JP2006320792A - Spacer coating apparatus, and spacer coating method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a technique which enables the arrangement of a spacer on the desired position relating to an apparatus arranging the spacer to a treatment object. <P>SOLUTION: In a spacer coating apparatus 1, a condition of a discharge hole is tested previously to specify an abnormal discharge hole. When a discharge of a discharge liquid to the treatment object 11 is carried out, a discharge operation of the abnormal discharge hole is stopped such that the discharge from a normal discharge hole be carried out to a discharge position for which the abnormal discharge hole is responsible. An adjacent hole to the abnormal discharge hole is unbalanced, and in the discharge position for which the abnormal discharge hole is responsible, the number of spacers is counted. To a deficient defect discharge position, the discharge liquid is discharged from the normal discharge hole, and the spacer is added. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to an apparatus for disposing a spacer on a processing object, and more particularly to a spacer coating apparatus for disposing a spacer by discharging a discharge liquid in which spacers are dispersed onto the processing object.

Conventionally, spacers have been inserted between the substrates holding the liquid crystal of the liquid crystal panel in order to keep the distance between the substrates constant.
Ink jet printers allow precise control of the discharge amount and position, so instead of ink, discharge liquid in which spacers are dispersed is discharged from the print head of the ink jet printer, and spacers are placed on the color filters and the substrate. ing.

  If there is an abnormality such as when the nozzles of the print head are clogged, the discharge liquid will not be discharged normally, and it will not be possible to place the required number of spacers at the discharge positions where spacers are to be placed. Further, the clogged nozzle also affects the discharge state of the adjacent nozzle, and the discharge amount of the nozzle becomes unstable.

As for the arrangement method of the spacer, there are the following prior arts.
JP-A-11-24083 JP 2002-372717 A JP 2002-72218 A JP 2005-4094 A

  The present invention was created to solve the above-described disadvantages of the prior art, and an object of the present invention is to provide a spacer coating apparatus that can eliminate the uneven arrangement of the spacers and can dispose a reference number or more of spacers at the discharge position. It is in.

  When the position where the discharge liquid is discharged is photographed with a camera and image analysis is performed, the number of spacers arranged at each discharge position can be counted, and the discharge liquid is landed again at a position where the spacer is insufficient, Spacers can be added.

However, since image analysis takes a long time, if the number of spacers at all ejection positions is to be inspected, it becomes impossible to keep up with the arrangement speed of the spacers of the print head.
In particular, the spacer has a fine diameter of 4 to 5 μm, and a high-magnification camera is required to perform image processing on the spacer. Therefore, if the entire area is to be inspected, the configuration of the inspection apparatus becomes large. The burden of image processing is large.

  Therefore, in the present invention, first, the discharge hole is tested in advance, and the discharge liquid is not discharged from the discharge hole determined to be abnormal, and the discharge liquid is discharged from the normal discharge hole to the discharge position assigned to the discharge hole. To discharge.

  And, one side or two side discharge holes adjacent to the abnormal discharge holes are also likely to be abnormal, so they are not treated as normal, and those discharge holes are responsible for the discharge position where the discharge liquid is discharged. Thus, the number of spacers can be counted, and a discharge liquid can be added and discharged from a normal discharge hole at a short discharge position to add a spacer.

