JP2006275312A - Fan filter unit - Google Patents

Abstract

A thin fan filter unit having a uniform wind speed distribution of a filter is provided.
SOLUTION: A box-shaped chamber 1, a suction port 2 for sucking air from the outside into the chamber 1, a fan 3 in the chamber 1, a motor 4 for rotating the fan 3, and a motor 4 are provided. A motor support 5 to be fixed, a filter 6 downstream of the fan 3 and adjacent to the chamber 1 for cleaning air, and a guide plate 7 on the outer periphery of the fan 3. As the air flows through the guide plate 7, The distance between the filter 6 and the guide plate 7 is reduced.
[Selection] Figure 1

Description

  The present invention relates to a fan filter unit used in a clean room requiring a clean space such as a semiconductor factory or a food factory.

  Conventionally, this type of fan filter unit has been required to make the distribution of the filter passing wind speed uniform using simple components (see, for example, Patent Document 1).

  The fan filter unit will be described below with reference to FIG.

As shown in the figure, the case 101 is arranged in the order of the blower 102, the chamber 103, and the filter 104 from the upstream side, and a diffusion plate 105 made of a porous plate is provided from the downstream side in the chamber 103 to the upstream side of the filter 104. With the fan filter unit, the distribution of the passing wind speed of the filter 104 can be made uniform.
JP 2001-116310 A (page 3, FIG. 1)

  In such a conventional fan filter unit, since the diffusion plate is installed on the downstream side of the blower and in the thickness direction of the fan filter unit, there is a problem that the product thickness of the fan filter unit increases. Moreover, in order to make the distribution of the air velocity passing through the filter uniform, the diffusion plate has a problem of generating an extra pressure loss and reducing the fan performance.

  The present invention solves such a conventional problem. A thin fan filter unit and a guide plate with a small pressure loss make the distribution of the passing wind speed of the filter uniform without reducing the fan performance. The purpose is to be.

  In order to achieve the above object, a fan filter unit of the present invention includes a box-shaped chamber, a suction port for sucking air from the outside into the chamber, a fan in the chamber, and a motor for rotating the fan. And a motor support for fixing the motor, a filter downstream of the fan and adjacent to the chamber for cleaning air, and a direction of air flow toward the filter at the outer periphery of the fan. It is characterized by having a plate-shaped guide plate.

  In addition, the fan filter unit of the present invention includes a guide plate that reduces the distance between the guide plate and the filter as the air flowing through the guide plate travels in the downstream direction.

  The fan filter unit according to the present invention is characterized in that the guide plate has a rectangular shape.

  The fan filter unit of the present invention is characterized in that a part of two sides parallel to the longitudinal direction of the rectangular guide plate is bent in an arc shape.

  The fan filter unit of the present invention is characterized in that all of two sides parallel to the longitudinal direction of the rectangular guide plate are bent into an arc shape.

  In addition, the fan filter unit of the present invention has a fan on the extension line of one of the upstream sides of the two sides perpendicular to the longitudinal direction of the rectangular guide plate when viewed from a plane perpendicular to the rotation axis of the fan. It features a center of rotation.

  In addition, the fan filter unit of the present invention is provided with a straight side wall on one outer side of the two sides parallel to the longitudinal direction of the rectangular guide plate so that air does not flow on the outer peripheral portion of this side. It is characterized by.

  In addition, the fan filter unit of the present invention is characterized in that the straight side wall is provided so as to be parallel to the rotation axis of the fan so that a gap is formed between the straight side wall and the filter.

  Further, when viewed from a plane perpendicular to the rotation axis of the fan, the fan filter unit of the present invention has two short sides out of the four sides forming the widest surface of the guide plate that are not parallel. These two sides are characterized by bending inward with respect to the rotation axis of the fan as it goes downstream.

  In addition, the fan filter unit of the present invention includes the rotation axis of the fan on the extension line of one side on the upstream side of the two short sides when viewed from a plane perpendicular to the rotation axis of the fan. It is characterized by that.

