JP2008214725A - Surface treatment method for stainless steel, and fluid apparatus such as electromagnetic pump - Google Patents
Surface treatment method for stainless steel, and fluid apparatus such as electromagnetic pump Download PDFInfo
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- 229910001220 stainless steel Inorganic materials 0.000 title claims abstract description 48
- 239000010935 stainless steel Substances 0.000 title claims abstract description 48
- 238000004381 surface treatment Methods 0.000 title claims abstract description 22
- 238000000034 method Methods 0.000 title claims description 20
- 239000012530 fluid Substances 0.000 title claims description 17
- 229910052717 sulfur Inorganic materials 0.000 claims abstract description 29
- 239000011593 sulfur Substances 0.000 claims abstract description 28
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 claims abstract description 27
- 239000007788 liquid Substances 0.000 claims abstract description 18
- 238000005520 cutting process Methods 0.000 claims abstract description 14
- 238000011282 treatment Methods 0.000 claims abstract description 6
- 238000005422 blasting Methods 0.000 claims description 12
- 239000002245 particle Substances 0.000 claims description 9
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 claims description 6
- 239000002436 steel type Substances 0.000 claims description 5
- 238000010828 elution Methods 0.000 abstract description 16
- 238000002161 passivation Methods 0.000 abstract description 4
- -1 particularly Substances 0.000 abstract description 3
- 230000001681 protective effect Effects 0.000 abstract description 3
- 150000002500 ions Chemical class 0.000 description 11
- 239000000463 material Substances 0.000 description 10
- 238000004458 analytical method Methods 0.000 description 7
- 239000000446 fuel Substances 0.000 description 6
- 230000033001 locomotion Effects 0.000 description 6
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- 230000002265 prevention Effects 0.000 description 5
- 238000000635 electron micrograph Methods 0.000 description 4
- 239000000696 magnetic material Substances 0.000 description 4
- 239000004696 Poly ether ether ketone Substances 0.000 description 3
- 229910000831 Steel Inorganic materials 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 150000002739 metals Chemical class 0.000 description 3
- 239000004033 plastic Substances 0.000 description 3
- 229920002530 polyetherether ketone Polymers 0.000 description 3
- 239000010959 steel Substances 0.000 description 3
- 238000012546 transfer Methods 0.000 description 3
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
- 238000013507 mapping Methods 0.000 description 2
- 229910017604 nitric acid Inorganic materials 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 235000013405 beer Nutrition 0.000 description 1
- 230000033228 biological regulation Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000007922 dissolution test Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 229920001973 fluoroelastomer Polymers 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-M hydroxide Chemical compound [OH-] XLYOFNOQVPJJNP-UHFFFAOYSA-M 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 150000007524 organic acids Chemical class 0.000 description 1
- 239000005518 polymer electrolyte Substances 0.000 description 1
- 238000010248 power generation Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
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- Electromagnetic Pumps, Or The Like (AREA)
- Chemical Treatment Of Metals (AREA)
Abstract
Description
この発明は、ステンレス鋼特にSUS303,SUS430Fを代表鋼種とする硫黄系快削ステンレス鋼からイオンの溶出を防止する表面処理方法及びその方法を用いて製造した電磁ポンプ等の流体機器に関する。 The present invention relates to a surface treatment method for preventing elution of ions from stainless steel, particularly sulfur-based free-cutting stainless steel having SUS303 and SUS430F as representative steel types, and to a fluid device such as an electromagnetic pump manufactured using the method.
ステンレス鋼は、錆にくい鋼であるため、食器,流し台等の家庭用品,酒,ビール等の貯蔵タンク,工業用の液体のタンクなど広く使用されている。鉄にCrを添加すると表面に緻密なCr水酸化物の不動態被膜を作り、それが鋼を環境から保護する働きをするため耐食性は大きい。一般にCrを約11%以上含む鋼をステンレス鋼と呼んでいる。 Since stainless steel is a rust-resistant steel, it is widely used for household goods such as tableware and sinks, storage tanks for liquor, beer, and industrial liquid tanks. When Cr is added to iron, a dense passive film of Cr hydroxide is formed on the surface, which acts to protect the steel from the environment, and therefore has high corrosion resistance. Generally, steel containing about 11% or more of Cr is called stainless steel.
