JP2006323032A - Apparatus and method for repairing defective pixel of flat panel display device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To obtain an apparatus and method for prepairing a defective pixel of a flat panel display device which can perform a repair operation for a bright spot defective pixel and a dark spot defective pixel, and confirm whether the repair operation is successful or not by using a single apparatus. <P>SOLUTION: The apparatus comprises; a driving circuit 17 for lighting on; a camera 10 for detecting the defective pixel from an image display face of a panel F to which a forward bias voltage is applied; a reverse bias circuit 18 which applies a reverse bias voltage; a camera 20 for detecting a faint light pixel, which specifies a faint infra-red ray emitted from a dark point defective pixel Ff of the panel F as it is, in two-dimensional coordinates; a pixel processing unit 11 for determining whether it is a leaking point 36 or not, by comparing a faint light energy intensity with a reference value of a good panel which is registered beforehand; a movable stage 19 on which the panel F is mounted and which is moved for detecting a whole pixel area and to a defective pixel position; and a laser beam source 15 for repairing which irradiates a laser beam to the defective pixel. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to whether or not a manufactured flat panel display device has a defective pixel such as a bright spot defective pixel or a dark spot defective pixel, and if there is a defective pixel, it is repaired and an image can be displayed with luminance within a standard. The present invention relates to a defective pixel repair apparatus and a defective pixel repair method for a flat panel display device capable of inspecting whether or not the panel display device is repaired.

  In the manufacture of flat panel display devices such as EL (Electroluminescence) panel display devices and FED (Field Emission Devices), pinholes, particles or contamination are inevitably generated during the formation of thin films. For this reason, a short circuit or a fine current leakage occurs between the TFT circuit and the electrode, and when the former phenomenon occurs, it becomes a bright spot defective pixel (described later), and when the latter phenomenon occurs, a dark spot defective pixel (described later). )become.

  FIG. 2 is an enlarged view of a flat panel display device (hereinafter referred to as a “processed flat panel display device”) F immediately after manufacture and having defective pixels to be repaired, and schematically shown in a plan view. . FIG. 2 shows a state in which each pixel of the processed flat panel display device F is lit by applying a bias voltage in the forward direction by the lighting drive circuit 17 (FIG. 1, which will be described later). The section shaded with the rising diagonal line indicates the bright spot defect pixel Fs, the section shaded with the right downward diagonal line indicates the pixel detected as the dark spot defective pixel Ff, and the pixel lit with the reference luminance is a normal pixel. This is indicated by the symbol Fn.

  In this specification, when the processed flat panel display device F is a color display device and is formed of red (R), green (G), and blue (B) pixels, the lighting drive circuit 17 causes a certain color. When a pixel is turned on, a voltage is constantly applied between the cathode and anode electrodes of a pixel of that color due to defects such as TFT and electrodes, and the brightness is higher than the reference value. When only a pixel to be lit and a pixel of a certain color are lit, a pixel that is lit at a higher brightness than the reference brightness even if not lit is called a “bright spot defective pixel”, and the lighting drive circuit 17 Even if the pixel is turned on by the above, a pixel that is not turned on at the reference value luminance due to the leak or the like is referred to as a “dark defect pixel”.

  Since these defective pixels deteriorate output characteristics, repair is performed by removing all or part of one electrode at the defective portion by, for example, laser irradiation or etching.

  The detection of the defective pixel is conventionally observed with a microscope or the like over the entire surface, or a reverse bias voltage is applied to the processed flat panel display device to cause the defective pixel to generate heat, and the light emission at this time is observed with the naked eye. It is done by the method. In order to identify the heat generation location, a method of detecting a weak light, that is, using a so-called thermoviewer and specifying a heat generation location at the time of applying a reverse bias is also performed.

  After finding defective pixels in this way, marking is performed manually, and then repair is performed by irradiating the marked part with a laser beam having a certain size and shape using a repair laser irradiation device. Is going.

  However, as the area of the processed flat panel display device is increased, it has become impossible to deal with the conventional defective pixel discovery and repair as described above. That is, as the processed flat panel display device becomes larger in area, the probability of occurrence of defective pixels increases, and a large number of defective pixels exist in one processed flat panel display device.

  As for repair of dark spot defective pixels in such a large-area processed flat panel display device, for example, a leak detection / repair device for photoelectric conversion elements disclosed in [Patent Document 1] can be cited. This leak location detection repair device detects the two-dimensional coordinates of infrared rays emitted from the surface to be measured of the photoelectric conversion element reversely biased by the reverse bias applying means, and detects each infrared ray on the two-dimensional coordinates. The energy intensity is compared with a reference value to determine whether or not it is a leak location by the leak location determination means, and then the two-dimensional coordinate information of the location determined to be the leak location is stored by the storage means. Based on the two-dimensional coordinates of the leak location stored in the storage means, the laser light irradiation position control means determines the photoelectric conversion element with the laser light irradiation position control means, and the laser light irradiation means irradiates the portion with the laser light irradiation means. A technique is disclosed in which the electrode layer at the leaked portion is removed and repaired.

