JP2009285116A - Fluid jetting device, method for driving fluid jetting device and surgical apparatus - Google Patents

Abstract

Disclosed is a fluid ejecting apparatus in which liquid does not flow out during a stop period in which a volume variable means is not driven.
A fluid ejecting apparatus (1) is a fluid ejecting apparatus that reduces the volume of a fluid chamber (30) by a diaphragm (40) and ejects liquid from a nozzle opening (81) in a pulsed manner, and supplies an fluid to the fluid chamber (30). Volume variable means including a flow path 25, an outlet flow path 21 having a nozzle opening 81 and discharging liquid from the fluid chamber 30, and a diaphragm 40 driven by a drive waveform composed of a combination of a pulsation waveform and a pause waveform 11 and a micro valve 90 as an opening / closing means that opens the inlet flow path 25 during the drive period of the volume variable means 11 and closes the inlet flow path 25 during the stop period. In this way, it is possible to prevent the liquid from flowing out during the stop period in which the volume varying means 11 is not driven.
[Selection] Figure 3

Description

  The present invention relates to a fluid ejecting apparatus, a surgical apparatus, and a driving method that reduce the volume of a fluid chamber with a diaphragm and eject a fluid in a pulse form from a nozzle opening.

  Surgery with fluid that is jetted at high speeds allows the incision of the organ parenchyma while preserving the vasculature such as blood vessels, and the incidental damage to living tissue other than the incision is minimal. Therefore, the burden on the patient is small, and because the bleeding does not interfere with the field of view of the operative field, rapid surgery is possible. Especially, it is clinically applied to hepatectomy, etc., which is difficult to bleed from microvessels. Yes.

  As a surgical device using fluid jetted at high speed, the volume of the fluid chamber (pump chamber) is rapidly reduced by a diaphragm, and from a nozzle opening (fluid ejection opening) provided in the distal direction of the outlet channel tube There is a fluid ejecting apparatus that ejects fluid in pulses (see, for example, Patent Document 1). In such a fluid ejecting apparatus, a check valve is provided between the inlet channel and the fluid chamber or between the outlet channel and the fluid chamber.

Japanese Patent Laying-Open No. 2005-152127 (Page 7, FIGS. 1 and 6)

  According to such a patent document 1, the check valve provided on the inlet channel side is opened in the fluid flow direction to promote fluid flow to the fluid chamber and prevent backflow from the fluid chamber. On the other hand, the check valve on the outlet channel side opens in the fluid discharge direction to prevent backflow into the fluid chamber. However, even when the diaphragm is not driven (that is, the initial state in which the volume of the fluid chamber is not reduced), the check valve is opened by the supply pressure of the fluid supplied from the inlet channel, and the fluid flows out from the outlet channel. It is possible to do.

  SUMMARY An advantage of some aspects of the invention is to solve at least a part of the problems described above, and the invention can be implemented as the following forms or application examples.

  Application Example 1 A fluid ejecting apparatus according to this application example is a fluid ejecting apparatus that reduces the volume of a fluid chamber by a diaphragm and ejects fluid in a pulse form from a nozzle opening, and supplies the fluid to the fluid chamber. And a volume variable means including the diaphragm driven by a drive waveform constituted by a combination of a pulsation waveform and a pause waveform, and an inlet flow channel having a nozzle opening and discharging fluid from the fluid chamber. And an opening / closing means for opening the inlet flow path during the drive period of the volume variable means and closing the inlet flow path during the stop period.

  According to this application example, during the drive period of the volume variable means, that is, the drive waveform output period, the inlet flow path is opened to supply the fluid into the fluid chamber, and the volume of the fluid chamber is rapidly reduced by the diaphragm to pulse the fluid. Inject into a shape. On the other hand, during the period when the volume varying means is stopped, the gap between the fluid chamber and the inlet channel is closed by the opening / closing means. Therefore, by blocking the flow path between the inlet flow path and the nozzle opening, it is possible to prevent dripping of fluid due to fluid outflow from the nozzle opening during the stop period.

  Note that fluid remains between the fluid chamber and the nozzle opening even during the stoppage period of the volume varying means. In this case, the pressure in the flow path from the fluid chamber to the nozzle opening is at least a large external pressure. Equivalent to atmospheric pressure, there is no fluid outflow in the static state, and there is no continuous outflow.

  Application Example 2 In the fluid ejecting apparatus according to the application example described above, the opening / closing means divides a connection channel chamber communicating with the inlet channel and a sealed pressure space, and the inlet flow into the partition. A microvalve that includes a sealing portion projecting toward a path and an actuator that displaces the partition, and that opens and closes the inlet channel by the sealing portion in accordance with the displacement of the partition; Is preferred.

  According to the above configuration, the opening / closing means for opening and closing the inlet flow path is a micro valve, and the partition is displaced by an actuator, so that the timing for opening and closing the inlet flow path is the optimum timing for driving and stopping the volume variable means. There is an effect that it can be easily adjusted.

  Application Example 3 In the fluid ejecting apparatus according to the application example, it is preferable that the inlet flow path is closed in an initial state where the partition wall is not displaced, and the inlet flow path is opened in a state where the partition wall is displaced.

  According to such a configuration, it is only necessary to input a drive signal to the actuator and displace the partition wall only during a period in which the volume varying means is driven, so that power consumption can be reduced.

  Application Example 4 In addition, it is preferable that the inlet channel is closed when the partition is displaced, and the inlet channel is opened in an initial state where the partition is not displaced.

  In this way, the inlet flow path is closed in a state where the drive signal is input to the actuator and the partition wall is displaced, so that it is possible to stably obtain the pressing force necessary for the blockage, and the inlet flow path is more reliable. Can be occluded.

  Application Example 5 In addition, it is preferable that the partition wall is displaced to one side from the initial state where the partition wall is not displaced and the inlet channel is closed, and the inlet channel is opened by being displaced to the other side.

  In this way, by opening and closing the inlet channel by forcibly displacing the partition wall by the actuator, the opening and closing can be performed more reliably and at a desired timing.

  Application Example 6 In the fluid ejecting apparatus according to the application example described above, the output timing of the drive waveform is a delay time from the activation of the volume varying means until at least the speed at which the fluid flows into the fluid chamber is maximized. Is preferably set.

  The speed at which the fluid flows into the fluid chamber gradually increases after the inlet channel is opened, and becomes maximum immediately before the fluid chamber is filled. Further, as described above, the drive waveform is configured by combining the pulsation waveform and the pause waveform, and the delay time can be replaced with the pause waveform when the drive waveform rises. By outputting the pulsation waveform at the timing after this delay time, high-speed fluid can be ejected immediately after the volume variable means is started.

  Application Example 7 In the fluid ejecting apparatus according to the application example described above, it is preferable that the activation timing of the volume varying unit and the opening timing of the inlet flow path substantially coincide.

  By matching the activation of the volume variable means and the opening timing of the inlet channel, the fluid can be ejected from the beginning of the activation by outputting the drive waveform after sufficiently supplying the fluid to the fluid chamber.

