JP2006349942A - Image blur correcting device and imaging apparatus equipped therewith - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an image blur correcting device capable of accurately moving an imaging device, and an imaging apparatus equipped therewith. <P>SOLUTION: The image blur correcting device has: a fixed member (12); a movable member (14) to which the imaging device (16) is attached; a support means (18) supporting the movable member on the fixed member; at least three driving coils (20) arranged on the movable member; a position sensor (24) arranged on the fixed member; at least three driving magnets (22) attached to positions opposed to the driving coils on the fixed member respectively; a detection means (34) detecting the deflection of an optical axis; and a control means (36) driving the movable member by making a current flow to the driving coils on the basis of the deflection of the optical axis and the position of the movable member with respect to the fixed member, and restraining the blur of the image formed on the imaging device. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to an image shake correction apparatus and an image pickup apparatus including the same, and more particularly to an image shake correction apparatus that suppresses image shake formed on an image pickup element by driving the image pickup element and an image pickup apparatus including the image shake correction apparatus. About.

  There has been proposed a camera provided with an image blur correction device of a type in which an image sensor such as a CCD is displaced to suppress blur of an image formed on the image sensor. Japanese Patent Application Laid-Open No. 2000-307937 (Patent Document 1) describes an imaging apparatus having such a camera shake prevention mechanism. In this image pickup apparatus, the image pickup device is driven by attaching the image pickup device to the L-shaped member via the first actuator and attaching the L-shaped member to the image pickup device main body via the second actuator. is doing. That is, the first actuator drives the imaging element in the first direction with respect to the L-shaped member, and the second actuator moves the L-shaped member in the second direction with respect to the imaging device main body. To drive. The image sensor is translated to an arbitrary position by combining the displacements in the first and second directions.

  Japanese Patent Laid-Open No. 6-46322 (Patent Document 2) describes an image pickup apparatus with an image stabilization function. In this image pickup apparatus, the image pickup device is slidably supported with respect to two orthogonal bars, and is driven in each direction by the repulsive force of an electromagnet and a permanent magnet attached to each bar.

  Furthermore, Japanese Patent Laid-Open No. 2003-110919 (Patent Document 3) describes an imaging device. In this imaging apparatus, the imaging element includes a base plate, a first slider that moves in a horizontal direction with respect to the base plate, and a second slider that moves in a direction perpendicular to the moving direction of the first slider. It is moved by the driving device. Each slider is driven in each direction by an actuator using a piezoelectric element.

  Japanese Patent Laying-Open No. 2004-77686 (Patent Document 4) describes a shake correction camera. In this shake correction camera, one set of leaf springs configured to be elastically deformable in a first direction and another set of leaf springs configured to be elastically deformable in a second direction orthogonal to the first direction. Thus, the CCD image element is elastically supported. The CCD image element is displaced by being pressed in each direction by an actuator provided with a piezoelectric element.

  Furthermore, Japanese Patent Application Laid-Open No. 2004-77711 (Patent Document 5) describes a camera with a camera shake correction function. In this camera, the image sensor is supported so as to be rotatable about two axes that are orthogonal to each other and are parallel to the light receiving surface of the image sensor. Image blurring is corrected by rotating the imaging element about these two axes by the piezoelectric element.

JP 2000-307937 A JP-A-6-46322 JP 2003-110919 A JP 2004-77686 A JP 2004-77711 A

  In each of the image shake correction apparatuses described in Patent Documents 1 to 5 described above, the image pickup element is supported so as to be slidable along two orthogonal axes. The image sensor is translated to an arbitrary position by combining the displacements along these two axes. However, in order to slidably support the image sensor along a certain axis, it is necessary to provide a clearance for allowing the image sensor to slide, and the image sensor can be slid along two axes. In the case of supporting in this way, this clearance is added. For this reason, there is a problem in that the backlash of the mechanism that supports the image sensor increases and the positioning accuracy of the image sensor decreases. Alternatively, when a load is applied to the mechanism that supports the image sensor in advance and the play is pressed down, the sliding resistance of the support mechanism increases, and there is a problem that the power required to drive the image sensor increases.

Accordingly, an object of the present invention is to provide an image blur correction apparatus capable of moving an image pickup element with high accuracy and an image pickup apparatus including the same.
Another object of the present invention is to provide an image blur correction apparatus that can move an image sensor with a small force, and an imaging apparatus including the same.

  In order to solve the above-described problems, an image shake correction apparatus according to the present invention includes a fixed member, a movable member to which an imaging element is attached, and an arbitrary direction within a plane in which the movable member is parallel to the light receiving surface of the imaging element. Support means for supporting the movable member with respect to the fixed member, at least three driving coils disposed on either the fixed member or the movable member, and either the fixed member or the movable member. Each of the driving members receives a driving force by a magnetic field generated by each driving coil on at least three position sensors disposed on the member on which the driving coil is disposed and the other of the fixed member or the movable member. At least three drive magnets mounted respectively at positions facing the coil for use, shake detection means for detecting shake of the optical axis of light incident on the light receiving surface of the image sensor, and the shake detection means Thus, an image formed on the image pickup device by driving the movable member by causing a current to flow through each driving coil based on the detected deflection of the optical axis and the position of the movable member relative to the fixed member detected by the position sensor. And a control means for suppressing the fluctuation of the image.

  In the present invention configured as described above, the shake of the optical axis of the light incident on the light receiving surface of the image sensor is detected by the shake detection means. The position sensor detects the position of the movable member with respect to the fixed member. The control means causes a current to flow through each driving coil based on the shake of the optical axis detected by the shake detection means and the position of the movable member detected by the position sensor. When a current flows through the driving coil, a magnetic field is generated, and the driving magnet receives a driving force by the magnetic field. By this driving force, the movable member supported by the support means is driven, and the image sensor attached to the movable member is moved, thereby suppressing the shake of the image formed on the image sensor.

  According to the present invention configured as described above, the movable member to which the imaging element is attached is supported by the supporting means that supports the movable member so that the movable member can move in an arbitrary direction within a plane parallel to the light receiving surface of the imaging element. Therefore, the backlash of the support means does not accumulate as in the case where the movable member is movably supported by the synthesis of sliding along two orthogonal axes, and the image sensor is moved with high accuracy. be able to.

  In the present invention, it is preferable that the support member further includes a suction yoke attached to a member of the fixed member or the movable member to which the drive magnet is not attached, and which attracts the movable member and the fixed member. Is composed of at least three spherical bodies sandwiched between a fixed member and a movable member.

  In the present invention configured as described above, the movable member is attracted to the fixed member by the magnetic force exerted by the drive magnet and the attracting yoke. At least three spherical bodies are sandwiched between the movable member and the fixed member, and the movable member is supported in parallel to the fixed member. The movable member can move in an arbitrary direction when the spherical body rolls on the fixed member.

