JP2009050376A - Mirror with temperature adjusting function, dew point instrument, and humidity sensor - Google Patents
Mirror with temperature adjusting function, dew point instrument, and humidity sensor Download PDFInfo
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Abstract
Description
本発明は、温度調節機能付き鏡と、これを用いた露点計及び湿度センサに関する。 The present invention relates to a mirror with a temperature control function, and a dew point meter and a humidity sensor using the mirror.
従来、温度調節機能付き鏡が露点計や湿度センサに用いられている。この温度調節機能付き鏡は、ペルチェ素子などの熱電素子と、白金抵抗体などの測温素子とを備えることにより、温度調節が可能に構成されている（例えば、特許文献１参照）。
しかし、特許文献１に記載の温度調節機能付き鏡は、鏡と熱電素子と測温素子とを別々に製造した後に、これらを接合することにより製造されている。このため、この接合に際し機械的な制約が大きく、温度調節機能付き鏡を更に小型化することが困難であるという問題があった。 However, the mirror with a temperature control function described in Patent Document 1 is manufactured by separately manufacturing a mirror, a thermoelectric element, and a temperature measuring element, and then bonding them. For this reason, there is a problem in that mechanical restrictions are large at the time of joining, and it is difficult to further reduce the size of the mirror with a temperature control function.
本発明は、こうした問題に鑑みなされたものであり、温度調節機能付き鏡の更なる小型化を可能とする技術を提供することを目的とする。 The present invention has been made in view of these problems, and an object thereof is to provide a technique that enables further miniaturization of a mirror with a temperature control function.
上記目的を達成するためになされた請求項１に記載の発明は、鏡面の温度を調節する機能を有する温度調節機能付き鏡であって、基板の面上に薄膜形成された熱電素子と、基板の面上または熱電素子上に薄膜形成された測温素子とを備え、熱電素子は、測温素子を加熱または冷却し、測温素子の表面が鏡面として利用されることを特徴とする温度調節機能付き鏡である。 In order to achieve the above object, the invention according to claim 1 is a mirror with a temperature adjusting function having a function of adjusting the temperature of the mirror surface, the thermoelectric element formed in a thin film on the surface of the substrate, and the substrate A temperature measuring element formed in a thin film on the surface of the thermoelectric element or the thermoelectric element, the thermoelectric element heating or cooling the temperature measuring element, and the surface of the temperature measuring element is used as a mirror surface It is a mirror with a function.
尚、「基板の面上に薄膜形成する」とは、直接または他部材を介して基板の面上に形成することである。同様に、「熱電素子上に薄膜形成する」とは、直接または他部材を介して熱電素子の面上に形成することである。 “Forming a thin film on the surface of the substrate” means forming on the surface of the substrate directly or via another member. Similarly, “to form a thin film on a thermoelectric element” is to form the film on the surface of the thermoelectric element directly or via another member.
このように構成された温度調節機能付き鏡では、測温素子と熱電素子が基板上に一体となって形成されている。このため、熱電素子と測温素子とを別々に製造してこれらを接合することが不要となり、温度調節機能付き鏡を更に小型化することが可能となる。また、測温素子は、薄膜形成によって表面の光反射率を高くすることで、その表面を鏡として用いることができる。 In the thus configured mirror with a temperature adjusting function, the temperature measuring element and the thermoelectric element are integrally formed on the substrate. For this reason, it becomes unnecessary to manufacture the thermoelectric element and the temperature measuring element separately and to join them, and it is possible to further reduce the size of the mirror with a temperature adjusting function. Further, the temperature measuring element can be used as a mirror by increasing the light reflectance of the surface by forming a thin film.
また、請求項１に記載の温度調節機能付き鏡においては、請求項２に記載のように、複数の熱電素子を有し、複数の熱電素子の少なくとも一部は、直列に連なるように配置されるとともに、測温素子と隣接するようにしてもよい。 Moreover, in the mirror with a temperature control function according to claim 1, as described in claim 2, the mirror has a plurality of thermoelectric elements, and at least some of the plurality of thermoelectric elements are arranged in series. In addition, it may be adjacent to the temperature measuring element.
このように構成された温度調節機能付き鏡では、或る熱電素子が移動させた熱を、その後、熱拡散による移動よりも速く、この熱電素子に隣接された別の熱電素子により更に移動させる。このため、１つの熱電素子を用いて、測温素子を加熱または冷却する場合よりも、測温素子から熱を移動させる速度を向上させることができる。 In the mirror with a temperature control function configured as described above, the heat transferred by a certain thermoelectric element is further moved by another thermoelectric element adjacent to the thermoelectric element faster than the movement by thermal diffusion. For this reason, the speed which moves heat from a temperature measuring element can be improved rather than the case where a temperature measuring element is heated or cooled using one thermoelectric element.
また、請求項１または請求項２に記載の温度調節機能付き鏡においては、請求項３に記載のように、複数の熱電素子を有し、複数の熱電素子の少なくとも一部は、測温素子に対してそれぞれ隣接して配置されるようにしてもよい。 Moreover, in the mirror with a temperature control function according to claim 1 or 2, as described in claim 3, the mirror has a plurality of thermoelectric elements, and at least a part of the plurality of thermoelectric elements is a temperature measuring element. May be arranged adjacent to each other.
このように構成された温度調節機能付き鏡では、複数の熱電素子が１つの測温素子から同時に熱を移動させる。このため、１つの熱電素子を用いて、測温素子を加熱または冷却する場合よりも、単位時間当たりに測温素子から熱を移動させる量を多くすることができる。 In the mirror with a temperature control function configured as described above, a plurality of thermoelectric elements simultaneously transfer heat from one temperature measuring element. Therefore, the amount of heat transferred from the temperature measuring element per unit time can be increased as compared with the case where the temperature measuring element is heated or cooled using one thermoelectric element.
また、請求項１〜請求項３の何れかに記載の温度調節機能付き鏡は、請求項４に記載のように、測温素子は、基板の面上に薄膜形成されるようにすることが可能である。
そして、請求項１〜請求項４の何れかに記載の温度調節機能付き鏡においては、請求項５に記載のように、基板は、測温素子及び熱電素子が形成されている面とは反対側の面において凹部が形成されたダイヤフラム領域と、このダイヤフラム領域以外の領域である周縁領域とを有し、測温素子は、ダイヤフラム領域内に配置され、熱電素子は、ダイヤフラム領域と周縁領域に跨って配置されるようにしてもよい。
Further, in the mirror with a temperature adjusting function according to any one of claims 1 to 3, the temperature measuring element may be formed as a thin film on the surface of the substrate as described in claim 4. Is possible.
And in the mirror with a temperature control function according to any one of claims 1 to 4, as described in claim 5, the substrate is opposite to the surface on which the temperature measuring element and the thermoelectric element are formed. A diaphragm region in which a concave portion is formed on the side surface, and a peripheral region that is a region other than the diaphragm region, the temperature measuring element is disposed in the diaphragm region, and the thermoelectric element is disposed in the diaphragm region and the peripheral region. You may make it arrange | position across.
