JP2009219988A - Magnetic filter, and treated-liquid cleaning device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a magnetic filter equipped with a catching member from which sludge can easily be separated in case the sludge caught thereby has aggregated in the catching member, and a treated-liquid cleaning device equipped with the magnetic filter. <P>SOLUTION: The magnetic filter is comprised of a communicating flow path 5 that is formed inside the magnetic filter and allows a treated liquid to circulate therethrough, a catching member 6 that is disposed in the communicating flow path 5 and catches sludge comprising a magnetic substance in the treated liquid, a magnetic-field generation means disposed around the catching member 6, with the magnetic-field generation member constituted of a coil member 7 disposed around the catching member 6, and a magnetic field inversion mechanism that supplies electricity to the coil member 7 and can invert the direction of the current flowing through the coil member 7. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention provides a communication channel that circulates the treatment liquid inside, and a collection unit that collects the sludge containing the magnetic substance in the treatment solution is provided in the communication channel, and around the collection unit The present invention relates to a magnetic filter in which a magnetic field generating means is disposed, and a treatment liquid purification apparatus including the magnetic filter.

  Conventionally, in this type of magnetic filter, as shown in FIG. 9, a permanent magnet 16 as a magnetic field generating means is provided so as to be slidable in the flow path direction. (Note that although such prior art is known among those skilled in the art, there is no patent document or the like in which the corresponding configuration is described, so prior art documents are not shown.)

  When the explanation is added, as shown in FIG. 9A, when the permanent magnet 16 is slid and moved to the position (collection position) on the outer side of the collection part 6, the magnetic field generated by the permanent magnet 16 is collected. Acting on the part 6, the sludge S containing the magnetic material is attracted to the collecting part 6 side and collected. As shown in FIG. 9B, when the permanent magnet 16 is slid from the position on the outer side of the collecting portion 6 to the position (cleaning position) opposite to the flow path direction, the permanent magnet 16 is generated. The magnetic field does not act on the collection unit 6, and the sludge S is detached from the collection unit 6.

And as a processing liquid purification apparatus provided with the magnetic filter, for example, a first circulation path for circulating and flowing the processing liquid across the magnetic filter and the processing apparatus via the pump apparatus, and a magnetic filter and processing via the pump apparatus. A second circulation path that circulates and flows the treatment liquid over a physical filter that separates and removes sludge S contained in the liquid, and alternatively the treatment liquid is supplied to the first circulation path and the second circulation path. Some have a circulation path switching mechanism that can freely switch circulation. For example, during normal operation, the permanent magnet is slid to the collection position, and the first circulation path is switched by the circulation path switching mechanism, so that sludge generated from the processing device is collected by the magnetic filter. The permanent magnet is slid to the cleaning position and switched to the second circulation path by the circulation path switching mechanism, and the sludge collected by the magnetic filter is separated and removed by the physical filter, thereby purifying the processing liquid. it can.
Incidentally, although it is possible to purify the processing liquid simply by providing a physical filter in the circulation path, in general, since the flow resistance of the physical filter is large, especially as processing liquid supplied at a relatively large flow rate to a machine tool as a processing apparatus. However, the purification device for cutting / grinding fluid has disadvantages that it is necessary to increase the capacity of the pump device and the running cost for operating the pump device is increased.

  In the conventional magnetic filter, when the collected sludge is agglomerated in the collecting part and so-called agglomerated flocs are formed, the agglomerated flocks are entangled in the collecting part, and the permanent magnets are moved. If only a state in which the generated magnetic field does not act on the collecting part is created, there is a possibility that the aggregated floc is difficult to be separated from the collecting part.

  The present invention has been made in view of the above situation, and the purpose thereof is a magnetic filter in which the aggregated flocs are easily separated from the collection part when the collected sludge is aggregated in the collection part, and the The object is to provide a treatment liquid purifying apparatus including a magnetic filter.

  In the magnetic filter of the present invention, a communication channel through which the treatment liquid is circulated is formed inside, and a collecting portion for collecting sludge containing the magnetic substance in the treatment liquid is provided in the communication channel, and the collection is performed. The magnetic field generating means for generating a magnetic field is provided in the part, and the first characteristic configuration is that the magnetic field generating means is provided around the collecting part and energized. A coil member that generates a magnetic field in the collecting portion and a magnetic field reversal mechanism that can reversely switch the direction of the current flowing in the coil member are provided.