In addition, with respect to bright spot defect pixels in large area processed flat panel display devices, for example, in a liquid crystal display panel, the light distribution of the bright spot defect pixel light distribution film is disrupted by laser light to transmit light. A repair method in which a bright spot defective pixel is changed to a dark spot defective pixel without being used is widely used. Further, a bright spot defective pixel in an EL (Electroluminescence) display panel employs a repair method in which the wiring of the TFT circuit is cut with a laser beam and no voltage is applied to the EL layer.
JP-A-9-266322 (first page, FIG. 1)

  However, the technique disclosed in the above [Patent Document 1] is a method for detecting a leak location of a photoelectric conversion element. When applied to an EL display panel, a leak location of a dark spot defective pixel can be detected, but a fatal defect The bright spot defect pixel is not detected because it is mostly caused by a defect such as a TFT circuit other than a short circuit between the anode and cathode of the EL layer. Even if the repair of the leaked part is successful, whether or not the defective pixel is normal must be confirmed by another method or another inspection apparatus.

  In the latter repair method, there is a problem that efficient detection and repair cannot be performed.

  The present invention is intended to solve these problems, and repairs and repairs of generated bright spot defect pixels and dark spot defect pixels even in a large-area processed flat panel display device. A defective pixel repair device (hereinafter simply referred to as “defective pixel repair device”) and a defective pixel repair method (hereinafter simply referred to as “defective pixel”) of a flat panel display device that enables confirmation of processing success / failure with a single device. The purpose is to obtain a repair method).

  Therefore, the defective pixel repair apparatus according to the present invention includes a lighting drive circuit that applies a voltage in a forward bias direction to a processed flat panel display device to light the processed flat panel display device, and the processed flat panel display. A reverse bias circuit for applying a voltage in a reverse bias direction to the device; a defective pixel detection camera for detecting a defective pixel on an image display surface of the processed flat panel display device to which a voltage is applied in the forward bias direction; A weak light pixel detection camera for identifying weak light emitted from a defective pixel of the processed flat panel display device to which a voltage is applied in a reverse bias direction, using the two-dimensional coordinates of the defective pixel, and the defective pixel The energy intensity of the brightness of each pixel detected by the detection camera is determined in advance. Compared with the brightness of the reference value of the recorded good flat panel display device, if it is high brightness, it is determined as a bright spot defective pixel, and if it is low brightness, it is determined as a dark spot defective pixel with a leak point, A pixel processing unit having a function of specifying and storing the bright spot defective pixel and the dark spot defective pixel by two-dimensional coordinates of the image display surface; and for the bright spot defective pixel, all of the cathode electrodes thereof A laser light source for repair that irradiates a region of the dark spot defective pixel with a laser beam to a leaked area of the cathode electrode to remove all or part of the cathode electrode, and the flat panel display to be processed The pixel processing unit stores the movable stage on which the device is placed and fixed, and the irradiation position of the laser beam from the movable stage and the repair laser light source. And a movement control means for moving the bright spot defective pixel detected in the whole pixel area of the processed flat panel display device based on certain two-dimensional coordinate information and the dark spot defective pixel area. It is characterized by being.

  The movable stage is capable of moving in at least a two-dimensional direction of the X direction and the Y axis direction.

  The movement control means controls the movable stage in at least a two-dimensional direction on the basis of information from the pixel processing unit, and places all the pixel areas of the flat panel display device to be processed mounted and fixed on the movable stage. It has a function of moving the two-dimensional coordinate position of the bright spot defective pixel and / or the dark spot defective pixel to the irradiation position of the repair laser beam from the repair laser light source.

  The flat panel display device is an electroluminescence panel or a field emission device panel.

  Further, the defective pixel repair method of the present invention includes a step of placing and fixing a processed flat panel display device in a horizontal state on a movable stage movable in the X-axis direction and the Y-axis direction, and the processed flat panel display Applying a voltage to the device in a forward bias direction, inspecting whether there is a defective pixel over the entire image display surface of the processed flat panel display device to which a voltage is applied in the forward bias direction, In the presence / absence inspection process, if there is a pixel having a luminance higher than the luminance of the reference value, the pixel is regarded as a bright spot defective pixel, and the two-dimensional coordinates of the bright spot defective pixel are stored. If there is a pixel, the step of capturing the pixel as a dark spot defective pixel and storing the two-dimensional coordinates of the dark spot defective pixel, and the processed flat after the inspection Irradiating the region of each bright spot defective pixel stored in the Nell display device with a laser beam and removing the cathode electrode of the bright spot defective pixel; and the processed flat panel display device after the inspection While applying a voltage in the reverse bias direction and detecting weak light emitted from the leaked spot of each dark spot defect pixel stored, the repaired laser beam is irradiated to the leaked spot, And a step of removing the cathode electrode corresponding to the area.

