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JP2008042087A - Working method for laminate substrate and manufacturing method for coil component - Google Patents

Working method for laminate substrate and manufacturing method for coil component Download PDF

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JP2008042087A
JP2008042087A JP2006217250A JP2006217250A JP2008042087A JP 2008042087 A JP2008042087 A JP 2008042087A JP 2006217250 A JP2006217250 A JP 2006217250A JP 2006217250 A JP2006217250 A JP 2006217250A JP 2008042087 A JP2008042087 A JP 2008042087A
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substrate
magnetic substrate
magnetic
protrusion
coil
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Toshiaki Kikuchi
俊秋 菊池
Hitoshi Okubo
等 大久保
Atsushi Akagawa
淳 赤川
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TDK Corp
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TDK Corp
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a working method for laminate substrate by which a laminate substrate is cut accurately and to provide a manufacturing method for coil component. <P>SOLUTION: The manufacturing method for a coil component 1 includes: a process wherein a first magnetic substrate 20 and a second magnetic substrate 30 that have same size substantially are prepared, and a first protruding part 22 for alignment is formed at an outer edge part of the first magnetic substrate 20 and a positioning second protruding part 23 for coil is formed inside the outer edge part, respectively; a process wherein a coil assembly 24 is arranged on the first magnetic substrate 20, and the first magnetic substrate 20 and the second magnetic substrate 30 are so overlaid as to cover the first protruding part 22 to bond with a resin member 11; a process wherein the part covering the first protruding part 22 in the second magnetic substrate 30 is removed to expose the first protruding part 22; and a process wherein the bonded magnetic substrate is cut with the exposed first protruding part 22 as reference. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

本発明は、貼り合わせ基板の加工方法及びコイル部品の製造方法に関する。   The present invention relates to a method for processing a bonded substrate and a method for manufacturing a coil component.

従来、コイル部品の製造方法として、例えば下記特許文献1に記載の方法がある。この方法は、第1磁性部材(基板)及び第2磁性部材(基板)を作製する工程と、シート状コイルが複数設けられた大判シートの所定位置に複数の穴部を形成して穴部に未硬化の第2磁性部材を配置する工程と、シート状コイルの上下面に第1磁性部材をそれぞれ配置する工程と、第1磁性部材及び第2磁性部材を硬化させる工程と、大判シートを切断する工程と、を備えている。
特開2003−257744号公報
Conventionally, as a manufacturing method of a coil component, for example, there is a method described in Patent Document 1 below. In this method, a first magnetic member (substrate) and a second magnetic member (substrate) are produced, and a plurality of holes are formed at predetermined positions on a large sheet provided with a plurality of sheet-like coils. The step of disposing the uncured second magnetic member, the step of disposing the first magnetic member on the upper and lower surfaces of the sheet coil, the step of curing the first magnetic member and the second magnetic member, and cutting the large sheet And a step of performing.
JP 2003-257744 A

しかしながら、上記の特許文献1には、大判シートを切断する時にアライメントが必要であることは開示されていない。アライメントマークを出すために、通常では違うサイズの基板を樹脂で貼り合わせる方法が用いられる。しかし、基板のサイズが異なるため、樹脂硬化時に樹脂の硬化収縮により基板反りの発生が多い。この結果、アライメントマークを基準として貼り合わせ基板を精度良く切断することが難しい。   However, the above-mentioned Patent Document 1 does not disclose that alignment is necessary when cutting a large sheet. In order to produce alignment marks, a method of bonding substrates of different sizes with a resin is usually used. However, since the size of the substrate is different, the substrate warpage often occurs due to the curing shrinkage of the resin when the resin is cured. As a result, it is difficult to accurately cut the bonded substrate with the alignment mark as a reference.

本発明は、上記の問題点を解消する為になされたものであり、貼り合わせ基板を精度良く切断する貼り合わせ基板の加工方法及びコイル部品の製造方法を提供することを目的とする。   The present invention has been made to solve the above-described problems, and an object of the present invention is to provide a method for processing a bonded substrate and a method for manufacturing a coil component that can cut the bonded substrate with high accuracy.

