JP2008268894A - Colored photosensitive resin composition, black matrix, color filter and liquid crystal display - Google Patents
Colored photosensitive resin composition, black matrix, color filter and liquid crystal display Download PDFInfo
- Publication number
- JP2008268894A JP2008268894A JP2008046072A JP2008046072A JP2008268894A JP 2008268894 A JP2008268894 A JP 2008268894A JP 2008046072 A JP2008046072 A JP 2008046072A JP 2008046072 A JP2008046072 A JP 2008046072A JP 2008268894 A JP2008268894 A JP 2008268894A
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- JP
- Japan
- Prior art keywords
- resin composition
- photosensitive resin
- solvent
- colored photosensitive
- acid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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- 239000011342 resin composition Substances 0.000 title claims abstract description 81
- 239000011159 matrix material Substances 0.000 title claims description 22
- 239000004973 liquid crystal related substance Substances 0.000 title claims description 12
- 239000002904 solvent Substances 0.000 claims abstract description 86
- 239000000049 pigment Substances 0.000 claims abstract description 32
- 150000001875 compounds Chemical class 0.000 claims abstract description 24
- 239000007787 solid Substances 0.000 claims abstract description 21
- 239000003999 initiator Substances 0.000 claims abstract description 15
- 238000009835 boiling Methods 0.000 claims abstract description 10
- MPAGVACEWQNVQO-UHFFFAOYSA-N 3-acetyloxybutyl acetate Chemical group CC(=O)OC(C)CCOC(C)=O MPAGVACEWQNVQO-UHFFFAOYSA-N 0.000 claims description 11
- LAVARTIQQDZFNT-UHFFFAOYSA-N 1-(1-methoxypropan-2-yloxy)propan-2-yl acetate Chemical compound COCC(C)OCC(C)OC(C)=O LAVARTIQQDZFNT-UHFFFAOYSA-N 0.000 claims description 6
- VXQBJTKSVGFQOL-UHFFFAOYSA-N 2-(2-butoxyethoxy)ethyl acetate Chemical compound CCCCOCCOCCOC(C)=O VXQBJTKSVGFQOL-UHFFFAOYSA-N 0.000 claims description 4
- FPZWZCWUIYYYBU-UHFFFAOYSA-N 2-(2-ethoxyethoxy)ethyl acetate Chemical compound CCOCCOCCOC(C)=O FPZWZCWUIYYYBU-UHFFFAOYSA-N 0.000 claims description 3
- 230000004931 aggregating effect Effects 0.000 abstract 1
- 238000004090 dissolution Methods 0.000 abstract 1
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 58
- -1 2-ethylhexyl Chemical group 0.000 description 47
- 239000011248 coating agent Substances 0.000 description 26
- 238000000576 coating method Methods 0.000 description 26
- 238000000034 method Methods 0.000 description 24
- JHIVVAPYMSGYDF-UHFFFAOYSA-N cyclohexanone Chemical compound O=C1CCCCC1 JHIVVAPYMSGYDF-UHFFFAOYSA-N 0.000 description 20
- 229920005989 resin Polymers 0.000 description 19
- 239000011347 resin Substances 0.000 description 19
- 239000000758 substrate Substances 0.000 description 19
- QMYGFTJCQFEDST-UHFFFAOYSA-N 3-methoxybutyl acetate Chemical compound COC(C)CCOC(C)=O QMYGFTJCQFEDST-UHFFFAOYSA-N 0.000 description 18
- 239000002253 acid Substances 0.000 description 17
- 230000000052 comparative effect Effects 0.000 description 17
- 238000001035 drying Methods 0.000 description 17
- 239000004593 Epoxy Substances 0.000 description 15
- 150000008065 acid anhydrides Chemical class 0.000 description 15
- 239000000178 monomer Substances 0.000 description 13
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 12
- 229910052799 carbon Inorganic materials 0.000 description 12
- 239000011521 glass Substances 0.000 description 12
- HRPVXLWXLXDGHG-UHFFFAOYSA-N Acrylamide Chemical compound NC(=O)C=C HRPVXLWXLXDGHG-UHFFFAOYSA-N 0.000 description 11
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 11
- 239000006185 dispersion Substances 0.000 description 11
- 239000003822 epoxy resin Substances 0.000 description 11
- 229920000647 polyepoxide Polymers 0.000 description 11
- LLHKCFNBLRBOGN-UHFFFAOYSA-N propylene glycol methyl ether acetate Chemical compound COCC(C)OC(C)=O LLHKCFNBLRBOGN-UHFFFAOYSA-N 0.000 description 10
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 9
- MTHSVFCYNBDYFN-UHFFFAOYSA-N diethylene glycol Chemical compound OCCOCCO MTHSVFCYNBDYFN-UHFFFAOYSA-N 0.000 description 9
- 150000007519 polyprotic acids Polymers 0.000 description 9
- 239000006229 carbon black Substances 0.000 description 8
- 239000002270 dispersing agent Substances 0.000 description 7
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 description 6
- ATUOYWHBWRKTHZ-UHFFFAOYSA-N Propane Chemical compound CCC ATUOYWHBWRKTHZ-UHFFFAOYSA-N 0.000 description 6
- DNIAPMSPPWPWGF-UHFFFAOYSA-N Propylene glycol Chemical compound CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 description 6
- 230000003746 surface roughness Effects 0.000 description 6
- 238000001291 vacuum drying Methods 0.000 description 6
- MPIAGWXWVAHQBB-UHFFFAOYSA-N [3-prop-2-enoyloxy-2-[[3-prop-2-enoyloxy-2,2-bis(prop-2-enoyloxymethyl)propoxy]methyl]-2-(prop-2-enoyloxymethyl)propyl] prop-2-enoate Chemical compound C=CC(=O)OCC(COC(=O)C=C)(COC(=O)C=C)COCC(COC(=O)C=C)(COC(=O)C=C)COC(=O)C=C MPIAGWXWVAHQBB-UHFFFAOYSA-N 0.000 description 5
- 230000015572 biosynthetic process Effects 0.000 description 5
- IISBACLAFKSPIT-UHFFFAOYSA-N bisphenol A Chemical compound C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 description 5
- 239000001055 blue pigment Substances 0.000 description 5
- 230000007547 defect Effects 0.000 description 5
- 238000011156 evaluation Methods 0.000 description 5
- WXZMFSXDPGVJKK-UHFFFAOYSA-N pentaerythritol Chemical compound OCC(CO)(CO)CO WXZMFSXDPGVJKK-UHFFFAOYSA-N 0.000 description 5
- 239000000126 substance Substances 0.000 description 5
- KMOUUZVZFBCRAM-OLQVQODUSA-N (3as,7ar)-3a,4,7,7a-tetrahydro-2-benzofuran-1,3-dione Chemical compound C1C=CC[C@@H]2C(=O)OC(=O)[C@@H]21 KMOUUZVZFBCRAM-OLQVQODUSA-N 0.000 description 4
- TXBCBTDQIULDIA-UHFFFAOYSA-N 2-[[3-hydroxy-2,2-bis(hydroxymethyl)propoxy]methyl]-2-(hydroxymethyl)propane-1,3-diol Chemical compound OCC(CO)(CO)COCC(CO)(CO)CO TXBCBTDQIULDIA-UHFFFAOYSA-N 0.000 description 4
- 239000004925 Acrylic resin Substances 0.000 description 4
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 4
- VZCYOOQTPOCHFL-OWOJBTEDSA-N Fumaric acid Chemical compound OC(=O)\C=C\C(O)=O VZCYOOQTPOCHFL-OWOJBTEDSA-N 0.000 description 4
- PXKLMJQFEQBVLD-UHFFFAOYSA-N bisphenol F Chemical compound C1=CC(O)=CC=C1CC1=CC=C(O)C=C1 PXKLMJQFEQBVLD-UHFFFAOYSA-N 0.000 description 4
- 229940125904 compound 1 Drugs 0.000 description 4
- NIHNNTQXNPWCJQ-UHFFFAOYSA-N fluorene Chemical compound C1=CC=C2CC3=CC=CC=C3C2=C1 NIHNNTQXNPWCJQ-UHFFFAOYSA-N 0.000 description 4
- 235000011187 glycerol Nutrition 0.000 description 4
- WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000002156 mixing Methods 0.000 description 4
- 239000000203 mixture Substances 0.000 description 4
- 230000003287 optical effect Effects 0.000 description 4
- 230000035945 sensitivity Effects 0.000 description 4
- 239000000243 solution Substances 0.000 description 4
- VZCYOOQTPOCHFL-UHFFFAOYSA-N trans-butenedioic acid Natural products OC(=O)C=CC(O)=O VZCYOOQTPOCHFL-UHFFFAOYSA-N 0.000 description 4
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 3
- VGKYEIFFSOPYEW-UHFFFAOYSA-N 2-methyl-4-[(4-phenyldiazenylphenyl)diazenyl]phenol Chemical compound Cc1cc(ccc1O)N=Nc1ccc(cc1)N=Nc1ccccc1 VGKYEIFFSOPYEW-UHFFFAOYSA-N 0.000 description 3
- OFNISBHGPNMTMS-UHFFFAOYSA-N 3-methylideneoxolane-2,5-dione Chemical compound C=C1CC(=O)OC1=O OFNISBHGPNMTMS-UHFFFAOYSA-N 0.000 description 3
- VQVIHDPBMFABCQ-UHFFFAOYSA-N 5-(1,3-dioxo-2-benzofuran-5-carbonyl)-2-benzofuran-1,3-dione Chemical compound C1=C2C(=O)OC(=O)C2=CC(C(C=2C=C3C(=O)OC(=O)C3=CC=2)=O)=C1 VQVIHDPBMFABCQ-UHFFFAOYSA-N 0.000 description 3
- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 description 3
- ZMXDDKWLCZADIW-UHFFFAOYSA-N N,N-Dimethylformamide Chemical compound CN(C)C=O ZMXDDKWLCZADIW-UHFFFAOYSA-N 0.000 description 3
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 3
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- ZMANZCXQSJIPKH-UHFFFAOYSA-N Triethylamine Chemical compound CCN(CC)CC ZMANZCXQSJIPKH-UHFFFAOYSA-N 0.000 description 3
- CQPFMGBJSMSXLP-UHFFFAOYSA-M acid orange 7 Chemical compound [Na+].OC1=CC=C2C=CC=CC2=C1N=NC1=CC=C(S([O-])(=O)=O)C=C1 CQPFMGBJSMSXLP-UHFFFAOYSA-M 0.000 description 3
- 238000004220 aggregation Methods 0.000 description 3
- 230000002776 aggregation Effects 0.000 description 3
- 125000001797 benzyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])([H])* 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 3
- 239000007795 chemical reaction product Substances 0.000 description 3
- 238000004040 coloring Methods 0.000 description 3
- 230000018109 developmental process Effects 0.000 description 3
- FPVGTPBMTFTMRT-UHFFFAOYSA-L disodium;2-amino-5-[(4-sulfonatophenyl)diazenyl]benzenesulfonate Chemical compound [Na+].[Na+].C1=C(S([O-])(=O)=O)C(N)=CC=C1N=NC1=CC=C(S([O-])(=O)=O)C=C1 FPVGTPBMTFTMRT-UHFFFAOYSA-L 0.000 description 3
- 239000000975 dye Substances 0.000 description 3
- 150000002148 esters Chemical class 0.000 description 3
- 235000019233 fast yellow AB Nutrition 0.000 description 3
- 239000001056 green pigment Substances 0.000 description 3
- 239000003112 inhibitor Substances 0.000 description 3
- FPYJFEHAWHCUMM-UHFFFAOYSA-N maleic anhydride Chemical compound O=C1OC(=O)C=C1 FPYJFEHAWHCUMM-UHFFFAOYSA-N 0.000 description 3
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 3
- 239000001294 propane Substances 0.000 description 3
- 239000001054 red pigment Substances 0.000 description 3
- MUTGBJKUEZFXGO-OLQVQODUSA-N (3as,7ar)-3a,4,5,6,7,7a-hexahydro-2-benzofuran-1,3-dione Chemical compound C1CCC[C@@H]2C(=O)OC(=O)[C@@H]21 MUTGBJKUEZFXGO-OLQVQODUSA-N 0.000 description 2
- YXIWHUQXZSMYRE-UHFFFAOYSA-N 1,3-benzothiazole-2-thiol Chemical compound C1=CC=C2SC(S)=NC2=C1 YXIWHUQXZSMYRE-UHFFFAOYSA-N 0.000 description 2
- OZAIFHULBGXAKX-UHFFFAOYSA-N 2-(2-cyanopropan-2-yldiazenyl)-2-methylpropanenitrile Chemical compound N#CC(C)(C)N=NC(C)(C)C#N OZAIFHULBGXAKX-UHFFFAOYSA-N 0.000 description 2
- LEJBBGNFPAFPKQ-UHFFFAOYSA-N 2-(2-prop-2-enoyloxyethoxy)ethyl prop-2-enoate Chemical compound C=CC(=O)OCCOCCOC(=O)C=C LEJBBGNFPAFPKQ-UHFFFAOYSA-N 0.000 description 2
- FALRKNHUBBKYCC-UHFFFAOYSA-N 2-(chloromethyl)pyridine-3-carbonitrile Chemical compound ClCC1=NC=CC=C1C#N FALRKNHUBBKYCC-UHFFFAOYSA-N 0.000 description 2
- XNWFRZJHXBZDAG-UHFFFAOYSA-N 2-METHOXYETHANOL Chemical compound COCCO XNWFRZJHXBZDAG-UHFFFAOYSA-N 0.000 description 2
- DZZAHLOABNWIFA-UHFFFAOYSA-N 2-butoxy-1,2-diphenylethanone Chemical compound C=1C=CC=CC=1C(OCCCC)C(=O)C1=CC=CC=C1 DZZAHLOABNWIFA-UHFFFAOYSA-N 0.000 description 2
- ZNQVEEAIQZEUHB-UHFFFAOYSA-N 2-ethoxyethanol Chemical compound CCOCCO ZNQVEEAIQZEUHB-UHFFFAOYSA-N 0.000 description 2
- 125000000954 2-hydroxyethyl group Chemical group [H]C([*])([H])C([H])([H])O[H] 0.000 description 2
- VPWNQTHUCYMVMZ-UHFFFAOYSA-N 4,4'-sulfonyldiphenol Chemical compound C1=CC(O)=CC=C1S(=O)(=O)C1=CC=C(O)C=C1 VPWNQTHUCYMVMZ-UHFFFAOYSA-N 0.000 description 2
- QPQKUYVSJWQSDY-UHFFFAOYSA-N 4-phenyldiazenylaniline Chemical compound C1=CC(N)=CC=C1N=NC1=CC=CC=C1 QPQKUYVSJWQSDY-UHFFFAOYSA-N 0.000 description 2
- KWOLFJPFCHCOCG-UHFFFAOYSA-N Acetophenone Chemical compound CC(=O)C1=CC=CC=C1 KWOLFJPFCHCOCG-UHFFFAOYSA-N 0.000 description 2
- 229920000178 Acrylic resin Polymers 0.000 description 2
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
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- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical class OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 2
- OKIZCWYLBDKLSU-UHFFFAOYSA-M N,N,N-Trimethylmethanaminium chloride Chemical compound [Cl-].C[N+](C)(C)C OKIZCWYLBDKLSU-UHFFFAOYSA-M 0.000 description 2
- UFWIBTONFRDIAS-UHFFFAOYSA-N Naphthalene Chemical compound C1=CC=CC2=CC=CC=C21 UFWIBTONFRDIAS-UHFFFAOYSA-N 0.000 description 2
- OFBQJSOFQDEBGM-UHFFFAOYSA-N Pentane Chemical compound CCCCC OFBQJSOFQDEBGM-UHFFFAOYSA-N 0.000 description 2
