the statistical maximum time Tmax required for normal bonding in a plurality of ultrasonic bondings that have been experimentally measured in advance. Alternatively, the maximum energy amount is applied, and when the command generation time arrives, the elapsed time is measured, or the output energy accumulated with the passage of time of the generated output of the vibrator drive voltage source 332 becomes the predetermined maximum energy amount. Judgment is made based on whether or not it has been reached.

The shortest command generation period, which is the period from the vibration start time 401e to the gradual increase start time 403e, is the statistical minimum time Tmin or minimum required for performing normal bonding in a plurality of ultrasonic bondings experimentally measured in advance. The amount of energy is applied, and when the shortest command generation time arrives, the elapsed time is measured, or the output energy accumulated with the passage of time of the generated output of the vibrator drive voltage source 332 reaches a predetermined maximum energy amount. Judgment is made based on whether or not it was done.
After the vibration completion time 405e, the process moves to the sixth time zone 406a via the preceding time zones 406d, 406c, and 406b.
FIG. 11F shows the signal amplitude of the rubbing vibration detected by the second vibration sensor 137 provided on the contact 130 side.
FIG. 11G shows the signal amplitude of the rubbing vibration detected by the first vibration sensor 172 (or 118, 152) provided on the joined member 120 side as in FIG. 4G.
11 (F) and 11 (G), the first times 401f and 401g are vibration start times, the second times 402f and 402g are sliding end times due to contamination of the joint surfaces, and the fourth times 404f and 404g are joint start times. Yes, the point in time when the output signals of the first and second vibration sensors decrease to the lower thresholds H13 and h13 is indicated by the joining completion time 404e shown in FIG.

11 (E), (F), (G) and FIGS. 4 (E), (F), (G) are mainly different from each other in that the drive voltage for the ultrasonic transducer 132 is changed from the middle in FIG. It is gradually increased, and this is promoted when the completion of joining is delayed.
Such gradual increase control can be applied not only to the embodiment but also to the above-described first embodiment and the third embodiment described later.
In the case of FIG. 4E, the second vibration sensor 137 is not provided, and the detection output of the first vibration sensor 172 (or 118, 152) exceeds the first determination threshold value H11. While the applied voltage to the ultrasonic transducer 132 is gradually decreased after a predetermined delay time Δτ, in the case of FIG. 11E, the joining completion judging means 325B performs the joining completion judgment. That is, the applied voltage to the ultrasonic transducer 132 is suddenly decreased and stopped at the 4th time 404e.
However, even in the case of FIG. 11E, the applied voltage to the ultrasonic transducer 132 may not be suddenly reduced and stopped gradually as indicated by the dotted line.

Next, the ultrasonic bonding control apparatus according to Embodiment 2 of the present invention configured as shown in FIGS. 8 to 10 is different from FIGS. 6 and 7 on the basis of the flowcharts shown in FIGS. Details of the control operation will be described focusing on the points.
In FIG. 12, step 600 is a start step of the control operation of the microprocessor 301 which is a main component of the ultrasonic bonding control apparatus 300B, but steps 600 to 606 and steps 613 to 615 are the same as FIG. Since the operation is performed, the description is omitted.
Step 607 following step 606 is a step in which step 606 is an excitation completion timing determination step for determining a command generation period for generating a drive voltage. This command generation period is a plurality of times that have been experimentally measured in advance. The statistical maximum time or maximum energy amount required for normal joining in the sonic joining is applied, and the arrival of the command generation time is measured by measuring the elapsed time or the generation of the vibrator driving voltage source 332. It is determined whether or not the output energy accumulated over time has reached a predetermined maximum energy amount. If not reached, NO is determined and the process proceeds to process block 620B. If reached, YES is determined. A determination is made and the process proceeds to step 608.

The process block 620B is a joint quality determination process for determining whether or not a joint is acceptable and whether or not an abnormality has occurred, as will be described later with reference to FIG. 13. The subsequent process 617B reads whether or not the process 628 in FIG. If an abnormality has occurred, a determination of YES is made and the process proceeds to step 618B. If no abnormality has occurred, a determination of NO is made and the process proceeds to step 609a.
Step 609a reads out whether or not step 627 in FIG. 13 stores the joint completion determination. If the completion determination is not stored, the determination is NO, the process returns to step 604, and the completion determination is stored. Step 612b is a determination step for making a determination of YES and proceeding to step 612b. In step 612b, a command to suddenly stop the target output voltage or output current is generated for the power supply control unit 330B in FIG. It is a step.
Step 618B is an abnormality generation processing step that notifies at least the occurrence of abnormality, stores and stores abnormality occurrence information, and then proceeds to step 612a.
In step 608, since the determination of YES is made in step 607, the abnormality determination is not performed within the predetermined vibration period, but the bonding completion determination is not obtained. After the determination is made and at least the occurrence of the overtime abnormality is stored, the process proceeds to step 612a.
Step 612a is a step of issuing a drive stop command to the ultrasonic transducer 132 to the power supply control unit 330B, and then proceeds to step 613.

In FIG. 13, step 621 is a subroutine program start step indicated by a process block 620B in FIG. 12, and step 629 provided after a series of control programs is a return step that shifts to step 617B in FIG. .
Step 622a executed subsequent to step 621 corresponds to the fourth abnormality determination means 324bb shown in FIG. 10, and if there is a power supply abnormality, a determination of YES is made and the process proceeds to step 628, and there is no power supply abnormality. If NO, the process proceeds to step 622b.
Step 622b corresponds to the second abnormality determination means 322b shown in FIG. 10, and when a crack breakage abnormality or a bond separation abnormality occurs, a determination of YES is made and the process proceeds to step 628, where an abnormality occurs. If not, the determination step is NO and the process proceeds to step 624a.

The process block 623 constituted by the process 624a and the process 625a is the previous data update storage means 325a in FIG. 10 reading the first data and the second data obtained from the pair of first bandpass filters 321a and 321aa before a predetermined time. The old data is a step of performing a read shift to the overflowing multistage shift register.
In subsequent step 624b, the new and old first data stored in step 624a are compared in size, and the process proceeds to step 624c.
In step 624c, as a comparison result in step 624b, it is determined whether or not the first data has increased to be equal to or higher than the first determination threshold value H11 and eventually becomes less than the lower limit threshold value H13. If the increase / decrease is not confirmed, NO is determined and the process proceeds to step 629, whereby the time immediately before the disappearance of the signal amplitude in FIG. 11 (G) is detected.
In subsequent step 625b, the new and old second data stored in step 625a are compared in size, and the process proceeds to step 625c.
In step 625c, it is determined whether the second data has increased to be equal to or higher than the first determination threshold value h11 as a comparison result in step 625b and eventually becomes less than the lower limit threshold value h13. If the increase / decrease is not confirmed, NO is determined and the process proceeds to step 629, whereby the time immediately before the disappearance of the signal amplitude in FIG. 11 (F) is detected.
However, in the case of having only one of the first vibration sensor 172 (or 118, 152) and the second vibration sensor 137, the step 624a, the step 624b, the step 624c, the step 625a, Either step 625b or step 625c is omitted.