このように構成された温度調節機能付き鏡では、ダイヤフラム領域の基板の厚みは、周縁領域の基板の厚みより薄くなるため、ダイヤフラム領域は周縁領域よりも熱容量が小さくなる。そして、鏡面となる測温素子がダイヤフラム領域に配置されている。このため、ダイヤフラム領域に測温素子を配置しない場合と比較して、鏡面の温度調節を高速かつ高精度に行うことが可能となる。また、ダイヤフラム領域と周縁領域に跨るように熱電素子が配置されているので、熱電素子を介してダイヤフラム領域から移動した熱が周縁領域に伝達されても、これにより、周縁領域の温度が急激に上昇することを防止することができる。 In the mirror with a temperature control function configured as described above, the thickness of the substrate in the diaphragm region is thinner than the thickness of the substrate in the peripheral region, and thus the diaphragm region has a smaller heat capacity than the peripheral region. And the temperature measuring element used as a mirror surface is arrange | positioned in the diaphragm area | region. For this reason, it becomes possible to adjust the temperature of the mirror surface at high speed and with high accuracy compared to the case where the temperature measuring element is not arranged in the diaphragm region. In addition, since the thermoelectric element is arranged so as to straddle the diaphragm area and the peripheral area, even if the heat transferred from the diaphragm area is transmitted to the peripheral area via the thermoelectric element, the temperature of the peripheral area rapidly increases. The rise can be prevented.
また、請求項１〜請求項５の何れかに記載の温度調節機能付き鏡においては、請求項６に記載のように、基板は、不透明材料により構成されているようにしてもよいし、請求項９に記載のように、基板は、透明材料により構成されているようにしてもよい。 Moreover, in the mirror with a temperature control function according to any one of claims 1 to 5, as described in claim 6, the substrate may be made of an opaque material. As described in Item 9, the substrate may be made of a transparent material.
そして請求項７に記載のように、発光素子と、受光素子と、請求項６に記載の温度調節機能付き鏡とを備え、発光素子及び受光素子は、発光素子が発する光を、請求項６に記載の温度調節機能付き鏡に反射させて、この反射光を受光素子が受光するように配置され、 発光素子から発光させた状態で、熱電素子により測温素子を冷却して、受光素子により受光された光の強度が低下した時に、測温素子により測定された温度を露点として演算する露点演算手段を備えることによって、露点計を構成するようにしてもよい。 According to a seventh aspect of the present invention, the light-emitting element, the light-receiving element, and the temperature-adjusting mirror according to the sixth aspect are provided, and the light-emitting element and the light-receiving element emit light emitted from the light-emitting element. The light-receiving element is arranged so that the reflected light is reflected by a mirror with a temperature control function described in 1. and the temperature-measuring element is cooled by a thermoelectric element in a state where the reflected light is emitted from the light-emitting element. You may make it comprise a dew point meter by providing the dew point calculating means which calculates the temperature measured by the temperature measuring element as a dew point when the intensity | strength of the received light falls.
また請求項８に記載のように、発光素子と、受光素子と、請求項６に記載の温度調節機能付き鏡とを備え、発光素子及び受光素子は、発光素子が発する光を、請求項６に記載の温度調節機能付き鏡に反射させて、この反射光を受光素子が受光するように配置され、発光素子から発光させた状態で、熱電素子により測温素子を冷却して、受光素子により受光された光の強度が低下した時に、測温素子により測定された温度を露点として演算する露点演算手段と、この露点における飽和水蒸気量と、被測定気体の温度における飽和水蒸気量とに基づいて、被測定気体の湿度を演算する湿度演算手段とを備えることによって、湿度センサを構成するようにしてもよい。 According to an eighth aspect of the present invention, the light-emitting element, the light-receiving element, and the temperature-adjusting mirror according to the sixth aspect are provided, and the light-emitting element and the light-receiving element emit light emitted from the light-emitting element. The light-receiving element is arranged so that the reflected light is reflected by the mirror with the temperature control function described in 1. and the temperature-measuring element is cooled by the thermoelectric element in a state where the reflected light is emitted from the light-emitting element. Based on the dew point calculation means for calculating the temperature measured by the temperature measuring element as the dew point when the intensity of the received light decreases, the saturated water vapor amount at the dew point, and the saturated water vapor amount at the temperature of the gas to be measured The humidity sensor may be configured by including humidity calculation means for calculating the humidity of the gas to be measured.
また請求項１０に記載のように、発光素子と、受光素子と、請求項９に記載の温度調節機能付き鏡とを備え、発光素子及び受光素子は、発光素子が発する光を、請求項９に記載の温度調節機能付き鏡に透過させて、この透過光を受光素子が受光するように配置され、発光素子から発光させた状態で、熱電素子により測温素子を冷却して、受光素子により受光された光の強度が低下した時に、測温素子により測定された温度を露点として演算する露点演算手段を備えることによって、露点計を構成するようにしてもよい。 According to a tenth aspect of the present invention, the light-emitting element includes a light-emitting element, a light-receiving element, and the temperature-adjusting mirror according to the ninth aspect. The temperature measuring element is transmitted through a mirror with a temperature control function described in 1., and the transmitted light is arranged to be received by the light receiving element. In a state where the light receiving element emits light, the temperature measuring element is cooled by the thermoelectric element, and the light receiving element You may make it comprise a dew point meter by providing the dew point calculating means which calculates the temperature measured by the temperature measuring element as a dew point when the intensity | strength of the received light falls.
また請求項１１に記載のように、発光素子と、受光素子と、請求項９に記載の温度調節機能付き鏡とを備え、発光素子及び受光素子は、発光素子が発する光を、請求項９に記載の温度調節機能付き鏡に透過させて、この透過光を受光素子が受光するように配置され、発光素子から発光させた状態で、熱電素子により測温素子を冷却して、受光素子により受光された光の強度が低下した時に、測温素子により測定された温度を露点として演算する露点演算手段と、この露点における飽和水蒸気量と、被測定気体の温度における飽和水蒸気量とに基づいて、被測定気体の湿度を演算する湿度演算手段とを備えることによって、湿度センサを構成するようにしてもよい。 Further, as described in claim 11, the light-emitting element, the light-receiving element, and the mirror with a temperature adjusting function according to claim 9, the light-emitting element and the light-receiving element emit light emitted from the light-emitting element. The temperature measuring element is transmitted through a mirror with a temperature control function described in 1., and the transmitted light is arranged to be received by the light receiving element. In a state where the light receiving element emits light, the temperature measuring element is cooled by the thermoelectric element, and the light receiving element Based on the dew point calculation means for calculating the temperature measured by the temperature measuring element as the dew point when the intensity of the received light decreases, the saturated water vapor amount at the dew point, and the saturated water vapor amount at the temperature of the gas to be measured The humidity sensor may be configured by including humidity calculation means for calculating the humidity of the gas to be measured.
以下に本発明の実施形態について図面とともに説明する。
図１は、本発明が適用された温度調節機能付き鏡２を備える露点計１の概略構成を示す側面図である。以下の説明では、図１に示す露点計１のうち左側を先端側として、右側を後端側として説明する。
Embodiments of the present invention will be described below with reference to the drawings.
