JP2011182203A - Package, manufacturing method therefor, piezoelectric vibrator, oscillator, electronic equipment, and radio-controlled clock - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a package having superior airtightness by suppressing the corrosion of a junction material, a manufacturing method of the package, a piezoelectric vibrator, an oscillator, electronic apparatus and a radio-controlled clock. <P>SOLUTION: The manufacturing method of the package 10 includes a cavity, capable of sealing a piezoelectric vibrating piece between a base board 2 and a lid board 3. The manufacturing method of the package includes a junction process anode-jointing an aluminum film 23a, made of a material mainly comprising aluminum formed on the jointing surface of the base board 2 and the jointing surface of the lid board 3. The manufacturing method of the package further includes an oxidizing process oxidizing the aluminum film, by treating the aluminum film 23a exposed between the base board 2 and the lid board 3 by an oxygen plasma. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to a package, a package manufacturing method, a piezoelectric vibrator, an oscillator, an electronic device, and a radio timepiece.

  2. Description of the Related Art In recent years, a piezoelectric vibrator using a crystal or the like is used as a time source, a timing source such as a control signal, a reference signal source or the like in a mobile phone or a portable information terminal device. Various piezoelectric vibrators of this type are known, and one of them is a surface-mount type piezoelectric vibrator. This type of piezoelectric vibrator includes, for example, a base substrate and a lid substrate made of glass materials bonded to each other, a cavity formed between both substrates, and a piezoelectric vibration housed in a hermetically sealed state in the cavity. A piece (electronic component).

  An anodic bonding has been proposed as a method of directly bonding the base substrate and the lid substrate. Anodic bonding is performed by applying a voltage between the bonding material formed on the inner surface of one of the base substrate and the lid substrate and the other substrate, thereby bonding the bonding material and the inner surface of the other substrate. It is a method to do. As a material for the bonding material, aluminum (Al) having a relatively low resistance value may be employed. Thus, it is considered that by using Al as the bonding material, a voltage can be uniformly applied to the entire surface of the bonding material, and the bonding material and the inner surface of the other substrate can be reliably anodically bonded. Patent Document 1 also describes a configuration in which an Al alloy containing copper (Cu) in Al is used as the bonding material in order to increase the voltage resistance of the bonding material.

JP 2006-339840 A

By the way, since Al is a very active metal (having a relatively high ionization tendency), usually the surface of the bonding material made of Al (exposed surface from the outer surface of the piezoelectric vibrator) is naturally oxidized by the atmosphere. Thus, an oxide film (for example, about several nm) made of aluminum oxide (AlO ₃ ) is formed.

However, for example, when the oxide film is damaged and Al is exposed on the surface of the bonding material, if water adheres to this Al, the Al on the surface loses electrons and is ionized (ionized) due to the oxidation-reduction reaction, and the generated Al ions Reacts with hydroxide (OH) ions in the water and dissolves into aluminum hydroxide (Al (OH) ₃ ), which corrodes the bonding material. When this corrosion progresses to the depth of the bonding material, the inside and the outside of the cavity communicate with each other, and the airtightness of the piezoelectric vibrator (gas barrier property of the bonding material) may be reduced. That is, there is a problem that the vibration characteristics of the piezoelectric vibrating piece are deteriorated by the air entering the cavity through the communicating portion. Even if an Al alloy containing Cu in Al is employed as a bonding material as in Patent Document 1, the above-described problem occurs similarly.

  Accordingly, the present invention has been made in view of the above-described problems, and is a package having excellent airtightness by suppressing corrosion of a bonding material, a package manufacturing method, a piezoelectric vibrator, an oscillator, an electronic device, and a radio timepiece. Is to provide.

In order to solve the above-described problems, the present invention provides the following means.
A manufacturing method of a package according to the present invention is a manufacturing method of a package provided with a cavity capable of enclosing an electronic component between a first substrate and a second substrate made of an insulator bonded to each other. A bonding step of anodically bonding a bonding material made of aluminum as a main component formed on the bonding surface of the substrate and the bonding surface of the second substrate; and between the first substrate and the second substrate. And an oxidizing step of oxidizing the bonding material by treating the exposed bonding material with oxygen plasma.

According to this configuration, a voltage is uniformly applied to the entire surface of the bonding material by anodic bonding the first substrate and the second substrate through the bonding material made of a material mainly composed of aluminum. It is possible to easily form a package in which the bonding surfaces of both substrates are strongly anodically bonded.
In particular, by treating the bonding material exposed from between the first substrate and the second substrate with oxygen plasma, the surface layer portion of the bonding material is oxidized by oxygen plasma to become aluminum oxide. Since aluminum oxide is very dense and excellent in chemical stability, it does not corrode even if it is exposed on the outer surface of the package. Therefore, it can suppress that air | atmosphere, the water | moisture content in air | atmosphere, etc. flow in into a cavity. According to the configuration of the present invention, a dense film that is thicker than the oxide film formed by natural oxidation can be formed by actively oxidizing the bonding material with oxygen plasma.
Therefore, corrosion of the bonding material can be suppressed, and the airtightness in the cavity can be maintained in a stable state for a long time.

In the bonding step, the plurality of first substrates included in the first wafer and the plurality of second substrates included in the second wafer are respectively anodically bonded, and the bonding step and the oxidation step are performed. In the meantime, a step of attaching an adhesive sheet to one surface of the joined body of the first wafer and the second wafer, and separating the joined body into each package formation region to form a plurality of joined pieces And an expanding step of expanding the interval between the plurality of pieces separated into pieces by stretching the pressure-sensitive adhesive sheet, and in the oxidation step, the stretched pressure-sensitive adhesive sheet The bonding material exposed from between the first substrate and the second substrate of each bonding piece in a state where the plurality of bonding pieces are spaced apart from each other is treated with oxygen plasma.
In order to uniformly oxidize the bonding material exposed on the outer surface of the bonding piece, it is necessary to dispose all the bonding pieces so that the outer surface is exposed.
Therefore, according to the configuration of the present invention, since the oxidation process is performed using a state in which a plurality of pieces are separated in the expanding process, it is not necessary to separately arrange all the pieces to be separated, thereby improving manufacturing efficiency. Can do. That is, since oxygen plasma can be irradiated in a state in which a space between the bonding pieces is ensured, the bonding material exposed from between the first substrate and the second substrate in each bonding piece can be uniformly oxidized.
Moreover, since the joining materials of the plurality of joining pieces that have been separated into pieces can be oxidized collectively, the manufacturing efficiency can be improved as compared with the case where the joining material is oxidized for each joining piece. Further, by oxidizing the bonding material in a state in which each bonding piece is stuck on the pressure-sensitive adhesive sheet, it is possible to suppress the positional deviation of the bonding piece during conveyance to the plasma processing apparatus or during film formation.