Step 626 corresponds to the premature abnormality determination unit 325d of FIG. 10, and when the elapsed time from the start of vibration to the determination of completion of joining is too short, a determination of YES is made and the process proceeds to step 628 or step 629, and a predetermined If the minimum time has been exceeded, a NO determination is made and the process proceeds to step 627.
Step 627 is a step in which the joining completion determination is stored and the process proceeds to step 629, and step 628 is a step in which the occurrence of an abnormality is stored and the process proceeds to step 629.
When Step 627 and Step 628 do not store the completion of bonding and the occurrence of abnormality, in FIG. 12, from Step Block 620B to Step 617B (NO determination), Step 609a (NO determination), Step 604, Step 605, and Step Through step 606 and step 607 (determination of NO), the process block 620B is repeatedly executed. If the step 607 eventually makes a determination of YES, the process proceeds to step 608, and the routine is exited. If it has been performed, the process proceeds to step 618B to exit the circuit routine, and if it is determined that the joining is completed, the process proceeds to step 612b to exit the circuit routine.

(3) Key Points and Features of Ultrasonic Bonding Control Device According to Embodiment 2 As is clear from the above description, the ultrasonic bonding control device according to Embodiment 2 of the present invention is contacted by the pressing drive mechanism 143. The joining member 121 is pressed into contact with the joined member 120 by the child 130, and an ultrasonic vibrator 132 to which the output voltage of the vibrator driving voltage source 332 is applied is connected to the contact 130, and is parallel to the pressure contact surface. The ultrasonic bonding control apparatus 300B for the ultrasonic bonding apparatus 100B is configured to bond the bonding member 121 and the member to be bonded 120 by ultrasonic vibration in the direction in which the bonding member 121 is pressed by the contact 130. The detection output of the first vibration sensor 172 (or 118, 152) that is in contact with the member 120 to be joined, or An abnormality detection unit 320B that responds to the detection output of the second vibration sensor 137 provided on the contact 130 side is provided, and the abnormality detection unit 320B is the first or second vibration sensor 172 (or 118, 152). 137 is a lower band in the entire frequency band detectable by 137, and is a first band filter 321a and 321aa for extracting an output signal in the first frequency band, and an upper band in the entire frequency band. A second band filter 322a for extracting an output signal in the second frequency band, and a first abnormality determination unit 321b and a second abnormality determination unit 322b.

  The center frequency of the first band-pass filters 321a and 321aa is higher than the frequency of the output voltage generated by the vibrator driving voltage source 332, and the joining member 121 and the joined member 120 are pressed to generate friction. The frequency band of rubbing vibration accompanying sliding is overlapped, and the center frequency of the second band-pass filter 322a is determined by the material and dimensions of the member to be joined 120 or the joining member 121 to be applied. Depending on the natural vibration frequency at the time of occurrence, selection switching or variable adjustment is performed, and the first abnormality determination means 321b is the first or second vibration sensor obtained via the first bandpass filters 321a and 321aa. 172 (or 118, 152) and 137 output signals are monitored, and this output is output in a predetermined time range after the start of vibration. When the signal amplitude of the signal does not reach the first determination threshold value H11 · h11, it is determined that the connection is defective, and the second abnormality determination unit 322b determines whether the first or second vibration sensor 172 ( Or 118, 152) When the signal amplitude of at least one of the output signals of 137 exceeds the second limit amplitude H22 in the second frequency band, the second storage circuit temporarily stores the signal information. On the basis of the above, it is determined that a crack breakage or a bond peeling abnormality has occurred in at least one of the bonded member 120 or the bonded member 121.

  The abnormality detection unit 320B further includes a joining completion determination unit 325B, and the joining completion determination unit 325B is an output of the first vibration sensor 172 (or 118, 152) obtained through the first band-pass filter 321a. For at least one of the signal data or the output signal data of the second vibration sensor 137 obtained via the first bandpass filter 321aa, the signal amplitude is compared with the old and new data with a predetermined time difference. After the above change from less than one determination threshold value H11, h11 to above, it is determined that the ultrasonic bonding has been completed by detecting a decrease to less than a predetermined lower limit threshold value H13, h13.

As described above, it is determined that the ultrasonic joining is completed when the signal amplitude of the output signal of the first or second vibration sensor changes from increasing to decreasing in time series and becomes less than a predetermined lower limit value. It has become.
Therefore, both the generation of sliding friction and the disappearance of sliding friction due to the completion of joining are judged in combination, and the joining completion judgment is made, and it is difficult to detect materials and frictional heat that hardly undergo dimensional changes due to ultrasonic joining. Even with ultrasonic bonding to materials, it is possible to accurately determine the completion of bonding.

  The joining completion determination means 325B further has an elapsed time from when the excitation to the contact 130 is started to when the output signal data changes from rising to decreasing to determine the joining completion is less than a predetermined minimum time. In such a case, it is determined that the bonding is abnormal, or at least the bonding completion determination is invalidated, and the predetermined minimum time is necessary for performing normal bonding in a plurality of ultrasonic bondings that have been experimentally measured in advance. The minimum time or the minimum amount of energy is applied, and the arrival of the minimum time is measured by measuring the elapsed time after the start of excitation, or the generated output of the vibrator driving voltage source 332 with time. The accumulated output energy is determined based on whether or not a predetermined minimum energy amount has been reached.

As described above, when the time when the joining completion determination is performed is too early, it is a joining abnormality or at least the joining completion determination is invalidated.
Accordingly, since the time period during which the joining completion determination is valid is limited, the probability that an erroneous joining determination is performed even if the signal output temporarily increases due to noise malfunctioning is improved and lowered.

  In the ultrasonic bonding control method using the ultrasonic bonding control apparatus 300B according to the second embodiment of the present invention, the vibration after the pressing force of the contact 130 against the bonding member 121 becomes a predetermined value or more. A power source control command generation step 606 for generating an output voltage of the child drive voltage source 332 and setting the output voltage to zero after a predetermined time, and a timing for releasing the pressing force of the contact 130 by setting the output voltage to zero. The vibration completion time determination step 607, the abnormality determination step 617B that responds to the second abnormality determination means 322b, the joint completion determination step 620B that executes the bonding completion determination means 325B, and the abnormality determination step 617B cause crack breakage. Or an abnormality processing step 618B that performs at least an abnormality notification when a bonding peeling abnormality is detected, and the excitation completion timing is provided. The command generation period in the fixed step 607 is the statistical maximum time or maximum energy amount required for performing normal bonding in a plurality of ultrasonic bondings that have been experimentally measured in advance. The arrival is determined by measuring the elapsed time or by determining whether the output energy accumulated with the passage of time has reached the predetermined maximum energy amount or not, and the abnormality determining step. When 617B makes an abnormality determination and the bonding completion determination step 620B determines that the bonding is completed, the vibration operation can be stopped in a time shorter than a preset maximum time. Thus, any determination result of the abnormality determination and the bonding completion determination cannot be obtained within the command generation period in the vibration completion timing determination step 607. Sometimes the first abnormality determination is made, overtime abnormality processing including at least abnormality notification is carried out.