  In the defective pixel repair method, the number of dark spot defective pixels on the image display surface of the processed flat panel display device is in an allowable range in the inspection step for the presence or absence of the defective pixel, If most or all of the pixels have a luminance equal to or within the permissible range of the reference value, a step of removing a defective pixel repair process of the flat panel display device and introducing a new flat panel display device to be processed It is characterized by including.

  The region in which each stored bright spot defective pixel is irradiated with laser light is the entire range of the cathode electrode of the bright spot defective pixel.

  In the defective pixel repair method, after the process of removing all the bright spot defective pixels and / or the dark spot defective pixels is completed, a forward bias voltage is applied to the processed flat panel display device again to display the image. And a step of inspecting whether the processed flat panel display device is repaired to a desired state.

  Therefore, according to the defective pixel repair device and the defective pixel repair method of the present invention, even in a large-area processed flat panel display device, all pixels constituting the image display surface are inspected for lighting, and the lighting inspection is performed. Repair and repair of bright spot defective pixels and dark spot defective pixels detected in step 1 can be performed with a single device, and defective pixels detected in the lighting inspection are repaired efficiently and with high accuracy. be able to.

According to the defective pixel repair device and the defective pixel repair method of the present invention,
1. After all the pixels of the flat panel display device to be processed are lit and inspected, it is possible to determine the number of defective pixels, so it is possible to determine whether the flat panel display device should be repaired and prevent unnecessary repairs. It is possible. 2. After all the pixels are inspected for lighting, the electrodes of the bright spot defective pixels detected in the lighting inspection can be removed by irradiating laser light so that the pixels are not lit. After all of the above pixels have been inspected for lighting, leak points in the dark spot defective pixels detected in the lighting inspection can be detected efficiently with a reverse bias, so that repair can be performed with high accuracy. After each defective pixel is repaired, the processed flat panel display device is turned on again by the lighting drive circuit, so that it can be confirmed whether the defective pixel has been repaired successfully, so that a good flat panel display device can be obtained. What we can do 5 Since repair is possible after the completion of the flat panel display device, the occurrence of defective products can be significantly reduced, and a number of excellent effects can be obtained, such as improved yield.

  The present invention is to inspect all pixels for each of R, G, and B pixels of a processed flat panel display device and repair defective pixels detected by the lighting inspection efficiently and with high accuracy. .

  That is, the processed flat panel display device is turned on for each of the R pixel, G pixel, and B pixel by the lighting drive circuit, the entire pixel area is detected by the pixel detection camera, and the defective pixel is the bright spot defective pixel. The pixel processing unit detects whether the pixel is a defective dot, and stores the two-dimensional coordinates of these defective pixels. If a defective pixel is detected, the movable stage is then moved to the pixel position determined to be a defective pixel.

  When the defective pixel is a bright spot defective pixel, the bright spot defective pixel is turned on by a lighting drive circuit, and repair is performed by irradiating the repair spot light to the bright spot defective pixel in the entire pixel region.

  If the defective pixel is a dark spot defective pixel, a reverse bias circuit applies a voltage in the reverse bias direction to the processed flat panel display device, and the two-dimensional coordinates of the weak light emitted from the processed surface are used for detecting the weak light pixel. It is detected by the camera, and the energy intensity of the weak light on the two-dimensional coordinates is compared with a reference value, and the pixel processing unit determines whether or not it is a leak location. Based on the two-dimensional coordinates of the leak location determined by the pixel processing unit, the movable stage is moved or the irradiation position of the repair laser beam is finely adjusted, and then the repair laser beam is irradiated to all leak locations. And repair them.

  Whether or not all defective pixels have been successfully repaired is turned on again by the lighting drive circuit and checked by the pixel processing unit.

  Hereinafter, a pixel repair device and a defective pixel repair method thereof according to the present invention will be described with reference to the drawings.

  FIG. 1 is a functional block diagram showing a basic configuration of a defective pixel repair apparatus according to an embodiment of the present invention. FIG. 2 is a partial plan view of a flat panel display device to be processed showing dark spot defective pixels detected by a lighting inspection. 3 is a schematic configuration diagram of one pixel in a processed flat panel display device. FIG. 3A is a plan view thereof, FIG. 3B is a cross-sectional view taken along the line A-A in FIG. 5A is a schematic view of a dark spot defect pixel generated in the processed flat panel display device shown in FIG. 5A, FIG. 5A is a plan view thereof, FIG. 5B is a cross-sectional view taken along the line AA in FIG. FIG. 4 is a schematic diagram for explaining repair of the dark spot defective pixel shown in FIG. 4 by laser light, where FIG. A is a plan view thereof, and FIG. B is a cross-sectional view taken along the line AA of FIG. FIG. 6 shows repair of a bright spot defect pixel by laser light. A conceptual diagram for explaining that, FIG. A is a plan view, FIG. B is a sectional view, and FIG. 7 is a repair flowchart by laser light of a defective pixel in the A-A line of the Figure A.

