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JP2011247918A - Low refractive index film and antireflection film - Google Patents

Low refractive index film and antireflection film Download PDF

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JP2011247918A
JP2011247918A JP2010117885A JP2010117885A JP2011247918A JP 2011247918 A JP2011247918 A JP 2011247918A JP 2010117885 A JP2010117885 A JP 2010117885A JP 2010117885 A JP2010117885 A JP 2010117885A JP 2011247918 A JP2011247918 A JP 2011247918A
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film
refractive index
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borazine
resin
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Toshimi Fukui
俊巳 福井
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Kansai Research Institute KRI Inc
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Abstract

PROBLEM TO BE SOLVED: To provide a low refractive index film and an antireflection film having sufficient mechanical strength, capable of supplying a composition having a low refractive index and forming the low refractive index film under normal temperature and normal pressure condition.SOLUTION: The low refractive index composition solving the problem can be provided by forming fine pores in the film or fine irregularities on the surface of the film constituted by using a borazine-based polymer or a boraizne-silicon based polymer as a main component. Moreover, the low refractive index film can be formed under the normal temperature and the normal pressure condition, and the antireflection film can be provided which has the sufficient mechanical strength by being formed on a transparent substrate.

Description

本発明は、ボラジン系ポリマー又はボラジン珪素系ポリマーより構成される低屈折率組成物に関する。更には、低屈折率膜、反射防止膜に関する。   The present invention relates to a low refractive index composition composed of a borazine polymer or a borazine silicon polymer. Further, the present invention relates to a low refractive index film and an antireflection film.

低屈折率組成物は、各種の光学デバイスの重要な構成部材である。特に低屈折率膜は、反射防止膜、反射膜、半透過半反射膜、可視光反射赤外線透過膜、赤外線反射可視光透過膜、青色反射膜、緑色反射又は赤色反射膜、輝線カットフィルター、色調補正膜に含まれる光学機能膜として光学部材に形成される。   The low refractive index composition is an important component of various optical devices. In particular, the low refractive index film is an antireflection film, a reflection film, a transflective film, a visible light reflection infrared transmission film, an infrared reflection visible light transmission film, a blue reflection film, a green reflection or red reflection film, a bright line cut filter, a color tone. An optical functional film included in the correction film is formed on the optical member.

表面形状が平坦な光学部材に限らず、液晶用バックライトの輝度向上レンズフィルムや拡散フィルム、ビデオプロジェクションテレビのスクリーンに用いられるフレネルレンズやレンチキュラーレンズ又はマイクロレンズなどの光学機能部材では、いずれも樹脂材料が微細構造体をもつことで所望の幾何光学的な性能を得ている。これらの微細構造体表面にも低屈折率膜を含む光学機能膜は必要とされている。   Not only optical members with a flat surface shape, but also optical function members such as brightness enhancement lens films and diffusion films for liquid crystal backlights, Fresnel lenses, lenticular lenses, and microlenses used for video projection television screens are all made of resin. The desired geometrical optical performance is obtained because the material has a microstructure. An optical functional film including a low refractive index film is also required on the surface of these fine structures.

低屈折率膜を反射防止膜として用いる場合、単層構造の低屈折率膜はそのまま反射防止膜となる。単層構造の反射防止膜は、反射防止性能をより広い波長範囲で示し、さらに、層数低減によりコストが低減する。単層構造の反射防止膜の屈折率としては、基材が樹脂材料などの透明材料である場合は、1.2〜1.4の範囲の低屈折率が望まれる。   When a low refractive index film is used as an antireflection film, the low refractive index film having a single layer structure becomes an antireflection film as it is. The antireflection film having a single layer structure exhibits antireflection performance in a wider wavelength range, and the cost is reduced by reducing the number of layers. As the refractive index of the antireflection film having a single layer structure, a low refractive index in the range of 1.2 to 1.4 is desired when the substrate is a transparent material such as a resin material.

低屈折率膜の形成方法には蒸着法、スパッタ法等の気相法や、ディッピング法、スピンコート法等の塗布法が挙げられる。   Examples of the method for forming the low refractive index film include vapor phase methods such as vapor deposition and sputtering, and coating methods such as dipping and spin coating.

気相法により得られる代表的な低屈折率の薄膜は、屈折率が1.38のMgF2や1.39のLiFであり、これらの薄膜の単層反射防止膜としての性能は低い。一方、塗布法で得られる低屈折率膜の代表的な材料には、屈折率が1.35〜1.4のフッ素系高分子材料や、屈折率が1.37〜1.46であるフッ素モノマーの重合体からなる微粒子を融着させた多孔質材料があるが(例えば、特許文献1参照)、屈折率が1.3以下のフッ素系高分子材料は得られていない。   Typical low refractive index thin films obtained by the vapor phase method are MgF 2 having a refractive index of 1.38 and LiF having 1.39, and the performance of these thin films as a single-layer antireflection film is low. On the other hand, typical materials for the low refractive index film obtained by the coating method include fluorine-based polymer materials having a refractive index of 1.35 to 1.4, and fluorine having a refractive index of 1.37 to 1.46. Although there is a porous material in which fine particles made of a monomer polymer are fused (see, for example, Patent Document 1), a fluorine-based polymer material having a refractive index of 1.3 or less has not been obtained.

