JP2009009897A - All-solid-state thin film battery, manufacturing method thereof and manufacturing apparatus thereof - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an all-solid-state thin film battery with reduced internal resistance, a manufacturing method thereof, and a manufacturing apparatus thereof.
A solid electrolyte layer 3 is formed by a gas phase process, a positive electrode layer 2 is formed by a gas phase process, and a negative electrode layer 4 is formed by a gas phase process. During each non-treatment time, the intermediate product of the all-solid-state thin film battery is maintained in an evacuated atmosphere.
[Selection] Figure 1

Description

  The present invention relates to an all-solid-state thin film battery, a method for manufacturing the same, and a manufacturing apparatus therefor, and more specifically to an all-solid-state thin film battery having a low internal resistance, a manufacturing method therefor, and a manufacturing apparatus therefor.

In the era when various types of batteries are mounted on portable electronic devices, the batteries are always required to be lighter, smaller, or have higher energy density, and battery characteristics such as charge / discharge voltage are improved. For example, in a lithium battery, in order to improve the situation where battery characteristics such as charge / discharge voltage and charge / discharge cycle life are greatly affected by the electrode used, the sheet-like negative electrode is placed in a non-oxidizing and non-hygroscopic atmosphere. There has been proposed a method of forming and incorporating it into a battery together with a separately formed positive electrode sheet or the like while being maintained in the atmosphere (Patent Document 1). A lithium battery that is an object of this method has a liquid-phase electrolyte and uses a separator to prevent a short circuit. The separator sheet, the positive electrode sheet, and the negative electrode sheet formed in the above atmosphere are mixed with the above atmosphere. After winding in, the separator sheet is impregnated with a liquid phase electrolyte. According to this method, moisture can be eliminated, so that the reaction between the lithium salt (LiPF ₆ or the like) used in the electrolyte and moisture can be prevented, and thus generation of hydrofluoric acid generated by the reaction can be prevented, and the battery characteristics can be reduced. Deterioration can be prevented. In addition, the surface oxidation of the negative electrode active material can be prevented, and lithium can be consumed for the reduction of the oxidized negative electrode active material, so that the decrease in the positive electrode capacity or the battery capacity can be prevented.
JP 2003-7343 A

  However, the above-mentioned battery is not perfect in terms of safety because it uses a liquid phase as an electrolyte. In recent years, practical use of devices such as portable devices, IC tags, etc. that humans have been in widespread progress. For thin film batteries used for portable devices, IC tags, etc., it is desired to mount a battery using a solid electrolyte, and in particular, an all-solid-state thin film battery is desired. However, all solid-phase thin-film batteries have not been put into practical use at present.

One of the main reasons for hindering the practical application of all-solid-state thin film batteries is the high internal resistance. The charge / discharge voltage of the all-solid-state thin film battery is several volts, and its internal resistance is currently at a level of 1 MΩcm ² . Therefore, even if an electric current of about 1 mA / cm ² is applied in charging / discharging, the voltage is formally estimated to be 1000 volts, so that the operation becomes impossible. In order to be operable, charging / discharging must be limited to a current of 1 μA / cm ^2, but it is difficult to find an application that requires this level of current. Therefore, it has been desired to reduce the internal resistance of the all-solid-state thin film battery.

  An object of the present invention is to provide an all-solid-state thin film battery with reduced internal resistance, a manufacturing method thereof, and a manufacturing apparatus thereof.

  The manufacturing method of the all-solid-state thin film battery of this invention is a manufacturing method of the all-solid-state thin film battery provided with a positive / negative electrode layer and a solid electrolyte layer on a base material. This manufacturing method includes a step of forming one of the positive and negative electrode layers on a base material by a gas phase process, a step of forming a solid electrolyte layer by a gas phase process, and a step of forming the other of the positive and negative electrode layers by a gas phase process. Prepare. The intermediate product of the all-solid-state thin film battery is held in a vacuum-evacuated atmosphere during each non-treatment time during the gas phase process.

