JP2011191076A - Device for measuring deflection, and device for measuring deflection and axial torsion - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a measuring device which can easily and inexpensively measure the amount of deflection and axial torsion orthogonal to a rotary shaft body in the axial direction in a non-contact manner. <P>SOLUTION: Target bodies 11a and 11b which are provided on the outer peripheral surface of the rotary shaft body 10 being a measuring object and rotate together with the rotation of the shaft body are made to periodically cross an optical path of a light beam from a light-emitting part 3 which is emitted almost parallel with the rotary shaft body 10 in the axial direction, and the light beam not intercepted by the target bodies 11a and 11b or reflected light is received by a light-receiving and operation display part 4. In the device, a change in a position irradiated with the light beam on irradiated surfaces of the target bodies 11a and 11b which is caused by the deflective deformation of the rotary shaft body 10 is detected, and the amount of the deflection of the rotary shaft body 10 is measured based on the result of detection. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to a deflection measuring device that can optically measure the amount of deflection of a rotating shaft body in a non-contact manner, and a deflection that can measure the amount of deflection of a rotating shaft body and the size of a shaft torsion in an optically non-contact manner, and The present invention relates to a shaft torsion measuring apparatus.

  For example, in a power generation turbine plant that generates power by rotating a turbine using energy held by water or steam, high efficiency and high operability and safety are required. In particular, when deformation such as deflection or shaft twist occurs in a turbine that rotates at a high speed, it may cause a very dangerous situation, and in order to ensure the safety as described above, a rotating shaft body such as a turbine may be used. It is important to accurately grasp the amount of deflection and shaft torsion, and to take appropriate measures when abnormalities are recognized.Therefore, there are measuring devices and methods that can measure these easily and with high accuracy. It is desired.

  A conventional technique for measuring the deflection of a rotating shaft has been proposed in Patent Document 1, for example. The technique described in Patent Document 1 relates to a bending moment measuring device for a rotating shaft body. In order to obtain the bending moment of the rotating shaft body, the disk attached to the outer peripheral surface of the rotating shaft body and the end face thereof are opposed to each other. And a distance measuring device for measuring the distance to the disk, and the inclination angle of the disk from the change in the distance caused by deflection during rotation of the rotating shaft body. (A deflection angle of the rotating shaft body) is obtained.

  Moreover, the torque measuring device of a rotating shaft body is proposed, for example in patent document 2, 3, etc. In the torque measuring device described in Patent Document 2, a linear light reflecting portion is provided along the axial direction on the outer peripheral surface of the rotating shaft body, and a first light emitting element and a light receiving element are arranged to face the light reflecting portion. The first and second detection units are provided at two locations in the axial direction, and a control device is provided that calculates torque based on the timing shift of the received light signal output from each detection unit. The torque measuring device described in Patent Document 3 includes a light emitting unit that emits light, a beam adjusting unit that divides a light beam into a plurality of light beams, adjusts the beam diameter of each light beam, and irradiates the rotating shaft body, and the rotation. A plurality of reflecting means attached to the surface of the shaft body for changing the reflection state of the plurality of light beams, a plurality of detecting means for detecting intensity changes of the reflected light of the plurality of light beams, and Signal processing means for obtaining a torque of the rotating shaft body by calculating a rotation period based on an output signal is provided.

JP 57-12338 A JP 2003-261808 A JP 2000-205977 A JP 2002-333376 A JP 2006-84462 A

  However, in the technique described in Patent Document 1, since the distance to the disk on the outer peripheral surface of the rotating shaft body is directly measured by a distance measuring device, the direction in which the rotating shaft body is perpendicular to the axial direction without bending during rotation. When shaft runout occurs, it is difficult to detect the shaft touch. In addition, when the deflection angle of the rotating shaft body is small, a very small distance must be measured by the distance measuring device, so that the measuring device needs high measurement accuracy, and as a result, the distance measuring device is expensive. There is a problem of becoming.

  In addition, the torque measuring devices described in Patent Documents 2 and 3 are good methods for measuring the torque applied to the rotating shaft, but in the first place, the amount of deflection of the rotating shaft that occurs during rotation is measured. Therefore, there is a problem that the amount of deflection cannot be measured.

  The present invention has been made to solve the above-mentioned problems, and its purpose is to easily and inexpensively measure a deflection and a deflection amount in a direction perpendicular to the axial direction of the rotating shaft body in a non-contact manner, Another object of the present invention is to provide an apparatus for measuring the amount of deflection of a rotating shaft body and a shaft torsion, to which the deflection measuring apparatus is applied. In the following description, the term “deflection” or “deflection deformation” is used in the meaning including axial runout. Further, in the case of the “deflection amount”, the amount of displacement in the radial direction of the rotating shaft body (including the component in the direction of the amount of displacement) due to deflection deformation and axial deflection at a predetermined position in the axial direction of the rotating shaft body. ).

  In order to achieve the above object, a deflection measuring apparatus according to the present invention is substantially parallel to the axial direction of the rotating shaft body by a target body that is provided on the outer peripheral surface of the rotating shaft body that is the object to be measured and rotates with the rotation. The light beam emitted from the light emitting unit is periodically blocked, and the light beam not reflected by the target body or the reflected light therefrom is received by the light receiving / calculating display unit, so that the deflection of the rotating shaft body is deformed. A change in the irradiation position of the light beam on the irradiated surface of the target body due to the above is detected, and a deflection amount of the rotating shaft body is measured based on the detection result.

The deflection measuring apparatus of the present invention uses the shape of the irradiated surface of the target body provided on the outer peripheral surface of the rotating shaft body, and determines the irradiation position of the light beam on the irradiated surface due to the deflection deformation of the rotating shaft body. A change is detected, and the amount of deflection of the rotating shaft is measured based on the detection result. As such a target body,
(1) A flat plate attached so as to be inclined with respect to the optical path of the light beam so that the light beam is reflected to the outside of the rotating shaft body by a reflecting surface provided on the whole surface or a part of the irradiated surface. Or curved plate,
(2) The rotary shaft body can be fitted on the outer peripheral surface, and the cross section parallel to the axial direction of the rotary shaft body is substantially semicircular or semi-elliptical, and the entire irradiated surface or part of the outer surface. Or (3) the width of the rotational direction can be fixed at a constant rate according to the radial height distance from the outer peripheral surface. A light-shielding plate or a reflecting plate having a width changing portion formed to change,
(4) A width changing portion comprising an opening that can be attached to the outer peripheral surface of the rotating shaft body and whose width in the rotating direction changes at a constant rate according to a radial height distance from the outer peripheral surface. A light shielding plate formed in the region,
(5) At the side of the rotating shaft body, the light beam from the light emitting portion can be attached to be inclined with respect to the optical path of the light beam so as to be reflected outward, and the width changing portion shown in (3) is provided. A reflector having,
(6) The rotary shaft body can be fitted to the outer peripheral surface, and the cross section parallel to the axial direction has a substantially semi-circular or substantially semi-elliptical shape, and the entire surface or a part of the irradiated surface on the outer surface is circumferential. An annular body in which a reflecting portion having the same shape as the width changing portion is disposed,
Etc. are included. A plurality of these target bodies are provided at equal intervals in the circumferential direction of the rotating shaft body (in the case of the annular bodies of (2) and (6) above, the reflecting portion described in each of the above items is attached to the outer periphery of the rotating body. A plurality of the irradiation surfaces can be provided at equal intervals in the circumferential direction). Here, the width changing portions shown in the above (3) and (5) are not limited to those formed so that the light shielding width in the rotation direction changes linearly (increase or decrease), It may be formed such that the light shielding width in the direction changes (increases or decreases) exponentially (including an inversely proportional relationship).

  Further, the deflection amount and shaft torsion measuring device according to the present invention changes the width in the rotational direction at a constant rate according to the radial distance from the first target body and the outer peripheral surface of the rotating shaft body that is the object to be measured. A pair of these two target bodies each having a width changing portion formed so as to be provided on the outer peripheral surface of the rotating shaft body at a predetermined distance in the axial direction, and rotating in accordance with the rotation of the rotating shaft body The light beam of the light beam from the light emitting unit irradiated by the target body approximately parallel to the axis of the rotating shaft body is periodically traversed, and the light beam not shielded by the one set of target bodies or the reflected light from the second target body Is received by the light receiving / calculating display unit, and the relative displacement in the circumferential direction of the second target body with respect to the first target body and the first target body due to axial twisting or deflection deformation of the rotating shaft body and the first Detecting a change in the scanning position of the light beam in the width change of the target body, characterized by measuring the deflection amount and the torsional size of the rotary shaft body based on the detection results.

