JP2011003285A - Manufacturing method of organic electroluminescent device, organic electroluminescent device, electronic apparatus, optical writing head, and image forming apparatus - Google Patents

Abstract

A separator for separating organic EL elements is desirably a material that has liquid repellency with respect to a solution containing an organic functional layer material and can be formed by a photolithographic method. It is necessary to use a material that sacrifices performance such as moisture permeability. In addition, there is a problem that the adhesiveness at the interface between the separator having the liquid repellency and the organic EL material is low, and the interface between the separator and the organic functional layer has a high moisture diffusibility.
A filler layer 114 that is superior to the separator 104 in terms of hygroscopicity and moisture resistance is disposed between the separator 104 and the organic functional layer 110. By preventing moisture from entering the organic functional layer 110 from the separator 104 by the filling layer 114, it is possible to obtain an organic EL device 50A including an organic EL element with excellent reliability.
[Selection] Figure 1

Description

  The present invention relates to a method for manufacturing an organic electroluminescent device, an organic electroluminescent device, an electronic apparatus, an optical writing head, and an image forming apparatus.

  In recent years, products using organic electroluminescence (hereinafter, electroluminescence is also referred to as EL) devices have been supplied to the market. For example, a liquid crystal panel performs gradation display by controlling the transmittance of the backlight, so that it is difficult to completely shield the backlight, so that black is displayed and a high-contrast image is obtained. It ’s difficult. On the other hand, when the organic EL device is used for a display, since the organic EL element used in the organic EL device is a self-luminous element, black is displayed when the current flowing through the organic EL element is stopped, and the liquid crystal panel is used. There is no leakage of backlight that occurs when Therefore, high contrast can be obtained. Also, the organic EL device is superior to the liquid crystal panel in terms of the wide viewing angle.

  When a high molecular organic material is used as the organic EL material, the organic EL device first prepares a liquid composition in which the organic material is dissolved or dispersed in a predetermined solvent. And it can manufacture by apply | coating this liquid composition using a droplet discharge method, for example. Compared with the vapor deposition method using low molecular weight organic materials, the droplet discharge method uniformly and cheaply provides a large organic EL device with many organic EL elements by applying a liquid composition by applying printing technology. Can be produced. In addition, the use efficiency of expensive organic EL materials is extremely low (about 5% or less) in the vapor deposition method, but the droplet discharge method has high efficiency (except for losses such as flushing), all the droplets adhere effectively. Therefore, in principle, the liquid composition (organic EL material) can be used at 100%), which is excellent in terms of cost and environmental load.

  When an organic functional layer is formed using a droplet discharge method, for example, as shown in Patent Document 1, a plurality of organic EL elements are arranged in one partition wall (circumferential separator), and the layer is formed over a large area. A technique for forming an organic functional layer with high uniformity in terms of thickness and electrical properties has been proposed.

  Patent Document 2 proposes a method of increasing the lyophilicity of the liquid composition located inside the partition wall while maintaining the liquid repellency at the sidewall of the partition wall by forming an inversely tapered partition wall. Has been. Specifically, this separator has a reverse taper shape, and the side surface of the separator is placed in the shadow of the top of the separator (the side far from the substrate) by irradiating ultraviolet rays parallel to the normal of the substrate surface. Maintains liquid repellency. Therefore, it is possible to suppress the occurrence of color unevenness and the like caused by the liquid composition being transmitted to other adjacent organic EL elements.

JP 2006-310257 A JP 2008-210540 A

  When the above-described configuration is used, the separator material is preferably a material that has liquid repellency with the liquid composition, has photosensitivity, and can be formed by a photolithographic method. It is difficult to satisfy all of the above, and it may be necessary to use a material that sacrifices moisture resistance, for example. In this case, in both configurations of Patent Documents 1 and 2, since the electron injection layer and the organic light emitting layer are in contact with the separator, moisture is diffused (penetrated) into the electron injection layer and the organic light emitting layer through the separator. May occur. Moreover, in the structure of patent document 1, since the electron injection layer and the organic light emitting layer are formed in common and continuously with respect to all the organic EL elements, the moisture which penetrate | invaded locally is the electron injection layer and the organic light emitting layer. There is a problem in that the diffusion of the electron injection layer and the organic light-emitting layer due to moisture is caused to diffuse through the interface with the liquid crystal.

  SUMMARY An advantage of some aspects of the invention is to solve at least a part of the problems described above, and the invention can be implemented as the following forms or application examples. Note that the substrate includes an active element and a substrate having another structure. Further, the second electrode may have a function as a carrier injection layer. The reverse taper type indicates a state in which the width of the separator on the side away from the substrate is wider than the width of the separator on the substrate side. “Top” indicates the direction in which the organic functional layer is arranged when viewed from the substrate. When “Top” is written, “Directly touching on XX” or “Other” on “XX”. The case where it arrange | positions via the structure of this shall be represented. In addition, the “island shape” refers to a state where the film is separated from a film made of the same material and formed in the same process in a plan view.

  [Application Example 1] An organic electroluminescence device manufacturing method according to this application example includes an organic material disposed on a substrate between a first electrode, a second electrode, and the first electrode and the second electrode. A method for manufacturing an organic electroluminescence device comprising a functional layer, the step of forming a plurality of the first electrodes arranged in a first direction on the substrate, and forming a current supply line on the substrate And a cross-sectional shape in the short direction on the substrate has a reverse taper type in which the width on the side closer to the substrate is narrower than the width on the side away from the substrate, in a plan view on the substrate, A step of forming two island-shaped separators extending along the first direction and arranged to sandwich the plurality of first electrodes, and a liquid organic functional layer precursor is formed on the substrate After applying on top, solidify and organic functional layer Forming a first mask having a first opening on the substrate so that the first opening overlaps at least one of the first electrodes in a plan view of the substrate; And forming an island-shaped second electrode at a position overlapping with a part of the organic functional layer by the first mask and spaced from the two separators, and using the second electrode as a mask, the organic A step of removing a part of the functional layer, separating the organic functional layer located on the first electrode into an island shape while being separated from the two separators, and a second mask comprising a shielding part and a second opening part In a plan view of the substrate, the second opening overlaps the substrate with the second mask such that the plurality of shielding portions overlap the peripheral portion of the substrate and do not overlap the two separators. ,gas phase Accordingly, characterized in that it comprises a step of forming a wiring layer for electrically connecting the current supply line and the second electrode by the second mask.

  According to this, the 1st mask used when forming a 2nd electrode in an organic functional layer is supported by a separator, and the organic functional layer and 1st mask in the area | region in which a 1st electrode is formed do not contact. Therefore, a method for manufacturing an organic electroluminescence device is provided in which the generation of scratches caused by the first mask touching the organic functional layer and the occurrence of contamination due to the transfer of foreign matter attached to the end of the first mask are suppressed. It becomes possible to do.