  According to the present invention configured as described above, since the movable member is moved by rolling the spherical body, the sliding resistance accompanying the movement of the movable member hardly acts, and the movable member is moved with a small driving force. Can do. Further, since the movement of the movable member in any direction is allowed by rolling the spherical body in any direction, the backlash accumulates and becomes large like a support means having a structure that combines movements in two orthogonal directions. There is no.

In the present invention, preferably, at least one of the drive magnets is disposed so as to receive a drive force in the first axial direction by a magnetic field generated by a drive coil opposed thereto, and the other drive magnets are The driving coils facing each other are arranged so as to receive a driving force in a direction different from that of the first axis by a magnetic field generated by each driving coil.
In the present invention configured as described above, the movable member receives a driving force in the first axial direction and a driving force in a direction different from the first axial direction, and is driven in an arbitrary direction.
In the present invention, preferably, three driving coils are arranged substantially in a straight line, and two of the driving magnets facing the driving coils are driven in the first axial direction by a magnetic field generated by the driving coils. The other driving magnet is arranged to receive a driving force in a second axial direction substantially perpendicular to the first axis by a magnetic field generated by a driving coil facing the other driving magnet. ing.

In the present invention configured as described above, the movable member is driven in an arbitrary direction by receiving the driving force in the first axial direction and the driving force in the second axial direction substantially orthogonal thereto.
According to the present invention configured as described above, since the driving force in the first axial direction and the driving force in the second axial direction can be determined independently, calculation in the control means can be simplified. it can.

In the present invention, it is preferable that the control unit generates a current to be supplied to each driving coil based on information on a focal length of the imaging lens for forming an image on the imaging element or an offset of an initial position of the imaging element. to correct.
According to the present invention configured as described above, even when the focal length or the like of the imaging lens for forming an image on the imaging element is changed by the zoom mechanism or the like, the image shake is effectively suppressed. Can do.

In addition, an image shake correction apparatus according to the present invention includes an image pickup device provided on one surface, at least three aligned drive magnets provided on the other surface, a movable member, and the other A fixing member composed of at least three driving coils respectively provided at positions corresponding to the driving magnets on one surface facing the surface, and position detecting means arranged in the driving coils. And an angular velocity that detects an angular velocity detection value by detecting a sliding means that is slidable between the movable member and the fixed member, and that is slidable when the movable member is moved, and an angular velocity component in which the optical axis is inclined due to vibration. It comprises a detection means, a drive coil, a position detection means, and a drive magnet, and is arranged at least three in order to obtain a predetermined position signal corresponding to the magnetic field intensity from the position detection means, Drive correction signal is supplied Based on at least the actuator that moves to a predetermined correction position to correct the shake of the movable member by the thrust generated by the interaction between the magnetic field of the driving coil and the driving magnet, the angular velocity detection value, and the predetermined correction signal, Control means for obtaining a corrected position command signal and supplying a drive correction signal for correcting shake to the actuator from the position command signal and the position signal. The actuator is a movable member under the control of the control means. Is movable in two directions, the X direction and the Y direction.
In the present invention, preferably, three driving magnets are arranged, two of the driving magnets at the two ends receive a vertical driving force, and the central driving magnet receives a horizontal driving force. Are arranged as follows.
The image pickup apparatus of the present invention includes the image shake correction apparatus of the present invention, and a lens unit including an image pickup lens that forms an image on an image sensor attached to a movable member of the image shake correction apparatus. It is a feature.

According to the image shake correction apparatus of the present invention and the imaging apparatus including the same, the imaging element can be moved with high accuracy.
In addition, according to the image shake correction apparatus of the present invention and the imaging apparatus including the same, the imaging element can be moved with a small force.

Next, embodiments of the present invention will be described with reference to the accompanying drawings.
An imaging apparatus according to an embodiment of the present invention will be described with reference to FIGS. FIG. 1 is a cross-sectional view of an imaging apparatus according to an embodiment of the present invention.

  As shown in FIG. 1, an imaging apparatus 1 according to an embodiment of the present invention includes a lens unit 2 and a camera body 4. The lens unit 2 includes a lens barrel 6 and a plurality of imaging lenses 8 arranged in the lens barrel. The camera body 4 also includes an actuator 10 that moves a CCD 16 (charge-coupled device), which is an image pickup device, within a predetermined plane, and a camera body 4 that detects the shake of the optical axis of light incident on the CCD 16. And gyroscopes 34a and 34b, which are shake detection means for detecting vibrations. Among these, at least the CCD 16, the actuator 10, and the gyros 34a and 34b function as an image blur correction device. The imaging apparatus 1 according to the embodiment of the present invention detects vibrations by the gyros 34 a and 34 b, operates the actuator 10 based on the detected vibrations, moves the CCD 16, and captures an image focused on the light receiving surface of the CCD 16. The shake is corrected. In this embodiment, piezoelectric vibration gyros are used as the gyros 34a and 34b which are detection means for detecting the angular velocity, but an arbitrary sensor such as an accelerometer, a laser gyro, or a mechanical gyro is used as the detection means. Can be used.

  The focus adjustment and the change of the focal length are made possible by moving a plurality of imaging lenses 8 inside. The lens unit 2 is attached to the camera body 4 and configured to form incident light on the light receiving surface of the CCD 16.

Next, the actuator 10 will be described with reference to FIGS. FIG. 2 is a side view of the actuator 10. 3 is a front view of the moving substrate 14 to which the CCD 16 is attached, and FIG. 4 is a rear view thereof. FIG. 5 is a front view of the fixed plate 12 that supports the movable substrate 14. As shown in FIGS. 2 to 5, the actuator 10 includes a fixed plate 12 that is a fixed member fixed in the camera body 4, and a movable substrate that is a movable member supported so as to be movable with respect to the fixed plate 12. 14 and four spherical steel balls 18 which are support means for supporting the moving substrate 14. Further, the actuator 10 includes three driving coils 20a, 20b, 20c attached to the fixed plate 12, and three driving parts attached to the moving substrate 14 at positions corresponding to the driving coils 20a, 20b, 20c, respectively. Magnets 22a, 22b, and 22c, and hall elements 24a, 24b, and 24c, which are position sensors serving as position detection means, disposed inside the drive coils 20a, 20b, and 20c. In addition, the actuator 10 uses the suction yoke 26 attached to the fixed plate 12 and the magnetic force of each drive magnet to the fixed plate 12 so that the moving substrate 14 is attracted to the fixed plate 12 by the magnetic force of each drive magnet. And a back yoke 28 attached to the back side of each drive magnet so as to be effectively directed to the direction. Further, the actuator 10 includes an attracting magnet 30 for attracting the steel ball 18 to the moving substrate 14, and a steel ball attached to the fixed plate 12 so that the steel ball 18 rolls smoothly between the fixed plate 12 and the moving substrate 14. And a receiver 32.
Alternatively, the support means may be a sliding means having a structure in which the fixed plate 12 and the moving substrate 14 can be smoothly slid on a smooth surface.