  In FIG. 1, reference numeral 1 denotes a defective pixel repair device according to an embodiment of the present invention. The defective pixel repair apparatus 1 includes a defective pixel detection camera 10, a pixel processing unit 11, a half mirror 12, an observation light source 13, a half mirror 14, a repair laser light source 15, a lens 16, a lighting drive circuit 17, and a reverse bias. A circuit 18, a movable stage 19, a weak light pixel detection camera 20, and a cold mirror 21 are provided.

  As the defective pixel detection camera 10, for example, a 11 million pixel CCD digital camera ADK-1100B type manufactured by FROVEL of Japan can be used. This ADK-1100B type CCD digital camera has a wide dynamic range since the number of pixels is 4008 (H) × 2772 (V) and the pixel size is (9 × 9) μm, which is a wide light receiving area. When inspecting a large-area processed flat panel display device F by the defective pixel detection camera 10, the image display surface is divided into a predetermined area.

As the faint light pixel detection camera 20, for example, a 2 million pixel CCD digital camera, MicroFire Monochrome, having sensitivity up to the near infrared region manufactured by Photonic Instruments Inc. of the United States can be used. The number of pixels is 1600 (H) × 1200 (V), and the size of one pixel is (7.4 × 7.4) μm.
The pixel processing unit 11 is connected to the outputs of the defective pixel detection camera 10 and the weak light pixel detection camera 20, and the luminance of the pixels captured by the defective pixel detection camera 10 and the weak light pixel detection camera 20 is increased. Compared with the brightness of the stored reference value, specify pixels that shine with a brightness higher than the reference value as bright spot defective pixels, specify pixels that shine with a brightness lower than the reference value as dark spot defective pixels, and A function for storing two-dimensional coordinates is provided. As will be described later, the movable stage 19 or the irradiation position of the repair laser light is moved and controlled based on the two-dimensional coordinates stored so that the repair laser light accurately irradiates the defective pixel. Furthermore, the area of the leaked spot of the dark spot defective pixel can be stored, and a function of varying the irradiation area of the repair laser beam according to each area is provided.

  The movable stage 19 can place and fix the flat panel display device F to be processed on a horizontal surface, and moves the X-axis direction and Y-axis to a pixel position determined to be a defective pixel by a drive control device (not shown). It has a function that can move finely in the axial direction.

  The lighting drive circuit 17 applies a bias voltage in the forward direction to the processed flat panel display device F fixed on the movable stage 19, and lights all the pixels for each of the R, G, and B pixels. It has. The lighting of the processed flat panel display device F by the lighting driving circuit 17 is not only for inspecting whether or not a bright spot defective pixel exists on the image display surface, but also for the success or failure of repair of the processed flat panel display device F. Is also used to turn on the processed flat panel display device F in the same manner as described above.

  The reverse bias circuit 18 has a function of applying a voltage in the reverse bias direction to the flat panel display device F to be processed. By applying a reverse bias voltage, faint light in the near infrared region is emitted from the image display surface of the processed flat panel display device F. The weak light pixel detection camera 20 senses the weak light.

  The observation light source 13 is a light source for observing each pixel of the processed flat panel display device F.

  The repair laser light source 15 is a light source for irradiating a defective pixel with repair laser light. As the repair laser light, YAG laser light or other laser light is used according to the constituent material of the repair location.

  The half mirror 12 reflects and reflects the light from the observation light source 13 on the optical axes of the defective pixel detection camera 10 and the weak light pixel detection camera 20 and irradiates a predetermined pixel of the flat panel display device F to be processed. The half mirror 14 reflects the laser light from the repair laser light source 15 on the optical axes of the defective pixel detection camera 10 and the weak light pixel detection camera 20 to reflect the bright spot defect pixel and the dark spot defect pixel. Irradiate the defective pixels.

  In the defective pixel repair device 1 of this embodiment, a weak light pixel detection camera is arranged above the movable stage 19 so that the optical axis L is perpendicular to the mounting surface of the horizontal processed flat panel display device F. 20 is arranged. A cold mirror 21, a half mirror 12, a half mirror 14, and a lens 16 are disposed with a predetermined gap therebetween. The cold mirror 21 and the half mirror 12 are arranged in parallel with each other at a predetermined interval and at an angle of 45 degrees with respect to the mounting surface of the movable stage 19. With respect to the angle of 135 degrees.