FIG. 1 is a side view showing a schematic configuration of a dew point meter 1 including a mirror 2 with a temperature adjusting function to which the present invention is applied. In the following description, the left side of the dew point meter 1 shown in FIG. 1 will be described as the front end side, and the right side will be described as the rear end side.
露点計１は、図１に示すように、温度調節機能付き鏡２と、温度調節機能付き鏡２に通電するためのケーブル群３（図１ではケーブル３２のみを示す。図２を参照）と、温度調節機能付き鏡２に光Ｌ１を照射する発光素子１１及び温度調節機能付き鏡２で反射した光Ｌ２を受光する受光素子１２を備えた発光・受光部４と、温度調節機能付き鏡２とケーブル群３と発光・受光部４を収納する筺体５とから構成される。 As shown in FIG. 1, the dew point meter 1 includes a mirror 2 with a temperature control function, and a cable group 3 for energizing the mirror 2 with a temperature control function (FIG. 1 shows only a cable 32; see FIG. 2). The light emitting / receiving unit 4 including the light emitting element 11 that irradiates the light L1 to the mirror 2 with temperature adjusting function and the light receiving element 12 that receives the light L2 reflected by the mirror 2 with temperature adjusting function, and the mirror 2 with temperature adjusting function And a cable group 3 and a housing 5 that houses the light emitting / receiving section 4.
これらのうち発光・受光部４は、上述の発光素子１１及び受光素子１２と、発光素子１１により照射された光が温度調節機能付き鏡２で反射されることなく直接受光素子１２に到達するのを防ぐために発光素子１１と受光素子１２との間に設けられた遮光壁１３と、露点計１の外部からの光が受光素子１２に到達するのを防ぐために設けられた遮光壁１４，１５と、発光素子１１と受光素子１２と遮光壁１３，１４，１５を温度調節機能付き鏡２の上方に配置されるように支持する支持部１６とから構成されている。なお、遮光壁１４は発光素子１１を挟んで遮光壁１３と反対側に配置され、遮光壁１５は受光素子１２を挟んで遮光壁１４と反対側に設けられている。 Among these, the light emitting / receiving section 4 directly reaches the light receiving element 12 without being reflected by the above-described light emitting element 11 and light receiving element 12 and the mirror 2 with the temperature adjusting function. A light shielding wall 13 provided between the light emitting element 11 and the light receiving element 12, and light shielding walls 14 and 15 provided to prevent light from the outside of the dew point meter 1 from reaching the light receiving element 12. The light-emitting element 11, the light-receiving element 12, and the light-shielding walls 13, 14, and 15 are configured to support the temperature-adjusting mirror 2 so as to be disposed above the support 2. The light shielding wall 14 is disposed on the side opposite to the light shielding wall 13 with the light emitting element 11 interposed therebetween, and the light shielding wall 15 is provided on the side opposite to the light shielding wall 14 with the light receiving element 12 interposed therebetween.
また筺体５の先端側は、被測定気体を筺体５の内部に導入するための開口部４１が設けられている。そして、開口部４１と温度調節機能付き鏡２との間に通気フィルタ４３が設置されている。更に筺体５の後端側には、ケーブル群３を露点計１の内部に導入するための開口部４２が設けられている。そして、ケーブル群３の一部が筺体５の内部に導入された状態でケーブル群３を固定するために、開口部４２は樹脂４４によりモールドされている。 Further, an opening 41 for introducing a gas to be measured into the inside of the housing 5 is provided on the front end side of the housing 5. And the ventilation filter 43 is installed between the opening part 41 and the mirror 2 with a temperature control function. Further, an opening 42 for introducing the cable group 3 into the dew point meter 1 is provided on the rear end side of the housing 5. Then, in order to fix the cable group 3 in a state where a part of the cable group 3 is introduced into the housing 5, the opening 42 is molded with a resin 44.
図２は、本発明が適用された温度調節機能付き鏡２の概略構成を示す平面図である。
温度調節機能付き鏡２は、図２に示すように、測温素子２１と、熱電素子２２と、熱電素子２２に通電するための電極２３，２４と、測温素子２１と熱電素子２２と電極２３，２４を支持する基板２０とを備える。なお以下、電極２３を温調電極２３、電極２４を非温調電極２４とも称す。
FIG. 2 is a plan view showing a schematic configuration of a mirror 2 with a temperature control function to which the present invention is applied.
As shown in FIG. 2, the mirror 2 with a temperature adjustment function includes a temperature measuring element 21, a thermoelectric element 22, electrodes 23 and 24 for energizing the thermoelectric element 22, a temperature measuring element 21, a thermoelectric element 22, and an electrode. And a substrate 20 that supports 23 and 24. Hereinafter, the electrode 23 is also referred to as a temperature control electrode 23, and the electrode 24 is also referred to as a non-temperature control electrode 24.
これらのうち基板２０は、シリコンを材料として構成されたシリコン基板である。そして基板２０は、その裏面に凹部２０ａが形成されたダイヤフラム構造を有している（図１を参照）。 Of these, the substrate 20 is a silicon substrate made of silicon. And the board | substrate 20 has a diaphragm structure in which the recessed part 20a was formed in the back surface (refer FIG. 1).
また測温素子２１は、温度によってその抵抗値が変化する白金抵抗体である。そして測温素子２１は、基板２０の主面上において、凹部２０ａが形成されて基板の厚みが薄くなっているダイヤフラム領域２０ｂに薄膜形成される。 The temperature measuring element 21 is a platinum resistor whose resistance value changes depending on the temperature. The temperature measuring element 21 is formed as a thin film on the main surface of the substrate 20 in the diaphragm region 20b where the recess 20a is formed and the thickness of the substrate is reduced.
また熱電素子２２は、ペルチェ効果を利用した熱移動により加熱または冷却を行う素子であり、基板２０の主面上において測温素子２１の周囲を取り囲むように薄膜形成される。これにより、熱電素子２２のうち内周部分は、ダイヤフラム領域２０ｂ（図１を参照）上に配置され、内周部分以外の部分は、ダイヤフラム領域２０ｂより基板の厚みが厚くなっている周縁領域２０ｃ（図１を参照）上に配置される。 The thermoelectric element 22 is an element that heats or cools by heat transfer using the Peltier effect, and is formed in a thin film so as to surround the temperature measuring element 21 on the main surface of the substrate 20. Thus, the inner peripheral portion of the thermoelectric element 22 is disposed on the diaphragm region 20b (see FIG. 1), and the portion other than the inner peripheral portion is the peripheral region 20c in which the substrate is thicker than the diaphragm region 20b. (See FIG. 1).
