JP2006346843A - Disc-like blade and cutting device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a disc-like blade capable of stably exhibiting excellent cutting performance to a machined material formed from a hard and fragile material, and easy to be designed. <P>SOLUTION: In the cutting device having the disc-like blade 1 provided with a through hole, which is to be fitted on a rotary shaft, in a central part thereof, ultrasonic vibrators 8 are arranged on both sides of the disc-like blade 1, and fixed by two support plates 7 from both sides of the ultrasonic vibrators 8. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a disk-shaped blade and a cutting apparatus that can be advantageously used for cutting or grooving a workpiece formed of a brittle material such as glass or silicon.

  A cutting device with a disk-shaped blade is generally used for cutting or grooving a workpiece formed from a hard and brittle material such as glass, silicon, silicon nitride, rare earth magnet material or super hard metal. It is used.

  FIG. 1 is a front view showing a configuration example of a conventional cutting device 5 described in Patent Document 1, and FIG. 2 is a side view of the cutting device 5 of FIG. The cutting device 5 shown in FIGS. 1 and 2 includes a first flange 2a, a disk-shaped blade 1 and a second flange 2b attached to the rotary shaft 3 of the rotary drive device 6, and these flanges 2a and 2b. It is comprised from the nut 4 for clamp | tightening and fixing the braid | blade 1 by this. Then, the workpiece is cut or grooved while the rotary drive device 6 of the cutting device 5 is operated to rotate the disk-shaped blade 1.

  On the other hand, a method of cutting an object to be processed while applying ultrasonic vibration to a tool such as a tool of a machine tool is known. Such a cutting method is called ultrasonic cutting, and is described in detail in Non-Patent Document 1. Ultrasonic cutting has the advantages that the frictional resistance between the workpiece and the tool is reduced, so that the thermal distortion of the machined surface is reduced, the machining accuracy is increased, and the life of the cutting tool is extended. ing. Further, it is described in detail in Non-Patent Document 2 that the processing speed is doubled or more.

Patent Document 2 discloses a cutting device having a configuration in which an ultrasonic transducer is attached to a rotating shaft that rotates a disk-shaped blade. This cutting device rotates at the outer edge of the blade while rotating the disk-shaped blade and applying the ultrasonic vibration generated by the ultrasonic vibrator to the disk-shaped blade via the rotating shaft. Cut the object. The disk-shaped blade of this cutting device is fixed to the tip of the rotating shaft while being tightened by a vibration transmission direction changer and a nut. The ultrasonic vibrator attached to the rotating shaft generates ultrasonic vibration that vibrates in the axial direction of the rotating shaft, and this ultrasonic vibration is supersonic that vibrates in the direction in which the diameter of the blade is expanded or contracted by the vibration transmission direction converter. It is converted into sonic vibration and applied to the blade. In order to convert the transmission direction of the ultrasonic vibration, the rotating shaft and the vibration transmission direction converter are designed in a predetermined shape by numerical calculation using a finite element method or the like.
JP-A-8-127003 JP 2000-210928 A Ultrasonic Handbook Editorial Committee, “Ultrasonic Handbook”, Maruzen Co., Ltd., August 1999, p679-684 Japan Electromechanical Industry Association, "Ultrasonic Engineering", Corona Co., Ltd., 1993, p218-229

  In the cutting apparatus described in Patent Document 2, when changing the vibration direction or frequency of the ultrasonic vibration applied to the blade, the numerical calculation is again performed by the finite element method or the like, and the rotation shaft or vibration transmission is performed. It is necessary to redesign the shape of the direction changer. Further, in this cutting apparatus, there is a high possibility that the magnitude of the ultrasonic vibration transmitted to the blade changes due to the strength of the tightening force of the blade by the vibration transmission direction changer and the nut. When the magnitude of ultrasonic vibration transmitted to the blade fluctuates, the magnitude of vibration in the direction of expanding or reducing the diameter of the blade changes, and the cutting performance of the blade changes.

An object of the present invention is to provide a disk-shaped blade with stable excellent cutting performance.
Another object of the present invention is to provide a cutting device that stably exhibits excellent cutting performance and is easy to design.

  The present invention provides a cutting device having a disk-like blade having a through-hole fitted in a rotating shaft in the center, and has two support plates having an ultrasonic transducer, and the support plates are shaped like a disk from both sides. The blade is to be tightened with screws.

  The present invention also resides in that a flange holds the support plate.

  The present invention is also characterized in that the ultrasonic transducer is a ring-shaped piezoelectric ceramic, and the polarization direction is different or the voltage application direction is different in the ring-shaped piezoelectric ceramic.

  The present invention also provides a cutting device in which an ultrasonic oscillation circuit is connected to an ultrasonic transducer.

  The disk-shaped blade provided with the support plate of the present invention does not transmit ultrasonic vibration to unnecessary members such as a rotating shaft because ultrasonic vibration is excited to the disk-shaped blade via the support plate. In addition, ultrasonic vibration can be efficiently and stably applied to the disk-shaped blade. For this reason, the disk-shaped blade of this invention and the cutting device provided with this blade show the outstanding cutting performance stably.

