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JP2009047949A - Manufacturing method of optical element - Google Patents

Manufacturing method of optical element Download PDF

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JP2009047949A
JP2009047949A JP2007214275A JP2007214275A JP2009047949A JP 2009047949 A JP2009047949 A JP 2009047949A JP 2007214275 A JP2007214275 A JP 2007214275A JP 2007214275 A JP2007214275 A JP 2007214275A JP 2009047949 A JP2009047949 A JP 2009047949A
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substrate
surrounding
spacer
optical element
cut
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Kazuhiro Miyagawa
和裕 宮川
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Alps Alpine Co Ltd
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Alps Electric Co Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a manufacturing method of an optical element capable of preventing the occurrence of burrs upon cutting a large-sized body into individual optical elements. <P>SOLUTION: The manufacturing method of the optical element comprises: a process to form a large-sized spacer 4 where surrounding parts 21, each of which surrounds an area with an optical functional surface 32 arranged therein and has a rectangular outer shape, are arrayed at prescribed intervals from one another through a linking part 22 that is arranged so as not to cover the corner parts of the surrounding parts; a process to fill with adhesive 23 a grid-shaped area of the large-sized spacer wherein the linking part is arranged between the surrounding parts, and to place a first large-sized substrate 2 and a second large-sized substrate 3 opposite to each other across the large-sized spacer and bond them to form a large-sized body 1; and a process to cut the area between the surrounding parts of the large-sized body into grid shapes, then, to form the optical element 5 comprising the first substrate having the optical function surface and the second substrate facing the first substrate through the spacer having the surrounding part. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

本発明は、光学機能面が形成される基板間にスペーサを設けてなる光学素子の製造方法に関し、特に複数の光学素子となる構成が格子状に複数配列されてなる大判体を切断して光学素子を形成する光学素子の製造方法に関する。   The present invention relates to a method for manufacturing an optical element in which a spacer is provided between substrates on which optical functional surfaces are formed, and in particular, by cutting a large body in which a plurality of structures to be a plurality of optical elements are arranged in a lattice shape to obtain an optical The present invention relates to a method for manufacturing an optical element for forming an element.

従来、カメラ等に用いられレンズ等の光学機能面を有する光学素子を効率よく製造するため、大判基板に光学機能面を所定間隔で格子状に複数配列し、光学機能面間の領域をダイシングにより縦横に切断して個々の光学素子を形成する製造方法が知られている。このような光学素子の製造方法としては、例えば特許文献1に挙げるようなものがある。
特開2003−125295号公報
Conventionally, in order to efficiently manufacture an optical element having an optical function surface such as a lens used in a camera or the like, a plurality of optical function surfaces are arranged in a lattice pattern at a predetermined interval on a large substrate, and a region between the optical function surfaces is diced. A manufacturing method is known in which individual optical elements are formed by cutting vertically and horizontally. As a method for manufacturing such an optical element, for example, there is a method described in Patent Document 1.
JP 2003-125295 A

ここで、光学機能面を有した第1基板と、この第1基板とスペーサを介して対向する第2基板とを有した光学素子が知られている。このような光学素子については、複数の光学機能面がアレイ状に配列された第1大判基板と、第1大判基板と大判スペーサを介して対向する第2大判基板とからなる大判体をダイシングにより切断して個々の光学素子を形成する。   Here, an optical element having a first substrate having an optical functional surface and a second substrate facing the first substrate via a spacer is known. With respect to such an optical element, a large body composed of a first large substrate having a plurality of optical functional surfaces arranged in an array and a second large substrate opposed to the first large substrate through a large spacer is obtained by dicing. Cutting to form individual optical elements.

図7には従来の製造方法における第1大判基板及び大判スペーサの平面図を示している。第1大判基板51は、平板状のガラスによって形成されており、少なくとも一方の表面には光学機能面としてのレンズ面53がアレイ状に複数配列されている。また、大判スペーサ52は、第1大判基板51と略同じ外形状を有する金属板によって構成されており、第1大判基板51に形成されるレンズ面53に対応する位置を囲むように囲繞部54が形成され、この囲繞部54がアレイ状に複数配列されている。複数の囲繞部54は、第1大判基板51の各レンズ面53にそれぞれ対応するように設けられると共に、互いに所定間隔を有するように配置されており、隣接する囲繞部54とは繋ぎ部55によって懸架されている。繋ぎ部55は、縦横に伸びる囲繞部54間の領域の交差部分に設けられ、隣接する囲繞部54同士を懸架する。このため、繋ぎ部55は各囲繞部54の4つの角部にかかるようにそれぞれ形成されることとなる。   FIG. 7 shows a plan view of a first large substrate and a large spacer in the conventional manufacturing method. The first large-sized substrate 51 is made of flat glass, and a plurality of lens surfaces 53 as optical functional surfaces are arranged in an array on at least one surface. The large spacer 52 is formed of a metal plate having substantially the same outer shape as that of the first large substrate 51, and the surrounding portion 54 surrounds a position corresponding to the lens surface 53 formed on the first large substrate 51. A plurality of the surrounding portions 54 are arranged in an array. The plurality of surrounding portions 54 are provided so as to correspond to the respective lens surfaces 53 of the first large-sized substrate 51 and are arranged so as to have a predetermined distance from each other. The adjacent surrounding portions 54 are connected by the connecting portions 55. Suspended. The connecting portion 55 is provided at an intersecting portion of the region between the surrounding portions 54 extending vertically and horizontally, and suspends the adjacent surrounding portions 54. For this reason, the connecting portion 55 is formed so as to cover the four corners of each surrounding portion 54.