また温調電極２３は、測温素子２１の周囲を取り囲むように形成された熱電素子２２の内周部に形成されるとともに、非温調電極２４は熱電素子２２の外周部に形成される。
またケーブル群３のうち、熱電素子用ケーブル３１は、配線２５を介して温調電極２３と電気的に接続される。また熱電素子用ケーブル３２は、配線を介することなく直接、非温調電極２４と電気的に接続される。更に測温素子用ケーブル３３，３４は、それぞれ配線２６，２７を介して測温素子２１と電気的に接続される。
The temperature control electrode 23 is formed on the inner peripheral portion of the thermoelectric element 22 formed so as to surround the temperature measuring element 21, and the non-temperature control electrode 24 is formed on the outer peripheral portion of the thermoelectric element 22.
In the cable group 3, the thermoelectric element cable 31 is electrically connected to the temperature control electrode 23 via the wiring 25. Further, the thermoelectric element cable 32 is directly electrically connected to the non-temperature control electrode 24 without a wiring. Further, the temperature measuring element cables 33 and 34 are electrically connected to the temperature measuring element 21 through wirings 26 and 27, respectively.
そして、例えばＰ型の熱電素子を用いた場合、熱電素子用ケーブル３１側を正極とするとともに熱電素子用ケーブル３２を負極として熱電素子２２に通電すると、温調電極２３から非温調電極２４へ向かう方向に熱が移動し（図２の矢印ＨＡを参照）、測温素子２１を冷却することができる。更に、熱電素子２２を介して非温調電極２４に到達した熱は、熱電素子用ケーブル３２を介して外部に放出される（図２の矢印ＨＢを参照）。 For example, when a P-type thermoelectric element is used, when the thermoelectric element cable 31 side is used as a positive electrode and the thermoelectric element cable 32 is used as a negative electrode and the thermoelectric element 22 is energized, the temperature adjustment electrode 23 changes to the non-temperature adjustment electrode 24. Heat moves in the direction of heading (see arrow HA in FIG. 2), and the temperature measuring element 21 can be cooled. Furthermore, the heat that has reached the non-temperature control electrode 24 via the thermoelectric element 22 is released to the outside via the thermoelectric element cable 32 (see arrow HB in FIG. 2).
なおケーブル群３のうち、非温調電極２４と接続される熱電素子用ケーブル３２は、ヒートシンクとして機能させるために、その他のケーブル３１，３３，３４よりも径が大きい。また、配線２５による温調電極２３の熱引きを抑制するために、配線２５の幅をできるだけ狭くすることが望ましい。同様に、配線２６，２７による測温素子２１の熱引きを抑制するために、配線２６，２７の幅をできるだけ狭くすることが望ましい。 In the cable group 3, the thermoelectric element cable 32 connected to the non-temperature control electrode 24 has a larger diameter than the other cables 31, 33, 34 in order to function as a heat sink. Further, in order to suppress the heat pulling of the temperature control electrode 23 by the wiring 25, it is desirable to make the width of the wiring 25 as narrow as possible. Similarly, it is desirable to make the widths of the wirings 26 and 27 as narrow as possible in order to suppress heat sinking of the temperature measuring element 21 by the wirings 26 and 27.
次に、露点計１の電気的構成について説明する。図３は、露点計１の電気的構成を示すブロック図である。
露点計１は、図３に示すように、発光素子１１と受光素子１２と測温素子２１と熱電素子２２を制御する制御回路５０を備える。
Next, the electrical configuration of the dew point meter 1 will be described. FIG. 3 is a block diagram showing an electrical configuration of the dew point meter 1.
As shown in FIG. 3, the dew point meter 1 includes a control circuit 50 that controls the light emitting element 11, the light receiving element 12, the temperature measuring element 21, and the thermoelectric element 22.
制御回路５０は、制御回路５０全体を制御するＣＰＵ５１と、発光素子１１を発光させるための電流を出力する電流出力回路５２と、受光素子１２が受光した光の強度が電流値により特定される電気信号を受光素子１２から入力する電流入力回路５３と、測温素子２１の抵抗値を検出する抵抗入力回路５４と、測温素子２１を加熱または冷却するための電流を熱電素子２２に出力する電流出力回路５５と、電流入力回路５３に入力した電流の電流値および抵抗入力回路５４が検出した抵抗値をアナログ値からデジタル値に変換してＣＰＵ５１へ出力するＡ／Ｄコンバータ５６と、ＣＰＵ５１が指示した電流値を示すデジタル値をアナログ値に変換して電流出力回路５２，５５へ出力するＤ／Ａコンバータ５７とから構成される。 The control circuit 50 includes a CPU 51 that controls the entire control circuit 50, a current output circuit 52 that outputs a current for causing the light emitting element 11 to emit light, and an electric current in which the intensity of light received by the light receiving element 12 is specified by a current value. A current input circuit 53 for inputting a signal from the light receiving element 12, a resistance input circuit 54 for detecting the resistance value of the temperature measuring element 21, and a current for outputting a current for heating or cooling the temperature measuring element 21 to the thermoelectric element 22. The CPU 51 instructs the output circuit 55, the A / D converter 56 that converts the current value of the current input to the current input circuit 53 and the resistance value detected by the resistance input circuit 54 from an analog value to a digital value, and outputs the digital value to the CPU 51. The D / A converter 57 converts the digital value indicating the current value into an analog value and outputs the analog value to the current output circuits 52 and 55.
次に、露点計１の動作について説明する。図４は、露点計１の測定タイミングを示すチャートである。
図４に示すように、露点計１は、測定周期ＳＳを１サイクルとして露点の測定を繰り返し行う。具体的には、図４（ａ）に示すように、制御回路５０が、電流値Ｉ１を初期値として測定周期ＳＳ経過後に電流値Ｉ２となるように徐々に電流値を増加させて、熱電素子２２に対して電流を出力する。なお、図４（ａ）では電流値が徐々に大きくなっており、１サイクル中において測定開始時刻ｔ０から時間が経過するほど測温素子２１から熱電素子２２への単位時間当たり熱移動量（即ち、測温素子２１の冷却速度）が大きくなることを示している。
Next, the operation of the dew point meter 1 will be described. FIG. 4 is a chart showing the measurement timing of the dew point meter 1.
As shown in FIG. 4, the dew point meter 1 repeatedly measures the dew point with the measurement cycle SS as one cycle. Specifically, as shown in FIG. 4A, the control circuit 50 gradually increases the current value so that the current value I2 becomes the current value I2 after the lapse of the measurement period SS with the current value I1 as the initial value, and the thermoelectric element. 22 outputs a current. In FIG. 4A, the current value gradually increases, and the amount of heat transfer per unit time from the temperature measuring element 21 to the thermoelectric element 22 (that is, as time elapses from the measurement start time t0 in one cycle) This indicates that the cooling rate of the temperature measuring element 21 is increased.