That is, the present invention relates to a discharge table on which a processing object is arranged, a print head having a plurality of discharge holes through which discharge liquid in which spacers are dispersed is discharged, the processing object on the discharge table, and the printing A moving device that relatively moves the head, and the discharge holes discharge the discharge liquid to discharge positions on the processing object, respectively, and are spacer application devices that place spacers, A test device for testing the state of each of the discharge holes; the discharge hole determined to be abnormal is identified from the detection result of the test device; A spacer coating device configured to discharge the discharge liquid from the discharge holes.
In addition, the present invention has a detection device that detects the surface state of the object to be processed, and counts the number of spacers at the discharge position from the detection result of the detection device, and compares it with a reference number to determine whether it is good or bad. The spacer coating apparatus is configured to additionally discharge the discharge liquid from a normal discharge hole at a discharge position determined to be defective.
Further, the present invention counts the number of spacers at the discharge position where the discharge liquid is discharged from the discharge hole located next to the discharge hole determined to be abnormal among the discharge holes, and determines the discharge as defective. It is the spacer coating device which adds the said spacer to a position.
Further, the present invention provides a spacer arrangement in which a plurality of ejection holes provided in a print head are made to eject ejection liquid in which spacers are dispersed at ejection positions assigned to the ejection holes, and the spacers are arranged at the ejection positions. In this method, the state of each of the discharge holes is tested in advance, and the discharge liquid is not discharged from the abnormal discharge hole to the discharge position assigned to the discharge hole having an abnormal test result. A spacer arrangement method for discharging the discharge liquid from
In addition, the present invention counts the number of spacers at the discharge position at least adjacent to the abnormal discharge hole, and discharges the other discharge holes from the other discharge holes to a defective discharge position that is less than the reference number. This is a spacer arrangement method for additionally discharging liquid.
Further, the present invention is a spacer arrangement method in which the discharge liquid is landed from two or more different discharge holes at the discharge position, and the number of the spacers at the discharge position is counted.

  In the present invention, the discharge position where each discharge hole should discharge the discharge liquid, that is, the discharge position that each discharge hole is in charge of is known in advance, and in order to reduce the burden of inspection, the discharge hole is tested, The state is classified as normal and abnormal, the discharge liquid is not discharged from the abnormal discharge hole, and the discharge liquid is discharged from the normal discharge hole at the position where the abnormal discharge hole takes charge, and a spacer is arranged. be able to.

  In addition, the discharge liquid may not be normally discharged due to the influence of the abnormal discharge hole in at least one discharge hole adjacent to the abnormal discharge hole, or one and two adjacent discharge holes. Such a discharge hole is unstable and cannot be said to be a normal discharge hole.

  Therefore, in the present invention, the discharge position assigned to the unstable discharge hole is inspected for the number of spacers, and when the spacer is insufficient, the discharge liquid is added and discharged from the normal discharge hole, and the spacer is added. be able to.

  Since only the discharge positions handled by the unstable discharge holes are inspected, the inspection burden for arranging more spacers than the reference number is light.

Reference numeral 1 in FIGS. 1 and 2 represents a spacer coating apparatus of a first example of the present invention. FIG. 1 is a side view of the spacer coating apparatus 1 viewed from the lateral direction, and FIG. 2 is a plan view viewed from above.
This spacer coating apparatus has a discharge table 13, and a first place 15 and a second place 16 are set on a predetermined position of the discharge table 13.

  The first place 15 is a place where an unprocessed processing object 11 is arranged, and the processing object 11 placed on the first place 15 by a transfer device and a substrate alignment device (not shown) The first place 15 is the starting point, and the second place 16 is the turning point. The first place 15 is configured to reciprocate between the second places 15 and 16. Reference numeral 30 in FIG. 1 indicates a moving path along which the processing object 11 reciprocates.

  A print head 21 and a detection device 22 are arranged in this order from the first location side between the first location 15 and the second location 16, that is, above the printing table 13 between the movement paths 30. .

  The print head 21 and the detection device 22 are attached to moving devices 25 and 26, respectively, so that they can reciprocate in a direction perpendicular to the movement path 30 of the processing object 11 in a plane parallel to the surface of the discharge table 13. It is configured. Reference numerals 31 and 32 in FIG. 1 indicate movement paths along which the print head 21 and the detection device 22 reciprocate.

A control device 20 is connected to the print head 21 and the detection device 22, and the movement of the print head 21 and the detection device 22 is controlled by the control device 20.
A discharge liquid supply device 27 is connected to the print head 21. The discharge liquid supply device 27 stores a discharge liquid in which spacers are dispersed in a dispersion liquid, and is configured so that the control apparatus 20 can discharge the discharge liquid from the print head 21 at a desired timing. .

