[go: up one dir, main page]

JP2008280246A - Apparatus for manufacturing high purity magnesium oxide fine powder and method for manufacturing high purity magnesium oxide fine powder using the same - Google Patents

Apparatus for manufacturing high purity magnesium oxide fine powder and method for manufacturing high purity magnesium oxide fine powder using the same Download PDF

Info

Publication number
JP2008280246A
JP2008280246A JP2008215403A JP2008215403A JP2008280246A JP 2008280246 A JP2008280246 A JP 2008280246A JP 2008215403 A JP2008215403 A JP 2008215403A JP 2008215403 A JP2008215403 A JP 2008215403A JP 2008280246 A JP2008280246 A JP 2008280246A
Authority
JP
Japan
Prior art keywords
magnesium
fine powder
vapor
oxide fine
magnesium oxide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2008215403A
Other languages
Japanese (ja)
Other versions
JP4949340B2 (en
Inventor
Hiroshi Arita
洋 在田
Yuzo Kato
裕三 加藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ube Material Industries Ltd
Original Assignee
Ube Material Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ube Material Industries Ltd filed Critical Ube Material Industries Ltd
Priority to JP2008215403A priority Critical patent/JP4949340B2/en
Publication of JP2008280246A publication Critical patent/JP2008280246A/en
Application granted granted Critical
Publication of JP4949340B2 publication Critical patent/JP4949340B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Landscapes

  • Compounds Of Alkaline-Earth Elements, Aluminum Or Rare-Earth Metals (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To provide a technique for continuously manufacturing high purity magnesium oxide fine powder having a uniform particle diameter. <P>SOLUTION: An apparatus for manufacturing high purity magnesium oxide fine powder is a magnesium oxidation apparatus provided with a magnesium vapor jetting port at the bottom part, an oxygen-containing gas jetting port at the side face and a magnesium oxide fine powder take-out port at the upper part. The apparatus for manufacturing high purity magnesium oxide fine powder includes a magnesium oxidation apparatus which is provided with a window for observing the inside disposed at the side part and a grinding apparatus installed parallel to the bottom part and for grinding metal magnesium or a magnesium compound deposited on the magnesium vapor jetting port, or includes a magnesium oxidation apparatus which has a heater for heating the surroundings of the magnesium vapor jetting port and is installed on the bottom part. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

本発明は、高純度酸化マグネシウム微粉末製造装置、及びこの装置を用いた高純度酸化マグネシウム微粉末の製造方法に関するものである。   The present invention relates to a high-purity magnesium oxide fine powder production apparatus and a method for producing a high-purity magnesium oxide fine powder using this apparatus.

高純度の酸化マグネシウム微粉末を製造する方法として、気相合成法が知られている。この気相合成法は、金属マグネシウムを加熱して、マグネシウム蒸気を発生させ、このマグネシウム蒸気と酸素含有気体とを互いに接触させることにより、マグネシウムを酸化して酸化マグネシウム微粉末を生成させる方法である。   A gas phase synthesis method is known as a method for producing a high-purity magnesium oxide fine powder. This vapor phase synthesis method is a method in which magnesium metal is heated to generate magnesium vapor, and this magnesium vapor and an oxygen-containing gas are brought into contact with each other to oxidize magnesium to produce magnesium oxide fine powder. .

気相合成法により酸化マグネシウム微粉末を製造するための装置は、一般に、金属マグネシウム蒸気を生成させるマグネシウム蒸気生成装置と、マグネシウム蒸気と酸素含有気体とを互いに接触させることにより、マグネシウムを酸化して酸化マグネシウム微粉末を生成させるマグネシウム酸化装置とからなる。   An apparatus for producing a magnesium oxide fine powder by a vapor phase synthesis method generally oxidizes magnesium by bringing a magnesium vapor generating apparatus that generates metallic magnesium vapor into contact with the magnesium vapor and an oxygen-containing gas. It consists of a magnesium oxidizer that produces magnesium oxide fine powder.

マグネシウム蒸気生成装置としては、金属マグネシウムを加熱して溶融させるための金属マグネシウムの溶融鍋(溶解鍋ともいう)と、溶融マグネシウムを加熱して蒸発させるためのマグネシウムの蒸発鍋とを耐熱性パイプ(接続パイプともいう)で連結した構成の金属マグネシウム溶融蒸発装置が知られている(特許文献1を参照)。   As a magnesium vapor generating apparatus, a metal magnesium melting pot (also referred to as a melting pot) for heating and melting metal magnesium and a magnesium evaporation pot for heating and evaporating molten magnesium are heat-resistant pipes ( 2. Description of the Related Art A metal magnesium melting / evaporating apparatus connected by a connecting pipe is also known (see Patent Document 1).

マグネシウム酸化装置としては、底部にマグネシウム蒸気の噴射口を備え、側部に酸素含有気体噴射口を備えたマグネシウム酸化装置が知られている(特許文献2を参照)。   As a magnesium oxidation apparatus, a magnesium oxidation apparatus having a magnesium vapor injection port at the bottom and an oxygen-containing gas injection port at a side is known (see Patent Document 2).

特開平2−307822号公報JP-A-2-307822 特開平7−101722号公報JP-A-7-101722

本発明者が、上記の金属マグネシウム溶融蒸発装置とマグネシウム酸化装置とを実際に用いて酸化マグネシウム微粉末を製造すると幾つかの問題があることが分かった。その内の一つに長期間にわたって連続的に酸化マグネシウム微粉末の製造を製造すると、マグネシウム酸化装置のマグネシウム蒸気噴射口の周囲に金属マグネシウムやマグネシウム化合物(例:酸化マグネシウム)が付着、堆積して、マグネシウム蒸気噴射口からマグネシウム酸化装置に導入されるマグネシウム蒸気量が変動しやすいため、得られる酸化マグネシウム微粉末の粒子径が不均一となることがあるという問題がある。
従って、本発明の目的は、均一な粒子径を有する高純度酸化マグネシウム微粉末を連続的に製造することを可能とする技術を提供することにある。
It has been found that there are some problems when the present inventors actually produce magnesium oxide fine powder by using the above-described metal magnesium melting and vaporizing apparatus and magnesium oxidizing apparatus. One of them, when manufacturing magnesium oxide fine powder continuously over a long period of time, metal magnesium and magnesium compounds (eg magnesium oxide) adhere and deposit around the magnesium vapor injection port of the magnesium oxidizer. Since the amount of magnesium vapor introduced from the magnesium vapor injection port into the magnesium oxidizer is likely to fluctuate, there is a problem that the particle diameter of the obtained magnesium oxide fine powder may be non-uniform.
Accordingly, an object of the present invention is to provide a technique that makes it possible to continuously produce high-purity magnesium oxide fine powder having a uniform particle size.

