JP2007264248A - LCD panel inspection equipment - Google Patents

Abstract

An inspection apparatus for a liquid crystal panel capable of improving the visibility of a projected inspection image without adversely affecting the inspection.
An inspection apparatus for a liquid crystal panel according to the present invention includes a panel holding means for holding a liquid crystal panel, a light source for irradiating the liquid crystal panel with inspection light, the panel holding means, and the light source. And a filter holding means 8 which is disposed outside the casing 2 and selectively inserts and holds the filter means 40 on the inspection optical path L of the liquid crystal panel 100. It is characterized by that.
[Selection] Figure 1

Description

The present invention relates to an inspection apparatus for a liquid crystal panel, and more particularly to an inspection apparatus for a liquid crystal panel used for a light valve such as a projection display apparatus.

Generally, a liquid crystal panel is a thin film transistor (Thin Film Transistor) in a manufacturing process.
Inspection of occurrence of point defects due to defects in switching elements such as TFT) elements and foreign matters mixed in the liquid crystal layer is performed. As an inspection apparatus for performing this type of inspection, for example, a lamp that irradiates the liquid crystal panel with inspection light and a projection optical system that projects the transmitted light of the liquid crystal panel onto the screen, the liquid crystal panel is subjected to a predetermined inspection. 2. Description of the Related Art An inspection apparatus that captures a luminance distribution on a screen when driven by a pattern with a CCD camera and automatically detects a point defect or the like on a liquid crystal panel from the imaging result is known. In general, inspection of point defects and the like is also performed in parallel by visual inspection of an operator. As an inspection device for a liquid crystal panel by visual observation, for example, Patent Document 1 discloses a liquid crystal panel with a predetermined inspection pattern. An inspection apparatus that is driven and projects the inspection image onto a screen is disclosed.
JP 2004-101748 A

By the way, the inspection of the liquid crystal panel by visual observation as described above is artificial, and thus there may be a difference in the inspection result depending on the skill level of the operator who performs the inspection. For example, when performing a visual inspection, an ND filter or a color filter is used as a filter means.
The inspection using such a filter means is generally performed by a person holding the filter means in front of the projection image, and therefore the determination result may vary depending on the position where the filter is held. As a countermeasure against such a problem, for example, in the inspection apparatus of Patent Document 1, a structure is disclosed in which a filter unit is held on a tray and fixed on an inspection optical path. Such a tray is disposed near a light source. Therefore, the filter means may be deteriorated by radiant heat from the light source. In particular, when the illuminance of the inspection light applied to the liquid crystal panel during projection of the inspection image is increased to make point defects or the like more conspicuous, such a problem is considered to increase.

The present invention has been made in view of such circumstances, and an object thereof is to provide a liquid crystal panel inspection apparatus capable of improving the visibility of a projected inspection image without adversely affecting the inspection. .

In order to solve the above problems, an inspection apparatus for a liquid crystal panel according to the present invention includes a panel holding means for holding a liquid crystal panel, a light source for irradiating the liquid crystal panel with inspection light, the panel holding means and the light source inside. And a filter holding means which is disposed outside the casing and selectively inserts and holds the filter means on the inspection optical path of the liquid crystal panel.

According to this configuration, it is possible to arbitrarily control the characteristics of the inspection light by selectively inserting and holding any filter means on the inspection optical path. Here, since the filter means is fixed to the filter holding means, the inspection results are less likely to vary than when the operator holds the filter means by hand, and the filter means is not scratched or soiled. Will also be easier. Furthermore, since the filter holding means is disposed outside the housing, the filter means is not deteriorated by radiant heat from the light source.

In the present invention, it is desirable to have a projection means on the inspection optical path between the liquid crystal panel and the filter holding means.

According to this configuration, it is possible to make a point defect or the like conspicuous by projecting the inspection light by the projection unit. Further, since the filter means is disposed on the emission side of the projection means, the light density of the inspection light irradiated to the filter means becomes small, and the deterioration of the filter means is less likely to occur.

In the present invention, the filter means is a contrast enhancement filter that enhances the contrast of the inspection light, an optical filter that transmits only the inspection light in a predetermined wavelength region, or a light amount adjustment filter that adjusts the light amount of the inspection light. It is desirable to be.

If the filter means is a contrast enhancement filter, the contrast of the inspection light can be enhanced. If the filter means is an optical filter, the inspection light can be limited to inspection light in a predetermined wavelength region. Furthermore, if the filter means is a light amount adjustment filter, the light amount of the inspection light can be adjusted.

