JP2011096376A - Optical device, method of manufacturing the same, and electronic apparatus - Google Patents

Abstract

An optical device manufacturing method capable of appropriately forming a plurality of organic functional layers by using a droplet discharge method is provided.
[Solution]
According to this manufacturing method, after forming the water-repellent oleophilic layer 31 on the upper surface of the partition wall 7, an aqueous solution of the hole injection layer is applied to each partition region P by using a droplet discharge method. 81 is formed. As the water repellent lipophilic layer 31, a pure resin material such as an acrylic resin that does not contain a liquid repellent substance such as fluorine is used, so that the liquid repellent substance does not elute into the solution. After the formation of the hole injection layer 81, a water / oil repellent layer 32 containing a fluorine-based liquid repellent material is formed on the water repellent / oleophilic layer 31, and each partition region P is utilized by utilizing the oil repellent function of the layer. Then, an oily solution of the light emitting layer is applied onto the hole injection layer 81 by a droplet discharge method to form the light emitting layer 83. Therefore, by properly using the functions of the water-repellent / oil-repellent layer 31 and the water- and oil-repellent layer 32, a plurality of organic functional layers can be appropriately formed using the droplet discharge method.
[Selection] Figure 6

Description

  The present invention relates to an optical device, a method for manufacturing the same, and an electronic apparatus including the optical device.

A so-called droplet discharge method is known in which a solution containing an organic EL (Electro Luminescence) material is discharged into a recess surrounded by a partition wall (bank) by an ink jet method and dried to form an organic functional layer.
In the case of forming a light emitting pixel by a droplet discharge method, a process of applying and drying a solution containing an organic material is repeated for each partitioned area, where one concave section partitioned by a partition is used as the partitioned area. Thus, an organic functional layer composed of a plurality of layers was formed. In addition, in order to prevent the solution from being mixed between adjacent partition regions, liquid repellency (water / oil repellency) is imparted to the upper surface of the partition partitioning each partition region.

For example, Patent Document 1 discloses a method of imparting liquid repellency by transferring a fluorine-based liquid repellent layer (water / oil repellent layer) onto the upper surface of a partition wall. Specifically, after laminating a film having a liquid repellent layer on the upper surface of the lattice-shaped partition wall, the liquid repellent layer (water / oil repellent layer) is selectively formed on the upper surface of the partition wall by peeling only the film. It is supposed to be transferred.
The document also describes that the same liquid repellency (water / oil repellency) can be imparted also by a method of performing CF ₄ plasma treatment on the upper part of the partition wall.

JP 2008-139378 A

However, according to the knowledge based on the experimental results of the inventors, when the liquid repellency is imparted by the method of Patent Document 1, when forming the second layer in the plurality of organic functional layers by the droplet discharge method, There was a problem that the formation failure of the second layer occurred. Specifically, after a hole injection layer as a first layer is formed by a droplet discharge method, a solution of a light emitting layer as a second layer is applied on the layer, and then on the hole injection layer or a partition wall. Since the portion having liquid repellency is formed on the facing portion, there is a problem that the solution is repelled in the portion and coating unevenness occurs.
As a result of the analysis by the inventors, the reason why the liquid repellent part is formed on the hole injection layer or on the partition wall is that the liquid repellent layer is in the solution of the hole injection layer applied in the first layer forming step. It was found that the fluorine component was deposited on the hole injection layer or on part of the partition walls in the drying process after a part of the metal was dissolved. Further, even when the CF ₄ plasma treatment is performed, a similar problem has been confirmed because the fluorine component dissolves into the hole injection layer solution. Note that the present invention is not limited to the combination of the hole injection layer and the light emitting layer, and the same problem is inherent in the case where the organic layer is continuously formed by the droplet discharge method.

That is, the conventional manufacturing method has a problem that it is difficult to appropriately form a plurality of organic functional layers by using a droplet discharge method.
In other words, the conventional manufacturing method including the step of continuously forming the organic functional layer by the droplet discharge method has a problem that it is difficult to ensure excellent display quality.

SUMMARY An advantage of some aspects of the invention is to solve at least a part of the problems described above, and the invention can be implemented as the following application examples or forms.

(Application example)
A method of manufacturing an optical device including a plurality of light-emitting pixels having a plurality of organic functional layers, the step of forming a pixel electrode serving as an opening of a light-emitting pixel on a substrate, and a partition partitioning the plurality of pixel electrodes Forming a lyophilic treatment on the exposed portion including the pixel electrode and the partition, forming a water-repellent lipophilic layer on the upper surface of the partition, and each of the plurality of regions partitioned by the partition When the partition region is formed, a step of applying a solution containing a material constituting the hole injection layer as the organic functional layer to the partition region by a droplet discharge method, and a water-repellent lipophilic layer on the water-repellent lipophilic layer A step of forming an oil repellent layer, and a step of applying a solution containing a material constituting the light emitting layer as the organic functional layer on the hole injection layer by a droplet discharge method for each partition region. A method of manufacturing an optical device.

According to this manufacturing method, after forming a water-repellent oleophilic layer on the upper surface of the partition, a solution of a water-soluble hole injection layer is applied to each partition region by using a droplet discharge method.
Here, as the water-repellent lipophilic layer, for example, a pure resin member such as an acrylic resin that does not contain a liquid-repellent substance such as fluorine is used, so that the liquid-repellent substance is contained in the hole injection layer solution. It does not elute.
Then, after forming the hole injection layer, for example, a water- and oil-repellent layer containing a fluorine-based liquid-repellent substance is formed on the water-repellent lipophilic layer, and the partitioning is performed using the oil-repellent function of the layer. For each region, an oil-based light emitting layer solution is applied onto the hole injection layer by a droplet discharge method.
In other words, in a process in which the droplet discharge method is continued, a water repellent lipophilic layer that does not contain a liquid repellent substance is used to prevent the liquid repellent substance from being mixed into the organic functional layer that is the base. After the aqueous solution of the hole injection layer is applied to each partition region, a water / oil repellent layer is formed, and the solution of the oil-based light emitting layer is applied to each partition region. In other words, by properly using the functions of the water-repellent lipophilic layer and the water- and oil-repellent layer, a plurality of organic functional layers are appropriately formed using the droplet discharge method.