  Hereinafter, the procedure of spacer application when the processing object 11 is a color filter will be described. However, the processing object 11 of the present invention is not limited to a color filter.

  FIG. 7 is a plan view for explaining the surface of the untreated object 11 to be processed. In the case of a color filter, red, green, and blue window portions 55R, 55G, and 55B corresponding to each color of R, G, and B are regularly arranged on the surface, and the window portions 55R, 55G, and 55B of the respective colors are arranged. , BM (black matrix) lines 56.

Here, the BM line 56 extends in the vertical and horizontal directions and is formed in a lattice shape, and the point where the horizontal direction X and the vertical direction Y intersect is a discharge position A _{x, y} suitable for arranging the spacers. Yes.

In FIG. 7 and FIG. 8 described later, the ranges of the subscripts x and y are x = 1 to 8 and y = 1 to 5, and 40 discharge positions A _1,1 to A _8,5 are shown. .

Position information of the discharge position discharge position A _{x, y} of the processing object 11 is input to the control device 20 in advance, and when the processing object 11 is moved, the position of the print head 21 and the position of the detection device 22 are detected. The relative positional relationship between the ejection positions A _{x, y} is known, and the processing object 11, the print head 21, and the detection device 22 are moved, and printing is performed above the desired position of the processing object 11. The head 21 and the detection device 22 are configured to be positioned.

Here, in the processing object 11, either the x-direction row or the y-direction row of the ejection positions A _{x, y} is parallel to the movement path 31 of the print head 21 and the movement path 32 of the detection device 22. It is arranged to be. The processing object 11 is moved by the control device 20, and the processing object 11 is temporarily stopped when the first row of the ejection positions A _{x, y} is located directly below the movement path 31 of the print head 31.

The print head 21 is generally provided with a plurality of ejection holes (nozzles) such as 128 or 256. Here, as shown in FIG. 3, a state is shown in which _six discharge holes N _{1 to} N ₆ are arranged in a straight line.

Spacing discharge holes N ₁ to N _6, the discharge position A _x, is greater than the distance _y, and columns of discharge holes N ₁ to N _6, the discharge position A _x, the angle formed by the row of _y is adjusted Thus, when the print head 21 is moved along the movement path 31 while the processing object 11 is stationary, each of the discharge holes N _{1 to} N ₆ can pass directly above the different discharge positions A _{x, y.} Has been.

Under the control of the control device 20, each of the discharge holes N _{1 to} N ₆ discharges the discharge liquid immediately above the discharge position A _{x, y} , and when the discharge liquid flies toward the discharge position A _{x, y} , the discharge position Land on A _{x, y} .

As a result, each the discharge hole N ₁ to N print head 21 while discharging from ₆ moves once, the ejection position A _x arranged in the same number of rows of discharge holes N ₁ to N ₆ was _discharged, the discharge liquid to _y Can be landed.

  The discharge liquid contains spacers at a predetermined content (number / volume). When the discharge liquid reaches the discharge position, the spacers contained in the discharge liquid are treated together with the dispersion liquid. It adheres on 11 discharge positions. The spacer is fixed at the discharge position when the dispersion liquid dries.

Here, when one discharge hole N ₄ in the print head 21 is abnormal, the discharge liquid is not discharged to the discharge position A _{4, y} in the row that the discharge hole N ₆ is responsible for or not. discharge position a _x of _less than _y, can not be placed spacers required number.

In the spacer coating apparatus 1, a test apparatus 23 is provided at a position within the movement range of the print head 21 that is out of the movement range of the processing object 11. As will be described later, the test device 23 tests the discharge states of the discharge holes N _{1 to} N ₆ of the print head 21 and closes them in advance with normal discharge holes N _{1 to} N ₃ , N ₅ , and N _6. Are classified into abnormal discharge holes N ₄ , and the result of the classification is input to the control device 20.
Therefore, abnormal discharge holes N ₄ is in charge, discharge position the ejection liquid is not ejected A _{4, y} can be specified in advance.