  [Application Example 2] A method of manufacturing an organic electroluminescence device according to this application example includes a first electrode for injecting current into an organic functional layer provided on a substrate, and at least one of the first electrodes in a plan view of the substrate. An organic device comprising: a separator that surrounds one electrode; a second electrode that covers the organic functional layer; and a current supply line that is electrically connected to the second electrode through a connection port in plan view on the substrate. A method for manufacturing an electroluminescence device, the step of forming the current supply line on the substrate, the step of forming the first electrode on the substrate, and the step of forming the connection port on the substrate; The cross-sectional shape in the direction connecting the inner side and the outer side of the separator has a reverse taper type in which the width on the side closer to the substrate is narrower than the width on the side away from the substrate, and the upper side of the current supply line A step of forming the separator in a region to be included; a step of applying a liquid organic functional layer precursor to the surface of the substrate and then solidifying to form an organic functional layer; and a plan view of the substrate in a first view. The portion overlaps at least a partial region of the separator and the connection port, and the first opening includes the first mask having the first pattern arranged to overlap the region including the first electrode. A step of overlapping with the substrate while maintaining a relationship, a step of forming a second electrode in a region separated from the separator, disposed to overlap with a part of the organic functional layer using a vapor phase method, and the second electrode And a step of opening the organic functional layer using the mask as a mask, and a second opening. The second opening is electrically connected between the second electrode and the connection port in a plan view of the substrate. Connect to A second mask having two pattern by vapor phase method after overlapping said substrate while maintaining the positional relationship as described above, characterized in that it comprises a step of forming a wiring layer based on the second pattern.

  According to this, the 1st mask used when forming a 2nd electrode in an organic functional layer is supported by a separator, and the organic functional layer and 1st mask in the area | region in which a 1st electrode is formed do not contact. Therefore, a method for manufacturing an organic electroluminescence device is provided in which the generation of scratches caused by the first mask touching the organic functional layer and the occurrence of contamination due to the transfer of foreign matter attached to the end of the first mask are suppressed. It becomes possible to do.

  In addition, even when the region surrounded by the separator is included through the current supply line, electrical conduction can be established between the upper electrode and the lower electrode or outside the region surrounded by the separator. The degree of freedom can be improved.

  Application Example 3 In the method of manufacturing an organic electroluminescence device according to the application example, the first electrode is lyophilic with respect to the organic functional layer precursor by an insulating layer having an opening. The substrate is surrounded with respect to the substrate surface direction.

  According to the application example described above, since the insulating layer is lyophilic with respect to the liquid organic functional layer precursor, the organic functional layer and the insulating layer obtained by drying the organic functional layer precursor Are closely coupled with high mechanical strength. Therefore, it is possible to maintain a bonded state with high mechanical strength and low contact resistance.

  Application Example 4 In the method of manufacturing an organic electroluminescence device according to the application example, the first electrodes are arranged in a line along the separator.

  According to the application example described above, the layer thickness of the organic functional layer is formed by solidifying the organic functional layer precursor because the liquid organic functional layer precursor is filled under the same conditions in the short direction. The layer thickness of the organic functional layer can be aligned in the short direction. Therefore, it is possible to provide a method for manufacturing an organic electroluminescence device with high uniformity of emission intensity.

  Application Example 5 A method of manufacturing an organic electroluminescence device according to the application example described above, further including a step of reducing the width of the separator after forming the second electrode.

  According to the above application example, by performing the process of reducing the width of the separator, leakage between the first electrode, the second electrode, and the third electrode due to the deposit on the separator side wall that occurs when the vapor phase method is used. The current can be suppressed.

  Application Example 6 In the method of manufacturing an organic electroluminescence device according to the application example, the step of reducing the width of the separator is performed simultaneously with the step of removing a part of the organic functional layer.

  According to the application example described above, it is possible to perform without separately providing a step of reducing the width of the separator. Therefore, it is possible to reduce the width of the separator without increasing the number of steps.

  Application Example 7 A method for manufacturing an organic electroluminescence device according to the application example described above, further including a step of filling at least a gap between the separator and the organic functional layer with a filling layer.

  According to the application example described above, the space between the separator and the organic functional layer is filled with the filling layer. For the separator, it is preferable to use a functional material capable of performing a photosensitive process in the manufacturing process. Therefore, there are restrictions on the material of the separator. For example, due to the liquid repellency of the separator, when the adhesion between the separator and the organic functional layer is poor, the moisture that has entered may diffuse along the interface between the separator and the organic functional layer. By using a high filling layer material, it is possible to prevent moisture from diffusing at the interface between the separator and the organic functional layer, and it is possible to prevent the occurrence of defects across a plurality of light emitting regions.

  Application Example 8 In the method of manufacturing an organic electroluminescence device according to the application example, the filling layer includes at least one of a desiccant or a moisture permeation preventive agent.

  According to the application example described above, when the packed bed contains the desiccant, the moisture that has penetrated is absorbed by the desiccant. For this reason, it is possible to more reliably suppress the intrusion of moisture into the organic functional layer. In addition, since the filling layer contains the moisture permeation preventive agent, it is possible to more reliably suppress the intrusion of moisture into the organic functional layer.

  Application Example 9 An organic electroluminescence device according to this application example is an organic electroluminescence device including an organic functional layer including at least a light emitting layer, and includes a first electrode provided on a substrate, and the first electrode. The organic functional layer provided above, a separator that partitions the organic functional layer with respect to the planar direction of the substrate, and is disposed at a position spaced apart from the organic functional layer, the separator, and the organic functional layer And at least a second electrode disposed at a position facing the first electrode across the organic functional layer, and electrically connected to the second electrode, And a wiring layer for supplying a current to the second electrode.

  According to this, the space between the separator and the organic functional layer is filled with the filling layer. For the separator, it is preferable to use a functional material capable of performing a photosensitive process in the manufacturing process. Therefore, there are restrictions on the material of the separator. For example, when the adhesion between the separator and the organic functional layer is poor, the moisture that has entered may diffuse along the interface between the separator and the organic functional layer, but by using a filler material with a high degree of material freedom, In addition, it is possible to prevent the phenomenon of moisture diffusing at the interface between the separator and the organic functional layer, and it is possible to prevent the occurrence of defects across a plurality of light emitting regions due to moisture intrusion from one place.

  Application Example 10 The organic electroluminescence device according to the application example described above, further including a current supply line electrically connected to the wiring layer between the separator and the substrate in the thickness direction. Features.

  According to the application example described above, it is possible to supply current from the outside to the region surrounded by the separator with respect to the plane direction of the substrate via the current supply line, and to the region surrounded by the separator. However, it is possible to apply a structure in which the filling layer material is filled between the separator and the organic functional layer.

  Application Example 11 In the organic electroluminescence device according to the application example described above, the filling layer includes at least one of a desiccant or a moisture permeation preventive agent.

  According to the application example described above, when the packed bed contains the desiccant, the moisture that has penetrated is absorbed by the desiccant. Therefore, it becomes possible to suppress the intrusion of moisture into the organic functional layer. Moreover, it becomes possible to suppress the penetration | invasion of the water | moisture content to an organic functional layer because a filling layer contains a moisture-permeation preventive agent.

  Application Example 12 An electronic apparatus according to this application example includes the organic electroluminescence device described above or an organic electroluminescence device manufactured by the method for manufacturing the organic electroluminescence device described above.

  According to this, since the intrusion of moisture into the organic functional layer is suppressed, an electronic device with excellent reliability can be provided.

  Application Example 13 An optical writing head according to this application example includes the organic electroluminescence device described above or the organic electroluminescence device manufactured by the method of manufacturing the organic electroluminescence device described above.

  According to this, since the intrusion of moisture into the organic functional layer is suppressed, an optical writing head having excellent reliability can be provided.

  Application Example 14 An image forming apparatus according to this application example includes the optical writing head described above.

  According to this, since the optical writing head having excellent reliability is used, an image forming apparatus having excellent reliability can be provided.