  A plurality of sets of the first target body and the second target body can be regularly provided on the outer peripheral surface of the rotating shaft body. Each set of these target bodies can also be formed in an annular shape.

  The deflection measuring device of the present invention receives a light beam that is not shielded by a target body provided on an outer peripheral surface of a rotating shaft body that is an object to be measured or reflected light from the target body, thereby deforming the deflection of the rotating shaft body. Since the change in the irradiation position of the light beam in the target body caused by the detection is detected and the deflection amount of the rotating shaft body is measured based on the detection result, the deflection of the rotating shaft body can be easily and inexpensively performed. The amount can be measured without contact. In addition, in the deflection measuring apparatus of the present invention, it is possible to measure shaft runout in which the rotating shaft body is not accompanied by deflection. In particular, by using a target body having a width changing portion or opening of a predetermined shape and setting the light beam to scan these predetermined height positions in the rotation direction, the light shielding width or light transmission width on the scanning line is set. Changes can be converted into radial irradiation position changes in the target body due to deflection deformation and axial deflection of the rotating shaft body, and this change is detected and calculated in the light reception / calculation display unit, so that the deflection amount of the rotating shaft body Can be obtained more easily and inexpensively.

  Further, according to the deflection and axial torsion measuring device of the present invention, the reference first target body and the second target body having the predetermined width changing portion are separated by a predetermined distance in the axial direction of the rotating shaft body. And the first target body is irradiated so that the light beam from the light emitting section scans the predetermined height position of the width changing section in the second target body. Therefore, the change in the scanning height position of the light beam accompanying the amount of deflection including the axis touch of the rotating shaft during rotation is detected as a change in the light shielding width in the rotation direction in the width changing portion. The amount of deflection of the rotating shaft is measured, and at the same time, the rotating shaft is determined from the change in the relative positional relationship between the first target body serving as the reference and the second target body at the scanning height position of the light beam. It is possible to measure the axial twist.

  As described above, the deflection measuring device of the present invention is simple and inexpensive by simply arranging the light emitting unit and the light receiving / calculating display unit around the rotating shaft body and providing the target body on the outer peripheral surface of the rotating shaft body. The amount of deflection of the rotating shaft can be measured in a non-contact manner, and further, the amount of deflection of the rotating shaft and the twist of the shaft can be measured simultaneously by separately providing a target body as a reference together with the target body.

It is a figure showing one embodiment of a deflection measuring device of the present invention. It is a figure which shows the measurement principle of the deflection measuring apparatus shown in FIG. It is a figure showing one embodiment of a deflection measuring device of the present invention. It is a figure which shows the measurement principle of the deflection measuring apparatus shown in FIG. It is a figure which shows the measurement principle at the time of changing a 2nd target body in the deflection | deviation measuring apparatus of FIG. It is a figure which shows one Embodiment of the deflection | deviation and axial twist measuring apparatus of this invention. It is a figure which shows another embodiment of the deflection | deviation and axial twist measuring apparatus of this invention. It is a figure which shows another embodiment of the deflection | deviation and axial twist measuring apparatus of this invention. FIG. 7 is a diagram showing a waveform of an output signal when deflection and shaft twist occur in the rotating shaft body in the deflection and shaft twist measurement device shown in FIG. 6. It is a figure which shows another embodiment of the deflection | deviation and axial twist measuring apparatus of this invention. FIG. 11 is a diagram showing a waveform of an output signal when deflection and shaft twist occur in the rotating shaft body in the deflection and shaft twist measurement device shown in FIG. 10. It is a figure which shows another embodiment of the deflection | deviation and axial twist measuring apparatus of this invention. FIG. 13 is a diagram showing a waveform of an output signal when deflection and shaft twist occur in the rotating shaft body in the deflection and shaft twist measurement device shown in FIG. 12. It is a figure which shows another embodiment of the deflection | deviation and axial twist measuring apparatus of this invention. In the measuring device shown in FIG. 14, it is a figure which shows the waveform of the output signal at the time of changing the shape of a 2nd target body. In the measuring device shown in FIG. 14, it is a figure which shows the waveform of the output signal at the time of changing the shape of a 2nd target body. It is a figure which shows another embodiment of the deflection | deviation and axial twist measuring apparatus of this invention. FIG. 17 is a diagram illustrating a waveform of an output signal when deflection and shaft twist occur in the rotating shaft body in the deflection and shaft twist measurement device illustrated in FIG. 16. It is a figure which shows another embodiment of the deflection | deviation and axial twist measuring apparatus of this invention.

Hereinafter, embodiments of the deflection measuring device and the deflection and shaft torsion measuring device of the present invention will be described with reference to the accompanying drawings, but the present invention is not limited to the following embodiments. In the following description, the term “rotation” of the rotating shaft body is used to mean rotation at a constant speed.
(1) Deflection Measuring Device for Rotating Shaft Body First, some examples of the embodiment of the deflection measuring device of the present invention will be described. In the following drawings, the same or common parts are denoted by the same reference numerals, and redundant description will be omitted below.
[Embodiment 1]
FIG. 1 shows an example of an embodiment of a deflection measuring apparatus according to the present invention, in which (a) is an overall configuration diagram and (b) is a front view. The deflection measuring apparatus 1 of the embodiment shown in this figure is opposed to the target bodies 11a and 11b attached to the outer peripheral surface of the rotating shaft body 10 as the object to be measured, and the regions at both ends in the axial direction of the rotating shaft body 10 respectively. The light emitting unit 3 and the light receiving / calculating display unit 4 are arranged. The rotary shaft body 10 is rotatable in the direction of the arrow in the figure by a rotational drive action from a rotary shaft body drive source (not shown). The light emitting unit 3 and the light receiving / calculating display unit 4 are arranged so that the optical path of the light beam from the former to the latter is substantially parallel to the axial direction of the rotary shaft 10, and with the rotation of the rotary shaft 10. The moving target bodies 11a and 11b block the optical path.

  The target bodies 11a and 11b attached to the outer peripheral surface of the rotating shaft body 10 are configured by a light shielding plate that does not transmit the light beams 21 and 22 irradiated thereto in the thickness direction. As shown in FIG. 1B, these target bodies 11a and 11b have a side (corresponding to the lower base of the trapezoid) extending in the radial direction of the rotary shaft body 10 and a side parallel to the side (upper base of the trapezoid). ), A hypotenuse that intersects with these at an acute angle, and a side that is joined to the outer peripheral surface of the rotating shaft 10. In the triangular region formed by the hypotenuse and the side conceived at the upper base, as the radial distance from the outer peripheral surface of the rotating shaft 10 increases, the rotational width (light-shielding width) decreases linearly. And constitutes a width changing portion. The angle formed between the side extending in the radial direction and the hypotenuse is preferably set to an acute angle as small as possible in consideration of a height restriction from the outer peripheral surface of the rotating shaft 10 of each target body. Thereby, it becomes easy to determine the timing between the light shielding state and the non-light shielding state in each target body when the light beam scans the hypotenuse in the direction of the rotation shaft body of the rotation shaft body 10. In FIG. 1, the target bodies 11a and 11b are shown as substantially trapezoidal shapes. However, the target bodies 11a and 11b are not limited thereto, and may be, for example, substantially triangular shapes. Further, the width changing portion in each target body is not limited to the one formed so that the width in the rotation direction linearly decreases in accordance with the height distance from the outer peripheral surface of the rotating shaft body 1, and is exponential. (Including an inversely proportional relationship) may be formed such that the width decreases. Moreover, the target bodies 11a and 11b can also form the irradiated surface by a reflective surface. In this case, by providing the light receiving / calculating display unit 4 at a position close to the light emitting unit 3, for example, it is possible to obtain the same effect as the present embodiment.

  The target bodies 11a and 11b can be mounted on the outer peripheral surface at an appropriate inclination angle with respect to the axis of the rotary shaft 10 if a width changing portion is formed when viewed from a direction parallel to the optical path of the light beam. However, it is preferably attached at a substantially right angle (substantially parallel to the rotation direction) with respect to the optical path of the light beam from the light emitting section described later, and more preferably at a right angle. Moreover, it is preferable that the target bodies 11a and 11b are erected substantially perpendicularly from the outer peripheral surface when they are viewed from the side of the rotary shaft body 10.

