JP2010135429A - Method and device for inspecting air leak of electronic component device - Google Patents

Abstract

In a conventional air leak inspection apparatus, the quality of a filter provided in an opening that communicates the inside and the outside of a sealed case cannot be determined, so that the inspection process of an electronic component device becomes complicated. It was.
A breathing hole 12e that communicates the inside and outside of an internal space 1a of the sealed case 10 is formed in a sealed case 10 that houses a circuit board 20 on which electronic components are mounted. Is an air leak inspection method for the electronic component device 1 that is configured to be blocked by a filter 16 that allows gas to pass therethrough, and is provided with a pressure sensor 58 outside the filter 16 in the breathing hole 12e, The test air is pumped into the internal space 1a, and the pressure change in the internal space 1a when the test air is pumped is monitored by the pressure sensor 58, along with the air leak test of the electronic component device 1, Whether the characteristics of the filter 16 are good or bad is determined.
[Selection] Figure 3

Description

  According to the present invention, an opening that communicates the inside and the outside of the hermetic case is formed in a hermetic case that houses a circuit board on which electronic components are mounted. The liquid is blocked from the opening and gas can pass therethrough. The present invention relates to an air leak inspection method and apparatus for an electronic component device configured to be closed by a filter.

  Conventionally, electronic component devices and the like installed in the engine room of a vehicle are configured by housing a circuit board on which electronic components are mounted in a case. Since the air in the case expands and contracts, the case for storing the circuit board is configured as a sealed case, and an opening is formed in the case to connect the inside and the outside. The gas is blocked by a filter that allows passage of gas, and is configured to be able to balance the internal pressure and the external pressure of the case while ensuring waterproofness to the inside of the case.

  As described above, in an electronic component device having a waterproof function, an air leak inspection is performed to detect leakage of air pressure fed into the case in order to inspect the sealability of the case. For air leak inspection, air is pumped into the case to be inspected, and then the pressure gauge method of detecting the pressure drop in the case with a pressure gauge, etc., or air is pumped into the case to be inspected and the reference tank Later, a differential pressure gauge method for detecting a pressure drop in a case to be inspected as a differential pressure with respect to a reference tank is known.

  In Patent Document 1, an opening that communicates the inside and the outside is formed on the side surface of a sealed case, and in the electronic control device in which a filter is provided in the opening, a confidential inspection device is connected to the opening and sealed by inspection air. It is disclosed to perform a confidential inspection of the case.

Further, in the electronic component device, as in the electronic component device 1 shown in FIG. 5, the sealed case 10 that houses the circuit board 20 includes the base plate 11 that forms the bottom surface of the case, the side surface of the case, and the base There is a housing member 12 joined to the plate 11 and a lid member 13 constituting the ceiling surface of the case and joined to the housing member 12.
A joint 11a projects from the base plate 11 in accordance with the shape of the housing member 12, and the base plate 11 and the lower end surface of the housing member 12 are bonded together by an adhesive 14a applied to the joint 11a. Yes. The joint between the base plate 11 and the housing member 12 is sealed with the adhesive 14a.
A seal member 15 is interposed between the upper surface of the housing member 12 and the lid member 13, and the joint between the housing member 12 and the lid member 13 is sealed by the seal member 15.
Thus, in the sealed case 10, the base plate 11, the housing member 12, and the lid member 13 are brought into close contact with each other to form a sealed internal space 1 a.

On one side of the housing member 12, a connector 12 a is integrally formed as an external connection terminal of the circuit board 20 joined to the base plate 11.
The connector 12a includes a connection portion 12b for connecting to an external device, and a connection pin 12c that penetrates the housing member 12 and is disposed from the connection portion 12b to the interior space 1a.

In addition, a partition wall 12d extends from one side surface of the housing member 12 toward the inside of the sealed case 10, and a distal end portion of the partition wall 12d is bonded to the joint portion 11b of the base plate 11 and an adhesive 14b. .
The joint between the partition wall 12d of the housing member 12 and the base plate 11 is sealed with an adhesive 14b, and the space surrounded by the partition wall 12d and the base plate 11 is isolated from the internal space 1a. It is configured as 1b.
The partition wall 12d is formed with a breathing hole 12e communicating the internal space 1a and the breathing chamber 1b. The breathing hole 12e is blocked by a filter 16 that blocks liquid and allows gas to pass through. . The filter 16 is attached to the surface of the partition wall 12d on the breathing chamber 1b side.
The base plate 11 is formed with a communication hole 11e that allows the breathing chamber 1b to communicate with the outside.