本発明は、上部に金属マグネシウムの導入口、そして側面下部に溶融マグネシウムの供給口を備えた金属マグネシウムの溶融鍋、該溶融鍋の溶融マグネシウム供給口に接続する耐熱性パイプ、そして該耐熱性パイプの他方の端部に接続する溶融マグネシウムの導入口を側面下部に備え、上部にはマグネシウム蒸気の吹き出し口を備えたマグネシウムの蒸発鍋からなる金属マグネシウム溶融蒸発装置と、底部に該蒸発鍋のマグネシウム蒸気吹き出し口と接続するマグネシウム蒸気の噴射口、側面に酸素含有気体の噴射口、そして上部に酸化マグネシウム微粉末の取出し口を有するマグネシウム酸化装置とからなり、マグネシウム酸化装置が、側部に内部観察窓を備え、かつその底部に平行に、マグネシウム蒸気噴射口に堆積する金属マグネシウムもしくはマグネシウム化合物を削り取る研削装置が付設されていることを特徴とする高純度酸化マグネシウム微粉末製造装置にある。マグネシウム酸化装置の底部には、マグネシウム蒸気噴射口の周囲を加熱する加熱器が付設されていてもよい。   The present invention relates to a metal magnesium melting pot having a metal magnesium inlet at the top and a molten magnesium supply port at the bottom of the side, a heat resistant pipe connected to the molten magnesium supply port of the melting pot, and the heat resistant pipe The molten magnesium inlet is connected to the other end of the metal at the lower part of the side, and the upper part is a magnesium magnesium evaporating apparatus comprising a magnesium evaporating pot provided with a magnesium vapor outlet, and the magnesium of the evaporating pot at the bottom. It consists of a magnesium vapor injection port connected to the vapor blow-out port, an oxygen-containing gas injection port on the side surface, and a magnesium oxidation device with a magnesium oxide fine powder take-out port on the top. Metal magnesium with windows and parallel to the bottom of the magnesium vapor Or in the high-purity magnesium oxide fine powder production apparatus characterized by grinding apparatus scraping magnesium compound it is attached. A heater for heating the periphery of the magnesium vapor injection port may be attached to the bottom of the magnesium oxidizer.

本発明はさらに、上記の高純度酸化マグネシウム微粉末製造装置を用い、金属マグネシウム溶融蒸発装置にてマグネシウム蒸気を生成させ、次いでマグネシウム酸化装置にてマグネシウム蒸気噴射口から該マグネシウム蒸気を、酸素含有気体噴射口から酸素含有気体をそれぞれ噴射させ、マグネシウム蒸気と酸素含有気体とを接触させて酸化マグネシウム微粉末を生成させるとともに、内部観察窓より該マグネシウム蒸気噴射口の周囲を観察しながら、該マグネシウム蒸気噴射口の周囲に堆積した金属マグネシウムもしくはマグネシウム化合物を研削装置にて削り取ることを特徴とする高純度酸化マグネシウム微粉末の製造方法にもある。   The present invention further uses the above-described high-purity magnesium oxide fine powder production apparatus to generate magnesium vapor in a metal magnesium melting and evaporating apparatus, and then in the magnesium oxidizing apparatus, the magnesium vapor is emitted from a magnesium vapor injection port into an oxygen-containing gas. Each of the oxygen-containing gases is injected from the injection port, and the magnesium vapor and the oxygen-containing gas are brought into contact with each other to produce fine magnesium oxide powder. While observing the periphery of the magnesium vapor injection port from the internal observation window, the magnesium vapor There is also a method for producing high-purity magnesium oxide fine powder, characterized in that metal magnesium or a magnesium compound deposited around the injection port is scraped off by a grinding device.

本発明はまた、上部に金属マグネシウムの導入口、そして側面下部に溶融マグネシウムの供給口を備えた金属マグネシウムの溶融鍋、該溶融鍋の溶融マグネシウム供給口に接続する耐熱性パイプ、そして該耐熱性パイプの他方の端部に接続する溶融マグネシウムの導入口を側面下部に備え、上部にはマグネシウム蒸気の吹き出し口を備えたマグネシウムの蒸発鍋からなる金属マグネシウム溶融蒸発装置と、底部に該蒸発鍋のマグネシウム蒸気吹き出し口と接続するマグネシウム蒸気の噴射口、側面に酸素含有気体の噴射口、そして上部に酸化マグネシウム微粉末の取出し口を有するマグネシウム酸化装置とからなり、マグネシウム酸化装置の底部にマグネシウム蒸気噴射口の周囲を加熱する加熱器が付設されていることを特徴とする高純度酸化マグネシウム微粉末製造装置にもある。   The present invention also provides a metal magnesium melting pot having a metal magnesium inlet at the top and a molten magnesium supply port at the lower side, a heat resistant pipe connected to the molten magnesium supply port of the melting pot, and the heat resistance. A molten magnesium inlet that is connected to the other end of the pipe is provided at the lower part of the side, and a magnesium magnesium evaporating apparatus comprising a magnesium evaporating pot provided with a magnesium vapor outlet at the upper part, and the evaporating pot at the bottom. It consists of a magnesium vapor injection port connected to the magnesium vapor discharge port, an oxygen-containing gas injection port on the side surface, and a magnesium oxidation device with a magnesium oxide fine powder take-out port on the top. Magnesium vapor injection at the bottom of the magnesium oxidation device A high-purity acid characterized by a heater that heats around the mouth Some magnesium fine powder production apparatus.

本発明はさらに、上記の高純度酸化マグネシウム微粉末製造装置を用い、金属マグネシウム溶融蒸発装置の金属マグネシウム導入口から金属マグネシウムを投入して、マグネシウム酸化装置のマグネシウム蒸気噴射口からマグネシウム蒸気を噴射させ、かつマグネシウム酸化装置の酸素含有気体噴射口から酸素含有気体を導入することにより、マグネシウム蒸気と酸素含有気体とを接触させて酸化マグネシウム微粉末を生成させるとともに、マグネシウム酸化装置のマグネシウム蒸気噴射口の周囲を加熱器により加熱することを特徴とする高純度酸化マグネシウム微粉末の製造方法にもある。   The present invention further uses the above-described high-purity magnesium oxide fine powder production apparatus to inject metal magnesium from the metal magnesium inlet of the metal magnesium melting evaporator, and to inject magnesium vapor from the magnesium vapor outlet of the magnesium oxide apparatus. In addition, by introducing the oxygen-containing gas from the oxygen-containing gas injection port of the magnesium oxidation apparatus, the magnesium vapor and the oxygen-containing gas are brought into contact with each other to generate magnesium oxide fine powder, and the magnesium vapor injection port of the magnesium oxidation apparatus There is also a method for producing a high-purity magnesium oxide fine powder characterized in that the surroundings are heated by a heater.

