JP2008145198A - Inspection device for flat panel display module and imaging device for inspection device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an inspection device for a flat panel display module capable of performing visual examination by acquiring a good image from both of the image display surface and side surface of the flat panel display module without scaling up the inspection device, and an imaging device for the inspection device. <P>SOLUTION: The inspection device 10a for a liquid crystal display panel in this embodiment is constituted so as to move the illumination device 1, first group mirror part 4 and second group mirror parts 5a and 5b provided above the upper surface 20a of the liquid crystal display panel 20 along a main scanning direction by a drive means. The first group mirror part 4 is moved in one direction at a constant speed while the second group mirror parts 5a and 5b are moved on one axis in both directions at a variable speed. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to an inspection apparatus for a flat panel display module and an imaging apparatus for an inspection apparatus for imaging the surface and side surfaces of a flat panel display module and performing an appearance inspection of the flat panel display module using the obtained image.

  In a flat panel display module (hereinafter referred to as an FPD module) such as a liquid crystal display panel, unevenness, black spots, white spots, and the like may occur as display quality defects. These defective elements are not so much a problem in small display panels used in wristwatches and the like, but they are enlarged and easily noticeable in large display panels, so that the commercial value thereof is significantly reduced. .

  Until a long time ago, such a display quality defect check was performed by an inspector. However, the visual inspection has a problem that the physical burden on the inspector is large, and since it is a sensory inspection, quantitative judgment is difficult. Furthermore, there has been a concern that the physical burden on the inspector will further increase as the FPD becomes larger. Therefore, in order to solve such problems and realize cost reduction, development of an inspection apparatus for an FPD module equipped with an optical system apparatus has been demanded.

Patent document 1 is disclosing about the test | inspection apparatus for measuring the surface of a display panel. As shown in FIG. 18, the inspection apparatus 100 includes a light source device 105 disposed below a liquid crystal display panel 101 to be inspected, and a light diffusion plate disposed between the light source device 105 and the liquid crystal display panel 101. and 106, a concave mirror 103 which is disposed above the liquid crystal display panel 101, a CCD camera 102 disposed on the optical path of the reflected light _{L 2} from the concave mirror 103, in front of the CCD camera 102, the slits in the optical axis And a slit plate 104 disposed at the focal position of the concave mirror 103. In addition, the inspection apparatus 100 is provided with a signal processing circuit 111 and an arithmetic processing circuit 112 connected to the CCD camera 102. In such an inspection apparatus 100, the illumination light L ₁ emitted from the light source device 105 is transmitted through the liquid crystal display panel 101 in a state in which the illuminance is made uniform by the light diffusion plate 106, then reflected by the concave mirror 103 The optical path is bent by 90 ° and the optical path is taken in the horizontal direction. Of the reflected light L ₂ , only parallel rays pass through the slit at the center of the optical axis, and light other than the parallel rays is shielded by the slit plate 104. Accordingly, only parallel rays are guided to the CCD camera 102. According to such a configuration, as shown in FIG. 18, the virtual image of the liquid crystal display panel 101 is formed at a position opposite to the CCD camera 102 with the concave mirror 103 interposed therebetween, and this virtual image is reduced and captured by the CCD camera 102. Will be. The output from the CCD camera 102 is input to the signal processing circuit 111, where predetermined signal processing is performed and input to the arithmetic processing circuit 112. Since the data when the display quality of the liquid crystal display panel is good is input to the arithmetic processing circuit 112 in advance, the data is compared with the image data of the liquid crystal display panel 101 given from the signal processing circuit 111. Then, it is determined whether or not the liquid crystal display panel 101 has display quality defects such as unevenness, black spots, and white spots, and the quality of the display quality of the liquid crystal display panel 101 is determined.

  Moreover, as a method for inspecting the side surface of the liquid crystal display panel, Patent Document 2 discloses an accuracy inspection method for automatically inspecting the adhesion accuracy of the polarizing plate to the liquid crystal display panel. In this method, as shown in FIG. 19, the polarizing plate 203 is attached to the liquid crystal panel 201, and then the end of the side surface of the liquid crystal panel 201 and the vicinity thereof are photographed by the CCD cameras 228 and 229. Then, the distance from the end of the liquid crystal panel 201 to the end of the polarizing plate 203 in the photographed image is measured by image processing, and if the distance is within a specified range, the accuracy of attaching the polarizing plate to the liquid crystal display panel is good. That is, it is determined as a non-defective product.

  Patent Document 3 discloses an inspection apparatus for inspecting a disconnection defect or a short-circuit defect, in which an irradiation position of light from a light source is sequentially changed by moving a reflecting mirror to inspect the entire surface of a liquid crystal substrate. A continuous inspection apparatus is disclosed. The configuration of this inspection apparatus will be described below with reference to FIGS.

  20 and 21 are diagrams for explaining the configuration of the above-described inspection apparatus. In this inspection apparatus, as shown in FIG. 20, a light reflector 310b is provided on the bottom surface of a liquid crystal sheet 310a in which liquid crystal is sealed inside a transparent case, and a thin film transparent electrode 310c is formed on the top surface of the liquid crystal sheet 310a. The electro-optic element 310 is used. Specifically, in the above-described inspection apparatus, when a current is supplied between the liquid crystal substrate 301 and the electro-optic element 310 by the power supply 311, an electric field generated by each pixel electrode 305 depending on the presence or absence of the liquid crystal substrate 301 and the situation. Changes, and accordingly, the optical properties of the electro-optical element 310 change variously. Therefore, the reflected light of the light emitted from the light source 312 to the electro-optic element 310 is received by the light receiver 313, the state of the reflected light is observed by the monitor 314, and the image data is subjected to an image processing technique. By using and analyzing the change, it is possible to detect a change in the optical properties of the electro-optic element 310 and to inspect the presence or absence of a defect in the liquid crystal substrate 301 based on the change.

  As shown in FIG. 21, the inspection apparatus includes a pair of guide members 325 provided in parallel to the electro-optic element 310 on the back side of the electro-optic element 310, and the electro-optics. A first slider 326 that is movable along the guide member 325 while maintaining a parallel state with respect to the element 310, and a direction that is attached to the first slider 326 and orthogonal to the moving direction of the first slider 326. And a second slider 327 that is freely movable. A first reflecting mirror 330 is provided on the first slider 326, and a second reflecting mirror 331 is provided on the second slider 327. In addition, as shown in FIG. 21, the inspection apparatus detects the positions of the first and second reflecting mirrors 330 and 331 to detect the irradiation position of the light to the electro-optic element 310, and based on the detected positions. Even if the position inspection device 340 for detecting the distance from the light receiver 313 to the irradiation position and the first and second sliders 326 and 327 move to change the light irradiation position every time, the light receiver A focus adjustment device 321 for matching the focus of 313 is provided. The focus adjustment device 321 is configured to adjust the focus by driving the lens 320.

  The inspection apparatus having such a configuration moves the first and second sliders 326 and 327 in synchronization to move the first and second reflecting mirrors 330 and 331 along the back surface of the electro-optical element 310. Thus, the entire surface of the liquid crystal substrate 301 can be inspected continuously by sequentially changing the irradiation position of the light from the light source 312.

  However, each of the configurations of Patent Documents 1 to 3 inspects only one of the surface and the side surface of the liquid crystal display panel, and has a drawback that both the surface and the side surface cannot be inspected at one time. Furthermore, in the case of Patent Document 3, the entire surface of the liquid crystal substrate 301 can be inspected continuously, but the focus adjustment device 321 needs to be provided, and there is a problem that the inspection device is increased in size.

As a configuration capable of inspecting the appearance of the surface and side surfaces of the panel, there is an appearance inspection device disclosed in Patent Document 4. The appearance inspection apparatus 500 shown in FIG. 22 has a tray receiver 516, a processing stage 518, and an inspection stage 520. An optical system 580 is provided above the inspection stage 520 in order to direct light to the panel 512 placed on the inspection stage 520, and the light from the optical system 580 is directed to the side surface of the panel 512 and the panel 512. Two sets of reflectors 582 that reflect the light reflected by the side surfaces upward, and two sets of oblique light generators 584 that direct the light from the optical system 580 to the upper surface of the panel 512 and reflect the light reflected by the upper surface upward. And a television camera 586 disposed above the inspection stage 520 to receive light reflected from the upper surface of the panel 512 and light reflected from the side surface and photograph the upper surface and side surface of the panel 512. According to the appearance inspection apparatus 500, the surface and side surface of the panel can be inspected. Another example of such an appearance inspection apparatus is disclosed in Patent Document 5.
JP-A-6-202060 (published July 22, 1994) JP 2004-233184 A (published August 19, 2004) Patent No. 3273971 (registered on February 1, 2002) JP 2005-3488 A (published January 6, 2005) JP 2006-64387 A (published March 9, 2006)

  However, in the case of the visual inspection apparatus having the configuration disclosed in Patent Documents 4 and 5, the imaging distance from the upper surface of the panel 312 to the television camera 386 and the imaging distance from the side surface of the panel 312 to the television camera 386 are different from each other. Therefore, it is difficult to obtain a good image in focus on both the upper surface of the panel and the side surface of the panel.

  In order to realize this, two methods are conceivable. The first is to reduce the effective aperture of the lens and increase the depth of field so that both the top surface of the panel and the side surface of the panel are in focus and the sensitivity is high enough to accommodate the reduced effective aperture. The area sensor (camera) is used. The other is to focus on both the top and side surfaces of the panel by increasing the minimum circle of confusion that is in focus using an imaging device and lens with a large imaging surface. is there. However, each method requires a very expensive configuration such as a high-sensitivity area sensor or an imaging element and a lens having a large imaging surface, and is not a realistic solution.

  Therefore, the present invention has been made in view of the above problems, and the object thereof is good from both the surface (image display surface) and the side surface of the image display area of the FPD module without increasing the size of the apparatus. An inspection apparatus for an FPD module and an imaging apparatus for an inspection apparatus that can inspect the appearance by acquiring a simple image are provided.

