JP2008185232A - Temperature-regulated air supplying device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To reduce a capacity of a heater in a temperature regulating device for cooling the air current by a heat exchanger and heating the cooled air current by a heater. <P>SOLUTION: This temperature-regulated air supplying device comprises a refrigerating machine 42, the heat exchanger 36 in which a refrigerant is circulated from the refrigerating machine 42 for cooling the air current taken therein, the heater 38 for heating the cooled air cooled by passing through the heat exchanger 36 to obtain the temperature-regulated air of a prescribed temperature, an air blower 40 for distributing the air heated by the heater 38, a first temperature sensor 56 for detecting a temperature of the air distributed from the air blower 40, a heating control portion 54 controlling the heater 38 to regulate a heating temperature by the heater 38 on the basis of a temperature detected by the first temperature sensor 56, and a refrigerating machine control portion 72 controlling a temperature of the refrigerant circulated to the heat exchanger 36 from the refrigerating machine 42 on the basis of the temperature detected by the first temperature sensor 56. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a temperature-controlled air supply device that generates an air flow having a predetermined temperature.

For example, in the manufacture of a liquid crystal display, precision processing such as film formation by sputtering or plasma CVD or exposure by an exposure apparatus is performed on a glass plate in a clean room controlled in temperature and humidity.
In such precision processing, the size fluctuation of the glass plate due to temperature change affects its processing accuracy, so in order to eliminate the glass plate size fluctuation due to temperature change in advance before performing precision processing, A glass plate is placed on a shelf installed in a clean room for a predetermined time (see, for example, Patent Document 1 and Patent Document 2).

Precision processing is performed on the glass plate placed on the shelf for a predetermined time and adjusted to the temperature in the clean room.
However, in recent years, a large glass plate has been adopted as a glass plate used as a substrate with an increase in size of a liquid crystal display. For this reason, the variation in the size of the glass plate due to the temperature change in the clean room has come to affect the processing accuracy of precision processing.

  In order to reduce the size variation due to temperature change of such a large glass plate as much as possible, the applicant of the present application introduces the refrigerant cooled by the refrigerator into the heat exchanger to cool the air flow, It has been found that by further heating the cooled air flow with a heater which is a heating device, temperature-controlled air whose temperature is adjusted to a predetermined temperature can be generated, and precise temperature adjustment can be performed (Japanese Patent Application No. 2006-2006). 196346).

The configuration of such a temperature-controlled air supply device will be described with reference to FIG.
The temperature-controlled air supply device 10 supplies temperature-controlled air adjusted to a predetermined temperature into a chamber 11 in which a work (not shown) such as a glass plate is placed.
The temperature control air supply device 10 is provided with a cooling means for cooling the air flow and a heating means for heating. As the cooling means, a heat exchanger 12 connected to the refrigerator 13 is used, and as the heating means, A heater 14 is used.

The heat exchanger 12 is connected to the refrigerator 13 via a supply pipe 15 that supplies a refrigerant and a return pipe 16 that returns the refrigerant. Water is used as this refrigerant.
Further, in the temperature-controlled air supply device 10, air as a refrigerant cooled to a predetermined temperature by the refrigerator 13 is circulated in the heat exchanger 12, so that air sucked from the opening 18 is circulated by the heat exchanger 12. After cooling, the temperature is adjusted to a predetermined temperature by the heater 14. The heater 14 can change the heating temperature easily and quickly as compared with the case where the refrigerant temperature is changed by the refrigerator 13. For this reason, the temperature of the air flow can be easily and quickly adjusted to a predetermined temperature.

  The heater 14 is controlled by the control unit 20. In the control unit 20, the heater 14 is controlled based on the preset temperature set in advance and the temperature of the air flow blown out from the filter 24 measured by the temperature sensor 22.

  The air flow adjusted to a predetermined temperature while passing through the heater 14 is blown into the chamber 11 by the blower 26 to keep the inside of the chamber 11 at a predetermined pressure.