The package of the present invention is manufactured using the above-described method for manufacturing a package of the present invention.
According to this structure, since it is manufactured using the method for manufacturing a package of the present invention, a package having excellent airtightness can be provided.

The piezoelectric vibrator according to the present invention is characterized in that a piezoelectric vibrating piece is hermetically sealed in the cavity of the package of the present invention.
According to this configuration, since the package having excellent airtightness is provided, a highly reliable piezoelectric vibrator having excellent vibration characteristics can be provided.

  An oscillator according to the present invention is characterized in that the piezoelectric vibrator of the present invention is electrically connected to an integrated circuit as an oscillator.

  In addition, an electronic apparatus according to the present invention is characterized in that the piezoelectric vibrator of the present invention is electrically connected to a timer unit.

  A radio timepiece according to the present invention is characterized in that the piezoelectric vibrator of the present invention is electrically connected to a filter portion.

  Since the oscillator, electronic device, and radio timepiece according to the present invention include a highly reliable piezoelectric vibrator having excellent vibration characteristics, a product having excellent characteristics and reliability can be provided in the same manner as the piezoelectric vibrator.

According to the package and the manufacturing method of the package according to the present invention, it is possible to provide a package having excellent airtightness by suppressing the corrosion of the bonding material.
In addition, according to the piezoelectric vibrator of the present invention, it is possible to provide a highly reliable piezoelectric vibrator that ensures airtightness in the cavity and has excellent vibration characteristics.
Since the oscillator, electronic device, and radio timepiece according to the present invention include the above-described piezoelectric vibrator, a product having excellent characteristics and reliability can be provided in the same manner as the piezoelectric vibrator.

It is the external appearance perspective view which looked at the piezoelectric vibrator concerning the present invention from the lid substrate side. It is an internal block diagram of a piezoelectric vibrator, and is a plan view of the piezoelectric vibrator showing a state where a lid substrate is removed. FIG. 3 is a cross-sectional view of the piezoelectric vibrator taken along line AA shown in FIG. 2. FIG. 2 is an exploded perspective view of the piezoelectric vibrator shown in FIG. 1. It is a flowchart which shows the flow at the time of manufacturing the piezoelectric vibrator shown in FIG. FIG. 6 is a diagram illustrating a process for manufacturing a piezoelectric vibrator according to the flowchart illustrated in FIG. 5, in which the base substrate wafer and the lid substrate wafer are anodically bonded in a state where the piezoelectric vibrating piece is accommodated in the cavity. It is a disassembled perspective view of the wafer bonded body. It is a figure for demonstrating an aluminum film formation process, Comprising: It is the top view which looked at the wafer for base substrates from the surface side. It is a figure for demonstrating an individualization process, Comprising: It is sectional drawing which shows the state with which the wafer bonded body was hold | maintained at the magazine. It is a figure for demonstrating an individualization process, Comprising: It is sectional drawing which shows the state with which the wafer bonded body was hold | maintained at the magazine. It is a figure for demonstrating an individualization process, Comprising: It is sectional drawing which shows the state with which the wafer bonded body was hold | maintained at the magazine. It is a figure for demonstrating an individualization process, Comprising: It is sectional drawing which shows the state with which the wafer bonded body was hold | maintained at the magazine. It is a figure for demonstrating an individualization process, Comprising: It is sectional drawing which shows the state with which the wafer bonded body was hold | maintained at the magazine. It is a figure for demonstrating an oxidation process, Comprising: (a) It is sectional drawing which shows the state in which the some piezoelectric vibrator was affixed on UV tape, (b) is the base substrate which shows the state which removed the lid substrate FIG. It is a block diagram which shows one Embodiment of the transmitter which concerns on this invention. It is a block diagram which shows one Embodiment of the electronic device which concerns on this invention. It is a block diagram which shows one Embodiment of the radio timepiece which concerns on this invention. It is process drawing for demonstrating the other method of an oxidation process.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.
(Piezoelectric vibrator)
FIG. 1 is a partially broken perspective view of the piezoelectric vibrator according to the present embodiment as viewed from the lid substrate side. FIG. 2 is an internal configuration diagram of the piezoelectric vibrator, and is a view of the piezoelectric vibrating piece viewed from above with the lid substrate removed. 3 is a cross-sectional view of the piezoelectric vibrator taken along line AA shown in FIG. 2, and FIG. 4 is an exploded perspective view of the piezoelectric vibrator. In FIG. 1, constituent members housed in cavities described later are not shown.
As shown in FIGS. 1 to 4, the piezoelectric vibrator 1 of the present embodiment has a box shape in which a base substrate (first substrate) 2 and a lid substrate (second substrate) 3 are anodically bonded via a bonding material 23. The surface mount type piezoelectric vibrator 1 including the package 10 and a piezoelectric vibrating piece (electronic component) 5 housed in the cavity C of the package 10. The piezoelectric vibrating reed 5 and the external electrodes 6, 7 installed on the back surface 2 a (the lower surface in FIG. 3) of the base substrate 2 are electrically connected by a pair of through electrodes 8, 9 penetrating the base substrate 2. ing.

  The base substrate 2 is formed in a plate shape with a transparent insulating substrate made of a glass material, for example, soda-lime glass. The base substrate 2 has a pair of through holes 21 and 22 in which a pair of through electrodes 8 and 9 are formed. The through-holes 21 and 22 have a tapered cross section in which the diameter gradually decreases from the back surface 2a of the base substrate 2 toward the front surface 2b (upper surface in FIG. 3).

  Similar to the base substrate 2, the lid substrate 3 is a transparent insulating substrate made of a glass material, for example, soda-lime glass, and is formed in a plate shape that can be superimposed on the base substrate 2. A rectangular recess 3 a for accommodating the piezoelectric vibrating reed 5 is formed on the back surface 3 b (lower surface in FIG. 3) side of the lid substrate 3. The concave portion 3 a forms a cavity C that accommodates the piezoelectric vibrating piece 5 when the base substrate 2 and the lid substrate 3 are overlaid. The lid substrate 3 is anodically bonded to the base substrate 2 via the bonding material 23 with the recess 3a facing the base substrate 2 side. That is, on the back surface 3 b side of the lid substrate 3, a concave portion 3 a formed in the center portion and a frame region 3 c formed around the concave portion 3 a and serving as a bonding surface with the base substrate 2 are formed.

