JP2010157612A - Flotation conveyance device and flotation conveyance method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To save the trouble and cost needed for maintenance of a flotation conveyance device 1 by detecting a substrate W and a flotation unit 39 coming into contact with each other without forming a conductive film on a top surface of a flotation unit 39 or a backside of the substrate w. <P>SOLUTION: The flotation unit 39 is arranged on a device frame 3 in a conveyance direction, and the device frame 3 is provided with an AE sensor which detects an elastic sound wave generated due to the contact of the substrate W with the flotation unit 39. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a levitation conveyance device and a levitation conveyance method for levitating and conveying a substrate such as a glass substrate in the conveyance direction (conveyed in a floated state).

   In recent years, in the field of clean conveyance, various developments have been made on levitation conveyance devices. The configuration and the like of a typical levitation conveyance device will be described as follows.

  That is, a general levitation conveyance apparatus includes an apparatus frame, and the apparatus frame extends in the conveyance direction. The apparatus frame is provided with a transport mechanism that transports a substrate such as a glass substrate in the transport direction.

  In the apparatus frame, a plurality of levitation units that levitate the substrate using the pressure of compressed air (air) as a levitation gas are arranged at intervals in the transport direction. Further, the interior of each floating unit is connected to an air supply source such as a fan that supplies compressed air, and a nozzle that ejects compressed air is formed on the top surface (top surface) of each floating unit.

  Accordingly, the transport mechanism is appropriately operated in a state where air is ejected from the nozzles of the plurality of floating units. As a result, the substrate can be floated and transported in the transport direction (conveyed in a state of being floated).

By the way, it is necessary to properly maintain the levitation conveyance device such as adjusting the amount of compressed air ejected from the nozzle of the levitation unit so that contact (interference) between the substrate and the levitation unit does not occur. Therefore, when performing maintenance of the levitation transport device, as shown in Patent Document 1, detection of continuity (presence / absence of conduction) between the unit-side conductive film of the levitation unit and the substrate-side conductive film of the measurement substrate is detected. Thus, the contact (presence / absence of contact) between the substrate and the floating unit is detected.
JP 2007-76836 A

  However, in order to detect the contact between the substrate and the floating unit by the method shown in Patent Document 1, a unit side conductive film is formed on the upper surface (front surface) of the floating unit and the substrate side is formed on the rear surface of the measurement substrate. There is a problem that a conductive film must be formed, and maintenance and maintenance costs of the levitation transport apparatus are expensive.

  Then, an object of this invention is to provide the levitation conveyance apparatus and levitation conveyance method of a novel structure which can solve the above-mentioned problem.

  A first feature of the present invention is a levitation transport apparatus that floats and transports a substrate in a transport direction (transports in a levitated state). The transport mechanism is provided in an apparatus frame and transports a substrate in the transport direction; The frame is disposed along the conveying direction, and the inside is connected to a floating gas supply source that supplies the floating gas, and a nozzle that ejects the floating gas is formed on the top surface (top surface), and the pressure of the floating gas is used. The present invention includes a plurality of levitation units that levitate the substrate and a sensor that detects sound waves or vibration caused by contact (interference) between the substrate and the levitation unit.

  In the claims and specification of the present application, “provided” means not only directly provided but also indirectly provided via an interposed member such as a bracket. Similarly, “arranged” means not only directly disposed but also indirectly disposed via an interposed member such as a bracket. “Floating gas” means compressed air (air), argon gas, nitrogen gas and the like.

  According to the first feature, the transport mechanism is appropriately operated in a state where the floating gas is ejected from the nozzles of the plurality of the floating units. Thereby, the substrate can be levitated and conveyed in the conveyance direction.

  By monitoring the sensor (output of the sensor) during the floating transportation of the substrate, the contact between the substrate and the floating unit based on the detection signal (output signal) output from the sensor (presence of contact) Can be detected. In other words, a conductive coating is provided on the upper surface of the floating unit or the back surface of the substrate (including the back surface of the measurement substrate) in order to include the sensor for detecting sound waves or vibration caused by contact between the substrate and the floating unit. The contact between the substrate and the floating unit can be detected without forming.