(A) is a top view for showing the structure of the organic electroluminescent apparatus concerning 1st Embodiment, (b) is sectional drawing in the A-A 'line of (a). (A) is a top view for showing the structure of the organic electroluminescent apparatus concerning 2nd Embodiment, (b) is sectional drawing in the AA 'line of (a), (c) is (a). Sectional drawing in the BB 'line | wire. (A) is a top view for showing the structure of the organic electroluminescent apparatus concerning the modification of 2nd Embodiment, (b) is sectional drawing in the AA 'line of (a), (c) is Sectional drawing in the BB 'line | wire of (a). (A)-(c) is process drawing which shows the manufacturing method of the organic electroluminescent apparatus in 3rd Embodiment. (A), (b) is process drawing which shows the manufacturing method of the organic electroluminescent apparatus in 3rd Embodiment. (A)-(c) is process drawing which shows the manufacturing method of the organic electroluminescent apparatus in 3rd Embodiment. (A), (b) is process drawing which shows the manufacturing method of the organic electroluminescent apparatus in 4th Embodiment. (A), (b) is process drawing which shows the manufacturing method of the organic electroluminescent apparatus in 4th Embodiment. (A), (b) is process drawing which shows the manufacturing method of the organic electroluminescent apparatus in 4th Embodiment. (A), (b) is process drawing which shows the manufacturing method of the organic electroluminescent apparatus in 4th Embodiment. (A) is a top view of the organic electroluminescent apparatus concerning the modification of 4th Embodiment, (b) is sectional drawing in the AA 'line of (a), (c) is B of (a). Sectional drawing in line -B '. (A) is a perspective view showing an example of a mobile phone, (b) is a perspective view showing an example of a portable information processing apparatus, and (c) is a perspective view showing an example of a wristwatch type electronic device. FIG. 3 is a cross-sectional view showing a main part of an optical printer as an image forming apparatus. The perspective view of the organic EL exposure head for black.

(First embodiment: Organic EL device-1)
Hereinafter, embodiments embodying the present invention will be described with reference to the drawings. In the drawings used for the following description, the scale of each layer and each member is shown to be different from the actual one so that each member has a size that can be recognized on the drawing.

  FIG. 1A is a plan view illustrating the structure of the organic EL device, and FIG. 1B is a cross-sectional view taken along the line A-A ′ in FIG. In addition, about a can sealing part, a desiccant, etc., the display is abbreviate | omitted. In the plan view, main elements are displayed in order to improve the visibility of the structure. That is, some structures are transmitted (omitted).

  The organic EL device 50A includes a substrate 100, a pixel electrode (anode) 101 as a first electrode, an insulating layer 102, an opening 103, a separator 104, an organic functional layer 110, a counter electrode (cathode) 111 as a second electrode, and wiring A layer 113 and a filling layer 114. The inside of the opening 103 located on the pixel electrode 101 functions as the first electrode 103A.

  The substrate 100 includes a substrate body 90, a TFT (thin film transistor) 91, a conductive wiring layer (not shown), and the like, and supports the insulating layer 102, the organic functional layer 110, and the like. Further, it functions to support the pixel electrode 101 and the like. Here, the planar layout will be described with reference to FIG. The organic EL device 50A has a second direction (extension of the long side of the substrate) in which a row in which the first electrodes 103A are arranged in a row in the first direction (extending direction of the short side of the substrate) intersects the first direction. The separators 104 are interposed between the rows and outside the rows at both ends, and the space between the separators 104 and the organic functional layer 110 is filled with a filling layer 114. In the present embodiment, a structure in which the region covering the organic functional layer 110 is filled with the filling layer 114 is illustrated. Next, the function of each component will be described with reference to FIGS. 1 (a) and 1 (b).

  The pixel electrode 101 cooperates with the insulating layer 102 to form the first electrode 103A, and the organic functional layer 110 emits light by supplying a current from the first electrode 103A to the organic functional layer 110. Note that the insulating layer 102 can be omitted, and in this case, the entire surface of the pixel electrode 101 functions as the first electrode 103A.

  The separator 104 is formed to partition a plurality of organic functional layers 110 (organic EL elements), and is formed in order to keep the layer thickness uniformity of the organic functional layer 110. A filler layer 114 described later is formed between the separator 104 and the organic functional layer 110.

  The organic functional layer 110 emits light with an intensity corresponding to a current value flowing between the counter electrode 111 and the pixel electrode 101 (first electrode 103A) whose current path is narrowed by the opening 103, and performs current-light conversion. Do. Here, the organic functional layer 110 covers the first electrode 103A so that current-light conversion can be performed by the current supplied from the first electrode 103A.

  The wiring layer 113 electrically connects a plurality of counter electrodes 111, receives a current from a power source by being electrically connected to a current supply line (not shown), and supplies a current to each counter electrode 111. It is formed in a region facing at least the first electrode 103A via the organic functional layer 110. The wiring layer 113 also functions as a connection wiring that receives a current from a power supply via a power supply line (not shown) and supplies the current to the counter electrode 111.

  The filling layer 114 fills at least the gap between the separator 104 and the organic functional layer 110 to prevent moisture from entering the organic functional layer 110. In the present embodiment, the case where the space between the separator 104 and the organic functional layer 110 is filled and the wiring layer 113 is also filled with the filling layer 114 is illustrated. As the filling layer 114, polyurethane, PET (polyethylene terephthalate), or the like having high moisture permeation prevention properties can be used because it is not affected by the constraints associated with the production of the filling layer 114. Therefore, high moisture resistance can be obtained. In addition, it is possible to use a desiccant such as Aure Dry (manufactured by Futaba Electronics Co., Ltd.) as the filling layer 114, and even in this case, high moisture resistance can be obtained. In addition, although moisture may diffuse along the separator 104, such moisture diffusion can be suppressed by interposing the filling layer 114.

  In the first embodiment, one counter electrode 111 is formed so as to cover the plurality of first electrodes 103A, but one counter electrode 111 may be formed corresponding to each first electrode 103A. good.

(Second Embodiment: Organic EL Device-2)
Next, an organic EL device having another configuration according to the present embodiment will be described.
2A is a plan view illustrating the structure of the organic EL device, FIG. 2B is a cross-sectional view taken along the line AA ′ in FIG. 2A, and FIG. It is sectional drawing in a BB 'line.

  The organic EL device 50B includes a substrate 100 as a substrate, a pixel electrode 101 as a first electrode, an insulating layer 102, an opening 103, a separator 104, an organic functional layer 110, a counter electrode 111 as a second electrode, a wiring layer 113, A filling layer 114, a current supply line 120, and a connection port 121. Since elements other than the current supply line 120 and the connection port 121 have the same configuration as that of the first embodiment, description thereof is omitted.

  When the separator 104 is formed in an annular shape, the counter electrode 111 and the wiring layer 113 are separated by the separator 104, and it is difficult to establish electrical continuity outside the annular region by the separator 104 and through the upper layer of the separator 104. It is. Therefore, by arranging the current supply line 120 below the separator 104 in advance, the wiring layer 113 can go under the separator 104 through the connection port 121 and be electrically connected to the outside of the annular region by the separator 104. It is possible to take. Here, the current supply line 120 may be supplied with current from outside the separator 104 through the separator 104. Further, current may be supplied below the separator 104.

(Modification: Second Embodiment)
Here, a modification according to the second embodiment will be described. The same components as those in the second embodiment are used. 3A is a plan view illustrating the structure of the organic EL device, FIG. 3B is a cross-sectional view taken along the line AA ′ in FIG. 3A, and FIG. It is sectional drawing in a BB 'line. Since the components and functions are basically the same as those in the second embodiment, description thereof is omitted. In the organic EL device 50 </ b> C, a plurality of first electrodes 103 </ b> A are aligned in a plurality of rows within the separator 104. Therefore, the area of the separator 104 can be reduced. Therefore, the first electrodes 103A can be arranged with high density accordingly. Therefore, it is suitable for an apparatus that requires a dense dot pattern, such as an optical writing head of an optical printer as an image forming apparatus.