As described above, in the electronic component device 1, the breathing chamber 1b communicates with the outside through the communication hole 11e, and the breathing hole 12e communicating the breathing chamber 1b and the internal space 1a is closed by the filter 16. Therefore, air can flow in and out between the internal space 1a of the sealed case 10 and the outside through the filter 16 and the communication hole 11e, and water and dust can be transferred from the outside to the internal space 1a by the filter 16. Can be prevented from entering.
Further, in a portion where the pin 12c of the portion where the connector 12a is formed on one side surface of the housing member 12 penetrates, there is a slight amount of air between the internal space 1a and the outside (connecting portion 12b of the connector 12a). Inflow and outflow are possible.

In the electronic component device 1 configured as described above, the air leak inspection for inspecting the airtightness of the internal space 1a of the airtight case 10 has been conventionally performed as follows.
As shown in FIG. 6, in the air leak test, the lid member 13 is not joined to the housing member 12 of the sealed case 10 (the base member 11 and the housing member 12 are joined, and the upper surface of the sealed case 10 is released. This is performed on the electronic component device 1 in the state).
An air leak inspection apparatus 150 that performs an air leak inspection closes an upper surface closing member 151 that closes the upper surface of the sealed case 10, a connector portion closing member 152 that closes a connection portion 12b of the connector 12a, and the communication hole 11e of the base plate 11. And a communication hole closing member 153.

A sealing member 151a such as a urethane pad is affixed to the surface of the upper surface closing member 151 that contacts the housing member 12, and the upper surface closing member 151 contacts the housing member 12 via the sealing member 151a. . Thereby, the upper surface closing member 151 airtightly closes the upper surface of the sealed case 10.
In addition, an air introduction hole 151b that communicates the internal space 1a and the outside is opened in the upper surface closing member 151 and the seal member 151a.
A seal member 152a such as a urethane pad is affixed to the surface of the connector portion closing member 152 that contacts the connector 12a. The connector portion closing member 152 contacts the connector 12a via the seal member 152a. . Thereby, the connector part closing member 152 airtightly closes the connector 12a.
In addition, an air introduction hole 152b that communicates the internal space 1a and the outside is opened in the connector portion closing member 152 and the seal member 152a.
A seal member 153a such as a urethane pad is affixed to the surface of the communication hole closing member 153 that contacts the communication hole 11e, and the communication hole closing member 153 airtightly closes the communication hole 11e. .

The air leak inspection apparatus 150 is connected to the air introduction hole 151b of the upper surface closing member 151 and the seal member 151a, and the air introduction hole 152b of the connector part closing member 152 and the seal member 152a. An inspection air application device 156 that pumps air into the internal space 1a through the hole 152b is provided.
Further, the air leak inspection apparatus 150 includes a pressure sensor 158 connected to a middle portion of the air pipe 157 connecting the inspection air application apparatus 156, the air introduction hole 151b, and the air introduction hole 152b. By 158, it is comprised so that the pressure in the internal space 1a at the time of applying the air in the internal space 1a from the test | inspection air application apparatus 156 may be detected.

Japanese Patent No. 3763354

When the air leak inspection of the electronic component device 1 configured as described above is performed by the air leak inspection device 150, the communication hole 11e communicating with the breathing chamber 1b is airtightly closed by the communication hole closing member 153. Since the air supplied into the internal space 1a does not leak outside through the communication hole 11e, the pressure in the internal space 1a is interposed between the internal space 1a and the communication hole 11e. It does not change depending on the 16 states.
That is, the filter 16 is broken and the air in the internal space 1a can flow into the breathing chamber 1b without receiving resistance by the filter 16, or the filter 16 is clogged and the air in the internal space 1a flows into the breathing chamber. Even if it is in a state where it cannot flow into 1b, the pressure in the internal space 1a does not change compared to when the filter 16 is in a normal state without tearing or clogging.