  The light emitting unit 3 shown in FIG. 1 includes two light emitting ports that emit two light beams in parallel with each other. Each light emitting port is disposed so that the optical paths of the two light beams emitted from these light emitting openings are substantially parallel, preferably parallel, to the axial direction of the rotating shaft body 10. Further, in the cross section perpendicular to the axis of the rotating shaft 10, the light emitting section 3 is formed such that the angle formed by two straight lines connecting the axis (rotation center) and the optical path of each light beam is substantially a right angle, preferably a right angle. It is arranged on one side. By arranging the two light-emitting ports of the light emitting unit 3 in this way with respect to the rotating shaft body 10, an orthogonal coordinate axis that passes through the axis of the rotating shaft body 10 (the coordinate axes constituting this orthogonal coordinate will be referred to below for the sake of convenience). The amount of deflection in the x-axis direction and the y-axis direction can be measured, and as a result, more complicated deflection deformation of the rotating shaft body can be detected. In addition, the number of the light-emitting openings arrange | positioned at a light emission part is not limited to two of the example of FIG. 1, Three or more may be sufficient, and the deflection amount in a certain radial direction of the rotating shaft body 10 is simply measured. If so, there may be only one. When further irradiating a plurality of light beams along the outer periphery of the rotating shaft in parallel to the axial direction, light emitting portions having the same or different number of light emitting ports can be used in appropriate combination.

  As the light source of the light emitting unit 3, a light source capable of continuous light emission is preferably used. The light source is not particularly limited as long as it can emit light of a type that can be received by the light receiving unit, and includes various lasers, photoelectric conversion elements such as light emitting diodes, or ordinary lamps. The light emitting unit 2 may also be configured to be capable of continuous light emission by appropriately combining such a light source and a lens, a slit, a pinhole, and the like. Among these, it is preferable to use various lasers having directivity.

  The two light beams L1 and L2 from the light emitting unit 3 respectively pass through predetermined height positions from the outer peripheral surface of the rotating shaft 10, and receive light and light installed on the optical path on the opposite side in the axial direction of the rotating shaft 10. The calculation display unit 4 is configured to receive light. The target bodies 11a and 11b that rotate and move with the rotation of the rotary shaft 10 traverse the light paths of the light beams L1 and L2 so as to intermittently block the light beams L1 and L2. Each of the light beams L1 and L2 apparently scans at a predetermined height level in the width changing portion of each of the target bodies 11a and 11b. The light emitting unit 3 is installed at an appropriate position around the rotary shaft body 10, and light emitted from the light emitting unit 3 is irradiated onto the irradiated surfaces of the target bodies 11a and 11b using an optical transmission means such as an optical fiber cable. Similarly, the light receiving / calculating display unit 4 is also arranged at an appropriate position around the rotary shaft body 10 and guided so as to receive light rays not blocked by the target bodies 11a and 11b via the light transmission means. be able to.

  In FIG. 1, the light reception / calculation display unit 4 includes a light reception unit 5, a calculation display unit 6, and a signal line 7 that electrically connects them. As the light receiving unit 5, a known photoelectric conversion element that can receive the light beams L <b> 1 and L <b> 2 and output an electric signal by photoelectric conversion, or a device including these can be used. Specific examples of such a photoelectric conversion element include known ones such as a photodiode and a phototransistor. In addition, an imaging device such as a CCD camera can be used as the light receiving unit 5. The light receiving unit 3 is disposed at a position where the reflected light from the guiding means 22 can be received in the lateral region of the rotating shaft 10. As shown in FIG. 1, the light receiving unit 5 is not limited to a configuration capable of receiving two light beams, and may be configured to receive only one light beam, and is necessary. If so, it may be configured to receive a plurality of light beams. When it is necessary to receive a plurality of light beams, these light receiving parts can be used in appropriate combination.

  The arithmetic processing unit 6 receives an electric signal input from the light receiving unit 5 through the signal line 7, calculates and displays the torque applied to the rotary shaft body 10 as will be described later, and responds to the calculation result outside if necessary. Can be used that has a function of outputting a signal to be output. The light receiving unit 5 and the arithmetic processing unit 6 may be configured separately or may be configured integrally.

  While the light beams L1 and L2 emitted continuously from the light emitting unit 3 are not blocked by the width changing portions of the target bodies 11a and 11b that rotate, the light receiving unit 5 receives the light beams L1 and L2 and has a predetermined size. The electrical signal is output to the calculation display unit 6. On the other hand, while the light beams L1 and L2 are blocked by the target bodies 11a and 11b, the light receiving unit 5 does not receive light and does not output an electric signal. As a result, the electric signal output from the light receiving unit 5 is a pulse. A waveform will be exhibited. The calculation display unit 6 is configured to obtain the light shielding time from the signal from the waveform of the electric pulse signal received from the light receiving unit 5. When the deflection deformation occurs during the rotation of the rotating shaft 10, the scanning height position of the light beam in the width changing portion of the target bodies 11a and 11b changes in the radial direction of the rotating shaft 10, and as a result, Since the light shielding time changes, the amount of deflection generated in the rotating shaft 10 can be calculated using this. In addition, the calculation display unit 6 further receives an input of the rotational speed signal of the rotary shaft body 10 to determine whether or not the rotational speed of the rotary shaft body 10 is constant (the variation in the rotational speed is within a predetermined range). Or not) may be determined.

FIG. 2 shows a height position where the light beam scans on the width changing portion of the target body 11a depending on the presence or absence of deflection deformation occurring in the rotating shaft 10 (FIG. 2A) and an electric pulse signal output from the light receiving section 3 (same as above). It is the figure which showed the relationship with figure (b)-(d)). In a state where the rotation shaft body 10 is not bent, as shown in FIG. 2C, while the target body 11a (or 11b) blocks the optical path of the light beam from the light emitting unit 3, the target body 11a. (Or 11b) A height position at which the light beam scans (this height position may be defined by a radial distance from the outer peripheral surface of the rotary shaft 10 or by a distance from the tip of the target body 11a. may be, but is defined by the distance the latter in Figure 5.) as the x _0, during which time the light receiving unit 5 does not output the electric signal by not receiving (hereinafter, referred to as light-blocking time.) Request T ₀ be able to.

When bending deformation occurs in the rotating shaft 10, as shown in FIG. 2 (a), the height position at which the light beam scans on the width changing portion of the target body according to the direction of the bending deformation is the rotating shaft. As a result, the shading width in the rotation direction changes, and as a result, the shading time changes. For example, if the figure toward and bending downward the right-hand portion the deformation of the rotating shaft 10 occurs, a height position at which scanning of the light beam on the target member 11a is changed from x ₀ to x _1, the light-shielding time with it Becomes shorter from T ₀ to T ₁ (see FIG. 2D). Also, if towards the FIG upward bending deformation in the right portion of the rotary shaft 10 during the rotation occurs, the height position at which light scans changes from x ₀ to x _2, the light-shielding time along with it T ₀ becomes longer and _{T 2} (see FIG. 2 (e)). Thus, by obtaining the light shielding time before and after the deflection deformation and further detecting the change in the scanning height position of the light beam in the width change portion of the target body, the deflection amount of the rotating shaft body 10 can be calculated by the following formula (Formula 1 or Formula 1). 2).

Further, in FIG. 1, when the scanning height positions of the light beams L1 and L2 in the width change portions of the two target bodies 11a and 11b change, and the respective light blocking times change accordingly, each target body each determined amount of deflection component in x axis direction and y axis direction as the mounting direction by the formula (if, x-axis direction and the y-axis direction of the deflection of components of each x _n, and y _n), the formula 3 Based on these vector sums, the dynamic behavior (dynamic deflection amount) (z _n ) of the deflection amount generated in the rotating shaft 10 can be obtained.

[Embodiment 2]
FIG. 3 is a diagram showing another example of the embodiment of the deflection measuring apparatus of the present invention. The deflection measuring apparatus 1 shown in this figure includes two target bodies 8 and 9 attached to the outer peripheral surface of a rotating shaft body 10 that is an object to be measured, a light emitting unit 3 and a light receiving unit disposed around the rotating shaft body 10. -It is comprised from the calculation display parts 4 and 4.