また制御回路５０は、受光素子１２から電流を入力し、その電流値を検出する。そして図４（ｂ）に示すように、測温素子２１が熱電素子２２により冷却されると、測温素子２１の表面に結露が生じ（点Ｐ１を参照）、反射光Ｌ２の強度を示す電流値が電流値Ｉ４から電流値Ｉ３に低下する。このため、反射光Ｌ２の強度が低下し始めた時（図４では時刻ｔ１）に、結露が生じたと判断することができる。 The control circuit 50 receives a current from the light receiving element 12 and detects the current value. Then, as shown in FIG. 4B, when the temperature measuring element 21 is cooled by the thermoelectric element 22, condensation occurs on the surface of the temperature measuring element 21 (see the point P1), and the current indicating the intensity of the reflected light L2 The value decreases from the current value I4 to the current value I3. For this reason, it can be determined that condensation has occurred when the intensity of the reflected light L2 starts to decrease (time t1 in FIG. 4).
更に制御回路５０は、抵抗入力回路５４を介して測温素子２１の抵抗値を検出する。そして、図４（ｃ）に示すように、熱電素子２２により測温素子２１が冷却されることによって測温素子２１の抵抗値が徐々に低下する。このため、結露発生時（即ち、時刻ｔ１）における測温素子２１の抵抗値（点Ｐ２を参照）を検出し、この抵抗値を温度に変換することにより露点を測定することができる。このようにして露点を測定する制御回路５０は、本発明の露点演算手段に相当する。 Further, the control circuit 50 detects the resistance value of the temperature measuring element 21 via the resistance input circuit 54. And as shown in FIG.4 (c), when the temperature measuring element 21 is cooled by the thermoelectric element 22, the resistance value of the temperature measuring element 21 will fall gradually. For this reason, the dew point can be measured by detecting the resistance value (see point P2) of the temperature measuring element 21 at the time of occurrence of dew condensation (that is, time t1) and converting the resistance value to temperature. The control circuit 50 that measures the dew point in this way corresponds to the dew point calculation means of the present invention.
このように構成された温度調節機能付き鏡２では、測温素子２１と熱電素子２２が基板２０の主面上に一体となって形成されている。このため、熱電素子２２と測温素子２１とを別々に製造してこれらを接合することが不要となり、温度調節機能付き鏡２を更に小型化することが可能となる。また、測温素子２１は、薄膜形成によって表面の光反射率を高くすることで、その表面を鏡として用いることができる。 In the mirror 2 with a temperature adjusting function configured as described above, the temperature measuring element 21 and the thermoelectric element 22 are integrally formed on the main surface of the substrate 20. For this reason, it becomes unnecessary to manufacture the thermoelectric element 22 and the temperature measuring element 21 separately and to join them, and it becomes possible to further miniaturize the mirror 2 with a temperature control function. Further, the temperature measuring element 21 can use the surface as a mirror by increasing the light reflectance of the surface by forming a thin film.
また、ダイヤフラム領域２０ｂの基板の厚みは、周縁領域２０ｃの基板の厚みより薄くなるため、ダイヤフラム領域２０ｂは周縁領域２０ｃよりも熱容量が小さくなる。そして、鏡面となる測温素子２１がダイヤフラム領域２０ｂに配置されている。このため、ダイヤフラム領域２０ｂに測温素子２１を配置しない場合と比較して、鏡面の温度調節を高速かつ高精度に行うことが可能となる。更に、熱電素子２２はダイヤフラム領域２０ｂと周縁領域２０ｃに跨って配置されており、周縁領域２０ｃはダイヤフラム領域２０ｂより熱容量が大きいので、熱電素子２２を介してダイヤフラム領域２０ｂから移動した熱が周縁領域２０ｃに伝達されても、これにより、周縁領域２０ｃの温度が急激に上昇することを防止することができる。 Further, since the thickness of the substrate in the diaphragm region 20b is thinner than the thickness of the substrate in the peripheral region 20c, the diaphragm region 20b has a smaller heat capacity than the peripheral region 20c. And the temperature measuring element 21 used as a mirror surface is arrange | positioned in the diaphragm area | region 20b. For this reason, compared with the case where the temperature measuring element 21 is not arranged in the diaphragm region 20b, the temperature of the mirror surface can be adjusted at high speed and with high accuracy. Furthermore, since the thermoelectric element 22 is disposed across the diaphragm region 20b and the peripheral region 20c, and the peripheral region 20c has a larger heat capacity than the diaphragm region 20b, the heat transferred from the diaphragm region 20b via the thermoelectric element 22 is the peripheral region. Even if it is transmitted to 20c, this can prevent the temperature of the peripheral region 20c from rapidly rising.
以上、本発明の一実施形態について説明したが、本発明は上記実施形態に限定されるものではなく、本発明の技術的範囲に属する限り種々の形態を採ることができる。
例えば上記実施形態では、１つの熱電素子２２を用いて測温素子２１の温度を調節するものを示したが、複数の熱電素子を用いるようにしてもよい。
As mentioned above, although one Embodiment of this invention was described, this invention is not limited to the said embodiment, As long as it belongs to the technical scope of this invention, a various form can be taken.
For example, in the above-described embodiment, the one in which the temperature of the temperature measuring element 21 is adjusted using one thermoelectric element 22 is shown, but a plurality of thermoelectric elements may be used.
例えば図５（ａ）に示すように、温度調節機能付き鏡１００は、１つの測温素子１０１と、４つの熱電素子１１１，１１２，１１３，１１４と、測温素子１０１と熱電素子１１１〜１１４を支持する基板１２１とを備える。なお、熱電素子１１１は第１電極１３１と第２電極１４１を備え、同様に、熱電素子１１２，１１３，１１４はそれぞれ第１電極１３２，１３３，１３４と第２電極１４２，１４３，１４４を備える。 For example, as shown in FIG. 5A, the mirror 100 with a temperature adjusting function includes one temperature measuring element 101, four thermoelectric elements 111, 112, 113, and 114, a temperature measuring element 101, and thermoelectric elements 111 to 114. And a substrate 121 that supports the substrate. The thermoelectric element 111 includes a first electrode 131 and a second electrode 141. Similarly, the thermoelectric elements 112, 113, and 114 include a first electrode 132, 133, and 134 and a second electrode 142, 143, and 144, respectively.
そして、第１電極１３１と第２電極１４１との間で熱電素子１１１を介して電流が流れるように第１電極１３１と第２電極１４１を電流源１５１に配線する。同様に、第１電極１３２，１３３，１３４と第２電極１４２，１４３，１４４との間で熱電素子１１２，１１３，１１４を介して電流が流れるように第１電極１３２，１３３，１３４と第２電極１４２，１４３，１４４を電流源１５１に配線する。 Then, the first electrode 131 and the second electrode 141 are wired to the current source 151 so that a current flows between the first electrode 131 and the second electrode 141 via the thermoelectric element 111. Similarly, the first electrodes 132, 133, 134 and the second electrodes are connected so that current flows between the first electrodes 132, 133, 134 and the second electrodes 142, 143, 144 via the thermoelectric elements 112, 113, 114. The electrodes 142, 143, and 144 are wired to the current source 151.