  In order to solve the above-described problems, an inspection apparatus for an FPD module according to the present invention includes at least one of an image display surface on which wirings and electrodes are arranged and a side surface in contact with the image display surface of the FPD module. A light source that illuminates light on the side surface, and an image pickup unit that is fixed in position and that captures the image display surface and the side surface by receiving reflected light of the light reflected on the image display surface and the side surface. An inspection apparatus for an FPD module for inspecting the appearance of the FPD module, which is arranged at a predetermined interval from the side surface, and reflects the reflected light reflected by the side surface, whereby the progress of the reflected light Reflecting means whose direction is parallel to the traveling direction of the reflected light reflected by the image display surface, reflected light a reflected by the reflecting means, and reflected light b reflected by the image display surface A light guide means for guiding the image pickup means; and a drive means for moving the light guide means and the light source so that the reflected light a and the reflected light b are sequentially received by the image pickup means. In the means, the reflected light a and the reflected light b are made incident, the first reflected light a and the reflected light b are guided to the second light guide unit, and the reflection from the first light guide unit. A second light guide that guides the light a and the reflected light b to the imaging unit, and the light source, the first light guide, and the second light guide are provided on the image display surface. The drive means is configured to move on the same movement axis that is parallel and straight to the first light guide unit, the light source, and the second light guide unit at different speeds. The imaging means is configured to move from the moving second light guide unit. It is characterized in that it is configured to continuously receive wither light.

  During the manufacturing process of the FPD module, for example, the electrical connection may be defective, or there may be defects such as misalignment between constituent members or cracks in the constituent members. Therefore, in order to provide a good FPD module, it is necessary to detect the above-described defects at a certain stage during manufacture. Therefore, conventionally, the above-described apparatus having the conventional configuration has been used to inspect the appearance of such an FPD module and detect the defect. However, there has been a problem as described above. On the other hand, as described above, the inspection apparatus for an FPD module according to the present invention makes the light reflected by the image display surface and the side surfaces of the FPD module enter and emit toward the second light guide unit. The light guide means having the first light guide section and the second light guide section that makes the light emitted from the first light guide section enter and emit the light toward the image pickup means, and the light reflected by each surface is image pickup means. And the first light guide unit and the second light guide unit are configured to move along the image display surface on the moving axis at different speeds. . With this configuration, the optical path length until the reflected light from the side surface (or image display surface) reaches the imaging unit, and the optical path length until the reflected light from the image display surface (or side surface) reaches the imaging unit. Can be equal. For this reason, a very expensive configuration such as a focus adjustment mechanism, a high-sensitivity area sensor, and an imaging element and a lens having a large imaging surface is not required. That is, with the above configuration, the first light guide unit receives the reflected light sequentially from the side surface and the image display surface of the FPD module or from the image display surface and the side surface while moving. Can be obtained at a time without increasing the size of the FPD module.

  Specifically, the driving means moves the first light guide unit on the movement axis while moving the first light guide unit on the movement axis at a constant speed V in one direction. And the speed is variable. In other words, the first light guide is configured to move from one end of the shaft to the other end at a constant speed V along the moving shaft by the driving means. The second light guide unit moves in both directions along the movement axis by the driving means while the first light guide unit moves from one end of the shaft to the other end. In addition, the speed can be varied during movement. According to this configuration, the moving speed of the second light guide unit is controlled depending on whether the first light guide unit directly receives the reflected light from the side surface or the reflected light from the image display surface. Then, the relative position between the second light guide unit and the first light guide unit can be changed, and the optical path lengths of the reflected light from the image display surface and the side surface to the imaging unit can be adjusted to be equal.

  By changing the relative position of the first light guide unit and the second light guide unit in this way, the optical path length of the reflected light from the image display surface and the side surface to the image pickup unit can be made equal. It is not necessary to provide a focus adjustment mechanism.

  In addition, when configured as described above, the image pickup means can be fixed and disposed without moving the position, and can be realized using a conventionally known lens and light receiving unit. Therefore, a very expensive configuration such as a high-sensitivity area sensor or an imaging element and lens having a large imaging surface is not required.

  In addition, according to the FPD module inspection apparatus according to the present invention, it is necessary to secure an area twice as large as the FPD module in the apparatus, and the FPD module is moved to continuously capture the side surface and the image display surface. Compared with the configuration, it is not necessary to move the FPD module, and only the light guide means and the light source need be moved, so that the apparatus can be realized in a compact manner.

  In the case where the FPD module needs to be moved, the heavy FPD module must be accelerated and decelerated. For this reason, a stage having high strength and torque for mounting the FPD module must be used. On the other hand, in the case of the configuration of the present invention, since only the light guide means and the light source are moved, a stage with relatively small strength and torque can be used.

  That is, according to the configuration of the present invention, it is possible to provide an inspection apparatus for an FPD module that can obtain a good image from both the image display surface and the side surface of the FPD module without increasing the size of the apparatus.

  More specifically, the FPD module inspection apparatus according to the present invention is configured to image a flat panel display module in which the image display surface is a polygon having at least one pair of sides parallel to each other. If the direction from one side A to the other side D of the set of sides is the main scanning direction, the movement axis is parallel to the main scanning direction, and the reflecting means A side surface A having A and a side surface D having the side D are disposed at a predetermined distance from each other, and the second light guide unit is arranged from the first light guide unit to the second side. The optical axis of the reflected light a and the reflected light b guided to the light guide unit is arranged downstream of the first light guide unit in the main scanning direction so as to be parallel to the main scanning direction, The above guided to the imaging means from the second light guide The incident light a and the reflected light b have an optical axis parallel to the optical axis, and are the traveling directions of the reflected light a and the reflected light b guided from the first light guide to the second light guide. It is configured to travel in the reverse direction.

  In the FPD module inspection apparatus according to the present invention, the side surface A has a side A ′ facing the side A, and the side surface D has a side D ′ facing the side D. The first light guide portion sequentially enters the reflected light a from the side A to the side A ′ on the side surface A, and then toward the side D from the side A on the image display surface. The reflected light b is sequentially incident, and then the reflected light a is sequentially incident from the side D ′ on the side surface D toward the side D, and the driving means includes (i) While the reflected light a and the reflected light b are incident on the first light guide, the second light guide is moved from upstream to downstream in the main scanning direction at a speed V / 2, and (ii) the first Immediately after the reflected light a from the side A ′ is incident on one light guide, the image is displayed on the first light guide. The second light guide is moved from upstream to downstream in the main scanning direction at a first predetermined speed that is higher than V / 2 until immediately before the reflected light b from the side A enters. (Iii) Immediately after the reflected light b from the side D on the image display surface is incident on the first light guide unit to immediately before the reflected light from the side D ′ is incident on the first light guide unit. During the period, the second light guide unit is configured to move from the downstream in the main scanning direction to the upstream at the second predetermined speed.

  Thereby, the optical path lengths of the reflected light from the image display surface and the side surface to the image pickup means can be made equal.

  Further, in the inspection apparatus for an FPD module according to the present invention, the polygon is a quadrangle, the side surface C provided on one side C of one set of sides different from the one set of sides, and the other The reflected light c, which is arranged at a predetermined interval from each of the side surfaces B provided on the side B and reflected by the side surfaces C and B, is reflected, whereby the traveling direction of the reflected light c is displayed in the image display. A second reflecting means different from the reflecting means, which is parallel to the traveling direction of the reflected light reflected by the surface, wherein the first light guide part reflects the reflected light a and the reflected light b. 1 light guide part, and the 1st light guide part for the side surface which is arrange | positioned at predetermined intervals downstream from the said 1st light guide part for both sides at predetermined intervals, and reflects the said reflected light c is comprised. Preferably it is.

  With the above configuration, it is possible to provide an inspection apparatus for an FPD module that can image four side surfaces provided on an image display surface having a quadrangle shape with a single scan of the light guide means and the light source.

  In the inspection apparatus for an FPD module according to the present invention, the second reflecting means is configured so that a part of the reflected light c reflected by the side surface C and the side surface B can be incident, and the driving is performed. The means is configured to move the second reflecting means together with the first light guide from the upstream end in the main scanning direction to the downstream end of the side C and side B. Is preferred.

  If it is set as said structure, compared with the area of the side C and the side B being larger than the reflective surface of a 2nd reflection means, a 2nd reflection means can be reduced in size.

  Further, in order to solve the above-described problems, the inspection apparatus for an FPD module according to the present invention includes an image display surface having a quadrangle in which wirings and electrodes are arranged, and four in contact with the image display surface. A light source that irradiates light to at least one of the side surfaces and a position are fixed, and the image display surface and the side surface are received by receiving reflected light reflected by the light on the image display surface and the side surface. An imaging unit that captures an image; and a reflector that is provided on an optical path of the reflected light between the image display surface and the side surface and the imaging unit and reflects incident light in a direction different from the incident direction. An inspection apparatus for an FPD module for inspecting the appearance of the module, wherein one of the two opposing sides of the image display surface is directed from one side A to the other side D. Is the fourth scanning unit for reflecting the reflected light of the light from the light source reflected by the side surface A having the side A and the side surface D having the side D, respectively. A first reflection unit configured to reflect the reflected light reflected by the fourth reflection unit and the reflected light reflected by the light emitted from the light source on the image display surface in the main scanning direction along the image display surface; and the first A second reflecting unit that reflects the reflected light reflected by the reflecting unit and generates reflected light having an optical axis parallel to the optical axis of the reflected light and traveling in a direction opposite to the traveling direction of the reflected light. The light source, the first reflection unit, and the second reflection unit are disposed in the vicinity of the image display surface, and the light source and the first reflection unit are arranged along the image display surface. While moving at a velocity V from upstream to downstream in the scanning direction, and during the movement of the first reflecting portion, The second reflecting unit includes a driving unit that moves the second reflecting unit from the upstream side to the downstream side in the main scanning direction and from the downstream side to the upstream side at a speed different from the speed V along the image display surface. It is characterized in that it is configured to continuously receive the reflected light generated by the second reflecting section moving in the scanning direction.