JP 2002-72492 A JP 2004-200706 A

  According to the temperature control air supply device 10 described above, when the temperature of the air flow taken into the heat exchanger 12 is lower than the temperature to be set, the temperature of the air flow that has passed through the heat exchanger 12 is further lowered. The electric capacity of the heater 14 that heats the air flow that has passed through the heat exchanger 12 must be increased in advance to adjust the temperature to a predetermined temperature that should be set.

Thus, in the case where the air flow is cooled and then heated to generate temperature-controlled air having a predetermined temperature, if only the heater 14 is controlled based on the actual temperature of the temperature-controlled air, The capacity must be increased in advance, and the manufacturing cost is high.
In particular, when the temperature of the air flow that has passed through the heat exchanger 12 is low, the power consumption of the heater 14 naturally increases to raise the temperature of the air flow to a predetermined temperature, and the running cost is high. There is a problem of becoming.

  The inventors of the present invention have come up with the present invention as a result of intensive studies on the assumption that it is not necessary to increase the capacity of the heater if the cooling process in the heat exchanger can be controlled.

  Accordingly, the present invention has been made to solve the above-mentioned problems, and an object of the present invention is to cool an air flow with a heat exchanger connected to a refrigerator, and heat the cooled air flow with a heater so as to air at a predetermined temperature. An object of the present invention is to provide a temperature-controlled air supply device that controls a cooling process in a heat exchanger so as to reduce the electrical capacity of a heater in a temperature-controlled air supply device that obtains a flow.

In order to achieve the above object, the present invention comprises the following arrangement.
That is, according to the temperature-controlled air supply device of the present invention, in the temperature-controlled air supply device that generates an air flow at a predetermined temperature, the refrigerant that is supplied with the refrigerant and the refrigerant that is supplied from the refrigerator are circulated and introduced. A heat exchanger that cools the generated air flow, a heater that heats the cooling air that has passed through the heat exchanger and that has been cooled to obtain temperature-controlled air, and for sending out the air heated by the heater , A first temperature sensor for detecting the temperature of the air sent from the blower, and the heater is controlled based on the temperature detected by the first temperature sensor to adjust the heating temperature by the heater. It is characterized by comprising a heating control unit that performs and a refrigerator control unit that controls the temperature of the refrigerant supplied by the refrigerator based on the temperature detected by the first temperature sensor.
By adopting this configuration, the temperature of the refrigerant supplied to the heat exchanger is automatically controlled based on the final temperature of the temperature-controlled air, and the cooling process in the heat exchanger can be controlled. For this reason, even when the temperature of the air flow taken into the heat exchanger is low, the heat exchanger can be controlled so as not to lower the temperature of the air flow too much, and the electrical capacity of the heater provided in the subsequent stage of the heat exchanger It is not necessary to increase the size in advance. In addition, power consumption during heating in the heater can be reduced.

Further, in a temperature-controlled air supply device that generates an air flow of a predetermined temperature, a refrigerator that supplies refrigerant, a heat exchanger that circulates the refrigerant supplied from the refrigerator and cools the introduced air flow, A heater that heats the cooling air that has passed through the heat exchanger and that is heated to a temperature-controlled air at a predetermined temperature, a blower that sends out the air heated by the heater, and an air that is sent from the blower A first temperature sensor for detecting a temperature; a second temperature sensor for detecting a temperature of air introduced into the heat exchanger; and the heater is controlled based on the temperature detected by the first temperature sensor. A heating control unit that adjusts the heating temperature by the heater, and a refrigerator control unit that controls the temperature of the refrigerant supplied by the refrigerator based on the temperature detected by the second temperature sensor. Features and To have.
According to this configuration, the temperature of the refrigerant supplied to the heat exchanger is automatically controlled based on the temperature of the air taken into the heat exchanger, and the cooling process in the heat exchanger can be controlled. For this reason, even when the temperature of the air flow taken into the heat exchanger is low, the heat exchanger can be controlled so as not to lower the temperature of the air flow too much, and the electrical capacity of the heater provided in the subsequent stage of the heat exchanger It is not necessary to increase the size in advance. In addition, power consumption during heating in the heater can be reduced.