That is, the hole injection layer and the light emitting layer can be appropriately formed without application unevenness by using a droplet discharge method. In other words, according to the manufacturing method according to the present embodiment, a plurality of organic functional layers can be appropriately formed using the droplet discharge method.
Therefore, an optical device with excellent display quality can be manufactured using a droplet discharge method.
Therefore, it is possible to provide a manufacturing method capable of manufacturing an optical device having excellent display quality by a droplet discharge method.

The lyophilic treatment is a plasma treatment using oxygen as a processing gas in an air atmosphere, and the water-repellent oleophilic layer is peeled off after laminating a film having the water-repellent oleophilic layer formed on the upper surface of the partition wall. By doing so, it is preferable that it is transferred and formed.
The water-repellent / lipophilic layer is preferably any of acrylic resin, acrylic polyol resin, polystyrene, styrene / acrylic copolymer, hydrogenated petroleum resin, ketone resin, and cellulose resin.
The water / oil repellent layer contains a lyophobic compound-containing liquid repellent, and is formed by laminating a film having a water / oil repellent layer formed on the upper surface of the partition wall and then peeling off the film. It is preferable that CF ₄ plasma treatment is performed on the upper part of the partition wall.

Moreover, it is preferable that the material which comprises a positive hole injection layer contains PEDOT / PSS, the solution containing the material is an aqueous solution, and the solution containing the material which comprises a light emitting layer is an oily solution.
Further, the method further includes a step of forming an electron injection layer as an organic functional layer by covering the light emitting layer by vapor deposition, and a step of forming a common cathode by covering the electron injection layer by vapor deposition. preferable.

A method of manufacturing an optical device including a plurality of light-emitting pixels having a plurality of organic functional layers, the step of forming a pixel electrode serving as an opening of a light-emitting pixel on a substrate, and a partition partitioning the plurality of pixel electrodes Forming a lyophilic process on the exposed portion including the pixel electrode and the partition, forming a water / oil repellent layer to which a liquid repellent is added on the upper surface of the partition, A material that forms a hole injection layer as an organic functional layer with respect to the partitioned region when each of the plurality of regions partitioned by the partition wall is a heating step that heats the laminated structure up to the oil layer. A step of applying the contained solution by a droplet discharge method, and a step of applying a solution containing a material constituting the light emitting layer as the organic functional layer on the hole injection layer by a droplet discharge method for each partition region And optics including Method of manufacturing location.
In addition, a fluorine compound is added to the liquid repellent, and the water / oil repellent layer is formed by laminating a film having a water / oil repellent layer formed on the upper surface of the partition wall, and then peeling the film to form a transfer. It is preferable that the water / oil repellent layer has a water / oil repellent function by heating in the heating step.

  An optical device including a plurality of light emitting pixels having a plurality of organic functional layers, a pixel electrode serving as an opening of a light emitting pixel formed on a substrate, a partition partitioning the plurality of pixel electrodes, and an upper surface of the partition A hole injection layer as an organic functional layer formed for each partitioned region, and a water repellent lipophilic layer when each of the plurality of regions partitioned by the partition is defined as a partitioned region An optical device comprising at least a water- and oil-repellent layer formed thereon and a light-emitting layer as an organic functional layer formed on the hole injection layer for each partition region.

  An electronic apparatus comprising the above-described optical device in a display portion.

FIG. 6 is a perspective view illustrating one embodiment of a display device according to Embodiment 1; The top view of an element substrate. The sectional side view in the ii cross section of FIG. The flowchart figure which shows the manufacturing process of a display panel. The figure which shows the one aspect | mode in a (a)-(c) manufacturing process. The figure which shows the one aspect | mode in a (a)-(c) manufacturing process. FIG. 6 is a flowchart showing a manufacturing process of a display panel according to Embodiment 2. The figure which shows the one aspect | mode in a (a)-(c) manufacturing process. The perspective view which shows the mobile telephone as an electronic device. The top view of the element substrate which concerns on the modification 2. FIG.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. In the following drawings, the scales are different for each layer and each member so that each layer and each member can be recognized on the drawing.

(Embodiment 1)
"Overview of display device"
FIG. 1 is a perspective view showing an aspect of the display device according to the present embodiment.
First, the outline | summary of the display apparatus 100 as an optical apparatus which concerns on Embodiment 1 of this invention is demonstrated.

The display device 100 is an organic EL display device, and includes a display panel 18, a flexible substrate 20, and the like. The display panel 18 is a bottom emission type organic EL display panel in which a functional layer including a light emitting layer is sandwiched between the element substrate 1 and the counter substrate 16, and emits display light from the element substrate 1 side.
The display panel 18 includes a display region V composed of a plurality of pixels arranged in a matrix. As shown in the upper right portion of FIG. 1, the display region V includes blue (B), green (G), and red (R) pixels that are periodically arranged, and each pixel emits light. A full color image is displayed by light. Each pixel is a light-emitting pixel, but is called a pixel. Further, the display panel is not limited to a display panel that performs color display, and may be a display panel that performs monochrome display. The display area V has a vertically long rectangle. In each figure including FIG. 1, the vertical direction is defined as the Y-axis direction, and the horizontal direction shorter than the vertical direction is defined as the X-axis direction. The thickness direction of the display panel 18 is the Z-axis direction. Further, the Y-axis (+) and (−) directions are defined as the vertical direction, and the X-axis (−) and (+) directions are defined as the horizontal direction.