さらに、近年、ボラジン−ケイ素系高分子の適用も検討されており、トリエチニル−N,N’,N”−トリメチルボラジンとのヒドロシリル基を有するケイ素化合物を共重合する事で屈折率1.46の低屈折率膜が形成可能である事が開示されている(特許文献2参照)。また、特許文献3にはボラジン系耐熱樹脂が1.45〜1.47の低い屈折率を示すため、低屈折率樹脂薄膜としての用途にも適用可能である旨の記述がある。しかし、得られた膜の屈折率は反射防止膜として使用するには不十分である。   Furthermore, in recent years, application of borazine-silicon polymers has been studied, and a refractive index of 1.46 is obtained by copolymerizing a silicon compound having a hydrosilyl group with triethynyl-N, N ′, N ″ -trimethylborazine. It is disclosed that a low refractive index film can be formed (see Patent Document 2), and since Patent Document 3 shows a low refractive index of 1.45 to 1.47, borazine-based heat-resistant resin is low. Although there is a description that it can be applied to applications as a refractive index resin thin film, the refractive index of the obtained film is insufficient for use as an antireflection film.

特許第3718031号公報Japanese Patent No. 3718031 特開2002−359240号公報JP 2002-359240 A 特開2005−104993号公報JP 2005-104993 A

本発明においては、低屈折率である組成物を供給すると伴に、充分な機械強度を有する低屈折率膜及び反射防止膜を提供することを目的とするものである。   An object of the present invention is to provide a low refractive index film and an antireflection film having sufficient mechanical strength while supplying a composition having a low refractive index.

上記課題を解決するために検討を行った結果、以下に示す発明を完成するに至った。   As a result of studies to solve the above problems, the following invention has been completed.

〔1〕ボラジン系ポリマー又はボラジン珪素系ポリマーを主成分として構成された膜であり、膜中に微細細孔が形成されていること又は膜の表面に微細な凹凸が形成されていることを特徴とする低屈折率膜。 [1] A film composed mainly of a borazine-based polymer or a borazine-silicon-based polymer, characterized in that fine pores are formed in the film or fine irregularities are formed on the surface of the film. Low refractive index film.

〔2〕前記〔1〕に記載の低屈折率膜を構成層とした反射防止膜 [2] Antireflection film comprising the low refractive index film according to [1] as a constituent layer

本発明の低屈折率組成物は、ボラジン系ポリマー又はボラジン珪素系ポリマーを母材としているため充分な機械強度が確保可能であり、構成組成物が疎水性である事より、吸湿が抑制され、内部に微細細孔を導入しても吸水による特性変化を生じ難い。
従って、充分な機械的強度を有し、経時安定性に優れた低屈折率膜が形成可能となる。また、得られる低屈折率膜を単独で又は積層して用いる事で機械的特性に優れ大気中の水分の影響による経時変化の少ない反射防止膜が形成可能となる。
Since the low refractive index composition of the present invention is based on a borazine polymer or a borazine silicon polymer, sufficient mechanical strength can be ensured, and since the constituent composition is hydrophobic, moisture absorption is suppressed, Even if fine pores are introduced inside, characteristic changes due to water absorption are unlikely to occur.
Therefore, a low refractive index film having sufficient mechanical strength and excellent stability over time can be formed. Further, by using the obtained low refractive index film alone or in a laminated state, it is possible to form an antireflection film having excellent mechanical characteristics and little change with time due to the influence of moisture in the atmosphere.

ボラジン系ポリマー又はボラジン珪素系ポリマーは、ボラジン系ポリマー又はボラジン珪素系ポリマーを有機溶剤中に溶解しした状態で使用される。
溶剤としては、ボラジン系ポリマー又はボラジン珪素系ポリマーが溶解すれば特に限定されないが、好ましくは以下に示す非水系の有機溶剤が用いられる。
The borazine polymer or borazine silicon polymer is used in a state where the borazine polymer or borazine silicon polymer is dissolved in an organic solvent.
The solvent is not particularly limited as long as the borazine polymer or the borazine silicon polymer is dissolved, but the following nonaqueous organic solvents are preferably used.