  As shown in FIG. 3, the target bodies 8 and 9 are curved plates of the same shape and the same size, which are curved only in one direction and have an irradiated surface (reflecting surface) that reflects light on the convex surface side. These target bodies 8 and 9 are attached to the outer peripheral surface of the rotary shaft body 10 with the irradiated surface made of a convex surface facing the light emitting section 2 side. The mounting angle of the target bodies 8 and 9 with respect to the axial direction of the rotary shaft body 10 is set to a substantially right angle, preferably a right angle, and these target bodies 8 and 9 are respectively substantially perpendicular to the outer peripheral surface of the rotary shaft body 10. It is preferable to stand vertically. The mounting angles of the two target bodies 8 and 9 can be set differently from each other, but are preferably set to be approximately the same.

  The light emitting unit 3 can irradiate two parallel light beams L1 and L2 along the axial direction of the rotating shaft body 10, and a straight line connecting each of the light beams L1 and L2 and the rotation center of the rotating shaft body 10. Are arranged in an outer region of one end of the rotary shaft 10 so as to intersect at right angles. As this light emission part 3, what was shown in the said Embodiment 1 provided with the light source which can light-emit continuously can be used conveniently.

  The light reception / calculation display unit 4 is arranged at a position where the reflected light from the target bodies 8 and 9 can be received in the breaking news area of the rotary shaft body 10. The light reception / calculation display unit 4 is not particularly limited as long as it can receive reflected light from the reflecting plates 7 and 8 and can detect a relative change in the light receiving position of the reflected light. As the light receiving / calculating display units 4 and 4, in FIG. 3, in order to facilitate understanding of the operation, a plate-like shape provided with a scale unit 4 a on one surface and arranged along the axial direction of the rotary shaft body 10. Although schematically shown by a body, in practice, a known image processing apparatus including an imaging apparatus such as a CCD camera can be suitably used instead of such an apparatus. In this case, in the CCD camera, the change in the light receiving position of the reflected light due to the state of deflection deformation to the rotating shaft 10 is converted into the amount of change in the coordinate position depending on the number of pixels, and the amount of deflection of the rotating shaft 10 is calculated and displayed. Can do.

  FIG. 4 is a diagram for explaining the measurement principle of the present embodiment shown in FIG. In this figure, only the light ray L1 of the two light rays is shown, but the other light ray L2 can be shown in the same manner. The light beam L1 from the light emitting unit 3 is irradiated toward the irradiated surface of the target body 8 in a state where the rotary shaft body 10 is not deformed, and the reflected light therefrom is received by the light receiving / calculating display unit 4. Is done. In FIGS. 3 and 4, the light receiving position in the light receiving / calculation display unit 4 in this state is indicated by “0” of the scale unit 4a).

  In FIG. 3, in the case where the right side portion of the rotating shaft body 10 is bent upward in the direction of the drawing and the rotating shaft body 10 is in the state of 10 a, the target body 8 becomes light emitting portion 3 along with the bending deformation. (See reference numeral 8a in the figure). When the irradiated surface of the reflecting plate 8a is irradiated with the light beam L1, the incident angle and the reflecting angle change from those when there is no deflection deformation. As a result, the reflected light 21a is received on the light emitting unit 3 side as compared with the case where there is no deflection deformation in the scale unit 4a of the light receiving / calculating display unit 4. In addition, when the right side portion of the rotating shaft body 10 is deformed downward toward the drawing and the rotating shaft body 10 is in the state 10b, the target body 8 is further tilted (see FIG. (See 8b). Accordingly, the incident angle and the reflection angle of the light beam L1 at the irradiation position on the target body 8 change, and the reflected light 21b is received on the light emitting unit 3 side of the scale unit 4a of the light receiving / calculating display unit 4. . As described above, the change of the light receiving position of the reflected light on the light receiving / calculation display unit 3 when the deflection is not generated in the rotating shaft 10 and when the deflection is generated is obtained by the scale unit 4a, thereby the reflecting plate 7 The amount of deflection of the rotary shaft body 10 at the installation position can be easily known in an amplified state on the scale portion 4a depending on the distance between the target body 8 and the scale 4a.

  If the relationship between the position where the deflection amount of the rotating shaft 10 is to be obtained and the installation position of the reflectors 8 and 9 is known, the amount of deflection of the rotating shaft 10 at the position where the deflection amount is desired can be obtained. . Furthermore, by providing a plurality of the reflecting plates at equal intervals in the circumferential direction of the rotating shaft body 10, it is possible to know a dynamic change in the amount of bending (the state of bending deformation) during the rotation of the rotating shaft body 10.

  In addition, as the target bodies 8 and 9 used in this embodiment, for example, a flat plate shape without a curve as shown in FIG. 5 may be used, or as a reflecting surface that is curved in any one of irregularities in each orthogonal direction. A curved plate having an illuminated surface may be used. Even when these target bodies are used, the measurement principle of the present embodiment is the same as described above, and therefore, a duplicate description is omitted.

[Embodiment 3]
The deflection measuring apparatus of the present invention can also be configured by combining the examples shown in the first and second embodiments. Specifically, the width change portions are formed in the target bodies 8 and 9 in the second embodiment in the same manner as the target bodies 11a and 11b shown in the first embodiment, and the reflected light reflected from the target bodies 8 and 9 is blocked by this. The light receiving / calculating display units 4 and 4 installed at the respective positions can receive the light rays that are not to be received. By adopting such a configuration, the method shown in the first and second embodiments can be changed as appropriate, and the amount of deflection of the rotating shaft body 10 can be obtained by each measurement method, thereby improving measurement accuracy. There are advantages.

(2) Deflection amount and shaft torsion measuring device of rotating shaft body Next, an embodiment of the deflection amount and shaft torsion measuring device of the rotating shaft body of the present invention will be described. The deflection amount and shaft torsion measuring devices shown in the following embodiments are each at least one set of target bodies (hereinafter referred to as a predetermined distance) attached to the outer peripheral surface of a rotating shaft body, which is a measurement object, in the axial direction. The first target body and the second target body), and light beams passing through a predetermined height position from the outer peripheral surface thereof substantially parallel to the axial direction of the rotating shaft body are provided in the first and second target bodies. It is configured to block with. As in the case of the first embodiment, the light emitting unit uses a type that emits two light beams parallel to each other in the same direction from two light beam emission ports arranged at predetermined positions. In addition, the two light beams pass through the same position as in the embodiment on the outer peripheral surface of the rotating shaft body, and the amount of deflection on the x, y orthogonal coordinate axes passing through the axis of the rotating shaft body. It can be measured. In the following drawings, the same or common parts are denoted by the same reference numerals, and overlapping description of these parts is omitted.

[Embodiment 4]
FIG. 6 is a diagram showing a configuration of an example of an embodiment of the deflection and shaft torsion measuring apparatus of the present invention. Moreover, FIG. 7 has shown each arrangement | positioning of the 1st target bodies 11a-11d and 2nd target bodies 12a-12d on the rotating shaft body shown in FIG. 6, (a) is a perspective view, (b) is It is a front view. In the embodiments shown in these drawings, the first target bodies 11a, 11b, 11c, 11d and the second target bodies respectively attached to the outer peripheral surfaces of both ends in the axial direction of the rotating shaft 10 at equal intervals in the circumferential direction. 12 a, 12 b, 12 c, 12 d, a light emitting unit 3 disposed opposite to both end regions of the rotating shaft body 10, and a light receiving / calculating display unit 4. The light beams L1 and L2 irradiated from the light emitting unit 3 toward the light receiving / calculating display unit 4 pass through a predetermined height position from the outer peripheral surface thereof substantially parallel (preferably in parallel) to the axis of the rotary shaft body 10, respectively. The optical path is set so as to.

  The first target bodies 11a, 11b, 11c, and 11d are light shielding plates of the same shape and the same size having a substantially rectangular planar shape composed of two long sides and short sides. Although the two long sides are illustrated in parallel with each other in FIG. 6, the two long sides are not necessarily limited to being parallel to each other. For example, the distance between the two long sides is continuous in one direction from one end to the other end. It can also be arranged and formed like a fan shape increasing in number. The first target bodies 11 a to 11 d are attached to the outer peripheral surface of the rotary shaft body 10 at one end in the length direction or the width direction. In attaching each of the first target bodies 11a to 11d, at least one of two long sides or short sides extending substantially radially from the outer peripheral surface of the rotary shaft body 10 is aligned in the radial direction of the rotary shaft body 10 It is preferable to make it. In the example shown in FIG. 6, the direction of the long side on the rear side in the rotation direction of the rotating shaft 10 is configured to coincide with the radial direction (normal direction). The first target bodies 11a to 11d can be attached using a known method such as adhesion or welding after being embedded in the outer peripheral surface of the rotating shaft body 10 directly or from the outer peripheral surface.