  In addition, a filling layer 114 superior to the separator 104 in terms of hygroscopicity and moisture resistance can be formed between the separator 104 and the organic functional layer 110, thereby preventing moisture from entering the organic functional layer 110. It is possible. In the present embodiment, the case where the filling layer 114 is formed so as to fill the space between the separator 104 and the organic functional layer 110 and also embed the wiring layer 113 is illustrated.

(Third Embodiment: Method for Manufacturing Organic EL Device-1)
Here, a method for manufacturing the organic EL device will be described. FIGS. 4A to 4C, FIGS. 5A and 5B, and FIGS. 6A to 6C are process diagrams illustrating a method for manufacturing an organic EL device according to this embodiment. In the plan view, main elements are displayed in order to improve the visibility of the structure. That is, some structures are transmitted (omitted).

  First, as Step 1, a pixel electrode 101 as a first electrode is formed on a substrate 100 having a TFT body 91 and a wiring structure (not shown) on a substrate body 90 by a known method represented by a sputtering method, a photolithographic method or the like. Next, an insulating layer 102 using silicon oxide or the like is formed on the pixel electrode 101 by a known method typified by a CVD (chemical vapor deposition) method or the like. Here, as the substrate 100, for example, glass, quartz glass, Si wafer, plastic film, metal plate, or the like can be used. However, in the case of taking a bottom emission type configuration in which light is emitted from the substrate 100 side, which is mainly shown in this embodiment, the substrate 100 needs to be transparent to light. Such a restriction does not occur when a top emission type structure in which light is emitted to the side opposite to the substrate 100 is employed. When the pixel electrode 101 has a bottom emission type structure, a conductor having light transmittance and suitable for hole injection is preferable, such as ITO (indium tin oxide) or IZO (indium zinc oxide). Can be used. When ITO is used, it is preferable to provide a layer thickness of about 20 nm or more and 500 nm or less in consideration of translucency and electric resistance. Although the case where the pixel electrode 101 side close to the substrate 100 is a positive electrode is described here, a configuration in which the pixel electrode 101 side is a negative electrode may be used. In this case, the pixel electrode 101 is configured. This can be achieved by using a thin film of MgAg (magnesium / silver) alloy having excellent electron injection properties as a substance.

  Next, as step 2, the insulating layer 102 over the substrate 100 is patterned to form the opening 103. A plurality of first electrodes 103A that supply current to the organic functional layer 110 (see FIG. 5A) through the openings 103 are formed by covering the pixel electrode 101 with the insulating layer 102 having the openings 103. . FIG. 4A shows a plan view after the steps so far, and FIG. 4B shows a cross-sectional view of FIG. 4A along the line A-A ′. Hereinafter, the cross-sectional view will describe the plane along the line A-A ′. Note that the step of covering with the insulating layer 102 having the opening 103 is not essential and can be omitted. In this case, the first electrode 103A is the pixel electrode 101 itself.

  Next, as step 3, a fluorine-based resin is patterned on the insulating layer 102 so as to have a height of, for example, about 1 to 2 μm, and a reverse-tapered separator 104 is formed in an island shape along the side of the opening 103. To form. Here, the planar pattern of the separator 104 is configured so as to sandwich the plurality of first electrodes 103A with respect to the planar view of the substrate 100. The organic functional layer 110 (see FIG. 5A) described later is configured. This is suitable for uniform layer thickness distribution. In this embodiment, the separator 104 is arrange | positioned so that 103 A of 1st electrodes may be isolate | separated for every row. By arranging in this way, the organic functional layer 110 (see FIG. 5A) formed on the first electrode 103A can be separated by the separator 104, and diffusion of moisture can be prevented. Note that the density of the separator 104 in the planar direction on the substrate 100 may be lowered, and the first electrode 103A may be arranged in a plurality of rows in a direction intersecting the longitudinal direction of the separator 104. In this case, the risk of moisture diffusion is slightly increased, but it is effective for an application in which it is preferable to form the first electrode 103A at a high density, such as an optical writing head for an optical printer.

  Here, as a forming material of the separator 104, a polymer material such as an acrylic resin, a polyimide resin, an olefin resin, and a melamine resin, an organic / inorganic hybrid material containing polysilazane, polysiloxane, or the like is used. As a method for forming the separator 104, an arbitrary method such as a lithography method or a printing method can be used. However, the lithography method is a preferable forming unit in order to form a reverse tapered shape with a small number of steps. In the case of using the lithography method, the condition is less than the condition of forming the negative separator precursor 104A on the substrate 100 by a predetermined method such as spin coating, spray coating, roll coating, die coating, dip coating, and then curing the entire surface. Exposure is performed using the exposure amount. By performing the exposure in this manner, the exposure amount on the substrate 100 side is smaller than that on the exposure light source side where the light intensity decrease due to light absorption is small. Therefore, when the separator precursor 104A thus exposed is developed, a reverse taper is obtained. It becomes possible to obtain the separator 104 in the shape of a plate. FIG. 4C shows a cross-sectional view after the steps so far are completed.

  Next, as step 4, the organic functional layer 110 including the hole injection layer 110A, the organic light emitting layer 110B, and the electron transport layer 110C is formed. The organic functional layer 110 is formed using a liquid phase method using a process in which a liquid organic functional layer precursor is applied and dried, and the next organic functional layer precursor is applied and dried. Here, although the example which took the above-mentioned layer structure as the organic functional layer 110 is described, this can be omitted or added except for the organic light emitting layer 110B. For example, hole transport is performed on the hole injection layer 110A. It is possible to make appropriate changes such as forming a layer or omitting the hole injection layer 110A.

  The hole injection layer 110A is formed to a thickness of about 10 nm to about 60 nm using a coating method, and then dried once. Thereafter, similarly, the organic light emitting layer 110B and the electron transport layer 110C are laminated to form the organic functional layer 110. Examples of the hole injection layer 110A include materials such as polythiophene / polystyrene sulfonic acid (PEDOT / PSS), copper phthalocyanine, metal-free phthalocyanine, and aromatic diamine (TPAC, 2Me-TPD, α-NPD).

  Further, as the organic light emitting layer 110B, polyfluorene derivatives (PF), polyparaphenylene vinylene derivatives (PPV), polyphenylene derivatives (PP), which are known polymer light emitting materials capable of emitting fluorescence or phosphorescence, Polysilanes such as polyparaphenylene derivatives (PPP), polyvinylcarbazole (PVK), polythiophene derivatives, polydialkylfluorene (PDAF), polyfluorenebenzothiadiazole (PFBT), polyalkylthiophene (PAT), and polymethylphenylsilane (PMPS) A system or the like can be preferably used. In addition, these light-emitting materials include polymer materials such as perylene dyes, coumarin dyes, rhodamine dyes, rubrene, perylene, 9,10-diphenylanthracene, tetraphenylbutadiene, Nile red, coumarin 6, quinacridone, and the like. It is also possible to use a low molecular weight material doped.

  As the electron transport layer 110C, a quinolinol aluminum complex gallium complex, an anthraquinodimethane derivative, a diphenylquinone derivative, an oxadiazole derivative, a perylenetetracarboxylic acid derivative, or the like can be used.

