JP2008172089A - Lifter device - Google Patents

Abstract

The present invention provides a lifter device that can save space by reducing the overall size of the lifter device and can reduce maintenance and maintenance parts by eliminating the need for a filter in a machine area.
A lift 4 that lifts and lowers a transported object placed on a clean booth 2, a lift mast 5 that supports the lift 4 so as to be liftable, and a drive that lifts the lift 4 via the lift mast 5. The device 6 is disposed, and the lifter mast 5 and the machine area 8 in which the drive device 6 is installed are separated from the lifter area 7 where the lifting body 4 moves up and down, and a lifter is introduced into the lifter area 7. In the apparatus, a part of the machine area 8 is partitioned by the partition wall 9 of the return duct 3, and an opening 10 is provided in the partition wall 9 for discharging the air that has passed through the machine area 8 to the return duct 3.
[Selection] Figure 1

Description

  The present invention relates to a lifter device installed in a clean room or the like, and in particular, a lifter device capable of reducing the overall size of the lifter device to save space, eliminating the need for a filter in the machine area, and reducing maintenance and maintenance parts. It is about.

In recent years, as liquid crystal glass substrates and semiconductor wafers have become larger in size, the area of a clean room where unmanned transfer carts and manufacturing equipment are installed has increased. For this reason, there are cases where the factory building has multiple floors or more. .
In this case, in order to transport the cassette containing the liquid crystal glass substrate and the semiconductor wafer between the floors, a lifter device that moves up and down between the plurality of floors is provided.

As shown in FIG. 2, the lifter device includes a downflow clean booth 2 having a fan filter unit (FFU) 1 at the top, and a return for returning the air that has passed through the clean booth 2 to the upstream side of the fan filter unit 1. A duct 3, a lifting body 4 that lifts and lowers a transported object placed on the clean booth 2, a lifting mast 5 that supports the lifting body 4 so as to be lifted and lowered, and a lifting body through the lifting mast 5. A drive device 6 for moving up and down 4 is disposed.
Then, the machine area 8 where the elevating mast and the driving device are installed is divided from the lifter area 7 where the elevating body moves up and down, and the downflow is introduced into the lifter area 7.

  That is, in the conventional lifter device, since the elevating mast 5 has a sliding portion, the elevating mast 5 and the machine area 8 of the driving device 6 are covered with the bottomed cover 83, and the fan filter unit ( FFU) 1a is attached to keep the lifter area 7 clean. However, since the cover 83 is formed independently from the surroundings, a filter is required in the exhaust part, and the partition between the cover 83 and the return duct 3 is provided. There is a problem that it is necessary separately and a space S is required.

  In view of the problems of the above conventional lifter device, the present invention reduces the overall size of the lifter device to save space, eliminates the need for a filter in the machine area, and reduces maintenance and maintenance parts. The purpose is to provide.

  In order to achieve the above object, a lifter device according to the present invention comprises a downflow clean booth equipped with a filter in the upper part, and a return duct for returning the air that has passed through the clean booth to the upstream side of the filter. In addition, an elevating body that places the transported object and moves up and down, an elevating mast that supports the elevating body so as to be movable up and down, and a drive device that elevates and lowers the elevating body through the elevating mast are disposed. In the lifter device in which the lift mast and the drive device are installed from the lifter area where the elevator moves up and down, and the downflow is introduced into the lifter area, a part of the machine area is formed by partitioning the return duct. In addition, the partition is provided with an opening for discharging the air that has passed through the machine area to the return duct.

  According to the lifter device of the present invention, it is provided with a downflow clean booth provided with a filter in the upper part, and a return duct for returning the air that has passed through the clean booth to the upstream side of the filter. A lifting / lowering body that is mounted and lifted / lowered, a lifting / lowering mast that supports the lifting / lowering body so that the lifting / lowering body can be lifted / lowered, and a drive device that lifts / lowers the lifting / lowering body via the lifting / lowering mast are disposed. In the lifter device in which the machine area where the lifting mast and the driving device are installed is partitioned and the downflow is introduced into the lifter area, a part of the machine area is partitioned by the partition wall of the return duct, and the partition wall Since an opening is provided to discharge the air that has passed through the machine area to the return duct, a part of the partition in the machine area is omitted, and air conditioning is included. The overall size of the lifter device is reduced to save space, and the air that has passed through the machine area is exhausted directly to the return duct to keep the lifter area clean even without a fan filter unit in the machine area. As a result, the cost can be reduced and a filter is not required, so that maintenance and maintenance parts can be reduced.

  Hereinafter, embodiments of a lifter device of the present invention will be described with reference to the drawings.