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- OFOBLEOULBTSOW-UHFFFAOYSA-N Propanedioic acid Natural products OC(=O)CC(O)=O OFOBLEOULBTSOW-UHFFFAOYSA-N 0.000 description 2
- JUJWROOIHBZHMG-UHFFFAOYSA-N Pyridine Chemical compound C1=CC=NC=C1 JUJWROOIHBZHMG-UHFFFAOYSA-N 0.000 description 2
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 2
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- ZJCCRDAZUWHFQH-UHFFFAOYSA-N Trimethylolpropane Chemical compound CCC(CO)(CO)CO ZJCCRDAZUWHFQH-UHFFFAOYSA-N 0.000 description 2
- GTDPSWPPOUPBNX-UHFFFAOYSA-N ac1mqpva Chemical compound CC12C(=O)OC(=O)C1(C)C1(C)C2(C)C(=O)OC1=O GTDPSWPPOUPBNX-UHFFFAOYSA-N 0.000 description 2
- 239000000654 additive Substances 0.000 description 2
- 150000008064 anhydrides Chemical class 0.000 description 2
- 239000012298 atmosphere Substances 0.000 description 2
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- JHIWVOJDXOSYLW-UHFFFAOYSA-N butyl 2,2-difluorocyclopropane-1-carboxylate Chemical compound CCCCOC(=O)C1CC1(F)F JHIWVOJDXOSYLW-UHFFFAOYSA-N 0.000 description 2
- DKPFZGUDAPQIHT-UHFFFAOYSA-N butyl acetate Chemical compound CCCCOC(C)=O DKPFZGUDAPQIHT-UHFFFAOYSA-N 0.000 description 2
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- 150000001244 carboxylic acid anhydrides Chemical group 0.000 description 2
- 239000003086 colorant Substances 0.000 description 2
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- ZUOUZKKEUPVFJK-UHFFFAOYSA-N diphenyl Chemical compound C1=CC=CC=C1C1=CC=CC=C1 ZUOUZKKEUPVFJK-UHFFFAOYSA-N 0.000 description 2
- 230000008034 disappearance Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 150000002170 ethers Chemical class 0.000 description 2
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 2
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- ANSXAPJVJOKRDJ-UHFFFAOYSA-N furo[3,4-f][2]benzofuran-1,3,5,7-tetrone Chemical compound C1=C2C(=O)OC(=O)C2=CC2=C1C(=O)OC2=O ANSXAPJVJOKRDJ-UHFFFAOYSA-N 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- CATSNJVOTSVZJV-UHFFFAOYSA-N heptan-2-one Chemical compound CCCCCC(C)=O CATSNJVOTSVZJV-UHFFFAOYSA-N 0.000 description 2
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- 230000001678 irradiating effect Effects 0.000 description 2
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- 150000003242 quaternary ammonium salts Chemical class 0.000 description 2
- 238000003756 stirring Methods 0.000 description 2
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- 150000005846 sugar alcohols Polymers 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
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- 125000003866 trichloromethyl group Chemical group ClC(Cl)(Cl)* 0.000 description 2
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- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 2
- PUPZLCDOIYMWBV-UHFFFAOYSA-N (+/-)-1,3-Butanediol Chemical compound CC(O)CCO PUPZLCDOIYMWBV-UHFFFAOYSA-N 0.000 description 1
- VMHYWKBKHMYRNF-UHFFFAOYSA-N (2-chlorophenyl)-phenylmethanone Chemical compound ClC1=CC=CC=C1C(=O)C1=CC=CC=C1 VMHYWKBKHMYRNF-UHFFFAOYSA-N 0.000 description 1
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- KFJJYOKMAAQFHC-UHFFFAOYSA-N (4-methoxy-5,5-dimethylcyclohexa-1,3-dien-1-yl)-phenylmethanone Chemical compound C1C(C)(C)C(OC)=CC=C1C(=O)C1=CC=CC=C1 KFJJYOKMAAQFHC-UHFFFAOYSA-N 0.000 description 1
- CDUQMGQIHYISOP-RMKNXTFCSA-N (e)-2-cyano-3-phenylprop-2-enoic acid Chemical compound OC(=O)C(\C#N)=C\C1=CC=CC=C1 CDUQMGQIHYISOP-RMKNXTFCSA-N 0.000 description 1
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- DVKJHBMWWAPEIU-UHFFFAOYSA-N toluene 2,4-diisocyanate Chemical compound CC1=CC=C(N=C=O)C=C1N=C=O DVKJHBMWWAPEIU-UHFFFAOYSA-N 0.000 description 1
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- VRVDFJOCCWSFLI-UHFFFAOYSA-K trisodium 3-[[4-[(6-anilino-1-hydroxy-3-sulfonatonaphthalen-2-yl)diazenyl]-5-methoxy-2-methylphenyl]diazenyl]naphthalene-1,5-disulfonate Chemical compound [Na+].[Na+].[Na+].COc1cc(N=Nc2cc(c3cccc(c3c2)S([O-])(=O)=O)S([O-])(=O)=O)c(C)cc1N=Nc1c(O)c2ccc(Nc3ccccc3)cc2cc1S([O-])(=O)=O VRVDFJOCCWSFLI-UHFFFAOYSA-K 0.000 description 1
- VIIUOXGZDWUVCX-UHFFFAOYSA-K trisodium 4-hydroxy-3-[[2-methyl-4-[5-methyl-4-[[4-(4-methylphenyl)sulfonyloxyphenyl]diazenyl]-2-sulfonatophenyl]-5-sulfonatophenyl]diazenyl]naphthalene-1-sulfonate Chemical compound [Na+].[Na+].[Na+].Cc1ccc(cc1)S(=O)(=O)Oc1ccc(cc1)N=Nc1cc(c(cc1C)-c1cc(C)c(cc1S([O-])(=O)=O)N=Nc1cc(c2ccccc2c1O)S([O-])(=O)=O)S([O-])(=O)=O VIIUOXGZDWUVCX-UHFFFAOYSA-K 0.000 description 1
- MUWXFTFIPYDMGT-UHFFFAOYSA-K trisodium 5-[[4-[4-[[4-[(3-carboxylato-4-hydroxyphenyl)diazenyl]-6-sulfonatonaphthalen-1-yl]diazenyl]phenyl]phenyl]diazenyl]-2-hydroxybenzoate Chemical compound [Na+].[Na+].[Na+].OC1=C(C=C(C=C1)N=NC1=CC=C(C=C1)C1=CC=C(C=C1)N=NC1=C2C=CC(=CC2=C(C=C1)N=NC1=CC(C([O-])=O)=C(O)C=C1)S([O-])(=O)=O)C([O-])=O MUWXFTFIPYDMGT-UHFFFAOYSA-K 0.000 description 1
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Landscapes
- Optical Filters (AREA)
- Materials For Photolithography (AREA)
Abstract
Description
本発明は、着色感光性樹脂組成物、ブラックマトリックス、カラーフィルター、及び液晶表示ディスプレイに関する。 The present invention relates to a colored photosensitive resin composition, a black matrix, a color filter, and a liquid crystal display.
液晶表示ディスプレイ等の表示体は、互いに対向して対となる電極が形成された2枚の基板の間に、液晶層を挟みこむ構造となっている。そして、一方の基板の内側には、赤色(R)、緑色(G)、及び青色(B)等の各色の画素領域からなるカラーフィルターが形成されている。このカラーフィルターにおいては、通常、赤色、緑色、及び青色の各画素領域を区画するように、ブラックマトリックスが形成されている。 A display body such as a liquid crystal display has a structure in which a liquid crystal layer is sandwiched between two substrates on which a pair of electrodes facing each other is formed. A color filter made up of pixel regions of each color such as red (R), green (G), and blue (B) is formed inside one substrate. In this color filter, normally, a black matrix is formed so as to partition red, green, and blue pixel regions.
一般に、カラーフィルターはリソグラフィ法により製造される。すなわち、まず、基板上に黒色の着色感光性樹脂組成物を塗布・乾燥させた後、露光・現像し、ブラックマトリックスを形成する。次いで、赤色、緑色、及び青色の各色の着色感光性樹脂組成物毎に、塗布、乾燥、露光、及び現像を繰り返し、各色の画素領域を所定の位置に形成してカラーフィルターを製造する。 Generally, a color filter is manufactured by a lithography method. That is, first, a black colored photosensitive resin composition is applied and dried on a substrate, and then exposed and developed to form a black matrix. Next, for each colored photosensitive resin composition of each color of red, green, and blue, coating, drying, exposure, and development are repeated to form a pixel region of each color at a predetermined position to manufacture a color filter.
近年、液晶表示ディスプレイの製造にあたっては、ブラックマトリックスによる遮光性を向上させて、液晶ディスプレイに表示される画像のコントラストを向上させる試みがなされている。ブラックマトリックスによる遮光性の向上のためには、ブラックレジストへ添加される黒色顔料の添加量を増加させることが必要とされる。 In recent years, in the manufacture of a liquid crystal display, an attempt has been made to improve the contrast of an image displayed on the liquid crystal display by improving the light shielding property by the black matrix. In order to improve the light shielding property by the black matrix, it is necessary to increase the amount of the black pigment added to the black resist.
ここで、特許文献1には、着色感光性樹脂組成物の一例として、アクリル樹脂からなるバインダー樹脂と、黒色顔料であるカーボンブラックを含むブラックレジスト組成物が開示されている。
しかしながら、特許文献1に記載の発明では、ブラックマトリックスの遮光性を向上させるために黒色顔料の含有量を増加させた場合、塗膜後の真空乾燥(VCD、減圧乾燥)工程において、黒色顔料の凝集により凝集物が発生してしまうという問題があった。 However, in the invention described in Patent Document 1, when the content of the black pigment is increased in order to improve the light-shielding property of the black matrix, in the vacuum drying (VCD, vacuum drying) step after the coating film, There was a problem that aggregates were generated by the aggregation.
本発明は、以上の課題に鑑みてなされたものであり、着色感光性樹脂組成物の塗布後の減圧乾燥時における凝集物の発生を防止でき、かつ遮光性の高いブラックマトリックスを形成できる着色感光性樹脂組成物を提供することを目的とする。 The present invention has been made in view of the above problems, and is capable of preventing the formation of aggregates at the time of drying under reduced pressure after application of a colored photosensitive resin composition and forming a black matrix having a high light-shielding property. It aims at providing a conductive resin composition.
本発明者らは、(A)光重合性化合物、(B)光重合開始剤、(C)黒色顔料、及び(S)溶剤を含有し、(C)黒色顔料が、固形分あたり40質量%より多い着色感光性樹脂組成物に、(S)溶剤として、溶解パラメーター及び沸点が所定の条件を満たす、少なくとも1種の(R)難揮発性溶剤を含有させた場合、減圧乾燥後における凝集物の発生を防止できることを見出し、本発明を完成するに至った。 The inventors include (A) a photopolymerizable compound, (B) a photopolymerization initiator, (C) a black pigment, and (S) a solvent, and (C) the black pigment is 40% by mass per solid content. When more colored photosensitive resin composition contains at least one (R) hardly volatile solvent whose solubility parameter and boiling point satisfy the predetermined conditions as the (S) solvent, an aggregate after drying under reduced pressure As a result, the present invention has been completed.
具体的には、本発明は以下のものを提供する。 Specifically, the present invention provides the following.
本発明の第一の態様は、(A)光重合性化合物、(B)光重合開始剤、(C)黒色顔料、及び(S)溶剤を含有し、前記(C)黒色顔料が、固形分あたり40質量%より多い着色感光性樹脂組成物であって、前記(S)溶剤は、溶解パラメーターが8.7(cal/cm3)1/2以上であり、大気圧下における沸点が200℃以上250℃以下である少なくとも1種の(R)難揮発性溶剤を含有する着色感光性樹脂組成物である。 The first aspect of the present invention contains (A) a photopolymerizable compound, (B) a photopolymerization initiator, (C) a black pigment, and (S) a solvent, and the (C) black pigment contains a solid content. More than 40% by mass of the colored photosensitive resin composition, the (S) solvent has a solubility parameter of 8.7 (cal / cm 3 ) 1/2 or more and a boiling point of 200 ° C. under atmospheric pressure. A colored photosensitive resin composition containing at least one (R) hardly volatile solvent having a temperature of 250 ° C. or lower.
本発明の第二の態様は、本発明の着色感光性樹脂組成物を用いて形成されたパターンを有するブラックマトリックスである。 The second aspect of the present invention is a black matrix having a pattern formed using the colored photosensitive resin composition of the present invention.
本発明の第三の態様は、本発明のブラックマトリックスを有するカラーフィルター、及びこのカラーフィルターを有する液晶表示ディスプレイである。 The third aspect of the present invention is a color filter having the black matrix of the present invention and a liquid crystal display having the color filter.
本発明によれば、(S)溶剤が(R)難揮発性溶剤を含むので、減圧乾燥時においても、着色感光性樹脂組成物から形成された塗膜に凝集物が発生することを防止することができる。 According to the present invention, since the (S) solvent contains the (R) hardly volatile solvent, it is possible to prevent agglomerates from being generated in the coating film formed from the colored photosensitive resin composition even during drying under reduced pressure. be able to.
以下、本発明の実施形態について詳細に説明する。なお、本発明は、以下の実施形態に何ら限定されるものではない。 Hereinafter, embodiments of the present invention will be described in detail. In addition, this invention is not limited to the following embodiment at all.
<着色感光性樹脂組成物>
本発明の着色感光性樹脂組成物は、(A)光重合性化合物、(B)光重合開始剤、(C)黒色顔料、及び(S)溶剤を含有する。
<Colored photosensitive resin composition>
The colored photosensitive resin composition of the present invention contains (A) a photopolymerizable compound, (B) a photopolymerization initiator, (C) a black pigment, and (S) a solvent.
[(A)光重合性化合物]
光重合性化合物は、エチレン性不飽和基を有する樹脂又はモノマーを含むものである。また、光重合性化合物としては、エチレン性不飽和基を有する樹脂及びモノマーを組み合わせることがより好ましい。エチレン性不飽和基を有する樹脂と、エチレン性不飽和基を有するモノマーとを組み合わせることにより、硬化性を向上させ、パターン形状を容易にすることができる。なお、本明細書では、エチレン性不飽和基を有する化合物のうち、質量平均分子量が1000以上のものを「エチレン性不飽和基を有する樹脂」と称し、質量平均分子量が1000未満のものを「エチレン性不飽和基を有するモノマー」と称することとする。
[(A) Photopolymerizable compound]
The photopolymerizable compound contains a resin or monomer having an ethylenically unsaturated group. Moreover, as a photopolymerizable compound, it is more preferable to combine the resin and monomer which have an ethylenically unsaturated group. By combining a resin having an ethylenically unsaturated group and a monomer having an ethylenically unsaturated group, the curability can be improved and the pattern shape can be facilitated. In the present specification, among compounds having an ethylenically unsaturated group, those having a mass average molecular weight of 1000 or more are referred to as “resin having an ethylenically unsaturated group”, and those having a mass average molecular weight of less than 1000 are referred to as “ It will be referred to as a “monomer having an ethylenically unsaturated group”.
