JP2011108387A - Terminal, coaxial cable module, and interface device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a terminal capable of shortening a manufacturing period of an interface device for an electronic component testing apparatus. <P>SOLUTION: The terminal 60A includes a main body part 61 with a plurality of fixing parts 62 arrayed in parallel, fixing shield layers 53 of coaxial cables 50 with a signal wire 51 of each coaxial cable 50 protruded, and a plurality of protruded parts 63 protruded from the main body part 61 substantially in the same direction as the signal wires 51 of the coaxial cables 50 and inserted into through-holes of a socket board 30. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to a terminal for connecting a plurality of coaxial cables to a circuit board, and a coaxial cable module and an interface device including the terminals.

  2. Description of the Related Art In an electronic component testing apparatus that tests electronic components such as semiconductor integrated circuit elements, an interface device is used to relay an electrical connection between a device under test (DUT) and a test head.

  As such an interface device, a socket board on which a socket that is in electrical contact with an electronic device under test is mounted and a performance board that is electrically connected to the test head are electrically connected by a number of coaxial cables. A CCN (Cable Connection) type interface device is known (see, for example, Patent Document 1).

  This CCN type interface device is suitable for a DUT that requires a high-quality test because the socket board and the performance board are directly connected by a coaxial cable.

JP 2008-78048 A

  However, in the above CCN type interface device, it is necessary to insert a coaxial cable into the through hole of the socket board one by one and fix it by soldering.

  The problem to be solved by the present invention is to provide a terminal, a coaxial cable module, and an interface device that can shorten the manufacturing period of the interface device.

  [1] A terminal according to the present invention is a terminal for electrically connecting a plurality of coaxial cables to a circuit board, and a shield layer of the coaxial cable is fixed while projecting a signal line of the coaxial cable. A plurality of fixing portions provided in parallel, and a plurality of fixing portions protruding from the main body portion in substantially the same direction as the signal lines of the coaxial cable and inserted into through holes formed in the circuit board. And a protruding portion.

  [2] In the above invention, the number of the protruding portions protruding from the main body portion is smaller than the number of the fixing portions provided on the main body portion, and a recess is formed between the adjacent protruding portions in plan view. May be.

  [3] In the above invention, the fixing portion is arranged at a first pitch on the main body portion, whereas the protruding portion is substantially twice the first pitch. The protrusions may be arranged every other pitch with respect to the fixed part.

  [4] In the above invention, the fixing portion may be fixed to the shield layer of the coaxial cable by soldering.

  [5] In the above invention, the terminal may be formed by processing a single metal plate.

  [6] A coaxial cable module according to the present invention includes the above terminal, and a plurality of coaxial cables each having a shield layer fixed to the terminal.

  [7] An interface device according to the present invention is an interface device that relays electrical connection between an electronic device under test and a test head, and is mounted with a socket that is in electrical contact with the electronic device under test. A socket board; a performance board electrically connected to the test head; and the plurality of coaxial cable modules electrically connecting the socket board and the performance board. .

  [8] An interface device according to the present invention is an interface device that relays electrical connection between an electronic device under test and a test head, and is mounted with a socket that is in electrical contact with the electronic device under test. A socket board; a performance board electrically connected to the test head; and the plurality of coaxial cable modules for electrically connecting the socket board and the performance board; The number of the protruding portions protruding from the main body portion is less than the number of the fixing portions provided in the main body portion, and in a plan view, a recess is formed between the adjacent protruding portions, and the terminal of the coaxial cable module The protruding portion is inserted into a concave portion of a terminal of the other coaxial cable module.

  In the present invention, since a plurality of coaxial cables can be collectively connected to the circuit board by the terminals, the manufacturing period of the interface device can be shortened.