In the present invention, it is desirable that the filter holding means has a cover member that covers the filter means.

According to this configuration, dust or the like drifting outside the housing can be prevented from adhering to the filter means.

In the present invention, it is desirable to have temperature adjusting means for adjusting the temperature of the liquid crystal panel held on the inspection optical path inside the casing.

According to this configuration, the liquid crystal panel can be inspected under a predetermined temperature condition by adjusting the temperature of the liquid crystal panel with the temperature adjusting means. Further, since the filter means is disposed outside the casing, even when the inside of the casing becomes high temperature, for example, when the inspection is performed while heating the liquid crystal panel, the filter means is deteriorated by such heat. There is nothing.

Embodiments of the present invention will be described below with reference to the drawings. The drawings relate to an embodiment of the present invention, FIG. 1 is a schematic configuration diagram of a liquid crystal panel inspection device, FIG. 2 is an external perspective view of the inspection device, FIG. 3 is a schematic configuration diagram of a temperature control device, and FIG. The schematic block diagram which shows the modification of a filter insertion / extraction mechanism part,
FIG. 5 is a schematic configuration diagram showing a modification of the temperature control device.

In FIG. 1, reference numeral 1 denotes a liquid crystal panel inspection apparatus. Here, in the present embodiment, a modularized liquid crystal panel, that is, a liquid crystal panel (liquid crystal panel module) to which an FPC (flexible printed circuit board) 101 or the like is attached and housed in a case together with dustproof glass (not shown) or the like ) An example of an inspection apparatus for inspecting 100 point defects and the like will be described.

The inspection apparatus 1 includes an inspection optical system 5 constituting the inspection optical path L, a stage 6 as a panel holding unit that holds the liquid crystal panel module 100 on the inspection optical path L, and a liquid crystal held on the inspection optical path L by the stage 6. The liquid crystal panel module 100 is heated or cooled by heating or cooling the probe unit 7 as a signal transmission means for transmitting an inspection signal for driving the panel module 100 with a predetermined inspection pattern and the inspection optical path L. Temperature adjusting device 9 as temperature adjusting means for adjusting the temperature of the light source, the inspection optical system 5, the stage 6, the probe unit 7, the temperature adjusting device 9 inside, and the outside of the case 2. The filter insertion / removal mechanism 8 as a filter holding means for selectively inserting and holding arbitrary filter means on the inspection optical path L It is configured the main part has a.

The inspection optical system 5 includes a lamp 15 serving as a light source for emitting inspection light such as white light in the horizontal direction at the lower portion of the housing 2, and a first light that reflects the inspection light emitted from the lamp 15 upward in the vertical direction. A reflecting mirror 16; a second reflecting mirror 17 that reflects the inspection light in the vertical direction reflected by the first reflecting mirror 16 horizontally in the upper part of the housing 2; and the first and second reflecting mirrors 16, And a projection lens 18 that is a projection means interposed on the inspection light path L between 17, and the inspection light reflected by the second reflecting mirror 17 is opened in the housing 2. The light is emitted from the mouth 19 and projected onto a screen (not shown).

The stage 6 is composed of a rectangular plate-like member that is horizontally supported in the housing 2 via a stage operation mechanism unit 25 (described later), and a liquid crystal panel module 100 to be inspected is placed on the upper surface of the stage 6. A recess 20 for mounting is formed.

In this case, the recess 20 has a shape that substantially conforms to the external shape of the liquid crystal panel module 100,
Further, by having a positioning member such as a pin (not shown) in the main part, the placed liquid crystal panel module 100 is held horizontally in a state where it is positioned at a predetermined position.

Further, on the stage 6, the display unit of the liquid crystal panel module 100 placed in the recess 20 (
An opening 21 for guiding the inspection light is opened to a not shown.

Further, a flange portion 23 for detachably mounting the stage 6 to the stage operation mechanism portion 25 is provided at the base portion of the stage 6.

The stage operation mechanism unit 25 includes an air cylinder 26 that is fixed horizontally in the housing 2. An air pressure control device (not shown) is connected to the air cylinder 26 so that the piston rod 27 of the air cylinder 26 can be expanded and contracted horizontally in the housing 2 by the operating air pressure supplied from the air pressure control device. It has become.

A stage mounting portion 28 as a panel holding means mounting portion is fixed to the tip of the piston rod 27, and the stage 6 is connected to the stage mounting portion 28 via the flange portion 23.
Is fastened and fixed removably.