更に、測温素子１０１と第１電極１３１とが隣り合うように熱電素子１１１を配置し、第２電極１４１と第１電極１３２が隣り合うように熱電素子１１２を配置し、第２電極１４２と第１電極１３３が隣り合うように熱電素子１１３を配置し、第２電極１４３と第１電極１３４が隣り合うように熱電素子１１４を配置される。 Further, the thermoelectric element 111 is arranged so that the temperature measuring element 101 and the first electrode 131 are adjacent to each other, the thermoelectric element 112 is arranged so that the second electrode 141 and the first electrode 132 are adjacent to each other, and the second electrode 142 The thermoelectric elements 113 are arranged so that the first electrodes 133 are adjacent to each other, and the thermoelectric elements 114 are arranged so that the second electrodes 143 and the first electrodes 134 are adjacent to each other.
これにより、測温素子１０１を基準とした熱電素子１１１，１１２，１１３，１１４を介する熱移動方向（図５（ａ）の矢印Ｈ１〜Ｈ５を参照）が同じになるように（矢印Ｈ１〜Ｈ５は、測温素子１０１から熱が出て行く方向を示している）、熱電素子１１１，１１２，１１３，１１４が直列に連なるように配置されるとともに、熱電素子１１１が測温素子１０１と隣接して配置される。 Thereby, the heat transfer directions (see arrows H1 to H5 in FIG. 5A) through the thermoelectric elements 111, 112, 113, and 114 with reference to the temperature measuring element 101 are the same (arrows H1 to H5). Indicates the direction in which heat is output from the temperature measuring element 101), the thermoelectric elements 111, 112, 113, and 114 are arranged in series, and the thermoelectric element 111 is adjacent to the temperature measuring element 101. Arranged.
このように熱電素子を配置することにより、或る熱電素子（例えば熱電素子１１１）が移動させた熱を、その後、熱拡散による移動よりも速く、この熱電素子に隣接された別の熱電素子（例えば熱電素子１１２）により更に移動させる。このため、１つの熱電素子を用いて、測温素子２１を加熱または冷却する場合よりも、測温素子２１から熱を移動させる速度を向上させることができる。 By arranging the thermoelectric element in this way, the heat transferred by a certain thermoelectric element (for example, the thermoelectric element 111) is then faster than the movement by thermal diffusion, and another thermoelectric element adjacent to this thermoelectric element ( For example, it is further moved by the thermoelectric element 112). For this reason, the speed at which heat is transferred from the temperature measuring element 21 can be improved as compared with the case where the temperature measuring element 21 is heated or cooled using one thermoelectric element.
或いは、図５（ｂ）に示すように、温度調節機能付き鏡２００は、１つの測温素子１０１と、４つの熱電素子１１１，１１２，１１３，１１４と、測温素子１０１と熱電素子１１１〜１１４を支持する基板１２２とを備える。そして、熱電素子１１１，１１２，１１３，１１４は、それぞれ異なる位置で、測温素子１０１と第１電極１３１，１３２，１３３，１３４が隣り合うように配置される。 Or as shown in FIG.5 (b), the mirror 200 with a temperature control function is the one temperature measuring element 101, the four thermoelectric elements 111,112,113,114, the temperature measuring element 101, and the thermoelectric elements 111-. And a substrate 122 that supports 114. The thermoelectric elements 111, 112, 113, and 114 are arranged at different positions so that the temperature measuring element 101 and the first electrodes 131, 132, 133, and 134 are adjacent to each other.
これにより、測温素子１０１に対してそれぞれ異なる位置で、測温素子１０１を基準とした熱電素子を介する熱移動方向（図５（ｂ）の矢印Ｈ１１〜Ｈ１８を参照）が同じになるように（矢印Ｈ１１〜Ｈ１８は、測温素子１０１から熱が出て行く方向を示している）、測温素子１０１に対してそれぞれ隣接して配置される。 Thereby, the heat transfer directions (see arrows H11 to H18 in FIG. 5B) are the same at different positions with respect to the temperature measuring element 101 via the thermoelectric element. (Arrows H <b> 11 to H <b> 18 indicate directions in which heat is emitted from the temperature measuring element 101), and are arranged adjacent to the temperature measuring element 101.
このように熱電素子を配置することにより、複数の熱電素子が１つの測温素子１０１から同時に熱を移動させる。このため、１つの熱電素子を用いて、測温素子１０１を加熱または冷却する場合よりも、単位時間当たりに測温素子１０１から熱を移動させる量を多くすることができる。 By arranging the thermoelectric elements in this way, a plurality of thermoelectric elements move heat from one temperature measuring element 101 simultaneously. For this reason, the amount of heat transferred from the temperature measuring element 101 per unit time can be increased as compared with the case where the temperature measuring element 101 is heated or cooled using one thermoelectric element.
また上記実施形態では、不透明材料であるシリコンで構成された基板２０を用いた温度調節機能付き鏡２に光を照射し、温度調節機能付き鏡２で反射した光を受光することにより露点を測定する露点計１を示したが、図６（ａ）に示すように、透明材料を用いた基板３０１上に測温素子２１及び熱電素子２２を形成した温度調節機能付き鏡３００を備え、温度調節機能付き鏡３００の裏面側から測温素子２１に向けて光Ｌ３１を照射し、測温素子２１を透過した光Ｌ３２を受光することにより露点を測定するようにしてもよい。 In the above embodiment, the dew point is measured by irradiating the mirror 2 with temperature control function using the substrate 20 made of silicon, which is an opaque material, and receiving the light reflected by the mirror 2 with temperature control function. The dew point meter 1 is shown. As shown in FIG. 6A, a temperature adjusting element 300 and a thermoelectric element 22 are formed on a substrate 301 made of a transparent material, and the temperature adjusting function 300 is provided. You may make it measure a dew point by irradiating the light L31 toward the temperature measuring element 21 from the back surface side of the mirror 300 with a function, and receiving the light L32 which permeate | transmitted the temperature measuring element 21. FIG.
また上記実施形態では、測温素子２１及び熱電素子２２が同一平面上に配置される温度調節機能付き鏡２を備える露点計１を示したが、図６（ｂ）に示すように、基板４０１上に熱電素子４２２を配置し、更に熱電素子４２２の上に測温素子４２１を配置することにより、基板４０１の厚さ方向に熱を移動させる（図６（ｂ）の矢印Ｈ４１を参照）ようにした温度調節機能付き鏡４００を備え、温度調節機能付き鏡４００の表面側から測温素子４２１に向けて光Ｌ４１を照射し、測温素子４２１で反射した光Ｌ４２を受光することにより露点を測定するようにしてもよい。 Moreover, in the said embodiment, although the dew point meter 1 provided with the mirror 2 with the temperature control function in which the temperature measuring element 21 and the thermoelectric element 22 are arrange | positioned on the same plane was shown, as shown in FIG.6 (b), board | substrate 401 is shown. The thermoelectric element 422 is disposed on the thermoelectric element 422, and the temperature measuring element 421 is disposed on the thermoelectric element 422, so that heat is moved in the thickness direction of the substrate 401 (see arrow H41 in FIG. 6B). The temperature-adjusting mirror 400 is provided, the light L41 is irradiated from the surface side of the temperature-adjusting mirror 400 toward the temperature measuring element 421, and the light L42 reflected by the temperature measuring element 421 is received, thereby setting the dew point. You may make it measure.