  Further, as shown in FIG. 1, the actuator 10 includes each drive coil 20a based on the vibration detected by the gyros 34a and 34b and the positional information of the moving substrate 14 detected by the Hall elements 24a, 24b and 24c. , 20b, 20c has a controller 36 which is a control means for controlling the current to flow. Further, a flexible cable 12 a for transmitting a signal from the CCD 16 to the fixed plate 12 side is connected between the movable substrate 14 and the fixed plate 12.

The actuator 10 moves the moving substrate 14 in a plane parallel to the light receiving surface of the CCD 16 with respect to the fixed plate 12 fixed to the camera main body 4 and forms an image on the light receiving surface even when the camera main body 4 vibrates. It is driven so that the image is not disturbed.
As shown in FIG. 5, the fixed plate 12 has a substantially rectangular shape, and three driving coils 20a, 20b, and 20c are arranged in a substantially straight line in the horizontal direction on the front surface thereof. In the present embodiment, the driving coils 20a and 20b at both ends have a conducting wire wound in a substantially square shape and are used for driving in the vertical direction. The driving coil 20c disposed between the driving coils 20a and 20b has a conducting wire wound in a substantially rectangular shape and is disposed so that its long side faces in the vertical direction, and is used for horizontal driving. is there.

  The moving substrate 14 has a substantially rectangular shape whose long side is shorter than the fixed plate 12, and is aligned so that the center point of the fixed plate 12 and the center point of the moving substrate 14 are substantially overlapped in parallel with the fixed plate 12. Has been placed. A CCD 16 is attached to the center of the front side of the moving substrate 14. Rectangular driving magnets 22a, 22b, and 22c are attached to positions on the back side of the moving substrate 14 corresponding to the driving coils 20a, 20b, and 20c, respectively. The driving magnets 22a and 22b at both ends are respectively attached so that the long sides thereof are directed in the vertical direction, and the central driving magnets 22c are provided so that the long sides thereof are directed in the horizontal direction. Further, the drive magnet 22c has a shorter side and is larger than the drive magnets 22a and 22b. In the present specification, the position corresponding to the driving coil means a position where the influence of the magnetic field formed by the driving coil is substantially reached.

  Further, the drive magnets 22a and 22b at both ends are magnetized so as to be polarized in the vertical direction as shown in FIG. 4, and the magnetic neutral axis C is configured to face in the horizontal direction. . Thus, the driving magnets 22a and 22b receive a vertical driving force when a current flows through the corresponding driving coils. On the other hand, the central drive magnet 22c is magnetized so as to be polarized in the horizontal direction as shown in FIG. 4, and the magnetic neutral axis C is oriented in the vertical direction. Thus, the driving magnet 22c receives a horizontal driving force when a current flows through the corresponding driving coil.

  In the present specification, the magnetic neutral axis C is a magnetic property in which the polarity changes from the middle S pole to the N pole when both ends of the long side of the drive magnet 22 are set to the S pole and the N pole, respectively. A line connecting points that are neutral in nature. Therefore, in the present embodiment, the magnetic neutral axis C is located in a linear region that bisects the long side of each rectangular drive magnet.

  Further, a back yoke 28 for efficiently directing the magnetic flux of each driving magnet toward the fixed plate 12 is attached to the opposite surface of each driving magnet, that is, the front surface of the moving substrate 14. Yes. The back yoke 28 has a single elongated rectangular shape, and is attached with the long sides facing in the horizontal direction so as to overlap the drive magnets 22a, 22b, and 22c. Further, the back yoke 28 is attached to the lower side of the CCD 16, that is, so that the CCD 16 straddles the back yoke 28.

  In addition, on the opposite side of each driving coil of the fixed plate 12, that is, on the back side of the fixed plate 12, one elongated rectangular suction yoke 26 is attached. The attraction yoke 26 is attached to a position where it overlaps with each of the driving magnets 22a, 22b, and 22c so that the long side thereof is directed in the horizontal direction. The moving substrate 14 is attracted to the fixed plate 12 by the magnetic force exerted by each driving magnet on the attracting yoke 26. In the present embodiment, the fixed plate 12 is made of a non-magnetic material so that the magnetic lines of force of the drive magnet 22 reach the attraction yoke 26 efficiently.

  As shown in FIG. 5, Hall elements 24a, 24b, and 24c are disposed inside the drive coils 20a, 20b, and 20c, respectively. Each Hall element is arranged so that the sensitivity center point S is located on the magnetic neutral axis C of each drive magnet when the movable substrate 14 is in the neutral position. In the present embodiment, the sensitivity center point S of the Hall element means a point at which the output of the Hall element becomes zero when the magnetic neutral axis C of the driving magnet is positioned to pass through that point.

  6 is a diagram showing a magnetic field distribution between the movable substrate 14 and the fixed plate 12 in the VI-VI cross section of FIG. As shown in FIG. 6, for example, the magnetic field formed by the driving magnet 22 a attached to the moving substrate 14 reaches the attracting yoke 26 on the back side of the fixed plate 12, and the moving substrate 14 is attached to the fixed plate 12. Adsorb. Further, the magnetic field generated by the driving magnet 22a generates a driving force in the vertical direction (left-right direction in FIG. 6) on the driving magnet 22a due to the interaction with the magnetic field generated by the current flowing through the driving coil 20a. Effect. Further, the magnetic field generated by the driving magnet 22a is detected by the Hall element 24a, and the position of the driving magnet 22a with respect to the Hall element 24a is detected. The other drive magnets 22b and 22c also form a similar magnetic field.

  7 to 9 are diagrams for explaining the relationship between the movement of the driving magnet 22a and the signal output from the Hall element 24a. As shown in FIGS. 7A and 7B, the drive magnet 22a is magnetized so as to be polarized to the south pole and the north pole in the longitudinal direction of the rectangle, and also in the thickness direction thereof, the south pole. , And magnetized so as to be polarized to the north pole. As shown in FIG. 7, when the sensitivity center point S of the Hall element 24a is located on the magnetic neutral axis C of the driving magnet 22a, the output signal from the Hall element 24a is zero. When the driving magnet 22a moves together with the moving substrate 14, the sensitivity center point of the Hall element 24a deviates from the magnetic neutral axis of the driving magnet 22a, and an image shift occurs, the output signal of the Hall element 24a changes. As shown in FIG. 8, when the driving magnet 22a moves in a direction perpendicular to the magnetic neutral axis C, that is, in the Y-axis direction, the Hall element 24a generates a sinusoidal signal. Therefore, when the amount of movement is small, the Hall element 24a outputs a signal that is substantially proportional to the distance of movement of the driving magnet 22a. In the present embodiment, when the moving distance of the driving magnet 22a is within about 3% of the length of the long side of the driving magnet 22a, the signal output from the Hall element 24a is the sensitivity center of the Hall element 24a. This is approximately proportional to the distance between the point S and the magnetic neutral axis C of the driving magnet 22a. In the present embodiment, the actuator 10 operates within a range in which the output of each Hall element is approximately proportional to the distance.