  Each of the second target bodies 12a, 12b, 12c, and 12d has a triangular shape of the same shape and the same size, preferably a right triangle, and its short side is fixed to the outer peripheral surface of the rotary shaft body 10 by a known method. In this case, the whole is constituted by the width changing portion in which the width in the rotation direction of the rotating shaft body 10 decreases as the radial distance from the outer peripheral surface of the rotating shaft body 10 increases. As shown in FIG. 7B, these second target bodies 12a to 12d are first ends when the rotary shaft body 10 is viewed from the front side in the rotational direction (when viewed from the axis direction of the rotary shaft body 10). The direction of the one target bodies 11a to 11d (sides near the target bodies 11a to 11d) matches the radial direction (normal direction) of the rotary shaft body 10. Here, the angle formed between the oblique side on the rear side in the rotation direction and the end side on the front side is preferably set as small as possible in order to facilitate the determination of the timing of light reception and light shielding as described above. The attachment of the second target bodies 12a to 12d to the rotating shaft body 10 can also be performed using a known method such as welding or adhesion as in the case of the first target bodies 11a to 11d.

  FIG. 8 is a diagram showing a modification in which the planar shape of the first target body in FIG. 7 is changed. As shown in this figure, a triangular (preferably a right triangle) planar light shielding plate can be used as the first target bodies 11a to 11d. In this case, the direction of one of the two ends extending outward from the rotation shaft body 10 of the first target bodies 11a to 11d matches the radial direction (normal direction) of the rotation shaft body 10. It is preferable to arrange them as follows. In FIG. 7, when viewed along the axial direction from the outside of the rotating shaft body 10, the orientation of the end sides of the first target bodies 11 a to 11 d near the second target bodies 12 a to 12 d is that of the rotating shaft body 10. It is matched with the radial direction (normal direction).

  Each of the first target bodies 11a to 11d and each of the second target bodies 12a to 12d are arranged on the outer peripheral surface of the rotating shaft body 10 so as to form a pair with each other in this order. As shown in FIG. 7 and FIG. 8, when each pair of the first target bodies 11 a to 11 d and the second target bodies 12 a to 12 d is viewed from the outside of the rotary shaft body 10 along the axial direction. In addition, a gap of a predetermined size is provided between the edges facing each other and matching the radial direction of the rotary shaft 10, and they are arranged so as not to overlap each other. The gap between the end sides is preferably set to a value larger than the amount of shaft twist predicted from the rotational force of the rotary shaft body 10 and the like.

  FIG. 9 is a diagram showing the measurement principle of the deflection amount and the shaft twist of the embodiment shown in FIG. In this figure, (a) to (c) are the positional relationship between the first target body 11a and the second target body 12a provided on the outer peripheral surface of the rotary shaft 10, and the light rays on the irradiated surface of these target bodies. The scanning height position and (d) to (l) are output from the light receiving unit 3 corresponding to each of the positional relationship between the two target bodies and the search height position of the light beam in (a) to (c). The waveforms of electrical signals are shown respectively. When the row of (a), (d), (g), and (l) does not cause shaft torsion in the rotary shaft body 10 and only bending deformation occurs, (b), (e), ( h) When the row of (k) is twisted in the direction opposite to the rotational direction in the rotating shaft 10 and bending deformation occurs, the remaining row is twisted in the rotating direction in the rotating shaft 10; Each of the cases where deflection deformation also occurs is shown. In FIGS. 1A to 1C, a cross section in a direction perpendicular to the axial direction of the rotary shaft 10 is shown in order to simplify the positional relationship of the set of target bodies and the scanning height position of the light beam. An arcuate outer peripheral surface is shown as a plane.

In FIG. 9A, in a state where the shaft is not twisted or bent in the rotating shaft 10, the light beam is at a height position 23 (second target) of both irradiated surfaces of the first target body 11a and the second target body 12a. The distance x ₀ ) from the tip of the body 12a is scanned along the rotation direction indicated by the arrow in the figure. In addition, while the light beam passes through the gap between the first target body 11a and the second target body 12a and is received by the light receiving unit 5, an electrical signal is output from the light receiving unit 5 for a predetermined time. 9 shows a light receiving time _{T 20} in the waveform of the pulse signal (FIG. 9 (d), (g), (j) see). From this state, when only the shaft twist occurs in the rotating shaft body 10, if the shaft twist occurs in the direction opposite to the rotating direction of the rotating shaft body 10, this is applied from the outside along the axial direction of the rotating shaft body 10. When viewed, the second target body 12a is shifted toward the first target body 11a, and the gap between the two becomes smaller. As a result, the light receiving time in the pulse signal corresponding to the gap becomes shorter, and T ₂₀ changes _{T 21} (FIG. 9 (e), (h) , (k) refer). On the other hand, if the rotational shaft body 10 is twisted in the rotational direction, the second target body 12a is displaced away from the first target body 11a, resulting in a large gap between them. receiving time becomes longer in a pulse waveform corresponding to the gap _changes from _{T 20} to _{T 22} (FIG. 9 (f), (i) , (l) refer). In addition to obtaining these light receiving times, the computation display unit 6 obtains the rotation period of the rotary shaft body 10 from the periodically repeated waveform of the output pulse signal, and calculates the angular velocity ω by Equation 3. .

ここで、式３中、Ｔ_０は回転軸体１０の回転周期を示す。

Here, in Expression 3, T ₀ indicates the rotation period of the rotating shaft 10.

Using each value of the light receiving times T ₂₁ and T ₂₂ and the angular velocity ω, the shaft twist dn can be obtained by the following formula 5 or formula 6. The shaft twist generated in the rotating shaft body 10 rotating at a constant speed in this manner appears as a change (shift) in the circumferential direction of the second target body corresponding to each first target body on the outer peripheral surface. It can be obtained by detecting the change in the gap between the opposite ends of the pair of first target body 11a and second target body 12a.

Next, in the case where only the deflection deformation occurs in the rotating shaft 10, as described above, the scanning height position of the light beam on the irradiated surface (width changing portion) included in the second target body of each set is Since the rotation shaft body 10 changes in the radial direction, the deflection amount in the radial direction of the rotation shaft body 10 can be converted into a change in the distance that the light beam scans in the rotation direction on the width change portion of the second target body. Therefore, by detecting the change in the scanning distance of the light beam on the second target body, the amount of deflection generated in the rotating shaft body 10 can be obtained. Specifically, when bending deformation occurs at the end of the rotating shaft body 10 on the second target body 12a side in FIG. 9, the scanning of the light beam L1 on the second target body 12a is performed depending on the direction of the bending deformation in any of the vertical directions. (the distance from the tip of the second target member 12a, from _{x 0 x 1} or _{x 2)} height is 23 to 24 or 25 changes. Thus, the distance of scanning in the rotational direction of the light beam L1 is changed on the irradiated surface of the second target member 12a, T shading time output for outputting the light receiving portion 5 with the change in this distance becomes zero from T _{30 31} or changes in the _{T 32} (FIG. 9 (d), (g) , (j) see). By substituting the values of the light shielding time and the distance from the tip of the second target body 12a into Expression 7 or Expression 8, the amount of deflection generated in the rotating shaft body 10 can be measured.

Further, when both the shaft twist and the deflection deformation occur in the rotating shaft body 10, the light receiving time and the light shielding time are respectively obtained from the output pulse signal waveform in the light receiving section 5 in the same manner as described above, thereby rotating the rotating shaft body. 10 can be independently determined. For example, a description will be given by taking as an example a case where axial torsion occurs in the rotation direction of the rotary shaft body 10 and bending deformation occurs downward at the end on the side where the second target body 12a is installed. In this case, the rise time of the pulses corresponding to the gap between the first target member 11a and the second target member 12a by the shaft torsion is changed from T ₂₀ to T _22. Further, the deflection by the scanning height position of the light beam in the width change part of the second target member 12a (distance from the tip) to x ₁ from x _0, T ₃₁ shading time from T ₃₀ corresponding to the scanning distance of the light beam (See FIG. 9I). From the numerical values before and after these changes, the amount of deflection and the amount of shaft twist generated in the rotating shaft body 10 can be measured independently of each other. A section perpendicular to the axis of the rotating shaft 10 is obtained by continuing to periodically measure the amount of deflection or the amount of axial twist with respect to each of the two light beams from the light emitting unit 3 by such a method. In addition, it is possible to track the change in the amount of deflection on the x, y orthogonal coordinate axes, and to improve the measurement accuracy for the torsion of the shaft.