本発明の高純度酸化マグネシウム微粉末製造装置を用いることにより、均一な粒子径を有する高純度酸化マグネシウム微粉末を長期間にわたって連続的に製造することができる。   By using the high-purity magnesium oxide fine powder production apparatus of the present invention, a high-purity magnesium oxide fine powder having a uniform particle diameter can be produced continuously over a long period of time.

本発明の高純度酸化マグネシウム微粉末製造装置、及びその装置を用いた高純度酸化マグネシウム微粉末の製造方法について、添付図面を参照しながら説明する。   A high-purity magnesium oxide fine powder production apparatus and a high-purity magnesium oxide fine powder production method using the apparatus of the present invention will be described with reference to the accompanying drawings.

図1は、本発明に従う高純度酸化マグネシウム微粉末製造装置を用いた高純度酸化マグネシウム微粉末製造回収装置の構成の一例を示す図であり、図2は、図1の高純度酸化マグネシウム微粉末製造装置の特徴点であるマグネシウム酸化装置のマグネシウム蒸気噴射口の周辺部分を拡大した図である。   FIG. 1 is a diagram showing an example of the configuration of a high-purity magnesium oxide fine powder production and recovery device using the high-purity magnesium oxide fine powder production device according to the present invention, and FIG. 2 shows the high-purity magnesium oxide fine powder of FIG. It is the figure which expanded the peripheral part of the magnesium vapor injection port of the magnesium oxidation apparatus which is the feature point of a manufacturing apparatus.

図1において、高純度酸化マグネシウム微粉末製造回収装置は、金属マグネシウム溶融蒸発装置10とマグネシウム酸化装置26とからなる高純度酸化マグネシウム微粉末製造装置と、熱交換機41、バグフィルター42、及びホッパー43からなる高純度酸化マグネシウム微粉末回収装置とから構成されている。   In FIG. 1, a high purity magnesium oxide fine powder production and recovery device includes a high purity magnesium oxide fine powder production device comprising a metal magnesium melt evaporation device 10 and a magnesium oxidation device 26, a heat exchanger 41, a bag filter 42, and a hopper 43. And a high-purity magnesium oxide fine powder recovery device.

金属マグネシウム溶融蒸発装置10は、金属マグネシウムの導入口11と金属マグネシウムの酸化を防止するための酸化防止ガスの導入口12とを備えた蓋部13、及び側面下部に溶融マグネシウムの取出し口14を備えた鍋部15からなる金属マグネシウムの溶融鍋16、溶融鍋の溶融マグネシウム取出し口に接続する耐熱性パイプ17、そして耐熱性パイプの他方の端部に接続する溶融マグネシウムの導入口18を側面下部に備えた鍋部19、及びマグネシウム蒸気の吹き出し口20と金属マグネシウムの酸化を防止し、マグネシウム蒸気を希釈する不活性ガスの導入口21とを備えた蓋部22からなるマグネシウムの蒸発鍋23から構成されている。   The metallic magnesium melting / evaporating apparatus 10 includes a lid 13 having an inlet 11 for metallic magnesium and an inlet 12 for an antioxidant gas for preventing oxidation of metallic magnesium, and a molten magnesium outlet 14 at the lower side of the side. A metal magnesium melting pan 16 comprising a pan portion 15 provided, a heat-resistant pipe 17 connected to the molten magnesium outlet of the melting pan, and a molten magnesium inlet 18 connected to the other end of the heat-resistant pipe are provided on the lower side of the side. A magnesium evaporating pan 23 comprising a pan portion 19 provided with a lid portion 22 provided with a magnesium vapor outlet 20 and an inert gas inlet 21 for preventing magnesium metal from oxidizing and diluting magnesium vapor. It is configured.

溶融鍋蓋部の酸化防止ガス導入口12から溶融鍋内部に導入する酸化防止ガスとしては、六フッ化硫黄ガス、二酸化炭素ガス、ネオンガス、アルゴンガス、クリプトンガス、キセノンガス、及びラドンガスを用いることができる。これらのガスの中でも、六フッ化硫黄ガスが特に好ましい。この酸化防止ガスは、マグネシウム蒸気の生成時には常に溶融鍋内部に導入される。   Use of sulfur hexafluoride gas, carbon dioxide gas, neon gas, argon gas, krypton gas, xenon gas, and radon gas as the antioxidant gas introduced into the melting pot from the antioxidant gas inlet 12 of the melting pot lid Can do. Among these gases, sulfur hexafluoride gas is particularly preferable. This antioxidant gas is always introduced into the melting pot when magnesium vapor is generated.

蒸発鍋蓋部の不活性ガス導入口21から蒸発鍋内部に導入する不活性ガスとしては、ヘリウムガス、ネオンガス、アルゴンガス、クリプトンガス、キセノンガス、及びラドンガスを用いることができる。これらのガスの中でも、アルゴンガスが特に好ましい。この不活性ガスは、マグネシウム蒸気の生成時には常に蒸発鍋内部に導入される。   Helium gas, neon gas, argon gas, krypton gas, xenon gas, and radon gas can be used as the inert gas introduced into the evaporation pot from the inert gas inlet 21 of the evaporation pot lid. Among these gases, argon gas is particularly preferable. This inert gas is always introduced into the evaporation pan when magnesium vapor is generated.