  The solvent is not particularly limited as long as it does not cause aggregation by dissolving and dispersing the substances constituting the hole injection layer 110A, the organic light emitting layer 110B, and the electron transport layer 110C. For example, alcohols such as methanol, ethanol, propanol, butanol, n-heptane, n-octane, decane, dodecane, tetradecane, toluene, xylene, cymene, durene, indene, dipentene, tetrahydronaphthalene, decahydronaphthalene, cyclohexylbenzene, etc. Hydrocarbon compounds of, and ethylene glycol dimethyl ether, ethylene glycol diethyl ether, ethylene glycol methyl ethyl ether, diethylene glycol dimethyl ether, diethylene glycol diethyl ether, diethylene glycol methyl ethyl ether, 1,2-dimethoxyethane, bis (2-methoxyethyl) ether, ether compounds such as p-dioxane, propylene carbonate, γ-butyrolactone, - methyl-2-pyrrolidone, dimethylformamide, dimethyl sulfoxide, and cyclohexanone can be exemplified.

  The hole injection layer 110A, the organic light emitting layer 110B, and the electron transport layer 110C are formed using a functional solution in which substances constituting the hole injection layer 110A, the organic light emitting layer 110B, and the electron transport layer 110C are dissolved and dispersed. Examples of the method include a droplet discharge method, a slit coating method, and a dispensing method. Here, a case where a droplet discharge method with high use efficiency of a functional solution is used will be described. Examples of the droplet discharge method include a charge control method, a pressure vibration method, an electromechanical conversion method, an electrothermal conversion method, and an electrostatic suction method.

Here, in the charge control method, a charge is applied to the functional solution with a charging electrode, and the flight direction of the material is controlled with a deflection electrode, and discharged from a nozzle. In addition, the pressurized vibration method is a method in which an ultra-high pressure of about 30 kg / cm ² is applied to the functional solution and the functional solution is discharged to the nozzle tip side. It is discharged from. When a control voltage is applied, electrostatic repulsion occurs between the materials, and the materials are scattered and are not discharged from the nozzle. In addition, the electromechanical conversion method utilizes the property that a piezoelectric element (piezoelectric element) deforms in response to a pulsed electric signal. A flexible substance is placed in a space where a functional solution is stored by deformation of the piezoelectric element. Pressure is applied to the functional solution, and the functional solution is pushed out from the space and discharged from the nozzle.

  In the electrothermal conversion method, the functional solution is rapidly vaporized by the heater provided in the space in which the functional solution is stored to generate bubbles, and the functional solution in the space is discharged by the pressure increase associated with the generation of bubbles. It is something to be made. In the electrostatic suction method, a minute pressure is applied to the space in which the functional solution is stored, a meniscus of the functional solution is formed on the nozzle, and the electrostatic solution is applied in this state before the functional solution is drawn out. In addition to this, techniques such as a system that uses a change in the viscosity of a fluid due to an electric field, a system that uses a discharge spark, and the like are also applicable. The droplet discharge method has an advantage that the use of the functional solution is less wasteful and a desired amount of the functional solution can be accurately disposed at a desired position. Note that the amount of one drop of the functional solution discharged by the droplet discharge method is, for example, 1 to 300 ng. The conditions exemplified below are those when an electromechanical conversion method in which there is no deterioration of the functional solution due to heating as compared with the electrothermal conversion method.

  When the droplet discharge method by the electromechanical conversion method is used, the surface tension of the functional solution is preferably in the range of 0.02 N / m or more and 0.07 N / m or less. When the liquid is discharged by the droplet discharge method, if the surface tension is less than 0.02 N / m, the wettability of the organic functional layer precursor with respect to the nozzle surface increases, and thus flight bending easily occurs. If it exceeds / m, the shape of the meniscus at the tip of the nozzle is not stable, and it becomes difficult to control the discharge amount and the discharge timing. In order to adjust the surface tension, a small amount of a surface tension regulator such as a fluorine-based, silicone-based, or nonionic-based material may be added to the functional solution within a range that does not significantly reduce the contact angle with the substrate. The nonionic surface tension modifier improves the wettability of the liquid to the substrate, improves the leveling property of the layer, and helps prevent the occurrence of fine irregularities in the layer. The surface tension modifier may contain an organic compound such as alcohol, ether, ester, or ketone, if necessary.

  The viscosity of the functional solution is preferably about 1 mPa · s to 50 mPa · s. When discharging the functional solution as droplets using the droplet discharge method, if the viscosity is less than 1 mPa · s, the nozzle periphery is easily contaminated by the outflow of the functional solution, and if the viscosity is greater than 50 mPa · s. The frequency of clogging in the nozzle holes increases, and it becomes difficult to smoothly discharge droplets. FIG. 5A shows a cross-sectional view after the step of forming the organic functional layer 110 including the hole injection layer 110A, the organic light emitting layer 110B, and the electron transport layer 110C is completed. When the separator 104 has liquid repellency, the organic functional layer is not formed on the separator 104 because it is repelled by the separator 104. Here, even when the organic functional layer remains on the separator 104, the organic functional layer remaining in this place is in an electrically floating state, so that no current flows and the influence on the operation of the organic EL device. Does not occur.

  Next, as step 5, a counter electrode 111 as a second electrode is formed. The counter electrode 111 is formed by a vapor phase method using a mask. In the first mask 112, the first shielding portion 112 </ b> A overlaps both ends of the separator 104, and positioning in the height direction is performed by the separator 104. The organic functional layer 110 in the region sandwiched between the separators 104 has a pattern overlapping the first opening 112B. A plan view showing a state in which the first mask 112 and the substrate 100 are overlapped is shown in FIG.

  Since the first mask 112 is positioned in the height direction by the separator 104, the organic functional layer 110 located at a position lower than the separator 104 (near the substrate 100) and the first mask 112 do not come into contact with each other. Therefore, when the first mask 112 is overlapped with the substrate 100, it is possible to prevent the occurrence of defects due to scratches caused by the edge of the first mask 112 and foreign matters deposited on the mask edge adhering to the organic functional layer 110.

  And while maintaining this positional relationship, a material containing LiF, Ca, Cs, and Sr having excellent electron injection properties using a vapor phase method such as sputtering or vapor deposition is about 0.5 nm to 50 nm. After stacking with a layer thickness, Al is stacked with a layer thickness of about 50 nm to about 500 nm using a vapor phase method such as sputtering or vapor deposition to form the counter electrode 111. Here, since the separator 104 has an inversely tapered shape, the counter electrode 111 positioned on the substrate 100 side is divided by a region that is a shadow of the separator 104. FIG. 6A shows a cross-sectional view after the steps so far are completed. As shown in FIG. 6A, a metal layer accompanying the formation of the counter electrode 111 may remain on the separator 104. However, since this metal layer is electrically isolated, the operation of the organic EL device is not affected. There is no impact.

  Next, as step 6, ashing of the organic functional layer 110 is performed using the counter electrode 111 as a mask. Ashing is performed using plasma ashing containing oxygen gas. Here, the ashing conditions may be set slightly isotropic so that the separator 104 is slightly etched. In this case, the organic functional layer 110 residue attached to the side wall of the separator 104 is surely removed. It becomes possible to do. Further, even when the counter electrode 111 parasitically wraps around the shadow of the separator 104, the separator 104 and the organic functional layer 110 can be reliably separated.

  Here, the etching of the separator 104 does not need to be performed at the same time as the ashing, and may be performed in another process. Further, the step of slightly etching the separator 104 is not essential. FIG. 6B shows a cross-sectional view after the steps so far are completed.

