JP2007022677A - Stocker device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a stocker device capable of isolating the inside of the stocker device from a fire breaking area when a fire breaks and preventing the fire from spreading between stories even when the stocker device penetrates through a plurality of stories. <P>SOLUTION: The stocker device comprises a body part 2 having a sealed structure provided inside a building having at least two stories, penetrated through a plurality of stories and insulated from the outside, a large number of storage shelves 3 provided within the body part 2, at least one ports 4, 5 having an opening part 21 which is opened in an outer surface of the body part 2 for delivering/taking out cargoes and a cargo loading table 22 provided inside/outside the body part 2 before/behind the opening part 21, a stacker crane 6 which is installed in the body part 2 in a traveling manner for carrying in the cargoes loaded on the ports 4, 5 onto the storage shelves 3 or carrying out the cargoes to the ports 4, 5 from the storage shelves 3, and a door member 7 capable of closing the opening part 21 of the ports 4, 5. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a stocker apparatus that is installed across a hierarchy in a clean room or the like.

  In a manufacturing process for producing a semiconductor integrated circuit, a liquid crystal display device, etc., at the stage of proceeding from one manufacturing process to the next manufacturing process, a substrate being manufactured is accommodated in a carrier or the like for time adjustment, and this carrier is It is temporarily stored in a stocker device installed in a clean room.

  The stocker device includes a plurality of storage shelves provided in the main body, one or more ports for loading and unloading luggage, a stacker crane installed in the main body so as to run freely.

  With the increase in the size of the substrate in the manufacturing process in recent years, this stocker apparatus is also increased in size. Therefore, a stocker device is used which is provided in a building having at least two floors or more and has a sealed main body that passes through a plurality of floors and is blocked from the outside, and storage shelves provided in large numbers in the main body. It has become like this.

  On the other hand, the clean room is a closed space because it requires a clean environment in which dust does not float, and therefore, special attention is paid to factory safety measures such as fire. In the case of a fire in a semiconductor factory or the like, measures are taken to prevent the spread of the fire and to prevent the fire damage by minimizing the fire spread by providing a fire door to prevent the fire from spreading.

  Fire doors are provided in units of floors and areas of factories, but the floors are usually separated by ceilings. However, staircases, elevators, etc. that pass between the levels cannot be separated by a ceiling, and these areas are provided with fire doors to isolate them from other areas.

  A fire door provided as a fire prevention measure for a general stocker device is disclosed in, for example, Japanese Patent Laid-Open No. 9-226908.

However, the stocker device that is installed in the production area of the production factory and penetrates between the floors is fire-proof due to structural restrictions such as the carrier (FOUP) loading / unloading port part inside the stocker device being composed of belt-type transfer means. It was difficult to install the door, and it was difficult to shut off the inside and outside of the stocker device with a fire door or the like. Therefore, unlike an elevator or a staircase, a stocker that penetrates between levels has a risk of promoting the spread of fire as a chimney extending between levels when a fire occurs.
JP-A-9-226908

  The problem to be solved is that, even if the stocker device extends across multiple floors, the inside of the stocker device and the fire occurrence area can be shut off in the event of a fire and the spread of fire between the layers can be prevented. It is a point to do.

  The present invention 1 is provided in a building having at least two floors or more, and has a sealed main body that is cut off from the outside through a plurality of floors, a plurality of storage shelves provided in the main body, and the main body. At least one or more ports having an opening on the outer side, an opening for loading and unloading the baggage, and a baggage placement table provided inside and outside the main body before and after the opening, and mounted on the port A stacker crane that is movably installed in the main body for carrying the loaded luggage into a storage shelf or carrying the luggage from the storage shelf to the port, wherein the opening of the port The most important feature is that a door member that can close the entire surface of the part is provided.

  A second aspect of the present invention is the first aspect of the present invention, wherein the load table is composed of an external conveyor unit installed outside the main body and an internal conveyor unit installed inside the main body, and constitutes both conveyor units. The gist is that the load placed on one conveyor unit is transferred to the other conveyor unit by rotation control of the rollers.