That is, to constitute the magnetic field generating means, a coil member that is arranged around the collecting unit and generates a magnetic field in the collecting unit by energization, and a magnetic field that can be switched in a reverse direction of the current flowing in the coil member. Since the reversing mechanism is provided, the sludge is attracted to the collecting portion side and collected by energizing the coil member to generate a magnetic field. Then, by reversing the direction of the current flowing in the coil member by the magnetic field reversal mechanism and reversing the magnetic field generated by the coil member, the magnetic force that separates the sludge from the collection portion acts on the sludge. Even when the flocs are aggregated in the collecting part and the flocs are formed, the aggregated flocs can be easily detached from the collecting part, for example, the aggregated flocs can be detached from the collecting part or broken.
As for the ionization of the non-magnetic material contained in the sludge, the non-magnetic material is ionized when the non-magnetic material passes through the magnetic field generated by the coil member at a relatively high speed, and the ionized non-magnetic material is collected in the collecting part. Therefore, it becomes easy to collect nonmagnetic materials contained in the sludge.

  According to a second characteristic configuration of the present invention, in addition to the first characteristic configuration, an AC current supply circuit that supplies an AC current to the coil member and a DC current that supplies the coil member to constitute the magnetic field inversion mechanism. A direct current supply circuit is provided, and a circuit changeover switch capable of selectively switching between the alternating current supply circuit and the direct current supply circuit is provided.

  That is, the coil member generates a magnetic field in a certain direction by switching to the direct current supply circuit with the circuit changeover switch, so that the sludge is attracted and collected to the collecting portion side stably. Then, by switching to the alternating current supply circuit with the circuit changeover switch, a magnetic field in which the coil member is repeatedly reversed is generated, so that the magnetic force pulled away from the collecting portion and the magnetic force drawn toward the collecting portion are alternately agglomerated flocs. The coagulation flocs are vibrated, and for example, the coagulation flocs are broken and the coagulation flocs are more easily separated from the collection part.

  A third characteristic configuration of the present invention is a processing liquid purification apparatus including the magnetic filter according to the first characteristic configuration, wherein the processing liquid is circulated and flowed between the magnetic filter and the processing apparatus via a pump device. And a second circulation path for circulating and flowing the processing liquid across the magnetic filter and a physical filter for separating and removing the sludge contained in the processing liquid via the pump device. And a circulation path switching mechanism capable of switching the flow of the processing liquid alternatively to the first circulation path and the second circulation path is provided.

  That is, normally, by supplying electricity to the coil member by the magnetic field reversing mechanism and switching to the first circulation path by the circulation path switching mechanism, sludge generated from the processing device is collected by the magnetic filter, and the filter During cleaning, the magnetic field reversal mechanism reverses the magnetic field of the coil member, and the circulation path switching mechanism switches to the second circulation path to separate and remove the aggregated floc separated from the magnetic filter by the physical filter. By doing so, the treatment liquid can be purified.

  The fourth feature configuration of the present invention is provided with command means for inputting a filter cleaning command and outputting command information to the control means in addition to the third feature configuration, and the filter cleaning command is input to the command means. Then, based on the command information output from the command means, the circulation path switching mechanism switches to the second circulation path, and the magnetic field reversal mechanism changes the direction of the current flowing through the coil member at least once. It is characterized in that the control means for controlling to counteract is provided.

  That is, when filter cleaning is input to the command means, the circulation path switching mechanism switches to the second circulation path, and the magnetic field reversal mechanism reverses the direction of the current flowing through the coil member at least once. The treatment liquid can be purified with a simple operation by simply inputting a cleaning command.

  In addition to the fourth feature configuration, a fifth feature configuration of the present invention is provided with an excitation state switching mechanism capable of switching the coil member between an excitation state and a non-excitation state, and the control means includes a command means. When filter cleaning is input, based on the command information output from the command means, the circuit is switched to the second circuit by the circuit switching mechanism, and the direction of the current flowing through the coil member by the magnetic field reversing mechanism The coil member is configured to be switched to a non-excited state by the excitation state switching mechanism after being inverted at least once.

  That is, when filter cleaning is input to the command means, the circuit is switched to the second circuit by the circuit switching mechanism, the direction of the current flowing through the coil member is reversed at least once by the magnetic field reversing mechanism, and then the excitation state is switched. Since the coil member is switched to the non-excited state by the mechanism, it is possible to prevent the aggregated floc separated from the collecting portion from adhering again with the coil member in the non-excited state.