すなわち、溶剤としては、ベンゼン、トルエン、エチルベンゼン、キシレン等の芳香族系溶剤、ヘキサン、ペンタン、オクタン、シクロヘキサン等の炭化水素系溶剤、アセトン、メチルエチルケトン等のケトン類、酢酸エチル、酢酸プロピル等のエステル系溶剤、テトラヒドロフラン、ジオキサンなどの環状エーテル系溶剤、メタノール、エタノール、1−プロパノール、2−プロパノール、1−ブタノール、2−ブタノール、t−ブタノール等のアルコール系溶剤、エチレングリコールモノメチルエーテル、エチレングリコールモノエチルエーテル、エチレングリコールジメチルエーテル、エチレングリコールジエチルエーテル、エチレングリコールモノアセテート、エチレングリコールジアセテート、エチレングリコールモノメチルエーテルアセテート、プロピレングリコール−α−モノメチルエーテル、プロピレングリコール−α−モノエチルエーテル、プロピレングリコールジメチルエーテル、プロピレングリコールジエチルエーテル、プロピレングリコール−α−アセテートなどのグリコール誘導体などが用いられる。   That is, the solvent includes aromatic solvents such as benzene, toluene, ethylbenzene, and xylene, hydrocarbon solvents such as hexane, pentane, octane, and cyclohexane, ketones such as acetone and methyl ethyl ketone, and esters such as ethyl acetate and propyl acetate. Solvents, cyclic ether solvents such as tetrahydrofuran and dioxane, alcohol solvents such as methanol, ethanol, 1-propanol, 2-propanol, 1-butanol, 2-butanol and t-butanol, ethylene glycol monomethyl ether, ethylene glycol mono Ethyl ether, ethylene glycol dimethyl ether, ethylene glycol diethyl ether, ethylene glycol monoacetate, ethylene glycol diacetate, ethylene glycol monomethyl ether Le acetate, propylene glycol -α- monomethyl ether, propylene glycol -α- monoethyl ether, propylene glycol dimethyl ether, propylene glycol diethyl ether, glycol derivatives such as propylene glycol -α- acetate is used.

低屈折率膜は、前記溶剤にボラジン系ポリマー又はボラジン珪素系ポリマーを溶解した塗布液を用い、ディップ成膜、スピン成膜、スプレー成膜、バーコート成膜などの方法で形成される。   The low refractive index film is formed by a method such as dip film formation, spin film formation, spray film formation, or bar coat film formation using a coating solution in which a borazine polymer or a borazine silicon polymer is dissolved in the solvent.

塗布液組成、濃度や乾燥条件を変えることにより、膜中に細孔を導入する事が可能であり、より低屈折率の膜を形成する事が可能である。細孔導入のためには、揮発温度の異なる複数の溶剤を組合せる事が有効である。   By changing the composition, concentration and drying conditions of the coating solution, it is possible to introduce pores into the film and to form a film with a lower refractive index. In order to introduce pores, it is effective to combine a plurality of solvents having different volatilization temperatures.

屈折率を低減させるため導入される細孔径は50nm以下が好ましい。50nmを超えると散乱により透明性が低下するため好ましくない。より好ましくは、20nm以下である。   In order to reduce the refractive index, the pore diameter introduced is preferably 50 nm or less. If it exceeds 50 nm, the transparency decreases due to scattering, which is not preferable. More preferably, it is 20 nm or less.

微細気孔の導入量は50%以下が好ましい。50%を超えると膜の強度を維持する事が出来なくなるため好ましくない。より好ましくは、5〜40%である。   The amount of fine pores introduced is preferably 50% or less. If it exceeds 50%, the strength of the film cannot be maintained, which is not preferable. More preferably, it is 5 to 40%.

膜中への細孔の導入は、沸点の異なる1種又は2種以上の二次添加溶剤を用い、多段的な乾燥・加熱処理により行われる。成膜後の乾燥段階で低沸点溶剤を揮発除去する事で、高沸点溶剤が膜中に残存し、膜形成成分との相分離により微細構造が形成される。更に加熱処理する事で、細孔構造を形成した二次添加溶剤を除去し、細孔が導入された低屈折率膜が形成される。   Introduction of pores into the membrane is performed by multistage drying / heating treatment using one or more secondary additive solvents having different boiling points. By evaporating and removing the low boiling point solvent in the drying step after film formation, the high boiling point solvent remains in the film, and a fine structure is formed by phase separation from the film forming component. Further, the secondary additive solvent having the pore structure formed is removed by heat treatment, and a low refractive index film having pores introduced therein is formed.

二次添加溶剤の沸点は、分散溶剤の種類により決定されるためその沸点差が30℃以上のものが用いられる。好ましくは50℃以上、より好ましくは80℃以上である。分散溶剤を乾燥除去した段階で膜中に十分残存する必要があるため、150℃以上の沸点の有機物が用いられる。好ましくは、180℃以上、より好ましくは200℃以上である。
使用する溶剤は、数10nmレベルでの相分離構造を形成する必要があるため、分散溶剤及び膜形成成分との相溶性が重要となる。具体的な種類は、分散溶剤の種類に依存するため、分相しなければ特に限定されない。
Since the boiling point of the secondary additive solvent is determined by the type of the dispersion solvent, a solvent having a boiling point difference of 30 ° C. or more is used. Preferably it is 50 degreeC or more, More preferably, it is 80 degreeC or more. An organic substance having a boiling point of 150 ° C. or higher is used because the dispersion solvent needs to remain sufficiently in the film after being removed by drying. Preferably, it is 180 ° C. or higher, more preferably 200 ° C. or higher.
Since the solvent to be used needs to form a phase separation structure at a level of several tens of nm, compatibility with the dispersion solvent and the film forming component is important. Since the specific type depends on the type of the dispersion solvent, it is not particularly limited unless phase separation is performed.