  The fan filter unit of the present invention is characterized in that a curved side wall is provided on the longest side of the four sides so that air does not flow outside the outer peripheral portion of the side.

  In addition, the fan filter unit of the present invention is characterized in that the curved side wall is provided so as to be parallel to the rotation axis of the fan so that a gap is formed between the curved side wall and the filter.

  In addition, the fan filter unit of the present invention is characterized in that each has a guide plate corresponding to one side of the box-like chamber when viewed from a plane perpendicular to the rotation axis of the fan.

  In the fan filter unit of the present invention, the fan is a turbo fan.

  The fan filter unit of the present invention is characterized in that a guide plate is attached to the bottom surface.

  The fan filter unit of the present invention is characterized in that the guide plate is attached to the motor support.

  According to the fan filter unit of the present invention, the fan filter can be made thin, and the distribution of the passing wind speed of the filter can be made uniform without reducing the blower performance by the induction plate with a small pressure loss. Unit is obtained.

  The fan filter unit according to claim 1 includes a box-shaped chamber, a suction port for sucking air from the outside into the chamber, a fan in the chamber, a motor for rotating the fan, and the motor. A motor support to be fixed, a filter downstream of the fan and adjacent to the chamber for cleaning air, and a plate-shaped guide plate for changing the direction of air flow toward the filter at the outer periphery of the fan The product can be made thin, and the distribution of the passing wind speed of the filter can be made uniform without deteriorating the blower performance by the induction plate having a small pressure loss.

  The invention according to claim 2 is the fan filter unit according to claim 1, further comprising a guide plate that reduces the distance between the guide plate and the filter as the air flowing through the guide plate moves in the downstream direction. The product can be made thin, and the guide plate with a small pressure loss can make the distribution of the passing air speed of the filter uniform without deteriorating the blower performance.

  According to a third aspect of the present invention, in the fan filter unit according to the first or second aspect, the guide plate has a rectangular shape, and the guide plate can be configured with simple parts. . Further, the product can be made thin, and the distribution of the passing air speed of the filter can be made uniform without deteriorating the blower performance by the induction plate having a small pressure loss.

  The invention according to claim 4 is the fan filter unit according to claim 1 or 2, wherein a part of two sides parallel to the longitudinal direction of the rectangular guide plate is bent in an arc shape. Yes, the product can be made thin. Moreover, the air can be effectively guided to the filter, and the distribution of the passing wind speed of the filter can be made uniform without deteriorating the blower performance by the guide plate having a small pressure loss.

  The invention according to claim 5 is the fan filter unit according to claim 1 or 2, wherein all of two sides parallel to the longitudinal direction of the rectangular guide plate are bent in an arc shape. Yes, the product can be made thin. Moreover, the air can be effectively guided to the filter, and the distribution of the passing wind speed of the filter can be made uniform without deteriorating the blower performance by the guide plate having a small pressure loss.

  According to a sixth aspect of the present invention, in the fan filter unit according to any of the third to fifth aspects, when viewed from a plane perpendicular to the rotation axis of the fan, the vertical direction of the rectangular guide plate is 2 Among the sides, a fan rotation center is provided on the extended line of one side on the upstream side, and the pressure loss when air flows into the guide plate can be reduced. Further, the product can be made thin, and the distribution of the passing air speed of the filter can be made uniform without deteriorating the blower performance by the induction plate having a small pressure loss.

  The invention according to claim 7 is the fan filter unit according to any one of claims 3 to 6, wherein one of the two sides parallel to the longitudinal direction of the rectangular guide plate is on the outer side of this side. The product is provided with straight side walls that do not allow air to flow, and the product can be made thin. Moreover, air can be prevented from leaking to the outer periphery of the guide plate, and the distribution of the passing wind speed of the filter can be made uniform without reducing the blower performance by the guide plate having a small pressure loss.