  The disk-shaped blade provided with the support plate of the present invention also supports the support plate by a flange. When the rigidity of the blade is smaller than that of the flange, if the blade surface is directly fixed and supported by the flange, it is difficult to propagate the ultrasonic vibration to the tip of the blade. Therefore, by making the diameter of the support plate made of a rigid material larger than or equal to the diameter of the flange, ultrasonic vibration can be efficiently and stably applied to the disk-shaped blade.

  The disc-shaped blade provided with the support plate of the present invention is further mechanically clamped and integrated with the support plate from both sides with the support plate. As a result, even when the disk-shaped blade is worn out and changed to a disk-shaped blade, the support plate can be removed from the worn disk-shaped blade and attached to a new disk-shaped blade. As a result, only the disk-shaped blade is consumed, which helps to save resources and reduce manufacturing costs.

  The embodiment is shown in the front view of FIG. 3 and the cross-sectional view of FIG. 4 taken along the line AA of FIG. First, the support plate 7a whose outer peripheral portion is tapered is passed through a joining bolt 14 having a through hole through which the rotation shaft passes through the central axis. By making the outer peripheral portion into a tapered shape, it spreads to the disk-shaped blade 1 and can be made almost only by vibration displacement. When the outer peripheral portion is not tapered, bending vibration in the direction orthogonal to the cutting direction may occur in the disk-shaped blade 1. The approximate shape of the joining bolt 14 is an outer diameter of 50 mm, an inner diameter of 40 mm, and a length of 10 mm.

  The support plate 7a was prepared as follows. An ultrasonic transducer having an outer diameter of 70 mm, an inner diameter of 50 mm, an outer peripheral thickness of 1.5 mm, and a rigid plate 12a made of aluminum alloy having a thickness of 0.5 mm of a portion to which the piezoelectric ceramic 8a is bonded. A piezoelectric ceramic 8a having a thickness of 50 mm and a thickness of 0.5 mm is joined with an epoxy resin. The rigid plate 12a is preferably an ultrasonic vibration material with a small vibration loss, and a metal such as an aluminum alloy or titanium and an inorganic material such as alumina or glass are suitable. Then, an insulating plate 13a made of a glass fiber composite material having the same shape as the piezoelectric ceramic is joined to the outside of the piezoelectric ceramic 8a with an epoxy resin.

Next, the metallic disk-shaped blade 1 having an outer diameter of 100 mm, an inner diameter of 50 mm and a thickness of 0.1 mm is passed through the joining bolt. When a contact medium such as grease or adhesive is used at the interface between the support plate 7a and the disk-shaped blade 1, the support plate 7a and the disk-shaped blade 1 become a further integrated vibrating body. An adhesive that can be easily removed using a release agent or the like is desirable in view of the subsequent disassembly work. The contact medium is described in detail in Non-Patent Document 3. The disk-shaped blade 1 used here is one in which abrasive grains are fixed on a metal surface. Examples of the material for the disk-shaped metal substrate include aluminum, iron, stainless steel, and cemented carbide.
Junichi Miyoshi, “Ultrasonic Technology Handbook”, Nikkan Kogyo Shimbun, December 1985, p722-723

  Then, the support plate 7b is passed. The shape of the support plate 7b is a shape in which the surface in contact with the blade of the support plate 7a is a symmetrical surface.

  After inserting the support plate 7 a, the disk-shaped blade 1, and the support plate 7 b in this order into the joining bolt 14, these are mechanically integrated by the joining nut 15. This is called a support plate / blade configuration.

  Next, a configuration in which the support plate / blade configuration is held by a flange and attached to a rotating shaft will be described with reference to FIG. 6 which is a plan view of FIG. 5 and a cross-sectional view taken along line AA of FIG.

  The rotary transformer 9a on the rotation side is fixed to the sleeve 10 / inner flange 2a in which the sleeve 10 and the inner flange 2a are integrated with screws (not shown). A support plate / blade configuration is then inserted along the outer diameter surface of the sleeve 10. Next, the flange 2b is inserted along the outer diameter surface of the sleeve 10 in the same manner. Furthermore, these are integrated by the flange nut 11.

  The shapes of the surfaces of the flanges 2a and 2b that contact the support plates 7a and 7b are an outer diameter of 85 mm and an inner diameter of 80 mm. Further, this portion has a ring shape, has an outer diameter of 85 mm, an inner diameter of 80 mm, and a length of about 3 mm. Further, the outer peripheral portions of the flanges 2a and 2b are tapered, and there is an effect that vibration is expanded at the outer peripheral portion. As shown in the figure, when the blade is very thin, the ring-shaped portion of the flanges 2a and 2b described above becomes a fixed end of vibration, and if the total thickness of the support plate and the blade increases, the ring shape Since this part is deformed by vibration, the vibration propagates to the tip of the disk-shaped blade 1. Thus, the thickness of the support plates 7a and 7b is important. If the thickness is too thin, the tip of the disk-shaped blade 1 does not vibrate or does not have the required amount of vibration displacement. Therefore, the thickness of the support plates 7a and 7b is determined by numerical calculation such as a finite element method.

