JP2006266991A - Temperature measurement system of object to be processed in vacuum heat facility - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To perform connection working and connection releasing operation of a thermocouple and a compensating lead without having an operator enter a vacuum heating furnace. <P>SOLUTION: The vacuum heating facility comprises heating a small-piece object to be treated soiled by PCB at a prescribed temperature under a prescribed pressure reduction condition in the vacuum heating furnace in such a state where it is stored in a storing casing, and separating/removing PCB from the object to be treated. The storing casing is provided with the thermocouple for measuring the temperature of object to be treated stored in the storing casing, and a deriving fixture for deriving/guiding the thermocouple to a position in the vicinity of an opening part of the vacuum heating furnace along the deriving fixture, and connects the thermocouple derived to the position in the vicinity of the opening part of the vacuum heating furnace along the deriving fixture and the compensating lead connected to an measuring instrument by being drawn to the outside from the vacuum heating furnace at the position in the vicinity of the opening part of the vacuum heating furnace from the outside. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to an improvement in a temperature measuring device for measuring the temperature of a workpiece when the piece-like workpiece soiled by PCB in a vacuum heating facility is subjected to a vacuum heating treatment.

  Conventionally, when separating / removing the PCB from an object to be treated contaminated by PCB (polychlorinated biphenyl) (for example, a component part of an electrical device mixed with PCB), for example, the object to be treated is predetermined. Is housed in a housing case in a state of being crushed to a size (for example, about 10 mm) or the like, and the housing case is carried into a vacuum heating furnace to be in a predetermined temperature and reduced pressure state. By performing a vacuum heat treatment at a lower temperature (for example, about 200 ° C., about 6.7 Pa), the PCB adhering to the object to be processed is evaporated and removed (for example, see Patent Document 1).

  In general, the vacuum heating furnace for separating / removing PCB from the object to be processed as described above measures the temperature of the object to be processed based on the “Regulation for Enforcement of Law on Waste Processing and Cleaning”, and A device for recording is provided. For example, the apparatus is provided in a housing case that accommodates an object to be processed, a thermocouple that measures the temperature of the object to be processed, one end connected to the thermocouple, and the other end vacuum heated. Comprising a compensation lead wire that is airtightly passed through the furnace wall from the inside of the furnace and drawn to the outside, and a measuring device connected to the other end of the compensation lead wire drawn from the vacuum heating furnace. In this case, by connecting the thermocouple and the compensating lead wire in advance via a connector or the like, the temperature of the object measured by the thermocouple is output to the measuring instrument via the compensating lead wire, and I am trying to record.

JP 2003-324015 A

  However, in a vacuum heating facility, when connecting or disconnecting a thermocouple for measuring the temperature of an object to be processed and a compensating lead wire connected to the measuring device via a connector, etc. An operator enters the vacuum heating furnace to perform the above-mentioned work. In the vacuum heating furnace, the PCB that has been separated and removed by subjecting the object to be processed by vacuum heat treatment, or vacuum heat treatment There is a possibility that PCB which is vaporized at room temperature from the object to be treated is retained before the treatment. In addition, after the vacuum heat treatment is completed, the inside of the vacuum heating furnace and the object to be processed are cooled in a state where the inside of the vacuum heating furnace is once purged with nitrogen for the purpose of explosion-proofing. In the case where the atmosphere replacement is not performed well due to an unexpected situation, a large amount of nitrogen may remain in the vacuum heating furnace. Therefore, in order to connect or disconnect the thermocouple and the compensating lead wire, the worker enters the vacuum heating furnace where there is a possibility that PCB or a large amount of nitrogen is stagnating. This is not preferable in terms of the safety and hygiene of the operator even if the work is performed with a safety device or the like.

  In view of the above problems, the present invention provides an object to be processed in a vacuum heating facility that enables an operator to perform connection and disconnection operations between a thermocouple and a compensating conductor without entering the vacuum heating furnace. An object of the present invention is to provide a temperature measuring apparatus.

  In order to solve the above-mentioned problem, the invention according to claim 1 is a method in which a small piece of object to be processed contaminated by a PCB is stored in a storage housing in a vacuum heating furnace under a predetermined decompression condition. In a vacuum heating facility in which PCB is separated and removed from the object to be processed by heat treatment to the temperature of the object, the housing case is for measuring the temperature of the object to be treated housed in the housing case. And a deriving jig for deriving and guiding the thermocouple from the housing case side to a position near the opening of the vacuum heating furnace, and an opening of the vacuum heating furnace along the deriving jig A thermocouple led out to a nearby position and a compensating conductor drawn out from the vacuum heating furnace and connected to a measuring instrument are connected from the outside at a position near the opening of the vacuum heating furnace. Features.