Further, in a temperature-controlled air supply device that generates an air flow of a predetermined temperature, a refrigerator that supplies refrigerant, a heat exchanger that circulates the refrigerant supplied from the refrigerator and cools the introduced air flow, A heater that heats the cooling air that has passed through the heat exchanger and that is heated to a temperature-controlled air at a predetermined temperature, a blower that sends out the air heated by the heater, and an air that is sent from the blower A first temperature sensor for detecting a temperature; a second temperature sensor for detecting a temperature of air introduced into the heat exchanger; and the heater is controlled based on the temperature detected by the first temperature sensor. A heating control unit that adjusts the heating temperature by the heater, and a refrigerator control unit that controls the temperature of the refrigerant supplied by the refrigerator based on the temperatures detected by the first temperature sensor and the second temperature sensor When It is characterized by comprising.
According to this configuration, the temperature of the refrigerant supplied to the heat exchanger is automatically controlled based on the final temperature of the temperature-controlled air and the temperature of the air taken into the heat exchanger, and the cooling process in the heat exchanger Can be controlled. For this reason, even when the temperature of the air flow taken into the heat exchanger is low, the heat exchanger can be controlled so as not to lower the temperature of the air flow too much, and the electrical capacity of the heater provided in the subsequent stage of the heat exchanger It is not necessary to increase the size in advance. In addition, power consumption during heating in the heater can be reduced.

  According to the temperature-controlled air supply device according to the present invention, since the cooling of the air flow in the heat exchanger can be controlled, the electrical capacity of the heater can be reduced, which contributes to cost reduction. In addition, the power consumption of the heater can be reduced, which contributes to a reduction in running cost.

DESCRIPTION OF EXEMPLARY EMBODIMENTS Hereinafter, preferred embodiments of the invention will be described in detail with reference to the accompanying drawings.
(First embodiment)
In FIG. 1, the whole structure of the temperature control air supply apparatus of this invention is shown.
The temperature-controlled air supply device 30 shown in the present embodiment is placed in the chamber 31 so as to maintain a glass plate for a liquid crystal display at a predetermined temperature before performing precision processing, as described in the prior art. In contrast, an air flow having a predetermined temperature is ejected.
The temperature-controlled air supply device 30 and the chamber 31 are installed in a clean room whose temperature and humidity are adjusted as a whole. Even if the temperature in the clean room changes, the temperature change does not reach the glass plate. It is provided so that it can be.

The temperature-controlled air supply device 30 is disposed adjacent to the opening side of the chamber 31 and feeds temperature-controlled air adjusted to a predetermined temperature into the chamber 31.
A filter 34 is provided at the temperature-controlled air outlet 33 of the temperature-controlled air supply device 30 to remove dust from the air flow fed into the chamber 31. As the filter 34, if a HEPA filter (High Efficiency Particulate Air filter) that can collect 0.3 μm particles or a ULPA filter (Ultra Low Penetration Air filter) that can collect 0.15 μm particles is used, the dust is highly removed. It is preferable that the air flow can be blown out from the entire surface of the filter 34.

  An opening 35 that is open is formed in a part of the outer wall surface of the temperature-controlled air supply device 30, and the air taken in from the opening 35 is a heat exchanger 36 that is a cooling means and a heater that is a heating means. The temperature is adjusted to a predetermined temperature through 38 and blown out as temperature-controlled air from the blow-out port 33 by the blower 40.

The heat exchanger 36 is connected to the refrigerator 42 and circulates the refrigerant cooled by the refrigerator 42 to cool the air flow taken from the opening 35. Connected between the heat exchanger 36 and the refrigerator 42 are a supply pipe 44 that supplies the refrigerant to the heat exchanger 36 and a return pipe 46 that returns the refrigerant from the heat exchanger 36 to the refrigerator 42.
Each of the supply pipe 44 and the return pipe 46 is provided with strainers 48 and 49 for filtering foreign matter.
Further, by using water as the refrigerant, the heat exchanger 36 can be repaired easily.

