JP2009194083A - Image sensor and method of manufacturing the same - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an image sensor that raises euphotic detecting accuracy, while stably ensuring condensing efficiency, can be miniaturized, can improve productivity and can reduce manufacturing cost, and to provide a method of manufacturing the image sensor. <P>SOLUTION: The image sensor 10 includes a light-condensing section 4 which condenses an incident light L, a light-receiving section 2 which receives the condensed incident light L, and a substrate 1 which distributes and arranges the light-condensing section 4 and the light-receiving section 2. The incident light L side of the substrate 1 includes an inside first region 6 with hydrophilic properties or oleophilic properties and an outside second region 7 with water repellency or oil repellency which are sectioned by a boundary portion 5. The light-condensing section 4 includes a liquid portion 4b of liquid. The liquid portion 4b is arranged inside the boundary portion 5, and its color setup is carried out so that the incoming incident light L may be selectively penetrated to the light-receiving section 2 side by a wavelength region. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to an image sensor including a light collecting unit that collects incident light and a light receiving unit that receives the collected incident light, and a method for manufacturing the image sensor.

 In general, an image sensor such as a CCD image sensor or a CMOS image sensor mounted on a digital still camera or a mobile phone includes a plurality of condensing lenses (condensing units), a color filter, and a light receiving element (light receiving unit). Is formed. A red (R), green (G) or blue (B) color filter made of an organic film is arranged in a pattern on the incident light side of each light receiving element such as a photodiode, and the incident light of these color filters is further arranged. Convex lens-like condensing lenses are arranged on the side, and these members are integrated with a substrate made of a semiconductor material.

The condensing lens refracts incident light from the light source at its spherical exterior surface (interface) and efficiently irradiates it to form an image on the light receiving element, thereby increasing the condensing efficiency. As such a condensing lens, for example, a lens disclosed in Patent Document 1 is known. In this patent document 1, a light-shielding aluminum film is covered with a resist pattern, and then an anodization is performed by passing a current, and only the opening portion of the resist pattern is changed to a light-transmitting anodic oxide (Al ₂ O ₃ ). A condensing lens is formed. In addition, as a condensing lens other than Patent Document 1, for example, a lens made of a substantially sheet-like acrylic resin film in which a plurality of convex lens portions are arranged in a vertical and horizontal direction in plan view is known.

  In addition, the color filter is provided for causing each light receiving element that does not have color discrimination ability to detect a color. For example, the light transmissive filter is colored in three primary colors of R, G, and B by pigments or dyes. These are formed in a pattern at positions corresponding to the respective light receiving elements. The incident light incident from the condensing lens is selectively transmitted in accordance with the wavelength region of each color and sent to each light receiving element.

As the color arrangement pattern of the color filter, for example, a Bayer arrangement in which green is provided twice as many as red or blue in accordance with the spectral sensitivity of human vision and arranged in a substantially array form is known.
Such a color filter is generally produced by photolithography. In recent years, a filter using a photonic crystal that selectively transmits incident light by periodically arranging two substances having different refractive indexes instead of the above-described color filter is also known.
Japanese Patent Laid-Open No. 9-222505

  However, when forming a condensing lens as in Patent Document 1, the manufacturing process is diversified, such as an aluminum film forming process, a resist pattern forming process, and an anodizing process. It was apt. In addition, when manufacturing a condensing lens by processing a resin such as an acrylic resin film, each light receiving element can collect the incident light efficiently and irradiate the light receiving element. However, it is difficult to ensure the positioning accuracy stably.

In addition, a slight gap may occur between the bottom surface portion of the condenser lens and, for example, the substrate surface on which the condenser lens is disposed during manufacturing, and incident light is scattered due to this gap, and the light receiving element. The imaging accuracy with respect to the image sensor decreases, and the detection accuracy of the image sensor may decrease.
Moreover, since the work process for manufacturing the condensing lens is complicated and requires skill of the operator, improvement in workability has been desired.

