JP2007163359A - Position adjustment mechanism - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a position adjusting mechanism capable of easily setting a sample to be faced to the tip of a probe in the axial direction of the probe. <P>SOLUTION: A shift amount of the sample 16 to the probe 42 is confirmed along an X-direction from a reflection image of a mirror 44 provided in an X-directional side way, as to the sample 16 and the probe 42 on a sample block 14, and a shift amount of the sample 16 to the probe 42 is confirmed along a Y-direction from a reflection image of a mirror 50 provided in a Y-directional side way, as to the sample 16 and the probe 42 on the sample block 14. The sample block 14 is moved along the X-direction and the Y-direction until the sample 16 is overlapped with the tip of the probe 42, based on confirmation results therein, to oppose the sample 16 to the tip of the probe 42 along the axial direction of the probe 42. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a position adjustment mechanism used for adjusting the relative positional relationship between a probe and a sample in an observation device configured to observe the sample in a state where the probe is opposed to the observation sample such as a near-field spectroscopic device. .

For example, in a scattering near-field spectroscopic microscope as disclosed in Patent Document 1 below, when observing a sample, the sample and the tip of the probe must face each other along the axial direction of the probe.
JP 2005-147745 A

  As described above, whether the sample and the tip of the probe face each other along the probe axial direction is determined on the side opposite to the sample of the probe or the side opposite to the probe of the sample along the probe axial direction. It is conceivable to provide observation means such as a CCD camera. However, a mechanism for supporting the probe is provided on the side opposite to the sample of the probe, and a sample stage for placing the sample and a drive mechanism for driving the sample stage are provided on the side opposite to the probe of the sample. The observation means cannot be provided at such a position, the relative positional relationship of the other to either the sample or the probe cannot be grasped, and it is difficult to adjust the position of the other to either one.

  An object of the present invention is to obtain a position adjusting mechanism that can easily set a sample so as to face the tip of the probe along the axial direction of the probe in consideration of the above fact.

  The position adjusting mechanism according to the first aspect of the present invention is a position adjusting mechanism for arranging a sample on the side of the tip of the probe along the axial direction of the probe, and is orthogonal to the axial direction. Optically indicates the relative positional relationship between the probe and the sample along the direction orthogonal to the axis, and forms position information light that can be observed at an observation position other than the extension of the probe along the axis direction. It comprises information light forming means and observation means arranged at the observation position for observing the position information light.

  In the position adjusting mechanism according to the first aspect of the present invention, the position information light formed by the information light forming means is applied to the observation means provided at an observation position other than on the extension of the probe along the probe axial direction. Observed. The positional information light formed by the information light forming means is relative to the probe and the sample along a direction perpendicular to the axial direction of the probe (hereinafter, this direction is referred to as “axial orthogonal direction” for convenience). Since the positional relationship is indicated, if the relative positional relationship between the probe and the sample is adjusted so that the probe and the sample overlap based on the positional information light observed by the observation means, the probe is aligned along the probe axial direction. The sample is set so as to face the tip.

  According to a second aspect of the present invention, there is provided the position adjusting mechanism according to the first aspect of the present invention, wherein the information light forming means includes the probe and the sample along one of the axis orthogonal directions. Reflection that is provided on the side and reflects light from the tip of the probe and the sample to the observation means as a reflection image as positional information light indicating the positional relationship between the probe and the sample along the one direction. It is characterized by providing a means.

  In the position adjusting mechanism according to the second aspect of the present invention, the light from the tip of the sample and the probe constitutes the information light forming means provided on the side of the sample and the probe along one direction orthogonal to the axis. Reflected by the reflecting means. The reflected light reflected by the reflecting means is reflected to the observing means as a reflected image as position information light indicating the positional relationship between the probe and the sample along one direction orthogonal to the axis. For this reason, the state where the probe and the sample overlap in the reflected image can be recognized as the position where the probe and the sample overlap in one direction perpendicular to the axis.

  According to a third aspect of the present invention, there is provided the position adjusting mechanism according to the second aspect of the present invention, wherein the reflecting means transmits a part of light from the tip of the probe and the sample, and the axial direction. In addition, the reflected image is incident on the observation means provided separately from the observation means on which the reflected image is incident as a transmission image indicating the positional relationship between the probe and the sample along a direction orthogonal to both of the one direction. It is characterized by that.

  In the position adjusting mechanism according to the third aspect of the present invention, part of the light from the tip of the sample and the probe passes through the reflecting means. The transmitted light transmitted through the reflecting means is reflected as a transmitted image as positional information light indicating the positional relationship between the probe and the sample orthogonal to both the axis orthogonal direction and one direction of the axis orthogonal direction. The light is incident on observation means provided separately from the observation means on which light is incident. A state where the probe and the sample overlap in the transmission image can be recognized as a position where the probe and the sample overlap along a direction orthogonal to both the axis orthogonal direction and one direction of the axis orthogonal direction. Therefore, the state where the probe and the sample overlap in both the transmission image and the reflection image can be confirmed as the state where the tip of the probe and the sample face each other along the axial direction of the probe.