  According to the above method, the intermediate product of the all-solid-state thin film battery can keep the oxygen concentration in the atmosphere low during the non-treatment time between each gas phase process. For this reason, it is difficult to form an oxygenate-enriched layer (oxide-enriched layer) that hinders electrical conductivity between the two electrode layers located between the solid electrolyte layers. As a result, the internal resistance can be greatly reduced, and the way to practical use can be opened. That is, obtaining a clean interface between the layers is effective for greatly reducing internal resistance. In addition, since impurities other than oxygen can be prevented from being mixed, the battery performance can be improved and the battery performance can be improved, such as the cycle life. Moreover, since it is an all-solid-state thin film battery and it is not necessary to use a separator, a high capacity | capacitance density can be ensured and it can contribute to size reduction.

  The vapor phase process means that the material used in each of the above steps is applied to the base material or the lower layer via a gas phase state such as atomic, molecular, ion, plasma, ablation, or the lower layer is ejected, or A processing method in which a material from the gas phase is attached to the lower layer. Naturally, the processing (gas phase process) is performed while exhausting. In other words, the gas phase process refers to a process other than the wet process, and thus may be referred to as a dry process. The term “gas phase state” should be interpreted as widely as possible without being limited to the above-described state state in view of technological progress in this field. Needless to say, the gas phase process in each step may be different. In addition, the order of forming the layers on the substrate is such that the negative electrode layer forming step and the positive electrode layer forming step are positioned so as to sandwich the solid electrolyte layer forming step. It doesn't matter what happens in the process. In addition, the base material may also serve as a current collector, but rather generally serves as a current collector. The intermediate product refers to a work-in-process in the manufacturing process of the all-solid-state thin film battery.

Further, when forming the atmosphere for the non-treatment time, the exhaust can be performed so as to reach a pressure of 3 × 10 ⁻³ Pa or less. By this method, the generation of the oxygen-enriched layer at each interface can be more reliably prevented. By setting the pressure of the vacuuming atmosphere to 3 × 10 ⁻³ Pa or less, the oxygen-enriched layer at the interface can be reliably prevented.

  Moreover, said base material is divided | segmented for every manufacturing unit of an all-solid-state thin film battery, and can transfer an intermediate | middle product for the next gaseous-phase process in non-processing time. According to this method, layer formation (film formation) is performed in a clean atmosphere for each manufacturing unit in a batch system, so that it is possible to easily adapt to slight changes in the manufacturing process. That is, even if an unexpected situation occurs, it can be dealt with stably. In addition, the manufacturing unit of the substrate is a manufacturing unit including a plurality of all solid-state thin film batteries. The intermediate product formed on the substrate including the substrate is naturally the same as the substrate.

  In addition, a step of sealing the laminate of the base material, the positive and negative electrode layers and the solid electrolyte layer in a sealing member is provided after the gas phase process, and in this sealing step, the intermediate product has a dew point of −45 ° C. or lower. In an inert atmosphere. According to this method, since the laminate is sealed continuously in an environment in which oxidation, moisture, and the like are restricted, until the stage of sealing the laminate to a sealing member, the degree of completeness is increased. And the elimination of impurities such as moisture can be promoted. As a result, it is possible to improve battery performance such as improvement in battery reliability and cycle life. When the dew point is −45 ° C. or lower, the moisture concentration in the atmosphere is 80 ppm or lower, and the range in which the solid electrolyte is altered by reaction with the solid electrolyte or the like is virtually negligible.

  Further, the step of removing the surface oxide layer of the base material by a gas phase process is provided before the step of forming one of the positive and negative electrode layers by the gas phase process, and the gas phase process and the positive and negative electrodes for removing the surface oxide layer The substrate can be kept in an evacuated atmosphere during the non-treatment time between the gas phase processes forming one of the layers. According to this method, a thick oxide layer is not generated on the surface of the substrate, and the internal resistance can be greatly reduced.

  The manufacturing apparatus of the all-solid-state thin film battery of this invention is a manufacturing apparatus of the all-solid-state thin film battery provided with a positive / negative electrode layer and a solid electrolyte layer on a base material. The manufacturing apparatus includes: a first chamber for a gas phase process for forming at least a solid electrolyte layer; at least one second chamber for a gas phase process continuous with the first chamber; Isolation means for isolating the chamber and the second chamber from each other, and transport means for transporting an intermediate product of the all-solid-state thin film battery across the first chamber and the second chamber.