As described above, the abnormality detection method using the ultrasonic bonding control device according to the second embodiment of the present invention includes the power supply control command generation step, the vibration completion timing determination step, the abnormality determination step, and the bonding completion determination step. If the abnormality determination or welding completion determination is performed within the vibration command generation period, the vibration operation is stopped and the abnormality determination and bonding completion are performed within the vibration command generation period. When none of the determination results is obtained, the time excess abnormality process is performed.
Therefore, it is possible to continue joining normally after completion of normal joining, or to perform abnormality processing according to the abnormality content when an abnormality is detected, or according to an overtime determination where neither determination of completion of joining or occurrence of abnormality can be obtained When the normal joining is completed, the generation of ultrasonic vibration is stopped, and the vibration extension time after the completion of joining is shortened, resulting in the occurrence of crack breakage and joining delamination due to excessive vibration application. Is prevented.

In the power supply control command generation step 606, the output voltage or output current of the vibrator drive voltage source 332 is maintained at a constant value in the initial period immediately after the start of generation of the output voltage of the vibrator drive voltage source 332. The output voltage or output current of the vibrator driving voltage source 332 is gradually increased with the passage of time corresponding to the minimum junction time or the minimum energy amount obtained by the preliminary experiment, and the output suppression start or generation stop timing As a result, the output voltage or output current of the vibrator drive voltage source 332 is gradually reduced or stopped.
As described above, the output voltage or output current is controlled to have a characteristic of gradually increasing after maintaining a constant value.
Therefore, when the completion of joining is delayed, the excitation amplitude can be gradually increased to promote joining.

Embodiment 3 FIG.
(1) Detailed Description of Configuration of Ultrasonic Bonding Control Device According to Embodiment 3 of the Invention Hereinafter, referring to FIG. 14, which is an overall control block diagram of an ultrasonic bonding control device according to Embodiment 3 of the present invention, The configuration will be described in detail with a focus on differences from the ultrasonic bonding control apparatus of FIG.
In each figure, the same reference numerals indicate the same or corresponding parts, and the subscripts B and C for the reference numerals indicate the corresponding parts due to the differences in the embodiments. The major difference is that the voltage is gradually decreased and the applied voltage to the ultrasonic transducer 132 is a constant value that does not gradually increase from the intermediate period.
In FIG. 14, the overall configuration of the ultrasonic bonding apparatus 100C is the same as that in FIG. The functions are roughly divided into an abnormality detection unit 320C, a carry-in / transfer command unit 603, a press control command unit 604, and a power supply control command unit 606, and the vibration sensor is a first vibration sensor 172 ( Or 118, 152) and the second vibration sensor 137 on the excitation side are used in combination.
A transfer control unit 310 that responds to a carry-in transfer command from the carry-in transfer command unit 603 controls the work transfer mechanism 311, and a drive that responds to a carry-in transfer command from the carry-in transfer command unit 603 and a press command from the press control command unit 604. The control unit 340 controls the servo motor 140, and the power control unit 330 C that responds to the vibration control command from the power control command unit 606 drives the ultrasonic transducer 132.

As a difference from the ultrasonic bonding control apparatus shown in FIG. 10, a relative abnormality determination means 326b is added to the abnormality detection unit 320C.
The relative abnormality determination means 326b is a relative output signal of the first band filter 321a connected to the first vibration sensor 172 (or 118, 152) and the first band filter 321aa connected to the second vibration sensor 137. Relative abnormality determination is performed when the ratio is outside the range of the predetermined upper and lower limit values, and is applicable to the ultrasonic bonding control apparatus shown in FIG.
The first vibration sensor 172 (or 118, 152) is highly sensitive to rubbing vibration generated on the joint surface if the non-hardening grease is properly managed to maintain adhesion to the member 120. Can be detected.
In addition, the detection of rubbing vibration by the second vibration sensor 137 has low sensitivity, but the mating surface is fixed because it is attached and fixed to the contact 130 via non-hardening grease, and has stable adhesion. .
The joining start determination unit 325e added to the abnormality detection unit 320C includes the first vibration sensor 172 (or 118, 152) or the second vibration obtained via the first band filter 321a or the first band filter 321aa. When the amplitude of the output signal of the sensor 137 exceeds first determination threshold values H11 and h11 shown in FIGS. 15G and 15F, which will be described later, and then decreases to the decrease start determination threshold values H12 and h12, the bonding is performed. A start determination signal is generated, and an output voltage gradual decrease command is supplied to the vibrator drive voltage source 332.
The premature abnormality determination unit 325d shown in FIG. 10 is applicable to FIG. 14, but the description is omitted.

Next, with respect to the ultrasonic bonding control apparatus according to the third embodiment of the present invention configured as shown in FIG. 14, based on the time chart shown in FIG. An outline of the control operation will be described.
FIG. 15A shows the work loading / unloading operation as in FIG. 4A. In the case of FIG. 4, the workpiece 120 is transferred by the upper transfer moving mechanism 160. On the other hand, in the case of FIG.
FIG. 15B shows the raising / lowering operation of the contact 130 as in FIG. 4B.
FIG. 15C shows the raising / lowering operation of the pressing drive mechanism 150 as in FIG. 4C.
FIG. 15D shows the pressing operation of the contact 130 as in FIG. 4D.
Therefore, FIGS. 15A to 15D and FIGS. 11A to 11D are the same operation.

  FIG. 15E shows the peak value of the output voltage of the vibrator drive voltage source 332 as in FIG. 4E, and the subsequent time zone 401d when the joining member 121 is pressed to a predetermined pressure by the contact 130. The vibration starts at a first time 401e that follows, and the output voltage keeps a constant value until a gradually decreasing start time 404ee, which will be described later. The output voltage gradually decreases until a fourth time 404e that is a junction completion time, and after the fourth time 404e. The vibration suppression operation is completed, the output voltage becomes a predetermined lower limit voltage (usually 0 V), and the output voltage is zero before the fifth time 405e, which is a vibration completion time described later.

The vibration command generation period, which is the period from the vibration start time 401e to the vibration completion time 405e, is the statistical maximum time Tmax required for normal bonding in a plurality of ultrasonic bondings that have been experimentally measured in advance. Alternatively, the maximum energy amount is applied, and when the command generation time arrives, the elapsed time is measured, or the output energy accumulated with the passage of time of the generated output of the vibrator drive voltage source 332 becomes the predetermined maximum energy amount. Judgment is made based on whether or not it has been reached.
After the vibration completion time 405e, the process moves to the sixth time zone 406a via the preceding time zones 406d, 406c, and 406b.
FIG. 15F shows the signal amplitude of the rubbing vibration detected by the second vibration sensor 137 provided on the contact 130 side.
FIG. 15G shows the signal amplitude of the rubbing vibration detected by the first vibration sensor 172 (or 118, 152) provided on the bonded member 120 side as in FIG. 4G.
As a main difference between FIGS. 15E, 15F, and 15G and FIGS. 4E, 4F, and 4G, the second vibration sensor 137 is provided in the case of FIG. 4E. However, the applied voltage to the ultrasonic transducer 132 is gradually decreased after a predetermined delay time Δτ after the detection output of the first vibration sensor 172 exceeds the first determination threshold value H11. On the other hand, in the case of FIG. 15E, the applied voltage to the ultrasonic transducer 132 starts to be gradually reduced at the fourth 'time 404ee when the joining start determining unit 325e determines the joining start, and the joining completion determining unit 325c is completed. The applied voltage to the ultrasonic transducer 132 is stopped at the fourth time 404e when the determination is made.