As will be described in detail later, the plurality of organic functional layers including the light emitting layer in each pixel of the display region V are formed through a process in which a droplet discharge method is continued.
Conventionally, in a manufacturing method including a process in which a droplet discharge method is continued, a liquid repellent substance is mixed in an organic functional layer on the base side, and a defective formation occurs in an organic functional layer formed thereon. There was a problem.
On the other hand, according to the display device 100, each organic functional layer can be appropriately formed by the characteristic manufacturing method according to the present embodiment even if the droplet discharge method is included. , Can ensure excellent display quality.

In the display panel 18, a flexible substrate 20 is connected to an extended region where the element substrate 1 extends from the counter substrate 16. The flexible board is an abbreviation for a flexible printed circuit board having flexibility in which an iron foil wiring or the like is formed on a polyimide film base. In addition, a driving IC (Integrated Circuit) 21 is mounted on the flexible substrate 20, and a plurality of terminals for connection to a dedicated controller or an external device (none of which are shown) are formed at the end thereof. Has been.
The display panel 18 displays images, characters, and the like in the display area V by receiving control signals including power and image signals from an external device via the flexible substrate 20.

"Detailed configuration of the display panel"
FIG. 2 is a plan view of the element substrate. FIG. 3 is a side sectional view of the display panel taken along line ii of FIG.
Next, a detailed configuration of the display panel will be described with reference to FIGS.
FIG. 2 is a plan view of the element substrate 1 when viewed from the Z-axis (+) direction in FIG. For this reason, the X-axis direction is reversed compared to FIG. Further, when the element substrate 1 in a completed state is observed from this direction, a uniform common electrode (cathode) is observed. Here, for convenience of explanation, a plane in the previous stage of forming the organic layer is used. An embodiment is shown.
On the element substrate 1, lattice-like partition walls 7 are formed. Specifically, the partition walls 7 are formed so as to partition the openings 5e of the pixel electrodes (anodes) 5 arranged in a matrix one by one. A plurality of regions partitioned by the partition walls 7 are referred to as partitioned regions P. The plurality of partition regions P are all formed in a vertically long rectangle having substantially the same size. In addition, it is not limited to a rectangle, A track shape, an ellipse, etc. may be sufficient. The opening 5e is also elliptical, but it may be a track, circle, rectangle, or the like.

  A red organic EL layer is formed in the column of the partition region P at the left end (X axis (−) side) of the display region V, and the column of the partition region P on the right side (X axis (+) side) thereof. A green organic EL layer is formed, and a blue organic EL layer is formed in the column of the partition region P adjacent to the right. Thereafter, the organic EL layers of the respective colors are periodically formed in this order for each partition region P row.

Subsequently, a cross-sectional configuration of the element substrate 1 will be described with reference to FIG. FIG. 3 is a side sectional view of the element substrate 1 in a completed state in which the organic layer, the common electrode, and the electrode protective layer are attached to the element substrate 1 in which the partition region P of FIG. 2 is formed. Note that the expression “element substrate 1” has two meanings, that is, a single element substrate 1 and a multi-layer laminated structure formed on the element substrate 1 in this embodiment.
On the element substrate 1, an element layer 2, a planarizing layer 4, a pixel electrode 5, a partition wall 7, an organic EL layer 8, a common electrode 9, an electrode protective layer 10, and the like are laminated.
The element substrate 1 is made of transparent inorganic glass. In this embodiment, alkali-free glass is used as a suitable example. Note that the substrate is not limited to glass, and a transparent substrate such as quartz or resin (plastic or plastic film) may be used.
In the element layer 2, a pixel circuit for actively driving each pixel is formed. The pixel circuit includes a selection transistor for selecting a pixel made of a TFT (Thin Film Transistor), a driving transistor 3 for flowing a current to the organic EL layer 8, and the like, which are formed corresponding to each pixel. Has been. The pixel circuit uses low-temperature polysilicon as the active layer as a preferred example, but may have a configuration using amorphous silicon as the active layer.

On the upper layer (Z-axis (+) direction) of the element layer 2, for example, a planarization layer 4 that is an insulating layer made of an acrylic resin or the like is formed.
A pixel electrode 5 serving as a first electrode is formed on the planarization layer 4 so as to be divided for each pixel. The pixel electrode 5 is composed of a transparent electrode such as ITO (Indium Tin Oxide) or ZnO, and is connected to a drain terminal of the driving transistor 3 of the element layer 2 and a contact hole penetrating the planarization layer 4 for each pixel. ing.
In addition, an insulating layer 6 made of, for example, SiO ₂ is formed on the upper layer of the pixel electrode 5, and defines an opening 5 e where the pixel electrode 5 and the organic EL layer 8 are in contact with each other. That is, the part where the pixel electrode 5 is exposed from the insulating layer 6 is the opening 5e.
The partition wall 7 is the lattice-shaped partition wall described above, and the cross-sectional shape is a trapezoidal shape wide on the pixel electrode 5 side. The cross-sectional shape may be rectangular or semicircular. As a material in a preferred example, a photocurable acrylic resin, polyimide resin, fluorine resin, or the like is used.
Here, on the upper surface of the partition wall 7, a water-repellent / oil-repellent layer 31 and a water- and oil-repellent layer 32, which are one of characteristic features of the present embodiment, are formed. Details of these will be described later.
Further, in the present embodiment, as a preferred example, a so-called double bank configuration is adopted in which the opening 5e is partitioned by an insulating layer 6 made of an inorganic material and a partition wall 7 made of an organic material. The configuration is not limited. For example, the insulating layer 6 may be omitted, or a single bank configuration including only the partition walls 7 may be employed.