Therefore, in this spacer coating device 1, the control device 20 stops the discharge of the abnormal discharge hole N ₆ and discharges the discharge liquid from the other discharge holes N _{1 to} N ₃ , N ₅ , N _6. the discharge position a _{4, y} columns hole N ₆ is responsible not landing the discharge liquid, the other discharge hole N ₁ ~N _3, N _5, the discharge position a N ₆ is responsible _{1, y} to a _{3 , y} , A _{5, y} , A _{6, y} , the discharged liquid is landed.

In FIG. 8, the print head 21 moves in the Y direction of the drawing with respect to the discharge position A _{x, y} on the processing object 11, and discharge holes N _{1 to} N ₃ , N ₅ , excluding the abnormal discharge hole N ₄ , A state in which the discharge liquid is discharged from N ₆ to five rows of discharge positions A _{1, y to} A _{3, y} , A _{5, y} , A _{6, y} is shown. Reference numeral 57 denotes the landed discharge liquid, and reference numeral 58 denotes a spacer contained in the landed discharge liquid. Discharge liquid to the discharge position A _{4, y} columns abnormal discharge holes N ₄ is responsible for not landing, the spacer is not disposed.

The controller 20 is inputted with the interval between the discharge positions A _{x, y} and the number of the two sides x, y, and the discharge positions A _{x, y are associated} with the respective discharge holes N _{1 to} N _6. The movement amount of the processing object 11 is calculated in advance.
As described above, the print head 21 moves on the movement path 31, and after the discharge liquid is discharged to a dischargeable range, the processing object 11 is moved by the calculated distance in the second place direction.

At this time, if the processing object 11 is moved by the same number of rows as the number of the discharge holes N _{1 to} N ₆ , the discharge positions A _{7, y to} A _{12, y from} which the discharge liquid is not discharged become the print head 21. When the discharge liquid is discharged from the normal discharge holes N _{1 to} N ₃ , N ₅ , and N ₆ while moving the print head 21 as described above, the abnormal discharge hole is stopped. except for the discharge position a _{10, y} columns N ₆ is responsible, the discharge liquid is discharged in the next discharge position _{a 7, y ~A 12, y} .

As described above, when the movement and ejection of the print head 21 and the movement of the processing object 11 are alternately performed, the ejection positions A _{x, y} excluding the ejection position A _{z, y} of the row that the abnormal ejection hole N ₆ is responsible for are _displayed . The discharged liquid is landed.

When the processing object 11 moves and discharges by a distance less than the number of the discharge holes N _{1 to} N ₆ and discharges, at each discharge position A _{x, y} , two or more different discharge holes N _{1 to} N are provided. _{From 6} discharge liquid is discharged. As a result, the discharge liquid discharged from different discharge holes land a plurality of times in total. For example, when two ejection holes are moved, that is, moved by two rows, the ejection liquid is landed from three different ejection holes at each ejection position A _{x, y} .

The movement path 12 of the detection device 21 is close to the movement path 31 of the print head 21, the processing object 11 moves in the direction of the second location 16 _, and the discharge liquid is discharged to the new discharge holes A _{x, y.} The discharge holes A _{4, y} and A _{6, y} assigned to the abnormal discharge hole N ₄ are stationary below the movement path 32 of the detection device 22.

In this state, the detection device 22 moves along the movement path 32, images the surface state of a predetermined range including the discharge positions A4 _{, y} of the row where the discharge liquid is not discharged, and displays an image on the control device 20. Send.

When one discharge hole N ₄ becomes abnormal and the discharge operation of the discharge hole N ₄ stops, the discharge holes N ₃ and N ₅ adjacent to the abnormal discharge hole N ₄ are greatly affected. The discharge holes N ₂ and N ₆ adjacent to the holes N ₃ and N ₅ may be affected, and the discharge amount of these discharge holes N ₂ , N ₃ , N ₅ and N ₆ becomes unstable.