In Formula 7 and Formula 8, the scanning distance of the light beam in the width change portion can be obtained by multiplying each of the light shielding times T ₃₀ , T ₃₁ and T ₃₂ by the angular velocity ω obtained in Formula 3. If the scanning distances are sequentially set to y ₀ , y ₁ , y ₂ ) and y ₀ , y _1, and y ₂ are substituted into T ₃₀ , T _31, and T ₃₂ in these equations, the rotating shaft body is similarly obtained. 10 can be obtained. As described above, by providing the width change portion in the second target body, it is possible to perform the measurement of the deflection amount that cannot be achieved by the conventional torque measurement technique using one set of target bodies simultaneously with the measurement of the shaft torsion. There are advantages.

[Embodiment 5]
FIG. 10 shows a deflection and shaft torsion measuring device according to the present invention in which the shape of the second target body provided on the outer peripheral surface of the rotating shaft body and the positional relationship in the rotational direction between the second target body and the first target body are changed. The other example of embodiment is shown, (a) is a perspective view, (b) is a front view. In this figure, the light emitting unit and the light receiving / calculating display unit (light receiving unit and calculation display unit) having the same basic configuration as in the first embodiment are arranged at the same positions as in the fourth embodiment. It is omitted (the same applies to FIGS. 12, 14, and 17 below).

  The second target bodies 12 a to 12 d shown in FIG. 10 are light shielding plates having a substantially rectangular shape, and are arranged and fixed so that the length direction thereof faces the tangential direction of the outer peripheral surface of the rotary shaft body 10. Triangular through-holes 13, 14,... Through which light can pass in the thickness direction are provided on the rear side in the rotation direction in the central regions of the second target bodies 12 a to 12 d, respectively. The outer shapes of the first target bodies 11a to 11d are not essentially different from those of the embodiment shown in FIG. 7, but the direction of the end side on the front side in the rotational direction is the radial direction of the rotary shaft body 10. It is preferable to arrange and fix each of the first target bodies 11 a to 11 d on the outer peripheral surface of the rotary shaft body 10 so as to match the above.

  As for the positional relationship between the first target bodies 11a to 11d and the second target bodies 12a to 12d corresponding to the first target bodies 11a to 11d, as shown in FIG. The first target bodies 11a to 11d are overlapped on the front side in the rotational direction of the second target bodies 12a to 12d, and the triangular through holes 13, 14, respectively included in the second target bodies 12a to 12d,.・ It is arranged so as not to block. Since the axial twist of the rotating shaft body 10 may occur in the direction of rotation and in the opposite direction, the end of the first target bodies 11a to 11d on the rear side in the rotational direction is preferably the second target body 12a to 12a. It is preferable to be positioned approximately in the middle between the edge on the front side in the rotational direction of 12d and the edge on the front side in the direction of the through holes 13, 14,.

  FIG. 11 shows the positional relationship between a pair of target bodies 11a and 12a of the fifth embodiment (FIG. 11 (a)) and the waveform of an electric pulse signal ((( It is the figure which showed the relationship with b)-(d)). When a deflection deformation occurs in the rotating shaft 10 during rotation, the scanning height position of the light beam on the irradiated surface of these two target bodies 11a and 12a depends on the direction of the deflection deformation. It changes in the up-down direction in the figure from the position 23 in the absence state to 24 or 25. As a result, as shown in FIGS. 11B to 11D, the light receiving time (the width of the peak indicated as “deflection” in the drawing) that the light receiving unit 3 receives through the through hole 13 changes. From the change, the amount of deflection generated in the rotating shaft 10 by the above method can be obtained. In addition, with respect to the shaft torsion that occurs during the rotation of the rotary shaft 10, the position of the second target body 12a relative to the first target body 11a is the rotational direction or the direction opposite to the direction (the direction of arrow S in the figure). Therefore, the first target body 11a and the second target body 12a are partially shielded by the light-shielding time (light reception time due to the reception of the light beam that has passed through the through-hole 13). Therefore, by obtaining this time, it is possible to measure the shaft torsion occurring in the rotating shaft body 10 using the above equation. Further, when both the shaft twist and the deflection deformation occur in the rotating shaft 10, the shaft twist and the deflection amount are determined by the light receiving time and the light shielding time obtained from the waveform of the pulse signal output from the light receiving unit 5 as described above. Each can be measured separately. Also in this case, by continuously measuring the amount of deflection or the like for each of the two light beams from the light emitting unit 3, on the x, y orthogonal coordinate axes in the cross section orthogonal to the axis of the rotating shaft 10. It is possible to track changes in the amount of deflection at the same time, and to improve the measurement system for shaft torsion.

[Embodiment 6]
FIG. 12 shows another example of the embodiment of the deflection and shaft torsion measuring device of the present invention in which the outer shape of the first target body provided on the outer peripheral surface of the rotating shaft body is changed, and (a) is a perspective view. (B) is a front view. The first target bodies 11 a to 11 d in the embodiment of this figure are light shielding plates having a substantially rectangular shape, and the length directions of the first target bodies 11 a to 11 d are substantially parallel to the tangential directions at the respective mounting positions on the outer peripheral surface of the rotary shaft body 10. The arrangement is fixed so as to be. Each of the first target bodies 11a to 11d has slits 11e, 11f,... Penetrating in the thickness direction in parallel to the tangential direction from the outer peripheral surface of the rotary shaft body 10 to a central region at a predetermined height position. Each is drilled. During the rotation of the rotating shaft 10, the light path of the light beam is set so that the light beam emitted from the light emitting unit (not shown) passes through the slits 11e to 11h. In addition, about the external shape of the 2nd target bodies 12a-12d, there is no place essentially different from what is shown in FIG.

  The positional relationship between the first target bodies 11a to 11d and the second target bodies 12a to 12d that form a pair with each of the first target bodies 11a to 11d is the front surface of the rotating shaft body 10 (outside along the axial direction of the rotating shaft body 10). When viewed from above, it is preferable that the second target bodies 12a to 12d be arranged at substantially the middle position in the longitudinal direction of the former slits 11e to 11h. As a result, the light beams that scan the slits 11e to 11h in the longitudinal direction by the rotational movements of the first target bodies 11a to 11d are shielded by the second target bodies 12a to 12d in the middle, resulting in the first Even when the positions of the second target bodies 12a to 12d are deviated from the target bodies 11a to 11d in the rotation direction of the rotary shaft body 10 or in the opposite direction, the shaft twist can be measured by the change in the deviation.

  FIG. 13 shows the positional relationship between the pair of target bodies 11a and 12a in the sixth embodiment (FIG. 13A) and the waveform of the electric pulse signal output from the light receiving unit (not shown, see FIG. 6). b) to (d)). The light beam that scans the scanning height position 23 and is received by the light receiving unit is irradiated from the end on the front side (left side in the drawing) in the rotation direction of the first target body 11a as the rotating shaft body 10 rotates. The light enters the edge of the surface and begins to irradiate the light, and the light receiving portion is shielded from light. The light reaches the slit 11e and is received by the light receiving portion again. Next, after the light beam starts to irradiate the irradiated surface from the end of the second target body 12a on the front side in the rotation direction, the light beam is blocked and does not reach the light receiving portion, and then the second target body. By passing through 12a, the light receiving unit receives light again. Then, the light beam reaches the edge of the irradiated surface on the rear side in the rotation direction of the first target body 11 and is blocked by this, so that the light receiving unit does not receive light again, and then passes through this edge. Thus, the light receiving unit also receives light.

  When axial torsion occurs in the rotary shaft 10, the circumferential direction (the second target body 12a is displaced in any direction of the arrow S in the figure according to the direction of the axial torsion, and the front side in the rotational direction of the slit 11e. The distance from the edge on the left side (to the left side in the figure) to the edge on the front side in the rotation direction of the second target body 12a (to the left side in the figure) changes, and the light receiving time in the light receiving unit (FIG. 13) changes accordingly. (Corresponding to the width of the pulse indicated as “torque” shown in (b)) also changes, and by obtaining this light reception time, it is possible to measure the torsion of the shaft occurring in the rotary shaft 10. When deflection deformation occurs during rotation of the first target body 11a, the light beam passes through the scanning height position 23 in the figure when passing through the slit of the first target body 11a. Scanning rays according to direction The vertical position moves from the position 23 in the state where there is no deflection, and the scanning height position of the light beam changes to a position of 24 or 25. As a result, the light beam on the irradiated surface of the second target body 12a. The scanning distance changes in either the long or short direction, and accordingly, the time during which the light receiving unit 3 does not receive light (light blocking time) due to this light blocking changes as shown in FIG. The calculation display unit (not shown, see FIG. 4) that receives the input of the pulse signal can measure the deflection amount of the rotating shaft body 10 by the above formula from the change in the light shielding time. However, by continuing to measure the amount of deflection, etc., for each of the two light beams from the light emitting unit 3, it is possible to track changes in the amount of deflection in two directions and to improve the measurement system for shaft torsion. It is possible.