ステンレス鋼には、Crのみを重要合金元素とするCr系と、CrとNiの両方を多量に含むCr−Ni系の2種類がある。そして、それぞれにおいて、硫黄系快削ステンレス鋼が存在し、その代表鋼種はSUS303とSUS430Fである。その他、電磁ステンレス鋼や更に快削性を改善した鋼種が市販されている。 There are two types of stainless steel, Cr-based, which contains only Cr as an important alloy element, and Cr-Ni-based, which contains a large amount of both Cr and Ni. And in each, sulfur free-cutting stainless steel exists, The representative steel types are SUS303 and SUS430F. In addition, electromagnetic stainless steel and steel types with further improved free-cutting properties are commercially available.
前記ステンレス鋼のSUS303は、Crが17.00〜19.00(wt%)、Niが8.00〜10.00(wt%)を含有すると共にSが0.15(wt%)程度含有する。SUS304は、Crが18.00〜20.00、Ni8.00〜10.50(wt%)を含有すると共にSが0.030(wt%)以下となっている。 The stainless steel SUS303 contains 17.00 to 19.00 (wt%) of Cr, 8.00 to 10.00 (wt%) of Ni, and about 0.15 (wt%) of S. . In SUS304, Cr contains 18.00 to 20.00, Ni 8.00 to 10.50 (wt%), and S is 0.030 (wt%) or less.
SUS303は、SUS304に比較して切削加工しやすく、自動旋盤等へ適用できる。最近はこのような自動旋盤用材は環境規制から鉛含有材の使用は難しくなってきており、硫黄系快削材に主力を移してきている。これに比して、SUS304は、Sの含有量が少ない難削材であって、切削くずの排出性が悪く、また加工速度が遅く、且つ材料単価も高価であるため、部材費が格段に上昇する。 SUS303 is easier to cut than SUS304 and can be applied to an automatic lathe. Recently, the use of lead-containing materials for such automatic lathe materials has become difficult due to environmental regulations, and the main focus has been shifted to sulfur-based free-cutting materials. Compared to this, SUS304 is a difficult-to-cut material with a low S content, has poor cutting waste discharge performance, is slow in processing speed, and is expensive in material cost, so the material cost is markedly high. To rise.
当然ながら、SUS303を用いて接液部品を製作すると、硫黄等のイオンが液体中に溶出し、例えば、石油バーナ機器では問題は無いが、家庭用燃料電池システムに用いる場合、イオンの溶出があると、触媒等にダメージを与えてしまう不都合があった。 Naturally, when a wetted part is manufactured using SUS303, ions such as sulfur are eluted in the liquid. For example, there is no problem in oil burner equipment, but there is ion elution when used in a household fuel cell system. Inconveniently damages the catalyst.
現在、ステンレス鋼の表面処理として、特許文献1,特許文献2をあげることができる。前記特許文献1にあっては、有機酸でステンレス鋼部材を洗浄することで、Cr主体の不動態被膜を形成させ、Feの溶出を抑制した食品製造用及び食品貯蔵運搬用ステンレス鋼材を提供している。
前記特許文献2にあっては、電力を直接的駆動源とする自動車、小規模の発電システムなどに用いられる固体高分子型燃料電池セパレータ部材にあって、当該部材のフラット性を高め、その表面の電気的接触抵抗を低くするための表面処理を施したことにある。その具体的な製造方法は、イオン溶出が極小な導電性化合物を超硬粒子に被覆した粒子を用いて、低い投射圧力でステンレス鋼表面に衝突させることで、その表面にイオン溶出が極小な導電性化合物が埋め込まれ、且つ形状がフラットとするものである。 In Patent Document 2, there is a polymer electrolyte fuel cell separator member used for automobiles, small-scale power generation systems, etc. that use electric power as a direct drive source, and the flatness of the member is improved, and the surface thereof The surface treatment for lowering the electrical contact resistance is performed. The specific manufacturing method uses a particle coated with super hard particles with a conductive compound with minimal ion elution, and collides against the surface of stainless steel at a low projection pressure, so that the surface is electrically conductive with minimal ion elution. The active compound is embedded and the shape is flat.