  According to a second aspect of the present invention, in the apparatus for measuring a temperature of an object to be processed in the vacuum heating facility according to the first aspect, the derivation jig uses a club or the like only from the housing case side to the vacuum heating furnace only when necessary. It is configured to move to the opening side and lead out the thermocouple to a position near the opening of the vacuum heating furnace.

  According to a third aspect of the present invention, in the apparatus for measuring a temperature of an object to be processed in the vacuum heating facility according to the second aspect, the housing case is provided with a stopper member for preventing swinging of the lead-out jig. And

  According to the first aspect of the present invention, the housing case is provided with a thermocouple for measuring the temperature of the object to be processed, and the thermocouple is led out from the housing case side to a position near the opening of the vacuum heating furnace. A lead-out jig for guiding is provided, and a thermocouple led out along the lead-out jig and a compensating lead wire drawn outside from the vacuum heating furnace and connected to a measuring instrument are arranged near the opening of the vacuum heating furnace. Since the connection is made from the outside at the position, the operation of connecting the thermocouple and the compensating conductor can be performed without the operator entering the vacuum heating furnace. Similarly, the operation of releasing the connection between the thermocouple and the compensating conductor can be performed without the operator entering the vacuum heating furnace. Therefore, there is no need for an operator to enter the vacuum heating furnace in which PCB or a large amount of nitrogen may be accumulated, and to perform the operation of connecting and disconnecting the thermocouple and the compensating lead wire. It is possible to reliably eliminate the danger that the worker is exposed to the PCB or to be deficient in oxygen, and to improve the safety of the worker during the work.

  According to the second aspect of the present invention, the lead-out jig provided in the housing case is moved from the housing case side to the opening side of the vacuum heating furnace only when necessary using a club or the like, and the thermocouple is moved. Since it is configured to be led out to a position near the opening of the vacuum heating furnace, when it is not necessary to connect the thermocouple and the compensating conductor when storing the housing, the lead-out jig is placed on the housing case side. It is possible to store the storage housing without interfering with it, and as a result, it is possible to reliably prevent the occurrence of problems such as a large space required for storing the storage housing due to the presence of the lead-out jig. it can.

  According to the third aspect of the present invention, since the stopper member for preventing the swing of the lead-out jig is provided in the housing case, the lead-out jig is used only when necessary by using a club or the like. Even if it is configured to move from the body side to the opening side of the vacuum heating furnace, the lead-out jig swings due to vibration or the like during transportation of the housing case, etc. Can be reliably prevented.

  Hereinafter, the best mode for carrying out the present invention will be described with reference to FIGS. First, in FIG. 1, reference numeral 1 denotes a vacuum heating furnace of a vacuum heating facility. For example, on both side surfaces in the longitudinal direction (left and right sides in FIG. 1), a housing case 11 that houses small pieces of workpieces. The opening part 1a for carrying in / out is opened. Reference numeral 2 denotes an opening / closing door for hermetically closing the opening 1a opened in the vacuum heating furnace 1, and can be driven in the vertical direction by driving means such as a cylinder device (not shown). Reference numeral 3 denotes a heating means including an electric heater for heating and holding the furnace wall of the vacuum heating furnace 1 at a predetermined temperature, and is disposed in the furnace wall of the vacuum heating furnace 1. Reference numeral 4 denotes an exhaust pipe that passes through a furnace wall of the vacuum heating furnace 1 (for example, the furnace wall on the upper side in FIG. 1) and is led out to the outside. The exhaust pipe 4 includes a primary tube as shown in FIG. The condenser 5, the auxiliary pump 6, the secondary condenser 7, the vacuum pump 8, the tertiary condenser 9, and the exhaust gas treatment device 10 are connected in series by pipes. As shown in FIG. 1, the longitudinal dimension of the vacuum heating furnace 1 is, for example, a length dimension capable of carrying a maximum of three housings 11 in one vacuum heating process. Is set. In FIG. 1, reference numeral 1 b denotes a mounting table for mounting the housing case 11 carried into the vacuum heating furnace 1.