The control unit 54 is connected to a temperature sensor 56 that detects the temperature of the temperature-controlled air flow that is finally blown out from the blow-out port 33, so that the temperature is set in advance based on the temperature detected by the temperature sensor 56. The heater 38 is controlled.
Specifically, a temperature regulator 57 is provided in the control unit 54, and a user can input a set temperature. The temperature controller 57 may send the control signal to a solid-state contactor (hereinafter simply referred to as SSC) so that the temperature of the temperature-controlled air becomes a preset temperature based on the temperature detected by the temperature sensor 56. ) 58, and the SSC 58 outputs a pulse voltage to the heater 38 to control the heating of the heater 38.

  The control of the heater 38 of the temperature controller 57 is preferably performed by PID control. That is, in the PID control, a proportional operation (P operation) in which the heater temperature is changed in accordance with the temperature difference between the set temperature and the temperature measured by the temperature sensor 56, and the heater temperature is changed in proportion to the duration of the temperature difference. It consists of an integration operation (I operation) and a differential operation (D operation) that changes the heater temperature in proportion to the amount of change in temperature difference.

A control circuit 72 that outputs a control signal capable of controlling the temperature of the refrigerant of the refrigerator 42 is provided in the control unit 54.
The control circuit 72 is connected to the temperature regulator 57 and outputs a control signal that can be controlled on the refrigerator 42 side based on a control signal from the temperature regulator 57.

  Specifically, the control circuit 72 and the refrigerator 42 are connected by a cable 59 capable of communicating by serial communication such as RS485, and the refrigerator 42 is provided with a communication port 64 to which the cable 59 can be connected. It has been.

The refrigerator 42 includes a water tank 65 for storing refrigerant to be supplied to the heat exchanger 36, a circulation path 66 for circulating the refrigerant circulating inside the refrigerator 42, an internal heat exchanger 67, and an internal heat exchanger 67. And a pressure feed pump 78 for supplying the refrigerant cooled by the internal heat exchanger 67 to the heat exchanger 36, and circulates inside the refrigerator 42 by the internal heat exchanger 67. Heat exchange is performed between the refrigerant and the refrigerant supplied to the heat exchanger 36, and the refrigerant supplied to the heat exchanger 36 is cooled.
An internal heat exchanger 67, a compressor 68, a condenser 69, and an expansion valve 74 are disposed in the circulation path 66, and the refrigerant circulating in the refrigerator 42 is separated from the refrigerant by the internal heat exchanger 67. Deprived of heat, the temperature rises by being compressed by the compressor 68, and then condensed by the condenser 69 to dissipate heat together with the latent heat of condensation, and the pressure is reduced by the expansion valve 74, the temperature is lowered, It is again introduced into the internal heat exchanger 67.

The refrigerator 42 is provided with a control unit 76 for controlling the rotation speed of the compressor 68. Specifically, the controller 76 can control the rotational speed of the compressor 68 by inverter control or the like.
The control signal input to the communication port 64 described above is transmitted to the control unit 76, and the control unit 76 controls the rotational speed of the compressor 68 based on the received control signal. In this way, the rotational speed of the compressor 68 is controlled based on the control signal input from the control circuit 72, and the temperature of the refrigerant circulating in the refrigerator 42 is adjusted to supply the heat exchanger 36. The temperature of the refrigerant to be adjusted can be adjusted.

  Note that both the control of the heater 38 and the control of the refrigerator 42 in this embodiment are executed by a single temperature controller 57. Therefore, the refrigerator control unit referred to in the claims corresponds to the temperature regulator 57 and the control circuit 72 in the present embodiment, and the heating controller referred to in the claims corresponds to the temperature regulator 57 and the SSC 58 in the present embodiment. Applicable.

A water leakage sensor 60 and a drain port 61 are provided below the heat exchanger 36. When the water leakage sensor 60 detects water leakage, the operation of the refrigerator 42 is controlled to stop. The drain port 61 is provided with a drain valve 62.
Further, an excessive temperature rise prevention thermo 64 is provided in the vicinity of the heater 38, and can be controlled by the control unit 54 so as to stop the operation when it is detected that the heater 38 has exceeded a predetermined temperature. Is provided.