第2大判基板は図7では図示しないが第1大判基板51と同様に形成され、第1大判基板51の裏側に大判スペーサ52が配置され、さらにその裏側に第2大判基板が配置される。図8には第1大判基板51と大判スペーサ52を重ね合わせた状態の平面図を示している。第1大判基板51と大判スペーサ52を重ね合わせたら、繋ぎ部55が設けられる囲繞部54間の領域に接着剤57(ハッチングで示す)を充填し、さらに第2大判基板を重ね合わせ、3枚の板を接着して大判体50を形成する。   Although the second large substrate is not shown in FIG. 7, it is formed in the same manner as the first large substrate 51, a large spacer 52 is disposed on the back side of the first large substrate 51, and a second large substrate is disposed on the back side. FIG. 8 is a plan view showing a state in which the first large substrate 51 and the large spacer 52 are overlapped. When the first large substrate 51 and the large spacer 52 are overlapped, an adhesive 57 (shown by hatching) is filled in the region between the surrounding portions 54 where the connecting portions 55 are provided, and the second large substrate is overlapped to form three sheets The large plate 50 is formed by bonding the plates.

大判体50を形成したら、これを切断して光学素子を形成する。まず図9に示すように囲繞部54間の領域を図中横方向にダイシングにより切断する。なお、符号58は第1大判基板51と対向する第2大判基板を表している。切断幅は、囲繞部54間の幅よりも若干狭く、切断面には接着剤57及び大判スペーサ52の繋ぎ部55の端部付近が露出する。すなわち、繋ぎ部55の切り残された部分59は、その端面が切断面の一部を構成することとなる。   After the large format 50 is formed, this is cut to form an optical element. First, as shown in FIG. 9, the region between the surrounding portions 54 is cut by dicing in the horizontal direction in the drawing. Reference numeral 58 represents a second large substrate facing the first large substrate 51. The cutting width is slightly narrower than the width between the surrounding portions 54, and the vicinity of the end portion of the connecting portion 55 of the adhesive 57 and the large spacer 52 is exposed on the cut surface. That is, the uncut portion 59 of the connecting portion 55 has an end surface that constitutes a part of the cut surface.

囲繞部54間の領域を図中横方向に切断したら、図10に示すように当該領域を図中縦方向にダイシングにより切断する。この際、横方向には既に切断されているため、横方向の切断面と対向する切断面との間は空間となっている。したがって、囲繞部54間の領域を図中縦方向に切断していくとダイシングの刃は、空間部から繋ぎ部55の切り残された部分を切断し、続いて接着剤が充填された領域を切断し、空間部に接する繋ぎ部55の切り残された部分を切断して、再び空間部に到達する。   If the area | region between the surrounding parts 54 is cut | disconnected in the horizontal direction in a figure, as shown in FIG. 10, the said area | region will be cut | disconnected by dicing in the vertical direction in the figure. At this time, since it has already been cut in the lateral direction, there is a space between the cut surface in the lateral direction and the opposite cut surface. Accordingly, when the region between the surrounding portions 54 is cut in the vertical direction in the figure, the dicing blade cuts the remaining portion of the connecting portion 55 from the space portion, and subsequently the region filled with the adhesive. It cut | disconnects, the part which was left uncut of the connection part 55 which touches a space part is cut | disconnected, and it reaches | attains a space part again.

