JP2008249461A - Dispensation inspecting apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a dispensation inspecting apparatus capable of automating inspection as to whether chemicals, or the like, are accurately dispensed to dispensing holes of a dispensing plate. <P>SOLUTION: The dispensation inspecting apparatus 10 comprises a light source 11 arranged on a casing plate 3; a first diffusion prevention filter 12 arranged above the light source 11; a second diffusion preventing filter 13 arranged at a prescribed interval above the first diffusion preventing filter 12; two telecentric lenses 17a and 17b inserted in mounting holes 16a and 16b provided for a stage 16; blue-enhanced filters 18a and 18b mounted below the telecentric lenses 17a and 17b; and two imaging means 19a and 19b arranged above the telecentric lenses 17a and 17b. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a dispensing inspection device that inspects whether or not a chemical solution or the like is accurately dispensed into a dispensing hole of a dispensing plate.

In the field of basic research on new drugs, there is research that dispenses a small amount of chemicals etc. into the dispensing holes of a dispensing plate, dispenses other chemicals etc. into the dispensing holes, and mixes them to see the reaction. Has been done. An example of this dispensing plate is shown in Patent Document 1. The surface of the dispensing plate main body is provided with a plurality of dispensing holes that are drilled vertically and horizontally so as to form rows and columns. When conducting research, a dispensing device is used to automatically dispense chemicals, etc. into the dispensing holes of the dispensing plate, and humans can visually check whether the chemicals, etc., have been accurately dispensed into the dispensing holes. I am inspecting.
JP-A-10-90260

  However, since humans visually inspected whether the chemical solution or the like was accurately dispensed into the dispensing holes, the inspection process was very inefficient. Further, even if it is attempted to automate the inspection, if the aspect ratio of the dispensing hole is high, it is difficult to detect a chemical solution or the like dispensed in the depth of the dispensing hole.

  The present invention has been made in view of such circumstances, and it is an object of the present invention to provide a dispensing inspection apparatus capable of automating an inspection of whether or not a chemical solution or the like is accurately dispensed into a dispensing hole of a dispensing plate. It is said.

  In order to achieve the object, the present invention is a dispensing inspection device for inspecting whether a chemical solution or the like is dispensed in a plurality of dispensing holes formed on the surface of a dispensing plate body, the dispensing plate A first light diffusion filter having a light source for directing light on the back surface thereof, a louver layer in which light transmission bands and light shielding bands are alternately arranged, and preventing diffusion of light incident from the light source; A louver layer in which light transmission bands and light-shielding bands arranged alternately at a predetermined angle with a louver layer of one diffusion prevention filter have a louver layer, and passed through the first diffusion prevention filter A second diffusion prevention filter for further preventing light diffusion, and the amount of light when the light is applied to the dispensing plate from the light source through the first diffusion prevention filter and the second diffusion prevention filter. Is it an imaging means to capture the image of the hole in the hole? It was adopted consisting configuration.

  Thereby, since the light emitted from the light source is prevented from diffusing by the first diffusion preventing filter and the second diffusion preventing filter and applied to the back surface of the dispensing plate, the image of the mist in the dispensing hole is clearly displayed. An image can be taken. And since it can test | inspect whether the chemical | medical solution etc. are dispensed from the image, a test | inspection can be automated.

  In the present invention, since the telecentric lens is disposed at the tip of the imaging means, the light transmitted through the dispensing plate is incident on the imaging means as a parallel light beam. An image can be taken.

  Further, the present invention provides a recording unit that records a recording image of a crease in the dispensing hole in advance, the recording image recorded in the recording unit is read out, and is captured by the recording image and the imaging unit. Detection means for detecting the number and position of the correlated wrinkles from the captured image of the wrinkles of the dispensing hole, determination means for determining whether there is the correlated wrinkles, and the correlated wrinkles In the case, the recorded image recorded in the recording means is read out, and the captured image correlated with the recorded image is compared, and whether the drug solution or the like is in the dispensing hole. Inspection means for inspecting. As a result, since the recorded image recorded in advance and the captured image are compared and inspected, it is possible to accurately recognize the portion where the chemical solution is present regardless of the shape of the dispensing hole. It can be examined more clearly and concisely.

  Moreover, since the said light source is blue LED, this invention can image a clearer image especially about the dispensing plate which was milky white.