  According to an eighth aspect of the present invention, in the fan filter unit according to the seventh aspect, a straight side plate is provided so as to be parallel to the rotation axis of the fan so that a gap is formed between the straight side wall and the filter. The product can be thinned. Moreover, air can be prevented from leaking to the outer periphery of the guide plate, and the distribution of the passing wind speed of the filter can be made uniform without reducing the blower performance by the guide plate having a small pressure loss.

  According to a ninth aspect of the present invention, in the fan filter unit according to the first or second aspect, among the four sides forming the widest surface of the guide plate when viewed from a plane perpendicular to the rotation axis of the fan. The two short sides are not parallel, and the remaining two sides are bent inward with respect to the rotation axis of the fan as it goes downstream, and the product can be made thin. In addition, the guide plate having a small pressure loss can make the distribution of the passing wind speed of the filter uniform without deteriorating the blower performance.

  According to a tenth aspect of the present invention, in the fan filter unit according to the ninth aspect, when viewed from a plane perpendicular to the rotation axis of the fan, one of the two sides having a short length is on the upstream side. The fan rotation center is provided on the extension line, and the pressure loss when air flows into the guide plate can be reduced. Further, the product can be made thin, and the distribution of the passing air speed of the filter can be made uniform without deteriorating the blower performance by the induction plate having a small pressure loss.

  The invention according to claim 11 is the fan filter unit according to claim 9 or 10, in which air is not allowed to flow outside the outer peripheral portion of the side of the longest side among the four sides. It is provided with a curved side wall, and the product can be made thin. Moreover, air can be prevented from leaking to the outer periphery of the guide plate, and the distribution of the passing wind speed of the filter can be made uniform without reducing the blower performance by the guide plate having a small pressure loss.

  According to a twelfth aspect of the present invention, in the fan filter unit according to the ninth or tenth aspect of the present invention, the curved side wall is provided so as to be parallel to the rotation axis of the fan, and there is a gap between the curved side wall and the filter. The product can be thinned. Moreover, air can be prevented from leaking to the outer periphery of the guide plate, and the distribution of the passing wind speed of the filter can be made uniform without reducing the blower performance by the guide plate having a small pressure loss.

  According to a thirteenth aspect of the present invention, in the fan filter unit according to any of the first to twelfth aspects, when viewed from a plane perpendicular to the rotation axis of the fan, the fan filter unit corresponds to one side of the box-shaped chamber. Each is equipped with a guide plate, the product can be made thin, and by using multiple guide plates with low pressure loss, the distribution of the passing wind speed of the filter can be made uniform without deteriorating the blower performance. be able to.

  A fourteenth aspect of the present invention is the fan filter unit according to any one of the first to thirteenth aspects, wherein the fan is a turbo fan, and the product can be made thin and the pressure loss can be reduced. With the small guide plate, the distribution of the passing wind speed of the filter can be made uniform without deteriorating the blower performance.

  According to a fifteenth aspect of the present invention, in the fan filter unit according to any one of the first to fourteenth aspects, the induction plate is provided on the bottom surface, the product can be made thin, and the induction plate has a small pressure loss. The distribution of the passing wind speed of the filter can be made uniform without deteriorating the blower performance.

  The invention described in claim 16 is the fan filter unit according to any one of claims 1 to 14, wherein the induction plate is provided in the motor support, the product can be made thin, and the pressure loss is small. Thus, the distribution of the passing wind speed of the filter can be made uniform without deteriorating the blower performance.

  Hereinafter, the form of the fan filter unit of the present invention will be described with reference to FIGS.

(Embodiment 1)
FIG. 1 is an exploded view showing a configuration of a fan filter unit according to Embodiment 1 of the present invention. FIG. 2 is a perspective view with a guide plate attached. FIG. 3 is a top view showing the shape of the guide plate as seen from a plane perpendicular to the rotation axis of the fan. FIG. 4 is a side view showing the shape of the guide plate. FIG. 5 is a top view showing the position of the guide plate as seen from a plane perpendicular to the rotation axis of the fan. FIG. 6 is a perspective view of the guide plate having straight side surfaces. FIG. 7 is a perspective view of the guide plate provided with straight side surfaces.