Unstable and abnormal discharge hole N ₄ discharge hole N _2, N _3, the N _5, the discharge position A ₁ of the column a normal discharge holes N _1, except for N ₆ is in _{charge, y,} reference number more than a few while the spacer 58 is disposed, abnormal discharge holes N ₄ column discharge position a _4, which was in _charge, the _y spacer is not disposed, unstable discharge holes _{N 2, N 3, N 5} , N 6 In the discharge positions A _{2, y} , A _{3, y} , A _{5, y} , A _{6, y} of the row that the person is responsible for, the discharge liquid does not land or the amount of the discharge liquid that lands is less than the normal amount In some cases, the reference number of spacers may not be arranged. Since such a discharge position _{Am, n} is defective, it is necessary to add a spacer.

The control device 20 analyzes the transmitted image, and discharge positions A _{3, y} , A _{5, y} (preferably at least one row on both sides of the discharge position A _{4, y} discharged from the abnormal discharge hole N ₄ (preferably, The number of spacers at the discharge positions A _{2, y} , A _{3, y} , A _{5, y} , A _{6, y} ) in two rows on both sides is counted, and defective discharge positions _{Am, n} less than the reference number are stored.

Except for the row in which the abnormal discharge hole N ₄ is in charge, the discharge liquid is discharged from the discharge holes N _{1 to} N ₆ to the discharge position A _{x, y} on the processing object 11, and the discharge position is the target of the pass / fail judgment. The processing object 11 for which the number of spacers A _{x and y} has been counted and the quality determination has been completed starts to move from the second location 16 toward the first location 15, and is responsible for the abnormal discharge hole N ₄ . When the discharge liquid is discharged one or more times from the normal discharge hole N ₆ to the discharge position A _{4, y} and the defective discharge position _{Am, n in the} row, and a spacer is added, each discharge position A _{x, y} In this case, a spacer having a reference number or more is arranged. Note that only the discharge holes N ₃ and N ₅ closest to the abnormal discharge hole N ₄ can be regarded as defective discharge holes, and the discharge holes N ₂ and N ₅ adjacent thereto can be handled as normal discharge holes.

As described above, if the abnormal discharge hole N ₄ is specified in advance and the discharge is stopped, the discharge position A _{4, y} assigned to the discharge hole N ₄ is always the defective discharge position A _{4, y.} since abnormal discharge holes N ₄ ejection position a ₄ which is _{responsible, y} can be discharged discharge liquid from normal discharge holes N ₁ without counting the spacer number.

The print head 21, discharge holes N ₁ to N as few columns worth than the number of ₆ is moved, the discharge liquid is discharged from the respective discharge positions A _x, discharge different two or more relative to the _y-holes N ₁ to N ₆ In this case, since the discharge liquid is discharged from the other discharge holes N ₆ to the discharge positions A _{4 and y} of the row that the abnormal discharge hole N ₄ is in charge of, the spacer is arranged, but the other is not abnormal The number of spacers to be arranged is reduced as compared with the row in which the discharge holes N _{1 to} N ₃ , N ₅ , and N ₆ are in charge.

Further, unstable discharge holes N _2, N _3, N _5, the discharge position A ₂ where N ₆ is _{responsible, y, A 3, y,} A 5, y, the even A _{6, y,} normal discharge hole N The number of spacers is smaller than the discharge position in charge by only _one .

These abnormal discharge holes N ₄ or unstable discharge hole _{N 2, N 3, N 5} , the discharge position A ₂ of the column N ₆ is _{responsible, y} to A 6, for also _y, the number of the spacer by the detection device 22 And the discharge liquid can be discharged from the normal discharge hole N ₁ to the defective position _{Am, n} where the number of spacers is insufficient.

Since only the discharge positions assigned to the abnormal discharge holes N ₄ and the unstable discharge holes N ₂ , N ₃ , N ₅ , N ₆ are inspected, the number of discharge holes is large, and normal discharge holes are abnormal and unstable. This is particularly effective when there are more than a large number of discharge holes.