In this case, the stage 6 is inserted between the first reflecting mirror 16 and the projection lens 18 when the piston rod 27 is in the contracted position, as shown by a solid line in FIG. Is held on the inspection optical path L. On the other hand, as shown by a two-dot chain line in FIG. 1, when the piston rod 27 is at the extended position, the display unit of the liquid crystal panel module 100 is retracted from the inspection optical path L. Specifications are set. As shown in the figure, when the piston rod 27 is extended before the start of inspection or after the end of the inspection, the stage 6 pushes open the opening / closing window 29 provided in the housing 2, so that the liquid crystal panel module 100 is in the housing 2. It is exposed outside and can be exchanged.

The probe unit 7 is supported in the housing 2 via a probe operation mechanism unit 33 (described later), and a plurality of probe units 7 corresponding to terminals (not shown) arranged on the FPC 101 of the liquid crystal panel module 100. The probe 30 is configured.

The probe unit 7 transmits a predetermined drive signal generated by the panel drive device 32 to the liquid crystal panel module 100 when each probe 30 is electrically connected to each terminal on the FPC 101. Yes.

The probe operation mechanism unit 33 includes an air cylinder 34 that is vertically fixed in the housing 2. An air pressure control device (not shown) is connected to the air cylinder 34 so that the piston rod 35 of the air cylinder 34 expands and contracts vertically in the housing 2 by the operating air pressure supplied from the air pressure control device. It has become.

A probe unit mounting portion 36 as a signal transmission means mounting portion is fixed to the tip of the piston rod 35, and the probe unit mounting portion 36 is connected to the probe unit 7.
Is fastened and fixed removably.

In this case, the probe unit 7 is opposed to each terminal on the FPC 101 of the liquid crystal panel module 100 in which each probe 30 is held on the inspection optical path L, and the piston rod 35 is in the extended position (lowering position). Each probe 30 is electrically connected to each terminal on the FPC 101 (see FIG. 1), and each probe 30 is separated from each terminal when the piston rod 35 is in the contracted position (upward position) (not shown). ), The specifications of each part are set.

The filter insertion / removal mechanism unit 8 is an arbitrary filter on the inspection optical path L between the second reflecting mirror 17 and the screen 4 (see FIG. 2) (that is, on the inspection optical path L on the exit side of the projection lens 18). For selectively inserting and holding the means 40, the filter support base 42 fixed to the outside of the projection port 19 of the housing 2 and the filter means 40 held on the filter support base 42 are respectively provided. The filter operating mechanism 43 is configured to move horizontally with respect to the inspection optical path L so as to advance and retreat.

As shown in FIG. 2, a plurality of groove portions 41 for holding the filter means 40 are provided on the filter support base 42. The filter operation mechanism unit 43 horizontally moves the filter means 40 held in each groove portion 41 along the groove 41. The filter operation mechanism 43 is
For example, it has an air cylinder (not shown) fixed horizontally outside the housing 2. A pneumatic control device (not shown) is connected to the air cylinder, and the piston rod of the air cylinder is expanded and contracted in the horizontal direction by the operating air pressure supplied from the pneumatic control device.

On the filter support base 42, a filter housing portion 44 having a plurality of grooves 46 continuous with the grooves 41 is provided. The filter means 40 held in the groove 41 is moved along the groove 41 by the filter operation mechanism portion 43 and can be accommodated in the groove 46 of the filter accommodation portion 44. The filter accommodating portion 40 is provided with an opening 45 for guiding the inspection light to the filter means 40 accommodated in each groove 46.

Further, a dustproof cover member 47 is provided on the filter support 42 to cover the filter means 40 held on the groove 41. The cover member 47 has a filter operation mechanism 43.
The opening part 48 for preventing interference with is provided. In FIG. 2, reference numeral 3 denotes
This is a housing having a power supply device and the like for supplying power to the lamp 15 and the like.

The filter insertion / removal mechanism unit 8 is configured to hold each filter means 40 at a retracted position from the inspection optical path L in a normal state, and a predetermined filter means 40 is selected by an operator or the like.
The filter means 40 is exposed to the inspection optical path L by being horizontally moved from the retracted position by the filter operation mechanism 43.

In each groove portion 41 of the filter support 42, as a filter means 40, for example, a viewing angle compensation filter as a contrast enhancement filter for enhancing the contrast of inspection light emitted from the liquid crystal panel module 100, green (G), blue ( B), ND (neutral density) as an optical filter that transmits only inspection light in a predetermined wavelength region such as red (R), and a light amount adjustment filter
) A filter or the like is placed. Here, each filter means 40 desirably has optical characteristics corresponding to various filters, dichroic mirrors, and the like of a liquid crystal projector apparatus that actually mounts a liquid crystal panel module to be inspected.