  Further, as a main difference between FIGS. 15E, 15F, and 11G and FIGS. 11E, 11F, and 11G, in the case of FIG. Although the voltage applied to the ultrasonic transducer 132 is suddenly reduced and stopped at the fourth time 404e when the 325c determines the completion of the joining, the gradual reduction is not started at the joining start time. In the case of FIG. After the applied voltage to the ultrasonic transducer 132 is gradually reduced, it suddenly stops.

(2) Detailed Description of Action / Operation of Ultrasonic Bonding Control Device According to Embodiment 3 of the Invention Next, an ultrasonic bonding control device according to Embodiment 3 of the invention configured as shown in FIG. With reference to the flowchart shown in FIG. 16, the details of the control operation will be described with a focus on the differences from FIG. 6 and FIG.
In FIG. 16, a process 600 is a start step of the control operation of the microprocessor 301 which is a main constituent element of the ultrasonic bonding control apparatus 300C, but the process 600 to the process 606 and the process 613 to the process 615 are shown in FIG. Since the operation is the same as 12, the description is omitted.
Step 607 following step 606 is a step in which step 606 is an excitation completion timing determination step for determining a command generation period for generating a drive voltage. This command generation period is a plurality of times that have been experimentally measured in advance. The statistical maximum time or maximum energy amount required for normal joining in the sonic joining is applied, and the arrival of the command generation time is measured by measuring the elapsed time or the generation of the vibrator driving voltage source 332. It is determined whether or not the output energy accumulated over time has reached a predetermined maximum energy amount. If not, NO is determined and the process proceeds to process block 620C. A determination is made and the process proceeds to step 608.

The process block 620C is a bonding quality determination process for determining whether or not a bonding is good and whether or not an abnormality has occurred as will be described later with reference to FIG. 17, and the subsequent process 617C reads whether or not the process 628 in FIG. If an abnormality has occurred, a determination of YES is made and the process proceeds to step 618C. If no abnormality has occurred, a determination of NO is made and the process proceeds to step 609a.
Step 609a reads whether or not step 627c in FIG. 17 stores the joining start determination, and if it does not store the start determination, it makes a NO determination, returns to step 604, and stores the start determination. A determination step of determining YES and proceeding to step 619, step 619 is a step after generating a command to suppress vibration by gradually reducing the target output voltage or output current to the power supply control unit 330C of FIG. This is a step for returning to 609a.

Step 609b reads out whether or not the step 637 in FIG. 17 stores the joint completion determination. If the completion determination is not stored, the determination is NO and the process returns to step 604, and the completion determination is stored. Step 612b is a determination step for making a determination of YES and proceeding to step 612b. In step 612b, a command for suddenly reducing and stopping the target output voltage or output current is issued to the power supply control unit 330C in FIG. It is a step.
Step 618C is an abnormality occurrence processing step of notifying at least occurrence of abnormality, storing and storing abnormality occurrence information, and then proceeding to step 612a.

In step 608, since the determination of YES is made in step 607, the abnormality determination is not performed within the predetermined vibration period, but the bonding completion determination is not obtained. This is a step in which the determination is made and at least the occurrence of the time excess abnormality is stored and then the process proceeds to step 612a.
Step 612a is a step of issuing a drive stop command to the ultrasonic transducer 132 to the power supply control unit 330C, and then proceeds to step 613.
In addition, when Step 627c and Step 628 in FIG. 17 do not store the start of joining and occurrence of abnormality and Step 637 does not store the completion of joining, Steps 620C to 617C (NO determination) in FIG. After step 609a (NO determination) and step 604, step 605, step 606 and step 607 (NO determination), the process block 620C is repeatedly executed, the joining start storage is performed, and the determination of step 609a is YES. A circulation loop including step 619 is formed so that the output voltage gradually decreases in step 606.
Eventually, when the completion of joining is performed and the determination in step 609b becomes YES, the circulation flow is exited and the process proceeds to step 612b. If the process 607 determines YES in the state where the joining is not completed and the process is not completed, the process proceeds to process 608 to exit the cyclic routine, and it is determined that the first abnormality has occurred.

17, step 621 is a subroutine program start step indicated by a process block 620C in FIG. 16, and step 629 in FIG. 17 provided after a series of control programs is a return step to shift to step 617C in FIG. It has become.
Step 622a executed subsequent to step 621 corresponds to the fourth abnormality determining means 324bb shown in FIG. 14, and if there is a power supply abnormality, a determination of YES is made and the process proceeds to step 628, and there is no power supply abnormality. If NO, the process proceeds to step 622b.

Step 622b corresponds to the second abnormality determination means 322b shown in FIG. 14, and when a crack breakage abnormality or a bond separation abnormality occurs, a determination of YES is made and the process proceeds to step 628, where an abnormality occurs. If not, it is a determination step of determining NO and proceeding to step 622c.
Step 622c corresponds to the relative abnormality determining means 326b shown in FIG. 14, and when a relative abnormality occurs, a determination of YES is made and the process proceeds to step 628, and when there is no abnormality, a determination of NO is made. This is a determination step that moves to step 624a.

The process block 623 constituted by the process 624a and the process 625a is the previous data update storage means 325a in FIG. 14 reads the first data and the second data obtained from the pair of first bandpass filters 321a and 321aa before a predetermined time. The old data is a step of performing a read shift to the overflowing multistage shift register.
In subsequent step 624b, the new and old first data stored in step 624a are compared in size, and the process proceeds to step 624c.
In step 624c, as a comparison result in step 624b, it is determined whether or not the first data has increased to the first determination threshold value H11 or more and eventually has decreased to the decrease determination threshold value H12 or less. Step 625b is a determination step in which NO is determined if increase / decrease is not confirmed, and step 634b in FIG. 17 is entered, and as a result, the gradual decrease start time 404ee in FIG. 15 (E) is detected. .

In subsequent step 625b, the new and old second data stored in step 625a are compared in size, and the process proceeds to step 625c.
In step 625c, it is determined whether the second data has increased to the first determination threshold value h11 or more as a comparison result in step 625b, and eventually has become the decrease determination threshold value h12. If the increase / decrease is confirmed, a determination of YES is made. Step 627c is a determination step in which NO is determined if increase / decrease is not confirmed, and step 634b in FIG. 17 is entered, whereby the gradual decrease start time 404ee in FIG. 15 (E) is detected. .

In the case where only one of the first vibration sensor 172 (or 118, 152) and the second vibration sensor 137 is provided, the process 624a, the process 624b, the process 624c, or the process 625a, the process 625b, the process 625c. Either one is omitted.
Step 627c is a step in which the joining start determination is stored and the process proceeds to step 634b in FIG. 17, and step 628 is a step in which the occurrence of abnormality is stored and the process proceeds to step 629.
In step 634b of FIG. 17, the new and old first data stored in step 624a are compared in size, and the process proceeds to step 634c.
In step 634c, it is determined whether or not the first data has increased to a value equal to or higher than the first determination threshold value H11 as a comparison result in step 634b and eventually becomes less than the lower limit threshold value H13. If the increase / decrease is not confirmed, NO is determined and the process proceeds to step 629, whereby the joining completion time 404e in FIG. 15 (E) is detected.