  According to a third aspect of the present invention, in the second aspect of the present invention, a gap in which the door member can be disposed is formed between the outer conveyor unit and the inner conveyor unit, and the opening member is formed by the door member positioned in the gap. The gist is that it can be closed.

  The gist of the present invention 4 is that, in the present invention 2 or 3, the two conveyor units are provided with a unit dedicated to warehousing and a unit dedicated to unloading provided in two rows.

  A gist of a fifth aspect of the present invention is that, in any one of the first to fourth aspects of the present invention, the door member is formed on a fire door member including a fire guard material.

  A sixth aspect of the present invention relates to any one of the first to fourth aspects, wherein the door member capable of closing the opening is a plate member, a groove provided around the opening to guide the plate member, An urging member that urges the plate member in a closing direction; and an electromagnetic adsorption member that is fixed in a state where the door member is opened. The gist is that the door member is closed by the urging member.

  This invention 7 in any one of this invention 1-4, the door member which can close the said opening part is a board member, the groove | channel provided in the circumference | surroundings of the said opening part so that the said board member may be guided, The present invention comprises a rack member fixed to a plate member and a pinion fixed to a drive motor, and the plate member is slidably driven in the closing direction by engagement of the rack member and the pinion. And

  The present invention 8 is the invention according to any one of the first to fourth aspects, wherein the door member capable of closing the opening is capable of rotating and driving the shutter that can be wound and fed out by rotating the winding shaft. The gist is that the motor and a groove provided around the opening so as to guide the shutter are provided, and the shutter can be extended toward the opening.

  When a fire occurs, the door member closes the opening of the port, so that the sealing structure of the main unit of the stocker device is maintained, and the stocker device penetrates between floors and spreads fire between floors. Can be blocked.

  Hereinafter, an embodiment of a stocker apparatus according to the present invention will be described with reference to the drawings.

  As shown in FIG. 1, the stocker apparatus 1 according to this embodiment includes a main body 2, a large number of storage shelves 3, a first floor port 5, a second floor port 4, a stacker crane 6, and a door member. 7.

  The main body 2 provided in the interior of the building forming the clean room is a box that penetrates the ceiling of the first floor from the first floor to the second floor, and is formed by a box that has a sealed structure that is blocked from the outside. ing. In the illustrated example, the main body 2 is provided through the first floor foundation 11 through the first floor 12 and further through the second floor 13 up to the building ceiling 14.

  A large number of storage shelves 3 are arranged in the vertical direction on both sides inside the main body 2. On this storage shelf 3, a carrier (package) 15 is placed as shown in the figure. A stacker crane 6 is movably disposed in a central space between the left and right storage shelves 3 of the main body 2.

  The stacker crane 6 has a configuration in which a stacker robot 18 that can be raised and lowered is provided on a stacker column 17 that includes wheels 16 for traveling. The stacker robot 18 is a hand device provided with a chuck for gripping the carrier 15 at the tip, and transfers the carrier 15 between a predetermined storage shelf and the internal conveyor unit (loading table) 24 of the ports 4 and 5. It is configured to be able to.

  The first-floor port 5 and the second-floor port 4 include an opening 21 that opens on the outer surface of the main body 2 and a luggage placing table 22 that is provided across the main body 2 before and after the opening 21. It is the composition which has. The luggage placing table 22 includes an external conveyor unit 23 installed outside the main body 2 and an internal conveyor unit 24 installed inside the main body 2. Between this external conveyor unit 23 and the internal conveyor unit 24, and outside the opening 21 of the main body 2, a gap 25 having no conveyor unit is formed.

  The outer conveyor units 23 of the first-floor port 4 and the second-floor port 5 are supported by suspension members 26 from the ceiling. On the ceiling above the outer conveyor unit 23, a ceiling transport vehicle 28 that can run along the rail 27 is provided. The overhead conveyance vehicle 28 can carry the carrier 15 from the outer conveyor unit 23 or can carry the carrier 15 to the outer conveyor unit 23. Such a second floor port 4 is provided on the second floor side in the illustrated example, and the first floor port 5 is provided on the first floor side, so that the carrier 15 enters through the ports 4 and 5 on each floor. Goods can be issued.