Thus, in the air leak inspection, the pressure in the internal space 1a detected by the pressure sensor 158 does not change depending on whether the filter 16 is good or bad, so that the filter 16 is in a normal state or is defective such as tearing or clogging. It is not possible to determine whether or not there is a problem.
However, if the filter 16 is broken, water may enter from the outside into the internal space 1a through the communication hole 11e and the breathing hole 12e. If the filter 16 is clogged, the internal space 1a Since the function of balancing the pressure and the external pressure cannot be achieved, the electronic component device 1 needs to determine whether the filter 16 is good or bad.
Therefore, conventionally, a process for inspecting the quality of the filter 16 is required separately from the air leak inspection, and the inspection process for the electronic component device 1 is complicated.

  Therefore, in the present invention, when performing an air leak inspection of an electronic component device, it is possible to simultaneously determine whether the characteristics of the filter provided in the opening that communicates the inside and the outside of the sealed case are good. An air leak inspection method and apparatus for an electronic component device that can simplify the inspection process of the apparatus 1 are provided.

An electronic component case air leak inspection method and apparatus for solving the above-described problems have the following features.
That is, as described in claim 1, an opening that communicates the inside and the outside of the sealed case is formed in the sealed case that houses the circuit board on which the electronic component is mounted. Is a method for inspecting an air leak of an electronic component device that is configured by being closed with a filter that can pass through, wherein a pressure sensor is provided outside the filter in the opening, and the inspection air is pumped into the sealed case. Then, the pressure change in the sealed case when the inspection air is pumped is monitored by the pressure sensor, and the quality of the filter is judged along with the air leak inspection of the electronic component device.

  According to a second aspect of the present invention, an opening that communicates the inside and the outside of the sealed case is formed in the sealed case that houses the circuit board on which the electronic component is mounted. Is an air leak inspection device for an electronic component device that is configured to be closed by a filter that can pass through, a pressure sensor disposed outside the filter in the opening, and an inspection air in the sealed case An air applying means for pumping air, and a pressure change in the sealed case when the air for inspection is pumped into the sealed case by the air applying means is monitored by the pressure sensor to detect an air leak in the electronic component device. Along with the inspection, the quality of the filter is judged.

  ADVANTAGE OF THE INVENTION According to this invention, when performing the air leak test | inspection of an electronic component apparatus, it becomes possible to perform the quality determination of the characteristic of the filter provided in the opening part which connects the inside of an airtight case, and the exterior simultaneously, The inspection process can be simplified.

  Next, modes for carrying out the present invention will be described with reference to the accompanying drawings.

An air leak inspection apparatus 50 shown in FIG. 1 is an apparatus for performing an air leak inspection for inspecting the airtightness of the internal space 1a of the airtight case 10 in the electronic component device 1.
The electronic component device 1 to be inspected by the air leak inspection device 50 is the same as the electronic component device 1 that has already been described and is the inspection target of the conventional air leak inspection device 150. Many are omitted in this description.

As described above, in the electronic component device 1, the sealed case 10 is configured by the base plate 11, the housing member 12, and the lid member 13.
In the sealed case 10, an internal space 1 a in which the circuit board 20 is accommodated, and a breathing chamber 1 b that is isolated by the internal space 1 a and the partition wall 12 d of the housing member 12 are formed.

  As shown in FIG. 2, the lower surface of the housing member 12 is bonded to the base plate 11 with an adhesive 14a over the entire circumference, and the partition wall 12d of the housing member 12 is bonded to the base plate 11 with the adhesive 14b. ing. In this way, the respiratory chamber 1b is formed by bonding the partition wall 12d to the base plate 11 with the adhesive 14b.

The breathing hole 12e formed in the partition wall 12d is closed by a filter 16 that blocks liquid and allows gas to pass through. For example, the filter 16 is attached to the surface of the partition wall 12d on the breathing chamber 1b side.
The filter 16 can be attached to the partition wall 12d by bonding the filter 16 to the partition wall 12d with an adhesive or ultrasonically bonding the filter 16 to the partition wall 12d.

  In the sealed case 10 of the electronic component device 1, the internal space 1 a in which the circuit board 20 is accommodated is configured in a sealed structure, and the internal space 1 a is communicated with the outside through the filter 16. In addition to preventing water from entering, the internal and external pressures of the internal space 1a can be balanced even when the air in the internal space 1a expands or contracts due to changes in the environmental temperature. Yes.

