JP2008159276A - Vacuum equipment and its manufacturing method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a vacuum apparatus capable of keeping the inside of a vacuum envelope in a high-vacuum state. <P>SOLUTION: The vacuum apparatus includes a hermetically-sealed vacuum envelope 2 and an exhaust pipe 60 communicated with the inside of the vacuum envelope to evacuate the vacuum envelope of air. The exhaust pipe includes a smaller inner-diameter portion 60a and a greater inner-diameter portion 60b which is disposed far away from the vacuum envelope relative to the smaller inner diameter portion and has a greater inner diameter than that of the smaller inner portion. The exhaust pipe is sealed with a metallic material 62 at a position where the smaller and greater inner-diameter portions adjoin each other. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a vacuum apparatus including at least one electrode in a vacuum envelope maintained at a predetermined high vacuum, and a method for manufacturing the same.

  At least one electrode and electron emission means are arranged in a vacuum envelope maintained at a predetermined high vacuum, and a predetermined voltage is applied to the electrode from the outside of the vacuum envelope via a conductor passing through the vacuum envelope. There is known a vacuum apparatus that controls the amount of electrons emitted from the electron emission means by applying a voltage to perform a desired operation.

  As an operation of such a vacuum apparatus, for example, so-called amplification that converts a small electric signal inputted into a large electric signal and outputs it, an electric signal according to the brightness of incident light, and vice versa. And photoelectric conversion that emits light in response to an input electrical signal. A generally well-known cathode ray tube is a typical example of a vacuum apparatus that performs an operation of converting an inputted electric signal into light.

  The operation of the vacuum apparatus is performed by electrons emitted from the electron emission means (hereinafter referred to as “cathode”) to the space in the vacuum envelope. The cathode emits electrons by an electric field or by heat and electric field. If the degree of vacuum in the space within the vacuum envelope is low, gas molecules in the vacuum envelope may interfere with the emission of electrons from the cathode, thereby preventing the vacuum device from performing the desired operation. . In addition, the gas in the vacuum envelope becomes ions and is accelerated toward the cathode by an electric field formed around the cathode, and may collide with the cathode to destroy the electron emission surface of the cathode. Therefore, it is desired that the space in the vacuum envelope of the vacuum apparatus is maintained in a high vacuum state with very little residual gas.

  A conventional method for sealing the space inside the vacuum envelope of the vacuum apparatus operating as an image pickup tube in a vacuum will be described with reference to FIG.

  A cathode 5 and a plurality of electrode groups 10 integrated by a pair of support rods 11 are inserted into an envelope body 4 to which a light-transmitting substrate 3 is sealed via a low melting point metal 40, and the envelope The vacuum envelope 2 is created by welding the main body 4 and the stem portion 8. Next, the exhaust pipe 160 connected to the stem portion 8 is connected to the chamber 71 having a predetermined volume. The chamber 71 is connected to the vacuum pump 70. The vacuum pump 70 is driven, and the chamber 71 and the vacuum envelope 2 are sucked into vacuum (hereinafter referred to as “evacuation”). In order to obtain a high degree of vacuum, generally, as the vacuum pump 70, a rotary pump for roughing (not shown) and a diffusion pump for high vacuum (not shown) are used in combination.

  After the inside of the vacuum envelope 2 reaches the target degree of vacuum, the exhaust pipe 160 is sealed to seal the vacuum envelope 2 and the exhaust pipe 160 is separated from the chamber 71. As a method for this, a part of the exhaust pipe 160 is heated and melted by a burner 175 (or an electric heater or the like), and cut so that outside air does not enter the vacuum envelope 2, thereby A method of sealing the exhaust pipe 160 while keeping the inside of the vessel 2 in a high vacuum state and separating it from the chamber 71 is known (Patent Documents 1 and 2).

  However, in this method, when the exhaust pipe 160 is heated and melted, gas is generated from the exhaust pipe 160, and this gas diffuses into the vacuum envelope 2 to deteriorate the degree of vacuum in the vacuum envelope 2. There is a problem that it ends up.