  During the manufacturing process of the FPD module, for example, the electrical connection may be defective, or there may be defects such as misalignment between constituent members or cracks in the constituent members. Therefore, in order to provide a good FPD module, it is necessary to detect the above-described defects at a certain stage during manufacture. Therefore, conventionally, the above-described apparatus having the conventional configuration has been used to inspect the appearance of such an FPD module and detect the defect. However, there has been a problem as described above. On the other hand, as described above, the FPD module inspection apparatus according to the present invention directly enters the light reflected from the image display surface and the side surfaces and emits the light toward the second light guide unit. Light until the light reflected by each surface reaches the image pickup means by the light guide means having the light guide portion and the second light guide portion for emitting the light emitted from the first light guide portion toward the image pickup means. The first light guide unit and the second light guide unit are provided on the road, and are configured to move along the image display surface at different speeds. By configuring in this way, the optical path length until the reflected light from the side surface reaches the imaging means can be made equal to the optical path length until the reflected light from the image display surface reaches the imaging means. For this reason, a very expensive configuration such as a focus adjustment mechanism, a high-sensitivity area sensor, and an imaging element and a lens having a large imaging surface is not required. That is, if it is set as said structure, a 1st light guide part will receive reflected light continuously from a side surface following an image display surface or an image display surface, without enlarging an apparatus. A good image of both the image display surface and the side surface of the FPD module can be obtained at a time.

  Specifically, by configuring in this way, the second light guide unit 2 determines whether the first light guide unit directly receives the reflected light from the side surface or the reflected light from the image display surface. By controlling the moving speed of the light part, the relative position between the second light guide part and the first light guide part is changed so that the optical path lengths of the reflected light from the image display surface and the side surface to the image pickup means become equal. Can be adjusted.

  By changing the relative position of the first light guide unit and the second light guide unit in this way, the optical path length of the reflected light from the image display surface and the side surface to the image pickup unit can be made equal. It is not necessary to provide a focus adjustment mechanism.

  In addition, if configured as described above, the image pickup means can be fixedly arranged without moving its position, and can be realized using a conventionally known lens and light receiving section. Therefore, a very expensive configuration such as a high-sensitivity area sensor or an imaging element and lens having a large imaging surface is not required.

  Further, as described above, the FPD module inspection apparatus according to the present invention is configured to move only the light guide means and the light source, and does not move the FPD module. Here, in the case where the FPD module is moved and the side surface and the image display surface are continuously captured, it is necessary to secure an area twice as large as that of the FPD module in the apparatus. However, in the case of the configuration of the present invention, it is sufficient that the area of the FPD module is ensured. Therefore, the apparatus can be realized in a compact manner.

  Further, in the case of a configuration in which the FPD module is moved, a heavy FPD module must be accelerated and decelerated, and therefore a stage having high strength and torque for detecting the FPD module must be used. On the other hand, in the case of the configuration of the present invention, since only the light guide means and the light source are moved, a stage with relatively small strength and torque can be used.

  That is, according to said structure, the inspection apparatus for FPD modules which concerns on this invention can obtain a favorable image from both the image display surface and side surface of an FPD module, without enlarging an apparatus.

  Moreover, in order to solve the above-described problem, the imaging apparatus for an inspection apparatus according to the present invention illuminates light on the main surface of the object to be inspected and at least one of the side surfaces in contact with the main surface. And an external appearance of the object to be inspected, which is fixed in position and has imaging means for imaging the main surface and the side surface by receiving the reflected light of the light reflected by the main surface and the side surface. An imaging device for an inspection device for inspecting a light source, wherein the traveling direction of the reflected light is reflected on the main surface by reflecting the reflected light that is arranged at a predetermined interval from the side surface and reflected by the side surface. Reflecting means that is parallel to the traveling direction of the reflected light reflected, a light guiding means that reflects the reflected light a reflected by the reflecting means, and a reflected light b that is reflected by the main surface to the imaging means, and the imaging means Reflected light a and reflected light b are sequentially received. In addition, the light guide means and the drive means for moving the light source are provided, and the reflected light a and the reflected light b are incident on the light guide means, and the reflected light a and the reflected light b that are incident on the light guide means A first light guide part that leads to two light guide parts, and a second light guide part that guides the reflected light a and the reflected light b guided from the first light guide part to the imaging means, The light source, the first light guide unit, and the second light guide unit are configured to be movable on the same movement axis that is parallel to the main surface and linear. Is configured to move the first light guide unit, the light source, and the second light guide unit on the moving shaft at different speeds, and the imaging unit is configured to move the second light guide unit while moving. The light guide unit is configured to continuously receive light guided from the light guide unit.

  According to said structure, since a 1st light guide part and a 2nd light guide part can be moved on the same movement axis | shaft at a mutually different speed | rate, relative of a 1st light guide part and a 2nd light guide The position can be changed. Therefore, it is possible to adjust the optical path lengths of the reflected light from the main surface and the side surface to reach the imaging unit to be equal.

  Thus, since the optical path length of the reflected light from the main surface and the side surface to the imaging means can be made equal, the first light guide unit is continuous from the side surface following the main surface, or from the side surface following the main surface. By receiving the reflected light, it is possible to obtain a good image of both the main surface and the side surface of the object to be inspected at once without increasing the size of the apparatus. It is not necessary to have.

  In addition, if configured as described above, the image pickup means can be fixedly arranged without moving its position, and can be realized using a conventionally known lens and light receiving section. Therefore, a very expensive configuration such as a high-sensitivity area sensor or an imaging element and lens having a large imaging surface is not required.

  Further, as described above, according to the imaging apparatus for an inspection apparatus according to the present invention, only the light guide means and the light source are moved, and the object to be inspected is not moved. Here, in the configuration in which the object to be inspected is moved and the side surface and the main surface are continuously imaged, it is necessary to secure twice the area of the object to be inspected in the apparatus. However, in the case of the configuration of the present invention, it is only necessary to ensure the area of the object to be inspected. Therefore, the apparatus can be realized in a compact manner.

  Further, in the case of a configuration in which the inspection object is moved, when the inspection object is heavy, the inspection object must be accelerated / decelerated. And a stage with large torque must be used. On the other hand, in the case of the configuration of the present invention, since only the light guide means and the light source are moved, a stage with relatively small strength and torque can be used.

  That is, according to said structure, the imaging device for inspection apparatuses which concerns on this invention can obtain a favorable image from both the main surface and side surface of a to-be-inspected object, without enlarging an apparatus.

  As described above, the inspection apparatus for an FPD module according to the present invention applies light to the image display surface of the FPD module on which wirings and electrodes are disposed, and at least one of the side surfaces in contact with the image display surface. The FPD module comprising: a light source that illuminates a light source; and an imaging unit that is fixed in position and that captures the image display surface and the side surface by receiving reflected light of the light reflected by the image display surface and the side surface An inspection apparatus for an FPD module for inspecting the appearance of the image, wherein the reflected light that is arranged at a predetermined interval from the side surface and reflected by the side surface is reflected to thereby determine the traveling direction of the reflected light. Reflecting means for making the reflected light reflected by the display surface parallel to the traveling direction, reflected light a reflected by the reflecting means, and reflected light b reflected by the image display surface are guided to the imaging means. The light guide means and the drive means for moving the light source are provided so that the reflected light a and the reflected light b are sequentially received by the imaging means. A first light guide part that causes the light a and the reflected light b to enter and guide the incident reflected light a and the reflected light b to the second light guide part, and the reflected light a and the reflected light from the first light guide part a second light guide that guides b to the imaging means, and the light source, the first light guide, and the second light guide are parallel to the image display surface, And the drive means is configured to move the first light guide unit, the light source, and the second light guide unit on the movement axis at different speeds. The imaging unit continuously transmits the light guided from the moving second light guide unit. It is characterized by being configured to receive the. In addition, as described above, the FPD module inspection apparatus according to the present invention includes an image display surface having a quadrangle in which wirings and electrodes are disposed, and four of the four side surfaces in contact with the image display surface. A light source that irradiates light to at least one side surface, and an imaging unit that is fixed in position and that captures the image display surface and the side surface by receiving reflected light reflected by the light on the image display surface and the side surface And a reflector provided on the optical path of the reflected light between the image display surface and the side surface to the imaging means, and reflecting the incident light in a direction different from the incident direction. FPD module inspection apparatus for inspecting the appearance of the image display surface, wherein a direction from one side A of one set toward the other side D is set as a main scanning direction among the two opposing sides of the image display surface. Then, the reflector includes a fourth reflecting portion that reflects light reflected from the light source reflected by the side surface A having the side A and the side surface D having the side D, and the fourth reflecting portion. Reflected reflected light and reflected light reflected by the light emitted from the light source on the image display surface in the main scanning direction along the image display surface, and reflected reflected by the first reflective portion A second reflecting unit that reflects the light and has a light axis parallel to the light axis of the reflected light and that generates reflected light that travels in a direction opposite to the traveling direction of the reflected light; The light source, the first reflection unit, and the second reflection unit are disposed in the vicinity of the image display surface, and the light source and the first reflection unit are moved along the image display surface from upstream to downstream in the main scanning direction. V is moved by V, and the second reflecting portion is moved in the image while the first reflecting portion is moving. Drive means for moving along the display surface from upstream to downstream in the main scanning direction and from downstream to upstream at a speed different from the speed V is provided, and the imaging means is the second moving in the main scanning direction. In other words, it is characterized by being configured to continuously receive the reflected light generated by the reflecting section.

  If it is set as the above structure, the inspection apparatus for FPD modules which can obtain a favorable image from both the image display surface and side surface of an FPD module can be provided, without enlarging an apparatus.