[First embodiment]
Hereinafter, a treatment liquid purification apparatus including a magnetic filter according to the present invention will be described.

  As shown in FIGS. 1 to 3, the processing liquid purifying apparatus includes a tank I for storing cutting fluid as processing liquid, a pump device A for sending out cutting fluid, and a sludge S containing magnetic material 1 in the cutting fluid. A magnetic filter B that can collect or remove the collected sludge S into the cutting fluid, a machine tool G as a processing device, a physical filter F that separates and removes the sludge S contained in the cutting fluid, A three-way switching valve E as a circulation path switching mechanism is provided.

The tank I and the three-way switching valve E are connected to each other through a first flow path 2 formed inside the pipe 9, and the pump device A and the magnetic filter B are connected to the first flow path 2 with cutting fluid. They are provided in the order of flow direction. The three-way switching valve E and the machine tool G are connected in communication by a second flow path 3 formed inside the pipe 9. The three-way switching valve E and the tank I are connected in communication by a bypass path 4 formed inside the pipe 9, and a physical filter F is provided in the bypass path 4. Thereby, when switching to the machine tool G side by the three-way switching valve E, the cutting fluid that has passed through the magnetic filter B is supplied to the machine tool G by the operation of the pump device A, and the cutting fluid that has passed through the machine tool G is In a normal circulation state in which the cutting fluid stored in the tank I and the cutting fluid stored in the tank I returns to the magnetic filter B, the cutting fluid is circulated and flowed, and is switched to the physical filter F side by the three-way switching valve E. By the operation of the pump device A, the cutting fluid that has passed through the magnetic filter B is supplied to the physical filter F without passing through the machine tool G, and the cutting fluid that has passed through the physical filter F is stored in the tank I. In the filter cleaning circulation state in which the cutting fluid stored in I returns to the magnetic filter B, the cutting fluid is circulated and flowed.
Therefore, the 1st flow path 2 and the 2nd flow path 3 comprise the 1st circulation path J1 which circulates and flows cutting fluid over the magnetic filter B, the machine tool G, and the tank I via the pump apparatus A, The first flow path 2 and the bypass path 4 constitute a second circulation path J2 for circulating and flowing the cutting fluid across the magnetic filter B, the physical filter F, and the tank I via the pump device A. The three-way switching valve E is configured to be capable of switching the flow of the cutting fluid alternatively to the first circulation path J1 and the second circulation path J2.

When the description of the configuration of the magnetic filter B is added, as shown in FIGS. 1 to 4, the communication flow path 5 through which the cutting fluid flows is formed inside, and the sludge S containing the magnetic body 1 in the cutting fluid is formed. A magnetic wire mesh 6 as a collecting part to be collected is provided in the communication channel 5, a coil member 7 is provided around the wire mesh 6, and a DC power supply 8 for supplying electricity to the coil member 7 is provided. It is.
In other words, the magnetic filter B includes a socket portion 10 on one side formed with a female screw portion 10a connected to a male screw portion 9a of the pipe 9 in which the first flow path 2 is formed. The socket part 10 on the other side formed with the female screw part 10a connected to the male screw part 9a of the pipe 9 in which the flow path 3 is formed, the cylindrical member 11 connecting the sockets 10 to each other, and the cylindrical member 11 A cylindrical wire net 6 attached to the inner peripheral surface 11a, a cylindrical coil member 7 and the like surrounding the outer peripheral surface 11b of the cylindrical member 11 along its longitudinal direction are provided. Therefore, the communication flow path 5 which distribute | circulates cutting fluid is formed in the inside of the cylindrical member 11a.

  The movable contact 12a of the first changeover switch SW1 is connected to the end of one winding of the coil member 7, and the movable contact 13a of the second changeover switch SW2 is connected to the other winding of the coil member 7. A fixed contact 12b on one side of the first changeover switch SW1 and a fixed contact 13b on one side of the second changeover switch SW2 are connected to one side of the DC power supply 8, and the first changeover switch SW1 is connected to the other side of the DC power supply 8. The other fixed contact 12c is connected to the other fixed contact 13c of the second changeover switch SW2.