しかし従来の製造方法では、このようにダイシングの刃が空間部に到達する前に、端面が空間部に面している繋ぎ部55の切り残された部分を切断することとなっていたため、切断方向に金属のバリ56が生じていた。このようにバリが生じると、光学素子をその後の工程で光学機器に組み込む際に障害となることがあり、また組み込んだ後でバリが光学系に入り込んで光学性能を低下させるなどの問題を発生させることがある。   However, in the conventional manufacturing method, before the dicing blade reaches the space portion, the remaining portion of the connecting portion 55 whose end surface faces the space portion is cut. A metal burr 56 was generated in the direction. If burr occurs in this way, it may become an obstacle when the optical element is incorporated in an optical device in the subsequent process, and after it has been incorporated, the burr enters the optical system and causes problems such as degradation of optical performance. There are things to do.

本発明は前記課題を鑑みてなされたものであり、大判体から切断して個々の光学素子とする際にバリの発生を防止することのできる光学素子の製造方法を提供することを目的とする。   The present invention has been made in view of the above problems, and an object of the present invention is to provide a method for manufacturing an optical element capable of preventing the generation of burrs when cut from a large size to obtain individual optical elements. .

前記課題を解決するため、本発明に係る光学素子の製造方法は、複数の光学機能面が所定間隔でアレイ状に配置された第1大判基板と、該第1大判基板と大判スペーサを介して対向する第2大判基板とからなる大判体を格子状に切断し個々の光学素子とする光学素子の製造方法において、
前記光学機能面が配置される領域を囲み方形状の外形を有する囲繞部が、該囲繞部の角部にかからないように配置される繋ぎ部を介して、互いに所定間隔を有してアレイ状に配置されるように大判スペーサを形成する工程と、
前記大判スペーサの前記繋ぎ部が配置され格子状とされる囲繞部間の領域に接着剤を充填し、前記大判スペーサを介して前記第1大判基板と第2大判基板を対向させると共に、接着して大判体を形成する工程と、
前記大判体の囲繞部間の領域を格子状に切断することで、光学機能面を有する第1基板と、前記囲繞部を有するスペーサを介して前記第1基板と対向する第2基板とからなる光学素子を形成する工程と、
を有することを特徴として構成されている。
In order to solve the above-described problems, an optical element manufacturing method according to the present invention includes a first large-sized substrate in which a plurality of optical functional surfaces are arranged in an array at predetermined intervals, and the first large-sized substrate and the large-sized spacer. In a manufacturing method of an optical element in which a large body composed of an opposing second large substrate is cut into a lattice shape to form individual optical elements,
Enclosures having an outer shape that surrounds the area where the optical functional surface is arranged are arranged in an array with a predetermined interval from each other via a connecting part arranged so as not to cover a corner of the enclosure part. Forming a large spacer to be disposed;
An adhesive is filled in a region between the surrounding portions in which the connecting portions of the large spacers are arranged and formed in a lattice shape, and the first large substrate and the second large substrate are opposed to each other through the large spacers and bonded. Forming a large format,
By cutting a region between the surrounding surrounding portions of the large size into a lattice shape, the first substrate having an optical functional surface and a second substrate facing the first substrate through a spacer having the surrounding portion are formed. Forming an optical element;
It is characterized by having.

また、本発明に係る光学素子の製造方法は、前記繋ぎ部が前記囲繞部の各辺の両端部より中央側の位置にそれぞれ配置されて、互いに対向する囲繞部間を懸架するように前記大判スペーサが形成されることを特徴として構成されている。   Further, in the method of manufacturing an optical element according to the present invention, the connecting portion is arranged at a position closer to the center side than both end portions of each side of the surrounding portion, and the large size is formed so as to suspend between the surrounding surrounding portions. A spacer is formed.

本発明に係る光学素子の製造方法によれば、囲繞部が、該囲繞部の角部にかからないように配置される繋ぎ部を介して、互いに所定間隔を有して配置されるように大判スペーサを形成し、囲繞部間の領域に接着剤を充填し、形成された大判体の囲繞部間の領域を切断することで光学素子を形成することにより、囲繞部間の領域が切断される際に、一方向に切断されて形成される空間部に繋ぎ部が接しないようにすることができるので、繋ぎ部は常に切断方向後方に接着剤が存在した状態で切断されるので、繋ぎ部の切断に伴うバリの発生を防止することができる。   According to the method for manufacturing an optical element according to the present invention, the large-sized spacers are arranged so that the surrounding portions are arranged at a predetermined interval from each other via the connecting portions that are arranged so as not to cover the corner portions of the surrounding portions. When the region between the surrounding parts is cut, the optical element is formed by filling the region between the surrounding parts with an adhesive and cutting the region between the formed large-sized surrounding parts. In addition, since it is possible to prevent the connecting portion from coming into contact with the space portion formed by being cut in one direction, the connecting portion is always cut in a state where the adhesive exists behind the cutting direction. Generation | occurrence | production of the burr | flash accompanying cutting | disconnection can be prevented.