  And the door member 7 which can pass through the clearance gap 25 between the said conveyor units 24 and can close the opening part 21 of the main-body part 2 is provided. The configuration of the door member 7 will be described in detail with reference to FIG.

  The door member 7 includes a plate member 31, upper and lower slide grooves 32, 33, a biasing member 34 in a closing direction connected to the plate member 31, and an electromagnetic adsorption member 35 that holds the open state of the plate member 31. Become.

  The plate member 31 is formed of a fireproof material such as a fireproof panel or an iron plate, and has a size that can cover the entire surface of the opening 21 provided in the main body 2. The upper and lower slide grooves 32 and 33 are L-shaped angles attached to the upper and lower body portions 2 of the opening 21 so that the upper and lower portions of the plate member 31 can slide. The slide grooves 32 and 33 are arranged so that the plate member 31 can be positioned in the gap 25 between the external conveyor unit 23 and the main body 2. Moreover, the side groove | channel which the front-end | tip at the time of closing of the board member 31 contact | abuts is formed using the L-shaped angle, for example. Thereby, the plate member 31 can cover the opening 21 in an airtight state when the plate member 31 is closed. In addition, a pressing means for pressing the plate member 31 toward the opening 21 when closed is provided so that the plate member 31 can cover the opening 21 in a completely sealed state, or between the plate member 31 and the opening 21. A seal member may be disposed between them.

  The biasing member 34 is formed by a winding belt 37 having one end fixed to the plate member 31 and the other end fixed to the winding shaft of the winding member 38. The winding member 38 is, for example, a member that winds a spiral spring around a winding shaft and urges the winding shaft to rotate in the winding direction. The electromagnetic adsorption member 35 includes a magnetic adsorption magnetic member 39 fixed to the plate member 31 and a solenoid 41 fixed to the main body 2 via a solenoid support member 40.

  The plate member 31 constituting the normal fire door is slid to the right side in the figure by manual operation by an operator or the like. At this time, the solenoid 41 fixed to the main body 2 via the solenoid support plate 40 is energized and excited to magnetically attract the magnetic attracting magnetic member 39 fixed to the plate member 31. That is, the plate member 31 is held open while being positioned on the right side of the drawing.

  On the other hand, when the energization of the solenoid 41 is cut off, the plate member 31 slides the pair of slide grooves 32 and 33 in the vertical direction by the winding belt 37 because the winding member 38 such as a spiral spring winds the winding belt 37. Then, it moves to the left side of the drawing, and the plate member 31 holds the opening 21 of the port in a closed state. The energization of the solenoid 41 is performed in conjunction with the fire detection system, that is, the energization of the solenoid 41 is automatically performed by a fire detection signal. Note that when the carrier 15 is being transported on the load table 22, the energization cut-off timing for the solenoid 41 so that the plate member 31 closes the opening 21 after the carrier 15 passes through the opening 21. Is controlled.

  Next, the inner and outer conveyor units 23 and 24, which are preferable application examples for the door member 7, will be described with reference to FIGS.

  The conveyor units 23 and 24 are configured by attaching a driving roller 52 and a driven roller 53 to the left and right sides of a rectangular frame 51. As shown in FIGS. 3 and 4, the drive roller 52 has a load receiving roller 55 fitted on a rotating shaft 54 that is rotatably provided on the frame 51, and a toothed sprocket 56 fitted, etc. A large number (5 in the illustrated example) are arranged at intervals. Further, a timing belt 57 is wound around a sprocket 56 of the drive roller 52 via a tension sprocket 58 and a splot 60 fitted to the output shaft of the drive motor 59. The tension sprocket 58 generates tension on the timing belt 57 and is bolted to the frame 51 so that the mounting position can be moved.