Hereinafter, the operation of the temperature-controlled air supply device 30 in the first embodiment will be described.
In the refrigerator 42, the temperature of the refrigerant is set to be 4 ° C. lower than the set temperature.
When the temperature of the temperature-controlled air measured by the temperature sensor 56 is higher than the set temperature, the control unit 54 controls the refrigerator 42 so as to lower the temperature of the refrigerant supplied by the refrigerator 42.
When the temperature of the temperature-controlled air measured by the temperature sensor 56 is lower than the set temperature, the control unit 54 controls the refrigerator 42 so as to increase the temperature of the refrigerant supplied by the refrigerator 42.
As described above, the temperature of the refrigerant flowing through the heat exchanger 36 can be controlled, so that the electric capacity of the heater can be reduced to about 1/3 to 1/4 of the conventional capacity. became.
In addition, the power consumption of the heater 38 when the temperature of the air taken in is low is almost equal to the power consumption when the temperature of the air taken in is high.

(Second Embodiment)
Next, a second embodiment of the temperature-controlled air supply device will be described.
However, the same components as those in the first embodiment described above are denoted by the same reference numerals, and description thereof may be omitted.
This embodiment is different from the first embodiment in that a temperature sensor 70 is provided between the opening 35 for introducing an air flow into the heat exchanger 36 and the heat exchanger 36.

The temperature sensor 70 measures the temperature of the air flow taken into the heat exchanger 36 and outputs the measured air temperature to the control unit 54.
The control unit 54 includes a temperature controller 57 connected to a temperature sensor 56 that measures the temperature of the air finally provided at the outlet 33, an SSC 58 that controls the heater 38, and a refrigerator. 42 is provided with a control circuit 72 for outputting a control signal.
The control circuit 72 receives the temperature measured by the temperature sensor 70, calculates the difference between the temperature measured by the temperature sensor 70 and a preset temperature, and controls the refrigerator 42 based on the calculated difference. And a function of outputting a signal.

  In this way, the cooling of the air flow in the heat exchanger 36 is controlled by controlling the refrigerator 42 so as to eliminate the difference from the set temperature by measuring the temperature on the input side of the air flow. This contributes to a reduction in running cost.

Hereinafter, the operation of the temperature-controlled air supply device 30 in the second embodiment will be described.
In the refrigerator 42, the temperature of the refrigerant is set to be 4 ° C. lower than the set temperature.
When the temperature of the air taken in measured by the temperature sensor 70 is higher than the set temperature, the control unit 54 controls the refrigerator 42 so as to lower the temperature of the refrigerant supplied by the refrigerator 42.
When the temperature of the air taken in measured by the temperature sensor 70 is lower than the set temperature, the control unit 54 controls the refrigerator 42 so as to lower the temperature of the refrigerant supplied by the refrigerator 42.
As described above, the temperature of the refrigerant flowing through the heat exchanger 36 can be controlled, so that the electric capacity of the heater can be reduced to about 1/3 to 1/4 of the conventional capacity. became.
In addition, the power consumption of the heater 38 when the temperature of the air taken in is low is almost equal to the power consumption when the temperature of the air taken in is high.

  Note that the temperature measured by the temperature sensor 70 in this embodiment is compared with the preset temperature set by the user in advance, and finally the temperature is blown out from the outlet 33 measured by the temperature sensor 56. It may be the temperature of the air.

In each of the embodiments described above, the temperature controller 57 in the control unit 54 can output control signals of two systems on the heating side and the cooling side to one temperature sensor 56. Accordingly, in each embodiment, the temperature controller 57 can be controlled by providing only one unit. However, in the case of using a temperature controller having only one output, a temperature controller that controls the heater, and a refrigerator. Two temperature controllers for controlling the temperature 42 are required.
Further, when two temperature controllers are provided, a temperature sensor is required for each of them. Therefore, a temperature sensor 56 provided at the outlet 33 and a temperature sensor provided between the opening 35 and the heat exchanger 36 are provided. Two pieces of 70 are required.