電磁ポンプにおいて、切削加工のしやすさや、価格の面からSUS303等の硫黄系快削ステンレス鋼が採用されているが、前記段落0006に記述したように含有する硫黄などのイオンが溶出する不都合があり、これを解決しなければ家庭用燃料電池システムに採用することはできない。 In the electromagnetic pump, sulfur-based free-cutting stainless steel such as SUS303 is adopted from the viewpoint of ease of cutting and price, but there is a disadvantage that ions such as sulfur contained are eluted as described in paragraph 0006 above. If this is not solved, it cannot be adopted for a household fuel cell system.
そこで、この発明は、ステンレス鋼特に快削性担保のための、硫黄(S)の成分の多い、SUS303等の硫黄系快削ステンレス鋼を用いるが、表面を加工して硫黄などの液体内への溶出を少なくすることを目的としている。 Therefore, this invention uses stainless steel, particularly sulfur-based free-cutting stainless steel such as SUS303, which has a high sulfur (S) component, to secure free-cutting properties, but the surface is processed into a liquid such as sulfur. The purpose is to reduce elution.
この発明に係るステンレス鋼の表面処理方法は、ステンレス鋼の表面にショットブラスト加工を施すと共に、不動態処理することにある(請求項1)。これにより、ステンレス鋼の表面に塑性流動層が生じると共に、該表面の硫黄が除去されて減少させることができる。そして更に表面に不動態処理されることから、微細な硫黄を除去すると共に、保護膜の形成によって、含有する金属等特に硫黄の溶出が確実に抑えられると共に耐食性が得られるものである。 The stainless steel surface treatment method according to the present invention includes subjecting the surface of the stainless steel to shot blasting and passive treatment (claim 1). Thereby, a plastic fluidized bed is generated on the surface of the stainless steel, and sulfur on the surface can be removed and reduced. Further, since the surface is further passivated, elution of fine sulfur is removed and formation of a protective film can surely suppress elution of sulfur, such as metals contained therein, and provide corrosion resistance.
前記ステンレス鋼はSUS303ならびにSUS430Fを代表鋼種とする硫黄系快削ステンレス鋼である(請求項2)。硫黄(S)が比較的多く、快削性が良い材質である。 The stainless steel is a sulfur-based free-cutting stainless steel having SUS303 and SUS430F as representative steel types (Claim 2). It is a material with a relatively large amount of sulfur (S) and good free-cutting properties.
前記ショットブラストによる吹き付けられる粒子の種類として、ジルコニアが用いられるのが好ましく(請求項3)、その粒子の径は0.3mm程又はそれ以下であることが好ましい(請求項4)。 Zirconia is preferably used as the type of particles sprayed by the shot blasting (Claim 3), and the diameter of the particles is preferably about 0.3 mm or less (Claim 4).
また、この発明に係る電磁ポンプ等の流体機器は、前記請求項1より成る表面処理方法を使用して、表面処理を施したステンレス鋼を用い、液体が流れる部位を製造したことにある(請求項5)。特に電磁ポンプのピストン、プランジャ、継手等の接液部に前記の表面処理方法を施したことにある(請求項6)。これにより、電磁ポンプを液体の移送時ならびに液体滞留時に特に硫黄のイオンの溶出が抑えられる。なお、流体機器としては、電磁ポンプばかりでなく、電磁弁や配管等であっても良い。 In addition, the fluid device such as an electromagnetic pump according to the present invention is that the surface treatment method according to claim 1 is used to manufacture a portion where the liquid flows using the surface-treated stainless steel (claim). Item 5). In particular, the surface treatment method is applied to a liquid contact portion such as a piston, a plunger, or a joint of an electromagnetic pump. Thus, elution of sulfur ions can be suppressed particularly when the electromagnetic pump is used to transfer the liquid and when the liquid is retained. In addition, as a fluid apparatus, not only an electromagnetic pump but an electromagnetic valve, piping, etc. may be sufficient.