  According to a fourth aspect of the present invention, there is provided the position adjusting mechanism according to the first aspect of the present invention, wherein the information light forming means is formed in a linear shape extending in the axial direction and is observed by the observation means. It is characterized by comprising aiming light forming means for forming possible aiming light as the position information light.

  In the position adjusting mechanism according to the fourth aspect of the present invention, the aiming light is formed as the position information light by the aiming light forming means constituting the information light forming means. Since the aiming light is a linear shape that spreads in the probe axial direction, the probe tip and the sample face each other along the probe axial direction when both the probe tip and the sample are illuminated by the aiming light. ing. Therefore, it is possible to confirm whether or not the tip of the probe and the sample face each other by observing this state with the observation means.

  The position adjustment mechanism according to the present invention described in claim 5 is provided in a side of the probe and the sample along one direction of the axis orthogonal direction in the present invention according to claim 4, A first light emitting means for emitting light having a spread in the axial direction; and provided on a side of the probe and the sample along a direction inclined by a predetermined angle with the axial direction as a central axis, and having a spread in the axial direction The aiming light forming means includes a second light emitting means that emits the emitted light, and crosses the light emitted by both the first light emitting means and the second light emitting means, so that the aiming position is at the crossing position. It is characterized by forming light.

  According to the position adjusting mechanism of the present invention described in claim 5, from the side of the probe and the sample along the direction orthogonal to the axial direction of the probe, from each of the first light emitting means and the second light emitting means. Light is emitted. Here, each position of the first light emitting means and the second light emitting means is inclined by a predetermined angle with the axial direction of the probe as the central axis. Therefore, the light emitted from the first light emitting means and the light emitted from the second light emitting means intersect each other. In addition, the light emitted from each of the first light emitting means and the second light emitting means spreads in the axial direction of the probe. For this reason, at the position where the light emitted from the first light emitting means and the light emitted from the second light emitting means intersect, the light is strongly emitted along the axial direction of the probe.

  This intensely shining light becomes the aiming light, and the tip of the probe and the sample are illuminated by the aiming light that shines stronger than the other positions, so that it can be recognized that the tip of the probe and the sample face each other along the axial direction of the probe.

  Here, in the position adjusting mechanism according to the present invention, a plurality of light emitting means (first light emitting means and second light emitting means) are used to form linear aiming light along the axial direction of the probe. Since all of the light emitting means are provided on the side of the probe and the sample along the direction orthogonal to the axial direction of the probe, the mounting table for mounting the sample and the support means for supporting the probe become an obstacle to the aiming light. In addition, the above-described aiming light can be formed without performing special processing on the mounting table or the support means.

  A position adjusting mechanism according to a sixth aspect of the present invention is the position adjusting mechanism according to the fifth aspect of the present invention, wherein the wavelength of the light emitted by the second light emitting means is different from the wavelength of the light emitted by the first light emitting means. It is characterized by being set to.

  According to the position adjusting mechanism of the present invention described in claim 6, the wavelength of the light emitted from the first light emitting means is different from that of the light emitted from the second light emitting means, and accordingly, the color of the light emitted from the first light emitting means The color of the light emitted by the second light emitting means is different. For this reason, in the intersection position of the light emitted from the 1st light emission means and the light emitted from the 2nd light emission means, it becomes a color different from the light which each of the 1st light emission means and the 2nd light emission means emitted. For this reason, each of the tip of the probe and the sample has a color light generated by the intersection of the light emitted from the first light emitting means and the light emitted from the second light emitting means only in a state where the probe has reached this intersection position ( That is, it is illuminated with aiming light. This facilitates the determination of whether or not the tip of the probe or the sample has reached the crossing position.

  In the position adjustment mechanism according to the first aspect of the present invention, the relative positional relationship between the probe and the sample is adjusted based on the position information light observed by the observation means so that the probe and the sample overlap each other. Thus, the sample can be easily set so as to face the tip of the probe along the axial direction of the probe.

  In the position adjustment mechanism according to the second aspect of the present invention, the relative positional relationship between the probe and the sample is adjusted so that the probe and the sample overlap each other in the reflected image observed by the observation unit. Deviation between the probe and the sample along one direction in the orthogonal direction can be eliminated.

  In the position adjustment mechanism according to the third aspect of the present invention, by adjusting the relative positional relationship between the probe and the sample so that the probe and the sample overlap in both the transmission image and the reflection image, the axis of the probe is adjusted. The tip of the probe and the sample can be made to face each other along the direction.

  In the position adjusting mechanism according to the fourth aspect of the present invention, the tip of the probe and the sample can be made to face each other along the axial direction of the probe by illuminating the tip of the probe and the sample with linear aiming light. .