  As shown in FIG. 1, the fan filter unit of the present invention includes a box-shaped chamber 1, a suction port 2 for sucking air from the outside into the chamber 1, a fan 3 in the chamber 1, and the fan 3 rotating. The motor 4 for fixing the motor 4, the motor support 5 for fixing the motor 4, the filter 6 for purifying the air downstream of the fan 3 and adjacent to the chamber 1, and the outer periphery of the fan 3 toward the filter 6 In this configuration, a plate-like guide plate 7 that changes the direction of air flow is provided.

  Here, the chamber 1 is a cube, but if it is configured as shown in FIG. 1, it is not necessarily a cube.

  The motor support 5 is attached to the side surface 8 or the bottom surface 9 of the chamber 1.

  In addition, the guide plate 7 is attached to the outer periphery of the fan 3, but if it is too close to the fan 3, the fan 3 and the guide plate 7 interfere with each other and generate interference sound. Therefore, it is necessary to provide an appropriate gap to prevent interference noise. In this embodiment, a gap of 15 mm is provided. A clearance of 0.05 times or more with respect to the outer diameter of the fan 3 is necessary.

  Here, in the present embodiment, the fan 3 constitutes a turbo fan. The turbofan that discharges air from the fan 3 in the centrifugal direction has a great effect by the guide plate 7.

  As shown in FIG. 2, the guide plate 7 has a configuration in which the distance from the filter 6 decreases toward the downstream as the air flows through the guide plate 7. However, if the distance between the filter 6 and the guide plate 7 is rapidly reduced toward the downstream, a large pressure loss results in a reduction in the air flow characteristics of the fan filter unit. Therefore, it is necessary to provide the guide plate 7 with an appropriate angle and the guide plate 7 with a small pressure loss. In the present embodiment, the guide plate is provided at an angle of 20 ° with respect to the bottom surface 9.

  As shown in FIG. 3, the guide plate 7 has a rectangular shape.

  Here, the shape of the guide plate 7 is a rectangular shape, but if the direction of air flow can be changed toward the filter 6, it is not necessary to have a rectangular shape.

  As shown in FIG. 4, the guide plate 7 has a configuration in which a part of two sides parallel to the longitudinal direction of the rectangular guide plate 7 is bent in an arc shape.

  Here, in FIG. 4, both ends of the side parallel to the longitudinal direction of the guide plate 7 are straight lines, and the middle is an arc shape. However, a part of the sides parallel to the longitudinal direction may be an arc shape.

  Further, all of the sides parallel to the longitudinal direction of the guide plate 7 may be arcuate.

  Note that the position in the longitudinal direction may change by 90 °, for example, when the chamber 1 is sufficiently large with respect to the outer diameter of the fan 3. At this time, two sides perpendicular to the longitudinal direction are arcuate. That is, two sides close to the direction parallel to the direction of the air flowing through the guide plate 7 are arcuate.

  As shown in FIG. 5, when viewed from a plane perpendicular to the rotation axis of the fan 3, the fan is placed on an extension line of one upstream side of two sides perpendicular to the longitudinal direction of the rectangular guide plate 7. 3 rotation centers 10 are provided.

  Note that the position in the longitudinal direction may change by 90 °, for example, when the chamber 1 is sufficiently large with respect to the outer diameter of the fan 3. At this time, the rotation center 10 of the fan 3 is provided on the extension line of one side on the upstream side of the two sides parallel to the longitudinal direction.

  As shown in FIG. 6, a configuration in which one of the two sides parallel to the longitudinal direction of the rectangular guide plate 7 is provided with a straight side wall 11 that does not allow air to flow to the outer peripheral portion of this side, and It has become.

  Here, even if the straight side wall 11 is not provided on all of the two sides parallel to the longitudinal direction of the rectangular guide plate 7, the side of the guide plate 7 can be obtained sufficiently even if the straight side wall 11 is not provided. It is not necessary for everything to be a straight side wall 11.