二次添加溶剤の種類として、炭素数9以上の炭化水素、例えば、n-ノナン(151℃)、炭素数6以上のアルコール、例えば1-ヘキサノール(156℃)、炭素数7以上のケトン、例えばアミルメチルケトン(151℃)、炭素数7以上のケトン、例えばシクロヘキサノン(157℃)、炭素数7以上のアルデヒド、例えばヘプタナール(155℃)、水素化ナフタリン及びその誘導体、例えば、テトラリン(207℃)、ジヒドロナフタリン(1.2又は1.4、207〜212℃)、テトラロン(257℃)、インダン(180℃)又はインダン(179℃)、単環式モノテルペノイドおよびその誘導体、例えば、リモネン(176℃)、テルピネン(α、β、178、183℃)、α−フェランドレン(175℃)、テルピネオール(α、β、γ、δ型、例えばα型は214〜227℃)、脂肪酸エステル、例えば、フタル酸ジエチル(298℃)、ジエチレングリコール誘導体、例えば、ジエチレングリコールモノエチルエーテル(196℃)、エチレングリコールモノブチルエーテル(230℃)、ジエチレングリコールジエチルエーテル(188℃)、ジエチレングリコールジブチルエーテル(255℃)、ジエチレングリコールモノアセテート(182℃)、ジエチレングリコールモノエチルエーテルアセテート(219℃)などが用いられる。   As the type of secondary additive solvent, hydrocarbons having 9 or more carbon atoms, such as n-nonane (151 ° C.), alcohols having 6 or more carbon atoms, such as 1-hexanol (156 ° C.), ketones having 7 or more carbon atoms, such as Amyl methyl ketone (151 ° C.), ketones having 7 or more carbon atoms, such as cyclohexanone (157 ° C.), aldehydes having 7 or more carbon atoms, such as heptanal (155 ° C.), hydrogenated naphthalene and its derivatives, such as tetralin (207 ° C.) , Dihydronaphthalene (1.2 or 1.4, 207-212 ° C.), tetralone (257 ° C.), indane (180 ° C.) or indane (179 ° C.), monocyclic monoterpenoids and derivatives thereof such as limonene (176 ° C.), terpinene (Α, β, 178, 183 ° C.), α-ferrandolene (175 ° C.), terpineol (α, β, γ, δ type, for example α type is 214 to 227 ° C.), fatty acid ester, for example diphthalate Chill (298 ° C), diethylene glycol derivatives such as diethylene glycol monoethyl ether (196 ° C), ethylene glycol monobutyl ether (230 ° C), diethylene glycol diethyl ether (188 ° C), diethylene glycol dibutyl ether (255 ° C), diethylene glycol monoacetate (182 ° C), diethylene glycol monoethyl ether acetate (219 ° C) or the like.

混合液の溶剤の種類により二次添加溶剤の最適添加量が決定されるが、固形分に対し重量比として0.1から10倍が好ましい。0.1より少ないと初期乾燥時に分散溶剤と一緒に揮発し、十分な気孔が導入できない。10倍より多く入れてもその効果は変らないため、10倍で充分である。好ましくは、0.2から5倍、より好ましくは0.2から2倍である。   Although the optimum addition amount of the secondary additive solvent is determined depending on the type of the solvent in the mixed solution, the weight ratio is preferably 0.1 to 10 times the solid content. If it is less than 0.1, it volatilizes together with the dispersion solvent during initial drying, and sufficient pores cannot be introduced. Even if it is added more than 10 times, the effect does not change, so 10 times is sufficient. Preferably, it is 0.2 to 5 times, more preferably 0.2 to 2 times.

一方、インプリントにより、膜表面に微細な凹凸を導入する事により、低屈折率膜を得る事もできる。成膜・乾燥後、成形型の圧着により目的とする形状を転写し、更に加熱硬化する事で膜表面に微細な凹凸構造が導入された低屈折率膜が得られる。   On the other hand, a low refractive index film can be obtained by introducing fine irregularities on the film surface by imprinting. After film formation and drying, the target shape is transferred by pressure bonding of a mold, and further heat-cured to obtain a low refractive index film in which a fine uneven structure is introduced on the film surface.

インプリントは、ボラジン系ポリマー又はボラジン珪素系ポリマー主組成とする低屈折率膜又は前記低屈折率膜中に微細細孔が形成されていることを特徴とする低屈折率膜のいずれにも行うことができる。   Imprinting is performed on either a low refractive index film having a borazine-based polymer or a borazine silicon-based polymer main composition or a low refractive index film in which fine pores are formed in the low refractive index film. be able to.

形成される凹凸の形状は、散乱の原因とならないサイズであれば特に限定されない。円柱状、円錐上、多角中状、多角錐状などの形状及びそれらの組み合わせにより形成される。可視光の散乱を抑制するために、柱状及び錐状形状の最長位置での長さは80nm以下である必要がある。より好ましくは、60nm以下である。柱状及び錐状孔の数は必要とする膜の気孔率量により決定される。   The shape of the unevenness formed is not particularly limited as long as it does not cause scattering. It is formed by a shape such as a cylindrical shape, a conical shape, a polygonal middle shape, a polygonal pyramid shape, or a combination thereof. In order to suppress the scattering of visible light, the length of the columnar and conical shapes at the longest position needs to be 80 nm or less. More preferably, it is 60 nm or less. The number of columnar and conical holes is determined by the required amount of membrane porosity.

