JP2009075071A5 - - Google Patents

Claims (12)

A distance adjustment device for adjusting a distance between the transmission line and an inspection object using the terahertz wave , including a transmission line for propagating the terahertz wave ,
A generator for generating a terahertz wave propagating through the transmission line ;
A detection unit for detecting a terahertz wave propagated through the transmission line,
A distance change means for varying exposed the distance in a direction intersecting the propagation direction of the terahertz wave in the transmission line,
A control unit for controlling the distance changing means ,
The terahertz wave propagating through the transmission line is configured to interact with the inspection object,
Wherein the control unit, the out of the terahertz wave detected by the detection unit, a distance adjusting device and controls the distance changing means using information on the terahertz waves at least said interaction. Wherein, among the terahertz wave detected by the detecting unit, by using a terahertz wave having an amplitude or phase that is at least the interaction distance according to claim 1, wherein the controller controls the distance changing means Adjustment device. Said interaction Keru Contact the absence Ji raw said distance, a storage unit for storing information about the terahertz wave detected by the detecting unit as the reference information,
Information about the terahertz wave detected by the detection unit, when the change from the reference information, according to claim 1 or 2, characterized in that and a determination unit for determining that the interaction occurs Distance adjustment device. The interaction is configured to be caused by a leakage electromagnetic field caused by a terahertz wave propagating through the transmission line and the inspection object,
The distance adjusting device according to claim 3, further comprising an adjusting unit configured to adjust the strength of the leakage electromagnetic field using a result of the determination unit. A delay unit for changing the timing of detecting the terahertz wave in the detection unit;
Wherein a terahertz wave signal detected by the detection unit, obtained using the delay unit, different from the plurality of signals said timing, be provided with a processing unit for obtaining information about the time waveform of the terahertz wave The distance adjusting device according to claim 1, wherein: Said transmission line includes a transmission line because the Ru used for the adjustment of the distance, any one of claims 1 to 5, characterized in that it consists of a transmission line of order to Ru used for the inspection of the inspection object 1 The distance adjusting device according to item. An inspection device for inspecting the inspection object, comprising the distance adjusting device according to any one of claims 1 to 6 ,
An inspection object holding unit for holding the inspection object;
An inspection apparatus , wherein the distance is determined using information on the terahertz wave, the interaction is performed at the determined distance, and the inspection object is inspected using information on the interacted terahertz wave . An inspection device for inspecting the inspection object, comprising the distance adjusting device according to any one of claims 1 to 6 ,
An inspection apparatus comprising an endoscope probe having the transmission line at a tip . An inspection method for inspecting an inspection object using the terahertz wave, including a transmission line for propagating the terahertz wave,
A first detection step of detecting a terahertz wave propagated through the transmission line at a first distance between the transmission line and the inspection object;
Regarding the direction intersecting the propagation direction of the terahertz wave in the transmission line, a changing step of changing the first distance to a second distance;
  A second detection step of detecting a terahertz wave propagated through the transmission line at the second distance;
Recognizing the distance between the transmission line and the inspection object using the terahertz wave detected in the first and second detection steps,
An inspection method characterized by causing a terahertz wave propagating through the transmission line to interact with the inspection object at a distance determined after the recognition, and inspecting the inspection object using the interacted terahertz wave . After the step of recognizing the distance between the transmission line and the inspection object, the step of bringing the distance between the transmission line and the inspection object closer to a third distance;
10. The inspection object according to claim 9, wherein at the third distance, the inspection object is inspected by acquiring information on an interaction between a leakage electromagnetic field caused by a terahertz wave propagating through the transmission line and the inspection object. Inspection method. The method includes an increasing step of increasing the strength of the leakage electromagnetic field from the transmission line before obtaining information on the interaction between the leakage electromagnetic field caused by the terahertz wave propagating through the transmission line and the inspection object. The inspection method according to claim 10. In the increasing step,
The leakage by switching the transmission line for propagating the terahertz wave from the first transmission line having a weak leakage electromagnetic field strength to the second transmission line having a stronger leakage electromagnetic field strength than the first transmission line. Increase the strength of the electromagnetic field, or
The inspection method according to claim 11, wherein the intensity of the leakage electromagnetic field is increased by increasing the intensity of the terahertz wave propagating through the transmission line.