  Note that the position in the longitudinal direction may change by 90 °, for example, when the chamber 1 is sufficiently large with respect to the outer diameter of the fan 3. At this time, of the two sides perpendicular to the longitudinal direction, a straight side wall 11 that prevents air from flowing to the outer peripheral portion of this side is provided on the outer side.

  As shown in FIG. 7, the straight side wall 11 is provided so as to be parallel to the rotation axis of the fan 3, and is provided so that a gap is formed between the straight side wall 11 and the filter 6.

  Here, the reason why the gap is provided is to prevent the inlet of the filter 6 from being blocked by the straight side wall 11. If the filter 6 has a fixed frame, the fixed frame and the straight side wall 11 may be provided so as to contact each other.

  As described above, according to the present embodiment, the fan filter unit can be made thin by providing the plate-like guide plate 7 that changes the air flow direction toward the filter 6 on the outer peripheral portion of the fan 3. Moreover, the distribution of the passing air speed of the filter 6 can be made uniform without deteriorating the blower performance.

  Moreover, according to this Embodiment, by providing the induction | guidance | derivation board 7, a fan filter unit can be made thin and the distribution of the passing wind speed of the filter 6 can be made uniform, without reducing fan performance.

  In addition, according to the present embodiment, by providing the rectangular guide plate 7, the fan filter unit can be made thin at a low production cost, and the distribution of the passing wind speed of the filter 6 can be achieved without enjoying the fan performance. It can be made uniform.

  In addition, according to the present embodiment, the guide plate 7 has a configuration in which a part of two sides parallel to the longitudinal direction of the guide plate 7 is bent in an arc shape so that two sides parallel to the longitudinal direction of the guide plate 7 are obtained. The direction of air flow can be changed toward the filter 6 with a small pressure loss, rather than making everything straight.

  Moreover, the fan filter unit can be made thin, and the distribution of the passing air speed of the filter 6 can be made uniform without deteriorating the blower performance.

  In addition, according to the present embodiment, the guide plate is provided with the rotation center 10 of the fan 3 on the extension line of one of the two sides perpendicular to the longitudinal direction of the rectangular guide plate 7 on the upstream side. 7 can be made to follow the flow of air flowing in, and the pressure loss near the entrance can be reduced.

  In addition, according to the present embodiment, by providing the side wall 11 on the outer side of the two sides parallel to the longitudinal direction of the guide plate 7 with the straight side wall 11 that does not flow air to the outer peripheral portion of the side, The air flowing through the guide plate 7 can be prevented from flowing out to the outer periphery of the guide plate 7, and the distribution of the passing wind speed of the filter 6 can be made uniform.

  Further, according to the present embodiment, the straight side wall 11 is provided so as to be parallel to the rotation axis of the fan 3, and the straight side wall 11 and the filter 6 are provided with a gap so that the guide plate 7 is provided. Can be prevented from flowing out to the outer periphery of the guide plate 7, and the distribution of the passing air speed of the filter 6 can be made uniform.

(Embodiment 2)
FIG. 8 is a top view showing the shape of the guide plate as seen from a plane perpendicular to the rotation axis of the fan. FIG. 9 is a top view showing the position of the guide plate as seen from a plane perpendicular to the rotation axis of the fan. FIG. 10 is a perspective view of the guide plate having a curved side surface. FIG. 11 is a perspective view in which the guide plate is provided with a curved side surface. FIG. 12 is a perspective view including four guide plates. FIG. 13 is a perspective view of the induction plate provided on the bottom surface of the chamber. FIG. 14 is a perspective view of the induction plate provided on the motor support.

  As shown in FIG. 8, the fan filter unit of the present invention has a short length 2 out of the four sides forming the widest surface of the guide plate 7 when viewed from a plane perpendicular to the rotation axis of the fan 3. The sides are not parallel, and the remaining two sides are configured to bend inward as they go downstream.

  Here, the guide plate 7 has four sides, but when viewed from a plane perpendicular to the rotation axis of the fan 3, the guide plate 7 is bent inward from the upstream side of the guide plate 7 through which air flows and flows downstream. What is necessary is just composition.