[Embodiment 7]
FIG. 14 shows another example of the embodiment of the deflection and shaft torsion measuring apparatus according to the present invention. Instead of the second target body 12a shown in the fifth embodiment, it is formed in a mountain shape as a width changing portion on the tip side. The second target body 12 including the mountain-shaped portion 121 is used. It is preferable that the mountain-shaped portion 121 is formed symmetrically about a perpendicular line that extends from the apex of the tip to the outer peripheral surface of the rotary shaft 10. As the 1st target body 11, the thing similar to what was provided with the slit in the center area | region as shown in FIG. 13 can be used. In FIG. 14, for convenience of explanation, it is assumed that only one first target body 11 and one second target body 12 are disposed at both ends in the axial direction of the rotating shaft body 10, and the rotating shaft is as shown in FIG. 8 or FIG. 10. Although a state in which a plurality of sets of the first target body 11 and the second target body 12 are arranged at equal intervals in the circumferential direction of the body 10 is not shown one by one, it goes without saying that such an arrangement can be adopted.

  As shown in FIG. 15 (a), the set of targets 11 and 12 includes a perpendicular line extending from the apex of the mountain-shaped portion 121 of the second target body 12 toward the outer peripheral surface of the rotary shaft body 10. The body 11 is arranged in a positional relationship so as to pass through substantially the middle in the length direction of the slit 11e. The light beam that has passed through the height position 23 and has been received by the light receiving unit (not shown) is on the front side in the rotational direction of the first target body 11a (on the left side in the drawing) with the rotation of the rotary shaft body 10. The light enters the edge of the irradiated surface from the edge and begins to irradiate it, and the light receiving unit is in a light shielding state. However, when the light beam reaches the slit 11e, the light receiving unit receives light again. Next, the light receiving unit starts to irradiate the irradiated surface from the edge of the second target body 12a in the rotational direction front side, so that the light receiving unit is in a light-shielding state, and passes through the second target body 12a. The light is received again. Thereafter, the light beam reaches the edge part on the rear side in the rotation direction of the first target body 11 and irradiates the irradiated surface, so that the light receiving part again becomes a light-shielding state, and passes through this edge part, thereby receiving the light receiving part. Will also receive light rays. FIG. 15B shows such a light reception and light shielding state of the light receiving unit as a waveform of an electric pulse signal output from the light receiving unit.

In FIG. 15B, when a deflection deformation occurs during the rotation of the rotary shaft 10, the first target body 11 (scanning height of the light beam) is changed according to the direction of the deflection deformation as described above. 2 Since the position of the target body 12 changes up and down in the radial direction of the rotating shaft body 10, the light shielding distance of the light beam in the circumferential direction of the rotating shaft body 10 changes, and accordingly, the light shielding time t of the light beam by the second target body 12. _a also changes to either long or short. Using a light-blocking time t _a of this change before and after the equation 1 by by obtaining the height position of the vertex after a deflection occurs in the rotary shaft body 10 to the scanning line, to measure the amount of deflection of the rotary shaft body be able to. Further, by obtaining the time t _b until the light beam begins to pass through the slit 11e along the rotation direction at the scanning height position 23 and reaches the perpendicular drawn from the apex of the chevron-shaped portion of the second target body 12. Further, it is possible to measure the shaft twist generated in the rotating shaft body.

  The second target body 12 shown in FIG. 15 (c) is provided with a substantially rectangular slit 13 having a length direction directed in the radial direction of the rotary shaft body 10 in the central region shown in FIG. 15 (a). Is. The slit 13 only needs to have a length direction intersecting the scanning line of the light beam at a substantially right angle, and can be provided at any position in the central region of the second target body 12, but preferably in FIG. As shown in the figure, it is preferable that the slit be formed in an elongated shape so as to be symmetric with respect to a perpendicular drawn from the apex of the mountain-shaped portion 121. Other configurations are essentially the same as those shown in FIGS. 14 and 15A. By providing such a slit 13 in the central region of the second target body 12, the time from when the light beam begins to pass through the slit 11e until it is blocked by the target body 12, reaches the slit 13, and is received by the light receiving unit, And torsion occurring in the circumferential direction of the rotating shaft by the above method by detecting the time until reaching the slit 13 and being blocked by the irradiated edge on the right side toward the drawing of the first target body 11 The direction can be easily determined along with the size of.

  FIG. 16 shows a modification of two second target bodies 12 in the sixth embodiment. In the second target body 12 shown in FIG. 14A, the heights of the mountain-shaped portions 121 of the second target body 12 shown in FIGS. The enlarged chevron-shaped portion 121 and the protruding piece 17 having a substantially rectangular planar shape protruding in the radial direction of the rotating shaft 10 are provided on the distal end side. In FIG. 16A, the projecting piece 17 is provided on the rear side in the rotation direction of the mountain-shaped portion 121 (right side as viewed in the figure), but is not limited to this position. It can also be provided on the front side of 121 (left side as viewed in the figure).

  By using the second target body 12 shown in FIG. 16 (a), when bending deformation occurs during the rotation of the rotating shaft body, the light beam passing through the slit 11e of the first target body 11 is the second. By detecting a change in the time (light shielding time) blocked by the mountain-shaped portion 121 of the target body 12, the amount of deflection generated in the rotating shaft body can be measured. Further, with the rotation of the rotating shaft body, the projecting piece 17 of the second target body 12 starts when the light beam starts to pass through the slit 11e from the edge of the irradiated surface on the left side as viewed in the drawing of the first target body 11. By obtaining the time required to reach the left edge in the direction of FIG. 16 from the pulse waveform of FIG. 16B, it is possible to detect the shaft twist occurring in the rotating shaft body as described above.

  In the second target body 12 shown in FIG. 16C, a substantially V-shaped notch 122 is formed on the tip side of the irradiated surface instead of the chevron shaped portion 121. In the second target body 12 having such a shape, a light beam passing through the slit 11e of the first target body 11 passes through the V-shaped cut 122 in the circumferential direction at the scanning height position 23. Since the light is received by the light receiving unit, the direction of deflection deformation and the amount of deflection of the rotating shaft body can be obtained by detecting the change in the light receiving time. In addition, the light receiving time in which the light beam passes through the gap between the end of both ends in the length direction of the slit 11e in the first target body 11 and the end of both ends in the same direction of the second target body 12 is received by the light receiving unit, respectively. By obtaining, the magnitude and direction of the shaft twist during rotation of the rotary shaft body can be obtained.

[Embodiment 8]
FIG. 17 shows still another embodiment of the deflection and axial torsion measuring device of the present invention. In the embodiment shown in this figure, the first target bodies 11, 11,... And the second target bodies 12, 12,. .. Are arranged at equal intervals in the circumferential direction of the rotating shaft at a pitch smaller than these pitches shown in FIG. The first target body 11 and the second target body 12 of each set have the same external shape as the two types of second target bodies 11a and 12a shown in FIG. 6 and are arranged in a staggered manner with respect to each other (see FIG. 18 (a)). Other configurations such as the light emitting unit and the light receiving / calculating display unit are not essentially replaced with the embodiment shown in FIG.

  In this way, the two types of target bodies 11 and 12 arranged in a plurality of sets as described above are separated from the outer peripheral surface of the rotary shaft body 10 by a predetermined distance in parallel to the rotary shaft body 10 from the light emitting unit 3 (see FIG. 6). The two light beams L1 and L2 are configured to be interrupted intermittently. These two light beams are received by the light receiving unit in a state where they are not shielded by the target bodies 11 and 12, whereby it is possible to measure a change with time in the amount of deflection of the rotating shaft body 10 in each direction.