  Next, with reference to FIGS. 2 to 5, the configuration of the housing case 11 that houses the small piece of object to be processed that has been soiled by the PCB will be described. As shown in FIGS. 2 and 3, the housing case 11 is formed in a rectangular shape with a predetermined depth by combining steel plates and steel materials and fixing them by welding or the like. The plate-like heat transfer member 11a is disposed with a predetermined distance interval. Reference numeral 12 denotes a thermocouple for measuring the temperature of the object accommodated in the housing 11, and as shown in FIGS. 2 and 3, the front end portion (temperature measuring unit) of the thermocouple 12 is accommodated. The thermocouple 12 is inserted between predetermined heat transfer members 11a, 11a disposed in the housing 11 and drawn through the wall surface of the housing 11 to the outside. The thermocouple side connector 12a is attached. The thermocouple 12 is provided only on the housing 11 that is mounted on the mounting table 1b on the opening 1a side (left and right sides in FIG. 1) of the vacuum heating furnace 1.

  Subsequently, reference numeral 13 denotes a base end portion (the side on which the thermocouple side connector 12a is attached) of the thermocouple 12 drawn out from the housing case 11 to the outside, and an opening portion of the vacuum heating furnace 1 from the housing case 11 side. 2a and 3b, the lead-out jig 13 includes a mounting seat 13a fixed to the outer wall surface in the vicinity of the corner portion of the housing 11 as shown in FIGS. A horizontally long arm 13b having a base end pivotably attached to the mounting seat 13a. In the arm 13b, along the longitudinal direction (from the lower right side in FIG. 2 toward the upper left side in FIG. 2), there is a thermocouple 12 that passes through the wall surface of the housing 11 and is drawn to the outside. The arm 13b is fixed by a plurality (two in FIGS. 2 and 3) of fixing members 13c, and the arm 13b is in the state shown in FIGS. 3 and 5 (b) from the state shown in FIGS. 2 and 5 (a). The thermocouple side connector 12a attached to the base end portion of the thermocouple 12 fixed to the arm 13b is turned from the housing case 11 side to the vacuum heating furnace by turning 90 ° counterclockwise so that 1 can be easily derived to a position near the opening 1a. The lead-out jig 13 is provided only in the housing case 11 placed on the placing table 1b on the opening 1a side (left and right sides in FIG. 1) of the vacuum heating furnace 1. The length of the arm 13b is such that the arm 13b does not protrude outward from the opening 1a when the arm 13b is rotated to the opening 1a side of the vacuum heating furnace 1 (opening 1a by the opening / closing door 2). The length is set so as not to hinder the closure of the).

  Reference numeral 14 denotes a stopper member for preventing the arm 13b of the lead-out jig 13 from swinging when the accommodating housing 11 is transported, and the stopper member 14 includes the above-described stopper member 14 as shown in FIGS. Due to the elastic force of a fixed seat 14a fixed to the housing 11 at a position corresponding to the distal end side of the arm 13b, a cylinder 14b mounted perpendicularly to the fixed seat 14a, and a spring member (not shown) housed in the cylinder 14b. The stopper pin 14c is pressed and protrudes from the cylinder 14b, and the stopper pin 14c is engaged with an engagement hole 13d recessed in the back surface of the arm 13b as shown in FIG. The arm 13b is prevented from swinging due to vibration or the like when the accommodating housing 11 is transported.

  In FIG. 5, reference numeral 15 denotes a compensation lead wire for connecting the thermocouple 12 provided in the housing 11 and the measuring device 16 installed outside the vacuum heating furnace 1. One end of the compensation lead wire 15 is The furnace wall of the vacuum heating furnace 1 is hermetically penetrated and drawn to the outside, connected to the measuring device 16, and a thermocouple is connected to the other end of the compensating lead wire 15 inserted into the vacuum heating furnace 1. A conducting wire side connector 15a coupled to the thermocouple side connector 12a attached to the base end portion of the twelve is attached. And as shown in FIG.5 (b), the thermocouple 12 and the compensation conducting wire 15 are connected by couple | bonding the said thermocouple side connector 12a and the conducting wire side connector 15a, and the thermocouple 12 is connected to the temperature measuring part. The temperature of the workpiece measured in this way can be output to the measuring device 16 via the compensating conductor 15 and recorded. The compensating conductor 15 is provided on the side of both openings 1a opened in the vacuum heating furnace 1, inserted into the vacuum heating furnace 1, and the compensating conductor 15 to which the conductor-side connector 15a is attached. As shown in FIG. 5 (a), the other end of each is grouped in the vicinity of the opening 1a of the vacuum heating furnace 1 when not in use. The thermocouple 12, the compensating lead wire 15, and the measuring device 16 constitute a temperature measuring device for the object to be processed.