  A second feature of the present invention is a levitation transport method in which a substrate is floated and transported in the transport direction (transported in a floated state). Sound waves or vibration caused by contact (interference) between the substrate and the levitation unit aligned in the transport direction And a sensor installation step of installing the sensor on a substrate, and after the completion of the sensor installation step, the sensor (output of the sensor) is monitored and the levitation unit is floated from the nozzles of the plurality of levitation units. The gist of the present invention is to include a levitation conveyance process in which the substrate is levitated and conveyed in the conveyance direction in a state where gas is ejected.

  According to the second feature, during the floating transportation of the substrate, by monitoring the sensor, the contact between the substrate and the floating unit based on the detection signal (output signal) output from the sensor (presence of contact) Can be detected. In other words, since the sensor for detecting sound waves or vibrations due to contact between the substrate and the floating unit is installed on the substrate, it is electrically conductive on the top surface of the floating unit or the back surface of the substrate (including the back surface of the measurement substrate). The contact between the substrate and the floating unit can be detected without forming a conductive film.

  According to the present invention, the contact between the substrate and the levitation unit can be detected without forming a conductive film on the upper surface of the levitation unit or the back surface of the substrate. And can reduce costs.

(First embodiment)
A first embodiment will be described with reference to FIGS. 1 to 5.

  Here, FIG. 1 is a partial side view of the levitation conveyance apparatus according to the first embodiment, FIG. 2 is a front view of the levitation conveyance apparatus according to the first embodiment, and FIG. 3 is a levitation conveyance according to the first embodiment. 4 is a partial plan view of the apparatus, FIG. 4 is a cross-sectional view taken along the line IV-IV in FIG. 1, and FIG. 5 is a flowchart showing a contact detection process between the substrate and the floating unit. In the drawings, “FF” indicates the forward direction, “FR” indicates the backward direction, “L” indicates the left direction, and “R” indicates the right direction.

  As shown in FIGS. 1 to 4, the levitating and conveying apparatus 1 according to the first embodiment is an apparatus that levitates and conveys a substrate W such as a glass substrate in the conveying direction (front and rear direction) (conveys in a levitated state). A plurality of device frames (support frames) 3 arranged in the front-rear direction are provided. Each device frame 3 includes a support base 5, a plurality of support columns 7 provided integrally below the support support 5, and a plurality of reinforcing members 9 provided so as to be connected to the plurality of support columns 7. And. The levitation conveyance device 1 may include a single device frame extending in the front-rear direction instead of the plurality of device frames 3 arranged in the front-rear direction.

  The plurality of support tables 5 are provided with a transport mechanism (transport unit) 11 that transports the substrate W in the transport direction. The specific configuration of the transport mechanism 11 is as follows.

  That is, a pair of support arms 13 are provided in the vicinity of the left end portion of each support base 5 at intervals in the front-rear direction, and each support arm 13 supports one end face (left end face) of the substrate W. A first conveying roller 15 is provided. In other words, a plurality of first conveying rollers 15 are provided in the vicinity of the left end portions of the plurality of device frames 3 with intervals in the front-rear direction via the plurality of support arms 13. Here, each first transport roller 15 is a free roller that is rotatable around a vertical (vertical) axis.