The organic EL layer 8 as a plurality of organic functional layers is formed from a plurality of organic functional layers including a hole injection layer, a light emitting layer, and the like.
The organic EL layer 8 in the preferred example has a three-layer configuration in which a hole injection layer 81, each color light emitting layer 83, and an electron injection layer 84 are stacked in this order for each partition region P. Note that the present invention is not limited to this stacked structure, and for example, a hole transport layer may be formed between the hole injection layer 81 and each color light emitting layer 83. Alternatively, a hole blocking layer may be formed between each color light emitting layer 83 and the electron injection layer 84.
As a material of the hole injection layer in a preferred example, for example, a mixture (PEDOT / PSS) in which polystyrene sulfonic acid (PSS) as a dopant is added to a polythiophene derivative such as polyethylenedioxythiophene (PEDOT) is used. Further, polystyrene, polypyrrole, polyaniline, polyacetylene, or a derivative thereof may be used.

As a material for the light emitting layer, it is preferable to use a light emitting material that emits red, green, blue fluorescence or phosphorescence for each of the organic EL layers 8R, 8G, and 8B.
As a preferred example, a polyolefin polymer fluorescent material corresponding to red, green, and blue is used. Alternatively, polythiophenylene derivatives (PF), polyparaphenylene vinylene derivatives (PPV), polyphenylene derivatives (PP), polyparaphenylene derivatives (PPP), polythiophenylene derivatives such as polyvinylcarbazole (PVK), polymethylphenylenesilane (PMPS) ) Etc. may be used. In addition, polymer materials such as perylene dyes, coumarin dyes, rhodamine dyes, rubrene, perylene, 9,10-diphenylanthracene, tetraphenylbutadiene, nile red, coumarin 6, quinacrine, etc. A low molecular material may be doped.

As a material for the electron injection layer 84, a material having a small work function is preferable. In a suitable example, for example, calcium is used.
The common electrode 9 as a common cathode is a reflective electrode made of a metal material having excellent reflectivity, and is formed so as to cover each color organic EL layer 8 and the partition wall 7. In a preferred example, for example, aluminum is used.
The electrode protective layer 10 as the cathode protective layer is made of a high-density and highly transparent material such as SiO ₂ , Si ₃ N ₄ , or SiOxNy, and is formed by covering the common electrode 9. In addition, moisture or the like is prevented from entering the organic EL layer 8.

"Manufacturing method of display panel"
FIG. 4 is a flowchart showing the manufacturing process of the display panel. FIG. 5A to FIG. 5C are diagrams showing an embodiment in the manufacturing process. FIGS. 6A to 6C are diagrams showing one embodiment in the manufacturing process.
Here, the manufacturing method of the display panel 18 will be described focusing on the process of the organic EL layer 8.

First, in step S1, the element substrate 1 having the openings 5e formed therein is formed by using a known manufacturing method such as a photolithography method, a vapor deposition method, a CVD (Chemical Vapor Deposition) method or the like. In other words, the element substrate 1 in which the openings 5e are formed is prepared.
In step S2, lattice-like partition walls 7 are formed using a photolithographic method. Specifically, after applying the above-described photo-curing resin to the entire surface of the element substrate 1 by a spin coat method or the like, the lattice-shaped partition walls 7 are formed by exposing and developing using a lattice-shaped mask. In the preferred example, a black photocurable resin is used.
As a result, as shown in FIG. 2A, the partition wall 7 is formed that partitions the plurality of openings 5e one by one. In other words, the partition wall 7 that partitions the display region V into a plurality of partition regions P is formed.
In step S3, a lyophilic process is performed on the exposed surface of the display region V including the opening 5e, the insulating layer 6, and the partition wall 7. Specifically, plasma processing using oxygen as a processing gas (O ₂ plasma processing) is performed in an air atmosphere. By this treatment, a hydroxyl group is introduced into the exposed surface of the display region V including the opening 5e, the insulating layer 6, and the partition wall 7 to impart lyophilicity. This state is shown in FIG.

In step S4, as shown in FIG. 5B, the transfer film 130 is overlaid on the element substrate 1 (preparation body), and a water-repellent oleophilic film is formed on the upper surface of the partition wall 7 using the transfer method. To do.
Here, the transfer film 130 is a film member in which a water-repellent lipophilic film 131 is formed (applied) on one surface of a resin film serving as a base material. As the resin film, a polyolefin film, a polystyrene film, a nylon film, a fluororesin film, or the like can be used. Further, as the water-repellent lipophilic film 131, any of acrylic resin, acrylic polyol resin, polystyrene, styrene / acrylic copolymer, hydrogenated petroleum resin, ketone resin, and cellulose resin can be used.
In the present embodiment, as a preferred example, a film made of polyethylene terephthalate (PET) having a thickness of about 20 μm is used as a resin film, and a water-repellent lipophilic film 131 having a thickness of about 80 nm is formed on the film. The transfer film 130 is used.

Then, as shown in the figure, a transfer film 130 is overlaid on the element substrate 1 with the partition wall 7 face up, with the water-repellent oleophilic film 131 side down, to prepare a preparation.
In this embodiment, as a suitable example, the liquid repellent layer is selectively formed on the upper surface of the partition wall 7 by laminating the prepared body with a laminating apparatus. FIG. 5B shows only the pressure rollers 61 and 62 made of an elastomer such as silicon rubber having heat conductivity in the laminating apparatus. Lamination is a kind of transfer method. As specific laminating conditions, the temperature of the pressure rollers 61 and 62 was about 130 ° C., and the conveying speed (laminating speed) of the prepared body was 0.5 m / min.
Note that the transfer method is not limited to the laminating method using a roller, and any transfer method capable of selectively forming a liquid repellent layer on the upper surface of the partition wall 7 may be used. For example, a method of selectively forming a liquid repellent layer on the upper surface of the partition wall 7 by pressing a flat plate heated from above the preparation body may be used.
As a result, as shown in FIG. 5C, the water repellent lipophilic layer 31 is selectively formed on the upper surface of the partition wall 7. The water repellent lipophilic layer 31 is a part of the water repellent lipophilic film 131 transferred thereto.
Further, the upper surface of the partition wall 7 refers to the upper base in the cross-sectional shape of the partition wall 7 having a substantially trapezoidal shape with a long lower base and a short upper base, and is actually a convex shape including a curved surface. Yes.