マグネシウム蒸気の生成は、次のように行われる。まず、原料となる金属マグネシウム24を金属マグネシウム導入口11から溶融鍋16に投入し、その溶融鍋にて、金属マグネシウムをその溶融温度に加熱して溶融マグネシウム25とする。この溶融マグネシウムは耐熱性パイプ17を通って蒸発鍋23に貯留される。そして、蒸発鍋23にてさらに溶融マグネシウム25をその沸点以上の温度に加熱してマグネシウム蒸気を生成する。このマグネシウム蒸気は、不活性ガス導入口21から蒸発鍋内部に導入された不活性ガスとの混合ガスとして蒸発鍋のマグネシウム蒸気吹き出し口20から放出される。   Magnesium vapor is generated as follows. First, metal magnesium 24 as a raw material is charged into the melting pot 16 from the metal magnesium inlet 11, and the metal magnesium is heated to its melting temperature in the melting pot to obtain molten magnesium 25. The molten magnesium passes through the heat resistant pipe 17 and is stored in the evaporation pot 23. The molten magnesium 25 is further heated to a temperature equal to or higher than its boiling point in the evaporating pot 23 to generate magnesium vapor. This magnesium vapor is discharged from the magnesium vapor outlet 20 of the evaporation pot as a mixed gas with the inert gas introduced into the evaporation pot from the inert gas inlet 21.

マグネシウム蒸気の生成を長期間にわたって連続的に行なうと、金属マグネシウム中の不純物(特に、鉄、ニッケル、クロムなどの高沸点重金属)が徐々に蒸発鍋に蓄積し、その蓄積量の増加に伴い不純物がマグネシウム蒸気に混入して、得られる酸化マグネシウム微粉末の純度が低下することがある。このため、図1の金属マグネシウム溶融蒸発装置では、蒸発鍋23の溶融マグネシウム導入口18から底部までの距離を、溶融鍋の溶融マグネシウム取出し口から底部までの距離よりも長くすることによって、不純物を蒸発鍋の底部側に滞留させて、マグネシウム蒸気への不純物の混入量を長期間にわたって少なくすることができるようにしている。   When magnesium vapor is generated continuously over a long period of time, impurities in metal magnesium (especially, high-boiling heavy metals such as iron, nickel, chromium, etc.) gradually accumulate in the evaporating pan, and impurities increase as the amount of accumulation increases. May be mixed with magnesium vapor, and the purity of the obtained fine powder of magnesium oxide may be reduced. For this reason, in the metal magnesium melting and evaporating apparatus of FIG. 1, the distance from the molten magnesium introduction port 18 of the evaporating pot 23 to the bottom is made longer than the distance from the molten magnesium take-out port to the bottom of the evaporating pot. By staying at the bottom side of the evaporating pan, the amount of impurities mixed into the magnesium vapor can be reduced over a long period of time.

マグネシウム酸化装置26は、底部に蒸発鍋のマグネシウム蒸気吹き出し口20と接続するマグネシウム蒸気の噴射口27、側面に酸素含有気体の噴射口28、そして上部に酸化マグネシウム微粉末の取出し口29を備えている。   The magnesium oxidizer 26 has a magnesium vapor injection port 27 connected to the magnesium vapor outlet 20 of the evaporation pan at the bottom, an oxygen-containing gas injection port 28 on the side surface, and a magnesium oxide fine powder take-out port 29 on the top. Yes.

マグネシウム蒸気の噴射口27は、マグネシウム蒸気と不活性ガスとの混合ガスが上方に向けて垂直上方に噴射されるように形成されている。酸素含有気体噴射口28は、マグネシウム蒸気噴射口27から噴射される混合ガスの進行方向に対して略垂直に、酸素含有気体を噴射するように配置されている。酸化マグネシウム微粉末取出し口29は、生成した酸化マグネシウム微粉末をマグネシウム蒸気と共に導入された不活性ガスの流れにのせて取り出せるように、マグネシウム蒸気噴射口の垂直上方に配置されている。   The magnesium vapor injection port 27 is formed so that a mixed gas of magnesium vapor and an inert gas is injected vertically upward. The oxygen-containing gas injection port 28 is disposed so as to inject the oxygen-containing gas substantially perpendicular to the traveling direction of the mixed gas injected from the magnesium vapor injection port 27. The magnesium oxide fine powder outlet 29 is arranged vertically above the magnesium vapor injection port so that the produced magnesium oxide fine powder can be taken out on the flow of an inert gas introduced together with the magnesium vapor.

酸素含有気体としては、通常は空気が使用される。ただし、酸素含有気体は空気に限定されるものではなく、例えば、酸素を単独で使用することも可能であり、さらに、酸素あるいは空気に不活性ガス(通常は、アルゴンガス)を添加して使用することも可能である。   As the oxygen-containing gas, air is usually used. However, the oxygen-containing gas is not limited to air. For example, oxygen can be used alone, and further, an inert gas (usually argon gas) is added to oxygen or air. It is also possible to do.

マグネシウム酸化装置26の内部温度(すなわち、マグネシウムの酸化反応温度)は1200〜2000℃とすることが好ましいが、マグネシウムの酸化反応は発熱反応であるため、酸化マグネシウム微粉末の生成に伴ってマグネシウム酸化装置の内部温度は上昇する傾向にある。このため、マグネシウム蒸気と酸素含有気体とが接触する部位の周囲は、冷却用空気導入口30と冷却用空気排気口31とを備えた冷却用外管32で覆われており、冷却用空気導入口から冷却用空気を導入することにより、マグネシウム酸化装置の内部温度を調整できるようにされている。   The internal temperature of the magnesium oxidizer 26 (that is, the oxidation reaction temperature of magnesium) is preferably 1200 to 2000 ° C. However, since the oxidation reaction of magnesium is an exothermic reaction, the magnesium oxidation is accompanied with the production of the magnesium oxide fine powder. The internal temperature of the device tends to increase. Therefore, the periphery of the portion where the magnesium vapor and the oxygen-containing gas are in contact with each other is covered with a cooling outer pipe 32 having a cooling air inlet 30 and a cooling air outlet 31, and cooling air introduction By introducing cooling air from the mouth, the internal temperature of the magnesium oxidizer can be adjusted.

図1のマグネシウム酸化装置においては、側部に内部観察用窓33を備え、かつその底部に平行に、マグネシウム蒸気噴射口に堆積する金属マグネシウムもしくはマグネシウム化合物を削り取る研削装置34が付設されている。研削装置34は、先端に研削板35を備えたアーム36と、そのアームをマグネシウム酸化装置の底部に平行に出し引きするためのシリンダ37とから構成されている。なお、図1のマグネシウム酸化装置では、内部観察用窓33と研削装置34とが、中空の筐体38に一体的に組み込まれて配置されているが、内部観察用窓33及び研削装置34の配置には特に制限はない。   In the magnesium oxidizer of FIG. 1, an internal observation window 33 is provided on the side, and a grinding device 34 for scraping off metallic magnesium or a magnesium compound deposited on the magnesium vapor injection port is provided in parallel with the bottom. The grinding device 34 is composed of an arm 36 having a grinding plate 35 at the tip, and a cylinder 37 for pulling the arm parallel to the bottom of the magnesium oxidation device. In the magnesium oxidation apparatus of FIG. 1, the internal observation window 33 and the grinding apparatus 34 are integrally incorporated in a hollow housing 38, but the internal observation window 33 and the grinding apparatus 34 There is no particular limitation on the arrangement.