  The driven roller 53 has the same configuration as that obtained by removing the driving sprocket and the timing belt from the driving roller 52, and rotates freely with the rotation of the rotating shaft.

  The load receiving roller of the driving roller 52 and the driven roller 53 has a periphery (outer layer) formed of urethane rubber 55a, and a flange 55b provided on the outer side surface thereof.

  The driving roller 52 is rotatably supported by the frame 51 so that its rotating shaft 54 is rotatable, and the timing belt 57 and the toothed sprocket 56 are engaged with each other and the driving motor 59 is rotated. As shown in FIG. 4, the carrier 15 is supported by a urethane rubber 55a provided on the outer layer of the load receiving roller 55 of the driving roller 52 and the driven roller 53, and the driving roller 52 and It is conveyed by the rotation of the driven roller 53.

  FIG. 5 is a top view of a port of a type in which two pairs of conveyor units 23A and 23B whose functions are dedicated to the warehousing part and the warehousing part are arranged symmetrically with respect to the central axis. As shown in FIG. 2, even if the port is a pair of conveyor units 23, the drive roller 52 can be switched between forward rotation and reverse rotation to perform warehousing and warehousing operations. The rotation direction switching time is wasted time, the conveyance efficiency is lowered, and processing cannot be completed. Therefore, normally, a pair of conveyor unit type ports dedicated to entry and exit in FIG. 5 are arranged in two rows.

  In this case, the opening 21 provided on the side wall of the main body 2 has a large width direction, but the longer plate member 31 is provided so that the opening 21 can be closed.

  6 and 7 show another embodiment of a fireproof door member. The fireproof door member 70 includes a plate member 71 formed of a fireproof material, a rack 72 provided on the plate member 71, and a pinion 74 fixed to the rotation shaft of the drive motor 73. When the pinion 74 is engaged with the rack 72 and the drive motor 73 is rotated forward and backward, the plate member 71 slides up and down in the door side groove 75 provided on the walls on both sides of the opening 21 provided in the main body 2. Open and close. A door lower groove (not shown) is provided below the opening 21. When the door member is closed, airtightness is secured by the side grooves (slide grooves) 75 and the lower groove on both sides. Moreover, the closing drive of the door member 70 by the drive motor 73 is interlocked with the fire detection system, and is automatically performed together with the fire detection.

  FIG. 8 shows still another embodiment of a door member for fire prevention. The door member 80 includes a fire shutter 81 that can be rolled up and a winding device 82. The hoisting device 82 rotates the take-up shaft 83 via the timing belt 85 by the drive motor 84 to wind up or feed out the fire shutter 81. The shutter 81 slides up and down in side grooves (sliding grooves) (not shown) for fire-proof shutters provided on both side walls to perform an opening / closing operation. A lower groove (not shown) for the fire shutter is provided at the lower part of the port. When the fire shutter 81 is closed, airtightness by the fire shutter 81 is ensured by the side grooves and the lower groove on both sides. Further, the drive-out driving of the fire prevention shutter 81 is interlocked with the fire detection system, and is automatically performed together with the fire detection.

  Next, the operation of the stocker apparatus 1 having the above configuration will be described. In FIG. 1, in a normal operation, the fireproof door member 7 is kept open. In the door member 7 of FIG. 2, the plate member 31 is opened by an operator's hand, the electrodeposition member 39 of the plate member 31 is attracted to the solenoid 40, and the open state of the plate member 31 is maintained. .

  Carrier loading / unloading to / from the stocker apparatus 1 is performed via port 5 for the first floor and port 4 for the second floor. In the case of delivery on the second floor, the stacker crane 6 carries the carrier 15 out of the specific storage shelf 3 and places the carrier 15 on the internal conveyor unit 24 of the port 4. A pair of inner and outer conveyor units 23 and 24 are driven in the carry-out direction, and the carrier 15 moves onto the outer conveyor unit 23. At this time, since the gap 25 between the conveyor units 23 and 24 is small, the carrier 15 can easily move between the inner and outer conveyor units 23 and 24. The carrier 15 on the external conveyor unit 23 is transported to the processing apparatus of the next process by the ceiling transport vehicle 28.