In the above, the same print head 21 performs the first discharge to the unprocessed processing object 11 and the additional discharge to the discharge position _{Am, n} determined to be defective. It is not limited.

  FIG. 5 shows a spacer coating apparatus 2 according to a second example of the present invention, in which print heads 21 a and 21 b are arranged on both sides of the inspection apparatus 22. The print heads 21 a and 21 b are attached to the moving devices 25 a and 25 b, and are configured to move on movement paths 31 a and 31 b in a direction perpendicular to the movement path 30 of the processing target 11.

  In this spacer coating device 2, test devices 23a and 23b are provided in positions within the movement range of the print heads 21a and 21b and deviated from the movement range of the processing object 11, respectively. The presence / absence and position of the abnormal discharge hole 21b are specified.

After the discharge liquid is discharged to the unprocessed processing object 11 by one print head 21a, the number is counted by the inspection device 22 and the defective discharge position _{Am, n} is specified, then the other print head 21b is normal. A discharge liquid can be discharged from a proper discharge hole, and a spacer can be added.

  In the above, both the processing object 11 and the print head 21 move in directions perpendicular to each other. When the movement direction of the processing object 11 is taken as the X axis, the movement direction of the print head 21 is the Y axis. However, the print head 21 and the detection device 22 may be stationary, and the processing target 11 may be configured to move in both the X-axis and Y-axis directions. Conversely, the processing object 11 may be stationary and the print head 21 may move in the X-axis and Y-axis directions.

  FIG. 6 shows the spacer coating apparatus 3 of the third example of the present invention. Similarly to the spacer coating devices 1 and 2, the spacer coating device 3 is configured such that the print head 21 and the detection device 22 are attached to the moving devices 25 and 26, respectively, and reciprocate in parallel directions. ing. Reference numerals 31 and 32 in the drawing indicate movement paths of the print head 21 and the detection device 22.

  In the spacer coating device 3, the moving devices 25 and 26 are attached to the rail 29, and the moving devices 25 and 26 are configured to reciprocate along the rail 29.

  The movement directions of the movement devices 25 and 26 are perpendicular to the direction of the print head 21 and the detection device 22 when the movement devices 25 and 26 are stationary. As a result, the print head 21 and the detection device 22 It can move in the X-axis direction and the Y-axis direction within a plane parallel to the surface, and the print head 21 and the detection device 22 can be arranged at desired positions on the processing object 11 arranged within the movement range. It is configured.

  Also in this spacer coating device 3, a test device 23 is provided at a position within the range of movement of the print head 21 and does not overlap with the processing object 11, and each discharge hole is tested to determine whether there is an abnormal discharge hole. The location is specified. As with the spacer coating apparatuses 1 and 2 in the first and second examples, discharge liquid is discharged from the normal discharge holes to the rows that are handled by the abnormal discharge holes, and the number of spacers is set to the rows that are handled by the unstable discharge holes. Inspected and discharged liquid can be re-discharged from the normal discharge hole to the defective discharge position.

Next, an example of a test method for the discharge state of the discharge holes N _{1 to} N ₆ will be described.
As shown in FIG. 4, a strobe 35 and a camera 36 are arranged in the test chambers 23, 23 a, and 23 b, and the discharge liquid 38 discharged from the discharge holes N _{1 to} N ₆ reaches the tray 37. In the meantime, the strobe 35 emits light after a certain delay time from the droplet discharge timing from the head, and the flight state of the discharge liquid 38 is photographed by the camera 36.

Shooting result is transmitted to the controller 20, an image analysis is performed, is compared with a normal case, it is possible to discharge state to determine normal or abnormal in each discharge hole N ₁ to N _6. When the discharge liquid is not discharged, when the flight speed of the discharge liquid is abnormal, or when the discharge amount is abnormal, it is determined to be abnormal, and the discharge of the discharge hole is stopped.

