JP2006318981A - Ultrasonic vibration cutting equipment - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an ultrasonic vibration capable of preventing a joint surface from being scraped together while exhibiting a preferable performance by integrally forming a cutting blade and a spindle by bringing the cutting blade and the spindle into close contact with each other. A cutting device is provided.
An ultrasonic vibration cutting device 10 according to the present invention includes a spindle 25, a spindle housing 26 that rotatably supports the spindle 25, a cutting blade 22 that is attached to the tip of the spindle 25, and a spindle 25. Provided with a vibrator 33 that ultrasonically vibrates the spindle 25, converts the transmission direction of ultrasonic vibration transmitted from the vibrator 33 via the spindle 25, and causes the cutting blade 22 to vibrate ultrasonically in the radial direction. An apparatus for cutting the workpiece 12, characterized in that a contact member 50 for bringing the cutting blade 22 and the spindle 25 into close contact is interposed at a joint between the cutting blade 22 and the spindle 25.
[Selection] Figure 3

Description

  The present invention relates to an ultrasonic vibration cutting device, and more particularly to an ultrasonic vibration cutting device that cuts a workpiece by ultrasonically vibrating a cutting blade in a radial direction.

  In order to divide a workpiece such as a semiconductor wafer into chips, a cutting apparatus such as a dicing apparatus that cuts a semiconductor wafer into a lattice with a cutting blade that is a cutting grindstone is known. In such a cutting apparatus, it is a continuous problem to suppress the temperature rise at the processing point and to reduce chipping without increasing the cutting resistance. As means for solving such a problem, cutting using ultrasonic vibration has been studied.

  As an example of a cutting method using such ultrasonic vibration, Japanese Patent Application Laid-Open No. H10-228707 describes cutting by causing a cutting blade to vibrate ultrasonically. In this method, the cutting blade is ultrasonically vibrated so as to bend in the thickness direction (rotation axis direction), and a force that widens the cutting groove of the semiconductor wafer by the ultrasonically vibrating cutting blade works. There was a problem that cutting resistance increased and chipping was likely to occur.

  As a method for solving such a problem, for example, Patent Document 2 describes a method of cutting a workpiece by ultrasonically vibrating a cutting blade in its radial direction. In this method, ultrasonic vibration is transmitted in the direction of the rotation axis of the spindle to which the cutting blade is attached, and the vibration direction is changed by the vibration transmission direction changing portion attached together with the cutting blade, so that the cutting blade is vibrated in the radial direction. ing.

  In this way, by cutting the workpiece with a cutting blade that is ultrasonically vibrated in the radial direction, (1) cutting resistance is reduced compared to normal cutting with a cutting blade that is not ultrasonically vibrated. Therefore, chipping can be suppressed. (2) Since cutting water is easily supplied to the machining point, the temperature rise at the machining point is suppressed and distortion due to heat hardly occurs. (3) Contamination adhered to the cutting blade by vibration. Since the nation is shaken off, there is an advantage that no contamination adheres to the cutting blade, and (4) the burden on the cutting blade is reduced and the life is extended.

  In the ultrasonic vibration cutting apparatus as described above, in order to vibrate the cutting blade in the radial direction by the vibration transmission direction changing portion attached together with the cutting blade, the shape and size of the cutting blade, the length and diameter of the spindle, or Not only the output of the ultrasonic transducer, but also the position where the cutting blade and ultrasonic transducer are attached to the spindle must be designed accurately.

  Usually, in the above ultrasonic vibration cutting apparatus, the minimum vibration amplitude point of the vibration waveform transmitted from the ultrasonic vibrator is set as the vibration transmission direction conversion point, and at the same position as or near the vibration transmission direction conversion point, A cutting blade is arranged. At this vibration transmission direction conversion point, the transmission direction of the ultrasonic vibration is changed from the rotational axis direction of the spindle (hereinafter sometimes simply referred to as “axial direction”) to the radial direction of the cutting blade (hereinafter simply referred to as “radial direction”). In some cases). The blade diameter of the cutting blade, the frequency of the ultrasonic vibration, etc. are adjusted so that the maximum vibration amplitude point in the vibration waveform of the ultrasonic vibration whose transmission direction is converted into the radial direction is located at the cutting edge position of the cutting blade. Has been.