また、本発明に係る光学素子の製造方法によれば、繋ぎ部が囲繞部の各辺の両端部より中央側の位置にそれぞれ配置されて、互いに対向する囲繞部間を懸架するように大判スペーサが形成されることにより、格子状となる囲繞部間の領域をどの方向から切断しても、繋ぎ部が空間部に接しないようにすることができ、確実に繋ぎ部の切断に伴うバリの発生を防止することができる。   Further, according to the method for manufacturing an optical element according to the present invention, the connecting portion is arranged at a position closer to the center than both ends of each side of the surrounding portion, and the large format spacer is suspended so as to suspend between the surrounding surrounding portions. As a result, it is possible to prevent the connecting portion from coming into contact with the space portion, regardless of the direction in which the region between the surrounding portions in a lattice shape is cut. Occurrence can be prevented.

本発明の実施形態について、図面に沿って詳細に説明する。図1には、本実施形態の製造方法によって形成される光学素子5の断面図を示している。この図に示すように、光学素子5は、第1基板30と第2基板33とがスペーサ36を介して対向してなり、第1基板30の外側に向かう面には第1レンズ面31が、それと反対側の面には第2レンズ面32が、それぞれ形成され、第2基板33の第1基板30と対向する面には第3レンズ面34が、それと反対側の面には第4レンズ面35が、それぞれ形成されている。   Embodiments of the present invention will be described in detail with reference to the drawings. FIG. 1 shows a cross-sectional view of an optical element 5 formed by the manufacturing method of the present embodiment. As shown in this figure, in the optical element 5, the first substrate 30 and the second substrate 33 are opposed to each other via a spacer 36, and the first lens surface 31 is formed on the surface facing the outside of the first substrate 30. The second lens surface 32 is formed on the opposite surface, the third lens surface 34 is formed on the surface of the second substrate 33 facing the first substrate 30, and the fourth lens is formed on the opposite surface. Lens surfaces 35 are formed respectively.

第1基板30と第2基板33はいずれも透明なガラス板からなり、スペーサ36は金属板によって形成されている。スペーサ36の各レンズ部間の領域は空間部とされており、第1基板30と第2基板33間で光が透過することができるようにされている。また、第1基板30と第2基板33及びスペーサ36の外壁に囲まれた凹状の領域には、接着剤23があって、これによって第1基板30と第2基板33及びスペーサ36を接着固定している。   Both the first substrate 30 and the second substrate 33 are made of a transparent glass plate, and the spacer 36 is formed of a metal plate. A region between the lens portions of the spacer 36 is a space portion, and light can be transmitted between the first substrate 30 and the second substrate 33. The concave region surrounded by the outer walls of the first substrate 30, the second substrate 33 and the spacer 36 has an adhesive 23, whereby the first substrate 30, the second substrate 33 and the spacer 36 are bonded and fixed. is doing.

次に、このような光学素子5の製造方法について説明する。本実施形態の製造方法では、第1大判基板2と第2大判基板3及び大判スペーサ4からなる大判体1を形成し、それを切断することで光学素子5を形成する。図2には、第1大判基板2と第2大判基板3及び大判スペーサ4の平面図を示している。この図に示すように第1大判基板2は、外形状を略正方形状に形成され、表面には第1レンズ面31及び第2レンズ面32が複数形成されており、これらは縦横に所定間隔を有したアレイ状となるように配列されている。なお、第1レンズ面31が図中裏側面、第2レンズ面32が図中表側面の同位置にそれぞれ形成されている。また、第2大判基板3は第1大判基板2と同じ外形状を有すると共に、表面には第1レンズ面31及び第2レンズ面32と同じ配列で、表面に第3レンズ面34及び第4レンズ面35が複数形成されている。   Next, a method for manufacturing such an optical element 5 will be described. In the manufacturing method of the present embodiment, the large body 1 including the first large substrate 2, the second large substrate 3, and the large spacer 4 is formed, and the optical element 5 is formed by cutting the large body 1. FIG. 2 shows a plan view of the first large substrate 2, the second large substrate 3, and the large spacer 4. As shown in this figure, the first large-sized substrate 2 has an outer shape formed in a substantially square shape, and a plurality of first lens surfaces 31 and a plurality of second lens surfaces 32 are formed on the surface, and these are arranged at predetermined intervals vertically and horizontally. Are arranged in an array having The first lens surface 31 is formed at the same position on the back side surface in the drawing, and the second lens surface 32 is formed at the same position on the front side surface in the drawing. The second large substrate 3 has the same outer shape as the first large substrate 2 and has the same arrangement as the first lens surface 31 and the second lens surface 32 on the surface, and the third lens surface 34 and the fourth lens on the surface. A plurality of lens surfaces 35 are formed.