柱状及び錐状形状は、乾燥又は1次加熱後あるいは二次添加溶剤除去後の低屈折膜の形成後に雛形からの転写により形成され、最終硬化処理する事で本発明の低屈折率膜となる。   The columnar and conical shapes are formed by transfer from the template after the formation of the low refractive film after drying or primary heating or after removal of the secondary additive solvent, and the film is subjected to final curing treatment to form the low refractive index film of the present invention. .

本発明の反射防止膜は、本発明による低屈折率膜を単層又は他の高屈折率組成物膜との積層により形成される。   The antireflection film of the present invention is formed by laminating a low refractive index film according to the present invention with a single layer or another high refractive index composition film.

高屈折率組成膜としては、酸化チタン、酸化ジルコニウム、酸化ニオブ、酸化タンタル、酸化亜鉛、酸化錫、酸化セリウム、酸化アルミニウム、チタン酸バリウムやチタン酸ストロンチウム、ニオブ酸カリウム、タンタル酸カリウムなどのペロブスカイト化合物及びそれら固溶体、ニオブ酸リチウム、タンタル酸リチウムなどのイルメナイト化合物及びそれら固溶体、又はこれら化合物を含む複合膜が用いられる。   High refractive index composition films include perovskites such as titanium oxide, zirconium oxide, niobium oxide, tantalum oxide, zinc oxide, tin oxide, cerium oxide, aluminum oxide, barium titanate, strontium titanate, potassium niobate, and potassium tantalate. Compounds and their solid solutions, ilmenite compounds such as lithium niobate and lithium tantalate and their solid solutions, or composite films containing these compounds are used.

また、上記の酸化物粒子を含む有機系複合膜が高屈折率膜として用いられる。有機マトリックスとして、(メタ)アクリル系樹脂、エポキシ系樹脂、ポリエステル系樹脂、スチレン系樹脂、ウレタン系樹脂、イミド系樹脂、アミド系樹脂、セルロース系樹脂、又はこれらの共重合体樹脂が用いられる。モノマーとして酸化物粒子と混合、成膜を熱・光硬化、又は、重合体と混合、成膜後乾燥する事に形成される。   An organic composite film containing the above oxide particles is used as the high refractive index film. As the organic matrix, (meth) acrylic resin, epoxy resin, polyester resin, styrene resin, urethane resin, imide resin, amide resin, cellulose resin, or a copolymer resin thereof is used. It is formed by mixing with oxide particles as a monomer, forming a film by heat / photocuring, or mixing with a polymer, and drying after film formation.

通常、本発明の反射防止膜は、透明基板上に形成される。
反射防止膜が形成される透明基板としては、その用途により決定されるものであり光学材料として使用可能な透明性を具備すれば特に限定されないが、ガラス、ポリカーボネート、アクリル系樹脂、PETに代表されるポリエステル系樹脂、脂環式炭化水素系樹脂などが用いられる。
Usually, the antireflection film of the present invention is formed on a transparent substrate.
The transparent substrate on which the antireflection film is formed is not particularly limited as long as it is determined by its use and has transparency that can be used as an optical material, but is typically represented by glass, polycarbonate, acrylic resin, and PET. Polyester resins, alicyclic hydrocarbon resins and the like are used.

続いて、本発明に用いるボラジン系ポリマー又はボラジン珪素系ポリマーについて、説明する。   Next, the borazine polymer or borazine silicon polymer used in the present invention will be described.

ボラジン系ポリマーは、化学式(1)で示される置換ボラジンの重合物(式中Rは、炭素数1〜3のアルキル基、R’は重合性末端を有するアルキル基を示す)である。   The borazine polymer is a polymer of a substituted borazine represented by the chemical formula (1) (wherein R represents an alkyl group having 1 to 3 carbon atoms, and R ′ represents an alkyl group having a polymerizable terminal).

又、ボラジン珪素系ポリマーは、化学式(2)(式中、R1およびR2はアルキル基、アリール基、アラルキル基または水素原子の中から選ばれる同一あるいは相異なる1価の基を示し、R3は置換基を有していても良い芳香族の2価の基、酸素原子、または、オキシポリ(ジメチルシロキシ)基を示す)又は化学式(3)(式中、R4はアルキル基、アリール基、またはアラルキル基を示し、nは3以上の整数を示す)で表される少なくとも2個以上のヒドロシリル基を有するケイ素化合物と前記化学式(1)で示される置換ボラジンの共重合物である。   The borazine silicon-based polymer has the chemical formula (2) (wherein R1 and R2 represent the same or different monovalent groups selected from alkyl groups, aryl groups, aralkyl groups or hydrogen atoms, and R3 represents a substituted group). An aromatic divalent group which may have a group, an oxygen atom, or an oxypoly (dimethylsiloxy) group) or a chemical formula (3) (wherein R4 is an alkyl group, an aryl group or an aralkyl group) Wherein n represents an integer of 3 or more), and is a copolymer of a substituted borazine represented by the above chemical formula (1) and a silicon compound having at least two hydrosilyl groups.