以上のように、この発明によれば、ショットブラストによる表面の塑性流動層が生じて、金属特に硫黄が減少させることができる。また、表面に保護膜が作られるため、金属特に硫黄がイオンとして溶出することが確実に防がれる(請求項1)。 As described above, according to the present invention, the surface plastic fluidized bed is generated by shot blasting, and metal, particularly sulfur, can be reduced. In addition, since a protective film is formed on the surface, it is possible to reliably prevent metals, particularly sulfur, from eluting as ions (claim 1).
さらに、ステンレス鋼としてSUS303,SUS430F等が採用でき切削加工性を維持できる利点と、材料単価の高騰を抑えることができる(請求項2)。 Furthermore, SUS303, SUS430F, etc. can be adopted as the stainless steel, and an advantage that the machinability can be maintained, and an increase in the material unit price can be suppressed.
さらにまた、電磁ポンプ等の流体機器を請求項1より成る表面処理方法を施したステンレス鋼を用い、液体が流れる部位を製造したことから、含有する金属等のイオンを溶出させることを抑えられ、家庭用の燃料電池システムの機器部位として採用できる。特に、電磁ポンプの接液部品に前記の表面処理することはすこぶる有効である。金属等のイオンの溶出が抑えられ、家庭用の燃料電池システム内の液体移送手段として優れた効果を発揮することができる(請求項5,6)。 Furthermore, since the fluid flow device such as an electromagnetic pump is made of stainless steel subjected to the surface treatment method according to claim 1 and the liquid flowing portion is manufactured, it is possible to suppress elution of ions such as contained metal. It can be used as an equipment part of a household fuel cell system. In particular, it is extremely effective to perform the surface treatment on the wetted parts of the electromagnetic pump. Elution of ions of metals and the like is suppressed, and an excellent effect as a liquid transfer means in a household fuel cell system can be exhibited (claims 5 and 6).
以下、この発明に実施例を図面にもとづいて説明する。 Embodiments of the present invention will be described below with reference to the drawings.
図1,図2において、この発明の表面処理方法を用いたステンレス鋼の電子顕微鏡写真と、無処理のステンレス鋼の電子顕微鏡写真が開示されている。ここで用いられているステンレス鋼はSUS303で、まず下記の条件によりショットブラスト加工が施される。 1 and 2, an electron micrograph of stainless steel using the surface treatment method of the present invention and an electron micrograph of untreated stainless steel are disclosed. The stainless steel used here is SUS303, which is first shot blasted under the following conditions.
吹き付けされる粒子は、ジルコニアで、その径は0.3mm程又はそれ以下で、吹き付け時間は5秒程である。これにより図1を見るごとく、表面付近では硫黄の元素の粒子(黒い点で示される)がなくなっている。 The particles to be sprayed are zirconia, the diameter is about 0.3 mm or less, and the spraying time is about 5 seconds. As a result, as shown in FIG. 1, there are no sulfur element particles (indicated by black dots) near the surface.
その理由として、表面が粒子により打たれることにより、その際に、硫黄の元素Sが叩き出されたものと思われる。なお最も表面には塑性流動層が見られる。 This is probably because the sulfur element S was struck out by the surface being struck by particles. A plastic fluidized bed can be seen on the outermost surface.