  At that time, the electrodes of the piezoelectric ceramics 8a and 8b of the support plates 7a and 7b are connected to one of the lead wires (not shown). The other lead wire is connected to a rotary transformer 9a on the rotation side.

  The sleeve 10 / the inner flange 2a and the support plate / blade structure integrated by the flange 2b and the flange nut 11 are attached to the rotary shaft 3 by the nut 4.

  Next, the operation method of the cutting apparatus using the disk-shaped blade 1 will be described with reference to the sectional view of FIG. First, the power of a motor (not shown) is turned on to rotate the rotary shaft 3. Next, an ultrasonic alternating voltage from an ultrasonic oscillation circuit (not shown) is applied to the ring-shaped piezoelectric ceramics 8a and 8b constituting the support plates 7a and 7b via the rotary transformers 9a and 9b. By applying the ultrasonic alternating voltage, the support plates 7a and 7b and the disk-shaped blade 1 are excited to expand in the radial direction. Next, cooling water is supplied from a nozzle to the rotating disk-shaped blade 1 and the workpiece not shown, and the workpiece is cut or grooved.

  By applying to the piezoelectric ceramics 8a and 8b a voltage having a natural frequency that excites the radial spreading vibration mode of the disk-shaped blade 1, a voltage of about 10 microns is applied to the tip of the blade at a low voltage of 100V or less. Vibration displacement can be easily excited.

  When the thickness of the disk-shaped blade 1 is 2 mm or less, particularly 1 mm or less, it is difficult to propagate the vibration of the piezoelectric ceramic to the tip of the blade by pressing the flanges 2 a and 2 b against the blade 1. .

  Therefore, by using means for making the outer diameters of the support plates 7a and 7b of the present invention larger or equal to the outer diameters of the flanges 2a and 2b, the vibration of the piezoelectric ceramic can be propagated to the tip of the blade. With this configuration, a blade having a thickness of about 50 microns can be used at present. It is believed that even thinner blades are applicable.

  According to the above configuration, since the conventional disk-shaped blade can be used as it is, it is not particularly necessary to make a special blade.

  Also, since only the support plate / blade configuration and part of the flange in contact with it vibrate, the vibration hardly propagates to the other parts, so there is almost no unnecessary vibration loss, so less power is required. The vibration of the magnitude can be excited. Therefore, since the rise in the temperature of the blade can be reduced, the machining accuracy can be improved.

  Further, since vibration hardly propagates to the rotating shaft, there is almost no risk of damage to the rotating shaft and the bearing that rotatably supports the rotating shaft.

  Further, when the disk-shaped blade is consumed, the disk-shaped blade can be removed from the support plate and replaced with a new disk-shaped blade. As a result, only the disk-shaped blade is consumed, and by applying ultrasonic vibration, the amount of blade consumption is significantly reduced compared to conventional cutting methods, saving resources and reducing manufacturing costs. Can do.

  As described above, since only a part of the blade and the flange can be vibrated, it is possible to provide a cutting device with high processing accuracy and high reliability.

  In the above embodiment, a metal blade is used. However, the same effect can be obtained with a resin blade.

  Furthermore, in the above embodiment, the ultrasonic vibrator is a ring-shaped piezoelectric ceramic and has the same polarization direction, and excites the spreading vibration of the disk. However, in order to excite the in-plane bending vibration of the disk, it is possible to use a ring-shaped piezoelectric ceramic having a different polarization direction or a different voltage application direction.

  The disk-shaped blade and cutting device of the present invention can be advantageously used for cutting or grooving a workpiece formed from a brittle material such as glass or silicon.

It is a front view which shows the structural example of the conventional cutting device. It is a side view of the cutting device of FIG. It is a front view which shows the disk shaped blade of this invention, a support plate, etc. FIG. It is sectional drawing cut | disconnected by the AA line of FIG. It is the front view which attached the disk shaped blade of this invention, the support plate, etc. to the rotating shaft. It is sectional drawing cut | disconnected by the AA line of FIG.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Blade 2 Flange 3 Rotating shaft 4 Nut 5 Cutting device 6 Rotation drive device 7 Support plate 8 Piezoceramic 9 Rotary transformer 10 Sleeve 11 Flange nut 12 Rigid plate 13 Insulating plate 14 Joining bolt 15 Joining nut 15

Claims (4)

  In a cutting device having a disk-shaped blade with a through-hole fitted in the center of a rotating shaft, there are two support plates with ultrasonic transducers. It is characterized by tightening using The cutting apparatus according to claim 1, wherein the flange holds a support plate. The cutting apparatus according to claim 1 or 2, wherein the ultrasonic vibrator is a ring-shaped piezoelectric ceramic, and a polarization direction is different or a voltage application direction is different in the ring-shaped piezoelectric ceramic. The cutting device which connects an ultrasonic oscillation circuit to the fixed side rotary transformer of Claims 1 and 2.

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