The piezoelectric vibrating piece 5 is a tuning fork type vibrating piece formed from a piezoelectric material such as quartz, lithium tantalate, or lithium niobate, and vibrates when a predetermined voltage is applied.
This piezoelectric vibrating piece 5 is a tuning fork type comprising a pair of vibrating arm portions 24 and 25 arranged in parallel and a base portion 26 that integrally fixes the base end sides of the pair of vibrating arm portions 24 and 25. On the outer surface of the vibrating arm portions 24, 25, there are formed an excitation electrode comprising a pair of first excitation electrode and second excitation electrode (not shown) for vibrating the vibrating arm portions 24, 25, and a first excitation electrode. And a pair of mount electrodes that electrically connect the second excitation electrode and routing electrodes 27 and 28 described later (both not shown).

  3 and 4, the piezoelectric vibrating reed 5 configured as described above is bumped on the lead-out electrodes 27 and 28 formed on the surface 2b of the base substrate 2 by using bumps B such as gold. It is joined. More specifically, the first excitation electrode of the piezoelectric vibrating piece 5 is bump-bonded on one lead-out electrode 27 via one mount electrode and bump B, and the second excitation electrode is connected to the other mount electrode and Bump bonding is performed on the other lead-out electrode 28 via the bump B. As a result, the piezoelectric vibrating reed 5 is supported in a state of floating from the surface 2b of the base substrate 2, and the mount electrodes and the routing electrodes 27 and 28 are electrically connected to each other.

  The external electrodes 6 and 7 are made of, for example, gold (Au) and are disposed on both sides in the longitudinal direction of the back surface 2 a of the base substrate 2, and the piezoelectric vibrating reed 5 through the through electrodes 8 and 9 and the routing electrodes 27 and 28. Is electrically connected. More specifically, one external electrode 6 is electrically connected to one mount electrode of the piezoelectric vibrating piece 5 through one through electrode 8 and one routing electrode 27. The other external electrode 7 is electrically connected to the other mount electrode of the piezoelectric vibrating piece 5 through the other through electrode 9 and the other lead-out electrode 28.

  The through-electrodes 8 and 9 are formed by the cylindrical body 32 and the core member 31 that are integrally fixed to the through-holes 21 and 22 by firing, and completely close the through-holes 21 and 22 to form a cavity. The airtightness in C is maintained, and the external electrodes 6 and 7 and the routing electrodes 27 and 28 are electrically connected. Specifically, one through electrode 8 is positioned below the lead-out electrode 27 between the external electrode 6 and the base portion 26, and the other through electrode 9 is between the external electrode 7 and the vibrating arm portion 25. Is located below the routing electrode 28.

The cylindrical body 32 is obtained by baking paste-like glass frit. The cylindrical body 32 is formed in a cylindrical shape having flat ends and substantially the same thickness as the base substrate 2. A core member 31 is arranged at the center of the cylinder 32 so as to penetrate the center hole of the cylinder 32. In the present embodiment, the outer shape of the cylindrical body 32 is formed in a conical shape (tapered cross section) in accordance with the shape of the through holes 21 and 22. The cylindrical body 32 is fired in a state of being embedded in the through holes 21 and 22, and is firmly fixed to the through holes 21 and 22.
The core material portion 31 described above is a conductive core material formed in a cylindrical shape from a metal material, and both ends are flat like the cylindrical body 32 and have a thickness substantially the same as the thickness of the base substrate 2. Is formed. The through electrodes 8 and 9 are ensured to have electrical conductivity through the conductive core portion 31.

The bonding material 23 described above is formed on the outer peripheral portion on the surface 2 b of the base substrate 2 so as to face the frame region 3 c of the lid substrate 3. The base substrate 2 and the lid substrate 3 are anodically bonded to the base substrate 2 via the bonding material 23 with the recess 3a facing the surface 2b side of the base substrate 2. Such a bonding material 23 is formed on the surface 2b of the base substrate 2 so as to surround an aluminum film 23a made of aluminum (Al) so as to surround the cavity C and to surround the outer side of the aluminum film 23a. And an alumina film 23b made of aluminum oxide (AlO ₃ ).

  The alumina film 23b is exposed between the base substrate 2 and the lid substrate 3 so as to be substantially flush with the outer surface (side surface) of the package 10, and the outer peripheral portion of the aluminum film 23a is positively exposed as will be described later. It is formed by oxidation. That is, the bonding material 23 is not exposed to the aluminum film 23a when viewed from the outer surface of the package 10, and is covered with the alumina film 23b. The entire width d1 (see FIG. 1) of the bonding material 23 is about 150 μm, and the width d2 (see FIG. 1) of the alumina film 23b is about tens of nanometers. That is, the alumina film 23b is formed to be sufficiently thicker than a normal natural oxide film (for example, several nm).

  When the piezoelectric vibrator 1 configured as described above is operated, a predetermined drive voltage is applied to the external electrodes 6 and 7 formed on the base substrate 2. As a result, a current can be passed through each excitation electrode of the piezoelectric vibrating piece 5, and the pair of vibrating arm portions 24 and 25 can be vibrated at a predetermined frequency in a direction in which the pair of vibrating arm portions 24 and 25 approaches and separates. The vibration of the pair of vibrating arm portions 24 and 25 can be used as a time source, a control signal timing source, a reference signal source, or the like.

(Piezoelectric vibrator manufacturing method)
Next, a method for manufacturing the above-described piezoelectric vibrator will be described. FIG. 5 is a flowchart of the method for manufacturing the piezoelectric vibrator according to this embodiment. FIG. 6 is an exploded perspective view of the wafer bonded body. In the following, a plurality of piezoelectric vibrating reeds 5 are sealed between a base substrate wafer 40 (first wafer) and a lid substrate wafer (second wafer) 50 to form a wafer bonded body 60, and the wafer bonded body A method of simultaneously manufacturing a plurality of piezoelectric vibrators (joint pieces) 1 by cutting (joined body) 60 will be described. In addition, the broken line M shown in each figure after FIG. 7 illustrates the cutting line cut | disconnected by a cutting process.
The piezoelectric vibrator manufacturing method according to the present embodiment mainly includes a piezoelectric vibrating piece manufacturing step (S10), a lid substrate wafer manufacturing step (S20), a base substrate wafer manufacturing step (S30), and an assembly step. (S40 and below). Among them, the piezoelectric vibrating piece producing step (S10), the lid substrate wafer producing step (S20) and the base substrate wafer producing step (S30) can be performed in parallel.

  First, as shown in FIG. 5, the piezoelectric vibrating reed manufacturing process is performed to manufacture the piezoelectric vibrating reed 5 shown in FIGS. 1 to 4 (S <b> 10). Further, after the piezoelectric vibrating piece 5 is manufactured, the resonance frequency is coarsely adjusted. Note that fine adjustment for adjusting the resonance frequency with higher accuracy is performed after mounting.