  Furthermore, according to the present invention, since the blue enhanced filter is provided in front of the imaging means, the light of the blue LED transmitted through the dispensing plate can be captured more clearly, and a clear image can be captured.

  A dispensing inspection device according to the present invention is a dispensing inspection device that inspects whether a chemical solution or the like is dispensed into a plurality of dispensing holes formed on the surface of a dispensing plate main body. A first diffusion prevention filter having a light source for irradiating light on the back surface, a louver layer in which light transmission bands and light shielding bands are alternately arranged, and preventing diffusion of light incident from the light source; The light having passed through the first diffusion prevention filter has a louver layer in which a light transmission band and a light shielding band are alternately arranged so as to cross the louver layer of the diffusion prevention filter at a predetermined angle. A second anti-diffusion filter that further prevents the diffusion of light, and the dispensing when the light is applied to the dispensing plate from the light source via the first anti-diffusion filter and the second anti-diffusion filter. From the imaging means that captures the image of the hole in the hole Since, the drug solution or the like in dispensing holes of the dispensing plate can be automated accurately it checks to see whether it is dispensed.

  A dispensing inspection device for inspecting whether a chemical solution or the like is dispensed into a plurality of dispensing holes formed on the surface of a dispensing plate body, a light source for illuminating the back surface of the dispensing plate, and a light transmission A louver layer in which bands and light shielding bands are alternately arranged; a first diffusion prevention filter for preventing diffusion of light incident from the light source; a louver layer of the first diffusion prevention filter; A second diffusion having a louver layer in which light transmission bands and light shielding bands arranged alternately at an angle are arranged, and further preventing diffusion of light that has passed through the first diffusion prevention filter; And an image pickup means for picking up an image of the eye of the dispensing hole when light is applied to the dispensing plate from the light source through the first diffusion preventing filter and the second diffusion preventing filter. Consists of.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
FIG. 1 is a configuration diagram showing an embodiment of a dispensing inspection system according to the present invention. FIG. 2 is a block diagram showing an embodiment of the dispensing inspection apparatus according to the present invention, wherein (a) is a top view thereof and (b) is a front view thereof. FIG. 3 is a perspective view showing the configuration of the diffusion prevention filter. 4A and 4B are diagrams for explaining a telecentric lens. FIG. 4A shows the principle of a conventional lens, and FIG. 4B shows the principle of a telecentric lens. In the following description, the vertical direction of the dispensing inspection apparatus is the Z axis, the horizontal direction is the X axis (left and right direction in FIG. 1), and the Y axis (depth direction in FIG. 1).

  As shown in FIG. 1, a dispensing inspection system 1 includes a box-shaped casing 2 that covers the outside of the apparatus, and a casing-shaped casing 3 that is disposed substantially at the center of the casing 2 and has a flat plate shape that extends in an XY plane. And the pre-inspection plate storage body 4 for storing the pre-inspection dispensing plate 31 disposed on the housing plate 3 and the dispensing holes 34 (see FIG. 5) of the dispensing plate 31 disposed adjacent thereto. Dispensing inspection apparatus 10 for inspecting whether or not a chemical solution or the like is accurately dispensed, and a dispensing plate 31 that stores a dispensing plate 31 that has been determined to be accurately dispensed by the dispensing inspection apparatus 10. A first inspected plate storage body 5; a second inspected plate storage body 6 that stores a dispensing plate 31 that has been determined that a chemical solution or the like has not been accurately dispensed by the dispensing inspection device 10; Holding the dispensing plate 31 between the inspection device 10 and the storage bodies 4, 5, 6 Consisting chuck 7 is moved in the direction. FIG. 1 shows an example in which the chuck 7 and the dispensing plate 31 are arranged in all of the dispensing inspection device 10 and the storage bodies 4, 5, 6. It moves in the X direction between the dispensing inspection device 10 and the storage bodies 4, 5, 6 only by being provided.

  The pre-inspection plate storage body 4, the first inspected plate storage body 5, and the second inspected plate storage body 6 have box-shaped casings 4a, 5a, 6a as a whole, and dispense into the inside thereof. The plate 31 can be stored horizontally stacked in the Z direction. Air actuators 4b, 5b, and 6b are disposed below the storage bodies 4, 5, and 6. The dispensing plate 31 held by the chuck 7 is pushed upward in the Z direction and stored in the casings 4a, 5a, and 6a. can do.