  As a means for solving this problem, a gas adsorbing substance (getter) that adsorbs gas in a vacuum envelope is generally provided. The getter is inactive in the atmospheric pressure state before the vacuum envelope is evacuated, and after reaching the target vacuum level, it is activated by heating to a certain temperature and becomes capable of gas adsorption. . That is, the getter 26 is provided in an appropriate space in the vacuum envelope 2 in advance, and after the desired degree of vacuum is reached, the getter 26 is heated and activated on the inner wall surface of the vacuum envelope 2. A vapor deposition film 27 made of a getter material is formed. The vapor deposition film 27 adsorbs the gas generated when the exhaust pipe 160 is heated and sealed.

  By forming the activated getter material on the inner wall surface of the vacuum envelope 2 in the form of the vapor deposition film 27, the surface area of the getter material is increased, and thus the gas in the vacuum envelope 2 can be adsorbed efficiently. Can do.

The getter material includes zirconium, aluminum, vanadium, iron and / or titanium, and may be formed, for example, as an alloy of vanadium, iron and zirconium.
JP-A-60-127635 Japanese Utility Model Publication No. 50-6754

  However, the above conventional vacuum apparatus has the following problems. In general, regardless of the volume of the vacuum envelope 2, the diameter of the exhaust pipe 160 is substantially the same, so the absolute amount of gas generated when the exhaust pipe 160 is heated and melted is also substantially the same. When the volume of the vacuum envelope 2 is small, the ratio of the amount of gas generated with respect to the volume of the vacuum envelope 2 becomes relatively large, so that the decrease in the degree of vacuum in the vacuum envelope 2 due to gas generation is significant. Become. Furthermore, when the volume of the vacuum envelope 2 is small, the area where the vapor deposition film 27 can be formed on the inner wall surface of the vacuum envelope 2 is limited, so that the amount of gas adsorption by the vapor deposition film 27 is reduced. Therefore, there is a problem that the smaller the volume of the vacuum envelope 2 is, the more difficult it is to maintain the inside of the vacuum envelope 2 in a high vacuum state. When the degree of vacuum in the vacuum envelope 2 is lowered, emission of electrons from the cathode is hindered, or the electron emission surface of the cathode is destroyed by ion collision, so that the vacuum apparatus can perform a desired operation. It becomes difficult.

  An object of this invention is to provide the vacuum apparatus which can hold | maintain the inside of a vacuum envelope in a high vacuum state, and its manufacturing method.

  The vacuum tube apparatus according to the present invention includes a hermetically sealed vacuum envelope, at least one electrode disposed in the vacuum envelope, and electricity between the at least one electrode and the outside of the vacuum envelope. At least one conductor penetrating through the vacuum envelope to ensure electrical continuity, and an exhaust pipe communicated with the inside of the vacuum envelope for sucking a vacuum inside the vacuum envelope. .

  The exhaust pipe includes a small inner diameter portion, and a large inner diameter portion disposed on a side farther from the vacuum envelope than the small inner diameter portion and having an inner diameter larger than the small inner diameter portion, The exhaust pipe is sealed with a metal material at a position adjacent to the large inner diameter portion.

  The vacuum device manufacturing method of the present invention includes a hermetically sealed vacuum envelope, at least one electrode disposed in the vacuum envelope, the at least one electrode, and the outside of the vacuum envelope. At least one conductor that penetrates the vacuum envelope to ensure electrical continuity with the vacuum envelope, and an exhaust pipe that communicates with the interior of the vacuum envelope to suck the vacuum envelope into a vacuum The exhaust pipe has a small inner diameter portion and a large inner diameter that is disposed on a side farther from the vacuum envelope than the small inner diameter portion and has a larger inner diameter than the small inner diameter portion. A vacuum device in which the exhaust pipe is sealed with a metal material, wherein the vacuum envelope is sucked into the vacuum through the exhaust pipe, and the vacuum envelope While maintaining the inside of the chamber in a vacuum, the exhaust pipe is inserted into the exhaust pipe from the large inner diameter side. Inserting a metal material toward the small inner diameter portion and sealing the exhaust pipe with the metal material at a position where the small inner diameter portion and the large inner diameter portion are adjacent to each other. To do.