  A moving air cylinder 17 is provided in the vicinity of the right end portion of each support base 5, and each moving air cylinder 17 moves to the cylinder main body 19 fixed to the support base 5 and the cylinder main body 19 in the left-right direction. The piston rod 21 is provided so as to be possible. Further, a slider 23 is provided in the cylinder body 19 of each moving air cylinder 17 so as to be movable in the left-right direction, and the piston rod 21 in each moving air cylinder 17 is connected to an appropriate position of the corresponding slider 23. It is. Further, a second transport roller 25 that supports the other end surface (right end surface) of the substrate W is provided at the left end portion of each slider 23 so as to be rotatable around a vertical axis. In other words, a plurality of second transport rollers 25 are provided in the vicinity of the right end portions of the plurality of apparatus frames 3 with a plurality of moving air cylinders 17 and a plurality of sliders 23 spaced in the front-rear direction. The second transport rollers 25 are moved in the left-right direction integrally with the slider 23 by the operation of the moving air cylinder 17. The right end of each slider 23 is provided with a rotation motor 27 that rotates the corresponding second transport roller 25, and the motor shaft (not shown) of each rotation motor 27 corresponds to the corresponding second. The roller shaft of the conveying roller 25 is interlocked and connected.

  Instead of the first transport roller 15 as a free roller and the second transport roller 25 as a driving roller that is rotated by driving of a motor (rotation motor 27), the first transport roller 15 is used as a drive roller and the second transport roller is rotated. The roller 25 may be a free roller, or the first transport roller 15 and the second transport roller 25 may be drive rollers. Further, instead of the transport mechanism 11 having a plurality of first transport rollers 15 and a plurality of second transport rollers 25, another transport having a clamper that holds the edge of the substrate W and can move in the front-rear direction. A mechanism or the like may be used.

  Each support base 5 is provided with a chamber 29 for storing compressed air (air) as a floating gas at an interval in the front-rear direction, and each chamber 29 extends in the left-right direction. In addition, a plurality of introduction holes 31 through which compressed air can be introduced are formed through the lower surface of each chamber 29, and a plurality of communication holes 33 are formed through the upper surface of each chamber 29. Yes. Furthermore, a fan (a fan filter unit in the embodiment of the present invention) 35 as a floating gas supply source that supplies compressed air to the inside of the chamber 29 is provided at the peripheral portion of each introduction hole 31 in each chamber 29. A bracket 37 is provided.

  A hollow levitation unit 39 that levitates the substrate W by using the pressure of compressed air is provided at the peripheral edge of each communication hole 33 in each chamber 29. A plurality of levitation units 39 are provided along the front-rear direction and the left-right direction via the plurality of chambers 29 and the like. Further, the side view shape and the front view shape of each levitation unit 39 are each T-shaped, and the interior of each levitation unit 39 is connected to the fan 35 via the chamber 29. A frame-like nozzle 41 for ejecting compressed air is formed through the upper surface (top surface) of each levitation unit 39, and each nozzle 41 is formed as disclosed in JP-A-2006-182563. Further, it is inclined to the unit center side (center side of the levitation unit 39) with respect to the vertical direction (direction perpendicular to the upper surface of the levitation unit 39). Instead of the frame-shaped nozzle 41 penetratingly formed on the upper surface of each floating unit 39, a plurality of slit-shaped or round hole-shaped nozzles may be formed to penetrate.

  Next, the main part of the embodiment of the present invention will be described.

  An appropriate support 7 in each device frame 3 is provided with an AE sensor 43 that detects elastic sound waves due to contact (interference) between the substrate W and the floating unit 39, in other words, a plurality of device frames 3 have a plurality of device frames 3. A plurality of AE sensors 43 are arranged at intervals in the transport direction. Although not shown, the AE sensor 43 is disposed on the back side of the sensor main body (sensor case), a receiving plate provided in the sensor main body and in direct contact with the support column 7, and in the sensor main body. And a piezoelectric element. Note that the AE sensor 43 may be provided in the floating unit 39 or the chamber 29 instead of being provided in the appropriate support 7 in the apparatus frame 3. When the AE sensor 43 is provided in the chamber 29, the support in the apparatus frame 3 is supported. This is indirectly and indirectly provided on the table 5.