  As shown in FIG. 2, the dispensing inspection apparatus 10 includes a light source 11 disposed on the housing plate 3, a first diffusion prevention filter 12 disposed above the light source 11, and a first diffusion prevention filter. 12, a second diffusion prevention filter 13 disposed at a predetermined interval above 12, a mounting table 14 disposed above the chuck 7 and the dispensing plate 31, and a parallel mounting on the mounting table 14. A stage 16 that moves on the rail 15 extending in the Y direction with high accuracy, two telecentric lenses 17a and 17b that are fitted in mounting holes 16a and 16b provided in the stage 16, and below the telecentric lenses 17a and 17b. The blue enhanced filters 18a and 18b attached to the two image pickup means 19a and 19b disposed above the telecentric lenses 17a and 17b. It made.

  Examples of the light source 11 include a blue LED (Light Emitting Diode). In particular, when the dispensing plate 31 is milky white, when a blue LED is used, the image can be suitably captured. The light source 11 is arranged in a wide range on the XY plane that is larger than the size of the dispensing plate 31 so that light can be applied to the entire back surface (lower surface) of the dispensing plate 31.

  As shown in FIG. 3, the first diffusion prevention filter 12 and the second diffusion prevention filter 13 have a thin flat plate shape extending in the XY plane. In this figure, a part of the first diffusion prevention filter 12 and the second diffusion prevention filter 13 is shown in an enlarged manner. However, in actuality, the first diffusion prevention filter 12 and the second diffusion prevention filter 13 have a thinner and larger flat plate shape, which will be described later. It has louver layers 12c and 13c having a large number of light transmission bands 12a and 13a and light shielding bands 12b and 13b.

  The first diffusion prevention filter 12 has a louver layer 12c in which light transmission bands 12a and light shielding bands 12b are alternately arranged. The light shielding band 12b has a wall shape extending in the X-axis direction and shields light incident in the Y direction. A portion divided by the light shielding band 12b is a light transmission band 12a, which transmits incident light. Transparent protective layers 12d and 12e are laminated above and below the louver layer 12c.

  The second diffusion prevention filter 13 has a louver layer 13c in which light transmission bands 13a and light shielding bands 13b are alternately arranged. The light shielding band 13b has a wall shape extending in the Y-axis direction and shields light incident in the X direction. The portion divided by the light shielding band 13b is a light transmission band 13a, which transmits incident light. Transparent protective layers 13d and 13e are stacked above and below the louver layer 13c.

  The thickness in the Z direction of the light transmission bands 12a and 13a and the light shielding bands 12b and 13b is preferably about 0.1 to 2.5 mm. The width in the Y direction of the light transmission band 12a and the width in the X direction of the light transmission band 13a are preferably in the range of 50 μm to 0.3 mm. The width in the Y direction of the light shielding band 12b and the width in the X direction of the light shielding band 13b are preferably in the range of 5 μm to 50 μm.

  As the material of the light transmission bands 12a and 13a, a highly transparent resin is used. Specifically, the light transmittance when light is transmitted in the Z direction is 75% or more, more preferably 85% or more. For example, highly transparent thermoplastic resins and thermosetting resins are used. Specific examples include cellulose resins, polyolefin resins, polyester resins, silicone resins, polystyrene resins, polyvinyl chloride resins, acrylic resins, polycarbonates. Examples thereof include resins.

  As the material of the light shielding bands 12b and 13b, a colored resin obtained by using the above-described resin as a material of the light transmission bands 12a and 13a and adding a colorant such as a pigment or a dye thereto is preferably used. . The color tone of the light shielding bands 12b and 13b is only required to provide preferable light shielding properties in the light shielding bands 12b and 13b, and can be, for example, black, red, yellow, green, blue, and light blue. The color tone of the light-shielding bands 12b and 13b can be adjusted by the type and addition amount of the colorant. Specifically, it has a light shielding property such that the light transmittance is 40% or less, preferably 10% or less when light is transmitted through the wall surfaces of the light shielding bands 12b and 13b.