本発明に係る貼り合わせ基板の加工方法は、実質的に同じサイズである第1基板と第2基板とを用意し、第1基板の主面の外縁部に段差部を形成する段差部形成工程と、段差部を覆うように第1基板と第2基板とを重ね合わせ、これらの基板を樹脂で接着する接着工程と、第1基板または第2基板における段差部を覆う部分を除去し、段差部を露出させる段差部露出工程と、露出された段差部を基準とし、接着された第1基板と第2基板とを切断する切断工程と、を備えることを特徴とする。   A method for processing a bonded substrate according to the present invention provides a step portion forming step of preparing a first substrate and a second substrate having substantially the same size, and forming a step portion on an outer edge portion of a main surface of the first substrate. The first substrate and the second substrate are overlapped so as to cover the stepped portion, the bonding step of bonding these substrates with a resin, the portion covering the stepped portion in the first substrate or the second substrate is removed, and the step And a cutting step of cutting the bonded first substrate and second substrate with the exposed stepped portion as a reference.

本発明に係る貼り合わせ基板の加工方法では、実質的に同じサイズを有する第1基板と第2基板を重ね合わせ、これらの基板を樹脂で接着するため、樹脂硬化時に樹脂の硬化収縮により基板反りの発生を防止することができる。また、段差部露出工程において、第1基板または第2基板における段差部を覆う部分を除去し、予め形成された段差部を露出させることができる。そして、露出された段差部をアライメントマークとし、これを基準とし、精度良く貼り合わせられた第1基板と第2基板を切断することができる。   In the method for processing a bonded substrate according to the present invention, since the first substrate and the second substrate having substantially the same size are overlapped and these substrates are bonded with a resin, the substrate warps due to the curing shrinkage of the resin when the resin is cured. Can be prevented. Further, in the stepped portion exposing step, a portion covering the stepped portion in the first substrate or the second substrate can be removed to expose the stepped portion formed in advance. Then, using the exposed stepped portion as an alignment mark, the first substrate and the second substrate bonded together with high accuracy can be cut using this as a reference.

好ましくは、段差部形成工程において、第1基板の外縁部の内側にも段差部を形成する。この場合には、外縁部及び外縁部の内側に段差部を形成し、これらの段差部を第1基板の主面上に規則正しく整列させることができ、貼り合わせ基板の切断加工を容易に行うことができる。   Preferably, in the step portion forming step, the step portion is also formed inside the outer edge portion of the first substrate. In this case, the step portion can be formed inside the outer edge portion and the outer edge portion, and these step portions can be regularly aligned on the main surface of the first substrate, and the bonded substrate can be easily cut. Can do.

本発明に係るコイル部品の製造方法は、実質的に同じサイズである第1磁性体基板と第2磁性体基板とを用意し、第1磁性体基板の主面の外縁部にアライメント用の複数の第1突起部と、外縁部の内側にコイルを位置決めするための複数の第2突起部とをそれぞれ形成する突起部形成工程と、第1磁性体基板の主面に形成された第2突起部にコイル集合体を配置し、第1突起部及びコイル集合体を覆うように第1磁性体基板と第2磁性体基板とを重ね合わせ、これらの磁性体基板を樹脂で接着する接着工程と、第1磁性体基板または第2磁性体基板における第1突起部を覆う部分を除去し、第1突起部を露出させる第1突起部露出工程と、露出された第1突起部を基準とし、接着された第1磁性体基板と第2磁性体基板とを切断する切断工程と、を備えることを特徴とする。   According to the coil component manufacturing method of the present invention, a first magnetic substrate and a second magnetic substrate having substantially the same size are prepared, and a plurality of alignment substrates are arranged on the outer edge portion of the main surface of the first magnetic substrate. Forming a first protrusion and a plurality of second protrusions for positioning the coil inside the outer edge, respectively, and a second protrusion formed on the main surface of the first magnetic substrate A bonding step in which a coil assembly is disposed in a portion, the first magnetic substrate and the second magnetic substrate are overlapped so as to cover the first protrusion and the coil assembly, and these magnetic substrates are bonded with resin. Removing the portion of the first magnetic substrate or the second magnetic substrate that covers the first protrusion, exposing the first protrusion, and using the exposed first protrusion as a reference, Cutting step of cutting the bonded first magnetic substrate and second magnetic substrate , Characterized in that it comprises a.