  Application Example 8 In the fluid ejection device according to the application example described above, a fluid supply path for supplying fluid to the connection flow path chamber is further provided, and the fluid injection path is located between the inlet flow path and the fluid supply path. When the protrusion is provided on the pressure space side and the inlet flow path is closed, the volume of the pressure space near the fluid supply path of the partition wall is caused by the pressure of the fluid supplied from the fluid supply path. It is preferable that the sealing portion is pressed with a lever using the protrusion as a fulcrum, the vicinity of the fluid supply path as a force point, and the sealing portion as an action point.

  In this way, since the pressure supplied from the fluid supply path is applied to the sealing portion by the lever with the projection serving as a fulcrum, the inlet channel can be more reliably closed. Such a configuration increases the pressing force of the sealing portion both in the structure in which the inlet channel is closed in the initial state in which the partition wall is not displaced and in the structure in which the inlet channel is closed with the partition wall displaced. effective.

  Application Example 9 In the fluid ejection device according to the application example described above, when the sealing portion closes the inlet flow path, the partition wall is displaced by the fluid supply pressure from the fluid supply path. The volume of the pressure space is reduced, and the internal pressure of the pressure space rises higher than the internal pressure of the fluid chamber, so that the sealing portion opens the inlet channel by the pressure difference between the pressure space and the fluid chamber. Further pressing is desirable.

  In an initial state where the volume variable means is not driven, the internal pressure of the other flow path including the pressure space and the fluid chamber is atmospheric pressure. Here, when a fluid supply pressure is applied from the fluid supply path, the partition wall is displaced in a direction to reduce the volume of the pressure space. Since the pressure space is sealed, the internal pressure becomes larger than the fluid chamber by reducing the volume. Further, the internal pressure of the fluid chamber decreases when the volume returns from the reduction to the initial state. The sealing portion is pressed toward the inlet channel by the pressure difference between the pressure space and the fluid chamber. If this pressure difference is used, the pressing force of the inlet channel is further increased with a simple microvalve structure. As described above, if this pressure difference is used, the inlet channel can be more reliably blocked. it can.

  Application Example 10 In the fluid ejecting apparatus according to the application example described above, it is preferable that a conical slope portion is provided at a tip of the sealing portion, and the inlet channel is closed by the slope portion.

  In this way, when the inlet channel is closed by the inclined surface, the contact portion between the sealing portion and the inlet channel becomes a thin ring shape, and even when the opening / closing operation stroke of the sealing portion is small, the opening portion is opened. The fluid can easily flow into the fluid chamber, and the pressing force per unit area at the time of closing can be increased.

  Application Example 11 In the fluid ejecting apparatus according to the application example described above, it is preferable that the combined inertance of the inlet channel is larger than the combined inertance of the outlet channel.

  The volume varying means is driven by a drive waveform configured by a combination of a pulsation waveform and a pause waveform. When this drive waveform is output, the inlet channel is open. Here, by making the combined inertance of the inlet channel larger than the combined inertance of the outlet channel, a pulsating flow larger than the amount of fluid flowing from the inlet channel into the fluid chamber is generated in the outlet channel during the pulsation period. In addition, pulsed fluid discharge can be performed.

  Further, if both the combined inertance of the inlet channel and the combined inertance of the outlet channel are made sufficiently large, a check valve for preventing backflow is not required.

  Application Example 12 In the fluid ejecting apparatus according to the application example described above, it is preferable that a unimorph type or bimorph type actuator is used as the actuator.

  When a unimorph actuator is used as the actuator, there is an effect that the microvalve can be configured with a simple configuration. In addition, when a bimorph actuator is used, the inlet channel is forcibly opened and closed with a higher pressing force, so that the inlet channel can be reliably opened and closed.

  Application Example 13 In the fluid ejecting apparatus according to the application example described above, it is preferable that a multilayer piezoelectric element is used for the actuator.

  Thus, when using a laminated actuator as an actuator, there exists an advantage that the pressing force of a sealing part can be enlarged.

  Application Example 14 In the fluid ejecting apparatus according to the application example described above, it is preferable that the partition wall has a concentric corrugated structure portion centering on the fluid supply path.

  In the flat partition wall structure, as the deformation due to the fluid supply pressure increases, the in-plane stress in the displacement region increases and becomes difficult to displace. Here, by adopting a corrugated structure for the partition wall, even if the displacement increases, the in-plane stress can be suppressed, and the displacement amount in the direction of reducing the volume of the pressure space due to the fluid supply pressure can be increased. Even when the pressure is changed, the pressure in the pressure space becomes a pressure corresponding thereto, so that the inlet channel can be reliably closed.

  Application Example 15 In the fluid ejecting apparatus according to the application example described above, it is preferable that the pulsation waveform is output when the speed at which the fluid flows into the fluid chamber is maximized after the inlet flow path is opened. .

  After the inlet channel is opened, the fluid inflow speed gradually increases and reaches the maximum speed. At this time, by outputting the pulsation waveform, a larger pulsation flow is generated in the outlet channel, and pulsed fluid discharge can be performed.

  Application Example 16 In the fluid ejecting apparatus according to the application example described above, it is preferable that the inlet flow path is closed while the volume is restored after the volume of the fluid chamber is minimized.

  The drive waveform is composed of a combination of a pulsation waveform and a pause waveform. Therefore, when the volume variable means is driven, and when the resting waveform output period is longer than the period of the pulsating waveform, if the inlet flow path is opened during the resting waveform output, there is little fluid. May leak from the fluid chamber toward the nozzle opening. If such a liquid exists, it is expected that when the liquid is ejected by the pulsation waveform to be generated next, the ejected liquid droplet collides with the leaked liquid droplet and an appropriate pulsed liquid droplet cannot be formed. However, the liquid leakage during the output of the resting waveform can be suppressed by closing the inlet channel at the above timing.

  Application Example 17 A fluid ejection device driving method according to this application example is a fluid ejection device driving method in which the volume of a fluid chamber is reduced by a diaphragm and fluid is ejected in a pulse form from a nozzle opening. An opening passage for supplying fluid to the fluid chamber is opened by an opening / closing means during a drive period of the volume variable means including the diaphragm driven by a drive waveform constituted by a combination of a waveform and a pause waveform, and the volume variable means The inlet channel is closed by the opening / closing means during the stop period.

  According to this application example, during the drive period of the volume variable means, that is, the drive waveform output period, the inlet flow path is opened to supply the fluid into the fluid chamber, and the volume of the fluid chamber is rapidly reduced by the diaphragm to pulse the fluid. Inject into a shape. On the other hand, during the period when the volume varying means is stopped, the gap between the fluid chamber and the inlet channel is closed by the opening / closing means. Therefore, by blocking the flow path between the inlet flow path and the nozzle opening, it is possible to prevent dripping of fluid due to fluid outflow from the nozzle opening during the stop period.

  Application Example 18 In the fluid ejection device driving method according to the application example described above, the pulsation waveform is output when the velocity at which the fluid flows into the fluid chamber becomes maximum after the inlet channel is opened. The inlet channel is closed while the volume is restored from when the volume of the fluid chamber is minimized.