In addition, an organic film is generally used for the color filter, and since it is manufactured by photolithography, the manufacturing cost is high.
In addition, since there is a demand for further thinning and downsizing of digital still cameras and mobile phones on which image sensors are mounted, it has been a challenge how to reduce the size of image sensors.

 The present invention has been made in view of the above-described problems. The light collection efficiency is stably secured, the detection accuracy of light reception is increased, the size can be reduced, the productivity is improved, and the manufacturing cost is reduced. An object of the present invention is to provide an image sensor that can be used and a manufacturing method thereof.

  In order to achieve the above object, the present invention proposes the following means. That is, the present invention is an image sensor including a light collecting unit that collects incident light, a light receiving unit that receives the collected incident light, and a substrate on which the light collecting unit and the light receiving unit are disposed. Then, on the incident light side of the substrate, a first region having an inner hydrophilicity or lipophilicity and a second region having an outer water repellency or oil repellency, which are partitioned by a boundary portion, are provided. The condensing unit includes a liquid-like liquid unit, and the liquid unit is disposed inside the boundary portion and selectively transmits the incident light incident on the light receiving unit side according to a wavelength region. The color is set as follows.

  According to the image sensor of the present invention, on the incident light side of the substrate, the hydrophilic or oleophilic first region adapted to the liquid part of the condensing part and the water-repellent or oil-repellent second part repelling the liquid part. Are provided. Then, for example, the first region is arranged on the inner side and the second region is arranged on the outer side by a boundary portion formed in a substantially circular frame shape in plan view or a substantially quadrangle frame shape in plan view, so that these regions are partitioned. ing.

  The liquid part of the condensing part is appropriately dropped inside the boundary part, so that the liquid part fits into the first region and is held inside. Further, since the second region that repels the liquid portion is disposed outside the boundary portion, the liquid portion is positioned so as to remain inside the boundary portion without moving to the outside. Further, the liquid portion is formed in a convex lens shape by surface tension by appropriately adjusting the liquid amount and the like.

  Therefore, the liquid part is positioned by simply being dropped inside the boundary part, so that the light collecting part is easily and accurately positioned, and the light collection efficiency is stably secured. The accuracy of the image sensor is increased. That is, the dropped liquid part is repelled by the second region, is held in conformity with the first region, and is naturally arranged so as to be centered inside the boundary portion. It is like that.

  In addition, since the first region is hydrophilic or oleophilic, which is easy to adjust to the liquid part, a gap is formed between the dropped liquid part and the surface of the first region as in the prior art. There is nothing. Therefore, the imaging accuracy with respect to the light receiving part of the light collecting part is stabilized. Here, if the inside of the boundary portion is formed entirely in the first region, the above-described effect can be achieved more reliably.

Moreover, the image sensor of this invention WHEREIN: The said condensing part is good also as providing the film-form exterior body which seals the said liquid part.
According to the present invention, since the liquid portion is sealed so as to be covered with the film-shaped exterior body, the liquid portion is scattered when an impact, vibration, acceleration, or the like is applied to the image sensor. It does not move or move outside the boundary portion, and is securely held inside the boundary portion. Therefore, the accuracy of the image sensor is stabilized.

In the image sensor of the present invention, the outer package may be made of a paraxylylene resin film formed by chemical vapor deposition.
According to the present invention, since the exterior body of the light collecting portion is a paraxylylene resin film (parylene) formed by a chemical vapor deposition method (CVD method), the liquid portion is hermetically sealed to collect light. As a result, the light collection efficiency of the light collecting part is stably secured, and the workability for manufacturing the light collecting part is greatly improved. Parylene has high airtightness, excellent gas barrier properties, chemical resistance, heat resistance, cold resistance, and the like, and has a high durability because the liquid portion is stably sealed for a long period of time.

Moreover, the image sensor of this invention WHEREIN: The said liquid part of the said condensing part is good also as being photocuring resin which changes from a liquid state to a solid state when exposed.
According to the present invention, a liquid portion made of a photo-curable resin can be exposed to light and changed into a solid state, so that stability against impacts and vibrations can be further increased, and various demands can be met. is there.