FIG. 1 is a schematic cross-sectional view showing an electronic component testing apparatus according to an embodiment of the present invention. FIG. 2 is a schematic cross-sectional view of the test head and HiFix according to the embodiment of the present invention. FIG. 3A is a front view showing a first coaxial cable module according to the embodiment of the present invention. FIG. 3B is a side view of the first coaxial cable module shown in FIG. 3A. FIG. 4 is a front view showing the coaxial cable in the embodiment of the present invention. FIG. 5A is a front view showing a first terminal in the embodiment of the present invention. FIG. 5B is a plan view of the first terminal shown in FIG. 5A. FIG. 5C is a cross-sectional view taken along the line VC-VC in FIG. 5A. FIG. 6 is a front view showing a second coaxial cable module according to the embodiment of the present invention. FIG. 7A is a front view showing a second terminal in the embodiment of the present invention. FIG. 7B is a plan view of the second terminal shown in FIG. 7A. FIG. 8 is a front view showing a third coaxial cable module according to the embodiment of the present invention. FIG. 9A is a front view showing a third terminal in the embodiment of the present invention. FIG. 9B is a plan view of the third terminal shown in FIG. 9A. FIG. 10 is a plan view showing a state where the second terminal and the third terminal are combined with each other in the embodiment of the present invention. FIG. 11 is a plan view showing the socket board in the embodiment of the present invention. FIG. 12 is an enlarged view of a portion XII in FIG. FIG. 13 is an enlarged view of a portion XIII in FIG.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

  FIG. 1 is a schematic cross-sectional view showing an electronic component test apparatus according to the present embodiment, and FIG. 2 is a schematic cross-sectional view of a test head and HiFix according to the present embodiment.

  As shown in FIG. 1, the electronic component testing apparatus 1 in the present embodiment includes a handler 2 for handling the electronic device under test DUT, a test head 4 electrically connected to the DUT during testing, and a test head 4. And a tester main body (main frame) 3 for sending a test signal to the DUT via the DUT and executing the DUT test. The electronic component testing apparatus 1 tests the electrical characteristics of the DUT in a state where high or low temperature stress is applied to the DUT, and classifies the DUT according to the test result.

  As shown in FIG. 1, a high fidelity tester access fixture (HIFIX) 10 that relays the electrical connection between the DUT and the test head 4 is mounted on the top of the test head 4. Further, a socket 20 that is in electrical contact with the DUT is provided on the upper portion of the HiFix 10. The socket 20 faces the inside of the handler 2 through an opening 2 a formed in the handler 2, and the DUT transported in the handler 2 is pressed against the socket 20. As the handler 2, a heat plate type or a chamber type can be used.

  As shown in FIG. 2, the HiFix 10 includes a socket board 30 on which the socket 20 is mounted, a performance board 70 connected to the test head 4 via a connector 71, a socket board 30, and a performance board 70. And a coaxial cable module 40 for electrically connecting the two. In FIG. 2, only two sockets 20 are illustrated, but actually, a large number of sockets 20 such as 64 pieces and 128 pieces are provided. Moreover, the code | symbol 60 in FIG. 2 is a general term of the 1st-3rd terminals 60A-60C mentioned later.

  First, the coaxial cable module 40 in this embodiment is demonstrated.

  In the present embodiment, as the coaxial cable module 40, three types of coaxial cable modules 40A to 40C as shown in FIGS. 3A, 6 and 8 are prepared.

  First, the first coaxial cable module 40A will be described. In the second and third coaxial cable modules 40B and 40C, the same components as those in the first coaxial cable module 40A are denoted by the same reference numerals and description thereof is omitted.

  3A and 3B are views showing a first coaxial cable module in the present embodiment, FIG. 4 is a view showing the coaxial cable in the present embodiment, and FIGS. 5A to 5C are views showing first terminals in the present embodiment. It is.

  As shown in FIGS. 3A and 3B, the first coaxial cable module 40A includes seven coaxial cables 50 and a first terminal 60A for connecting these coaxial cables 50 together to the socket board 30. I have.

  As shown in FIG. 4, the coaxial cable 50 is configured by braiding a signal line 51, an insulating layer 52 disposed on the outer periphery of the signal line 51, and a metal wire, for example, and is disposed on the outer periphery of the insulating layer 52. It has a shield layer 53 and a covering layer 54 covering them. As shown in the figure, both ends of the coaxial cable 50 are processed in advance so that a predetermined amount of the signal line 51 and the shield layer 53 are exposed when modularized.

  As shown in FIGS. 5A to 5C, the first terminal 60 </ b> A includes a main body 61 and a plurality (four in this example) of protrusions 63 inserted into the through holes of the socket board 30. .

  The first terminal 60A is made of a conductive material such as a metal material, and is formed, for example, by pressing or punching a single plate material. Thus, the cost of the first terminal 60A can be reduced by forming the first terminal 60A from a single plate material. In particular, since the first terminal 60A is used in a large amount in one HiFix 10, the effect is remarkable.