  The near-infrared light of weak light from the processed flat panel display device F passes through the cold mirror 21 and enters the camera 20 for detecting weak light pixels. On the other hand, visible light from the processed flat panel display device F is reflected by the cold mirror 21 and enters the defective pixel detection camera 10 disposed at an angle of 45 degrees with respect to the plane of the cold mirror 21. Output terminals of the defective pixel detection camera 10 and the faint light pixel detection camera 20 are connected to an input terminal of the pixel processing unit 11.

  The observation light source 13 is arranged so that its optical axis is at an angle of 45 degrees with respect to the plane of the half mirror 12.

  The repair laser light source 15 is arranged so that its optical axis is at an angle of 45 degrees with respect to the plane of the half mirror 14.

  Either the lighting drive circuit 17 or the reverse bias circuit 18 is switched and connected to the processed flat panel display device F.

  FIG. 3 shows an EL display panel type as a flat panel display device. FIG. 6A schematically shows a planar structure of one normal pixel Fn of the light emitting portion of the EL display panel, and FIG. 5B schematically shows a cross-sectional structure on the AA line of FIG. It is a thing. The normal pixel Fn, which is a light emitting portion, is composed of an insulating layer 34 for separating the EL layer 31, the anode electrode 32, and the cathode electrode 33. In FIG. 3, the opening area 35 having a planar structure of the normal pixel Fn emits light.

  An EL element of an EL display panel type is an element that is excited and emits light by applying an electric field to a fluorescent compound. The EL element includes an inorganic EL element whose EL layer is an inorganic compound, and an organic EL element that is an organic compound. There is. The material of the EL layer of the inorganic EL element is a sulfide system mainly containing strontium (Sr), gallium (Ga), sulfur (S), cerium (Ce) and the like. In addition, the material of the EL layer of the organic EL element includes low molecular weight materials such as organic phosphors and distyrylbenzene derivatives based on metal complex-based 8-hydroxynoline aluminum complexes, polyparaphenylene vinylene (PPV), and polyfluorene. There is a (PF) polymer material.

  FIG. 4 shows an example of a dark spot defect in which pinholes, particles, and the like are generated when the anode electrode 32 and the EL layer 31 are formed, and the anode electrode 32 and the cathode electrode 33 are short-circuited to generate a leak portion 36. The pixel Ff is also shown. When such a dark spot defective pixel Ff is generated, the pixel is lit only with a luminance equal to or lower than a reference value, depending on the area of the leaked portion. In the dark spot defect pixel Ff, for example, it is difficult to detect a minute leak portion 36 of about several tens of nm with an optical microscope or the like. Even if it can be detected, it is determined whether or not the portion 36 is a true defect. Nondestructive and cannot be specified.

  When there is such a dark spot defective pixel Ff, by applying a reverse bias to the processed flat panel display device F by the reverse bias circuit 18, weak light in the near infrared region such as hot electrons from the leaked portion 36 is generated. Since the emitted faint light is detected by the faint light pixel detection camera 20, the leak location 36 can be specified. In this embodiment, a reverse bias voltage of about 5 to 10 V is usually applied to the processed flat panel display device F shown in FIG.

  In FIG. 5, when the leaked portion 36 of the dark spot defective pixel Ff is specified, the range 33 a of the cathode electrode 33 that irradiates the repairing laser beam is determined, and the minute portion of the cathode electrode 33 in the irradiation range of the repairing laser beam is determined. Remove only 33b and repair. When the weak light pixel detection camera 20 determines that the leak point 36 is present, the two-dimensional coordinate information of the leak point 36 and the area of the leak point 36 are stored in the pixel processing unit 11, and the leak point information is included in the leak point information. Based on this, the repair laser light irradiation position is positioned so that the repair laser light emitted from the repair laser light source 15 irradiates the leak portion 36. For example, the position of the flat panel display device F to be processed may be positioned by moving the movable stage 19, or the angle of the half mirror 14 is changed in the optical path of the repair laser beam emitted from the repair laser light source 15. You may make it position by doing. Moreover, you may position using these both methods together.

  As described above, the repaired laser beam is applied to the leaked portion 36 of the flat panel display device F to be processed, and the minute portion 33b of one cathode electrode 33 of the leaked portion 36 is removed. Can be repaired.

  As a repair laser beam for repairing the leak portion 36, although depending on the constituent material of the repair portion, YAG laser light or other laser light can be used depending on the constituent material. In FIG. 5, if the material of the cathode electrode 33 is an ITO film and the film thickness is about several tens of nm, when the YAG laser beam having a wavelength of 1064 nm is used, only the cathode electrode 33 can be removed with an energy of several μJ. .