  In the image sensor according to the aspect of the invention, the plurality of light condensing units may be configured so that each of the liquid units has a color setting that transmits a wavelength region of any one color of red, green, and blue, and the adjacent liquids It is good also as a part being set as the said color setting which is mutually different.

  According to the present invention, the liquid part of the condensing part is colored in any one color of red, green, or blue by a pigment, a dye, or the like, respectively, and the wavelength range of incident light corresponding to each color setting Is selectively transmitted to the light receiving unit side. As a result, a light receiving unit that does not have color identification capability can detect each color.

That is, since the condensing part is colored, it is not necessary to provide a space for arranging a color filter or a photonic crystal for color identification between the condensing part and the light receiving part as in the past. Only the condensing space is sufficient. Therefore, the image sensor can be made thinner and smaller, and a digital still camera, a mobile phone, and the like equipped with the image sensor can be made thinner and smaller. Moreover, work efficiency is improved by reducing the number of members, and the manufacturing cost is reduced.
In addition, since the adjacent liquid parts have different color settings, color detection can be performed more precisely.

In the image sensor of the present invention, the plurality of light condensing units may be arranged in a pattern.
According to the present invention, for example, a plurality of light collecting units are provided with twice the number of light receiving units for detecting green and red for detecting the green color in accordance with the spectral sensitivity of human vision, respectively. It is a Bayer array arranged in an array, and is arranged in a pattern. When such an image sensor is used, it is possible to perform detection that more closely approximates human vision.

  In the image sensor according to the aspect of the invention, the light condensing unit may have a refractive index set by setting either the liquid amount or viscosity of the liquid unit, or a range inside the boundary part. .

  According to the present invention, the condensing unit appropriately sets one of the liquid amount or viscosity of the liquid forming the liquid part, or the range inside the boundary part where the liquid part is disposed. As a result, the outer shape of the convex lens formed by the surface tension changes, and the refractive index changes. Therefore, it is possible to appropriately set the light collection efficiency of incident light determined by the refractive index, and it is possible to respond to various detection demands.

Further, in the image sensor of the present invention, the plurality of light collecting units may be set to at least two different sizes.
According to the present invention, since the plurality of light collecting portions are set to at least two kinds of sizes different from each other, the light collecting efficiency of the light collecting portion can be set to each of various demands. Can respond.

  The present invention is also a method for manufacturing the above-described image sensor, wherein the liquid portion is dropped toward the inside of the boundary portion using an ink jet technique.

  According to the method for manufacturing an image sensor of the present invention, a plurality of liquid portions can be dropped and arranged inside each boundary portion by using an inkjet technique. In addition, after the liquid portion is positioned by dropping, the dropped liquid portion naturally moves so as to align with the approximate center inside the boundary portion. Accordingly, it is possible to improve the position accuracy of the light collecting unit without taking time and effort to the operator. Further, as in the prior art, in order to position the condensing unit, a troublesome work process that requires the skill of the operator is unnecessary, and productivity is improved. In addition, by using the ink jet technique, the amount of the liquid to be dropped can be set as appropriate, and the degree of freedom for setting the light collecting portion is increased. Further, the light collecting part can be formed quickly with good workability.

  According to the image sensor and the manufacturing method thereof according to the present invention, the light collection efficiency is stably secured, the detection accuracy of light reception is increased, the size can be reduced, the productivity is improved, and the manufacturing cost is reduced. it can.

Embodiments of the present invention will be described below with reference to the drawings.
FIG. 1 is a cross-sectional view illustrating a schematic configuration of an image sensor according to an embodiment of the present invention, FIG. 2 is a schematic plan view illustrating the arrangement of the image sensor according to the embodiment of the present invention, and FIG. It is the schematic explaining the manufacturing process of the image sensor which concerns on embodiment.