  According to the present invention, after the vacuum envelope of the vacuum device is evacuated to a desired degree of vacuum, the exhaust pipe is sealed without heating and melting the exhaust pipe connected to the vacuum envelope. Can do. Therefore, it is possible to solve the conventional problem that the exhaust pipe is heated and melted to generate gas from the exhaust pipe and the inside of the vacuum envelope cannot be maintained at a high vacuum. Thus, it is possible to provide a vacuum apparatus that can maintain the inside of the vacuum envelope in a high vacuum state and can stably perform a desired operation without hindering the emission of the electron beam from the cathode. it can.

  In the vacuum apparatus of the present invention described above, it is preferable that an inner diameter of the exhaust pipe is changed stepwise between the small inner diameter portion and the large inner diameter portion. As a result, the metal material can be plastically deformed using the stepped step, and therefore the exhaust pipe can be sealed efficiently and reliably.

  The metal material is preferably made of indium. Indium is soft at room temperature and easily plastically deforms when pressure is applied, so that the exhaust pipe can be sealed efficiently.

  Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the drawings.

(Embodiment 1)
FIG. 1 is a cross-sectional view showing a vacuum apparatus according to Embodiment 1 of the present invention that operates as an imaging tube.

  The vacuum apparatus includes a cylindrical envelope body 4 and a translucent substrate 3 sealed at one opening end of the envelope body 4 via a low melting point metal 40 such as indium. The vacuum envelope 2 comprises a glass stem portion 8 welded to the other opening end of the envelope body 4 and the internal space is maintained in a high vacuum state. On the inner surface of the translucent substrate 3, the photoelectric conversion target 7 in which the translucent conductive film 22 and the photoelectric conversion film 23 are sequentially laminated is formed. The photoelectric conversion target 7 generates and accumulates signal charges according to the incident light 1 from the outside. In the vacuum envelope 2, a cathode 5 that emits an electron beam 30 for reading out a signal charge accumulated in a spatial distribution in the photoelectric conversion target 7 as a time-series electric signal, and an electron beam emitted from the cathode 5 Are encapsulated with a plurality of electrode groups 10 for substantially focusing the light on the photoelectric conversion target 7. The cathode 5 and the plurality of electrode groups 10 are integrated and held by a pair of glass support rods 11. A plurality of metal stem pins 9 for applying a predetermined voltage to the cathode 5 and the plurality of electrode groups 10 penetrate the stem portion 8 in an airtight manner. The cathode 5 and the plurality of electrode groups 10 and the plurality of stem pins 9 are electrically connected to each other by a plurality of rod-shaped metal members (not shown), and the cathode 5 and the plurality of the plurality of stem pins 9 are integrated by a pair of support rods 11. The electrode group 10 is supported by the stem pin 9.

  In order to effectively cause the electron beam emitted from the cathode 5 to reach the photoelectric conversion target 7 and to prevent the cathode 5 from being damaged by stray electrons, surplus electrons, residual gas ions, etc. existing in the vacuum envelope 4. The shield-grid electrode 20 is disposed between the cathode 5 and the translucent substrate 3 so as to face the translucent substrate 3 and be separated by a predetermined distance.

  A getter 26 for maintaining the inside of the vacuum envelope 2 in a high vacuum state is disposed in the vicinity of the inner wall of the envelope body 4. In a state where the inside of the vacuum envelope 2 is evacuated, the getter 26 is heated to form a vapor deposition film 27 made of the activated getter material on the inner wall of the envelope body 4. The vapor deposition film 27 can adsorb the gas remaining in the vacuum envelope 2 and keep the inside of the vacuum envelope 2 in a high vacuum state.