(エチレン性不飽和基を有する樹脂)
エチレン性不飽和基を有する樹脂としては、(メタ)アクリル酸、フマル酸、マレイン酸、フマル酸モノメチル、フマル酸モノエチル、2−ヒドロキシエチル(メタ)アクリレート、エチレングリコールモノメチルエーテル(メタ)アクリレート、エチレングリコールモノエチルエーテル(メタ)アクリレート、グリセロール(メタ)アクリレート、(メタ)アクリルアミド、アクリロニトリル、メタクリロニトリル、メチル(メタ)アクリレート、エチル(メタ)アクリレート、イソブチル(メタ)アクリレート、2−エチルヘキシル(メタ)アクリレート、ベンジル(メタ)アクリレート、エチレングリコールジ(メタ)アクリレート、ジエチレングリコールジアクリレート、トリエチレングリコールジ(メタ)アクリレート、テトラエチレングリコールジ(メタ)アクリレート、ブチレングリコールジメタクリレート、プロピレングリコールジ(メタ)アクリレート、トリメチロールプロパントリ(メタ)アクリレート、テトラメチロールプロパンテトラ(メタ)アクリレート、ペンタエリスリトールトリ(メタ)アクリレート、ペンタエリスリトールテトラ(メタ)アクリレート、ジペンタエリスリトールペンタ(メタ)アクリレート、ジペンタエリスリトールヘキサ(メタ)アクリレート、1,6−ヘキサンジオールジ(メタ)アクリレート、及びカルドエポキシジアクリレート等が重合したオリゴマー類;多価アルコール類と一塩基酸又は多塩基酸とが縮合して得られるポリエステルプレポリマーに(メタ)アクリル酸を反応させて得られるポリエステル(メタ)アクリレート、及びポリオールと2個のイソシアネート基を持つ化合物とを反応させた後、(メタ)アクリル酸を反応させて得られるポリウレタン(メタ)アクリレート;並びに、ビスフェノールA型エポキシ樹脂、ビスフェノールF型エポキシ樹脂、ビスフェノールS型エポキシ樹脂、フェノール又はクレゾールノボラック型エポキシ樹脂、レゾール型エポキシ樹脂、トリフェノールメタン型エポキシ樹脂、ポリカルボン酸ポリグリシジルエステル、ポリオールポリグリシジルエステル、脂肪族又は脂環式エポキシ樹脂、アミンエポキシ樹脂、及びジヒドロキシベンゼン型エポキシ樹脂等のエポキシ樹脂と(メタ)アクリル酸とを反応させて得られるエポキシ(メタ)アクリレート樹脂等が挙げられる。さらに、エポキシ(メタ)アクリレート樹脂に多塩基酸無水物を反応させた樹脂を用いることができる。
(Resin having an ethylenically unsaturated group)
As the resin having an ethylenically unsaturated group, (meth) acrylic acid, fumaric acid, maleic acid, monomethyl fumarate, monoethyl fumarate, 2-hydroxyethyl (meth) acrylate, ethylene glycol monomethyl ether (meth) acrylate, ethylene Glycol monoethyl ether (meth) acrylate, glycerol (meth) acrylate, (meth) acrylamide, acrylonitrile, methacrylonitrile, methyl (meth) acrylate, ethyl (meth) acrylate, isobutyl (meth) acrylate, 2-ethylhexyl (meth) Acrylate, benzyl (meth) acrylate, ethylene glycol di (meth) acrylate, diethylene glycol diacrylate, triethylene glycol di (meth) acrylate, tetrae Lenglycol di (meth) acrylate, butylene glycol dimethacrylate, propylene glycol di (meth) acrylate, trimethylolpropane tri (meth) acrylate, tetramethylolpropane tetra (meth) acrylate, pentaerythritol tri (meth) acrylate, pentaerythritol tetra Oligomers in which (meth) acrylate, dipentaerythritol penta (meth) acrylate, dipentaerythritol hexa (meth) acrylate, 1,6-hexanediol di (meth) acrylate, cardoepoxy diacrylate, etc. are polymerized; polyhydric alcohol Polyester (meth) acrylate obtained by reacting (meth) acrylic acid with a polyester prepolymer obtained by condensation of a monobasic acid with a polybasic acid. Polyurethane (meth) acrylate obtained by reacting a rate, a polyol and a compound having two isocyanate groups and then reacting with (meth) acrylic acid; and bisphenol A type epoxy resin and bisphenol F type epoxy resin Bisphenol S type epoxy resin, phenol or cresol novolak type epoxy resin, resol type epoxy resin, triphenolmethane type epoxy resin, polycarboxylic acid polyglycidyl ester, polyol polyglycidyl ester, aliphatic or cycloaliphatic epoxy resin, amine epoxy Examples thereof include an epoxy (meth) acrylate resin obtained by reacting a resin and an epoxy resin such as a dihydroxybenzene type epoxy resin with (meth) acrylic acid. Further, a resin obtained by reacting an epoxy (meth) acrylate resin with a polybasic acid anhydride can be used.
また、エチレン性不飽和基を有する樹脂としては、エポキシ化合物(a1)と、エチレン性不飽和基含有カルボン酸化合物(a2)との反応物を、さらに多塩基酸無水物(a3)と反応させることにより得られる樹脂を好ましく用いることができる。 Moreover, as resin which has an ethylenically unsaturated group, the reaction material of an epoxy compound (a1) and an ethylenically unsaturated group containing carboxylic acid compound (a2) is made to react with a polybasic acid anhydride (a3) further. The resin obtained by this can be used preferably.
(エポキシ化合物(a1))
エポキシ化合物(a1)としては、グリシジルエーテル型、グリシジルエステル型、グリシジルアミン型、脂環型、ビスフェノールA型、ビスフェノールF型、ビスフェノールS型、ビフェニル型、ナフタレン型、フルオレン型、フェノールノボラック型、及びオルソクレゾール型エポキシ樹脂等が挙げられる。
(Epoxy compound (a1))
Examples of the epoxy compound (a1) include glycidyl ether type, glycidyl ester type, glycidyl amine type, alicyclic type, bisphenol A type, bisphenol F type, bisphenol S type, biphenyl type, naphthalene type, fluorene type, phenol novolac type, and An ortho-cresol type epoxy resin etc. are mentioned.
(エチレン性不飽和基含有カルボン酸化合物(a2))
エチレン性不飽和基含有カルボン酸化合物(a2)としては、分子中にアクリル基やメタクリル基等の反応性のエチレン性二重結合を含有するモノカルボン酸化合物が好ましい。このようなエチレン性不飽和基含有カルボン酸化合物としては、アクリル酸、メタクリル酸、β−スチリルアクリル酸、β−フルフリルアクリル酸、α−シアノ桂皮酸、及び桂皮酸等が挙げられる。このエチレン性不飽和基含有カルボン酸化合物(a2)は、単独で用いてもよく、2種以上を組み合わせて用いてもよい。
(Ethylenically unsaturated group-containing carboxylic acid compound (a2))
The ethylenically unsaturated group-containing carboxylic acid compound (a2) is preferably a monocarboxylic acid compound containing a reactive ethylenic double bond such as an acryl group or a methacryl group in the molecule. Examples of such ethylenically unsaturated group-containing carboxylic acid compounds include acrylic acid, methacrylic acid, β-styrylacrylic acid, β-furfurylacrylic acid, α-cyanocinnamic acid, and cinnamic acid. This ethylenically unsaturated group-containing carboxylic acid compound (a2) may be used alone or in combination of two or more.
エポキシ化合物(a1)とエチレン性不飽和基含有カルボン酸化合物(a2)とを反応させる方法としては、公知の方法を用いることができる。例えば、エポキシ化合物(a1)とエチレン性不飽和基含有カルボン酸化合物(a2)とを、トリエチルアミン、及びベンジルエチルアミン等の3級アミン、ドデシルトリメチルアンモニウムクロライド、テトラメチルアンモニウムクロライド、テトラエチルアンモニウムクロライド、及びベンジルトリエチルアンモニウムクロライド等の4級アンモニウム塩、ピリジン、及びトリフェニルホスフィン等を触媒として、有機溶剤中、反応温度50℃以上150℃以下で数時間〜数十時間反応させる方法が挙げられる。 As a method of reacting the epoxy compound (a1) with the ethylenically unsaturated group-containing carboxylic acid compound (a2), a known method can be used. For example, an epoxy compound (a1) and an ethylenically unsaturated group-containing carboxylic acid compound (a2) are converted into a tertiary amine such as triethylamine and benzylethylamine, dodecyltrimethylammonium chloride, tetramethylammonium chloride, tetraethylammonium chloride, and benzyl. Examples thereof include a method of reacting in an organic solvent at a reaction temperature of 50 ° C. or more and 150 ° C. or less for several hours to several tens of hours using a quaternary ammonium salt such as triethylammonium chloride, pyridine, triphenylphosphine, or the like as a catalyst.
エポキシ化合物(a1)とエチレン性不飽和基含有カルボン酸化合物(a2)との反応における使用量比は、エポキシ化合物(a1)のエポキシ当量とエチレン性不飽和基含有カルボン酸化合物(a2)のカルボン酸当量との比で、通常1:0.5〜1:2、好ましくは1:0.8〜1:1.25、より好ましくは1:1である。上記の範囲とすることにより、架橋効率が向上する傾向がある。 The use amount ratio in the reaction between the epoxy compound (a1) and the ethylenically unsaturated group-containing carboxylic acid compound (a2) is the same as the epoxy equivalent of the epoxy compound (a1) and the carboxyl of the ethylenically unsaturated group-containing carboxylic acid compound (a2). The ratio to the acid equivalent is usually 1: 0.5 to 1: 2, preferably 1: 0.8 to 1: 1.25, more preferably 1: 1. By setting it as the above range, the crosslinking efficiency tends to be improved.
(多塩基酸無水物(a3))
多塩基酸無水物(a3)としては、例えば、無水マレイン酸、無水コハク酸、無水イタコン酸、無水フタル酸、テトラヒドロ無水フタル酸、ヘキサヒドロ無水フタル酸、メチルヘキサヒドロ無水フタル酸、メチルテトラヒドロ無水フタル酸、無水トリメリット酸、無水ピロメリット酸、ベンゾフェノンテトラカルボン酸二無水物、3−メチルヘキサヒドロフタル酸無水物、4−メチルヘキサヒドロ無水フタル酸、3−エチルヘキサヒドロ無水フタル酸、4−エチルヘキサヒドロ無水フタル酸、テトラヒドロ無水フタル酸、3−メチルテトラヒドロ無水フタル酸、4−メチルテトラヒドロ無水フタル酸、3−エチルテトラヒドロ無水フタル酸、及び4−エチルテトラヒドロ無水フタル酸が挙げられる。これらの多塩基酸無水物は、単独で用いてもよく、2種以上を組み合わせて用いてもよい。
(Polybasic acid anhydride (a3))
Examples of the polybasic acid anhydride (a3) include maleic anhydride, succinic anhydride, itaconic anhydride, phthalic anhydride, tetrahydrophthalic anhydride, hexahydrophthalic anhydride, methylhexahydrophthalic anhydride, methyltetrahydrophthalic anhydride. Acid, trimellitic anhydride, pyromellitic anhydride, benzophenonetetracarboxylic dianhydride, 3-methylhexahydrophthalic anhydride, 4-methylhexahydrophthalic anhydride, 3-ethylhexahydrophthalic anhydride, 4- Examples include ethylhexahydrophthalic anhydride, tetrahydrophthalic anhydride, 3-methyltetrahydrophthalic anhydride, 4-methyltetrahydrophthalic anhydride, 3-ethyltetrahydrophthalic anhydride, and 4-ethyltetrahydrophthalic anhydride. These polybasic acid anhydrides may be used alone or in combination of two or more.
エポキシ化合物(a1)とエチレン性不飽和基含有カルボン酸化合物(a2)とを反応させた後、さらに多塩基酸無水物(a3)を反応させる方法としては、公知の方法を用いることができる。また、使用量比は、エポキシ化合物(a1)とエチレン性不飽和基含有カルボン酸化合物(a2)との反応物中のOH基のモル数と、多塩基酸無水物(a3)の酸無水物基の当量比で、通常1:1〜1:0.1であり、好ましくは1:0.8〜1:0.2である。上記の範囲とすることにより、現像液への溶解性が適度となる傾向がある。 As a method of reacting the epoxy compound (a1) with the ethylenically unsaturated group-containing carboxylic acid compound (a2) and further reacting the polybasic acid anhydride (a3), a known method can be used. The ratio of the amounts used is the number of moles of OH groups in the reaction product of the epoxy compound (a1) and the ethylenically unsaturated group-containing carboxylic acid compound (a2) and the acid anhydride of the polybasic acid anhydride (a3). The equivalent ratio of groups is usually 1: 1 to 1: 0.1, preferably 1: 0.8 to 1: 0.2. By making it into said range, there exists a tendency for the solubility to a developing solution to become moderate.
エポキシ化合物(a1)と、エチレン性不飽和基含有カルボン酸化合物(a2)との反応物を、さらに多塩基酸無水物(a3)と反応させることにより得られる樹脂の酸価は、樹脂固形分で、10mgKOH/g以上150mgKOH/g以下であることが好ましく、70mgKOH/g以上110mgKOH/g以下であることがより好ましい。樹脂の酸価を10mgKOH/g以上にすることにより現像液に対する充分な溶解性が得られ、また150mgKOH/g以下にすることにより充分な硬化性を得ることができ、表面性を良好にすることができる。 The acid value of the resin obtained by further reacting the reaction product of the epoxy compound (a1) with the ethylenically unsaturated group-containing carboxylic acid compound (a2) with the polybasic acid anhydride (a3) is the resin solid content. It is preferably 10 mgKOH / g or more and 150 mgKOH / g or less, and more preferably 70 mgKOH / g or more and 110 mgKOH / g or less. By setting the acid value of the resin to 10 mgKOH / g or more, sufficient solubility in the developer can be obtained, and by setting it to 150 mgKOH / g or less, sufficient curability can be obtained and the surface property should be improved. Can do.
また、樹脂の質量平均分子量(Mw)は、1000以上40000以下であることが好ましく、より好ましくは2000以上30000以下である。質量平均分子量を1000以上にすることにより耐熱性、膜強度を向上させることができ、また40000以下にすることにより現像液に対する十分な溶解性を得ることができる。 Further, the mass average molecular weight (Mw) of the resin is preferably 1000 or more and 40000 or less, and more preferably 2000 or more and 30000 or less. By making the mass average molecular weight 1000 or more, heat resistance and film strength can be improved, and by making it 40000 or less, sufficient solubility in a developer can be obtained.
また、エチレン性不飽和基を有する樹脂としては、分子内にカルド構造を有する樹脂を好ましく用いることができる。カルド構造を有する樹脂は耐熱性や耐薬品性が高いため、光重合性化合物に用いることによって着色感光性樹脂組成物の耐熱性及び耐薬品性を向上させることができる。例えば、下記式(1)で表される樹脂を好ましく用いることができる。 Moreover, as resin which has an ethylenically unsaturated group, resin which has a cardo structure in a molecule | numerator can be used preferably. Since the resin having a cardo structure has high heat resistance and chemical resistance, the heat resistance and chemical resistance of the colored photosensitive resin composition can be improved by using it as a photopolymerizable compound. For example, a resin represented by the following formula (1) can be preferably used.
式(1)中、nは1〜20の整数であり、Xは、下記式(2)で示される基である。
また、式(1)中、Yは無水マレイン酸、無水コハク酸、無水イタコン酸、無水フタル酸、無水テトラヒドロフタル酸、無水ヘキサヒドロフタル酸、無水メチルエンドメチレンテトラヒドロフタル酸、無水クロレンド酸、メチルテトラヒドロ無水フタル酸、及び無水グルタル酸等のジカルボン酸無水物からカルボン酸無水物基(−CO−O−CO−)を除いた残基である。 In the formula (1), Y is maleic anhydride, succinic anhydride, itaconic anhydride, phthalic anhydride, tetrahydrophthalic anhydride, hexahydrophthalic anhydride, methylendomethylenetetrahydrophthalic anhydride, chlorendic anhydride, methyl It is a residue obtained by removing a carboxylic anhydride group (—CO—O—CO—) from a dicarboxylic anhydride such as tetrahydrophthalic anhydride and glutaric anhydride.
また、式(1)中、Zは無水ピロメリット酸、ベンゾフェノンテトラカルボン酸二無水物、ビフェニルテトラカルボン酸二無水物、及びビフェニルエーテルテトラカルボン酸二無水物等のテトラカルボン酸二無水物から2個のカルボン酸無水物基を除いた残基である。 In the formula (1), Z is 2 from tetracarboxylic dianhydrides such as pyromellitic anhydride, benzophenone tetracarboxylic dianhydride, biphenyl tetracarboxylic dianhydride, and biphenyl ether tetracarboxylic dianhydride. This residue is obtained by removing one carboxylic anhydride group.
(エチレン性不飽和基を有するモノマー)
エチレン性不飽和基を有するモノマーには、単官能モノマーと多官能モノマーとがある。
(Monomer having an ethylenically unsaturated group)
Monomers having an ethylenically unsaturated group include monofunctional monomers and polyfunctional monomers.