  Next, an operation for separating / removing the PCB from the workpiece contaminated by the PCB will be described. When separating / removing PCB from the object to be processed, the housing is first made into a small piece by, for example, crushing the object to be processed into a predetermined size (for example, about 10 mm). 11. At this time, between the predetermined heat transfer members 11a and 11a arranged in the housing 11 to be placed on the mounting table 1b on the opening 1a side of the vacuum heating furnace 1, a thermocouple 12 is previously provided. Since the distal end portion (temperature measuring portion) is inserted, the distal end portion of the thermocouple 12 is placed in the object to be processed by accommodating the small piece of object to be processed in the accommodating housing 11 as described above. It will be buried. In addition, if the said to-be-processed object is below a predetermined magnitude | size, what is necessary is just to accommodate in the accommodating housing | casing 11 as it is, without performing crushing etc. specially.

  Subsequently, a plurality (three in FIG. 1) of housing casings 11 containing objects to be processed are carried into the vacuum heating furnace 1 using a transfer device (not shown), and the inside of the vacuum heating furnace 1 It is mounted on the mounting table 1b provided in the above. In addition, at this time, the housing | casing housing | casing 11 which comprised the thermocouple 12 and provided the derivation | leading jig | tool 13 on the mounting base 1b of both the opening parts 1a vicinity of the said vacuum heating furnace 1 is shown in FIG. In this way, it is placed with a predetermined distance from the opening 1a. This is to reduce the occurrence of heating unevenness in the object to be processed housed in the housing 11 near the center of the vacuum heating furnace 1 and the opening 1a side. Further, when the housing case 11 is carried into the vacuum heating furnace 1, the arm 13 b of the lead-out jig 13 provided in the housing case 11 is inserted into the engaging hole 13 d provided in the back surface side of the stopper member 14. Since the stopper pin 14c of the locking member 14b included in the engagement is engaged, it is possible to reliably prevent the rocker from swinging due to vibration or the like.

  When the housing case 11 is carried into the vacuum heating furnace 1 as described above, the thermocouple provided in each housing case 11 mounted on the mounting table 1b on the both opening portions 1a side of the vacuum heating furnace 1. 12 is connected to the compensating lead wire 15 drawn out from the vacuum heating furnace 1 to the outside and connected to the measuring device 16. At this time, in the vacuum heating furnace 1, PCBs separated or removed from the object to be processed by the previous vacuum heat treatment, or PCBs that are vaporized at room temperature from the object newly introduced this time may stay. Therefore, it is not preferable for safety and hygiene that an operator enters the vacuum heating furnace 1 to perform work. On the other hand, the housing case 11 provided with the thermocouple 12 is placed on the placing table 1b at a predetermined distance from the opening 1a of the vacuum heating furnace 1, so that the vacuum heating furnace 1 In order to connect the thermocouple 12 and the compensating conductor 15 without entering the inside, the thermocouple 12 needs to be led out from the housing 11 side to a position near the opening 1a of the vacuum heating furnace 1. Therefore, when connecting the thermocouple 12 and the compensating lead wire 15, first, the operator forms, for example, the tip shown in FIG. 5A from the outside of the opening 1 a of the vacuum heating furnace 1 in a bowl shape. 2 and 5 (a), with the arm 13b of the lead-out jig 13 provided in the housing case 11 centered on the base end portion pivotally attached to the mounting seat 13a. From the state, it is turned 90 ° counterclockwise so as to be in the state shown in FIG. 3 and FIG. Thereby, the thermocouple side connector 12a attached to the base end portion of the thermocouple 12 fixed to the arm 13b can be easily led out from the housing case 11 side to the position near the opening 1a of the vacuum heating furnace 1. Can do.

  Subsequently, as shown in FIG. 5, a thermocouple-side connector 12 a attached to the base end portion of the thermocouple 12 led to the position near the opening 1 a of the vacuum heating furnace 1, and inserted into the vacuum heating furnace 1, And the conducting wire side connector 15a attached to the other end of the compensating conducting wire 15 collected in the vicinity of the opening 1a is coupled from the outside in the vicinity of the opening 1a of the vacuum heating furnace 1. In other words, the operator performs the coupling operation of the thermocouple side connector 12a and the conductor side connector 15a without entering the vacuum heating furnace 1, and connects the thermocouple 12 and the compensating conductor 15. In this way, there is a possibility that PCBs separated and removed from the object to be processed by the previous vacuum heat treatment in the vacuum heating furnace 1 or PCBs that are vaporized at room temperature from the object newly introduced this time are retained. Even if there is, the operator rotates the arm 13 b of the lead-out jig 13 provided in the housing case 11 without entering the vacuum heating furnace 1 to move the thermocouple 12 from the housing case 11 side to the vicinity of the opening 1 a. By leading to the position and connecting to the compensating lead wire 15, the risk of the operator being exposed to the PCB is reduced, and as a result, the safety of the operator during the operation can be reliably ensured.