本発明に係るコイル部品の製造方法では、実質的に同じサイズを有する第1磁性体基板と第2磁性体基板を重ね合わせ、これらの磁性体基板を樹脂で接着するため、樹脂硬化時に樹脂の硬化収縮により磁性体基板反りの発生を防止することができる。また、第1突起部は、メタルパターンと違い、削られても伸びたり、無くなったりしないので、確実にアライメントマークを形成することができる。そして、第1磁性体基板または第2磁性体基板における第1突起部を覆う部分を除去し、第1突起部を露出させ、この露出された第1突起部を基準とし、精度良く貼り合わせられた第1磁性体基板及び第2磁性体基板を切断することができ、高精度のコイル部品を製造することができる。   In the method for manufacturing a coil component according to the present invention, the first magnetic substrate and the second magnetic substrate having substantially the same size are overlapped and these magnetic substrates are bonded with resin. Generation | occurrence | production of a magnetic substrate curvature can be prevented by hardening shrinkage | contraction. In addition, unlike the metal pattern, the first protrusion does not stretch or disappear even if it is shaved, so that the alignment mark can be formed reliably. Then, the portion of the first magnetic substrate or the second magnetic substrate that covers the first protrusion is removed, the first protrusion is exposed, and the first protrusion is exposed, and bonding is performed with high accuracy. In addition, the first magnetic substrate and the second magnetic substrate can be cut, and a highly accurate coil component can be manufactured.

本発明によれば、貼り合わせ基板を精度良く切断する貼り合わせ基板の加工方法及びコイル部品の製造方法を提供することができる。   ADVANTAGE OF THE INVENTION According to this invention, the processing method of a bonded substrate and the manufacturing method of coil components which cut | disconnect a bonded substrate accurately can be provided.

以下、本発明に係るコイル部品の製造方法の好適な実施形態について、図面を参照して詳細に説明する。   DESCRIPTION OF EMBODIMENTS Hereinafter, a preferred embodiment of a method for manufacturing a coil component according to the present invention will be described in detail with reference to the drawings.

図1はコイル部品を示す斜視図である。同図において、コイル部品1は、上フェライトコア2と下フェライトコア3とを有する直方体状のコア構造体4と、このコア構造体4の両端部に設けられた断面コ字状の外部電極5A,5Bとを備えている。   FIG. 1 is a perspective view showing a coil component. In FIG. 1, a coil component 1 includes a rectangular parallelepiped core structure 4 having an upper ferrite core 2 and a lower ferrite core 3, and external electrodes 5A having a U-shaped cross section provided at both ends of the core structure 4. , 5B.

上フェライトコア(第2磁性体基板)2は、図2に示すように、矩形状の平板部6と、この平板部6の両側縁部に沿って延在するように設けられた1対の直方体状の脚部7とを有している。下フェライトコア3は、矩形状の平板部(第1磁性体基板)8と、この平板部8の中央部に設けられた直方体状の突起部(第2突起部)9とを有している。このような上フェライトコア2及び下フェライトコア3からなるコア構造体4において、下フェライトコア3の平板部8に上フェライトコア2の各脚部7が突き合わされることで、漏洩磁束の少ない磁気回路が形成されることになる。そして、上フェライトコア2と下フェライトコア3とは、その間に設けられた樹脂部材11を介して互いに接着されている。   As shown in FIG. 2, the upper ferrite core (second magnetic substrate) 2 includes a rectangular flat plate portion 6 and a pair of flat plate portions 6 provided so as to extend along both side edge portions of the flat plate portion 6. It has a rectangular parallelepiped leg 7. The lower ferrite core 3 has a rectangular flat plate portion (first magnetic substrate) 8 and a rectangular parallelepiped protrusion portion (second protrusion portion) 9 provided at the center of the flat plate portion 8. . In such a core structure 4 including the upper ferrite core 2 and the lower ferrite core 3, each leg portion 7 of the upper ferrite core 2 is abutted against the flat plate portion 8 of the lower ferrite core 3, so that the magnetic flux with less leakage magnetic flux is obtained. A circuit will be formed. The upper ferrite core 2 and the lower ferrite core 3 are bonded to each other via a resin member 11 provided therebetween.

図3はコイル部品から外部電極を取り除いた状態を示す斜視図である。図3に示すように、コア構造体4の内部には、コイル10が配設されている。コイル10は、突起部9を取り囲むように連結巻き線状に形成されており、上フェライトコア2と下フェライトコア3とから構成された隙間に納められ、樹脂部材11により封止されている。コイル10は、断面矩形状を有しており、その両端が互いに対向する樹脂部材11の端面11a,11bに達し、外部電極5A,5Bにそれぞれ電気的に接続されている。なお、コイル10を形成する金属材料としては、導電率及びコストの点でCuが望ましいが、AgやNi等であっても良い。   FIG. 3 is a perspective view showing a state in which the external electrode is removed from the coil component. As shown in FIG. 3, a coil 10 is disposed inside the core structure 4. The coil 10 is formed in a connected winding shape so as to surround the protruding portion 9, is placed in a gap formed by the upper ferrite core 2 and the lower ferrite core 3, and is sealed with a resin member 11. The coil 10 has a rectangular cross section, and both ends thereof reach the end surfaces 11a and 11b of the resin member 11 facing each other, and are electrically connected to the external electrodes 5A and 5B, respectively. The metal material for forming the coil 10 is preferably Cu in terms of conductivity and cost, but may be Ag, Ni, or the like.