  Next, as step 7, the wiring layer 113 is formed. The wiring layer 113 is formed by a vapor phase method using a mask. The second mask includes, as a second opening, a second pattern that at least partially overlaps the counter electrode 111 and electrically connects the counter electrodes 111 to each other. Here, an example is described in which a pattern covering the entire counter electrode 111 is used as the second pattern. Then, in a state where this positional relationship is maintained, Al is stacked with a layer thickness of about 50 nm to about 500 nm using a vapor phase method such as a sputtering method to form the wiring layer 113.

  Since the second mask uses a pattern that covers the entire counter electrode 111, it comes into contact with the organic functional layer 110, but the first electrode 103 </ b> A involved in light emission in the organic functional layer 110 and its periphery are the counter electrode. Since it is covered with 111, there is no influence due to damage caused when it comes into contact with the second mask. Here, the shielding part of the second mask is preferably arranged so as to cover the periphery of the substrate, for example. In this way, vapor deposition can be performed without creating an extra shadow. In addition, the second mask can easily be positioned by covering the periphery of the substrate. In addition, since the second mask is supported by the periphery of the substrate, it is possible to more reliably suppress damage caused by contact with the second mask. FIG. 6C shows a cross-sectional view after the steps so far are completed.

  Next, as Step 8, a filling layer 114 is formed in a region including a gap between the separator 104 and the organic functional layer 110 using a desiccant or a moisture permeation preventive agent. As a desiccant used for filling, for example, Aure Dry (manufactured by Futaba Electronics Industry) can be exemplified. As the moisture permeation preventing agent, for example, polyurethane or PET (polyethylene terephthalate) can be used. Note that other resin may be used for the filling layer 114, and in this case as well, a protective function against moisture can be expected as compared with the case where the organic functional layer 110 is exposed.

  Then, for example, by performing a can sealing (not shown) step, the organic EL device 50A shown in FIGS. 1A and 1B can be manufactured. As described above, since the filling layer 114 including a desiccant and a moisture permeation preventive agent is formed between the separator 104 and the organic functional layer 110, it is possible to provide the organic EL device 50A having excellent moisture resistance. Become.

(Fourth Embodiment: Method for Manufacturing Organic EL Device-2)
Here, a method for manufacturing an organic EL device having another structure will be described. FIGS. 7A, 7B, 8A, 8B, 9A, 9B, 10A, and 10B show the manufacture of the organic EL device according to this embodiment. It is process drawing which shows a method. In the description, the same steps as those in the manufacturing method-1 of the organic EL device will be described with reference to the numbers of the steps, and the description will not be duplicated.

  First, as step 1, a first electrode is formed on a substrate 100 having a TFT body 91 (see FIG. 4B) or a wiring structure (not shown) on the substrate body 90 by a known method represented by a sputtering method, a photolithography method, or the like. The pixel electrode 101, the current supply line 120, and the connection port 121 are formed. Here, it is preferable to form the pixel electrode 101 and the current supply line 120 at the same time in terms of shortening the manufacturing process. Further, it may be formed by another process. In this case, the degree of freedom in designing the current supply line 120 can be improved. Next, an insulating layer 102 using silicon oxide or the like is formed by a known method typified by a CVD (chemical vapor deposition) method so as to cover the pixel electrode 101 and the current supply line 120. The correspondence with respect to the bottom emission type, the top emission type, the polarity of the pixel electrode 101, and the like is equivalent to the step 1 of the manufacturing method-1 of the organic EL device.

  Next, as step 2, the insulating layer 102 over the substrate 100 is patterned to form the opening 103 and the connection port 121. FIG. 7A is a plan view after the steps so far, FIG. 4B is a cross-sectional view along the line AA ′, and FIG. 7B is a cross-sectional view along the line BB ′. Shown in b). Hereinafter, the cross-sectional view will describe the plane along the line B-B ′. Here, since the cross-sectional view along the line A-A ′ shows the same cross-sectional shape as the manufacturing method 1 of the organic EL device, the drawings are omitted, and overlapping description is avoided.

  Next, as step 3, a fluorine-based resin is patterned on the insulating layer 102 so as to have a height of, for example, about 1 to 2 μm, thereby forming a reverse taper type separator 104. Here, the thickness of the organic functional layer 110 (see FIG. 8B), which will be described later, is to configure the planar pattern of the separator 104 so that the first electrode 103A is sandwiched with respect to the planar view of the substrate 100. It is suitable for making the distribution uniform. In the present embodiment, the separator 104 separates the first electrodes 103A for each row, surrounds the opening 103 and the connection port 121 in a plan view of the substrate 100, and is disposed so as to overlap the current supply line 120. With this arrangement, current can be supplied to the wiring layer 113 (see FIG. 2C) that is electrically coupled to the connection port 121 via the current supply line 120. The layout of the first electrode 103A, the material of the separator 104, the manufacturing process, and the like are the same as those described in step 3 in the manufacturing method-1 of the organic EL device.

  Next, the organic functional layer 110 is formed according to the process 4 in the manufacturing method-1 of an organic EL device. FIG. 8A shows a plan view after the steps so far, and FIG. 8B shows a cross-sectional view along the line B-B ′.

  Next, the counter electrode 111 as the second electrode is formed according to Step 5 in the method 1 for manufacturing an organic EL device. Here, a plan view showing a state in which the first mask 112 and the substrate 100 are overlapped is shown in FIG. FIG. 9B shows a cross-sectional view along the line B-B ′ in the state where the counter electrode 111 has been formed.

  Next, ashing of the organic functional layer 110 is performed using the counter electrode 111 as a mask in accordance with Step 6 in the manufacturing method-1 of the organic EL device.

  FIG. 10A shows a cross-sectional view along the line B-B ′ after the steps so far are completed.

  Next, the wiring layer 113 is formed according to the process 7 in the manufacturing method-1 of an organic EL device. FIG. 10B shows a cross-sectional view along the line B-B ′ after the steps so far are completed.

  Next, the filling layer 114 is formed according to the process 8 in the manufacturing method-1 of an organic EL device.

  Then, for example, by performing a can sealing (not shown) step, the organic EL device 50B shown in FIGS. 2A, 2B, and 2C can be manufactured. Even in this case, since a desiccant or a moisture permeation preventive agent can be formed between the separator 104 and the organic functional layer 110, it is possible to provide the organic EL device 50B having excellent moisture resistance.

(Modification: Fourth Embodiment)
Here, a modification according to the fourth embodiment will be described. As a manufacturing process, the same manufacturing process as that of the fourth embodiment is used except for the pattern of the opening 103. 11A is a plan view for illustrating the arrangement of openings in the organic EL device, FIG. 11B is a cross-sectional view taken along the line AA ′ of the organic EL device, and FIG. 11C is B of the organic EL device. It is sectional drawing in the -B 'line. Since the pattern except for the pattern of the opening 103 is basically the same as that of the fourth embodiment, the description thereof is omitted. In the organic EL device 50 </ b> C (see FIGS. 3A, 3 </ b> B, and 3 </ b> C), a plurality of openings 103 are aligned in a plurality of rows within the separator 104. Therefore, the pattern area of the separator 104 is reduced, and the first electrode 103A that controls light emission can be arranged at a high density. Therefore, it is suitable for an apparatus that requires a dense dot pattern, such as an optical writing head of an optical printer as an image forming apparatus.

(Fifth embodiment: electronic device)
Hereinafter, embodiments embodying the present invention will be described with reference to the drawings. FIG. 12 illustrates an example of an electronic device. FIG. 12A is a perspective view illustrating an example of a mobile phone. In FIG. 12A, reference numeral 500 denotes a mobile phone body, and the mobile phone body 500 includes a display unit 501 having an electro-optical device such as the organic EL display device 50 described above.