研削装置34は、図2に示すように、アーム36を矢印方向に出し引きすることにより研削板35にてマグネシウム蒸気噴射口27の周囲に堆積した金属マグネシウムもしくはマグネシウム化合物を削り取る。この研削装置34により削り取られた金属マグネシウムやマグネシウム化合物は、マグネシウム酸化装置の側部に備えられた開口部(掃除用窓)39により、外部に取り出せるようになっている。   As shown in FIG. 2, the grinding device 34 scrapes off the metal magnesium or magnesium compound deposited around the magnesium vapor injection port 27 by the grinding plate 35 by pulling out the arm 36 in the direction of the arrow. The metallic magnesium and magnesium compound scraped off by the grinding device 34 can be taken out to the outside through an opening (cleaning window) 39 provided on the side of the magnesium oxidation device.

内部観察用窓33は、マグネシウム蒸気噴射口27の周囲での金属マグネシウムもしくはマグネシウム化合物の堆積状況を目視にて観察するための窓である。研削装置34のアーム36の作動速度は、この内部観察用窓にて観察された酸化マグネシウムの堆積状態を考慮して適宜調整する。   The internal observation window 33 is a window for visually observing the deposition state of metallic magnesium or a magnesium compound around the magnesium vapor injection port 27. The operating speed of the arm 36 of the grinding device 34 is appropriately adjusted in consideration of the magnesium oxide deposition state observed in the internal observation window.

図1のマグネシウム酸化装置では、マグネシウム蒸気噴射口27からマグネシウム蒸気を、酸素含有気体噴射口28から酸素含有気体をそれぞれ噴射させ、マグネシウム蒸気と酸素含有気体とを接触させて高純度酸化マグネシウム微粉末40を生成させるとともに、内部観察窓33よりマグネシウム蒸気噴射口の周囲を観察しながら、マグネシウム蒸気噴射口の周囲に堆積した酸化マグネシウムを研削装置34にて削り取ることができる。従って、マグネシウム蒸気噴射口からマグネシウム酸化装置に導入されるマグネシウム蒸気量が長期間にわたって安定する。   In the magnesium oxidation apparatus of FIG. 1, magnesium vapor is injected from the magnesium vapor injection port 27, oxygen-containing gas is injected from the oxygen-containing gas injection port 28, and the magnesium vapor and the oxygen-containing gas are brought into contact with each other. 40, and the magnesium oxide deposited around the magnesium vapor injection port can be scraped off by the grinding device 34 while observing the periphery of the magnesium vapor injection port through the internal observation window 33. Accordingly, the amount of magnesium vapor introduced from the magnesium vapor injection port into the magnesium oxidizer is stabilized over a long period of time.

マグネシウム酸化装置にて生成した酸化マグネシウム微粉末40は、酸化マグネシウム微粉末取り出し口29を通って熱交換機41に送られる。熱交換機41にて冷却された酸化マグネシウム微粉末はバグフィルター42にて回収され、ホッパー43に一旦貯蔵される。   The magnesium oxide fine powder 40 generated by the magnesium oxidation apparatus is sent to the heat exchanger 41 through the magnesium oxide fine powder take-out port 29. The magnesium oxide fine powder cooled by the heat exchanger 41 is collected by the bag filter 42 and temporarily stored in the hopper 43.

気相合成により生成される酸化マグネシウム微粉末は、活性が高いため空気に接触すると空気中の二酸化炭素や水蒸気を吸着することがある。このため、ホッパーに貯蔵されている酸化マグネシウム微粉末は、その出荷の前に500〜1100℃の温度で再焼成することが好ましい。   Magnesium oxide fine powder produced by gas phase synthesis has high activity and may adsorb carbon dioxide and water vapor in the air when in contact with air. For this reason, it is preferable to re-fire the magnesium oxide fine powder stored in the hopper at a temperature of 500 to 1100 ° C. before shipment.

図3は、本発明に従う高純度酸化マグネシウム微粉末製造装置を用いた高純度酸化マグネシウム微粉末製造回収装置の構成の別の一例を示す図であり、図4は、図3の高純度酸化マグネシウム微粉末製造装置の特徴点であるマグネシウム酸化装置のマグネシウム蒸気噴射口の周辺部分を拡大した図である。   FIG. 3 is a diagram showing another example of the configuration of a high-purity magnesium oxide fine powder production and recovery device using the high-purity magnesium oxide fine powder production device according to the present invention, and FIG. 4 is a diagram showing the high-purity magnesium oxide of FIG. It is the figure which expanded the peripheral part of the magnesium vapor injection port of the magnesium oxidation apparatus which is the feature point of a fine powder manufacturing apparatus.

図3において、高純度酸化マグネシウム微粉末製造回収装置は、図1の場合と同様に金属マグネシウム溶融蒸発装置10とマグネシウム酸化装置26とからなる高純度酸化マグネシウム微粉末製造装置と、熱交換機41、バグフィルター42、及びホッパー43からなる高純度酸化マグネシウム微粉末回収装置とから構成されている。   In FIG. 3, the high-purity magnesium oxide fine powder production and recovery apparatus includes a high-purity magnesium oxide fine powder production apparatus composed of a metal magnesium melt evaporation apparatus 10 and a magnesium oxidation apparatus 26, a heat exchanger 41, as in FIG. The high-purity magnesium oxide fine powder recovery device including the bag filter 42 and the hopper 43 is configured.

