JP2008155113A - Droplet ejection apparatus and device manufacturing method - Google Patents

Abstract

Disclosed is a droplet discharge device capable of realizing downsizing while suppressing deterioration in performance.
A droplet discharge device includes: a discharge head having a discharge surface on which a discharge port for discharging a droplet of a functional liquid is formed; and a predetermined region including a first position facing the discharge surface with respect to the discharge head. A plurality of movable bodies that are movable and arranged along a predetermined axis, and a drive device that moves the plurality of movable bodies along the predetermined axis are provided.
[Selection] Figure 1

Description

  The present invention relates to a droplet discharge apparatus and a device manufacturing method.

As one method for forming a device pattern, a droplet discharge method (inkjet method) in which a pattern is formed on a substrate with droplets of a functional liquid is known. The following patent document discloses an example of a technique related to a droplet discharge device (inkjet device) that forms a pattern on a substrate based on a droplet discharge method.
Japanese Patent Laid-Open No. 11-248926

  The droplet discharge device has a discharge head that discharges droplets and a substrate stage that moves while holding the substrate with respect to the discharge head. In order to maintain a good operation of the ejection head, the droplet ejection apparatus is provided with a maintenance device for maintaining the ejection head, such as a capping device or a wiping device. In the droplet discharge device, downsizing is desired. In order to reduce the size of the droplet discharge device, the devices constituting the droplet discharge device, such as the discharge head, the substrate stage, the maintenance device, and the drive device that drives them, may be simplified or omitted. Conceivable. However, if the device is oversimplified or omitted too much, there is a possibility that the performance of the droplet discharge device deteriorates and a desired pattern cannot be formed with droplets. Therefore, it is desired to devise a technique that can realize downsizing of the droplet discharge device while suppressing deterioration of the performance of the droplet discharge device.

  The present invention has been made in view of such circumstances, and an object of the present invention is to provide a droplet discharge device that can realize downsizing while suppressing deterioration in performance. It is another object of the present invention to provide a device manufacturing method using the droplet discharge apparatus.

  In order to solve the above problems, the present invention adopts the following configuration.

  According to a first aspect of the present invention, an ejection head having an ejection surface in which ejection openings for ejecting functional liquid droplets are formed, and a predetermined area including a first position facing the ejection surface, the ejection head is disposed on the ejection head. A droplet discharge device is provided that includes a plurality of moving bodies that are movable along a predetermined axis and a drive device that moves the plurality of moving bodies along the predetermined axis.

  According to the first aspect of the present invention, a plurality of moving bodies are arranged along a predetermined axis, and each of the moving bodies is moved along a predetermined axis using a driving device. By mounting the device constituting the above on the moving body, it is possible to reduce the size of the droplet discharge device while suppressing the deterioration of the performance of the droplet discharge device.

  In the liquid droplet ejection apparatus of the present invention, a configuration including a holding device that holds the ejection head so that the position of the ejection head does not substantially move can be employed. According to this, the space around the ejection head can be used effectively, and the entire droplet ejection apparatus can be reduced in size.

  In the liquid droplet ejection apparatus of the present invention, the moving body may be configured to be movable while holding a substrate on which a pattern is formed with the liquid droplets. According to this, the substrate can be moved to the first position, and a pattern can be formed on the substrate with droplets from the ejection head.

  In the liquid droplet ejection apparatus of the present invention, the moving body may include a maintenance device that maintains the ejection head. According to this, the maintenance device can be moved to the first position, and the discharge head can be maintained.

  In the droplet discharge device of the present invention, the maintenance device includes a wiping device that wipes out foreign matter on the discharge surface, a capping device that covers the discharge surface, and an immersion that immerses at least a part of the discharge head in a liquid other than the functional liquid. A configuration including at least one of the devices can be employed. According to this, the discharge head can be maintained satisfactorily using the wiping device, the capping device, and the dipping device, and the good operation of the discharge head can be maintained.

  In the droplet discharge device of the present invention, the moving body may include a detection device that detects a droplet discharge state of the discharge head. According to this, it is possible to detect the discharge state of the discharge head using the detection device, and it is possible to take appropriate measures for maintaining a good operation of the discharge head based on the detection result.

  In the droplet discharge device of the present invention, a configuration including a guide member that guides the movement of the movable body in the predetermined axis direction can be employed. According to this, the moving body can be favorably moved along the predetermined axis.

  In the droplet discharge device of the present invention, the driving device can employ a configuration in which each of the plurality of moving bodies can be moved independently. According to this, the board | substrate, apparatus, etc. which were mounted in each moving body can be arrange | positioned in a desired position.

  In the droplet discharge device of the present invention, the driving device can adopt a configuration in which the plurality of moving bodies are moved together. According to this, generation | occurrence | production of the malfunction which a mobile body interferes or collides can be suppressed. In addition, for example, among the plurality of moving bodies, when the first moving body is arranged at the first position and performs a predetermined process in cooperation with the ejection head, the first moving body is different from the first moving body. When the second moving body moves, there is a possibility that problems such as vibrations caused by the movement of the second moving body deteriorate the accuracy of processing of the first moving body. By moving a plurality of moving bodies together, the occurrence of the above-described problems can be suppressed.

  In the droplet discharge device of the present invention, a configuration including a connecting member for connecting the moving bodies can be employed. According to this, while being able to move a some moving body together, at least one part of the drive device for moving a moving body can be abbreviate | omitted. Further, by omitting at least a part of the driving device, heat generated from the driving device can be suppressed.

  In the liquid droplet ejection apparatus according to the present embodiment, the plurality of moving bodies are sequentially arranged at the first position, perform a predetermined process in cooperation with the ejection head, and perform the predetermined process according to the order of the processes. A configuration in which the positional relationship of the plurality of moving bodies with respect to a predetermined axis direction can be set. According to this, for example, after the first moving body is arranged at the first position among the plurality of moving bodies and the first process is executed in cooperation with the ejection head, the first process is followed. In the case where a second moving body different from the first moving body is arranged at the first position and the second process is executed in cooperation with the ejection head, for example, the first process is executed. By shifting the first moving body and the second moving body that executes the second process so as to be adjacent to each other in the predetermined axial direction, the transition from the first process to the second process is quickly performed. be able to.

  In the liquid droplet ejection apparatus of the present invention, a pattern is formed with the liquid droplets on a first moving body that is arranged at a second position different from the first position in the predetermined axis direction among the plurality of moving bodies. A transport device that performs at least one of an operation of loading a substrate and an operation of unloading the substrate from the first moving body disposed at the second position, and the first moving body is disposed at the second position. In this case, a configuration in which a second moving body different from the first moving body is arranged at the first position can be adopted. According to this, at least one of the processing using the first moving body arranged at the second position (substrate loading / unloading processing) and the processing using the second moving body arranged at the first position. And the processing efficiency of the droplet discharge device can be improved.

  In the liquid droplet ejection apparatus according to the aspect of the invention, the first moving body and the second moving body may be moving bodies arranged at both ends with respect to the predetermined axis direction among the plurality of moving bodies. Can be adopted. According to this, for example, after the processing of the second moving body arranged at the first position is completed, the second moving body is moved in the direction away from the first moving body, thereby the second position. The third moving body arranged between the first moving body and the second moving body can be moved to the first position in the state where the first moving body is arranged at the first position. The process using the 3rd moving body arrange | positioned in can be performed.

  In the liquid droplet ejection apparatus according to the aspect of the invention, the plurality of moving bodies are sequentially arranged at the first position, perform a predetermined process in cooperation with the ejection head, and start from the first position in the order of the processes. The structure arrange | positioned toward the said 2nd position is employable. According to this, when a predetermined process is performed by causing each moving body and the ejection head to cooperate, each moving body can be quickly arranged at the first position facing the ejection head, and the processing efficiency of the droplet ejection apparatus can be improved. Can be improved.

  According to a second aspect of the present invention, the method includes an operation of ejecting droplets onto the substrate using the above-described droplet ejection device to form a pattern on the substrate, and an operation of drying the droplets on the substrate. A method for manufacturing a device is provided.

  According to the second aspect of the present invention, it is possible to efficiently manufacture a device having desired performance by using a droplet discharge device that is downsized and whose performance is prevented from being deteriorated.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. In the following description, an XYZ orthogonal coordinate system is set, and the positional relationship of each member will be described with reference to this XYZ orthogonal coordinate system. The predetermined direction in the horizontal plane is the X-axis direction, the direction orthogonal to the X-axis direction in the horizontal plane is the Y-axis direction, and the direction orthogonal to each of the X-axis direction and the Y-axis direction (that is, the vertical direction) is the Z-axis direction. To do. Further, the rotation (inclination) directions around the X axis, Y axis, and Z axis are the θX, θY, and θZ directions, respectively.

<First Embodiment>
A first embodiment will be described. FIG. 1 is a schematic configuration diagram illustrating a droplet discharge device IJ according to the first embodiment, and FIG. 2 is a perspective view illustrating a part of the droplet discharge device IJ according to the first embodiment.

  The droplet discharge device IJ forms a device pattern on the substrate P by discharging droplets D of the functional liquid onto the substrate P. The droplet discharge device IJ has a discharge head 3 in a predetermined area including a discharge head 3 having a discharge surface 2 on which a discharge port 1 for discharging a droplet D of a functional liquid is formed, and a first position A1 facing the discharge surface 2. 3, a plurality of moving bodies 4, 5, 6, 7 arranged along the Y axis, and a drive for moving the plurality of moving bodies 4, 5, 6, 7 along the Y axis A device 8, a functional liquid storage device 9 that is connected to the discharge head 3 via a flow path and stores a functional liquid to be supplied to the discharge head 3, and a control device 10 that controls the overall operation of the droplet discharge device IJ. And.