  FIG. 6 is a conceptual diagram for explaining repair of the bright spot defect pixel Fs by the repair laser beam. This is an example showing a method of repairing a pixel in which a voltage is constantly applied between the anode electrode 32 and the cathode electrode 33 due to a defect (not shown) such as a TFT circuit and the pixel becomes a bright spot defect pixel Fs. When the defective pixel detection camera 10 determines that the pixel is a bright spot defective pixel Fs, the repair laser light emitted from the repair laser light source 15 is based on the size information of the pixel opening region 25. The repair laser beam irradiation position is positioned so that the entire region 35 is irradiated. For example, the position of the flat panel display device F to be processed may be positioned by moving the movable stage 19 or by changing the optical path of the repair laser beam emitted from the repair laser light source 15. You may make it position. Further, both of these positioning methods may be used in combination.

  As described above, the entire opening 35 of the bright spot defect pixel Fs of the flat panel display device F to be processed is irradiated with the repairing laser light, and the cathode electrode 33 in the entire area of the opening 35 is removed, so that the EL Since no voltage is constantly applied to the layer 31, no light is emitted. That is, the bright spot defective pixel Fs can be changed to a kind of dark spot defective pixel Ff.

  As the repair laser light for repairing the bright spot defective pixel Fs, YAG laser light or other laser light can be used according to the constituent material of the repair location. In FIG. 6, when the material of the cathode electrode 33 is an ITO film, the film thickness is about several tens of nm, and YAG laser light having a wavelength of 1064 nm is used, only the cathode electrode 33 is removed with energy of several μJ. be able to.

  As described above, the repair method of the bright spot defective pixel Fs is not a repair method to the normal pixel Fn. However, since the bright spot defective pixel Fs is more conspicuous as a defect than the dark spot defective pixel Ff, the flat panel display device is used. In general, when the number of bright spot defective pixels Fs is one, regardless of the panel size, it is generally a defective product. The dark spot defective pixel Ff depends on the panel size. However, in the case of a panel size of several tens of inches, if there are several dark spot defective pixels Ff, the defective spot defective pixel Ff is regarded as a non-defective product. Is a very effective repairing method for making the bright spot defective pixel Fs into the dark spot defective pixel Ff.

  Next, based on the above defective pixel repair method, the operation of the defective pixel repair device 1 configured as described above will be described with reference to FIG. FIG. 7 shows one flow of the repair operation for the flat panel display device F to be processed by the defective pixel repair device 1 of the present invention.

  First, the flat panel display device F to be processed is placed and fixed in a horizontal state on the placement surface on the movable stage 19.

  Next, the processed flat panel display device F is turned on for each of the R, G, and B pixels by the lighting drive circuit 17, and the panel lighting inspection is started.

  Then, the entire pixel region is detected by the defective pixel detection camera 10, and the defective pixel of the bright spot defective pixel Fs and / or the dark spot defective pixel Ff is detected by the pixel processing unit 11. If a defective pixel is detected, the luminance, range, and position of the defective pixel are sequentially stored in the pixel processing unit 11 (step S1). As a method for detecting all the pixel areas of the flat panel display device F to be processed, batch inspection may be performed using the defective pixel detection camera 10 of the tens of millions of pixels class, or the movable stage 19 may be moved to perform division inspection. You may take the method of doing.

When the inspection of all the pixels is completed, it is determined whether or not the bright spot defective pixel Fs or the dark spot defective pixel Ff is detected (step S2).

  When the bright spot defective pixel Fs or the dark spot defective pixel Ff is not detected, the next flat panel display device F to be processed is replaced (step S13).

  Next, when the bright spot defective pixel Fs and / or the dark spot defective pixel Ff are detected, for example, the movable stage 19 is controlled based on the defective pixel position information of the pixel processing unit 11, and the defective pixel is repaired with the repair laser beam. Is positioned so as to be able to irradiate (step S3).

  In the next step S4, it is determined whether the defective pixel is a bright spot defective pixel Fs or a dark spot defective pixel Ff.

  When the defective pixel is determined to be the bright spot defective pixel Fs in step S4, the repair laser light source 15 emits light based on the size information of the opening 35 of the bright spot defective pixel Fs determined by the pixel processing unit 11. The irradiation range of the repair laser light is adjusted so that the entire repair region is irradiated with the repair laser light. When this adjustment is completed, the process shifts to the bright spot defect pixel Fs repair laser beam irradiation in step S5 in which the repair laser beam irradiation is performed.

  If it is determined in step S4 that the defective pixel is the dark spot defective pixel Ff, the reverse bias circuit 18 applies a voltage to the processed flat panel display device F with a reverse bias (step S6).

  Then, the weak light pixel detection camera 20 detects the two-dimensional coordinates of the weak light emitted from the leaked portion 36 of the processed flat panel display device F, which is reverse-biased, and the energy intensity of the weak light on the two-dimensional coordinates. Compared with a reference value of a good flat panel display device registered in advance, whether or not it is a leak point 36, and if it is a leak point 36, the size of the range 33a (FIG. 5A) is set to the pixel processing unit 11. The process proceeds to step S7 where the determination is made.