  When processing a large number of processing objects 11, it is possible to test the discharge holes before starting the processing for each processing object 11, or to perform testing for a plurality of sheets.

  In the spacer coating apparatuses 1 to 3, detection of a predetermined row is performed while discharging the discharge liquid onto the processing object 11. However, after the discharge to the processing object 11 is completed, the detection apparatus 22. Such detection may be performed.

Moreover, although the said control apparatus 20 performed control of the operation | movement of the print head 21 and the detection apparatus 22, and image analysis, you may make them take charge of a separate control apparatus.
In the above example, ejection by the print head 21 and photographing by the detection device 22 are performed simultaneously, but they can be performed alternately.

Further, in the above example and detector 22 were moved on the movement path 32, it is not necessary to move, even when stationary, abnormal discharge hole N ₄ ejection position A ₄ which was in _{charge, y} of At least the discharge positions A _{3, y} , A _{5, y in} one row on both sides (preferably, the discharge positions A _{2, y} , A _{3, y} , A _{5, y} , A _{6, y in} two rows on both sides) What is necessary is just to be able to count the number.

  The processing object 11 is a color filter. However, the present invention is not limited to this, and may be a substrate on the array side, and widely includes ones whose ejection positions are determined.

Schematic side view of the spacer coating apparatus of the first example of the present invention Schematic plan view Diagram for explaining the arrangement of discharge holes Illustration for explaining the inside of the test room Schematic plan view of the spacer coating apparatus of the second example of the present invention Schematic plan view of the spacer coating apparatus of the third example of the present invention Schematic plan view for explaining the application position of the processing object The figure for demonstrating the landing state of each discharge position

Explanation of symbols

1-3 ... Spacer coating device 13 ... Discharge table 11 ... Processing object (substrate)
21, 21 a, 21 b... Print head 23, 23 a, 23 b... Detection device N _{1 to} N _6.

Claims (6)

A discharge table on which a processing object is placed;
A print head having a plurality of ejection holes through which ejection liquid in which spacers are dispersed is ejected;
A moving device that relatively moves the object to be processed on the discharge table and the print head;
The discharge hole is a spacer coating apparatus that discharges the discharge liquid to a discharge position in charge on each of the processing objects and arranges a spacer,
A test device for testing the state of each discharge hole;
From the detection result of the test device, identify the discharge hole determined to be abnormal,
A spacer coating apparatus configured to discharge the discharge liquid from another discharge hole at a discharge position assigned to the discharge hole determined to be abnormal. It has a detection device that detects the surface state of the processing object,
The number of spacers at the discharge position is counted from the detection result of the detection device, and the quality is compared with the reference number to determine whether it is good or bad. The discharge liquid is added from the normal discharge hole to the discharge position determined to be defective. The spacer coating apparatus according to claim 1 configured to discharge.   The number of spacers at the discharge position where the discharge liquid is discharged from the discharge hole located next to the discharge hole determined to be abnormal among the discharge holes is counted, and the spacer is added to the discharge position determined to be defective. The spacer coating apparatus according to claim 2. A spacer arrangement method in which a discharge liquid in which spacers are dispersed is discharged from a plurality of discharge holes provided in a print head to discharge positions assigned to the discharge holes, and the spacers are disposed at the discharge positions.
The state of each discharge hole is tested in advance, and the discharge liquid is not discharged from the abnormal discharge hole to the discharge position assigned to the discharge hole with an abnormal test result, and the discharge liquid is discharged from the other discharge holes. Spacer arrangement method for discharging.   Count the number of spacers at the discharge position where the abnormal discharge hole is responsible for at least the next discharge hole, and discharge the discharge liquid from other discharge holes to the defective discharge position that is less than the reference number. The spacer arrangement method according to claim 4.   The spacer arrangement method according to claim 5, wherein the discharge liquid is landed from two or more different discharge holes at the discharge position, and the number of the spacers at the discharge position is counted.

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