  The droplet discharge device IJ of this embodiment is a multi-head type droplet discharge device including a plurality of discharge heads 3 and includes a carriage member 11 that supports the plurality of discharge heads 3. Further, the droplet discharge device IJ includes a controller 12 including a drive circuit that controls the drive of the discharge head 3. The controller 12 drives the ejection head 3 based on a command from the control device 10.

  In the present embodiment, the substrate P is a low temperature co-fired ceramics (LTCC) multilayer circuit as disclosed in, for example, Japanese Patent Application Laid-Open Nos. 2006-114593 and 2006-261146. It is a board | substrate for forming a board | substrate, Comprising: The LTCC board | substrate (green sheet) before baking is included. The functional liquid includes, for example, those obtained by dispersing conductive fine particles in a predetermined dispersion medium as disclosed in JP-A-2005-34837. In the present embodiment, the conductive fine particles of the functional liquid are mainly composed of silver fine particles (including organic silver compounds and silver oxide nanoparticles), and the dispersion medium is mainly composed of water. In the present embodiment, the droplet discharge device IJ discharges a droplet D of a functional liquid containing silver fine particles onto an LTCC substrate (green sheet) before firing, and the substrate (green sheet) with the droplet D A case where a wiring pattern is formed will be described as an example.

  The droplet discharge device IJ has at least three moving bodies. In the present embodiment, the droplet discharge device IJ includes four moving bodies 4, 5, 6, and 7. The first moving body 4 is disposed on the most −Y side among the four moving bodies disposed along the Y axis, and the fourth moving body 7 is disposed on the most + Y side. That is, the 1st moving body 4 and the 2nd moving body 7 are arrange | positioned at both ends regarding the Y-axis direction among the four moving bodies 4, 5, 6, 7 arrange | positioned along the Y-axis. The second moving body 5 and the third moving body 6 are disposed between the first moving body 4 and the fourth moving body 7. The second moving body 5 is disposed on the −Y side of the third moving body 6.

  The first moving body 4 is movable while holding the substrate P on which a pattern is formed with the droplets D. The second, third, and fourth moving bodies 5, 6, and 7 include a maintenance device that maintains the ejection head 3. In the present embodiment, the second moving body 5 includes a capping device 13 that covers the ejection surface 2 of the ejection head 3. The third moving body 6 includes a wiping device 14 that removes foreign matter on the ejection surface 2 of the ejection head 3. The fourth moving body 7 includes an immersion device 15 that immerses at least a part of the ejection head 3 in a liquid other than the functional liquid.

  The droplet discharge device IJ includes a base member 17 having a support surface 16 that movably supports the moving bodies 4, 5, 6, and 7. Each of the moving bodies 4, 5, 6, 7 is movable along the support surface 16. In the present embodiment, the support surface 16 is substantially parallel to the XY plane. Further, in the present embodiment, an air bearing is formed between the support surface 16 of the base member 17 and the opposing surfaces of the moving bodies 4, 5, 6, 7 that face the support surface 16. Each moving body 4, 5, 6, 7 is supported in a non-contact manner with respect to the support surface 16 by an air bearing.

  In addition, the droplet discharge device IJ includes a guide member 18 that guides the movement of the plurality of moving bodies 4, 5, 6, 7 in the Y-axis direction. The guide member 18 is a rod-like member that is long in the Y-axis direction, and is disposed on the support surface 16. In the present embodiment, both ends of the guide member 18 are supported by support members 19 disposed outside the guide member 18. The support member 19 is supported on the floor surface 20. The base member 17 is supported by a support member 21 supported by the floor surface 20.

  In the present embodiment, the driving device 8 includes a linear motor and can move each of the plurality of moving bodies 4, 5, 6, 7 independently. The driving device 8 includes a linear motor stator 22 disposed on the guide member 18 and a linear motor mover disposed on each of the opposing surfaces of the movable bodies 4, 5, 6, 7 facing the guide member 18. 23, 24, 25, 26. The control device 10 can move each of the moving bodies 4, 5, 6, and 7 independently on the base member 17 using a driving device 8 including a linear motor.

  The droplet discharge device IJ is disposed at a position different from the discharge head 3 and performs at least one of the operation of loading the substrate P into the first moving body 4 and the operation of unloading the substrate P from the first moving body 4. A substrate transfer device 27 is provided. In the vicinity of the substrate transfer device 27, a substrate accommodation device 28 capable of accommodating the substrate P is disposed.

  The substrate transfer device 27 performs an operation of loading the substrate P into the first moving body 4 disposed at the second position A2 different from the first position A1 with respect to the Y-axis direction, and an operation of unloading the substrate P from the first moving body 4. Execute at least one of the following. The first position A1 and the second position A2 are separated with respect to the Y-axis direction. In the present embodiment, the first position A1 is a position on the + Y side of the second position A2. The first moving body 4 moves along the support surface 16 of the base member 17 between the first position A1 facing the ejection surface 2 of the ejection head 3 and the second position A2 in the vicinity of the substrate transport device 27. Is possible.

  The substrate transfer device 27 can carry, for example, the substrate P accommodated in the substrate accommodation device 28 into the first moving body 4 arranged at the second position A2. Further, the substrate transport device 27 can carry the substrate P out of the first moving body 4 disposed at the second position A <b> 2 and accommodate it in the substrate accommodation device 28.

  Further, in the present embodiment, the droplet discharge device IJ is provided with a heat insulating member 29 that is disposed on at least a part of the moving path of the first moving body 4 and blocks heat dissipation of the first moving body 4 to the surroundings. ing. The heat insulating member 29 is attached to a predetermined position of the base member 17 so as not to hinder the movement of the moving bodies 5, 6, 7 including the first moving body 4.

  Further, the droplet discharge device IJ includes the above-described discharge head 3, carriage member 11, moving bodies 4, 5, 6, 7, base member 17, guide member 18, substrate transport device 27, substrate storage device 28, and heat insulating member 29. , Adjusting the environment (temperature, humidity, cleanliness, etc.) of the chamber main body 30 that accommodates each device and member such as the functional liquid storage device 9, the controller 12, and the control device 10, and the space inside the chamber main body 30 A chamber device 32 having a possible air conditioner 31 is provided.

  The ejection head 3 will be described with reference to FIGS. 3 and 4. FIG. 3 is a view of the plurality of ejection heads 3 supported by the carriage member 11 as viewed from below, and FIG. 4 is a cross-sectional view for explaining an example of the structure of the ejection head 3.

  The ejection head 3 according to the present embodiment supplies a predetermined drive signal to a piezo element (piezoelectric element) 33 and deforms the piezo element 33 so that the pressure in the space 34 containing the functional liquid is flexible. This is a discharge head of a so-called electromechanical conversion system that discharges the functional liquid droplet D from the discharge port 1 by using the fluctuation of the pressure via the vibration plate (film) 35. The controller 12 drives the ejection head 3 based on a command from the control device 10. The controller 12 can supply a predetermined drive signal to the piezo element 33 of the discharge head 3 and discharge the droplet D having a size corresponding to the drive signal from each of the discharge ports 1.

  As shown in FIG. 3, the droplet discharge device IJ of the present embodiment has a plurality of discharge heads 3. The plurality of ejection heads 3 are supported by the carriage member 11. The ejection head 3 has an ejection surface (nozzle formation surface) 2 on which ejection ports (ejection nozzles) 1 for ejecting functional liquid droplets D are formed. The discharge surface 2 has a shape that is long in a predetermined direction (in the present embodiment, a substantially rectangular shape). A plurality of discharge ports 1 are formed on the discharge surface 2 along a predetermined direction (longitudinal direction of the discharge surface 2). In the present embodiment, the predetermined direction in which the plurality of discharge ports 1 are arranged is a direction inclined with respect to the X-axis direction in the XY plane.

  As shown in FIG. 4, the ejection head 3 includes a head main body 36 and a plate member (nozzle plate) 37 disposed at the lower end of the head main body 36. The discharge port 1 is formed in the plate member 37. The plate member 37 has a plurality of holes penetrating in the vertical direction. The discharge port 1 is disposed at the lower end of the hole. The discharge surface 2 is disposed on the plate member 37.

  In the present embodiment, the ejection surface 2 of the ejection head 3 (plate member 37) faces downward (−Z side). The surface of the substrate P on which the droplets D from the ejection head 3 are ejected (supplied) is directed upward (+ Z side) so as to face the ejection surface 2 of the ejection head 3. The first moving body 4 holds the substrate P so that the surface of the substrate P faces upward (+ Z side). Further, the ejection surface 2 of the ejection head 3 is substantially parallel to the XY plane. The first moving body 4 holds the substrate P so that the surface of the substrate P and the XY plane are substantially parallel. The control device 10 discharges in a state where the distance (platen gap) between the discharge surface 2 of the discharge head 3 and the surface of the substrate P held by the first moving body 4 is maintained at a predetermined value (for example, 600 μm). A droplet D is discharged from the outlet 1 onto the substrate P.

  The discharge head 3 includes a cavity (space) 34 formed above the plate member 37 (discharge port 1), a flexible plate (vibration plate) 35 disposed above the cavity 34, and a vibration plate. 35 and a piezo element 33 disposed above 35. A plurality of cavities 34 are formed so as to correspond to each of the plurality of discharge ports 1. The cavity 34 is connected to the functional liquid storage device 9 through a flow path. The cavity 34 stores the functional liquid from the functional liquid storage device 9 and supplies the functional liquid to the discharge port 1.