In subsequent step 635b, the new and old second data stored in step 625a are compared in size, and the process proceeds to step 635c.
In step 635c, it is determined whether the second data has increased to the first determination threshold value h11 or more as a comparison result in step 635b, and eventually becomes less than the lower limit threshold value h13. If increase / decrease is confirmed, a determination of YES is made. If the increase / decrease is not confirmed, NO is determined and the process proceeds to step 629, whereby the joining completion time 404e in FIG. 15 (E) is detected.
In the case of one having only one of the first vibration sensor 172 (or 118, 152) and the second vibration sensor 137, either step 634b or step 634c or step 635b or step 635c is omitted. It has become so.

(3) Key Points and Features of Ultrasonic Bonding Control Device According to Embodiment 3 of the Invention As is apparent from the above description, the ultrasonic bonding control device according to Embodiment 3 of the present invention is pressed from the pressing drive mechanism 143. The contact member 130 presses the joining member 121 to the member 120 to be joined, and the contact member 130 is connected to the ultrasonic vibrator 132 to which the output voltage of the vibrator driving voltage source 332 is applied. The ultrasonic bonding control apparatus 300C for the ultrasonic bonding apparatus 100C is configured to bond the bonding member 121 and the member to be bonded 120 by ultrasonic vibration in a direction parallel to the surface, and the bonding member 121 is the contactor. This is a detection output of the first vibration sensor 172 (or 118, 152) that is in contact with the bonded member 120 when pressed by the member 130. Or an abnormality detection unit 320C that responds to the detection output of the second vibration sensor 137 provided on the contact 130 side, and the abnormality detection unit 320C includes the first or second vibration sensor 172 (or 118). 152) and a pair of first band-pass filters 321a and 321aa for extracting an output signal of the first frequency band, which is a lower band in the entire frequency band detectable by 137, and in the entire frequency band. And a second band filter 322a for extracting an output signal in the second frequency band, which is the upper band of the first band, and first and second abnormality determination means 321b and 322b.

  The center frequency of the pair of first band pass filters 321a and 321aa is higher than the frequency of the output voltage generated by the vibrator driving voltage source 332, and the joining member 121 and the joined member 120 are pressed. The center frequency of the second band-pass filter 322a overlaps with the frequency band of rubbing vibration caused by frictional sliding, and the crack breakage or the damage determined by the material and dimensions of the member to be joined 120 or the joining member 121 applied thereto. The first abnormality determination means 321b is switched or variably adjusted in accordance with the natural vibration frequency at the time of occurrence of bond separation, and the first abnormality determination means 321b is obtained through the pair of first band filters 321a and 321aa. The output signals of the vibration sensors 172 (or 118, 152) and 137 of the second are monitored, and in a predetermined time range after the start of vibration If the signal amplitude of the output signal does not reach the first determination threshold values H11 and h11, it is determined that the connection is defective, and the second abnormality determination unit 322b determines the first or second vibration. When the signal amplitude of at least one of the output signals of the sensor 172 (or 118, 152), 137 exceeds the second limit amplitude H22 in the second frequency band, the second storage circuit temporarily stores the amplitude, Based on this stored information, it is determined that a crack breakage or a bond peeling abnormality has occurred in at least one of the bonded member 120 or the bonded member 121.

  The abnormality detection unit 320C further includes a joining completion determination unit 325C, and the joining completion determination unit 325C outputs the first vibration sensor 172 (or 118, 152) obtained through the first band-pass filter 321a. For at least one of the signal data or the output signal data of the second vibration sensor 137 obtained via the first bandpass filter 321aa, the signal amplitude is compared with the old and new data with a predetermined time difference. After the above change from less than one determination threshold value H11, h11 to above, it is determined that the ultrasonic bonding has been completed by detecting a decrease to less than a predetermined lower limit threshold value H13, h13.

As described above, it is determined that the ultrasonic joining is completed when the signal amplitude of the output signal of the first vibration sensor or the second vibration sensor changes from increasing to decreasing in time series and becomes less than the predetermined lower threshold. It is supposed to be.
Therefore, both the generation of sliding friction and the disappearance of sliding friction due to the completion of joining are judged in combination, and the joining completion judgment is made, and it is difficult to detect materials and frictional heat that hardly undergo dimensional changes due to ultrasonic joining. Even with ultrasonic bonding to materials, it is possible to accurately determine the completion of bonding.

  The abnormality detection unit 320C further includes a first bandpass filter 321aa to which an output signal of the second vibration sensor 137 is input and a relative abnormality determination unit 326b. The second vibration sensor 137 is connected to the contact 130. It is a vibration sensor that is installed close to detect frictional vibrations caused by the sliding of the joining member 121 and the joined member 120 by being pressed, and the center frequency of the first bandpass filter 321aa is The relative abnormality determining means 326b is in the first vibration sensor 172 (or 118, 152) within the frequency band of the frictional vibration accompanying the sliding of the joining member 121 and the member 120 to be joined. Output signals of the first band-pass filter 321a connected to the second vibration sensor 137 and the first band-pass filter 321aa connected to the second vibration sensor 137. Is adapted to perform relative abnormality determination by the ratio of the relative is outside of predetermined upper and lower limit values.

As described above, in order to detect frictional vibration due to sliding friction of the joint surface, the output signal of the second vibration sensor provided on the vibration mechanism side is monitored via the first bandpass filter, and the first vibration sensor By comparing the signal amplitude of the rubbing vibration detected by the second vibration sensor, the abnormality of the first vibration sensor or the second vibration sensor is detected.
Therefore, when a relative abnormality occurs, the first vibration sensor that is likely to be contaminated by non-hardening grease is suspected, but even if there is an abnormality on the second vibration sensor side, the first vibration sensor or This can be detected as an abnormality of the second vibration sensor.

  In the ultrasonic bonding control method using the ultrasonic bonding control device 300C according to the third embodiment of the present invention, the vibration after the pressing force of the contact 130 against the bonding member 121 becomes a predetermined value or more. A power source control command generation step 606 for generating an output voltage of the child drive voltage source 332 and setting the output voltage to zero after a predetermined time, and a timing for releasing the pressing force of the contact 130 by setting the output voltage to zero. An excitation completion time determination step 607, an abnormality determination step 617C responsive to the second abnormality determination means 322b, a joining completion determination step 620C executing the joining completion determination means 325C, and the first bandpass filter 321a, 321aa detects the occurrence of rubbing vibration, and when the signal amplitude of the rubbing vibration starts to decrease with the start of joining, the output of the vibrator driving voltage source 332 starts. A vibration suppression start step 619 gradually decreasing the voltage or the output current, when it detects a crack failure or debonding abnormal by the abnormality determination process 617c, and a abnormal processing step 618C of performing at least abnormality notification.