  FIG. 12B is a perspective view showing an example of a portable information processing apparatus such as a word processor or a personal computer. In FIG. 12B, reference numeral 600 denotes an information processing apparatus. The information processing apparatus 600 includes an input unit 601 such as a keyboard, an information processing apparatus body 602, and an electro-optical device such as the organic EL device 50 described above. Part 603 is provided. FIG. 12C is a perspective view showing an example of a wristwatch type electronic device. In FIG. 12C, reference numeral 700 denotes a watch body, and the watch body 700 includes a display unit 701 including an electro-optical device such as the organic EL display device 50 described above. Since the electronic devices shown in FIGS. 12A to 12C include the above-described organic EL display panel and the like, good display with reduced color unevenness and the like can be obtained.

  The above-described electro-optical device such as the organic EL device 50 can be applied to various electronic devices other than the electronic devices illustrated in FIGS. For example, liquid crystal projectors, engineering workstations (EWS), pagers, televisions, viewfinder type or monitor direct view type video tape recorders, electronic notebooks, electronic desk calculators, car navigation devices, POS terminals, devices with touch panels, etc. It can be applied to other electronic devices.

(Sixth embodiment: image forming apparatus)
Hereinafter, embodiments embodying the present invention will be described with reference to the drawings. FIG. 13 is a cross-sectional view showing a main part of an optical printer as an image forming apparatus according to an embodiment of the present invention. An optical printer 1 shown in FIG. 13 is a tandem optical printer capable of full color display. As shown in FIG. 13, the optical printer 1 includes a black organic EL exposure head 2K, a cyan organic EL exposure head 2C, a magenta organic EL exposure head 2M, and a yellow organic EL exposure head 2Y as optical write heads. ing.

  Further, the optical printer 1 includes a black photosensitive drum 3K, a cyan photosensitive drum 3C, a magenta photosensitive drum 3M, and a yellow photosensitive drum 3Y below the exposure heads 2K, 2C, 2M, and 2Y. Furthermore, the optical printer 1 includes a driving roller 4, a driven roller 18, a tension roller 6, and an intermediate transfer belt 7 that is circulated and driven counterclockwise in FIG. Prepare.

  The photosensitive drums 3K, 3C, 3M, and 3Y are arranged at a predetermined interval with respect to the intermediate transfer belt 7. Each of the photosensitive drums 3K, 3C, 3M, and 3Y is rotated in the clockwise direction in FIG. 13 in synchronization with the driving of the intermediate transfer belt 7. The exposure heads 2K, 2C, 2M, and 2Y sequentially scan the outer circumferential surfaces of the photosensitive drums 3K, 3C, 3M, and 3Y in synchronization with the rotation of the photosensitive drums 3K, 3C, 3M, and 3Y. Then, electrostatic latent images corresponding to the drawing data are formed on the corresponding photosensitive drums 3K, 3C, 3M, 3Y. Corona chargers 8K, 8C, 8M, and 8Y are provided around the photosensitive drums 3K, 3C, 3M, and 3Y to uniformly charge the outer peripheral surfaces of the photosensitive drums 3K, 3C, 3M, and 3Y. Yes.

  The optical printer 1 also includes a black developing device 9K around the black photosensitive drum 3K, a cyan developing device 9C around the cyan photosensitive drum 3C, and a magenta developing device 9M around the magenta photosensitive drum 3M. A yellow developing device 9Y is provided around the yellow photosensitive drum 3Y. Each of these developing devices 9K, 9C, 9M, and 9Y has a color corresponding to the electrostatic latent image formed on each of the photosensitive drums 3K, 3C, 3M, and 3Y by the corresponding organic EL exposure heads 2K, 2C, 2M, and 2Y. A visible image (toner image) is formed by applying a toner which is a developer. For example, the cyan developing device 9C forms a visible image (toner image) by applying cyan toner to the electrostatic latent image formed on the cyan photosensitive drum 3C by the cyan organic EL exposure head 2C. .

  Specifically, each of the developing devices 9K, 9C, 9M, and 9Y uses, for example, a non-magnetic one-component toner as a toner. The film thickness of the adhered toner is regulated with a regulation blade. According to this regulation, the developing roller is brought into contact with or pressed against each of the photosensitive drums 3K, 3C, 3M, 3Y, and according to the potential level of the electrostatic latent image formed on each of the photosensitive drums 3K, 3C, 3M, 3Y. A developer is attached to develop a visible image (toner image).

  Further, the optical printer 1 performs an intermediate transfer on which a visible image (toner image) developed by each developing device 9K, 9C, 9M, 9Y is a primary transfer object around each photosensitive drum 3K, 3C, 3M, 3Y. Primary transfer rollers 10K, 10C, 10M, and 10Y that sequentially transfer to the belt 7 are provided. Furthermore, the optical printer 1 includes cleaning devices 11K, 11C, 11M, and 11Y around the photosensitive drums 3K, 3C, 3M, and 3Y. The cleaning devices 11K, 11C, 11M, and 11Y are for removing toner remaining on the surfaces of the photosensitive drums 3K, 3C, 3M, and 3Y after the primary transfer.

  The visible images (toner images) of black, cyan, magenta, and yellow formed on the photosensitive drums 3K, 3C, 3M, and 3Y are intermediate transfer belts by the primary transfer rollers 10K, 10C, 10M, and 10Y. 7 is firstly transferred onto the upper surface. The visible image (toner image), which is sequentially superposed on the intermediate transfer belt 7 by this primary transfer and becomes a full color, is secondarily transferred onto the recording medium P such as paper by the secondary transfer roller 5 and a pair of fixing rollers. 12 is fixed on the recording medium P. The recording medium P on which the visible image (toner image) is fixed is guided by the paper discharge roller 13 and discharged onto a paper discharge tray 14 formed on the upper portion of the optical printer 1.

  The optical printer 1 also includes a paper feed cassette 15 that holds a large number of recording media P, a pickup roller 16 that feeds the recording media P from the paper feed cassette 15 one by one, and a secondary transfer unit of the secondary transfer roller 5. A gate roller 17 is provided for defining the supply timing of the recording medium P to the recording medium. Further, the optical printer 1 includes a secondary transfer roller 5 that forms a secondary transfer portion with the intermediate transfer belt 7, and a cleaning blade 19 that removes toner remaining on the surface of the intermediate transfer belt 7 after the secondary transfer. I have.

(Seventh embodiment: optical writing head for image forming apparatus)
Hereinafter, embodiments embodying the present invention will be described with reference to the drawings. Here, the organic EL exposure head 2K for black, the organic EL exposure head 2C for cyan, the organic EL exposure head 2M for magenta, and the organic EL exposure head 2Y for yellow shown in FIG. 13 have substantially the same structure. For convenience of explanation, the black organic EL exposure head 2K will be described, and the detailed description of the other organic EL exposure heads 2C, 2M, and 2Y will be omitted.

  FIG. 14 is a perspective view of a black organic EL exposure head 2K. The black organic EL exposure head 2K includes a box body 21 arranged in one direction, that is, a direction orthogonal to the conveyance direction of the intermediate transfer belt 7 (see FIG. 13), the box body 21, and the black photosensitive drum 3K. And an optical member 23 supported and fixed to the box 21 so as to be positioned between the two. The box 21 has an opening on the black photosensitive drum 3K side, and the organic EL device 50 (A, B, C) is fixed so that light is emitted toward the opening. Although any organic EL device can be used to form the organic EL exposure head 2K for black, an organic EL device 50C that can increase the density of the first electrode 103A that defines a region involved in light emission is, for example, Is preferred. By making the density of the open first electrode 103A high, printing corresponding to a fine pattern becomes possible.