  According to the above manufacturing apparatus, since the laminate can be continuously formed in a vacuum atmosphere in a chamber, an electrically conductive layer is provided between (negative electrode layer / solid electrolyte layer / positive electrode layer). Formation of an oxygen-enriched layer (oxide layer) that becomes an obstacle can be prevented. As a result, the internal resistance can be greatly reduced. In addition, since impurities other than oxygen can be prevented from being mixed, battery reliability can be improved and battery performance can be improved such as cycle life. In the first chamber, any of positive and negative electrode layers may be formed in addition to the solid electrolyte layer.

  Further, as the second chamber, a positive electrode layer forming chamber for forming a positive electrode layer and a negative electrode layer forming chamber for forming a negative electrode layer can be provided so as to sandwich the first chamber. According to this configuration, the positive electrode layer, the solid electrolyte layer, and the negative electrode layer can be formed in separate chambers, and there is a risk of contamination that easily occurs when different layers are formed in common with the chamber. Disappears. Further, it becomes possible to efficiently produce an all-solid-state thin film battery by flowing an intermediate product in a certain direction.

  And a sealing chamber that is connected to at least one of the first chamber and the second chamber with an isolation means interposed therebetween and seals the laminate of the base material, the positive and negative electrode layers, and the solid electrolyte layer. Can do. According to this configuration, the laminated body formed in the chamber can be sealed with the sealing member in an atmosphere in which moisture and oxygen concentration are limited without being exposed to the air atmosphere. For this reason, it is possible to promote the reduction of internal resistance and the elimination of impurities such as moisture, and the battery performance can be improved such as improvement of battery reliability and improvement of cycle life.

  In addition, a surface oxide layer removal chamber that is connected to the first chamber or the second chamber with an isolation means interposed therebetween and removes the surface oxide layer of the substrate by a vapor phase process can be provided. As a result, the surface oxide layer of the substrate is not used in a thick state, and the internal resistance can be greatly reduced.

The all-solid-state thin film battery of the present invention is an all-solid-state thin film battery including a positive and negative current collector, a positive and negative electrode layer, and a solid electrolyte layer. This all-solid-state thin film battery has an oxygen concentration that is not higher than the oxygen concentration in the higher oxygen concentration layer on both sides of the positive electrode layer, the solid electrolyte layer, and the negative electrode layer. The internal resistance of the main body of the solid thin film battery is 5 kΩcm ² or less.

This all-solid-state thin film battery does not have an interface enriched with oxygen as described above at the interface between the positive and negative electrode layers sandwiching the solid electrolyte layer, so that the internal resistance can be reduced and it can be 5 kΩcm ² or less. . By reducing the internal resistance in this manner, a current of several mA / cm ² level can be flowed by charging / discharging, thereby opening up applications for RFID (Radio Frequency Identification) such as an IC tag. When the internal resistance exceeds 5 kΩcm ² , there are few applicable electronic devices including RFID. By setting it to 5 kΩcm ² or less, the prospect of use for RFID is opened, but it is preferable to set the internal resistance to 500 Ωcm ² or less because larger current can be charged and discharged, so that the application can be expanded.

  According to the all-solid-state thin film battery, the manufacturing method and the manufacturing apparatus of the present invention, the internal resistance of the battery can be reduced.

(Embodiment 1)
FIG. 1 is a diagram for explaining an all-solid-state thin-film battery manufacturing apparatus and a battery manufacturing method according to Embodiment 1 of the present invention. This apparatus is an apparatus capable of continuously depositing three types of layers (a positive electrode layer, a solid electrolyte layer, and a negative electrode layer) that form the main body of the all-solid-state thin film battery. In FIG. 1, the continuous vapor deposition apparatus includes at least three chambers 13, 15, and 17 for forming the above three types of layers, and all the chambers can be evacuated by various vacuum pumps. The intermediate product can be moved between the chambers by the conveyor 9. The chambers can be separated from the atmosphere of the adjacent chambers by the gate valves 12, 14, 16, and 18 serving as isolation means.

  In front of the chamber 13 for forming the positive electrode layer on the base material, an oxide layer removal chamber 11 for removing the surface oxide layer of the base material is disposed, and the apparatus is connected to the apparatus via the inlet gate valve 22. The surface of the substrate to be carried in is cleaned. The base material or the intermediate product is fixed to the heat-resistant tray 31. In the following description, the intermediate product 31 or the tray 31 is described without distinguishing between the tray and the intermediate product. However, when the intermediate product reaches the final stage battery main body portion (both electrode layers and solid electrolyte layer formed on the base material), the intermediate product 10 or the battery main body portion 10 is described.