  As shown in FIG. 1, the image sensor 10 of the present embodiment has a photodiode (light receiving unit) 2 flush with the surface of the base material 1a made of a semiconductor material on the incident light L side (upper side in FIG. 1). Arranged. In addition, a light shielding layer 3 made of an aluminum material is provided in a portion other than the light receiving surface 2 a that receives the incident light L of the photodiode 2 in order to prevent smear and the like due to oblique incidence of the incident light L. The substrate 1a and the light shielding layer 3 are laminated to form the substrate 1. A substantially circular hole-shaped opening 3 a is formed at a position corresponding to the light receiving surface 2 a of the light shielding layer 3. The opening 3 a has an opening area in plan view that is set slightly smaller than the area of the light receiving surface 2 a of the photodiode 2.

  Although not shown, a plurality of wirings are provided between the light shielding layer 3 of the substrate 1 and the base material 1a. In addition, a charge-coupled device (Charge-Coupled Device) for transporting charges generated in the photodiode 2 is provided.

  Further, on the incident light L side of the photodiode 2, there is provided a condensing portion 4 formed in a convex curved surface shape or a convex lens shape so as to cover the light receiving surface 2 a and the opening 3 a of the light shielding layer 3. It has been. The condensing unit 4 includes a transparent exterior body 4a made of a flexible film, a lens liquid (liquid part) 4b made of liquid aqueous ink that is sealed inside the exterior body 4a and has translucency. It is formed by. Further, the lens liquid 4b is colored in any one of red (R), green (G), and blue (B) in advance with a pigment, a dye, or the like.

  Further, a surface portion facing the incident light L side of the light shielding layer 3 with which the peripheral portion of the exterior body 4 a of the light collecting portion 4 abuts is a boundary portion 5. That is, the boundary portion 5 is formed on the substrate 1 in a substantially circular frame shape in plan view. A substantially ring-shaped region in plan view sandwiched between the boundary portion 5 and the periphery of the opening 3a on the inner side is a hydrophilic region (first region) 6.

  The hydrophilic region 6 has a surface that has been previously subjected to a hydrophilic treatment by irradiation with hydrogen ions and is adapted to the lens solution 4b, and holds the lens solution 4b. Further, a water repellent region (second region) 7 is formed outside the boundary portion 5 so as to surround the hydrophilic region 6. The water-repellent region 7 has a property that its surface repels the lens liquid 4b. That is, in this way, the hydrophilic region 6 and the water repellent region 7 are partitioned by the boundary portion 5.

  The condensing unit 4 has a structure in which the lens liquid 4b is hermetically sealed in a droplet state by covering the surface on which the droplet of the lens liquid 4b is formed with an exterior body 4a. Specifically, the condensing unit 4 drops an appropriate amount of a lens liquid 4b having an appropriate viscosity onto the substrate 1, and the droplet of the lens liquid 4b is formed in a substantially spherical shape or a substantially dome shape due to surface tension. By forming a flexible film exterior 4a made of paraxylylene resin film (parylene) on the surface using chemical vapor deposition (CVD), the lens solution 4b is airtight in the form of droplets. Sealed. And the condensing part 4 formed with these exterior bodies 4a and the lens liquid 4b is made into the substantially convex lens shape, and is provided with the focusing effect of light. And the focal position of the condensing part 4 formed in this way is set so that it may become the light-receiving surface 2a of the photodiode 2. FIG.

  Paraxylylene resins are excellent in gas barrier properties, chemical resistance, heat resistance, cold resistance, and the like. Examples of such paraxylylene resins include polymonochloroparaxylylene (parylene C) and polyparaxylylene. (Parylene N), polydichloroparaxylylene (Parylene D), etc. can be mentioned. The parylene formed by this CVD method is very suitable as the exterior body 4a because the lens liquid 4b can be hermetically sealed in a droplet state and can be easily miniaturized.

Next, an arrangement using the plurality of image sensors 10 configured as described above will be described.
As shown in FIG. 2, in the plurality of image sensors 10, the lens liquid 4 b of each condensing unit 4 is colored by setting one of R, G, and B, and is incident on the substrate 1. They are regularly arranged in an approximate array on the same surface facing the light L side.