  DESCRIPTION OF SYMBOLS 1 ... Optical printer, 2C ... Organic EL exposure head for cyan, 2K ... Organic EL exposure head for black, 2M ... Organic EL exposure head for magenta, 2Y ... Organic EL exposure head for yellow, 3C ... Photosensitive drum for cyan, 3K ... Black photosensitive drum, 3M ... Magenta photosensitive drum, 3Y ... Yellow photosensitive drum, 4 ... Driving roller, 5 ... Secondary transfer roller, 7 ... Intermediate transfer belt, 8K ... Corona charger, 9C ... Cyan developing device, 9K ... Developing device for black, 9M ... Developing device for magenta, 9Y ... Developing device for yellow, 10C ... Primary transfer roller, 10K ... Primary transfer roller, 10M ... Primary transfer roller, 10Y ... Primary transfer roller, 12 ... Fixing roller, 13 ... paper discharge roller, 14 ... paper discharge tray, 15 ... paper feed cassette, 16 ... pickup roller, 17 Gate roller, 18 ... driven roller, 19 ... cleaning blade, 21 ... box, 23 ... optical member, 50 ... organic EL device, 50A ... organic EL device, 50B ... organic EL device, 50C ... organic EL device, 90 ... substrate Main body 91 ... TFT 100 ... Substrate 101 ... Pixel electrode 102 ... Insulating layer 103 ... Opening 103A ... First electrode 104 ... Separator 104A ... Separator precursor 110 ... Organic functional layer 110A ... Positive Hole injection layer, 110B ... organic light emitting layer, 110C ... electron transport layer, 111 ... counter electrode, 112 ... first mask, 112A ... first shielding part, 112B ... first opening, 113 ... wiring layer, 114 ... filling layer , 120 ... current supply line, 121 ... connection port, 500 ... mobile phone body, 501 ... display unit, 600 ... information processing device, 601 ... input unit, 602 The information processing apparatus main body, 603 ... display unit, 700 ... watch body, 701 ... display unit.

Claims (14)

A method of manufacturing an organic electroluminescence device comprising: a first electrode; a second electrode; and an organic functional layer disposed between the first electrode and the second electrode on a substrate,
Forming a plurality of the first electrodes arranged in a first direction on the substrate;
Forming a current supply line on the substrate;
A cross-sectional shape in a short direction on the substrate has a reverse taper type in which a width closer to the substrate is narrower than a width on a side away from the substrate, and the first shape in the plan view of the substrate is Forming two island-shaped separators extending along the direction and arranged to sandwich the plurality of first electrodes;
Applying a liquid organic functional layer precursor on the substrate and then solidifying it to form an organic functional layer;
A step of overlapping a first mask having a first opening with the substrate so that the first opening overlaps at least one of the first electrodes in a plan view of the substrate;
Using a vapor phase method to form an island-shaped second electrode at a position that overlaps a part of the organic functional layer by the first mask and is separated from the two separators;
Using the second electrode as a mask, removing a part of the organic functional layer, and separating the organic functional layer located on the first electrode into an island shape while being separated from the two separators;
In a second mask having a shielding part and a second opening part, the second opening part overlaps the peripheral part of the substrate and the two separators in a plan view of the substrate. Overlapping the second mask with the substrate so as not to become
Forming a wiring layer that electrically connects the second electrode and the current supply line by the second mask by a vapor phase method;
A method for producing an organic electroluminescence device, comprising: A first electrode for injecting current into an organic functional layer provided on the substrate;
A separator surrounding at least one of the first electrodes in a plan view of the substrate;
A method of manufacturing an organic electroluminescence device comprising: a second electrode that covers the organic functional layer; and a current supply line that is electrically connected to the second electrode through a connection port in a plan view of the substrate. There,
Forming the current supply line on the substrate;
Forming the first electrode on the substrate;
Forming the connection port on the substrate;
A region having a reverse taper shape in which the cross-sectional shape in the direction connecting the inner side and the outer side of the separator has a narrower width closer to the substrate than the width away from the substrate, and includes the upper side of the current supply line Forming the separator in
Applying a liquid organic functional layer precursor to the substrate surface, then solidifying and forming an organic functional layer;
In a plan view of the substrate, the first shielding part is arranged to overlap at least a part of the separator and the connection port, and the first opening is arranged to overlap the area including the first electrode. A step of superimposing a first mask having a pattern on the substrate while maintaining the positional relationship described above;
Using a vapor phase method, forming a second electrode in a region that is disposed so as to overlap with a part of the organic functional layer and separated from the separator;
Opening the organic functional layer using the second electrode as a mask;
A second mask provided with a second pattern, wherein the second opening includes a second pattern for electrically connecting the second electrode and the connection port in a plan view of the substrate; Forming a wiring layer based on the second pattern by a vapor phase method after overlapping the substrate while maintaining the positional relationship;
A method for producing an organic electroluminescence device, comprising:   3. The method of manufacturing an organic electroluminescence device according to claim 1, wherein the first electrode is lyophilic with respect to the organic functional layer precursor, and the substrate is formed by an insulating layer having an opening. A method for producing an organic electroluminescent device, characterized in that the organic electroluminescent device is enclosed in a plane direction.   4. The method of manufacturing an organic electroluminescence device according to claim 1, wherein the first electrode is arranged in a line along the separator. 5. Manufacturing method.   5. The method of manufacturing an organic electroluminescence device according to claim 1, further comprising a step of reducing the width of the separator after the second electrode is formed. A method for manufacturing an electroluminescence device.   6. The method of manufacturing an organic electroluminescent device according to claim 5, wherein the step of reducing the width of the separator is performed simultaneously with the step of removing a part of the organic functional layer. Production method.   7. The method of manufacturing an organic electroluminescence device according to claim 1, further comprising a step of filling at least a gap between the separator and the organic functional layer with a filling layer. A method for manufacturing an electroluminescence device.   8. The method of manufacturing an organic electroluminescence device according to claim 7, wherein the filling layer includes at least one of a desiccant or a moisture permeation preventive agent. An organic electroluminescence device having an organic functional layer including at least a light emitting layer,
A first electrode provided on a substrate;
The organic functional layer provided on the first electrode;
A separator that divides the organic functional layer with respect to a planar direction of the substrate and is disposed at a position separated from the organic functional layer;
A packed layer filling at least a space between the separator and the organic functional layer;
A second electrode disposed at a position facing at least the first electrode across the organic functional layer;
A wiring layer electrically connected to the second electrode and supplying a current to the second electrode;
An organic electroluminescence device comprising:   10. The organic electroluminescence device according to claim 9, further comprising a current supply line electrically connected to the wiring layer between the separator and the substrate with respect to a thickness direction. Electroluminescence device.   11. The organic electroluminescence device according to claim 9, wherein the filling layer includes at least one of a desiccant or a moisture permeation preventing agent.   An organic electroluminescence device according to any one of claims 9 to 11 or an organic electroluminescence device produced by the method for producing an organic electroluminescence device according to any one of claims 1 to 8. Electronic equipment characterized by   An organic electroluminescence device according to any one of claims 9 to 11 or an organic electroluminescence device produced by the method for producing an organic electroluminescence device according to any one of claims 1 to 8. An optical writing head characterized by.   An image forming apparatus comprising the optical writing head according to claim 13.

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