  The diaphragm 35 can vary the pressure (volume) of the cavity 34 by vibrating in the vertical direction. The piezo element 33 can vibrate the diaphragm 35 in the vertical direction. A plurality of piezo elements 33 are arranged so as to correspond to each of the plurality of ejection openings 1. The piezo element 33 causes the vibration plate 35 to vibrate based on the drive signal from the controller 12 and causes the pressure of the cavity 34 to fluctuate, thereby ejecting the functional liquid droplet D from the ejection port 1.

  Further, the controller 12 adjusts a drive signal (drive waveform) supplied to the piezo element 33 as disclosed in, for example, Japanese Patent Application Laid-Open No. 2001-58433, and discharges liquid from each of the discharge ports 1. The amount (size, volume) of the droplet D can be adjusted.

  As shown in FIG. 1, the droplet discharge device IJ of this embodiment includes a holding device 38 that holds a plurality of discharge heads 3 so that the positions of the plurality of discharge heads 3 do not substantially move. The holding device 38 includes a carriage member 11 and a support mechanism 39 that supports the carriage member 11. In the present embodiment, the support mechanism 39 is fixed to the ceiling surface (inner surface) of the chamber body 30. That is, in the present embodiment, the plurality of ejection heads 3 are held so as not to move substantially with respect to the ceiling surface (inner surface) of the chamber body 30 via the holding device 38 including the carriage member 11 and the support mechanism 39. ing.

  In the present embodiment, the support mechanism 39 includes an actuator that can finely move the carriage member 11. The support mechanism 39 can finely move the carriage member 11 in directions of six degrees of freedom in the X axis, Y axis, Z axis, θX, θY, and θZ directions.

  Next, the first moving body 4 will be described with reference to FIG. FIG. 5A is a perspective view showing the first moving body 4, and FIG. 5B is a view of the first moving body 4 as viewed from the −Y side.

  The first moving body 4 is movable while holding the substrate P on which a pattern is formed with the droplets D. The first movable body 4 includes a first movable member 40 having a mover 23 of a linear motor, and a holder member 42 having a holding mechanism 41 mounted on the first movable member 40 and holding the substrate P. An air bearing 43 is formed on the lower surface of the first movable member 40 facing the support surface 16 of the base member 17. The first movable member 40 is supported by the air bearing 43 without contact with the support surface 16. The holder member 42 of the first moving body 4 is configured so that the surface of the substrate P and the ejection surface 2 of the ejection head 3 face each other, and the surface of the substrate P and the XY plane are substantially parallel. Hold.

  As described above, the substrate P of the present embodiment includes a green sheet, and a hole (via) penetrating in the thickness direction is formed in the green sheet. A film F formed of, for example, polyethylene terephthalate (PET) is attached to the back surface of the substrate P (green sheet), and the holder member 42 of the first moving body 4 is a substrate supported by the film F. Hold P. That is, in the present embodiment, the holder member 42 of the first moving body 4 holds the substrate P (green sheet) via the film F.

  A concave portion 44 in which the guide member 18 can be disposed is formed on the lower surface of the first movable member 40. The inner surface of the recess 44 of the first movable member 40 faces the guide member 18. As described above, the linear motor stator 22 is disposed on the guide member 18. A mover 23 of a linear motor is disposed on the inner surface of the recess 44 of the first movable member 40 facing the guide member 18. The drive device 8 including the stator 22 and the mover 23 can move the first movable member 40 in the Y-axis direction. As the first movable member 40 moves in the Y-axis direction, the holder member 42 (substrate P) mounted on the first movable member 40 also moves in the Y-axis direction together with the first movable member 40. Moving.

  In the present embodiment, a plurality of actuators 45 are arranged between the first movable member 40 and the holder member 42. The actuator 45 includes, for example, a piezo element. The control device 10 can move (finely move) the holder member 42 holding the substrate P on the first movable member 40 by controlling these actuators 45. In the present embodiment, the holder member 42 holding the substrate P is moved by the actuator 45 on the first movable member 40 in directions of six degrees of freedom in the X axis, Y axis, Z axis, θX, θY, and θZ directions. It is possible to move (fine movement).

  In order to supply the droplets D ejected from the ejection head 3 to the substrate P, the control device 10 moves the first moving body 4 using the driving device 8 and faces the ejection surface 2 of the ejection head 3. The board | substrate P currently hold | maintained at the 1st moving body 4 (holder member 42) is arrange | positioned in 1st position A1. In addition, the control device 10 uses the actuator 45 disposed between the first movable member 40 and the holder member 42 to cause the droplet D ejected from the ejection port 1 of the ejection surface 2 to be in a predetermined position on the substrate P. , The distance (platen gap) between the ejection surface 2 of the ejection head 3 and the surface of the substrate P held by the first moving body 4, the ejection surface 2 of the ejection head 3 and the first movement The positional relationship in the tilt direction (θX, θY direction) and the rotational relationship (θZ direction) with the surface of the substrate P held by the body 4 are adjusted. The control device 10 uses the actuator 45 to discharge the discharge head 3 so that the discharge surface 2 of the discharge head 3 and the surface of the substrate P are substantially parallel and the platen gap becomes a predetermined value. The positional relationship between the surface 2 and the surface of the substrate P held by the first moving body 4 is adjusted.

  In the present embodiment, flushing regions 46 are provided on both sides in the Y-axis direction of the holding mechanism 41 that holds the substrate P on the upper surface of the holder member 42 that can face the discharge surface 2 of the discharge head 3. Yes. The flushing region 46 is formed on the upper surface of a porous member that can absorb the droplet D ejected from the ejection port 2 of the ejection head 3. The porous member includes, for example, a sponge-like member. Before supplying the droplet D from the ejection head 3 to the substrate P, the control device 10 causes the droplet from the ejection port 1 to face the ejection port 1 of the ejection head 3 and the flushing region 46 of the holder member 42. An operation of discharging D in advance, a so-called flushing operation is executed.

  Further, the first moving body 4 includes a heating device 47 that heats the substrate P. The heating device 47 is provided on the holder member 42. The control device 10 can heat the substrate P held by the holder member 42 using the heating device 47 of the holder member 42.

  The heating device 47 can instantaneously vaporize the liquid component contained in the droplet D discharged from the discharge port 1 of the discharge head 3 and supplied (contacted) to the substrate P. The droplet discharge device IJ uses the heating device 47 to heat the substrate P and supplies the droplet D to the heated substrate P from the discharge port 1 of the discharge head 3 to thereby contact the substrate P with the liquid. Drops D can be dried instantly.

  Further, by supplying the droplet D to the substrate P while heating the substrate P, the pinning phenomenon can be caused. In the drying process of the droplet D after being supplied to the substrate P, when the solid content concentration at the peripheral portion of the droplet D reaches the saturation concentration, the solid content locally precipitates at the peripheral portion. Then, the peripheral portion of the droplet D is pinned by the deposited solid content, and the contraction of the droplet D (outer diameter contraction) accompanying the subsequent drying is suppressed. A pattern (pinning phenomenon in this embodiment) formed on the substrate P by causing such a phenomenon (pinning phenomenon) that the shrinkage of the droplets D caused by drying is suppressed by the solid content deposited on the peripheral portion. ) Edge (outer shape) can be well defined.

  For example, as disclosed in JP-A-2005-28276, JP-A-2005-144324, etc., adjusting the drying conditions, convection conditions, etc. of the droplets D arranged on the surface of the substrate P, You may make it produce the pinning phenomenon in the droplet D discharged (supplied) to the substrate P.

  In the following description, the process of disposing the substrate P of the first moving body 4 at the first position A1 and discharging the droplet D for forming a pattern on the substrate P from the discharge port 1 is appropriately performed as a pattern forming process. .

  Next, the 2nd mobile body 5 is demonstrated, referring FIG.6 and FIG.7. FIG. 6 is a diagram of the second moving body 5 as viewed from the −X side, and FIG. 7 is a diagram for explaining an example of the operation of the second moving body 5. The second moving body 5 includes a capping device 13 that covers the ejection surface 2 of the ejection head 3.

  The capping device 13 includes a cap member 48 that covers the ejection surface 2 of the ejection head 3. The cap member 48 includes an upper surface that can face the ejection head 3, and a cap portion 50 that is formed on the upper surface and can form a sealed space 49 between the ejection surface 2 of the ejection head 3. The cap unit 50 includes a recess (groove) formed on the upper surface of the cap member 48, and a space 49 can be formed between the cap unit 50 and the ejection surface 2 of the ejection head 3. A plurality of cap portions 50 are provided so as to correspond to the plurality of ejection heads 3.

  As shown in FIG. 7, the capping device 13 can arrange all of the ejection surface 2 of the ejection head 3 inside the cap portion (concave portion) 50. The capping device 13 forms the space 49 by bringing the upper end of the inner surface of the cap part (recessed portion) 50 into contact with the side surface of the discharge head 3 (plate member 37) outside the discharge surface 2, for example.

  The capping device 13 includes a suction port 53 that is formed on the bottom surface of the cap portion (recessed portion) 50 and can suck the fluid in the space 49, and a vacuum system 55 that is connected to the suction port 53 via the flow path 54. Have.