  As shown in FIG. 9, when viewed from a plane perpendicular to the rotation axis of the fan 3, the rotation center of the fan 3 is on the extension line of one side on the upstream side of the two short sides of the guide plate 7. 10 is provided.

  As shown in FIG. 10, of the four sides of the guide plate 7, the longest side is provided with a curved side wall 12 that prevents air from flowing outside the outer peripheral portion of this side. .

  As shown in FIG. 11, the curved side wall 12 is provided so as to be parallel to the rotation axis of the fan 3, and the curved side wall 12 and the filter 6 are provided with a gap.

  Here, the reason why the gap is provided is to prevent the curved side wall 12 from blocking the inlet of the filter 6. If the filter 6 has a fixed frame, the fixed frame and the straight side wall 11 may be provided so as to contact each other.

  As shown in FIG. 12, when viewed from a plane perpendicular to the rotation axis of the fan 3, the guide plate 7 is provided corresponding to one side of the outer periphery of the chamber 1.

  Here, each of the guide plates 7 is provided corresponding to one side of the outer periphery of the chamber 1. However, if a sufficient effect of the guide plate 7 is obtained, the number of guide plates is equal to the number of the outer sides of the chamber 1. It may be less than the number.

  As shown in FIG. 13, the guide plate 7 includes a ground surface 13 a that contacts the bottom surface 9, and the ground surface 13 a is attached to the bottom surface 9.

  Here, the guide plate 7 and the motor support 5 are provided with a gap, and can be prevented from coming into contact with each other due to vibration during rotation of the fan 3.

  As shown in FIG. 14, the guide plate 7 includes a grounding surface 13 b that contacts the motor support 5, and the grounding surface 13 b is attached to the motor support 5.

  Here, the guide plate 7 and the bottom surface 9 of the chamber 1 are provided with a gap and can be prevented from coming into contact with each other due to vibration during rotation of the fan 3.

  As described above, according to the present embodiment, the fan filter unit can be thinned by being provided to bend inward as the air flowing through the guide plate 7 moves in the downstream direction. Moreover, air can be induced | guided | derived toward the rotating shaft of the fan 3, and distribution of the passing wind speed of the filter 6 can be made uniform, without reducing fan performance.

  Further, according to the present embodiment, the rotation center 10 of the fan 3 is provided on the extended line of one side on the upstream side of the two short sides of the guide plate 7, thereby flowing into the guide plate 7. It is possible to follow the flow of air, and the pressure loss near the entrance can be reduced.

  Moreover, according to this Embodiment, by providing the curved side wall 12 which does not flow air outside the outer peripheral part of the longest side among the four sides of the guide plate 7, the guide plate 7 Can be prevented from flowing out to the outer periphery of the guide plate 7, and the distribution of the passing air speed of the filter 6 can be made uniform.

  Further, according to the present embodiment, the curved side wall 12 is provided so as to be parallel to the rotation axis of the fan 3, and the guide plate 7 is provided so that a gap is formed between the straight side wall 12 and the filter 6. Can be prevented from flowing out to the outer periphery of the guide plate 7, and the distribution of the passing air speed of the filter 6 can be made uniform.

  Moreover, according to this Embodiment, by providing the guide plate 7 corresponding to one side of the outer periphery of the chamber 1, the distribution of the passing wind speed of the filter 6 can be made uniform.

  Moreover, according to this Embodiment, a fan filter unit can be made thin by providing the guide plate 7 on the bottom surface 9. Further, the distribution of the passing wind speed of the filter 6 can be made uniform.

  Further, according to the present embodiment, the fan filter unit can be made thin by providing the guide plate 7 in the motor support 5. Further, the distribution of the passing wind speed of the filter 6 can be made uniform.

  The fan filter unit according to the present invention is applied to a thin fan filter unit having a uniform distribution of the passing wind speed of the filter by providing a guide plate that changes the air flow direction toward the filter at the outer periphery of the fan. It is useful in that.