  Therefore, there is a possibility that the ultrasonic vibration in the radial direction of the cutting blade cannot obtain a sufficient amplitude even if the vibration transmission direction conversion point or the maximum vibration amplitude point is slightly deviated from the planned position. May not vibrate.

  For these reasons, it is preferable that the spindle and the cutting blade are integrally formed as much as possible in order to suitably transmit and convert the ultrasonic vibration waveform. However, because the cutting blade is a consumable part, if it is configured integrally with the spindle, the spindle will be replaced, which is not practical. Therefore, a cutting blade (hub blade) in which the grinding wheel portion and the base portion are integrally formed is used so that the spindle and the cutting blade can be configured as integrally as possible, and one side of the base portion of the cutting blade is used. Is provided with a joint having the same diameter as the spindle and joined to the tip of the spindle. Then, the cutting blade can be integrally formed with the spindle by joining from the other side of the base portion of the cutting blade with a bolt via a spacer having the same diameter as the spindle. This spacer is used as an adjusting member for making the waveform of ultrasonic vibration a maximum vibration amplitude point at the tip. The spacer may be formed integrally with the cutting blade. However, since the cutting blade becomes difficult to handle, a structure that can be separated is preferable.

  As described above, the ultrasonic vibration cutting apparatus is configured to firmly fix the cutting blade and the spindle in close contact with each other.

JP 2002-336775 A JP2000-210928

  However, when joining the base of the cutting blade and the tip of the spindle or the spacer, the joining surfaces do not adhere to each other unless the respective joining surfaces have sufficiently high accuracy flatness. There was a problem that the spindle could not be integrated with the spindle, and the desired performance could not be exhibited, for example, sufficient amplitude could not be obtained.

  In addition, when the flatness of each joint surface is used, there is a problem that the respective joint surfaces are scraped together and fall into a vicious circle in which the flatness is further lowered.

  Therefore, the present invention has been made in view of such problems, and the object thereof is to bring the cutting blade and spindle into close contact with each other so as to exhibit favorable performance. At the same time, it is an object of the present invention to provide a new and improved ultrasonic vibration cutting apparatus capable of preventing the joint surfaces from being scraped together.

  In order to solve the above-described problems, according to one aspect of the present invention, a spindle, a spindle housing that rotatably supports the spindle, a cutting blade that is attached to the tip of the spindle, and a spindle provided on the spindle that exceeds the spindle. An ultrasonic vibration cutting device that includes a vibrator for ultrasonic vibration, converts a transmission direction of ultrasonic vibration transmitted from the vibrator through a spindle, and cuts a workpiece by ultrasonically vibrating a cutting blade in a radial direction. An apparatus is provided. This ultrasonic vibration cutting apparatus is characterized in that a close contact member for closely contacting the cutting blade and the spindle is interposed at a joint portion between the cutting blade and the spindle.

  Further, when the cutting blade and the spacer are configured as separate members, it is necessary to use a close contact member because the cutting blade and the spacer are also joined to each other. Therefore, the ultrasonic vibration cutting apparatus further includes a spacer that is disposed on the opposite side of the cutting blade from the joint with the spindle and supports the cutting blade, and the cutting blade is provided at the joint between the spacer and the cutting blade. An adhesion member that closely contacts the spacer may be interposed.

  Further, the contact member is preferably formed of a soft material such as a resin. However, such a soft material is not limited to a resin, and may be any material having a hardness of the adhesion member (Rockwell hardness HRR) of 5 <HRR <70.

  Thus, even if the processing accuracy of the joint surface is poor (even if the flatness is low) by interposing an adhesion member formed of a soft material such as resin or paper at the joint between the cutting blade and the spindle. The cutting blade and the spindle can be brought into close contact with each other by absorbing the unevenness of the joint surface to the close contact member.

  In addition, by interposing an adhesion member at the joint between the cutting blade and the spindle in this way, the joint surface is scraped by friction between the joint surfaces due to the unevenness of the joint surface with low flatness, and the flatness is further increased. The vicious circle of decline can also be prevented.

  According to the present invention, an adhesive member formed of a soft material is interposed in a joint portion between a cutting blade and a spindle, so that the cutting blade and the spindle are adhered by the adhesive member even when the flatness of the joint surface is low. Can be brought into close contact with each other. Therefore, since the cutting blade and the spindle can be configured integrally, it is possible to exhibit desirable performance and to prevent the problem that the joint surfaces are scraped together.

  Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. In the present specification and drawings, components having substantially the same functional configuration are denoted by the same reference numerals, and redundant description is omitted.

(Overall configuration of dicing apparatus 10)
First, based on FIG. 1, the whole structure of the dicing apparatus 10 comprised as an example of the ultrasonic vibration cutting apparatus which concerns on the 1st Embodiment of this invention is demonstrated. FIG. 1 is an overall perspective view showing a dicing apparatus 10 according to the present embodiment.

  As shown in FIG. 1, the dicing apparatus 10 includes, for example, a cutting unit 20 that cuts a workpiece 12 such as a semiconductor wafer, a chuck table 15 that is a holding means for holding the workpiece 12, and a cutting unit movement. A mechanism (not shown) and a chuck table moving mechanism (not shown) are provided.

  The cutting unit 20 includes a cutting blade 22 attached to a spindle. The cutting unit 20 cuts the workpiece 12 to form an extremely thin kerf (cut groove) by cutting the workpiece 12 while rotating the cutting blade 22 that vibrates ultrasonically in the radial direction at a high speed. can do.

  The chuck table 15 is, for example, a disk-shaped table having a substantially flat upper surface, and is provided with a vacuum chuck (not shown) on the upper surface. For example, the workpiece 12 supported by the frame 14 via the wafer tape 13 is placed on the chuck table 15, and the workpiece 12 can be stably held by vacuum suction.

  The cutting unit moving mechanism moves the cutting unit 20 in the Y-axis direction. The Y-axis direction is a horizontal direction orthogonal to the cutting direction (X-axis direction), and is, for example, the axial direction of a spindle disposed in the cutting unit 20. By such movement in the Y-axis direction, the cutting edge of the cutting blade can be aligned with the cutting position (cutting line) of the workpiece 12. The cutting unit moving mechanism also moves the cutting unit 20 in the Z-axis direction (vertical direction). Thereby, the cutting depth of the cutting blade 22 with respect to the workpiece 12 can be adjusted.

  During normal dicing, the chuck table moving mechanism reciprocates the chuck table 15 holding the workpiece 12 in the cutting direction (X-axis direction) and feeds the cutting table 22 to the workpiece 12. The cutting edge is operated with a linear trajectory.

  The dicing apparatus 10 having such a configuration can perform the dicing process on the workpiece 12 by moving the cutting unit 20 and the chuck table 15 relative to each other while cutting the cutting blade rotating at a high speed into the workpiece 12. .

(Configuration of the cutting unit 20)
Next, based on FIG. 2, the structure of the cutting unit 20 which concerns on this embodiment is demonstrated. FIG. 2 is a perspective view showing the cutting unit 20 according to this embodiment.

  As shown in FIG. 2, the cutting unit 20 includes, for example, a cutting blade 22, a base portion 21 integrated with the cutting blade 22, and an example of a fixing member that fixes the base portion 21 to the tip portion of the spindle 25. The spacer 23, the spindle 25, the spindle housing 26, the cutting water supply nozzle 27, and the wheel cover 28 are mainly provided.

  The cutting blade 22 is, for example, an extremely thin cutting grindstone (cutting blade) having a substantially ring shape, and is formed by electroforming abrasive grains such as diamond. The cutting blade 22 is configured integrally with the base portion 21 that supports the cutting blade 22. That is, the cutting blade 22 and the base portion 21 constitute a so-called hub blade in which the grindstone portion and the mount portion are integrated. The cutting blade 22 and the base portion 21 are attached to the tip portion of the spindle 25 by a spacer 23 and a fixing bolt (not shown). That is, as shown in FIG. 2, the spacer 23 is formed with a through-hole 23a through which a fixing bolt passes, and this fixing bolt penetrates the spacer 23 and the base portion 21 in the Y-axis direction and enters the spindle. It fastens to the internal thread part formed in the front-end | tip part of 25 (refer FIG. 3). As a result, the base portion 21 can be locked with the spacer 23 and the fixing bolt and fixed to the tip portion of the spindle 25.

  In the present embodiment, close contact members are interposed between the spacer 23 and the base portion 21 and between the base portion 21 and the female screw portion 24. Details will be described later (FIG. 3 and FIG. 5).