Then, as shown in FIG. 1, the first switching switch SW1 is switched to bring the movable contact 12a into contact with the one fixed contact 12b, and the second switching switch SW2 is switched to move the movable contact 13a and the other fixed contact. By switching to 13c, the coil member 7 is switched to an excitation state in which a current flows. As shown in FIG. 2, the first changeover switch SW1 is changed over to bring the movable contact 12a into contact with the other fixed contact 12c, and the second changeover switch SW2 is changed over to move the movable contact 13a and the fixed contact 13b on one side. Is reversed to reverse the direction of the current flowing in the coil member 7. As shown in FIG. 3, the first changeover switch SW1 is changed over so that the movable contact 12a does not come into contact with any one of the fixed contact 12b and the other fixed contact 12c, and the second changeover switch SW2 is changed over. Thus, the movable contact 13a is not brought into contact with any one of the fixed contact 13b on one side and the fixed contact 12c on the other side, so that the coil member 7 is switched to a non-excited state.
Therefore, the coil member 7, the DC power source 8, the first changeover switch SW1, and the second changeover switch SW2 constitute a magnetic field generating means. Then, the first changeover switch SW1 and the second changeover switch SW2 switch the magnetic field reversing mechanism C and the coil member 7 which can switch the direction of the current flowing through the coil member 7 between the excited state and the non-excited state. A flexible excitation state switching mechanism D is configured.

Hereinafter, an explanation will be given on the action of the sludge collected by the magnetic filter B separating from the collecting part.
As shown in FIG. 1, when the three-way switching valve E is switched to the first circulation path J1, and the coil member 7 is switched to the excited state by the first switching switch SW1 and the second switching switch SW2, it is generated from the coil member 7. Since the wire mesh 6 is magnetized by the magnetic field, the sludge S is attracted to the wire mesh 6 side and collected. Thereby, the sludge S generated from the machine tool G is collected by the magnetic filter B while the cutting fluid circulates and flows in a normal circulation state, and the cutting fluid can be maintained in a good state.

As shown in FIG. 5 (a), when the collected sludge S aggregates on the wire mesh 6 and a so-called aggregate floc is formed, the end 1a on the wire mesh 6 side of the magnetic body 1 included in the aggregate floc. In addition, a magnetic pole opposite to that of the wire mesh 6 is generated. Then, as shown in FIG. 2, the three-way switching valve E switches to the second circulation path J2, and the first switching switch SW1 and the second switching switch SW2 reverse the direction of the current flowing through the coil member 7 to thereby change the coil member. When the magnetic field 7 is reversed, the magnetic pole of the wire mesh 6 is also reversed, and a repulsive force is generated between the magnetic pole of the reversed wire mesh 6 and the magnetic pole 1a of the magnetic body 1 included in the aggregated floc. As shown, the aggregated floc is easily separated from the wire mesh 6 such that the aggregated floc is detached from the wire mesh 6 or the aggregated floc is destroyed. That is, in the conventional configuration, since the magnetic field acting on the wire mesh 6 is only zero or almost zero, no repulsive force is generated between the wire mesh 6 and the magnetic body 1 included in the aggregated floc. According to the above, since the magnetic field acting on the wire mesh 6 is reversed, a repulsive force is generated between the wire mesh 6 and the magnetic body 1 included in the aggregated floc, so that the aggregated floc can be easily separated from the collecting portion. It is. Thereby, the magnetic filter B can be satisfactorily cleaned by separating and removing the aggregated flocs collected by the magnetic filter B while the cutting fluid circulates and flows in the filter cleaning circulation state.
In addition, regarding the ionization of the nonmagnetic material 15 contained in the sludge S, the nonmagnetic material 15 is ionized when the nonmagnetic material 15 passes through the magnetic field generated by the coil member 7 at a relatively high speed. 6, the nonmagnetic material 15 contained in the sludge S can be easily collected.

  Thereafter, as shown in FIG. 3, when the second circulation path J2 is maintained by the three-way selector valve E and the coil member 7 is switched to the non-excited state by the first selector switch SW1 and the second selector switch SW2, the coil member 7 is in a non-excited state, so that the sludge S separated from the wire mesh 6 can be prevented from adhering again.

  Hereinafter, control for cleaning the magnetic filter B will be described.

  As shown in FIGS. 6 and 7, a filter cleaning command button 14 as command means for inputting a filter cleaning command and outputting command information to a control device H as control means, and the filter cleaning command button 14 A control device H that controls switching of the three-way selector valve E, the first selector switch SW1, and the second selector switch SW2 is provided based on the output command information. When the filter cleaning command is input to the filter cleaning command button 14, the control means H enters the second circulation path J2 with the three-way switching valve E based on the command information output from the filter cleaning command button 14. After switching, the direction of the current flowing through the coil member 7 is reversed once by the first switch SW1 and the second switch SW2, and then the coil member 7 is de-excited by the first switch SW1 and the second switch SW2. It is configured to switch to a state.