大判スペーサ4は、外形状を第1大判基板2よりも若干小さい略正方形状に形成され、周縁部が枠形状の枠部20として形成されている。枠部20の内側には、複数の囲繞部21が配列される。囲繞部21は、大判スペーサ4を第1大判基板2と重ね合わせた際に、第1レンズ面31及び第2レンズ面32が配置される領域を囲むようにして外形が方形状に形成される。囲繞部21は、第1大判基板2の各レンズ面にそれぞれ対応するように形成されるので、それに合わせて縦横に所定間隔を有したアレイ状に配列される。それに伴い囲繞部21間の領域は、縦横に交差する格子状に形成される。   The large spacer 4 is formed in a substantially square shape whose outer shape is slightly smaller than that of the first large substrate 2, and the peripheral edge portion is formed as a frame-shaped frame portion 20. A plurality of surrounding portions 21 are arranged inside the frame portion 20. The surrounding portion 21 is formed in a rectangular shape so as to surround a region where the first lens surface 31 and the second lens surface 32 are arranged when the large spacer 4 is overlapped with the first large substrate 2. Since the surrounding portions 21 are formed so as to correspond to the respective lens surfaces of the first large-sized substrate 2, they are arranged in an array having predetermined intervals in the vertical and horizontal directions. Accordingly, the region between the surrounding portions 21 is formed in a lattice shape that intersects vertically and horizontally.

大判スペーサ4の隣接する囲繞部21間には、これらを繋ぐように幅細状の繋ぎ部22が形成されている。また、最外周の囲繞部21については、枠部20に対向する辺と枠部20とを懸架するように幅細状の繋ぎ部22が形成されている。繋ぎ部22は、囲繞部21の角部にかからない位置に形成されている。具体的には、繋ぎ部22は囲繞部21の一辺毎に2つずつ設けられており、囲繞部21の一辺の両端近傍であって角部から所定長さ離れた位置から、それぞれ囲繞部21の一辺と直交する方向に伸び、対向する囲繞部21または枠部20に渡るように形成されている。   A narrow connecting portion 22 is formed between adjacent surrounding portions 21 of the large spacer 4 so as to connect them. In addition, with respect to the outermost peripheral surrounding portion 21, a narrow connecting portion 22 is formed so as to suspend the side facing the frame portion 20 and the frame portion 20. The connecting portion 22 is formed at a position that does not cover the corner portion of the surrounding portion 21. Specifically, two connecting portions 22 are provided for each side of the surrounding portion 21, and the surrounding portions 21 are respectively located from both ends of one side of the surrounding portion 21 and at a predetermined distance from the corner portion. It extends in a direction orthogonal to one side and extends to the opposing surrounding part 21 or frame part 20.

大判スペーサ4は、金属板によって構成されており、板金をプレスあるいはレーザー切断等の手段によって加工し、形成される。なお、大判スペーサ4は金属材のものには限られず、例えば樹脂加工品であってもよい。その場合、完成する光学素子5のスペーサ36も樹脂材で構成されたものとなる。   The large spacer 4 is formed of a metal plate, and is formed by processing a sheet metal by means such as pressing or laser cutting. The large spacer 4 is not limited to a metal material, and may be a resin processed product, for example. In that case, the spacer 36 of the completed optical element 5 is also made of a resin material.

次に、第1大判基板2と第2大判基板3及び大判スペーサ4を一体化する。図3には、第1大判基板2に大判スペーサ4を重ね合わせた状態の平面図を示している。この図に示すように、大判スペーサ4を第1大判基板2に重ね合わせると、大判スペーサ4の囲繞部21は第1大判基板2の第1レンズ面31及び第2レンズ面32の形成された領域を囲むように配置される。また、繋ぎ部22が形成される囲繞部21間の領域及び囲繞部21と枠部20との間の領域には、その空間を埋めるように接着剤23が充填される(図中ハッチングで示す)。   Next, the first large substrate 2, the second large substrate 3 and the large spacer 4 are integrated. FIG. 3 is a plan view showing a state in which the large spacers 4 are superposed on the first large substrate 2. As shown in this figure, when the large spacer 4 is superimposed on the first large substrate 2, the surrounding portion 21 of the large spacer 4 is formed with the first lens surface 31 and the second lens surface 32 of the first large substrate 2. Arranged to surround the area. In addition, the region between the surrounding portions 21 where the connecting portions 22 are formed and the region between the surrounding portion 21 and the frame portion 20 are filled with an adhesive 23 so as to fill the space (indicated by hatching in the figure). ).