  Then, whether or not the weak light is detected is determined based on whether or not the weak light is detected in step S8. If the weak light is not detected, the process moves to the defective pixel position in step S3.

  When the weak light is detected, the position is finely adjusted by the movable stage 19 based on the two-dimensional coordinates of the leak portion 36 determined by the pixel processing unit 11. When the fine adjustment is completed, the repair laser light 15 is irradiated with the repair laser beam to the leak portion 36 (step S9). The area to be irradiated with the repair laser light is detected by the weak light pixel detection camera 20 and varied according to the size or the like of the weak light processed by the pixel processing unit 11. Then, repair by irradiating the laser beam for repair.

  In order to determine whether the repair of the bright spot defective pixel Fs and / or the dark spot defective pixel Ff of the processed flat panel display device F is successful, the processed flat panel display device F is shifted to panel lighting in step S10. The lighting drive circuit 17 turns on the processed flat panel display device F again, and the pixel processing unit 11 checks whether or not the repair is successful.

  Next, in the repair OK process in step S11, it is determined whether or not the bright spot defective pixel Fs and / or the dark spot defective pixel Ff are successfully repaired in the lighting inspection. Return to step S6.

  If the repair is successful, the process proceeds to the defect presence / absence process in step S12. If there is still a defective pixel to be repaired, the process proceeds to the process of moving to the defective pixel in step S3. Repair processing of the flat panel display device F to be processed is completed.

  As described above, the defective pixel repair method of the present invention for repairing the bright spot defective pixel Fs and / or the dark spot defective pixel Ff by using the defective pixel repair device 1 of the present invention involves an operator as apparent from the repair flow. Even in the case of a flat panel display device F to be processed having a large area, the defective pixel can be repaired efficiently.

  In addition, it is needless to say that in the repair flow described above, the defect defect pixel Ff and the bright spot defect pixel Fs can be sequentially repaired on the image display surface of the processed flat panel display device F. In the defective pixel repair method of the present invention, all the dark spot defective pixels Ff or all the bright spot defective pixels Fs are repaired first, and then all the bright spot defective pixels Fs or all the dark spot defective pixels are repaired. The method of repairing Ff may be adopted, and the one with more dark spot defective pixels Ff or bright spot defective pixels Fs is repaired first, and then the few dark spot defective pixels Ff or bright spot defective pixels Fs are repaired. It should be noted that a repair flow may be taken.

  In the above embodiment, the present invention has been described by taking an EL display panel as an example of a flat panel display device. However, the present invention can also be applied to detection and repair of defective pixels in a field emission device panel. Keep it.

  The present invention can be used in the electronic machine industry for manufacturing a defective pixel repair device for flat panel display devices and the electronic equipment industry for manufacturing flat panel display devices.

It is a functional block diagram which shows the basic composition of the defective pixel repair apparatus of one Example of this invention. It is a partial top view of the to-be-processed flat panel display device which shows the defective pixel detected by the lighting test | inspection. FIG. 2 is a schematic configuration diagram of one pixel in a processed flat panel display device, where FIG. A is a plan view thereof, and FIG. B is a cross-sectional view taken along line AA of FIG. FIG. 4 is a schematic diagram of a dark spot defect pixel generated in the processed flat panel display device shown in FIG. 3, wherein FIG. A is a plan view thereof, and FIG. B is a cross-sectional view taken along the line AA of FIG. is there. 5A and 5B are schematic diagrams for explaining repair of the dark spot defective pixel shown in FIG. 4 by repair laser light, where FIG. A is a plan view thereof, and FIG. B is a cross-sectional view taken along the line AA of FIG. It is. It is a conceptual diagram for demonstrating repair by the laser beam for repair of a luminescent spot defect pixel, Comprising: FIG. A is the top view, FIG. B is sectional drawing on the AA line of the same FIG. It is a repair flow figure by the laser beam for repair of a defective pixel.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Leak location detection repair apparatus (of flat panel display device) of one Example of this invention, 10 ... Camera for defective pixel detection, 11 ... Pixel processing unit, 12 ... Half mirror, 13 ... Light source for observation, 14 ... Half Mirror, 15 ... Repair laser light source, 16 ... Lens, 17 ... Driving circuit for lighting, 18 ... Reverse bias circuit, 19 ... Movable stage, 20 ... Camera for weak light pixel detection, 21 ... Cold mirror, 31 ... EL layer, 32... Anode electrode, 33... Cathode electrode, 33 a. , 33c, a range in which the repair laser beam is irradiated on the bright spot defect pixel Fs, 33d, the bright spot defect pixel F Of the cathode electrode 33 removed by the repair laser beam in FIG. 34, an insulating layer, 35, an opening (region) of one pixel, 36, a leaked portion, F, a flat panel display device to be processed, Ff, a dark spot defect Pixel, Fs ... Bright spot defect pixel, Fn ... Normal pixel