  The second moving body 5 has a second movable member 51 having a linear motor movable element 24, and the cap member 48 of the capping device 13 is mounted on the second movable member 51. Similar to the first movable member 40 described above, an air bearing is formed on the lower surface of the second movable member 51 that faces the support surface 16 of the base member 17, and the second movable member 51 is in contact with the support surface 16. Supported without contact. Similarly to the first movable member 40 described above, a concave portion in which the guide member 18 can be disposed is formed on the lower surface of the second movable member 51, and the mover 24 is a second movable member facing the guide member 18. It is disposed on the inner surface of the recess of the member 51. The drive device 8 including the stator 22 and the movable element 24 can move the second movable member 51 in the Y-axis direction. As the second movable member 51 moves in the Y-axis direction, the cap member 48 of the capping device 13 mounted on the second movable member 51 also moves in the Y-axis direction together with the second movable member 51. Moving.

  Further, similarly to the first moving body 4 described above, a plurality of actuators 52 are arranged between the second movable member 51 and the cap member 48. The control device 10 can move (finely move) the cap member 48 on the second movable member 51 by controlling these actuators 52. In the present embodiment, the cap member 48 is moved (finely moved) by the actuator 52 on the second movable member 51 in directions of six degrees of freedom in the X axis, Y axis, Z axis, θX, θY, and θZ directions. Is possible.

  In order to cover the ejection surface 2 of the ejection head 3 with the cap member 48, the control device 10 moves the second moving body 5 using the driving device 8 to face the ejection surface 2 of the ejection head 3. The capping device 13 for the second moving body 5 is arranged at A1. The control device 10 uses the actuator 52 disposed between the second movable member 51 and the cap member 48 to provide a space between the ejection surface 2 of the ejection head 3 and the cap portion 50 of the cap member 48. The positional relationship between the ejection surface 2 of the ejection head 3 and the cap portion 50 of the cap member 48 is adjusted so that 49 is formed. For example, the control device 10 uses the actuator 52 to move the cap member 51 in the + Z direction. As a result, the discharge surface 2 is disposed inside the cap portion 50, the upper end of the inner surface of the cap portion 50 contacts the side surface of the discharge head 3 (plate member 37) outside the discharge surface 2, and the space 49 is formed. It is formed.

  The capping device 13 can suck the fluid in the space 49 through the suction port 53 by driving the vacuum system 55 in a state where the space 49 is formed between the discharge surface 2 of the discharge head 3 and the cap unit 50. It is. The capping device 13 can suck the fluid (mainly gas) in the space 49 from the suction port 53 to make the space 49 have a negative pressure. The capping device 13 can suck the functional liquid inside the ejection head 3 such as the cavity 34 through the ejection port 1 by setting the space 49 to a negative pressure. The capping device 13 can generate the flow of the functional liquid toward the discharge port 1 inside the discharge head 3 by sucking the fluid in the space 49.

  The capping device 13 described with reference to FIGS. 6 and 7 mainly has a suction function for sucking the functional liquid of the discharge head 3, but has a function of suppressing drying of the discharge surface 2 (discharge port 1) ( It may have a moisturizing function). For example, a wet porous member (mesh member) is disposed inside the cap unit 50, and the cap unit 50 including the wet porous member is opposed to the discharge surface 2 of the discharge head 3, thereby drying the discharge surface 2. Can be suppressed. That is, by disposing the wet porous member inside the space 49 formed by the discharge surface 2 and the cap portion 50, drying of the discharge surface 2 can be suppressed.

  In the following description, the process of placing the second moving body 5 at the first position A1, facing the discharge surface 2 and the cap portion 50, and covering the discharge surface 2 with the cap member 48 is appropriately performed as a capping process. Called.

  Next, the third moving body 6 will be described with reference to FIGS. 8 and 9. FIG. 8 is a view of the third moving body 6 as viewed from the −X side, and FIG. 9 is a view for explaining an example of the operation of the third moving body 6. The third moving body 6 includes a wiping device 14 that removes foreign matter on the ejection surface 2 of the ejection head 3. The foreign matter on the ejection surface 2 of the ejection head 3 includes droplets. The droplets include at least one of the functional liquid droplet D and the liquid droplet of the immersion device 15.

  The wiping device 14 moves the wiping member 57 having a wiping surface 56 that can move relative to the ejection surface 2 and the wiping surface 56 of the wiping member 57 in a state of facing the ejection surface 2 of the ejection head 3. And a housing member 59 that houses the wiping member 57 and the drive mechanism 58.

  At least a part of the wiping member 57 is exposed (projected) from an opening 60 formed on the upper surface of the housing member 59 that can face the ejection head 3, and can face the ejection surface 2 of the ejection head 3. The wiping device 14 moves the wiping surface 56 of the wiping member 57 relative to the ejection surface 2 in a state where the ejection surface 2 of the ejection head 3 and the wiping surface 56 of the wiping member 57 face each other. In 56, the foreign matter adhering to the ejection surface 2 of the ejection head 3 can be removed (removed).

  In the present embodiment, the wiping member 57 is a sheet-like member. The wiping member 57 is made of a material that can absorb liquid. The wiping member 57 includes, for example, a nonwoven fabric. The wiping member 57 may be a woven fabric such as polyester. By forming the wiping member 57 with a material capable of absorbing liquid, when the foreign matter adhering to the ejection surface 2 of the ejection head 3 is a droplet, the droplet (foreign matter) can be removed well.

  The drive mechanism 58 for moving the wiping surface 56 of the wiping member 57 has a plurality of rollers that rotate while supporting the wiping member 57. The drive mechanism 58 is disposed inside the housing member 59 and is positioned closest to the ejection surface 2 of the ejection head 3, a feeding roller 61 that feeds the sheet-like wiping member 57, a take-up roller 62 that winds the wiping member 57, and the like. And a support roller 63 that supports a surface opposite to the wiping surface 56 of the wiping member 57 facing the discharge surface 2 of the discharge head 3. Each of the feeding roller 61 and the take-up roller 62 is rotated by actuators 64 and 65 such as a rotary motor. The wiping device 14 controls the actuators 64 and 65 to move (run) the wiping surface 56 of the wiping member 57 at a predetermined speed. The drive mechanism 58 includes a guide roller that guides the movement (running) of the wiping member 57 and a tension roller that can adjust the tension of the wiping member 57.

  The third moving body 6 includes a third movable member 66 having a linear motor movable element 25, and the housing member 59 of the wiping device 14 is mounted on the third movable member 66. Similar to the first movable member 40 described above, an air bearing is formed on the lower surface of the third movable member 66 facing the support surface 16 of the base member 17, and the third movable member 66 is in contact with the support surface 16. Supported without contact. Similarly to the first movable member 40 described above, a concave portion in which the guide member 18 can be disposed is formed on the lower surface of the third movable member 66, and the movable element 25 is a third movable member facing the guide member 18. The member 66 is disposed on the inner surface of the recess. The drive device 8 including the stator 22 and the movable element 25 can move the third movable member 66 in the Y-axis direction. As the third movable member 66 moves in the Y-axis direction, the housing member 59 of the wiping device 14 mounted on the third movable member 66 also moves in the Y-axis direction together with the third movable member 66. Moving.

  Further, similarly to the first moving body 4 described above, a plurality of actuators 67 are arranged between the third movable member 66 and the housing member 59. The control device 10 can move (finely move) the housing member 59 on the third movable member 66 by controlling these actuators 67. In this embodiment, the housing member 59 is moved (finely moved) by the actuator 67 on the third movable member 66 in directions of six degrees of freedom in the X axis, Y axis, Z axis, θX, θY, and θZ directions. Is possible. The drive mechanism 58 including the wiping member 57 and the roller of the wiping device 14 moves together with the housing member 59 on the third movable member 66 as the housing member 59 moves.

  In order to wipe off the foreign matter on the ejection surface 2 of the ejection head 3 with the wiping member 57, the control device 10 moves the third moving body 6 using the drive device 8 and faces the ejection surface 2 of the ejection head 3. The wiping device 14 of the third moving body 6 is disposed at the 1 position A1. Then, the control device 10 uses the actuator 67 disposed between the third movable member 66 and the housing member 59 so that the foreign matter on the discharge surface 2 can be removed by the wiping surface 56. The positional relationship between the discharge surface 2 and the wiping surface 56 of the portion of the wiping member 57 supported by the support roller 63 is adjusted. For example, the control device 10 uses the actuator 67 to move the housing member 59 in the Z-axis direction. As the housing member 59 moves in the Z-axis direction, the support roller 63 that supports the wiping member 57 also moves in the Z-axis direction. The control device 10 uses the actuator 67 to adjust the distance (gap) in the Z-axis direction between the ejection surface 2 of the ejection head 3 and the wiping surface 56 of the portion of the wiping member 57 supported by the support roller 63. To do. Then, the controller 10 drives the feeding roller 61 and the take-up roller 62 to move (run) the wiping surface 56 of the wiping member 57 with respect to the ejection surface 2 of the ejection head 3. As a result, the wiping device 14 can remove (remove) foreign matter adhering to the ejection surface 2 of the ejection head 3.

  In the following description, the process in which the third moving body 6 is disposed at the first position A1, the discharge surface 2 and the wiping surface 56 face each other, and foreign matter on the discharge surface 2 is removed is appropriately referred to as a wiping process.

  Next, the 4th moving body 7 is demonstrated, referring FIG.10 and FIG.11. FIG. 10 is a diagram of the fourth moving body 7 as viewed from the −X side, and FIG. 11 is a diagram for explaining an example of the operation of the fourth moving body 7. The fourth moving body 7 includes an immersion device 15 that immerses at least a part of the ejection head 3 in a liquid other than the functional liquid.