  After the inlet channel is opened, the fluid inflow speed gradually increases and reaches the maximum speed. At this time, by outputting the pulsation waveform, a larger pulsation flow is generated in the outlet channel, and pulsed fluid discharge can be performed.

  Further, by closing the inlet channel during the output of the pause waveform, it is possible to suppress liquid leakage during the output of the pause waveform and eject an appropriate pulsed droplet from the start of the pulsation waveform output.

  Application Example 19 A surgical apparatus according to this application example includes a fluid chamber, a diaphragm, an inlet channel that supplies fluid to the fluid chamber, and an outlet flow that discharges fluid from the fluid chamber. A volume variable means including the diaphragm, which is generated based on the path and the cutting hardness information, and is driven by a drive waveform constituted by a combination of a pulsation waveform and a rest waveform, Opening and closing means for closing and closing the inlet channel during a stop period, the volume of the fluid chamber is reduced by the diaphragm, the fluid is ejected in pulses from the nozzle opening, An incision is made.

  With high-speed pulsed fluid ejection based on the optimal driving waveform generated based on the excision hardness information of the surgical site, it is possible to incise the organ substance while preserving the vascular structure such as blood vessels. The incidental damage to the living tissue is minimal, so the patient burden is small.

  Moreover, since there is no fluid leakage during the rest period, the field of view of the operative field is not obstructed, and a quick operation is possible, which is particularly suitable for hepatectomy or the like that is difficult to bleed from a microvessel.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.
1 to 8 show a fluid ejecting apparatus according to the first embodiment, FIGS. 9 and 10 show the second embodiment, FIGS. 11 to 13 show the third embodiment, and FIG. 14 shows the fourth embodiment.
Note that the drawings referred to in the following description are schematic views in which the vertical and horizontal scales of members or portions are different from actual ones for convenience of illustration.

In addition, the fluid ejecting apparatus according to the present invention can be used in various ways such as drawing using ink, washing fine objects and structures, and a scalpel for operation. A fluid ejecting apparatus suitable for a surgical apparatus (surgical knife) suitable for incision or excision will be described as an example. Therefore, the fluid used in the following embodiments is water or physiological saline, and hereinafter, the fluid will be described as a liquid.
(Embodiment 1)

  1 and 2 are explanatory diagrams illustrating an example of a schematic configuration of the fluid ejecting apparatus according to the first embodiment. 1 and 2, the fluid ejecting apparatus 1 includes, as a basic configuration, a control unit 100 including a liquid container 104 as a liquid supply unit that stores liquid and supplies the liquid, and a fluid that changes and discharges the liquid into pulsation. The injection part 10 and the connection tube 15 which connects the control part 100 and the fluid injection part 10 are comprised. A thin pipe-shaped connection flow channel pipe 70 is connected to the fluid ejection unit 10, and a nozzle 80 having a nozzle opening 81 with a reduced flow channel is inserted into the tip of the connection flow channel pipe 70. . The fluid ejecting unit 10 changes the liquid into pulsation, and ejects the liquid at high speed as a droplet from the nozzle opening 81 via the connection flow channel pipe 70 and the nozzle 80.

  The control unit 100 includes an optimum drive parameter calculation unit 101 for calculating the optimum drive parameter based on the surgical resection hardness information, and a diaphragm drive waveform for driving the volume variable means based on the calculated optimum drive parameter. A generation unit 102 and a partition wall drive waveform generation unit 103 for generating a drive waveform for driving the micro valve 90 as an opening / closing means attached to the fluid ejection unit 10 are provided. In addition, the control unit 100 has an arbitrary drive waveform corresponding to conditions such as a pressure generating unit 105 such as a pump that supplies liquid to the fluid ejecting unit 10 with a constant supply pressure from the liquid container 104 and conditions such as the hardness of the surgical site. An adjustment device (not shown) is provided for adjustment.

  The fluid ejecting unit 10 includes a volume varying means 11 for reducing the volume of the fluid chamber 30 (see FIG. 3), and an inlet channel 25 (see FIG. 3, FIG. 3) for controlling the liquid inflow into the fluid chamber 30. And a micro valve 90 for opening and closing (see).

  The volume varying means 11 includes a diaphragm 40 and a piezoelectric element 50 as an actuator that drives the diaphragm 40, and the microvalve 90 includes a partition body 92 and a piezoelectric element 55 as an actuator that drives the partition body 92. ing. Moreover, the control part 100 and the fluid injection part 10 are connected by the connection tube 15 and the connection cable which is not shown in figure.

  Next, a liquid flow action in the fluid ejecting apparatus 1 will be briefly described. The liquid stored in the liquid container 104 is supplied to the fluid ejecting unit 10 through the connection tube 15 by the pressure generating unit 105 at a constant pressure. In the fluid ejecting section 10, pulsation is generated by the volume varying means 11, and the liquid is ejected in a pulse form from the nozzle opening 81 through the connection channel pipe 70 and the nozzle 80 at high speed.

  The pressure generation unit 105 is not limited to a pump, and the liquid container 104 may be held at a position higher than the fluid ejection unit 10 by a stand or the like as an infusion bag. In such a case, the pressure generator 105 is not necessary, and the configuration can be simplified, and there is an advantage that sterilization and the like are facilitated.

  The liquid supply pressure by the pressure generator 105 is generally set to 3 atm or less, preferably 0.3 atm (0.03 MPa) or less. Moreover, when using an infusion bag, the altitude difference between the fluid ejection unit 10 and the top surface of the infusion bag is the pressure. When using an infusion bag, it is desirable to set the altitude difference so as to be about 0.1 to 0.15 atm (0.1 to 0.15 MPa).

In addition, when performing an operation using the fluid ejecting apparatus 1, the part grasped by the operator is the fluid ejecting unit 10. Therefore, it is preferable that the connection tube 15 to the fluid ejecting unit 10 is as flexible as possible. For this purpose, the connection tube 15 is preferably a flexible and thin tube, and the pressure is preferably set within a range where the liquid can be fed to the fluid ejecting unit 10. In particular, when there is a possibility that a malfunction of the device may cause a serious accident as in the case of brain surgery, it is necessary to avoid the ejection of high-pressure fluid when the connection tube 15 is cut off. However, it is required to keep the pressure low.
It is more preferable that the fluid ejecting unit 10 includes an external operation member (not shown) such as a switch for starting or stopping the volume varying unit 11.

Next, the structure of the fluid ejecting unit according to the present embodiment will be described.
FIG. 3 is a cross-sectional view illustrating a schematic structure of the fluid ejecting unit according to the present embodiment. In FIG. 3, the fluid ejecting unit 10 includes a volume varying means 11 provided in a space formed by an upper case 20 and a lower case 60 as a lid, and a micro valve 90 attached to the outer case of the upper case 20. It is configured.