  When the arm 13b of the lead-out jig 13 is rotated from the housing case 11 side to the opening 1a side of the vacuum heating furnace 1 as described above, the engagement hole 13d provided in the back surface side of the arm 13b is recessed. As shown in FIG. 4, although the stopper pin 14c of the stopper member 14 is engaged, when the engagement between the engagement hole 13d and the stopper pin 14c is released along with the rotation of the arm 13b, The stopper pin 14c is pressed by the arm 13b and is immersed in the cylinder 14b against the elastic force of a spring member (not shown) accommodated in the cylinder 14b. As a result, the rotating operation of the arm 13b is hindered. There is nothing like that.

  In addition, as described above, the thermocouple 12 and the compensating lead wire 15 are connected to each other on the side of the openings 1a of the vacuum heating furnace 1, and the object to be processed is stored in the two housing cases 11 carried into the vacuum heating furnace 1. Therefore, even if one of the thermocouples 12 or the compensating conductor 15 is broken, the temperature of the object to be processed can be reliably measured.

  Subsequently, when the thermocouple side connector 12a and the conductor side connector 15a are coupled as described above and the thermocouple 12 provided in the housing 11 is connected to the compensating conductor 15 connected to the measuring instrument 16, the opening and closing is performed. The door 2 closes the opening 1a of the vacuum heating furnace 1 in an airtight manner. At this time, although the thermocouple 12 is led out to the opening 1a side of the vacuum heating furnace 1 by rotating the arm 13b of the lead-out jig 13 provided in the housing case 11, the arm 13 Since the length dimension is set to a length dimension that does not protrude from the opening 1a, there is no problem when the opening / closing door 2 closes the opening 1a.

  After the opening 1a of the vacuum heating furnace 1 is airtightly closed by the open / close door 2, after that, the vacuum pump is started to sequentially exhaust from the vacuum heating furnace 1, and the auxiliary pump 5 is started as necessary. By assisting the exhaust from the vacuum heating furnace 1, the pressure in the vacuum heating furnace 1 is reduced to a predetermined pressure (for example, about 6.7 Pa). At the same time, the heating means 3 is energized to heat the furnace wall of the vacuum heating furnace 1. When the furnace wall of the vacuum heating furnace 1 is heated, the wall surface of the housing case 11 is heated by radiant heat from the furnace wall and the heat of the wall surface of the housing case 11 is transferred into the housing case 11. The heat is transmitted from the wall surface itself to the object to be processed accommodated in the accommodating housing 11 via the arranged heat transfer member 11a. The object to be processed is heated to a temperature (for example, about 200 ° C.) at which PCB can be evaporated and removed. At this time, the temperature measuring unit of the thermocouple 12 provided in the housing 11 is in a state where it is buried in the object to be processed between the predetermined heat transfer members 11 a and 11 a disposed in the housing 11. Therefore, while being able to measure the temperature of the said processed material favorably, the temperature of the said processed material is output to the measuring device 16 installed outside the vacuum heating furnace 1 through the compensation lead wire 15 connected to the thermocouple 12, Recorded sequentially.

  As described above, the inside of the vacuum heating furnace 1 is reduced to a predetermined pressure, and the object to be processed in the housing case 11 carried into the vacuum heating furnace 1 is heated to a temperature at which PCB can be evaporated and removed. By heating, the PCB adhering to the object to be processed starts to evaporate and separate, and is sequentially discharged from the vacuum heating furnace 1 to the exhaust pipe 4 together with the exhaust gas. Most of the PCB discharged to the exhaust pipe 4 together with the exhaust gas is cooled and liquefied in a primary condenser 5 disposed in the middle of the exhaust pipe 4 and discharged and recovered in a sealable recovery container (not shown). At the same time, a small amount of PCB that has passed through the primary condenser 5 is reliably cooled and liquefied in the secondary and tertiary condensers 7 and 9 and discharged and collected in a sealable collection container (not shown). The exhaust gas from which PCB has been removed by passing through the primary to tertiary condensers 5, 7, 9 is finally adsorbed / removed by malodorous components and the like in the exhaust gas treatment device 10, and then cleaned into the atmosphere. Discharged inside.