Returning to FIG. 1, the temperature control device 9 includes the liquid crystal panel module 1 held on the inspection optical path L.
The temperature of the liquid crystal panel module 100 is adjusted by blowing warm air or cold air at 00. As shown in FIG. 3, a blower device 45, a control unit 46 that performs drive control of the blower device 45, and a liquid crystal A temperature sensor 47 embedded in the stage 6 is provided in the vicinity of the panel module 100.

The control unit 46 is provided with a control panel (not shown) for performing temperature setting and the like, and the control unit 46 is based on the temperature detected by the temperature sensor 47 and the amount of hot or cold air blown from the blower device 45. The liquid crystal panel module 100 is controlled to a desired set temperature by feedback controlling the temperature.

  Next, the operation of the inspection apparatus 1 configured as described above will be described.

First, the operator moves the stage 6 to the retracted position from the inspection optical path L by operating the air cylinder 26 via a pneumatic control device (not shown). And in this state, stage 6
The liquid crystal panel module 100 to be inspected is positioned and placed on the recess 20.

Thereafter, the operator operates the air cylinder 26 via the pneumatic control device, and the stage 6
Is moved to the insertion position between the first reflecting mirror 16 and the projection lens 18. Thereby, the display unit of the liquid crystal panel module 100 placed on the stage 6 is held on the inspection optical path L in a predetermined manner.

Thereafter, the operator lowers the probe unit 7 by operating the air cylinder 34 via the air pressure control device, and the probe 30 of the probe unit 7 is connected to each terminal arranged on the FPC 101 of the liquid crystal panel module 100. Connect electrically.

Thereafter, the operator operates the panel drive device 32 and applies a predetermined drive signal to the liquid crystal panel module 100. As a result, a predetermined inspection image is projected on a screen (not shown).

At that time, the operator selectively moves each tray 42 of the filter insertion / removal mechanism unit 8 onto the inspection optical path L on the emission side of the liquid crystal panel module 100 to convert each filter means into the emitted light from the liquid crystal panel module 100. By operating 40, an inspection image in which the characteristics of inspection light are arbitrarily controlled can be observed.

For example, by inserting a viewing angle compensation filter on the inspection optical path L, an inspection image with enhanced contrast can be observed, and detection of point defects and the like can be facilitated.

Further, by inserting a predetermined optical filter on the inspection optical path L, it is possible to observe an inspection image limited to the wavelength region of each color such as G, B, R, etc., and each color optical path of an actual liquid crystal projector apparatus, etc. Inspection can be performed under the optimum conditions.

If the ND filter is inserted into and removed from the inspection optical path L, the bright spot inspection of the panel that requires high illuminance and the other inspection that does not require high illuminance are performed without changing the amount of light emitted from the lamp 15. Can do.

In addition, the operator operates the temperature control device 9 to control the temperature of the liquid crystal panel module 100, so that an inspection image under a predetermined high temperature condition or low temperature condition in which an actual liquid crystal projector apparatus or the like can be used. Can be observed.

Here, as the filter holding means used in the inspection apparatus 1, for example, a filter insertion / removal mechanism unit 50 shown in FIG. 4 can be adopted instead of the filter insertion / removal mechanism unit 8 described above.
More specifically, the filter insertion / removal mechanism 50 includes a shaft 51 standing in the housing 2 so as to be parallel to the inspection optical path L, and a plurality of shafts 51 rotatably supported on the shaft 51. And four trays 52 (in this embodiment). Filter means 4 is provided on the upper surface of each tray 52.
A recess 53 for placing and holding 0 is provided, and an opening 54 for guiding the inspection light to the filter means 40 respectively placed in each recess 53 is provided at the bottom of each recess 53. ing. The filter insertion / removal mechanism unit 50 normally holds each tray 52 at a retracted position from the inspection optical path L, and a predetermined tray 52 is selected by an operator or the like to rotate a predetermined distance from the retracted position. The filter means 40 held on the tray is exposed to the inspection optical path L by being rotated by a corner. According to such a configuration, by placing an arbitrary filter means 40 on each tray 52, the inspection image is observed by each inspection light modulated in a predetermined manner, similar to the filter insertion / removal mechanism section 8 described above. be able to.