  Further, as described above, the imaging apparatus for an inspection apparatus according to the present invention has a light source that illuminates light on at least one of the main surface of the object to be inspected and the side surface in contact with the main surface, and position fixing. In order to inspect the appearance of the object to be inspected, comprising imaging means for imaging the main surface and the side surface by receiving reflected light of the light reflected by the main surface and the side surface. Reflecting light that is arranged at a predetermined interval from the side surface and reflects the reflected light reflected on the side surface, and reflects the traveling direction of the reflected light on the main surface. A reflecting means that is parallel to the traveling direction of the light, a reflected light a reflected by the reflecting means, and a light guiding means that guides the reflected light b reflected by the main surface to the imaging means, and a reflected light a on the imaging means. The light guide so that the reflected light b is sequentially received. And a driving means for moving the light source. The reflected light a and the reflected light b are made incident on the light guide means, and the reflected light a and the reflected light b incident on the second light guide unit. A first light guide part that guides the reflected light a and the reflected light b guided from the first light guide part to the imaging means, the light source, and the first light guide part. 1 light guide part and the 2nd light guide part are constituted so that it can move on the same movement axis which is parallel to the main surface, and is straight, and the drive means is the 1st above-mentioned The light guide unit, the light source, and the second light guide unit are configured to move on the moving axis at different speeds, and the imaging unit is guided from the moving second light guide unit. It is characterized by being configured to continuously receive the emitted light.

  If it is set as the above structure, the imaging device for inspection apparatuses which can obtain a favorable image from both the main surface and side surface of a to-be-inspected object can be provided, without enlarging an apparatus.

[Embodiment 1]
An embodiment of an inspection apparatus for an FPD module (imaging apparatus for an inspection apparatus) according to the present invention will be described with reference to FIGS. In the following description, various technically preferable limitations for carrying out the present invention are given, but the scope of the present invention is not limited to the following embodiments and drawings.

  FIG. 1 is a perspective view showing a configuration of a liquid crystal display panel inspection apparatus according to the present embodiment. The liquid crystal display panel inspection apparatus 10a of the present embodiment can image the appearance of the liquid crystal display panel in order to inspect the presence or absence of so-called display quality defects such as unevenness, black spots, and white spots in the liquid crystal display panel. It is configured. Therefore, as shown in FIG. 1, the liquid crystal display panel inspection apparatus 10a includes an illumination device 1 (light source), a line sensor 2 and a lens 3 (imaging unit), and a first group mirror unit 4 (light guide unit, first unit). 1 light guide portion), second group mirror portions 5a and 5b (light guide means, second light guide portion), third group mirror portions 6a and 6b (second reflection means), and fourth group mirror portion 7a. 7b (reflecting means) and driving means (not shown) are provided.

  The liquid crystal display panel inspection apparatus 10a of the present embodiment is configured so that the liquid crystal display panel 20 (FPD module), which is an inspection target (imaging target), can be mounted on a mounting table (not shown). The panel 20 is placed such that an upper surface (image display surface, main surface) 20a on which wirings and electrodes (not shown) are arranged is a surface opposite to the surface facing the mounting surface of the mounting table. .

  Here, the inspection apparatus 10a for a liquid crystal display panel in the present embodiment is configured for the liquid crystal display panel 20 having a square image display surface. Therefore, in the following description, the positional relationship of each constituent member constituting the liquid crystal display panel inspection apparatus 10a is described with respect to the four sides (sides A to D) of the square upper surface 20a placed on the mounting table and the sides. The description will be made with reference to the four side surfaces (side surfaces A to D). Note that the side A and the side D are a set of sides parallel to each other, and the side B and the side D are a set of sides parallel to each other. The direction from the side A toward the side D and parallel to the upper surface 20a is defined as the “main scanning direction” of the liquid crystal display panel inspection apparatus 10a. Further, the direction from the side C to the side B and parallel to the upper surface 20a is defined as the “sub-scanning direction” of the liquid crystal display panel inspection apparatus 10a. Each direction is also shown in FIG.

  In the present embodiment, the mounting table is configured such that the liquid crystal display panel 20 can be placed so that the upper surface 20a is horizontal. And the line sensor 2, the lens 3, the illuminating device 1, the 1st group mirror part 4, and the 2nd group mirror part 5a * 5b are arrange | positioned above the upper surface 20a. Further, as shown in FIG. 1, the fourth group mirror unit 7 a is disposed at a position spaced apart from the side surface A of the liquid crystal display panel 20, and the fourth group mirror unit 7 b is arranged from the side surface D. It is arranged at a position with a predetermined interval. The third group mirror 6a is disposed at a position spaced from the side surface B, and the third group mirror 6b is disposed at a position spaced from the side C. Yes.

  FIG. 2 is a perspective view of the liquid crystal display panel inspection apparatus 10a according to the present embodiment, and shows a state at a time different from that of FIG. FIG. 3 is also a perspective view of the liquid crystal display panel inspection apparatus 10a of the present embodiment, and shows a state at a time different from those in FIGS. As shown in FIGS. 1 to 3, the liquid crystal display panel inspection device 10 a according to the present embodiment includes an illumination device 1, a first group mirror unit 4, and second group mirror units 5 a and 5 b located above the upper surface 20 a. Can be moved from the state shown in FIG. 1 to the state shown in FIG. 2 by a driving means (not shown), and further moved from the state shown in FIG. 2 to the state shown in FIG. It is configured. Details will be described later.

  Below, each above-mentioned structural member is explained in full detail.

  The position of the line sensor 2 and the lens 3 is fixed by a fixing means (not shown), and the position does not move while receiving the reflected light reflected by the second group mirrors 5a and 5b. . The line sensor 2 is reflected by the first group mirror unit 4 and the second group mirror units 5a and 5b after being reflected by the upper surface 20a and the side surfaces A, B, C, and D, and is finally collected by the lens 3 It is configured to receive reflected light, and is configured to be able to generate image signals for each surface based on the received light.

  The illuminating device 1 is integrated with the first group mirror unit 4, and as shown in FIGS. 1 to 3, from the upstream to the downstream in the main scanning direction, that is, from the position of the fourth group mirror unit 7a to the fourth group. It is configured to be able to move to the position of the mirror unit 7b. The illuminating device 1 can use a conventionally well-known thing, and can move as mentioned above along the guide rail which is not shown in figure by the said drive means which is not shown in figure. The illuminating device 1 moving as described above can sequentially irradiate the side surface A, then the upper surface 20a and the side surfaces B and C, and then the side surface D with light.

  The lighting device 1 is provided with an opening (not shown) for emitting light, and this opening has an elongated shape along the side A of the upper surface 20a. Specifically, the illuminating device 1 includes three illuminating units 1a to 1c arranged along the side A, and the three illuminating units 1a to 1c are integrally moved as described above. To do.

  The illumination unit 1b located at the center of the three illumination units can sequentially irradiate light toward the side surface A, the upper surface 20a, and the side surface D by moving as described above. Moreover, the illumination part 1a in the one end side of the illumination part 1b can irradiate light toward the side surface B, and the illumination part 1c in the other end side of the illumination part 1b irradiates light toward the side surface C. can do. In this embodiment, a plurality of illumination units are provided as described above, and the angle and intensity (brightness) of the emitted light emitted from each illumination unit are changed according to the irradiation target surface and the distance from the emission port to each surface. Yes. Thereby, the reflected light of uniform intensity can be obtained from any surface.

  The illumination units 1a to 1c can independently adjust the intensity of the emitted light. For example, the illumination unit 1b can vary the intensity of the emitted light depending on whether the side surface A and the side surface D are irradiated or the upper surface 20a. Specifically, when irradiating the side surface A and the side surface D, the light intensity can be made higher than when irradiating the upper surface 20a.

  Further, while the illumination unit 1b irradiates the side surface A or the side surface D, the illumination units 1a and 1c can be turned off. Thus, by turning off the illumination units 1a and 1c only when not necessary, the power consumption of the liquid crystal display panel inspection device 10a can be suppressed.

  By the way, the 1st group mirror part 4 comprised so that the reflected light reflected on the upper surface 20a and the reflected light reflected on each side surface can enter while moving with the illuminating device 1 is above the upper surface 20a. Therefore, as shown in FIG. 2, when the illumination unit 1b located in the center is at a position where the upper surface 20a can be irradiated with light, and the emitted light emitted from the illumination unit 1b is reflected by the upper surface 20a, the reflected light ( The reflected light C) in FIG. 2 has an optical axis substantially perpendicular to the upper surface 20a, and therefore can be incident on the first group mirror unit 4 above the upper surface 20a as it is. On the other hand, when the illumination unit 1b is in a position where light can be irradiated onto the side surface A as shown in FIG. 1, the reflected light A reflected by the side surface A has an optical axis perpendicular or substantially perpendicular to the side surface A. is doing. Similarly, when the illumination unit 1b is in a position where light can be emitted to the side surface D as shown in FIG. 3, the reflected light A reflected by the side surface D also has an optical axis perpendicular or substantially perpendicular to the side surface D. Have. Therefore, in order to cause the reflected light A reflected by the side surface A and the side surface D to enter the first group mirror unit 4 above the upper surface 20a, the liquid crystal display panel inspection device 10a includes the fourth group mirror unit 7a. 7b.

  The fourth group mirror portion 7 a is disposed at a position spaced apart from the side surface A and has an elongated shape along the side A. The fourth group mirror portion 7 b is disposed at a position spaced from the side surface D by a predetermined distance, and has a long and narrow shape along the side D. Specific arrangement positions of the fourth group mirror unit 7a and the fourth group mirror unit 7b will be described later. The reflected light A reflected by the side surface A incident on the fourth group mirror part 7a is reflected and becomes reflected light B having an optical axis parallel to the optical axis of the reflected light C and enters the first group mirror part 4. To do. The reflected light A reflected by the side surface D incident on the fourth group mirror portion 7b is also reflected and becomes reflected light B having an optical axis parallel to the optical axis of the reflected light C, so that the first group mirror portion 4 is reflected. Is incident on. Here, “parallel” means that the first group mirror part 4 above the upper surface 20a is the same as the reflected light C, except that it is completely parallel to the optical axis of the reflected light C. The optical axis of light that can be made incident on the optical axis is also shown.