  In the position adjustment mechanism according to the fifth aspect of the present invention, the mounting table on which the sample is mounted and the support means for supporting the probe obstruct the aiming light. A linear aiming light can be formed without performing any special processing, and the tip of the probe and the sample can be opposed to each other by illuminating the tip of the probe and the sample with this aiming light.

  In the position adjusting mechanism according to the sixth aspect of the present invention, it is determined whether or not the tip of the probe or the sample is illuminated by the aiming light, that is, the tip of the probe and the sample face each other in the axial direction of the probe. It is very easy to determine whether or not it exists.

<Configuration of First Embodiment>
FIG. 1 shows an outline of the configuration of a near-field spectrometer 11 to which a position adjusting mechanism 10 according to the first embodiment of the present invention is applied, as a composite diagram of a front view and a block diagram. FIG. 3 is a perspective view schematically showing the configuration of the main part of the near-field spectrometer 11 to which the position adjusting mechanism 10 is applied. Since the mechanism for observing and measuring the sample 16 in the near-field spectrometer 11 is a well-known technique, a detailed description thereof including illustration is omitted, and a position that is a main part of the present embodiment. Only the configuration related to the adjustment mechanism 10 will be described below.

  As shown in FIG. 1, the near-field spectrometer 11 includes a scanner 12. The scanner 12 includes a sample stage 14 configured to include a sample mounting surface formed of silicon in a flat plate shape with a rectangular shape in plan view with silicon, and on the sample stage 14 (more specifically, the sample mounting surface). The sample 16 to be observed is set in (above). A drive mechanism 18 is provided below the sample stage 14. The drive mechanism 18 includes piezo elements 20X, 20Y, and 20Z. The piezo elements 20X to 20Z have a structure in which the crystal expands and contracts in a certain direction when a voltage is applied. The piezo element 20X extends the sample stage 14 in one direction parallel to the sample mounting surface (X Direction).

  The piezo element 20Y slightly displaces the sample stage 14 in a direction (Y direction) parallel to the sample placement surface and perpendicular to the X direction by crystal expansion and contraction. Furthermore, the piezo element 20Z slightly displaces the sample stage 14 in the direction of the sample placement surface, that is, in the direction orthogonal to both the X direction and the Y direction (Z direction) by crystal expansion and contraction. The piezo elements 20X and 20Y are connected to an X and Y scanning mechanism 26. The X and Y scanning mechanism 26 includes a kind of driver circuit, and is interposed between a power source (not shown) and the piezo elements 20X and 20Y. The X and Y scanning mechanism 26 is connected to the CPU 28. When a scanning control signal from the CPU 28 is input to the X and Y scanning mechanism 26, the X and Y scanning mechanism 26 detects the piezoelectric element 20X and the piezoelectric element 20Y. A voltage corresponding to the scanning control signal is applied to at least one of them.

  The CPU 28 is directly or indirectly connected to the input unit 30 configured with a keyboard, a mouse, and the like. When an input operation is performed at the input unit 30 in order to scan (displace) the sample 16 in the X direction or the Y direction, an input signal corresponding to the input operation is input to the CPU 28, and further according to the input signal. A scan control signal is output from the CPU 28.

  Further, the CPU 28 is connected to the Z-axis servo mechanism 32. The Z-axis servo mechanism 32 is configured to include a kind of driver circuit, and is connected to a power source (not shown) and to the piezo element 20Z. When the servo signal is output by the CPU 28, the Z-axis servo mechanism 32 applies a voltage to the piezo element 20Z based on the input servo signal, and the sample stage 14 is slightly raised and lowered.

  On the other hand, as shown in FIGS. 1 and 2, a probe support portion 40 is disposed above the sample stage 14 having the above-described configuration, and a metal probe 42 is supported on the probe support portion 40. The probe 42 has a rod shape that is axial in the direction of the sample mounting surface of the sample stage 14, and is gradually tapered toward the sample stage 14, that is, downward. In the near-field spectrometer 11, when infrared rays are passed through the sample mounting surface of the silicon substrate constituting the sample stage 14, a near field called an evanescent centimeter wave is generated on the surface of the sample mounting surface. This near field is converted into propagating light by the probe 42, and this propagating light is collected and detected by a detector, thereby enabling local infrared spectroscopy.

  Of the directions orthogonal to the axial direction of the probe 42 (in other words, in the direction parallel to the sample mounting surface of the sample stage 14, this direction is hereinafter referred to as “axis orthogonal direction” for convenience). An information light forming unit is configured as a reflecting unit in the same direction as the sample table 14 is slightly displaced by applying a voltage to the piezo element 20X, that is, on the side of the sample table 14 along the X direction. A mirror 44 is disposed. In this embodiment, the mirror 44 is formed on the surface of a substrate formed of infrared inactive crystals, for example, potassium bromide (KBr), sodium chloride (NaCl), calcium fluoride (CaF), diamond, or the like. , Gold (Au), platinum (Pt), aluminum (Al), silver (Ag), etc. are formed by vapor deposition as a reflective film.