  FIGS. 9A to 9C show a case where the magnetic neutral axis C of the driving magnet 22a is positioned on the sensitivity center point S of the Hall element 24a. As shown in FIG. The output signal from the Hall element 24a is zero even when the magnet 22a rotates or when the driving magnet 22a moves in the direction of the magnetic neutral axis C (X-axis direction) as shown in FIG. 9C. It is. FIGS. 9D to 9F show the case where the magnetic neutral axis C of the driving magnet 22a deviates from the sensitivity center point S of the Hall element 24a. The sensitivity center point S and the magnetic neutral axis line are shown in FIGS. A signal proportional to the size of the distance r from C is output from the Hall element 24a. Therefore, if the distance r between the sensitivity center point S and the magnetic neutral axis C is the same, the drive magnet 22a moves in a direction perpendicular to the magnetic neutral axis C as shown in FIG. When the driving magnet 22a is translated and rotated as shown in FIG. 9E, or when the driving magnet 22a is translated in an arbitrary direction as shown in FIG. 9F, a signal having the same magnitude is transmitted from the Hall element 24a. Is output.

  Although the Hall element 24a has been described here, the other Hall elements 24b and 24c also output similar signals based on the positional relationship with the corresponding driving magnets 22b and 22c. For this reason, based on the signals detected by the Hall elements 24a, 24b, and 24c, the position where the movable substrate 14 is translated and rotated with respect to the fixed plate 12 can be specified.

  By the way, the four steel balls 18 as the support means described above are respectively arranged at the four corners on the back side of the moving substrate 14. As shown in FIGS. 2 to 4, each steel ball 18 is attracted to the moving substrate 14 by four attracting magnets 30 attached to the front side of the position corresponding to each steel ball 18 of the moving substrate 14. Yes. Each steel ball 18 is attracted to the moving substrate 14 by the attracting magnet 30, and the moving substrate 14 is attracted to the fixed plate 12 by each driving magnet, so that each steel ball 18 is interposed between the fixed plate 12 and the moving substrate 14. It will be pinched. As a result, the movable substrate 14 is supported on a plane parallel to the fixed plate 12, and by allowing the steel balls 18 to roll while being sandwiched, the movable substrate 14 is allowed to translate and rotate in any direction with respect to the fixed plate 12. Is done.

  Further, two elongated rectangular steel ball receivers 32 are attached to the front side of the fixed plate 12 so as to contact the steel balls 18. When the moving substrate 14 moves in a state where the steel balls 18 are sandwiched between the fixed plate 12 and the moving substrate 14, each steel ball 18 rolls on the steel ball receiver 32. For this reason, even when the movable substrate 14 moves relative to the fixed plate 12, no large sliding friction occurs between them. Preferably, the surfaces of the moving substrate 14 and the steel ball receiver 32 are formed smoothly so that the rolling resistance between the steel ball 18 and the moving substrate 14 and between the steel ball 18 and the steel ball receiver 32 is reduced, and the surface hardness is increased. The moving substrate 14 and the steel ball receiver 32 are preferably made of a high material.

  In the present embodiment, since the moving substrate 14 is made of a nonmagnetic material, the magnetic lines of force of the attracting magnet 30 efficiently reach the steel ball 18. Moreover, in this embodiment, although the steel sphere is used as the steel ball 18 which is a support body, the steel ball 18 does not necessarily need to be a sphere. That is, if the portion that contacts the steel ball receiver 32 during the operation of the actuator 10 has a substantially spherical shape, it can be used as the steel ball 18. In addition, in this specification, such a form is called a spherical body.

  Next, the control of the actuator 10 will be described with reference to FIG. FIG. 10 is a block diagram showing signal processing in the controller 36. The controller 36 includes an X-axis control unit 36b that controls movement of the moving substrate 14 in the X-axis direction that is the horizontal direction, and a Y-axis control unit 36a that controls movement of the moving substrate 14 in the Y-axis direction that is the vertical direction. Have. Further, as shown in FIG. 10, the vibration of the camera body 4 is detected momentarily by the two gyros 34a and 34b, and is input to arithmetic circuits 38a and 38c which are CCD position command signal generating means built in the controller 36. The In the present embodiment, the gyro 34a is configured and arranged to detect the angular velocity ωy of the pitching motion of the camera body 4, and the gyro 34b is detected to detect the angular velocity ωx of the yawing motion.

  The arithmetic circuits 38a and 38c are configured to generate CCD position command signals ra, rb, and rc for commanding in time series the position to which the CCD 16 should be moved based on the angular velocity input from the gyro 34a and 34b every moment. ing. By moving the CCD 16 momentarily according to the CCD position command signal obtained in this way, for example, even when the camera body 4 vibrates during the exposure for photographing, the CCD 16 is aligned with the light receiving surface of the CCD 16 on the moving substrate 14. A focused image is stabilized without being disturbed.

  The horizontal component rc of the CCD position command signal generated by the arithmetic circuit 38c is input to the differential circuit 40c, and is used for driving necessary for moving the CCD 16 to the position commanded by the position command signal by this circuit. The current flowing through the coil 20c is generated. Similarly, the vertical components ra and rb of the CCD position command signal generated by the arithmetic circuit 38a are input to the differential circuits 40a and 40b, and currents flowing through the driving coils 20a and 20b are respectively generated by these circuits. It is comprised so that.

  The arithmetic circuit 38c includes an integration circuit 42c, a multiplication circuit 44c, and an addition circuit 46c. The integrating circuit 42c is configured to calculate the yaw angle θx by time-integrating the angular velocity ωx of the yawing motion detected by the gyro 34b. The multiplication circuit 44c is configured to multiply the yaw angle θx calculated by the integration circuit 42c by a predetermined proportional coefficient Kx generated by the proportional coefficient generation means 48c. The adder circuit 46c is configured to add the offset correction coefficient Ex generated by the offset correction coefficient generation means 50c to the output Kxθx of the multiplication circuit 44c. The arithmetic circuit 38c outputs the value Kxθx + Ex (= rc) thus obtained to the differential circuit 40c.