  Moreover, when the illumination part 1b exists in the position which can irradiate light with respect to the upper surface 20a, as shown in FIG. 2, the illumination part 1a exists in the position which can irradiate light with respect to the side surface B, and the illumination part 1c is a side surface. C is at a position where light can be irradiated. At this time, the reflected light S reflected by the side surfaces B and C has an optical axis substantially perpendicular to the side surfaces B and C. Therefore, similarly to the fourth group mirror portions 7a and 7b, the optical axis of the reflected light C having an optical axis substantially perpendicular to the side surfaces B and C and an optical axis substantially perpendicular to the upper surface 20a. In order to be parallel, the liquid crystal display panel inspection device 10a includes the third group mirror portions 6a and 6b. Here, “parallel” means that the first group mirror part 4 above the upper surface 20a is the same as the reflected light C, except that it is completely parallel to the optical axis of the reflected light C. The optical axis of light that can be made incident on the optical axis is also shown.

  As shown in FIG. 2, the third group mirror section 6 a is disposed at a predetermined distance from the side surface B, and is an elongated reflecting surface slightly longer than the side B along the side B. have. The third group mirror section 6b is disposed at a predetermined distance from the side surface C, and has a slender reflecting surface that is slightly longer than the side B along the side C. . The reflected light S incident on the third group mirrors 6a and 6b is reflected and becomes reflected light T having an optical axis parallel to the optical axis of the reflected light C, and is incident on the first group mirror unit 4 together with the reflected light C. To do.

  Specifically, as the third group mirror portions 6a and 6b and the fourth group mirror portions 7a and 7b that perform the functions as described above, the surfaces facing the side surfaces of the liquid crystal display panel as shown in FIGS. A mirror body having a reflecting surface can be used. The reflecting surface is inclined by about 45 ° with respect to the side surface, with the side of the reflecting surface that is close to the mounting surface as the center.

  Here, the arrangement positions of the third group mirror units 6a and 6b and the fourth group mirror units 7a and 7b will be described in detail.

  FIG. 5 shows the relative positions of the third group mirrors 6a and 6b with respect to the liquid crystal display panel 20. The liquid crystal display panel inspection apparatus 10a shown in FIG. 1 is moved from downstream to upstream in the main scanning direction. It shows the state seen towards. For convenience of explanation, only the relative positions of the third group mirrors 6a and 6b and the liquid crystal display panel 20 are shown in FIG.

  As shown in FIG. 5, in the third group mirror portions 6a and 6b, the end j of the reflective surface closest to the side surface is expressed by the formula (1) from the end k close to the placement surface on the side surface. The distance u is separated along the sub-scanning direction, and the distance v shown by the equation (2) is subtracted from the mounting surface of the mounting table from the side edge k.

  At this time, tan θ satisfies the following formula (3).

  Here, w, d, and t in the equation (3) will be described with reference to FIGS. FIG. 6B is an enlarged view of a part of the configuration shown in FIG. 6, w indicates the half width of the upper surface 20a of the liquid crystal display panel 20, d indicates the optical path length from the surface of the liquid crystal display panel 20 to the lens 3, that is, the imaging distance, and h indicates The height of the liquid crystal display panel 20 (that is, the length on the short side of the side surface) is shown. From FIG. 6 (b), t is represented by u + v and has a relationship of (h + v): u = u: v = (h + v + u) :( v + u) = d: (w + u + v) for four triangles having an angle θ. (H + v + u) :( v + u) = d: Substituting u + v = t into (w + u + v) to derive (h + t): t = d: (w + t), from which FIG. t in b) is the distance of the gap represented by the following formula (4).

  By disposing the third group mirror portions 6a and 6b in this way, the upper surface 20a and the side surfaces B and D of the liquid crystal display panel can be imaged without gaps (see FIG. 15). The length of the element can be minimized.

  That is, as shown in FIG. 6, the line sensor 2 and the lens 3 include the half width w of the upper surface 20a of the liquid crystal display panel 20, the height of the liquid crystal display panel 20 (that is, the length on the short side side) h, The lens 3 and the line sensor 2 need only be configured so as to be able to image a width twice as large as the width including the gap t shown in Expression (4). Both can be conventionally known ones.

  Further, specific arrangement positions of the fourth group mirror unit 7a and the fourth group mirror unit 7b will be described with reference to FIG. FIG. 7 is a side view showing the arrangement positions of the fourth group mirror unit 7a and the fourth group mirror unit 7b. The fourth group mirror unit 7a and the fourth group mirror unit 7b are moved from the downstream in the sub-scanning direction. It is a side view of the state seen toward the upstream. 7 shows only the relative positions of the fourth group mirror unit 7a and the fourth group mirror unit 7b and the liquid crystal display panel 20, and therefore other components are omitted.

  As the fourth group mirror unit 7a and the fourth group mirror unit 7b, a mirror body in which the surface facing the side surface of the liquid crystal display panel as shown in FIGS. The reflecting surface is inclined by about 45 ° with respect to the side surface, with the side of the reflecting surface that is close to the mounting surface as the center. As shown in FIG. 7, the end closest to the side surface A in the fourth group mirror portion 7 a is separated from the side surface A by a distance p. The end portion of the fourth group mirror portion 7b closest to the side surface D is separated from the side surface D by a distance q. The distance p and the distance q have different distances, and the distance p has a distance longer than t + h. T and h are as described above.

  As shown in FIG. 1, the reflected light B reflected by the third group mirror parts 6a and 6b and the fourth group mirror parts 7a and 7b and the first group mirror part 4 on which the reflected light C is incident are The three mirrors 4a to 4c are arranged along A, and the three mirrors 4a to 4c are integrally moved as described above. The mirror 4b (both first light guides) located at the center of the three mirrors 4a to 4c is an elongated reflector that is the same as the length of the side A or longer than the length of the side A. Thus, the reflected light B reflected by the side surface A and the fourth group mirror portion 7a (FIG. 1), the reflected light C reflected by the upper surface 20a (FIG. 2), the side surface D and the fourth group mirror portion 7b. The reflected light B (FIG. 3) reflected by and can be sequentially incident. Further, the mirror 4a (first light guide for side surface) on one end side of the mirror 4b can make the reflected light T (FIG. 2) reflected by the side surface B and the third group mirror unit 6a enter. Moreover, the mirror 4c (first light guide for side surface) on the other end side of the mirror 4b can make the reflected light T (FIG. 2) reflected by the side surface C and the third group mirror unit 6b enter. And the 1st group mirror part 4 is comprised so that the reflected light D which advances the main scanning direction toward the downstream may be produced | generated by reflecting these.

  The 1st group mirror part 4 also becomes a structure which moves along the guide rail which is not shown in figure by the said drive means not shown similarly to the illuminating device 1. FIG. In addition, when the 1st group mirror part 4 and the illuminating device 1 are mutually fixed by the connection member which is not shown in figure, for example, a drive means is arrange | positioned at the illuminating device 1 and the illuminating device 1 moves by a drive means. Accordingly, the first group mirror unit 4 may be configured to move. Moreover, the reverse may be sufficient. The function of the driving means will be described in detail later.

  FIG. 4 shows a state in which the first group mirror unit 4 is viewed from the downstream to the upstream in the main scanning direction. For convenience of explanation, only the relative positions of the mirror 4a and mirror 4c of the first group mirror unit 4 and the liquid crystal display panel 20 are shown in FIG.

  As shown in FIG. 4, the mirror 4a is disposed at a position closer to the mirror 4b side than a position directly above the third group mirror section 6a, and the mirror 4c is also disposed on the third group mirror section 6b. It is disposed at a position closer to the mirror 4b side than the position directly above.

  Further, the reflection surfaces of the mirrors 4a and 4c are at positions shifted to the downstream in the main scanning direction as compared with the reflection surface of the mirror 4b (see FIG. 8). The amount of deviation is a distance (imaging distance) until the reflected light reflected by the upper surface 20a reaches the line sensor 2, and a distance (imaging distance) until the reflected light reflected by the side surfaces B and C reaches the line sensor 2. Is the amount that satisfies the matching condition. Specifically, as shown in FIG. 8, the distance between the mirror 4a (mirror 4c) and the mirror 4b (between e-e 'in FIG. 8) satisfies t + h. T and h are as described above.

  The reflected light D generated by being reflected by each mirror of the first group mirror unit 4 is then incident on the second group mirror units 5a and 5b.

  As shown in FIGS. 1 to 3, the second group mirror units 5 a and 5 b are disposed downstream of the first group mirror unit 4 and the illumination device 1 in the main scanning direction. On the same movement axis as the apparatus 1, the main scanning direction can be moved from upstream to downstream and from downstream to upstream. This movement is performed along a guide rail (not shown) by the driving means (not shown), similarly to the first group mirror unit 4 and the illumination device 1.

  The second group mirror units 5a and 5b enter the reflected light D generated by the first group mirror unit 4 that is also moving while being moved, and reflect the reflected light D, thereby changing the main scanning direction from downstream to upstream. The reflected light E (FIGS. 1 to 3) traveling toward the direction can be generated.

  Specifically, the second group mirror portions 5a and 5b have an elongated shape along the side A as shown in FIGS. The second group mirror unit 5a receives the reflected light D and reflects the reflected light D, thereby generating reflected light D ′ that travels in a direction perpendicular to the upper surface 20a and above the upper surface 20a. it can. The second group mirror unit 5b is disposed above the second group mirror unit 5a, that is, at a position perpendicular to the upper surface 20a and further away from the upper surface 20a so that the reflected light D ′ can enter. Has been. Then, the second group mirror unit 5b generates the reflected light F that travels in the main scanning direction from the downstream side to the upstream side by making the incident reflected light D 'incident and reflecting the incident reflected light D'.