次に、コイル部品1の製造方法について説明する。図4は、コイル部品の製造方法を説明するフローチャートである。図5〜7は、コイル部品の製造方法を説明する工程図である。これらの図では、複数個のコイル部品1を同時に製造する場合を示している。   Next, the manufacturing method of the coil component 1 is demonstrated. FIG. 4 is a flowchart illustrating a method for manufacturing a coil component. 5-7 is process drawing explaining the manufacturing method of a coil component. In these drawings, a case where a plurality of coil parts 1 are manufactured simultaneously is shown.

初めに、突起部形成工程(ステップS1)では、第1磁性体基板20の主面21上に突起部が形成される(図5(a))。第1磁性体基板20は、下フェライトコア3の平板部8の母材であり、両面が平坦化されており、例えばフェライトのウェハが削られることにより形成される。なお、貼り合わせ基板として、第1磁性体基板20と後述する第2磁性体基板30の代わりにエポキシ樹脂基板を用いてもよい。   First, in the protruding portion forming step (step S1), protruding portions are formed on the main surface 21 of the first magnetic substrate 20 (FIG. 5A). The first magnetic substrate 20 is a base material of the flat plate portion 8 of the lower ferrite core 3, and both surfaces thereof are flattened. For example, the first magnetic substrate 20 is formed by cutting a ferrite wafer. As the bonded substrate, an epoxy resin substrate may be used instead of the first magnetic substrate 20 and the second magnetic substrate 30 described later.

図8は、第1磁性体基板に形成された突起部の配列状態を示す斜視図である。図8に示すように、第1磁性体基板20の主面21には、複数の突起が規則正しく配列されている。主面21の外縁部21a(図8中の二点鎖線で囲まれる範囲以外の部分)には、アライメントマークとする第1突起部22が設けられ、外縁部21aの内側(図8中の二点鎖線で囲まれる範囲)には、コイル集合体の位置決めとする第2突起部23が設けられている。第1突起部22と第2突起部23とは、同じく直方体状に形成されており、主面21から突出する高さが同一になるように形成されている。このように第1突起部22と第2突起部23とが主面21上に規則正しく整列されることにより、基板の切断加工を容易に行うことができる。   FIG. 8 is a perspective view showing an arrangement state of protrusions formed on the first magnetic substrate. As shown in FIG. 8, a plurality of protrusions are regularly arranged on the main surface 21 of the first magnetic substrate 20. A first protrusion 22 serving as an alignment mark is provided on the outer edge 21a of the main surface 21 (a portion other than the range surrounded by the two-dot chain line in FIG. 8), and the inner side of the outer edge 21a (two in FIG. 8). A second protrusion 23 for positioning the coil assembly is provided in a range surrounded by a dotted line. The first protrusion 22 and the second protrusion 23 are similarly formed in a rectangular parallelepiped shape, and are formed so that the heights protruding from the main surface 21 are the same. As described above, the first protrusion 22 and the second protrusion 23 are regularly aligned on the main surface 21, whereby the substrate can be easily cut.

図9は、第2磁性体基板を示す斜視図である。第2磁性体基板30は、上フェライトコア2の母材であり、第1磁性体基板20と実質的に同じサイズを有し、第1磁性体基板20と同様に、フェライトのウェハが削られることにより形成される。第2磁性体基板30の主面31には、複数の仕切板32が等間隔で配置されている。そして、主面31の両端には、仕切板32と平行する枠部33がそれぞれ設けられている。なお、枠部33と仕切板32とは、主面31から突出する高さが同一になるように形成されている。   FIG. 9 is a perspective view showing the second magnetic substrate. The second magnetic substrate 30 is a base material of the upper ferrite core 2 and has substantially the same size as the first magnetic substrate 20. Like the first magnetic substrate 20, the ferrite wafer is cut. Is formed. A plurality of partition plates 32 are arranged at equal intervals on the main surface 31 of the second magnetic substrate 30. And the frame part 33 parallel to the partition plate 32 is provided in the both ends of the main surface 31, respectively. In addition, the frame part 33 and the partition plate 32 are formed so that the height which protrudes from the main surface 31 may become the same.