  The proportional coefficient generation unit 48c is configured to generate a proportional coefficient Kx corresponding to the distance that the CCD 16 should move in order to prevent image blur based on the focal length of the lens unit 2 described above. That is, due to the zoom function of the lens unit 2, the proportional coefficient Kx increases when the focal length is long, and the proportional coefficient Kx decreases when the focal length is short. The offset correction coefficient generation means 50c is configured to generate a coefficient Ex for correcting an offset error such as an output signal of the gyro 34b. By adding the coefficients generated by the offset correction coefficient generating means 50c, the offset error of the initial position in the horizontal direction of the CCD 16 (moving substrate 14) (the zero point of the moving substrate 14 when image blur correction is not performed) is corrected. Position error) is corrected. In addition to the above, by appropriately changing the coefficients generated by the proportional coefficient generation means 48c and the offset correction coefficient generation means 50c, a function for preventing an excessive amplitude of the movement amount of the moving substrate 14, the start and end of shake correction A function for preventing a sudden movement of the moving substrate 14 at the time can be incorporated.

  The differential circuit 40c includes a Hall element inverting amplifier 52c and an adder circuit 54c. The hall element inverting amplifier 52c is configured to amplify the output signal CH of the hall element 24c by a predetermined magnification and invert the sign thereof. The adder circuit 54c is configured to add the output signal −CH1 of the Hall element inverting amplifier 52c and the output signal rc of the arithmetic circuit 38c, and to pass a current having a magnitude proportional to the sum to the drive coil 20c. Yes. Therefore, the differential circuit 40c outputs a current proportional to the difference rc-CH1 between the horizontal direction component of the CCD position command signal and the output of the Hall element 24c to the driving coil 20c. Becomes zero. When a current flows through the driving coil 20c and a magnetic field is generated, the driving magnet 22c disposed corresponding thereto receives a horizontal driving force, and the horizontal direction in which the movable substrate 14 is commanded by the position command signal. It is configured to be moved in a direction approaching the position. Thereby, the movable substrate 14 is moved so as to follow the CCD position command signal.

  Similarly, the arithmetic circuit 38a includes an integration circuit 42a, a multiplication circuit 44a, and an addition circuit 46a. The integration circuit 42a is configured to calculate the pitch angle θy by time-integrating the angular velocity ωy of the pitching motion detected by the gyro 34a. The multiplying circuit 44a is configured to multiply the pitch angle calculated by the integrating circuit 42a by a predetermined proportional coefficient Ky generated by the proportional coefficient generating means 48a. The addition circuit 46a is configured to add the offset correction coefficient Ey generated by the offset correction coefficient generation means 50a to the output of the multiplication circuit 44a.

  The configurations of the proportional coefficient generation unit 48a and the offset correction coefficient generation unit 50a are the same as the proportional coefficient generation unit 48c and the offset correction coefficient generation unit 50c except that the correction direction is the vertical direction, and thus description thereof is omitted. .

  The differential circuit 40a includes a Hall element inverting amplifier 52a and an adder circuit 54a. Thereby, the differential circuit 40a drives a current ra-AH1 proportional to the difference between the vertical direction component ra (= rb) of the CCD position command signal output from the arithmetic circuit 38a and the output AH of the Hall element 24a. Output to the coil 20a. Similarly, the differential circuit 40b includes a Hall element inverting amplifier 52b and an adder circuit 54b. As a result, the differential circuit 40b supplies a current rb-BH1 proportional to the difference between the vertical component rb of the CCD position command signal output from the arithmetic circuit 38a and the output BH of the Hall element 24b to the drive coil 20b. Output. When a current flows through the driving coils 20a and 20b and a magnetic field is generated, the driving magnets 22a and 22b arranged correspondingly receive the driving force in the vertical direction, and the moving substrate 14 is commanded by a position command signal. It is comprised so that it may move in the direction approaching the made vertical direction position. Further, since the moving substrate 14 also receives the driving force in the horizontal direction as described above, it is moved by these driving forces so as to follow the CCD position command signal in both the horizontal and vertical directions.

  Next, with reference to FIG. 11 and FIG. 12, a command signal for causing the moving substrate 14 to perform various movements will be described. FIG. 11 is a diagram illustrating a positional relationship between the driving coil disposed on the fixed plate 12 and the three driving magnets 22 a, 22 b, and 22 c disposed on the moving substrate 14. First, the three driving coils 20a, 20b, and 20c are arranged so that their center points Ha, Hb, and Hc are arranged at equal intervals on a straight line. Each Hall element 24a, 24b, 24c is also arranged such that its sensitivity center point S is located on the points Ha, Hb, Hc. Further, when the moving substrate 14 is in the neutral position, that is, when the center point of the light receiving surface of the CCD 16 is on the optical axis, the magnetic neutral axes L, M, N of the driving magnets 22a, 22b, 22c are , Respectively, pass through the points Ha, Hb, Hc, and the midpoints of the magnetic neutral axes are positioned so as to overlap the points Ha, Hb, Hc, respectively. The horizontal axis passing through the points Ha, Hb, and Hc is taken as the X axis, and the vertical axis passing through the point Hc is taken as the Y axis. Therefore, when the movable substrate 14 is in the neutral position, the magnetic neutral axes L and M overlap with the X axis, and the magnetic neutral axis N overlaps with the Y axis.

Here, first, a command signal in the case of causing the moving substrate 14 to move arbitrarily will be described, and then, a case of moving the moving substrate 14 which is one mode of the arbitrary movement in translation will be described.
As shown in FIG. 11, when the moving substrate 14 moves, the center point of the light receiving surface of the CCD 16 moves to the point Q1, and further when the moving substrate 14 rotates counterclockwise around the point Q1, the driving substrate 14 is driven. The axis including the magnetic neutral axes L and M of the magnets 22a and 22b moves to X1, and the axis including the magnetic neutral axis N of the driving magnet 22c moves to Y1. In order for the moving substrate 14 to move to such a position, the magnitude of the command signal for the drive coil 20a is the radius of a circle that touches the axis X1 with the point Ha as the center, and the command signal for the drive coil 20b is: The command signal of the drive coil 20c needs to be a value proportional to the radius of the circle that is in contact with the axis X1 around the point Hb and that is in contact with the axis Y1 around the point Hc. Let radii of these circles be ra, rb, and rc, respectively.

  The coordinates of the point Q1 are (u, v), the coordinates of the point Ha are (a, 0), and the coordinates of the point Hb are (-a, 0). Furthermore, the angle formed between the straight line connecting the point Q1 and the point Ha and the X axis is γ, the angle formed between the straight line connecting the point Q1 and the point Hb and the X axis is δ, the straight line connecting the point Q1 and the point Hc, and the Y axis. Let ε be the angle made.

First, the relationship of Formula 1 is established between the angles γ, δ, and ε and the above coordinates.

Further, when the distance between the point Q1 and the point Ha is La, the distance between the point Q1 and the point Hb is Lb, and the distance between the point Q1 and the point Hc is Lc, the relationship of Expression 2 is established.