  The spindle 25 is a rotating shaft for transmitting, for example, a rotational driving force of a motor (not shown) to be described later to the cutting blade 22, and rotates the mounted cutting blade 22 at a high speed of, for example, 30,000 rpm. Most of the spindle 25 is covered with the spindle housing 26, but the tip portion is exposed from the spindle housing 26, and the blade 22 and the base portion 21 are attached to the tip portion.

  The spindle housing 26 is a housing provided so as to cover the spindle 25. The spindle housing 26 can support the spindle 25 so as to be rotatable at high speed by an air bearing provided therein.

  Here, based on FIG. 3, the internal structure of the spindle housing 26 according to the present embodiment will be described. FIG. 3 is a longitudinal sectional view showing an internal configuration of the spindle housing 26 in the cutting unit 20 according to the present embodiment.

  As shown in FIG. 3, the spindle housing 26 of the cutting unit 20 includes, for example, a spindle 25, a radial air bearing 30 and a thrust air bearing 31 that rotatably support the spindle 25, and a radial air bearing 30 and a thrust. An air supply path (not shown) for supplying high-pressure air to the air bearing 31, an exhaust path (not shown) for discharging the air ejected by the radial air bearing 30 and the thrust air bearing 31, and a rotor A motor 32 having a 321 and a stator 322, a stator power supply 34 for supplying power to the stator 322, a PZT vibrator 33 as an ultrasonic vibrator provided on the rear end side of the spindle 25, and PZT Non-contact power feeding device 40 for supplying power to the vibrator 33 , It is provided.

  The PZT vibrator 33 to which power is supplied from the non-contact power feeding device 40 generates ultrasonic vibrations and causes the spindle 25 to vibrate ultrasonically. This ultrasonic vibration is transmitted in the axial direction of the spindle 25 (Y-axis direction) and travels toward the cutting blade 22 attached to the tip of the spindle 25.

  Furthermore, when the ultrasonic vibration transmitted in the axial direction (Y-axis direction) of the spindle 25 is converted into the radial direction (XZ plane direction) of the cutting blade 22, the Y-axis position of the vibration transmission direction conversion point is The structure and arrangement of the spindle 25 and the frequency of the PZT vibrator 33 are adjusted so as to be the same as the mounting position of the cutting blade 22 on the spindle 25 (Y-axis position of the cutting blade 22).

  The description of the configuration of the cutting unit 20 will be continued based on FIG. The cutting water supply nozzle 27 is detachably provided on both sides of the cutting blade 22, for example, and supplies cutting water to the side surface of the cutting blade 22 and in the vicinity of the processing point to cool it. Further, the foil cover 28 is provided so as to cover the outer periphery of the cutting blade 22 and protects the cutting blade 22 and prevents scattering of cutting water and cutting debris.

  The cutting unit 20 having such a configuration rotates the cutting blade 22 at a high speed by the spindle 25 and cuts the cutting edge of the cutting blade 22 into the workpiece 12 so as to relatively move. Thereby, for example, the processing surface of the workpiece 12 can be cut and an extremely thin kerf can be formed along the cutting line.

  With the above configuration, ultrasonic vibrations are transmitted in the axial direction of the spindle 25, and the transmission direction of the transmitted ultrasonic vibrations is determined by the cutting blade 22 at the vibration transmission direction conversion point at substantially the same position as the cutting blade 22. Can be converted in the radial direction. As a result, the cutting blade 22 is ultrasonically vibrated in the radial direction, that is, the workpiece 12 is cut by the cutting blade 22 while the ring-shaped cutting blade 22 is vibrated so as to repeatedly expand and contract at a high frequency. can do.

(Principle of ultrasonically vibrating the cutting blade 22 in the radial direction)
The principle of ultrasonic vibration of the cutting blade 22 in the radial direction as described above is described in, for example, the above-mentioned Patent Document 2 and is publicly known, but will be briefly described below with reference to FIG.

  FIG. 4 is an explanatory diagram showing a vibration waveform W1 that resonates with ultrasonic vibration from the PZT vibrator 33 and a vibration waveform W2 in which the transmission direction is converted to the radial direction in the cutting unit 20 according to the present embodiment. . The vibration waveform W1 represents the instantaneous displacement (vibration amplitude) of the ultrasonic vibration due to resonance, and the vibration waveform W2 represents the instantaneous displacement (vibration amplitude) of the ultrasonic vibration whose transmission direction is converted to the radial direction. .