  As the material for the transparent protective layers 12d, 12e, 13d, and 13e, the resins listed above as the material for the light transmission bands 12a and 13a can be used. With respect to the transparent protective layers 12d, 12e, 13d, and 13e alone, the light transmittance when light is transmitted in the Z direction is 75% or more, more preferably 85% or more. The material of the transparent protective layers 12d, 12e, 13d, and 13e is particularly preferably a polycarbonate resin, a polyester resin, an acrylic resin, a polyolefin resin (particularly a cycloolefin polymer), or a cellulose resin from the viewpoint of transparency and heat resistance. Of these, polycarbonate and polyester resins are more preferred.

  In this example, the louver layer 12c of the first anti-diffusion filter 12 and the louver layer 13c of the second anti-diffusion filter 13 are arranged so as to be orthogonal, but the present invention is not limited to this. They can also be arranged to cross at various angles, for example 60 degrees.

  When the light emitted from the light source 11 enters the first diffusion prevention filter 12, the light diffused in the Y direction is shielded by the light shielding band 12b. When the light transmitted through the first diffusion prevention filter 12 enters the second diffusion prevention filter 13, the light diffused in the X direction is shielded by the light shielding band 13b. In this way, since the light diffused in the XY directions is blocked, the light in the Z direction, which is prevented from diffusing, is applied to the dispensing plate 31, and the image can be taken very clearly. it can. The angle of the transmitted light is, for example, within a range of 60 to 120 degrees with respect to the Z axis, and the other angles are shielded by the light shielding bands 12b and 13b.

  As shown in FIG. 4B, the telecentric lenses 17a and 17b allow light to pass through using a relatively large central portion of the lens. That is, conventionally, as shown in FIG. 4A, the light incident on the portion near the outer end of the lens 21 does not become parallel to the vertical direction but passes obliquely with a predetermined angle with respect to the vertical direction. End up. On the other hand, when the telecentric lenses 17a and 17b are used, only the central portion is used without using the outer end portion of the lens, so that the light passing through the lens becomes parallel to the vertical direction.

  The blue enhanced filters 18 a and 18 b are for improving the imaging sensitivity of light of a specific wavelength, and are particularly useful when a blue LED is used as the light source 11.

  As the imaging means 19a, 19b, for example, a CCD (Charge Coupled Device) camera can be exemplified. The CCD camera converts an image into an electric signal using a charge coupled device that reads out charges generated from light. As shown in FIG. 2A, the imaging means 19a and 19b are not arranged side by side in the X direction but arranged in the Y direction in order to avoid interference of the telecentric lenses 17a and 17b. In this manner, by disposing, the imaging means 19a does not cause a gap between the X-direction range that can be imaged by the imaging means 19a and the X-direction range that can be imaged by the imaging means 19b, and the imaging plate 19a can The left half of the figure can be imaged and the right half of the dispensing plate 31 can be imaged by the imaging means 19b. Specifically, the imaging means 19a, 19b can simultaneously capture an image of the ridges in the 6 × 6 dispensing holes. Then, the entire surface of the dispensing plate 31 can be imaged by moving the stage 16 in the Y direction.

Next, a dispensing plate that is inspected by the dispensing inspection apparatus of the present invention will be described.
FIG. 5 is a perspective view showing the shape of the dispensing plate.

  The dispensing plate 31 includes a base 32 extending in the XY plane, and a dispensing plate body 33 formed on the top of the base 32. The outer peripheral surface of the base 32 protrudes from the dispensing plate main body 33 so that it can be easily gripped by the chuck 7. The dispensing plate 31 is milky white and is made of synthetic resin by injection molding.

  The dispensing plate main body 33 is formed with a plurality of bottomed dispensing holes 34 having openings on the upper surface. In this example, dispensing holes 34 having 12 rows in the X direction and 20 columns in the Y direction are formed. The dispensing hole 34 is hollowed out into a concave shape of a regular quadrangular prism, and the portion that is not hollowed out is a thin side wall 35. The dispensing holes 34 are high aspect ratio holes that are deeper in the Z direction than the distance between the opposing side walls. As for the dimensions, for example, a regular quadrangular prism whose horizontal cross section has a side of 3 mm and a depth of 30 mm can be inspected.