  A sealing chamber 19 is connected to the chamber 17 that forms the last layer (in this embodiment, the negative electrode layer). After the above three types of layers are formed, the battery body that is the laminate is sealed. It is carried into the stop chamber 19. The sealing chamber 19 has an atmosphere of an Ar gas that is an inert gas, and is configured to be able to carry out the battery main body through the outlet gate valve 24. Inside the battery main body, the battery main body can be sealed with an aluminum laminate. The glove box structure. The sealing chamber 19 is provided with a mechanism capable of circulating and purifying the Ar gas described above.

FIG. 2 shows an intermediate product 10 that is a battery main body portion that is sealed with a sealing member such as an aluminum laminate. In the intermediate product 10, the positive electrode layer 2 is positioned on the base material 1 that also serves as a current collector, the solid electrolyte layer 3 is positioned on the positive electrode layer 2, and the negative electrode layer 4 is formed thereon. The positive and negative electrode layers 2 and 4 may be positioned with the solid electrolyte layer 3 interposed therebetween, and either may be close to the substrate 1. The battery main body 10 manufactured using the continuous vapor deposition apparatus of FIG. 1 has no oxygen-enriched layer at the interface, and the internal resistance is 5 kΩcm ² or less. The internal resistance is desirably should be 1 k? Cm ² or less, it is preferable to further 500Omucm ² below.

Next, a manufacturing method is demonstrated based on FIG. 3 and FIG. As shown in FIG. 3, the manufacturing process proceeds in the order of the surface oxide layer removing process → the positive electrode layer forming process → the solid electrolyte forming process → the negative electrode layer forming process → the sealing process. In the process from the surface oxide layer removing step to the negative electrode layer forming step, the gas phase process is performed while evacuating, and during the non-treatment time, an evacuated atmosphere, preferably an atmosphere having a pressure of 3 × 10 ⁻³ Pa or less. It has a great feature in that it is held in That is, the non-treatment time elapses in (vacuum process treatment) → evacuation atmosphere (desirably pressure 3 × 10 ⁻³ Pa or less) → (vapor phase process treatment) →. For this reason, the intermediate product is not exposed to the outside air, can ensure a clean interface, and can greatly reduce the internal resistance. Further, the sealing step is performed in an inert gas atmosphere having a dew point of −45 ° C. or lower so that the all-solid-state thin film battery can be completed in a state of being sealed in aluminum laminate or the like. Next, each step will be specifically described.

(Surface oxide layer removing step): The aluminum alloy, which is the base material 1 serving also as a current collector, is fixed to the heat-resistant tray 31. The tray 31 is provided with an opening so that the layers 2, 3, and 4 can be formed on the aluminum alloy 1 by vapor deposition. This is carried into a vacuum apparatus. An inlet gate valve 22 that moves up and down by gas pressure is provided at the inlet of the oxide layer removal chamber 11, and the inlet gate valve 22 rises when the oxide layer removal chamber 11 is loaded. After carrying in, the inlet gate valve 22 descends, the oxide layer removal chamber 11 can be sealed, and vacuum exhausted to 2 × 10 ⁻³ Pa. Thereafter, Ar gas is introduced until the pressure reaches 30 Pa, and a plasma treatment is performed by applying a voltage. As a result, the surface of the substrate 1 is bombarded with argon ions, and the surface oxide layer is removed. That is, the surface oxide layer of the substrate is removed by vapor phase treatment. After performing the above argon gas bombardment treatment for 5 minutes, the pressure is evacuated again to a pressure of 2 × 10 ⁻³ Pa.

(Positive electrode layer forming step): After the exhaust is completed, the gate valve 12 to the next positive electrode layer forming chamber 13 is raised and carried into the positive electrode layer forming chamber 13 by driving the conveyor 9. Here, the base material 1 is heated to 500 ° C. by a halogen lamp, and oxygen gas is introduced. After adjusting the pressure to 25 Pa, the target is irradiated with an excimer laser to form a lithium manganate thin film (positive electrode layer 2). After the formation of the lithium manganate layer, the pressure is evacuated again to a pressure of 2 × 10 ⁻³ Pa.