  In the case of warehousing on the second floor, the carrier 15 is carried by the ceiling transport vehicle 28 and placed on the external conveyor unit 23. A pair of inner and outer conveyor units 23 and 24 are driven in the carry-in direction, and the carrier 15 moves onto the inner conveyor unit 24. At this time, since the gap 25 between the conveyor units 23 and 24 is small, the carrier 15 can easily move between the inner and outer conveyor units 23 and 24. Then, the stacker crane 6 carries the carrier 15 on the internal conveyor unit 24 to the specific storage shelf 3.

  In this way, the carrier 15 is reliably conveyed through the gap 25 in a state where the door member 7 with respect to the opening 21 is opened.

  Next, when the fire detection system is activated and a fire in the building is detected, the plate member 31 is driven in the closing direction by the detection signal. In the case of the electromagnetic adsorption type door member 7 of FIG. 2, the energization of the solenoid 41 is cut off, and the plate member 31 is automatically pulled to the closed state by the urging member 34. At this time, an airtight state is maintained between the plate member 31 and the opening 21 by the slide grooves 32 and 33 and a side groove (not shown).

  In the case of the up-and-down sliding door member 70 of FIGS. 6 and 7, when the fire detection system is activated and a building fire is detected, the plate member 71 is driven downward by the detection signal. At this time, the airtightness by the plate member 71 is maintained between the plate member 71 and the opening 21 by the side grooves 75 and the lower grooves on both sides.

  In the case of the shutter-type door member 80 of FIG. 8, when the fire detection system is activated and a fire in the building is detected, the shutter 81 is extended downward by the detection signal. At this time, in the closed state of the fire shutter 81, the air tightness by the fire shutter 81 is maintained by the three grooves. Moreover, since the door member itself is formed of a fireproof material, the fireproof property is also excellent.

  In the stocker apparatus 1 described above, a stocker body that is hermetically sealed over the first floor and the second floor is provided in a building having two or more floors, and a port for loading and unloading required on the first floor and / or the second floor. Therefore, it is possible to store and retrieve on each floor, to arrange a large stocker, and to effectively use a space and store a large amount of carriers.

  In this way, when the stocker body is provided over a plurality of floors, it communicates with other floors through the opening for loading and unloading. Therefore, in the event of a fire, the opening is automatically closed with a door member. Thereby, the sealed structure of the stocker body is maintained, and communication of hot air through the opening is prevented.

  At this time, the load mounting table provided in the port is composed of an external conveyor unit and an internal conveyor unit, and the door member enters the gap between the two and closes the opening, so that the opening is sealed by the door member. Is certain.

  On the other hand, since the luggage placing table is composed of an external conveyor unit and an internal conveyor unit and is driven in conjunction with the carry-in direction or the carry-out direction, the carrier is smoothly transported through the gap.

  Further, in the case of the electromagnetic adsorption type door member 7 of FIG. 2, the case of the up / down sliding type door member 70 of FIGS. 6 and 7, the case of the shutter type door member 80 of FIG. Alternatively, both sides and the tip side of the shutter are configured to enter the groove, and the airtight state with respect to the opening can be satisfactorily maintained.

  Next, in order to confirm the above effect in the present embodiment, a comparative example was examined. In FIG. 9, the conveyor unit 101 of the port is configured as a belt-type transfer device integrated with the inside and outside. At this time, the door member 102 with respect to the opening is lowered to the top of the belt type transfer device to close the opening.

  Since the door member 102 does not close the entire opening, the inside and outside of the stocker device communicate with each other via the belt-type transfer device, and the door member 102 is not sufficient for shutting off the stocker device body in the event of a fire. I understood.

Moreover, although this invention was demonstrated based on suitable embodiment, this invention can be changed in the range which does not exceed the meaning.
That is, the stocker device may be formed from the first floor to the third floor, or may be formed from the second floor to the third floor.