単官能モノマーとしては、(メタ)アクリルアミド、メチロール(メタ)アクリルアミド、メトキシメチル(メタ)アクリルアミド、エトキシメチル(メタ)アクリルアミド、プロポキシメチル(メタ)アクリルアミド、ブトキシメトキシメチル(メタ)アクリルアミド、N−メチロール(メタ)アクリルアミド、N−ヒドロキシメチル(メタ)アクリルアミド、(メタ)アクリル酸、フマル酸、マレイン酸、無水マレイン酸、イタコン酸、無水イタコン酸、シトラコン酸、無水シトラコン酸、クロトン酸、2−アクリルアミド−2−メチルプロパンスルホン酸、tert−ブチルアクリルアミドスルホン酸、メチル(メタ)アクリレート、エチル(メタ)アクリレート、ブチル(メタ)アクリレート、2−エチルヘキシル(メタ)アクリレート、シクロヘキシル(メタ)アクリレート、2−ヒドロキシエチル(メタ)アクリレート、2−ヒドロキシプロピル(メタ)アクリレート、2−ヒドロキシブチル(メタ)アクリレート、2−フェノキシ−2−ヒドロキシプロピル(メタ)アクリレート、2−(メタ)アクリロイルオキシ−2−ヒドロキシプロピルフタレート、グリセリンモノ(メタ)アクリレート、テトラヒドロフルフリル(メタ)アクリレート、ジメチルアミノ(メタ)アクリレート、グリシジル(メタ)アクリレート、2,2,2−トリフルオロエチル(メタ)アクリレート、2,2,3,3−テトラフルオロプロピル(メタ)アクリレート、及びフタル酸誘導体のハーフ(メタ)アクリレート等が挙げられる。これらの単官能モノマーは、単独で用いてもよく、又は2種以上を組み合わせて用いてもよい。 Monofunctional monomers include (meth) acrylamide, methylol (meth) acrylamide, methoxymethyl (meth) acrylamide, ethoxymethyl (meth) acrylamide, propoxymethyl (meth) acrylamide, butoxymethoxymethyl (meth) acrylamide, N-methylol ( (Meth) acrylamide, N-hydroxymethyl (meth) acrylamide, (meth) acrylic acid, fumaric acid, maleic acid, maleic anhydride, itaconic acid, itaconic anhydride, citraconic acid, citraconic anhydride, crotonic acid, 2-acrylamide- 2-methylpropane sulfonic acid, tert-butylacrylamide sulfonic acid, methyl (meth) acrylate, ethyl (meth) acrylate, butyl (meth) acrylate, 2-ethylhexyl (meth) acrylate Cyclohexyl (meth) acrylate, 2-hydroxyethyl (meth) acrylate, 2-hydroxypropyl (meth) acrylate, 2-hydroxybutyl (meth) acrylate, 2-phenoxy-2-hydroxypropyl (meth) acrylate, 2- (Meth) acryloyloxy-2-hydroxypropyl phthalate, glycerin mono (meth) acrylate, tetrahydrofurfuryl (meth) acrylate, dimethylamino (meth) acrylate, glycidyl (meth) acrylate, 2,2,2-trifluoroethyl ( And (meth) acrylate, 2,2,3,3-tetrafluoropropyl (meth) acrylate, and phthalic acid derivative half (meth) acrylate. These monofunctional monomers may be used alone or in combination of two or more.
一方、多官能モノマーとしては、エチレングリコールジ(メタ)アクリレート、ジエチレングリコールジ(メタ)アクリレート、テトラエチレングリコールジ(メタ)アクリレート、プロピレングリコールジ(メタ)アクリレート、ポリプロピレングリコールジ(メタ)アクリレート、ブチレングリコールジ(メタ)アクリレート、ネオペンチルグリコールジ(メタ)アクリレート、1,6−ヘキサングリコールジ(メタ)アクリレート、トリメチロールプロパントリ(メタ)アクリレート、グリセリンジ(メタ)アクリレート、ペンタエリスリトールトリアクリレート、ペンタエリスリトールテトラアクリレート、ジペンタエリスリトールペンタアクリレート、ジペンタエリスリトールヘキサアクリレート、ペンタエリスリトールジ(メタ)アクリレート、ペンタエリスリトールトリ(メタ)アクリレート、ペンタエリスリトールテトラ(メタ)アクリレート、ジペンタエリスリトールペンタ(メタ)アクリレート、ジペンタエリスリトールヘキサ(メタ)アクリレート、2,2−ビス(4−(メタ)アクリロキシジエトキシフェニル)プロパン、2,2−ビス(4−(メタ)アクリロキシポリエトキシフェニル)プロパン、2−ヒドロキシ−3−(メタ)アクリロイルオキシプロピル(メタ)アクリレート、エチレングリコールジグリシジルエーテルジ(メタ)アクリレート、ジエチレングリコールジグリシジルエーテルジ(メタ)アクリレート、フタル酸ジグリシジルエステルジ(メタ)アクリレート、グリセリントリアクリレート、グリセリンポリグリシジルエーテルポリ(メタ)アクリレート、ウレタン(メタ)アクリレート(すなわち、トリレンジイソシアネート)、トリメチルヘキサメチレンジイソシアネートとヘキサメチレンジイソシアネート等と2−ビドロキシエチル(メタ)アクリレートとの反応物、メチレンビス(メタ)アクリルアミド、(メタ)アクリルアミドメチレンエーテル、多価アルコールとN−メチロール(メタ)アクリルアミドとの縮合物、及びトリアクリルホルマール等が挙げられる。これらの多官能モノマーは、単独で用いてもよく、2種以上を組み合わせて用いてもよい。 On the other hand, as the polyfunctional monomer, ethylene glycol di (meth) acrylate, diethylene glycol di (meth) acrylate, tetraethylene glycol di (meth) acrylate, propylene glycol di (meth) acrylate, polypropylene glycol di (meth) acrylate, butylene glycol Di (meth) acrylate, neopentyl glycol di (meth) acrylate, 1,6-hexane glycol di (meth) acrylate, trimethylolpropane tri (meth) acrylate, glycerin di (meth) acrylate, pentaerythritol triacrylate, pentaerythritol Tetraacrylate, dipentaerythritol pentaacrylate, dipentaerythritol hexaacrylate, pentaerythritol di (meta Acrylate, pentaerythritol tri (meth) acrylate, pentaerythritol tetra (meth) acrylate, dipentaerythritol penta (meth) acrylate, dipentaerythritol hexa (meth) acrylate, 2,2-bis (4- (meth) acryloxydi Ethoxyphenyl) propane, 2,2-bis (4- (meth) acryloxypolyethoxyphenyl) propane, 2-hydroxy-3- (meth) acryloyloxypropyl (meth) acrylate, ethylene glycol diglycidyl ether di (meth) Acrylate, diethylene glycol diglycidyl ether di (meth) acrylate, diglycidyl phthalate ester di (meth) acrylate, glycerin triacrylate, glycerin polyglycidyl ether poly (Meth) acrylate, urethane (meth) acrylate (that is, tolylene diisocyanate), reaction product of trimethylhexamethylene diisocyanate and hexamethylene diisocyanate and 2-bidoxyethyl (meth) acrylate, methylenebis (meth) acrylamide, (meth) acrylamide methylene Examples include ethers, condensates of polyhydric alcohols and N-methylol (meth) acrylamide, and triacryl formal. These polyfunctional monomers may be used alone or in combination of two or more.
このエチレン性不飽和基を有するモノマーの含有量は、着色感光性樹脂組成物の固形分に対して5質量%以上50質量%以下であることが好ましく、より好ましくは10質量%以上40質量%以下の範囲である。上記の範囲とすることにより、感度、現像性、及び解像性のバランスがとり易い傾向がある。なお、固形分とは、溶剤以外の成分の総和のことをいう。 The content of the monomer having an ethylenically unsaturated group is preferably 5% by mass or more and 50% by mass or less, more preferably 10% by mass or more and 40% by mass with respect to the solid content of the colored photosensitive resin composition. The range is as follows. By setting it as the above range, it tends to be easy to balance sensitivity, developability, and resolution. In addition, solid content means the sum total of components other than a solvent.
光重合性化合物の含有量は、着色感光性樹脂組成物の固形分に対して5質量%以上50質量%以下であることが好ましく、10質量%以上40質量%以下であることがより好ましい。上記の範囲とすることにより、感度、現像性、及び解像性のバランスがとり易い傾向がある。 The content of the photopolymerizable compound is preferably 5% by mass or more and 50% by mass or less, and more preferably 10% by mass or more and 40% by mass or less with respect to the solid content of the colored photosensitive resin composition. By setting it as the above range, it tends to be easy to balance sensitivity, developability, and resolution.
[(B)光重合開始剤]
光重合開始剤としては、1−ヒドロキシシクロヘキシルフェニルケトン、2−ヒドロキシ−2−メチル−1−フェニルプロパン−1−オン、1−〔4−(2−ヒドロキシエトキシ)フェニル〕−2−ヒドロキシ−2−メチル−1−プロパン−1−オン、1−(4−イソプロピルフェニル)−2−ヒドロキシ−2−メチルプロパン−1−オン、1−(4−ドデシルフェニル)−2−ヒドロキシ−2−メチルプロパン−1−オン、2,2−ジメトキシ−1,2−ジフェニルエタン−1−オン、ビス(4−ジメチルアミノフェニル)ケトン、2−メチル−1−〔4−(メチルチオ)フェニル〕−2−モルフォリノプロパン−1−オン、2−ベンジル−2−ジメチルアミノ−1−(4−モルフォリノフェニル)−ブタン−1−オン、エタノン−1−[9−エチル−6−(2−メチルベンゾイル)−9H−カルバゾル−3−イル]−1−(O−アセチルオキシム)、2,4,6−トリメチルベンゾイルジフェニルホスフィンオキシド、4−ベンゾイル−4’−メチルジメチルスルフィド、4−ジメチルアミノ安息香酸、4−ジメチルアミノ安息香酸メチル、4−ジメチルアミノ安息香酸エチル、4−ジメチルアミノ安息香酸ブチル、4−ジメチルアミノ−2−エチルヘキシル安息香酸、4−ジメチルアミノ−2−イソアミル安息香酸、ベンジル−β−メトキシエチルアセタール、ベンジルジメチルケタール、1−フェニル−1,2−プロパンジオン−2−(O−エトキシカルボニル)オキシム、O−ベンゾイル安息香酸メチル、2,4−ジエチルチオキサントン、2−クロロチオキサントン、2,4−ジメチルチオキサントン、1−クロロ−4−プロポキシチオキサントン、チオキサンテン、2−クロロチオキサンテン、2,4−ジエチルチオキサンテン、2−メチルチオキサンテン、2−イソプロピルチオキサンテン、2−エチルアントラキノン、オクタメチルアントラキノン、1,2−ベンズアントラキノン、2,3−ジフェニルアントラキノン、アゾビスイソブチロニトリル、ベンゾイルパーオキシド、クメンパーオキシド、2−メルカプトベンゾイミダール、2−メルカプトベンゾオキサゾール、2−メルカプトベンゾチアゾール、2−(O−クロロフェニル)−4,5−ジ(m−メトキシフェニル)−イミダゾリル二量体、ベンゾフェノン、2−クロロベンゾフェノン、p,p’−ビスジメチルアミノベンゾフェノン、4,4’−ビスジエチルアミノベンゾフェノン、4,4’−ジクロロベンゾフェノン、3,3−ジメチル−4−メトキシベンゾフェノン、ベンジル、ベンゾイン、ベンゾインメチルエーテル、ベンゾインエチルエーテル、ベンゾインイソプロピルエーテル、ベンゾイン−n−ブチルエーテル、ベンゾインイソブチルエーテル、ベンゾインブチルエーテル、アセトフェノン、2,2−ジエトキシアセトフェノン、p−ジメチルアセトフェノン、p−ジメチルアミノプロピオフェノン、ジクロロアセトフェノン、トリクロロアセトフェノン、p−tert−ブチルアセトフェノン、p−ジメチルアミノアセトフェノン、p−tert−ブチルトリクロロアセトフェノン、p−tert−ブチルジクロロアセトフェノン、α,α−ジクロロ−4−フェノキシアセトフェノン、チオキサントン、2−メチルチオキサントン、2−イソプロピルチオキサントン、ジベンゾスベロン、ペンチル−4−ジメチルアミノベンゾエート、9−フェニルアクリジン、1,7−ビス−(9−アクリジニル)ヘプタン、1,5−ビス−(9−アクリジニル)ペンタン、1,3−ビス−(9−アクリジニル)プロパン、p−メトキシトリアジン、2,4,6−トリス(トリクロロメチル)−s−トリアジン、2−メチル−4,6−ビス(トリクロロメチル)−s−トリアジン、2−[2−(5−メチルフラン−2−イル)エテニル]−4,6−ビス(トリクロロメチル)−s−トリアジン、2−[2−(フラン−2−イル)エテニル]−4,6−ビス(トリクロロメチル)−s−トリアジン、2−[2−(4−ジエチルアミノ−2−メチルフェニル)エテニル]−4,6−ビス(トリクロロメチル)−s−トリアジン、2−[2−(3,4−ジメトキシフェニル)エテニル]−4,6−ビス(トリクロロメチル)−s−トリアジン、2−(4−メトキシフェニル)−4,6−ビス(トリクロロメチル)−s−トリアジン、2−(4−エトキシスチリル)−4,6−ビス(トリクロロメチル)−s−トリアジン、2−(4−n−ブトキシフェニル)−4,6−ビス(トリクロロメチル)−s−トリアジン、2,4−ビス−トリクロロメチル−6−(3−ブロモ−4−メトキシ)フェニル−s−トリアジン、2,4−ビス−トリクロロメチル−6−(2−ブロモ−4−メトキシ)フェニル−s−トリアジン、2,4−ビス−トリクロロメチル−6−(3−ブロモ−4−メトキシ)スチリルフェニル−s−トリアジン、及び2,4−ビス−トリクロロメチル−6−(2−ブロモ−4−メトキシ)スチリルフェニル−s−トリアジン等が挙げられる。これらの中でも、オキシム系の光重合開始剤を用いることが、感度の面で特に好ましい。これらの光重合開始剤は、単独で用いてもよく、2種以上を組み合わせて用いてもよい。
[(B) Photopolymerization initiator]
As photopolymerization initiators, 1-hydroxycyclohexyl phenyl ketone, 2-hydroxy-2-methyl-1-phenylpropan-1-one, 1- [4- (2-hydroxyethoxy) phenyl] -2-hydroxy-2 -Methyl-1-propan-1-one, 1- (4-isopropylphenyl) -2-hydroxy-2-methylpropan-1-one, 1- (4-dodecylphenyl) -2-hydroxy-2-methylpropane -1-one, 2,2-dimethoxy-1,2-diphenylethane-1-one, bis (4-dimethylaminophenyl) ketone, 2-methyl-1- [4- (methylthio) phenyl] -2-morpho Linopropan-1-one, 2-benzyl-2-dimethylamino-1- (4-morpholinophenyl) -butan-1-one, ethanone-1- [ -Ethyl-6- (2-methylbenzoyl) -9H-carbazol-3-yl] -1- (O-acetyloxime), 2,4,6-trimethylbenzoyldiphenylphosphine oxide, 4-benzoyl-4'-methyl Dimethyl sulfide, 4-dimethylaminobenzoic acid, methyl 4-dimethylaminobenzoate, ethyl 4-dimethylaminobenzoate, butyl 4-dimethylaminobenzoate, 4-dimethylamino-2-ethylhexylbenzoic acid, 4-dimethylamino- 2-isoamylbenzoic acid, benzyl-β-methoxyethyl acetal, benzyldimethyl ketal, 1-phenyl-1,2-propanedione-2- (O-ethoxycarbonyl) oxime, methyl O-benzoylbenzoate, 2,4- Diethylthioxanthone, 2-chlorothioxanthone, 2 4-dimethylthioxanthone, 1-chloro-4-propoxythioxanthone, thioxanthene, 2-chlorothioxanthene, 2,4-diethylthioxanthene, 2-methylthioxanthene, 2-isopropylthioxanthene, 2-ethylanthraquinone, octamethylanthraquinone 1,2-benzanthraquinone, 2,3-diphenylanthraquinone, azobisisobutyronitrile, benzoyl peroxide, cumene peroxide, 2-mercaptobenzoimidazole, 2-mercaptobenzoxazole, 2-mercaptobenzothiazole, 2, -(O-chlorophenyl) -4,5-di (m-methoxyphenyl) -imidazolyl dimer, benzophenone, 2-chlorobenzophenone, p, p'-bisdimethylaminobenzophenone, 4,4 ' Bisdiethylaminobenzophenone, 4,4'-dichlorobenzophenone, 3,3-dimethyl-4-methoxybenzophenone, benzyl, benzoin, benzoin methyl ether, benzoin ethyl ether, benzoin isopropyl ether, benzoin-n-butyl ether, benzoin isobutyl ether, benzoin Butyl ether, acetophenone, 2,2-diethoxyacetophenone, p-dimethylacetophenone, p-dimethylaminopropiophenone, dichloroacetophenone, trichloroacetophenone, p-tert-butylacetophenone, p-dimethylaminoacetophenone, p-tert-butyltrichloro Acetophenone, p-tert-butyldichloroacetophenone, α, α-dichloro-4-phenoxyace Tophenone, thioxanthone, 2-methylthioxanthone, 2-isopropylthioxanthone, dibenzosuberone, pentyl-4-dimethylaminobenzoate, 9-phenylacridine, 1,7-bis- (9-acridinyl) heptane, 1,5-bis- (9-acridinyl) pentane, 1,3-bis- (9-acridinyl) propane, p-methoxytriazine, 2,4,6-tris (trichloromethyl) -s-triazine, 2-methyl-4,6-bis (Trichloromethyl) -s-triazine, 2- [2- (5-methylfuran-2-yl) ethenyl] -4,6-bis (trichloromethyl) -s-triazine, 2- [2- (furan-2) -Yl) ethenyl] -4,6-bis (trichloromethyl) -s-triazine, 2- [2- (4-diethylamino) -2-methylphenyl) ethenyl] -4,6-bis (trichloromethyl) -s-triazine, 2- [2- (3,4-dimethoxyphenyl) ethenyl] -4,6-bis (trichloromethyl) -s -Triazine, 2- (4-methoxyphenyl) -4,6-bis (trichloromethyl) -s-triazine, 2- (4-ethoxystyryl) -4,6-bis (trichloromethyl) -s-triazine, 2 -(4-n-butoxyphenyl) -4,6-bis (trichloromethyl) -s-triazine, 2,4-bis-trichloromethyl-6- (3-bromo-4-methoxy) phenyl-s-triazine, 2,4-bis-trichloromethyl-6- (2-bromo-4-methoxy) phenyl-s-triazine, 2,4-bis-trichloromethyl-6- (3-bromo-4- Butoxy) styryl phenyl -s- triazine, and 2,4-bis - trichloromethyl-6- (2-bromo-4-methoxy) styrylphenyl -s- triazine. Among these, it is particularly preferable in terms of sensitivity to use an oxime-based photopolymerization initiator. These photopolymerization initiators may be used alone or in combination of two or more.