(Wad production process for lid substrate)
Next, as shown in FIGS. 5 and 6, a lid substrate wafer manufacturing process is performed in which a lid substrate wafer 50 to be the lid substrate 3 later is manufactured up to the state immediately before anodic bonding (S20). Specifically, after polishing and cleaning soda-lime glass to a predetermined thickness, a disk-shaped lid substrate wafer 50 is formed by removing the outermost work-affected layer by etching or the like (S21). Next, a recess forming step is performed in which a plurality of recesses 3a for the cavity C are formed in the matrix direction by etching or the like on the back surface 50a (the lower surface in FIG. 6) of the lid substrate wafer 50 (S22).
Next, in order to ensure airtightness with the base substrate wafer 40, which will be described later, a polishing step of polishing at least the back surface 50a side of the lid substrate wafer 50 to be a bonding surface with the base substrate wafer 40 (S23). ) To mirror-finish the back surface 50a. The lid substrate wafer creation step (S20) is thus completed.

(Base substrate wafer creation process)
Next, a base substrate wafer manufacturing step is performed in which the base substrate wafer 40 to be the base substrate 2 later is manufactured up to the state immediately before anodic bonding (S30). First, after polishing and washing soda-lime glass to a predetermined thickness, a disk-shaped base substrate wafer 40 is formed by removing the outermost work-affected layer by etching or the like (S31). Next, a through-hole forming step is performed in which a plurality of through-holes 21 and 22 for arranging the pair of through-electrodes 8 and 9 are formed on the base substrate wafer by, for example, pressing (S32). Specifically, after forming a concave portion from the back surface 40b of the base substrate wafer 40 by pressing or the like, the concave portion is penetrated by polishing at least from the front surface 40a side of the base substrate wafer 40, and the through holes 21, 22 Can be formed.

  Subsequently, a through electrode forming step (S33) for forming the through electrodes 8 and 9 in the through holes 21 and 22 formed in the through hole forming step (S32) is performed. As a result, in the through holes 21 and 22, the core member 31 is held flush with both surfaces 40 a and 40 b (upper and lower surfaces in FIG. 6) of the base substrate wafer 40. Thus, the through electrodes 8 and 9 can be formed.

FIG. 7 is a diagram for explaining the aluminum film forming process, and is a plan view of the base substrate wafer as viewed from the front surface side. In FIG. 7, illustration of the through electrodes 8 and 9 and the through holes 21 and 22 is omitted.
Next, as shown in FIG. 7, an aluminum film 23 a is formed on the surface 40 a of the base substrate wafer 40, and is bonded to the lid substrate wafer 50 (other than the formation region of the cavity C in the base substrate wafer 40). Patterning is performed so that the aluminum film 23a remains in the region) (S34). Thereafter, a lead electrode forming step for forming the lead electrodes 27 and 28 electrically connected to the pair of through electrodes 8 and 9 is performed (S35). In this way, the base substrate wafer manufacturing step (S30) is completed.

  Next, the piezoelectric vibrating reeds 5 created in the piezoelectric vibrating reed creating step (S10) are respectively formed on the routing electrodes 27 and 28 of the base substrate wafer 40 created in the base substrate wafer creating step (S30). It mounts via bumps B, such as gold (S40). Then, an overlaying step is performed in which the base substrate wafer 40 and the lid substrate wafer 50 created in the above-described production steps of the wafers 40 and 50 are overlaid (S50). Specifically, both wafers 40 and 50 are aligned at the correct positions while using a reference mark (not shown) as an index. As a result, the mounted piezoelectric vibrating reed 5 is housed in a cavity C surrounded by the recess 3 a formed in the lid substrate wafer 50 and the base substrate wafer 40.

  After the superposition process, the two superposed wafers 40 and 50 are put into an anodic bonding apparatus (not shown), and a predetermined voltage is applied in a predetermined temperature atmosphere with the outer peripheral portion of the wafer clamped by a holding mechanism (not shown). Then, a bonding step for anodic bonding is performed (S60). Specifically, a predetermined voltage is applied between the bonding material 23 and the lid substrate wafer 50. Then, an electrochemical reaction occurs at the interface between the aluminum film 23a and the lid substrate wafer 50, and the two are firmly adhered to each other and anodic bonded. Thereby, the piezoelectric vibrating reed 5 can be sealed in the cavity C, and the wafer bonded body 60 in which the base substrate wafer 40 and the lid substrate wafer 50 are bonded can be obtained. Then, the two wafers 40 and 50 are anodically bonded as in the present embodiment, so that compared with the case where the two wafers 40 and 50 are bonded with an adhesive or the like, a shift due to deterioration with time, impact, etc. Thus, both wafers 40 and 50 can be bonded more firmly. In this case, since the aluminum film 23a having a relatively low resistance value is used for anodic bonding in this embodiment, a voltage can be applied uniformly to the entire surface of the aluminum film 23a, and the bonding of both wafers 40 and 50 can be performed. The wafer bonded body 60 in which the surfaces are strongly anodically bonded can be easily formed. In addition, since anodic bonding can be performed at a relatively low voltage, energy consumption can be reduced and manufacturing costs can be reduced.

  Thereafter, a pair of external electrodes 6 and 7 electrically connected to the pair of through electrodes 8 and 9 are formed (S70), and the frequency of the piezoelectric vibrator 1 is finely adjusted (S80).

8 to 12 are process diagrams for explaining the singulation process, and are sectional views showing a state in which the wafer bonded body is held in the magazine.
After the fine adjustment of the frequency is completed, an individualization process is performed for cutting and bonding the bonded wafer bonded body 60 (S90). In the individualization step (S90), as shown in FIG. 8, first, the wafer bonded body 60 is held by the magazine 82 including the UV tape 80 and the ring frame 81. The ring frame 81 is a ring-shaped member having an inner diameter larger than the diameter of the wafer bonded body 60, and has a thickness (length in the axial direction) equivalent to that of the wafer bonded body 60. . The UV tape 80 is obtained by applying a UV curable resin, for example, an acrylic adhesive to a sheet material made of polyolefin.
The magazine 82 can be created by attaching the UV tape 80 from one surface 81a of the ring frame 81 so as to close the through hole 81b. Then, the wafer bonded body 60 is attached to the adhesive surface of the UV tape 80 in a state where the central axis of the ring frame 81 and the central axis of the wafer bonded body 60 are matched. Specifically, the back surface 40 b side (external electrodes 6, 7 side) of the base substrate wafer 40 is attached to the adhesive surface of the UV tape 80. As a result, the wafer bonded body 60 is set in the through hole 81 b of the ring frame 81.