FIG. 1 shows an embodiment of the lifter device of the present invention.
This lifter device comprises a downflow clean booth 2 having a fan filter unit 1 at the top, and a return duct 3 for returning the air that has passed through the clean booth 2 to the upstream side of the fan filter unit 1. 2, a lifting / lowering body 4 that lifts and lowers the transported object, a lifting / lowering mast 5 that supports the lifting / lowering body 4 so that it can be lifted / lowered, and a drive device 6 that lifts / lowers the lifting / lowering body 4 via the lifting / lowering mast 5. In addition, a machine area 8 where the elevating mast 5 and the driving device 6 are installed is partitioned from the lifter area 7 where the elevating body 4 moves up and down, and a downflow is introduced into the lifter area 7.
The lifter device forms a part of the machine area 8 with the partition wall 9 of the return duct 3, and the partition wall 9 is provided with an opening 10 for discharging the air that has passed through the machine area 8 to the return duct 3. ing.

The clean booth 2 is partitioned from the outside by an outer wall and generates a downflow of clean air by a plurality of fan filter units 1 arranged at the upper part.
The generated downflow circulates from the bottom of the clean booth 2 to the upstream side of the fan filter unit 1 through the return duct 3 installed at the rear.

The clean booth 2 includes an elevating body 4 that elevates and lowers a conveyed product, an elevating mast 5 that supports the elevating body 4 together with a balance weight 41, and a drive device that elevates the elevating body 4 via the elevating mast 5. 6 are arranged.
Of these, the lifting mast 5 has a sliding portion, and particles are generated. Therefore, the machine area 8 where the lifting mast 5 and the driving device 6 are installed is divided so as to be separated from the lifter area 7 and is lowered to the lifter area 7. The flow is introduced.

The machine area 8 is demarcated by a bottomed cover 82 that is open at the top, and a rear partition 81 is also used as a part of the partition 9 of the return duct 3.
The rear partition wall 81 is provided with a plurality of openings 10 spaced vertically from the lifter area 7 through the gap between the cover 82 and exhausting the air flowing into the machine area 8 into the return duct 3.
In the present embodiment, the flow rate is controlled by opening the opening 10 so as to be lower in the lower position, but the flow rate can also be adjusted by attaching a fan or a louver.
Particles generated in the elevating mast 5 are discharged directly from the opening 10 of the rear partition 81 into the return duct 3 and are filtered by the fan filter unit 1 above the clean booth 2 together with the air that has passed through the lifter area 7.
The air from which the particles are filtered is supplied to the lifter area 7 as a downflow of clean air.

  Thus, the lifter device of the present embodiment includes a downflow clean booth 2 provided with a fan filter unit 1 at the top, and a return duct 3 for returning the air that has passed through the clean booth 2 to the upstream side of the fan filter unit 1. A lift body 4 that lifts and lowers a transported object placed on the clean booth 2; a lift mast 5 that supports the lift body 4 so as to be liftable; and the lift body 4 is lifted and lowered via the lift mast 5. The drive device 6 is disposed, and the lift mast 5 and the machine area 8 in which the drive device 6 is installed are partitioned from the lifter area 7 where the lifting body 4 moves up and down, and the downflow is introduced into the lifter area 7. In the lifter device, a part of the machine area 8 is defined by the partition wall 9 of the return duct 3, and air that has passed through the machine area 8 is returned to the partition wall 9 by a return duct. Since the opening 10 for discharging is provided in the hood 3, a part of the partition wall of the machine area 8 is omitted, and the overall size of the lifter device including the air conditioner is reduced to save space and pass through the machine area 8. The exhausted air is exhausted directly to the return duct 3 so that the lifter area 7 can be kept clean without providing a fan filter unit in the machine area 8, thereby reducing costs and eliminating the need for a filter. Maintenance and maintenance parts can be reduced.

  As mentioned above, although the lifter device of the present invention has been described based on the embodiments thereof, the present invention is not limited to the configurations described in the above embodiments, and the purpose thereof is, for example, appropriately combining the configurations described in the embodiments. The configuration can be changed as appropriate without departing from the scope of the invention.

  The lifter device of the present invention has the characteristics that the overall size of the lifter device is reduced to save space, and the filter of the machine area is not required, and maintenance and maintenance parts can be reduced. It can be used widely and suitably for lifter devices installed in clean rooms and the like.

One Example of the lifter apparatus of this invention is shown, (a) is the longitudinal cross-sectional view, (b) is the BB sectional drawing of (a). The conventional lifter apparatus is shown, (a) is the longitudinal cross-sectional view, (b) is the sectional view on the AA line of (a).

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Fan filter unit 2 Clean booth 3 Return duct 4 Lifting body 41 Balance weight 5 Lifting mast 6 Drive unit 7 Lifter area 8 Machine area 81 Rear partition 82 Cover 9 Partition 10 Opening

Claims (1)

  A downflow clean booth provided with a filter at the top, and a return duct for returning the air that has passed through the clean booth to the upstream side of the filter; An elevating mast that supports the elevating body so as to be movable up and down, and a drive device that elevates the elevating body through the elevating mast are disposed, and the elevating mast and the driving device are installed from a lifter area where the elevating body moves up and down In the lifter device that divides the machine area and introduces the downflow to the lifter area, a part of the machine area is defined by the partition of the return duct, and the air that has passed through the machine area is returned to the partition. A lifter device comprising an opening for discharging the duct.

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