接着剤23を充填したら、第1大判基板2と対向するように大判スペーサ4に第2大判基板3を重ね合わせる。これによって、第1大判基板2と第2大判基板3及び大判スペーサ4は、接着剤23により接着され一体化されて、大判体1を形成する。図4には、大判体1の断面図を示している。この図に示すように、大判体1において第1大判基板2と第2大判基板3に形成された各レンズ部は互いに対向し、その間は空間部とされている。また、第1大判基板2と第2大判基板3及び囲繞部21の外壁または枠部20の内壁に囲まれた領域には、接着剤23が充填されている。   When the adhesive 23 is filled, the second large substrate 3 is overlaid on the large spacer 4 so as to face the first large substrate 2. As a result, the first large-sized substrate 2, the second large-sized substrate 3, and the large-sized spacer 4 are bonded and integrated by the adhesive 23 to form the large-sized body 1. FIG. 4 shows a cross-sectional view of the large format 1. As shown in this figure, in the large format 1, the lens portions formed on the first large format substrate 2 and the second large format substrate 3 face each other, and a space is formed between them. An area surrounded by the first large-sized substrate 2 and the second large-sized substrate 3 and the outer wall of the surrounding portion 21 or the inner wall of the frame portion 20 is filled with an adhesive 23.

次に、大判体1を切断して光学素子5を形成する。図5には、大判体1の平面図であって大判体1を横方向に切断した状態の図を示している。大判体1は、ダイシングにより囲繞部21間及び囲繞部21と枠部20との間の領域が切断される。ダイシングによって切断される領域は、囲繞部21間及び囲繞部21と枠部20との間の領域よりも若干幅が狭く、したがって囲繞部21の外壁には接着剤23が残され、第1大判基板2と第2大判基板3及び大判スペーサ4が接着された状態を維持する。   Next, the large body 1 is cut to form the optical element 5. FIG. 5 is a plan view of the large format 1 showing a state in which the large format 1 is cut in the horizontal direction. In the large format 1, regions between the surrounding portions 21 and between the surrounding portion 21 and the frame portion 20 are cut by dicing. The region cut by dicing is slightly narrower than the region between the surrounding portions 21 and the region between the surrounding portion 21 and the frame portion 20, so that the adhesive 23 remains on the outer wall of the surrounding portion 21, and the first large format is formed. The state where the substrate 2, the second large format substrate 3, and the large format spacer 4 are bonded is maintained.

続いて大判体1を縦方向にも切断して光学素子5を形成する。図6には、大判体1の平面図であって大判体1を縦方向に切断した状態の図を示している。この図では、囲繞部21間及び囲繞部21と枠部20との間の領域を形成する5列にそれぞれ符号a〜eを付しており、説明のために各列がそれぞれ異なった段階まで切断された状態を表している。   Subsequently, the large format 1 is also cut in the vertical direction to form the optical element 5. FIG. 6 is a plan view of the large format 1 in which the large format 1 is cut in the vertical direction. In this figure, reference numerals a to e are respectively attached to five columns forming the region between the surrounding portions 21 and between the surrounding portion 21 and the frame portion 20, and for the sake of explanation, the respective rows are different from each other. It shows a disconnected state.

図6の符号aで表される右端の列は、枠部20の右辺の内壁と右端に配置された囲繞部21の外壁とに挟まれた領域であり、この図では全長に渡ってダイシングにより切断された状態を表している。符号bで表される右から2番目の列も同様に全長に渡ってダイシングにより切断されている。これにより、右端に配置された4つの囲繞部21を有する部分が大判体1から個々に切り離されて、図1に示す光学素子5が形成されている。   6 is a region sandwiched between the inner wall of the right side of the frame portion 20 and the outer wall of the surrounding portion 21 arranged at the right end, and in this figure, dicing is performed over the entire length. It shows a disconnected state. Similarly, the second column from the right represented by the symbol b is cut by dicing over the entire length. Thereby, the part which has the four surrounding parts 21 arrange | positioned at the right end is cut | disconnected from the large format 1 individually, and the optical element 5 shown in FIG. 1 is formed.