  In other words, as shown in FIG. 7, when the filter cleaning command button 14 is pressed and a filter cleaning command is input, the first circulating path J1 is switched to the second circulating path J2, and the current flowing through the coil member 7 is changed. Is reversed once to reverse the magnetic field of the coil member 7, and the coil member 7 is switched to the non-excited state and switched to the non-excited state (# 1 to # 4). If the filter cleaning command is not input, the second circulation path J2 is switched to the first circulation path J1, and the coil member 7 is switched to the excited state (# 5, # 6).

[Another embodiment]
(1) In the above embodiment, the configuration in which the magnetic field reversal mechanism C and the excitation state switching mechanism D are the DC power supply 8, the first switching switch SW1, and the second switching switch SW2 is exemplified. In order to constitute the magnetic field reversing mechanism C, an AC current supply circuit that supplies an AC current to the coil member 7 and a DC current supply circuit that supplies a DC current to the coil member are provided. A circuit selector switch SW4 that can be selectively switched between the DC current supply circuit and the DC current supply circuit may be provided. That is, as shown in FIG. 8, the end of one side of the coil member 7 and the AC power supply 17 are wired, the AC power supply 17 and the circuit switch SW4 are wired, and the circuit switch SW4 and the coil member are wired. 7 is connected to one end of the winding to constitute an AC current supply circuit, AC power supply 17 and rectifier 18 are wired, rectifier 18 and circuit changeover switch SW4 are wired, A direct current supply circuit may be configured. Furthermore, an AC power supply and a rectifier are wired in parallel, and an AC current supply circuit that supplies an AC current to the coil member 7 and a DC current supply circuit that supplies a DC current to the coil member are provided. A circuit change-over switch SW4 that can selectively switch between the DC current supply circuit and the DC current supply circuit may be provided.

(2) In the above embodiment, the processing apparatus is a machine tool such as a lathe or a milling machine and the processing liquid is a cutting liquid. However, the processing apparatus is not limited to such a configuration, and the processing apparatus is a grinding machine. Thus, the processing liquid may be a grinding liquid, and various processing apparatuses can be used.

(3) In the above embodiment, the configuration in which the direction of the current flowing through the coil member 7 is reversed once by the first changeover switch SW1 and the second changeover switch SW2 and the coil member 7 is switched to the non-excited state is exemplified. The direction of the current flowing through the coil member 7 may be reversed two or more times by the first changeover switch SW1 and the second changeover switch SW2. Further, the number of times and the time for reversing the direction of the current flowing through the coil member 7 and the time for maintaining the non-excited state can be appropriately set according to the properties of sludge and the like. Furthermore, the coil member 7 may not be switched to the non-excited state.

(4) In the above embodiment, based on the filter cleaning command button 14 that inputs the filter cleaning command and outputs the command information to the control device H, and the command information output from the filter cleaning command button 14, A three-way switching valve E, a control device H that controls switching of the first switching switch SW1 and the second switching switch SW2, and when the control means H inputs filter cleaning to the filter cleaning command button 14, the filter Based on the command information output from the cleaning command button 14, the three-way switching valve E switches to the second circulation path J2, and the direction of the current flowing through the coil member 7 is determined by the first switching switch SW1 and the second switching switch SW2. After reversing once, the coil member 7 is in a non-excited state by the first changeover switch SW1 and the second changeover switch SW2. Although the configuration for switching is illustrated, the present invention is not limited to this, and the control device H is provided with switching state detecting means for detecting the switching state of the three-way switching valve E without providing the filter cleaning command button 14. When the detection means detects that the second circulation path J2 has been switched, the three-way switching valve E switches to the second circulation path J2, and the first switching switch SW1 and the second switching switch SW2 flow to the coil member 7. A configuration in which the coil member 7 is switched to a non-excited state by the first changeover switch SW1 and the second changeover switch SW2 after reversing the direction of the current once is possible, and various control modes are conceivable.
Without providing the control device H, the three-way selector valve E is manually switched to the second circulation path J2, and the direction of the current flowing through the coil member 7 through the first selector switch SW1 and the second selector switch SW2 is changed once. Needless to say, the coil member 7 may be switched to the non-excited state after the reversal by using the first switch SW1 and the second switch SW2.