  The plurality of image sensors 10 arranged in this manner are arranged in a pattern by alternately arranging a plurality of a rows and a plurality of b rows. That is, when attention is paid to the row a extending in the vertical direction in FIG. 2, R and G are alternately arranged. When attention is paid to the b row extending in the vertical direction in FIG. 2 as in the case of the a row, G and B are alternately arranged. In addition, the Gs arranged in the a row and the b row are arranged in a staggered manner so that the a row and the b row are not adjacent to each other in the vertical and horizontal directions (vertical and horizontal directions in FIG. 2). Yes. In this way, a so-called Bayer array using R, G, and B colors is formed.

  According to the Bayer-arrayed image sensors 10, the adjacent image sensors 10 are arranged so that the color setting of the condensing unit 4 is different from each other, and the color arrangement matches the spectral sensitivity of human vision. Thus, G is set to be twice the quantity of R and B.

Next, a manufacturing process of the image sensor 10 of the present embodiment will be described.
First, in the semiconductor manufacturing process, as shown in FIG. 3A, a base material 1a made of a semiconductor material is prepared, and as shown in FIG. 3B, the incident light L side (in FIG. 3) of the base material 1a. The light receiving surface 2a of the photodiode 2 is disposed on the upper surface so as to be flush with each other. In addition, various wirings and a CCD (not shown) are arranged on the substrate 1a.

  Next, as shown in FIG. 3C, a water-repellent light-shielding layer 3 made of an aluminum material is formed on the base 1a and the incident light L side of the light receiving surface 2a of the photodiode 2 by sputtering or the like. Then, a predetermined resist pattern (not shown) is provided on the surface of the light shielding layer 3, and an opening 3a is formed as shown in FIG.

  Next, as shown in FIG. 3 (e), in the region of reference numeral 6 between the peripheral edge portion of the opening 3a of the light shielding layer 3 and the boundary portion 5 formed around the opening 3a. Hydrophilic treatment is performed by hydrogen ion irradiation to form the hydrophilic region 6. The outer side of the boundary portion 5 is a water repellent region 7.

  Next, as shown in FIG. 3 (f), a droplet of the lens liquid 4 b is appropriately dropped inside the boundary portion 5 using an ink jet technique. Then, the lens liquid 4b stays in the range inside the boundary portion 5 so as to be repelled by the water-repellent region 7 outside the boundary portion, and the outer shape is formed into a convex lens shape by its surface tension. Further, the lens liquid 4b formed in a convex lens shape in this way is naturally aligned at a position corresponding to the light receiving surface 2a at the substantially center of the boundary portion 5.

  Next, as shown in FIG. 3G, the lens liquid 4b is formed by forming a flexible film exterior body 4a made of parylene on the substantially spherical surface of the lens liquid 4b using a CVD method. The light condensing part 4 is formed by hermetically sealing in the form of droplets.

  As described above, according to the image sensor 10 of the present embodiment, the liquid lens liquid 4b of the light collecting unit 4 is dropped toward the inside of the boundary portion 5 by using the ink jet technology. The position accuracy is stable. Further, by using the ink jet technique, the amount of the liquid for dropping the lens liquid 4b can be set as appropriate, and the degree of freedom for setting the light collecting unit 4 is increased. Further, the light collecting section 4 can be formed quickly with good workability, and productivity is improved.

  In addition, since the hydrophilic region 6 into which the lens liquid 4b is dropped is surrounded by the water-repellent region 7 that repels the lens liquid 4b, the lens liquid 4b is reliably positioned within the boundary portion 5. It has become so. That is, the dropped lens liquid 4 b is repelled by the water-repellent region 7, is familiar with the hydrophilic region 6, is held within the boundary portion 5, and is naturally adjusted to substantially the center of the boundary portion 5. Arranged as minded.