Figure 2011247918
Figure 2011247918


Figure 2011247918
Figure 2011247918

Figure 2011247918
Figure 2011247918

ボラジン系ポリマー又はボラジン珪素系ポリマーとしては、化学式(4)〜(6)に示される化学構造に代表されるものである(ここで、化学式(1)の化合物としては、R:メチル、R’:エチニルの場合の化合物の例を示している)。   The borazine-based polymer or borazine-silicon-based polymer is represented by the chemical structure represented by the chemical formulas (4) to (6) (wherein, as the compound of the chemical formula (1), R: methyl, R ′ : Shows examples of compounds in the case of ethynyl).

また、化学式(5)の式中、x、yは0又は正の整数を示し、両者とも0であることはない。
そして、化学式(6)の式中、x、yは0又は正の整数を示し、両者とも0であることはなく、p、qは0又は正の整数を示す。
Moreover, in the formula of chemical formula (5), x and y are 0 or a positive integer, and neither is 0.
In the chemical formula (6), x and y are 0 or a positive integer, both are not 0, and p and q are 0 or a positive integer.

Figure 2011247918
Figure 2011247918

Figure 2011247918
Figure 2011247918



Figure 2011247918
Figure 2011247918

ボラジン系ポリマー又はボラジン珪素系ポリマーの合成は、化学式(1)又は化学式(1)と化学式(2)や(3)で示されるモノマーを白金などの触媒共存下で重合させる事で得られる。   The synthesis of the borazine polymer or the borazine silicon polymer can be obtained by polymerizing the monomer represented by the chemical formula (1) or the chemical formula (1) and the chemical formula (2) or (3) in the presence of a catalyst such as platinum.

(ボラジン系樹脂1の合成)
エチレンジアミン0.03モルを乾燥トルエン30mLに溶解し、N,N’,N”-ト リメチルボラジン0.03モルを滴下した。得られた均一溶液を、反応容器に少量の窒素ガス気流下、110℃で3日間加熱攪拌し、ボラジン系重合物を得た。
(Synthesis of borazine resin 1)
0.03 mol of ethylenediamine was dissolved in 30 mL of dry toluene, and 0.03 mol of N, N ', N ”-trimethylborazine was added dropwise. The obtained homogeneous solution was placed in a reaction vessel at 110 ° C. under a small amount of nitrogen gas. The mixture was heated and stirred for a day to obtain a borazine polymer.

(ボラジン系樹脂2の合成)
B,B’,B”-トリエチニル-N,N’,N”-トリメチルボラジン1モルとp-ビス(ジメチルシリル)ベンゼン1モルをエチルベンゼンに溶解し、窒素雰囲気下、白金1,3-ジビニル(1,1,3,3テトラメチル-1,3-ジシロキサン(Pt2(dvs)3)を触媒として50℃で2時間反応し、ヒドロシリル化重合した。
(Synthesis of borazine resin 2)
B, B ', B "-triethynyl-N, N', N" -trimethylborazine 1 mol and p-bis (dimethylsilyl) benzene 1 mol are dissolved in ethylbenzene, and platinum 1,3-divinyl ( Hydrosilylation polymerization was performed by reacting 1,1,3,3 tetramethyl-1,3-disiloxane (Pt2 (dvs) 3) as a catalyst at 50 ° C. for 2 hours.

(ボラジン系樹脂3の合成:)
B,B’,B”-トリエチニル-N,N’,N”-トリメチルボラジン1モルと1,3,5,7-テトラメチルシクロテトラシロキサン1モルをエチルベンゼンに溶解し、窒素雰囲気下、Pt2(dvs)3を触媒として50℃で2時間反応し、ヒドロシリル化重合した。
(Synthesis of borazine resin 3)
1 mol of B, B ', B "-triethynyl-N, N', N" -trimethylborazine and 1 mol of 1,3,5,7-tetramethylcyclotetrasiloxane are dissolved in ethylbenzene, and Pt2 ( The reaction was carried out at 50 ° C. for 2 hours using dvs) 3 as a catalyst to carry out hydrosilylation polymerization.

(ボラジン系樹脂4の合成)
B,B’,B”-トリス(1’-プロピニル)-N,N’,N”-トリメチルボラジン3.6g(15mmol)と1,3,5,7-テトラメチルシクロテトラシロキサン3.6g(15mmol)をメシチレン150mlに溶解し、Pt2(dvs)3のキシレン溶液(白金2%含有)30μlを加え、窒素下40℃で1日間攪拌した。そこへPt2(dvs)3のキシレン溶液(白金2%含有)30μlを追加し、窒素下40℃で1日間攪拌した。続いて、1,3,5,7-テトラメチルシクロテトラシロキサン0.36g(1.5mmol)を加え、窒素下40℃で1日間攪拌した。
(Synthesis of borazine resin 4)
B, B ', B "-tris (1'-propynyl) -N, N', N" -trimethylborazine 3.6 g (15 mmol) and 1,3,5,7-tetramethylcyclotetrasiloxane 3.6 g (15 mmol) Was dissolved in 150 ml of mesitylene, 30 μl of a Pt2 (dvs) 3 xylene solution (containing 2% platinum) was added, and the mixture was stirred at 40 ° C. for 1 day under nitrogen. Thereto was added 30 μl of a Pt2 (dvs) 3 xylene solution (containing 2% platinum), and the mixture was stirred at 40 ° C. for 1 day under nitrogen. Subsequently, 1,3,5,7-tetramethylcyclotetrasiloxane (0.36 g, 1.5 mmol) was added, and the mixture was stirred at 40 ° C. for 1 day under nitrogen.