図3の高純度酸化マグネシウム微粉末製造装置においても、金属マグネシウム溶融蒸発装置10は、金属マグネシウムの導入口11と金属マグネシウムの酸化を防止するための酸化防止ガスの導入口12とを備えた蓋部13、及び側面下部に溶融マグネシウムの取出し口14を備えた鍋部15からなる金属マグネシウムの溶融鍋16、溶融鍋の溶融マグネシウム取出し口に接続する耐熱性パイプ17、そして耐熱性パイプの他方の端部に接続する溶融マグネシウムの導入口18を側面下部に備えた鍋部19、及びマグネシウム蒸気の吹き出し口20と金属マグネシウムの酸化を防止し、マグネシウム蒸気を希釈する不活性ガスの導入口21とを備えた蓋部22からなるマグネシウムの蒸発鍋23から構成されている。   Also in the high-purity magnesium oxide fine powder production apparatus of FIG. 3, the metal magnesium melting and evaporating apparatus 10 includes a lid provided with a metal magnesium inlet 11 and an antioxidant gas inlet 12 for preventing the metal magnesium from being oxidized. Part 13, a metal magnesium melting pot 16 comprising a pan part 15 provided with a molten magnesium outlet 14 at the lower side, a heat resistant pipe 17 connected to the molten magnesium outlet of the melting pot, and the other of the heat resistant pipes A pan portion 19 provided with a molten magnesium inlet 18 connected to the end portion at the lower side of the side, a magnesium vapor outlet 20 and an inert gas inlet 21 for preventing oxidation of metallic magnesium and diluting magnesium vapor It is comprised from the magnesium evaporating pot 23 which consists of the cover part 22 provided with.

図3の高純度酸化マグネシウム微粉末製造装置においても、マグネシウム酸化装置26は、底部に蒸発鍋のマグネシウム蒸気吹き出し口20と接続するマグネシウム蒸気の噴射口27、側面に酸素含有気体の噴射口28、そして上部に酸化マグネシウム微粉末の取出し口29を備えている。図3のマグネシウム酸化装置では、その底部に加熱器44が付設されている点に特徴がある。加熱器44には、誘導加熱方式加熱器及び発熱体方式加熱器を用いることができる。   Also in the high purity magnesium oxide fine powder production apparatus of FIG. 3, the magnesium oxidation apparatus 26 includes a magnesium vapor injection port 27 connected to the magnesium vapor discharge port 20 of the evaporation pan at the bottom, and an oxygen-containing gas injection port 28 on the side surface. A magnesium oxide fine powder outlet 29 is provided at the top. The magnesium oxidizer of FIG. 3 is characterized in that a heater 44 is attached to the bottom thereof. As the heater 44, an induction heating type heater or a heating element type heater can be used.

図3のマグネシウム酸化装置では、マグネシウム蒸気噴射口27からマグネシウム蒸気を、酸素含有気体噴射口28から酸素含有気体をそれぞれ噴射させ、マグネシウム蒸気と酸素含有気体とを接触させて高純度酸化マグネシウム微粉末40を生成させるとともに、マグネシウム蒸気噴射口27の周囲を加熱器44により金属マグネシウムの沸点以上の温度(好ましくは、1200〜2000℃)に加熱することにより、金属マグネシウムやマグネシウム化合物をマグネシウム蒸気噴射口の周囲に付着しにくくすることができる。従って、マグネシウム蒸気噴射口からマグネシウム酸化装置に導入されるマグネシウム蒸気量が長期間にわたって安定する。   In the magnesium oxidizer of FIG. 3, magnesium vapor is injected from the magnesium vapor injection port 27 and oxygen-containing gas is injected from the oxygen-containing gas injection port 28, and the magnesium vapor and the oxygen-containing gas are brought into contact with each other. 40, and the surroundings of the magnesium vapor injection port 27 are heated by the heater 44 to a temperature not lower than the boiling point of the metal magnesium (preferably 1200 to 2000 ° C.), so that the metal magnesium or the magnesium compound is heated to the magnesium vapor injection port. It can be made difficult to adhere to the surroundings. Accordingly, the amount of magnesium vapor introduced from the magnesium vapor injection port into the magnesium oxidizer is stabilized over a long period of time.

なお、図3のマグネシウム酸化装置では、加熱器44は、図4に示すように、マグネシウム蒸気噴射口の周囲に囲むように配置されているが、図1のマグネシウム酸化装置のマグネシウム蒸気噴射口27の周囲に、研削装置34の作動を妨げない範囲で加熱器を付設して、研削装置による堆積物の研削と、加熱器によるマグネシウム蒸気噴射口の周囲の加熱とを同時に行なってもよい。   In the magnesium oxidizer shown in FIG. 3, the heater 44 is disposed so as to surround the magnesium vapor jet port as shown in FIG. 4, but the magnesium vapor jet port 27 of the magnesium oxidizer shown in FIG. A heater may be attached to the periphery of the steel plate so long as the operation of the grinding device 34 is not hindered, and the grinding of the deposit by the grinding device and the heating of the periphery of the magnesium vapor injection port by the heater may be performed simultaneously.

本発明に従う高純度酸化マグネシウム微粉末製造装置を用いた高純度酸化マグネシウム微粉末製造回収装置の構成の一例を示す図である。It is a figure which shows an example of a structure of the high purity magnesium oxide fine powder manufacture collection apparatus using the high purity magnesium oxide fine powder manufacturing apparatus according to this invention. 図1の高純度酸化マグネシウム微粉末製造装置の特徴点であるマグネシウム酸化装置のマグネシウム蒸気噴射口の周辺部分を拡大した図である。It is the figure which expanded the peripheral part of the magnesium vapor injection port of the magnesium oxidation apparatus which is the feature point of the high purity magnesium oxide fine powder manufacturing apparatus of FIG. 本発明に従う高純度酸化マグネシウム微粉末製造装置を用いた高純度酸化マグネシウム微粉末製造回収装置の構成の別の一例を示す図である。It is a figure which shows another example of a structure of the high purity magnesium oxide fine powder manufacture collection | recovery apparatus using the high purity magnesium oxide fine powder manufacturing apparatus according to this invention. 図3の高純度酸化マグネシウム微粉末製造装置の特徴点であるマグネシウム酸化装置のマグネシウム蒸気噴射口の周辺部分を拡大した図である。It is the figure which expanded the peripheral part of the magnesium vapor injection port of the magnesium oxidation apparatus which is the feature point of the high purity magnesium oxide fine powder manufacturing apparatus of FIG.