  The translucent substrate 3 may be selected and used in accordance with the wavelength of light for imaging a known substrate material. For example, a glass substrate is used for visible light imaging, and sapphire or quartz glass is used for ultraviolet light imaging. In the case of X-ray imaging, Be, Al, Ti, BN or the like is used.

As the translucent conductive film 22, a metal thin film such as a SnO ₂ film or an ITO film formed by a vacuum deposition method or a sputtering method can be used.

The photoelectric conversion film 23 is an impermeable film that does not transmit light, and a semiconductor material made of PbO, Sb ₂ S ₃ , Sc, Si, Cd, Zn, As, Te, or the like that has been conventionally known is vacuum-deposited or the like. Can be formed.

  In order to supply a predetermined voltage to the translucent conductive film 22, lead pins 24 penetrate the translucent substrate 3. The lead pin 24 is electrically connected to the translucent conductive film 22 by an ultrasonic soldering method or the like, and keeps the vacuum envelope 2 in a high vacuum airtight state.

  The electron beam 30 emitted from the cathode 5 is accelerated by the plurality of electrode groups 10 to which a predetermined voltage is applied, and travels toward the photoelectric conversion target 7 through the electron beam passage holes formed in the plurality of electrode groups 10. proceed. In addition, the plurality of electrode groups 10 are arranged to face each other, and a predetermined voltage is applied to them, whereby an electron lens is formed between adjacent electrodes. This electron lens substantially focuses the electron beam 30 on the photoelectric conversion target 7.

  A deflection coil 50 is provided outside the envelope body 4. The electron beam 30 is deflected by the deflection coil 50 and scans on the photoelectric conversion target 7. The signal charge generated and accumulated in the film of the photoelectric conversion film 23 in accordance with the amount of incident light is read out of the vacuum apparatus by the electron beam 30 via the lead pin 24 in time series. Thus, an electric signal corresponding to the spatial distribution of the incident light quantity is obtained.

  An exhaust pipe 60 that communicates with the inside of the vacuum envelope 2 is provided at substantially the center of the stem portion 8 in order to evacuate the inside of the vacuum envelope 2 during the manufacturing process of the vacuum apparatus.

  The inner diameter of the exhaust pipe 60 is not constant, and the exhaust pipe 60 includes a small inner diameter portion 60a having a relatively small inner diameter Di and a large inner diameter portion 60b having an inner diameter Do larger than Di. The large inner diameter portion 60b is disposed on the far side from the vacuum envelope 2 with respect to the small inner diameter portion 60a. Between the large inner diameter portion 60b and the small inner diameter portion 60a, a stepped portion 61 is formed on the inner wall surface of the exhaust pipe 60 as a result of the inner diameter changing stepwise from the inner diameter Do to the inner diameter Di.

  The exhaust pipe 60 is hermetically sealed with a low melting point metal 62 such as indium at a position where the large inner diameter portion 60b and the small inner diameter portion 60a are adjacent, that is, in the vicinity of the stepped portion 61.

  A method for manufacturing the vacuum apparatus according to the present embodiment will be described with reference to FIGS.

  As shown in FIG. 2, a cathode 5 and a plurality of electrode groups 10 integrated by a pair of support rods 11 are inserted into an envelope body 4 to which a translucent substrate 3 is sealed, and the envelope The main body 4 and the stem portion 8 are welded. The exhaust pipe 60 connected to the stem portion 8 is connected to a chamber 71 having a predetermined volume. The chamber 71 is connected to the vacuum pump 70.

  The chamber 71 has a rod-like member 72 holding the low melting point metal 62 below the extension line of the central axis of the exhaust pipe 60, and pushes up the rod-like member 72 along the extension line while maintaining the vacuum atmosphere in the chamber 71. And a drive mechanism 73. The outer diameter Dm of the low melting point metal 62 is smaller than the inner diameter Do of the large inner diameter portion 60b of the exhaust pipe 60 and larger than the inner diameter Di of the small inner diameter portion 60a.