  For the command generation period in the excitation completion time determination step 607, the statistical maximum time or maximum energy amount required for performing normal bonding in a plurality of ultrasonic bondings that have been experimentally measured in advance is applied. The arrival of the command generation time is determined by measuring the elapsed time or whether the output energy accumulated with the passage of time from the generated output of the vibrator drive voltage source 332 has reached a predetermined maximum energy amount. When the determination result of the abnormality determination and the joining completion determination is not obtained within the command generation period in the vibration completion timing determination step 607, the first abnormality determination is performed, and the time excess abnormality including at least abnormality notification is performed. When the process is performed and the abnormality determination step 617C makes an abnormality determination, or the bonding completion determination step 620C determines the completion of bonding. When in is adapted to be able to stop the vibrating operation in a shorter time than the maximum time set in advance.

  As described above, the abnormality detection method using the ultrasonic bonding control device according to the third embodiment of the present invention includes the power supply control command generation step, the vibration completion timing determination step, the abnormality determination step, and the bonding completion determination step. And the vibration suppression start step and the abnormality occurrence processing step. After the joining start determination, the excitation amplitude gradually decreases, and whether the abnormality determination is performed within the vibration command generation period. When the determination is made, the vibration operation is stopped, and the abnormality determination is not performed within the vibration command generation period, and when the joining completion determination is not performed, the first abnormality determination is performed by the completion of the vibration command period. It has become.

Therefore, it is possible to continue joining normally after completion of normal joining, or to perform abnormality processing according to the abnormality content when an abnormality is detected, or according to an overtime determination where neither determination of completion of joining or occurrence of abnormality can be obtained When the normal joining is completed, the generation of ultrasonic vibration is stopped, and the vibration extension time after the completion of joining is shortened, resulting in the occurrence of crack breakage and joining delamination due to excessive vibration application. Is prevented.
In addition, since the vibration suppressing operation starts at the start of bonding, bonding peeling during the bonding process can be suppressed.

(Description of other embodiments)
In the above description, the overall control block diagrams shown in FIG. 3, FIG. 10, and FIG. 14 are the control contents of the overall control panels 190A, 190B, and 190C divided and displayed in functional units. It does not show how to configure the wear.
As one example of actual configuration, the overall control panel is mainly composed of a programmable controller, and the input / output bus of this programmable controller is not only a general-purpose board for on / off control, but also an analog input / output board, digital data The special option board such as the I / O board is connected to not only the solenoid valve for the air cylinder and the operation check sensor provided in the work transfer mechanism 311 but also the servo amplifier 342 and the vibrator drive voltage source 332. They are directly connected and share one part of negative feedback control.
Further, the carry-in transfer command unit 603, the press control command unit 604, and the power control command unit 606 in the ultrasonic bonding control devices 300A, 300B, and 300C are also functions shared by the programmable controller.
However, for the abnormality detection units 320A, 320B, and 320C, a dedicated board composed of hardware is created and connected to the input / output bus of the programmable controller.

This dedicated board is equipped with a dedicated microprocessor that communicates directly with the microprocessor in the programmable controller to determine the signal frequency for performing joint analysis by performing Fourier analysis of the signal waveform, and to prevent crack breakage and bond peeling. It is connected to an analysis tool for measuring the natural frequency generated.
In particular, the crack detection signal and the bond separation detection signal obtained through the second and third bandpass filters 322a and 323a are compared with the second and third limit amplitudes H22 and H3 by hardware, and the comparison determination result is obtained. It is possible to detect new crack detection and occurrence of bond debonding abnormality by storing it in the memory circuit, periodically reading out the memory information of this memory circuit by the programmable controller, and resetting the memory circuit when the reading is completed It has become.
Note that the storage information of the storage circuit can be urgently read from the programmable controller by generating a read request by an interrupt signal.

A setting display panel (not shown) is serially connected to the programmable controller as a man-machine interface, and the center frequencies of the second and third bandpass filters 322a and 323a are adjusted by a screen operation from the setting display panel.
The simplest method for adjusting the center frequency is to select and switch the resistance value or capacitance of the resistor / capacitor circuit with an analog switch. It is also possible to adjust the amplification factor by adjusting the center frequency by changing the pulse period and adjusting the ON / OFF ratio of the pulse.

In the above description, in the first embodiment, the mechanical vibration of the contact 130 is detected by the third vibration sensor 138, so that the vibrator driving voltage source 332 and the ultrasonic vibrator 132 are operating normally. Judgment is made.
On the other hand, in the second embodiment and the third embodiment, the second vibration sensor 137 detects the rubbing vibration generated between the joining member 121 and the member to be joined 120 via the contact 130, and The joint completion determination is performed in cooperation with the vibration sensor 1 or used as the relative abnormality determination means 326b.
The detection sensitivity of the friction vibration by the first vibration sensor that directly contacts the member to be bonded 120 is higher than that of the second vibration sensor that indirectly detects the friction vibration through the contact 130, and Although it is suitable for accurately determining the completion of joining, it is necessary to manage the supply of intervening non-hardening grease.

On the other hand, since the second vibration sensor 137 is fixed to the contact 130, there is an advantage that it is possible to detect the rubbing vibration stably although the sensitivity is low.
Note that it is difficult to detect both mechanical vibration and rubbing vibration with one vibration sensor because the vibration frequency is too large and cannot be avoided by changing the center frequency of the bandpass filter. .
For this reason, two vibration sensors having different response frequency bands may be fixed to the contact 130, and the mechanical vibration of the contact may be detected on the one hand and the rubbing vibration may be detected on the other hand.
As a result, it is possible to detect both an abnormality on the facility side including the vibrator driving power source and the ultrasonic vibrator and an adhesion abnormality of the first vibration sensor.
In addition, about the abnormality determination by the side of an installation, it is also possible to measure the vibration state of a contactor in the no-load state which does not press a contactor.

In the above description, each of the first vibration sensor and the second vibration sensor is described as one vibration sensor. For example, a plurality of sensors among the first vibration sensors 118, 152, and 172 are used. It is also possible to improve detection accuracy and reliability by performing joint determination and crack / peel detection in cooperation.
In addition, some of the sensors used more than one can be used only for applications suitable for the installation location, such as specializing for joint judgment and detection of joint peeling, and others for crack judgment. It is.

  100A to 100C ultrasonic bonding apparatus, 110 base, 116 vibration sensor, 118 vibration sensor, 120 member to be bonded, 121 bonding member, 130 contact, 131 lead member, 132 ultrasonic vibrator, 133 ultrasonic horn, 134 lead Member, 135 coupling block, 136 balancer, 137 second vibration sensor, 138 third vibration sensor, 140 servo motor, 141 rotation sensor, 143 pressure drive mechanism, 144 pressure sensor, 152 vibration sensor, 172 vibration sensor, 300A- 300C ultrasonic bonding control device, 320A to 320C abnormality detection unit, 321a, 321aa first band filter, 321b first abnormality determination means, 321c first amplitude suppression means, 322a second band filter, 322b second Abnormality determination means, 22c Second amplitude suppressing means, 322d Characteristic selection adjustment command, 323a Third band filter, 323b Third abnormality determining means, 324a Fourth band filter, 324b, 324bb Fourth abnormality determining means, 325d Premature abnormality determination , 325e joining start judging unit, 325B, 325C joining completion judging means, 326b relative abnormality judging means, 330A to 330C power supply control unit, 332 vibrator driving voltage source, 333 voltage / current sensor, 340 driving control unit, 341 speed pattern , 342 Servo amplifier, 344 Pressing force pattern, 603 Loading / transfer command unit, 604 Press control command unit, 606 Power supply control command unit, 608 overtime processing step (first abnormality determining means), 617A to 617C Abnormality determining step, 618A ~ 618B Abnormality occurrence processing step, 619 vibration suppression start step, 620B, 620C joining completion determination step.