In step S5, the hole injection layer 81 is formed in each partition region P using a droplet discharge method (inkjet method). The formation process of the hole injection layer 81 includes a solution application process and a drying process.
First, in the solution application step, an aqueous solution containing a material constituting the hole injection layer 81 is discharged for each partition region P using a droplet discharge device. Note that the present invention is not limited to the ink jet method, and any coating method capable of discharging the solution to a predetermined position may be used. For example, a dispenser method such as a jet dispenser method or a needle dispenser method may be used.

FIG. 5C shows a state in which the solution d1 is discharged from the nozzle 510 of the droplet discharge device and landed in the partition region P to form a convex (polka dot) solution reservoir u1. .
The solution reservoir u1 has a convex shape because the opening 5e and the like forming the bottom of the partition region P have lyophilic properties, and the water-repellent / lipophilic layer 31 has lyophobic properties with respect to an aqueous solution. This is because the filled solution accumulates in the partition region P with a polka dot-like bulge due to its surface tension.
Here, since the water repellent lipophilic layer 31 does not contain a liquid repellent substance such as fluorine, even if the solution reservoir u1 is in contact with the layer, the liquid repellent substance is dissolved in the solution. There is no.

In the drying process, vacuum drying and heat treatment are performed. First, the element substrate 1 on which the solution has been applied is transferred to a vacuum chamber and vacuum dried. As a result, the boiling point of the solvent in the solution decreases and the solvent evaporates at a low temperature, so that the solute is deposited and a hole injection layer is formed. Further, heat treatment is performed to remove the remaining solvent. In a preferred example, heat treatment is performed at about 200 ° C. for about 10 minutes in a nitrogen gas atmosphere.
In the drying process, the element substrate 1 may be heated. For example, a method of heating the substrate on a hot plate or a method of irradiating an infrared lamp from above the display region V can be employed. Further, these methods may be combined. According to such a method, drying can be performed more efficiently.
When the drying step is completed, the solvent in the solution is blown off, and a hole injection layer 81 that covers the opening 5e is formed at the bottom of the partition region P as shown by the dotted line in FIG.

In step S6, the transfer film is overlaid on the element substrate 1, and the water / oil repellent layer 32 is formed on the upper surface of the partition wall 7 using the transfer method. The transfer film is a film member in which a water / oil repellent film is formed (applied) on one surface of a resin film as a base material.
Specifically, by using the laminating method described in FIG. 5B, a water- and oil-repellent layer 32 is formed on the water-repellent lipophilic layer 31 on the upper surface of the partition wall 7 as shown in FIG. 6A. Overlapping to form. The material of the resin film and the lamination conditions are the same as described in step S4.
As the water / oil repellent film, a liquid repellent containing a fluorine compound or a silicon compound can be used. In the present embodiment, Novec (registered trademark) EGC-1720 manufactured by Sumitomo 3M Limited is used as a preferred example.

In step S7, each color light emitting layer 83 is formed in each partition region P by using a droplet discharge method (inkjet method). Note that the formation process of the light emitting layer 83 includes a solution application process and a drying process.
In the solution application step, an oily solution containing the material constituting the light emitting layer 83 is discharged for each partition region P using a droplet discharge device. Specifically, as shown in FIG. 2, a solution corresponding to each color of RGB is applied to each pixel column. Note that the application method is not limited to the ink jet method, and any application method capable of discharging a solution to a predetermined position is the same as that described in step S5.
FIG. 6B shows a state in which the solution d2 is discharged from the nozzle 520 of the droplet discharge device and landed in the partition region P to form a convex (polka dot) solution reservoir u2. .
Here, the reason that the solution reservoir u2 has a convex shape is that the water / oil repellent layer 32 has liquid repellency with respect to the oily solution, and the filled solution has a polka dot shape due to its surface tension. It will accumulate in the partition area P with a bulge.
The drying process is the same as that described in step S5.
When the drying process is completed, the solvent in the solution is blown off, and the light emitting layer 83 is formed on the hole injection layer 81 on the bottom side of the partition region P as shown by the dotted line in FIG. .

In step S8, the electron injection layer 84 made of calcium is formed using the vacuum deposition method so as to cover the light emitting layer 83 and the partition wall 7.
In step S9, the common electrode 9 made of aluminum is formed so as to cover the electron injection layer 84 using a vacuum deposition method.
In step S10, the electrode protective layer 10 made of SiO ₂ is formed by covering the common electrode 9 using the CVD method. This state is shown in FIG.

Further, following step S10, a buffer layer made of a thermosetting epoxy resin, a gas barrier layer made of SiO ₂ or the like may be formed by using a spin coat method, a CVD method or the like. Then, the display substrate 18 is completed by bonding the element substrate 1 having such a laminated structure and the separately manufactured counter substrate 16 together using a filler or a sealant.

"Dimensions in the preferred example"
The dimensions of each part according to the above-described preferred example will be introduced with reference to FIG.
First, the “length (Y-axis direction) × width (X-axis direction)” of the partition region was set to “about 300 μm × about 150 μm”.
Further, the length of the opening 5e was about 200 μm, and the width was about 100 μm.
The height (thickness) of the partition wall 7 was about 3 μm.
The thickness of the water repellent lipophilic layer 31 was about 80 nm.