  Therefore, the positioning accuracy of the light collecting unit 4 with respect to the photodiode 2 is further stabilized, the light collecting efficiency is stably secured, the detection accuracy of the image sensor 10 is increased, and the light collecting unit is not troublesome. The position accuracy of 4 is improved. Therefore, unlike the prior art, a troublesome work process that requires the skill of an operator to position the light collecting unit 4 is unnecessary, and productivity is improved.

Further, since the hydrophilic region 6 is made hydrophilic so as to be familiar with the lens solution 4b, a gap is formed between the dropped lens solution 4b and the surface of the hydrophilic region 6 in the conventional manner. There is nothing. Therefore, the imaging accuracy with respect to the photodiode 2 of the condensing part 4 is stabilized.
In addition, the condensing unit 4 is capable of setting a convex lens-shaped outer shape due to surface tension by appropriately adjusting the liquid amount or viscosity of the lens liquid 4b or the inner range of the boundary portion 5. Thus, the refractive index of the incident light L can be freely changed to improve the light collection efficiency. Therefore, it is possible to meet various detection requests.

  Further, since the lens liquid 4b is covered and sealed by the film-shaped exterior body 4a, when the image sensor 10 is subjected to impact, vibration, acceleration, or the like, the lens liquid 4b is scattered or has a boundary portion 5. It does not move to the outside of the boundary portion 5 and is reliably held in the range inside the boundary portion 5. Therefore, the accuracy of the image sensor 10 is stably secured.

  Moreover, since the exterior body 4a of the light collecting unit 4 is a parylene formed by a CVD method, the lens liquid 4b is hermetically sealed, the light collecting efficiency of the light collecting unit 4 is stabilized, and the light collecting unit The workability for manufacturing 4 is improved. Parylene has high airtightness, excellent gas barrier properties, chemical resistance, heat resistance, and cold resistance, and has high durability because the lens liquid 4b is stably sealed over a long period of time.

  Further, the lens liquid 4b of the condensing unit 4 is colored in any one color of R, G, and B by a pigment, a dye, or the like, and only the wavelength region of the incident light L corresponding to each color setting is used. The light is selectively transmitted to the photodiode 2 side. That is, since the condensing unit 4 itself is colored, a space for arranging a color filter, a photonic crystal or the like for color identification is provided between the condensing unit 4 and the photodiode 2 as in the prior art. There is no need, and only the space of the condensing part 4 is sufficient. Therefore, the image sensor 10 can be reduced in thickness and size, and a digital still camera, a mobile phone, and the like on which the image sensor 10 is mounted can be reduced in thickness and size. Moreover, work efficiency is improved by reducing the number of members, and the manufacturing cost is reduced.

  Further, when a plurality of image sensors 10 are arranged, if arranged in a Bayer arrangement as shown in FIG. 2, the lens liquids 4b of the adjacent light converging units 10 are set to different colors, so that the color detection is more precise. Can be done. In addition, a plurality of light collecting units 4 are provided with twice the number of photodiodes 2 for detecting G and the number of photodiodes 2 for detecting R and B in accordance with the spectral sensitivity of human vision. Since they are arranged in a pattern, it is possible to perform detection that more closely approximates human vision.

The present invention is not limited to this embodiment, and various modifications can be made without departing from the spirit of the present invention.
For example, in each of the plurality of image sensors 10, each light collecting unit 4 may be set to at least two kinds of sizes different from each other. According to this, for example, the size of the light collecting unit 4 can be set for each color setting, and the light collecting efficiency can be set, so that various requests can be met.

  Further, in the present embodiment, the lens liquid 4b made of water-based ink is dropped on a portion including the hydrophilic region 6 inside the boundary portion 5, and the outside of the boundary portion 5 is surrounded by the water-repellent region 7, However, the present invention is not limited to this, and a lens liquid made of oil-based ink may be used to provide an oleophilic region on the inner side of the boundary portion 5 and surround the outer side of the boundary portion 5 with an oil-repellent region.