Next, an air leak inspection apparatus 50 that performs an air leak inspection of the electronic component device 1 configured as described above will be described.
In the air leak inspection of the electronic component device 1, the lid member 13 is not joined to the housing member 12 of the sealed case 10 (the base member 11 and the housing member 12 are joined and the upper surface of the sealed case 10 is released). The air leak inspection device 50 includes an upper surface closing member 51 that closes the upper surface of the sealed case 10, a connector portion closing member 52 that closes the connection portion 12b of the connector 12a, and the base. A pressure sensor 58 connected to the communication hole 11e of the plate 11 is provided.

A sealing member 51a such as a urethane pad is affixed to the surface of the upper surface closing member 51 that contacts the housing member 12, and the upper surface closing member 51 contacts the housing member 12 via the sealing member 51a. . Thereby, the upper surface closing member 51 airtightly closes the upper surface of the sealed case 10.
The upper surface closing member 51 and the seal member 51a have an air introduction hole 51b communicating the internal space 1a with the outside.

A seal member 52a such as a urethane pad is affixed to the surface of the connector portion closing member 52 that comes into contact with the connector 12a, and the connector portion closing member 52 is in contact with the connector 12a via the seal member 52a. . Thereby, the connector part closing member 52 has airtightly closed the connector 12a.
The connector closing member 52 and the seal member 52a have air introduction holes 52b communicating the internal space 1a with the outside.
The pressure sensor 58 is connected to a portion of the base plate 11 where the communication hole 11e is formed via a sealing member 53a such as a urethane pad, and the pressure in the breathing chamber 1b communicating with the communication hole 11e is measured. It is configured to be detectable.

  The air leak inspection device 50 is connected to the air introduction hole 51b of the upper surface closing member 51 and the seal member 51a, and the air introduction hole 52b of the connector part closing member 52 and the seal member 52a by an air pipe 57, and the air introduction hole An inspection air application device 56 that pumps air into the internal space 1a through 51b and the air introduction hole 52b is provided.

  As shown in FIG. 3, the inspection air application device 56 includes an inspection air source 60 for generating air to be pumped into the internal space 1a, and the pressure of the air generated from the inspection air source 60 as a primary pressure P1. The primary regulator 61 to be adjusted, the primary pressure sensor 62 for detecting the air pressure adjusted by the primary regulator 61, and the air pressure adjusted to the primary pressure P1 by the primary regulator 61 are used as the primary pressure. An electropneumatic regulator 63 such as an electromagnetic proportional valve that throttles to an applied pressure P2 lower than P1, an applied pressure sensor 64 that detects the air pressure adjusted to the applied pressure P2 by the electropneumatic regulator 63, and an applied pressure P2. An air tank 65 for storing air (hereinafter referred to as “inspection air”), and an inspection solenoid 66 for switching supply / stop of inspection air to the internal space 1a. Eteiru.

  In the air leak inspection of the electronic component device 1, the pressure change in the internal space 1a when the inspection air is pumped into the internal space 1a through the air introduction holes 51b and 52b by the air leak inspection device 50 configured as described above, It is measured via the filter 16 (that is, the pressure change in the respiratory chamber 1b is measured).

Specifically, the air leak inspection of the electronic component device 1 is performed as follows.
As shown in FIG. 4, first, with the inspection solenoid 66 closed, the pressure of the air generated by the inspection air source 60 is adjusted by the primary regulator 61 to about 100 kpa, which is the primary pressure P1, and further electropneumatic. The regulator 63 adjusts the inspection air to about 40 kpa, which is the applied pressure P2.
Next, the inspection solenoid 66 is switched from the closed state to the open state, the inspection air is applied to the internal space 1a through the air introduction holes 51b and 52b, and the pressure in the breathing chamber 1b when the inspection air is applied is measured by the pressure sensor 58. To detect.

  In an application section that is a period in which the inspection air is applied to the internal space 1a (a period from when the inspection solenoid 66 is opened to when it is closed), the detected pressure P3 by the pressure sensor 58 is due to an impact due to the application of the inspection air. In the equilibration waiting section after the inspection solenoid 66 is closed after the inspection air is applied until the predetermined time elapses, the detected pressure P3 detected by the pressure sensor 58 gradually decreases, and the equilibration waiting section. In the air leak inspection section that follows, the pressure P3 detected by the pressure sensor 58 is constant.