As described above, according to the display device 100 and the manufacturing method according to the present embodiment, the following effects can be obtained.
According to this manufacturing method, after forming the water-repellent oleophilic layer 31 on the upper surface of the partition wall 7, the solution of the water-soluble hole injection layer is applied to each partition region P using the droplet discharge method. Yes.
Here, as the water repellent lipophilic layer 31, for example, a pure resin member such as an acrylic resin that does not contain a liquid repellent material such as fluorine is used, so that the liquid repellent material is contained in the hole injection layer solution. Does not elute.
Then, after forming the hole injection layer 81, the water / oil repellent layer 32 containing a fluorine-based liquid repellent material is formed on the water repellent lipophilic layer 31, and the oil repellent function of the layer is utilized. For each partition region P, an oil-based light emitting layer solution is applied onto the hole injection layer 81 by a droplet discharge method.
That is, in a process in which the droplet discharge method is continued, a water repellent lipophilic layer 31 that does not contain a liquid repellent material is used as a base so that the liquid repellent material is not mixed into the organic functional layer that is a base. After the aqueous solution of the hole injection layer is applied to each partition region, a water / oil repellent layer 32 is formed, and the oil-based light emitting layer solution is applied to each partition region. In other words, by properly using the functions of the water-repellent / oil-repellent layer 31 and the water- and oil-repellent layer 32, a plurality of organic functional layers are appropriately formed using the droplet discharge method.

That is, the hole injection layer 81 and the light emitting layer 83 can be appropriately formed without application unevenness by using a droplet discharge method. In other words, according to the manufacturing method according to the present embodiment, a plurality of organic functional layers can be appropriately formed using the droplet discharge method.
Therefore, the display device 100 with excellent display quality can be manufactured using the droplet discharge method.
Therefore, it is possible to provide a manufacturing method capable of manufacturing the display device 100 with excellent display quality by the droplet discharge method.

(Embodiment 2)
FIG. 7 is a flowchart showing the manufacturing process of the display panel according to the second embodiment, and corresponds to FIG. FIGS. 8A to 8C are diagrams showing an embodiment in the manufacturing process, and correspond to FIGS.
The display device according to Embodiment 2 of the present invention will be described below. In addition, about the component same as Embodiment 1, the same number is attached | subjected and the overlapping description is abbreviate | omitted.

The display device of the present embodiment includes an element substrate 1b having a configuration different from that of the element substrate 1 of the first embodiment. Specifically, the two functional layers of the water-repellent / oil-repellent layer and the water- and oil-repellent layer are not formed on the upper surface of the partition wall 7, but a single-layer structure of the water- and oil-repellent layer having a characteristic function is formed. This is different from the element substrate 1 of the first embodiment.
Further, part of the manufacturing method is different with the change of the configuration. Other than that, it is substantially the same as the description in the first embodiment. The element substrate 1b refers to the entire multilayer structure formed on the element substrate 1 in the present embodiment.
First, the planar aspect of the element substrate 1b according to the present embodiment is the same as the planar aspect of the first embodiment in FIG.
FIG. 8C is a cross-sectional view of the same part as FIG. 6C, and as can be seen by comparing the two figures, in the element substrate 1b according to the second embodiment, the water repellent and repellent surface of the partition wall 7 is formed. The point that the oil layer 33 is formed as a single layer is different from the element substrate 1 of FIG.
Here, although the details will be described later, the water / oil repellent layer 33 is a water / oil repellent layer having a characteristic function of generating a water / oil repellent action only on the surface thereof.
The organic EL layer 8 has a three-layer structure of a hole injection layer 81, a light emitting layer 83, and an electron injection layer 84, as in the first embodiment.

Subsequently, the manufacturing method of the element substrate 1b of the present embodiment will be described with reference to FIG. 7, focusing on the manufacturing process of the water / oil repellent layer 33. In addition, the overlapping description is abbreviate | omitted about the process same as the process of FIG.
First, the process from the pixel electrode forming process in step S11 to the lyophilic process in step S13 is the same as each process from step S1 to step S3 in FIG.

In step S14, the transfer film is overlaid on the element substrate 1, and the water / oil repellent layer 33 is formed on the upper surface of the partition wall 7 using the transfer method. The transfer film is a film member in which a water / oil repellent film is formed (applied) on one surface of a resin film as a base material. Specifically, the water / oil repellent layer 33 is formed on the upper surface of the partition wall 7 by using the laminating method described with reference to FIG. The material of the resin film and the lamination conditions are the same as described in step S4.
Here, as the water / oil repellent film, an acrylic resin, an acrylic polyol resin, polystyrene, a styrene / acrylic copolymer, a hydrogenated petroleum resin, a ketone resin, or a cellulose resin to which a liquid repellent is added is used. .
In a preferred example, an acrylic resin to which a liquid repellent containing a fluorine compound (polymer) is added is used as a water / oil repellent film. A transfer film is formed by forming the water / oil repellent film on one surface of a PET resin film as a base material.

In step S15, the element substrate 1b is heated. Specifically, the element substrate 1b is put in an oven, and the entire element substrate 1b is heated under heating conditions of about 130 ° C. for 5 minutes.
The state after this heating is shown in FIG. 8A, and as shown in the figure, the water / oil repellent function by the liquid repellent is provided on the upper surface (Z axis (+) side) of the water / oil repellent layer 33. Will be granted. The principle of imparting the water / oil repellent function by the heating process is not completely understood, but it is assumed that the liquid repellent component is moved to the surface side of the water / oil repellent layer 33 by heating.
In addition, the water / oil repellent layer 33 uses a water / oil repellent resin to which a liquid repellent is added as a water / oil repellent layer, and therefore, unlike a conventional liquid repellent layer in which the liquid repellent (layer) is exposed, Even when it comes into contact with the solution, almost no dissolution of the liquid repellent component into the solution occurs.