  In the present embodiment, two separate reflecting members, the second group mirror unit 5a and the second group mirror unit 5b, are provided. However, the present invention is not limited to this, and may be configured by a single member having a surface having the same function as the second group mirror unit 5a and the second group mirror unit 5b. If it consists of one member, the mutual positioning is unnecessary, and there is no possibility of positional deviation. In the present embodiment, two reflecting members are used until the reflected light F is generated from the reflected light D. However, if the relative positions of the reflecting members do not change, the number is limited to two. Instead, three or more reflecting members may be used.

  The driving means can move the first group mirror unit 4 and the illuminating device 1 from the upstream to the downstream in the main scanning direction at a constant speed, and the second group mirror parts 5a and 5b while changing the moving speed. It can be moved from upstream to downstream in the main scanning direction and from downstream to upstream, and the relative position between the first group mirror unit 4 and the second group mirror units 5a and 5b, that is, the first group mirror unit 4 and the second group mirror unit 2 The distance between the group mirror portions 5a and 5b can be adjusted. In the adjustment, the relative positions of the first group mirror unit 4 and the second group mirror units 5a and 5b during imaging are set in advance in the driving unit, and the driving unit sets the first group mirror according to the setting. What is necessary is just to set it as the structure moved with the part 4 and 2nd group mirror part 5a * 5b. In addition, for example, the position of the first group mirror unit 4 that moves at a constant speed is detected by the drive means, and the drive means moves the movement speed and direction of the second group mirror parts 5a and 5b according to this position. The structure which adjusts may be sufficient.

  In the present embodiment, the first group mirror unit 4 (and the illumination device 1) and the second group mirror units 5a and 5b are driven by one driving means, but the present invention is limited to this. Instead, the first group mirror unit 4 and the second group mirror units 5a and 5b may be driven by different driving means.

  The reflected light F reflected from the second group mirror unit 5 b is collected by the lens 3 described above and received by the line sensor 2.

  The line sensor 2 can be configured using a conventionally known sensor as described above as long as it can receive the light collected by the lens 3 and generate an electrical signal. In addition, for example, a display device that can display an image of each surface formed based on the electrical signal may be connected to the line sensor 2.

  In addition, data for determining whether or not the display quality of the liquid crystal display panel is defective is set in advance in the line sensor 2 or another device provided in the line sensor 2, and an inspection is performed based on the electric signal. It is also possible to determine whether or not there is a display quality defect of the liquid crystal display panel.

  Below, the imaging method using the test | inspection apparatus 10a for liquid crystal display panels provided with said structure is demonstrated.

  8 to 13 show the first group mirror unit 4 and the second group mirror unit 5a, while the upper surface and the four side surfaces A to D of the liquid crystal display panel 20 are imaged by using the liquid crystal display panel inspection apparatus 10a. It is a side view of the test | inspection apparatus 10a for liquid crystal display panels which showed the relative position with 5b along each process. 8 to 13 show the liquid crystal display panel inspection device 10a shown in FIGS. 1 to 3 as viewed from the downstream to the upstream in the sub-scanning direction.

  FIG. 8 shows a state at the time of starting imaging. At the time when the imaging is started, the lighting device 1 and the first group mirror unit 4 are located above the fourth group mirror unit 7a, and the first group mirror unit 4 includes, as shown in FIG. The reflected light B reflected at the position L1 in the fourth group mirror portion 7a enters the mirror 4b. The reflected light reflected at the position of L1 is derived from the light reflected near the side A on the side surface A. At this time, the second group mirror portions 5a and 5b are located above the upper surface 20a of the liquid crystal display panel.

  Then, the driving means drives (moves) the first group mirror unit 4 and the illumination device 1 at a constant speed V from the upstream to the downstream along the main scanning direction from the position shown in FIG. By moving at a constant speed V, the reflected light B incident on the first group mirror unit 4 is reflected in the plane of the side surface A from the reflected light B reflected at the position L1 in the fourth group mirror unit 7a. Reflected at the position of L2 in the fourth group mirror part 7a derived from the reflected light in the vicinity of the side A 'which is the opposite side of the side A in the side surface A through the reflected light B reflected between L1 and L2 derived from the light The reflected light B changes sequentially. In addition, the driving means moves the first group mirror unit 4 and at the same time moves the second group mirror unit 5a... At a half speed (speed V / 2) from the upstream to the downstream along the main scanning direction. Move 5b. Since the first group mirror unit 4 and the second group mirror units 5a and 5b move in this way, the reflected light reflected near the side A of the side surface A starts to be received by the line sensor 2, and then the side surface A The optical path length of reflected light from the side surface A to the line sensor 2 until the time when the reflected light reflected near the side A ′ is received by the line sensor 2 is made constant (this is the imaging distance R). Can do.

  FIG. 9 shows a state in which the reflected light reflected at the position L2 in the fourth group mirror unit 7a is incident on the mirror 4b of the first group mirror unit 4, and the time point when the imaging of the side surface A is completed is shown. . From this state, the first group mirror unit 4 further moves at a constant speed V and enters a process (FIG. 10) for imaging the upper surface 20a and side surfaces B and C of the liquid crystal display panel described later (FIG. 10). Until the reflected light T reflected by the third group mirror unit 6a is incident on the mirrors 4a and 4c of the first group mirror unit 4 (that is, the light reflected by the side surfaces B and C), that is, the reflection at the position of L4. Until the light is incident, the second group mirrors 5a and 5b change the moving speed and move from the upstream to the downstream in the main scanning direction at a first predetermined speed higher than the speed V / 2.

  Here, the first predetermined speed is a speed at which the imaging distance when the reflected light reflected by the upper surface 20a and the side surfaces B and C starts to be received by the line sensor 2 becomes equal to the imaging distance R.

  In the present embodiment, a configuration is described in which the first group mirror unit 4 images all the side surfaces A to D together with the upper surface 20a while moving from upstream to downstream in the main scanning direction. However, the configuration is not limited to the configuration that images all the side surfaces, and may be a configuration that images the two side surfaces A and D located upstream and downstream in the main scanning direction together with the upper surface 20a. In this case, from the time shown in FIG. 9 to the time when the reflected light C reflected near the side A of the upper surface 20a (that is, the position of L4 in FIG. 9) is incident on the mirror 4b of the first group mirror section 4. The second group mirror units 5a and 5b are moved from the upstream side to the downstream side in the main scanning direction at the first predetermined speed.

  FIG. 10 shows a point in time when the reflected light T (derived from the side reflected by the side surfaces B and C) reflected by the third group mirror unit 6a begins to enter the mirrors 4a and 4c of the first group mirror unit 4. Yes. As soon as the reflected light T reflected by the third group mirror unit 6a begins to enter the mirrors 4a and 4c of the first group mirror unit 4, the second group mirror units 5a and 5b again set the moving speed to the speed V / 2. To start moving from upstream to downstream in the main scanning direction. Then, the reflected light C on the upper surface 20 a passes through the mirror 4 b and the second group mirror units 5 a and 5 b of the first group mirror unit 4, and the reflected light T on the side surface B is reflected on the first group mirror unit 4. The reflected light T on the side surface C passes through the mirror 4a and the second group mirror units 5a and 5b, and passes through the mirror 4c of the first group mirror unit 4 and the second group mirror units 5a and 5b, respectively. The sensor 2 receives the light. The imaging distances from the upper surface 20a and the side surfaces B and D to the line sensor 2 are equal to each other, and are also equal to the imaging distance R.

  FIG. 11 shows a point in time when the imaging of the upper surface 20a and the side surfaces B and C is completed. Specifically, the mirror 4b of the first group mirror unit 4 is at the position L5 and the side of the upper surface 20a. The state immediately after receiving the reflected light C in the vicinity of D is shown. From this state, the first group mirror unit 4 further moves at a constant speed V and enters a step (FIG. 12) for imaging a side surface D of the liquid crystal display panel described later. From the state shown in FIG. Until the reflected light B (derived from the light reflected by the side surface D) reflected by the fourth group mirror 7b is incident on the mirror 4b of the mirror part 4, that is, until the reflected light at the position of L6 is incident. The second group mirrors 5a and 5b change the moving speed and move from the downstream in the main scanning direction to the upstream at a second predetermined speed slower than the speed V / 2.

  Here, the second predetermined speed is a speed at which the imaging distance when the reflected light reflected by the side surface D starts to be received by the line sensor 2 becomes equal to the imaging distance R.

  FIG. 12 is derived from the reflected light B (reflected near the opposite side (side D ′) of the side D of the side surface D) reflected by the mirror 4b of the first group mirror unit 4 at L6 in the fourth group mirror unit 7b. ) Indicates the point in time at which incidence began. As soon as the reflected light B reflected by L6 in the fourth group mirror section 7b begins to enter the mirror 4b, the second group mirror sections 5a and 5b again change the moving speed to the speed V / 2 to change the main scanning direction. Start moving from upstream to downstream. Then, the reflected light B incident on the first group mirror unit 4 is a reflection reflected at the position of L6 in the fourth group mirror unit 7a derived from the reflected light near the opposite side (side D ′) of the side D of the side surface D. The fourth group derived from the reflected light in the vicinity of the side D on the side surface D shown in FIG. 13 through the reflected light B reflected between the L6 and L7 derived from the reflected light reflected in the plane of the side surface D from the light B The reflected light B sequentially changes at the position L7 in the mirror portion 7b. Since the first group mirror unit 4 and the second group mirror units 5a and 5b move in this way, the reflected light reflected near the side D 'of the side surface D starts to be received by the line sensor 2, and the side surface D The imaging distance of the reflected light from the side surface D to the line sensor 2 until the time when the reflected light reflected in the vicinity of the side D is completely received by the line sensor 2 is constant and is equal to the imaging distance R. .