ショットブラスト加工が終わると、不動態処理が施される。例えば、濃硝酸に浸せきする方法が用いられる。このように、ショットブラスト加工の後に、不動態処理が施されることから、液体中に硫黄の溶出が抑えられる。 When the shot blasting is finished, the passivation process is performed. For example, a method of immersing in concentrated nitric acid is used. Thus, since the passive treatment is performed after the shot blasting process, the elution of sulfur in the liquid is suppressed.
図3は、表面処理を施したステンレス鋼をEDSマッピング分析した特性線図で、SiとSは微小に存在するが、Sはほとんど検出されず、分布もみられない。 FIG. 3 is a characteristic diagram obtained by EDS mapping analysis of the surface-treated stainless steel. Si and S are minutely present, but S is hardly detected and no distribution is observed.
図4及び図5は、溶出試験の結果の表で、2つの分析方法で行われている。第1の方法は、誘動結合高周波プラズマ発光分析装置(ICP)により、第2の方法は、イオンクロマト分析器(IP)による。ICP分析結果は図4で、A1がわずかに溶出しているにすぎない。IP分析結果は図5で、NH,SO4がわずかに溶出しているにすぎない。この結果から、家庭用燃料電池システム内における液体の移送手段として採用できるものである。 4 and 5 are tables of the results of the dissolution test, which are performed by two analysis methods. The first method is based on an inductively coupled high-frequency plasma emission spectrometer (ICP), and the second method is based on an ion chromatograph analyzer (IP). The result of ICP analysis is shown in FIG. 4, where A1 is only slightly eluted. The results of IP analysis are shown in FIG. 5, and NH and SO 4 are only slightly eluted. From this result, it can employ | adopt as a liquid transfer means in a household fuel cell system.
図6において、この発明(実施例1)の表面処理方法によるステンレス鋼(SUS303,SUS430F)を用いて、電磁ポンプ11のピストン37とプランジャ51等に用いた例が示されている。このピストン37とプランジャ51等の接液部から、液体の移送時に、硫黄の溶出が抑えられた。なお、電磁ポンプ11を以下簡単に説明する。 FIG. 6 shows an example in which the stainless steel (SUS303, SUS430F) according to the surface treatment method of the present invention (Example 1) is used for the piston 37 and the plunger 51 of the electromagnetic pump 11. From the liquid contact parts such as the piston 37 and the plunger 51, the elution of sulfur was suppressed when the liquid was transferred. The electromagnetic pump 11 will be briefly described below.
電磁ポンプ11は、定容積形電磁ポンプで、鉄などの磁性材で製造されたケース12内にパルス電流が印加されるコイル13を備え、このコイル13は樹脂製のボビン14に電線が巻装されて構成され、ボビン14の中心を貫通して形成された貫通孔には、非磁性材より成るガイドパイプ16が嵌挿されている。 The electromagnetic pump 11 is a constant displacement electromagnetic pump, and includes a coil 13 to which a pulse current is applied in a case 12 made of a magnetic material such as iron. The coil 13 has a wire wound around a resin bobbin 14. A guide pipe 16 made of a nonmagnetic material is fitted into a through hole formed through the center of the bobbin 14.
このガイドパイプ16の図6の下側に磁性材より成る下磁極筒18、上側に磁性材より成る上磁極筒19がそれぞれ接続され、内部に下記するプランジャ51の駆動空間20が構成されている。前記下磁極筒18の下側の開口には、吸入通路23が接続されている。 A lower magnetic pole cylinder 18 made of a magnetic material is connected to the lower side of the guide pipe 16 in FIG. 6 and an upper magnetic pole cylinder 19 made of a magnetic material is connected to the upper side of the guide pipe 16, respectively. . A suction passage 23 is connected to the lower opening of the lower magnetic pole cylinder 18.
下磁極筒18はその中心で軸方向に形成の大径孔26とこれに連なる小径孔27とで構成され、該小径孔27は下記する吸入弁30の弁座32となっている。 The lower magnetic pole cylinder 18 includes a large-diameter hole 26 formed in the axial direction at the center thereof and a small-diameter hole 27 connected thereto, and the small-diameter hole 27 serves as a valve seat 32 of an intake valve 30 described below.