  As shown in FIG. 5A, seven fixing portions 62 to which the shield layer 53 of the coaxial cable 50 is fixed are provided in parallel at the first pitch P1 on the main body portion 61 of the first terminal 60A. The fixing portion 62 is a portion that is fixed to the shield layer 53 of the coaxial cable 50 in the main body portion 61 by soldering. For example, in this embodiment, the opening 621 that penetrates the main body portion 61 in the main body portion 61. Is a region around (a region surrounded by an alternate long and short dash line in FIG. 5A).

  Further, eight ribs 623 are erected on the lower portion of the main body 61. As shown in FIGS. 5A and 5B, these eight ribs 623 are arranged at substantially equal intervals so as to be located on both sides of the fixing portion 62, respectively.

  The shield layer 53 of the coaxial cable 50 is brought into close contact with the fixed portion 62 and the shield layer 53 and the fixed portion 62 are soldered in a state where the coaxial cable 50 is sandwiched between two ribs 623 adjacent to the fixed portion 62. It is fixed by attaching. By this soldering, the shield layer 53 fixed to the fixing portion 62 is electrically connected to the protruding portion 63 via the main body portion 61.

  On the other hand, the upper part of the fixing part 62 in FIG. 5A is open, and the signal line 51 of the coaxial cable 50 fixed to the fixing part 62 protrudes upward in the figure (see FIG. 3A).

  The protruding portion 63 of the first terminal 60 </ b> A extends from the main body portion 61 so as to protrude in substantially the same direction as the signal line 51 of the coaxial cable 50 fixed to the fixing portion 62. In the first terminal 60A, four protrusions 63 are provided at a second pitch P2 that is twice the first pitch P1 (P2 = P1 × 2). , Every other fixed portion 62 is arranged. In addition, as long as the number of the protrusions 63 of the first terminal 60A is smaller than the number of the coaxial cables 50 fixed to the first terminal 60A, these numbers are not particularly limited.

  Thus, in this embodiment, since the protrusion part 63 is arrange | positioned every other with respect to the fixing | fixed part 62, the recessed part 631 is each formed between adjacent protrusion parts 63 in planar view shown to FIG. 5B. ing. The recess 631 is not particularly used in the first terminal 60A. However, in the second and third terminals 60B and 60C described later, the protrusion 63 of one terminal enters the recess 631 of the other terminal, so that the socket 631 Many coaxial cables 50 can be connected to a limited space on the board 30.

  As shown in FIGS. 3A and 3B, the signal line 51 of the coaxial cable 50 and the shield layer 54 are electrically connected to the through hole (not shown) of the performance board 70 at the other end of the coaxial cable 50. For this purpose, terminals 64 as shown in the figure are individually attached.

  FIG. 6 is a diagram showing a second coaxial cable module in the present embodiment, and FIGS. 7A and 7B are diagrams showing second terminals in the present embodiment.

  As shown in FIG. 6, the second coaxial cable module 40 </ b> B includes 15 coaxial cables 50 and a second terminal 60 </ b> B for connecting these coaxial cables 50 together to the socket board 30. .

  The second terminal 60B is different from the first terminal 60A in the number of fixing portions 62 and the number of protruding portions 63. As the 15 coaxial cables 50 are fixed to the second terminal 60B, as shown in FIGS. 7A and 7B, 15 fixing portions 62 are provided in the main body portion 61. The eight protruding parts 63 protrude from the main body part 61.

  FIG. 8 is a view showing a third coaxial cable module in the present embodiment, FIGS. 9A and 9B are views showing a third terminal in the present embodiment, and FIG. 10 is a view showing the second terminal and the third terminal in the present embodiment. It is a top view which shows the state which match | combined the terminal mutually.

  Similarly to the second coaxial cable module 40B, the third coaxial cable module 40C also includes 15 coaxial cables 50 and a third coaxial cable 50 connected together to the socket board 30 as shown in FIG. Terminal 60C.

  As shown in FIGS. 9A and 9B, the third terminal 60C has the same number of fixing portions 62 as the second terminals 60B, whereas the number and arrangement of the protruding portions 63 are the second terminals 60B. Is different.