1 is an exploded view showing a configuration of a fan filter unit in Embodiment 1 of the present invention. The perspective view which attached the guide plate in the air blower The top view seen from the plane perpendicular to the rotation axis of the fan showing the shape of the guide plate in the blower Side view showing the shape of the guide plate in the blower The top view seen from the plane perpendicular to the rotation axis of the fan showing the position of the guide plate in the blower The perspective view which provided the guide plate in the air blower with the straight side surface The perspective view which provided the guide plate in the air blower with the straight side surface The top view seen from the plane perpendicular | vertical to the rotating shaft of the fan in Embodiment 2 of this invention The top view seen from the plane perpendicular to the rotation axis of the fan showing the position of the guide plate in the blower The perspective view which provided the curve side in the induction board in the air blower The perspective view which provided the curve side in the induction board in the air blower The perspective view provided with four guide plates in the air blower The perspective view which equipped the induction plate in the air blower with the bottom face of the chamber The perspective view which equipped the induction plate in the air blower with the motor support Sectional view showing a conventional fan filter unit

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Chamber 2 Suction port 3 Fan 4 Motor 5 Motor support 6 Filter 7 Guide plate 8 Side surface 9 Bottom surface 10 Center of rotation 11 Straight side wall 12 Curved side wall 13a Ground surface 13b Ground surface

Claims (16)

A box-shaped chamber, a suction port for sucking air from the outside into the chamber, a fan in the chamber, a motor for rotating the fan, a motor support for fixing the motor, a downstream of the fan, And a fan filter unit comprising: a filter adjacent to the chamber for purifying air; and a plate-shaped guide plate for changing a direction of air flow toward the filter at an outer peripheral portion of the fan. . 2. The fan filter unit according to claim 1, further comprising a guide plate that reduces a distance between the guide plate and the filter as the air flowing through the guide plate moves in the downstream direction. 3. The fan filter unit according to claim 1, wherein the guide plate has a rectangular shape. 3. A fan filter unit according to claim 1, wherein a part of two sides parallel to the longitudinal direction of the rectangular guide plate is bent into an arc shape. 3. The fan filter unit according to claim 1, wherein all of two sides parallel to the longitudinal direction of the rectangular guide plate are bent into an arc shape. When viewed from a plane perpendicular to the rotation axis of the fan, the rotation center of the fan is provided on the extended line of one upstream side of the two sides perpendicular to the longitudinal direction of the rectangular guide plate. The fan filter unit according to any one of claims 3 to 5. 7. A straight side wall that prevents air from flowing on the outer periphery of one of the two sides parallel to the longitudinal direction of the rectangular guide plate. The fan filter unit according to crab. 8. The fan filter unit according to claim 7, wherein the straight side wall is provided so as to be parallel to a rotation axis of the fan, and a gap is formed between the straight side wall and the filter. When viewed from a plane perpendicular to the rotation axis of the fan, the two short sides of the four sides forming the widest surface of the guide plate are not parallel, and the remaining two sides are directed downstream. 3. The fan filter unit according to claim 1, wherein the fan filter unit bends inward with respect to a rotation axis of the fan. 10. The fan rotation shaft is provided on an extension line of one of the two sides having a short length when viewed from a plane perpendicular to the rotation shaft of the fan. Fan filter unit. The fan filter unit according to claim 9 or 10, wherein a curved side wall is provided on the longest side of the four sides so that air does not flow outside the outer peripheral portion of the side. The fan filter unit according to claim 9 or 10, wherein the curved side wall is provided so as to be parallel to a rotation axis of the fan, and a gap is formed between the curved side wall and the filter. The fan filter unit according to any one of claims 1 to 12, further comprising a guide plate corresponding to one side of the box-like chamber when viewed from a plane perpendicular to the rotation axis of the fan. The fan filter unit according to claim 1, wherein the fan is a turbo fan. The fan filter unit according to claim 1, wherein a guide plate is attached to the bottom surface. The fan filter unit according to claim 1, wherein the guide plate is attached to the motor support.

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