  As described above, by using the liquid crystal display panel inspection apparatus 10a of the present embodiment, for example, if the letter F is printed on each surface of the liquid crystal display panel 20 as shown in FIG. 14, it is shown in FIG. An image in such a state can be obtained. In addition, L1-L7 in FIG. 15 is L1-L7 shown in FIGS.

  FIG. 16 summarizes the relationship between the position and speed of the first group mirror unit 4 and the second group mirror units 5a and 5b in a diagram. In addition, L1-L7 of the vertical axis | shaft of FIG. 16 is L1-L7 shown in FIGS.

  As described above, the liquid crystal display panel inspection device 10a according to the present embodiment includes the movement axes of the first group mirror unit 4 and the illumination device 1 and the movement axes of the second group mirror units 5a and 5b above the upper surface 20a. Are provided with driving means for moving the first group mirror unit 4 (and the illumination device 1) and the second group mirror units 5a and 5b at different speeds, and the line sensor 2 and the lens 3 are The position is fixed, and the reflected light from each surface guided from the moving second group mirrors 5a and 5b is continuously received. This eliminates the need for a very expensive configuration such as a focus adjustment mechanism as in the conventional configuration, a high-sensitivity area sensor, an imaging element and a lens with a large imaging surface, and the top and side surfaces of the liquid crystal display panel. It is possible to obtain a good image of both sides at once.

  In the present embodiment, the liquid crystal display panel has been described as an FPD module. However, the present invention is not limited to this, and an EL (electroluminescence) display, FED (electrolytic emission display), or PFP is not limited thereto. (Plasma display panel) can also be applied.

  Further, in the present embodiment, the mounting table is configured such that the liquid crystal display panel 20 can be placed so that the upper surface 20a is horizontal. However, the present invention is not limited to this, and the liquid crystal display panel 20 may be placed such that the upper surface 20a is inclined at a predetermined angle with respect to the horizontal plane. The structure which can be mounted so that 20a may become perpendicular | vertical with respect to a horizontal surface may be sufficient.

  Further, in the present embodiment, the first group mirror unit 4 has finished imaging when it has moved from upstream to downstream in the main scanning direction, but the present invention is not limited to this. It may be configured to move from downstream to upstream after moving to the downstream in the scanning direction. Alternatively, the configuration may be such that imaging is started from the downstream in the main scanning direction and the imaging is completed when moving to the upstream.

  In the present embodiment, the configuration for imaging all the side surfaces A to D together with the upper surface 20a has been described. However, the present invention is not limited to this, and the first group mirror unit 4 performs main scanning. The configuration may be such that the two side surfaces A and D are imaged together with the upper surface 20a while moving from upstream to downstream in the direction. In this case, the third group mirrors 6a and 6b are not required, and the side surfaces B and C are imaged by rotating the liquid crystal display panel on the mounting table after the upper surface 20a and the side surfaces A and D are imaged. The side surfaces B and C may be imaged by the method of imaging A and D.

  Furthermore, in the present embodiment, a case where a rectangular liquid crystal display panel (upper surface) is targeted has been described, but the present invention is not limited to this, and two sides that are parallel to each other (in the case of the present embodiment, sides) Any polygon having a shape having A and side D) can be applied. For example, it can be applied even if it has a regular hexagonal top surface. In this case, the third group mirror units 6a and 6b are not necessary as described above.

  The inspection apparatus of the present invention can also be applied as an inspection apparatus for performing a lighting inspection of a liquid crystal panel, for example, in addition to an application for inspecting the appearance of an FPD module. In general, an FPD module such as a liquid crystal panel is provided with a large number of pixel electrodes, scanning lines, and signal lines, which may be disconnected or short-circuited during the manufacturing process. In addition to the components described in the present embodiment, a power supply circuit and a control circuit for lighting the liquid crystal display panel, and a backlight are provided to inspect the appearance of the liquid crystal display panel. At the same time, it is possible to inspect the lighting of the liquid crystal display panel.

  In addition to the flat panel display module, the configuration of the present invention can be an object to be imaged if the object has an upper surface (main surface) and side surfaces (object to be inspected). That is, the configuration of the present invention can also be applied as an imaging apparatus for an inspection apparatus for inspecting an object having an upper surface and a side surface. Examples of such an object include a box whose outer surface is printed and a notebook computer.

In other words, the FPD module inspection apparatus according to the present invention is characterized by the following configuration.
That is, the FPD module inspection apparatus moves on a plane parallel to the surface of the FPD module at a constant speed v in the sub-scanning direction, and moves at a speed of V / 2 relative to the first group mirror part. The second group mirror unit, and the light from the surface of the FPD module is guided to the line sensor extending in the main scanning direction by an imaging lens that condenses light through the first group mirror unit and the second group mirror unit, In an inspection apparatus for an FPD module that images the entire surface of the FPD module, a third group mirror unit for imaging the side surface in the main scanning direction of the FPD module, and a third group mirror unit that transmits light from the side surface of the FPD module, When the first group mirror unit, the second group mirror unit, and the imaging lens are guided and guided to the line sensor, the optical path length for guiding the light from the surface and the light from the side surface of the FPD module are guided. light So that the length is equal, it is possible to say that characterized by moving the part of the first group mirror portion in the sub-scanning direction. In the above configuration, it is preferable that the third group mirror unit is configured to reflect the entire side surface of the object to be imaged.

[Embodiment 2]
Another embodiment according to the present invention will be described below with reference to FIG. In the present embodiment, in order to explain the differences from the first embodiment, for the sake of convenience of explanation, members having the same functions as those described in the first embodiment are denoted by the same member numbers. The description is omitted.

  FIG. 17 is a perspective view showing the configuration of the liquid crystal display panel inspection apparatus 10b of the present embodiment.

  In the liquid crystal display panel inspection apparatus 10a in the first embodiment, the third group mirror unit 6a is disposed at a position spaced apart from the side surface B as shown in FIGS. , Along the side B, has an elongated reflecting surface slightly longer than the side B. The third group mirror portion 6 b is disposed at a position spaced from the side surface C by a predetermined distance, and has an elongated reflecting surface that is slightly longer than the side B along the side C. On the other hand, as shown in FIG. 17, the third group mirror units 6a ′ and 6b ′ provided in the liquid crystal display panel inspection apparatus 10b of the present embodiment have sides B and C as long as possible. Shorter than the rectangular reflecting surface.

  In the liquid crystal display panel inspection apparatus 10b of the present embodiment, the third group mirror units 6a ′ and 6b ′ are integrated with the first group mirror unit 4 described in the first embodiment, and The first group mirror unit 4 is configured to move from upstream to downstream in the main scanning direction as the first group mirror unit 4 moves from upstream to downstream in the main scanning direction.

  That is, the third group mirror portion 6 a ′ has an end portion adjacent to the side surface D on the side surface B from an end portion adjacent to the side surface A on the side surface B as the first group mirror portion 4 moves. The reflected light S is reflected toward the mirror a of the first group mirror unit 4 as shown in FIG. In addition, the third group mirror portion 6b ′ has an end portion adjacent to the side surface D on the side surface C from an end portion adjacent to the side surface A on the side surface C as the first group mirror portion 4 moves. The reflected light S is reflected toward the mirror c of the first group mirror unit 4 as shown in FIG.

  Even when the liquid crystal display panel 20 is imaged using the liquid crystal display panel inspection apparatus 10b configured as described above, as in the liquid crystal display panel inspection apparatus 10a in the first embodiment, FIG. The image shown can be obtained.

  Thus, according to the configuration of the present embodiment, the size of the third group mirror unit can be reduced as compared with the case of the first embodiment.

  The present invention is not limited to the above-described embodiments, and various modifications can be made within the scope of the claims, and the technical means disclosed in different embodiments can be appropriately combined. Such embodiments are also included in the technical scope of the present invention.

  The inspection apparatus for FPD module (imaging apparatus for inspection apparatus) of the present invention can obtain good images from both the upper surface and the side surface of the FPD module without increasing the size of the apparatus.

  Therefore, in addition to being applicable as an inspection device for inspecting an FPD module such as a liquid crystal display panel or an EL (electroluminescence) display body, an inspection device for inspecting the printing of a box whose outer surface is printed, It can be applied as an appearance inspection device for notebook computers.

It is a perspective view which shows the structure of the test | inspection apparatus for liquid crystal display panels which concerns on the 1st Embodiment of this invention. It is a perspective view which shows the structure of the test | inspection apparatus for liquid crystal display panels which concerns on the 1st Embodiment of this invention, and the position of a 1st group mirror part and a 2nd group mirror part differs from what was shown in FIG. Indicates the state. It is a perspective view which shows the structure of the test | inspection apparatus for liquid crystal display panels which concerns on the 1st Embodiment of this invention, and the position of a 1st group mirror part and a 2nd group mirror part differs from what was shown in FIG.1 and FIG.2. It shows a different state. FIG. 2 is a side view showing a specific configuration of a first group mirror unit provided in the liquid crystal display panel inspection apparatus shown in FIG. 1. It is the side view shown about the arrangement position of the 3rd group mirror part provided in the inspection apparatus for liquid crystal display panels shown in FIG. (A) * (b) is a figure explaining the imaging range of the inspection apparatus for liquid crystal display panels shown in FIG. It is the side view shown about the arrangement position of the 4th group mirror part provided in the inspection apparatus for liquid crystal display panels shown in FIG. It is the side view which showed the process in which a liquid crystal display panel is imaged using the test | inspection apparatus for liquid crystal display panels which concerns on the 1st Embodiment of this invention. It is the side view which showed the process in which a liquid crystal display panel is imaged using the test | inspection apparatus for liquid crystal display panels which concerns on the 1st Embodiment of this invention. It is the side view which showed the process in which a liquid crystal display panel is imaged using the test | inspection apparatus for liquid crystal display panels which concerns on the 1st Embodiment of this invention. It is the side view which showed the process in which a liquid crystal display panel is imaged using the test | inspection apparatus for liquid crystal display panels which concerns on the 1st Embodiment of this invention. It is the side view which showed the process in which a liquid crystal display panel is imaged using the test | inspection apparatus for liquid crystal display panels which concerns on the 1st Embodiment of this invention. It is the side view which showed the process in which a liquid crystal display panel is imaged using the test | inspection apparatus for liquid crystal display panels which concerns on the 1st Embodiment of this invention. It is the perspective view which showed the liquid crystal display panel imaged with the test | inspection apparatus for liquid crystal display panels which concerns on the 1st Embodiment of this invention. It is the figure which showed the image of the liquid crystal display panel of FIG. 14 imaged with the test | inspection apparatus for liquid crystal display panels which concerns on the 1st Embodiment of this invention. It is the figure which put together the relationship between the position and speed of the 1st group mirror part and 2nd group mirror part which were provided in the test | inspection apparatus for liquid crystal display panels which concerns on the 1st Embodiment of this invention in the diagram. It is the perspective view which showed the structure of the test | inspection apparatus for liquid crystal display panels which concerns on the 1st Embodiment of this invention. It is the figure which showed the structure of the prior art. It is the figure which showed the structure of the prior art. It is the figure which showed the structure of the prior art. It is the figure which showed the structure of the prior art. It is the figure which showed the structure of the prior art.