  In the third terminal 60C, seven projecting portions 63 project from the main body portion 61 at a reverse period (alternately) from the projecting portions 63 of the second terminal 60B. For this reason, as shown in FIG. 10, when the second terminal 60B and the third terminal 60C are put together, the protrusion 63 of the second terminal 60B enters the recess 631 of the third terminal 60C, and the third The protrusion 63 of the terminal 60C enters the recess 631 of the second terminal 60B, and as a result, all the protrusions 63 of the second and third terminals 60B and 60C are aligned in a line. Yes. Thereby, many coaxial cables 50 can be connected to a narrow space (see FIG. 11) between the sockets 20 in the socket board 30.

  The first to third coaxial cable modules 40 </ b> A to 40 </ b> C described above are connected to the socket board 30.

  11 is a plan view showing the socket board in the present embodiment, FIG. 12 is an enlarged view of the XII portion of FIG. 11, and FIG. 13 is an enlarged view of the XIII portion of FIG.

  The socket 20 mounted on the socket board 30 has a large number of contact pins (not shown) that are in electrical contact with the input / output terminals of the DUT. Each contact pin is connected to the through holes 31a, 31b, 32a, 32b, 32c, 33a shown in FIG. 11 via a wiring pattern (not shown) formed on the socket board 30, and in this embodiment, These through holes 31a, 31b, 32a, 32b, 32c, and 33a constitute three types of first to third through hole groups 31 to 33.

  The first through-hole group 31 is a through-hole group to which the above-described first coaxial cable module 40A is connected, and four socket boards 30 are provided. Each first through hole group 31 includes 14 through holes 31a and 31b arranged in 2 rows and 7 columns.

  More specifically, taking the first through hole group shown in FIG. 12 as an example, in a row closer to the socket 20 (shown by a broken line in FIG. 11) (lower row in FIGS. 11 and 12), A signal through hole 31a into which the signal line 51 of the coaxial cable 50 of the first coaxial cable module 40A is inserted is disposed.

  On the other hand, in the row farther from the socket 20 (the upper row in FIGS. 11 and 12), the ground through hole 31b into which the protruding portion 63 of the first terminal 60A of the first coaxial cable module 40A is inserted. Is arranged. Incidentally, in the first through hole group 31 of the present embodiment, some of the ground through holes 31b are not used.

  On the other hand, the second through-hole group 32 is a through-hole group to which the second and third coaxial cables 40B and 40C are connected, and only one is provided in one socket board 30. It is arranged between the sockets 20. As shown in FIG. 11, the second through hole group 32 includes 45 through holes 32a, 32b, and 32c arranged in 15 rows and 3 columns.

  As shown in FIG. 10, the second and third coaxial cable modules 40B and 40C are connected to the second through hole group 32 with the second and third terminals 60B and 60C aligned with each other. The In the enlarged view of FIG. 13, the second coaxial cable module 40B is connected to the through holes 32a and 32c with patterns. On the other hand, the third coaxial cable module 40c is connected to the white through holes 32b and 32c in FIG.

  Specifically, as shown in FIG. 13, for example, the signal line 51 of the coaxial cable 50 of the second coaxial cable module 40 </ b> B is placed in the signal through hole 32 a of the first column (left column in the figure). Each inserted.

  On the other hand, the signal lines 51 of the coaxial cable module 50 of the third coaxial cable module 40C are inserted into the signal through holes 32b in the third column (right column in the figure), respectively.

  And the protrusion part 63 of the 2nd and 3rd coaxial cable modules 40B and 40C is inserted by turns into the 2nd line (center line in the figure). That is, the protrusion 63 of the second coaxial cable module 40B is inserted into the ground through holes 32c in the odd rows. On the other hand, the protrusions 63 of the third coaxial cable module 40C are inserted into the ground through holes 32c in even rows.

  The third through-hole group 33 is a through-hole group composed of a power supply through-hole 33a to which a cable for supplying power to the DUT during the test is connected. The coaxial cable module according to the present embodiment. 40A to 40C are not connected.

  Accordingly, four first coaxial cable modules 40A are connected to one socket board 30, and one each of the second and third coaxial cable modules 40B and 40C is connected. The signal lines 51 and the protrusions 63 inserted into the through holes 31a, 31b, 32a, 32b, and 32c are fixed to the socket board 30 by soldering.

  On the other hand, the other end of the coaxial cable 50 of each of the coaxial cable modules 40A to 40C (the end portion on the side where the first to third terminals 60A to 60C are not provided) is connected to a through hole (un- Individually).

  As described above, in the present embodiment, since the plurality of coaxial cables 50 can be connected to the socket board 30 by the first to third terminals 60A to 60C, the manufacturing period of the HiFix 10 can be shortened. Can be planned.