  In addition, the ports provided in the stocker device are not limited to those provided on each floor, and may be a stocker device extending from the first floor to the second floor, and the port may be provided only on the first floor. It is possible to prevent hot air from being sent from the first floor to the second floor via the stocker device.

  The pair of inner and outer conveyor units are not limited to those using rollers, but may be a pair of inner and outer conveyor units using a conveyor belt.

  The present invention is not limited to a stocker apparatus installed across a hierarchy in a clean room, but can be applied to a stocker apparatus in a general factory as long as it is a closed stocker apparatus formed over a plurality of floors.

It is side surface sectional drawing of the stocker apparatus of this invention. It is a perspective view which shows the structure of the port in the stocker apparatus of this invention. It is a side view from the inner side of the luggage loading table of a port. It is a front view of the luggage loading table of a port. It is a top view of the luggage loading table of a port. It is a perspective view which shows the structure of the other port in the stocker apparatus of this invention. It is sectional drawing of the door apparatus of FIG. It is a perspective view which shows the structure of the further another port in the stocker apparatus of this invention. It is side surface sectional drawing of the stocker apparatus of a comparative example.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Stocker apparatus 2 Main-body part 3 Storage shelf 4 Port for 2nd floors 5 Port for 1st floors 6 Stacker crane 15 Carrier 21 Opening part 22 Article mounting base 23 External conveyor unit 24 Internal conveyor unit 25 Gap 31 Plate member 34 Energizing member 35 Electromagnetic Adsorption member 70 Door member 71 Plate member 72 Rack 73 Motor 74 Pinion 75 Slide groove 80 Door member 81 Shutter 82 Winding device 84 Motor

Claims (8)

  It is provided in a building with at least two floors or more, and has a sealed main body that is cut off from the outside through a plurality of floors, a large number of storage shelves in the main body, and an opening on the outer surface of the main body. And at least one port having an opening for loading and unloading the luggage, and a luggage placing table provided inside and outside the main body before and after the opening, and a storage shelf for storing the luggage placed on the port A stacker crane that is movably installed in the main body for carrying a load from a storage shelf to the port, and closing the entire surface of the opening of the port. A stocker device provided with a door member that can be freely moved.   The load carrying table is composed of an external conveyor unit installed outside the main body unit and an internal conveyor unit installed inside the main body unit, and one conveyor unit is controlled by rotation control of rollers constituting both conveyor units. 2. The stocker device according to claim 1, wherein the stocker device is configured to transfer a load placed thereon onto the other conveyor unit.   The stocker device according to claim 2, wherein a gap in which the door member can be disposed is formed between the outer conveyor unit and the inner conveyor unit, and the opening portion can be closed by the door member positioned in the gap. .   4. The stocker device according to claim 2, wherein each of the conveyor units is provided with a unit dedicated to warehousing and a unit dedicated to unloading in two rows. 5.   The said door member is a stocker apparatus in any one of Claims 1-4 currently formed in the fireproof door member containing a fireproof material.   A door member capable of closing the opening, a plate member, a groove provided around the opening to guide the plate member, and a biasing member that biases the plate member in a closing direction; An electromagnetic attracting member that is fixed in a state where the door member is open, and when the attracting of the electromagnetic attracting member is released, the door member is closed by the biasing member. The stocker apparatus in any one of -4.   A door member capable of closing the opening is a plate member, a groove provided around the opening to guide the plate member, a rack member fixed to the plate member, and a shaft fixed to the drive motor. The stocker device according to any one of claims 1 to 4, further comprising a pinion configured to slide the plate member in a closing direction by meshing between the rack member and the pinion. A door member capable of closing the opening is capable of winding and unwinding by rotation of the winding shaft, a motor for driving the winding shaft to rotate, and a periphery of the opening so as to guide the shutter The stocker device according to any one of claims 1 to 4, further comprising a groove provided in the shutter, wherein the shutter can be extended toward the opening.

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