In step S16, the hole injection layer 81 is formed in each partition region P by using a droplet discharge method. The formation process of the hole injection layer 81 is the same as that described in the first embodiment (step S5), and includes a solution application process and a drying process.
Further, the solution discharged from the droplet discharge device becomes a convex (polka dot) solution pool in a state where the periphery thereof is pinned by the water / oil repellent layer 33 as in FIG. In other words, the water repellent function of the water / oil repellent layer 33 causes the aqueous solution of the hole injection layer to be repelled at the peripheral portion, resulting in a convex (polka dot) solution pool.
Here, as described above, since the liquid repellent component hardly elutes from the water / oil repellent layer 33, the liquid repellent substance can be prevented from being mixed into the solution.

In step S <b> 17, the light emitting layer 83 is formed on the hole injection layer 81 in each partition region P using a droplet discharge method. In addition, the formation process of the light emitting layer 83 is the same as that described in the first embodiment (step S7), and includes a solution application process and a drying process.
FIG. 8B shows a state in which the solution d2 is discharged from the nozzle 520 of the droplet discharge device and landed in the partition region P to form a convex (polka dot) solution reservoir u2. .
Here, the solution reservoir u2 has a convex shape due to the water-repellent function of the water- and oil-repellent layer 33, and the oil-based solution filled in the partition region P is surrounded by the water- and oil-repellent layer. In the pinned state, it accumulates in the partition region P with a polka-dot-like bulge due to surface tension.
When the drying step is completed, the solvent in the solution is blown off, and the light emitting layer 83 is formed on the hole injection layer 81 on the bottom side of the partition region P as shown by the dotted line in FIG. .

The process from the electron injection layer forming process in step S18 to the electrode protective layer forming process in step S20 is the same as each process from step S8 to step S10 in FIG. FIG. 8C shows the state of the element substrate 1b in which step S20 has been completed and the electrode protective layer 10 has been formed.
Further, following step S20, a buffer layer, a gas barrier layer, or the like may be formed, and the counter substrate 16 manufactured separately is bonded using a filler or a sealant, and the display panel of FIG. Completion of 18 is the same as described in the first embodiment.

As described above, according to the optical device and the manufacturing method according to the present embodiment, the following effects can be obtained in addition to the effects of the first embodiment.
According to this manufacturing method, the hole injection layer 81 and the light emitting layer 83 are formed on the upper surface of the partition wall 7 by forming the water / oil repellent layer 33 made of a water / oil-repellent resin to which a liquid repellent is added. Even if it is continuously formed by the droplet discharge method, each layer can be formed appropriately.
This is because the water / oil repellent layer 33 is different from the conventional liquid repellent layer in which the liquid repellent (layer) is exposed, and even when the liquid repellent layer is in contact with the solution, the liquid repellent component is dissolved into the solution. This is because it has a characteristic that it hardly occurs.

That is, the hole injection layer 81 and the light emitting layer 83 can be appropriately formed without application unevenness by using a droplet discharge method. In other words, according to the manufacturing method according to the present embodiment, a plurality of organic functional layers can be appropriately formed using the droplet discharge method.
Therefore, the display device 100 with excellent display quality can be manufactured using the droplet discharge method.
Therefore, it is possible to provide a manufacturing method capable of manufacturing the display device 100 with excellent display quality by the droplet discharge method.

Further, since the organic functional layer can be continuously formed using the droplet discharge method by the single water- and oil-repellent layer 33, the manufacturing efficiency is excellent.
Furthermore, since the water and oil repellent layer 33 can be imparted with water and oil repellency by a simple process of heating the entire element substrate 1b (step S15), the manufacturing efficiency is good.
Therefore, a method for manufacturing the display device 100 with high manufacturing efficiency can be provided.

(Electronics)
FIG. 9 is a perspective view showing a mobile phone equipped with the display device described above.
The display device 100 described above can be used by being mounted on a mobile phone 200 as an electronic device, for example.
The mobile phone 200 includes a main body 350 and a display unit 370 that can be opened and closed with respect to the main body, and incorporates the display device 100 according to the first embodiment. Specifically, the display device 100 is incorporated in the display unit 370, and the display panel 18 is a display screen. The main body unit 350 is provided with an operation unit 365 having a plurality of operation buttons.
That is, the mobile phone 200 is equipped with the display device 100 with excellent display quality. Therefore, the mobile phone 200 having a clear display screen can be provided.
Note that the element substrate 1b according to the second embodiment may be used as the element substrate of the display panel 18. Even in this case, the same function and effect can be obtained.

Further, the mode of the mobile phone is not limited to the folding type shown in FIG. 9, and any mobile phone provided with a display panel may be used.
For example, the display unit 370 may be a mobile phone that can be folded and turned with respect to the main body 350. Alternatively, the mobile phone may be an integrated mobile phone or a sliding mobile phone in which an operation unit is housed in an integrated main body.
The electronic device is not limited to a mobile phone, and any electronic device provided with a liquid crystal panel may be used.
For example, it can be used in various electronic devices such as a display device for a car navigation system, PDA (Personal Digital Assistants), a mobile computer, a digital camera, a digital video camera, an in-vehicle device, and an audio device.
According to these electronic devices, a high-quality display can be obtained.

  Note that the present invention is not limited to the above-described embodiment, and various modifications and improvements can be added to the above-described embodiment. A modification will be described below.

(Modification 1)
This will be described with reference to FIG.
In each of the above embodiments, the display panel 18 has been described as a bottom emission type organic EL panel, but may be a top emission type organic EL panel, and a plurality of organic functional layers are continuously formed by a droplet discharge method. Any display device may be used.
Specifically, when the display panel 18 is a top emission type, a total reflection layer is formed on the element substrate 1 side of the pixel electrode 5. Further, the common electrode 9 is thinned to form a half mirror layer. Thereby, display light is emitted from the common electrode 9 side.
Even if it is these structures, the effect similar to each said embodiment can be acquired.