  The mirror 44 having such a structure is above the sample placement surface of the sample stage 14 along the axial direction of the probe 42 and the reflection surface of the mirror 44 is substantially parallel to the sample placement surface of the sample stage 14. It is arranged to be. As shown in FIG. 1, the mirror 44 receives the light L from the vicinity of the tip of the sample 16 placed on the sample placement surface of the sample stage 14 and the probe 42 arranged in the vicinity of the sample 16. It can be reflected downward as reflected light. A CCD camera 46 as observation means is disposed below the mirror 44, and a reflected image as position information light formed by reflected light from the mirror 44 can be captured by the CCD camera 46.

  The CCD camera 46 is connected to the CPU 28, and when the electrical image signal output from the CCD camera 46 is processed by the CPU 28, a reflection image at the mirror 44 is displayed on the monitor 48 connected to the CPU 28. . As shown in (X) of FIG. 3, for example, in a state where the sample 16 is displaced in the X direction with respect to the tip of the probe 42, it is displayed as one of the X-Y divided images of the monitor 48. The reflected image from the mirror 44 is displayed with the sample 16 shifted in the horizontal direction of the screen of the monitor 48 with respect to the tip of the probe 42.

  On the other hand, as shown in FIG. 2, a direction orthogonal to the axial direction of the probe 42 (in other words, a direction parallel to the sample placement surface of the sample stage 14, hereinafter, this direction is referred to as “ In the same direction as the direction in which the sample stage 14 is slightly displaced by applying a voltage to the piezo element 20Y, that is, on the side of the sample stage 14 along the Y direction. The mirror 50 constituting the information light forming means is disposed as the reflecting means. In the present embodiment, the mirror 50 is structurally similar to the mirror 44, and the mirror 50 has a reflecting surface above the sample placement surface of the sample stage 14 along the axial direction of the probe 42. It arrange | positions so that it may become substantially parallel with respect to the sample mounting surface of the base 14. FIG. Similar to the mirror 44, the mirror 50 uses the light from the sample 16 placed on the sample placement surface of the sample stage 14 and the tip of the probe 42 arranged in the vicinity of the sample 16 as reflected light. Can be reflected.

  As shown in FIG. 2, a CCD camera 52 as observation means is arranged below the mirror 50, and a reflected image as position information light formed by the reflected light from the mirror 50 is picked up by the CCD camera 52. It can be done. The CCD camera 52 is connected to the CPU 28, and when the electrical image signal output from the CCD camera 52 is processed by the CPU 28, a reflection image from the mirror 50 is displayed on the monitor 48 connected to the CPU 28. . As shown in (Y) of FIG. 3, for example, in a state where the sample 16 is displaced in the Y direction with respect to the tip of the probe 42, it is displayed as the other of the XY divided images of the monitor 48. The reflected image from the mirror 50 is displayed with the sample 16 shifted in the horizontal direction of the screen of the monitor 48 with respect to the tip of the probe 42.

<Operation and Effect of First Embodiment>
In the present embodiment configured as described above, the reflected images formed by the reflected light from the mirrors 44 and 50 are captured by the CCD cameras 46 and 52, respectively. When each of the CCD cameras 46 and 52 captures a reflected image, an electrical image signal corresponding to the captured data is processed by the CPU 28 and displayed on the monitor 48.

  Here, as described above, in a state where the sample 16 is displaced in the X direction with respect to the tip of the probe 42, one of the divided images of the monitor 48 is lateral to the tip of the probe 42 in the horizontal direction of the screen of the monitor 48. The sample 16 is displayed in a shifted manner. Thus, when the sample 16 is displaced with respect to the tip of the probe 42, a voltage is applied to the piezo element 20X, and the sample stage 14 is displaced in the X direction. When the tip of the probe 42 and the sample 16 overlap each other by displacing the sample stage 14 in the X direction in this manner, the deviation between the probe 42 and the sample 16 along the X direction is eliminated.

  When the sample 16 is displaced in the Y direction with respect to the tip of the probe 42, the sample 16 is displaced with respect to the tip of the probe 42 in the horizontal direction of the screen of the monitor 48 on the other side of the divided image of the monitor 48. Is displayed. Thus, when the sample 16 is displaced with respect to the tip of the probe 42, a voltage is applied to the piezo element 20Y, and the sample stage 14 is displaced in the Y direction. When the tip of the probe 42 and the sample 16 are overlapped by displacing the sample stage 14 in the Y direction in this way, the deviation between the probe 42 and the sample 16 along the Y direction is eliminated.

  Thus, the tip of the probe 42 and the sample 16 can be easily made to face each other along the axial direction of the probe 42 by eliminating the deviation between the probe 42 and the sample 16 along both the X direction and the Y direction. Can do.