  Further, the air temperature measured by the temperature sensor 56 and the temperature sensor 70 necessary for controlling the refrigerator 42 is not input to the temperature regulator 57 but directly input to the control circuit 72. Good. In such a case, the temperature controller 57 only controls the heater 38 and outputs a control signal to the refrigerator 42, and the control circuit 72 corresponds to the refrigerator control unit in the claims.

  In the description so far, the glass plate of the liquid crystal display has been described as the workpiece, but the temperature-controlled air supply device of the present invention can also be used for temperature adjustment of the semiconductor wafer.

  While the present invention has been described above with reference to a preferred embodiment, the present invention is not limited to this embodiment, and it goes without saying that many modifications can be made without departing from the spirit of the invention. .

It is explanatory drawing explaining the whole structure of 1st Embodiment of a temperature control air supply apparatus. It is explanatory drawing explaining the whole structure of 2nd Embodiment of a temperature control air supply apparatus. It is explanatory drawing explaining the whole structure of the conventional temperature control air supply apparatus.

Explanation of symbols

30 Temperature Control Air Supply Device 31 Chamber 33 Outlet 34 Filter 35 Opening 36 Heat Exchanger 38 Heater 40 Blower 42 Refrigerator 44 Supply Pipe 46 Return Pipe 48, 49 Strainer 54 Control Unit 56 Temperature Sensor 57 Temperature Controller 59 Cable 60 Water leakage sensor 61 Drain port 62 Drain valve 64 Excess temperature rise prevention thermo 64 Communication port 65 Water tank 66 Circulation path 67 Internal heat exchanger 68 Compressor 69 Condenser 70 Temperature sensor 72 Control circuit 74 Expansion valve 76 Control unit 78 Pressure pump

Claims (3)

In a temperature-controlled air supply device that generates an air flow at a predetermined temperature,
A refrigerator,
A heat exchanger that circulates refrigerant from the refrigerator and cools the air flow taken in;
A heater that heats the cooling air that has passed through the heat exchanger and is cooled to have a predetermined temperature, and
A blower for sending out air heated by the heater;
A first temperature sensor for detecting the temperature of air sent from the blower;
A heating control unit that controls the heater based on the temperature detected by the first temperature sensor and adjusts the heating temperature by the heater;
A temperature-controlled air supply apparatus comprising: a refrigerator control unit that controls a temperature of a refrigerant circulated from the refrigerator to a heat exchanger based on the temperature detected by the first temperature sensor. In a temperature-controlled air supply device that generates an air flow at a predetermined temperature,
A refrigerator,
The refrigerant is circulated from the refrigerator,
A heat exchanger that cools the air flow taken in;
A heater that heats the cooling air that has passed through the heat exchanger and is cooled to have a predetermined temperature, and
A blower for sending out air heated by the heater;
A first temperature sensor for detecting the temperature of air sent from the blower;
A second temperature sensor for detecting the temperature of air introduced into the heat exchanger;
A heating control unit that controls the heater based on the temperature detected by the first temperature sensor and adjusts the heating temperature by the heater;
A temperature-controlled air supply device comprising: a refrigerator control unit that controls a temperature of a refrigerant circulated from the refrigerator to a heat exchanger based on the temperature detected by the second temperature sensor. In a temperature-controlled air supply device that generates an air flow at a predetermined temperature,
A refrigerator,
A heat exchanger that circulates refrigerant from the refrigerator and cools the air flow taken in;
A heater that heats the cooling air that has passed through the heat exchanger and is cooled to have a predetermined temperature, and
A blower for sending out air heated by the heater;
A first temperature sensor for detecting the temperature of air sent from the blower;
A second temperature sensor for detecting the temperature of air introduced into the heat exchanger;
A heating control unit that controls the heater based on the temperature detected by the first temperature sensor and adjusts the heating temperature by the heater;
And a refrigerator control unit that controls a temperature of the refrigerant circulated from the refrigerator to the heat exchanger based on the temperatures detected by the first temperature sensor and the second temperature sensor. Temperature control air supply device.

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