  The volume varying means 11 includes a diaphragm 40 that is fixed to opposite ends of the upper case 20 and the lower case 60, and a piezoelectric element that varies the volume of the fluid chamber 30 formed between the diaphragm 40 and the upper case 20. 50. In the present embodiment, the piezoelectric element 50 is a multilayer piezoelectric element. An upper plate 61 is interposed between the diaphragm 40 and the piezoelectric element 50. The tail portion of the piezoelectric element 50 is fixed to the lower plate 62, and the lower plate 62 is press-fitted and fixed to the end portion of the lower case 60.

  In the upper case 20, an outlet channel 21 is formed at a substantially central portion of the fluid chamber 30, and an inlet channel 25 and a liquid supply channel 26 are opened at positions separated from the outlet channel 21. One end of the outlet channel 21 communicates with the fluid chamber 30, and the other end communicates with the outlet connection channel 71 of the connection channel pipe 70. A nozzle 80 having a nozzle opening 81 is inserted into the distal end portion of the connection flow channel pipe 70. Here, the cross-sectional area perpendicular to the liquid flow direction of the nozzle opening 81 is smaller than the cross-sectional area of the outlet channel 21.

On the outlet connection channel 71 side of the outlet channel 21 and the nozzle 80, a slope 23 and a slope 82 are formed, respectively, to reduce the channel resistance with the outlet connection channel 71.
The connection channel pipe 70 is a thin wall pipe having rigidity, and is press-fitted and fixed to the connection portion 22 projecting from the upper case 20.

  One end of the inlet channel 25 communicates with the fluid chamber 30, and the other end communicates with the connection channel chamber 94 of the microvalve 90. In addition, one end of the liquid supply path 26 communicates with the connection flow path chamber 94, and the other end penetrates the upper case 20 and communicates with the connection tube 15. The connection tube 15 is fitted into a connection portion 27 protruding from the upper case 20, and extends in the direction opposite to the connection flow path pipe 70 with respect to the upper case 20 and is connected to the liquid container 104.

  The microvalve 90 is illustrated in a simplified manner, but is divided into a connection channel chamber 94 and a sealed pressure space 95 by a partition wall 92, and the partition body 92 has a sealing portion that opens and closes the inlet channel 25. 93 is formed. In addition, in FIG. 3, the state which open | released the inlet flow path 25 is represented.

Next, the operation of the fluid ejecting unit 10 will be described with reference to FIG.
The liquid is always supplied to the liquid supply path 26 by the pressure generator 105 at a constant supply pressure. The supplied liquid flows through the liquid supply path 26, the connection flow path chamber 94, and the inlet flow path 25 and flows into the fluid chamber 30. When the piezoelectric element 50 does not operate, the liquid flows into the fluid chamber 30 due to the difference between the supply pressure of the pressure generating unit 105 and the fluid resistance of the entire inlet channel side.

  Here, if a pulsation waveform is input to the piezoelectric element 50 and the piezoelectric element 50 expands abruptly, the combined inertance L1 on the entire inlet flow path 25 side and the combined inertance L2 on the outlet flow path 21 side are sufficiently large. , The pressure in the fluid chamber 30 rises rapidly and reaches several tens of atmospheres.

  Since this pressure is much larger than the supply pressure by the pressure generating unit 105 applied to the inlet channel 25, the inflow of liquid from the inlet channel 25 to the fluid chamber 30 is reduced by the pressure, and the outlet channel 21 Outflows from will increase.

However, since the synthetic inertance L1 on the inlet flow path 25 side is larger than the synthetic inertance L2 on the outlet flow path 21 side, the outlet flow path is larger than the amount of decrease in the flow rate of the liquid flowing from the inlet flow path 25 into the fluid chamber 30. The increase in the amount of liquid discharged from 21 is larger. Therefore, a pulsed liquid discharge, that is, a pulsating flow is generated in the outlet connection channel 71. The pressure fluctuation at the time of discharge propagates through the connection flow channel pipe 70, and the liquid is ejected from the nozzle opening 81 at the tip.
Here, since the cross-sectional area (diameter) of the nozzle opening 81 is smaller than the cross-sectional area (diameter) of the outlet channel 21, the liquid is ejected as a high-pressure, high-speed pulsed droplet. .

  On the other hand, the inside of the fluid chamber 30 becomes a pressure drop or a vacuum state immediately after the pressure rise due to the interaction between the decrease in the liquid inflow amount from the inlet channel 25 and the increase in the liquid outflow amount from the outlet channel 21. As a result, due to both the supply pressure of the pressure generator 105 and the pressure in the fluid chamber 30, the liquid in the inlet channel 25 enters the fluid chamber 30 at the same speed as before the operation of the piezoelectric element 50 after a lapse of a certain time. Return to the heading flow. Then, after the flow of the liquid in the inlet channel 25 is restored, if the piezoelectric element 50 expands, pulsed droplets from the nozzle opening 81 are continuously ejected.

  A micro valve 90 is provided between the inlet flow path 25 and the liquid supply path 26, and the inlet flow path 25 is opened and the volume variable means 11 is stopped during the period in which the volume variable means 11 is driven. During this period, the inlet channel 25 is closed to block the liquid inflow into the fluid chamber 30.

Next, the configuration and operation of the microvalve as the opening / closing means according to the present embodiment will be described with reference to the drawings. First, the configuration of the microvalve will be described.
FIG. 4 is a cross-sectional view showing an example of the configuration of the microvalve, FIG. 5 shows a partition wall, (a) is a plan view, and (b) is a cross-sectional view showing an AA cut surface of (a). 4 and 5, a microvalve 90 includes an upper substrate 97, a lower substrate 91, a partition body 92 sandwiched between the upper substrate 97 and the lower substrate 91, and a unimorph actuator fixed to the partition body 92. As a piezoelectric element 55.

The partition body 92 has a diaphragm-shaped partition wall 92a and an edge portion 92b formed over the entire periphery of the peripheral edge portion of the partition wall 92a, and the connection channel chamber 94 in a state where the upper substrate 97 and the lower substrate 91 are laminated. The pressure space 95 is divided. The connection channel chamber 94 has an opening that is opened in the lower substrate 91 and communicates with the inlet channel 25, and an opening that communicates with the liquid supply channel 26. In the present embodiment, the inlet channel 25 and the outlet channel 21 will be described including the respective openings.
On the other hand, the pressure space 95 is a space sealed by the edge portion 92b and the upper substrate 97, and the assembled internal pressure in the initial state is atmospheric pressure. Further, the internal pressure of the connection flow channel chamber 94 is also atmospheric pressure because it communicates with the outside.

  The partition wall 92a is formed with a sealing portion 93 projecting toward the inlet flow channel 25 at a position facing the inlet flow channel 25, and the tip of the sealing portion 93 has a conical shape and is inclined. A portion 93a is formed. FIG. 4 shows a state in which the inlet channel 25 is closed by the sealing portion 93, and the contact portion between the inclined surface portion 93a and the inlet channel 25 has a thin ring shape, increasing the pressing force per unit area at the time of closing, The sealing property is improved.