  In addition, in the present embodiment, mirrors 44 and 50 are arranged on the side of the sample stage 14 along the axis orthogonal, and the reflected images at these mirrors 44 and 50 are confirmed in both the X direction and the Y direction. In order to eliminate the deviation between the probe 42 and the sample 16 along the probe 42, the probe support unit 40 and the sample stage 14 are not obstructed when the tip of the probe 42 and the sample 16 are imaged by the CCD cameras 46 and 52. The structure of the probe support unit 40 and the sample stage 14 need not be particularly changed.

  In the present embodiment, the mirrors 44 and 50 are arranged so that the reflection surface is substantially parallel to the sample placement surface of the sample stage 14, or the CCD cameras 46 and 52 are disposed below the mirrors 44 and 50. However, the mirrors 44 and 50 and the CCD camera 46 can be used as long as the displacement between the tip of the probe 42 and the sample 16 along each direction in the X direction and the Y direction can be captured as a reflected image. , 52 is not limited to the above-described embodiment.

<Configuration of Second Embodiment>
Next, other embodiments of the present invention will be described. In describing each of the following embodiments, the same parts as those in the previous embodiment are basically the same as those in the embodiment described above including the first embodiment. Reference numerals are assigned and detailed description thereof is omitted.

  FIG. 4 is a front view schematically showing a configuration of a near-field spectrometer 72 to which the position adjusting mechanism 70 according to the second embodiment of the present invention is applied, and FIG. 5 shows a near-field spectrometer. An outline of the configuration 72 is shown in a perspective view.

  As shown in these drawings, the position adjusting mechanism 70 applied in the near-field spectrometer 72 does not include the mirror 50. Further, the position adjusting mechanism 70 does not include the mirror 44, but instead includes a mirror 74 constituting an information light forming unit as a reflecting unit. The structure of the mirror 74 is basically the same as that of the mirror 44, but the thickness of the substrate of the mirror 74 and the reflective film is set so that a part of the incident light can be transmitted without being reflected.

  As shown in FIGS. 4 and 5, from the region including the tip of the sample 16 provided on the sample placement surface of the sample stage 14 and the probe 42 in the vicinity of the sample 16, the light enters the mirror 74 and enters the mirror 74. A CCD camera 76 as an observation means is provided on the extension of the optical axis of the light that has passed through the light beam, and a transmission image as position information light formed by the transmitted light that has passed through the mirror 74 can be taken. Yes. Although not shown, the CCD camera 76 is also connected to the CPU 28 in the same manner as the CCD camera 46.

  The transmitted image formed by the transmitted light that has passed through the mirror 74 is an image of the tip of the probe 42 and the sample 16 as viewed from the X direction side, as shown in FIG. When the tip and the sample 16 are displaced in the Y direction, the image reflected by the mirror 44 displayed as the other of the XY divided images of the monitor 48 shown in FIG. The sample 16 is displayed in a direction shifted from the tip of the probe 42.

<Operation and Effect of Second Embodiment>
In the present embodiment configured as described above, the deviation between the tip of the probe 42 and the sample 16 along the X direction is confirmed by the image displayed on the monitor 48 based on the reflection image at the mirror 74. Therefore, as in the first embodiment, a voltage is applied to the piezo element 20X, and the sample stage 14 is displaced in the X direction. When the tip of the probe 42 and the sample 16 overlap each other by displacing the sample stage 14 in the X direction in this manner, the deviation between the probe 42 and the sample 16 along the X direction is eliminated.

  On the other hand, the deviation between the tip of the probe 42 and the sample 16 along the Y direction is confirmed by an image displayed on the monitor 48 based on the transmission image transmitted through the mirror 74, and the piezo element 20Y is confirmed while confirming this image. A voltage is applied, and the sample stage 14 is displaced in the Y direction until the tip of the probe 42 and the sample 16 face each other in the axial direction of the probe 42. Thereby, the shift | offset | difference of the probe 42 and the sample 16 along a Y direction is eliminated.

  Thus, the tip of the probe 42 and the sample 16 can be easily made to face each other along the axial direction of the probe 42 by eliminating the deviation between the probe 42 and the sample 16 along both the X direction and the Y direction. Can do.

  In addition, in the present embodiment, as in the first embodiment, a mirror 74 is disposed on the side of the sample stage 14 along the axis orthogonal, and a reflected image and a transmitted image on the mirror 74 are confirmed. In order to eliminate the displacement between the probe 42 and the sample 16 along both the X direction and the Y direction, the probe support unit 40 and the sample stage 14 are used when the tip of the probe 42 and the sample 16 are imaged by the CCD cameras 46 and 52. There is no obstacle, and the structure of the probe support unit 40 and the sample stage 14 need not be particularly changed.