光重合開始剤の含有量は、着色感光性樹脂組成物の固形分に対して0.5質量%以上30質量%以下であることが好ましく、1質量%以上20質量%以下であることがより好ましい。上記の範囲とすることにより、十分な耐熱性、及び耐薬品性を得ることができ、また塗膜形成能を向上させ、光硬化不良を抑制することができる。 The content of the photopolymerization initiator is preferably 0.5% by mass or more and 30% by mass or less, and more preferably 1% by mass or more and 20% by mass or less with respect to the solid content of the colored photosensitive resin composition. preferable. By setting it as said range, sufficient heat resistance and chemical-resistance can be acquired, a coating-film formation ability can be improved, and photocuring failure can be suppressed.
[(C)黒色顔料]
黒色顔料としては、特に限定されるものではないが、ブラックレジストに用いられる従来公知の顔料を使用することができる。具体的には、カーボンブラック(CB)、チタンブラック、酸化クロム、酸化鉄、アニリンブラック、ペリレン系顔料、及びC.I.ソルベントブラック123等を用いることができる。また、エポキシ樹脂等で被覆されたカーボンブラック;チタン、マンガン、鉄、銅、及びコバルト等の複合酸化物等の無機系ブラック顔料も、適宜、採用することができる。
[(C) Black pigment]
Although it does not specifically limit as a black pigment, The conventionally well-known pigment used for a black resist can be used. Specifically, carbon black (CB), titanium black, chromium oxide, iron oxide, aniline black, perylene pigment, and C.I. I. Solvent black 123 or the like can be used. Carbon black coated with an epoxy resin or the like; inorganic black pigments such as composite oxides such as titanium, manganese, iron, copper, and cobalt can also be appropriately employed.
なお、着色感光性樹脂組成物においては、黒色顔料分散液を用いて黒色顔料を分散させることもでき、無機系ブラック顔料分散液である、御国色素社製の「カーボン分散液CFブラック(カーボン濃度20%含有)」、及び御国色素社製の「カーボン分散液CFブラック(高抵抗カーボン24%含有)」等を用いることができる。 In the colored photosensitive resin composition, the black pigment can also be dispersed using a black pigment dispersion, and “carbon dispersion CF black (carbon concentration 20% content) ”,“ Carbon dispersion CF black (containing high resistance carbon 24%) ”manufactured by Mikuni Dye Co., Ltd., and the like can be used.
上記黒色顔料の含有量は、着色感光性樹脂組成物の固形分に対し、40質量%より多いものとするが、45質量%以上であることが好ましく、50質量%以上であることがより好ましい。40質量%より多くすることにより、遮光性に優れた着色感光性樹脂組成物を得ることができる。一方、上記黒色顔料の含有量は、着色感光性樹脂組成物の固形分に対し、70質量%以下であることが好ましい。これにより、感度、硬化後の塗膜の耐熱性、及び耐薬品性が良好に保たれる。 The content of the black pigment is more than 40% by mass with respect to the solid content of the colored photosensitive resin composition, but is preferably 45% by mass or more, and more preferably 50% by mass or more. . By making it more than 40 mass%, the colored photosensitive resin composition excellent in light-shielding property can be obtained. On the other hand, it is preferable that content of the said black pigment is 70 mass% or less with respect to solid content of a coloring photosensitive resin composition. Thereby, a sensitivity, the heat resistance of the coating film after hardening, and chemical resistance are kept favorable.
着色感光性樹脂組成物において、黒色顔料が上記含有量の範囲内で含有されることにより、遮光性(光学密度、OD値)の高い着色感光性樹脂組成物を得ることができる。具体的には、黒色顔料の含有量を40質量%より多くすることにより、本発明の着色感光性樹脂組成物を用いて厚さ1μmのブラックマトリックスを形成した場合における光学密度を4.0以上の値とすることができる。光学密度は、より好ましくは4.3以上であり、4.5以上であるとさらに好ましい。 In the colored photosensitive resin composition, when the black pigment is contained within the above content range, a colored photosensitive resin composition having high light shielding properties (optical density, OD value) can be obtained. Specifically, the optical density when the black matrix having a thickness of 1 μm is formed using the colored photosensitive resin composition of the present invention by increasing the black pigment content to more than 40% by mass is 4.0 or more. Value. The optical density is more preferably 4.3 or more, and even more preferably 4.5 or more.
また、高抵抗値化や色調の調製のために、遮光性能を低下させない範囲で、上記黒色顔料に、下記に挙げられる有機顔料や染料等の、他の着色剤を加えることもできる。 In addition, for the purpose of increasing the resistance value and adjusting the color tone, other colorants such as organic pigments and dyes listed below can be added to the black pigment as long as the light shielding performance is not lowered.
有機顔料としては、具体的には、カラーインデックス・ナンバー(C.I.No.)で、
黄色顔料:C.I.20、24、83、86、93、109、110、117、125、129、137、138、139、147、148、150、153、154、166、168、180、185、195
橙色顔料:C.I.36、43、51、55、59、61
赤色顔料:C.I.9、97、122、123、149、168、177、180、192、215、216、217、220、223、224、226、227、228、240、254
紫色顔料:C.I.19、23、29、30、37、40、50
青色顔料:C.I.15、15:3、15:6、22、60、64
緑色顔料:C.I.7、36
茶色顔料:C.I.23、25、26
として表されているものが透明性が高く、しかも耐熱性、耐候性、及び耐薬品性に優れているため、好適に用いることができる。
As an organic pigment, specifically, a color index number (CI No.),
Yellow pigment: C.I. I. 20, 24, 83, 86, 93, 109, 110, 117, 125, 129, 137, 138, 139, 147, 148, 150, 153, 154, 166, 168, 180, 185, 195
Orange pigment: C.I. I. 36, 43, 51, 55, 59, 61
Red pigment: C.I. I. 9, 97, 122, 123, 149, 168, 177, 180, 192, 215, 216, 217, 220, 223, 224, 226, 227, 228, 240, 254
Purple pigment: C.I. I. 19, 23, 29, 30, 37, 40, 50
Blue pigment: C.I. I. 15, 15: 3, 15: 6, 22, 60, 64
Green pigment: C.I. I. 7, 36
Brown pigment: C.I. I. 23, 25, 26
Can be suitably used because of its high transparency and excellent heat resistance, weather resistance, and chemical resistance.
また、カーボンブラックの赤みがかった色調を抑え、全体としてより好ましい黒色にするために、御国色素社製の「バイオレット分散液(バイオレット顔料10%含有)」、御国色素社製の「ブルー顔料分散液CFブルー(ブルー顔料20%含有)」等を混合することもできる。 In addition, in order to suppress the reddish color tone of carbon black and make the overall black more preferable, “Violet Dispersion (containing 10% violet pigment)” manufactured by Mikuni Dye and “Blue Pigment Dispersion CF” manufactured by Mikuni Dye Blue (containing 20% of blue pigment) "and the like can also be mixed.
また染料としては、具体的にはC.I.No.で、
黄色染料:C.I.ダイレクトイエロー1、C.I.ダイレクトイエロー11、C.I.ダイレクトイエロー12、C.I.ダイレクトイエロー28、C.I.アシッドイエロー1、C.I.アシッドイエロー3、C.I.アシッドイエロー11、C.I.アシッドイエロー17、C.I.アシッドイエロー23、C.I.アシッドイエロー38、C.I.アシッドイエロー40、C.I.アシッドイエロー42、C.I.アシッドイエロー76、C.I.アシッドイエロー98、C.I.ベイシックイエロー1、C.I.ディスパースイエロー3、C.I.ディスパースイエロー4、C.I.ディスパースイエロー7、C.I.ディスパースイエロー31、C.I.ディスパースイエロー61、C.I.ソルベントイエロー2、C.I.ソルベントイエロー14、C.I.ソルベントイエロー15、C.I.ソルベントイエロー16、C.I.ソルベントイエロー21、C.I.ソルベントイエロー33、C.I.ソルベントイエロー56
橙色染料:C.I.アシッドオレンジ1、C.I.アシッドオレンジ7、C.I.アシッドオレンジ8、C.I.アシッドオレンジ10、C.I.アシッドオレンジ20、C.I.アシッドオレンジ24、C.I.アシッドオレンジ28、C.I.アシッドオレンジ33、C.I.アシッドオレンジ56、C.I.アシッドオレンジ74、C.I.ダイレクトオレンジ1、C.I.ディスパースオレンジ5、C.I.ソルベントオレンジ1、C.I.ソルベントオレンジ2、C.I.ソルベントオレンジ5、C.I.ソルベントオレンジ6、C.I.ソルベントオレンジ45
赤色染料:C.I.ダイレクトレッド20、C.I.ダイレクトレッド37、C.I.ダイレクトレッド39、C.I.ダイレクトレッド44、C.I.アシッドレッド6、C.I.アシッドレッド8、C.I.アシッドレッド9、C.I.アシッドレッド13、C.I.アシッドレッド14、C.I.アシッドレッド18、C.I.アシッドレッド26、C.I.アシッドレッド27、C.I.アシッドレッド51、C.I.アシッドレッド52、C.I.アシッドレッド87、C.I.アシッドレッド88、C.I.アシッドレッド89、C.I.アシッドレッド92、C.I.アシッドレッド94、C.I.アシッドレッド97、C.I.アシッドレッド111、C.I.アシッドレッド114、C.I.アシッドレッド115、C.I.アシッドレッド134、C.I.アシッドレッド145、C.I.アシッドレッド154、C.I.アシッドレッド180、C.I.アシッドレッド183、C.I.アシッドレッド184、C.I.アシッドレッド186、C.I.アシッドレッド198、C.I.ベイシックレッド12、C.I.ベイシックレッド13、C.I.ディスパースレッド5、C.I.ディスパースレッド7、C.I.ディスパースレッド13、C.I.ディスパースレッド17、C.I.ディスパースレッド58、C.I.ソルベントレッド1、C.I.ソルベントレッド3、C.I.ソルベントレッド8、C.I.ソルベントレッド23、C.I.ソルベントレッド24、C.I.ソルベントレッド25、C.I.ソルベントレッド27、C.I.ソルベントレッド30、C.I.ソルベントレッド49、C.I.ソルベントレッド100
紫色染料:C.I.ダイレクトバイオレット22、C.I.アシッドバイオレット49、C.I.ベイシックバイオレット2、C.I.ベイシックバイオレット7、C.I.ベイシックバイオレット10、C.I.ディスパーバイオレット24
青色染料:C.I.ダイレクトブルー25、C.I.ダイレクトブルー86、C.I.ダイレクトブルー90、C.I.ダイレクトブルー108、C.I.アシッドブルー1、C.I.アシッドブルー7、C.I.アシッドブルー9、C.I.アシッドブルー15、C.I.アシッドブルー103、C.I.アシッドブルー104、C.I.アシッドブルー158、C.I.アシッドブルー161、C.I.ベイシックブルー1、C.I.ベイシックブルー3、C.I.ベイシックブルー9、C.I.ベイシックブルー25
緑色染料:C.I.アシッドグリーン3、C.I.アシッドグリーン9、C.I.アシッドグリーン16、C.I.ベイシックグリーン1、C.I.ベイシックグリーン4
茶色染料:C.I.ダイレクトブラウン6、C.I.ダイレクトブラウン58、C.I.ダイレクトブラウン95、C.I.ダイレクトブラウン101、C.I.ダイレクトブラウン173、C.I.アシッドブラウン14
等が好適に用いられる。
Specific examples of the dye include C.I. I. No. so,
Yellow dye: C.I. I. Direct Yellow 1, C.I. I. Direct Yellow 11, C.I. I. Direct Yellow 12, C.I. I. Direct Yellow 28, C.I. I. Acid Yellow 1, C.I. I. Acid Yellow 3, C.I. I. Acid Yellow 11, C.I. I. Acid Yellow 17, C.I. I. Acid Yellow 23, C.I. I. Acid Yellow 38, C.I. I. Acid Yellow 40, C.I. I. Acid Yellow 42, C.I. I. Acid Yellow 76, C.I. I. Acid Yellow 98, C.I. I. Basic Yellow 1, C.I. I. Disperse Yellow 3, C.I. I. Disperse Yellow 4, C.I. I. Disperse Yellow 7, C.I. I. Disperse Yellow 31, C.I. I. Disperse Yellow 61, C.I. I. Solvent Yellow 2, C.I. I. Solvent Yellow 14, C.I. I. Solvent Yellow 15, C.I. I. Solvent Yellow 16, C.I. I. Solvent Yellow 21, C.I. I. Solvent Yellow 33, C.I. I. Solvent Yellow 56
Orange dye: C.I. I. Acid Orange 1, C.I. I. Acid Orange 7, C.I. I. Acid Orange 8, C.I. I. Acid Orange 10, C.I. I. Acid Orange 20, C.I. I. Acid Orange 24, C.I. I. Acid Orange 28, C.I. I. Acid Orange 33, C.I. I. Acid Orange 56, C.I. I. Acid Orange 74, C.I. I. Direct Orange 1, C.I. I. Disperse Orange 5, C.I. I. Solvent Orange 1, C.I. I. Solvent Orange 2, C.I. I. Solvent Orange 5, C.I. I. Solvent Orange 6, C.I. I. Solvent Orange 45
Red dye: C.I. I. Direct Red 20, C.I. I. Direct Red 37, C.I. I. Direct Red 39, C.I. I. Direct Red 44, C.I. I. Acid Red 6, C.I. I. Acid Red 8, C.I. I. Acid Red 9, C.I. I. Acid Red 13, C.I. I. Acid Red 14, C.I. I. Acid Red 18, C.I. I. Acid Red 26, C.I. I. Acid Red 27, C.I. I. Acid Red 51, C.I. I. Acid Red 52, C.I. I. Acid Red 87, C.I. I. Acid Red 88, C.I. I. Acid Red 89, C.I. I. Acid Red 92, C.I. I. Acid Red 94, C.I. I. Acid Red 97, C.I. I. Acid Red 111, C.I. I. Acid Red 114, C.I. I. Acid Red 115, C.I. I. Acid Red 134, C.I. I. Acid Red 145, C.I. I. Acid Red 154, C.I. I. Acid Red 180, C.I. I. Acid Red 183, C.I. I. Acid Red 184, C.I. I. Acid Red 186, C.I. I. Acid Red 198, C.I. I. Basic Red 12, C.I. I. Basic Red 13, C.I. I. Disper thread 5, C.I. I. Disper thread 7, C.I. I. Disperse thread 13, C.I. I. Disperse thread 17, C.I. I. Disperse thread 58, C.I. I. Solvent Red 1, C.I. I. Solvent Red 3, C.I. I. Solvent Red 8, C.I. I. Solvent Red 23, C.I. I. Solvent Red 24, C.I. I. Solvent Red 25, C.I. I. Solvent Red 27, C.I. I. Solvent Red 30, C.I. I. Solvent Red 49, C.I. I. Solvent Red 100
Purple dye: C.I. I. Direct violet 22, C.I. I. Acid Violet 49, C.I. I. Basic Violet 2, C.I. I. Basic Violet 7, C.I. I. Basic Violet 10, C.I. I. Disper Violet 24
Blue dye: C.I. I. Direct Blue 25, C.I. I. Direct Blue 86, C.I. I. Direct Blue 90, C.I. I. Direct Blue 108, C.I. I. Acid Blue 1, C.I. I. Acid Blue 7, C.I. I. Acid Blue 9, C.I. I. Acid Blue 15, C.I. I. Acid Blue 103, C.I. I. Acid Blue 104, C.I. I. Acid Blue 158, C.I. I. Acid Blue 161, C.I. I. Basic Blue 1, C.I. I. Basic Blue 3, C.I. I. Basic Blue 9, C.I. I. Basic Blue 25
Green dye: C.I. I. Acid Green 3, C.I. I. Acid Green 9, C.I. I. Acid Green 16, C.I. I. Basic Green 1, C.I. I. Basic green 4
Brown dye: C.I. I. Direct Brown 6, C.I. I. Direct Brown 58, C.I. I. Direct Brown 95, C.I. I. Direct Brown 101, C.I. I. Direct Brown 173, C.I. I. Acid Brown 14
Etc. are preferably used.