  In this state, the vacuum pump 70 is driven to evacuate the chamber 71 and the vacuum envelope 2. After the vacuum envelope 2 reaches the target degree of vacuum, the getter 26 is heated by, for example, a method such as high-frequency induction heating, and a deposited film made of the getter material activated on the inner wall of the envelope body 4 27 is formed. Since gas is generated when the getter 26 is heated, the degree of vacuum in the vacuum envelope 24 temporarily decreases immediately after the deposition film 27 is formed. Therefore, after the vapor deposition film 27 is formed, evacuation is continued until the target degree of vacuum is reached again.

  After the vapor deposition film 27 is formed, the inside of the vacuum envelope 2 reaches the target degree of vacuum, and then, as shown in FIG. 3, the drive mechanism 73 is driven to push up the rod-like member 72 to remove the low melting point metal 62 from the exhaust pipe. 60.

  The low melting point metal 62 abuts on the stepped portion 61 formed on the inner wall surface of the exhaust pipe 60 and is further pushed up to be plastically deformed along the shape of the inner wall around the stepped portion 61 of the exhaust pipe 60. The tube 60 is hermetically sealed. Since the low melting point metal 62 is very soft, it is easily plastically deformed by being pressed against the stepped portion 61 of the exhaust pipe 60 with a predetermined pressure, and is in close contact with the inner wall surface of the exhaust pipe 60 in the vicinity of the stepped portion 61. Therefore, it is possible to keep the inside of the vacuum envelope 2 in a favorable high vacuum state.

  Thereafter, the rod-shaped member 72 is extracted from the exhaust pipe 60 while leaving the low melting point metal 62 in the exhaust pipe 60, the exhaust pipe 60 is separated from the chamber 71, and the exhaust pipe 60 is cut by a mechanical method or the like. Thus, a vacuum apparatus is obtained in which the interior shown in FIG. 1 is maintained in a high vacuum state.

(Embodiment 2)
A second embodiment of the present invention will be described with reference to FIG. Portions that can be regarded as having the same function and structure as those of the first embodiment are given the same reference numerals as those of the first embodiment, and redundant descriptions thereof are omitted.

  As in the first embodiment, the inner diameter of the exhaust pipe 60 is not constant, and the exhaust pipe 60 includes a small inner diameter portion 60a having a relatively small inner diameter Di and a large inner diameter portion 60b having an inner diameter Do larger than Di. Is provided. The large inner diameter portion 60b is disposed on the far side from the vacuum envelope 2 with respect to the small inner diameter portion 60a. However, unlike the first embodiment, the funnel-shaped portion 63 generated by the gentle change of the inner diameter from the inner diameter Do to the inner diameter Di is provided between the large inner diameter portion 60b and the small inner diameter portion 60a. It is formed on the inner wall surface. In addition, the shape of the low melting point metal 62 that hermetically seals the exhaust pipe 60 before being inserted into the exhaust pipe 60 is chamfered at the tip in the insertion direction so as to follow the shape of the funnel-shaped portion 63 of the exhaust pipe 60. (That is, it is formed in a substantially truncated cone shape).

  The manufacturing method of the vacuum apparatus of the second embodiment is the same as that of the first embodiment. That is, the exhaust pipe 60 is connected to the chamber 71, the vacuum pump 70 is driven, and the chamber 71 and the vacuum envelope 2 are evacuated. After the inside of the vacuum envelope 2 reaches the target degree of vacuum, the getter 26 is heated to form a vapor deposition film 27 made of an activated getter material on the inner wall of the envelope body 4. Thereafter, evacuation is continued until the target degree of vacuum is reached again.

  After the inside of the vacuum envelope 2 reaches the target degree of vacuum, the drive mechanism 73 is driven to push up the rod-like member 72 and insert the low melting point metal 62 into the exhaust pipe 60. The low melting point metal 62 abuts on the funnel-shaped portion 63 formed on the inner wall surface of the exhaust pipe 60 and is further pushed up to be plastically deformed along the inner wall shape around the funnel-shaped portion 63 of the exhaust pipe 60. The exhaust pipe 60 is hermetically sealed.