  Further, the partition 92 a is formed with a protrusion 92 d at an intermediate position between the inlet channel 25 and the liquid supply path 26, and the protrusion 92 d is in contact with the inner surface of the upper substrate 97. As shown in FIG. 5, a concentric corrugated structure 92e centering on the liquid supply path 26 is formed in the partition wall 92a. A piezoelectric element 55 is fixed to the opposite surface of the partition wall 92a from which the sealing portion 93 is projected.

  Next, the operation of the microvalve 90 will be described with reference to the drawings. The state shown in FIG. 4 described above represents an initial state in which the fluid ejecting unit 10 is assembled including the micro valve 90. This state is a state in which no drive signal is input to the piezoelectric element 50, the partition 92 a is not displaced, and the dimensions are set so that the sealing portion 93 closes the inlet channel 25. In this state, the liquid is supplied from the pressure generator 105 to the liquid supply path 26 at a constant supply pressure.

  FIG. 6 is a cross-sectional view illustrating a state in which liquid is supplied to the liquid supply path 26 when the fluid ejecting unit (volume variable unit) is not driven. In FIG. 6, when liquid is supplied from the liquid supply path 26, the partition wall 92 a includes the protrusion 92 d, so that the liquid supply as shown in FIG. 6 depends on the pressure and flow velocity of the liquid supplied from the liquid supply path 26. The vicinity of the passage 26 is pressed in the direction of the pressure space 95, the protrusion 92 d is used as a fulcrum, the vicinity of the center of the liquid supply passage 26 is a force point, and the sealing portion 93 is used as an action point to make the sealing portion 93 the inlet passage 25 Further press against the opening edge.

  In the initial state where the volume varying means 11 is not driven, the internal pressure of the other flow path including the pressure space 95 and the fluid chamber 30 is atmospheric pressure. Here, when supply pressure is applied from the liquid supply path 26, the partition wall 92 a is deformed in a direction to reduce the volume of the pressure space 95. Since the pressure space 95 is sealed, the pressure is close to that of the connection flow path chamber 94 by reducing the volume. Therefore, the sealing portion 93 may be pressed toward the inlet flow path 25 by the force of the pressure difference between the internal pressure of the pressure space 95 and the internal pressure of the fluid chamber 30. Furthermore, if this pressure difference and the above-mentioned thing are utilized, the pressing force applied to the sealing part 93 can be further increased.

Next, the operation of the microvalve 90 when the fluid ejecting unit 10 (volume varying means 11) is driven will be described with reference to the drawings.
FIG. 7 is a cross-sectional view showing a state when the variable volume means is driven. In FIG. 7, when starting the volume varying means 11, a drive signal is input to the piezoelectric element 55 from the partition wall drive waveform generating unit 103 (see FIG. 2). At this time, the piezoelectric element 55 is charged and expanded. As the piezoelectric element 55 expands, the portion of the partition wall 92a that faces the inlet channel 25 (the region between the edge 92b and the protrusion 92d) is displaced convexly as shown in FIG. Then, the sealing portion 93 moves to the pressure space 95 side, opens the inlet flow path 25, and the flow path from the liquid supply path 26 to the fluid chamber 30 communicates. In this way, the liquid is supplied from the liquid container 104 to the fluid chamber 30.

  When driving of the variable volume means is stopped, the state shown in FIG. 6 is obtained. That is, the application of the pulsation waveform to the piezoelectric element 55 is eliminated, and the piezoelectric element 55 is released from the expanded state, so that the displacement of the partition wall 92a is also released, and the sealing portion 93 seals the inlet flow path 25.

  At this time, since the liquid supply pressure from the liquid supply path 26 continues, the vicinity of the liquid supply path 26 of the partition wall 92a continues to protrude toward the pressure space 95, and the pressing force of the sealing portion 93 is increased.

  Further, when the liquid supply from the liquid supply path 26 is stopped (stop of the fluid ejecting apparatus), the partition wall 92 returns to the initial state shown in FIG.

  When the volume variable means 11 is being driven, a necessary amount of liquid flows into the fluid chamber 30 at a necessary timing, and when the volume variable means 11 is stopped, the liquid is prevented from flowing out to the outside. Therefore, it is required to appropriately set the drive waveform and the opening / closing timing of the inlet passage 25 by the microvalve 90 when the volume varying means 11 is started and stopped.

  FIG. 8 shows a driving method of the fluid ejecting apparatus, and is a timing diagram schematically showing the relationship between the driving of the variable volume means, the driving waveform, and the opening / closing timing of the microvalve. This will be described with reference to FIGS. In FIG. 8, the upper diagram shows the driving time T for driving the fluid ejecting unit 10, the middle diagram shows the driving waveform, and the lower diagram shows the opening and closing timing of the microvalve 90. First, the fluid ejecting unit 10 (that is, the volume varying unit 11) is activated. The user starts (ON) and stops (OFF) the fluid ejecting unit 10 by operating an external operation member (not shown) such as a switch.

  Then, a drive waveform is output with a delay time T0 from the activation of the volume varying means 11. The drive waveform is composed of a combination of a pulsation waveform and a pause waveform. The drive waveform shown in FIG. 8 represents one example thereof, and has one pulse pulse (period T1) and pause pulse output time I for a plurality of pulses. A pause waveform is output for a plurality of cycles in the period of the drive time T of the volume varying means 11. These pulsation waveform and rest waveform are set by the optimum drive parameter calculation unit 101 (see FIG. 2) based on the excision hardness data.

  The delay time T0 is a time until the speed at which the liquid flows from the inlet channel 25 into the fluid chamber 30 is maximized, and is approximately equivalent to the period T1 of the pulsation waveform.

  The microvalve 90 closes the inlet flow path 25 until the volume variable means 11 is activated, and is opened at the same timing as the activation of the volume variable means 11, and the liquid flows into the fluid chamber 30. Then, the volume of the fluid chamber 30 is suddenly reduced by the pulsation waveform, and droplets are ejected in a pulse form from the nozzle opening 81 (see FIG. 3).

  The microvalve 90 closes the inlet flow path 25 at the timing when the volume varying means 11 is stopped (OFF). The drive time T of the volume varying means 11 may be set in advance in the drive profile, but the user may perform an OFF operation at an arbitrary timing.

  Therefore, according to the present embodiment, during the driving period of the volume variable means 11, the microchannel 90 opens the inlet channel 25 to supply the liquid into the fluid chamber 30, and the volume of the fluid chamber 30 is rapidly reduced. The liquid is ejected in pulses. On the other hand, during the period when the volume varying means 11 is stopped, the space between the fluid chamber 30 and the inlet channel 25 is closed by the micro valve 90. That is, by blocking the flow path between the inlet flow path 25 and the nozzle opening 81, it is possible to prevent liquid from dripping from the nozzle opening 81 during the stop period.

  In addition, the microvalve 90 is used as an opening / closing device that opens and closes the inlet channel 25, and the partition 92a is displaced by the piezoelectric element 55, so that the timing of opening and closing the inlet channel 25 is driven by the volume variable means 11. In addition, there is an effect that it can be easily adjusted to the timing of the stop.