Here, when ra, rb, and rc that are proportional to the magnitude of the command signal are represented by La, Lb, and Lc, the relationship of Equation 3 is established.

の関係が得られる。従って、移動基板１４を水平方向にｕ、鉛直方向にｖ移動させ、かつ反時計回りにθ回転させる場合には、数式４を使用してｒａ、ｒｂ、ｒｃを計算し、これらの値に対応した指令信号を、駆動用コイル２０ａ、２０ｂ、２０ｃに夫々加えればよい。 By substituting the relationship of Formulas 1 and 2 into Formula 3,

The relationship is obtained. Therefore, when the moving substrate 14 is moved u in the horizontal direction, v is moved in the vertical direction, and θ is rotated counterclockwise, ra, rb, and rc are calculated using Equation 4 to correspond to these values. The command signal may be added to the driving coils 20a, 20b, and 20c, respectively.

この数式５から理解されるように、移動基板１４に並進移動のみを与える場合には、鉛直方向の移動距離に対応した同一の位置指令信号を駆動用コイル２０ａ、２０ｂに与え、水平方向の移動距離に対応した位置指令信号を駆動用コイル２０ｃに加えればよい。図１２は、このような並進移動のみを与える位置指令信号を各駆動用コイルに与えた場合の移動基板１４の移動を示している。図１２に示すように、中立位置において実線の位置にあった各駆動用コイルは、上述した位置指令信号を加えることによって、破線の位置に移動される。このような位置指令信号は、図１０において説明したＣＣＤ位置指令信号に対応するものであり、本実施形態におけるコントローラ３６によって生成される。 Further, in the case where u is moved in the horizontal direction and v is translated in the vertical direction without rotating the moving substrate 14, ra, rb, and rc are calculated by Expression 5 obtained by substituting zero into θ in Expression 4. do it.

As can be understood from Equation 5, when only translational movement is given to the moving substrate 14, the same position command signal corresponding to the vertical movement distance is given to the driving coils 20a and 20b to move in the horizontal direction. A position command signal corresponding to the distance may be added to the driving coil 20c. FIG. 12 shows the movement of the moving substrate 14 when a position command signal for giving only such translational movement is given to each driving coil. As shown in FIG. 12, each drive coil that was in the solid line position in the neutral position is moved to the broken line position by applying the position command signal described above. Such a position command signal corresponds to the CCD position command signal described with reference to FIG. 10, and is generated by the controller 36 in the present embodiment.

この数式６から理解されるように、移動基板１４に回転移動のみを与える場合には、回転角に対応した絶対値同一の、逆符号の位置指令信号を駆動用コイル２０ａ、２０ｂに与え、駆動用コイル２０ｃにはゼロの位置指令信号を加えればよい。 Further, when the movable substrate 14 is rotated by the angle θ without translational movement, ra, rb, and rc may be calculated by Expression 6 obtained by substituting zero into u and v of Expression 4.

As understood from Equation 6, when only the rotational movement is given to the moving substrate 14, a position command signal having the same absolute value corresponding to the rotation angle and the opposite sign is given to the driving coils 20a and 20b, and the driving is performed. A zero position command signal may be applied to the coil 20c.

  In the control by the controller 36 described above, the translation substrate 14 can only be translated, but the actuator 10 provided in the imaging apparatus 1 according to the embodiment of the present invention can be arbitrarily attached to the migration substrate 14 by changing the controller. It can also be configured to move. In this case, a coil position command signal ra applied to each drive coil using any one of Equations 4 to 6 based on the positions u and v to which the movable substrate 14 is to be moved and the rotation angle θ. , Rb, rc, and the controller may be configured to add them to the drive coils 20a, 20b, 20c.

  Next, an example of a specific circuit of the controller 36 will be described with reference to FIG. In the circuit of FIG. 13, ancillary circuits such as a power supply line for operating each operational amplifier are omitted. First, as shown in FIG. 12, a power supply voltage + Vcc (12 V), a ground potential GND (0 V), and a reference voltage COM (6 V) are connected to this circuit.

  The fourth terminal of the hall element 24a is connected to the reference voltage COM, and the signal AH is output from the second terminal as the output terminal. This signal is input to the negative input terminal of the operational amplifier OP11 through the electric resistor R11. ing. The negative input terminal of the operational amplifier OP11 is connected to the output terminal of the operational amplifier OP11 through the electric resistor R12 and the variable resistor VR11. The reference voltage COM is connected to the positive input terminal of the operational amplifier OP11. Further, the output terminal of the operational amplifier OP11 is connected to the negative input terminal of the operational amplifier OP12 via the electric resistor R13. The operational amplifier OP11 functions as a Hall element inverting amplifier 52a, and a signal -AH1 is output from the output terminal. The gain of the Hall element inverting amplifier 52a is adjusted by the variable resistor VR11.

  On the other hand, the output of the arithmetic circuit 38a is connected to the plus input terminal of the operational amplifier OP13. Further, the negative input terminal and the output terminal of the operational amplifier OP13 are connected. The output terminal of the operational amplifier OP13 is connected to the negative input terminal of the operational amplifier OP12 through the electric resistor R16. The operational amplifier OP13 acts as a buffer amplifier for the output of the arithmetic circuit 38a, and a signal ra is output from its output terminal. To do. Further, the output of the Hall element inverting amplifier 52a and the output of the arithmetic circuit 38a are added at the negative input terminal of the operational amplifier OP12. Therefore, the operational amplifier OP12 functions as the addition circuit 54a.

  The power supply voltage + Vcc and the ground potential GND are divided by the variable resistor VR12, and the divided potential VA is connected to the plus input terminal of the operational amplifier OP16. The negative input terminal of the operational amplifier OP16 is connected to the output terminal of the operational amplifier OP16, and the output terminal of the operational amplifier OP16 is connected to the negative input terminal of the operational amplifier OP12 through the electric resistor R14. The operational amplifier OP16 functions as a buffer amplifier for the potential VA divided by the variable resistor VR12.

  On the other hand, the positive input terminal of the operational amplifier OP12 is connected to the reference voltage COM. Further, the negative input terminal of the operational amplifier OP12 is connected to the output terminal of the operational amplifier OP12 via the electric resistance R15. Thereby, the operational amplifier OP12 acts as an inverting amplifier. Therefore, a value obtained by inverting the sign of the added value of the output of the arithmetic circuit 38a and the output of the Hall element inversion amplifier 52a is output from the output terminal of the operational amplifier OP12. That is, a voltage of −R15 (−HA1 / R13 + ra / R14 + VA / R16) is output from the output terminal of the operational amplifier OP12.