  Thereafter, the rod-shaped member 72 is extracted from the exhaust pipe 60 while leaving the low melting point metal 62 in the exhaust pipe 60, the exhaust pipe 60 is separated from the chamber 71, and the exhaust pipe 60 is cut by a mechanical method or the like. Thus, a vacuum apparatus in which the inside is maintained in a high vacuum state is obtained.

(Embodiment 3)
A third embodiment of the present invention will be described with reference to FIG. Parts that can be regarded as having the same function and structure as those of the first and second embodiments are denoted by the same reference numerals as those of the first and second embodiments, and redundant description thereof is omitted.

  In the manufacturing method of the vacuum apparatus shown in the first and second embodiments, the exhaust pipe 60 is sealed by connecting the exhaust pipe 60 to the chamber 71 having a predetermined volume to which the vacuum pump 70 is connected. On the other hand, in the third embodiment, the exhaust pipe 60 is sealed in a state where the entire vacuum apparatus is housed in the chamber 75 connected to the vacuum pump 70.

  That is, the cathode 5 and the plurality of electrode groups 10 integrated by a pair of support rods 11 are inserted into the envelope body 4 to which the translucent substrate 3 is sealed, and the envelope body 4 and the stem portion are inserted. 8 is welded. The vacuum device with the exhaust pipe 60 unsealed thus obtained is held in the chamber 75 using the holding mechanism 80 provided in the chamber 75. The chamber 75 has a rod-like member 72 holding the low melting point metal 62 below the extension line of the central axis of the exhaust pipe 60 and pushes up the rod-like member 72 along the extension line while maintaining the vacuum atmosphere in the chamber 75. And a drive mechanism 73.

  When the vacuum pump 70 is driven in this state and the chamber 75 is evacuated, the vacuum envelope 2 is also evacuated to the same pressure as the chamber 75 through the exhaust pipe 60. After the inside of the vacuum envelope 2 reaches the target degree of vacuum, the getter 26 is heated to form a vapor deposition film 27 made of an activated getter material on the inner wall of the envelope body 4. Thereafter, evacuation is continued until the target degree of vacuum is reached again.

  After the inside of the vacuum envelope 2 reaches the target degree of vacuum, the drive mechanism 73 is driven to push up the rod-like member 72 and insert the low melting point metal 62 into the exhaust pipe 60. The low melting point metal 62 abuts on the stepped portion 61 formed on the inner wall surface of the exhaust pipe 60 and is pushed upward further, so that the exhaust pipe 60 can be hermetically sealed as in the first embodiment. . Thereafter, the bar-shaped member 72 is extracted from the exhaust pipe 60 while leaving the low melting point metal 62 in the exhaust pipe 60, the pressure in the chamber 75 is returned to atmospheric pressure, and the vacuum device is removed from the chamber 75. Finally, the vacuum apparatus is obtained by cutting the exhaust pipe 60 by a mechanical method or the like.

  In the third embodiment, the case where the inner wall shape of the exhaust pipe 60 and the low melting point metal 62 are the same as those in the first embodiment has been described. However, the third embodiment is also applied to the case where the same as in the second embodiment. can do.

  In the first to third embodiments, the case where the vacuum device is an imaging tube has been described. However, the present invention is not limited to this, and the operation, application, and shape of the vacuum device can be used as long as the vacuum device includes an exhaust pipe. It can be applied regardless of the size and the like, and the same effect as described above can be obtained.

  In the first to third embodiments, the case where the low melting point metal 62 such as indium is used as the metal material for sealing the exhaust pipe 60 has been described. However, in the present invention, a low melting point metal other than indium can be used. . Further, even a metal material having a higher melting point than indium or the like can be used. For example, the solder held by the rod-like member 72 is heated to the softening point, inserted into the exhaust pipe 60 and pushed up, whereby the exhaust pipe 60 can be hermetically sealed in the same manner as described above. Can be obtained.