  In addition, the inlet channel 25 is closed in the initial state where the partition wall 92a is not displaced, and the inlet channel 25 is opened while the partition wall 92a is displaced. Since it is only necessary to input a drive signal to displace the partition wall 92a, power consumption can be reduced.

  Further, the output timing of the drive waveform is set with a delay time T0 from the activation of the volume varying means 11 until at least the speed at which the liquid flows into the fluid chamber 30 is maximized. The speed at which the liquid flows into the fluid chamber 30 gradually increases after the inlet channel 25 is opened, and reaches a maximum immediately before the fluid chamber 30 is filled. By providing the delay time T0, the liquid can be injected into the fluid chamber 30 when the drive waveform rises, and then the liquid can be ejected immediately after the volume varying means 11 is started by outputting the pulsation waveform.

  Further, the partition wall 92 of the microvalve 90 is provided with a protrusion 92 d on the pressure space 95 side between the inlet channel 25 and the liquid supply channel 26. When the inlet channel 25 is closed, the liquid supply pressure supplied from the liquid supply channel 26 presses the vicinity of the liquid supply channel 26 of the partition wall 92a in the direction of the pressure space 95, and the protrusion 92d serves as a fulcrum. The sealing part is pressed with a lever using the vicinity of 26 as a power point and the sealing part 93 as an action point. By doing so, the sealing portion 93 is pressed against the inlet flow path 25 by the lever, so that the inlet flow path 25 can be more reliably closed.

  In the initial state where the volume varying means 11 is not driven, the internal pressure of the other flow path including the pressure space 95 and the fluid chamber 30 is atmospheric pressure. Here, when supply pressure is applied from the liquid supply path 26, the partition wall 92 a is deformed in a direction to reduce the volume of the pressure space 95. Since the pressure space 95 is sealed, the pressure is close to that of the connection flow path chamber 94 by reducing the volume. Therefore, the sealing portion 93 may be pressed toward the inlet flow path 25 by the force of the pressure difference between the internal pressure of the pressure space 95 and the internal pressure of the fluid chamber 30. Furthermore, if this pressure difference and the above-mentioned thing are utilized, the pressing force applied to the sealing part 93 can be further increased.

  Further, a conical slope portion 93a is provided at the tip of the sealing portion 93, and the inlet passage 25 is closed by the slope portion 93a, whereby the contact portion between the sealing portion 93 and the inlet passage 25 is provided. Becomes a thin ring shape, and even if the stroke of the opening / closing operation of the sealing portion 93 is small, it is easy for the liquid chamber 30 to flow into the liquid when opened, and the pressing force per unit area at the time of closing can be increased.

  The volume varying means 11 is driven by a drive waveform configured by a combination of a pulsation waveform and a pause waveform. At the time of inputting the driving waveform, the inlet channel is opened. Here, by making the combined inertance L1 of the inlet channel 25 larger than the combined inertance L2 of the outlet channel 21, a pulsating flow larger than the amount of fluid flowing from the inlet channel 25 into the fluid chamber 30 during the pulsation period. Is generated in the outlet channel 21, and a pulsed fluid can be discharged.

  Further, if both the combined inertance L1 of the inlet channel 25 and the combined inertance L2 of the outlet channel 21 are sufficiently large, a check valve for preventing a backflow is not required.

  In the present embodiment, the piezoelectric element 55 is used as a unimorph actuator that displaces the partition wall 92a. Since the piezoelectric element 55 can be formed of a thin film, the microvalve 90 can be made thinner and smaller.

Further, the partition wall 92 a constituting the microvalve 90 has a concentric wave structure 92 e centering on the liquid supply path 26. In the flat partition wall structure, even if the rigidity is small at the initial stage of displacement due to the fluid supply pressure, in-plane stress is generated in the displacement region as the out-of-plane deformation increases, and the rigidity increases and becomes difficult to displace. Here, by forming the corrugated structure 92e in the partition wall 92a, the in-plane stress is suppressed even when the out-of-plane displacement increases, and the amount of displacement toward the pressure space 95 due to the liquid supply pressure can be increased. The pressure inside 95 can be increased, and the pressure difference with the fluid chamber 30 can be increased.
Note that a concentric corrugated structure centered on the sealing portion 93 may be formed on the partition wall 92a.
(Embodiment 2)

Next, the configuration of the fluid ejection unit according to the second embodiment will be described with reference to the drawings. Embodiment 2 is characterized in that the inlet channel is closed while the partition wall is displaced from the initial state to one side, and the inlet channel is opened while the partition wall is displaced to the other side. Since the basic configuration can be the same as in the first embodiment, description of the configuration is omitted, and the operation of the microvalve will be described with the same reference numerals as in the first embodiment.
9 and 10 are cross-sectional views illustrating a part of the schematic structure of the fluid ejecting unit according to the second embodiment. First, a state where the inlet channel is closed will be described with reference to FIG.

  FIG. 9 shows a state where the inlet channel is closed. The initial state in which the fluid ejecting unit 10 is assembled including the micro valve 90 is a state in which the inlet channel 25 shown in FIG. 10 is opened. Here, when a drive signal is input to the piezoelectric element 55 from the partition wall drive waveform generation unit 103 (see FIG. 2), the piezoelectric element 55 is charged and expanded. As the piezoelectric element 55 expands, the portion of the partition wall 92a facing the inlet channel 25 is displaced convexly as shown in FIG. 9, so that the inlet channel 25 is closed. That is, during the period when the volume varying means 11 is not driven, the inlet channel 25 is continuously closed by maintaining the state where the piezoelectric element 55 is charged. When the electric charge charged in the piezoelectric element 55 is discharged, the expansion of the piezoelectric element 55 is released and the initial shape is restored.

  FIG. 10 shows a state where the inlet channel is opened. When the electric charge charged in the piezoelectric element 55 is discharged, as shown in FIG. 10, the piezoelectric element 55 is released from expansion, returns to the initial assembly state, and opens the inlet channel 25. That is, this state is maintained while the variable volume means 11 is being driven.

  The start and stop of the volume varying means 11, the output of the drive waveform, and the opening / closing timing of the microvalve 90 are set in the same manner as in the first embodiment (see FIG. 8).

  Further, in the present embodiment, the sealing portion 93 is used by utilizing the pressure difference between the pressure space 95 and the fluid chamber 30 and utilizing the lever with the projection 92d as a fulcrum as in the first embodiment. It is possible to block the inlet channel 25 more strongly by applying a pressing force.

Therefore, the inlet flow path 25 is closed while the drive signal is input to the piezoelectric element 55 and the partition wall 92a is displaced, so that the pressing force necessary for closing can be stably obtained. It can be reliably occluded.
(Modification of Embodiment 1 and Embodiment 2)

  Further, in contrast to the first and second embodiments using the thin film type piezoelectric element 55 as a unimorph type actuator, a laminated actuator (for example, a laminated piezoelectric element) can be used. Although not shown, the description will be given with reference to FIG. One end of the multilayer piezoelectric element is fixed to the partition wall 92 a at the same position as the piezoelectric element 55, and the other end is fixed to the upper substrate 97.