In the present embodiment, the description has been made assuming that the substantially ring-shaped region in plan view sandwiched between the boundary portion 5 and the peripheral edge of the opening 3a on the inside thereof is the hydrophilic region 6, but not limited thereto. For example, the inner peripheral surface of the opening 3 a and the light receiving surface 2 a of the photodiode 2 may be subjected to hydrophilic treatment so that all the regions inside the boundary portion 5 are made the hydrophilic region 6. Alternatively, it may be set to a slight ring-shaped region sandwiched between the boundary portion 5 and a substantially circular frame set outward from the periphery of the opening 3a.
In the present embodiment, the shape of the boundary portion 5 has been described as being formed in a substantially circular frame shape in a plan view. However, the shape is not limited thereto, and for example, a substantially hexagonal frame shape in a plan view or a substantially rectangular frame shape in a plan view. The shape may be other than that.

  Further, as the lens liquid 4b of the light condensing unit 4, a photo-curing resin that changes from a liquid state to a solid state by exposure may be used. In this case, since the condensing part 4 is exposed and changes into a fixed shape, the stability against impacts and vibrations is increased, and various requests can be met.

In the present embodiment, the color setting of the light collecting unit 4 of the image sensor 10 provided in plurality is described as using the three primary colors R, G, and B. However, the present invention is not limited to this, and other colors are used. It doesn't matter. Also, the types of colors are not limited to three colors.
In the present embodiment, the plurality of image sensors 10 are described as being arranged in a Bayer array, but the present invention is not limited to this, and for example, a honeycomb array or other arrays may be used.

  Further, in the present embodiment, it has been described that the CCD for carrying the charge generated in the photodiode 2 is installed, but a CMOS may be installed instead of the CCD. Other configurations may also be used.

It is sectional drawing which shows schematic structure of the image sensor which concerns on one Embodiment of this invention. It is a schematic plan view explaining the arrangement of image sensors according to an embodiment of the present invention. It is the schematic explaining the manufacturing process of the image sensor which concerns on one Embodiment of this invention.

Explanation of symbols

1 Substrate 2 Photodiode (light receiving part)
4 Condensing part 4a Exterior body 4b Lens liquid (liquid part)
5 boundary part 6 hydrophilic region (first region)
7 Water repellent area (second area)
10 Image sensor L Incident light R, G, B Color setting (red, green, blue)

Claims (9)

An image sensor comprising: a condensing unit that collects incident light; a light receiving unit that receives the collected incident light; and a substrate on which the condensing unit and the light receiving unit are disposed.
The incident light side of the substrate includes a first region made of an inner hydrophilic or lipophilic property and a second region made of an outer water-repellent or oil-repellent material, which is partitioned by a boundary portion,
The condensing part includes a liquid liquid part,
The image sensor according to claim 1, wherein the liquid portion is disposed inside the boundary portion, and is color-set so as to selectively transmit the incident light incident on the light receiving portion side in a wavelength region. The image sensor according to claim 1,
The image sensor, wherein the light condensing unit includes a film-shaped exterior body that seals the liquid part. The image sensor according to claim 2,
The outer package is made of a paraxylylene resin film formed by a chemical vapor deposition method. The image sensor according to any one of claims 1 to 3,
The liquid sensor of the condensing unit is a photocurable resin that changes from a liquid state to a solid state when exposed to light. The image sensor according to claim 1, wherein:
The plurality of condensing units have a color setting that allows each liquid unit to transmit a wavelength region of any one color of red, green, and blue,
The image sensor, wherein the adjacent liquid parts have different color settings. The image sensor according to claim 5,
An image sensor, wherein the plurality of condensing portions are arranged in a pattern. The image sensor according to any one of claims 1 to 6,
The light condensing unit has a refractive index set by setting either a liquid amount or viscosity of the liquid unit or a range inside the boundary part. The image sensor according to any one of claims 1 to 7,
The image sensor, wherein the plurality of light collecting units are set to at least two different sizes. A method for manufacturing the image sensor according to any one of claims 1 to 8,
The method of manufacturing an image sensor, wherein the liquid portion is dropped toward the inside of the boundary portion by using an ink jet technique.

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