  The output terminal of the operational amplifier OP12 is connected to the negative input terminal of the operational amplifier OP14 via the electric resistance R17. Further, the negative input terminal of the operational amplifier OP14 is connected to the output terminal of the operational amplifier OP14 via the electric resistance R18. Further, the positive input terminal of the operational amplifier OP14 is connected to the reference voltage COM. As a result, the operational amplifier OP14 acts as an inverting amplification amplifier, and the sign inverted by the operational amplifier OP12 is returned to the original sign and output from the output terminal of the operational amplifier OP14. The offset voltage appearing at the output terminal of the operational amplifier OP14 is corrected by adjusting the variable resistor VR12. In this embodiment, a gain of about 200 times is obtained by this inverting amplifier.

  The output terminal of the operational amplifier OP14 is connected to one terminal of the driving coil 20a, and the other terminal of the driving coil 20a is connected to the reference voltage COM. As a result, when the output voltage of the operational amplifier OP14 becomes higher than the reference voltage COM, a current flows from the operational amplifier OP14 toward the reference voltage COM to the driving coil 20a, and the output voltage of the operational amplifier OP14 is lower than the reference voltage COM. When this happens, a reverse current flows.

  On the other hand, the operational amplifiers OP41 and OP42, the transistor Q41, and the electric resistances R41 to R45 constitute a constant current circuit for supplying a current for operating the Hall element to each Hall element. In the present embodiment, a current of about 3 mA is passed between the first terminal and the third terminal of each Hall element 24a, 24b, 24c.

Although the configuration of the differential circuit 40a has been described above, the differential circuits 40b and 40c have the same configuration, and thus description thereof will be omitted. The operational amplifiers OP11, OP12, OP14, and OP16 of the differential circuit 40a have the same functions as the operational amplifiers OP21, OP22, OP24, and OP26 of the differential circuit 40b and the operational amplifiers OP31, OP32, OP34, and OP36 of the differential circuit 40c, respectively. Plays. Similarly, the electrical resistance and the variable resistance are also numbered.
As described above, in the present embodiment, the moving substrate is controlled only by proportional control, but control that appropriately combines integral control, differential control, and the like may be performed.

  Next, the operation of the imaging apparatus 1 according to the embodiment of the present invention will be described with reference to FIGS. First, an actuator 10 provided in the camera body 4 is operated by turning on a start switch (not shown) of an image shake correction function of the imaging apparatus 1. The gyros 34 a and 34 b attached to the fixed plate 12 detect vibrations in a predetermined frequency band every moment and output them to the arithmetic circuits 38 a and 38 b built in the controller 36. The gyro 34a outputs an angular velocity signal in the pitching direction of the camera body 4 to the arithmetic circuit 38a, and the gyro 34b outputs an angular velocity signal in the yawing direction to the arithmetic circuit 38b. The arithmetic circuit 38a integrates the input angular velocity signal with time to calculate a pitching angle.

  The calculated signal is corrected based on the output signals of the proportional coefficient generation means 48a and the offset correction coefficient generation means 50a, and the vertical components ra and rb (ra and rb are the same signal) of the CCD position command signal are generated. . Further, the proportionality coefficient generating unit 48a detects the position of the zoom adjustment ring (not shown) of the lens unit 2, and determines the proportionality constant based on this position.

  Similarly, the arithmetic circuit 38c integrates the input angular velocity signal with time to calculate a yawing angle, adds a predetermined correction to the yawing angle, and generates a horizontal component rc of the CCD position command signal. By moving the CCD 16 momentarily to the position commanded by the CCD position command signal output in time series by the arithmetic circuits 38a and 38c, the image focused on the light receiving surface of the CCD 16 is stabilized.

  Vertical components ra and rb of the CCD position command signal generated by the arithmetic circuit 38a are input to the differential circuits 40a and 40b, respectively. The horizontal component rc of the CCD position command signal generated by the arithmetic circuit 38c is input to the differential circuit 40c.

  On the other hand, the hall element 24a arranged inside the driving coil 20a is in the differential circuit 40a, the hall element 24b inside the driving coil 20b is in the differential circuit 40b, and the hall element 24c inside the driving coil 20c is A detection signal is output to the differential circuit 40c.

  The differential circuits 40a, 40b, and 40c generate voltages corresponding to the differences between the input detection signals of the hall elements and the CCD position command signals ra, rb, and rc, and drive currents proportional to the voltages. It flows through the coils 20a, 20b, 20c. When a current flows through each driving coil, a magnetic field proportional to the current is generated. Due to this magnetic field, the driving magnets 22a, 22b, and 22c arranged corresponding to the driving coils 20a, 20b, and 20c respectively have a driving force in a direction approaching the position specified by the CCD position command signals ra, rb, and rc. Then, the moving substrate 14 is moved. When each driving magnet reaches the position specified by the CCD position command signal by this driving force, the CCD position command signal and the detection signal of the Hall element coincide with each other, so the output of the differential circuit becomes zero and the driving force also becomes zero. Become. Further, when each driving magnet deviates from the position specified by the CCD position command signal due to a disturbance or a change in the CCD position command signal, a current flows again to each driving coil, and each driving magnet The position is returned to the position specified by the position command signal.

  By repeating the above operation every moment, the CCD 16 attached to the moving substrate 14 having each driving magnet is moved so as to follow the lens position command signal. Thereby, the image focused on the light receiving surface of the CCD 16 is stabilized.

  According to the image pickup apparatus of the embodiment of the present invention, the moving substrate on which the image pickup element is mounted is supported by the steel balls so that it can move in any direction within a plane parallel to the light receiving surface of the image pickup element. By combining the movements along the two axes, the backlash of the support means does not accumulate unlike the conventional support mechanism that movably supports the movable part, and the image sensor can be moved with high accuracy. it can.

  Further, according to the imaging apparatus of the present embodiment, since the moving substrate is moved by rolling the steel ball, the large sliding resistance accompanying the movement of the moving substrate does not act, and the moving substrate can be moved with a small driving force. Can do.

  Furthermore, according to the imaging apparatus of the present embodiment, two of the three driving magnets are arranged so that two of the driving magnets receive a vertical driving force and the central driving magnet receives a horizontal driving force. Therefore, the driving force in each direction can be determined independently, and the calculation in the controller can be simplified.

  Further, according to the imaging apparatus of the present embodiment, since the proportional coefficient generation unit changes the movement amount of the CCD based on the focal length of the lens unit, even when the focal length or the like is changed by a zoom mechanism or the like. Thus, it is possible to effectively suppress image blur on the CCD.

  In the imaging apparatus according to the embodiment of the present invention, the magnetism of the driving magnet is detected by the Hall element, and the position of the moving substrate is measured, so that the driving magnet is not provided separately from the Hall element magnet. It can be combined. In addition, since the Hall element is arranged inside the driving coil, the point of action of the force exerted from the driving coil to the driving magnet is almost equal to the point whose position is measured by the Hall element on the driving magnet. Thus, the position of the moving substrate can be accurately detected without being affected by mechanical play or the like.