  A controller 45 is disposed in the vicinity of the apparatus frame 3. The controller 45 includes a memory that stores a control program and the like, and a CPU that executes processing of the control program, and includes a plurality of AE sensors. 43 is electrically connected. The CPU of the controller 45 has functions as a filtering processing unit and a contact detection processing unit, as will be described later.

  Then, the effect | action and effect by embodiment of this invention are demonstrated.

  By operating the plurality of fans 35 as appropriate and supplying the compressed air to the inside of the plurality of floating units 39 through the chamber 29, the compressed air is ejected from the nozzles 41 of the plurality of floating units 39. Then, under a state where compressed air is ejected from the nozzles 41 of the plurality of floating units 39, the plurality of second conveying rollers 25 are synchronously moved to the left by the operation of the plurality of moving air cylinders 17, and The plurality of second transport rollers 25 are rotated synchronously by driving the plurality of rotation motors 27. Accordingly, the plurality of first transport rollers 15 and the plurality of second transports are generated while generating a substantially uniform pressure pool layer (air pool layer) S (see FIG. 4) between the substrate W and the plurality of floating units 39. The substrate 25 can be floated and conveyed in the conveyance direction while supporting the substrate W from both sides by the cooperation of the rollers 25.

  During the floating transportation of the substrate W, the plurality of AE sensors 43 (outputs of the plurality of AE sensors 43) are monitored, and the substrate W and the floating uni are determined based on the detection signals (output signals) output from the AE sensors 43. The contact with 39 (the presence or absence of contact) can be detected. Specifically, as shown in FIG. 5, the CPU (filtering processing unit) of the controller 45 receives detection signals (output signals) output by a plurality of AE sensors (step 1 in FIG. 5), and detects them. The signal is filtered to remove noise (step 2 in FIG. 5). Then, the CPU (contact detection processing unit) of the controller 45 executes a contact detection process based on the detection signal from which noise has been removed, and if the detection signal from which noise has been removed exceeds a predetermined threshold, the substrate If it is determined that there is contact (interference) between W and the floating uni and 39, and if the detection signal from which noise is removed does not exceed a predetermined threshold, contact between the substrate W and the floating uni and 39 is It is judged that there is no.

  In short, in order to provide a plurality of AE sensors 43 for detecting elastic sound waves due to contact between the substrate W and the floating uni 39, the conductive surface is electrically connected to the upper surface of the floating unit 39 or the back surface of the substrate W (including the back surface of the measurement substrate). The contact between the substrate W and the floating uni 39 can be detected without forming a conductive film.

  Therefore, according to the embodiment of the present invention, it is possible to reduce the labor and cost required for the maintenance of the levitation conveyance device 1. In particular, since a plurality of AE sensors 43 are arranged at intervals in the transport direction, the floating unit 39 in contact with the substrate W can be specified to some extent, and the labor required for maintenance of the floating transport device is further reduced. can do.

(Second Embodiment)
A second embodiment will be described with reference to FIG.

  Here, FIG. 6 is a diagram for explaining the levitation conveyance method according to the second embodiment. In the drawings, “FF” indicates the forward direction, “FR” indicates the backward direction, “L” indicates the left direction, and “R” indicates the right direction.

  The levitation transfer method according to the second embodiment uses the levitation transfer apparatus 1 according to the first embodiment (in the case of the second embodiment, a plurality of AE sensors 43 are omitted), and the substrate W is transferred in the transfer direction. This is a method of levitation conveyance (conveyance in a floated state) in the front-rear direction, and includes (i) a sensor installation step and (ii) a levitation conveyance step. And the concrete content of each process is as follows.

(i) Sensor Installation Step An AE sensor 47 that detects elastic sound waves due to contact between the substrates W arranged in the transport direction and the floating uni 39 is prepared, and the AE sensor 47 is installed on the substrate W. The AE sensor 47 is electrically connected to the controller 45 wirelessly.

(ii) Levitation conveyance process After the (i) sensor installation process is completed, the CPU of the controller 45 monitors the AE sensor 47 (the output of the AE sensor 47) and jets compressed air from the nozzles 41 of the plurality of levitation units 39. In this state, the substrate W is levitated and conveyed in the conveyance direction.