(Solid electrolyte layer forming step): After the exhaust is completed, the gate valve 14 between the next solid electrolyte forming chamber 15 is raised, and the intermediate product 31 is driven to 2 × 10 ⁻³ Pa or less by driving the conveyor 9. The solid electrolyte layer forming chamber 15 is loaded. The intermediate product 31 is cooled to 150 ° C. or less by bringing the cooling jacket into contact with the substrate 1. The carbon boat carrying the carbon boat and _P 2 _{S 5} carrying the Li ₂ S, evaporate the Li ₂ S and _P 2 _{S 5} by passing a current. A crystal resonator is disposed in the vicinity of these evaporation sources. By monitoring the evaporation rate by changing the frequency and feedback controlling the current, the molar concentration ratio of Li ₂ S and P ₂ S ₅ (Li ₂ S / P ₂ S ₅ ) is set to 3. After forming the solid electrolyte layer 3, it is preferable to improve the ionic conductivity of the solid electrolyte layer by heating the substrate to 250 ° C. with a halogen lamp. After cooling to 100 ° C., the gate valve 16 between the next negative electrode layer forming chamber 17 is raised and carried into the negative electrode layer forming chamber 17 by driving the conveyor 9.

(Negative electrode layer forming step): The pressure of the negative electrode layer forming chamber 17 is preferably kept at 2 × 10 ⁻³ Pa or less. When Li is put on a boat and energized, Li as the negative electrode layer 4 is deposited on the solid electrolyte layer 3. At this time, the base material 1 of the intermediate product 31 is preferably brought into contact with the cooling jacket to keep the base material temperature at 100 ° C. or lower. After the completion of the deposition, Ar gas is introduced to increase the pressure to the atmospheric pressure level, and the gas is carried into the next sealing chamber 19 via the gate valve 18.
(Sealing process): The sealing chamber 19 that is the next process of the negative electrode layer forming chamber 17 is a glove box, and the aluminum alloy that is the positive electrode current collector 1 and the lithium in which the negative electrode also serves as the current collector in the glove box. 4 are respectively connected with a positive electrode terminal and a negative electrode terminal and sealed with aluminum laminate. The positive and negative terminals are insulated except for the joint, and are not short-circuited after sealing.

  The main body part 10 of the all-solid-state thin film battery manufactured according to the above manufacturing process undergoes a manufacturing process in which the positive electrode layer, the solid electrolyte layer, and the negative electrode layer are individually formed and exposed to air or an inert gas atmosphere. Compared with the manufactured all-solid-state thin film battery, the internal resistance can be greatly reduced.

When the internal resistance is measured for the all-solid-state thin film battery of the present invention and the comparative example, the following values are obtained.
(Example of the present invention): According to the manufacturing method according to the first embodiment.
(Comparative example): An all-solid-state thin film battery is manufactured while taking out from the chamber to the outside air for each standby step between the positive electrode layer forming step, the solid electrolyte forming step, and the negative electrode layer forming step. The contents of each step in the comparative example are the same as the contents of the above-described example of the present invention.
The value of the internal resistance is 1 MΩcm ² or more in the comparative example, whereas it can be 500 Ωcm ² or less in the present invention example.

(Embodiment 2)
FIG. 4 is a diagram showing an apparatus for manufacturing an all-solid-state thin film battery according to Embodiment 2 of the present invention. This device is in principle the same as the all-solid-state thin film battery manufacturing device in the first embodiment. The difference is that the positive electrode layer forming chamber and the solid electrolyte forming chamber are shared, and the positive electrode layer 2 can also be formed in the solid electrolyte forming chamber 15. The positive electrode layer 2 and the solid electrolyte layer 3 are less likely to be a problem even if they are mixed as a material, so that the chamber can be used in common. As a result, the processing steps can be shortened, and the manufacturing apparatus can be simplified. Advantages such as being able to reduce the internal resistance of the battery body 10 are the same as those in the first embodiment.

  Although the embodiments and examples of the present invention have been described above, the embodiments and examples of the present invention disclosed above are merely examples, and the scope of the present invention is the implementation of these inventions. It is not limited to the form. The scope of the present invention is indicated by the description of the scope of claims, and further includes meanings equivalent to the description of the scope of claims and all modifications within the scope.

  According to the all-solid-state thin film battery, the manufacturing method and the manufacturing apparatus of the present invention, the internal resistance can be lowered to a level where a practical application can be found, so that it can be expected to contribute to fields such as RFID in the future. .