また上記実施形態では、温度調節機能付き鏡２の上方に発光素子１１と受光素子１２が配置される露点計１を示したが、図７（ａ）に示すように、基板５０１上に発光素子５１１と受光素子５１２と測温素子５２１と熱電素子５２２を一体形成し、発光素子５１１から測温素子５２１に向けて光Ｌ５１を照射し、測温素子５２１で反射した光Ｌ５２を受光素子５１２で受光することにより露点を測定するようにしてもよい。 Moreover, in the said embodiment, although the dew point meter 1 by which the light emitting element 11 and the light receiving element 12 are arrange | positioned above the mirror 2 with a temperature control function was shown, as shown to Fig.7 (a), a light emitting element is provided on the board | substrate 501. 511, a light receiving element 512, a temperature measuring element 521, and a thermoelectric element 522 are integrally formed, and light L51 is irradiated from the light emitting element 511 toward the temperature measuring element 521, and the light L52 reflected by the temperature measuring element 521 is reflected by the light receiving element 512. The dew point may be measured by receiving light.
また上記実施形態では、制御回路５０から電流を出力することにより発光素子１１を発光させるとともに、受光素子１２からの電気信号を制御回路５０に入力することにより反射光の強度を検出して露点を測定する露点計１を示したが、図７（ｂ）に示すように、光ファイバー６１３により外部から導かれた光Ｌ６１を発光部６１１から温度調節機能付き鏡２に向けて照射するとともに、温度調節機能付き鏡２で反射した光Ｌ６２を受光部６１２で受光し、更に、受光部６１２で受光した光Ｌ６２を光ファイバー６１４により外部へ導くことによって、露点を測定するようにしてもよい。 In the above embodiment, the light emitting element 11 is caused to emit light by outputting a current from the control circuit 50, and the dew point is detected by detecting the intensity of the reflected light by inputting an electric signal from the light receiving element 12 to the control circuit 50. Although the dew point meter 1 to be measured is shown, as shown in FIG. 7 (b), the light L61 guided from the outside by the optical fiber 613 is irradiated from the light emitting unit 611 toward the mirror 2 with a temperature adjusting function, and the temperature is adjusted. The dew point may be measured by receiving the light L62 reflected by the functional mirror 2 by the light receiving unit 612 and guiding the light L62 received by the light receiving unit 612 to the outside through the optical fiber 614.
また上記実施形態では、温度調節機能付き鏡２を用いて露点を測定する露点計１を示した。しかし、露点計１で測定された露点における飽和水蒸気量と、被測定気体の温度における飽和水蒸気量とに基づいて、被測定気体の湿度を演算する処理を制御回路５０のＣＰＵ５１が行うことによって、湿度センサとして用いるようにしてもよい。この場合に、ＣＰＵ５１は、本発明の湿度演算手段に相当する。 Moreover, in the said embodiment, the dew point meter 1 which measures a dew point using the mirror 2 with a temperature control function was shown. However, the CPU 51 of the control circuit 50 performs a process of calculating the humidity of the gas to be measured based on the saturated water vapor amount at the dew point measured by the dew point meter 1 and the saturated water vapor amount at the temperature of the gas to be measured. It may be used as a humidity sensor. In this case, the CPU 51 corresponds to the humidity calculation means of the present invention.
１…露点計、２，１００，２００，３００，４００…温度調節機能付き鏡、３…ケーブル群、４…発光・受光部、５…筺体、１１，５１１…発光素子、１２，５１２…受光素子、１３〜１５…遮光壁、１６…支持部、２０，１２１，１２２，３０１，４０１，５０１…基板、２０ａ…凹部、２０ｂ…ダイヤフラム領域、２０ｃ…周縁領域、２１，１０１，４２１，５２１…測温素子、２２，１１１〜１１４，４２２，５２２…熱電素子、２３…温調電極、２４…非温調電極、２５〜２７…配線、３１，３２…熱電素子用ケーブル、３３，３４…測温素子用ケーブル、４１，４２…開口部、４３…通気フィルタ、４４…樹脂、５０…制御回路、５１…ＣＰＵ、５２，５５…電流出力回路、５３…電流入力回路、５４…抵抗入力回路、５６…Ａ／Ｄコンバータ、５７…Ｄ／Ａコンバータ、６１１…発光部、６１２…受光部、６１３，６１４…光ファイバー DESCRIPTION OF SYMBOLS 1 ... Dew point meter, 2,100,200,300,400 ... Temperature control mirror, 3 ... Cable group, 4 ... Light emitting / receiving part, 5 ... Housing, 11,511 ... Light emitting element, 12,512 ... Light receiving element , 13 to 15: Light shielding wall, 16: Supporting part, 20, 121, 122, 301, 401, 501 ... Substrate, 20a ... Recess, 20b ... Diaphragm area, 20c ... Peripheral area, 21, 101, 421, 521 ... Measurement Temperature element 22, 111-114, 422, 522 ... Thermoelectric element, 23 ... Temperature control electrode, 24 ... Non-temperature control electrode, 25-27 ... Wiring, 31, 32 ... Cable for thermoelectric element, 33, 34 ... Temperature measurement Element cable, 41, 42 ... opening, 43 ... vent filter, 44 ... resin, 50 ... control circuit, 51 ... CPU, 52, 55 ... current output circuit, 53 ... current input circuit, 54 ... resistance input circuit, 56 ... A / Converter, 57 ... D / A converter, 611 ... light-emitting portion, 612 ... receiving portion, 613 and 614 ... optical fiber
Claims (11)
基板の面上に薄膜形成された熱電素子と、
前記基板の面上または前記熱電素子上に薄膜形成された測温素子とを備え、
前記熱電素子は、前記測温素子を加熱または冷却し、
前記測温素子の表面が前記鏡面として利用される
ことを特徴とする温度調節機能付き鏡。 A mirror with a temperature adjustment function having a function of adjusting the temperature of the mirror surface,
A thermoelectric element formed in a thin film on the surface of the substrate;
A temperature measuring element formed in a thin film on the surface of the substrate or on the thermoelectric element;
The thermoelectric element heats or cools the temperature measuring element,
A mirror with a temperature control function, wherein the surface of the temperature measuring element is used as the mirror surface.
複数の前記熱電素子の少なくとも一部は、
直列に連なるように配置されるとともに、前記測温素子と隣接する
ことを特徴とする請求項１に記載の温度調節機能付き鏡。 A plurality of the thermoelectric elements;
At least some of the plurality of thermoelectric elements are:
The mirror with a temperature adjusting function according to claim 1, wherein the mirror is arranged so as to be connected in series and is adjacent to the temperature measuring element.
複数の前記熱電素子の少なくとも一部は、
前記測温素子に対してそれぞれ隣接して配置される
ことを特徴とする請求項１または請求項２に記載の温度調節機能付き鏡。 A plurality of the thermoelectric elements;
At least some of the plurality of thermoelectric elements are:
The mirror with a temperature adjusting function according to claim 1, wherein the mirror is disposed adjacent to each of the temperature measuring elements.