  In particular, in the present embodiment, the protruding portion 63 of the first to third terminals 60A to 60C and the signal line 51 of the coaxial cable 50 protrude in substantially the same direction. It can be simultaneously inserted into the holes 31a, 31b, 32a, 32b, 32c.

  In general, the configuration of the socket board differs depending on the type of DUT, etc., but in this embodiment, even if the socket board has a different type of DUT, the same arrangement as shown in FIG. A hole is formed to share the socket board.

  In the present embodiment, a number of through holes corresponding to all signals that can be input and output by the tester 3 are formed in the socket board 30. Each socket board 30 is designed so that only signals necessary for the target DUT are transmitted from the through holes 31a, 31b, 32a, 32b, and 32c to the socket 20, and unnecessary signals are transmitted to the socket 20. Is not transmitted to the network.

  In this embodiment, by performing such a design, the connection of the coaxial cable modules 40A to 40C is started first from the versatile performance board 70, and then the coaxial cable unit is connected to the socket board 30 having low versatility. 40A to 40C can be connected, and the manufacturing period of HiFix 10 can be further shortened.

  The embodiment described above is described for facilitating the understanding of the present invention, and is not described for limiting the present invention. Therefore, each element disclosed in the above embodiment is intended to include all design changes and equivalents belonging to the technical scope of the present invention.

  For example, the number of the coaxial cables 50 fixed to the first to third terminals 60A to 60C (that is, the number of the fixing portions 62 in the first to third terminals 60A to 60C) is not particularly limited to the above. It can be arbitrarily set according to.

4 ... Test head 10 ... HiFix (interface device)
DESCRIPTION OF SYMBOLS 20 ... Socket 30 ... Socket board 31 ... 1st through-hole group 32 ... 2nd through-hole group 33 ... 3rd through-hole group 40A-40B ... Coaxial cable module 50 ... Coaxial cable 51 ... Signal wire 52 ... Insulating layer 53 ... Shielding layer 54 ... Coating layer 60A ... First terminal 61 ... Main body part 62 ... Fixing part 621 ... Opening 623 ... Rib 63 ... Protruding part 631 ... Recessed part 60B ... Second terminal 60C ... Third terminal 70 ... Performance board

Claims (8)

A terminal for electrically connecting a plurality of coaxial cables to a circuit board,
A main body provided in parallel with a plurality of fixing parts to which the shield layer of the coaxial cable is fixed while projecting the signal line of the coaxial cable;
A terminal that protrudes from the main body in substantially the same direction as the signal line of the coaxial cable, and includes a plurality of protrusions that are inserted into through holes formed in the circuit board. . The terminal according to claim 1,
The number of the protruding portions protruding from the main body portion is less than the number of the fixing portions provided in the main body portion,
A terminal, wherein a recess is formed between the protrusions adjacent in a plan view. The terminal according to claim 2,
Whereas the fixed portion is arranged at the first pitch on the main body portion,
The protrusions are arranged at a second pitch that is substantially twice the first pitch;
The terminal is characterized in that the projecting portions are arranged alternately with respect to the fixed portion. The terminal according to any one of claims 1 to 3,
The terminal, wherein the fixing portion is fixed to a shield layer of the coaxial cable by soldering. The terminal according to any one of claims 1 to 4,
A terminal characterized by being formed by processing a single metal plate. A terminal according to any one of claims 1 to 5;
A coaxial cable module, comprising: a plurality of coaxial cables each having a shield layer fixed to each of the terminals. An interface device that relays an electrical connection between an electronic device under test and a test head,
A socket board on which a socket in electrical contact with the electronic component under test is mounted;
A performance board electrically connected to the test head;
An interface device comprising: the plurality of coaxial cable modules according to claim 6, wherein the socket board and the performance board are electrically connected to each other. An interface device that relays an electrical connection between an electronic device under test and a test head,
A socket board on which a socket in electrical contact with the electronic component under test is mounted;
A performance board electrically connected to the test head;
A plurality of coaxial cable modules according to claim 6, wherein the socket board and the performance board are electrically connected.
The number of the protruding portions protruding from the main body portion is less than the number of the fixing portions provided in the main body portion,
An interface device, wherein, in a plan view, a recess is formed between adjacent protrusions, and a protrusion of a terminal of the coaxial cable module enters a recess of a terminal of another coaxial cable module.

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