(ボラジン系樹脂5の合成)
B,B’,B”-トリス(1’-プロピニル)-N,N’,N”-トリメチルボラジン5.0mmol、1,3,5,7-テトラメチルシクロテトラシロキサン5.0mmolをエチルベンゼンに溶解し、Pt2(dvs)3のキシレン溶液(白金2%含有)10μlを加え、窒素下40℃で1日間、続いて、室温で3日間撹拌した。
(Synthesis of borazine resin 5)
B, B ′, B ″ -tris (1′-propynyl) -N, N ′, N ″ -trimethylborazine 5.0 mmol, 1,3,5,7-tetramethylcyclotetrasiloxane 5.0 mmol are dissolved in ethylbenzene, 10 μl of Pt2 (dvs) 3 in xylene (containing 2% platinum) was added, and the mixture was stirred at 40 ° C. for 1 day under nitrogen, and then at room temperature for 3 days.

(ボラジン系樹脂6の合成)
B,B’,B”-トリス(1’-プロピニル)-N,N’,N”-トリメチルボラジン1.0mmol、p-ビス(ジメチルシリル)ベンゼン1.0mmolをエチルベンゼンに溶解し、Pt2(dvs)3のキシレン溶液を加え、窒素下40℃で3日間撹拌した。
(Synthesis of borazine resin 6)
B, B ′, B ″ -tris (1′-propynyl) -N, N ′, N ″ -trimethylborazine 1.0 mmol and p-bis (dimethylsilyl) benzene 1.0 mmol were dissolved in ethylbenzene, and Pt2 (dvs) 3 Of xylene was added and stirred at 40 ° C. under nitrogen for 3 days.

(ボラジン系樹脂7の合成)
B,B',B"-トリエチニル-N,N',N"-トリメチルボラジン1.0mmol、1,1,3,3-テトラフェニル-1,3-ジシロキサン1.0mmolをエチルベンゼンに溶解し、白金ジビニルテトラメチルジシロキサンのキシレン溶液を加え、窒素下40℃で3日間撹拌した。
(Synthesis of borazine resin 7)
B, B ', B "-triethynyl-N, N', N" -trimethylborazine 1.0mmol, 1,1,3,3-tetraphenyl-1,3-disiloxane 1.0mmol dissolved in ethylbenzene, platinum divinyl A xylene solution of tetramethyldisiloxane was added, and the mixture was stirred at 40 ° C. for 3 days under nitrogen.

(ボラジン系樹脂8の合成)
B,B',B"-トリエチニル-N,N',N"-トリメチルボラジン1.0mmol、1,3,3,5-テトラメチル-1,5-ジフェニル-1,3,5-トリシロキサン1.0mmolをエチルベンゼンに溶解し、白金ジビニルテトラメチルジシロキサンのキシレン溶液を加え、窒素下4 0 ℃で3日間撹拌した。
全ての合成例においてガスクロマトグラフィー(GC)分析により、残存モノマーが残存しない事を確認した。
(Synthesis of borazine resin 8)
B, B ', B "-triethynyl-N, N', N" -trimethylborazine 1.0 mmol, 1,3,3,5-tetramethyl-1,5-diphenyl-1,3,5-trisiloxane 1.0 mmol Was dissolved in ethylbenzene, a xylene solution of platinum divinyltetramethyldisiloxane was added, and the mixture was stirred at 40 ° C. for 3 days under nitrogen.
In all synthesis examples, it was confirmed by gas chromatography (GC) analysis that no residual monomer remained.

〔実施例1〜14〕
ボラジン系樹脂のエチルベンゼン10%溶液に高沸点溶剤を加えた後、ガラス基板(Corning7059、nd=1.52)及びSi基板にスピンコーティングにより塗布し、100℃で1分感乾燥後、大気中180℃で10分、更に300℃で30分加熱する事で高硬度の低屈折率膜を得た。膜厚が0.1μmとなるよう回転数を調整した。
Si基板上に形成された膜の屈折率(nd)を分光反射法で測定した。また、ガラス基板上に形成された膜の鉛筆硬度を測定した。成膜条件と屈折率とボトム位置での反射率を表1にまとめる。
[Examples 1 to 14]
After adding a high-boiling solvent to a 10% solution of borazine resin in ethylbenzene, apply it to a glass substrate (Corning7059, nd = 1.52) and Si substrate by spin coating, dry at 100 ° C for 1 minute, and then at 180 ° C in the atmosphere. A high refractive index film having a high hardness was obtained by heating for 30 minutes at 300 ° C. for 10 minutes. The number of rotations was adjusted so that the film thickness was 0.1 μm.
The refractive index (nd) of the film formed on the Si substrate was measured by a spectral reflection method. Moreover, the pencil hardness of the film | membrane formed on the glass substrate was measured. Table 1 summarizes the film forming conditions, the refractive index, and the reflectance at the bottom position.