  As shown in FIG. 4, the maximum vibration amplitude points A, C, E, and G and the minimum vibration amplitude points B, D, F, and H of the vibration waveform W1 exist on the axis of the spindle 25 (on the Y axis). To do. Usually, at the minimum vibration amplitude points B, D, F, and H, the radial extension of the spindle 25 is maximized. Accordingly, the distance between the spindle 25 and the spindle housing 26 must be larger than the maximum diameter expansion amount of the spindle 25 at least at the minimum vibration amplitude points B, D, F, and H. However, with respect to other points, since the cutting unit 20 employs an air spindle mechanism, the vicinity of the minimum vibration amplitude points B, D, F, and H is structurally reinforced as in the case of the mechanical spindle mechanism. There is no need.

  The minimum vibration amplitude point B of the vibration waveform W1 is a vibration transmission direction conversion point, and the cutting blade 22 is disposed at the same position as or near the vibration transmission direction conversion point. At the vibration transmission direction conversion point B, the transmission direction of the ultrasonic vibration is converted from the axial direction of the spindle 25 to the radial direction of the cutting blade 22. Thus, the blade diameter of the cutting blade 22 and the ultrasonic wave are set so that the maximum vibration amplitude points α and β in the vibration waveform W2 of the ultrasonic vibration whose transmission direction is converted into the radial direction are located at the cutting edge position of the cutting blade 22. The frequency of vibration is adjusted.

  Further, in order to suitably transmit and convert the ultrasonic vibration, the cutting blade 22 and the base portion 21 are integrally formed, and the spacer 23, the base portion 21 and the tip portion of the spindle 25 are mutually connected. It is configured to be firmly and firmly fixed. Further, the base portion 21 is shaped so as to be symmetrical in the Y-axis direction with the vibration transmission direction conversion point B as the center.

  As described above, by changing the transmission direction of the ultrasonic vibration transmitted through the spindle 25 in the axial direction to the radial direction, the cutting blade 22 repeatedly expands and contracts, and the cutting edge of the cutting blade 22 becomes the diameter. Vibrate in the direction.

  Note that a vibration transmission direction conversion member such as a horn can be arranged at the vibration transmission direction conversion point B to facilitate the conversion of the vibration transmission direction, but the position of the vibration transmission direction conversion point and the position of the cutting blade 22 Are substantially the same, it is possible to change the vibration transmission direction without providing this vibration transmission direction conversion member separately.

(Configuration around cutting blade 22 and spindle 25 tip)
Next, based on FIG. 3 and FIG. 5, the contact member 50 that is a characteristic part of the cutting unit 20 according to the present embodiment will be described. 5A is an exploded view showing the configuration around the cutting blade 22 and the tip of the spindle 25 in the cutting unit 20 according to the present embodiment, and FIG. 5B is an adhesion view according to the present embodiment. It is a front view of member 50 (52, 54).

  Here, in the ultrasonic vibration cutting device that vibrates ultrasonically in the radial direction of the cutting blade 22 like the dicing device 10 according to the present embodiment, as described above, the base portion 21 of the cutting blade 22 and the spindle In the case of joining the tip portion of 25 or the spacer 23, the joining surfaces do not adhere to each other unless the respective joining surfaces have sufficiently high accuracy flatness, and therefore the cutting blade 22 and the spindle 25 are integrally formed. Can not do it. For this reason, there has been a problem in that preferable performance cannot be exhibited, for example, when sufficient amplitude cannot be obtained or when ultrasonic vibration is not performed.

  Also, if the flatness of the joint surface between the cutting blade 22 and the spindle 25 or the joint surface between the cutting blade 22 and the spacer 23 is used in a low state, the respective joint surfaces are ground together to further improve the flatness. There was a problem of falling into a vicious circle of lowering.

  In order to solve the above problem, it is necessary to make the cutting blade 22 and the spindle 25 as an integral structure and to bond the cutting blade 22 and the spindle 25 in close contact. However, since the cutting blade 22 and the spindle 25 are made of metal, and joining the flat surfaces of the metals requires high processing accuracy, the cost increases and the incidence of defective products also increases. . Therefore, in the cutting unit 20 according to this embodiment, the cutting blade 22 and the spindle 25 can be brought into close contact with each other even if the processing accuracy of the joint surface is poor (even if the flatness is low). An adhesion member 50 formed of a soft material such as resin or paper is interposed at the joint with the spindle 25. Thereby, the unevenness | corrugation of a joint surface can be absorbed and the cutting blade 22 and the spindle 25 can be stuck. In addition, by virtue of the contact member 50 being interposed in this way, there is also a vicious circle in which the joint surfaces are scraped and the flatness is further reduced due to friction between the joint surfaces caused by unevenness of the joint surfaces with low flatness. Can be blocked.