  If the PCB contained in the exhaust gas passes through the primary to tertiary condensers 5, 7, 9 without being sufficiently cooled and liquefied and flows into the exhaust gas treatment device 10 due to an unexpected situation, The exhaust gas treatment apparatus 10 collects and removes PCBs contained in the exhaust gas and discharges the exhaust gas into the atmosphere in a purified state.

  When the PCB attached to the object to be processed is separated and removed by holding the object to be processed at a predetermined temperature for a predetermined time under a predetermined reduced pressure condition, the furnace wall of the vacuum heating furnace 1 by the heating means 3 is removed. The heating is stopped, and the heating of the object to be processed by the radiant heat from the furnace wall is finished. At the same time, the vacuum pump 8 and the auxiliary pump 6 are stopped, and nitrogen is supplied into the vacuum heating furnace 1 from a supply system (not shown) for the purpose of explosion prevention (replacement of the vacuum heating furnace 1 with nitrogen). Thus, the pressure in the vacuum heating furnace 1 is sequentially returned to a predetermined pressure (a pressure slightly lower than the atmospheric pressure, for example, 85 kPa). Subsequently, with the inside of the vacuum heating furnace 1 replaced with nitrogen as described above, the inside of the vacuum heating furnace 1 and the object to be processed are cooled, and when the object to be processed is cooled to a predetermined temperature, the vacuum pump 8 is again used. Then, the auxiliary pump 6 is started to exhaust nitrogen in the vacuum heating furnace 1, and when the exhaust of nitrogen is completed, the vacuum pump 8 and the auxiliary pump 6 are stopped. Thereafter, air is supplied into the vacuum heating furnace 1 from a supply system (not shown) to return the inside of the vacuum heating furnace 1 to atmospheric pressure, and when the pressure in the vacuum heating furnace 1 returns to atmospheric pressure, the vacuum is supplied. The opening / closing door 2 that closes the opening 1a of the heating furnace 1 in an airtight manner is opened.

  Subsequently, when unloading the housing case 11 from the vacuum heating furnace 1, when the connection between the thermocouple 12 provided in the housing case 11 and the compensating lead wire 15 provided on the vacuum heating furnace 1 side is to be released. As shown in FIG. 5, the thermocouple attached to the base end portion of the thermocouple 12 led out from the housing case 11 side to the position near the opening 1 a of the vacuum heating furnace 1 along the arm 13 b of the lead-out member 13. The connection between the side connector 12a and the conductor-side connector 15a attached to the other end of the compensating conductor 15 assembled in the vicinity of the opening 1a of the vacuum heating furnace 1 is made in the vicinity of the opening 1a of the vacuum heating furnace 1. By releasing from the outside, the connection between the thermocouple 12 and the compensating conductor 15 is released. As described above, after the object to be processed is subjected to the vacuum heat treatment, when the housing 11 is carried out of the vacuum heating furnace 1, the connection between the thermocouple side connector 12a and the conductor side connector 15a is also released. Can be performed outside the vacuum heating furnace 1, so that in the unlikely event that the atmosphere in the vacuum heating furnace 1 is not satisfactorily replaced due to unforeseen circumstances, a large amount of nitrogen is present in the vacuum heating furnace 1. Even if it stays, the danger that the worker falls into an oxygen deficiency becomes extremely low, and as a result, the safety of the worker during the work can be reliably ensured.

  After the connection between the thermocouple 12 and the compensating lead wire 15 is released, the arm 13b of the lead-out jig 13 to which the thermocouple 12 is fixed is pressed by the bar 17 or the like, and the arm 13b is pivoted to the mounting seat 13a. Centering on the worn base end portion, the state shown in FIG. 3 and FIG. 5B is turned 90 ° clockwise so as to be in the state shown in FIG. 2 and FIG. It accommodates from the opening part 1a side to the accommodating housing | casing 11 side. Further, by storing the arm 13b on the housing case 11 side, the stopper pin 14c of the stopper member 14 is engaged with the engaging hole 13d provided in the back side of the arm 13b. It is locked so that it cannot swing.

  When the connection between the thermocouple 12 and the compensating lead wire 15 is released as described above and the arm 13b of the lead-out jig 13 is stored on the storage housing 11 side, the storage housing 11 is mounted using a transport device (not shown). Unload from the vacuum heating furnace 1. Thereafter, when the PCB is separated and removed from the processing object soiled by the PCB, the above operation may be repeated.