吸入弁30は、円錐弁で、ステンレス鋼(SUS303)で作られ、前記のようにショットブラスト加工と不動態処理がなされ、前記スプリング受31と前記弁座32との間に介在のスプリング34により、弁座32に着座されている。 The suction valve 30 is a conical valve made of stainless steel (SUS303), which is subjected to shot blasting and passivation as described above, and is provided by a spring 34 interposed between the spring receiver 31 and the valve seat 32. , Is seated on the valve seat 32.
シリンダ36は、円筒形の部材で、ポリエーテルエーテルケトン(PEEK)前記下磁極筒18に形成の大径孔26内に嵌合され、その先端が前記吸入弁30に至っている。 The cylinder 36 is a cylindrical member and is fitted into a large-diameter hole 26 formed in the lower pole cylinder 18 of polyetheretherketone (PEEK), and the tip thereof reaches the intake valve 30.
ピストン37は、SUS303で製造され、前記のようにショットブラスト加工と不動態処理がなされ、中心で軸方向に貫通孔38を持つ円筒体で、前記シリンダ36に摺動自在に挿入され、下記するプランジャ51の往復動に従動される。このピストン37の下端である先端に吐出弁39が装着されている。この吐出弁39は、PEEKで作られ、スプリング43により弁座41に着座されている。 The piston 37 is manufactured from SUS303, and is subjected to shot blasting and passivation as described above. The piston 37 is a cylindrical body having a through hole 38 in the axial direction at the center, and is slidably inserted into the cylinder 36. It is driven by the reciprocating motion of the plunger 51. A discharge valve 39 is attached to the tip which is the lower end of the piston 37. The discharge valve 39 is made of PEEK and is seated on the valve seat 41 by a spring 43.
前記シリンダ36の図面上の上端に、リテーナとクッション49が取付られ、下記するプランジャ51の下方動を規制し、且つ騒音と振動を防いでいる。前記クッション49は、弾性材のフッ素ゴムが用いられ、移送の流体にイオンが溶出することがないようにしている。 A retainer and a cushion 49 are attached to the upper end of the cylinder 36 in the drawing, restricting the downward movement of the plunger 51 described below, and preventing noise and vibration. The cushion 49 is made of an elastic fluororubber so that ions are not eluted into the fluid to be transferred.
プランジャ51は、SUS430F等の磁性材により作られ、前記のようにショットブラスト加工と不動態処理がなされ、前記プランジャの駆動空間20内に、前記シリンダ36の下端との間に設けられた戻しスプリング52により反シリンダ側に押圧されて配されている。このプランジャ51は、内部に通孔53が形成され、該通孔53を用いて前記ピストン37が嵌着されている。従って、プランジャ51の往復動がピストン37に伝えられると共にピストン37の貫通孔38、通孔53を通ってポンプ室45からの流体が流され、プランジャの駆動空間20内に至る。 The plunger 51 is made of a magnetic material such as SUS430F, and is subjected to shot blasting and passivating as described above. The return spring is provided between the lower end of the cylinder 36 in the drive space 20 of the plunger. It is arranged so as to be pressed to the opposite cylinder side by 52. The plunger 51 has a through hole 53 formed therein, and the piston 37 is fitted using the through hole 53. Therefore, the reciprocating motion of the plunger 51 is transmitted to the piston 37, and the fluid from the pump chamber 45 is caused to flow through the through hole 38 and the through hole 53 of the piston 37 and reach the plunger drive space 20.