Further, as the temperature adjusting means used in the inspection device 1, for example, a temperature adjusting device 60 shown in FIG. 5 can be adopted instead of the temperature adjusting device 9 described above. More specifically, the temperature adjusting device 60 adjusts the temperature of the liquid crystal panel module 100 by heating or cooling the stage 6, and temperature control for heating or cooling a fluid made of gas or liquid to a predetermined temperature. Part 61 and flow path 62 for introducing heated or cooled fluid into stage 6
And a pump 63 interposed in the middle of the flow path 62, and a temperature sensor 64 embedded in the stage 6 in the vicinity of the liquid crystal panel module 100. The temperature control unit 61 is provided with a control panel (not shown) for setting the temperature and the like.
Is configured to control the liquid crystal panel module 100 to a desired set temperature via the stage 6 by feedback-controlling the fluid temperature based on the detected temperature from the temperature sensor 64. According to such a configuration, the inspection image can be observed under a predetermined temperature condition, similarly to the temperature control device 9.

According to the liquid crystal panel inspection apparatus 1 of the present embodiment described above, the characteristics of the inspection light can be arbitrarily controlled by selectively inserting and holding the arbitrary filter means 40 on the inspection optical path L. it can. Here, since the filter means 40 is fixed to the filter holding means 8, 50, the inspection results are less likely to vary than when the operator holds the filter means 40 by hand, and the filter means 40 is scratched or soiled. Since it does not stick, inspection becomes easy.

Further, since the filter holding means 8 and 50 are disposed outside the housing 2, the filter means 40 is not deteriorated by radiant heat from the lamp 15 or heat generated by the temperature adjusting device 9. In particular, in this embodiment, since the filter means 40 is disposed on the exit side of the projection lens 18, the light density of the inspection light applied to the filter means 40 is reduced, and the filter means 40 is less likely to deteriorate.

Furthermore, since the cover member 47 that covers the filter means 40 is provided on the filter support 42, it is possible to prevent dust or the like drifting outside the housing 2 from adhering to the filter means 40.

The preferred embodiment of the present invention has been described above with reference to the accompanying drawings.
It goes without saying that the present invention is not limited to such examples. Various shapes, combinations, and the like of the constituent members shown in the above-described examples are examples, and various modifications can be made based on design requirements and the like without departing from the spirit of the present invention. For example, LCOS (Liquid Crystal On Silico
The present invention can be applied to a reflection type electro-optical panel such as n), and the present invention can be used even when the lamp 15 is disposed above the stage 6 together with the half mirror and the reflected light is inspected. In LCOS, a single crystal silicon substrate is used as an element substrate, a transistor is formed on a single crystal silicon substrate as a switching element used for a pixel or a peripheral circuit, a reflective pixel electrode is used as a pixel, and a pixel is formed below the pixel electrode. These elements are formed.

It is a schematic block diagram of the inspection apparatus of a liquid crystal panel. It is an external appearance perspective view of the inspection apparatus. It is a schematic block diagram of a temperature control apparatus. It is a schematic block diagram which shows the modification of a filter insertion / extraction mechanism part. It is a schematic block diagram which shows the modification of a temperature control apparatus.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Inspection apparatus, 2 ... Housing | casing, 6 ... Stage (panel holding means), 8, 50 ... Filter insertion / removal mechanism part (filter holding means), 9, 60 ... Temperature control apparatus (temperature control means), 15 ... Lamp (
Light source), 18 ... projection lens (projection means), 40 ... filter means (contrast enhancement filter, 47 ... cover member, optical filter, light amount adjustment filter), 100 ... liquid crystal panel module (liquid crystal panel), L ... inspection optical path

Claims (5)

Panel holding means for holding the liquid crystal panel;
A light source for irradiating the liquid crystal panel with inspection light;
A housing having the panel holding means and the light source therein;
An inspection apparatus for a liquid crystal panel, comprising: filter holding means that is disposed outside the housing and selectively inserts and holds filter means on an inspection optical path of the liquid crystal panel. 2. The liquid crystal panel inspection apparatus according to claim 1, further comprising a projection unit on an inspection optical path between the liquid crystal panel and the filter holding unit. The filter means is a contrast enhancement filter that enhances the contrast of the inspection light, an optical filter that transmits only the inspection light in a predetermined wavelength region, or a light amount adjustment filter that adjusts the light amount of the inspection light. The liquid crystal panel inspection apparatus according to claim 1 or 2. The said filter holding means has a cover member which covers the said filter means, The test | inspection apparatus of the liquid crystal panel of any one of Claims 1-3 characterized by the above-mentioned. 5. The liquid crystal panel inspection according to claim 1, further comprising a temperature adjusting unit that adjusts a temperature of the liquid crystal panel held on the inspection optical path inside the casing. apparatus.

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