  The dipping device 15 includes a container 68 that contains a liquid. The liquid in the immersion device 15 includes at least one of a cleaning liquid for cleaning at least a part of the ejection head 3 and a cooling liquid for cooling at least a part of the ejection head 3. An opening 69 is formed in the upper part of the container 68 of the dipping device 15, and the ejection head 3 can move (can enter) into the space inside the container 68 through the opening 69. The control device 10 arranges the discharge head 3 in the space inside the container 68 of the dipping device 15 and immerses it in the liquid, thereby cleaning at least a part of the discharge head 3 such as the discharge surface 2 and the discharge port 1. Or can be cooled.

  As the liquid of the dipping device 15, for example, a separating medium for functional liquid can be used. Since the dispersion medium of the present embodiment is a liquid mainly composed of water, water or a liquid mainly composed of water can be used as the liquid of the immersion device 15. Thereby, at least a part of the ejection head 3 such as the ejection surface 2 and the ejection port 1 can be cleaned or cooled.

  The fourth moving body 7 includes a fourth movable member 70 having a linear motor movable element 26, and the container 68 of the immersion device 15 is mounted on the fourth movable member 70. Similar to the first movable member 40 described above, an air bearing is formed on the lower surface of the fourth movable member 70 facing the support surface 16 of the base member 17, and the fourth movable member 70 is in contact with the support surface 16. Supported without contact. Similarly to the first movable member 40 described above, a concave portion in which the guide member 18 can be disposed is formed on the lower surface of the fourth movable member 70, and the movable element 26 is a fourth movable member facing the guide member 18. It is disposed on the inner surface of the recess of the member 70. The drive device 8 including the stator 22 and the mover 26 can move the fourth movable member 70 in the Y-axis direction. Further, as the fourth movable member 70 moves in the Y-axis direction, the container 68 of the immersion device 15 mounted on the fourth movable member 70 also moves in the Y-axis direction together with the fourth movable member 70. To do.

  Further, similarly to the first moving body 4 described above, a plurality of actuators 71 are arranged between the fourth movable member 70 and the container 68. The control device 10 can move (finely move) the container 68 on the fourth movable member 70 by controlling these actuators 71. In the present embodiment, the container 68 can be moved (finely moved) by the actuator 71 on the fourth movable member 70 in directions of six degrees of freedom in the X axis, Y axis, Z axis, θX, θY, and θZ directions. It is. Further, the surface of the liquid stored in the container 68 of the dipping device 15 moves together with the container 68 on the fourth movable member 70 as the container 68 moves.

  In order to immerse at least a part of the ejection head 3 in the liquid of the immersion device 15, the control device 10 moves the fourth moving body 7 using the driving device 8 and opposes the ejection surface 2 of the ejection head 3. The immersion device 15 for the fourth moving body 7 is disposed at the one position A1. Then, the control device 10 uses the actuator 71 disposed between the fourth movable member 70 and the container 68 so that at least the discharge surface 2 of the discharge head 3 is immersed in the liquid in the container 68. The positional relationship between the discharge surface 2 and the container 68 (liquid surface) is adjusted. For example, the control apparatus 10 uses the actuator 71 to move the container 68 in the + Z direction. As the container 68 moves in the + Z direction, the surface of the liquid stored in the container 68 moves so as to approach the ejection head 3. Thereby, the immersion device 15 can immerse at least a part of the ejection head 3 in the liquid. In addition, the control device 10 can separate the liquid contained in the container 68 from the ejection head 3 by moving the container 68 in the −Z direction using the actuator 71.

  In the following description, the fourth moving body 7 is disposed at the first position A1, the discharge surface 2 and the liquid surface of the container 68 are opposed to each other, and at least a part of the discharge head 3 is immersed in the liquid of the container 68. The treatment is appropriately referred to as immersion treatment.

  In the following description, a process for maintaining the ejection head 3 is appropriately referred to as a maintenance process. The maintenance process includes at least one of the above-described capping process, wiping process, and dipping process.

  Next, the heat insulating member 29 will be described with reference to FIGS. 12 and 13. FIG. 12 is a perspective view showing the heat insulating member 29, and FIG. 13 is a view of the heat insulating member 29 as viewed from the -Y side.

  The heat insulating member 29 is disposed on at least a part of the moving path of each moving body 5, 6, 7 including the first moving body 4. The heat insulating member 29 blocks the diffusion of the heat of the first moving body 4 to the surroundings. As described above, the first moving body 4 (holder member 42) includes the heating device 47 that heats the substrate P. The heat insulating member 29 blocks heat radiating from the first moving body 4 including the heating device 47 to the surroundings.

  The heat insulating member 29 is arranged on the moving path of the moving bodies 4, 5, 6, and 7 other than the first position A1. That is, the heat insulating member 29 is not disposed at the first position A1 where the process using the ejection head 3 is performed. Thereby, execution of various processing (pattern formation processing, maintenance processing, etc.) by the cooperation of the ejection head 3 and each moving body 4, 5, 6, 7 is not hindered.

  Further, the heat insulating member 29 is not arranged at the second position A2 where the processing by the substrate transfer device 27 is executed. That is, in this embodiment, the heat insulation member 29 is arrange | positioned at the movement path | route of the mobile bodies 4, 5, 6, and 7 other than 1st position A1 and 2nd position A2. Thereby, the carrying-in operation of the substrate P by the substrate transfer device 27 and the carrying-out operation of the substrate P from the first moving body 4 to the first moving body 4 arranged at the second position A2 are not hindered.

  In the present embodiment, the heat insulating member 29 is disposed so as to surround the moving bodies 4, 5, 6, 7 at positions away from the moving bodies 4, 5, 6, 7 on the base member 17. The heat insulating member 29 forms an internal space 72 in which each moving body 4, 5, 6, 7 can move. Specifically, the heat insulating member 29 forms an internal space 72 in which each moving body 4, 5, 6, 7 can move (can be arranged) with the support surface 16 of the base member 17. The heat insulating member 29 blocks the diffusion of the heat of the first moving body 4 disposed in the internal space 72 to the external space 73. The external space 73 is a space outside the heat insulating member 29 with respect to the internal space 72. In the present embodiment, the external space 73 includes a space between the chamber main body 30 (the inner surface of the chamber main body 30) and the heat insulating member 29 (the outer surface of the heat insulating member 29).

  The air conditioner 31 of the chamber device 32 adjusts at least the temperature of the external space 73. Thereby, each apparatus and member in the chamber body 30 are arranged in a desired environment (temperature).

  The heat insulating member 29 has a heat insulating property, and is formed of a material that can block the diffusion of the heat of the first moving body 4 disposed in the internal space 72 to the external space 73. In the present embodiment, the heat insulating member 29 is made of a synthetic resin having heat insulating properties such as foamed polystyrene or foamed urethane.

  The heat insulating member 29 of the present embodiment has a tunnel shape, and openings (entrances / outlets) 74 through which the moving bodies 4, 5, 6, 7 can pass are formed on both sides of the heat insulating member 29 in the Y-axis direction. . The opening 74 is formed so as to communicate the internal space 72 formed by the heat insulating member 29 and the external space 73.

  Next, an example of a procedure for manufacturing a device using the droplet discharge apparatus IJ having the above-described configuration will be described.

  The control device 10 controls the driving device 8 to place the first moving body 4 at the second position A2. The control device 10 loads the substrate P into the first moving body 4 disposed at the second position A2 using the substrate transport device 27. The control device 10 controls the driving device 8 to move the first moving body 4 holding the substrate P to the first position A1.

  FIG. 14 is a schematic diagram illustrating a state in which the first moving body 4 holding the substrate P is disposed at the first position A1. The control device 10 arranges the first moving body 4 holding the substrate P at the first position A1 facing the ejection surface 2 of the ejection head 3. Then, the control device 10 controls the controller 12 and the driving device 8 to move the substrate P of the first moving body 4 in the Y-axis direction with respect to the discharge port 1 of the discharge head 3 while moving the substrate P of the discharge head 3. A droplet D is discharged (supplied) to the substrate P from the discharge port 1. Thereby, a pattern is formed on the substrate P by the droplets D. The control device 10 discharges droplets D onto the substrate P while heating the substrate P with the heating device 47.

  In the present embodiment, among the discharge ports 1 of the plurality of discharge heads 3, the distance between the most + X side discharge port 1 and the most −X side discharge port 1 and the size of the substrate P in the X-axis direction are almost the same. equal. Accordingly, the droplet discharge device IJ moves the substrate P of the first moving body 4 in the Y-axis direction with respect to the discharge port 1 of the discharge head 3 and applies the droplet D to the substrate P from the discharge port 1 of the discharge head 3. When discharging (supplying), the droplets D can be supplied to almost the entire surface of the substrate P by moving the substrate P in the Y-axis direction only once.

  In addition, the droplet discharge device IJ moves the substrate P of the first moving body 4 in the Y axis direction with respect to the discharge port 1 of the discharge head 3 and applies the droplet D to the substrate P from the discharge port 1 of the discharge head 3. The operation of discharging (supplying) may be repeated a plurality of times. For example, the operation of discharging the droplet D while moving the substrate P in the + Y direction and the operation of discharging the droplet D while moving the substrate P in the −Y direction may be repeated a plurality of times. Further, as disclosed in, for example, Japanese Patent Application Laid-Open No. 2004-146996, the position of the substrate P in the X-axis direction is moved by a small distance (for example, one pixel) every time the substrate P moves in the Y-axis direction. You may change only.

  As described above, the substrate P of the present embodiment is an LTCC substrate (green sheet) before sintering, and is supported by the film F. The droplet discharge device IJ discharges the droplet D onto the substrate P (green sheet) supported by the film F.