  Next, as shown in FIG. 9, the surface layer portion of the surface 50 b of the lid substrate wafer 50 is irradiated with the laser beam R <b> 1 along the cutting line M to form a scribe line M ′ on the wafer bonded body 60. .

Next, a cutting process of cutting the wafer bonded body 60 on which the scribe line M ′ is formed into each piezoelectric vibrator 1 is performed. In the cutting step, first, as shown in FIG. 10, a separator 83 for protecting the lid substrate wafer 50 is attached to the other surface 81c of the ring frame 81 so as to close the through hole 81b. Thus, the wafer bonded body 60 is held in the through hole 81b of the ring frame 81 in a state of being sandwiched between the UV tape 80 and the separator 83. In this state, the wafer bonded body 60 is transferred into the braking device.
Next, a breaking process for applying cleaving stress is performed on the wafer bonded body 60 conveyed into the braking apparatus. In the breaking process, a cutting blade 70 whose blade length is longer than the diameter of the wafer bonded body 60 (the blade edge angle θ is, for example, 80 degrees to 100 degrees) is prepared, and this cutting blade 70 is used as the back surface of the base substrate wafer 40. After alignment with the scribe line M ′ from the side of 40 b, the cutting edge of the cutting blade 70 is brought into contact with the back surface 40 b of the base substrate wafer 40. Thereafter, a predetermined cleaving stress (for example, 10 kg / inch) is applied to the wafer bonded body 60 along the thickness direction (cut line M) of the wafer bonded body 60.

  As a result, a crack is generated in the wafer bonded body 60 along the thickness direction, and the wafer bonded body 60 is cut so as to be folded along the scribe line M ′ formed on the lid substrate wafer 50. Then, by pressing the cutting blade 70 for each scribe line M ′, the wafer bonded body 60 can be collectively separated into the package 10 for each cutting line M. Thereafter, the separator 83 attached to the wafer bonded body 60 is peeled off.

Next, as shown in FIG. 11, an expanding process is performed in which the wafer bonded body 60 is conveyed into the expanding apparatus 91 and the UV tape 80 is stretched.
First, the expanding device 91 will be described. The expanding device 91 includes an annular base ring 92 on which the ring frame 81 is set, and a disk-shaped heater panel 93 disposed inside the base ring 92 and having a larger diameter than the wafer bonded body 60. I have. The heater panel 93 has a heat transfer type heater (not shown) mounted on a base plate 94 on which the wafer bonded body 60 is set, so that the central axis of the heater panel 93 coincides with the central axis of the base ring 92. Is arranged. The heater panel 93 is configured to be movable along the axial direction by a driving means (not shown). Although not shown, the expanding device 91 also includes a pressing member that clamps the ring frame 81 set on the base ring 92 with the base ring 92.

  In order to perform the expanding process using such an apparatus, first, before setting the wafer bonded body 60 in the expanding apparatus 91, an inner ring 85a of a grip ring 85 to be described later is set outside the heater panel 93. At this time, the inner ring 85 is fixed to the heater panel 93 and is set to move together when the heater panel 93 moves. The grip ring 85 is a resin ring having an inner diameter larger than the outer diameter of the heater panel 93 and smaller than the inner diameter of the through-hole 81b of the ring frame 81. The inner ring 85a and the inner ring have an inner diameter. An outer ring 85b (see FIG. 12) formed to have the same outer diameter as 85a. That is, the inner ring 85a fits inside the outer ring 85b.

  Thereafter, the wafer bonded body 60 fixed to the magazine 82 is set in the expanding device 91. At this time, the wafer bonded body 60 is set with the UV tape 80 side (external electrodes 6 and 7 side) facing the heater panel 93 and the base ring 92. Then, the ring frame 81 is held between the base ring 92 and a pressing member (not shown). Next, the UV tape 80 is heated by the heater of the heater panel 93 to soften the UV tape 80. Then, as shown in FIG. 12, the heater panel 93 is raised together with the inner ring 85a while the UV tape 80 is heated (see the arrow in FIG. 12). At this time, since the ring frame 81 is sandwiched between the base ring 92 and the pressing member, the UV tape 80 extends outward in the radial direction of the wafer bonded body 60. Thereby, the packages 10 adhered to the UV tape 80 are separated from each other, and the space between the adjacent packages 10 is expanded. In this state, the outer ring 85b is set outside the inner ring 85a. Specifically, both are fitted together with the UV tape 80 sandwiched between the inner ring 85a and the outer ring 85b. Thereby, the UV tape 80 is held by the grip ring 85 in a stretched state. Then, the UV tape 80 outside the grip ring 85 is cut, and the ring frame 81 and the grip ring 85 are separated.

FIG. 13 is a diagram for explaining the oxidation process, and FIG. 13A is a cross-sectional view showing a state in which a plurality of piezoelectric vibrators are attached to the UV tape, and FIG. FIG. 6 is a plan view of a state where a lid substrate is removed.
As shown in FIG. 13, the aluminum film 23a is treated with oxygen (O ₂ ) plasma, and an oxidation step (S100) is performed to oxidize the outer peripheral portion of the aluminum film 23a. Specifically, first, the plurality of packages 10 are transferred into the chamber of the plasma processing apparatus in a state of being attached to the UV tape 80, and the packages 10 are heated to about 80 ° C., for example. Then, in a state where the pressure in the chamber is reduced, oxygen gas is supplied into the chamber and oxygen plasma is generated. The generated oxygen plasma is supplied from the surface 3d side of the lid substrate 3 along the thickness direction of the package 10. Irradiate (see arrow in FIG. 13 (a)). Then, the outer peripheral portion of the aluminum film 23a exposed from between the base substrate 2 and the lid substrate 3 is oxidized by this oxygen plasma to become AlO ₃ . As the plasma irradiation conditions in the oxidation step (S100), for example, the oxygen flow rate is preferably set to 1000 sccm, the RF power is set to 900 W, and the degree of vacuum in the chamber is preferably set to 500 mtorr. Thus, the alumina film 23b having a width of about several tens of nanometers is formed so as to surround the aluminum film 23a.