図6の符号c〜eで表される3列は、ダイシングによる切断の過程を示している。符号cで表される列は、大判体1の図中上端から切断されて最初に繋ぎ部22を切断する直前の位置まで切断された状態を示している。また、図6の符号dで表される列は、符号cで表される列からさらに切断を進めて、図中上から2番目の繋ぎ部22を切断する直前の位置まで切断された状態を示している。図6の符号cで表される列に示す切断位置からさらに切断を進める際、切断される繋ぎ部22の切断方向後方には接着剤23が充填されているため、符号dの列に示すように繋ぎ部22は切断方向後方に変形することがなく、バリが発生することもない。   Three columns represented by symbols c to e in FIG. 6 indicate a cutting process by dicing. A column denoted by reference character c shows a state in which the large format 1 is cut from the upper end in the drawing and is cut to a position immediately before the connecting portion 22 is first cut. Further, the column represented by the symbol d in FIG. 6 is further cut from the column represented by the symbol c, and is in a state where it has been cut to a position immediately before the second connecting portion 22 is cut from the top in the drawing. Show. When the cutting is further advanced from the cutting position indicated by the column c in FIG. 6, the adhesive 23 is filled behind the cutting portion 22 to be cut, so that it is indicated by the column d. The connecting portion 22 is not deformed rearward in the cutting direction, and no burrs are generated.

また、図6の符号eで表される列は、符号dで表される列からさらに切断を進めて、既に横方向に切断されて空間部となった位置まで切断された状態を示している。符号dで表される列に示す切断位置からさらに切断を進める際にも、切断される2番目の繋ぎ部22の切断方向後方には接着剤23が充填されており、既に横方向に切断されたことによる空間部に接する部分には繋ぎ部22が配置されていないため、符号eの列に示すように繋ぎ部22を切断することによるバリが発生することがない。   In addition, the column represented by the symbol e in FIG. 6 shows a state where the cutting is further advanced from the column represented by the symbol d, and has already been cut in the horizontal direction to become a space portion. . Even when further cutting is performed from the cutting position shown in the row indicated by the symbol d, the adhesive 23 is filled behind the cutting direction of the second connecting portion 22 to be cut and has already been cut in the horizontal direction. Since the connecting portion 22 is not disposed at the portion in contact with the space portion, there is no occurrence of burrs due to the cutting of the connecting portion 22 as shown in the row of the symbol e.

このように、大判スペーサ4を形成するにあたって繋ぎ部22を囲繞部21の角部にかからないように形成したことにより、一方向への切断による空間部に繋ぎ部22が接しないため、一方向への切断方向と直交する方向に切断を行う際に、繋ぎ部22の切断方向後方には必ず接着剤23が充填された状態となるために、繋ぎ部22の切断によるバリの発生を防止することができる。また、繋ぎ部22は囲繞部21の一辺にそれぞれ2つずつ設けられ、そのいずれも囲繞部21の角部より辺の中央寄りに配置されていることにより、囲繞部21間の領域がいずれの方向に切断されても、繋ぎ部22のバリの発生を確実に防止することができる。   As described above, when the large spacer 4 is formed, the connecting portion 22 is formed so as not to be applied to the corner portion of the surrounding portion 21, so that the connecting portion 22 does not contact the space portion by cutting in one direction. When cutting in a direction orthogonal to the cutting direction of the adhesive portion 23, the adhesive 23 is always filled in the rear of the connecting portion 22 in the cutting direction, so that generation of burrs due to the cutting of the connecting portion 22 is prevented. Can do. In addition, two connecting portions 22 are provided on each side of the surrounding portion 21, and both of them are arranged closer to the center of the side than the corner portion of the surrounding portion 21, so that the region between the surrounding portions 21 is any Even if it is cut in the direction, it is possible to reliably prevent burrs from occurring in the connecting portion 22.

以上、本発明の実施形態について説明したが、本発明の適用は本実施形態には限られず、その技術的思想の範囲内において様々に適用されうるものである。例えば、第1大判基板2及び第2大判基板3に形成されるレンズ面の構成については、本実施形態のものには限られず、少なくとも第1大判基板2の一面に光学機能面が形成されていればよい。また、大判体1における光学素子5の多面取りの個数及び配置についても、繋ぎ部22が囲繞部21の角部以外に配置されていれば任意に設定することができる。   Although the embodiment of the present invention has been described above, the application of the present invention is not limited to this embodiment, and can be applied in various ways within the scope of its technical idea. For example, the configuration of the lens surfaces formed on the first large substrate 2 and the second large substrate 3 is not limited to that of the present embodiment, and an optical functional surface is formed on at least one surface of the first large substrate 2. Just do it. In addition, the number and arrangement of the multiple chamfers of the optical element 5 in the large format 1 can be arbitrarily set as long as the connecting portion 22 is arranged at a portion other than the corner portion of the surrounding portion 21.