  Then, the effect | action and effect by 2nd Embodiment are demonstrated.

  During the floating conveyance of the substrate W, the CPU of the controller 45 monitors the AE sensor 47, so that the contact between the substrate W, the floating uni and 39 (contact) based on the detection signal (output signal) output from the AE sensor 47. Presence / absence) can be detected. In other words, since the AE sensor 47 for detecting the elastic sound wave due to the contact between the substrate W and the floating uni 39 is installed on the substrate W, the upper surface of the floating unit 39 or the rear surface of the substrate W (the rear surface of the measurement substrate is It is possible to detect contact between the substrate W, the floating uni, and 39 without forming a conductive film.

  Therefore, according to the second embodiment, similarly to the effect of the first embodiment, it is possible to reduce the labor and cost required for the maintenance of the levitation transport apparatus 1.

  The present invention is not limited to the description of the above-described embodiment. For example, instead of the AE sensor 43 (or 47), an acceleration pickup that detects acceleration of vibration caused by contact between the substrate W, the floating uni, and 39 is used. The present invention can be implemented in various other modes such as using a microphone that detects sound waves caused by contact between the substrate W and the floating uni 39. Further, the scope of rights encompassed by the present invention is not limited to these embodiments.

It is a partial side view of the levitation conveyance apparatus which concerns on 1st Embodiment, Comprising: The conveyance mechanism is abbreviate | omitted. It is a front view of the levitation conveyance device concerning a 1st embodiment. It is a partial top view of the levitation conveyance apparatus concerning a 1st embodiment. It is sectional drawing along the IV-IV line in FIG. It is a flowchart which shows the contact detection process of a board | substrate and a floating unit. It is a figure explaining the levitation conveyance method concerning a 2nd embodiment.

Explanation of symbols

W substrate S pressure accumulation layer 1 levitation transport device 3 device frame 11 transport mechanism 15 first transport roller 17 moving air cylinder 23 slider 25 second transport roller 27 motor for rotation 29 chamber 35 fan 39 levitation unit 41 nozzle 43 AE sensor 45 Controller 47 AE sensor

Claims (6)

In a levitation transport device that levitates and transports a substrate in the transport direction,
A transport mechanism provided in the apparatus frame for transporting the substrate in the transport direction;
The apparatus frame is disposed along the transport direction, the inside is connected to a floating gas supply source for supplying floating gas, and a nozzle for jetting the floating gas is formed on the upper surface, and the substrate is formed using the pressure of the floating gas. A plurality of levitation units to levitate,
And a sensor for detecting a sound wave or a vibration caused by contact between the substrate and the floating unit.   The levitation conveyance apparatus according to claim 1, wherein the number of sensors is plural, and the plurality of sensors are arranged at intervals in the conveyance direction.   The levitation transport according to claim 1, wherein the sensor is an AE sensor that is provided in the apparatus frame or the levitation unit and detects an elastic wave due to contact between a substrate and the levitation unit. apparatus.   3. The levitation according to claim 1, wherein the sensor is an acceleration pickup that is provided in the apparatus frame or the levitation unit and detects acceleration of vibration caused by contact between a substrate and the levitation unit. Conveying device.   The levitation conveyance apparatus according to claim 1, wherein the sensor is a microphone that detects a sound wave generated by contact between a substrate and the levitation unit. In the levitation transport method that levitates and transports the substrate in the transport direction,
Preparing a sensor for detecting sound waves or vibrations due to contact between the substrate and the floating units aligned in the transport direction, and installing the sensor on the substrate; and
A levitation conveyance step of levitation conveyance of the substrate in the conveyance direction in a state in which levitation gas is ejected from the nozzles of the plurality of levitation units while monitoring the sensor after the sensor installation step is completed. A floating transportation method characterized by the above.

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