  According to the present invention, the vacuum envelope can be hermetically sealed while the vacuum envelope of the vacuum apparatus is maintained in a desired high vacuum state, and the residual gas in the vacuum envelope is extremely small. The electron beam emission from the cathode is not hindered. Therefore, it can be widely used as a vacuum device that operates stably.

FIG. 1 is a sectional view showing a vacuum apparatus according to Embodiment 1 of the present invention. FIG. 2 is a cross-sectional view showing one step of the method of manufacturing the vacuum device according to Embodiment 1 of the present invention. FIG. 3 is a cross-sectional view showing a step of the method of manufacturing the vacuum device according to Embodiment 1 of the present invention. FIG. 4 is a cross-sectional view showing one step of a method for manufacturing a vacuum device according to Embodiment 2 of the present invention. FIG. 5 is a cross-sectional view showing a step of the method of manufacturing a vacuum device according to Embodiment 3 of the present invention. FIG. 6 is a cross-sectional view showing a conventional method for manufacturing a vacuum apparatus.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Incident light 2 Vacuum envelope 3 Translucent board | substrate 4 Enclosure main body 5 Cathode 8 Stem part 7 Photoelectric conversion target 9 Stem pin 10 Several electrode group 11 Support rod 20 Shield-grid electrode 22 Translucent conductive film 23 Photoelectric Conversion film 24 Lead pin 26 Getter 27 Deposition film 30 Electron beam 40 Low melting point metal 50 Deflection coil 60 Exhaust pipe 61 Stepped portion 60a Small inner diameter portion 60b Large inner diameter portion 62 Low melting point metal (metal material)
63 funnel-shaped portion 70 vacuum pump 71 chamber 72 rod-shaped member 73 drive mechanism 75 chamber 80 holding mechanism

Claims (5)

To ensure a hermetically sealed vacuum envelope, at least one electrode disposed within the vacuum envelope, and electrical continuity between the at least one electrode and the outside of the vacuum envelope. A vacuum apparatus comprising: at least one electric conductor penetrating the vacuum envelope; and an exhaust pipe communicated with the inside of the vacuum envelope in order to suck the inside of the vacuum envelope to a vacuum,
The exhaust pipe includes a small inner diameter portion, and a large inner diameter portion disposed on a side farther from the vacuum envelope than the small inner diameter portion and having an inner diameter larger than the small inner diameter portion,
The vacuum apparatus, wherein the exhaust pipe is sealed with a metal material at a position where the small inner diameter portion and the large inner diameter portion are adjacent to each other.   2. The vacuum apparatus according to claim 1, wherein an inner diameter of the exhaust pipe changes stepwise between the small inner diameter portion and the large inner diameter portion.   The vacuum apparatus according to claim 1, wherein the metal material is made of indium. To ensure a hermetically sealed vacuum envelope, at least one electrode disposed within the vacuum envelope, and electrical continuity between the at least one electrode and the outside of the vacuum envelope. A vacuum apparatus comprising: at least one electric conductor penetrating the vacuum envelope; and an exhaust pipe communicated with the inside of the vacuum envelope in order to suck the inside of the vacuum envelope to a vacuum, The exhaust pipe includes a small inner diameter portion and a large inner diameter portion disposed on a side farther from the vacuum envelope with respect to the small inner diameter portion and having an inner diameter larger than the small inner diameter portion, and the exhaust pipe is made of metal. A method of manufacturing a vacuum device sealed with a material,
Sucking the inside of the vacuum envelope to a vacuum via the exhaust pipe;
With the vacuum envelope maintained at a vacuum, a metal material is inserted into the exhaust pipe from the large inner diameter portion side toward the small inner diameter portion side so that the small inner diameter portion and the large inner diameter portion are adjacent to each other. And a step of sealing the exhaust pipe with the metal material at a position to perform.   The method for manufacturing a vacuum apparatus according to claim 4, wherein the metal material is made of indium.

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