符号の説明Explanation of symbols

10 金属マグネシウム溶融蒸発装置
11 金属マグネシウム導入口
12 酸化防止ガス導入口
13 蓋部
14 溶融マグネシウム取出し口
15 鍋部
16 溶融鍋
17 耐熱性パイプ
18 溶融マグネシウム導入口
19 鍋部
20 マグネシウム蒸気吹き出し口
21 不活性ガス導入口
22 蓋部
23 蒸発鍋
24 金属マグネシウム
25 溶融マグネシウム
26 マグネシウム酸化装置
27 マグネシウム蒸気噴射口
28 酸素含有気体噴射口
29 酸化マグネシウム微粉末取出し口
30 冷却用空気導入口
31 冷却用空気排気口
32 冷却用外管
33 内部観察窓
34 研削装置
35 研削板
36 アーム
37 シリンダ
38 筐体
39 開口部(掃除用窓)
40 酸化マグネシウム微粉末
41 熱交換機
42 バグフィルター
43 ホッパー
44 加熱器
DESCRIPTION OF SYMBOLS 10 Metal magnesium fusion | evaporation apparatus 11 Metal magnesium inlet 12 Antioxidation gas inlet 13 Lid part 14 Molten magnesium outlet 15 Pot part 16 Molten pot 17 Heat resistant pipe 18 Molten magnesium inlet 19 Pot part 20 Magnesium vapor outlet 21 Not Active gas inlet 22 Lid portion 23 Evaporation pan 24 Metal magnesium 25 Molten magnesium 26 Magnesium oxidizer 27 Magnesium vapor jet 28 Oxygen-containing gas jet 29 Magnesium oxide fine powder outlet 30 Cooling air inlet 31 Cooling air exhaust 31 32 Cooling outer tube 33 Internal observation window 34 Grinding device 35 Grinding plate 36 Arm 37 Cylinder 38 Housing 39 Opening (cleaning window)
40 Magnesium oxide fine powder 41 Heat exchanger 42 Bag filter 43 Hopper 44 Heater

Claims (5)

上部に金属マグネシウムの導入口、そして側面下部に溶融マグネシウムの取出し口を備えた金属マグネシウムの溶融鍋、該溶融鍋の溶融マグネシウム取出し口に接続する耐熱性パイプ、そして該耐熱性パイプの他方の端部に接続する溶融マグネシウムの導入口を側面下部に備え、上部にはマグネシウム蒸気の吹き出し口を備えたマグネシウムの蒸発鍋からなる金属マグネシウム溶融蒸発装置と、底部に該蒸発鍋のマグネシウム蒸気吹き出し口と接続するマグネシウム蒸気の噴射口、側面に酸素含有気体の噴射口、そして上部に酸化マグネシウム微粉末の取出し口を備えたマグネシウム酸化装置とからなり、マグネシウム酸化装置が、側部に内部観察窓を備え、かつその底部に平行に、マグネシウム蒸気噴射口に堆積する金属マグネシウムもしくはマグネシウムの化合物を削り取る研削装置が付設されていることを特徴とする高純度酸化マグネシウム微粉末製造装置。   A metal magnesium melting pot having a metal magnesium inlet at the top and a molten magnesium outlet at the bottom of the side, a heat resistant pipe connected to the molten magnesium outlet of the melting pot, and the other end of the heat resistant pipe The molten magnesium inlet connected to the part is provided in the lower part of the side surface, the upper part is a magnesium magnesium melting evaporator comprising a magnesium evaporation pot provided with a magnesium vapor outlet, and the magnesium vapor outlet of the evaporation pot at the bottom. It consists of a magnesium vaporizer, a magnesium vaporizer that has an oxygen-containing gas jet on the side, and a magnesium oxide fine powder outlet on the top. The magnesium oxide has an internal observation window on the side. If the magnesium metal is deposited on the magnesium vapor jet, parallel to the bottom High purity magnesium oxide fine powder production apparatus characterized by grinding device scraping a compound of magnesium is attached is. マグネシウム酸化装置の底部に、マグネシウム蒸気噴射口の周囲を加熱する加熱器が付設されていることを特徴とする請求項1に記載の高純度酸化マグネシウム微粉末製造装置。   2. The high-purity magnesium oxide fine powder production apparatus according to claim 1, wherein a heater for heating the periphery of the magnesium vapor injection port is attached to the bottom of the magnesium oxidation apparatus. 請求項1もしくは2に記載の高純度酸化マグネシウム微粉末製造装置を用い、金属マグネシウム溶融蒸発装置にてマグネシウム蒸気を生成させ、次いでマグネシウム酸化装置にてマグネシウム蒸気噴射口から該マグネシウム蒸気を、酸素含有気体噴射口から酸素含有気体をそれぞれ噴射させ、マグネシウム蒸気と酸素含有気体とを接触させて酸化マグネシウム微粉末を生成させるとともに、内部観察窓より該マグネシウム蒸気噴射口の周囲を観察しながら、該マグネシウム蒸気噴射口の周囲に堆積した金属マグネシウムもしくはマグネシウム化合物を研削装置にて削り取ることを特徴とする高純度酸化マグネシウム微粉末の製造方法。   Using the high-purity magnesium oxide fine powder production apparatus according to claim 1 or 2, magnesium vapor is generated by a metal magnesium melting evaporator, and then the magnesium vapor is oxygen-containing from a magnesium vapor injection port by the magnesium oxidation apparatus. Each of the oxygen-containing gases is injected from the gas injection port, and the magnesium vapor and the oxygen-containing gas are brought into contact with each other to produce a fine powder of magnesium oxide, and while observing the surroundings of the magnesium vapor injection port from the internal observation window, the magnesium A method for producing a high-purity magnesium oxide fine powder, characterized in that metal magnesium or a magnesium compound deposited around a steam injection port is scraped off by a grinding device. 上部に金属マグネシウムの導入口、そして側面下部に溶融マグネシウムの取出し口を備えた金属マグネシウムの溶融鍋、該溶融鍋の溶融マグネシウム取出し口に接続する耐熱性パイプ、そして該耐熱性パイプの他方の端部に接続する溶融マグネシウムの導入口を側面下部に備え、上部にはマグネシウム蒸気の吹き出し口を備えたマグネシウムの蒸発鍋からなる金属マグネシウム溶融蒸発装置と、底部に該蒸発鍋のマグネシウム蒸気吹き出し口と接続するマグネシウム蒸気の噴射口、側面に酸素含有気体の噴射口、そして上部に酸化マグネシウム微粉末の取出し口を備えたマグネシウム酸化装置とからなり、マグネシウム酸化装置の底部にマグネシウム蒸気噴射口の周囲を加熱する加熱器が付設されていることを特徴とする高純度酸化マグネシウム微粉末製造装置。   A metal magnesium melting pot having a metal magnesium inlet at the top and a molten magnesium outlet at the bottom of the side, a heat resistant pipe connected to the molten magnesium outlet of the melting pot, and the other end of the heat resistant pipe The molten magnesium inlet is connected to the lower part of the side, and the upper part of the side is provided with a magnesium magnesium evaporating apparatus having a magnesium vapor outlet at the upper part, and the magnesium vapor outlet of the evaporating pot at the bottom. It consists of a magnesium vapor injection port connected to it, an oxygen-containing gas injection port on the side, and a magnesium oxide fine powder extraction port on the top. High-purity magnesium oxide characterized by having a heater for heating Beam fine powder production equipment. 請求項4に記載の高純度酸化マグネシウム微粉末製造装置を用い、金属マグネシウム溶融蒸発装置にてマグネシウム蒸気を生成させ、次いでマグネシウム酸化装置にてマグネシウム蒸気噴射口から該マグネシウム蒸気を、酸素含有気体噴射口から酸素含有気体をそれぞれ噴射させ、マグネシウム蒸気と酸素含有気体とを接触させて酸化マグネシウム微粉末を生成させるとともに、マグネシウム蒸気噴射口の周囲を加熱器により加熱することを特徴とする高純度酸化マグネシウム微粉末の製造方法。   5. The magnesium vapor is produced by a metal magnesium melting and evaporating apparatus using the high purity magnesium oxide fine powder producing apparatus according to claim 4, and then the magnesium vapor is injected into the magnesium vapor from a magnesium vapor injection port by the magnesium oxidizing apparatus. High-purity oxidation characterized by injecting oxygen-containing gas from the mouth, bringing magnesium vapor and oxygen-containing gas into contact to produce fine magnesium oxide powder, and heating the periphery of the magnesium vapor injection port with a heater Manufacturing method of magnesium fine powder.
JP2008215403A 2008-08-25 2008-08-25 High purity magnesium oxide fine powder production apparatus and high purity magnesium oxide fine powder production method using the same Expired - Lifetime JP4949340B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2008215403A JP4949340B2 (en) 2008-08-25 2008-08-25 High purity magnesium oxide fine powder production apparatus and high purity magnesium oxide fine powder production method using the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008215403A JP4949340B2 (en) 2008-08-25 2008-08-25 High purity magnesium oxide fine powder production apparatus and high purity magnesium oxide fine powder production method using the same