ここで、実質的に同じサイズとは、第1磁性体基板20と第2磁性体基板30とを重ね合わせ接着する際に、第1磁性体基板20の主面21上に形成された第1突起部22及び第2突起部23が第2磁性体基板30により覆われて、第1磁性体基板20と第2磁性体基板30とが接着されることが可能であるサイズである。   Here, the substantially same size means that the first magnetic substrate 20 and the second magnetic substrate 30 are overlapped and bonded to each other on the first surface 21 of the first magnetic substrate 20. The protrusion 22 and the second protrusion 23 are covered with the second magnetic substrate 30, and the first magnetic substrate 20 and the second magnetic substrate 30 can be bonded to each other.

突起部形成工程(ステップS1)に続く樹脂塗布工程(ステップS2)では、樹脂部材11が第1磁性体基板20の主面21に塗布される(図5(b))。すなわち、主面21に設けられている第1突起部22及び第2突起部23が樹脂部材11により覆われる。樹脂部材11としては、例えば熱硬化型エポキシ樹脂等が用いられる。   In the resin application process (step S2) subsequent to the protrusion formation process (step S1), the resin member 11 is applied to the main surface 21 of the first magnetic substrate 20 (FIG. 5B). That is, the first protrusion 22 and the second protrusion 23 provided on the main surface 21 are covered with the resin member 11. As the resin member 11, for example, a thermosetting epoxy resin or the like is used.

次に、主面21に塗布された樹脂部材11を放置し、樹脂部材11内部に混入される空気を脱泡させる(図5(c))。   Next, the resin member 11 applied to the main surface 21 is allowed to stand, and the air mixed in the resin member 11 is defoamed (FIG. 5C).

樹脂塗布工程(ステップS2)に続くコイル組み込み工程(ステップS3)では、第1磁性体基板20の主面21にコイル集合体24が組み込まれる。コイル集合体24は、複数の連結巻き線状のコイル10が一列に形成されており、隣接するコイル10同士の間隔は、第1磁性体基板20に形成された第2突起部23の間隔に合わせるように設定されている。   In the coil incorporation step (step S3) subsequent to the resin coating step (step S2), the coil assembly 24 is incorporated on the main surface 21 of the first magnetic substrate 20. In the coil assembly 24, a plurality of connected winding coils 10 are formed in a row, and the interval between adjacent coils 10 is the same as the interval between the second protrusions 23 formed on the first magnetic substrate 20. It is set to match.

コイル集合体24は、主面21上に配置される第2突起部23の配列方向に沿って、個々の第2突起部23に対応し、それぞれ第2突起部23に嵌め込まれる。このとき、第1磁性体基板20の外縁部に配置される第1突起部22には、コイル集合体24を組み込まないことが好適である(図6(a))。このようにすれば、後述する第1突起部露出工程でアライメント用の第1突起部22であることを確実に識別することができる。   The coil assemblies 24 correspond to the individual second protrusions 23 along the arrangement direction of the second protrusions 23 arranged on the main surface 21, and are fitted into the second protrusions 23, respectively. At this time, it is preferable not to incorporate the coil assembly 24 into the first protrusion 22 disposed on the outer edge of the first magnetic substrate 20 (FIG. 6A). If it does in this way, it can identify reliably that it is the 1st projection part 22 for alignment in the 1st projection part exposure process mentioned below.

このとき、コイル集合体24の組み込みにより樹脂部材11が溢れるため、コイル集合体24の組み込み作業が終了した後に、その溢れた樹脂部材11をスキージングさせる(図6(b))。   At this time, since the resin member 11 overflows due to the incorporation of the coil assembly 24, the overflowing resin member 11 is squeezed after the assembly operation of the coil assembly 24 is completed (FIG. 6B).

コイル組み込み工程(ステップS3)に続く接着工程(ステップS4)では、第1磁性体基板20と第2磁性体基板30とが重ね合わせされ、樹脂部材11により接着される。具体的には、第1磁性体基板20の第1突起部22及び第2突起部23とを覆うように、第2磁性体基板30と第1磁性体基板20とを重ね合わせる。次に、重ね合わせられ第1磁性体基板20及び第2磁性体基板30に圧力を加えながら、数時間に放置した後に、加熱、自然放置等の方法で樹脂部材11を硬化させる。従って、第1磁性体基板20と第2磁性体基板30とは、樹脂部材11の硬化により接着され、一体化される。コイル集合体24は、樹脂部材11により封止され、第2突起部23に固定される(図6(c))。   In the bonding step (step S4) subsequent to the coil incorporation step (step S3), the first magnetic substrate 20 and the second magnetic substrate 30 are overlaid and bonded by the resin member 11. Specifically, the second magnetic substrate 30 and the first magnetic substrate 20 are overlapped so as to cover the first protrusion 22 and the second protrusion 23 of the first magnetic substrate 20. Next, the resin member 11 is cured by a method such as heating or natural standing after being left to stand for several hours while applying pressure to the first magnetic substrate 20 and the second magnetic substrate 30 that are overlaid. Therefore, the first magnetic substrate 20 and the second magnetic substrate 30 are bonded and integrated by curing the resin member 11. The coil assembly 24 is sealed by the resin member 11 and fixed to the second protrusion 23 (FIG. 6C).