  Specifically, as shown in FIGS. 3 and 5A, in the cutting unit 20 according to the present embodiment, the joining between the female thread portion 24 of the spindle 25 and the base portion 21 of the cutting blade 22 is performed. A contact member 52 for bringing the spindle 25 and the cutting blade 22 into close contact with each other is provided to absorb the unevenness of the joint surface of the female screw portion 24 and the unevenness of the joint surface on the spindle 25 side of the base portion 21. Further, when the cutting blade 22 and the spacer 23 are configured as separate members as in the cutting unit 20 according to the present embodiment, the cutting blade 22 and the spacer 23 are also bonded to each other with metal. Therefore, it is necessary to use a close contact member. Therefore, in the present embodiment, an adhesion member 54 for bringing the cutting blade 22 and the spacer 23 into close contact with each other is interposed between the base portion 21 of the cutting blade 22 and the spacer 23, and the base portion 21. The unevenness of the bonding surface on the spacer 23 side and the unevenness of the bonding surface of the spacer 23 are absorbed.

  In this embodiment, the cutting blade 22 and the spacer 23 are separated from each other. However, the present invention is not limited to such a case, and the cutting blade and the spacer may be integrated. Good. In such a case, it is natural that an adhesion member for bringing the cutting blade and the spacer into close contact with each other is not necessary.

  5A, the spindle 25, the contact member 52, the cutting blade 22 and the base portion 21, the contact member 54, and the spacer 23 as described above are arranged in this order, and the cutting blade 22 and the base 23 are arranged in this order. The base 21 is attached to the tip of the spindle 25 by a spacer 23 and a fixing bolt 29. That is, through holes (23a, 52a, 54a, etc.) penetrating in the axial direction of the spindle are formed in the spacer 23, the base portion 21, and the contact member 50 (52, 54). 23, the base portion 21 and the contact members 52, 54 are passed through in the Y-axis direction and fastened to a female screw portion 24 formed at the tip portion of the spindle 25. As a result, as shown in FIG. 3, the base 21 is locked by the spacer 23 and the fixing bolt 29, and the cutting blade 22 can be fixed to the tip of the spindle 25.

  Next, the contact member 50 (52, 54) which is a characteristic part of the cutting unit 20 according to the present embodiment will be described based on FIG.

  The close contact members 52 and 54 according to the present embodiment have a substantially disk shape, and the size thereof is substantially the same as the joining surface where the tip portion of the spindle 25 and the base portion 21 of the cutting blade 22 are joined. That is, the diameter of the spindle 25 or the spacer 23 is substantially the same. The thickness of the contact members 52 and 54 is about 3 to 100 μm.

  Further, as described above, substantially circular through holes 52a and 54a through which the fixing bolts 29 pass are formed in the center portions of the contact members 52 and 54, respectively. The diameters of the through holes 52 a and 54 a are formed to be substantially the same as or slightly larger than the diameter of the body portion of the fixing bolt 29.

As the material of the contact members 52 and 54, a hard material such as a metal or a ceramic plate is not suitable because it is difficult to absorb the unevenness of the joint surface, and is not suitable for absorbing the unevenness of the joint surface such as a resin. Soft materials are preferred. However, the material of the contact members 52 and 54 is not limited to resin, and it is considered that when the cutting blade 22 is mounted on the spindle 25, the torque T to be tightened with the fixing bolt 29 is in the range of 10 Nm <T <30 Nm. The hardness of the contact members 52 and 54 (Rockwell hardness HRR) is
5 <Hardness of contact member (HRR) <70 (1)
Any material can be used. However, if a metal member such as copper or zinc is used as the contact member, the contact member may become metal powder due to friction and contaminate the workpiece. Even within the range of the above formula (1), it is not preferable.