  After the operation of ejecting the droplets D on the substrate P is completed, the control device 10 controls the driving device 8 to carry the substrate P out of the first moving body 4 to move the first moving body 4 to the second position. Move to A2. In the present embodiment, the driving device 8 moves the plurality of moving bodies 4, 5, 6, and 7 together in the −Y direction (the direction from the first position A1 toward the second position A2).

  Since the heat insulating member 29 is arranged in the moving path of the first moving body 4 between the first position A1 and the second position A2, the first moving between the first position A1 and the second position A2. It can suppress that the heat of the mobile body 4 is dissipated to the external space 73.

  FIG. 15 is a schematic diagram illustrating a state in which the first moving body 4 holding the substrate P is disposed at the second position A2. In the present embodiment, the first moving body 4 capable of holding the substrate P is arranged on the most −Y side (second position A2 side) among the plurality (four) of moving bodies 4, 5, 6, and 7. It is a moving body. As shown in FIG. 15, when the first moving body 4 is arranged at the second position A2, among the plurality (four) moving bodies 4, 5, 6, and 7, the + Y side (first position) The size and number of each moving body 4, 5, 6, 7 and the first position A1 and the second position so that the fourth moving body 7 disposed on the A1 side) is disposed at the first position A1. The distance from A2 is set. Accordingly, as shown in FIG. 15, when the first moving body 4 is disposed at the second position A2, the fourth moving body 7 is disposed at the first position A1.

  The control device 10 uses the substrate transfer device 27 to carry out the substrate P from the first moving body 4 arranged at the second position A2, and to carry in a new substrate P into the first moving body 4.

  On the other hand, the control device 10 performs a maintenance process on the ejection head 3 using the fourth moving body 7 disposed at the first position A1. The dipping device 15 of the fourth moving body 7 performs a maintenance process (immersion process) in cooperation with the ejection head 3. As described with reference to FIG. 11 and the like, the control device 10 immerses the discharge head 3 in the liquid of the immersion device 15 and cleans the discharge head 3. Further, as described above, the ejection head 3 (plate member 37) discharges the droplet D while facing the substrate P of the first moving body 4, so that the ejection head 3 (plate member 37) includes the heating device 47. There is a possibility of being heated by heat. If the plate member 37 of the discharge head 3 is heated and left in that state, for example, the plate member 37 is thermally deformed, and the distance (nozzle pitch) between the discharge ports 1 formed in the plate member 37 varies. there is a possibility. When the nozzle pitch varies, the droplet D cannot be supplied to a desired position on the substrate P, and the performance of the manufactured device deteriorates. In the present embodiment, by immersing the ejection head 3 in the liquid of the immersion device 15, the heated ejection head 3 (plate member 37) is cooled, and the ejection head 3 (plate member 37) is returned to an optimum temperature ( Adjust). Therefore, it is possible to suppress the occurrence of problems such as fluctuation of the nozzle pitch.

  Further, in the present embodiment, the control device 10 uses the maintenance process for the ejection head 3 by the fourth moving body 7 disposed at the first position A1 and the first moving body 4 disposed at the second position A2. It is possible to execute in parallel with at least a part of the processing (unloading and loading processing of the substrate P). Thereby, the processing efficiency of the droplet discharge device IJ can be improved.

  After the processing (immersion processing) using the fourth moving body 7 is completed, the control device 10 controls the driving device 8 to move the plurality of moving bodies 4, 5, 6, and 7 in the + Y direction (second position A2). To the first position A1), and the third moving body 6 is arranged at the first position A1. The control device 10 performs a maintenance process for the ejection head 3 using the third moving body 6 disposed at the first position A1. The wiping device 14 of the third moving body 6 performs maintenance processing (wiping processing) in cooperation with the ejection head 3. As described with reference to FIG. 9 and the like, the control device 10 uses the wiping member 57 of the wiping device 14 to remove the foreign matter adhering to the ejection surface 2 of the ejection head 3. In this embodiment, before the wiping process by the wiping device 14, the immersion process by the immersion apparatus 15 is performed. There is a possibility that liquid droplets of the immersion device 15 remain on the ejection surface 2 of the ejection head 3. The control device 10 uses the wiping device 14 to remove (remove) the liquid droplets of the immersion device 15 remaining on the ejection surface 2 of the ejection head 3.

  After the wiping process for the ejection head 3 by the third moving body 6 is completed, the control device 10 controls the driving device 8 to move the plurality of moving bodies 4, 5, 6, and 7 in the + Y direction (from the second position A2). Move in the first direction A1) and place the second moving body 5 at the first position A1. The control device 10 performs a maintenance process for the ejection head 3 using the second moving body 5 disposed at the first position A1. The capping device 13 of the second moving body 5 performs maintenance processing (capping processing) in cooperation with the ejection head 3. As described with reference to FIG. 7 and the like, the control device 10 uses the capping device 13 to suck the discharge port 1 of the discharge head 3.

  After the capping process is completed, the second moving body 6 can be arranged at the first position A1 and the wiping process can be executed. Even when foreign matter (including droplets) is attached to the ejection surface 2 after the capping process is completed, the foreign matter can be removed by the wiping process.

  After the capping process on the ejection head 3 by the second moving body 5 is completed, the control device 10 controls the driving device 8 to move the plurality of moving bodies 4, 5, 6, and 7 in the + Y direction (from the second position A2). The first moving body 4 is arranged at the first position A1 by moving together in the direction toward the first position A1. The control device 10 starts a process (pattern formation process) for ejecting the droplets D from the ejection head 3 on the substrate P held by the first moving body 4 arranged at the first position A1. The first moving body 4 cooperates with the ejection head 3 to execute a process for forming a pattern on the substrate P with the droplets D (pattern formation process).

  Thus, in the present embodiment, the control device 10 sequentially arranges the plurality of moving bodies 4, 5, 6, and 7 at the first position A1, and the moving body 4 disposed at the first position A1, Processing by cooperation of 5, 6, 7 and the ejection head 3 is executed. In the present embodiment, the plurality of moving bodies 4, 5, 6, 7 cooperate with the ejection head 3 in the order in which predetermined processing is performed, from the first position A 1 (+ Y side) to the second position A 2 ( -Y side). That is, as described above, the control device 10 sequentially arranges the fourth moving body 7, the third moving body 6, the second moving body 5, and the first moving body 4 at the first position A1, An immersion process using the moving body 7, a wiping process using the third moving body 6, a capping process using the second moving body 5, and a pattern forming process using the first moving body 4 are sequentially executed. In the present embodiment, the fourth moving body 7, the third moving body 6, the second moving body 5, and the first moving body 4 are arranged in this order from the first position A1 to the second position A2. .

  In the present embodiment, droplets D are discharged onto a plurality of (for example, about 10 to 20) substrates P (green sheets), and a pattern is formed on each substrate P with the droplets D. The film F is removed from the substrate P after the pattern is formed with the droplets D. Then, a plurality of substrates P having a pattern formed by droplets D are stacked, and a stacked body of the substrates P is formed. Thereafter, the laminated body of the substrates P is heat-treated. Thereby, the droplets D on the substrate P are dried and fired, and the substrate P (green sheet) is also fired. Thereby, an LTCC substrate (LTCC multilayer circuit substrate) having a predetermined wiring pattern is formed.

  As described above, according to the present embodiment, a plurality of moving bodies 4, 5, 6, 7 are arranged along a predetermined axis (Y axis), and each of the moving bodies 4, 5, 6, 7 is Since the drive device 8 is used to move along a predetermined axis (Y axis), the devices constituting the droplet discharge device IJ, such as the holder member 42, the capping device 13, the wiping device 14, and the immersion device 15, are provided. By mounting on the moving bodies 4, 5, 6, and 7, excessive simplification and omission of each device are suppressed, and deterioration of the performance of the droplet discharge apparatus IJ is suppressed, and the droplet discharge apparatus IJ is controlled. Can be downsized. In particular, the size (occupied area, footprint) of the droplet discharge device IJ in the XY direction can be reduced.

  Further, according to the present embodiment, it is not necessary to move the position of the ejection head 3 substantially, so that the space around the ejection head 3 can be used effectively. In the present embodiment, as shown in FIG. 1, the control device 10, the controller 12, the functional liquid storage device 9, and the like can be disposed around the ejection head 3. As a result, the entire droplet discharge device IJ can be reduced in size.

  Further, in the present embodiment, after the processing using at least one of the plurality of moving bodies 4, 5, 6, 7 (for example, the immersion process using the fourth moving body 7) is completed, the plurality of moving bodies 4. In order to shift to the next process using at least one of 5, 6, 7 (for example, the wiping process using the third moving body 6), the plurality of moving bodies 4, 5, 6, 7 are moved together. To do. Thereby, generation | occurrence | production of the malfunction which the mobile bodies 4, 5, 6, and 7 interfere or collide can be suppressed. Further, among the plurality of moving bodies 4, 5, 6, and 7, for example, when the third moving body 6 is arranged at the first position A1 and performs the capping process in cooperation with the ejection head 3, When the moving bodies 4, 5, 7 move, vibrations caused by the movement of the other moving bodies 4, 5, 7 may cause problems such as deterioration in the accuracy of the wiping process of the third moving body 6. There is sex. By moving the plurality of moving bodies 4, 5, 6, and 7 together, the occurrence of the above-described problems can be suppressed.