It is a figure which shows the manufacturing apparatus of the all-solid-state thin film battery in Embodiment 1 of this invention. It is a figure which shows the main-body part of an all-solid-state thin film battery. It is a figure which shows the manufacturing method of the all-solid-state thin film battery in Embodiment 1 of this invention. It is a figure which shows the manufacturing apparatus of the all-solid-state thin film battery in Embodiment 2 of this invention.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 Base material (current collector), 2 Positive electrode layer, 3 Solid electrolyte layer, 4 Negative electrode layer, 9 Conveyor, 10 Main body part of all-solid-state thin film battery, 11 Oxidation layer removal chamber, 13 Positive electrode layer formation chamber, 15 Solid electrolyte layer formation Chamber, 17 Negative electrode layer forming chamber, 19 Sealing chamber, 12, 14, 16, 18, 22, 24 Gate valve, 31 Tray (intermediate product).

Claims (10)

A method for producing an all-solid-state thin film battery comprising positive and negative electrode layers and a solid electrolyte layer on a substrate,
A step of forming one of the positive and negative electrode layers on the substrate by a gas phase process, a step of forming the solid electrolyte layer by a gas phase process, and a step of forming the other of the positive and negative electrode layers by a gas phase process,
A method for producing an all-solid-state thin film battery, characterized in that an intermediate product of the all-solid-state thin film battery is maintained in an evacuated atmosphere during each non-treatment time during the gas phase process. 2. The method for producing an all-solid-state thin film battery according to claim 1, wherein when forming the atmosphere during the non-treatment time, the exhaust is performed so as to reach a pressure of 3 × 10 ⁻³ Pa or less.   The said base material is divided | segmented for every manufacturing unit of the said all-solid-state thin-film battery, The said intermediate product is moved for the next gaseous-phase process in the said non-processing time, The said or 1 characterized by the above-mentioned. 2. A method for producing an all-solid battery according to 2.   A step of sealing the laminate of the base material, the positive and negative electrode layers, and the solid electrolyte layer in a sealing member is provided after the vapor phase process, and in the sealing step, the intermediate product has a dew point of −45 ° C. It keeps in the following inert atmosphere, The manufacturing method of the all-solid-state thin film battery in any one of Claims 1-3 characterized by the above-mentioned.   The step of removing the surface oxide layer of the base material by a gas phase process is provided before the step of forming one of the positive and negative electrode layers by the gas phase process, and the gas phase process of removing the surface oxide layer and the positive and negative electrodes The all-solid-state thin film according to any one of claims 1 to 4, wherein the substrate is held in an evacuated atmosphere during a non-treatment time between a gas phase process for forming one of the layers. Battery manufacturing method. An apparatus for producing an all-solid-state thin film battery comprising positive and negative electrode layers and a solid electrolyte layer on a substrate,
A first chamber for a gas phase process for forming at least the solid electrolyte layer;
A second chamber for at least one gas phase process in succession to the first chamber;
Isolating means for isolating each chamber of the first chamber and the second chamber;
An apparatus for manufacturing an all-solid-state thin film battery, comprising: a transfer means for transferring an intermediate product of the all-solid-state thin film battery across the first chamber and the second chamber.   The second chamber includes a positive electrode layer forming chamber for forming the positive electrode layer and a negative electrode layer forming chamber for forming the negative electrode layer so as to sandwich the first chamber. The manufacturing apparatus of the all-solid-state thin film battery of Claim 6.   A sealing chamber that is connected to at least one of the first chamber and the second chamber with an isolation means interposed therebetween and seals the laminate of the base material, the positive and negative electrode layers, and the solid electrolyte layer; The manufacturing apparatus of the all-solid-state thin film battery of Claim 6 or 7 characterized by these.   A surface oxide layer removal chamber connected to the first chamber or the second chamber via an isolation means and removing a surface oxide layer of the substrate by a vapor phase process. The manufacturing apparatus of the all-solid-state thin film battery of 6-8. An all-solid-state thin film battery comprising a positive and negative current collector, a positive and negative electrode layer, and a solid electrolyte layer,
At the interface between the positive electrode layer, the solid electrolyte layer and the negative electrode layer, the oxygen concentration is not higher than the oxygen concentration in the higher oxygen concentration layer on both sides,
The all-solid-state thin film battery, wherein the internal resistance of the main body of the all-solid-state thin film battery including the positive and negative current collectors is 5 kΩcm ² or less.

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