  Compared with the first embodiment, in this embodiment, a mirror 74 is provided in place of the mirror 44, but the mirror 50 is not provided. As a result, the installation space for the mirror 50 in the first embodiment can be used as another space, and the position adjustment mechanism 70 and thus the near-field spectrometer 72 can be reduced in size by the installation space for the mirror 50. .

<Configuration of Third Embodiment>
Next, a third embodiment of the present invention will be described.

  FIG. 7 is a perspective view schematically showing a configuration of a near-field spectrometer 92 to which the position adjusting mechanism 90 according to the present embodiment is applied, and FIG. 8 shows a near-field to which the position adjusting mechanism 90 is applied. A schematic configuration of the spectroscopic measurement device 92 is shown in a plan view.

  The position adjusting mechanism 90 includes a laser light source 94 that constitutes an aiming light forming unit, and thus an information light forming unit, as the first light emitting unit. For example, an argon laser light source is used as the laser light source 94, and emits blue laser light L1 having a wavelength of 430 nm to 460 nm, that is, blue light. The laser light source 94 is provided above the sample table 14 on the side of the sample table 14 along the direction perpendicular to the axis, and emits a laser beam L1 downward.

  Below the laser light source 94, a curved reflecting member 96 that constitutes the aiming light forming means together with the laser light source 94 is provided. The curved reflecting member 96 includes a reflecting surface that is curved so as to protrude toward the sample 16 on the sample table 14 with a predetermined curvature. The laser light L 1 emitted from the laser light source 94 is reflected by the reflecting surface of the curved reflecting member 96. As is well known, the laser beam basically travels straight without spreading at a constant spot diameter, but the laser beam L1 reflected by the curved reflecting surface of the curved reflecting member 96 requires the reflecting surface of the curved reflecting member 96 as a key. It spreads in a fan shape along the axial direction of the probe 42.

  On the other hand, the position adjustment mechanism 90 includes a laser light source 98 that constitutes an aiming light forming unit, and thus an information light forming unit, as the second light emitting unit. As the laser light source 98, for example, a helium neon (He-Ne) laser light source is used, and emits a laser beam L2 having a wavelength of 570 nm to 590 nm, that is, a yellow laser beam L2. The laser light source 98 is provided on the side of the sample stage 14 along the direction perpendicular to the axis and above the sample stage 14 and emits laser light L2 downward.

  Below the laser light source 98, a curved reflecting member 100 that constitutes an aiming light forming unit together with the laser light source 98 is provided. The curved reflecting member 100 has basically the same configuration as the curved reflecting member 96, and includes a reflecting surface that is curved so as to protrude toward the sample 16 on the sample stage 14 with a predetermined curvature. Laser light L <b> 2 emitted from the laser light source 98 is reflected by the reflecting surface of the curved reflecting member 100. This laser light L2 is also reflected by the curved reflecting surface of the curved reflecting member 100 in the same manner as the laser light L1, and spreads in a fan shape along the axial direction of the probe 42 using the reflecting surface of the curved reflecting member 100 as a main component. .

  Each of the curved reflection member 96 and the curved reflection member 100 may be fixed, or may be rotatable about an axis parallel to the axial direction of the probe 42. . In the configuration in which each of the curved reflection member 96 and the curved reflection member 100 is fixed, the reflection direction of the laser beams L1 and L2 is naturally fixed, but the curved reflection is performed around an axis parallel to the axial direction of the probe 42. In the configuration in which each of the member 96 and the curved reflecting member 100 is rotatable, the laser beams L1 and L2 reflected by the curved reflecting member 96 and the curved reflecting member 100 are along the axial direction of the probe 42 with the reflecting surface as a main component. Although it spreads in a fan shape, the reflection direction changes around an axis parallel to the axial direction of the probe 42.

  Here, as shown in FIG. 8, the laser light source 98 and the curved reflecting member 100 are approximately around the position of the sample 16 or the vicinity thereof with respect to the laser light source 94 and the curved reflecting member 96. Is provided at a position inclined at a predetermined angle from the center. Therefore, the blue laser light L1 reflected by the curved reflecting member 96 and the yellow laser light L2 reflected by the curved reflecting member 100 intersect at the position of the sample 16 or in the vicinity thereof. At this crossing position, the blue laser beam L1 and the yellow laser beam L2 cross each other, so that the colors of the individual laser beams L1 and L2 are different from each other, and are stronger than the individual laser beams L1 and L2. It becomes the shining aiming light Ls.

  Moreover, each of the blue laser light L1 reflected by the curved reflecting member 96 and the yellow laser light L2 reflected by the curved reflecting member 100 requires the reflecting surfaces of the curved reflecting members 96 and 100 as described above. It extends in a fan shape along the axial direction of the probe 42. For this reason, the above-mentioned aiming light Ls formed by the crossing of these laser beams L 1 and L 2 is linear along the axial direction of the probe 42.