In the air leak inspection performed using the leak inspection apparatus 50, the change in the detected pressure P3 is monitored by the pressure sensor 58 to determine whether the filter 16 is good or bad in the application section, and the air leak in the internal space 1a in the air leak inspection section. Perform an inspection.
In the application section, when the inspection solenoid 66 is opened and the application of inspection air is started, the pressure P3 detected by the pressure sensor 58 rises (rises) and falls after reaching the first peak (falls). . Thereafter, the detected pressure P3 detected by the pressure sensor 58 repeats rising and falling again and has a wavy shape. That is, the value of the detected pressure P3 in the application interval varies due to the control accuracy of the air pressure of the electropneumatic regulator 63.
Then, the quality of the filter 16 is determined based on the length of the rising time ta from the start of application of the inspection air until the pressure detected by the pressure sensor 58 rises and reaches the first peak.

Here, when the air in the internal space 1a passes through the filter 16 to the breathing chamber 1b, the air pressure in the breathing chamber 1b by the pressure sensor 58 is detected by the pressure sensor 58 because the filter 16 receives resistance. Compared to the case where the air pressure is directly detected, the rise is delayed.
In other words, the pressure of the air in the internal space 1a at the start of application of inspection air rises quickly (see “internal space pressure P4” in FIG. 4), but the rise time ta of the pressure P3 detected by the pressure sensor 58 is the filter The resistance of 16 is slower than the case of the internal space pressure P4.
Therefore, whether the filter 16 is good or bad can be determined based on whether the rising time ta of the pressure P3 detected by the pressure sensor 58 is within a predetermined range.

  The internal space pressure P4 is connected to an intermediate portion of an air pipe 157 connecting the inspection air application device 156, the air introduction hole 151b, and the air introduction hole 152b as in the conventional leak inspection device 150. It is equivalent to the pressure in the internal space 1a detected by the pressure sensor 158.

The predetermined range of the rising time ta is, for example, applying inspection air to the electronic component device 1 serving as a master on which a filter 16 that is known to be in a normal state without tearing or clogging is installed, It can be set based on the rising time ta of the pressure P3 detected by the pressure sensor 58 at that time.
If the rise time ta of the pressure P3 detected by the pressure sensor 58 when the inspection air is applied to the electronic component device 1 to be inspected is within the set predetermined range, the electronic component device 1 is concerned. It is determined that the filter 16 is a non-defective product.

  If the rising time ta of the detected pressure P3 is shorter than the predetermined range, that is, if the rising of the detected pressure P3 is fast, it is determined that the filter 16 is broken and has an abnormal defect. Conversely, if the rising time ta of the detected pressure P3 is longer than the predetermined range, that is, if the rising of the detected pressure P3 is late, it is determined that the filter 16 is clogged and defective.

That is, when the detection pressure P3 rises faster than normal, air in the internal space 1a flows into the breathing chamber 1b without receiving the resistance of the filter 16, and thus the filter 16 Judge that there is a defect in the tearing abnormality.
Further, the rising of the detected pressure P3 is slower than normal, which means that the air in the internal space 1a flows into the respiratory chamber 1b while receiving a resistance higher than that of the filter 16 (one of the filters 16). The filter 16 is clogged), or the air in the internal space 1a does not flow into the respiratory chamber 1b (the filter 16 is totally clogged). Judge that there is a defect.

In the air leak inspection of the internal space 1a performed in the air leak inspection section, the presence or absence of air leak is determined based on the degree of decrease in the detected pressure P3 by the pressure sensor 58 in the air leak inspection section.
Specifically, the presence or absence of an air leak is determined based on whether or not the degree of decrease in the detected pressure P3 is greater than a predetermined threshold value set in advance. For example, if the degree of decrease in the detected pressure P3 is greater than the threshold value, sealing is performed. It is determined that an air leak has occurred in the case 10, and it is determined that no air leak has occurred in the sealed case 10 if the degree of decrease in the detected pressure P3 is not more than the threshold value.

Thus, in the air leak inspection apparatus 50, the airtight case 10 that houses the circuit board 20 is provided with the breathing hole 12e that is an opening that communicates the inside and the outside of the internal space 1a in the airtight case 10, and the breathing hole When performing an air leak test on the electronic component device 1 configured by closing the filter 12e with the filter 12e, a pressure sensor 58 is connected to the communication hole 11e of the base plate 11 located outside the filter 16 in the breathing hole 12e. The test air is pumped into the internal space 1a of the sealed case 10, and the pressure change in the internal space 1a when the test air is pumped is monitored by the pressure sensor 16 through the filter 16, and the electronic component device In addition to the air leak test of No. 1, the quality of the filter 16 such as the presence or absence of breakage or clogging is determined. There.
Thereby, when performing the air leak inspection of the electronic component device 1, it is possible to determine the quality of the filter 16 at the same time, and the inspection process of the electronic component device 1 can be simplified.