(Modification 2)
FIG. 10 is a plan view of an element substrate according to the second modification, and corresponds to FIG.
In each of the above embodiments, one partition region P is formed for each opening 5e by the partition wall 7. However, the present invention is not limited to this configuration. For example, as illustrated in FIG. 10, a partition 77 configuration in which one partition region P is formed for the plurality of openings 5 e may be used.
The element substrate 51 of Modification 2 includes a partition wall 77 different from the partition wall 7 (FIG. 2) of the first embodiment. Specifically, the partition 77 has a configuration in which one partition region P (common bank) is formed for two openings 5e adjacent in the Y-axis direction. For this reason, the length of the partition area P in the vertical direction (Y-axis direction) is longer than that of the partition area P of FIG. Except this point, it is the same as the description in the first embodiment.

Even in this configuration, since the manufacturing method in each of the above embodiments can be applied, the same effects as those in each of the above embodiments can be obtained.
Note that the present invention is not limited to the configuration in which one partition region P is formed for two openings 5e, and that one partition region P is formed for three or more openings 5e. Also good. Or, in the peripheral portion of the display region V, one partition region P is formed for the plurality of openings 5e, and in the center portion, one partition region P is formed for one opening 5e. You may let them. Even if it is these structures, the effect similar to said each embodiment can be acquired.

  DESCRIPTION OF SYMBOLS 1,51 ... Element board | substrate as a board | substrate, 5 ... Pixel electrode, 5e ... Opening part, 7,77 ... Partition, 8 ... Organic EL layer as a multiple layer organic functional layer, 9 ... Common electrode as a common cathode, 18 DESCRIPTION OF SYMBOLS ... Display panel, 31 ... Water-repellent / oil-repellent layer, 32, 33 ... Water / oil-repellent layer, 81 ... Hole injection layer, 83 ... Light emitting layer, 84 ... Electron injection layer, 100 ... Display device as an optical device, 200 ... Electron Mobile phone as device, d1, d2 ... droplet, u1, u2 ... solution reservoir, P ... partition area, V ... display area.

Claims (10)

A method of manufacturing an optical device including a plurality of light emitting pixels having a plurality of organic functional layers,
Forming a pixel electrode to be an opening of the light emitting pixel on a substrate;
Forming a partition partitioning a plurality of the pixel electrodes;
Applying lyophilic treatment to the exposed portion including the pixel electrode and the partition;
Forming a water repellent lipophilic layer on the upper surface of the partition;
When each of the plurality of regions partitioned by the partition walls is defined as a partitioned region, a solution containing a material constituting the hole injection layer as the organic functional layer is applied to the partitioned region by a droplet discharge method. Applying step;
Forming a water / oil repellent layer on the water / oil repellent layer;
Applying a solution containing a material constituting the light emitting layer as the organic functional layer on the hole injection layer for each partition region by a droplet discharge method. Manufacturing method. The lyophilic treatment is a plasma treatment using oxygen as a treatment gas in an air atmosphere,
The water-repellent oleophilic layer is formed by laminating a film on which the water-repellent oleophilic layer is formed on the upper surface of the partition wall, and then transferring the film to peel off the film. A method for manufacturing the optical device according to 1.   The water-repellent lipophilic layer is any one of acrylic resin, acrylic polyol resin, polystyrene, styrene / acrylic copolymer, hydrogenated petroleum resin, ketone resin, and cellulosic resin. The manufacturing method of the optical apparatus of description. The water / oil repellent layer contains a liquid repellent containing a fluorine-based compound, and after the film on which the water / oil repellent layer is formed is laminated on the upper surface of the partition wall, the film is peeled off and transferred. The method of manufacturing an optical device according to any one of claims 1 to 3, wherein the upper surface of the partition wall is subjected to CF ₄ plasma treatment. The material constituting the hole injection layer includes PEDOT / PSS, and the solution containing the material is an aqueous solution,
The method for manufacturing an optical device according to claim 1, wherein the solution containing a material constituting the light emitting layer is an oily solution. A step of forming an electron injection layer as the organic functional layer by covering the light emitting layer by vapor deposition;
The method for manufacturing an optical device according to claim 1, further comprising a step of covering the electron injection layer and forming a common cathode by a vapor deposition method. A method of manufacturing an optical device including a plurality of light emitting pixels having a plurality of organic functional layers,
Forming a pixel electrode to be an opening of the light emitting pixel on a substrate;
Forming a partition partitioning a plurality of the pixel electrodes;
Applying lyophilic treatment to the exposed portion including the pixel electrode and the partition;
Forming a water / oil repellent layer to which a liquid repellent is added on the upper surface of the partition;
A heating step of heating a laminated structure from the substrate to the water / oil repellent layer;
When each of the plurality of regions partitioned by the partition walls is defined as a partitioned region, a solution containing a material constituting the hole injection layer as the organic functional layer is applied to the partitioned region by a droplet discharge method. Applying step;
Applying a solution containing a material constituting the light emitting layer as the organic functional layer on the hole injection layer for each partition region by a droplet discharge method. Manufacturing method. In the liquid repellent, a fluorine compound is added,
The water / oil repellent layer is formed by laminating the film on which the water / oil repellent layer is formed on the upper surface of the partition wall, and then peeling the film to form a transfer.
8. The method of manufacturing an optical device according to claim 7, wherein the water and oil repellent function is imparted to the surface of the water and oil repellent layer by heating in the heating step. An optical device including a plurality of light emitting pixels having a plurality of organic functional layers,
A pixel electrode serving as an opening of the light emitting pixel formed on the substrate;
A partition partitioning a plurality of the pixel electrodes;
A water-repellent lipophilic layer formed on the upper surface of the partition;
When each of the plurality of regions partitioned by the partition walls is defined as a partitioned region, a hole injection layer as the organic functional layer formed for each partitioned region,
A water / oil repellent layer formed on the water / oil repellent layer;
An optical device comprising at least a light emitting layer as the organic functional layer formed on the hole injection layer for each partition region.   An electronic apparatus comprising the optical device according to claim 9 in a display unit.

Images