  Since the imaging means 19a and 19b capture the light passing through the surface of the dispensing plate 31, the captured image is an image of a plurality of ridges (bottom surfaces of the dispensing holes 34) divided by the image of the side wall 35. Recognized (see FIG. 7). In this example, an example in which the dispensing hole 34 is hollowed in a concave shape of a regular quadrangular prism is shown, but the present invention is not limited to this, and is hollowed in, for example, a cylindrical concave shape. It is also possible to inspect a dispensing plate or a dispensing plate hollowed into a conical concave shape.

Next, the operation of the dispensing inspection apparatus of the present invention will be described.
FIG. 6 is a flowchart showing the image processing operation of the dispensing inspection apparatus of the present invention.

  When the dispensing inspection device 10 is used to inspect whether or not a chemical solution or the like is accurately dispensed into the dispensing hole 34, the computer previously includes a recording image of the wrinkles in the dispensing hole 34 (see FIG. 7). It is recorded in the recording means (S101). Then, the recorded image recorded in the recording means is read out, and the number of wrinkles correlated with the recorded image and the captured images of the wrinkles of the dispensing holes 34 taken by the imaging means (CCD cameras) 19a and 19b, and The position is detected (S102). The correlation is obtained by superimposing a pre-recorded recorded image and a captured image, aligning wrinkles from those images, and determining which wrinkle of the recorded image the captured wrinkle image corresponds to It is to recognize. As a result, the number and position of the ridges can be detected.

  Subsequently, it is determined whether or not there is a correlated wrinkle (S103). If there is a correlated wrinkle (S103-Yes), the recorded image recorded in the recording means is read out and the recorded image is recorded. A comparison is made between the picked-up images of the eyelids that are correlated with each other, and it is inspected whether or not a chemical solution or the like is in the dispensing hole 34 (S104). Specifically, when a chemical solution or the like enters the dispensing hole 34, the captured image is displayed in a color close to black. Therefore, when a recorded image recorded in advance is subtracted from the captured image, the chemical solution or the like is displayed. A black image can be detected, and each wrinkle is inspected for a black image of the drug solution or the like. This process is continued as long as there remains a sputum that needs to be inspected for the presence or absence of chemicals or the like (S105). Note that this detection of an image of a chemical solution, etc. recognizes that a certain amount of area is a chemical solution, etc. Therefore, even if foreign matter (fine dust etc.) is mixed, Judged as not being dredged.

  It is determined whether there is a correlated wrinkle (S103). If there is no correlated wrinkle (S103-No), the process is terminated.

Next, an image captured by the imaging unit will be described.
7A and 7B are diagrams showing images picked up by the image pickup means. FIG. 7A shows a recorded image previously recorded in the recording means, and FIG. 7B shows a picked-up image picked up by the image pickup means.

  As shown in FIG. 7A, the recorded image includes a side wall 35 (shown by hatching in gray) displayed in gray, and a wrinkle (dispensing hole) displayed in a color close to white divided by the side wall 35. (Bottom surface of 34) 36 (in the figure, it is displayed in white without hatching). This is because light from the light source 11 is applied to the back surface of the dispensing plate 31 and the light passing through the dispensing plate 31 is imaged by the imaging means 19a and 19b, so that the light that has passed through the bottom surface of the thin dispensing hole 34. Has a large amount of light and is recognized as an image close to white in the imaging means 19a and 19b, and the light passing through the thick side wall 35 has a small amount of light and is displayed in gray.

  As shown in FIG. 7B, the captured image includes a side wall 35 (shown by hatching in gray) displayed in gray, and a ridge (bottom surface of the dispensing hole 34) 36 (in the drawing). In this figure, it is displayed in white without hatching) and a chemical solution dispensed in the dispensing holes 34 (displayed in black in the drawing). About 1 μl of chemical solution or the like is dispensed into each dispensing hole 34. The chemical liquid or the like is displayed in a color close to black because it is difficult for the imaging means 19a and 19b to capture an image because light passing through the portion is diffused in multiple directions. When the chemical solution or the like is attached to the inner side wall 35 of the dispensing hole 34 (reference numeral 37a) or is accumulated at the approximate center of the ridge 36 (reference numeral 37b), it is surrounded by the side wall 35 of the dispensing hole 34. There is a case where it is accumulated at the corner (reference numeral 37c).

  In this example, no chemicals or the like are dispensed on the bag 36a, and an image close to black is not displayed. Further, no chemical or the like is dispensed into the heel 36b, and a foreign object (thread waste) 38 is detected instead.