接着工程(ステップS4)に続く第1突起部露出工程(ステップS5)では、第2磁性体基板30における第1突起部22を覆う部分が除去されることにより、第1突起部22が露出される(図7(a))。具体的には、第2磁性体基板30の4辺のうち、任意の平行する2辺から基板の中央に向けて基板を少しずつ除去し、第1突起部22を露出させる。第2磁性体基板30における第1突起部22を覆う部分を除去する方法としては、砥石等を用いた機械的に切削除去する方法の他、第2磁性体基板30がエポキシ樹脂を用いる場合、樹脂部材11への影響のない溶剤等により溶解して除去する方法も可能である。   In the first protrusion exposing step (step S5) subsequent to the bonding step (step S4), the first protrusion 22 is exposed by removing the portion of the second magnetic substrate 30 that covers the first protrusion 22. (FIG. 7A). Specifically, among the four sides of the second magnetic substrate 30, the substrate is removed little by little from any two parallel sides toward the center of the substrate to expose the first protrusion 22. As a method of removing the portion covering the first protrusion 22 in the second magnetic substrate 30, in addition to a method of mechanically cutting and removing using a grindstone or the like, when the second magnetic substrate 30 uses an epoxy resin, A method of dissolving and removing with a solvent or the like that does not affect the resin member 11 is also possible.

第1突起部22を露出させるには、必ずしも第2磁性体基板30における第1突起部22を覆う部分を除去する必要はなく、第1突起部22が形成された第1磁性体基板20における覆う部分を除去してもよい。また、接着工程において、第1突起部22が樹脂部材11により完全に封止された場合は、第1磁性体基板20と第2磁性体基板30とのうち、どちらの基板を除去してもよいが、第1突起部22が樹脂部材11により完全に封止されていない場合は、第1磁性体基板20を除去することと比べ、第2磁性体基板30を除去した方がより作業が容易に行われる。   In order to expose the first protrusion 22, it is not always necessary to remove the portion of the second magnetic substrate 30 that covers the first protrusion 22. In the first magnetic substrate 20 on which the first protrusion 22 is formed, The covering portion may be removed. In the bonding step, when the first protrusion 22 is completely sealed by the resin member 11, whichever of the first magnetic substrate 20 and the second magnetic substrate 30 is removed. However, when the first protrusion 22 is not completely sealed by the resin member 11, it is more work to remove the second magnetic substrate 30 than to remove the first magnetic substrate 20. Easy to do.

第1突起部露出工程(ステップS5)に続く切断工程(ステップS6)では、カットラインLに沿って第1磁性体基板20及び第2磁性体基板30が切断される(図7(b))。カットラインLの決め方として、例えば、図10に示すように、露出された第1突起部22をアライメントマークとして、第2突起部23の配置間隔やコイル集合体24の配置間隔に基づき、縦方向及び横方向のカットラインLが決められる。次に、この決められたカットラインLに沿って、縦、横に第1磁性体基板20と第2磁性体基板30とをそれぞれ切断する。これにより、図3に示すようなコア構造体4が得られる。   In the cutting step (step S6) subsequent to the first protrusion exposing step (step S5), the first magnetic substrate 20 and the second magnetic substrate 30 are cut along the cut line L (FIG. 7B). . As a method for determining the cut line L, for example, as shown in FIG. 10, the exposed first protrusion 22 is used as an alignment mark, and the vertical direction is determined based on the arrangement interval of the second protrusion 23 and the arrangement interval of the coil assembly 24. And the cut line L of the horizontal direction is determined. Next, the first magnetic substrate 20 and the second magnetic substrate 30 are cut vertically and horizontally along the determined cut line L, respectively. Thereby, the core structure 4 as shown in FIG. 3 is obtained.