  As mentioned above, although preferable embodiment of this invention was described, a various change can be added to embodiment mentioned above. In particular, in the above-described embodiment, the case where the image shake correction apparatus of the present invention is incorporated in an image pickup apparatus for still image shooting has been described. However, the image shake correction apparatus of the present invention is used alone or for moving image shooting. It can also be used by being incorporated into a device. In the above-described embodiment, the driving magnet is attached to the moving substrate, and the driving coil is attached to the fixed plate. However, these relationships can be reversed. Furthermore, in the above-described embodiment, one drive magnet is arranged corresponding to one drive coil. However, instead of one drive magnet, a drive magnet composed of two or more drive magnets is used. A set can be arranged and can be made to act in the same manner as the above-described embodiment. In the present specification, “(one) drive magnet” includes a set of drive magnets acting in this way. In the above-described embodiment, the moving substrate is supported by the steel ball. However, the moving substrate may be supported by a sliding means that directly slides the moving substrate and the fixed plate on a smooth surface.

It is sectional drawing of the imaging device by embodiment of this invention. It is a side view of the actuator currently used for the imaging device by the embodiment of the present invention. It is a front view of the movement board | substrate of an actuator. It is a rear view of the moving substrate of an actuator. It is a front view of the stationary plate which supports a movement board | substrate. It is a figure which shows distribution of the magnetic field between a movement board | substrate and a fixed board. It is the (a) perspective view and (b) side view for demonstrating the relationship between the movement of a drive magnet, and the signal output from a Hall element. It is a graph for demonstrating the relationship between the movement of a drive magnet, and the signal output from a Hall element. It is a top view for demonstrating the relationship between the movement of a drive magnet, and the signal output from a Hall element. It is a block diagram which shows the signal processing in a controller. It is a figure which shows the positional relationship of the drive coil arrange | positioned on a stationary plate, and the three drive magnets arrange | positioned on a movement board | substrate. It is a figure which shows the positional relationship of the drive coil arrange | positioned on a fixed board, and the three drive magnets arrange | positioned on a movement board | substrate when a movement board | substrate is translated. It is a circuit diagram which shows an example of the concrete circuit of a controller.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Imaging device 2 Lens unit 4 Camera body 6 Lens barrel 8 Imaging lens 10 Actuator 12 Fixed plate 12a Flexible cable 14 Moving substrate 16 CCD
18 Steel ball 20a, 20b, 20c Driving coil 22a, 22b, 22c Driving magnet 24a, 24b, 24c Hall element 26 Suction yoke 28 Back yoke 30 Suction magnet 32 Steel ball receiver 34a, 34b Gyro 36 Controller 38a, 38c Arithmetic circuit 40a, 40b, 40c Differential circuit 42a, 42c Integration circuit 44a, 44c Multiplication circuit 46a, 46c Addition circuit 48a, 48c Proportional coefficient generation means 50a, 50c Offset correction coefficient generation means 52a, 52b, 52c Hall element inversion amplifier 54a , 54b, 54c Adder circuit

Claims (8)

A fixing member;
A movable member to which an image sensor is attached;
Support means for supporting the movable member with respect to the fixed member so that the movable member can move in an arbitrary direction within a plane parallel to the light receiving surface of the imaging element;
At least three drive coils disposed on either the fixed member or the movable member;
At least three position sensors arranged on one of the fixed member and the movable member on the member on which the driving coil is arranged;
At least three driving magnets attached to the other of the fixed member or the movable member, respectively, at positions facing the driving coils so as to receive a driving force by a magnetic field generated by the driving coils;
Detecting means for detecting a shake of an optical axis of light incident on a light receiving surface of the imaging element;
Based on the shake of the optical axis detected by the shake detection means and the position of the movable member with respect to the fixed member detected by the shake position sensor, current is passed through the drive coils to drive the movable member. And a control means for suppressing shake of an image formed on the image sensor,
An image blur correction apparatus comprising:   An adsorbing yoke that adsorbs the movable member and the fixed member attached to a member of the fixed member or the movable member to which the driving magnet is not attached; and the support means The image blur correction device according to claim 1, wherein the image blur correction device is at least three spherical bodies sandwiched between the fixed member and the movable member.   At least one of the driving magnets is arranged to receive a driving force in the first axial direction by a magnetic field generated by the driving coil facing the other, and the other driving magnets are opposed to them. 3. The image blur correction device according to claim 1, wherein the image blur correction device is arranged to receive a driving force in a direction different from the first axis by a magnetic field generated by each of the driving coils.   The three driving coils are arranged substantially in a straight line, and two of the driving magnets facing the driving coils receive a driving force in the first axial direction by the magnetic field generated by the driving coil. The other one driving magnet is arranged to receive a driving force in a second axial direction substantially orthogonal to the first axis by a magnetic field generated by the driving coil facing the other driving magnet. The image blur correction device according to claim 1.   The control unit corrects a current flowing through each of the driving coils based on information on a focal length of an imaging lens for forming an image on the imaging element or an offset of an initial position of the imaging element. Item 5. The image blur correction device according to any one of Items 1 to 4. A movable member composed of an image sensor provided on one surface and at least three aligned drive magnets provided on the other surface;
It is composed of at least three driving coils provided at positions corresponding to the driving magnets on one surface facing the other surface, and position detecting means arranged in the driving coils. Fixing members,
A sliding means that is interposed between the movable member and the fixed member and is slidable when the movable member is moved;
Angular velocity detecting means for detecting an angular velocity component in which the optical axis is inclined by vibration and obtaining an angular velocity detection value;
The driving coil, the position detecting means, and the driving magnet are arranged in an aligned manner, and obtain a predetermined position signal corresponding to the magnetic field intensity from the position detecting means. An actuator that is supplied with a drive correction signal and moves to a predetermined correction position to correct a shake of the movable member by a thrust generated by an interaction of a magnetic field between at least the drive coil and the drive magnet;
Control means for obtaining a corrected position command signal based on the detected angular velocity value and a predetermined correction signal, and for supplying a drive correction signal for correcting shake to the actuator from the position command signal and the position signal. When,
The image blur correction apparatus according to claim 1, wherein the actuator is capable of moving the movable member in two directions of an X direction and a Y direction under the control of the control means.   Three of the drive magnets are arranged, two of the drive magnets at the two ends receive a vertical driving force, and the central driving magnet is arranged to receive a horizontal driving force. The image blur correction apparatus according to claim 6. An image blur correction apparatus according to any one of claims 1 to 7,
A lens unit including an imaging lens that forms an image on an imaging element attached to the movable member of the image blur correction device;
An imaging device comprising:

Images