  In addition, discrimination | determination of this chemical | medical solution 37a, 37b, 37c and the foreign material 38 is discriminate | determined according to the area. Specifically, in the image processing of the dispensing inspection apparatus 10, a chemical threshold and a foreign substance threshold can be set, and a detected object having an area equal to or larger than the chemical threshold is determined as a chemical. However, those having an area less than the chemical threshold and greater than or equal to the foreign substance threshold are judged as foreign matters, and those having an area less than the foreign substance threshold are judged as noise and ignored.

  Here, each sputum on the dispensing plate is inspected, and if all sputums are judged to have “chemical solution / no foreign matter”, it is determined that there is a chemical solution in each sputum and no foreign matter is contained. Then, the dispensing plate is stored in the first inspected plate storage body 5 (see FIG. 1). Then, on the screen of the display 58 (see FIG. 8), the position of the bag containing the chemical is displayed. If there is a jar with “chemical solution / foreign matter”, it is determined that there is a chemical solution and there is a jar containing foreign matter, and the dispensing plate is the second inspected plate container 6 ( (See FIG. 1). On the screen, the position of the bag containing the chemical and the bag containing the foreign substance is displayed.

  If there is a “no chemical / no foreign matter” flaw, it is determined that there is no chemical and no foreign matter and the dispensing plate is stored in the second inspected plate container 6. Stored. On the screen, the position of the wrinkles that do not contain chemicals and foreign substances is displayed. If there is a “no chemical / no foreign matter” flaw, it is determined that there is no chemical and no foreign matter is contained, and the dispensing plate is placed in the second inspected plate container 6. Stored. On the screen, the position of the bag containing no foreign substance and no foreign substance is displayed.

  Therefore, in the case of the jar 36a, it is determined that there is a jar that does not contain any chemical solution and no foreign matter, and after the inspection of this dispensing plate, the dispensing plate is subjected to the second inspection. Stored in the used plate storage 6. On the screen, the position of the bag 36a that does not contain the chemical solution and the foreign matter is displayed. Further, in the case of the bag 36b, since no chemical solution is contained and the foreign matter 38 is contained, the dispensing plate 31 is stored in the second inspected plate storage body 6. On the screen, the position of the bag 36b where no chemical is contained and foreign matter is contained is displayed.

Next, the configuration of a computer that executes processing of the dispensing inspection apparatus of the present invention will be described.
FIG. 8 is a configuration diagram of a computer that executes processing of the dispensing inspection apparatus of the present invention.

  As shown in FIG. 8, the computer 44 includes a CPU 47 with a built-in timer 48, a storage unit such as a RAM 49, a ROM 50, a hard disk 51 (HD), an input interface 52 (input I / F), and an output interface 53 (output). I / F) and the like, which are connected via a bus line 54. Also, a keyboard 55 and a mouse 56 as input devices are connected to the input I / F 52, and a speaker 57 and a display 58 are connected to the output I / F 53.

  Imaging means 19a and 19b are connected to the input interface 52, and a captured image is input. Further, the position information 61 of the stage 16, the cylinder position information 62 of the air actuators 4b, 5b, and 6b, the presence / absence signal 63 of the dispensing plate 31, and the like are input to the input interface 52.

  The output interface 53 includes a stage control unit 64 that controls the position of the stage 16, a cylinder control unit 65 that controls the cylinder positions of the air actuators 4 b, 5 b, and 6 b, and a light source control unit 66 that controls the illuminance of the light source 11. Etc. are connected.

  With these structures, a signal is output from the position information 61 of the stage 16 to the stage control means 64 to control the position of the stage 16, and the cylinder position information 62 of the air actuators 4b, 5b, 6b is transferred to the cylinder control means 65. A signal is output to control the position of the cylinder, a signal is output from the presence / absence signal 63 of the dispensing plate 31 to the cylinder control means 65 to control the cylinders of the air actuators 4b, 5b, 6b, and the light source 11 is turned on. The illuminance of the light source 11 can be controlled by controlling OFF and outputting a signal to the light source control means 66 in accordance with the captured images input from the imaging means 19a and 19b.