In this case, in order to uniformly irradiate the bonding material 23 exposed on the outer surface of the package 10 with oxygen plasma, it is necessary to arrange all the packages 10 so as to expose the outer surface.
Therefore, according to the present embodiment, since the oxidation process (S100) is performed using the state where the plurality of packages 10 are separated in the expanding process, it is not necessary to arrange all the packages 10 apart from each other, thereby improving the manufacturing efficiency. Can be made. That is, since oxygen plasma can be irradiated in a state where a space between the packages 10 is secured, the bonding material 23 exposed from between the base substrate 2 and the lid substrate 3 in each package 10 can be uniformly formed on the alumina film 23b.
In addition, by performing plasma irradiation in a state where a plurality of packages 10 are attached on the expanded UV tape 80, the alumina film 23b can be formed collectively on the plurality of separated packages 10; Compared with the case where the alumina film 23b is individually formed in each package 10, the manufacturing efficiency can be improved. Furthermore, the positional deviation of the package 10 during conveyance to the plasma processing apparatus or during film formation can be suppressed.

  Further, by irradiating the plasma from the lid substrate 3 side with the UV tape 80 attached to the back surface 2a side of the base substrate 2, the irradiation of oxygen plasma to the external electrodes 6 and 7 can be suppressed. Thereby, the oxidation of the external electrodes 6 and 7 by oxygen plasma can be suppressed, and the conductivity of the external electrodes 6 and 7 can be maintained. In the present embodiment, since the external electrodes 6 and 7 are made of Au, there is no possibility that the external electrodes 6 and 7 are oxidized even if the external electrodes 6 and 7 are irradiated with O 2 plasma.

  In order to efficiently irradiate the aluminum film 23a with oxygen plasma, it is preferable to perform plasma irradiation while rotating the grip ring 85 (package 10).

Next, a pickup process for taking out the piezoelectric vibrator 1 on which the alumina film 23b is formed is performed. In the pickup process, the UV tape 80 is first irradiated with UV to reduce the adhesive strength of the UV tape 80. Thereby, the piezoelectric vibrator 1 is peeled from the UV tape 80. Thereafter, the position of each piezoelectric vibrator 1 is grasped by image recognition or the like, and sucked by a nozzle or the like, whereby the piezoelectric vibrator 1 peeled from the UV tape 80 is taken out.
As described above, the piezoelectric vibration piece 5 is sealed in the cavity C formed between the base substrate 2 and the lid substrate 3 which are anodic bonded to each other, and the two-layer structure surface mount type piezoelectric vibration shown in FIG. A plurality of children 1 can be manufactured at a time.

  Thereafter, an internal electrical characteristic inspection is performed (S110). That is, the resonance frequency, resonance resistance value, drive level characteristic (excitation power dependency of the resonance frequency and resonance resistance value), etc. of the piezoelectric vibrating piece 5 are measured and checked. In addition, the insulation resistance characteristics and the like are also checked. Then, an external appearance inspection of the piezoelectric vibrator 1 is performed to finally check dimensions and quality.

Thus, in this embodiment, in the oxidation step (S60), the aluminum film 23a is irradiated with oxygen plasma to oxidize the outer peripheral portion of the aluminum film 23a, thereby forming the alumina film 23b.
According to this configuration, since the alumina film 23b is formed so as to surround the aluminum film 23a, the aluminum film 23a is protected by the alumina film 23b, and the aluminum film 23a is protected from the space between the base substrate 2 and the lid substrate 3. The film 23a is not exposed. Here, since aluminum oxide is very dense and excellent in chemical stability, even if it is exposed to the outer surface of the package 10, it does not corrode. For this reason, it is possible to suppress the inflow of air or moisture in the air into the cavity C. Note that, according to the present embodiment, by densely oxidizing the aluminum film 23a with oxygen plasma, a thicker and denser film than the natural oxide film can be formed.
Therefore, the corrosion of the bonding material 23 can be suppressed and the airtightness in the cavity C can be maintained in a stable state over a long period of time, so that the highly reliable piezoelectric vibrator 1 having excellent vibration characteristics can be provided.

(Oscillator)
Next, an embodiment of an oscillator according to the present invention will be described with reference to FIG.
As shown in FIG. 14, the oscillator 100 according to the present embodiment is configured such that the piezoelectric vibrator 1 is an oscillator electrically connected to the integrated circuit 101. The oscillator 100 includes a substrate 103 on which an electronic component 102 such as a capacitor is mounted. On the substrate 103, the integrated circuit 101 for the oscillator is mounted, and the piezoelectric vibrator 1 is mounted in the vicinity of the integrated circuit 101. The electronic component 102, the integrated circuit 101, and the piezoelectric vibrator 1 are electrically connected by a wiring pattern (not shown). Each component is molded with a resin (not shown).

In the oscillator 100 configured as described above, when a voltage is applied to the piezoelectric vibrator 1, the piezoelectric vibrating reed 5 in the piezoelectric vibrator 1 vibrates. This vibration is converted into an electric signal by the piezoelectric characteristics of the piezoelectric vibrating piece 5 and input to the integrated circuit 101 as an electric signal. The input electrical signal is subjected to various processes by the integrated circuit 101 and is output as a frequency signal. Thereby, the piezoelectric vibrator 1 functions as an oscillator.
Further, by selectively setting the configuration of the integrated circuit 101, for example, an RTC (real-time clock) module or the like according to a request, the operation date and time of the device and the external device in addition to a single-function oscillator for a clock, etc. A function for controlling the time, providing a time, a calendar, and the like can be added.

  As described above, according to the oscillator 100 of this embodiment, since the piezoelectric vibrator 1 in which the airtightness in the cavity C is ensured is provided, the high-quality oscillator 100 having excellent characteristics and reliability can be provided. In addition to this, a stable and highly accurate frequency signal can be obtained over a long period of time.

(Electronics)
Next, an embodiment of an electronic apparatus according to the present invention will be described with reference to FIG. Note that the portable information device 110 having the above-described piezoelectric vibrator 1 will be described as an example of the electronic device.
First, the portable information device 110 according to the present embodiment is represented by, for example, a mobile phone, and is a development and improvement of a wrist watch in the related art. The appearance is similar to that of a wristwatch, and a liquid crystal display is arranged in a portion corresponding to a dial so that the current time and the like can be displayed on this screen. Further, when used as a communication device, it is possible to perform communication similar to that of a conventional mobile phone by using a speaker and a microphone that are removed from the wrist and incorporated in the inner portion of the band. However, it is much smaller and lighter than conventional mobile phones.

  Next, the configuration of the portable information device 110 of this embodiment will be described. As shown in FIG. 15, the portable information device 110 includes the piezoelectric vibrator 1 and a power supply unit 111 for supplying power. The power supply unit 111 is made of, for example, a lithium secondary battery. The power supply unit 111 includes a control unit 112 that performs various controls, a clock unit 113 that counts time, a communication unit 114 that communicates with the outside, a display unit 115 that displays various types of information, A voltage detection unit 116 that detects the voltage of the functional unit is connected in parallel. The power unit 111 supplies power to each functional unit.