本実施形態の製造方法によって形成される光学素子の断面図である。It is sectional drawing of the optical element formed by the manufacturing method of this embodiment. 第1大判基板と第2大判基板及び大判スペーサの平面図である。It is a top view of a 1st large format board, a 2nd large format board, and a large format spacer. 第1大判基板に大判スペーサを重ね合わせた状態の平面図である。It is a top view in the state where the large format spacer was superimposed on the first large format substrate. 大判体の断面図である。It is sectional drawing of a large format. 大判体の平面図であって大判体を横方向に切断した状態の図である。It is a top view of a large format, and is a figure of the state which cut | disconnected the large format in the horizontal direction. 大判体の平面図であって大判体を縦方向に切断した状態の図である。It is a top view of a large format, and is a figure of the state which cut | disconnected the large format in the vertical direction. 従来の製造方法における第1大判基板及び大判スペーサの平面図である。It is a top view of the 1st large format board | substrate and large format spacer in the conventional manufacturing method. 従来の製造方法における第1大判基板と大判スペーサを重ね合わせた状態の平面図である。It is a top view of the state which overlap | superposed the 1st large format board | substrate and the large format spacer in the conventional manufacturing method. 従来の製造方法における大判体を横方向に切断した状態の図である。It is a figure of the state which cut | disconnected the large format in the conventional manufacturing method in the horizontal direction. 従来の製造方法における大判体を縦方向に切断した状態の図である。It is a figure of the state which cut | disconnected the large format in the conventional manufacturing method in the vertical direction.

符号の説明Explanation of symbols

1 大判体
2 第1大判基板
3 第2大判基板
4 大判スペーサ
5 光学素子
10 レンズ面
20 枠部
21 囲繞部
22 繋ぎ部
23 接着剤
50 大判体
30 第1基板
31 第1レンズ面
32 第2レンズ面
33 第2基板
34 第3レンズ面
35 第4レンズ面
36 スペーサ
DESCRIPTION OF SYMBOLS 1 Large format 2 1st large format board 3 2nd large format substrate 4 Large format spacer 5 Optical element 10 Lens surface 20 Frame part 21 Enclosure part 22 Connection part 23 Adhesive 50 Large format 30 1st board | substrate 31 1st lens surface 32 2nd lens Surface 33 Second substrate 34 Third lens surface 35 Fourth lens surface 36 Spacer

Claims (2)

複数の光学機能面が所定間隔でアレイ状に配置された第1大判基板と、該第1大判基板と大判スペーサを介して対向する第2大判基板とからなる大判体を格子状に切断し個々の光学素子とする光学素子の製造方法において、
前記光学機能面が配置される領域を囲み方形状の外形を有する囲繞部が、該囲繞部の角部にかからないように配置される繋ぎ部を介して、互いに所定間隔を有してアレイ状に配置されるように大判スペーサを形成する工程と、
前記大判スペーサの前記繋ぎ部が配置され格子状とされる囲繞部間の領域に接着剤を充填し、前記大判スペーサを介して前記第1大判基板と第2大判基板を対向させると共に、接着して大判体を形成する工程と、
前記大判体の囲繞部間の領域を格子状に切断することで、光学機能面を有する第1基板と、前記囲繞部を有するスペーサを介して前記第1基板と対向する第2基板とからなる光学素子を形成する工程と、
を有することを特徴とする光学素子の製造方法。
A large body composed of a first large substrate having a plurality of optical functional surfaces arranged in an array at predetermined intervals and a second large substrate facing the first large substrate through a large spacer is cut into a lattice and individually In the method of manufacturing an optical element as an optical element,
Enclosures having an outer shape that surrounds the area where the optical functional surface is arranged are arranged in an array with a predetermined interval from each other via a connecting part arranged so as not to cover a corner of the enclosure part. Forming a large spacer to be disposed;
An adhesive is filled in a region between the surrounding portions in which the connecting portions of the large spacers are arranged and formed in a lattice shape, and the first large substrate and the second large substrate are opposed to each other through the large spacers and bonded. Forming a large format,
By cutting a region between the surrounding surrounding portions of the large size into a lattice shape, the first substrate having an optical functional surface and a second substrate facing the first substrate through a spacer having the surrounding portion are formed. Forming an optical element;
A method for producing an optical element, comprising:
前記繋ぎ部が前記囲繞部の各辺の両端部より中央側の位置にそれぞれ配置されて、互いに対向する囲繞部間を懸架するように前記大判スペーサが形成されることを特徴とする請求項1記載の光学素子の製造方法。   2. The large spacer is formed so that the connecting portion is disposed at a position closer to the center side than both ends of each side of the surrounding portion, and the surrounding surrounding portions are suspended. The manufacturing method of the optical element of description.
JP2007214275A 2007-08-21 2007-08-21 Manufacturing method of optical element Withdrawn JP2009047949A (en)

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