  Note that it is considered that the contact members 52 and 54 are easy to handle if they are attached in advance to the joining surface side of the cutting blade 22 or the joining surface side of the tip of the spindle 25 with one surface as an adhesive surface. It is also effective to apply an adhesion member made of a liquid to the joint surface and then dry it to adhere to the joint surface.

  As mentioned above, although preferred embodiment of this invention was described referring an accompanying drawing, it cannot be overemphasized that this invention is not limited to this example. It will be apparent to those skilled in the art that various changes and modifications can be made within the scope of the claims, and these are of course within the technical scope of the present invention. Understood.

  For example, in the above embodiment, the dicing apparatus 10 is described as an example of the ultrasonic vibration cutting apparatus, but the present invention is not limited to such an example. For example, as long as it is a device that cuts the workpiece 12 using the cutting blade 22 that rotates at high speed by the spindle 25, for example, various cutting devices that perform cutting processing other than dicing processing may be used.

  In the cutting unit 20 according to the above embodiment, the example of the air spindle has been described as the support mechanism of the spindle 25, but the present invention is not limited to this example. For example, the support mechanism of the spindle 25 may be a mechanical spindle that mechanically supports the spindle 25 with a bearing. The present invention is applicable to any spindle support mechanism as long as it is an ultrasonic vibration cutting device that ultrasonically vibrates the cutting blade 22 in the radial direction.

  In the above embodiment, the PZT vibrator 33 is disposed on the rear side of the spindle 25. However, the present invention is not limited to this example. For example, the PZT vibrator 33 may be disposed at the center or tip side of the spindle 25.

  Moreover, in the said embodiment, although the base part 21 was fixed to the front-end | tip part of the spindle 25 using the spacer 23 and the fixing bolt 29, this invention is not limited to this example, Even if arbitrary fixing members are used. Good. For example, the base portion 21 may be sandwiched by using a fixing nut that is screwed with a male screw portion formed at the tip portion of the spindle 25 so as to be fixed to the tip portion of the spindle 25.

  Moreover, although the said embodiment gave and demonstrated the example which the spacer 23 and the cutting blade 22 isolate | separated, this invention is not limited to this example, Even if the spacer and the cutting blade are comprised integrally. Good.

  Moreover, the shape of the base part 21 is not limited to the example of the said embodiment, If it can support the cutting blade 22, it can be set as arbitrary shapes. At this time, it is preferable that the base portion 21 has a symmetrical shape in the axial direction of the spindle 25 with the vibration transmission direction conversion point B (see FIG. 5) as the center. Thereby, the transmission direction of the ultrasonic vibration can be suitably converted and transmitted to the cutting blade 22 suitably.

  The present invention is applicable to an ultrasonic vibration cutting apparatus that performs cutting while ultrasonically vibrating a cutting blade in the radial direction.

1 is an overall perspective view showing a dicing apparatus according to a first embodiment of the present invention. It is a perspective view which shows the cutting unit which concerns on the same embodiment. It is a longitudinal cross-sectional view which shows the internal structure of the spindle housing in the cutting unit which concerns on the same embodiment. It is explanatory drawing which shows the principle which ultrasonically vibrates the cutting blade which concerns on the embodiment to radial direction. FIG. 4 is an exploded view showing a configuration around a cutting blade and a spindle tip in the cutting unit according to the same embodiment.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Dicing apparatus 12 Workpiece 20 Cutting unit 21 Base part 22 Cutting blade 23 Spacer 25 Spindle 26 Spindle housing 33 PZT vibrator 50 Adhering member

Claims (3)

A spindle, a spindle housing that rotatably supports the spindle, a cutting blade attached to the tip of the spindle, and a vibrator that is provided on the spindle and that vibrates the spindle ultrasonically. In an ultrasonic vibration cutting apparatus for converting a transmission direction of ultrasonic vibration transmitted through the spindle and ultrasonically vibrating the cutting blade in a radial direction to cut a workpiece:
An ultrasonic vibration cutting apparatus characterized in that an adhesive member that closely contacts the cutting blade and the spindle is interposed at a joint between the cutting blade and the spindle. A spacer that is disposed on the opposite side of the cutting blade from the joint with the spindle and further supports the cutting blade;
The ultrasonic vibration cutting device according to claim 1, wherein an adhesion member that closely contacts the cutting blade and the spacer is interposed at a joint portion between the cutting blade and the spacer. The ultrasonic vibration cutting device according to claim 1, wherein the contact member is formed of a resin.

Images