切断工程(ステップS6)に続く外部電極形成工程(ステップS7)では、切断されたコア構造体4に外部電極5A,5Bが形成される。コア構造体4が研磨と洗浄された後に、コア構造体4の端面のうち、脚部7を有していない対向する端面を覆うように、これらの端面にそれぞれ導電性ペーストが塗布される。そして、この導電性ペーストが塗布されたコア構造体4に、中性雰囲気中または還元雰囲気中、約200℃で熱処理を施し、外部電極5A,5Bが形成される。なお、外部電極5A,5Bの表面には、必要に応じてバレルメッキ処理を施してもよい。これにより、コイル部品1が完成する。   In the external electrode formation step (step S7) subsequent to the cutting step (step S6), the external electrodes 5A and 5B are formed on the cut core structure 4. After the core structure 4 is polished and cleaned, a conductive paste is applied to each of the end surfaces of the core structure 4 so as to cover the opposing end surfaces that do not have the leg portions 7. Then, the core structure 4 to which the conductive paste is applied is subjected to heat treatment at about 200 ° C. in a neutral atmosphere or a reducing atmosphere to form the external electrodes 5A and 5B. The surface of the external electrodes 5A and 5B may be subjected to barrel plating as necessary. Thereby, the coil component 1 is completed.

本実施形態によれば、実質的に同じサイズを有する第1磁性体基板20と第2磁性体基板30を重ね合わせ、樹脂部材11によりこれらの磁性体基板を接着するため、樹脂部材11の硬化時に樹脂の硬化収縮により第1磁性体基板20及び第2磁性体基板30の反りの発生を防止することができる。また、第1突起部22は、メタルパターンと違い、削られても伸びたり、無くなったりしないので、確実にアライメントマークを形成することができる。そして、第2磁性体基板30における第1突起部22を覆う部分を除去し、第1突起部22を露出させ、この露出された第1突起部22をアライメントマークとし、精度良く貼り合わせられた第1磁性体基板20及び第2磁性体基板30を切断することができ、高精度を有するコイル部品1を製造することができる。   According to the present embodiment, the first magnetic substrate 20 and the second magnetic substrate 30 having substantially the same size are superposed and these magnetic substrates are bonded by the resin member 11, so that the resin member 11 is cured. Occurrence of warpage of the first magnetic substrate 20 and the second magnetic substrate 30 can sometimes be prevented by the curing shrinkage of the resin. Further, unlike the metal pattern, the first protrusion 22 does not stretch or disappear even if it is cut, so that the alignment mark can be formed reliably. And the part which covers the 1st projection part 22 in the 2nd magnetic substrate 30 was removed, the 1st projection part 22 was exposed, this exposed 1st projection part 22 was used as the alignment mark, and it bonded together with high precision. The first magnetic substrate 20 and the second magnetic substrate 30 can be cut, and the coil component 1 having high accuracy can be manufactured.

本発明は、上記実施形態に限定されるものではない。例えば、上記の実施形態では、第1突起部22と第2突起部23とは、同じ大きさで、同じ形状に形成されているが、異なる大きさまたは異なる形状に形成されてもよい。この場合は、アライメント用の第1突起部とコイルを位置決めするための第2突起部23とを容易に識別することができる。また、上記の実施形態では、コイル集合体24として連結巻き線コイルが用いられたが、これに限らず、スパイラルコイルが用いられてもよい。   The present invention is not limited to the above embodiment. For example, in the above-described embodiment, the first protrusion 22 and the second protrusion 23 have the same size and are formed in the same shape, but may be formed in different sizes or different shapes. In this case, the first protrusion for alignment and the second protrusion 23 for positioning the coil can be easily identified. In the above-described embodiment, the connected winding coil is used as the coil assembly 24. However, the present invention is not limited to this, and a spiral coil may be used.

コイル部品を示す斜視図である。It is a perspective view which shows a coil component. 図1に示すコア構造体の分解斜視図である。It is a disassembled perspective view of the core structure shown in FIG. コイル部品から外部電極を取り除いた状態を示す斜視図である。It is a perspective view which shows the state which removed the external electrode from the coil components. コイル部品の製造方法を説明するフローチャートである。It is a flowchart explaining the manufacturing method of coil components. コイル部品の製造方法を説明する工程図である。It is process drawing explaining the manufacturing method of coil components. コイル部品の製造方法を説明する工程図である。It is process drawing explaining the manufacturing method of coil components. コイル部品の製造方法を説明する工程図である。It is process drawing explaining the manufacturing method of coil components. 第1磁性体基板に形成された突起部の配列状態を示す斜視図である。It is a perspective view which shows the arrangement | sequence state of the projection part formed in the 1st magnetic body board | substrate. 第2磁性体基板を示す斜視図である。It is a perspective view which shows a 2nd magnetic body board | substrate. カットラインを示す説明図である。It is explanatory drawing which shows a cut line.