また、赤色、緑色、青色、シアン、マゼンダ、及び黄色等の有彩色の場合、例えば、特開昭60−237403号公報、及び特開平4−310901号公報に記載の顔料、又は染料を挙げることができる。 In the case of chromatic colors such as red, green, blue, cyan, magenta, and yellow, mention may be made of, for example, the pigments or dyes described in JP-A-60-237403 and JP-A-4-310901. Can do.
[(S)溶剤]
本発明における(S)溶剤は、少なくとも1種の(R)難揮発性溶剤を含有する。
[(S) solvent]
The (S) solvent in the present invention contains at least one (R) hardly volatile solvent.
((R)難揮発性溶剤)
(R)難揮発性溶剤は、溶解パラメーターが8.7(cal/cm3)1/2以上、好ましくは9(cal/cm3)1/2以上であり、大気圧下における沸点が200℃以上250℃以下である。沸点が200℃以上250℃以下である難揮発性溶剤の溶解パラメーターが8.7(cal/cm3)1/2以上であることにより、難揮発性溶剤と着色感光性樹脂組成物における黒色顔料以外の固形成分との相溶性が向上し、減圧乾燥後において、着色感光性樹脂組成物から形成される塗膜における凝集物の発生を防止することができる。これは、着色感光性樹脂組成物から形成される塗膜において、難揮発性溶剤が減圧乾燥の末期まで残留して黒色顔料の分散性が良好に保たれるため、塗膜中での黒色顔料の凝集が抑制されるためであると考えられる。また、難揮発性溶剤は、溶解パラメーターが11(cal/cm3)1/2以下であることが好ましい。溶解パラメーターが11(cal/cm3)1/2以下であることにより、難揮発性溶剤と着色感光性樹脂組成物における黒色顔料以外の固形成分との相溶性の低下を防止することができ、凝集物の発生をより抑制することができる。
((R) hardly volatile solvent)
(R) The hardly volatile solvent has a solubility parameter of 8.7 (cal / cm 3 ) 1/2 or more, preferably 9 (cal / cm 3 ) 1/2 or more, and has a boiling point of 200 ° C. under atmospheric pressure. The temperature is 250 ° C. or higher. When the solubility parameter of the hardly volatile solvent having a boiling point of 200 ° C. or more and 250 ° C. or less is 8.7 (cal / cm 3 ) 1/2 or more, the hardly volatile solvent and the black pigment in the colored photosensitive resin composition Compatibility with solid components other than the above can be improved, and after drying under reduced pressure, generation of aggregates in the coating film formed from the colored photosensitive resin composition can be prevented. This is because in the coating film formed from the colored photosensitive resin composition, the non-volatile solvent remains until the end of the vacuum drying, and the dispersibility of the black pigment is maintained, so the black pigment in the coating film This is thought to be due to the suppression of aggregation. Further, the hardly volatile solvent preferably has a solubility parameter of 11 (cal / cm 3 ) 1/2 or less. When the solubility parameter is 11 (cal / cm 3 ) 1/2 or less, it is possible to prevent a decrease in compatibility between the hardly volatile solvent and the solid component other than the black pigment in the colored photosensitive resin composition, The generation of aggregates can be further suppressed.
さらに、上記沸点が、200℃以上であることにより、減圧乾燥後の塗膜の表面荒れや乾燥ムラを防止できる。また、沸点が250℃以下であることにより、難揮発性溶剤が着色感光性樹脂組成物のパターン形成後のポストベークにおいて容易に除去される。つまり、本発明の着色感光性樹脂組成物から形成されるブラックマトリックスにおける溶剤の残留を防止できる。さらに、特に面積の大きな基板を用いる場合においても、塗膜の乾燥ムラを防止できる。 Furthermore, when the boiling point is 200 ° C. or higher, it is possible to prevent surface roughness and uneven drying of the coating film after drying under reduced pressure. Moreover, when a boiling point is 250 degrees C or less, a hardly volatile solvent is easily removed in the post-baking after the pattern formation of a coloring photosensitive resin composition. That is, it is possible to prevent the solvent from remaining in the black matrix formed from the colored photosensitive resin composition of the present invention. Further, even when a substrate having a large area is used, drying unevenness of the coating film can be prevented.
また、難揮発性溶剤の、20℃における飽和蒸気圧は2mmHg以下であることが好ましい。 Moreover, it is preferable that the saturation vapor pressure in 20 degreeC of a hardly volatile solvent is 2 mmHg or less.
加えて、難揮発性溶剤は、100℃における重量変化率が、10TG%以下であることが好ましい。難揮発性溶剤の重量変化率を10TG%以下にすることにより、本発明の着色感光性樹脂組成物から形成された塗膜における減圧乾燥後の凝集物の発生を、より一層防止できる。また、乾燥後の塗膜における表面荒れや乾燥ムラを防止することもできる。上記効果に一層優れるという点において、上記重量変化率は、1TG%以上9TG%以下であることがより好ましく、4TG%以上8TG%以下であることがさらに好ましい。 In addition, the hardly volatile solvent preferably has a weight change rate at 100 ° C. of 10 TG% or less. By setting the weight change rate of the hardly volatile solvent to 10 TG% or less, it is possible to further prevent the occurrence of aggregates after drying under reduced pressure in the coating film formed from the colored photosensitive resin composition of the present invention. In addition, surface roughness and drying unevenness in the dried coating film can be prevented. The weight change rate is more preferably 1 TG% or more and 9 TG% or less, and further preferably 4 TG% or more and 8 TG% or less in that the effect is further improved.
ここで、「100℃における重量変化率」とは、単位時間当たりの溶剤の重量変化を指す。本明細書では、100℃に保温した熱天秤に溶剤を添加し、大気中において、溶剤の重量の変化量を求めることにより、測定されたものである。 Here, “weight change rate at 100 ° C.” refers to a change in the weight of the solvent per unit time. In the present specification, the measurement is performed by adding a solvent to a thermobalance kept at 100 ° C. and determining the amount of change in the weight of the solvent in the atmosphere.
難揮発性溶剤の含有量は、溶剤の全量に対し、0.1質量%以上であることが好ましい。難揮発性溶剤の含有量が0.1質量%以上であることにより、着色感光性樹脂組成物から形成される塗膜における、凝集物の発生をより抑えることができると共に、表面荒れや乾燥ムラをも防止することができる。また、難揮発性溶剤の含有量は、溶剤の全量に対して10質量%以下であることが好ましい。難揮発性溶剤の含有量が10質量%以下であることにより、着色感光性樹脂組成物の塗布性や膜形成能を良好に保つことができると共に、難揮発性溶剤のポストベーク時の除去を容易にし、形成されるブラックマトリックスに溶剤が残留することを防止できる。上記効果を一層高めるため、上記含有量は、1質量%以上8質量%以下であることがより好ましく、3質量%以上7質量%以下であることがさらに好ましい。 The content of the hardly volatile solvent is preferably 0.1% by mass or more based on the total amount of the solvent. When the content of the hardly volatile solvent is 0.1% by mass or more, generation of aggregates in the coating film formed from the colored photosensitive resin composition can be further suppressed, and surface roughness and drying unevenness can be suppressed. Can also be prevented. Moreover, it is preferable that content of a hardly volatile solvent is 10 mass% or less with respect to the whole quantity of a solvent. When the content of the hardly volatile solvent is 10% by mass or less, the coating property and the film forming ability of the colored photosensitive resin composition can be kept good, and the removal of the hardly volatile solvent at the time of post-baking can be performed. It is easy to prevent the solvent from remaining in the black matrix to be formed. In order to further enhance the above effects, the content is more preferably 1% by mass or more and 8% by mass or less, and further preferably 3% by mass or more and 7% by mass or less.
難揮発性溶剤としては、具体的には、1,3−ブチレングリコールジアセテート(1,3−BGA)、ジプロピレングリコールメチルエーテルアセテート(DPMA)、ジエチレングリコールモノエチルエーテルアセテート(EDGAC)、又はジエチレングリコールモノブチルエーテルアセテート(BDGAC)を挙げることができる。これらの中でも、1,3−ブチレングリコールジアセテート及びジエチレングリコールモノブチルエーテルアセテートが好ましい。 Specific examples of the hardly volatile solvent include 1,3-butylene glycol diacetate (1,3-BGA), dipropylene glycol methyl ether acetate (DPMA), diethylene glycol monoethyl ether acetate (EDGAC), or diethylene glycol mono Mention may be made of butyl ether acetate (BDGAC). Among these, 1,3-butylene glycol diacetate and diethylene glycol monobutyl ether acetate are preferable.
溶剤は、上記難揮発性溶剤以外の溶剤(その他の溶剤)を含有していてもよい。その他の溶剤としては、特に限定されるものではなく、着色感光性樹脂組成物に通常用いられる溶剤を用いることができる。その他の溶剤として、具体的には、エチレングリコールモノメチルエーテル、エチレングリコールモノエチルエーテル、エチレングリコールモノ−n−プロピルエーテル、エチレングリコールモノ−n−ブチルエーテル、ジエチレングリコールモノメチルエーテル、ジエチレングリコールモノエチルエーテル、ジエチレングリコールモノ−n−プロピルエーテル、ジエチレングリコールモノ−n−ブチルエーテル、トリエチレングリコールモノメチルエーテル、トリエチレングリコールモノエチルエーテル、プロピレングリコールモノメチルエーテル、プロピレングリコールモノエチルエーテル、プロピレングリコールモノ−n−プロピルエーテル、プロピレングリコールモノ−n−ブチルエーテル、ジプロピレングリコールモノメチルエーテル、ジプロピレングリコールモノエチルエーテル、ジプロピレングリコールモノ−n−プロピルエーテル、ジプロピレングリコールモノ−n−ブチルエーテル、トリプロピレングリコールモノメチルエーテル、及びトリプロピレングリコールモノエチルエーテル等の(ポリ)アルキレングリコールモノアルキルエーテル類;エチレングリコールモノメチルエーテルアセテート、エチレングリコールモノエチルエーテルアセテート、ジエチレングリコールモノメチルエーテルアセテート、プロピレングリコールモノメチルエーテルアセテート、及びプロピレングリコールモノエチルエーテルアセテート等の(ポリ)アルキレングリコールモノアルキルエーテルアセテート類;ジエチレングリコールジメチルエーテル、ジエチレングリコールメチルエチルエーテル、ジエチレングリコールジエチルエーテル、及びテトラヒドロフラン等の他のエーテル類;メチルエチルケトン、シクロヘキサノン、2−ヘプタノン、及び3−ヘプタノン等のケトン類;2−ヒドロキシプロピオン酸メチル、及び2−ヒドロキシプロピオン酸エチル等の乳酸アルキルエステル類;2−ヒドロキシ−2−メチルプロピオン酸エチル、3−メトキシプロピオン酸メチル、3−メトキシプロピオン酸エチル、3−エトキシプロピオン酸メチル、3−エトキシプロピオン酸エチル、エトキシ酢酸エチル、ヒドロキシ酢酸エチル、2−ヒドロキシ−3−メチルブタン酸メチル、3−メトキシブチルアセテート、3−メチル−3−メトキシブチルアセテート、3−メチル−3−メトキシブチルプロピオネート、酢酸エチル、酢酸n−プロピル、酢酸i−プロピル、酢酸n−ブチル、酢酸i−ブチル、蟻酸n−ペンチル、酢酸i−ペンチル、プロピオン酸n−ブチル、酪酸エチル、酪酸n−プロピル、酪酸i−プロピル、酪酸n−ブチル、ピルビン酸メチル、ピルビン酸エチル、ピルビン酸n−プロピル、アセト酢酸メチル、アセト酢酸エチル、及び2−オキソブタン酸エチル等の他のエステル類;トルエン、及びキシレン等の芳香族炭化水素類;並びにN−メチルピロリドン、N,N−ジメチルホルムアミド、及びN,N−ジメチルアセトアミド等のアミド類等が挙げられる。これらの中でも、3−メトキシブチルアセテートは光重合性化合物、光重合開始剤に対して優れた溶解性を示すと共に、黒色顔料等の不溶性成分の分散性を良好にするところから好適である。また、プロピレングリコールモノメチルエーテルアセテート、及びシクロヘキサノンも好ましい。その他の溶剤は、単独で用いてもよく、2種以上を組み合わせて用いてもよい。特に、3−メトキシブチルアセテート、プロピレングリコールモノメチルエーテルアセテート、及びシクロヘキサノンの3種を組み合わせて用いることが好ましい。 The solvent may contain a solvent other than the hardly volatile solvent (other solvents). The other solvent is not particularly limited, and a solvent usually used for the colored photosensitive resin composition can be used. Specific examples of other solvents include ethylene glycol monomethyl ether, ethylene glycol monoethyl ether, ethylene glycol mono-n-propyl ether, ethylene glycol mono-n-butyl ether, diethylene glycol monomethyl ether, diethylene glycol monoethyl ether, diethylene glycol mono- n-propyl ether, diethylene glycol mono-n-butyl ether, triethylene glycol monomethyl ether, triethylene glycol monoethyl ether, propylene glycol monomethyl ether, propylene glycol monoethyl ether, propylene glycol mono-n-propyl ether, propylene glycol mono-n -Butyl ether, dipropylene glycol monomethyl ether (Poly) alkylene glycol monoalkyl such as dipropylene glycol monoethyl ether, dipropylene glycol mono-n-propyl ether, dipropylene glycol mono-n-butyl ether, tripropylene glycol monomethyl ether, and tripropylene glycol monoethyl ether Ethers; (poly) alkylene glycol monoalkyl ether acetates such as ethylene glycol monomethyl ether acetate, ethylene glycol monoethyl ether acetate, diethylene glycol monomethyl ether acetate, propylene glycol monomethyl ether acetate, and propylene glycol monoethyl ether acetate; diethylene glycol dimethyl ether; Diethylene glycol Other ethers such as ruethyl ether, diethylene glycol diethyl ether, and tetrahydrofuran; ketones such as methyl ethyl ketone, cyclohexanone, 2-heptanone, and 3-heptanone; methyl 2-hydroxypropionate and ethyl 2-hydroxypropionate Lactic acid alkyl esters; ethyl 2-hydroxy-2-methylpropionate, methyl 3-methoxypropionate, ethyl 3-methoxypropionate, methyl 3-ethoxypropionate, ethyl 3-ethoxypropionate, ethyl ethoxyacetate, hydroxyacetic acid Ethyl, 2-hydroxy-3-methylbutanoic acid methyl, 3-methoxybutyl acetate, 3-methyl-3-methoxybutyl acetate, 3-methyl-3-methoxybutylpropionate, ethyl acetate N-propyl acetate, i-propyl acetate, n-butyl acetate, i-butyl acetate, n-pentyl formate, i-pentyl acetate, n-butyl propionate, ethyl butyrate, n-propyl butyrate, i-propyl butyrate , Other esters such as n-butyl butyrate, methyl pyruvate, ethyl pyruvate, n-propyl pyruvate, methyl acetoacetate, ethyl acetoacetate, and ethyl 2-oxobutanoate; aromatic carbonization such as toluene and xylene Hydrogen; and amides such as N-methylpyrrolidone, N, N-dimethylformamide, and N, N-dimethylacetamide. Among these, 3-methoxybutyl acetate is preferable because it exhibits excellent solubility in a photopolymerizable compound and a photopolymerization initiator and improves dispersibility of an insoluble component such as a black pigment. Also preferred are propylene glycol monomethyl ether acetate and cyclohexanone. Other solvents may be used alone or in combination of two or more. It is particularly preferable to use a combination of 3-methoxybutyl acetate, propylene glycol monomethyl ether acetate, and cyclohexanone.