FIG. 18B shows a three-dimensional coordinate between a time axis t and an orthogonal coordinate composed of an x-axis and a y-axis passing through the axis (rotation center) of the rotating shaft 10 and orthogonal to the optical paths of the two light beams. In the system, the time-dependent change in the amount of deflection in each of the x-axis direction and the y-axis direction obtained from the light shielding time by irradiation of each light beam on the second target body is plotted. In FIG. 18B, since the deflection amount in the x-axis direction at time t ₁ is x ₁ and the deflection amount in the y-axis direction is y ₁ , the vector sum is obtained by substituting these deflection amounts into Equation 3 above. Is calculated, the amount of dynamic deflection of the rotating shaft body 10 at time t1 can be obtained. Moreover, the dynamic deflection amount at time t ₂ by calculating these vector sum by substituting the x deflection of the axis x ₂ and y-axis direction of the deflection of y ₂ in the same manner and said expression 3 at time t2 Can be requested. In this way, by continuously measuring the deflection amount in the x-axis direction and the y-axis direction, the dynamic deflection amount of the rotating shaft body 10 at an arbitrary time can be calculated. Further, by further increasing the number of sets of two target bodies arranged on the rotary shaft body 10, it is possible to know more precisely the amount of deflection and the dynamic change of the shaft twist generated in the rotary shaft body 10. Become.

[Embodiment 9]
FIG. 19 shows still another embodiment of the deflection and shaft torsion measuring device of the present invention. In the embodiment shown in this figure, the first target body 31 and the second target body 33, which are fitted on the outer periphery of the rotary shaft 10 by a predetermined distance in the length direction, and a light beam L1 are emitted. The light emitting unit 3, the light beam L 1 is irradiated on the irradiated surfaces of the respective target bodies 31 and 33, the reflected light is guided through the optical system 30, the two light receiving units 5 and 5, and the signal lines 43 and 44. Mainly from the calculation display unit 6 that receives an electric signal output from each of the light receiving units 5 and 5 and calculates and displays the rotation period, the shaft twist and the deflection amount of the rotary shaft body 10 based on the electric signal. It is configured. The optical system 30 divides the light beam L1 transmitted by the light transmission unit 35 from the light emitting unit 2 into two light beams L11 and L12 parallel to the axial direction of the rotary shaft 10, and The optical path branching means 37 for adjusting the optical paths of the light beams L11 and L12 so as to irradiate the irradiated surfaces of the target bodies 31, 33 facing each other, and the optical path branching means 37 and the target bodies 31, 33 It is mainly composed of half mirrors 39 and 42 which are respectively arranged in the optical path between them and receive the reflected light from the respective target bodies 31 and 33 and guide them to the light receiving parts 5 and 5 respectively. In addition, the light emission part 3 is comprised with the light source which radiate | emits the light ray which has directivity continuously, What was illustrated above can be used conveniently.

  Each of the first target body 31 and the second target body 33 fixed to the outer peripheral surface of the rotating shaft body 10 has a surface to be irradiated that is irradiated with light from the light emitting unit 3. As shown in FIG. 19, the irradiated surface of the second target body 33 has a substantially triangular planar shape that is concentrically arranged adjacent to each other in a saw blade shape and has a diameter larger than the diameter of the rotating shaft body 10. Are provided with reflecting portions 32, 32,. Similarly to the reflecting portion 32 of the second target body 33, the irradiated surface of the first target body 33 disposed opposite to the second target body 33 is also concentrically formed with a diameter larger than the diameter of the rotary shaft body 10. Reflecting portions (not shown) having a triangular or substantially rectangular planar shape similar to the first target body (11a or the like) shown in FIG. 7 or FIG. 8 are arranged.

  The light beam L1 emitted from the light emitting unit 3 is transmitted by the light transmission means 35 such as an optical fiber cable, and is converted into parallel light by the lens 36 and enters the optical path branching means 37. The optical path branching means 37 is composed of a half mirror 37a and a reflecting mirror 37b arranged in a U-shape with inclinations of 45 degrees and 135 degrees with respect to the optical path, respectively, and one of the rays incident on the half mirror 37a. The portion is reflected at right angles to the optical path, branched in one direction along the axis of the rotating shaft 10 (ray L11), and the remaining portion is transmitted through and reflected by the reflecting mirror 37b, along the rotating shaft 10. Thus, the light is branched in the direction opposite to the reflected light of the half mirror 37a (light ray L12).

  One of the branched light beams L11 passes through the half mirror 42 provided on the optical path, and then the diameter of the light beam is narrowed down by the condensing lens 41, and is reflected on the reflection portion on the irradiated surface of the first target body 31. Irradiated. The other light beam L12 also passes through the half mirror 39 provided on the optical path, is narrowed down by the condenser lens 40, and is applied to the reflecting portions 32, 32,... Of the second target body 33. The reflected light reflected by the reflecting portions of the first target body 31 and the second target body 33 is incident from the surface opposite to the incident surface of the branched light of the half mirrors 39 and 42, all of which is here. Reflected and incident on the light receiving portions 5 and 5 respectively.

  The reflected light incident on the light receiving portions 5 and 5 is converted into an electrical signal having a predetermined magnitude according to the intensity thereof, and then input to the calculation display portion 6 via the signal lines 43 and 44, respectively. The The calculation display unit 6 receives the input of these two electric signals, calculates the rotation period, shaft twist and deflection amount of the rotary shaft body 10 by the above-described method, displays the calculation result, or sends it to another device. It becomes possible to output.

  The deflection measuring device and the deflection and shaft torsion measuring device according to the present invention include a deflection amount of a wide range of rotating shaft bodies from a rotating shaft body provided in a rotating machine such as an electric motor to a turbine shaft in a power plant or the like, and a shaft thereof. It can be used effectively to measure the size of twist.

DESCRIPTION OF SYMBOLS 1 Deflection measuring device 2 Deflection and axial torsion measuring device 3 Light emission part 4 Light reception and calculation display part 5 Light reception part 6 Calculation display part 7 Signal line 8, 9 Target body 10 Rotating shaft body 11 (11a, 11b, 11c, 11d) 1 target body 11e, 11f, 11g, 11h Slit 12 (12a, 12b, 12c, 12d) Second target body 13-16 Slits 23, 24, 25 Apparent scanning lines 31, 33 Target body 32 Reflector 35 Light transmission means 36 Lens 37 Light splitting means 37a Half mirror 37b Reflective mirror 39, 42 Half mirror 40, 41, 47, 48 Condensing lens 43, 44 Signal lines L1-L4 Light rays L11, L12, L21, L22 Light rays (light rays)

Claims (5)

  A target body that is provided on the outer peripheral surface of the rotating shaft body that is the object to be measured and rotates with the rotation traverses the optical path of the light beam from the light emitting unit that is irradiated substantially parallel to the axial direction of the rotating shaft body, A light ray not reflected by the target body or reflected light from the light is received by the light receiving / calculation display unit, and the irradiation position of the light ray on the irradiated surface of the target body due to the deflection deformation of the rotating shaft body is determined. A deflection amount measuring apparatus characterized by detecting a change and measuring a deflection amount of the rotating shaft body based on the detection result.   The target body includes a width changing portion formed on the irradiated surface so that the width in the rotation direction changes at a constant rate according to a radial distance from the outer peripheral surface of the rotating shaft body. Deflection measuring device as described.   The deflection measuring apparatus according to claim 1 or 2, wherein a plurality of the target bodies are provided on the outer peripheral surface of the rotating shaft body at equal intervals in the circumferential direction. A second target having a width changing portion formed so that the width in the rotational direction changes at a constant rate according to the radial distance from the outer peripheral surface of the rotating shaft body that is the object to be measured. The body is provided on the outer peripheral surface of the rotating shaft body at a predetermined distance in the axial direction thereof, and is substantially parallel to the axis of the rotating shaft body by these one set of target bodies that rotate as the rotating shaft body rotates. The light path from the light emitting unit to be irradiated is periodically traversed, and the light that is not shielded by the one set of target bodies or the reflected light from the second target body is received by the light receiving / calculating display unit,
Relative displacement of the second target body in the circumferential direction with respect to the first target body due to axial torsion or deflection deformation of the rotating shaft body, and change in the scanning position of the light beam in the width changing portion of the second target body And measuring the deflection amount and the torsional magnitude of the rotating shaft body based on the detection results.   The deflection and shaft torsion measuring device according to claim 4, wherein a plurality of sets of the first target body and the second target body are provided on the outer peripheral surface of the rotating shaft body at equal intervals in the circumferential direction.

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