またプランジャ51の上端(下流側端)には閉止弁54が配され、コイル13への無通電時にこの閉止弁54が弁座56に着座され、弁孔55を閉じている。この閉止弁54と弁座56とでプランジャ51の反ピストン側への動きの規制と共に、ポンプ停止時にプランジャの駆動空間20から流体の流出や逆に流体の流入を阻止している。 Further, a shutoff valve 54 is disposed at the upper end (downstream end) of the plunger 51, and the shutoff valve 54 is seated on the valve seat 56 when the coil 13 is not energized, thereby closing the valve hole 55. The stop valve 54 and the valve seat 56 restrict the movement of the plunger 51 toward the non-piston side, and also prevent the fluid from flowing out from the driving space 20 of the plunger and conversely when the pump is stopped.
このプランジャ51は、前記コイル13に通電されて励磁されると、戻しスプリング52に抗してシリンダ側に変位し、その下端(上流側端)が前記クッション49に至る。前記コイル13が消励されると、戻しスプリング52の力により戻され、その上端の閉止弁54が弁座56に着座される。 When the coil 51 is energized and energized, the plunger 51 is displaced toward the cylinder against the return spring 52, and the lower end (upstream end) thereof reaches the cushion 49. When the coil 13 is de-energized, it is returned by the force of the return spring 52 and the closing valve 54 at the upper end thereof is seated on the valve seat 56.
プランジャの駆動空間20は、前述したごとく、ガイドパイプ16と上磁極筒19と下磁極筒18、シリンダ36により構成され、前記吐出弁39より後流側にあり、そして前記プランジャの駆動空間20にプランジャ51の内部に形成の通孔53を介して吐出流体が流入される。またプランジャの駆動空間20は、上磁極筒19の上端に形成のシート孔55を持つ弁座56を介して下記する吐出通路59に連通している。 As described above, the plunger drive space 20 includes the guide pipe 16, the upper magnetic pole cylinder 19, the lower magnetic pole cylinder 18, and the cylinder 36, is located downstream from the discharge valve 39, and is located in the plunger drive space 20. Discharged fluid flows into the plunger 51 through a through-hole 53 formed. The plunger drive space 20 communicates with a discharge passage 59 described below via a valve seat 56 having a seat hole 55 formed at the upper end of the upper magnetic pole cylinder 19.
吐出通路59は、この内部に流体の流れ方向に対向するようにスプリング65付勢の逆流防止弁61が設けられ、前記弁座56に着座されている。この逆流防止弁61により閉止弁54の開時にプランジャの駆動空間20への逆流が防がれる。逆流防止弁61は順方向への流体の流れを許し、プランジャ駆動空間20との圧力差により開閉する。 The discharge passage 59 is provided with a backflow prevention valve 61 biased by a spring 65 so as to face the fluid flow direction and is seated on the valve seat 56. The backflow prevention valve 61 prevents the backflow of the plunger into the drive space 20 when the closing valve 54 is opened. The backflow prevention valve 61 allows fluid flow in the forward direction and opens and closes due to a pressure difference with the plunger drive space 20.
上述の構成において、コイル13に例えば5HZのパルス電流を流すと、オン時にコイル13が励磁されると、下磁極筒18、上磁極筒19、プランジャ51が磁化され、プランジャ51が戻しスプリング52に抗して下方へ動き、その下端がシリンダ36に設けられたクッション49に当接し、下方動が止められる。このプランジャ51の動きは、ピストン37に伝えられ、該ピストン37は下方へ従動し、ポンプ室45は図の状態からデッドスペースが無きまで縮小する。これによりポンプ室45内の圧力が上昇し、圧力差から吐出弁39を開いて流体がプランジャ駆動空間20内へ吐出される。 In the above configuration, when a pulse current of 5 Hz, for example, is passed through the coil 13, when the coil 13 is excited when it is turned on, the lower magnetic pole cylinder 18, the upper magnetic pole cylinder 19, and the plunger 51 are magnetized, and the plunger 51 is moved to the return spring 52. The lower end moves against the cushion 49, and a lower end of the lower end abuts against a cushion 49 provided on the cylinder 36 to stop the downward movement. The movement of the plunger 51 is transmitted to the piston 37, the piston 37 is driven downward, and the pump chamber 45 is reduced from the state shown in the figure to a dead space. As a result, the pressure in the pump chamber 45 rises, and the discharge valve 39 is opened from the pressure difference to discharge the fluid into the plunger drive space 20.