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2002350425A Division JP4231283B2 (en) 2002-12-02 2002-12-02 High purity magnesium oxide fine powder production apparatus and high purity magnesium oxide fine powder production method using the same

Publications (2)

Publication Number Publication Date
JP2008280246A true JP2008280246A (en) 2008-11-20
JP4949340B2 JP4949340B2 (en) 2012-06-06

Family

ID=40141366

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008215403A Expired - Lifetime JP4949340B2 (en) 2008-08-25 2008-08-25 High purity magnesium oxide fine powder production apparatus and high purity magnesium oxide fine powder production method using the same

Country Status (1)

Country Link
JP (1) JP4949340B2 (en)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60161327A (en) * 1984-01-31 1985-08-23 Ube Ind Ltd Manufacturing method of high purity magnesia fine powder
JPS61291406A (en) * 1985-06-07 1986-12-22 Res Dev Corp Of Japan Method and apparatus for producing ultrafine oxide particles
JPH02307822A (en) * 1989-05-19 1990-12-21 Ube Ind Ltd Continuous magnesium melting and evaporation device
JPH07101722A (en) * 1993-10-05 1995-04-18 Ube Ind Ltd Method for producing high-purity magnesia fine powder

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60161327A (en) * 1984-01-31 1985-08-23 Ube Ind Ltd Manufacturing method of high purity magnesia fine powder
JPS61291406A (en) * 1985-06-07 1986-12-22 Res Dev Corp Of Japan Method and apparatus for producing ultrafine oxide particles
JPH02307822A (en) * 1989-05-19 1990-12-21 Ube Ind Ltd Continuous magnesium melting and evaporation device
JPH07101722A (en) * 1993-10-05 1995-04-18 Ube Ind Ltd Method for producing high-purity magnesia fine powder

Also Published As

Publication number Publication date
JP4949340B2 (en) 2012-06-06

Similar Documents

Publication Publication Date Title
JP5427452B2 (en) Method for producing titanium metal
TWI846040B (en) Silica to high purity silicon production apparatus and process
JP5492854B2 (en) Method for producing high-purity SiOx nanopowder having excellent volatility and apparatus for producing the same
JPS6330062B2 (en)
WO2010137688A1 (en) Method for producing titanium metal
JP6591129B1 (en) Metal chloride generator and method for producing metal powder
WO2012070461A1 (en) Device for producing titanium metal, and method for producing titanium metal
JP4231283B2 (en) High purity magnesium oxide fine powder production apparatus and high purity magnesium oxide fine powder production method using the same
JP3848816B2 (en) High-purity metal purification method and apparatus
JP4949340B2 (en) High purity magnesium oxide fine powder production apparatus and high purity magnesium oxide fine powder production method using the same
JP4195279B2 (en) Method for producing high-purity magnesium oxide fine powder
JP5698221B2 (en) Metal titanium manufacturing apparatus and metal titanium manufacturing method
JP4195278B2 (en) Metallic magnesium melt evaporation apparatus and method for producing high-purity magnesium oxide fine powder using the same
JP4855452B2 (en) Metallic magnesium melt evaporation apparatus and method for producing high-purity magnesium oxide fine powder using the same
KR100669877B1 (en) Manufacturing method and apparatus for high purity magnesium oxide fine powder
JP5811002B2 (en) Method and apparatus for producing SiO using hollow carbon electrode
JP5995175B2 (en) Reduction method of alumina and magnesia by supersonic airflow
JP4094055B2 (en) Method for producing tetrafluoroethylene
AU2020424483A1 (en) A method and apparatus to condense magnesium vapor using a fluid-cooled heat exchanger
KR100985676B1 (en) Zinc oxide fine powder production apparatus and method
JP6806517B2 (en) Alkaline earth metal manufacturing equipment and manufacturing method
Samokhin et al. Characteristics of heat and mass transfer to the wall of a confined-jet plasma flow reactor in the processes of nanopowder preparation from metals and their compounds
JPH0438801B2 (en)
JP5730423B2 (en) Thermal plasma processing equipment
JP2017001918A (en) Apparatus and method for continuous carbonization of cellulose acetate

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20080922

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20080922

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20110411

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20111206

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20120206

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20120224

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20120307

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20150316

Year of fee payment: 3

R150 Certificate of patent or registration of utility model

Ref document number: 4949340

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

Free format text: JAPANESE INTERMEDIATE CODE: R150

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

EXPY Cancellation because of completion of term