  As described above, in the present invention, after the housing case 11 is carried into the vacuum heating furnace 1, the thermocouple 12 provided in the housing case 11 and the compensating lead wire inserted into the vacuum heating furnace 1. 15, the arm 13 b of the lead-out jig 13 provided in the housing case 11 is rotated from the housing case 11 side to the opening 1 a side of the vacuum heating furnace 1 using a bar 17 or the like. The base end of the thermocouple 12 fixed to the arm 13 is led out to a position near the opening 1a of the vacuum heating furnace 1, and the thermocouple side connector 12a attached to the base end of the thermocouple 12 is Since the connection is made to the conductor-side connector 15a attached to the other end of the conductor 15, the connection between the thermocouple 12 and the compensation conductor 15 is a PCB or the like that has been vaporized at room temperature from the object to be processed before the vacuum heat treatment. Vacuum heating that may be stagnant As a result of being able to perform from the outside without entering in 1, it is possible to surely eliminate the danger that the worker is exposed to the PCB, and to improve the safety of the worker during the work. it can.

  In addition, after the vacuum heat treatment of the object to be processed is completed, the inside of the vacuum heating furnace 1 and the object to be processed are cooled in a state where the inside of the vacuum heating furnace 1 is replaced with nitrogen, and the inside of the vacuum heating furnace 1 is further air After the replacement, when opening the opening 1a and carrying out the housing 11 from the vacuum heating furnace 1, the thermocouple 12 provided in the housing 11 and the compensating conductor 15 provided on the vacuum heating furnace 1 side. Even when the connection is disconnected, the work can be performed from the outside without the operator entering the vacuum heating furnace 1, so that in the unlikely event, the atmosphere in the vacuum heating furnace 1 is replaced by an unexpected situation. Even if a large amount of nitrogen stays in the vacuum heating furnace 1 without being performed well, the danger that the worker enters into the vacuum heating furnace 1 and performs an operation will cause a lack of oxygen, etc. is ensured. As a result that can be eliminated, the safety of workers during work It can be reliably improved.

  Further, the arm 13b of the lead-out jig 13 provided in the housing case 11 uses the bar 17 or the like only when connecting the thermocouple side connector 12a and the conductor side connector 15a. To the opening 1a side of the vacuum heating furnace 1, and the base end of the thermocouple 12 to which the thermocouple side connector 12a is attached is moved to the position near the opening 1a of the vacuum heating furnace 1 along the arm 13b. Since it has been derived, when the housing case 11 is stored or the like, the arm 13b does not need to be led out to the position near the opening 1a of the vacuum heating furnace 1 when the thermocouple connector 12a is stored. In view of being stored so as not to disturb the side, it is possible to satisfactorily prevent a problem that a large space is required for storing the housing 11 due to the presence of the arm 13b.

  Further, the arm 13b of the lead-out jig 13 is heated by vacuum from the housing 11 side using the pin 17 only when the thermocouple connector 12a and the conductor connector 15a are connected as described above. Although it is configured to rotate to the opening 1a side of the furnace 1, in other cases, the stopper pin 14c of the stopper member 14 provided in the housing case 11 is housed on the housing case 11 side. Since the swinging is prevented by engaging with the engaging hole 13d provided in the back side of the arm 13b, the arm 13b swings due to vibration or the like when the housing 11 is transported. It is possible to satisfactorily prevent a collision with the housing case.

  In the present invention, the thermocouple connector 12a is attached by rotating the arm 13b of the lead-out jig 13 in the horizontal direction (lateral direction) around the base end pivotally attached to the attachment seat 13a. Although the case where the base end portion of the thermocouple 12 is led out from the accommodating housing 11 side to the position near the opening 1a of the vacuum heating furnace 1 along the arm 13b has been described as an example, instead of this, As shown in FIGS. 6 and 7, by rotating the arm 13b of the lead-out jig 13 in the vertical direction (vertical direction) around the base end portion pivotally attached to the mounting seat 13a, the thermocouple connector 12a is The base end portion of the attached thermocouple 12 may be led out from the housing case 11 side to the position near the opening 1a of the vacuum heating furnace 1 along the arm 13b.