符号の説明Explanation of symbols

1…コイル部品、2…上フェライトコア(第2磁性体基板)、8…平板部(第1磁性体基板)、9…突起部(第2突起部)、11…樹脂部材、20…第1磁性体基板、21…主面、22…第1突起部(段差部)、23…第2突起部(段差部)、24…コイル集合体、30…第2磁性体基板。   DESCRIPTION OF SYMBOLS 1 ... Coil component, 2 ... Upper ferrite core (2nd magnetic substrate), 8 ... Flat plate part (1st magnetic substrate), 9 ... Projection part (2nd projection part), 11 ... Resin member, 20 ... 1st Magnetic substrate 21... Main surface 22. First protrusion (step) 23. Second protrusion (step) 24. Coil assembly 30. Second magnetic substrate.

Claims (3)

実質的に同じサイズである第1基板と第2基板とを用意し、前記第1基板の主面の外縁部に段差部を形成する段差部形成工程と、
前記段差部を覆うように前記第1基板と前記第2基板とを重ね合わせ、これらの基板を樹脂で接着する接着工程と、
前記第1基板または前記第2基板における前記段差部を覆う部分を除去し、前記段差部を露出させる段差部露出工程と、
露出された前記段差部を基準とし、接着された前記第1基板と前記第2基板とを切断する切断工程と、
を備えることを特徴とする貼り合わせ基板の加工方法。
Preparing a first substrate and a second substrate having substantially the same size, and forming a stepped portion on an outer edge portion of the main surface of the first substrate;
Bonding the first substrate and the second substrate so as to cover the stepped portion, and bonding these substrates with a resin;
A stepped portion exposing step of removing the portion covering the stepped portion of the first substrate or the second substrate and exposing the stepped portion;
A cutting step of cutting the bonded first substrate and the second substrate on the basis of the exposed stepped portion,
A method for processing a bonded substrate, comprising:
前記段差部形成工程において、前記第1基板の前記外縁部の内側にも段差部を形成することを特徴とする請求項1に記載の貼り合わせ基板の加工方法。   2. The method for processing a bonded substrate according to claim 1, wherein in the step portion forming step, a step portion is also formed inside the outer edge portion of the first substrate. 実質的に同じサイズである第1磁性体基板と第2磁性体基板とを用意し、前記第1磁性体基板の主面の外縁部にアライメント用の複数の第1突起部と、前記外縁部の内側にコイルを位置決めするための複数の第2突起部とをそれぞれ形成する突起部形成工程と、
前記第1磁性体基板の主面に形成された前記第2突起部にコイル集合体を配置し、前記第1突起部及び前記コイル集合体を覆うように前記第1磁性体基板と前記第2磁性体基板とを重ね合わせ、これらの磁性体基板を樹脂で接着する接着工程と、
前記第1磁性体基板または前記第2磁性体基板における前記第1突起部を覆う部分を除去し、前記第1突起部を露出させる第1突起部露出工程と、
露出された前記第1突起部を基準とし、接着された前記第1磁性体基板と前記第2磁性体基板とを切断する切断工程と、
を備えることを特徴とするコイル部品の製造方法。

A first magnetic substrate and a second magnetic substrate having substantially the same size are prepared, a plurality of first protrusions for alignment on the outer edge of the main surface of the first magnetic substrate, and the outer edge A protrusion forming step of forming a plurality of second protrusions for positioning the coil inside each of the protrusions,
A coil assembly is disposed on the second protrusion formed on the main surface of the first magnetic substrate, and the first magnetic substrate and the second so as to cover the first protrusion and the coil assembly. Adhering step of superimposing magnetic substrates and bonding these magnetic substrates with resin;
Removing a portion of the first magnetic substrate or the second magnetic substrate that covers the first protrusion and exposing the first protrusion; and
A cutting step of cutting the bonded first magnetic substrate and the second magnetic substrate on the basis of the exposed first protrusion,
A method for manufacturing a coil component, comprising:

JP2006217250A 2006-08-09 2006-08-09 Working method for laminate substrate and manufacturing method for coil component Pending JP2008042087A (en)

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JP2014130879A (en) * 2012-12-28 2014-07-10 Panasonic Corp Manufacturing method of coil-embedded magnetic element
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