なお、本発明の着色感光性樹脂組成物における溶剤は、固形分の濃度が1質量%以上50質量%以下となる量であることが好ましく、5質量%以上30質量%以下となる量であることがより好ましい。溶剤の量が上記範囲内にあることにより、着色感光性樹脂組成物における膜形成能や塗布性を良好に保つことができる。 The solvent in the colored photosensitive resin composition of the present invention is preferably in an amount such that the solid content concentration is 1% by mass or more and 50% by mass or less, and is an amount that provides 5% by mass or more and 30% by mass or less. It is more preferable. When the amount of the solvent is within the above range, the film forming ability and the coating property in the colored photosensitive resin composition can be kept good.
[その他の成分]
本発明の着色感光性樹脂組成物には、必要に応じて添加剤を含有させることができる。添加剤としては、熱重合禁止剤、消泡剤、界面活性剤、増感剤、硬化促進剤、光架橋剤、光増感剤、分散剤、分散助剤、充填剤、密着促進剤、酸化防止剤、紫外線吸収剤、及び凝集防止剤等を挙げることができる。分散剤としては、ウレタン樹脂系分散剤等の高分子分散剤が好ましく用いられる。
[Other ingredients]
The colored photosensitive resin composition of the present invention may contain an additive as necessary. Additives include thermal polymerization inhibitors, antifoaming agents, surfactants, sensitizers, curing accelerators, photocrosslinking agents, photosensitizers, dispersants, dispersion aids, fillers, adhesion promoters, oxidation Examples thereof include an inhibitor, an ultraviolet absorber, and an aggregation inhibitor. As the dispersant, a polymer dispersant such as a urethane resin dispersant is preferably used.
[着色感光性樹脂組成物の調製方法]
本発明の着色感光性樹脂組成物は、上記各成分を全て撹拌機で混合することにより得られる。なお、得られた混合物が均一なものとなるようフィルターを用いて濾過してもよい。
[Method for preparing colored photosensitive resin composition]
The colored photosensitive resin composition of the present invention can be obtained by mixing all the above components with a stirrer. In addition, you may filter using a filter so that the obtained mixture may become uniform.
<ブラックマトリックス及びカラーフィルター>
カラーフィルターにおけるブラックマトリックスは、本発明の着色感光性樹脂組成物を用いて形成される。すなわち、ガラス、ポリエチレンテレフタレート、アクリル樹脂、及びポリカーボネート等からなる基板に、本発明の着色感光性樹脂組成物をロールコータ、リバースコーター、及びバーコーター等の接触転写型塗布装置やスピンナー(回転式塗布装置)、スリットコーター、及びカーテンフローコーター等の非接触型塗布装置を用いて基板上に塗布する。
<Black matrix and color filter>
The black matrix in the color filter is formed using the colored photosensitive resin composition of the present invention. That is, the colored photosensitive resin composition of the present invention is applied to a substrate made of glass, polyethylene terephthalate, acrylic resin, polycarbonate, and the like. Apparatus), a slit coater, and a curtain flow coater.
次いで、塗布された着色感光性樹脂組成物を乾燥させて塗膜を形成する。乾燥方法は特に限定されないが、例えば、真空乾燥装置を用いて室温にて減圧乾燥し、その後、ホットプレートにて80℃以上120℃以下、好ましくは90℃以上100℃以下の温度にて60秒間以上120秒間以下乾燥する方法を挙げることができる。 Next, the applied colored photosensitive resin composition is dried to form a coating film. The drying method is not particularly limited, and for example, vacuum drying is performed at room temperature using a vacuum drying apparatus, and then, at a temperature of 80 ° C. to 120 ° C., preferably 90 ° C. to 100 ° C. for 60 seconds on a hot plate. The method of drying for 120 seconds or less can be mentioned.
次いで、この塗膜に、ネガ型のマスクを介して紫外線、エキシマレーザー光等の活性エネルギー線を照射して部分的に露光する。照射するエネルギー線量は、着色感光性樹脂組成物の組成によっても異なるが、例えば30mJ/cm2以上2000mJ/cm2以下であることが好ましい。 Next, this coating film is partially exposed by irradiating active energy rays such as ultraviolet rays and excimer laser light through a negative mask. Energy dose to be irradiated also differ depending on the composition of the colored photosensitive resin composition is preferably, for example, 30 mJ / cm 2 or more 2000 mJ / cm 2 or less.
次いで、露光後の塗膜を、現像液により現像することによって所望の形状にパターニングする。現像方法は特に限定されず、例えば浸漬法、スプレー法等を用いることができる。現像液としては、モノエタノールアミン、ジエタノールアミン、及びトリエタノールアミン等の有機系のものや、水酸化ナトリウム、水酸化カリウム、炭酸ナトリウム、アンモニア、及び4級アンモニウム塩等の水溶液が挙げられる。 Next, the exposed coating film is developed into a desired shape by developing with a developer. The development method is not particularly limited, and for example, an immersion method, a spray method, or the like can be used. Examples of the developer include organic ones such as monoethanolamine, diethanolamine, and triethanolamine, and aqueous solutions such as sodium hydroxide, potassium hydroxide, sodium carbonate, ammonia, and quaternary ammonium salts.
次いで、現像後のパターンを220℃〜250℃程度、好ましくは230℃〜240℃程度でポストベークを行う。この際、形成されたパターンを全面露光することが好ましい。以上により、所定のパターン形状を有するブラックマトリックスを形成することができる。 Next, the pattern after development is post-baked at about 220 ° C. to 250 ° C., preferably about 230 ° C. to 240 ° C. At this time, it is preferable to expose the entire surface of the formed pattern. As described above, a black matrix having a predetermined pattern shape can be formed.
以上の操作を、赤色、緑色、及び青色の顔料が分散された着色感光性樹脂組成物について行って、各色の画素パターンを形成する。これにより、カラーフィルターが形成される。 The above operation is performed on the colored photosensitive resin composition in which red, green, and blue pigments are dispersed to form pixel patterns of each color. Thereby, a color filter is formed.
赤色、緑色、及び青色の顔料が分散された着色感光性樹脂組成物は、従来公知のものを使用することができる。 Conventionally known colored photosensitive resin compositions in which red, green, and blue pigments are dispersed can be used.
なお、本発明のカラーフィルターの製造にあたっては、ブラックマトリックスによって区画された各領域に赤色、緑色、及び青色の各色のインクをインクジェットノズルから吐出し、溜められたインクを熱又は光で硬化させ、カラーフィルターを製造することもできる。 In the production of the color filter of the present invention, the ink of each color of red, green, and blue is ejected from the inkjet nozzles in each region partitioned by the black matrix, and the stored ink is cured by heat or light, Color filters can also be manufactured.
本発明の着色感光性樹脂組成物は、基板上に塗布後、真空乾燥装置を用いた減圧乾燥を行う際においても、凝集物の発生を防止することができ、遮光性の高いブラックマトリックスを形成することができる。 The colored photosensitive resin composition of the present invention can prevent the formation of aggregates and form a black matrix with high light-shielding properties even when drying under reduced pressure using a vacuum drying apparatus after coating on a substrate. can do.
<液晶表示ディスプレイ>
本発明の液晶表示ディスプレイは、本発明のブラックマトリックスを有するカラーフィルターを備えるものである。本発明の液晶表示ディスプレイを製造するに当たっては、基板上に、上記カラーフィルターを形成し、次いで、電極、スペーサー等を順次形成する。そして、もう一枚の基板上に電極等を形成し、両者を張り合わせて所定量の液晶を注入、封止して、常法により製造される。
<Liquid crystal display>
The liquid crystal display of the present invention includes the color filter having the black matrix of the present invention. In manufacturing the liquid crystal display of the present invention, the color filter is formed on a substrate, and then electrodes, spacers, and the like are sequentially formed. Then, an electrode or the like is formed on another substrate, the two are bonded together, and a predetermined amount of liquid crystal is injected and sealed.
<実施例1>
[光重合性化合物の合成]
まず、500mlの四つ口フラスコ中に、ビスフェノールフルオレン型エポキシ樹脂235g(エポキシ当量235)とテトラメチルアンモニウムクロライド110mg、2,6−ジ−tert−ブチル−4−メチルフェノール100mg、及びアクリル酸72.0gを仕込み、これに25ml/分の速度で空気を吹き込みながら90℃〜100℃で加熱溶解した。次に、溶液が白濁した状態のまま徐々に昇温し、120℃に加熱して完全に溶解させた。ここで溶液は次第に透明粘稠になったが、そのまま撹拌を継続した。この間、酸価を測定し、1.0mgKOH/g未満になるまで加熱撹拌を続けた。酸価が目標に達するまで12時間を要した。そして室温まで冷却し、ビスフェノールフルオレン型エポキシアクリレートを得た。
<Example 1>
[Synthesis of photopolymerizable compound]
First, in a 500 ml four-necked flask, 235 g of bisphenolfluorene type epoxy resin (epoxy equivalent 235), 110 mg of tetramethylammonium chloride, 100 mg of 2,6-di-tert-butyl-4-methylphenol, and 72. 0 g was charged and dissolved by heating at 90 ° C. to 100 ° C. while blowing air at a rate of 25 ml / min. Next, the temperature was gradually raised while the solution was clouded, and the solution was heated to 120 ° C. to be completely dissolved. Here, the solution gradually became transparent and viscous, but stirring was continued as it was. During this time, the acid value was measured, and heating and stirring were continued until the acid value was less than 1.0 mgKOH / g. It took 12 hours for the acid value to reach the target. And it cooled to room temperature and obtained the bisphenol fluorene type epoxy acrylate.
次いで、このようにして得られた上記のビスフェノールフルオレン型エポキシアクリレート307.0gに3−メトキシブチルアセテート600gを加えて溶解した後、ベンゾフェノンテトラカルボン酸二無水物80.5g、及び臭化テトラエチルアンモニウム1gを混合し、徐々に昇温して110℃〜115℃で4時間反応させた。酸無水物の消失を確認した後、1,2,3,6−テトラヒドロ無水フタル酸38.0gを混合し、90℃で6時間反応させ、光重合性化合物1を得た。酸無水物の消失はIRスペクトルにより確認した。 Next, after adding 600 g of 3-methoxybutyl acetate to 307.0 g of the bisphenolfluorene type epoxy acrylate thus obtained and dissolving, 80.5 g of benzophenone tetracarboxylic dianhydride and 1 g of tetraethylammonium bromide Were mixed, gradually heated, and reacted at 110 ° C. to 115 ° C. for 4 hours. After confirming the disappearance of the acid anhydride, 38.0 g of 1,2,3,6-tetrahydrophthalic anhydride was mixed and reacted at 90 ° C. for 6 hours to obtain a photopolymerizable compound 1. The disappearance of the acid anhydride was confirmed by IR spectrum.
光重合性化合物1(Mw:3400、固形分:55%、溶剤:3−メトキシブチルアセテート);23.6質量部、ジペンタエリスリトールヘキサアクリレート;4.8質量部、光重合開始剤(「IRGACURE OXE 02」、チバスペシャルティケミカルズ社製);1.4質量部、及びカーボン分散液(「CFブラックEX−1455」、御国色素社製、高抵抗カーボン:24%、分散剤:5%、溶剤:3−メトキシブチルアセテート);100質量部を用い、固形分濃度が18質量%となるように溶剤で調整した。なお、溶剤は、3−メトキシブチルアセテート:シクロヘキサノン:プロピレングリコールモノメチルエーテルアセテート:1,3−ブチレングリコールジアセテート=55:30:12:3(質量比)となるようにした。これらの混合物を、撹拌機で2時間混合した後、5μmメンブランフィルターで濾過し、着色感光性樹脂組成物を得た。 Photopolymerizable compound 1 (Mw: 3400, solid content: 55%, solvent: 3-methoxybutyl acetate); 23.6 parts by mass, dipentaerythritol hexaacrylate; 4.8 parts by mass, photopolymerization initiator (“IRGACURE” OXE 02 ", manufactured by Ciba Specialty Chemicals Co., Ltd .; 1.4 parts by mass, and a carbon dispersion (" CF Black EX-1455 "manufactured by Mikuni Dye Co., Ltd., high resistance carbon: 24%, dispersant: 5%, solvent: 3-methoxybutyl acetate); 100 parts by mass was adjusted with a solvent so that the solid content concentration was 18% by mass. The solvent was 3-methoxybutyl acetate: cyclohexanone: propylene glycol monomethyl ether acetate: 1,3-butylene glycol diacetate = 55: 30: 12: 3 (mass ratio). These mixtures were mixed for 2 hours with a stirrer and then filtered with a 5 μm membrane filter to obtain a colored photosensitive resin composition.
なお、着色感光性樹脂組成物の調製に用いた各溶剤の、大気圧下における沸点、100℃における重量変化率、及び溶解パラメーターの値を表1に、着色感光性樹脂組成物中における、全固形分中のカーボンブラック(CB)含有率を表2に示した。 In addition, Table 1 shows the boiling point under atmospheric pressure, the weight change rate at 100 ° C., and the value of the solubility parameter of each solvent used for the preparation of the colored photosensitive resin composition. Table 2 shows the carbon black (CB) content in the solid content.
[塗膜の形成]
上記着色感光性樹脂組成物を680mm×880mmのガラス基板上に塗布した後、66Paで30秒間減圧乾燥し、次いで110℃で120秒間プリベークして約1.0μmの膜厚を有する塗膜を得た。
[Formation of coating film]
After coating the colored photosensitive resin composition on a glass substrate of 680 mm × 880 mm, it is dried under reduced pressure at 66 Pa for 30 seconds, and then pre-baked at 110 ° C. for 120 seconds to obtain a coating film having a film thickness of about 1.0 μm. It was.