ことを特徴とする請求項１〜請求項３の何れかに記載の温度調節機能付き鏡。 The mirror with temperature control function according to any one of claims 1 to 3, wherein the temperature measuring element is formed as a thin film on the surface of the substrate.
前記測温素子は、前記ダイヤフラム領域内に配置され、
前記熱電素子は、前記ダイヤフラム領域と前記周縁領域に跨って配置される
ことを特徴とする請求項１〜請求項４の何れかに記載の温度調節機能付き鏡。 The substrate has a diaphragm region in which a concave portion is formed on a surface opposite to the surface on which the temperature measuring element and the thermoelectric element are formed, and a peripheral region that is a region other than the diaphragm region,
The temperature measuring element is disposed in the diaphragm region,
The said thermoelectric element is arrange | positioned ranging over the said diaphragm area | region and the said peripheral area | region. The mirror with the temperature control function in any one of Claims 1-4 characterized by the above-mentioned.
前記発光素子及び前記受光素子は、前記発光素子が発する光を、請求項６に記載の温度調節機能付き鏡に反射させて、この反射光を前記受光素子が受光するように配置され、
前記発光素子から発光させた状態で、前記熱電素子により前記測温素子を冷却して、前記受光素子により受光された光の強度が低下した時に、前記測温素子により測定された温度を露点として演算する露点演算手段を備える
ことを特徴とする露点計。 A light-emitting element, a light-receiving element, and the temperature-adjusting mirror according to claim 6,
The light emitting element and the light receiving element are arranged so that the light emitted from the light emitting element is reflected by a mirror with a temperature adjusting function according to claim 6 so that the light receiving element receives the reflected light.
When the temperature measuring element is cooled by the thermoelectric element in a state where light is emitted from the light emitting element, and the intensity of light received by the light receiving element is reduced, the temperature measured by the temperature measuring element is used as a dew point. A dew point meter comprising a dew point calculating means for calculating.
前記発光素子及び前記受光素子は、前記発光素子が発する光を、請求項６に記載の温度調節機能付き鏡に反射させて、この反射光を前記受光素子が受光するように配置され、
前記発光素子から発光させた状態で、前記熱電素子により前記測温素子を冷却して、前記受光素子により受光された光の強度が低下した時に、前記測温素子により測定された温度を露点として演算する露点演算手段と、
この露点における飽和水蒸気量と、被測定気体の温度における飽和水蒸気量とに基づいて、被測定気体の湿度を演算する湿度演算手段とを備える
ことを特徴とする湿度センサ。 A light-emitting element, a light-receiving element, and the temperature-adjusting mirror according to claim 6,
The light emitting element and the light receiving element are arranged so that the light emitted from the light emitting element is reflected by a mirror with a temperature adjusting function according to claim 6 so that the light receiving element receives the reflected light.
When the temperature measuring element is cooled by the thermoelectric element in a state where light is emitted from the light emitting element, and the intensity of light received by the light receiving element is reduced, the temperature measured by the temperature measuring element is used as a dew point. Dew point calculating means for calculating,
A humidity sensor comprising: a humidity calculating means for calculating the humidity of the gas to be measured based on the saturated water vapor amount at the dew point and the saturated water vapor amount at the temperature of the gas to be measured.
前記発光素子及び前記受光素子は、
前記発光素子が発する光を、請求項９に記載の温度調節機能付き鏡に透過させて、この透過光を前記受光素子が受光するように配置され、
前記発光素子から発光させた状態で、前記熱電素子により前記測温素子を冷却して、前記受光素子により受光された光の強度が低下した時に、前記測温素子により測定された温度を露点として演算する露点演算手段を備える
ことを特徴とする露点計。 A light emitting element, a light receiving element, and a mirror with a temperature control function according to claim 9,
The light emitting element and the light receiving element are:
The light emitted from the light emitting element is transmitted through the mirror with a temperature adjusting function according to claim 9, and the transmitted light is arranged to be received by the light receiving element.
When the temperature measuring element is cooled by the thermoelectric element in a state where light is emitted from the light emitting element, and the intensity of light received by the light receiving element is reduced, the temperature measured by the temperature measuring element is used as a dew point. A dew point meter comprising a dew point calculating means for calculating.
前記発光素子及び前記受光素子は、
前記発光素子が発する光を、請求項９に記載の温度調節機能付き鏡に透過させて、この透過光を前記受光素子が受光するように配置され、
前記発光素子から発光させた状態で、前記熱電素子により前記測温素子を冷却して、前記受光素子により受光された光の強度が低下した時に、前記測温素子により測定された温度を露点として演算する露点演算手段と、
この露点における飽和水蒸気量と、被測定気体の温度における飽和水蒸気量とに基づいて、被測定気体の湿度を演算する湿度演算手段とを備える
ことを特徴とする湿度センサ。 A light emitting element, a light receiving element, and a mirror with a temperature control function according to claim 9,
The light emitting element and the light receiving element are:
The light emitted from the light emitting element is transmitted through the mirror with a temperature adjusting function according to claim 9, and the transmitted light is arranged to be received by the light receiving element.
When the temperature measuring element is cooled by the thermoelectric element in a state where light is emitted from the light emitting element, and the intensity of light received by the light receiving element is reduced, the temperature measured by the temperature measuring element is used as a dew point. Dew point calculating means for calculating,
A humidity sensor comprising: a humidity calculating means for calculating the humidity of the gas to be measured based on the saturated water vapor amount at the dew point and the saturated water vapor amount at the temperature of the gas to be measured.
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| WO2013008753A1 (en) * | 2011-07-13 | 2013-01-17 | ステラグリーン株式会社 | Humidity sensor |
| WO2016040482A1 (en) * | 2014-09-12 | 2016-03-17 | Honeywell International Inc. | Humidity sensor |
| US10585058B2 (en) | 2016-05-13 | 2020-03-10 | Honeywell International Inc. | FET based humidity sensor with barrier layer protecting gate dielectric |
| US10677747B2 (en) | 2015-02-17 | 2020-06-09 | Honeywell International Inc. | Humidity sensor |
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| JP2007093269A (en) * | 2005-09-27 | 2007-04-12 | Yamatake Corp | Moisture detector |
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| JPS61124861A (en) * | 1984-11-22 | 1986-06-12 | Yamatake Honeywell Co Ltd | Humidity detection element |
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| WO2013008753A1 (en) * | 2011-07-13 | 2013-01-17 | ステラグリーン株式会社 | Humidity sensor |
| WO2016040482A1 (en) * | 2014-09-12 | 2016-03-17 | Honeywell International Inc. | Humidity sensor |
| US9513242B2 (en) | 2014-09-12 | 2016-12-06 | Honeywell International Inc. | Humidity sensor |
| US10677747B2 (en) | 2015-02-17 | 2020-06-09 | Honeywell International Inc. | Humidity sensor |
| US10585058B2 (en) | 2016-05-13 | 2020-03-10 | Honeywell International Inc. | FET based humidity sensor with barrier layer protecting gate dielectric |
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