  In the present embodiment, the first moving body 4 that can move while holding the substrate P and the fourth moving body 7 that can perform the maintenance process on the ejection head 3 include a plurality of moving bodies 4, 5, 6. , 7 are movable bodies arranged at both ends in the Y-axis direction. Thereby, for example, after the immersion treatment of the fourth moving body 7 arranged at the first position A1 is completed, the fourth moving body 7 is moved in the direction away from the first moving body 4 (+ Y direction). The third movement arranged between the first moving body 4 and the fourth moving body in the state where the first moving body 4 is arranged at the second position A2 for the loading and unloading processing of the substrate P. The body 6 can also be moved to the first position A1. Accordingly, a wiping process using the third moving body 6 arranged at the first position A1 and a process using the first moving body 4 arranged at the second position A2 (loading and unloading process of the substrate P). Can be performed in parallel.

  In the present embodiment, the plurality of moving bodies 4, 5, 6, 7 are sequentially arranged at the first position A 1, execute predetermined processing in cooperation with the ejection head 3, and perform the processing in the order in which they are processed. The first position A1 is disposed toward the second position A2. Therefore, when each moving body 4, 5, 6, 7 performs a predetermined process in cooperation with the ejection head 3, the first position A 1 that faces each moving body 4, 6, 7 to the ejection head 3. Can be placed quickly. Thereby, the processing efficiency of the droplet discharge device IJ can be improved.

  In addition, after performing the immersion process, the wiping process, and the capping process, and before performing the pattern formation process, the wiping apparatus 14 for performing the wiping process and the capping apparatus 13 for performing the capping process are performed. Are arranged adjacent to each other in the Y-axis direction, and therefore, after the capping process by the capping device 13, the wiping device 14 can be quickly arranged at the first position A1. As described above, when the second process (for example, the wiping process) is executed following the first process (for example, the capping process), the first processing apparatus that executes the first process and the second process are executed. By arranging the second processing device so as to be adjacent to each other in the Y-axis direction, the transition from the first processing to the second processing can be performed quickly.

  Note that the order of processing using the above-described moving bodies 4, 5, 6, and 7 is an example. For example, the dipping process may be performed after the capping process, and then the wiping process may be performed. Or after performing an immersion process, a capping process may be performed and a wiping process may be performed after that. Also, the same process (in this case, the wiping process) may be executed a plurality of times, such as after the immersion process is performed, the wiping process is performed, the capping process is performed, and then the wiping process is performed again. The arrangement of the moving bodies 4, 5, 6, and 7 is set according to the processing order.

  Further, in the maintenance process using the second moving body 5, the third moving body 6, and the fourth moving body 7, the second moving body 5, the third moving body 6, and the fourth moving body are not necessarily provided for each maintenance process. All of 7 need not be used. For example, only the dipping process and the wiping process may be performed without performing the capping process, or the capping process and the wiping process may be performed without performing the dipping process, or the dipping process and the capping process may be performed. Only the wiping process may be performed without performing the wiping process, or only the capping process may be performed without performing the immersion process and the wiping process.

  The maintenance process using the second moving body 5, the third moving body 6, and the fourth moving body 7 can be executed at a predetermined timing. In the present embodiment, the maintenance process is executed for each operation of unloading the substrate P from the first moving body 4 and for each operation of loading the substrate P into the first moving body 4. You may make it perform a maintenance process for every space | interval.

<Second Embodiment>
Next, a second embodiment will be described. In the following description, the same or equivalent components as those of the above-described embodiment are denoted by the same reference numerals, and the description thereof is simplified or omitted.

  FIG. 16 is a schematic diagram showing a droplet discharge device IJ according to the second embodiment. In the first embodiment described above, the plurality of moving bodies 4, 5, 6, 7 can move independently of each other, but the characteristic part of the second embodiment is that the plurality of moving bodies 4, 5, 6 and 7 are provided with a connecting member 75 for connecting the members.

  As shown in FIG. 16, the droplet discharge device IJ includes a connecting member 75 that connects the moving bodies 4, 5, 6, and 7. In the present embodiment, for example, only the first movable member 40 of the first movable body 4 is provided with the movable element 23 of the drive device 8 including a linear motor, and the movable members of the other movable bodies 5, 6, 7 are provided. 51, 66, and 70 are not provided with a mover. When discharging the droplet D onto the substrate P, as shown in FIG. 16, the first moving body 4 holding the substrate P is disposed at the first position A1.

  After the operation of ejecting the droplets D on the substrate P is completed, the control device 10 controls the driving device 8 to carry the substrate P out of the first moving body 4 to move the first moving body 4 to the second position. Move to A2. The plurality of moving bodies 4, 5, 6, and 7 are connected to each other by a connecting member 75. As the first moving body 4 moves, the other moving bodies 5, 6, and 7 also move to the first moving body 4. And move in the -Y direction.

  FIG. 17 is a schematic diagram illustrating a state in which the first moving body 4 holding the substrate P is disposed at the second position A2. Similar to the first embodiment described above, also in the present embodiment, when the first moving body 4 is arranged at the second position A2, among the plurality (four) of moving bodies 4, 5, 6, and 7 , The size and number of each of the moving bodies 4, 5, 6, 7 and the first position A1 and the first position so that the fourth moving body 7 arranged on the most + Y side is arranged at the first position A1. A distance from the second position A2 is set.

  As described above, by connecting the moving bodies 4, 5, 6, 7 with the connecting member 75, the configuration of the drive device 8 can be simplified or the number of parts of the drive device 8 can be reduced. .

  The connecting member (connector) 75 can be provided with a mechanism that can be connected and released. As the coupler 75, an existing one such as a screw coupler, an automatic coupler, a close coupler, or the like can be used. Further, the coupler 75 may be provided with an electromagnetic chuck mechanism, and the coupler may be connected and released using the electromagnetic chuck mechanism. When the first moving body 4 is arranged at the first position A1 and the operation of discharging the droplet D onto the substrate P of the first moving body 4 is executed, the first moving body 4 It moves at high speed in the Y-axis direction (for example, reciprocating movement). In that case, if the first moving body 4 is connected to the other moving bodies 5, 6, 7, the accuracy (movement accuracy, position accuracy, etc.) of the first moving body 4 is deteriorated and formed on the substrate P. There is a possibility that the accuracy of the pattern to be formed (pattern shape accuracy, etc.) may deteriorate. Therefore, when the droplet D is discharged onto the substrate P of the first moving body 4, the connection between the first moving body 4 and the second moving body 5 is released. In other words, the first moving body 4 is separated from the other moving bodies 5, 6, and 7. Thereby, during the discharge operation of the droplet D, the first moving body 4 can move alone and with high accuracy. And after discharge operation of the droplet D with respect to the board | substrate P of the 1st moving body 4 is complete | finished, as demonstrated with reference to FIG. 17 etc. by connecting the 1st moving body 4 and the 2nd moving body 5. FIG. In addition, as the first moving body 4 moves, the other moving bodies 5, 6, 7 can move together with the first moving body 4.

<Third Embodiment>
Next, a third embodiment will be described. FIG. 18 is a diagram illustrating an example of the moving object 76 according to the third embodiment. In the first and second embodiments described above, the case where the movable body is the movable body 4 that holds the substrate P or the movable bodies 5, 6, and 7 that can maintain the discharge head 3 has been described as an example. The moving body may include a detection device 77 that detects the discharge state of the droplet D of the discharge head 3.

  FIG. 18 is a diagram illustrating an example of the fifth moving body 76 including the detection device 77. The fifth moving body 76 includes a detection device 77 that detects the discharge state of the droplet D of the discharge head 3.

  The detection device 77 is mounted on the support member 78, the sheet-like detection member 80 that is mounted on the support member 78 and has a detection surface 79 that can face the discharge surface 2 of the discharge head 3, and the discharge surface 2 of the discharge head 3. A drive mechanism 81 that can move the detection surface 79 relative to the ejection surface 2 in a state where the detection surface 79 is opposed, and an imaging device (camera) 82 that can acquire an image of the detection surface 79 are provided.

  The drive mechanism 81 for moving the detection surface 79 of the detection member 80 includes a plurality of rollers 83 and 84 that rotate while supporting the detection member 80. The drive mechanism 81 includes a feed roller 83 that is disposed on the support member 78 and feeds the sheet-like detection member 80, and a take-up roller 84 that winds the detection member 80. Each of the supply roller 83 and the take-up roller 84 is rotated by an actuator such as a rotary motor. The detection device 77 controls the actuator to move (run) the detection surface 79 of the detection member 80 at a predetermined speed.

  In the present embodiment, the detection surface 79 is disposed so as to be substantially parallel to the XY plane (discharge surface 2) in a state where a predetermined gap is formed with the discharge surface 2. The drive mechanism 81 moves the detection member 80 so that the detection surface 79 moves in the Y-axis direction (in this embodiment, the + Y direction).

  The fifth moving body 76 includes a fifth movable member 85 having a linear motor movable element, and the support member 78 of the detection device 77 is mounted on the fifth movable member 85. Similar to the first movable member 40 described above, an air bearing is formed on the lower surface of the fifth movable member 85 facing the support surface 16 of the base member 17, and the fifth movable member 85 is in contact with the support surface 16. Supported without contact. Similarly to the first movable member 40 described above, a concave portion in which the guide member 18 can be disposed is formed on the lower surface of the fifth movable member 85, and the movable element is a fifth movable member facing the guide member 18. It is arranged on the inner surface of 85 recesses. The drive device 8 including the stator 22 and the mover can move the fifth movable member 85 in the Y-axis direction. Further, as the fifth movable member 85 moves in the Y-axis direction, the detection device 77 (support member 78) mounted on the fifth movable member 85 also moves together with the fifth movable member 85 in the Y-axis direction. Move to.