  Here, when the electric charge is charged in the multilayer piezoelectric element, the multilayer piezoelectric element expands, displaces the partition wall 92a, closes the inlet channel 25 by the sealing portion 93, and returns to the original shape when the electric charge is discharged. The same operation as in Embodiment 1 or Embodiment 2 is performed.

As described above, the configuration using the stacked actuator as the actuator has an advantage that the pressing force of the sealing portion 93 can be increased.
(Embodiment 3)

Subsequently, a fluid ejecting apparatus according to Embodiment 3 will be described with reference to the drawings. The third embodiment is characterized in that a bimorph actuator is used as an actuator constituting the microvalve. Since the other configuration is the same as that of the first embodiment, the description is omitted, and the same reference numerals are given to the same functional elements. Will be described.
11 to 13 show a fluid ejecting unit according to the third embodiment, FIG. 11 is an initial state, FIG. 12 is a state in which the inlet channel is closed, and FIG. 13 is a partial cross-sectional view showing a state in which the inlet channel is opened. is there.

  First, an initial state will be described with reference to FIG. A bimorph actuator 155 is fixed to the partition wall 92a constituting the microvalve 90. The bimorph actuator 155 is configured by laminating a first piezoelectric element 56 on one surface of a substrate 57 and a second piezoelectric element 58 on the other surface. The first piezoelectric element 56 and the second piezoelectric element 58 have opposite polarization directions, and electrodes are formed on both front and back surfaces.

  In the initial state, since no electric charge is applied to the bimorph actuator 155, the partition wall 92a is in a neutral position where it is not displaced. Therefore, the liquid supply path 26, the connection channel chamber 94, the inlet channel 25, and the fluid chamber 30 (not shown) are in communication. Here, the micro valve 90 is driven simultaneously with the activation of the volume varying means 11 (see FIG. 3).

  When a drive signal is input to the bimorph actuator 155, the first piezoelectric element 56 and the second piezoelectric element 58 have opposite polarization directions, so the second piezoelectric element 58 contracts when the first piezoelectric element 56 expands. . Accordingly, as shown in FIG. 12, the partition wall 92a is displaced so as to protrude toward the inlet channel 25, and the sealing portion 93 closes the inlet channel 25 and blocks the liquid flow.

  When the inlet channel 25 is opened, a driving signal having a phase opposite to that when the bimorph actuator 155 is closed is input. Then, when the first piezoelectric element 56 is reduced and the second piezoelectric element 58 is expanded, the partition wall 92a is displaced so as to protrude toward the pressure space 95 as shown in FIG. The channel 25 is opened to allow the liquid to flow.

  Therefore, by using the bimorph actuator 155 for the microvalve 90 as the opening / closing means, the partition wall 92a is displaced toward the inlet flow path 25 to close the inlet flow path 25, and is displaced toward the pressure space 95 to displace the inlet flow path 25. Since it opens, the inlet flow path 25 can be opened and closed at a predetermined accurate timing.

Further, since the stroke of the sealing portion 93 from the closing to the opening of the inlet channel 25 can be set large, the open area of the inlet channel 25 is increased and the flow resistance of the liquid is reduced. There is an effect that it is easy to secure the inflow amount.
(Embodiment 4)

Next, a fluid ejecting apparatus according to Embodiment 4 will be described with reference to the drawings. The fourth embodiment is characterized by the output of the pulsation waveform and the opening / closing timing of the inlet channel in the drive waveform output period. In addition, since the structure of Embodiment 1-3 mentioned above is applicable, description of a structure is abbreviate | omitted.
FIG. 14 is a timing diagram schematically illustrating the relationship between the drive waveform and the opening / closing timing of the microvalve according to the fourth embodiment. As described above, the drive waveform is composed of a combination of a pulsation waveform and a pause waveform. Here, the drive waveform shown in FIG. 14 represents an example, and a pulsation waveform 1 pulse (period T1) and a pause waveform having a pause pulse output time I for a plurality of pulses are outputted in a plurality of cycles. These pulsation waveform and rest waveform are set by the optimum drive parameter calculation unit 101 (see FIG. 2) based on the excision hardness data.

  The pulsation waveform is output after elapse of time t from when the microvalve 90 is opened from the state where the inlet passage 25 is closed. The time t is generally a time from when the inlet channel 25 is opened (indicated by a in the drawing) to when the speed at which the liquid flows into the fluid chamber 30 is maximized, and is a time corresponding to the period T1 at the maximum. It is. A pulsation waveform is output, and the volume of the fluid chamber 30 is rapidly reduced by the volume varying means 11. At this time, the displacement of the diaphragm 40 is slightly delayed with respect to the pulsation waveform as shown in FIG.

  The microvalve 90 is configured so that the inlet flow path 25 is restored while the volume returns to the initial state from when the volume of the fluid chamber 30 is minimized (indicated by b in the figure, when the displacement of the diaphragm 40 is maximized). Occlude. Then, the state shifts from the closed state to the open state by a time t before the rising of the next pulsation waveform (indicated by c in the figure).

  When the pulsation waveform is composed of a plurality of pulses, the inlet flow path 25 is closed while the volume returns to the initial state from the time when the volume of the fluid chamber 30 is minimized by the pulsation waveform immediately before the pause waveform is output. . Further, when the pulsation waveform is composed of a plurality of continuous pulses, the pause pulse output time I is preferably nT1 (n is an integer of 2 or more).

  The drive waveform is composed of a combination of a pulsation waveform and a pause waveform. Therefore, when the variable volume means 11 is being driven and the resting waveform is longer than the period T1 of the pulsating waveform, the fluid is slight if the inlet channel 25 is opened during the resting waveform output. May leak from the fluid chamber 30 toward the nozzle opening 81. If such a liquid exists, it is expected that when the liquid is ejected by the pulsation waveform to be generated next, the ejected liquid droplet collides with the leaked liquid droplet and an appropriate pulsed liquid droplet cannot be formed. However, by closing the inlet channel 25 at the above timing, it is possible to suppress liquid leakage during pause waveform output.

  The surgical apparatus using the fluid ejecting apparatus 1 described above is driven by a drive waveform generated based on the excision hardness information. Such a surgical device can incise the organ parenchyma while preserving the vasculature such as blood vessels by high-speed pulsed fluid ejection, and incidental damage to living tissue other than the incision. The burden on the patient is small.

  Further, since there is no fluid leakage during the rest period of the volume variable means 11, the field of view of the operative field is not obstructed, and a rapid operation is possible, and is particularly suitable for hepatectomy or the like that is difficult to bleed from a microvessel. .