Claims (15)

The contact member is pressed against the member to be joined by the contact pressed from the pressing drive mechanism, and an ultrasonic transducer to which the output voltage of the transducer drive voltage source is applied is connected to the contact, and the pressure contact surface An ultrasonic bonding control device for an ultrasonic bonding control device configured to bond the bonding member and the member to be bonded by ultrasonic vibration in a direction parallel to
When the joining member is pressed by the contact, the detection output of the first vibration sensor abutted on the member to be joined or the detection of the second vibration sensor provided on the contact side Equipped with an abnormality detection unit that responds to output,
The abnormality detection unit extracts a first band filter that extracts an output signal of a first frequency band that is a lower band in the entire frequency band that can be detected by the first vibration sensor or the second vibration sensor; A second band filter that extracts an output signal of a second frequency band that is an upper band in the entire frequency band, a first abnormality determination unit, and a second abnormality determination unit,
The center frequency of the first bandpass filter is higher than the frequency of the output voltage generated by the vibrator driving voltage source, and the joining member and the joined member are pressed and frictionally slid. Overlapping with the frequency band of accompanying vibration,
The center frequency of the second band-pass filter is selectively switched or variably adjusted according to the natural vibration frequency at the time of occurrence of crack breakage or bond peeling determined by the material to be joined or the material and dimensions of the joined member.
The first abnormality determining means monitors the output signal of the first vibration sensor or the second vibration sensor obtained through the first band filter, and in a predetermined time range after the start of vibration. When the signal amplitude of the output signal has not reached the first determination threshold, it is determined that the bonding is defective,
The second abnormality determination means is configured to detect when the signal amplitude of at least one of the output signals of the first vibration sensor or the second vibration sensor exceeds a second limit amplitude in the second frequency band. Temporary storage in a second storage circuit, and determination based on the stored information that at least one of the member to be joined or the joining member has crack cracks or abnormal joining debonding. apparatus. The abnormality detection unit further includes a first amplitude suppression unit and a second amplitude suppression unit,
The first amplitude suppression means is delayed by a predetermined delay time after the signal amplitude of the output signal of the first vibration sensor obtained through the first bandpass filter exceeds the first determination threshold value. Or when the output signal starts decreasing, the target output voltage or target output current for the vibrator driving voltage source is gradually decreased,
The second amplitude suppression unit applies the signal to the vibrator driving voltage source when the signal amplitude of the output signal of the first vibration sensor obtained via the second bandpass filter exceeds a second determination threshold value. Reduce the target output voltage or target output current,
2. The ultrasonic bonding control apparatus according to claim 1, wherein the second determination threshold has a signal amplitude lower than the second limit amplitude applied in the second abnormality determination unit. . The abnormality detection unit further includes a third band filter and a third abnormality determination means,
The center frequency of the third band filter is within a third frequency band that is within the entire frequency band detectable by the first vibration sensor, and the applied member to be joined or the joining member It is selectively switched or variably adjusted according to the natural vibration frequency when one of bond peeling or crack damage abnormality determined by the material and dimensions occurs.
The third abnormality determining means temporarily stores in the third storage circuit when the signal amplitude of the output signal of the first vibration sensor exceeds a third limit amplitude in the third frequency band. , Based on the stored information, it is determined that one of bonding peeling or crack breakage abnormality has occurred between the bonded member and the bonding member,
2. The ultrasonic bonding according to claim 1, wherein the second band filter and the second abnormality determination unit share functions with each other so as to perform the other determination of bonding separation or crack breakage abnormality. Control device. The abnormality detection unit further includes fourth abnormality detection means that responds to a voltage / current sensor that is a voltage or current detection means provided in an input circuit or an output circuit of the vibrator driving voltage source,
The fourth abnormality determination unit compares the standard characteristic measured and stored with respect to the output characteristic of the detection signal of the voltage / current sensor and the output characteristic of the newly measured detection signal to compare the transducer driving voltage. The ultrasonic bonding control apparatus according to claim 1, wherein the presence or absence of a power supply abnormality is determined based on whether or not an output current corresponding to an input voltage supplied to a source is obtained. The abnormality detection unit further includes a joining completion determination unit,
The joining completion determination means is the output signal data of the first vibration sensor obtained through the first band filter, or the output signal of the second vibration sensor obtained through the first band filter. For at least one of the data, by comparing the old and new data with a predetermined time difference, and detecting that the signal amplitude has decreased to less than the predetermined lower threshold after the signal amplitude has changed from less than the first determination threshold It determines with ultrasonic joining having been completed. The ultrasonic joining control apparatus of Claim 1 characterized by the above-mentioned. The abnormality detection unit further includes a fourth band filter to which an output signal of the third vibration sensor is input,
The third vibration sensor is a vibration sensor for detecting a vibration amplitude of an excitation mechanism installed close to the contact;
The fourth band filter is a band filter that operates with the frequency of the output voltage generated by the vibrator driving voltage source as a center frequency,
The fourth abnormality determination means compares the detection signal of the voltage / current sensor with the output signal of the fourth bandpass filter, and the vibration amplitude of the vibration mechanism including the contact is determined by the voltage / current sensor. It is determined whether it is the vibration amplitude corresponding to a detection output. The ultrasonic bonding control apparatus of Claim 4 characterized by the above-mentioned. The abnormality detection unit further includes a first band filter to which an output signal of the second vibration sensor is input and a relative abnormality determination unit.
The second vibration sensor is a vibration sensor that is installed close to the contact and detects rubbing vibration caused when the joining member and the joined member are pressed and frictionally slid.
The center frequency of the first band-pass filter is in a frequency band of rubbing vibration accompanying the sliding of the joining member and the member to be joined being pressed,
The relative abnormality determination means has a predetermined relative ratio between output signals of the first band-pass filter connected to the first vibration sensor and the first band-pass filter connected to the second vibration sensor. The ultrasonic bonding control device according to claim 5, wherein relative abnormality determination is performed by being out of a lower limit range. In the case where the joining completion determination means is further less than a predetermined minimum time after the start of excitation of the contactor until the output signal data changes from rising to decreasing to determine the joining completion To determine that it is a bonding abnormality or at least invalidate the bonding completion determination,
As the predetermined minimum time, a statistical minimum time or a minimum energy amount required for performing normal bonding in a plurality of ultrasonic bondings experimentally measured in advance is applied, and the arrival of the minimum time is added. It is determined by measuring the elapsed time after the start of vibration, or by determining whether the output energy accumulated with the passage of time has reached the specified minimum energy amount. The ultrasonic bonding control apparatus according to claim 5. The pressing drive mechanism is pressed and driven by a servo motor that is driven and controlled by a drive control unit,
The drive control unit includes a servo amplifier having a speed control mode and a torque control mode as well as a rotation sensor and a pressure sensor connected as input signals,
In the speed control mode, negative feedback control is performed so that the rotation speed of the servo motor detected by the rotation sensor matches a predetermined acceleration / deceleration pattern, and the contact is driven toward or away from the joining member. And