  Further, as described above, when the curved reflecting member 96 and the curved reflecting member 100 are rotatable around an axis parallel to the axial direction of the probe 42, the curved reflecting member 96 and the curved reflecting member 100 are configured. Is rotated to change the formation position of the aiming light Ls.

  On the other hand, the position adjustment mechanism 90 includes a CCD camera 102 as observation means. The CCD camera 102 generally has an imaging direction on the opposite side to either one through either one of the arrangement position of the laser light source 94 and the arrangement of the laser light source 98 around an axis about the aiming light Ls. It arrange | positions in the state which faced the side of the aiming light Ls. The CCD camera 102 is electrically connected to the CPU 28, and an image captured by the CCD camera 102 is displayed on the screen of the monitor 48.

<Operation and Effect of Third Embodiment>
In the present embodiment configured as described above, when the laser beams L1 and L2 are emitted from the laser light sources 94 and 98, respectively, the linear aiming light Ls is formed along the axial direction of the probe 42 as described above. . Here, as shown in FIG. 9, when the tip of the probe 42 and the aiming light Ls do not overlap along the axial direction of the probe 42, the tip of the probe 42 is not illuminated by the aiming light Ls. The laser light source 94 is illuminated by any one of the blue laser light L1 and the laser light source 98 by the yellow laser light L2, or is not illuminated by any laser light L1, L2. In this state, if the probe support portion 40 is slid in the X direction or the Y direction, or each of the curved reflecting member 96 and the curved reflecting member 100 is rotatable, the curved reflecting member 96 or the curved reflecting member is used. 100 is rotated to change the formation position of the aiming light Ls.

  In this way, by appropriately adjusting the position of the probe 42 and the formation position of the aiming light Ls, as shown in FIG. 10, when the tip of the probe 42 and the aiming light Ls overlap, the tip of the probe 42 is It is green, which is the color of the aiming light Ls, and shines stronger than when the tip of the probe 42 is illuminated by either one of the laser beams L1 and L2. By confirming this state on the screen of the monitor 48, it can be confirmed that the tip of the probe 42 and the aiming light Ls overlap each other.

  As described above, when the tip of the probe 42 and the aiming light Ls overlap with each other and the aiming light Ls and the sample 16 do not overlap with each other, the sample 16 is not illuminated by the aiming light Ls, and the laser light source 94. The blue laser beam L1 and the yellow laser beam L2 of the laser light source 98 are illuminated, or none of the laser beams L1 and L2 is illuminated.

  In this state, a voltage is appropriately applied to each of the piezo elements 20X and 20Y, and the sample stage 14 is appropriately displaced in the X direction and the Y direction. When the sample 16 is displaced in this way and the sample 16 and the aiming light Ls overlap as shown in FIG. 11, the sample 16 is green, which is the color of the aiming light Ls, and the laser beams L1 and L2 It shines more intensely than when the sample 16 is illuminated on either one.

  By confirming this state on the screen of the monitor 48, it can be confirmed that the sample 16 and the aiming light Ls overlap each other. As a result, the tip of the probe 42 and the sample 16 face each other along the axial direction of the probe 42. I can confirm that.

  Thus, in the present embodiment, the tip of the probe 42 and the green aiming light Ls, which is neither the blue laser light L1 emitted from the laser light source 94 nor the yellow laser light L2 emitted from the laser light source 98, In order to confirm that the tip of the probe 42 and the sample 16 face each other along the axial direction of the probe 42 by illuminating the sample 16, whether or not the tip of the probe 42 and the sample 16 face each other is colored. Easy to confirm.

  Moreover, the aiming light Ls shines stronger than either of the laser lights L1 and L2. Therefore, when the tip of the probe 42 or the sample 16 is illuminated by the aiming light Ls, either of the laser lights L1 or L2 is probed. The tip of the probe 42 and the sample 16 shine stronger than when the tip of the sample and the sample 16 are illuminated. Therefore, whether or not the tip of the probe 42 and the sample 16 face each other can be easily confirmed by the intensity of the light.

  Furthermore, in the present embodiment, the laser beams L1 and L2 spread in a fan shape in the axial direction of the probe 42 are intersected from the side of the probe 42 and the sample 16 along the direction orthogonal to the axis to form the aiming light Ls. The probe support unit 40 and the sample stage 14 do not become an obstacle when the linear aiming light Ls is formed along the axial direction of the probe 42, and the structure of the probe support unit 40 and the sample stage 14 is not affected. The aiming light Ls can be formed without any particular change.

  In addition, the tip of the probe 42 and the position of the sample 16 are adjusted so that the tip of the probe 42 and the sample 16 face each other by illuminating the tip of the probe 42 and the sample 16 with the aiming light Ls formed in such a configuration. In adjusting the tip of the probe 42 and the position of the sample 16, the probe support section 40 and the sample stage 14 do not obstruct the position adjustment, and the structure of the probe support section 40 and the sample stage 14 is not particularly changed. Even the position can be adjusted.