パルス電流がオフとなると、下磁極筒18、上磁極筒19、プランジャ51が消磁され、プランジャ51は、戻しスプリング52により、上方へ動き、プランジャ駆動空間20内が圧縮されることにより圧力が高まり、該プランジャ駆動空間20内の流体が前記吐出通路59側との圧力差により前記逆流防止弁61を開成し、前記吐出通路59に流出する。そして開止弁54が弁座56に当接して、プランジャ駆動空間20内の圧縮行程が停止される。その際に、ポンプ室45内の容積が拡大する。これにより、ポンプ室45内の圧力が低下し、圧力差から吸入弁30を開いて流体が吸入される。 When the pulse current is turned off, the lower magnetic pole cylinder 18, the upper magnetic pole cylinder 19, and the plunger 51 are demagnetized, and the plunger 51 is moved upward by the return spring 52, and the pressure inside the plunger driving space 20 is compressed. The fluid in the plunger drive space 20 opens the backflow prevention valve 61 due to the pressure difference from the discharge passage 59 side and flows out into the discharge passage 59. Then, the stop valve 54 contacts the valve seat 56, and the compression stroke in the plunger drive space 20 is stopped. At that time, the volume in the pump chamber 45 increases. As a result, the pressure in the pump chamber 45 decreases, and the suction valve 30 is opened from the pressure difference to suck the fluid.
そして、パルス電流が再びオンとなると、プランジャ51及びピストン37が下方動しポンプ室45内の加圧作用が開始される。このような作用が繰り返され、ポンプ作用が行われる。 When the pulse current is turned on again, the plunger 51 and the piston 37 move downward, and the pressurizing action in the pump chamber 45 is started. Such an action is repeated and a pump action is performed.
なお、前記したピストン37、プランジャ51のみならず吸入弁30がステンレス鋼(SUS303)で作られ、前記のようにショットブラスト加工と不動態処理がなされているが、その他に弁座41,56などもステンレス鋼(SUS303)により作られ、前記した表面処理がなされている。さらに、切削加工品以外のスプリング52及びガイドパイプ16もSUS340又はSUS304で作られ、濃硝酸に浸せきの不動態処理が施されている。このように、液体との接液部に本発明の表面処理がなされることで、特に硫黄の溶出が抑えられる。 The intake valve 30 as well as the piston 37 and plunger 51 described above are made of stainless steel (SUS303), and the shot blasting and passive processing are performed as described above. Is also made of stainless steel (SUS303) and has the surface treatment described above. Further, the spring 52 and the guide pipe 16 other than the machined product are also made of SUS340 or SUS304, and are subjected to a passive treatment of immersion in concentrated nitric acid. As described above, the surface treatment of the present invention is performed on the liquid contact portion with the liquid, and in particular, elution of sulfur is suppressed.
11 電磁ポンプ
12 ケース
13 コイル
16 ガイドパイプ
20 プランジャの駆動空間
23 吸入通路
24 吸入継手
30 吸入弁
32 弁座
36 シリンダ
37 ピストン
39 吐出弁
41 弁座
45 ポンプ室
49 クッション
51 プランジャ
52 戻しスプリング
54 閉止弁
56 弁座
59 吐出通路
61 逆流防止弁
DESCRIPTION OF SYMBOLS 11 Electromagnetic pump 12 Case 13 Coil 16 Guide pipe 20 Plunger drive space 23 Suction passage 24 Suction joint 30 Suction valve 32 Valve seat 36 Cylinder 37 Piston 39 Discharge valve 41 Valve seat
45 Pump chamber 49 Cushion 51 Plunger 52 Return spring 54 Stop valve 56 Valve seat 59 Discharge passage 61 Backflow prevention valve
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