  The embodiment of the present invention has been described above, but the present invention is not limited to such an embodiment, and is merely an example, and various modifications can be made without departing from the scope of the present invention. Of course, the scope of the present invention is indicated by the description of the scope of claims, and further, the equivalent meanings described in the scope of claims and all modifications within the scope of the scope of the present invention are included. Including.

  The dispensing inspection apparatus according to the present invention can be applied to a dispensing inspection apparatus that inspects whether or not a chemical solution or the like is accurately dispensed into a dispensing hole of a dispensing plate.

It is a lineblock diagram showing an embodiment of a dispensing inspection system concerning the present invention. It is a block diagram which shows embodiment of the dispensing inspection apparatus which concerns on this invention, (a) is the top view, (b) is the front view. It is a perspective view which shows the structure of a diffusion prevention filter. It is a figure for description of a telecentric lens, (a) is the principle of the conventional lens, (b) is the principle of a telecentric lens. It is a perspective view which shows the shape of a dispensing plate. It is a flowchart which shows the operation | movement of the image processing of the dispensing inspection apparatus of this invention. It is a figure which shows the image imaged by the imaging means, (a) shows the recorded image previously recorded on the recording means, (b) shows the captured image imaged by the imaging means. It is a block diagram of the computer which performs the process of the dispensing inspection apparatus of this invention.

Explanation of symbols

1 ····················································································· 3 ······················· Plate storage bodies 4a, 5a, 6a ···· Case 4b, 5b, 6b ··· Air actuator 5 ······· First inspection Finished plate container 6 ···························································· Second chuck Inspection device 11 ... Light source 12 ... First diffusion prevention filters 12a, 13a ... Light transmission bands 12b, 13b ... Shading bands 12c, 13c ... Louver layers 12d, 12e, 13d, 13e ... Transparent protective layer 13 ... Second diffusion prevention filter 14 ... ········································································ Stages 16a and 16b ... 18a, 18b ... Blue enhanced filters 19a, 19b ... Imaging means 31 ... Dispensing plate 32 ... Base 33 ... ······································································································· Side walls 36, 36a, 36b,. ·························································· 37b ... When chemicals or the like are collected in the corners surrounded by the side wall 35 of the dispensing hole 34 ... ... foreign matter 47 ·········· CPU
48 ... Timer 49 ... RAM
50 ... ROM
51: Hard disk 52: Input interface 53: Output interface 54: Bus Line 55 ... Keyboard 56 ... Mouse 57 ... Speaker 58 ... Display 61 Stage position information 62 Cylinder position information 63 Dispensing plate presence / absence signal 64・ ・ ・ ・ ・ Stage control means 65 ・ ・ ・ ・ ・ Cylinder control means 66 ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ Light source control means

Claims (5)

A dispensing inspection device for inspecting whether a chemical solution or the like is dispensed into a plurality of dispensing holes formed on the surface of a dispensing plate body,
A light source that shines light on the back of the dispensing plate;
A first diffusion prevention filter having a louver layer in which light transmission bands and light shielding bands are alternately arranged, and preventing diffusion of light incident from the light source;
A louver layer in which a light transmission band and a light shielding band are arranged alternately to cross the louver layer of the first diffusion prevention filter at a predetermined angle, and the first diffusion prevention filter is A second anti-diffusion filter that further prevents diffusion of light that has passed through;
Dispensing comprising imaging means for capturing an image of the eye of the dispensing hole when light is applied to the dispensing plate from the light source through the first diffusion preventing filter and the second diffusion preventing filter. Inspection device.   The dispensing inspection apparatus according to claim 1, wherein a telecentric lens is disposed at a tip of the imaging unit. Recording means for recording a recording image of the dispensing hole in advance,
Detection of reading out the recorded image recorded in the recording means and detecting the number and position of the corrugated correlates from the recorded image and the captured image of the eye of the dispensing hole imaged by the imaging means means,
Determining means for determining whether there is a correlated wrinkle;
When there is a correlated wrinkle, the recorded image recorded in the recording unit is read out, and the captured image of the wrinkle correlated with the recorded image is compared. Inspection means to inspect whether it is in the dispensing hole,
The dispensing inspection apparatus according to claim 1, comprising:   The dispensing inspection apparatus according to any one of claims 1 to 3, wherein the light source is a blue LED.   The dispensing inspection apparatus according to claim 4, wherein a blue enhanced filter is provided in front of the imaging unit.

Images