<実施例2>
難揮発性溶剤として、1,3−ブチレングリコールジアセテートの代わりにジエチレングリコールモノエチルエーテルアセテートを用いた点以外は、実施例1と同様の方法により着色感光性樹脂組成物を調製し、当該着色感光性樹脂組成物を実施例1と同様の方法によりガラス基板上に塗布した。
<Example 2>
A colored photosensitive resin composition was prepared in the same manner as in Example 1 except that diethylene glycol monoethyl ether acetate was used in place of 1,3-butylene glycol diacetate as the hardly volatile solvent. The functional resin composition was applied on a glass substrate in the same manner as in Example 1.
<実施例3>
難揮発性溶剤として、1,3−ブチレングリコールジアセテートを用い、溶剤を3−メトキシブチルアセテート:シクロヘキサノン:プロピレングリコールモノメチルエーテルアセテート:1,3−ブチレングリコールジアセテート=55:26:12:7(質量比)とした点以外は、実施例1と同様の方法により着色感光性樹脂組成物を調製し、当該着色感光性樹脂組成物を実施例1と同様の方法によりガラス基板上に塗布した。
<Example 3>
1,3-butylene glycol diacetate was used as the hardly volatile solvent, and the solvent was 3-methoxybutyl acetate: cyclohexanone: propylene glycol monomethyl ether acetate: 1,3-butylene glycol diacetate = 55: 26: 12: 7 ( A colored photosensitive resin composition was prepared by the same method as in Example 1 except that the weight ratio was set, and the colored photosensitive resin composition was applied on a glass substrate by the same method as in Example 1.
<実施例4>
光重合性化合物1(Mw:3400、固形分:55%、溶剤:3−メトキシブチルアセテート);24.5質量部、ジペンタエリスリトールヘキサアクリレート;4.5質量部、光重合開始剤(「IRGACURE OXE 02」、チバスペシャルティケミカルズ社製);1.4質量部、及びカーボン分散液として、「カーボン分散液CFブラック」(カーボン濃度:20%、分散剤:5%、溶剤:3−メトキシブチルアセテート、御国色素社製);100質量部を用いた点以外は、実施例1と同様の方法により着色感光性樹脂組成物を調製し、当該着色感光性樹脂組成物を実施例1と同様の方法によりガラス基板上に塗布した。
<Example 4>
Photopolymerizable compound 1 (Mw: 3400, solid content: 55%, solvent: 3-methoxybutyl acetate); 24.5 parts by mass, dipentaerythritol hexaacrylate; 4.5 parts by mass, photopolymerization initiator (“IRGACURE” OXE 02 ", manufactured by Ciba Specialty Chemicals Co., Ltd .; 1.4 parts by mass and, as a carbon dispersion," carbon dispersion CF black "(carbon concentration: 20%, dispersant: 5%, solvent: 3-methoxybutyl acetate A colored photosensitive resin composition was prepared by the same method as in Example 1 except that 100 parts by mass was used, and the colored photosensitive resin composition was prepared in the same manner as in Example 1. Was applied onto a glass substrate.
<実施例5>
難揮発性溶剤として、1,3−ブチレングリコールジアセテートの代わりにジプロピレングリコールメチルエーテルアセテートを用い、溶剤を3−メトキシブチルアセテート:シクロヘキサノン:プロピレングリコールモノメチルエーテルアセテート:ジプロピレングリコールメチルエーテルアセテート=65:15:15:5(質量比)とした点以外は、実施例1と同様の方法により着色感光性樹脂組成物を調製し、当該着色感光性樹脂組成物を実施例1と同様の方法によりガラス基板上に塗布した。
<Example 5>
As the hardly volatile solvent, dipropylene glycol methyl ether acetate is used instead of 1,3-butylene glycol diacetate, and the solvent is 3-methoxybutyl acetate: cyclohexanone: propylene glycol monomethyl ether acetate: dipropylene glycol methyl ether acetate = 65 : A colored photosensitive resin composition was prepared by the same method as in Example 1 except that the ratio was 15: 15: 5 (mass ratio), and the colored photosensitive resin composition was prepared by the same method as in Example 1. It apply | coated on the glass substrate.
<実施例6>
難揮発性溶剤として、1,3−ブチレングリコールジアセテートの代わりにジエチレングリコールモノブチルエーテルアセテートを用い、溶剤を3−メトキシブチルアセテート:シクロヘキサノン:プロピレングリコールモノメチルエーテルアセテート:ジエチレングリコールモノブチルエーテルアセテート=65:15:15:5(質量比)とした点以外は、実施例1と同様の方法により着色感光性樹脂組成物を調製し、当該着色感光性樹脂組成物を実施例1と同様の方法によりガラス基板上に塗布した。
<Example 6>
As the hardly volatile solvent, diethylene glycol monobutyl ether acetate is used instead of 1,3-butylene glycol diacetate, and the solvent is 3-methoxybutyl acetate: cyclohexanone: propylene glycol monomethyl ether acetate: diethylene glycol monobutyl ether acetate = 65: 15: 15 : A colored photosensitive resin composition was prepared by the same method as in Example 1 except that it was 5 (mass ratio), and the colored photosensitive resin composition was prepared on the glass substrate by the same method as in Example 1. Applied.
<比較例1>
光重合性化合物1(Mw:3400、固形分:55%、溶剤:3−メトキシブチルアセテート);30質量部、ジペンタエリスリトールヘキサアクリレート;6.5質量部、光重合開始剤(「IRGACURE OXE 02」、チバスペシャルティケミカルズ社製);2質量部、及びカーボン分散液として、「カーボン分散液CFブラック」(カーボン濃度:20%、分散剤:5%、溶剤:3−メトキシブチルアセテート、御国色素社製);100質量部を用い、溶剤は、1,3−ブチレングリコールジアセテートを添加せず、混合比率を3−メトキシブチルアセテート:シクロヘキサノン:プロピレングリコールモノメチルエーテルアセテート=60:20:20として、実施例1と同様の方法により着色感光性樹脂組成物を調製し、当該着色感光性樹脂組成物を実施例1と同様の方法によりガラス基板上に塗布した。
<Comparative Example 1>
Photopolymerizable compound 1 (Mw: 3400, solid content: 55%, solvent: 3-methoxybutyl acetate); 30 parts by mass, dipentaerythritol hexaacrylate; 6.5 parts by mass, photopolymerization initiator (“IRGACURE OXE 02 "Ciba Specialty Chemicals Co., Ltd."; 2 parts by mass, and as a carbon dispersion, "carbon dispersion CF black" (carbon concentration: 20%, dispersant: 5%, solvent: 3-methoxybutyl acetate, Mikuni Dye Co., Ltd.) 100 parts by mass, 1-butylene glycol diacetate was not added, and the mixing ratio was 3-methoxybutyl acetate: cyclohexanone: propylene glycol monomethyl ether acetate = 60: 20: 20. A colored photosensitive resin composition was prepared in the same manner as in Example 1, It was coated on a glass substrate in the same manner as in Example 1 the color photosensitive resin composition.
<比較例2>
光重合性化合物1(Mw:3400、固形分:55%、溶剤:3−メトキシブチルアセテート);24.5質量部、ジペンタエリスリトールヘキサアクリレート;4.5質量部、光重合開始剤(「IRGACURE OXE 02」、チバスペシャルティケミカルズ社製);1.4質量部とした点以外は、比較例1と同様の方法により着色感光性樹脂組成物を調製し、当該着色感光性樹脂組成物を比較例1と同様の方法によりガラス基板上に塗布した。
<Comparative example 2>
Photopolymerizable compound 1 (Mw: 3400, solid content: 55%, solvent: 3-methoxybutyl acetate); 24.5 parts by mass, dipentaerythritol hexaacrylate; 4.5 parts by mass, photopolymerization initiator (“IRGACURE” OXE 02 ", manufactured by Ciba Specialty Chemicals); a colored photosensitive resin composition was prepared in the same manner as in Comparative Example 1 except that the amount was 1.4 parts by mass, and the colored photosensitive resin composition was used as a comparative example. 1 was applied on a glass substrate by the same method.
<比較例3>
溶剤として、1,3−ブチレングリコールジアセテートを添加せず、混合比率を3−メトキシブチルアセテート:シクロヘキサノン:プロピレングリコールモノメチルエーテルアセテート=55:30:15とした点以外は、実施例1と同様の方法により着色感光性樹脂組成物を調製し、当該着色感光性樹脂組成物を実施例1と同様の方法によりガラス基板上に塗布した。
<Comparative Example 3>
As the solvent, 1,3-butylene glycol diacetate was not added, and the mixing ratio was the same as in Example 1 except that 3-methoxybutyl acetate: cyclohexanone: propylene glycol monomethyl ether acetate = 55: 30: 15 A colored photosensitive resin composition was prepared by the method, and the colored photosensitive resin composition was applied on a glass substrate by the same method as in Example 1.
<比較例4>
溶剤の混合比率を3−メトキシブチルアセテート:シクロヘキサノン:プロピレングリコールモノメチルエーテルアセテート=50:30:20とした点以外は、比較例3と同様の方法により着色感光性樹脂組成物を調製し、当該着色感光性樹脂組成物を比較例3と同様の方法によりガラス基板上に塗布した。
<Comparative Example 4>
A colored photosensitive resin composition was prepared by the same method as in Comparative Example 3 except that the mixing ratio of the solvent was 3-methoxybutyl acetate: cyclohexanone: propylene glycol monomethyl ether acetate = 50: 30: 20, and the coloring was performed. The photosensitive resin composition was apply | coated on the glass substrate by the method similar to the comparative example 3.
<比較例5>
1,3−ブチレングリコールジアセテートの代わりに、ジプロピレングリコールジメチルエーテルを用いた点以外は、実施例1と同様の方法により着色感光性樹脂組成物を調製し、当該着色感光性樹脂組成物を実施例1と同様の方法によりガラス基板上に塗布した。
<Comparative Example 5>
A colored photosensitive resin composition was prepared in the same manner as in Example 1 except that dipropylene glycol dimethyl ether was used instead of 1,3-butylene glycol diacetate, and the colored photosensitive resin composition was carried out. It coated on the glass substrate by the method similar to Example 1.
ここで、重量変化率は、100℃に保温した熱天秤(「TG/DTA6200(商品名)」、SIIナノテクノロジー社製)に溶剤を添加し、大気中において、溶剤の重量の変化量を求めることにより、測定した。 Here, the weight change rate is obtained by adding a solvent to a thermobalance (“TG / DTA6200 (trade name)”, manufactured by SII Nanotechnology Co., Ltd.) kept at 100 ° C. and determining the amount of change in the weight of the solvent in the atmosphere. Was measured.
[凝集物の評価]
上記実施例1〜6、比較例1〜5で調製した着色感光性樹脂組成物を、8インチウエハに塗布し、上記実施例1〜6、比較例1〜5と同様の条件で形成した塗膜(膜厚;約1μm)について、「KLA−213X」(KLA−Tencor株式会社製)を用いて、表面の欠陥を検査し、ウエハ面積内の欠陥数を測定することにより、凝集物の発生の程度を評価した。結果を表2に示す。欠陥数は、製品の品質上、20未満であることが好ましい。
[Evaluation of aggregates]
The colored photosensitive resin compositions prepared in Examples 1-6 and Comparative Examples 1-5 were applied to an 8-inch wafer, and the coating was formed under the same conditions as in Examples 1-6 and Comparative Examples 1-5. About a film | membrane (film thickness; about 1 micrometer), using "KLA-213X" (made by KLA-Tencor Co., Ltd.), the surface defect is inspected and the generation of aggregates is measured Was evaluated. The results are shown in Table 2. The number of defects is preferably less than 20 in terms of product quality.
[乾燥ムラの評価]
上記実施例1〜6、比較例1〜5で形成した塗膜の表面について、ナトリウムランプ光を照射して観察した際に、外観上問題となるものを×、外観上問題とならないものを○として、乾燥ムラを評価した。結果を表2に示す。
[Evaluation of uneven drying]
Regarding the surfaces of the coating films formed in Examples 1 to 6 and Comparative Examples 1 to 5, when observing by irradiating with sodium lamp light, x is a problem in appearance, and ○ is not a problem in appearance. As a result, drying unevenness was evaluated. The results are shown in Table 2.
[表面荒れの評価]
上記実施例1〜6、比較例1〜5で形成した塗膜について、原子間力顕微鏡(「AFM(装置名)」、SIIナノテクノロジー社製)を用いて表面荒れ(Ra)を評価した。結果を表2に示す。評価は、Raが60Å未満を◎、60Å以上100Å未満を○、100Å以上を×とし、括弧内にその値を記載した。
[Evaluation of surface roughness]
About the coating film formed in the said Examples 1-6 and Comparative Examples 1-5, surface roughness (Ra) was evaluated using atomic force microscope ("AFM (device name)", SII nanotechnology company make). The results are shown in Table 2. In the evaluation, Ra is less than 60 cm, Å is 60 cm or more and less than 100 cm, and x is 100 cm or more, and the value is described in parentheses.
[光学密度(OD値)の評価]
上記実施例1〜6、比較例1〜5で塗膜を形成する際、ブラックマトリックスの膜厚を1μmとして、OD測定装置「D−200II」(グレタグマクベス社製)にてOD値を測定した。
[Evaluation of optical density (OD value)]
When forming the coating film in Examples 1 to 6 and Comparative Examples 1 to 5, the film thickness of the black matrix was set to 1 μm, and the OD value was measured with an OD measuring device “D-200II” (manufactured by Gretag Macbeth). .
表2から分かるように、溶剤に溶解パラメーターが8.7(cal/cm3)1/2以上であり、大気圧下における沸点が200℃以上250℃以下である難揮発性溶剤を添加した実施例1〜6では、全固形分中のカーボンブラック含有率が40質量%より多い(OD値が4.0以上である)にも関わらず、塗膜における欠陥の発生が少なく、凝集物の発生が抑えられていること分かる。一方、比較例1では、欠陥の数は少ないが、4.0以上のOD値を達成できておらず、十分な遮光性が得られていないのが分かる。また、比較例2〜5では、多数の欠陥が発生していることが分かった。加えて、実施例1〜6では、比較例1〜5と比較して表面荒れや乾燥ムラも見られないことが分かった。 As can be seen from Table 2, the solvent was added with a hardly volatile solvent having a solubility parameter of 8.7 (cal / cm 3 ) 1/2 or more and a boiling point of 200 ° C. or more and 250 ° C. or less under atmospheric pressure. In Examples 1 to 6, although the carbon black content in the total solid content is more than 40% by mass (OD value is 4.0 or more), the occurrence of agglomerates is small with less occurrence of defects in the coating film. It is understood that is suppressed. On the other hand, in Comparative Example 1, although the number of defects is small, an OD value of 4.0 or more cannot be achieved, and it can be seen that sufficient light shielding properties are not obtained. Moreover, in Comparative Examples 2-5, it turned out that many defects have generate | occur | produced. In addition, in Examples 1-6, it turned out that surface roughness and drying nonuniformity are not seen compared with Comparative Examples 1-5.
Claims (7)
前記(S)溶剤は、溶解パラメーターが8.7(cal/cm3)1/2以上であり、大気圧下における沸点が200℃以上250℃以下である少なくとも1種の(R)難揮発性溶剤を含有する着色感光性樹脂組成物。 (A) A photopolymerizable compound, (B) a photopolymerization initiator, (C) a black pigment, and (S) a solvent, wherein the (C) black pigment is more than 40% by mass per solid content. A resin composition comprising:
The (S) solvent has a solubility parameter of 8.7 (cal / cm 3 ) ½ or more and at least one kind of (R) hardly volatile having a boiling point of 200 ° C. or more and 250 ° C. or less under atmospheric pressure. A colored photosensitive resin composition containing a solvent.
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JPWO2017141723A1 (en) * | 2016-02-19 | 2018-11-22 | 富士フイルム株式会社 | Curable composition, light shielding film, solid-state imaging device, and color filter |
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