In the torque control mode, the pressure between the contact and the joining member detected by the pressing sensor gradually increases based on a predetermined pressing force pattern and maintains a constant value, and the output of the vibrator driving voltage source The pressing force is released with the stop, and the joining member and the joined member are carried in or transferred while the contactor is being driven apart. The ultrasonic bonding control apparatus described. The contact is attached and fixed to one end of the first lead member,
The ultrasonic transducer is attached and fixed to one end of the second lead member,
The other ends of the first and second lead members are fixed to a common coupling block,
The ultrasonic transducer and the contactor or one end of the first lead member are connected by an ultrasonic horn that amplifies ultrasonic vibration,
The contact, the first lead member, the coupling block, the second lead member, the ultrasonic vibrator, and the ultrasonic horn constitute an integrated movable part,
The super movable body according to claim 9, wherein the movable portion is pressed and driven from the servo motor via the pressure sensor, and the entire gravity of the movable portion is reduced by a counterbalancer. Sonic bonding control device. The vibrator driving voltage source constitutes a power control unit,
The power supply control unit performs negative feedback control on the output voltage of the vibrator driving voltage source so that the output voltage or output current detected by the voltage / current sensor matches a target output voltage or output current. The target output voltage is suppressed so that the product of the target output voltage and the detected output current is less than or equal to a predetermined value, or the product of the target output current and the detected output voltage is less than or equal to a predetermined value. The ultrasonic bonding control device according to any one of claims 1 to 5, wherein an output current is suppressed. An ultrasonic bonding control method using the ultrasonic bonding control device according to claim 2,
A power source control command generation step of generating an output voltage of the vibrator driving voltage source after the pressing force of the contact with respect to the joining member exceeds a predetermined value, and setting the output voltage to zero after a predetermined time;
An excitation completion timing determination step for determining a timing for releasing the pressing force of the contact by setting the output voltage to zero,
An abnormality determination step responsive to the determination result of the second abnormality determination means;
An excitation suppression start step of gradually decreasing or reducing the output voltage or output current of the vibrator drive voltage source when the first amplitude suppression means or the second amplitude suppression means generates an excitation amplitude suppression command;
When detecting a crack breakage abnormality or bond peeling abnormality by the abnormality determination step, an abnormality occurrence processing step that performs at least abnormality notification,
The command generation period by the vibration completion time determination step is applied with the statistical maximum time or maximum energy amount required to perform normal bonding in a plurality of ultrasonic bondings that have been experimentally measured in advance, The arrival of the command generation time is determined by measuring the elapsed time, or by determining whether the output energy accumulated with the passage of time of the generated output of the vibrator drive voltage source has reached a predetermined maximum energy amount,
The first time when the vibration suppression by the vibration suppression start step is completed within the command generation period by the vibration completion timing determination step and the output voltage of the vibrator drive voltage source has not decreased below a predetermined lower limit voltage. An abnormality determination is performed and an overtime abnormality process including at least an abnormality notification is performed,
When the abnormality determination step makes an abnormality determination and when the vibration suppression by the vibration suppression start step is completed, the vibration operation can be stopped in a time shorter than a preset maximum time. An ultrasonic bonding control method characterized by comprising: An ultrasonic bonding control method using the ultrasonic bonding control device according to claim 5,
A power source control command generation step of generating an output voltage of the vibrator driving voltage source after the pressing force of the contact with respect to the joining member exceeds a predetermined value, and setting the output voltage to zero after a predetermined time;
An excitation completion time determination step for determining a timing for releasing the pressing force of the contactor by setting the output voltage to zero,
An abnormality determination step responsive to the determination result of the second abnormality determination means;
A joining completion determining step for executing the joining completion determining means;
When detecting a crack breakage abnormality or bond peeling abnormality by the abnormality determination step, an abnormality occurrence processing step that performs at least abnormality notification,
The command generation period by the vibration completion time determination step is applied with the statistical maximum time or maximum energy amount required to perform normal bonding in a plurality of ultrasonic bondings that have been experimentally measured in advance, The arrival of the command generation time is determined by measuring the elapsed time or whether the output energy accumulated with the passage of time of the generated output of the vibrator drive voltage source has reached a predetermined maximum energy amount, and When the abnormality determination step makes an abnormality determination, and the bonding completion determination step determines that the bonding is completed, the vibration operation can be stopped in a time shorter than a preset maximum time. When the determination result of either the abnormality determination or the joining completion determination is not obtained within the command generation period in the vibration completion timing determination step, the first Abnormality determination is made, ultrasonic bonding control method characterized by overtime abnormality processing including at least abnormality notification is carried out. An ultrasonic bonding control method using the ultrasonic bonding control device according to claim 5,
A power source control command generation step of generating an output voltage of the vibrator driving voltage source after the pressing force of the contact with respect to the joining member exceeds a predetermined value, and setting the output voltage to zero after a predetermined time;
An excitation completion time determination step for determining a timing for releasing the pressing force of the contactor by setting the output voltage to zero,
An abnormality determination step responsive to the determination result of the second abnormality determination means;
A joining completion determining step for executing the joining completion determining means;
An excitation suppression start step in which the first band filter detects the occurrence of rubbing vibration and gradually decreases the output voltage or output current of the vibrator driving voltage source when the signal amplitude of the rubbing vibration starts to decrease with the start of bonding. When,
When detecting a crack breakage abnormality or bond peeling abnormality by the abnormality determination step, an abnormality occurrence processing step that performs at least abnormality notification,
The command generation period by the vibration completion time determination step is applied with the statistical maximum time or maximum energy amount required to perform normal bonding in a plurality of ultrasonic bondings that have been experimentally measured in advance, The arrival of the command generation time is determined by measuring the elapsed time or whether the output energy accumulated with the passage of time of the generated output of the vibrator drive voltage source has reached a predetermined maximum energy amount,
A first abnormality determination is performed when neither the abnormality determination nor the welding completion determination result is obtained within the command generation period in the vibration completion timing determination step, and an overtime abnormality process including at least an abnormality notification is performed. I,
When the abnormality determination step makes an abnormality determination, or when the bonding completion determination step determines bonding completion, the vibration operation can be stopped in a time shorter than a preset maximum time. An ultrasonic bonding control method characterized by comprising: In the power supply control command generation step, the output voltage or output current of the vibrator drive voltage source is maintained at a constant value in an initial period immediately after the start of generation of the output voltage of the vibrator drive voltage source. As the time corresponding to the minimum junction time or the minimum amount of energy obtained by experiments elapses, the output voltage or output current of the vibrator drive voltage source is gradually increased, and the output suppression start or generation stop timing comes. The ultrasonic bonding control method according to any one of claims 12 to 14, wherein the output voltage or output current of the vibrator driving voltage source is gradually reduced or stopped.

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