  Further, in the configuration in which the breathing chamber 1b is formed by bonding the partition wall 12d extending from one side surface of the housing member 12 to the base plate 11 as in the electronic component device 1, the partition wall 12d and the base plate 11 are formed. If it is not sealed by the adhesive 14 (that is, if the breathing chamber 1b is not isolated from the internal space 1a and communicates between the partition wall 12d and the base plate 11), the communication hole 11e allows the inside of the breathing chamber 1b. It is important to inspect the sealing state of the partition wall 12d and the base plate 11 with the adhesive 14 because the water that has entered the interior enters the internal space 1a from between the partition wall 12d and the base plate 11.

When air leak inspection is performed by the air leak inspection apparatus 50 as described above, the detection pressure P3 is detected by the pressure sensor 58 connected to the communication hole 11e of the base plate 11. If the seal with the adhesive 14 to the base plate 11 is not complete and air can flow from the internal space 1a through the space between the partition wall 12d and the base plate 11 into the respiratory chamber 1b, the air in the internal space 1a Since the inflow speed into the breathing chamber 1b is faster than the case where it passes through only the filter 16 and flows into the breathing chamber 1b, the rising time ta of the detected pressure P3 is faster than in the normal time.
Therefore, by inspecting whether the rising time ta of the detection pressure P3 is shorter than normal (for example, whether it is shorter than the predetermined range set above), the partition 12d and the base plate 11 are inspected. It is also possible to determine whether the sealing state is good or bad.

  In this example, the quality of the filter and the quality of the seal state between the partition 12d and the base plate 11 are determined based on the length of the rising time ta of the detected pressure P3. It is also possible to determine the quality of the filter characteristics and the quality of the seal state between the partition wall 12d and the base plate 11 based on the magnitude of the rising of the detected pressure P3 at the start of application of the inspection air.

It is side surface sectional drawing which shows the air leak test | inspection apparatus which performs the air leak test | inspection of an electronic component apparatus. It is a top view which shows the base board with which the adhesive agent was apply | coated. It is a circuit diagram which shows an air leak test | inspection apparatus. It is a figure which shows the detection pressure etc. by the pressure sensor in an air leak test | inspection. It is side surface sectional drawing which shows the electronic component apparatus used as the test object of an air leak inspection apparatus. It is side surface sectional drawing which shows the conventional air leak test | inspection apparatus.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Electronic component apparatus 1a Internal space 1b Breathing chamber 10 Sealing case 11 Base board 11e Communication hole 12 Housing member 12a Connector 12d Partition 12e Breathing hole 13 Lid member 14a / 14b Adhesive 16 Filter 20 Circuit board 50 Air leak test apparatus 51 Upper surface closing member 51 b Air introduction hole 52 Connector portion blocking member 52 b Air introduction hole 56 Inspection air application device 58 Pressure sensor 60 Inspection air source 61 Primary regulator 61
63 Electropneumatic regulator 66 Inspection solenoid

Claims (2)

An opening that communicates the inside and outside of the sealed case is formed in a sealed case that houses a circuit board on which electronic components are mounted, and the opening is blocked by a filter that blocks liquid and allows gas to pass through. An air leak inspection method for an electronic component device configured as described above,
A pressure sensor is provided outside the filter in the opening,
Test air is pumped into the sealed case,
The pressure change in the sealed case when the inspection air is pumped is monitored by the pressure sensor,
Along with the air leak inspection of the electronic component device, the quality determination of the filter is performed.
An air leak inspection method for an electronic component device. An opening that communicates the inside and outside of the sealed case is formed in a sealed case that houses a circuit board on which electronic components are mounted, and the opening is blocked by a filter that blocks liquid and allows gas to pass through. An air leak inspection device for an electronic component device configured as described above,
A pressure sensor disposed outside the filter in the opening, and
Air application means for pumping inspection air into the sealed case,
The pressure sensor monitors the pressure change in the sealed case when the air for inspection is pumped into the sealed case by the air application means,
Along with the air leak inspection of the electronic component device, the quality determination of the filter is performed.
An air leak inspection device for an electronic component device.

Images