  The control unit 112 controls each function unit to control operation of the entire system such as transmission and reception of audio data, measurement and display of the current time, and the like. The control unit 112 includes a ROM in which a program is written in advance, a CPU that reads and executes the program written in the ROM, and a RAM that is used as a work area of the CPU.

  The timer unit 113 includes an integrated circuit including an oscillation circuit, a register circuit, a counter circuit, an interface circuit, and the like, and the piezoelectric vibrator 1. When a voltage is applied to the piezoelectric vibrator 1, the piezoelectric vibrating piece 5 vibrates, and the vibration is converted into an electric signal by the piezoelectric characteristics of the crystal, and is input to the oscillation circuit as an electric signal. The output of the oscillation circuit is binarized and counted by a register circuit and a counter circuit. Then, signals are transmitted to and received from the control unit 112 via the interface circuit, and the current time, current date, calendar information, or the like is displayed on the display unit 115.

The communication unit 114 has functions similar to those of a conventional mobile phone, and includes a radio unit 117, a voice processing unit 118, a switching unit 119, an amplification unit 120, a voice input / output unit 121, a telephone number input unit 122, and a ring tone generation unit. 123 and a call control memory unit 124.
The wireless unit 117 exchanges various data such as audio data with the base station via the antenna 125. The audio processing unit 118 encodes and decodes the audio signal input from the radio unit 117 or the amplification unit 120. The amplifying unit 120 amplifies the signal input from the audio processing unit 118 or the audio input / output unit 121 to a predetermined level. The voice input / output unit 121 includes a speaker, a microphone, and the like, and amplifies a ringtone and a received voice or collects a voice.

In addition, the ring tone generator 123 generates a ring tone in response to a call from the base station. The switching unit 119 switches the amplifying unit 120 connected to the voice processing unit 118 to the ringing tone generating unit 123 only when an incoming call is received. To the audio input / output unit 121.
The call control memory unit 124 stores a program related to incoming / outgoing call control of communication. The telephone number input unit 122 includes, for example, a number key from 0 to 9 and other keys. By pressing these number keys and the like, a telephone number of a call destination is input.

  When the voltage applied to each functional unit such as the control unit 112 by the power supply unit 111 falls below a predetermined value, the voltage detection unit 116 detects the voltage drop and notifies the control unit 112 of the voltage drop. . The predetermined voltage value at this time is a value set in advance as a minimum voltage necessary for stably operating the communication unit 114, and is, for example, about 3V. Upon receiving the voltage drop notification from the voltage detection unit 116, the control unit 112 prohibits the operations of the radio unit 117, the voice processing unit 118, the switching unit 119, and the ring tone generation unit 123. In particular, it is essential to stop the operation of the wireless unit 117 with high power consumption. Further, the display unit 115 displays that the communication unit 114 has become unusable due to insufficient battery power.

That is, the operation of the communication unit 114 can be prohibited by the voltage detection unit 116 and the control unit 112, and that effect can be displayed on the display unit 115. This display may be a text message, but as a more intuitive display, a x (X) mark may be attached to the telephone icon displayed at the top of the display surface of the display unit 115.
In addition, the function of the communication part 114 can be stopped more reliably by providing the power supply cutoff part 126 that can selectively cut off the power of the part related to the function of the communication part 114.

  As described above, according to the portable information device 110 of this embodiment, since the piezoelectric vibrator 1 in which the airtightness in the cavity C is ensured is provided, the high-quality portable information device 110 having excellent characteristics and reliability. Can provide. In addition to this, it is possible to display highly accurate clock information that is stable over a long period of time.

(Radio watch)
Next, an embodiment of a radio timepiece according to the present invention will be described with reference to FIG.
As shown in FIG. 16, the radio timepiece 130 of the present embodiment includes the piezoelectric vibrator 1 electrically connected to the filter unit 131, and receives a standard radio wave including timepiece information to accurately It is a clock with a function of automatically correcting and displaying the correct time.
In Japan, there are transmitting stations (transmitting stations) that transmit standard radio waves in Fukushima Prefecture (40 kHz) and Saga Prefecture (60 kHz), each transmitting standard radio waves. Long waves such as 40 kHz or 60 kHz have the property of propagating the surface of the earth and the property of propagating while reflecting the ionosphere and the surface of the earth, so the propagation range is wide and the above two transmitting stations cover all of Japan is doing.

Hereinafter, the functional configuration of the radio timepiece 130 will be described in detail.
The antenna 132 receives a long standard wave of 40 kHz or 60 kHz. The long-wave standard radio wave is obtained by subjecting time information called a time code to AM modulation on a 40 kHz or 60 kHz carrier wave. The received long standard wave is amplified by the amplifier 133 and filtered and tuned by the filter unit 131 having the plurality of piezoelectric vibrators 1. The piezoelectric vibrator 1 according to this embodiment includes crystal vibrator portions 138 and 139 having resonance frequencies of 40 kHz and 60 kHz that are the same as the carrier frequency.

Further, the filtered signal having a predetermined frequency is detected and demodulated by the detection and rectification circuit 134. Subsequently, the time code is taken out via the waveform shaping circuit 135 and counted by the CPU 136. The CPU 136 reads information such as the current year, accumulated date, day of the week, and time. The read information is reflected in the RTC 137, and accurate time information is displayed.
Since the carrier wave is 40 kHz or 60 kHz, the crystal vibrator units 138 and 139 are preferably vibrators having the tuning fork type structure described above.

  In addition, although the above-mentioned description was shown in the example in Japan, the frequency of the long standard wave is different overseas. For example, in Germany, a standard radio wave of 77.5 KHz is used. Accordingly, when the radio timepiece 130 that can be used overseas is incorporated in a portable device, the piezoelectric vibrator 1 having a frequency different from that in Japan is required.

  As described above, according to the radio timepiece 130 of the present embodiment, since the piezoelectric vibrator 1 in which the airtightness in the cavity C is ensured is provided, the high quality radio timepiece 130 having excellent characteristics and reliability is provided. it can. In addition to this, it is possible to count the time with high accuracy and stability over a long period of time.

  It should be noted that the technical scope of the present invention is not limited to the above-described embodiments, and includes those in which various modifications are made to the above-described embodiments without departing from the spirit of the present invention. That is, the specific materials, layer configurations, and the like given in the embodiment are merely examples, and can be changed as appropriate.

For example, in the above-described embodiment, the bonding material 23 is formed on the front surface 40a of the base substrate wafer 40. On the contrary, the bonding material 23 may be formed on the back surface 50a of the lid substrate wafer 50. In this case, it is possible to form the bonding material 23 only on the bonding surface with the base substrate wafer 40 on the back surface 50a of the lid substrate wafer 50 by patterning after film formation, but the back surface including the inner surface of the recess 3a. By forming over the whole 50a, the patterning of the bonding material 23 becomes unnecessary, and the manufacturing cost can be reduced.
The design of the width d2 of the alumina film 23b can be changed as appropriate.