  Further, similarly to the first moving body 4 described above, a plurality of actuators 86 are arranged between the fifth movable member 85 and the support member 78. The control device 10 can move (finely move) the support member 78 on the fifth movable member 85 by controlling these actuators 86. In the present embodiment, the support member 78 is moved by the actuator 86 on the fifth movable member 85 in the directions of six degrees of freedom in the X axis, Y axis, Z axis, θX, θY, and θZ directions (fine movement). Is possible.

  In the present embodiment, the rollers 83 and 84 that support the detection member 80 are supported by support mechanisms 83S and 84S fixed on the support member 78. The imaging device 82 is supported by a support mechanism 82S fixed on a support member 78. Therefore, the detection surface 79 of the detection member 80 moves together with the support member 78 as the support member 78 moves, and the imaging device 82 also moves together with the support member 78 as the support member 78 moves. To do.

  Next, an example of the operation of the detection device 77 will be described. In order to detect the discharge state of the droplets D of the discharge head 3 using the detection device 77, the control device 10 moves the fifth moving body 85 using the drive device 8 and discharges the discharge surface 2 of the discharge head 3. The detection device 77 of the fifth moving body 76 is disposed at the first position A1 that faces. Specifically, the control device 10 arranges the detection surface 79 of the detection member 80 at the first position A1 facing the discharge surface 2 of the discharge head 3. Then, the control device 10 causes the ejection surface 2 of the ejection head 3 and the detection surface 79 of the detection member 80 to face each other while moving the detection surface 79 of the detection member 80 in the + Y direction by the drive mechanism 81. A droplet D is discharged from the discharge port 1 of the head 3 to the detection surface 79. The droplet D discharged from the discharge port 1 is supplied to the detection surface 79.

  The control device 10 moves the detection surface 79 of the detection member 80 using the drive mechanism 81 so that the droplet D supplied to the detection surface 79 is arranged in the imaging region of the imaging device 82. The imaging device 82 is disposed on the + Y side of the ejection head 3 and images the droplet D supplied to the detection surface 79. The detection device 77 evaluates the imaging result (observation result) of the imaging device 82. For example, the detection device 77 evaluates the position, size, and the like of the plurality of droplets D supplied to the detection surface 79 based on the imaging result (observation result) of the imaging device 82. Information relating to the target position and target size of the droplet D supplied to the detection surface 79 is stored in the detection device 77 in advance. The detection device 77 compares the imaging result of the imaging device 82 with the stored information. The detection device 77 determines whether or not the ejection head 3 is ejecting the droplet D in a desired state based on the imaging result of the imaging device 82 and the stored information. For example, based on the imaging result of the imaging device 82 and the stored information, the position of the droplet D (pitch between the liquid enemies D) supplied on the detection surface 79 is within an allowable range with respect to the target position (target pitch). If it is determined that the discharge state of the droplet D is within the allowable range, the detection device 77 determines that the discharge state of the droplet D of the discharge head 3 is normal. Judge that the condition is abnormal. Further, when it is determined that the size of the droplet D supplied on the detection surface 79 is within an allowable range with respect to the target size based on the imaging result of the imaging device 82 and the stored information, the detection device 77 determines that the discharge state of the droplet D of the discharge head 3 is normal, and determines that the discharge state of the droplet D of the discharge head 3 is abnormal when it is determined that the discharge state is outside the allowable range.

  When the detection device 77 determines that the discharge state of the droplet D of the discharge head 3 is normal, the control device 10 continues the normal sequence including the pattern formation process. On the other hand, when the detection device 77 determines that the discharge state of the droplet D of the discharge head 3 is abnormal, the control device 10 uses the maintenance devices 13, 14, and 15 described in the above embodiment to discharge Maintenance processing for the head 3 is executed. By the maintenance process, the ejection head 3 can eject the droplets D satisfactorily.

  When the fifth moving body 76 including the detection device 77 is provided, as described in the first embodiment, the position (arrangement) of each moving body is determined according to the order of processing in cooperation with the ejection head 3. ) Is set.

  In the present embodiment, the detection device 77 detects the position and size of the droplet D ejected from the ejection head 3. However, as the detection device, a droplet ejected from the ejection head 3 is used. The weight of D may be measured.

  In the first to third embodiments described above, the substrate P is an LTCC substrate (green sheet) and a wiring pattern (circuit pattern) is formed on the substrate P as an example. Can be appropriately selected according to the device to be manufactured, such as a glass substrate and a semiconductor wafer, as well as a green sheet. Further, the conductive fine particles of the functional liquid used are not only silver but also metal fine particles such as gold, copper, palladium, and nickel as disclosed in, for example, JP-A-2005-34837. It may be a conductive polymer. Moreover, the dispersion medium used can also be suitably selected according to electroconductive fine particles. In addition to the wiring pattern, at least a part of a thin film transistor (TFT) can be formed.

  A device that can be manufactured using the droplet discharge device IJ is not limited to a circuit board, and can form at least a part of a liquid crystal device such as a color filter, an alignment film, or the like, or at least an organic EL device. A part can also be formed.

It is a schematic block diagram which shows the droplet discharge apparatus which concerns on 1st Embodiment. 1 is a perspective view illustrating a part of a droplet discharge device according to a first embodiment. It is the figure which looked at the some discharge head supported by the carriage member from the lower side. It is sectional drawing for demonstrating an example of the structure of a discharge head. It is a figure which shows an example of a 1st moving body. It is a figure which shows an example of a 2nd moving body. It is a figure for demonstrating an example of operation | movement of a 2nd moving body. It is a figure which shows an example of a 3rd moving body. It is a figure for demonstrating an example of operation | movement of a 3rd moving body. It is a figure which shows an example of a 4th moving body. It is a figure for demonstrating an example of operation | movement of a 4th moving body. It is a perspective view which shows a heat insulation member. It is a side view which shows a heat insulation member. It is a figure for demonstrating an example of operation | movement of the droplet discharge apparatus which concerns on 1st Embodiment. It is a figure for demonstrating an example of operation | movement of the droplet discharge apparatus which concerns on 1st Embodiment. It is a figure which shows the droplet discharge apparatus which concerns on 2nd Embodiment. It is a figure which shows the droplet discharge apparatus which concerns on 2nd Embodiment. It is a figure which shows an example of the 5th moving body which concerns on 3rd Embodiment.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 ... Discharge port, 2 ... Discharge surface, 3 ... Discharge head, 4 ... 1st moving body, 5 ... 2nd moving body, 6 ... 3rd moving body, 7 ... 4th moving body, 8 ... Drive apparatus, 13 ... Capping device, 14 ... Wiping device, 15 ... Immersion device, 18 ... Guide member, 38 ... Holding device, 75 ... Connecting member, 76 ... Fifth moving body, 77 ... Detection device, A1 ... First position, A2 ... Second Position, D ... droplet, P ... substrate

Claims (15)

An ejection head having an ejection surface on which ejection openings for ejecting droplets of functional liquid are formed;
A plurality of movable bodies that are movable with respect to the ejection head in a predetermined region including a first position facing the ejection surface, and are arranged along a predetermined axis;
A droplet discharge device comprising: a driving device that moves the plurality of moving bodies along the predetermined axis.   The droplet discharge device according to claim 1, further comprising a holding device that holds the discharge head so that the position of the discharge head does not substantially move.   The liquid droplet ejection apparatus according to claim 1, wherein the movable body is movable while holding a substrate on which a pattern is formed by the liquid droplets.   The droplet discharge device according to claim 1, wherein the moving body includes a maintenance device that maintains the discharge head.   The maintenance device includes at least one of a wiping device that removes foreign matter on the ejection surface, a capping device that covers the ejection surface, and an immersion device that immerses at least a part of the ejection head in a liquid other than the functional liquid. 4. The droplet discharge device according to 4.   The droplet discharge device according to claim 1, wherein the moving body includes a detection device that detects a discharge state of the droplets of the discharge head.   The liquid droplet ejection apparatus according to claim 1, further comprising a guide member that guides movement of the movable body in the predetermined axis direction.   The liquid droplet ejection apparatus according to claim 1, wherein the driving device is capable of independently moving each of the plurality of moving bodies.   The liquid droplet ejection apparatus according to claim 1, wherein the drive device moves the plurality of moving bodies together.   The droplet discharge device according to claim 1, further comprising a connecting member that connects the movable bodies.   The plurality of moving bodies are sequentially arranged at the first position, execute a predetermined process in cooperation with the ejection head, and according to the order of processing, the plurality of moving bodies in the predetermined axis direction. The droplet discharge apparatus according to claim 1, wherein the positional relationship is set. An operation of loading a substrate on which a pattern is formed with the droplets into a first moving body arranged at a second position different from the first position in the predetermined axis direction among the plurality of moving bodies; and A transport device that performs at least one of the operations of unloading the substrate from the first moving body disposed at the two positions;
The second moving body different from the first moving body is disposed at the first position when the first moving body is disposed at the second position. The droplet discharge device according to any one of the preceding claims.   The liquid droplet ejection apparatus according to claim 12, wherein the first moving body and the second moving body are moving bodies arranged at both ends with respect to the predetermined axis direction among the plurality of moving bodies.   The plurality of moving bodies are sequentially arranged at the first position, perform predetermined processing in cooperation with the ejection head, and are arranged from the first position toward the second position in the order of processing. The droplet discharge device according to claim 12 or 13. An operation of discharging a droplet onto a substrate using the droplet discharge device according to claim 1 to form a pattern on the substrate;
An operation of drying droplets of the substrate.

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