FIG. 3 is an explanatory diagram illustrating an example of a schematic configuration of the fluid ejecting apparatus according to the first embodiment. FIG. 3 is an explanatory diagram illustrating an example of a schematic configuration of the fluid ejecting apparatus according to the first embodiment. FIG. 3 is a cross-sectional view illustrating a schematic structure of a fluid ejecting unit according to the first embodiment. FIG. 3 is a cross-sectional view showing an example of the configuration of the microvalve according to the first embodiment. The partition of the microvalve which concerns on Embodiment 1 is shown, (a) is a top view, (b) is sectional drawing which shows the AA cut surface of (a). Sectional drawing showing the state which supplied the liquid to the liquid supply path when the volume variable means is not driven. Sectional drawing showing a state when the volume variable means is driven. The timing diagram which represents typically the relationship between the drive of a fluid injection part, a drive waveform, and the opening / closing timing of a microvalve. Sectional drawing which shows a part of schematic structure of the fluid injection part which concerns on Embodiment 2 (state which closed the inlet flow path). Sectional drawing which shows a part of schematic structure of the fluid injection part which concerns on Embodiment 2 (state which opened the inlet flow path). Sectional drawing which shows the fluid injection part which concerns on Embodiment 3 (initial state). Sectional drawing which shows the fluid injection part which concerns on Embodiment 3 (state which obstruct | occludes an inlet flow path). Sectional drawing which shows the fluid injection part which concerns on Embodiment 3 (state which opened the inlet flow path). FIG. 9 is a timing chart schematically showing a relationship between a drive waveform and a microvalve opening / closing timing according to the fourth embodiment.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 ... Fluid injection apparatus, 10 ... Fluid injection part, 21 ... Outlet flow path, 25 ... Inlet flow path, 26 ... Liquid supply path, 30 ... Fluid chamber, 40 ... Diaphragm, 81 ... Nozzle opening, 90 ... Micro valve.

Claims (19)

A fluid ejection device that reduces the volume of a fluid chamber with a diaphragm and ejects fluid in a pulse form from a nozzle opening,
An inlet channel for supplying fluid to the fluid chamber;
An outlet channel having the nozzle opening and discharging fluid from the fluid chamber;
Volume variable means including the diaphragm driven by a drive waveform composed of a combination of a pulsation waveform and a pause waveform;
Opening and closing means for opening the inlet flow path during the drive period of the volume variable means and closing the inlet flow path during the stop period;
A fluid ejecting apparatus comprising: The fluid ejection device according to claim 1,
The opening / closing means includes a partition wall that is divided into a connection channel chamber that communicates with the inlet channel and a sealed pressure space, a sealing portion that projects from the partition toward the inlet channel, and the partition wall And an actuator for displacing the inlet, and a microvalve that opens and closes the inlet channel by the sealing portion in accordance with the displacement of the partition wall. The fluid ejection device according to claim 2,
The fluid ejecting apparatus according to claim 1, wherein the inlet channel is closed in an initial state where the partition wall is not displaced, and the inlet channel is opened in a state where the partition wall is displaced. The fluid ejection device according to claim 2,
The fluid ejecting apparatus according to claim 1, wherein the inlet channel is closed when the partition is displaced, and the inlet channel is opened in an initial state where the partition is not displaced. The fluid ejection device according to claim 2,
The fluid ejecting apparatus according to claim 1, wherein the inlet channel is closed by displacing the partition to one side from an initial state where the partition is not displaced, and the inlet channel is opened by displacing the partition to the other side. In the fluid ejection device according to any one of claims 1 to 5,
The fluid ejection is characterized in that the output timing of the drive waveform is set with a delay time from the start of the volume varying means to the maximum speed at which the fluid flows into the fluid chamber. apparatus. The fluid ejection device according to any one of claims 1 to 6,
The fluid ejecting apparatus according to claim 1, wherein the activation timing of the volume varying means and the opening timing of the inlet channel substantially coincide. In the fluid ejection device according to any one of claims 2 to 5,
A fluid supply path for supplying fluid to the connection flow path chamber is further provided, and a protrusion is provided on the pressure space side at a position between the inlet flow path and the fluid supply path,
When the inlet channel is closed, the pressure of the fluid supplied from the fluid supply path presses the vicinity of the fluid supply path of the partition wall in the direction of reducing the volume of the pressure space, A fluid ejecting apparatus, wherein the sealing portion is pressed by a lever having a fulcrum and the vicinity of the fluid supply path as a force point and the sealing portion as an action point. In the fluid ejection device according to any one of claims 2 to 5,
When the sealing portion closes the inlet channel, the partition wall is displaced by the fluid supply pressure from the fluid supply path, the volume of the pressure space is reduced, and the internal pressure of the pressure space is reduced. The fluid ejecting apparatus according to claim 1, wherein the sealing portion presses the inlet channel due to a pressure difference between the pressure space and the fluid chamber when the pressure rises above the internal pressure of the fluid chamber. The fluid ejection device according to claim 2,
A fluid ejecting apparatus, wherein a conical slope portion is provided at a tip of the sealing portion, and the inlet channel is closed by the slope portion. The fluid ejection device according to claim 1,
The fluid ejection device according to claim 1, wherein a combined inertance of the inlet channel is larger than a combined inertance of the outlet channel. The fluid ejection device according to claim 2,
A fluid ejecting apparatus using a unimorph type or bimorph type actuator as the actuator. The fluid ejection device according to claim 2,
A fluid ejecting apparatus using a multilayer piezoelectric element for the actuator. The fluid ejection device according to claim 8, wherein
The fluid ejecting apparatus according to claim 1, wherein the partition wall has a concentric corrugated structure centered on the fluid supply path. The fluid ejection device according to any one of claims 1 to 4,
The fluid ejecting apparatus according to claim 1, wherein the pulsation waveform is output when a speed at which a fluid flows into the fluid chamber reaches a maximum after the inlet channel is opened.   5. The fluid ejecting apparatus according to claim 1, wherein the inlet channel is closed while the volume is restored after the volume of the fluid chamber is minimized. Fluid ejection device. A fluid ejection device driving method for reducing the volume of a fluid chamber with a diaphragm and ejecting fluid from a nozzle opening in a pulse shape,
In the drive period of the volume variable means including the diaphragm driven by a drive waveform composed of a combination of a pulsation waveform and a pause waveform, an inlet passage for supplying fluid to the fluid chamber is opened by an opening / closing means,
The fluid ejection device driving method, wherein the inlet channel is closed by the opening / closing means during a stop period of the volume varying means. A fluid ejection apparatus driving method according to claim 17,
The pulsation waveform is output when the speed at which the fluid flows into the fluid chamber becomes maximum after the inlet channel is opened, and the volume returns from when the volume of the fluid chamber becomes minimum. And closing the inlet flow path. Fluid chambers, diaphragms,
An inlet channel for supplying fluid to the fluid chamber;
An outlet channel having a nozzle opening and discharging fluid from the fluid chamber;
Volume variable means including the diaphragm, which is generated based on the excision hardness information and is driven by a drive waveform composed of a combination of a pulsation waveform and a rest waveform,
Opening and closing means for opening the inlet flow path during the drive period of the volume variable means and closing the inlet flow path during the stop period; and
A surgical apparatus characterized in that the volume of the fluid chamber is reduced by the diaphragm, the fluid is ejected in pulses from the nozzle opening, and the living body is excised or incised.

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