(5) In the above embodiment, the configuration in which the pump device A and the magnetic filter B are provided in the first flow path 2 in the order of the flow direction of the cutting fluid is exemplified. However, the number of the magnetic filters B is limited to one. It is not necessary to provide two or more. As a result, the nonmagnetic material 15 contained in the sludge S is ionized by the magnetic filter B upstream of the cutting fluid flow direction, and the ionized nonmagnetic material 15 is captured by the magnetic filter B downstream of the cutting fluid flow direction. It will be easy to collect.

(6) In the above embodiment, the configuration in which the pump device A that feeds the cutting fluid is illustrated, but a pulsation mechanism that pulsates the pressure that feeds the cutting fluid to the pump device A may be further provided.

(7) In the above embodiment, when switching to the physical filter F side by the three-way switching valve E, the cutting fluid that has passed through the magnetic filter B does not pass through the machine tool G to the physical filter F by the operation of the pump device A. The configuration in which the cutting fluid supplied and passing through the physical filter F is stored in the tank I is illustrated. However, the cutting fluid passing through the magnetic filter B may be discarded without providing the physical filter F. .

(8) In the above embodiment, the configuration in which the collection unit is the wire net 6 is illustrated, but the present invention is not limited to this, and the collection unit may be steel wool or a coil. It can be replaced if it is made of a magnetic material and has a large surface area.

Overall configuration diagram of treatment liquid purifier Overall configuration diagram of treatment liquid purifier Overall configuration diagram of treatment liquid purifier Cross section of magnetic filter Diagram showing the action of sludge leaving the wire mesh Control block diagram of control operation Control flow chart of control operation Whole block diagram of processing liquid purification device in another embodiment Sectional view of a conventional magnetic filter

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Magnetic body 5 Communication flow path 6 Collection part 7 Coil member 14 Command means A Pump apparatus B Magnetic filter C Magnetic field inversion mechanism D Excitation state switching mechanism E Circulation path switching mechanism F Physical filter G Processing apparatus H Control means J1 1st circulation Road J2 Second circuit

Claims (5)

A magnetic field for forming a communication channel for flowing the treatment liquid therein, providing a collection part for collecting sludge containing the magnetic substance in the treatment liquid in the communication channel, and generating a magnetic field in the collection part A magnetic filter provided with generating means,
The magnetic field generating means includes a coil member disposed around the collecting unit and generating a magnetic field in the collecting unit by energization, and a magnetic field reversing mechanism capable of switching the direction of the current flowing through the coil member. A magnetic filter is provided.   The magnetic field reversing mechanism includes an alternating current supply circuit that supplies an alternating current to the coil member, and a direct current supply circuit that supplies a direct current to the coil member, and the alternating current supply circuit and the direct current The magnetic filter according to claim 1, further comprising a circuit changeover switch capable of selectively switching between the supply circuit and the supply circuit. A treatment liquid purification apparatus comprising the magnetic filter according to claim 1,
A first circulation path that circulates and flows the processing liquid across the magnetic filter and the processing apparatus via a pump device; and the sludge contained in the magnetic filter and the processing liquid is separated via the pump device. A second circulation path that circulates and flows the treatment liquid across the physical filter to be removed, and the circulation path in which the treatment liquid can be selectively switched between the first circulation path and the second circulation path A treatment liquid purification apparatus provided with a switching mechanism. Provided with command means for inputting a filter cleaning command and outputting command information to the control means,
When a filter cleaning command is input to the command means, based on the command information output from the command means, the circuit is switched to the second circuit by the circuit switching mechanism, and the coil member is operated by the magnetic field reversing mechanism. The processing liquid purification apparatus according to claim 3, wherein the control means is provided for controlling the direction of the current flowing through the at least one time to reverse. Provided with an excitation state switching mechanism capable of switching the coil member between an excitation state and a non-excitation state,
The control means is
When a filter cleaning command is input to the command means, based on the command information output from the command means, the circuit is switched to the second circuit by the circuit switching mechanism, and the coil member is operated by the magnetic field reversing mechanism. The processing liquid purifying apparatus according to claim 4, wherein the coil member is controlled to be switched to a non-excited state by the excitation state switching mechanism after the direction of the current flowing through is reversed at least once.

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