Explanation of symbols

1 Illumination device (light source)
1a-1c Illumination part (light source)
2 Line sensor (imaging means)
3 Lens (imaging means)
4 1st group mirror part (light guide means, 1st light guide part)
4a, 4c Mirror (first light guide for side surface)
4b Mirror (Both first light guide)
5a, 5b 2nd group mirror part (light guide means, 2nd light guide part)
6a, 6b, 6a ', 6b' Third group mirror section (second reflecting means)
7a, 7b 4th group mirror part (reflection means)
10a, 10b Liquid crystal display panel inspection device (inspection device for flat panel display module, imaging device for inspection device)
20 LCD panel (flat panel display module, object to be inspected)
20a Upper surface (image display surface, main surface)

Claims (9)

A light source for illuminating light on an image display surface of the flat panel display module on which wiring and electrodes are disposed, and at least one of the side surfaces in contact with the image display surface;
In order to inspect the appearance of the module, which is fixed in position and includes imaging means for imaging the image display surface and the side surface by receiving reflected light of the light reflected by the image display surface and the side surface Inspection apparatus for flat panel display module of
Reflecting means that is arranged at a predetermined interval from the side surface and reflects the reflected light reflected by the side surface so that the traveling direction of the reflected light is parallel to the traveling direction of the reflected light reflected by the image display surface. When,
A light guide means for guiding the reflected light a reflected by the reflecting means and the reflected light b reflected by the image display surface to the imaging means;
The imaging means includes a driving means for moving the light guide means and the light source so that the reflected light a and the reflected light b are sequentially received.
The light guide means receives the reflected light a and the reflected light b, and guides the incident reflected light a and the reflected light b to the second light guide, and the first light guide. A second light guide part that guides the reflected light a and the reflected light b from the image pickup means, and
The light source, the first light guide, and the second light guide are configured to be movable on the same movement axis that is parallel to the image display surface and is a straight line,
The driving unit is configured to move the first light guide unit, the light source, and the second light guide unit on the moving shaft at different speeds.
The flat panel display module inspection apparatus, wherein the imaging means is configured to continuously receive light guided from the moving second light guide unit.   The drive means moves the second light guide part in both directions on the movement axis while moving the first light guide part on the movement axis in one direction at a constant speed V; The inspection apparatus for a flat panel display module according to claim 1, wherein the speed is variable. The image display surface is configured to image a flat panel display module, which is a polygon having at least one set of sides parallel to each other.
When the direction from one side A to the other side D of the set of sides is the main scanning direction, the movement axis is parallel to the main scanning direction.
The reflecting means is disposed on each of the side surface A having the side A and the side surface D having the side D with the predetermined distance therebetween,
The second light guide unit is configured so that the optical axes of the reflected light a and the reflected light b guided from the first light guide unit to the second light guide unit are parallel to the main scanning direction. 1 is disposed downstream of the light guide portion in the main scanning direction,
The reflected light a and the reflected light b guided from the second light guide unit to the imaging unit have an optical axis parallel to the optical axis, and from the first light guide unit to the second light guide unit. 3. The flat panel display module inspection apparatus according to claim 2, wherein the inspection apparatus is configured to travel in a direction opposite to a traveling direction of the reflected light a and the reflected light b that are guided. The side surface A has a side A ′ facing the side A, the side surface D has a side D ′ facing the side D,
The first light guide portion sequentially enters the reflected light a from the side A to the side A ′ on the side surface A, and then sequentially reflects the reflection from the side A to the side D on the image display surface. The flat panel display module inspection according to claim 3, wherein the light b is incident, and then the reflected light a is sequentially incident from the side D ′ on the side surface D toward the side D. 5. apparatus. The driving means is
(I) While the reflected light a and the reflected light b are incident on the first light guide, the second light guide is moved from the upstream in the main scanning direction to the downstream at the speed V / 2,
(Ii) From immediately after the reflected light a from the side A ′ is incident on the first light guide portion to immediately before the reflected light b from the side A on the image display surface is incident on the first light guide portion. In the meantime, the second light guide is moved from the upstream in the main scanning direction to the downstream at a first predetermined speed, the moving speed of which is faster than V / 2.
(Iii) Immediately after the reflected light b from the side D on the image display surface is incident on the first light guide unit to immediately before the reflected light from the side D ′ is incident on the first light guide unit. The flat panel display module inspection apparatus according to claim 4, wherein the second light guide unit is moved from downstream to upstream in the main scanning direction at a second predetermined speed. The polygon is a quadrangle, and is predetermined from each of a side surface C provided on one side C and a side surface B provided on the other side B of one set of sides different from the one set of sides. The reflected light c reflected by the side surface C and the side surface B is reflected to make the traveling direction of the reflected light c parallel to the traveling direction of the reflected light reflected by the image display surface. A second reflecting means different from the reflecting means,
The first light guide is
A first light guide portion for reflecting both the reflected light a and the reflected light b;
It is comprised from the said 1st light guide part for both sides arrange | positioned at predetermined intervals downstream from the said 1st light guide part for both sides, and the said 1st reflection part for side surfaces which reflects the said reflected light c is characterized by the above-mentioned. The flat panel display module inspection device according to any one of claims 3 to 5. The second reflecting means is configured to allow a part of the reflected light c reflected by the side surface C and the side surface B to be incident,
The driving unit is configured to move the second reflecting unit together with the first light guide unit from the upstream end to the downstream end in the main scanning direction on the side surface C and the side surface B. 5. The flat panel display module inspection apparatus according to claim 4, wherein the inspection apparatus is a flat panel display module. A light source for irradiating light to an image display surface having a quadrangle in which wiring and electrodes are arranged in a flat panel display module, and at least one of the four side surfaces in contact with the image display surface;
Imaging means that is fixed in position and that captures the image display surface and the side surface by receiving the reflected light reflected by the image display surface and the side surface;
An external appearance of the module, comprising: a reflector provided on an optical path of the reflected light between the image display surface and a side surface to the imaging means, and reflecting incident light in a direction different from the incident direction. An inspection device for a flat panel display module for inspecting
Of the two opposing sides of the image display surface, when the direction from one side A to the other side D of one set is the main scanning direction,
The reflector is
A fourth reflecting portion for reflecting the reflected light of the light from the light source reflected by the side surface A having the side A and the side surface D having the side D;
A first reflecting unit that reflects the reflected light reflected by the fourth reflecting unit and the reflected light reflected by the light emitted from the light source on the image display surface in the main scanning direction along the image display surface;
The reflected light reflected by the first reflecting portion is reflected to generate reflected light having an optical axis parallel to the optical axis of the reflected light and traveling in a direction opposite to the traveling direction of the reflected light. 2 reflection parts,
The light source, the first reflecting portion, and the second reflecting portion are disposed in the vicinity of the image display surface,
The light source and the first reflecting unit are moved along the image display surface from the upstream side to the downstream side in the main scanning direction at a speed V. During the movement of the first reflecting unit, the second reflecting unit is moved to the image display. Drive means for moving along the surface from upstream to downstream in the main scanning direction and from downstream to upstream at a speed different from the speed V;
The flat panel display module inspection apparatus, wherein the imaging means is configured to continuously receive the reflected light generated by the second reflecting section moving in the main scanning direction. A light source that illuminates the main surface of the object to be inspected and at least one of the side surfaces in contact with the main surface;
Inspecting the appearance of the object to be inspected, which is fixed in position and includes imaging means for imaging the main surface and the side surface by receiving reflected light of the light reflected by the main surface and the side surface. An imaging device for an inspection apparatus for performing
Reflecting means arranged at a predetermined interval from the side surface and reflecting the reflected light reflected by the side surface so that the traveling direction of the reflected light is parallel to the traveling direction of the reflected light reflected by the main surface; ,
A light guide means for guiding the reflected light a reflected by the reflecting means and the reflected light b reflected by the main surface to the imaging means;
The imaging means includes a driving means for moving the light guide means and the light source so that the reflected light a and the reflected light b are sequentially received.
The light guide means receives the reflected light a and the reflected light b, and guides the incident reflected light a and the reflected light b to the second light guide, and the first light guide. A second light guide part for guiding the reflected light a and the reflected light b guided from the light to the imaging means,
The light source, the first light guide, and the second light guide are configured to be movable on the same movement axis that is parallel to the main surface and straight.
The driving unit is configured to move the first light guide unit, the light source, and the second light guide unit on the moving shaft at different speeds.
The imaging apparatus for an inspection apparatus, wherein the imaging means is configured to continuously receive light guided from the moving second light guide unit.

Images