  Further, by rotating the arm 13b of the lead-out jig 13 in the horizontal direction or the vertical direction, the base end portion of the thermocouple 12 to which the thermocouple side connector 12a is attached is accommodated along the arm 13b. Instead of deriving from the 11 side to the position in the vicinity of the opening 1a of the vacuum heating furnace 1, for example, as shown in FIG. 8, the arm 13b is configured in a pantograph shape and folded as shown in FIG. The base end portion of the thermocouple 12 to which the thermocouple side connector 12a is attached is vacuum-heated from the housing case 11 side along the arm 13b by extending from the contracted state as shown in FIG. 8B. As shown in FIG. 9, the arm 13b is configured to be slidable in the front-rear direction (vertical direction in FIG. 9) along one side surface of the housing 11 as shown in FIG. This is shown in FIG. From the retracted state, the base end portion of the thermocouple 12 to which the thermocouple side connector 12a is attached is moved along the arm 13b as shown in FIG. 9B. The same effect can be obtained even if the lead is led out to the position in the vicinity of the opening 1a of the vacuum heating furnace 1.

  Furthermore, in the present invention, the case where the dimension in the longitudinal direction of the vacuum heating furnace 1 is set to a dimension capable of carrying in a maximum of three housings 11 in one vacuum heating process has been described as an example. However, the dimension in the longitudinal direction of the vacuum heating furnace 1 may be appropriately set in accordance with the maximum number of housings 11 to be carried into the vacuum heating furnace 1 in one vacuum heating process.

  Moreover, in this invention, although the case where the opening part 1a was opened to the both sides in the longitudinal direction of the vacuum heating furnace 1 (right and left both sides of FIG. 1) was demonstrated as an example, it is not limited to this, For example, vacuum heating The opening 1a may be opened only on one side surface in the longitudinal direction of the furnace 1. In this case, at least two thermocouples 12 are provided in the housing 11 mounted on the mounting table 1 b on the opening 1 a side of the vacuum heating furnace 1, and the thermocouple 12 is provided in the housing 11. Along the arm 13b of the lead-out jig 13, the at least two compensating lead wires 15 led out from the housing case 11 side to the position near the opening 1a of the vacuum heating furnace 1 and provided at the position near the opening 1a; If each can be connected, even if either one of the thermocouples 12 or the compensating conductor 15 is broken, the temperature of the object to be processed accommodated in the accommodating housing 11 will be described. Can be reliably measured.

It is a schematic block diagram which shows vacuum heating equipment. It is a perspective view which shows the housing | casing housing | casing provided with the thermocouple derivation | leading-out jig | tool. It is a perspective view which shows the state which rotated the arm of the derivation jig. It is a principal part expanded sectional view which shows the relationship between the arm of the extraction jig | tool provided in the accommodating housing | casing, and a stopper member. (A) is a top view which shows the state before couple | bonding a thermocouple side connector and a conducting wire side connector, (b) is a top view which shows the state which couple | bonded the thermocouple side connector and the conducting wire side connector. It is a perspective view which shows the other example of the derivation | leading-out jig | tool provided in the accommodating housing | casing. It is a perspective view which shows the state which rotated the arm of the derivation jig in FIG. (A) is a top view which shows the further another example of the extraction jig | tool provided in the accommodating housing | casing, (b) is a top view which shows the state which extended the arm of the extraction jig | tool. (A) is a top view which shows the further another example of the extraction jig | tool provided in the accommodating housing | casing, (b) is a top view which shows the state which advanced the arm of the extraction jig | tool.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Vacuum heating furnace 1a Opening part 11 Housing | casing housing | casing 12 Thermocouple 13 Deriving jig 14 Stopper member 15 Compensation lead 16 Measuring instrument 17 Bar

Claims (3)

  A small piece of processing object contaminated by PCB is heat-treated at a predetermined temperature in a vacuum heating furnace in a state where the processing object is stored in a housing, and the PCB is separated from the processing object. -In the vacuum heating equipment to be removed, the housing case is provided with a thermocouple for measuring the temperature of an object accommodated in the housing case, and the thermocouple is connected to the housing case side. A lead-out jig for leading and guiding to the position near the opening of the vacuum heating furnace is provided, a thermocouple led to the position near the opening of the vacuum heating furnace along the lead-out jig, and from the vacuum heating furnace to the outside An apparatus for measuring a temperature of an object to be processed in a vacuum heating facility, wherein a compensating lead wire drawn out and connected to a measuring device is connected from the outside at a position near the opening of the vacuum heating furnace.   The lead-out jig is configured to move the thermocouple to a position in the vicinity of the opening of the vacuum heating furnace by moving the housing from the housing case side to the opening of the vacuum heating furnace only when necessary using a club. The apparatus for measuring a temperature of an object to be processed in a vacuum heating facility according to claim 1.   The apparatus for measuring a temperature of an object to be processed in a vacuum heating facility according to claim 2, wherein the housing case is provided with a stopper member that prevents the lead jig from swinging.

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