Claims (9)

A lighting drive circuit for applying a voltage in a forward bias direction to the processed flat panel display device to light the processed flat panel display device;
A reverse bias circuit for applying a voltage in a reverse bias direction to the processed flat panel display device;
A defective pixel detection camera for detecting defective pixels on the image display surface of the processed flat panel display device to which a voltage is applied in the forward bias direction;
A weak light pixel detection camera for identifying weak light emitted from a defective pixel of the processed flat panel display device to which a voltage is applied in the reverse bias direction, using two-dimensional coordinates of the defective pixel;
Compare the brightness energy intensity of each pixel detected by the defective pixel detection camera with the brightness of the reference value of a non-defective flat panel display device registered in advance. In addition, if the luminance is low, it is determined as a dark spot defective pixel having a leak portion, and the pixel having a function of specifying and storing the bright spot defective pixel and the dark spot defective pixel by two-dimensional coordinates of the image display surface A processing unit;
The entire area of the cathode electrode is irradiated to the bright spot defective pixel, and the leaked spot range of the cathode electrode is irradiated to the whole area of the cathode electrode, and all or a part of the cathode electrode is irradiated. A laser light source for repair,
A movable stage for mounting and fixing the processed flat panel display device;
The movable stage and the irradiation position of the laser beam from the repair laser light source are detected in all pixel regions of the processed flat panel display device based on the two-dimensional coordinate information stored in the pixel processing unit. A defective pixel repair device for a flat panel display device, comprising: a bright spot defective pixel; and a movement control means for moving the bright spot defective pixel relatively to the area of the dark spot defective pixel.   The defective pixel repair device of a flat panel display device according to claim 1, wherein the movable stage is movable in at least a two-dimensional direction of an X direction and a Y axis direction.   The movement control means controls the movable stage in at least a two-dimensional direction on the basis of information from the pixel processing unit, and places all the pixel areas of the flat panel display device to be processed mounted and fixed on the movable stage. 2. A function of moving the two-dimensional coordinate position of the bright spot defective pixel and / or the dark spot defective pixel to the irradiation position of the repair laser beam from the repair laser light source is provided. A defective pixel repair device for a flat panel display device as described.   4. The apparatus for detecting and repairing a leak point of a flat panel display device according to claim 1, wherein the flat panel display device is an electroluminescence panel.   2. The apparatus for detecting and repairing a leak location of a flat panel display device according to claim 1, wherein the flat panel display device is a field emission device panel. Placing and fixing the processed flat panel display device in a horizontal state on a movable stage movable in the X-axis direction and the Y-axis direction;
Applying a voltage in a forward bias direction to the processed flat panel display device;
Inspecting for the presence or absence of defective pixels across the entire image display surface of the processed flat panel display device to which a voltage is applied in the forward bias direction;
In the inspection process for the presence or absence of the defective pixel, if there is a pixel whose luminance is higher than the luminance of the reference value, the pixel is regarded as a bright spot defective pixel, and the two-dimensional coordinates of the bright spot defective pixel are stored. If there is a pixel with a luminance lower than the luminance, capturing the pixel as a dark spot defective pixel and storing the two-dimensional coordinates of the dark spot defective pixel;
Irradiating a region of each stored bright spot defective pixel of the processed flat panel display device after the inspection with a laser beam, and removing a cathode electrode of the bright spot defective pixel;
Applying a voltage in the reverse bias direction to the processed flat panel display device after the inspection, and detecting weak light emitted from the leaked spot of each dark spot defect pixel stored in the leaked spot Irradiating a laser beam for repair, and removing a cathode electrode corresponding to the area of the leaked portion. A method for repairing defective pixels in a flat panel display device. In the inspection process for the presence or absence of the defective pixels, the number of dark spot defective pixels on the image display surface of the flat panel display device to be processed is within an allowable range or none, and is equal to the luminance of the reference value 6. The flat according to claim 5, further comprising a step of removing a defective pixel repair process of the flat panel display device and introducing a new flat panel display device to be processed if the number of pixels having luminance within an allowable range is most or all. A defective pixel repair method for a panel display device.   7. The defect of the flat panel display device according to claim 6, wherein the area where the stored bright spot defective pixel is irradiated with laser light is the entire range of the cathode electrode of the bright spot defective pixel. Pixel repair method. After the process of removing all the bright spot defective pixels and / or dark spot defective pixels is completed, a forward bias voltage is applied to the processed flat panel display device again to light the image display surface, and the processed The method for repairing defective pixels of a flat panel display device according to claim 6, further comprising a step of inspecting whether the flat panel display device is repaired to a desired state.

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