Figure 2011247918
Figure 2011247918

〔実施例15〕
ボラジン系樹脂3のエチルベンゼン10%溶液をガラス基板(Corning7059)及びSi基板にスピンコーティングにより塗布し、100℃で1分感乾燥後、ピッチ90nm、高さ80nm、直径60nmの円柱形状を有する金型を用いインプリント処理を行った300℃で30分硬化処理する事で高硬度の低屈折率膜を得た。膜厚が0.1μmとなるよう回転数を調整した。
Si基板上に形成された膜の屈折率(nd)を分光反射法で測定した。また、ガラス基板上に形成された膜の筆硬度を測定した。屈折率は1.30、ボトム位置で反射率が0.3%、鉛筆硬度は1Hであった。外観上問題となるヘイズは観察されなかった。
Example 15
A 10% ethylbenzene solution of borazine resin 3 is applied to a glass substrate (Corning 7059) and Si substrate by spin coating, dried at 100 ° C for 1 minute, and then a mold having a cylindrical shape with a pitch of 90 nm, a height of 80 nm, and a diameter of 60 nm A low refractive index film having a high hardness was obtained by curing at 300 ° C. for 30 minutes using imprinting. The number of rotations was adjusted so that the film thickness was 0.1 μm.
The refractive index (nd) of the film formed on the Si substrate was measured by a spectral reflection method. Moreover, the brush hardness of the film | membrane formed on the glass substrate was measured. The refractive index was 1.30, the reflectance at the bottom position was 0.3%, and the pencil hardness was 1H. No haze that is a problem in appearance was observed.

〔比較例1〕
ボラジン系樹脂3の10%溶液をガラス基板(Corning7059)及びSi基板にスピンコーティングにより塗布し、100℃で1分乾燥後、大気中で300℃でポストアニールする事でボラジン系樹脂膜を得た。膜厚が0.1μmとなるよう回転数を調整した。
本発明の実施例では、表1に示したようにガラス基板(屈折率1.52、片面4.3%反射率)に比べ十分低い反射率が達成されその反射防止効果が確認されると供に、ボラジン系樹脂のみを使用した比較例1の膜(屈折率1.47)に比べ低い屈折率とする事が可能であった。また、外観上ヘイズが認められず透明性が維持され、全ての実施例において1H以上の鉛筆硬度を示した。結果として、単層膜で表1に示した低反射率の反射防止膜の形成が可能となった。
[Comparative Example 1]
A 10% solution of borazine resin 3 was applied to a glass substrate (Corning 7059) and Si substrate by spin coating, dried at 100 ° C. for 1 minute, and post-annealed at 300 ° C. in the air to obtain a borazine resin film. . The number of rotations was adjusted so that the film thickness was 0.1 μm.
In the embodiment of the present invention, as shown in Table 1, when a sufficiently low reflectance is achieved as compared with the glass substrate (refractive index 1.52, reflectance on one side 4.3%) and the antireflection effect is confirmed. Furthermore, it was possible to make the refractive index lower than that of the film of Comparative Example 1 (refractive index: 1.47) using only the borazine resin. Further, no haze was observed on the appearance and transparency was maintained, and in all Examples, a pencil hardness of 1H or more was shown. As a result, it was possible to form an antireflection film having a low reflectance shown in Table 1 as a single layer film.

〔実施例16〕
本発明の低屈折率膜(実施例4、膜厚110nm、nd=1.33)の下部層として屈折率1.65、膜厚88nmのチタニア−アクリル複合膜を用いた2層反射膜(基板:Corning7059、屈折率1.52)では、ボトム位置で反射率が0.1%以下の反射防止膜が形成可能であった。
Example 16
A two-layer reflective film (substrate: Corning 7059) using a titania-acrylic composite film having a refractive index of 1.65 and a thickness of 88 nm as a lower layer of the low refractive index film of the present invention (Example 4, film thickness 110 nm, nd = 1.33). With a refractive index of 1.52), an antireflection film having a reflectance of 0.1% or less could be formed at the bottom position.

本発明の低屈折率組成物は、従来より知られている低屈折率材料に比べ機械的特性が優れる事、大気中水分の影響による経時安定性に優れる事より、反射防止膜としての適用範囲が広がる。機械強度の弱い低屈折率膜が直接触れる事のない場所にその使用範囲が限定されていたのに対し、本発明の低屈折率組成物は反射防止膜として光学素子の最表面部への適用も可能となる。
The low refractive index composition of the present invention is superior in mechanical properties as compared to conventionally known low refractive index materials, and is excellent in stability over time due to the influence of moisture in the atmosphere. Spread. Whereas the range of use is limited to places where the low refractive index film with weak mechanical strength is not directly touched, the low refractive index composition of the present invention is applied to the outermost surface portion of the optical element as an antireflection film. Is also possible.

Claims (2)

ボラジン系ポリマー又はボラジン珪素系ポリマーを主成分として構成された膜であり、膜中に微細細孔が形成されていること又は膜の表面に微細な凹凸が形成されていることを特徴とする低屈折率膜。 A film composed mainly of a borazine-based polymer or a borazine-silicon-based polymer, characterized in that fine pores are formed in the film or fine irregularities are formed on the surface of the film. Refractive index film. 請求項1に記載の低屈折率膜を構成層とした反射防止膜 An antireflection film comprising the low refractive index film according to claim 1 as a constituent layer
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