Further, in the above-described bonding step (S60), a bonding auxiliary material serving as an anode is disposed on the back surface 40b of the base substrate wafer 40, and a cathode is disposed on the front surface 50b of the lid substrate wafer 50 (so-called counter electrode). A method in which the bonding material 23 is connected to the anode, a cathode is disposed on the surface 50b of the lid substrate wafer 50, and a voltage is directly applied to the bonding material 23 (a so-called direct electrode). Method).
By adopting the counter electrode method, an anodic bonding reaction occurs between the bonding auxiliary material and the back surface 40b of the base substrate wafer 40 by applying a voltage between the bonding auxiliary material and the cathode during anodic bonding. In conjunction with this, the bonding material 23 and the back surface 50a of the lid substrate wafer 50 are anodically bonded. Thereby, it becomes possible to apply a voltage more uniformly to the entire surface of the bonding material 23, and the anodic bonding can be reliably performed between the bonding material 23 and the back surface 50 a of the lid substrate wafer 50.
In contrast, the direct electrode method eliminates the need to remove the bonding auxiliary material after the bonding process required by the counter electrode method, thus reducing the number of manufacturing steps and improving the manufacturing efficiency. Can be achieved.

  In the above-described embodiment, the piezoelectric vibrator is manufactured by enclosing the piezoelectric vibrating piece in the package while using the package manufacturing method according to the present invention. However, the electronic component other than the piezoelectric vibrating piece is provided in the package. It is also possible to manufacture a device other than the piezoelectric vibrator by encapsulating.

In the above-described embodiment, the case where the oxidation process (S70) is performed in a state where the plurality of packages 10 are attached to the UV tape 80 after the expansion process is finished is described. It is also possible to carry out by various methods.
Specifically, as shown in FIG. 17A, after the expanding process is completed, the first jig 150 is set from above the plurality of packages 10 attached to the UV tape 80. The first jig 150 includes a flat plate-shaped base portion 151, and a housing portion 152 that is formed in the base portion 151 and has a concave shape in sectional view for housing a plurality of packages 10 attached on the UV tape 80. . That is, the accommodating part 152 is formed for every arrangement pitch of the plurality of packages 10 attached to the UV tape 80. Then, the first jig 150 is set so as to cover each package 10 from the surface 3 d side of the lid substrate 3, and each package 10 is accommodated in each accommodating portion 152 of the jig 150.

Next, as shown in FIG. 17B, the first jig 150 and the UV tape 80 are turned upside down, and then the UV tape 80 is irradiated with UV to peel the UV tape 80 from each package 10 ( (See arrow in FIG. 17B). As a result, each package 10 is housed in each housing portion 152 of the first jig 150.
Next, as shown in FIG. 17C, the second jig 160 is set from above the first jig 150. The second jig 160 includes a flat base portion 161 and a concave portion 162 formed so as to face the accommodating portion 152 of the first jig 150. Then, the second jig 160 is set so that the external electrodes 6 and 7 are accommodated in the recess 162 from the back surface 2 a side of the base substrate 2.

Subsequently, the first jig 150 and the second jig 160 are turned upside down, and the first jig 150 is separated from the package 10. As a result, the plurality of packages 10 are arranged at predetermined intervals on the base portion 161 of the second jig 160. In this state, as shown in FIG. 17D, the plurality of packages 10 are transferred together with the second jig 160 into the plasma processing apparatus, and the above-described oxidation step (S70) is performed.
According to this configuration, unlike the case where the oxidation step (S70) is performed with a plurality of packages 10 attached on the UV tape 80, there is no possibility that the UV tape 80 breaks in the middle. From the conveyance to the plasma irradiation to the plasma irradiation can be performed reliably. In the above-described configuration, the configuration in which the concave portion 162 is provided for each arrangement pitch of each package 10 has been described. However, the present invention is not limited thereto, and a magnet is arranged for each arrangement pitch of each package 10 on the base portion 161. The external electrodes 6 and 7 may be adsorbed using

  DESCRIPTION OF SYMBOLS 1 ... Piezoelectric vibrator 2 ... Base board | substrate (1st board | substrate) 3 ... Lid board | substrate (2nd board | substrate) 5 ... Piezoelectric vibration piece (electronic component) 6, 7 ... External electrode 10 ... Package (joining piece) 23 ... Joining material 40 ... base substrate wafer (first wafer) 50 ... lid substrate wafer (second wafer) 60 ... wafer bonded body (bonded body) 100 ... oscillator 101 ... integrated circuit of oscillator 110 ... portable information device (electronic device) 113 ... Timekeeping part 130 of electronic equipment ... Radio clock 131 ... Filter part of radio clock C ... Cavity

Claims (7)

A method of manufacturing a package having a cavity capable of enclosing an electronic component between a first substrate and a second substrate made of an insulator bonded to each other,
A bonding step of anodic bonding a bonding material made of a material mainly composed of aluminum formed on the bonding surface of the first substrate and the bonding surface of the second substrate;
A method of manufacturing a package, comprising: an oxidizing step of oxidizing the bonding material by treating the bonding material exposed from between the first substrate and the second substrate with oxygen plasma. In the bonding step, the plurality of first substrates included in the first wafer and the plurality of second substrates included in the second wafer are respectively anodically bonded,
Between the joining step and the oxidation step,
Attaching an adhesive sheet to one surface of the joined body of the first wafer and the second wafer;
Dividing the joined body into pieces for each formation region of the package, and forming a plurality of joined pieces;
Expanding the adhesive sheet to expand the interval between the plurality of pieces separated into pieces, and an expanding step.
In the oxidation step, the bonding material exposed from between the first substrate and the second substrate of each bonding piece in a state where the plurality of bonding pieces are spaced apart on the stretched adhesive sheet. 2. The method of manufacturing a package according to claim 1, wherein the treatment is performed with oxygen plasma.   A package manufactured using the method for manufacturing a package according to claim 1.   A piezoelectric vibrator, wherein a piezoelectric vibrating piece is hermetically sealed in the cavity of the package according to claim 3.   The oscillator according to claim 4, wherein the piezoelectric vibrator is electrically connected to an integrated circuit as an oscillator.   The electronic device according to claim 4, wherein the piezoelectric vibrator is electrically connected to a timing unit.   5. A radio timepiece wherein the piezoelectric vibrator according to claim 4 is electrically connected to a filter portion.

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