  In the present embodiment, the laser beams L1 and L2 are crossed to form the green aiming light Ls. However, the two laser beams L1 and L2 have different colors and the two laser beams L1. As long as the sighting light Ls formed by intersecting L2 is clearly different in color from any of the laser light L1 and L2, the colors of the laser light L1 and L2 and the color of the sighting light Ls are limited at all. The laser light sources 94 and 98 may be appropriately selected.

It is a compound figure of the front view and block diagram which show the outline of the structure of the near-field spectrometer which applied the position adjustment mechanism which concerns on the 1st Embodiment of this invention. It is a perspective view showing the outline of the composition of the near-field spectrometer which applied the position adjustment mechanism concerning a 1st embodiment of the present invention. It is a figure which shows the monitor image in the position adjustment mechanism which concerns on the 1st Embodiment of this invention. It is a front view which shows the outline of a structure of the near-field spectrometer which applied the position adjustment mechanism which concerns on the 2nd Embodiment of this invention. It is a perspective view which shows the outline of a structure of the near-field spectrometer which applied the position adjustment mechanism which concerns on the 2nd Embodiment of this invention. It is a figure which shows the monitor image in the position adjustment mechanism which concerns on the 2nd Embodiment of this invention. It is a perspective view which shows the outline of a structure of the near-field spectrometer which applied the position adjustment mechanism which concerns on the 3rd Embodiment of this invention. It is a top view which shows the outline of a structure of the near-field spectrometer which applied the position adjustment mechanism which concerns on the 3rd Embodiment of this invention. It is a figure which shows the monitor image in the position adjustment mechanism which concerns on the 3rd Embodiment of this invention, and is a figure which shows the state in which the probe, the sample, and aiming light have not overlapped. It is a figure which shows the monitor image in the position adjustment mechanism which concerns on the 3rd Embodiment of this invention, and is a figure which shows the state with which the probe and aiming light overlapped. It is a figure which shows the monitor image in the position adjustment mechanism which concerns on the 3rd Embodiment of this invention, and is a figure which shows the state with which the probe, the sample, and the aiming light overlapped.

Explanation of symbols

10 Position adjustment mechanism 16 Sample 42 Probe 44 Mirror (reflection means, information light forming means)
46 CCD camera (observation means)
50 mirror (reflecting means, information light forming means)
52 CCD camera (observation means)
70 Position adjustment mechanism 74 Mirror (reflection means, information light forming means)
76 CCD camera (observation means)
90 Position adjustment mechanism 94 Laser light source (first light emitting means, aiming light forming means, information light forming means)
96 Curved reflection member (aiming light forming means, information light forming means)
98 Laser light source (second light emitting means, aiming light forming means, information light forming means)
100 Curved reflection member (aiming light forming means, information light forming means)
102 CCD camera (observation means)
Ls Aiming light (position information light)

Claims (6)

A position adjusting mechanism for arranging a sample on the side of the tip of the probe along the axial direction of the probe,
Optically shows the relative positional relationship between the probe and the sample along the axis orthogonal direction orthogonal to the axis direction, and observes at an observation position other than on the extension of the probe along the axis direction Information light forming means for forming possible position information light;
An observation means arranged at the observation position to observe the position information light;
A position adjusting mechanism comprising:   The information light forming means is provided on a side of the probe and the sample along one direction of the axis orthogonal direction, and the light from the tip of the probe and the sample is transmitted along the one direction. 2. The position adjusting mechanism according to claim 1, further comprising reflecting means for reflecting to the observation means as a reflected image as position information light indicating a positional relationship between the probe and the sample.   The reflecting means transmits a part of the light from the tip of the probe and the sample, and determines the positional relationship between the probe and the sample along a direction orthogonal to both the axial direction and the one direction. The position adjusting mechanism according to claim 2, wherein the reflected light is incident on the observation unit provided separately from the observation unit on which the reflected image is incident.   The said information light formation means is provided with the aiming light formation means which forms the aiming light which is formed in the linear form extended in the said axial direction, and can be observed by the said observation means as said position information light. The position adjustment mechanism according to 1. A first light emitting means that is provided on a side of the probe and the sample along one direction of the axis orthogonal direction and emits light having a spread in the axial direction;
A second light emitting means that is provided on a side of the probe and the sample along a direction inclined by a predetermined angle with the axial direction as a central axis, and emits light having a spread in the axial direction;
The aiming light forming means is configured to include, and the aiming light is formed at the intersecting position by intersecting light emitted from both the first light emitting means and the second light emitting means. Item 5. The position adjustment mechanism according to Item 4.   6. The position adjusting mechanism according to claim 5, wherein the wavelength of the light emitted from the second light emitting unit is set to a value different from the wavelength of the light emitted from the first light emitting unit.

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